TW289857B - - Google Patents

Info

Publication number
TW289857B
TW289857B TW084113508A TW84113508A TW289857B TW 289857 B TW289857 B TW 289857B TW 084113508 A TW084113508 A TW 084113508A TW 84113508 A TW84113508 A TW 84113508A TW 289857 B TW289857 B TW 289857B
Authority
TW
Taiwan
Application number
TW084113508A
Original Assignee
Sony Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Co Ltd filed Critical Sony Co Ltd
Application granted granted Critical
Publication of TW289857B publication Critical patent/TW289857B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8248—Combination of bipolar and field-effect technology
    • H01L21/8249—Bipolar and MOS technology
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/009—Bi-MOS

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
TW084113508A 1994-12-19 1995-12-18 TW289857B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6335015A JPH08172139A (ja) 1994-12-19 1994-12-19 半導体装置製造方法

Publications (1)

Publication Number Publication Date
TW289857B true TW289857B (zh) 1996-11-01

Family

ID=18283791

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084113508A TW289857B (zh) 1994-12-19 1995-12-18

Country Status (4)

Country Link
US (1) US5641692A (zh)
JP (1) JPH08172139A (zh)
KR (1) KR100385127B1 (zh)
TW (1) TW289857B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3695029B2 (ja) * 1996-08-14 2005-09-14 ソニー株式会社 半導体装置の製造方法
US6399458B1 (en) 1999-09-21 2002-06-04 International Business Machines Corporation Optimized reachthrough implant for simultaneously forming an MOS capacitor
US6800921B1 (en) 2000-03-01 2004-10-05 International Business Machines Corporation Method of fabricating a polysilicon capacitor utilizing fet and bipolar base polysilicon layers
DE10138648A1 (de) * 2001-08-07 2003-03-06 Infineon Technologies Ag Verfahren zum parallelen Herstellen eines MOS-Transistors und eines Bipolartransistors
US6987039B2 (en) * 2001-10-03 2006-01-17 Texas Instruments Incorporated Forming lateral bipolar junction transistor in CMOS flow
JP3790237B2 (ja) * 2003-08-26 2006-06-28 株式会社東芝 半導体装置の製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492786B1 (zh) * 1969-03-28 1974-01-22
NL7017066A (zh) * 1970-11-21 1972-05-24
JPS52132684A (en) * 1976-04-29 1977-11-07 Sony Corp Insulating gate type field effect transistor
US4325180A (en) * 1979-02-15 1982-04-20 Texas Instruments Incorporated Process for monolithic integration of logic, control, and high voltage interface circuitry
JPS567463A (en) * 1979-06-29 1981-01-26 Hitachi Ltd Semiconductor device and its manufacture
US4409725A (en) * 1980-10-16 1983-10-18 Nippon Gakki Seizo Kabushiki Kaisha Method of making semiconductor integrated circuit
JPS5936959A (ja) * 1982-08-24 1984-02-29 Mitsubishi Electric Corp 半導体装置の製造方法
IT1188309B (it) * 1986-01-24 1988-01-07 Sgs Microelettrica Spa Procedimento per la fabbricazione di dispositivi elettronici integrati,in particolare transistori mos a canale p ad alta tensione
JPH0812918B2 (ja) * 1986-03-28 1996-02-07 株式会社東芝 半導体装置の製造方法
JP2565317B2 (ja) * 1986-12-03 1996-12-18 富士通株式会社 半導体装置の製造方法
JPH025463A (ja) * 1988-06-24 1990-01-10 Hitachi Ltd 半導体集積回路装置及びその製造方法
JPH0236561A (ja) * 1988-07-27 1990-02-06 Hitachi Ltd 半導体集積回路装置及びその製造方法
US5141881A (en) * 1989-04-20 1992-08-25 Sanyo Electric Co., Ltd. Method for manufacturing a semiconductor integrated circuit
US5288651A (en) * 1989-11-09 1994-02-22 Kabushiki Kaisha Toshiba Method of making semiconductor integrated circuit device including bipolar transistors, MOS FETs and CCD
DE69133446T2 (de) * 1990-11-14 2006-02-09 Samsung Semiconductor, Inc., San Jose BiCMOS-Verfahren mit Bipolartransistor mit geringem Basis-Rekombinationsstrom
US5374569A (en) * 1992-09-21 1994-12-20 Siliconix Incorporated Method for forming a BiCDMOS
US5288652A (en) * 1992-12-18 1994-02-22 Vlsi Technology, Inc. BICMOS-compatible method for creating a bipolar transistor with laterally graded emitter structure

Also Published As

Publication number Publication date
JPH08172139A (ja) 1996-07-02
US5641692A (en) 1997-06-24
KR100385127B1 (ko) 2003-09-06

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