JPWO2024116761A1 - - Google Patents

Info

Publication number
JPWO2024116761A1
JPWO2024116761A1 JP2024561295A JP2024561295A JPWO2024116761A1 JP WO2024116761 A1 JPWO2024116761 A1 JP WO2024116761A1 JP 2024561295 A JP2024561295 A JP 2024561295A JP 2024561295 A JP2024561295 A JP 2024561295A JP WO2024116761 A1 JPWO2024116761 A1 JP WO2024116761A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024561295A
Other languages
Japanese (ja)
Other versions
JPWO2024116761A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024116761A1 publication Critical patent/JPWO2024116761A1/ja
Publication of JPWO2024116761A5 publication Critical patent/JPWO2024116761A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/704Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H10N30/708Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/853Ceramic compositions
    • H10N30/8548Lead-based oxides
    • H10N30/8554Lead-zirconium titanate [PZT] based
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/07Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/07Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/079Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2024561295A 2022-11-28 2023-11-08 Pending JPWO2024116761A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022189584 2022-11-28
PCT/JP2023/040248 WO2024116761A1 (ja) 2022-11-28 2023-11-08 圧電素子及びアクチュエータ

Publications (2)

Publication Number Publication Date
JPWO2024116761A1 true JPWO2024116761A1 (https=) 2024-06-06
JPWO2024116761A5 JPWO2024116761A5 (https=) 2025-08-06

Family

ID=91323403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024561295A Pending JPWO2024116761A1 (https=) 2022-11-28 2023-11-08

Country Status (5)

Country Link
US (1) US20250275477A1 (https=)
EP (1) EP4629810A4 (https=)
JP (1) JPWO2024116761A1 (https=)
TW (1) TW202435733A (https=)
WO (1) WO2024116761A1 (https=)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005123421A (ja) * 2003-10-17 2005-05-12 Matsushita Electric Ind Co Ltd 圧電体薄膜素子、インクジェットヘッド、インクジェット式記録装置、角速度センサ及びディスク装置用圧電アクチュエータ
JP2007059525A (ja) * 2005-08-23 2007-03-08 Fujifilm Corp 積層型圧電素子及びそれを用いる装置、並びに、積層型圧電素子の製造方法
JP5280789B2 (ja) * 2008-09-30 2013-09-04 富士フイルム株式会社 鉛含有ペロブスカイト型酸化物膜およびその作製方法、鉛含有ペロブスカイト型酸化物膜を用いる圧電素子、ならびにこれを用いる液体吐出装置
JP5836755B2 (ja) 2011-10-04 2015-12-24 富士フイルム株式会社 圧電体素子及び液体吐出ヘッド
JP5836754B2 (ja) 2011-10-04 2015-12-24 富士フイルム株式会社 圧電体素子及びその製造方法
US10266936B2 (en) * 2011-10-17 2019-04-23 The United States Of America As Represented By The Secretary Of The Army Process for making lead zirconate titanate (PZT) layers and/or platinum electrodes and products thereof
JP6481394B2 (ja) * 2015-02-04 2019-03-13 三菱マテリアル株式会社 MnドープのPZT系圧電体膜
WO2016175013A1 (ja) * 2015-04-30 2016-11-03 株式会社村田製作所 圧電デバイス、圧電トランスおよび圧電デバイスの製造方法
US10369787B2 (en) * 2015-05-25 2019-08-06 Konica Minolta, Inc. Piezoelectric thin film, piezoelectric actuator, inkjet head, inkjet printer, and method for manufacturing piezoelectric actuator
TW202235704A (zh) * 2021-02-03 2022-09-16 國立大學法人東京大學 積層結構體及其製造方法
JP7425020B2 (ja) 2021-06-11 2024-01-30 矢崎総業株式会社 電流検出装置及び電源装置

Also Published As

Publication number Publication date
TW202435733A (zh) 2024-09-01
EP4629810A1 (en) 2025-10-08
US20250275477A1 (en) 2025-08-28
EP4629810A4 (en) 2026-04-15
WO2024116761A1 (ja) 2024-06-06

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

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Effective date: 20250521