TW202435733A - 壓電元件和致動器 - Google Patents

壓電元件和致動器 Download PDF

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Publication number
TW202435733A
TW202435733A TW112144848A TW112144848A TW202435733A TW 202435733 A TW202435733 A TW 202435733A TW 112144848 A TW112144848 A TW 112144848A TW 112144848 A TW112144848 A TW 112144848A TW 202435733 A TW202435733 A TW 202435733A
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TW
Taiwan
Prior art keywords
piezoelectric film
piezoelectric
electrode
film
vcr
Prior art date
Application number
TW112144848A
Other languages
English (en)
Chinese (zh)
Inventor
小林宏之
中村誠吾
杉本真也
佐佐木勉
Original Assignee
日商富士軟片股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商富士軟片股份有限公司 filed Critical 日商富士軟片股份有限公司
Publication of TW202435733A publication Critical patent/TW202435733A/zh

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H10N30/708—Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/079—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
TW112144848A 2022-11-28 2023-11-21 壓電元件和致動器 TW202435733A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022189584 2022-11-28
JP2022-189584 2022-11-28

Publications (1)

Publication Number Publication Date
TW202435733A true TW202435733A (zh) 2024-09-01

Family

ID=91323403

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112144848A TW202435733A (zh) 2022-11-28 2023-11-21 壓電元件和致動器

Country Status (5)

Country Link
US (1) US20250275477A1 (https=)
EP (1) EP4629810A4 (https=)
JP (1) JPWO2024116761A1 (https=)
TW (1) TW202435733A (https=)
WO (1) WO2024116761A1 (https=)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005123421A (ja) * 2003-10-17 2005-05-12 Matsushita Electric Ind Co Ltd 圧電体薄膜素子、インクジェットヘッド、インクジェット式記録装置、角速度センサ及びディスク装置用圧電アクチュエータ
JP2007059525A (ja) * 2005-08-23 2007-03-08 Fujifilm Corp 積層型圧電素子及びそれを用いる装置、並びに、積層型圧電素子の製造方法
JP5280789B2 (ja) * 2008-09-30 2013-09-04 富士フイルム株式会社 鉛含有ペロブスカイト型酸化物膜およびその作製方法、鉛含有ペロブスカイト型酸化物膜を用いる圧電素子、ならびにこれを用いる液体吐出装置
JP5836755B2 (ja) 2011-10-04 2015-12-24 富士フイルム株式会社 圧電体素子及び液体吐出ヘッド
JP5836754B2 (ja) 2011-10-04 2015-12-24 富士フイルム株式会社 圧電体素子及びその製造方法
US10266936B2 (en) * 2011-10-17 2019-04-23 The United States Of America As Represented By The Secretary Of The Army Process for making lead zirconate titanate (PZT) layers and/or platinum electrodes and products thereof
JP6481394B2 (ja) * 2015-02-04 2019-03-13 三菱マテリアル株式会社 ＭｎドープのＰＺＴ系圧電体膜
WO2016175013A1 (ja) * 2015-04-30 2016-11-03 株式会社村田製作所 圧電デバイス、圧電トランスおよび圧電デバイスの製造方法
US10369787B2 (en) * 2015-05-25 2019-08-06 Konica Minolta, Inc. Piezoelectric thin film, piezoelectric actuator, inkjet head, inkjet printer, and method for manufacturing piezoelectric actuator
TW202235704A (zh) * 2021-02-03 2022-09-16 國立大學法人東京大學 積層結構體及其製造方法
JP7425020B2 (ja) 2021-06-11 2024-01-30 矢崎総業株式会社 電流検出装置及び電源装置

Also Published As

Publication number Publication date
EP4629810A1 (en) 2025-10-08
JPWO2024116761A1 (https=) 2024-06-06
US20250275477A1 (en) 2025-08-28
EP4629810A4 (en) 2026-04-15
WO2024116761A1 (ja) 2024-06-06

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