JP2003264069A - Organic el display device and manufacturing installation of the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high-definition and reliable organic EL display device in which little short-circuit between electrodes occurs, and a manufacturing method of the same. <P>SOLUTION: In the manufacturing method of a passive matrix organic EL display device that has a production process of forming first electrodes of a stripe-shape formed on a transparent support substrate, insulating layers which have at least one opening which corresponds to every pixel, partitions provided at each periphery of the openings in the perpendicular direction of the above electrodes, organic light-emitting layers, and second electrodes, respectively, the above partitions are formed by transferring what is beforehand patterned into a desired shape, at the periphery of the openings of the above insulating layers, and the above organic light-emitting layers and the second electrodes are separated into two or more areas electrically independent by the above partitions. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a display device in the information field, and particularly to a high-definition and highly reliable organic E device.
The present invention relates to a passive matrix display device using an L element and a manufacturing method thereof.

[0002]

2. Description of the Related Art With the diversification of information in recent years, display devices in the information field are required to have "beauty, lightness, thinness, and excellent" requirements, and the development of such devices requires low power consumption. And it is being actively promoted along with the realization of high-speed response. In particular, development for a high-definition full-color display device has been extensively carried out.

In the latter half of 1980, a laminated organic electroluminescence (hereinafter referred to as "hereinafter referred to as" organic electroluminescence "having a structure in which thin films made of organic molecular materials are laminated, and having a high brightness of 1000 cd / m ² or more at an applied voltage of 10 V is obtained. A device called "organic EL" was reported by Tang et al. (Appl. Ph.
ys. Lett., 51, 913 (1987)). Since then, research for practical use of organic EL devices has been actively conducted. Similarly,
A device composed of an organic polymer material instead of the organic molecule material is also under active development.

The main characteristics of the display device using the organic EL element are as follows: high brightness and high contrast; low voltage driving and high luminous efficiency; high resolution;
It has excellent features such as high visual field; fast response speed; miniaturization and colorization possible; lightness and thinness. As described above, since the organic EL element can realize a high current density at a low voltage, it has a possibility of improving the light emission luminance and the light emission efficiency of the display device as compared with the inorganic EL element or the light emitting diode (LED). Further, a display device using an organic EL element has a possibility of being excellent in viewing angle dependence and high-speed response, as compared with a liquid crystal display device. From the above points, as a display device that meets the requirements of "beauty, lightness, thinness, and excellentness", organic EL for flat panel displays
Application of devices is expected.

In recent years, a color conversion system has been disclosed in which a fluorescent material that absorbs light in the emission region of an organic EL element and emits fluorescence in the visible region is used as a filter (Japanese Patent Laid-Open No. 3-15).
2897, JP-A-5-258860, etc.). The emission color of the organic EL element is not limited to white, and an organic EL element having higher brightness can be applied as a light source. For example, blue-emitting organic E
In a color conversion method using an L element, wavelength conversion of blue light into green light or red light is performed (Japanese Patent Laid-Open Nos. 3-152897, 8-286033, 9-20).
8944, etc.).

By the way, in order to construct a full-color display device using the above-mentioned color conversion system, it is necessary to pattern a fluorescent conversion film containing a fluorescent dye with high precision. The following two methods are mainly known as general methods for patterning the fluorescence conversion film. First, as in the case of the inorganic phosphor, a method of dispersing the fluorescent dye in a liquid resist (photoreactive polymer), forming a film by a spin coating method, and then patterning by a photolithographic method is used. (See JP-A-5-198921, JP-A-5-258860, etc.). Second,
This is a method in which a fluorescent dye or fluorescent pigment is dispersed in a basic binder, and this is etched with an acidic aqueous solution (see JP-A-9-208944).

As described above, the organic EL device and the organic E
Various developments have been made on the color conversion system of the L element. In addition, a full-color light emitting display device constructed by combining an organic EL element and a highly precise patterned fluorescent conversion film can also use weak energy rays such as near-ultraviolet light or visible light as a light source. Is. Therefore, expectations are rising as ones that can fulfill the diversified demands for display devices.

A passive matrix organic EL display is known as an example of a display device using an organic EL element. This display is typically a stripe-shaped transparent first electrode (anode) formed on a transparent support substrate, an organic light emitting layer provided on the anode,
An organic EL element including a second electrode (cathode) provided on the organic light emitting layer is provided. The display portion of the display is formed by forming one pixel with the light emitting portion in the intersection region of the anode and the cathode as one unit, and arranging a plurality of such pixels. Further, the display device is driven by connecting the anode and the cathode through a connecting portion formed by extending from the display portion toward the periphery of the supporting substrate, and further connecting the connecting portion and an external drive circuit to a desired device. This is achieved by inputting an electric signal to the pixel. That is, by inputting an electrical signal to a specific pixel sandwiched between a specific first electrode and a specific second electrode, only the organic light emitting layer corresponding to the specific pixel emits light and information is displayed. .

[0009]

In the production of a passive matrix type organic EL display having the above-mentioned structure, the organic light emitting layer and the second electrode provided on the first electrode are usually formed by " It is deposited as a "solid film". Therefore, a pixel is formed by providing an insulating layer having an opening corresponding to each pixel and a partition on the first electrode.

FIG. 1 is a schematic view showing the structure of an organic EL element applied to an organic EL display. As described above, in the organic EL element, the insulating layer 30 having the openings 30a corresponding to the respective pixels is provided on the transparent first electrode 20 having a stripe shape provided on the transparent support substrate 10.
Is provided, a stripe-shaped partition wall 40 is provided on the insulating layer 30 in a direction perpendicular to the first electrode 20, and then the organic light emitting layer and the second electrode are sequentially provided. In this way, one pixel (corresponding to the opening 30a in the figure) is formed, with one unit of the light emitting portion in the intersection region of the first electrode and the second electrode, and a plurality of such pixels are formed. A display portion is formed by arranging them. Organic EL
In the production of the device, the presence of the partition wall 40 is an important item for facilitating the production of the organic light emitting layer and the second electrode and for practical use.

FIG. 2 is a schematic cross-sectional view showing the structure of the organic EL element, which corresponds to the cross section along the line AA 'in FIG. As can be seen from FIG. 2, in order to prevent a short circuit between the first electrode 20 and the second electrode 60, the partition wall 40 needs to have an inverse tapered shape (inverse trapezoidal shape). However, the partition 40
In addition, the fine electrodes are arranged so as not to protrude from the openings 30 a corresponding to each pixel provided in the insulating layer 30 covering the first electrode 20 and in a direction perpendicular to the first electrode 20. Patterning is required. That is, the partition wall 40
Must be precisely patterned in specific locations and made to have a specific shape with an inverse taper.

The conventional partition wall is produced by a photolithographic method, using a positive resist in which an unexposed portion remains as a pattern, and adjusting an exposure amount or a developing time so that the lower portion of the pattern is scraped more. There is. The reverse taper shape requires the upper side to be longer than the lower side (that is, more of the lower part of the pattern is scraped), but often has a shape close to a rectangle. As a result, a part of the second electrode may come into contact with the transparent electrode and cause a short circuit. Therefore, conventionally, it has been necessary to strictly adjust the conditions such as the exposure amount or the development time in order to manufacture the partition wall. Furthermore, the partition material that can be used under such conditions is limited. Therefore, in order to realize a highly precise and highly reliable display device,
A simple method for producing a good partition wall is desired.

Therefore, an object of the present invention is to provide a method for precisely and efficiently forming an inverse tapered shape of a partition in the manufacture of an organic EL device, and a high-definition and highly reliable display produced by the method. An object is to provide a device, especially a full color flat panel display.

[0014]

Means for Solving the Problems The inventors of the present invention have earnestly studied a method of manufacturing a partition having an inverse taper shape in the manufacture of an organic EL display device in order to solve the above-mentioned problems, and completed the present invention. It was That is, the method for manufacturing a passive matrix organic electroluminescent display device according to the first aspect of the present invention includes a stripe-shaped first electrode provided on a transparent support substrate and at least one corresponding one for each pixel. A step of forming an insulating layer having an opening, a partition wall provided on the outer periphery of the opening in a direction perpendicular to the first electrode, an organic light emitting layer, and a second electrode, The partition wall is formed by transferring what is previously patterned into a desired shape onto the outer periphery of the opening of the insulating layer, and the organic light emitting layer and the second electrode are formed in a plurality of electrically independent regions. It is characterized by separating.

Here, the partition wall patterning is performed by forming a second film layer using a negative resist on the first film having a smooth and peelable property, and the second film layer. It is preferable to have a step of processing into a tapered shape by a photolithography method to form a desired pattern.

Further, the patterning of the partition wall preferably has a step of forming a desired pattern by directly patterning a negative type resist on the first film having a smooth and peelable property by a printing method.

The transfer of the partition wall is performed by combining a desired pattern formed on the first film and the first electrode provided with the insulating layer, and then heating and curing them. It is preferably carried out by

The organic electroluminescence display device according to the second aspect of the present invention is characterized by being manufactured by the manufacturing method according to the first mode. Here, it is preferable that the display device further includes a color conversion unit.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below.

The first aspect of the present invention relates to a method of manufacturing a passive matrix organic EL display device. The manufacturing method of the present invention comprises: a striped first electrode provided on a transparent support substrate; an insulating layer having at least one opening corresponding to each pixel; A step of forming a partition wall provided in a direction perpendicular to the first electrode, an organic light emitting layer, and a second electrode,
The partition wall is formed by transferring what is previously patterned into a desired shape onto the outer periphery of the opening of the insulating layer, and the organic light emitting layer and the second electrode are formed in a plurality of electrically independent regions. It is characterized by separating.

The partition wall formed by the above-described manufacturing method has a "reverse taper shape" in which the upper side is longer than the lower side in its cross section in order to prevent the occurrence of a short circuit between the first electrode and the second electrode. Is desirable. Further, it is preferable that the partition wall provided on the outer periphery of the opening has a stripe pattern as shown in FIG. 1 which is positioned in the vertical direction with respect to the first electrode. According to the present invention, a partition having a specific shape can be easily produced, and further, the organic light emitting layer and the second electrode can be vapor-deposited as a solid film.

FIG. 3 is a diagram for explaining the steps of manufacturing the partition wall according to the present invention, in which (a) to (d) correspond to each step. Hereinafter, the manufacturing process of the partition pattern in the present invention will be described in more detail with reference to FIG.

First, as shown in FIG. 3 (a), a negative resist is applied on a first film layer (hereinafter referred to as a "transfer film") 70 having a smooth and peelable property to form a second film. The film layer 42 of is formed. Examples of the negative resist include "V259PA / P5" (trade name, manufactured by Nippon Steel Chemical Co., Ltd.) or "JNPC-48" (trade name, manufactured by Japan Synthetic Rubber).

Next, by exposing using a photomask 80, a desired partition wall pattern 44 having a tapered shape as shown in FIG. 3B is formed. The transfer film 70 that supports the partition pattern 44 is preferably one that can reliably and easily transfer the partition pattern 44. That is, the transfer film 70 has the partition pattern 4
4 and the transfer surface (outer periphery of the opening 30a of the insulating layer 30) are improved in adhesiveness and can be easily peeled off after the partition wall pattern 44 is transferred and the partition wall 40 is formed at a predetermined position. An example of a suitable transfer film is a PTFE film.

The partition pattern 44 is not limited to the photolithographic method, but may be formed by a printing method such as screen printing. When the printing method is used, a negative resist is directly patterned on the transfer film 70 having smoothness and releasability to form a desired partition wall pattern.

Next, as shown in FIG. 3C, the partition pattern 44 is transferred. The transfer of the partition pattern 44 is the first
Desired partition pattern 44 formed on the film
And the first electrode 20 provided with an insulating layer (not shown) are aligned and brought into close contact with each other. As the transfer technique, press transfer, thermal transfer, optical transfer, or the like can be used. Although not particularly limited, in consideration of uniformly transferring a fine pattern, thermal transfer without applying pressure is desirable. The temperature at the time of transfer is raised to the curing temperature of the resist. The temperature distribution during heating is also important, and it is necessary to integrally heat the substrate and the transfer film in order to obtain a uniform film. In the thermal transfer, usually, a substrate and a transfer film are sandwiched between two aluminum plates, and these are weighted at ² kg / cm ² or less, and then placed in a clean oven for 100 to 100%.
It is carried out by heating in the range of 180 ° C.

Next, as shown in FIG. 3D, the transfer film 70 is peeled off to form the partition wall 40 having a predetermined shape on the insulating layer (not shown). The transfer film 70 is peeled off by first allowing the aluminum plate to cool naturally, and then slowly removing it so that the partition walls are not distorted.

As described above, in the manufacturing method according to the present invention, the barrier rib is formed by transferring the barrier rib pattern formed in advance onto the first electrode via the insulating layer. Therefore, as compared with the conventional method in which the partition wall is directly formed on the insulating layer, a more precise and excellent tapered partition wall can be easily manufactured. Further, according to the manufacturing method of the present invention, since the partition walls are independently formed, it is not necessary to strictly adjust the exposure amount or the developing time. Therefore, usable partition wall materials are not limited, and various materials can be used.

A second aspect of the present invention relates to a passive matrix type organic EL display device manufactured according to the first aspect of the present invention. An organic EL display device according to the present invention includes a stripe-shaped first electrode provided on a transparent support substrate, an insulating layer having at least one opening corresponding to each pixel, and an outer periphery of the opening. It is characterized by having at least a partition wall provided in a direction perpendicular to the first electrode, an organic light emitting layer, and a second electrode. The partition wall is formed by transferring what is previously patterned into a desired shape onto the outer periphery of the opening of the insulating layer, and the organic light emitting layer and the second partition wall are formed.
The electrode is separated into a plurality of electrically independent regions.

In the organic EL element constructed as described above, the first electrode and the second electrode intersect with each other, so that matrix driving can be performed. That is, when a voltage is applied to a specific stripe on the first electrode and a specific stripe on the second electrode,
In the organic light emitting layer, the portion where the stripes intersect emits light. As described above, by applying a voltage to the selected stripes of the first and second electrodes, it becomes possible to emit light only in the portion where the specific fluorescent color conversion film and / or the filter layer is located.

In the organic EL element configured as described above, at least one of the first electrode and the second electrode (that is, the anode and the cathode) is transparent in the wavelength range of the light emitted by the organic EL element. Is desirable, and emits light to the outside through this transparent electrode. In the art,
It is generally known that the anode is a transparent electrode, and it is known that such a transparent electrode can be easily manufactured.
Also in the present invention, it is desirable that the anode be a transparent electrode.

As described above, in the display device according to the present invention, the partition wall having an excellent reverse taper cross-sectional shape formed by transfer is provided on the organic EL element.
Therefore, a short circuit between the electrodes is unlikely to occur, and a highly reliable display device having excellent display characteristics can be realized.

The organic EL display device according to the present invention has an organic light emitting layer sandwiched by a pair of electrodes as an organic EL element. Such an organic EL device may have a structure in which a hole injection layer, an electron injection layer, and a hole transport layer are interposed, if necessary. The specific layer structure of the organic EL element applicable to the present invention is as follows. (1) Anode / organic light emitting layer / cathode (2) Anode / hole injection layer / organic light emitting layer / cathode (3) Anode / organic light emitting layer / electron injection layer / cathode (4) Anode / hole injection layer / organic Light emitting layer / electron injection layer / cathode (5) Anode / hole injection layer / hole transport layer / organic light emitting layer / electron injection layer / cathode

Each layer in the organic EL element can be formed using a known material. For the hole injection layer, for example, copper phthalocyanine (CuPc) can be used. For example, 4,4′-bis [N- (1
-Naphthyl) -N-phenylamino] biphenyl (α-
NPD) can be used. The organic light-emitting layer includes, for example, a benzothiazole-based, benzimidazole-based, benzoxazole-based fluorescent whitening agent, a metal chelated oxonium compound, a styrylbenzene-based compound, and an aromatic dimethylidin in order to obtain blue to blue-green light emission. Compounds and the like are preferably used. For the electron injection layer, for example, aluminum chelate (Alq) can be used.

Specific examples of the organic EL display device according to the present invention include a flat display panel, a mobile display device, an in-vehicle display device and the like.

By further providing the above-mentioned organic EL element with color conversion means, it becomes possible to construct a multi-color or full-color display device. Examples of the color conversion means include a fluorescent color conversion filter or a fluorescent color conversion film formed of a resin containing a fluorescent dye. By using such a color conversion unit, it is possible to output light in the near-ultraviolet to visible region, preferably light in the blue to blue-green region, emitted from the organic EL element, as visible light having different wavelengths.

Hereinafter, as an example of the organic EL display device of the present invention, the number of pixels (320 × RGB) × 240 dots, the pixel pitch 110 × 330 μm, and the number of subdots 230, 4
Conversion type color organic EL having a plurality of 00 pixels
The display will be described.

FIG. 4 shows one example of a color conversion type color organic EL display, which is an example of a display device according to the present invention.
FIG. 2 is a schematic cross-sectional view showing a pixel (note that the cross-section is B in FIG. 1).
-Corresponding to the B'line direction). The display has a color conversion filter substrate and an organic EL element. As can be seen from FIG. 4, the color conversion filter substrate includes a red conversion filter 90 as a fluorescent color conversion filter layer on the transparent support substrate 10.
a, green conversion filter 90b, blue conversion filter 90c
And a gas barrier layer 100. In addition, the organic EL element is formed by patterning I on the color conversion filter substrate.
A first electrode (transparent anode) 20 such as TO, a hole injection layer 52 covering the first electrode, a hole transport layer 54 formed on the hole injection layer 52, and the holes. An organic light emitting layer 50 formed on the transport layer 54, an electron injection layer 56 formed on the organic light emitting layer 50, and a second electrode (a metal electrode or the like formed on the electron injection layer 56). And a cathode) 60. Note that, in FIG. 4, the insulating layer and the partition wall are not shown for simplification.

A fluorescent color conversion filter substrate will be described below as an example of the color conversion means. As shown in FIG.
The fluorescent color conversion filter substrate is formed on the transparent support substrate 10,
A red color conversion filter 90a as a fluorescent color conversion filter layer,
Green conversion filter 90b and blue conversion filter 90
c and the gas barrier layer 100. Further, each color conversion filter 90a, 90b, 90c contains an organic fluorescent dye and a matrix resin. These will be described in detail below.

Organic Fluorescent Dye In the present invention, the organic fluorescent dye contained in the color conversion filter is different by absorbing light in the near-ultraviolet region or visible region, particularly light in the blue or blue-green region, which is emitted from the luminescent material. Any material that emits visible light may be used. It is easy to obtain an organic EL element that emits light in the blue or blue-green range. However, if you try to change this to light in the red range by passing it through a simple red filter, light with a wavelength in the red range will be obtained. Since it is few, the output light will be extremely dark.

Therefore, the light in the red region can be output with a sufficient intensity by converting the light from the device into the light in the red region by the fluorescent dye. On the other hand, the light in the green region may be converted into the light in the green region by another organic fluorescent dye and output, as in the light in the red region, or the light emitted from the device may be green. The light from the device may simply be output through the green filter if it contains sufficient light in the area. On the other hand, regarding the light in the blue region, it is possible to output the light of the organic EL element through a simple blue filter.

Examples of fluorescent dyes that absorb light in the blue to blue-green range emitted from the light-emitting body and emit fluorescence in the red range include, for example, rhodamine B, rhodamine 6G, rhodamine 3B, rhodamine 101, rhodamine 110, sulforhodamine, and basic. Rhodamine dyes such as violet 11 and Basic Red 2, cyanine dyes, 1-ethyl-2- [4- (p-dimethylaminophenyl) -1
Examples include pyridine-based dyes such as 3-butadienyl] -pyridinium-perchlorate (pyridine 1), and oxazine-based dyes. Further, various dyes (direct dyes, acid dyes, basic dyes, disperse dyes, etc.) can be used as long as they have fluorescence.

Fluorescent dyes that absorb light in the blue to blue-green range emitted from the luminescent material and emit fluorescence in the green range include, for example, 3- (2'-benzothiazolyl) -7-diethylaminocoumarin (coumarin 6), 3 -(2'-benzimidazolyl) -7-N, N-diethylaminocoumarin (coumarin 7), 3- (2'-N-methylbenzimidazolyl) -7-N, N-diethylaminocoumarin (coumarin 30), 2,3,3 5,6-1H, 4H-tetrahydro-8-trifluoromethylquinolidine (9,9a,
1-1 gh) Coumarin-based dyes such as coumarin (coumarin 153) or Basic Yellow 51 which is a coumarin dye-based dye, and Naphthalimide-based dyes such as Solvent Yellow 11 and Solvent Yellow 116. Further, various dyes (direct dyes, acid dyes, basic dyes, disperse dyes, etc.) can be used as long as they have fluorescence.

The organic fluorescent dye used in the present invention includes polymethacrylic acid ester, polyvinyl chloride, vinyl chloride-vinyl acetate copolymer resin, alkyd resin, aromatic sulfonamide resin, urea resin, melamine resin, benzoguanamine resin and An organic fluorescent pigment may be obtained by previously kneading into a resin mixture or the like to form a pigment. Further, these organic fluorescent dyes and organic fluorescent pigments (in the present specification, the above two are collectively referred to as organic fluorescent dyes) may be used alone, and two or more kinds thereof may be used in order to adjust the hue of fluorescence. You may use in combination. The organic fluorescent dye used in the present invention is contained in the fluorescent color conversion film in an amount of 0.01 to 5% by weight, preferably 0.1 to 2% by weight, based on the weight of the conversion film. If the content of the organic fluorescent dye is less than 0.01% by weight, sufficient wavelength conversion cannot be performed,
Alternatively, if the content exceeds 5%, the color conversion efficiency is lowered due to the effect of density quenching or the like.

Matrix Resin Next, the matrix resin used in the fluorescent color conversion filter of the present invention is a photocurable or photothermal combined curable resin.
It is a product obtained by inducing radical species or ionic species by light and / or heat treatment to polymerize or crosslink to make it insoluble and infusible. The photocurable or photothermal combined curable resin is preferably soluble in an organic solvent or an alkaline solution before being cured for patterning the fluorescent color conversion film.

Specific examples of the photocurable or photothermal combined curable resin include the following. (1) A composition film comprising an acrylic polyfunctional monomer or oligomer having a plurality of acroyl groups or methacroyl groups and a photo or thermal polymerization initiator was photo- or heat-treated to generate photo radicals or thermal radicals and polymerized. thing. (2) A composition obtained by dimerizing and cross-linking a composition comprising polyvinyl cinnamate and a sensitizer by light or heat treatment. (3) A composition film composed of a linear or cyclic olefin and bisazide, which is crosslinked with olefin by generating nitrene by light or heat treatment. (4) A composition film composed of a monomer having an epoxy group and a photoacid generator, which is polymerized by generating an acid (cation) by light or heat treatment.

In particular, the photocurable or photothermal combined curable resin (1) is preferable in terms of high-precision patterning and reliability such as solvent resistance and heat resistance after polymerization.

Gas Barrier Layer The gas barrier layer has high transparency in the visible region (400-400).
Transmittance 50% or more in the range of 700 nm), Tg is 100
Any material may be used as long as it has a surface hardness of 2 H or more as a pencil hardness at 2 ° C. or higher, can form a coating film on a color conversion filter smoothly, and does not deteriorate the function of the color conversion filter. 5-134112 publication,
JP-A-7-218717, JP-A-7-30631
No. 1, etc.), inorganic metal compounds (TiO, AL ₂
(O ₃ , SiO _2, etc.) is dispersed in acrylic, polyimide, silicone resin or the like (see JP-A-5-119306, JP-A-7-104114, etc.), and epoxy-modified acrylate is used as a UV-curable resin. Resin (see JP-A-7-48424), resin having a reactive vinyl group of acrylate monomer / oligomer / polymer, resist resin (JP-A-6-300910,
JP-A-7-128519, JP-A-8-27939
No. 4, JP-A-9-330793, etc.),
Sol-gel method for inorganic compounds (Monthly Display 1997
, Vol. 3, No. 7, JP-A-8-27934, etc.), fluorinated resins (see JP-A-5-36475, JP-A-9-330793, etc.), etc. Resins and / or thermosetting resins may be mentioned.

The method for forming the gas barrier layer is not particularly limited, and for example, conventional methods such as a dry method (sputtering method, vapor deposition method, CVD method, etc.) and a wet method (spin coating method, roll coating method, casting method, etc.) are used. Can be formed by.

The gas barrier layer has an electric insulating property, a barrier property against a gas and an organic solvent, and high transparency in the visible region (transmittance of 50% or more in the range of 400 to 700 nm). A material having a film hardness of 2H or more as the hardness that can withstand film formation of the anode may be used. For example, SiO _x , SiN
_x , SiN _x O _y , AlO _x , TiO _x , TaO _x , Z
Inorganic oxides such as nO _x and inorganic nitrides can be used. The method for forming the gas barrier layer is not particularly limited, and the gas barrier layer can be formed by a conventional method such as a sputtering method, a CVD method, a vacuum deposition method, a dip method. The above-mentioned gas barrier layer may be a single layer or a laminate of a plurality of layers.

There are important factors that must be taken into consideration when applying the gas barrier layer to a color conversion organic light emitting display. That is, consideration is given to the influence of the film thickness of the gas barrier film on the display performance, particularly the viewing angle characteristics. A particularly important viewing angle characteristic in the color conversion type organic light emitting display is a change in color that occurs when the viewing angle with respect to the display is changed.

If the gas barrier layer is made too thick, the optical path length of the excitation light generated in the organic light emitting layer until it reaches the color conversion layer existing through the gas barrier layer. as a result,
When viewed from an oblique direction, leakage of excitation light (optical crosstalk) to adjacent pixels of another color occurs. Considering the display performance of the display, it is required that the ratio of the light emission amounts of the adjacent colors due to the optical crosstalk be sufficiently smaller than the light emission amount of the original color. This requirement is replaced by limiting the relationship between the film thickness of the gas barrier film and the minimum width of the pixel.

[0053]

The following examples illustrate the case where the present invention is applied as a multi-color or full-color display. However, it is needless to say that the present invention is not limited to the following examples and can be variously modified without departing from the spirit of the present invention. In addition, the following examples are the "embodiments of the invention" shown above.
And will be understood in more detail with reference to FIGS.

(Example 1) A. Fabrication of color conversion filter substrate (fabrication of blue filter) Blue filter material (Fuji Hunt Electronics Technology: Color Mosaic CB
-7001) as a transparent substrate and Corning glass (5
(0 × 50 × 1.1 mm) was applied using a spin coating method. Then, patterning is performed by a photolithography method to obtain a line width of 0.1 mm, a pitch of 0.33 mm,
A blue filter having a line pattern with a film thickness of 10 μm was obtained.

(Production of Green Conversion Filter) Coumarin 6 (0.7 parts by weight) as a fluorescent dye was dissolved in 120 parts by weight of propylene glycol monoethyl acetate (PGMEA) as a solvent. Photopolymerizable resin "V259PA / P
5 "(trade name, Nippon Steel Chemical Co., Ltd.) was added and dissolved to obtain a coating liquid. This coating solution was applied onto a transparent substrate on which a blue filter line pattern had been formed in advance by spin coating. Next, patterning was performed by a photolithography method to obtain a green color conversion filter having a line pattern with a line width of 0.1 mm, a pitch of 0.33 mm, and a film thickness of 10 μm.

(Preparation of Red Conversion Filter) Coumarin 6 (0.6 parts by weight) and Rhodamine 6G (0.
3 parts by weight) and Basic Violet 11 (0.3 parts by weight) were dissolved in 120 parts by weight of the solvent propylene glycol monoethyl acetate (PGMEA). 100 parts by weight of a photopolymerizable resin "V259PA / P5" (trade name, Nippon Steel Chemical Co., Ltd.) was added and dissolved to obtain a coating solution. This coating solution was applied by a spin coating method onto a transparent substrate on which a line pattern of a blue filter and a green conversion filter was previously formed. Next, patterning is performed by a photolithography method to obtain a line width of 0.
A red conversion filter having a line pattern of 1 mm, a pitch of 0.33 mm, and a film thickness of 10 μm was obtained.

(Production of Gas Barrier Layer) A UV curable resin (epoxy-modified acrylate) was placed on the fluorescence conversion filter obtained as described above and having a uniform film thickness of 10 μm.
Was applied by a spin coating method and irradiated with a high pressure mercury lamp to form a gas barrier layer having a film thickness of 3 μm. At this time, the pattern of the fluorescence conversion filter was not deformed.

B. Preparation of organic EL element (display device) (preparation of transparent electrode (anode)) A transparent electrode (I) is formed on the upper surface of the gas barrier layer which is the outermost layer of the filter portion by a sputtering method.
(TO) was formed on the entire surface. Resist agent "OFR" on ITO
P-800 "(trade name, manufactured by Tokyo Ohka Co., Ltd.), and then patterning is performed by photolithography to obtain a width of 0. 094 mm, gap 0.016 mm,
An anode having a stripe pattern with a film thickness of 100 nm was obtained.

(Production of Insulating Layer) Next, on the transparent electrode,
A positive type resist “WIX-2A” (trade name, manufactured by Zeon Corporation) was applied, and patterning was performed by photolithography to have a thickness of 1 μm having openings corresponding to the light emitting portions of each color.

(Preparation of Partition Wall) The partition wall was formed on the insulating layer prepared previously so as to be orthogonal to the transparent electrode so as not to protrude into the pixel as follows. First, a negative transfer resist "V259PA / P5" (trade name, manufactured by Nippon Steel Chemical Co., Ltd.) and "JNPC-48" (trade name, manufactured by Japan Synthetic Rubber) are applied to a transfer film (PTFE film) that is smooth and peelable.
Was applied by a spin coater or a printing method to form a film layer. Next, patterning was performed by a photolithography method using a photomask to form tapered partition walls having a thickness of 4 μm and a width of 30 μm. The transfer film on which the partition pattern is formed and the transparent electrode having the insulating layer are aligned and integrated, and sandwiched between two aluminum plates.
The pressure was suppressed below kg / cm ² . The laminated body thus integrated is put in a clean oven and heated at 160 ° C. for 60 minutes.
Heated for minutes. After allowing the laminate to cool naturally, the aluminum plate was removed, and then the transfer film was slowly peeled along the longitudinal direction of the partition wall.

(Production of Organic EL Element (Display)) On the transparent electrode (anode) with partition walls produced as described above, hole injection layer / hole transport layer / organic light emitting layer / electron injection layer / A five-layer structure of the cathode was formed to produce an organic EL device. Each film formation was performed as follows.

First, a transparent substrate provided with a transparent electrode, a partition wall and an insulating layer in this order was mounted in a resistance heating vapor deposition apparatus, the internal pressure of the vacuum chamber was reduced to 1 × 10 ⁻⁴ Pa, and copper was used as a hole injection layer. Phthalocyanine (CuPc) was laminated to a thickness of 100 nm. Next, the hole transport layer, the organic light emitting layer, and the electron injection layer were sequentially formed without breaking the vacuum. As the hole transport layer, 4,4′-bis [N- (1-naphthyl) -N-phenylamino] biphenyl (α-NPD) was laminated to a thickness of 20 nm. As an organic light emitting layer, 4,4'-bis (2,2'-
Diphenylvinyl) biphenyl (DPVBi) 30n
m stacked. Aluminum chelate (Al
q) was laminated to 20 nm. Table 1 shows the structural formulas of the materials used for each layer.

[0063]

[Table 1]

On the surface (electron injection layer) of the laminated body obtained as described above, Mg / Ag (1
A cathode consisting of a 0: 1 weight ratio layer was formed without breaking the vacuum. All of the above-mentioned five layers were formed by solid films that did not require patterning.

The organic EL device thus obtained was sealed with a sealing glass (not shown) and a UV curing adhesive in a dry nitrogen atmosphere (both oxygen and water concentrations were 100 ppm or less) in a glove box, and the color was measured. A conversion type color organic EL display was obtained.

The color conversion type color organic EL display completed by the above steps is 60 (× RGB) × 60.
It has a number of pixels. Drive the resulting display,
The number of short-circuit points between the cathode and the anode was examined. The results are shown in Table 2 below.

(Comparative Example 1) The same procedure as in Example 1 was carried out except that the partition wall was manufactured by directly performing spin coating and patterning by photolithography on the insulating layer using a conventional positive resist. To produce a color conversion type color organic EL display. The resulting display was driven to check the number of short-circuited points between the cathode and the anode. The results are shown in Table 2 below.

[0068]

[Table 2]

As is clear from Table 2, the number of short-circuited points in the display manufactured by the manufacturing method of the present invention is significantly reduced as compared with Comparative Example 1 by the conventional method.

[0070]

As described above, according to the present invention,
It becomes possible to easily manufacture a highly accurately patterned partition wall, and it is possible to provide an organic EL display device having very few short circuits between the cathode and the anode and having high display characteristics and reliability.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a structure of an organic EL element.

FIG. 2 is a schematic cross-sectional view showing the structure of an organic EL element.

FIG. 3 is a diagram illustrating a process of manufacturing a partition wall according to the present invention, in which (a) to (d) correspond to each process.

FIG. 4 is a schematic sectional view showing an example of an organic EL display device according to the present invention.

[Explanation of symbols]

10 Transparent support substrate 20 First electrode (anode) 30 insulating layer 30a opening (pixel) 40 partitions (reverse taper shape) 42 Second film layer (resist film layer) 44 Partition pattern (taper shape) 50 Organic light emitting layer 52 Hole injection layer 54 Hole Transport Layer 56 electron injection layer 60 Second electrode (cathode) 70 First film layer (transfer film) 80 photo mask 90a Red conversion filter 90b Green conversion filter 90c blue conversion filter 100 gas barrier layer

Claims (6)

[Claims] 1. A method for manufacturing a passive matrix organic EL display device, comprising: a stripe-shaped first electrode provided on a transparent support substrate; and an insulating layer having at least one opening corresponding to each pixel. And a step of forming a partition wall provided in a direction perpendicular to the first electrode, an organic light emitting layer, and a second electrode on the outer periphery of the opening, respectively. Is formed by transferring a patterned material in the outer periphery of the opening of the insulating layer to separate the organic light emitting layer and the second electrode into a plurality of electrically independent regions. Manufacturing method. 2. The patterning of the partition wall comprises a step of forming a second film layer using a negative resist on the first film having a smooth and peelable property, and a step of forming a photo film on the second film layer. The manufacturing method according to claim 1, further comprising a step of forming a desired pattern by processing into a tapered shape by a lithographic method. 3. The patterning of the partition wall includes a step of forming a desired pattern by directly patterning a negative resist on the first film having a smooth and peelable property by a printing method. The manufacturing method according to claim 1. 4. The transfer of the partition wall is performed by combining a desired pattern formed on the first film and the first electrode provided with the insulating layer, and then heating and curing them. The method according to any one of claims 1 to 3, which is carried out by 5. An organic EL display device manufactured by the method according to any one of claims 1 to 4. 6. The organic EL display device according to claim 5, further comprising color conversion means.