TW311328B - Connection sheet for interconnecting electrodes facing each other, and electrode connection structure and method using the connection sheet - Google Patents
Connection sheet for interconnecting electrodes facing each other, and electrode connection structure and method using the connection sheet Download PDFInfo
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- TW311328B TW311328B TW85108849A TW85108849A TW311328B TW 311328 B TW311328 B TW 311328B TW 85108849 A TW85108849 A TW 85108849A TW 85108849 A TW85108849 A TW 85108849A TW 311328 B TW311328 B TW 311328B
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-------- 五、發明説明(i ) 本發明係相於用來將—電極 活 地結合至線路板以達成二元件間之: =-------- V. Description of the invention (i) The present invention is relative to the one used to vigorously combine the electrode to the circuit board to achieve the relationship between the two components: =
=接一連接結構以及連LI 這元:之小型化及薄片化之最近《,使用在 菩路在密度上隨著增加而在連接間距上隨 達成ί此Φ於使用傳^技街如焊接,檢膠連接器等不易 、成某二電子兀件至細 夠提供解士六十、Α 近年來廣泛使用能 接片)。丨式又各向異性導電粘合劑及似薄膜材料(連 抖如=連接片包括—枯合劑,其具有—特定量之導電材 m顆粒。由於具有位於電子元件和電極或電路間之 n ’當施加壓力或者熱及壓力兩者至連接片時,兩者 會緊密地結合因而兩元件之對應電極可互相作電性連接, 而同時在相近之電極間提供絕緣。 經濟部中央標準局員工消费合作杜印製 、I用此種連接片達成高分解能之基本概念是在靠近電 極{導電顆粒之顆粒直徑必需小於鄰近電極間之絕緣區之 長度以確保電極間之絕緣功效。此外,在連接片中之導電 顆粒里必需加以選擇使得其密度不會使顆粒不會互相接 觸,而且當連接電極時顆粒不會存在於要被連接之電極 上,因而在連接部份可達成導電性。 然而,如果導電顆粒之顆粒直徑太小,導電顆粒會受 到結合力,而且因顆粒之表面面積過度增加會結合在一 齊,造成在鄰近電極間不能維持所需之絕缘性能。相反地, 如果導電顆粒之含量減少,在要被速接之電桎上之導電顆 本纸張尺度適财® ®緖準(CNS ) A4規格(210 X297^17 A7 五、發明説明(2 ) 粒數时會減少,其結果會由於接觸_足而衫達成對 =:!二:然而’藉由傳統之技術非常不易以連接 1來達成而同時維持長期< 連接可靠性。詳而 二:!近有較面分解能之需求’亦即有減少電極面積及 鄰近電極之間隔之需求。當在速拉 田仕建接步驟中施加壓力或同時 施加熱及壓力至連接片時,在電極之導電顆粒會和枯合劑 -齊流向位於鄰近電極之—區域中,因而阻礙使用連接片 以分解能之達成。而如果增加枯合劑度以抑制外 泥,則導電顆粒不能滿意地與各電極接觸,因而不能達成 對時電極間之電連接。相反地,如果枯合劑之枯度降低, 不僅導電顆粒易於外流,而且氣泡會易於包含在鄰近電極 間<區域,而降低連接可靠性,特別是濕氣電阻。 有鑑於這些缺點,例如日本特許公開公報ν〇 Μ — 95179及No. 4-3 66630揭示了 一種多層連接片,其包括— 絕緣粘合層(第1粘合層)及一與第丨粘合層分開,充填有 導電顆粒之第2粘合層。第2粘合層之粘度乃選成在連接 争較第〗枯合層有較兩之枯度或結合力,以減少導電顆粒 之流動而將導電顆粒捕集在電極上。 經濟部中央標準局員工消費合作社印製 然而’依據所揭示之技術,由於在連接時充填有導電 顆粒之看具有較絕緣粘合層高之粘度,因此導電顆粒不能 充份地和電極接觸,因此會增加連接電阻並降低連接可靠 性。爲了降低連接電阻,可使用其中導電顆粒先暴露至顆 粒充填層接觸之表面之結構以易於與電極接觸。在此情形 下’導電顆粒之直徑必需增加,因而不易達成高分解能。= The connection structure and the connection of LI: The most recent "miniaturization and thinning", used in the Bo Road with the increase in density and in the connection distance to achieve this Φ in the use of ^ technology street such as welding, It is not easy to detect the glue connector, etc., and it is a small electronic component to be thin enough to provide Jieshi 60. A has been widely used in recent years.丨 type and anisotropic conductive adhesive and film-like materials (even shaking, such as = the connecting sheet includes a binder, which has a specific amount of conductive material m particles. Because of the n 'between electronic components and electrodes or circuits When pressure or heat and pressure are applied to the connection piece, the two will be closely combined so that the corresponding electrodes of the two components can be electrically connected to each other, while providing insulation between the adjacent electrodes. The basic concept of high-resolution energy is achieved by the cooperation of Du Printing and I using this connection piece. The diameter of the conductive particles must be less than the length of the insulating area between the adjacent electrodes to ensure the insulation effect between the electrodes. In addition, the connection piece The conductive particles must be selected so that their density does not prevent the particles from coming into contact with each other, and the particles do not exist on the electrodes to be connected when the electrodes are connected, so that electrical conductivity can be achieved at the connection part. However, if The particle diameter of the conductive particles is too small, the conductive particles will be subjected to binding force, and due to the excessive increase in the surface area of the particles will be combined in a , Resulting in the inability to maintain the required insulating properties between adjacent electrodes. Conversely, if the content of conductive particles is reduced, the conductive particles on the electrical connection to be fast-connected are paper-sized Shicai ® ® Standard (CNS) A4 Specifications (210 X297 ^ 17 A7 V. Description of the invention (2) The number of grains will be reduced, and the result will reach the right due to contact_foot and shirt = :! Two: However, it is very difficult to achieve with connection 1 by traditional technology And at the same time maintain the long-term < connection reliability. In detail two: there is a demand for near-level decomposition energy, that is, there is a need to reduce the electrode area and the distance between adjacent electrodes. When applying pressure or simultaneous application during the connection process of Solatian Shi When heated and pressured to the connection piece, the conductive particles in the electrode will flow with the binder to the area located adjacent to the electrode, which hinders the use of the connection piece to achieve the decomposition energy. If the degree of binder is increased to suppress the external mud The conductive particles cannot be satisfactorily contacted with the electrodes, so that the electrical connection between the time-aligned electrodes cannot be achieved. Conversely, if the dryness of the mixture decreases, not only does the conductive particles tend to flow out, but also Bubbles can be easily contained in the < area between adjacent electrodes, reducing connection reliability, especially moisture resistance. In view of these shortcomings, for example, Japanese Patent Laid-Open Publication ν〇Μ — 95179 and No. 4-3 66630 disclose a multilayer Connection sheet, including-an insulating adhesive layer (first adhesive layer) and a second adhesive layer separated from the first adhesive layer and filled with conductive particles. The viscosity of the second adhesive layer is selected to be connected The competition layer has a lower dryness or binding force to reduce the flow of conductive particles and trap the conductive particles on the electrode. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs but based on the disclosed technology Because the conductive particles filled during the connection have a higher viscosity than the insulating adhesive layer, the conductive particles cannot fully contact the electrode, which increases the connection resistance and reduces the connection reliability. In order to reduce the connection resistance, a structure in which the conductive particles are first exposed to the surface where the particle filling layer contacts is used to facilitate contact with the electrode. In this case, the diameter of the 'conductive particles must be increased, so it is not easy to achieve high decomposition energy.
本紙張尺度適用中國國^規格(210x贈FIThis paper scale is applicable to China's national specifications (210x gift FI
•、發明説明( 有-種連接片被提出,此連 電路,而且可提供優良切純,土細小電-電接要被連接之區域。雖纽連接片、2電顆粒被集中至 電極’例如’在半導體晶 : 狀之微細 操作效率。 雜㈣準方可,如此便降低了 連接此問題’因而本發明之目的在於提供-二 導電顆粒*連接時可牢固地被捕集在 = 電極間,而且可容易地與電接接觸,因而在電 連接^業中可達成良料長期連接可純及操作效率。 特徵’本發明提供了 — 之連接片以將二電極連接在-齊以達成電接 =電性仙。此連接片包括:—由具有電絕緣性質之第 枯合劑所製成之第丨枯合層;一置於此第】枯合廣上之 第2枯合屠,此第2枯合層包括—具有電絕緣性質之第2 枯合劑及-導電材料’當第i及第2枯合劑在溶融狀態時, 此第2粘合劑具有相同或低於第i粘合劑之粘度。 麵濟部中央榡準局員Η消t合作衽印製 依照本發明之第i特徵,由於在溶融狀態:第2枯合 劑之粘度相等或小於第I粘合劑,因此當電極相連接時: 包含在第2粘合劑層中之導電材料就埋入或陷入具有較高 嫁融黏度之第1枯合層中。因此,導電材枓可牢固地被= 持在互相料之電極間。之後,當第丨枯合劑層軟化並流 動時,導電材料就和突出之電極相接觸而達成導通。由於 第1粘合層具有較第2粘合劑相同或較高之粘度因而能留 本紙張尺度適用中國國家標準(CNS ) Α4^ΤΤΓϋ 297公楚) A7 A7 經濟部中央標準局員工消費合作社印製 五、發明説明(4 ) 住導電材料’藉此不會有氣泡包含在相鄰接之凸出電極間 之區域。 、如果包含導電顆粒之第2粘合劑之粘度高於第i粘合 ,〈粘度(吓即$丨粘合劑減去$ i粘合劑之差爲負値), 第2粘合劑之粘度過高,會使得導電顆粒不能被埋入或 陷入第I枯合屬之中。因而導電顆粒就不能充份地和電極 相接觸,就不能達成互相對畤電極間之電性連接。 最好,當第1及第2粘合劑在熔融狀態時,第)粘八 劑之粘度較第1粘合劑低】〇〇〇泊或以下。 _ ° ,如果’帛2枯合劑之枯度比第i枯合劑低超過咖 則第2枯合劑之枯度過低會發生導電顆粒外流。此外, 氣泡容易被包含在鄰近電極間之區域中,會降低連接之可 靠性’特別是濕氣電阻。 * 第2粘合層最好具有5〇〇泊或更少之熔融粘度。 依照發明所作之實驗結果,當第2枯合層之=融 身馬500泊或以下時,由於其與第】枯 ^又 關係可達成滿意之結果。 <枯度產又 产會2枯合劑最好包含相同之材料,因爲枯合強 ❹第1及第2枯合層内之界面之枯合度之增加而 第2枯合劑和第i枯合劑具有不同之枯合性 八理由是此連接片可在具有較低粘合 基質分開,因而有利於修補工作。 度<界面從〜 第2粘合層及/或第丨粘合層最好包含絕缘顆粒。 本纸張尺度兩 ----------- -丨裝------訂------線!.. (請先閲讀背而之注意事項再填寫本頁) ^•1328 A7 經濟部中央標準局員工消費合作社印製 五、發明説明(5 ) 當電極連接時如果包含有絕緣顆粒時 _ 導電顆粒與電極間之絕緣能可靠地達<。I電顆粒間或 最好,導電材料包括導電顆粒或去甘 材料之導電顆粒。 W、表面塗覆有絕缘 當導電顆粒塗覆有絕緣材料時,只有位、 域之那些導電顆粒之絕緣塗覆騎… ^電極接觸區 絕緣塗覆之關係在絕緣性能反而增進。而其他部份由於 第1枯合廣最好包括一分離片,此分離片覆 合看相反側之…合廣之一表面,而且可從第7枯合看 剥離。 當電極眞正從第丨枯合看連接時,亦即當 使用時,分離片剥離,因而在使用前 w 連接片。 ^防止灰塵等枯合至 根據本發明之第2特徵,本發明提供了 —將對畔電極 接合-齊之連接構造以使電極作電性連接。此連接構造包 括:-由具有電絕緣性質之第!枯合劑所‘製成之第!枯合 看;置於第1枯合廣上之第2枯合層,此第2枯合看包含 —具有電絕緣性質2枯合劑及—導電材料,此第U 合劑在當第丨及第2枯合劑是在熔融狀態時,具有相等於 或低於第一枯合劑之枯度;以及一基質與第I粘合劑層或 第2枯合劑膚接觸,此基質具有一與導電材料相接觸之電 極表面之電極,此電極表面之長側(L)與短侧⑴)之比値 (L/D)爲20或以下。 依,·、、本發明之第2特徵,在形成於一基質如—半導體 (請先閲讀背面之注意事項再填寫本頁) --------裝-------訂-- -1:· , 線 --------------- I— 1-— I · 本纸張尺度朝中國國家$準(CNS ) A4^TllOX297^F7 經濟部中央標準局員工消費合作社印製 A7 -------- B7 五、發明説明(6) ' 晶片上之連接電極之連接結構中,在基質上之各電極之連 接表面之長側(L)與短側之比(L/D)爲20或以下。在此情形 下,更多的導電材料可被安定地捕集在細小之凸出電極 丄,因而可改良連接之可靠性並可更有效地使用昂貴的導 電材料。 藉由使第2粘合劑之熔融狀態之粘度相等或低於第^ 粘合劑,如在本發明之第1特徵中所述,當電極連接時, 包含在第2枯合看中之導電材料會埋人具有較高溶融枯度 之第2粘合層中,或者部份導電材料會被捕集在要被連接 之電極上。因而導電材料可被牢固地維持在對峙電極 間。 最好,當第1及第2粘合劑是在熔融狀態時,如本發 明〈第1特徵,第2黏合劑之枯度較第】枯合劑之濃度低 1000泊或以下。 一 依照本發明之第3特徵,本發明提供了 一將對崎電極 結合-齊疋連接構造以將電極作電性連接,,此連接結構包 括:—由具有電絕緣性質之第】枯合劑所製成之第!枯合 層;-置於第1粘合層上之第2粘合層,此第2粘合層包 含有一具有電絕緣性質之第2枯合劑及導電材料:電 極列成互相對峙而且在其中配置者第!及第)枯人層,s 少一電極列包括有從一基質突出之凸出電極,此凸^電= 各具有-靠近基質之底部以及面向對應電極之上表面,第 I粘合層環繞至少各凸出電極之底部。 根據本發明之第3特徵,當作絕緣枯合看之第ι枯合 9 本紙張尺度適财關家鱗-——_____ (請先閲讀背面之注意事項再填寫本頁) 裝. 、1Τ 線丨 I — . I . Μ Β7 經濟部中央標準局員工消費合作社印製 五、發明説明(7 ) —~ 廣乃置於靠近從基質突出之電極,因而可改良鄰近電極間 之絕緣性能以及分解能。 最好,當第1及第2粘合劑是在熔融狀態時,第2粘 α劑之粘度較第1粘合劑低丨〇〇〇泊或更少。 當作爲絕緣粘合層之第1粘合層具有高的熔融粘度 時,則連接壓力就不可能作用至鄰近電極間之區域,因而 導電材料會流至此區域,因而更改良鄰近電極間之絕緣性 能及分解能。 、 最好,第2粘合層之導電材料具有一密度,此密度乃 成從各凸出電極之上表面向靠近基質之底部隨著距離成漸 減之方式。 在電極之上表面或連接表面之導電材料之密度越高則 越易達成可靠之電連接。另—方面,對於電極之底部,導 電材料切度越低,勒近電極越能可# 依據本發明之第4特徵,本發明提供了—將=電極 結合一齊又結合方法以將電極作電連接。此達接方法包 括:將-包括第!枯合屬及一第2枯合屬之連接片置於— 對電極列之間而使此對電極列成對崎之安排步驟,此第I 粘合看乃由具有電絕緣性質及熱固性質之第!枯合劑所製 成’此第2枯合看置於第!枯合廣之上而且包含—導電材 料及具有電絕緣性質及熱固性質之第2枯合劑;對第!及 第2釉合廣施以熱壓之施加熱壓步驟,在施加熱壓之步驟 中施加至第2粘合劑之熱或/及壓力較施加至第i粘合 熱或/及壓力爲低。 ^ 10 本紙張尺度適财關家標準) A4規格(2丨0'_<297公慶_)— ml nn i n I I ί il^< 士 nn n (請先閱讀背而之注意事項再填寫本頁) 訂 - I —II· ml 11— .• Description of the invention (There are one kind of connection piece is proposed, this circuit, and can provide excellent purity, soil small electric-electric connection to be connected to the area. Although the button connection piece, 2 electric particles are concentrated to the electrode 'For example 'In the semiconductor crystal: the fine operation efficiency of the shape. It is possible to reduce the problem of connection, so the purpose of the present invention is to provide-two conductive particles * can be firmly trapped between the = electrode when connected Moreover, it can be easily contacted with the electrical connection, so in the electrical connection industry, good material can be achieved for long-term connection purity and operating efficiency. Features' The present invention provides a connecting piece to connect the two electrodes together to achieve electrical connection = Electricity. This connecting piece includes:-the first 丨 coated layer made of the electrically insulative compound; the second set of mortars placed on the celestial field, the second The dry layer includes-a second dry agent with electrically insulating properties and a conductive material. When the first and second dry agents are in a molten state, the second adhesive has the same or lower viscosity than the first adhesive 。 Printed by the member of the Central Bureau of the Ministry of Economy and Economy, cooperating with H Xiaot According to the i feature of the present invention, in the molten state: the viscosity of the second binder is equal to or lower than that of the first binder, so when the electrodes are connected: the conductive material contained in the second binder layer is buried Or fall into the first dry layer with higher melting viscosity. Therefore, the conductive material can be firmly held between the electrodes of each other. After that, when the thinner layer softens and flows, the conductive material becomes Contact with the protruding electrode to achieve continuity. Because the first adhesive layer has the same or higher viscosity than the second adhesive, it can be retained in the paper. The Chinese National Standard (CNS) Α4 ^ ΤΤΓϋ 297 Gongchu) A7 A7 Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 5. Description of the invention (4) Living conductive materials' By this way, no bubbles will be contained in the area between the adjacent protruding electrodes. 3. If the viscosity of the second adhesive containing conductive particles is higher than the i-th adhesive, <viscosity (the difference between $ 丨 adhesive minus $ i adhesive is negative), the second adhesive If the viscosity is too high, the conductive particles cannot be buried or caught in the first genus. Therefore, the conductive particles cannot fully contact the electrodes, and the electrical connection between the opposing electrodes cannot be achieved. Preferably, when the first and second adhesives are in a molten state, the viscosity of the first adhesive is lower than that of the first adhesive by 10,000 poise or less. _ °, if the dryness of ‘Bo 2 ’s mix is lower than the i’th mix, then the second mix ’s dryness is too low, and conductive particles will flow out. In addition, air bubbles are easily contained in the area between adjacent electrodes, which reduces the reliability of the connection ', especially the moisture resistance. * The second adhesive layer preferably has a melt viscosity of 500 poises or less. According to the experimental results made by the invention, when the 2nd dry layer = melt body horse 500 poises or less, a satisfactory result can be achieved due to its relationship with the 1st dry layer. < Dryness production and production meeting 2 It is best to include the same material, because the strength of the combination ❹ the increase in the degree of combination of the interface in the first and second combination layers and the second combination and the i combination The eight reasons for the different compatibility are that the connection sheet can be separated with a lower adhesive matrix, which is beneficial to repair work. Degree < Interface from ~ The second adhesive layer and / or the first adhesive layer preferably contains insulating particles. The size of this paper is two ------------installed ------ ordered ---- line! .. (please read the precautions before filling in this page) ^ • 1328 A7 Printed by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs V. Invention Instructions (5) When electrodes are connected with insulating particles _ conductive particles The insulation between the electrodes can reach < reliably. In some cases, the electrically conductive material includes electrically conductive particles or electrically conductive particles of demineralized material. W. The surface is coated with insulation. When the conductive particles are coated with insulating material, only the insulating coating of the conductive particles of the bit and field ... ^ Electrode contact area The relationship of the insulating coating is improved in the insulation performance. As for the other parts, since the 1st hybrid is better to include a separator, this separator covers one surface of the opposite side ... Heguang, and can be peeled off from the 7th hybrid. When the electrode is connected from the first point of view, that is, when it is used, the separator is peeled off, so the connector is connected before use. ^ Preventing dust and the like from collapsing to According to the second feature of the present invention, the present invention provides a connection structure in which the counter electrodes are joined-aligned so that the electrodes are electrically connected. This connection structure includes:-the first with electrical insulation properties! Withered Mixture ‘Made First! Drying; the second dry layer placed on the first dry wide, the second dry layer contains-with electrical insulating properties 2 dry agent and-conductive material, this U mixture is in the first and second The binder is in the molten state and has a dryness equal to or lower than that of the first binder; and a substrate is in contact with the first adhesive layer or the second binder skin, the substrate has a For the electrode on the electrode surface, the ratio (L / D) of the long side (L) to the short side (L) of this electrode surface is 20 or less. According to the second feature of the present invention, it is formed on a substrate such as a semiconductor (please read the precautions on the back before filling out this page) --1: ·, Line --------------- I— 1-— I · The paper size is toward the Chinese National Standard (CNS) A4 ^ TllOX297 ^ F7 Central Ministry of Economic Affairs Printed by the Bureau of Standards and Staff Consumer Cooperative A7 -------- B7 5. Description of invention (6) 'In the connection structure of the connection electrode on the chip, the long side (L) of the connection surface of each electrode on the substrate The ratio to the short side (L / D) is 20 or less. In this case, more conductive materials can be stably trapped in the small bump electrodes, so that the reliability of the connection can be improved and expensive conductive materials can be used more efficiently. By making the viscosity of the second binder in the molten state equal to or lower than that of the second binder, as described in the first feature of the present invention, when the electrodes are connected, the conductive conductivity included in the second binder The material will be buried in the second adhesive layer with a higher melting degree, or part of the conductive material will be trapped on the electrode to be connected. Therefore, the conductive material can be firmly maintained between the opposing electrodes. Preferably, when the first and second binders are in a molten state, as described in the first characteristic of the present invention, the second adhesive has a lower dryness of 1000 poise or less than the concentration of the first adhesive. According to a third feature of the present invention, the present invention provides a connection-combination structure of Qiqi electrodes to electrically connect the electrodes. The connection structure includes:-the first compound with electrical insulation properties Made the first! Drying layer;-a second bonding layer placed on the first bonding layer, this second bonding layer contains a second bonding agent with electrically insulating properties and a conductive material: the electrodes are arranged to face each other and arranged in it No. 1! And) the dry layer, s less one electrode row includes a protruding electrode protruding from a substrate, the convex ^ electricity = each has-close to the bottom of the substrate and facing the upper surface of the corresponding electrode, the first adhesive layer surrounds at least The bottom of each protruding electrode. According to the third feature of the present invention, it is regarded as the first of insulation insulation. This paper size is suitable for financial matters ----- _____ (please read the precautions on the back before filling out this page).丨 I —. I. Μ Β7 Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy V. Description of the invention (7) — ~ It is placed close to the electrode protruding from the substrate, so it can improve the insulation performance and decomposition energy between adjacent electrodes. Preferably, when the first and second adhesives are in a molten state, the viscosity of the second viscous alpha agent is 1,000 poises or less than that of the first adhesive. When the first adhesive layer as the insulating adhesive layer has a high melt viscosity, it is impossible for the connection pressure to act on the area between the adjacent electrodes, so the conductive material will flow to this area, thus changing the insulation performance between the adjacent electrodes And decomposition energy. Preferably, the conductive material of the second adhesive layer has a density that decreases from the upper surface of each protruding electrode toward the bottom of the substrate with distance. The higher the density of the conductive material on the upper surface of the electrode or the connection surface, the easier it is to achieve reliable electrical connection. On the other hand, for the bottom of the electrode, the lower the cut of the conductive material, the closer the electrode can be. # According to the fourth feature of the present invention, the present invention provides a method of combining the electrode together and combining the electrodes for electrical connection . This access method includes: will-include the first! The connecting piece of the genus and a second genus is placed between the pair of electrode rows to arrange the pair of electrode rows in pairs. The first bonding is made of electrically insulating and thermosetting properties. No! Made with withering agent ‘this second withering is placed first! It contains a wide range of compounds and contains-conductive materials and a second compound with electrical insulation and thermosetting properties; yes! And the second glaze is applied with a hot pressing step, and the heat or / and pressure applied to the second adhesive in the step of applying hot pressing is lower than the heat or / and pressure applied to the i-th bonding . ^ 10 The size of the paper is suitable for financial standards) A4 specification (2 丨 0 '_ < 297 Gongqing_) — ml nn in II il il && nn n (please read the precautions before filling in this Page) Order-I —II · ml 11—.
• --- -· 1 -1 - I 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明(8 ) 依照本發明之第4特徵,施加至包含導電顆粒之第2 枯合劑疋成或/及壓力降低’因而在連接時,具有熱固性質 之第2枯合劑之枯度可相等或低於具有熱固性質之第… 合劑。 因此,在連接時在熔融狀態之第2粘合劑之粘度可製 成軏第1粘合層之粘度爲低,如在上面本發明之第丨特徵 處所述,因而在第2枯合看中之導電材料被埋入具有較高 且炫融枯度《第!枯合層中,或者一部份導電材料被捕集 在相接觸要被連結之電極之上。因而導電材料可被牢固地 、准才守在對峙之電極之間。此外,由於第^枯合層之枯度較 第^枯合層疋枯度爲向,不僅導電材料可被捕集而且不會 有氣泡包含在鄰近凸出電極間之區域中。 最好,在施加熱愿之切中,$ 1及第2枯合層在加 壓下加熱以使得當第i及第2枯合劑在溶融狀態時第?枯 合劑之粘度較第1粘合劑低1〇〇〇泊或以下。 此外,在施加熱壓步驟時,連接片最‘好是以一裝設在 靠近第1粘合層之熱源在加壓下加熱。 如果熱源裝設在靠近第!枯合屬而且各枯合廣均使用 熱固性樹脂的話,則離熱源、較遠之第2枯合劑之枯度就奋 要知*較第丨枯合劑爲低。 根據本發明之第5特徵,本發明提供了 —將對崎電極 結合-齊以電性連接電極之方法,此方法包括:將包括一 第一枯合屬及第2枯合廣之連接片置於一對電極列之間, 而使此對電極列成對峙之安排步驟,此第丨粘合層乃由具 11 本紙張尺度朝巾國—國家標準(CNS ) A4祕(210X297^^7 (請先閲讀背面之注意事項再填苟本頁)• ----· 1 -1-I Printed A7 B7 by the Staff Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy V. Description of the invention (8) According to the fourth feature of the present invention, it is applied to the second compounding agent containing conductive particles Or / and reduced pressure 'Therefore, when connected, the dryness of the second curing agent with thermosetting properties may be equal to or lower than that of the second curing agent with thermosetting properties. Therefore, the viscosity of the second adhesive in the molten state at the time of connection can be made as the viscosity of the first adhesive layer is low, as described above in the first feature of the present invention, and therefore the second adhesive The conductive material in is buried with high and dazzling dryness "No! In the dry layer, or a part of the conductive material is trapped on the electrode to be connected in contact. Therefore, the conductive material can be firmly and accurately guarded between the opposing electrodes. In addition, since the dryness of the second dry layer is higher than the dryness of the second dry layer, not only the conductive material can be trapped but also no bubbles are contained in the area between adjacent protruding electrodes. Preferably, in the application of the hot wish, the $ 1 and the second binder layer are heated under pressure so that the first and second binders are in the molten state. The viscosity of the binder is 1,000 poises or less than that of the first binder. In addition, at the time of applying the hot pressing step, the connecting sheet is preferably heated under pressure by a heat source installed near the first adhesive layer. If the heat source is installed close to the first! If the compounding type is used and thermosetting resins are used for each compounding type, then the degree of dryness of the second compounding agent farther from the heat source and farther from the heat source needs to be known * lower than that of the first compounding agent. According to the fifth feature of the present invention, the present invention provides a method of electrically connecting electrodes to a pair of Qisaki electrodes. The method includes: placing a connecting piece including a first genus and a second genus Between a pair of electrode arrays, and the arrangement of the pair of electrode arrays facing each other, the first 丨 adhesive layer is made of 11 pieces of paper-scale paper towel national-National Standard (CNS) A4 secret (210X297 ^^ 7 ( (Please read the precautions on the back before filling this page)
B7 五、發明説明(9 ) 有電絕緣性質及熱固性質之第1粘合層所製成,第2粘合 層置於第〗粘合層之上,而且包含一導電材料及具有電絕 缘性質及熱固性質之第2粘合劑;當第1及第2粘合劑在 培融狀態下於加壓下加熱第2及第I粘合層之第1施加熱 壓步驟’以使導電材料和各對對峙之電極相接觸,藉此使 各電極對作電連接;檢視各電極對之電導性之電流供應檢 查步驟;以及在檢查步驟之後再於加壓下加熱第2及第] 粘合層以硬化粘合劑之第2施加熱壓步驟。 根據本發明之第5特徵,施加熱壓之步驟乃分成二階 段以上,所以電流供應檢查步驟及已連接之電極之修補步 驟可依需要在各階段間進行,因而操作效率及產品品質可 改進。 最好,電流供應檢查㈣在當第1及/或第2枯合劑之 枯合力增加至電贼連接可被維狀程度時進行。 在此情況下,由於連接結構維持不變 查步驟可容易及可靠地進行。 粘合力可藉由加熱來部份加速粘合劑 經 濟 部 中 A 標 準 員 工 消 t 合 社 印 製 ,故電流供應檢 之硬化反應來增 溫度進而增加彈 加或者可藉由使連接部份之溫度低於連接 性模數來增加。 r , , , 疋在^電拯對在加壓下王 仃,如此則電極之連接可被維持以達成電連接。丁 此外,在此情形下,電流供麻拾 行。 U供a查可容易且可靠地另 第2及第1枯合屬在 最好,在第1施加熱壓步驟時 J2 本紙張尺度適用中國國家標準(CNS ) A4規格(2丨〇X 297公趁)B7 5. Description of the invention (9) It is made of the first adhesive layer with electrical insulation and thermosetting properties. The second adhesive layer is placed on the first adhesive layer and contains a conductive material and has electrical insulation properties And a thermosetting second adhesive; when the first and second adhesives are heated under pressure in the melted state, the first and second adhesive layers are applied in the first hot pressing step to make the conductive material and The pairs of opposing electrodes are in contact, thereby electrically connecting the pairs of electrodes; the current supply inspection step for inspecting the electrical conductivity of the pairs of electrodes; and heating the second and second adhesive layers under pressure after the inspection step The second step of applying heat and pressure is to harden the adhesive. According to the fifth feature of the present invention, the step of applying the heat pressure is divided into two or more stages, so the current supply inspection step and the repairing step of the connected electrode can be performed between the stages as required, so that the operation efficiency and product quality can be improved. Preferably, the current supply check (iv) is performed when the coupling force of the first and / or second coupling agent is increased to such an extent that the electrical connection can be maintained. In this case, since the connection structure remains unchanged, the checking step can be performed easily and reliably. The adhesive force can be partially accelerated by heating to be printed by the A Standard Employee in the Ministry of Economic Affairs, so the hardening reaction of the current supply inspection can increase the temperature and increase the elasticity or can be made by connecting the part The temperature increases below the connectivity modulus. r,,, 喋 在 ^ Electricity saver is under pressure, so that the electrode connection can be maintained to achieve electrical connection. D In addition, in this case, the electric current is supplied. U for a check can be easily and reliably the second and the first with the best combination, in the first step of applying heat and pressure J2 This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (2 丨 〇X 297 take advantage of)
3^·1328 五 經濟部中央標準局員工消費合作社印製 ΑΊ Β7 、發明説明(10) — ~~~ 加壓下加熱以使當第丨及第2粘合層在熔融狀態時,第二 粘合劑具有相等或低於第}粘合劑之粘度。 籍由使在熔融狀態下之第2粘合劑’具有相等或低於 第I粘合劑之粘度,如在本發明之第1特徵中所述,在電 極連接時,在第2粘合層中之導電材料乃埋入具有較高熔 融枯度之第i枯合層之中,或者一部份之導電材料乃被捕 集在要被連接接觸之電極之上。因&,導電材料可被可靠 地留在要被連接之電極之上。 MA之簡單説明 第1圖爲依照本發明之一連接片之概略剖視圖; -圖爲依照本發明之另—連接片之概略剖視圖; 第3A至3G圖顯示用在本發明之各種導電粘合層 面; 度之關第_圖爲依照本發明之^合磨―錢及速接溫 第Γ二5:2依照本發明之一連接步驟之剖視圖; 圖馬-概略剖視圖顯示使 片疋電極連接結構之例子; 《連接 第圖爲—概田各刻視圖顯示使用依、 片又電極連接結構之另一例子; 、 <一連接 …電接連接::::圖:::使用依照本發明之-連接 片之電接連:結用依照本發明之 13 μ氏張尺錢财® I-------^---抽衣------IT------^ (請先閱讀背面之注意事項再填寫本頁) 連接 A4^fe· ( 210X297-^# ) A/ A/3 ^ · 1328 5th Ministry of Economic Affairs Central Standards Bureau employee consumer cooperative printed ΑΊ Β7, invention description (10) — ~~~ Heating under pressure to make the second sticky layer when the first and second adhesive layers are in a molten state The mixture has a viscosity equal to or lower than that of the binder. By making the second binder in the molten state have a viscosity equal to or lower than that of the first binder, as described in the first feature of the present invention, when the electrodes are connected, the second adhesive layer The conductive material in is buried in the i-th cladding layer with a higher melting dryness, or a part of the conductive material is trapped on the electrode to be connected and contacted. Due to &, the conductive material can be reliably left on the electrode to be connected. Brief description of MA. FIG. 1 is a schematic cross-sectional view of a connecting piece according to the present invention;-FIG. Is another schematic cross-sectional view of a connecting piece according to the present invention; FIGS. 3A to 3G show various conductive adhesive layers used in the present invention Figure 1 is a cross-sectional view of a connection step according to the present invention according to the present invention: ^ he mill-money and quick connection temperature Γ 2 5: 2 according to one of the present invention; Figure horse-a schematic cross-sectional view showing the connection structure of the electrode Example; "The connection picture is-another example of the outline view of each field using the connection structure of the electrode, the piece and the electrode; < a connection ... electric connection connection :::::::: use according to the invention- The electrical connection of the connecting piece: use the 13 μ's Zhang Chi Cai according to the invention® I ------- ^ --- pulling clothes ------ IT ------ ^ (please Read the precautions on the back before filling in this page) Connect A4 ^ fe · (210X297-^ #) A / A /
五、發明説明(11 ) 第10圖爲一半導體a g ' 極在一基質上之二…電極侧—電 以下將參考圖式說明本發明。 第】圖顯示依照本發明之一實施例之連接片10之 剖視圖。本發明之連接片10是一多屬 2及一第2粘合層丨。 〇層 ”屬1乃由導電材料3及—第2枯合 而且在施壓方向(厚度方向)具有導電性,亦斤 異性(anistropic)導電度。 向 第1粘合劑層2乃形成在篦7杜 具有電絕緣性質。㈣合#心一側’而且 如第2圖所示,具有絕緣性f之第丨枯合^可 在第2黏合層之各側。此外,雖未示 巴成 枯合層2以_層結構之連= 進其性質,例如粘合性質。 ·^日 ^第丨輯示,村依需要將—可_<分 =第1及第2枯合層所製成之連接片<表面,以除去^ 經 濟 部 中 襟 率 為 員 工 消 費 合 作 社 印 製 止灰層等枯合至此連接片。雖未圖示: 者。料枯至第2枯合看1而非第1枯合層2或兩 所示之連接片IG<情況,分離片 :絕緣性質之第丨枯合看2相接觸,因而,例:具 片暫時枯至具有平電極之連接片時,此速接:連接 有、小不平坦度之平電極侧之第2枯合層!相枯合面 14 311328 A7 B7 經濟部中央標隼局貝工消費合作社印裝 ——, 五 '發明説明(12 吏連接更谷匆且改善操作效率。最好分離片$爲速續膠帶 /式不論何種方式,連接步驟均可連續及自動地進行。 久錄玉,圖貝不具有電導度之第2枯合層1在施磨方向之 ^此$2枯合廣1如上述乃是由包含導電材料3 2粘口劑4所製成。對於導電材料3,可使用導電顆 、果、魟大小及形狀可改成各種方式,第3 Α至3G圖 ^ —最佳<顆粒直徑是導電材料3可形成垂直於 一枯。劑4〈厚度方向之單-顆粒層,亦即如第3C至 'E圖所示’較佳顆粒直徑大約相等於第2枯合劑4之厚 二.^此’導電材料3可很容易地捕集在電極上, 因=在連接步料不會自由流動。在當導電材料3之顆 ’:·幾乎相等於第2枯合劑4之厚度時,可藉由簡單地 讓枯合屬與電極接觸而達成電導通。 最好’導電材料3對第2枯合屬4之比率是約〇 !至 :體::’更奸是1至15V°1%以容易地達成各向異性導電 二:外第方向易於得到導‘電性以達到高的 '"層’最好應該具有藉由薄膜形成方法所 可得到之最小厚度。第2枯合心之厚度最好是2,或以 下,更好疋丨Ομιτι或以下。 導電材料3最好包括在第2枯合層}中之具有各種不 同大小<球形顆粒’如第从至3E圖所示,因爲這種導電 顆1""可谷力地製出,而且亦容易取得。如第3F圖所示,此 導電材料3可爲—導體平舖在第2枯合劑4之通孔之内周 表面上,或如第3G圖所示爲一導電絲,如電線,在厚度 本紙張尺度適用中國國家橾 (請先閱讀背面之注意事項再填寫本頁) -裝. 、11 f線 15 A7 A7 經濟部中央標準局員工消費合作社印製 五、發明説明(13 '~ -- 方向穿透第2粘合層4。 用作導電材料之顆粒包括Au,Ag,Pt,Ni,Cu, W Sb ’ Sn ’焊錫等金屬顆粒以及碳顆粒等。此外,這 丄導電顆粒或由非導電材料如玻璃,陶瓷材料及塑膠材料 所製成<大分子顆粒當作芯部,然後再用前述材料之一種 塗覆其上作爲導電層。 除了可使用具有塗覆以絕緣層之導電芯部之絕緣塗覆 〜顆粒作爲導電材料3外,亦可將玻璃,陶瓷材料或塑膠 材料之絕緣顆粒與導電顆粒(導電材料)3 一齊在第2粘合 劑4中混合。在此情形下,第2粘合層乃用來增強分解能。 對於導電材料3,必需一個以上之導電顆粒,最好是 越多顆粒與微細電極相接觸。有鑑於此,導電顆粒之顆粒 4最好爲1 5 μ1Ώ或以下,更好是在1 pm至7 μηι包括1 7‘um如果顆粒直徑小於1 μΐτι,則不易達成與電極之接 觸。 導電材料3之導電顆粒最好在顆粒直徑是均勻的。均 勾的顆粒直徑在連接時減少從對峙電極間導電顆粒之外 流。 最好使用以導電層塗覆塑勝材料之大分子芯部之顆粒 或池可挺金屬如焊錫之顆粒作爲導電材料3。此乃因爲這 些材料當施加以熱或壓力時變形,所以和電極接觸之面積 在連接步驟時會因變形而增加。特別在當使用大分子芯部 時’在惊點到達前,這些顆粒並不會有良好之流動性,而 當爲焊錫時,軟化狀態可有利地在連接溫度之廣泛範圍内 本紙張尺度適㈤巾國家縣() A4規格(2⑴KM?公慶) (請先閱讀背面之注意事項再填朽本頁) .I---- -- i I I--- I —--i i ^^^1 T- 1 n< I - - ·ί= i In SU328 五、發明説明(]4 控制,故可克服電極在厚度及平坦上之不均勾。 =佳之導電材料包括N"w等之硬金屬顆粒, 二=面具有多凸出之顆粒。此乃因爲當此 " 才貧黏土電極或金屬(電輕)因而巧 有-戟化物薄膜或污染層存在,仍可達到低連接電阻, 因而改善其可靠性。 第2粘合劑4及第丨粘合層2之粘合劑(第】粘合劑 可由各種«讀或光會魏<討塑#料所製成。所用 《材料最好具有高的枯合性。在這些提到之枯合劑中,硬 化材料較佳,因爲他們具有連接步驟後之優良熱電阻及满 氣電阻。包含有潛硬化劑之環氧枯合劑特別佳, 可在短時間内硬化,因而改良連接工作之效率,而且由於 他們又分子結構亦有良好之粘合性。潛硬化劑具有相對清 楚之活化點,在此活化點反應會因熱及/或壓力而起始,而 且較好用,因爲本發明包括施加熱及/或壓力。 經濟部中央標準局員工消費合作社印製 用在本發明之硬化劑最好具有40至.200。(:之活化溫 度。如果活化溫度低於4〇 ,由於活化溫度與室溫之声如 此小,以致於必需保持較低之溫度,相反地,如果活化溫 度超過200 °C,其他的連接元件會被熱所影響。因此,較 佳的活化溫度範圍是50至丨5〇 T。本發明所指的活化溫度 乃是環氧樹脂和硬化劑之混合物樣品之尖峰溫度,其乃是 用一 DSC(差示掃描卡計)測量而混合物以1 〇 t /分之速率 逐漸加熱。活化溫度乃藉由考慮具有低活化溫度之硬化劑 在反應性上較佳但具有較差之適用期來決定。 17 本紙張尺度適用中國國家標準(CNS ) A4規格(21〇>< 297公釐) A7 -—--- 五、發明説明(15 般可収環氧#合劑乃是那些包含大分子型式之尸 戰樹脂;固體環氧樹脂及液體環氧樹脂;或者用氨基甲二 乙翰,聚醋,丙稀酸椽膠,職㈣-丁二稀椽膠),秒酬,5. Description of the invention (11) Figure 10 is the second of a semiconductor a g 'pole on a substrate ... electrode side-electricity The invention will be explained below with reference to the drawings. Fig. 1 shows a cross-sectional view of the connecting piece 10 according to an embodiment of the present invention. The connecting sheet 10 of the present invention is a multi-layer 2 and a second adhesive layer. The "layer 1" is composed of the conductive material 3 and the second layer and has electrical conductivity in the pressure direction (thickness direction), and also anisotropic conductivity. The first adhesive layer 2 is formed in the grate 7 Du has electrical insulation properties. ㈣ 合 # 心 侧 'And as shown in Figure 2, the first ^ ^ with insulation f ^ can be on each side of the second adhesive layer. In addition, although not shown Layer 2 is connected with _ layer structure = into its properties, such as adhesive properties. · ^^^ The first series shows that the village will be made of-may _ < points = the first and second dry layers as required The connecting piece &surface; to remove ^ The Ministry of Economy ’s central rate is printed by employees ’consumer cooperatives to prevent the ash layer and the like from joining. Although it is not shown in the figure: it is expected to be the second to see the first one instead of the first one. 1 Drying layer 2 or the connecting piece IG < case, separator: the first insulating layer of the insulating nature is 2 contact, so, for example: when the piece is temporarily dried to the connecting piece with a flat electrode, this speed Connect: Connect the second dry layer on the flat electrode side with small unevenness! Phase dry surface 14 311328 A7 B7 Ministry of Economic Affairs Central Standard Falcon Bureau shellfish consumer cooperation Printing——, Five'Instructions for the invention (12 officials connect more quickly and improve the operation efficiency. The best separator is a quick-release adhesive tape / type. The connection steps can be performed continuously and automatically regardless of the method. 久 录 玉, Tubei does not have the conductivity of the second dry layer 1 in the grinding direction ^ this $ 2 dry wide 1 as described above is made of conductive material 3 2 adhesive 4. For conductive material 3, can Using conductive particles, fruit, stingray size and shape can be changed to various ways, the third 3A to 3G Figure ^-the best < particle diameter is that the conductive material 3 can be formed perpendicular to a wither. Agent 4 <Single-particle in thickness direction Layer, that is, as shown in Figures 3C to 'E', the preferred particle diameter is approximately equal to the thickness of the second binder 4. The 'conductive material 3 can be easily trapped on the electrode, because = in the connection The material will not flow freely. When the particles of the conductive material 3 are almost equal to the thickness of the second compound 4, the electric conduction can be achieved by simply contacting the compound with the electrode. It is best to conduct The ratio of the material 3 to the second genus 4 is about 〇! To: body :: 'The more rape is 1 to 15V ° 1% to easily achieve each direction Sexual conductivity 2: The outer direction is easy to obtain the 'electricity' to achieve a high '" layer' should preferably have the minimum thickness that can be obtained by the film forming method. The thickness of the second dry center is preferably 2, Or less, more preferably Ομιτι or less. The conductive material 3 is preferably included in the second dry layer} with various sizes < spherical particles' as shown in Figures 3 to 3E, because such conductive particles 1 "; " can be made with strength and easy to obtain. As shown in FIG. 3F, this conductive material 3 can be-the conductor is laid flat on the inner peripheral surface of the through hole of the second mixture 4, or as The 3G picture shows a conductive wire, such as a wire, in the thickness of this paper standard is applicable to the Chinese national custody (please read the precautions on the back before filling in this page)-installed., 11 f line 15 A7 A7 Employee of Central Bureau of Standards, Ministry of Economic Affairs Printed by the consumer cooperative V. Description of the invention (13 '~-direction penetrates the second adhesive layer 4. The particles used as the conductive material include metal particles such as Au, Ag, Pt, Ni, Cu, W Sb 'Sn' solder, and carbon particles. In addition, these conductive particles or made of non-conductive materials such as glass, ceramic materials and plastic materials < macromolecule particles are used as the core, and then coated with one of the aforementioned materials as a conductive layer. In addition to the use of insulating coating ~ particles with a conductive core coated with an insulating layer as the conductive material 3, the insulating particles of glass, ceramic material or plastic material can also be combined with the conductive particles (conductive material) 3 in the second Mix in binder 4. In this case, the second adhesive layer is used to enhance the decomposition performance. For the conductive material 3, more than one conductive particle is necessary, and it is preferable that the more particles are in contact with the fine electrode. In view of this, the particles 4 of the conductive particles are preferably 15 μ1Ώ or less, more preferably 1 μm to 7 μm including 17 μm. If the particle diameter is less than 1 μlτι, it is difficult to achieve contact with the electrode. The conductive particles of the conductive material 3 are preferably uniform in particle diameter. The uniform particle diameter reduces the outflow of conductive particles between the opposing electrodes when connected. As the conductive material 3, it is preferable to use particles of a macromolecular core coated with a plastic layer or conductive particles such as solder particles. This is because these materials are deformed when heat or pressure is applied, so the area in contact with the electrode will increase due to deformation during the connection step. Especially when using a macromolecular core, these particles will not have good fluidity before the start point is reached, and when it is solder, the softened state can advantageously be in a wide range of connection temperature. The paper size is suitable. Towel Country () A4 specification (2⑴KM? Gongqing) (Please read the notes on the back before filling this page) .I -----i I I --- I ---- ii ^^^ 1 T- 1 n < I--ί = i In SU328 V. Description of the invention (] 4 Control, so it can overcome the uneven thickness and flatness of the electrode. = The best conductive materials include hard metal particles such as N " w , Two = the surface has more protruding particles. This is because when this " is poor in clay electrodes or metals (electrically light) and therefore there is a halberdide film or pollution layer, it can still achieve low connection resistance, thus improving its Reliability. The second adhesive 4 and the adhesive of the first adhesive layer 2 (the first) adhesive can be made of various materials such as "Reading or Guanghui Wei & discuss plastic". The material used is preferably High drying ability. Among the drying agents mentioned, hardening materials are better because they have excellent thermal resistance and Gas resistance. Epoxy binders containing latent hardeners are particularly good and can be hardened in a short time, thus improving the efficiency of the connection work, and because they have good adhesion to the molecular structure. Latent hardeners are relatively clear Activation point, where the activation point reaction will start due to heat and / or pressure, and it is better to use, because the present invention includes the application of heat and / or pressure. Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs used in the present invention The hardener preferably has an activation temperature of 40 to .200. (: The activation temperature is lower than 40. Since the activation temperature and the room temperature are so small, it is necessary to keep the temperature low, on the contrary, if activated If the temperature exceeds 200 ° C, other connecting elements will be affected by heat. Therefore, the preferred activation temperature range is 50 to 丨 50 T. The activation temperature referred to in the present invention is a mixture sample of epoxy resin and hardener The peak temperature is measured with a DSC (differential scanning card meter) and the mixture is gradually heated at a rate of 10 t / min. The activation temperature is by considering hardening with a low activation temperature The agent is better in reactivity but has a poorer application period to determine. 17 This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (21〇 < 297mm) A7 ------ V. Description of the invention (15 般 可 收 催 # Mixtures are those that contain macromolecular forms of cadaveric resins; solid epoxy resins and liquid epoxy resins; or urethane, ethyl acetate, acrylic acid rafters, vocational (iv) -Ding Erxian (rafter glue), second payment,
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I 背I 面 之I 注 ί 意| 事I 項 再 嗔 I I裳 頁I 2龍等改質之環氧樹脂作爲主成份者,這些環氧枯合劑乃 ,、硬化劑,觸媒,偶合劑,填料等混合。 第2拍合淘4及第^黏合看2之第!枯合劑,依 發明在他們之各別的枯合劑組成中,最好包括ι%或以:'之 共同材料,更好是5%或以上之共同材料。以乃是因爲 I及第2枯合屬2及!間之介面的枯合強度可被加強。因爲 共同材料’主成份,硬化劑等可用來增加效能。 訂 本發明之一特徵在於在連接步綠期間,當第2枯合 4在溶融狀態時,其枯度低於第i枯合屬2之枯合劑:枯 度。此特徵在後文中將參考第4及第5圖作説明。 經濟部中央標準局員工消費合作杜印製 第4圖爲一概略圖説明在加熱步踩期間$ 2枯合劑4 及第1粘合層2之溫度和粘度之關係。依照本發明,在連 接電極之溫度時(在圖中以點線表示),第2枯合劑*(圖中 以A表示)具有相等或低於第2枯合廣2之第!枯 中以B表示)之枯度,而枯度之差,亦即b-八爲泊或 以下’最好是1至200泊。如果枯度差太於1〇〇〇泊,則導 電材料3及電極將不充份接觸。此外,第2枯合劑*本身 之枯度變得如此低’因而會引起導電顆粒之外流,而且氣 泡易於包含在鄰近電極之區域中,因而降低連接之可^ 性,特別是濕氣電阻。 如果第2枯合劑4之枯度高於第1枯合屬2之枯度(前 18 本紙張尺度適财關家辟(CNS) A7 B7 五、發明説明(16 ) ~~~------- 述軲度差爲—負値),則第2枯合劑4對第!枯合屬2之相 :粘度太高,以致導電顆粒及電極將不能充份“,而使 仔不能連接對峙之電極。 亦即,有鑑於電極連接與流動性之間的平衡,粘度差 有-較佳之範園以使導電顆粒可被捕集在電極上,而且確 保顆粒與電極之有效接觸,如後文參考第5圖所作之説 明。當進行連接時,在第二枯合層】中之第2枯合劑:枯 度,最好是500泊或以下,而第1枯合層2之枯度應該最 好爲1000泊或以下。 從實用之觀點來看,最好達接溫度在約50至300之 間。如果連接溫度小於50 °c,卿合劑之反應速率緩慢, 會降低大量生產之效率;如果自連接溫度高於·。C,附 攻凡件如基質則易被熱所損害。考慮此點以及所用硬化劑 之居化恤度以決定連接溫度。連接溫度之一較佳範園是約 70 至 250。。。 第5圖顯示依據本發明使用連接片1〇之連接方法。 第5圖之實施例顯示—連接結構,其中一半導體基質 11之凸出電極(凸出部,bump) 12及一基質Ha之平電極Η 經濟部中央標準局員工消費合作社印製 乃連接^舞。 在第5Α所不之接觸過程中,電極12被壓至具有絕緣 性質之第1粘合層2之表面,因而導電材料3變成埋入或 其一部份被熔融狀態具有高粘度之第丨粘合層2所捕集, 所以導電材料3之位覃被固定。接著,在第5B圖所示之流 動過程中,當第1絕緣粘合層2軟化時,導電材料3和凸 19 本纸張尺度適用中國國家標準(CNS ) Λ4規 3ϋ3^3 A7 B7 五、發明説明(π ) " 請 | 先I 閱 I 讀 背i 而 I 5 >王! 意 ! 事 u 項 ί # | 填丨 寫奘 本, 頁 出電極12接觸,因而在凸出電極12和基質lla之平坦電 極13之電導通完成,而導電材料3亦和基質113之平坦電 極13相接觸。在此狀態下,第1粘合層2用來維持導電材 料3,而且亦將鄰近之凸出電極互相連接,並且不會有氣 泡包含在鄰近凸出電極内之區域中。 最好,在此情況下,連接片1〇置入而使得第丨粘合層 2面向凸出電極12以促使第]粘合層2軟化。此外,此連 接片最好在加壓下用一裝設在第丨粘合層側之熱源加熱以 使得第2粘合層4之粘度低於第〗粘合層2之枯度。 玎 最好施加熱壓之步驟分成二個以上之階段進行,以使 得可在施加熱壓步驟之分開階段之間,依需要進行電流供 應檢查步驟及/或修補步驟。藉由將熱壓施加步驟分成二個 以上之階段就能控制流程中之粘度,此流程體隨著熱硬化 粘合劑之硬化反應,因而可達成無氣泡之滿意連接。此外, 修補性,此乃和硬化枯合劑有關之問題,可由此枯合劑賦 予。 . I 線 經濟部中央標準局員工消費合作社印製 此電流供應檢查步驟10,可藉由將連接片之粘合力增 加至已連接之電極可被維持在定位或者藉由施加壓力至電 極連接部份來進行之。連接片之枯合力可藉由加叙部份增 加枯合劑之硬化反應,或者藉由例如使連接部份之溫度低 於連接溫度來增加彈性模數之方式來增加。電流供應檢查 步驟’例如可藉由將引線從個別電極12及!3延伸出,然 後測量連接電阻或者進行性能測試以進行之。 在電流供應檢查步驟中亦可分別或—齊進行導電材料 20 (210x297公釐) 經濟部中央標準局員工消費合作社印製 A7 ~~- _____ B7__ 五、發明説明(18 ) ~ ~' — 3和電極12及13間之接觸狀態之目視檢查步驟。 修補性爲表示藉由溶劑等移除多餘之粘合劑而使之可 再連接電極之讓粘合劑被清除之性質。一般說來,在—硬 化粘合劑硬化之後,產生交聯結構而使得粘合劑不能藉由 加熱熔化或不溶於溶劑,這些問題使得不易清潔。因而, 在施加熱壓之第丨階段時,對應電極均進行電流供應檢查 而連接片乃在導電材料3與凸出電極成接觸之狀態,因而 例如可在凸出電極12和平電極13之間導通。而如果在此 時發現有不良之電極連接,就可立即修補連接部份,隨後 再連接。當第I階段完成時,粘合劑2及4兩者均在一未 硬化或硬化不足之狀態,因此電極可很容易地剥除,而粘 合劑可很容易地沈浸在一溶劑中,而有利於修補工作。 測量熔融粘度之方法並無特別限制,只要第2粘合劑 4及第1粘合層(第1粘合劑)2之粘度可互相比較即可。然 而,最好使用相同之方法,而且例如可使用一般旋轉式粘 度计,其可在鬲溫作測量。例如如果使用一熱固化組合物, 其反應在進行且在測量時會改變粘度,可使用一硬化劑被 移除之模式組合物來測量其値。 —般用來得到在連接時第2粘合劑4及第1粘合層2 疋熔融粘度差之方法包括藉由材料之分子量或分子之糾纏 適當地結合特性粘度(mtmisic Visc〇sity),適當地選擇填料 作爲稠化劑及控制硬化劑系統反應速率之差異。 爲了生產依照本發明之連接片,第2粘合層1及第! 粘合屠2可層合一齊或者例如連續地將其中之一塗覆至另 21 本紙張尺度制巾準(CNS ) Μ規格(210^7^^· -------;II批衣I — (請先閲讀背而之注意事項再填"本頁) 訂-----.’線 .I - - - 1 -— ,I -I ..... · 經濟部中央標準局員工消費合作杜印製 五、發明説明 片 <上,以得到一積層片。 及生產之,法本,明〈速接片1G之其他電極連接結構,以 法,在下文中將參考第6_8圖作説明。 圖例示了—結構,其中形成在一晶片基 出:極】2,藉由本發明之連接片1〇速接至基質⑴ :千Η。詳而言之,在此連接結構中至少-對互相對 庫ί電極^Λ—突出來’導電材料3置於凸出電極η及對 :你而導電材料3在第2枯合看1中分佈, 传在凸出電極12和對應平電極13區域之密度,高於 圍丸凸出電極<區域(15)之密度。此m黏合屬2圍 繞至少由晶片基質】1突出之各凸出電極12之基部之至少 外圍部份,以作爲絕緣層。此更能增進鄰近凸出電極12, 12之絕緣性能。此外,導電顆粒之密度最好在各凸出電拖 12與對應平電極13之間的連接部料加,以達到凸出電 極!2和平電極13間之可靠連接。 平電極13和晶片基質lla之表面齊平(等高)或者對晶 片基質高度上僅有極小之差異,如數微米以下。此種電極 一般藉由添加法或薄膜形成方法來形成。 第7圖例示了形成在一晶片基質上之凸出電極P 連接至形成在另一晶片基質13上之對應凸出電極12a上之 '情形。用在此連接結構之連接片10包括一第2粘合層1及 枯合至第2粘合層1兩側之二第1粘合層2及2a,如第) 圖所示之連接片10。第1粘合層2及2a圍繞著各凸出電 極12及12a之基部之周圍部份,而且與電極12及12a突 22 本紙張尺度適用中國國家標準(CNS ) A4规格(210X297公釐) I-1 H1- - 1 - ----------- I i II __ ί請先閲讀背面之注意事項再填寫本f) -=0 線 23 A7 B7 五、發明説明(20 出之各晶片基質11及lla之表面相接觸。第 驗例亦可確保鄰近電極之可靠的絕緣性能 圖所示之實 在第8圖所示實施例中,使用—連接結構 基質11乃備有凹陷電極丨6,而另—日 、日9片 X — π_山+ & 日日片基質Π a則備有 另-凸出電極12。在此連接結構中,凹陷電極μ可用在 第6圖所述之平電極π取代。 凹陷電極10之一例子是铭塾等1 形成在-半導體晶片等之前,而二凸,電極 緣W此絕緣看】8乃由二=要=用-絕 砟脸签㈣a 魏矽、虱化矽、聚醯 ^寺所水成’而通常具有约數微米之厚度。除了在前述 F'施例中所提到之停點夕卜 ΜPlease read ! I back the I side of the I Note ί Italian | Matter I item and then II page II I 2 dragon and other modified epoxy resin as the main component, these epoxy curing agent is, hardener, catalyst, coupling agent, Mixing of fillers, etc. 2nd beat Hetao 4 and ^ sticky watch 2nd! The binder, according to the invention, in their respective compositions of binders, it is preferable to include a common material of ι% or :, more preferably a common material of 5% or more. That's because I and 2 are together 2 and 2! The joint strength of the interface can be strengthened. Because the common material 'main component, hardeners, etc. can be used to increase performance. One of the characteristics of the present invention is that, during the connection step, when the second compound 4 is in a molten state, its dryness is lower than that of the second compound: dryness. This feature will be described later with reference to FIGS. 4 and 5. Du Printed by the Ministry of Economic Affairs, Central Bureau of Standards, and Consumer Cooperation. Figure 4 is a schematic diagram illustrating the relationship between the temperature and viscosity of the $ 2 mixture 4 and the first adhesive layer 2 during the heating step. According to the present invention, when the temperature of the electrode is connected (represented by a dotted line in the figure), the second compound * (represented by A in the figure) has the same or lower value than the second compound 2! The dryness is represented by B), and the difference in dryness, that is, b-eight is poise or below, preferably 1 to 200 poises. If the difference in dryness is too large, the conductive material 3 and the electrode will not be in sufficient contact. In addition, the dryness of the second binder * itself becomes so low 'that it causes outflow of conductive particles, and bubbles are easily contained in the area adjacent to the electrode, thereby reducing the possibility of connection, especially moisture resistance. If the dryness of the second dry mixture 4 is higher than the dryness of the first dry type 2 (the first 18 papers are suitable for the financial sector (CNS) A7 B7 V. Invention description (16) ~~~ ---- --- The difference between the degrees is -negative value), then the second mixture 4 pairs first! Phase 2 of the combination: the viscosity is too high, so that the conductive particles and the electrode will not be sufficient, and the child will not be able to connect to the opposing electrode. That is, in view of the balance between the connection of the electrode and the fluidity, the difference in viscosity is- The preferred range is to allow conductive particles to be trapped on the electrode, and to ensure effective contact between the particles and the electrode, as described below with reference to Figure 5. When making connections, in the second dry layer] The second dry agent: dryness, preferably 500 poise or less, and the dryness of the first dry layer 2 should be preferably 1000 poise or less. From a practical point of view, it is best to reach a temperature of about 50 Between 300 and 300. If the connection temperature is less than 50 ° C, the reaction rate of the Qing mixture is slow, which will reduce the efficiency of mass production; if the self-connection temperature is higher than · .C, all parts such as substrates are easily damaged by heat. Considering this point and the degree of incubation of the hardener used to determine the connection temperature. One of the preferred range of connection temperature is about 70 to 250 .. Figure 5 shows the connection method using the connection piece 10 according to the present invention. The embodiment of the figure shows-the connection structure, where A protruding electrode (bump) 12 of a semiconductor substrate 11 and a flat electrode of a substrate Ha. Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. It is connected. During the contact process that the 5A does not 12 is pressed to the surface of the first adhesive layer 2 with insulating properties, so that the conductive material 3 becomes buried or part of it is trapped by the first adhesive layer 2 with a high viscosity in the molten state, so the conductive material 3 The position is fixed. Then, during the flow shown in Figure 5B, when the first insulating adhesive layer 2 is softened, the conductive material 3 and the protrusion 19 are in accordance with the Chinese National Standard (CNS) Λ4 regulations 3ϋ3 ^ 3 A7 B7 Fifth, the description of invention (π) " please | first I read I read back i and I 5 > Wang! Italian! 事 u 项 ί # | fill in the book, the electrode 12 contacts, so The electrical conduction between the protruding electrode 12 and the flat electrode 13 of the substrate 11a is completed, and the conductive material 3 is also in contact with the flat electrode 13 of the substrate 113. In this state, the first adhesive layer 2 is used to maintain the conductive material 3, And also connect the adjacent protruding electrodes to each other, and there will be no bubbles included In the area adjacent to the protruding electrode. Preferably, in this case, the connection sheet 10 is placed so that the first adhesive layer 2 faces the protruding electrode 12 to promote softening of the] adhesive layer 2. In addition, this connection The sheet is preferably heated under pressure with a heat source installed on the side of the first adhesive layer so that the viscosity of the second adhesive layer 4 is lower than the dryness of the second adhesive layer 2. It is best to apply heat and pressure The steps are divided into two or more phases, so that the current supply inspection step and / or the repairing step can be performed between the separate phases of the hot pressing step as needed. By dividing the hot pressing application step into two or more phases, It can control the viscosity in the process. The process body follows the hardening reaction of the thermosetting adhesive, so that a satisfactory connection without bubbles can be achieved. In addition, the repairability, which is related to the hardening compound, can be given by this compound. The I-line of the Ministry of Economic Affairs Central Standards Bureau Employee Consumer Cooperative printed this current supply check step 10, which can be maintained in position by increasing the adhesive force of the connection piece to the connected electrode or by applying pressure to the electrode connection part. To do it. The cohesive force of the connecting piece can be increased by increasing the curing reaction of the cohesive agent, or by increasing the modulus of elasticity, for example, by making the temperature of the connecting part lower than the connecting temperature. The current supply inspection step can be performed by removing the leads from the individual electrodes 12 and! 3 Extend, and then measure the connection resistance or perform a performance test to perform it. In the current supply inspection step, conductive materials can also be separately or altogether 20 (210x297 mm) A7 ~~-_____ B7__ printed by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (18) ~ ~ '— 3 and Visual inspection procedure for the contact state between the electrodes 12 and 13. Repairability refers to the property of removing the excess adhesive by using a solvent or the like to make it reconnectable to the electrode and allowing the adhesive to be removed. Generally speaking, after the hardened adhesive is hardened, a cross-linked structure is generated so that the adhesive cannot be melted by heating or is insoluble in the solvent. These problems make it difficult to clean. Therefore, at the first stage of applying the heat pressure, the corresponding electrodes are checked for current supply and the connection piece is in a state where the conductive material 3 is in contact with the protruding electrode, and thus can be conducted between the protruding electrode 12 and the flat electrode 13, for example . However, if a bad electrode connection is found at this time, the connection part can be repaired immediately and then connected again. When the first stage is completed, both adhesives 2 and 4 are in an unhardened or underhardened state, so the electrode can be easily peeled off, and the adhesive can be easily immersed in a solvent, and Conducive to repair work. The method of measuring the melt viscosity is not particularly limited, as long as the viscosities of the second adhesive 4 and the first adhesive layer (first adhesive) 2 can be compared with each other. However, it is preferable to use the same method, and for example, a general rotary viscometer can be used, which can be measured at the temperature. For example, if a heat-curing composition is used and its reaction is carried out and the viscosity is changed during the measurement, a model composition with a hardener removed can be used to measure its value. Generally, the method used to obtain the second adhesive 4 and the first adhesive layer 2 at the time of connection is a method in which the difference in melt viscosity includes properly combining the intrinsic viscosity (mtmisic viscosity) by entanglement of the molecular weight or molecules of the material, as appropriate Choose filler as thickener and control the difference of reaction rate of hardener system. In order to produce the connecting sheet according to the present invention, the second adhesive layer 1 and the first! The adhesive paste 2 can be laminated together or, for example, one of them can be continuously applied to the other 21 paper-scale tissue preparation standards (CNS) M specifications (210 ^ 7 ^^ · -------; II batch of clothes I — (please read the precautions before filling in the “quote” page) Order -----. '线 .I---1 -—, I -I ..... · Central Bureau of Standards, Ministry of Economic Affairs Employee consumption cooperation du printing 5. Invent the description sheet < to get a laminate. And the production, the legal text, clearly <the other electrode connection structure of the quick connection sheet 1G, in order to refer to the following figure 6_8 For illustration. The figure illustrates a structure, in which a chip is formed on the base: pole] 2, which is connected to the substrate by the connection sheet 10 of the present invention at a speed of ⑴: 千. In detail, in this connection structure at least- Pairs of opposite electrodes ΛΛ-protruding come 'the conductive material 3 is placed in the protruding electrode η and the pair: you and the conductive material 3 is distributed in the second combination of 1, see the protruding electrode 12 and the corresponding flat electrode 13 The density of the area is higher than the density of the area around the protruding electrode < area (15). This m-bonding belongs to at least the periphery of the base of each protruding electrode 12 protruding at least from the wafer substrate It can be used as an insulating layer. This can improve the insulation performance of the adjacent protruding electrodes 12, 12. In addition, the density of the conductive particles is preferably added at the connection between each protruding electric drag 12 and the corresponding flat electrode 13, In order to reach the protruding electrode! 2 and the reliable connection between the flat electrode 13. The surface of the flat electrode 13 and the wafer substrate 11a are flush (equal height) or there is only a small difference in the height of the wafer substrate, such as a few microns or less. Such electrodes are generally It is formed by an additive method or a thin film forming method. FIG. 7 illustrates the case where the bump electrode P formed on a wafer substrate is connected to the corresponding bump electrode 12a formed on another wafer substrate 13. The connecting sheet 10 of this connecting structure includes a second adhesive layer 1 and two first adhesive layers 2 and 2a laminated to both sides of the second adhesive layer 1, as shown in FIG. The first adhesive layers 2 and 2a surround the surrounding parts of the bases of the protruding electrodes 12 and 12a, and protrude from the electrodes 12 and 12a. 22 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) I -1 H1--1------------ I i II __ ί Please read the precautions on the back before filling in this f)-= 0 line 23 A7 B7 5. Description of the invention (20 out of The surfaces of the wafer substrates 11 and 11a are in contact. The first verification example can also ensure the reliable insulation performance of the adjacent electrodes. As shown in the figure, in the embodiment shown in FIG. 8, the substrate 11 with the connection structure is provided with concave electrodes. 6, and the other-day and day 9 tablets X-π_ 山 + & day and day film substrate Π a is provided with another-protruding electrode 12. In this connection structure, the concave electrode μ can be used as described in Figure 6 The flat electrode is replaced by π. An example of the recessed electrode 10 is that Ming Yu et al. 1 was formed before the semiconductor wafer, etc., and the two convex, the electrode edge W is insulated. Wei Si, Si Hua Si, and poly ^ ^ The water of the temple is usually 'thickness of about a few microns. In addition to the aforementioned stop point Xi Bu
Mm ®所以連接構造具有可 降低成本〈優點’因爲其不必在晶片上形成凸出電極。 =6至8圖所示之實施例中,第二枯合層丨及第! 口曰2 <間具有—清楚之界線,但是亦可在他們所界面 間互相混合。 舰此外’如第9圖所示’包含在第1粘合層2中之導電 α 3 ’可具有1度其從各凸出電極12之頂部17向靠 經濟部中—準局i-消—作社印 =土質η之底部i9隨著距離漸漸降低。在此情形下,在 =頂邓17、’電極連接表面之導電材料之密度越高,則越 :于到可電連接。此外,在底部19 密度越低’财鄰近電極19,^^輯能就越高。 在第6至8圖所示之實施例中,晶片基質I】可包括— 妙、砷化鎵、磷化銨、戈 等。 m寶石、石播石、鐵氧磁體 本紙張尺 23 A7 —_ _ ___B7 五、發明説明(21) —~~ 基質丨丨a則可使用例如無機材料如聚酿亞胺聚酯等之 薄膜,玻璃纖維一環氧樹脂複合材料,矽半導體,玻璃, 陶瓷材料等。 請 I 先I 閲 I 讀I 背j 面 I 之 注 I 意 事1 項 i 再 填I 蓉裝 頁 要被連接之凸出電極12,12a除了凸出部外亦可包括 谷種電路及接頭(termillds)。此外,在第6至第8圖所示之 各種電極亦可依希望作適當之連接。 以下説明在晶片基質11上之凸出電極12,12a之電 極表面。 訂 在於晶片基質11上之凸出電極12,l2a,各電極在 半導體w片上之連接表面之長側與短側之長度之比値(L/D) 最好爲20或以下。此乃因爲在下述之本發明之實驗結果顯 不备L/D比値在上述範圍内之時,導電顆粒在使用依照本 發明之連接片10之後可被滿意地捕集在電極之上。 此第10圖清楚的表示,L/D比値代表在一半導體晶片 上又電極之連接表面之長側長度L對短側D之比値。 線 蛵濟部中央標準局員工消費合作社印製 ^雖然在半導體晶片等上之電極之連接表面的L/D比値 很小,卻可確保高的連接信賴度,因爲許多微小的導電顆 粒3可被界定在各微小凸出電極12之上,而且因爲有效地 使用昂貴的導電材料,故可節省資源。 爲何此多層連接片結構及電椏連接表面之L/D比値在 連接步驟之後與在互相對峙之電極上之導電顆粒3之捕集 性有密切之關係之理由尚不清楚,但是可假設此捕集性質 乃被粘合劑之流動方向性及熱傳性質所影響。 此外,在此情形下,在連接步驟期間,第2粘合劑4 本紙張尺颇财 ® CNS ) Α4» ( 210Χ297^?Τ~~~— 經濟部中央標準局員工消費合作社印製 五' ίίϊ^722~)〜 ' ---- y Λ融粘度低於第1絕缘粘合層2約1 000泊或以下。 根據本發明,導電材料3可被可靠地捕集在凸出電極 12之上 ’因而使得導電度及連續性測試之可靠性加強。此 ’、】試了在當枯合劑是在一未硬化或硬化不足之狀態 下逖仃,因而有利於修補工作。 。在上迷之各種實施例中,連接片乃置於第I粘合層2 可面向凸出電極丨2之位置,因而鄰近凸出電極12,丨2間 之絕緣性能及分解能可改進。此外,在當第1粘合層2具 有車又向又溶融枯度時’導電材料更不易流向鄰近電極之區 域因爲第2粘合層】在連接時並未加壓。此外,第2粘 〇層】之導電材料3乃沿著表面均可地分佈在第2粘合 層,因而導電顆粒並不需相對於電極精確地定位,因而可 改善操作效率。 此外’第1枯合層2及第2粘合層1可適當地結合以 得到苻合目的之所希望粘合度,例如配合所用之電極基質 之材料,因而可用材質之選擇性増加,而且連接可靠性亦 增,因爲在連接部份等之氣泡會減少。粘合層之一可具有 對一溶劑之溶解度或溶脹特性或者二粘合層具有不同之熱 電阻,不論在何種情況均可賦予修補性,而使得連接片可 容易地從基質表面剥離亦使得可再連接。此外,粘合層可 作適當地結合以與所用之電極基質之材質配合,以利於各 電極與導電顆粒之接觸,並簡化生產程序。此外,部份被 壓迫出連接部份之粘合層可當作密封材料提供強化及防濕 之效果。 本紙張尺度適用中國國豕標準(CNS〉Α4規格(2ΐ〇χ297公餐) -------,π-----i-----ί (請先閱讀背1&之注意事項耳填寫本頁) A7 A7 經濟部中央標準局員工消費合作社印製 五、發明説明(23 ) 實施你[ 依照本發明之各種實施例乃詳細敘述如下,但需注意 本發明並不限定於這些實施例。 〜 實施你 1_J__ (Π第2粘合層1之製備 以30/70疋比率混合苯氧樹脂(聚合環氧樹脂,聯合碳 石公司之ΡΚΗΑ)及包含微膠囊潛硬化劑之液體 (NOVACUREMX-3921,旭化學工業株式會社,環氧當量: 185,活化溫度:n8t:)得到含3〇%乙酸乙酯之溶二了於 此溶液中加入8Vol%之導電顆粒,此導電顆粒乃藉由以Mm ® so the connection structure has the advantage of reducing costs <because it does not have to form a bump electrode on the wafer. = 6 to 8 in the embodiment shown in the figure, the second dry layer and the first! Mouth 2 < has a clear boundary, but it can also be mixed between them. In addition, the 'as shown in Fig. 9' conductive α 3 included in the first adhesive layer 2 may have 1 degree from the top 17 of each protruding electrode 12 toward the Ministry of Economy—quasi-bureau i-elimination— Zuosheyin = bottom i9 of soil quality η gradually decreases with distance. In this case, the higher the density of the conductive material on the surface of the electrode connection, the higher the electrical connection. In addition, the lower the density at the bottom 19, the closer to the electrode 19, the higher the energy. In the embodiments shown in FIGS. 6 to 8, the wafer substrate I may include Miao, GaAs, Ammonium Phosphide, Ge, etc. m gemstone, stone stone, ferrite magnet paper ruler 23 A7 —_ _ ___B7 V. Description of the invention (21) — ~~ Substrate 丨 丨 a can use films such as inorganic materials such as polyimide polyester, etc., Glass fiber-epoxy composite materials, silicon semiconductors, glass, ceramic materials, etc. Please I first I read I read I back j side I note I notice 1 item i then fill in I The protruding electrodes 12 and 12a to be connected can also include grain circuits and connectors besides the protruding parts ( termillds). In addition, the various electrodes shown in Figs. 6 to 8 can also be appropriately connected as desired. The electrode surface of the protruding electrodes 12, 12a on the wafer substrate 11 will be described below. The protruding electrodes 12, 12a provided on the wafer substrate 11, the ratio (L / D) of the length of the long side to the short side of the connection surface of each electrode on the semiconductor wafer is preferably 20 or less. This is because when the following experimental results of the present invention show that the L / D ratio is within the above range, the conductive particles can be satisfactorily trapped on the electrode after using the connection sheet 10 according to the present invention. As clearly shown in Fig. 10, the L / D ratio represents the ratio of the length L of the long side to the short side D of the connection surface of the electrode on a semiconductor wafer. Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs ^ Although the L / D ratio of the connection surface of the electrode on the semiconductor wafer is small, it can ensure high connection reliability because many tiny conductive particles It is defined above each micro-protruding electrode 12, and because expensive conductive materials are effectively used, resources can be saved. The reason why the multilayer connection sheet structure and the L / D ratio of the electrical connection surface is closely related to the catchability of the conductive particles 3 on the electrodes facing each other after the connection step is not clear, but it can be assumed that The trapping properties are affected by the flow direction and heat transfer properties of the adhesive. In addition, in this case, during the connecting step, the second adhesive 4 paper ruler Pocai ® CNS) Α4 »(210Χ297 ^? Τ ~~~ — Printed by the Ministry of Economic Affairs Bureau of Central Standards Employee Consumer Cooperative Five 'ίίϊ ^ 722 ~) ~ '---- y Λ melt viscosity is lower than the first insulating adhesive layer 2 about 1 000 poise or less. According to the present invention, the conductive material 3 can be reliably trapped on the protruding electrode 12 'thereby enhancing the reliability of the conductivity and continuity test. This',】 tried when the mixture is in an unhardened or underhardened state, which is conducive to repair work. . In the various embodiments described above, the connection sheet is placed at the position where the first adhesive layer 2 can face the protruding electrode 丨 2, so that the insulation performance and decomposition performance between the protruding electrode 12 and 丨 2 can be improved. In addition, when the first adhesive layer 2 has a direction of reversal and melting, the conductive material is less likely to flow to the area adjacent to the electrode because the second adhesive layer is not pressurized during connection. In addition, the conductive material 3 of the second adhesive layer can be evenly distributed on the second adhesive layer along the surface. Therefore, the conductive particles do not need to be accurately positioned relative to the electrode, which can improve the operation efficiency. In addition, the 'first dry layer 2 and the second adhesive layer 1 can be properly combined to obtain the desired adhesion for the purpose of fusing, for example, to match the material of the electrode substrate used, so that the selective use of the material can be increased and connected Reliability also increases because air bubbles at the connection part etc. will decrease. One of the adhesive layers may have solubility or swelling characteristics to a solvent or the two adhesive layers may have different thermal resistances, which may give repairability in any case, so that the connection sheet can be easily peeled off from the surface of the substrate. Reconnectable. In addition, the adhesive layer can be properly combined to match the material of the electrode matrix used to facilitate contact between each electrode and the conductive particles and simplify the production process. In addition, part of the adhesive layer that is pressed out of the connecting part can be used as a sealing material to provide reinforcement and moisture resistance. This paper scale is applicable to the Chinese national standard (CNS> Α4 specification (2〇〇297 meals) -------, π ----- i ----- ί (please read the back 1 & Note Matters fill in this page) A7 A7 Printed by the Employees ’Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (23) Implement you [Various embodiments according to the invention are described in detail below, but it should be noted that the invention is not limited to these Example. ~ Implement 1_J__ (Preparation of 2nd Adhesive Layer 1) Mix a phenoxy resin (polymerized epoxy resin, PKHA of Union Carbon) and a liquid containing microcapsule latent hardener at a ratio of 30/70. NOVACUREMX-3921, Asahi Chemical Industry Co., Ltd., epoxy equivalent: 185, activation temperature: n8t :) A solution containing 30% ethyl acetate was obtained. To this solution was added 8 Vol% conductive particles. The conductive particles were borrowed By
Nl/Au塗覆具有直徑爲4 ± 〇如之聚苯^顆粒 (GELPACK,日立化成株式會社)0 2/002jum而得,再混人 及分散此導電顆粒。將分散液用一滾子塗覆器施加β此: 離片(用矽酮處理之對苯二甲酸乙烯酯,厚户· 土 刀 。 予哎· 4〇μηι>,在 110 C乾燥此塗覆有分散液之分離片20分鐘以得到厚戶 5‘um之第2粘合層。使用硬化劑被移除之模式組入物予又 數位式粘度計HV-8(RheSCa公司製造)測音口 ’用 ;里柏合層乏处 度,在150 °C爲80泊。 (2)第1粘合層之製備及連接片]〇之製作 將與製備前述第2枯合層1之相同苯氧樹脂(聚人p 樹脂及包含微膠囊潛硬化劑之液體環氧樹於 —衣氧 185)以40/60之比率混合,但不添加導電顆粒3 用里: 粘合層1相同之方式製出15μπι厚之片。 ’以第2 接著,第2粘合層1及以上述方式產生泛 弔1粘合層 26 本紙張尺度適用中國國家標準(CNS〉Α4規格(21〇Χ297公釐) —裝------、玎------線 (請先閲讀背面之注意事項再填寫本頁) 2 經濟部中央標隼局員工消費合作社印製 A7 -_______B7 五、發明説明(24^~ ' '--- 在橡膠滾子間滾壓並於他們的粘合面層合在—齊。結果得 到如第1圖所示厚度20_包括二層之多廣連接片 照⑴所述之方法,第i黏合廣2之枯度經測試爲在 280 泊。 因此,包含導電材料之枯合看具有絕緣性質 之第1粘合層2之間之在15(rc之粘度差爲2〇〇泊。、 (3)至電極之連接 此連接片乃用來連接一 IC晶片及平坦電極以作評 估,此1C晶片爲2 X 12mm之秒基質,高度〇 5mn並具有 J支直徑50μηι,高20μιη形成在靠近基質兩長側之金電極, 而平坦電極乃位於1.1mm厚之玻璃基質之上,此玻璃基質 具有〇.2‘um厚之IT0(銦-錫氧化物)的薄膜電路,表面抵抗 爲20Ω。詳細言之,此在玻璃基質上之ΙΤ〇電極乃製成對 應於1C晶片之凸出部電極之大小,而且有引線延伸出基質 外部以作測量。連接片1〇乃切成2.5 X 14mm之大小以較 ic晶片之尺寸稍大而且以第2粘合曆i面對平電極13之方 式,暫時粘結至基質(參閲第5 A圖)。 當連接片10暫時連接至基質時,其可較易粘合而且後 續剥離分離片可容易地進行,因爲基質11a之平滑性及連 接片1 0之粘度之關係。 然後,在1c晶片凸出電極(凸出部)準確地和平坦電極 對準之情況下,整個構造在3〇kgf/mm2之壓力下於丨5〇 加必1 5秒’因而得到連接體(參考5B圖)。在此時,此結 構之絕緣枯合層乃位於靠近連接裝置之熱源,而第2粘合 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) n I ----I ——士κ--- I I n T n n _ I .!. 、v。 髮 (請先閱讀背而之注意事項再填"本頁) 經濟部中央標準局員工消費合作社印策 A7 B7 五、發明説明(25) ~ '~~---- 層1面向平坦電極。 (4)評估 *將以上述方式得到之連接體之切面磨光,並用顯微鏡 硯务’其具有如第6圖所示之連接結構。特別注意到的是 =近電極之間的區域不合空氣氣泡,而且在此區域之顆 'ϋϋΐ &而’在各凸出電極及對應平電極13之間存在 之果、粒已被壓鲕而變形,而且被維持在凸出電極丨2之上表 面與平電極丨3之間並與其接觸。 4估互相對峙之凸出電極丨2及平電極13之連接電阻 估鄰近凸出電極間之絕緣電阻。測試結果,連接電阻 与]Ω或以下而絕緣電阻是101ϋΩ或以上,而且在85。〇及 85%RH之咖小時高溫濕度試驗之後,這些値均維持相 同,從明具有令人滿意之長期可靠性。 在此施例中,分佈至和電極(直徑5〇^m=1962 連接《有效顆粒之平均數是20(最大23,最小18顆)。 在此,只有那些當用顯微鏡(10 0倍)從玻璃側觀察連接 表面時由於與電極接觸爲平滑者,才被視爲分佈至此連接 之有政顆粒。L/D比率爲i 〇,因爲直徑是5〇ρΏ。 依照實施例],在各凸出電極12上之顆粒已被壓縮而 變形,而且被維持在對應之上下電極對之間並與其接觸。 热任何氣泡被包含在鄰近凸出電極】2,12之間,而 且可達成令人滿意之長期可靠性。導電顆粒3變形之程度 依照互相對峙凸出電極丨2平電極對之間的距離之不同而 有斤不同,而且部份顆粒被枯在凸出電極之上。對於所有 本紙張尺度適用中 m m n ------种衣-----I、1T_ _____ (請先閲讀背面之注意事項再填寫本頁) 28 經濟部中央標準局買工消費合作社印製 3il323 A7 〜^_______B7 五、發明説明(26 ) -' 的電極均可達到令人滿意之連接。 下文中之表1顯不了第2粘合劑丨之粘度,在熔融狀 態下相對於帛!枯合劑之枯度差(第2枯合劑較第!枯合劑 爲小差値)以及分佈至與電極作電連接之在電極上的有 顆粒平均數。 j7匕較實施例1 在此比較實施例1之中裝備出一不具有第丨絕缘層, 而且/、包括包含導電顆粒之第2粘合層之習知單層連接 詳而言之,藉由混合30/70比率之苯氧樹脂(聚合環氧 樹脂)(聯合碳石公司之PKHA)以及包含微膠囊潛硬化劑之 液體環氧樹脂(旭化成工業株式會社之n〇vacure 3921)環氧當量185 ;活化溫度:118t:)得到包含川%乙 酸乙脂之溶液。於此溶液中加入8v〇1%之導電顆粒,這此 導電顆粒乃藉由用Ni/Au塗佈聚苯乙烯(日立化成株式奋 社之GELPACK,顆粒直徑410.2降)0.2/0.02_之厚度^ 然後混合並分散導電顆粒。此分散液藉由一滾子塗覆^施 加至一分離片(用矽酮處理之聚對苯二甲酸乙烯酯,厚戶 40μΓη),並於110 1乾燥此施加有分散液之分離片^ 到厚度20μηι之第2粘合層。 亦即,比較實施例1之連接片只包括20μιη厚之 粘合層。 ~ 接著’在如第1實施例1所使用之條件下,將要作, 估之1C晶片及薄膜平電極用連接片在其間互相連接,以得 29 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) -----------—裳------訂-------線------ (苛先閱讀背,&之注意事J§再填寫本頁 五 A7 B7 發明説明(27 ) 到一連接體。 使用如上述相同的評估方法,使用顯微鏡觀察比較實 :例1所得到之連接體之切面,並測量連接電阻及絕緣電 果發現在連接至平電極丨3之凸出電極之上表面(直 經5〇·_之顆粒數最多爲13最少爲〇,亦即有些平電極_ 2出電極對之間無有效的顆粒作二電接之電連接,因而和 只施例1 L 有效顆<最大及最小數且之間有很大之差 異。 此外,在測量連接體之絕緣抵抗時產生短路。此可能 是在連接步驟_從電^上表面 <導電顆粒流所引起, 因而在鄰近電極之間不能維持絕緣性質。 f施例2 '如κ施例〗相同 < 方式得到—連接片,但在此實施 ::,依照實施例1所用之相同方法在第2枯合層之另一 D另—第1枯合廣。亦即得到-如第2圖所示之包括 I一層又多層連接片1〇。 =外’使用雙屬FPC(撓性印刷線路板),其在聚 亞^版上具有-18_厚之銅電路,代替實施例^斤用 上之平電極。依照實施例1所使用之相同程序, 將这些電極連接以得到如第7圖所示之結構之連接體。 ::施例i評估依照實施例2所得到之連接 質上與實施例1所得者相同。詳而言之,連 且疋1Ω或以下,而絕緣電阻是ι〇1〇ω或以上,而且這 30 ----^----丨裝------訂-----線 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 五、發明説明(28 ) 些値在85 °C及85RH乏丨Ληη , + 小時高溫濕度測試之後仍維 持不變’證明具有令人滿意之長期可靠性。 在此實施例+,分配至此連接之電極(直徑 3〇μηι = 1962.5μπι2)上之有、τ t .、 】政顆担 < 乎均數目是丨6(最大 個顆粒,最小I 〇個顆粒)。 ㈤比率是[〇 ’因爲電極直徑是50—。 有關實施例2評估<結果亦示於表】。 在貝施例2中’ 10個以上之顆粒可被捕集在各電極之 上,不論在此結構中顆粒是易於流動的,因爲凸出電極乃 互相連接。 實施例3-5 η施例3 土 5中’依照實施例1所使用之相同程序 得二但是第1及第2枯合廣2及1之苯氧樹脂及 戒體%乳树脂的混合比改變以改變在1501時二層之間之 枯度差。 詳而言之,在實施例3中,第2枯合層具有2〇〇 粘度而粘度差是〇。 經濟部中央標準局員工消費合作社印製 1在實施例4中,第2枯合層具有泊之枯度而枯度 差是1。 如表1所示,實施例3有效顆粒之平均數目是13(H 至15),而實施例ι4是ι9(ι7至22)。 因而,依照這些實施例,許多有效顆粒可被捕集在電 極上而只有相對之小變化,如實施例1,如表1可見可~ 到令人滿意之連接特性。 仔 31 石氏張尺度適用中國厂二規格(210Χ297公釐·τ 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明(29) 生較實施例2及3 1 ---—----- 在比較實施例2及3中,製備具有如實施例1之雙廣 結構之連接片;但是第1及第2粘合層2及丨之苯氧樹脂 及液體環氧樹脂之混合比改變以改變在]5〇弋時二層之粘 度差。 曰 詳而言之,在比較實施例之中,第2粘合層具有8〇泊 <枯度而粘差爲1〇,〇〇〇泊。 在比較實施例3中,第2粘合層具有200泊之粘度而 粘度差是-120。如_120之粘度差顯示在比較實施例3 $, 包含導電材料之第2粘合層之第2粘合劑之粘度較第i 缘枯合層之粘度高120泊。 、 此外,在比較實施例2及3中,L/D之比爲κ 電極直徑爲50μιη。 馬 如表1所示有顆粒之平均數爲0(比較實施 小(比較實施例3)。 一非吊 >在比較實施例2中,由於枯度差非常大,導電 路至第丨粘合層而且在電極上無有效顆粒,所有連接 依照比較實旅例3之連接片具有習知技術之雙厚处 構,但是具有和實施例丨完全相反的粘度分 夂"〜 效顆粒之平均佈0因此,有 外,和Μ間無有效顆粒。此 '^施例1比較,有效顆粒之.最大和最 大之差距。 』数<間有很 32 本紙張尺錢用_ I 裳 訂 線 (請先閲讀背而之:>x意事項再填寫本Fc A7 B7 五、發明説明(30 ) 表 第1粘合劑之 粘度(泊)Nl / Au is coated with polystyrene particles (GELPACK, Hitachi Chemical Co., Ltd.) 0 2 / 002jum with a diameter of 4 ± 0, and the conductive particles are mixed and dispersed. Apply the dispersion with a roller applicator β this: off-chip (silicone-treated vinyl terephthalate, thick household · earth knife. Yu Hei · 4〇μηι>, dry the coating at 110 C Separate pieces with dispersion liquid for 20 minutes to obtain the second adhesive layer with a thickness of 5'um. Use the patterned material with the hardener removed to the digital viscometer HV-8 (manufactured by RheSCa) sound port 'Use; Libo compound layer lack of degree, 80 poise at 150 ° C. (2) Preparation of the first adhesive layer and connecting sheet] 〇 The production will be the same as the preparation of the same second phenoxy resin layer 2 (Polyp resin and liquid epoxy resin containing microcapsule latent hardener in-Yi oxygen 185) Mix at a ratio of 40/60, but do not add conductive particles 3 Use: Adhesive layer 1 in the same way to make 15μπι Thick piece. 'In the second, the second adhesive layer 1 and the pan-hanging 1 adhesive layer 26 produced in the above-mentioned manner. This paper size is applicable to the Chinese National Standard (CNS> Α4 specification (21〇Χ297 mm)-installed- ----- 、 玎 ------ Line (please read the precautions on the back before filling in this page) 2 Printed A7 by the Consumer Consumption Cooperative of the Central Standard Falcon Bureau of the Ministry of Economic Affairs -_ ______B7 V. Description of the invention (24 ^ ~ '' --- Rolled between the rubber rollers and laminated on their adhesive surface-aligned. The result is as shown in Figure 1 thickness 20_ including two layers According to the method described in (1), the dryness of the i-th bonding bond 2 is tested at 280 poise. Therefore, the bonding of conductive materials includes the first bonding layer 2 with insulating properties between 15 ( The difference in viscosity of rc is 200 poises. (3) Connection to the electrode This connecting piece is used to connect an IC chip and a flat electrode for evaluation. The 1C chip is a 2 X 12mm second substrate with a height of 0.5 mm and It has J branches with a diameter of 50μηι and a height of 20μιη formed on the gold electrodes near the two long sides of the substrate, and the flat electrode is located on a 1.1mm thick glass substrate with a 0.20um thick IT0 (indium-tin oxide The surface resistance of the thin film circuit is 20Ω. In detail, the ITO electrode on the glass substrate is made to correspond to the size of the protrusion electrode of the 1C wafer, and there are leads extending out of the substrate for measurement. The connection piece 10 is cut into a size of 2.5 X 14mm to be slightly larger than the size of the IC chip With the second bonding calendar i facing the flat electrode 13, temporarily bond to the substrate (see Figure 5A). When the connection sheet 10 is temporarily connected to the substrate, it can be more easily bonded and the separation sheet is subsequently peeled off It can be easily performed because of the relationship between the smoothness of the substrate 11a and the viscosity of the connection sheet 10. Then, in the case where the 1c wafer protrusion electrode (protrusion) is accurately aligned with the flat electrode, the entire structure is 3 °. Under the pressure of kgf / mm2, it is necessary to add 15 seconds at 丨 50 to obtain the connector (refer to figure 5B). At this time, the insulating layer of this structure is located near the heat source of the connection device, and the second adhesive paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) n I ---- I ----士 κ --- II n T nn _ I.!., V. Issue (please read the precautions first and then fill in " this page>). Policy printed by the Staff Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs A7 B7 V. Description of invention (25) ~ '~~ ---- Layer 1 faces the flat electrode. (4) Evaluation * Polish the cut surface of the connecting body obtained in the above-mentioned manner, and use a microscope to paint it. It has a connecting structure as shown in FIG. 6. It is particularly noticed that the area between the near electrodes does not contain air bubbles, and the particles in this area are not between the protruding electrodes and the corresponding flat electrodes 13 and the particles have been pressed. It is deformed and maintained between and in contact with the upper surface of the protruding electrode 丨 2 and the flat electrode 丨 3. 4. Estimate the connection resistance between the protruding electrode 丨 2 and the flat electrode 13 facing each other. Estimate the insulation resistance between adjacent protruding electrodes. As a result of the test, the connection resistance is Ω or less and the insulation resistance is 101 ϋΩ or more, and it is 85. After the coffee hour high-temperature humidity test of 85% RH and 85% RH, these values are maintained the same, and it is clear that it has satisfactory long-term reliability. In this example, the distribution is connected to the electrode (diameter 50 ^ m = 1962 "the average number of effective particles is 20 (maximum 23, minimum 18 particles). Here, only those when using a microscope (100 times) When the connection surface is observed on the glass side, the contact with the electrode is smooth, and it is regarded as the administrative particles distributed to this connection. The L / D ratio is i 〇, because the diameter is 5〇ρΏ. According to the embodiment], protruding at each The particles on the electrode 12 have been compressed and deformed, and are maintained between and in contact with the corresponding upper and lower electrode pairs. Any bubbles of heat are contained between the adjacent protruding electrodes, 2, 12, and satisfactory results can be achieved Long-term reliability. The degree of deformation of conductive particles 3 varies according to the distance between the protruding electrodes facing each other and the flat electrode pairs, and some particles are dried on the protruding electrodes. For all paper sizes Applicable in mmn ------ seed coat ----- I, 1T_ _____ (please read the precautions on the back before filling in this page) 28 Printed by the Central Bureau of Standards of the Ministry of Economic Affairs, printed by 3il323 A7 ~ ^ _______ B7 5. Description of the invention (26)-' Very satisfactory connection can be achieved. The following Table 1 does not show the viscosity of the second adhesive 丨 in the molten state relative to silk! The dryness of the binder is poor (the second binder is less than the binder! Is a small difference) and the average number of particles distributed on the electrode that are electrically connected to the electrode. J7 compares to Example 1 In this Comparative Example 1, it is equipped with a first insulating layer, and / or A conventional single-layer connection including a second adhesive layer containing conductive particles. In detail, by mixing a 30/70 ratio of phenoxy resin (polymerized epoxy resin) (PKHA of Union Carbon) and containing microcapsules Latent hardener liquid epoxy resin (novacure 3921 of Asahi Kasei Industries Co., Ltd.) epoxy equivalent 185; activation temperature: 118 t :) A solution containing ethyl acetate in Sichuan was obtained. 8v〇1% of conductive particles were added to this solution. The conductive particles were coated with Ni / Au polystyrene (Hitachi Chemical Co., Ltd. GELPACK, particle diameter 410.2 drop) 0.2 / 0.02_ thickness ^ Then, the conductive particles are mixed and dispersed. This dispersion liquid is applied to a separator (a silicone-treated polyethylene terephthalate with a thickness of 40 μΓη) by a roller coating ^, and the separator applied with the dispersion liquid is dried at 110 1 to The second adhesive layer with a thickness of 20 μm. That is, the connecting sheet of Comparative Example 1 includes only a 20 m thick adhesive layer. ~ Next ', under the conditions used in the first embodiment 1, the 1C chip and the thin film flat electrode connecting piece are connected to each other in order to obtain 29 paper scales applicable to the Chinese National Standard (CNS) A4 specification (210X297mm) ------------- sling ------ order ------- line ------ J§ fill in this page five A7 B7 description of invention (27) to a connector. Use the same evaluation method as above, use a microscope to observe the reality: the cut surface of the connector obtained in Example 1, and measure the connection resistance and insulation electricity It was found that on the upper surface of the protruding electrode connected to the flat electrode 丨 3 (the number of particles passing through 50 · _ is at most 13 and at least 0, that is, some flat electrodes_ 2 there are no effective particles between the pair of electrodes The electrical connection of the two electrical connections is therefore very different from the maximum and minimum number of effective particles of Example 1 L. In addition, a short circuit occurs when measuring the insulation resistance of the connection body. This may be in the connection step _ Caused by the flow of electrically conductive particles on the upper surface < therefore, the insulating properties cannot be maintained between adjacent electrodes. FExample 2 ' κ 例〗 The same < way to obtain a connecting piece, but here it is implemented ::, according to the same method as used in Example 1, at another D of the second dry layer-the first dry wide. That is to say- As shown in Figure 2, including I one layer and multiple layers of connection sheet 10. = Outer 'uses dual-type FPC (flexible printed circuit board), which has a -18_ thick copper circuit on the poly board, instead of implementing Example ^ The flat electrode used above. According to the same procedure used in Example 1, these electrodes were connected to obtain a connection body with the structure shown in Figure 7. :: Example i Evaluation obtained according to Example 2. The connection quality is the same as that obtained in Example 1. In detail, the connection resistance is 1 Ω or less, and the insulation resistance is ι〇1〇ω or more, and this 30 ---- ^ ---- 丨 installed- ----- Subscribe ----- Line (please read the precautions on the back before filling in this page) Printed by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs V. Invention Instructions (28) Some values are at 85 ° C and 85RH The lack of Ληη, remains unchanged after + hours of high temperature and humidity testing, which proves to have satisfactory long-term reliability. In this embodiment, + is assigned to this connection The electrode (diameter 30μηι = 1962.5μπι2), τ t.,】 Government load <almost the average number is 丨 6 (the largest particle, the smallest I 〇 particles). ㈤ ratio is [〇 'because the electrode The diameter is 50-. The evaluation of Example 2 < the results are also shown in the table]. In Bess Example 2, more than 10 particles can be trapped on each electrode, regardless of whether the particles are easy to flow in this structure Because the protruding electrodes are connected to each other. Example 3-5 η Example 3 In soil 5 'According to the same procedure as used in Example 1, two phenoxy resins were obtained, but the first and second compounds were 2 and 1. And the mixing ratio of the body% milk resin was changed to change the difference in dryness between the two layers at 1501. Specifically, in Example 3, the second dry layer has a viscosity of 200 and the viscosity difference is 0. Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 1 In Example 4, the second dry layer has a dryness and the dryness difference is 1. As shown in Table 1, the average number of effective particles in Example 3 is 13 (H to 15), and Example ι4 is ι9 (ι7 to 22). Therefore, according to these examples, many effective particles can be trapped on the electrode with relatively small changes. As in Example 1, as shown in Table 1, satisfactory connection characteristics can be seen. Aberdeen 31 Shi's Zhang scale is applicable to the second specification of the Chinese factory (210Χ297mm · τ printed by the employee consumer cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs A7 B7 V. Description of the invention (29) Health comparison examples 2 and 3 1 ------- --- In Comparative Examples 2 and 3, a connection sheet having a double-wide structure as in Example 1 is prepared; however, the mixing ratio of the phenoxy resin and liquid epoxy resin of the first and second adhesive layers 2 and 丨Change to change the difference in viscosity of the two layers at 50 °. In particular, in the comparative example, the second adhesive layer has a porosity of 80 ° and a viscosity difference of 10,000. 〇Poise. In Comparative Example 3, the second adhesive layer has a viscosity of 200 poise and the viscosity difference is -120. For example, the viscosity difference of _120 is shown in Comparative Example 3 $, the second adhesive layer containing a conductive material The viscosity of the second binder is 120 poises higher than the viscosity of the i-layer dry layer. In addition, in Comparative Examples 2 and 3, the ratio of L / D is κ and the electrode diameter is 50μιη. The average number of particles shown is 0 (Comparative implementation is small (Comparative Example 3). One non-hanging> In Comparative Example 2, since the difference in dryness is very large, the circuit丨 Adhesive layer and no effective particles on the electrode, all the connecting pieces according to Comparative Example 3 have a double-thickness structure of the conventional technology, but have a completely opposite viscosity distribution from the example 丨 " ~ effective particles The average cloth is 0. Therefore, there is no effective particles between the outer layer and the M. In this comparison of Example 1, the effective particles are the largest and the largest gap. 』Number < There are 32 paper rulers _ I shed Threading (please read the opposite first: &x; then fill in this Fc A7 B7 V. Description of the invention (30) Table 1 viscosity of adhesive (poise)
實施例 200 實施例4 在電極上有效顆粒之平 均數目(顆粒/1962 5|am2、 13⑴至15)Example 200 Example 4 The average number of effective particles on the electrode (particles / 1962 5 | am2, 13 (1 to 15)
實施例6至9 f請先"讀背面之注意事項再嗔寫本頁j .裝 在實施例6至9中,使用如實施例之相同方式所製出 連接片,但要被連接之電椏具有不同之形狀。詳而言之, 藉由改變在一 1C晶片之連接表面上之各凸出電极之形 狀’長側對短側之L/D比値在1至20之範圍内變化。 在實施例6中,凸出電極之長側l與短側各爲5〇μΐΏ, 因而L/D比値爲1.41。 在實施例7中,凸出電極之長側l及短側〇分則爲 20μπι 及 ΙΟΟμιτι,因而 L/D 値爲 5.0。 在實施例8中,凸出電極之長側L及短側D分別爲 20μιη 及 200μιτι,因而 L/D 値爲 10.0。 在實施例9中,凸出電極之長側L及短側D分別爲 ΙΟμπι 及 200μιη ’ 因而 L/D 値爲 2〇.〇。 33 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公笼) 、--° 線 經濟部中央標準局員工消費合作社印装 B7 B7 —----- 五、發明説明(3 1 ) 各凸出電極之長側L垂直於1C晶片之中線N如第1〇 圖所示。而測試結果乃示於下面之表2。 如表2所示,在這些實施例中以〇在i至2〇間變化, 許多有效的顆粒可被捕集在電極上而且變化很小,而且如 «施例丨可得到令人滿意之連接特性。 生較實施例 在比較實施例4及5中,實施例i中所用之Fpc板互 相連接成平行之電極連接(電極寬度D=5—;連接寬度 L=1500‘随;l/D=30)。 在比較實施例4中,如在實施例1相同方式製出之連 接片被用來連接’但是在電極上之有效顆粒之平均數目是 每1962.5_2 9_至16),其較在實施例丨所得之平均 數目的1 /2還小。 在比較實施例5中’使用如在比較實施例3相同 所製出〈連接片(第2枯合劑之枯度爲2n枯度差爲_ 曰有效顆粒之平均數爲18(14至24)其大於比較實施例 3所仔之平均數。 、上述實驗 < 結㈣科接η最適輯會因連接片是 否=至具有L/D大比値之乎行電極連接(如在線路板上 :導體_片上<電極)而有所不同。其理由並不知,_是可 广在連接步驟期間熱傳性質及枯合#!之流動受L/D之影 1— I 11 - ----U » - -I ....... I (請先閱讀背面之注意事項再填寫本頁)Examples 6 to 9 f Please read the notes on the back first and then write this page j. Installed in Examples 6 to 9, use the connection piece made in the same way as the example, but the power to be connected桠 has different shapes. In detail, the L / D ratio of the long side to the short side varies in the range of 1 to 20 by changing the shape of each protruding electrode on the connection surface of a 1C chip. In Example 6, the long side 1 and the short side of the protruding electrode were 50 μl Ώ each, so the L / D ratio value was 1.41. In Example 7, the long side 1 and the short side of the protruding electrode are 20 μm and 100 μm, so the L / D value is 5.0. In Example 8, the long side L and the short side D of the protruding electrode are 20 μm and 200 μm, respectively, so the L / D value is 10.0. In Example 9, the long side L and the short side D of the protruding electrode are 10 μm and 200 μm respectively, and thus the L / D value is 20.0. 33 This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210X297 male cage),-° Line Printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs B7 B7 —----- V. Description of the invention (3 1) The long side L of the protruding electrode is perpendicular to the center line N of the 1C wafer as shown in FIG. The test results are shown in Table 2 below. As shown in Table 2, in these examples, 〇 varies between i and 20, many effective particles can be trapped on the electrode and the change is very small, and as in «Example 丨, a satisfactory connection can be obtained characteristic. Comparative Examples In Comparative Examples 4 and 5, the Fpc boards used in Example i were interconnected to form parallel electrode connections (electrode width D = 5—; connection width L = 1500 ′; l / D = 30) . In Comparative Example 4, the connection piece made in the same manner as in Example 1 was used to connect 'but the average number of effective particles on the electrode was 1962.5_2 9_ to 16), which is better than in Example 丨The average number obtained is 1/2. In Comparative Example 5, 'use the same preparation as in Comparative Example 3 <connecting sheet (the second compound's dryness is 2n, the dryness difference is _, the average number of effective particles is 18 (14 to 24) It is greater than the average number of the comparison example 3. The above experiment < the best connection will be due to whether the connecting piece = to the line electrode connection with a large L / D ratio (such as on the circuit board: conductor _On-chip < electrode) is different. The reason is not known. _ 是 可 广 During the connection step, the heat transfer properties and the flow of ## are affected by the L / D shadow 1— I 11----- U »--I ....... I (Please read the notes on the back before filling this page)
、1T ---線---- 經 濟 部 中 央 標 準 為 負 工 消 f 合 社 印 製 .1 I I · 34 3ϋ328 五 '發明説明(32 Α7 Β7 經濟部中央操準局ί消費合作社, 1T --- line ---- The central standard of the Ministry of Economic Affairs is printed by the negative labor union. 1 I I · 34 3ϋ328 5 'Instructions for the invention (32 Α7 Β7 Central Business Administration of the Ministry of Economic Affairs Consumer Cooperative
162(141 至 1 82) 245(228 至 253) 依照在實施例玉所使~--一__ 在電極上有效顆粒之平 目(顆粒/1962 5μηι2) 24(22 至 27) 121(112 至 138、 9(0 至 16) m n - ---1 κ- I I ϋ m I (請先閱讀背面之注意事項再填寫本頁) 是在ic晶片上不形成電=序=:連接片’但 二^具有如第8圖所示構造由之半導體晶片,其中塾乃 ^在Μ線之所被要求之部份㈣了塾以収晶片表面 因有1障厚< 絕緣層(纽實施财爲_層), =成::電極。此連接片乃暫時枯合至半導上 而其第二粘合層面向晶片。 在實施例1 〇中,連接電阻辜]门+ ^疋IQi^下,絕緣電阻是 以以上’而這些値即使是在85。0,85。細麵小 争向溫溫度測試之後仍維持幾乎不變。而用來連接電相之 有效顆粒<平均數是25(最大H最小·禅 /1962»。此外’從經濟的觀點來看實施例㈣佳,因 爲其不需要在一晶片之上形成凸出電椏。 實施例11 35 本纸張尺度適用中國⑺0X297公釐)162 (141 to 1 82) 245 (228 to 253) According to the example in the example of the use of jade ~-a __ on the electrode of the effective particle of the flat mesh (particle / 1962 5μηι2) 24 (22 to 27) 121 (112 to 138 , 9 (0 to 16) mn---- 1 κ- II ϋ m I (please read the precautions on the back before filling out this page) is not formed on the IC chip = sequence =: connection sheet 'but two ^ The semiconductor wafer with the structure shown in Fig. 8, in which the required part is at the required line of the M line, and the surface of the received wafer has a barrier thickness < insulation layer (New Zealand implementation is _ layer) ), = Into :: electrode. This connecting piece is temporarily bonded to the semiconductor and its second adhesive layer faces the wafer. In Example 10, the connection resistance is lower than the gate + ^ 疋 IQi ^, insulation resistance Therefore, even if these values are at 85. 0, 85. The fine-grained small-to-temperature temperature test remains almost unchanged. The effective particles used to connect the electrical phase < the average number is 25 (maximum H minimum · Zen / 1962 ». In addition, from an economic point of view, the embodiment is preferred because it does not need to form a bump on a wafer. Example 11 35 This paper size is applicable State ⑺0X297 mm)
I ί !- -I— I - - I I 線------------ 1^1 H— , • I — ——-I . 經濟部中央標隼局員工消費合作社印製 咕3初 A7 二 -------—B7 五、發明説明(33 ) 、使用具有和實施例2相同結構之連接片,但導電顆粒 之顆粒直徑是7μιτι而第2粘合劑】之厚度亦爲7μιη。在此 連接片之一側之第!粘合層2具有25μπι之厚度,而在此連 接片之另一側之另一第】粘合層具有5〇μηι之厚度。 要被連接之電極是一QFp型IC之引導線(厚度 Ηθμοί ;節距:30μΙΏ,電極寬度:35〇um,連接寬度: J〇〇〇‘um ; L/D=8.6),而這些電極乃被連接到形成在一玻璃 知氧基質上之3 5 μιτι厚之銅端子。 依照實施例1 1所得到之連接結構類似於第7圖所示 者,但是在其一側無基質,亦即在1C引導線側無基質。 如實施例具有類似於實施例所能達到之效果,而且不 論疋在具有大的鬲度之電極間之連接亦可顯示令人滿意之 連接特性而不會引起電極之位移。雖然在導電片中之導電 材料未圖示出,這些顆粒已被壓縮變形而且保持在互相接 觸之上下電極之間。此外,在鄰近電極之區域之間不包含 氣泡,而且可達成令人滿意之長期可靠性。在此實施例中, 粘合層亦形成在無基質存在之區域以與引導線等高,以使 可將引導線定位。10個或以上之有效顆粒可被捕集在每 一電極之上。 實施例12及13 在實施例12及13中,使用以與實施例1相同方式製 作出之連接片;但是電極在加壓下分二階段加熱。 詳而言之,在實施例12中,使用能夠裝設5個IC晶 片之玻璃基質,而不使用實施例1所用之基質,而且熱壓 本紙張尺度適用中國國家標準(CNS ) A4規格(2丨〇χ297公釐) I裝 訂----- 線 (請先閲讀背面之注意事項再填寫本頁) 311328 A7 五 ^濟部中央標準局負工消費合作社印製 發明説明(34 ) 步驟分二階段進行。首先,在150°C,20 kgf/cm2下加熱 此結構,然後停止2秒鐘,將結構保持在壓下力藉由三用 表測量各連接點之連接電阻。 只施例I 3具有如實施例丨2相同之構造,但是在於【5〇 C,20 kgf/cm2下開始熱壓步驟3秒鐘之後,將此結構從 j接步驟中移出。由於熱及壓力之施加,枯合劑之枯合力 立曰加,所以個別之IC晶片可暫時地被固定在玻璃基質之 ^,因而在未施加至結構壓力下如實施例丨2使用三用表測 里在各連接點之連接電阻。 在二實施例中均有一 ^晶片失效。因而將失效之晶片 剥除’並將一新的晶片定位’進行上述之連接步驟。如此, 則在實施例均未發現有失效。依照這些實施例,在修補步 驟中失效的晶片被剥除而新的晶片被速接上,枯合劑乃在 =充份硬化之狀態’因此晶片可被非常容易地剥除而且後 ^使用丙酮清洗之步㈣極容易,使得修補丄作易於進 在此檢查步驟及修補步驟如上述進行之後 】5〇。(: ’ 20kgfW下進行第二階段 其結果,二實施例均顯示令人滿意之連接特性二;: =接上有效顆粒之數目爲]9或以上。在實施例 ^在凸出電極上〈有效顆粒之乎均數目與會说如 可增加,而使電極之顆粒外流可減少。此外,、n此較 力可進-步改良因爲熱壓步驟乃分爲二階一〈保持 實施例14 订。 ---裝-- (請先閲讀背面之注意事項再填寫本頁〕 .—1 '1τ- In κ - - -I- I .I ί!--I— I--II line ------------ 1 ^ 1 H—, • I — ——- I. Printed by the Ministry of Economic Affairs, Central Falcon Bureau Employee Consumer Cooperative 3. Early A7 II --------- B7 V. Description of the invention (33) Use a connection sheet with the same structure as in Example 2, but the particle diameter of the conductive particles is 7μιτι and the thickness of the second adhesive Also 7μιη. No. 1 on one side of the connection piece! The adhesive layer 2 has a thickness of 25 µm, and the other first adhesive layer on the other side of the connection sheet has a thickness of 50 µm. The electrode to be connected is a guide wire of a QFp type IC (thickness Ηθμοί; pitch: 30μΙΏ, electrode width: 35〇um, connection width: J〇〇〇'um; L / D = 8.6), and these electrodes are It was connected to a 3 5 μιτι thick copper terminal formed on a glass substrate. The connection structure obtained according to Example 11 is similar to that shown in Figure 7, but there is no substrate on one side, that is, no substrate on the 1C guide wire side. As the embodiment has the effect similar to that which can be achieved in the embodiment, and regardless of the connection between the electrodes having a large temperature, satisfactory connection characteristics can be exhibited without causing displacement of the electrodes. Although the conductive material in the conductive sheet is not shown, these particles have been compressed and deformed and remain between the upper and lower electrodes in contact with each other. In addition, bubbles are not included between the areas adjacent to the electrodes, and satisfactory long-term reliability can be achieved. In this embodiment, the adhesive layer is also formed in the area where no substrate exists to be at the same height as the guide wire, so that the guide wire can be positioned. 10 or more effective particles can be trapped on each electrode. Embodiments 12 and 13 In Embodiments 12 and 13, a connection sheet made in the same manner as in Embodiment 1 was used; however, the electrode was heated in two stages under pressure. In detail, in Example 12, a glass substrate capable of mounting 5 IC wafers is used instead of the substrate used in Example 1, and the paper size of the hot-pressed paper is applicable to the Chinese National Standard (CNS) A4 specification (2丨 〇χ297mm) I binding ---- line (please read the precautions on the back before filling in this page) 311328 A7 Five ^ Instructions for printing inventions by the Ministry of Economy Central Standards Bureau Negative Consumers Cooperative (34) Step two In stages. First, heat the structure at 150 ° C at 20 kgf / cm2, and then stop for 2 seconds, keeping the structure under pressure. Measure the connection resistance of each connection point with a multimeter. Only Example I 3 had the same structure as Example 1-2, but after starting the hot pressing step at [50 ° C, 20 kgf / cm 2 for 3 seconds, the structure was removed from the j step. Due to the application of heat and pressure, the compounding power of the compounding agent is increased immediately, so individual IC wafers can be temporarily fixed on the glass substrate, so without using the structural pressure as in Example 丨 2 using a three-meter test Connection resistance at each connection point. In both embodiments, the chip fails. Therefore, the failed wafer is peeled off and a new wafer is positioned to perform the above-mentioned connection step. As such, no failure was found in the examples. According to these embodiments, the wafers that failed during the repairing step are stripped and new wafers are quickly attached. The binder is in the state of = fully cured 'so the wafers can be stripped very easily and then cleaned with acetone This step is very easy, making repairs easy to proceed. After this inspection step and repair step are performed as described above] 5. (: As a result of the second stage under 20kgfW, both examples showed satisfactory connection characteristics II; = = the number of effective particles attached was 9 or more. In Example ^ on the protruding electrode <effective It can be said that the average number of particles can be increased, and the particle outflow of the electrode can be reduced. In addition, this comparison can be further improved because the hot pressing step is divided into two steps and one <Keep Example 14 set.- -Install-- (Please read the precautions on the back before filling in this page). —1 '1τ- In κ---I- I.
• I . 1 I ann 37 本紙張尺纽财@ ( CNS ) -1---. A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明(35 ) " ~ 只施例14與實施例1不同之處在於使用不同之材料作 第1及第2粘合劑。 詳而言之,和實施例1之連接片不同,將具有不平滑 表面之羰基鎳顆粒(平均顆粒直徑:3μπι)加入作爲導電顆 粒,加入量爲4 vol%,而且第2粘合層具有5μιη之厚度。 此外,對於第一粘合層,包含微膠囊潛硬化劑之液體環氧 树如(環氧當量:185)與一羧基改質之SEBS(苯乙烯-乙烯_ 丁烯-苯乙烯嵌斷聚以以2〇/80之比率混合以依照上述之相 同程序得到厚度15μπι之片,然後將所得到之片與第2粘 合層層積在一齊。第丨粘合層之粘度之前述方法測量之結 果马100泊(丨50。〇,因而第i及第2粘合層之間之粘度差 爲20泊。 &二 只施例14以與實施例1相同之方式評估;結果導電顆 粒稍微粘至電極而有100顆或以上之有效顆粒可被捕集在 電極上。此外,實施例丨4顯示了令人滿意之連接電阻,絕 緣電阻以及長期可靠性。 . ^ 在實施例I4之中,使用不同之高分子材料作爲第】及 第2粘合層之第1及第2粘合劑;因此,粘合 a 〜仪’日日片 可乾淨地從第1粘合層表面剥離。此表示,有利於終補工 作。依照TMA(熱機械分析)測試第1及第2粘合層之張力 而且其Tg(玻璃轉移點)分別爲丨25。(:及11 〇。士 & 此對修補 一作來説是一有效的特徵當剥離在一高溫下進行時,大/ 粘合層之間的熱電陴之差可被用來加速此剥離而且^ = 爲較易提供一枯合差之緣故。 *、 工 38 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) (請先閲讀背面之注意事項再填寫本頁) .裝.• I. 1 I ann 37 paper ruler New Zealand @ (CNS) -1 ---. A7 B7 Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy V. Description of Invention (35) " ~ Only Example 14 and Implementation Example 1 differs in that different materials are used as the first and second adhesives. In detail, unlike the connection sheet of Example 1, nickel carbonyl particles having an uneven surface (average particle diameter: 3 μm) are added as conductive particles at an amount of 4 vol%, and the second adhesive layer has 5 μm The thickness. In addition, for the first adhesive layer, a liquid epoxy resin containing a microcapsule latent hardener such as (epoxy equivalent: 185) and a carboxyl modified SEBS (styrene-ethylene_butene-styrene intercalation polymer to Mix at a ratio of 20/80 to obtain a sheet with a thickness of 15 μm according to the same procedure as described above, and then laminate the obtained sheet with the second adhesive layer. The result of the measurement of the viscosity of the adhesive layer by the aforementioned method Ma 100 poises (丨 50.〇, so the viscosity difference between the i and the second adhesive layer is 20 poises. &Amp; Two Example 14 were evaluated in the same manner as Example 1; as a result, the conductive particles were slightly adhered to There are 100 or more effective particles that can be trapped on the electrode. In addition, Example 丨 4 shows satisfactory connection resistance, insulation resistance and long-term reliability. ^ In Example I4, use Different polymer materials are used as the first and second adhesives of the first and second adhesive layers; therefore, the adhesive a ~ days can be cleanly peeled from the surface of the first adhesive layer. This means that Conducive to the final repair work. According to TMA (thermomechanical analysis) test the first and second adhesive layer Tension and its Tg (glass transfer point) are 丨 25. (: and 11 〇. Shi & this is an effective feature for the repair work when peeling is carried out at a high temperature, between the large / adhesive layer The difference of the thermoelectric power can be used to accelerate this peeling and ^ = for the sake of easier provision of a close difference. *, Gong 38 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (please first Read the notes on the back and fill out this page).
'1T 線 / 經濟部中央標準局負工消費合作社印裝 A7 B7 五、發明説明(36 ) 實施例15〜17 在實施例15-17之中,連接片亦依實施例1相同之方 式製作,但亦添加絕緣顆粒。 在實施例1 5中,1 vol%之聚苯乙烯顆粒,其乃用作實 施例1之導電顆粒之芯部,被混合及分散在第2枯合廣之 中作爲絕缘顆粒以得到類似實施例1之連接片。 在實施例16中,1 vol%之聚苯乙烯顆粒,其乃用作會 施例1之導電顆粒之芯部,被混合及分散在第1枯合廣之 中作爲絕缘顆粒以得到類似實施例1之連接片。 在實施例17中,1 v〇l%之聚苯乙烯顆粒,其乃用作會 施例1之導電顆粒之芯部,被混合及分散在各第1及2粘 合屬之中以作爲絕緣顆粒以得類似於實施例1之連接片。 實施例I5〜17以與實施例i相同之方式作評估,而且 他們被證明在連接電阻(1Ω或以下),絕緣電阻(1〇η)ω以上 及長期可靠性上均極優良。由於絕缘顆粒僅小量加入,在 各實施例中未觀察到絕緣顆粒對流動性有影響。 特別是,在實施例]5中,分散在導電顆粒中之絕緣顆 粒在改良第2枯合m向異性之導電度之電解能上有 效。實施例16可有效地保留第】枯合屬之絕缘性質而實施 例π具有實施例15 & 16兩者之優點。在實施例15及】7 中,絕緣祕如導電雌—樣被❹彡而且 連接電極之間。 = 實施例18 在此實施例之中,和實施例丨知η、& 施例相问〈導電顆粒被塗覆 39 ----------. -种衣------訂-----、線 (請先閲漬背面之注意事項再填寫本頁) 本紙張尺度it用中國國CNS )~'1T line / Printed by the Ministry of Economic Affairs Central Standards Bureau Negative Consumers Cooperative A7 B7 V. Description of the invention (36) Examples 15 ~ 17 In Examples 15-17, the connecting piece is also produced in the same way as Example 1, However, insulating particles are also added. In Example 15, 1 vol% of polystyrene particles, which are used as the core of the conductive particles of Example 1, are mixed and dispersed in the second compound as insulating particles to obtain a similar example 1's connection piece. In Example 16, 1 vol% of polystyrene particles, which are used as the core of the conductive particles of Example 1, are mixed and dispersed in the first compound as insulating particles to obtain a similar example 1's connection piece. In Example 17, 1 vol% of polystyrene particles, which are used as the core of the conductive particles of Example 1, are mixed and dispersed in each of the first and second adhesive genus to serve as insulation The particles are similar to the connecting sheet of Example 1. Examples I5 to 17 were evaluated in the same manner as in Example i, and they proved to be extremely excellent in connection resistance (1 Ω or less), insulation resistance (10 η) ω or more, and long-term reliability. Since the insulating particles were only added in small amounts, no effect of insulating particles on fluidity was observed in the examples. In particular, in Example 5, the insulating particles dispersed in the conductive particles are effective in improving the electrolytic energy of the second mixed m-anisotropic conductivity. Embodiment 16 can effectively retain the insulating properties of the first compound and Embodiment π has the advantages of both Embodiment 15 & 16. In Examples 15 and 7, the insulating material is ❹ 彡 and connected between the electrodes like a conductive female. = Example 18 In this example, it is the same as in Example 丨, η, & Examples <Conductive particles are coated 39 ----------.-Seed coat ----- -Order -----, line (please read the precautions on the back of the stain before filling in this page) This paper size it uses China CNS) ~
3US2S 經濟部中央標準局員工消費合作社印製Printed by 3US2S Employee Consumer Cooperative of Central Bureau of Standards, Ministry of Economic Affairs
A7 五、發明説明(37 ) —絕緣材料以得到類似於實施例1之連接片。 詳而言之,具有平均粒徑爲4μηι之導電顆粒之表面塗 覆上具有厚度約0.2μιη而破璃轉移點爲127 t之尼龍樹脂 膜,此外添加之導電顆粒之量增加至15 ν〇ι%。 " 此實施例以和實施例1相同的方式作評估而顯示具有 令=滿意之連接特性(連接電阻:1〇或以下;絕緣電阻: 1〇=Ω或以上)。在此實施例中,電極上之顆粒之平均數目 顯著疋增加。在峙電極之連接部份,維持在電極間之導電 顆紅之絕、.彖塗層在連接時被熱及壓力所炫化,使得由於第 1絕緣枯合看之軟化而可達成電連接及導電。另—方面, 由於在鄰近電極間之區域的導電顆粒的表面仍被絕緣膜所 塗覆’因爲熱及壓力較小,因而可確保令人滿意之絕效能, 所:〈凸出電極之有效顆粒之數目均爲%或以上。藉由依 ’、'、Λ施例18疋連接片構造,在第1粘合劑中導電材料之濃 度可增加。 本發明並不限足於上述實施例而可作各種改變但仍不 脱離本發明之精神與範圍。 例如’亦可不直接將第1絕緣枯合層置於包含導電材 <第2粘合層又上,而亦可將另一層,例如具有不同物 =質:粘度及粘合度等之第3絕緣粘合層置於第丨及2 '看之間。在此情況下可得到類似之優點。 卜各第1及第2粘合層之粘度亦不一定需很均勻, 第"厚度方向有所變化。然而,在此情況下,當第1及 枯°層在炫熱狀態時第2枯合劑之枯度必需等於或小 40 Α4_· ( 2丨〇Χ297公着 --—1 I I---- i—x±衣__ (請先閲讀背面之注意事項再填寫本頁) 訂 A7 B7 五、發明説明(38 )於第1粘合劑之粘度 m -—15-»· II -- m^9 ..... - UK - --If- It- 一 V ---1 *^v^· US 、V5 务 (請先閱讀背面之注意事項Λ填寫本頁) 經濟部中央標準局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS ) Α4規格(210Χ297公釐)A7 V. Description of the invention (37)-Insulating material to obtain a connecting piece similar to that of Embodiment 1. In detail, the surface of the conductive particles having an average particle diameter of 4 μm is coated with a nylon resin film having a thickness of about 0.2 μm and a glass breaking point of 127 t, and the amount of conductive particles added is increased to 15 ν〇ι %. " This example was evaluated in the same manner as in Example 1 and was shown to have satisfactory connection characteristics (connection resistance: 10 or less; insulation resistance: 10 = Ω or more). In this embodiment, the average number of particles on the electrode increases significantly. In the connection part of the electrode, the conductive particles between the electrodes are kept red. The coating is dazzled by heat and pressure during connection, so that the electrical connection can be achieved due to the softening of the first insulation. Conductive. On the other hand, because the surface of the conductive particles in the area between the adjacent electrodes is still coated with the insulating film, because of the small heat and pressure, it can ensure a satisfactory performance, so: <effective particles protruding from the electrode The number is% or above. With the connection sheet structure according to Example 18, A, and A, the concentration of the conductive material in the first adhesive can be increased. The present invention is not limited to the above-mentioned embodiments and various changes can be made without departing from the spirit and scope of the present invention. For example, instead of directly placing the first insulating dry layer on the second adhesive layer containing the conductive material < the second adhesive layer, another layer may also be placed, for example, a third layer with a different substance = quality: viscosity, adhesion, etc. The insulating adhesive layer is placed between the first and second views. In this case, similar advantages can be obtained. The viscosity of the first and second adhesive layers does not necessarily need to be very uniform, and the thickness direction of the first " changes. However, in this case, when the first and dry layers are in the hot state, the dryness of the second dry mixture must be equal to or less than 40 Α4_ (2 丨 〇Χ297 公 節 --- 1 I I ---- i—x ± 衣 __ (Please read the precautions on the back before filling in this page) Order A7 B7 V. Description of invention (38) The viscosity of the first adhesive m-15- »· II-m ^ 9 .....-UK---If- It- Yi V --- 1 * ^ v ^ · US, V5 (please read the notes on the back first and fill in this page) Employee consumption of the Central Bureau of Standards of the Ministry of Economic Affairs The size of the paper printed by the cooperative is applicable to the Chinese National Standard (CNS) Α4 specification (210Χ297mm)
Claims (1)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP1912995 | 1995-02-07 | ||
JP17482395A JP3656768B2 (en) | 1995-02-07 | 1995-07-11 | Connection member, electrode connection structure using the connection member, and connection method |
JP12798196A JP4032439B2 (en) | 1996-05-23 | 1996-05-23 | Connection member, electrode connection structure and connection method using the connection member |
Publications (1)
Publication Number | Publication Date |
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TW311328B true TW311328B (en) | 1997-07-21 |
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Application Number | Title | Priority Date | Filing Date |
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TW85108849A TW311328B (en) | 1995-02-07 | 1996-07-20 | Connection sheet for interconnecting electrodes facing each other, and electrode connection structure and method using the connection sheet |
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TW (1) | TW311328B (en) |
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1996
- 1996-07-20 TW TW85108849A patent/TW311328B/en not_active IP Right Cessation
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