TW248610B - Implementing method for submicron T-type gate of microwave transistor - Google Patents

Implementing method for submicron T-type gate of microwave transistor

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Publication number
TW248610B
TW248610B TW83105375A TW83105375A TW248610B TW 248610 B TW248610 B TW 248610B TW 83105375 A TW83105375 A TW 83105375A TW 83105375 A TW83105375 A TW 83105375A TW 248610 B TW248610 B TW 248610B
Authority
TW
Taiwan
Prior art keywords
type gate
submicron
implementing method
microwave transistor
present
Prior art date
Application number
TW83105375A
Other languages
Chinese (zh)
Inventor
Tzy-Horng Chen
Original Assignee
Tzy-Horng Chen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tzy-Horng Chen filed Critical Tzy-Horng Chen
Priority to TW83105375A priority Critical patent/TW248610B/en
Application granted granted Critical
Publication of TW248610B publication Critical patent/TW248610B/en

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Abstract

A new implementing method for submicron T-type gate of microwave transistor mainly utilizes poly methyl isopropenyl ektone and poly methyl methacrylate acid to form photoresist body of three layers with low high and low light sensitivity. After being lit by aligned ultraviolet of variation to generate exposed erosion space with different sensitivity, then being steeped in development solution and baked to present T-type trench, filling space by evaporation and lift-off photoresist body to present T-type gate.
TW83105375A 1994-10-15 1994-10-15 Implementing method for submicron T-type gate of microwave transistor TW248610B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83105375A TW248610B (en) 1994-10-15 1994-10-15 Implementing method for submicron T-type gate of microwave transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83105375A TW248610B (en) 1994-10-15 1994-10-15 Implementing method for submicron T-type gate of microwave transistor

Publications (1)

Publication Number Publication Date
TW248610B true TW248610B (en) 1995-06-01

Family

ID=51401229

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83105375A TW248610B (en) 1994-10-15 1994-10-15 Implementing method for submicron T-type gate of microwave transistor

Country Status (1)

Country Link
TW (1) TW248610B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8435875B1 (en) 2012-01-11 2013-05-07 National Chiao Tung University Method for forming T-shaped gate structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8435875B1 (en) 2012-01-11 2013-05-07 National Chiao Tung University Method for forming T-shaped gate structure

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MM4A Annulment or lapse of patent due to non-payment of fees