TW290709B - - Google Patents

Info

Publication number
TW290709B
TW290709B TW085103107A TW85103107A TW290709B TW 290709 B TW290709 B TW 290709B TW 085103107 A TW085103107 A TW 085103107A TW 85103107 A TW85103107 A TW 85103107A TW 290709 B TW290709 B TW 290709B
Authority
TW
Taiwan
Application number
TW085103107A
Original Assignee
Okura Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Okura Denki Co Ltd filed Critical Okura Denki Co Ltd
Application granted granted Critical
Publication of TW290709B publication Critical patent/TW290709B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G19/00—Weighing apparatus or methods adapted for special purposes not provided for in the preceding groups
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S367/00—Communications, electrical: acoustic wave systems and devices
    • Y10S367/908—Material level detection, e.g. liquid level

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
TW085103107A 1995-03-27 1996-03-15 TW290709B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07068454A JP3109564B2 (ja) 1995-03-27 1995-03-27 成長結晶体の重量測定装置

Publications (1)

Publication Number Publication Date
TW290709B true TW290709B (zh) 1996-11-11

Family

ID=13374168

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085103107A TW290709B (zh) 1995-03-27 1996-03-15

Country Status (6)

Country Link
US (1) US5763838A (zh)
EP (1) EP0778934A1 (zh)
JP (1) JP3109564B2 (zh)
KR (1) KR100216360B1 (zh)
TW (1) TW290709B (zh)
WO (1) WO1996030729A1 (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3615291B2 (ja) * 1995-12-25 2005-02-02 信越半導体株式会社 引上げ結晶重量測定装置
DE10124899B4 (de) * 2001-05-22 2013-09-05 Crystal Growing Systems Gmbh Kristallziehanlage mit einer Hubeinrichtung
JP4362760B2 (ja) 2003-10-14 2009-11-11 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 半導体単結晶製造装置
JP5104129B2 (ja) * 2007-08-31 2012-12-19 信越半導体株式会社 単結晶直径の検出方法および単結晶引上げ装置
US20100242831A1 (en) * 2009-03-31 2010-09-30 Memc Electronic Materials, Inc. Methods for weighing a pulled object having a changing weight
CN103469296A (zh) * 2013-03-29 2013-12-25 浙江晶盛机电股份有限公司 一种用于蓝宝石炉的三等分圆盘称重装置
US9657407B2 (en) * 2013-10-29 2017-05-23 Siemens Medical Solutions Usa, Inc. Cantilever device for extending capacity of a scale used in a crystal growth apparatus
CN112430844B (zh) * 2021-01-28 2021-04-30 天通控股股份有限公司 一种压电晶体称重长晶装置及工作方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL300759A (zh) * 1962-12-07
US3323606A (en) * 1965-01-06 1967-06-06 Otis Elevator Co Elevator load weighing apparatus
AT284490B (de) * 1968-04-17 1970-09-10 Voest Ag Fahrzeug zum Transport und zum Wägen von metallurgischen Gefäßen
DE2516197C3 (de) * 1975-04-14 1982-02-04 Schweizerische Aluminium AG, 3965 Chippis Wägevorrichtung zur automatischen Regelung des Durchmessers eines Kristalls beim Ziehen aus einem Tiegel
DE3306049A1 (de) * 1983-02-22 1984-08-23 Leybold-Heraeus GmbH, 5000 Köln Vorrichtung zum ziehen eines einkristalls aus einem tiegel
US4503921A (en) * 1983-09-06 1985-03-12 The Alliance Machine Company Weighing system
DE3408071A1 (de) * 1984-03-05 1985-09-05 Siemens AG, 1000 Berlin und 8000 München Waegeanordnung
GB2180357A (en) * 1985-09-10 1987-03-25 Masterweigh Limited Loadcell mounting
AU603220B2 (en) * 1987-05-05 1990-11-08 Schott Solar, Inc. System for controlling apparatus for growing tubular crystalline bodies
DE3718260A1 (de) * 1987-05-30 1988-12-08 Kernforschungsanlage Juelich Verfahren und vorrichtung zur ermittlung einer bestimmungsgroesse fuer den uebergangsbereich zwischen schmelze und kristall
JPS6447914A (en) * 1987-08-18 1989-02-22 Shinetsu Handotai Kk Apparatus for measuring crystal-rod lifting load
JPH04283638A (ja) * 1991-03-12 1992-10-08 Ishikawajima Kensa Keisoku Kk 重心測定装置
US5172782A (en) * 1991-11-15 1992-12-22 Otis Elevator Company Pivot mount of elevator load-weighing at car hitch
JP2796687B2 (ja) * 1992-01-17 1998-09-10 コマツ電子金属株式会社 単結晶製造方法およびその装置
US5345042A (en) * 1992-05-29 1994-09-06 Otis Elevator Company Elevator hitch load weighing tare compensation
JP3606623B2 (ja) * 1995-01-10 2005-01-05 コマツ電子金属株式会社 半導体単結晶製造装置

Also Published As

Publication number Publication date
KR970707428A (ko) 1997-12-01
WO1996030729A1 (en) 1996-10-03
US5763838A (en) 1998-06-09
KR100216360B1 (ko) 1999-08-16
EP0778934A1 (en) 1997-06-18
JPH08261903A (ja) 1996-10-11
JP3109564B2 (ja) 2000-11-20

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Legal Events

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MK4A Expiration of patent term of an invention patent