TW202420403A - 資訊處理方法、電腦程式及資訊處理裝置 - Google Patents

資訊處理方法、電腦程式及資訊處理裝置 Download PDF

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Publication number
TW202420403A
TW202420403A TW112124884A TW112124884A TW202420403A TW 202420403 A TW202420403 A TW 202420403A TW 112124884 A TW112124884 A TW 112124884A TW 112124884 A TW112124884 A TW 112124884A TW 202420403 A TW202420403 A TW 202420403A
Authority
TW
Taiwan
Prior art keywords
semiconductor manufacturing
manufacturing device
data
information processing
sensor
Prior art date
Application number
TW112124884A
Other languages
English (en)
Chinese (zh)
Inventor
高良穣二
吉田晃一
斉翀
舟久保隆男
紀野國祐太
Original Assignee
日商東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商東京威力科創股份有限公司 filed Critical 日商東京威力科創股份有限公司
Publication of TW202420403A publication Critical patent/TW202420403A/zh

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Software Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Evolutionary Computation (AREA)
  • Computing Systems (AREA)
  • Medical Informatics (AREA)
  • Data Mining & Analysis (AREA)
  • Mathematical Physics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Artificial Intelligence (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Semiconductor Integrated Circuits (AREA)
TW112124884A 2022-07-04 2023-07-04 資訊處理方法、電腦程式及資訊處理裝置 TW202420403A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2022-107851 2022-07-04
JP2022107851 2022-07-04
WOPCT/JP2023/024372 2023-06-30
PCT/JP2023/024372 WO2024009902A1 (ja) 2022-07-04 2023-06-30 情報処理方法、コンピュータプログラム及び情報処理装置

Publications (1)

Publication Number Publication Date
TW202420403A true TW202420403A (zh) 2024-05-16

Family

ID=89453506

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112124884A TW202420403A (zh) 2022-07-04 2023-07-04 資訊處理方法、電腦程式及資訊處理裝置

Country Status (6)

Country Link
US (1) US20250124357A1 (https=)
JP (1) JPWO2024009902A1 (https=)
KR (1) KR20250033233A (https=)
CN (1) CN119487613A (https=)
TW (1) TW202420403A (https=)
WO (1) WO2024009902A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150253762A1 (en) 2012-09-26 2015-09-10 Hitachi Kokusai Electric Inc. Integrated management system, management device, method of displaying information for substrate processing apparatus, and recording medium
JP7458808B2 (ja) * 2020-02-07 2024-04-01 東京エレクトロン株式会社 プロセス推定システム、プロセスデータ推定方法及びプログラム
JP7325356B2 (ja) * 2020-02-20 2023-08-14 東京エレクトロン株式会社 情報処理システム及びシミュレーション方法
EP4207006A4 (en) * 2020-08-31 2023-09-27 Fujitsu Limited MODEL GENERATION PROGRAM, MODEL GENERATION METHOD AND MODEL GENERATION APPARATUS

Also Published As

Publication number Publication date
CN119487613A (zh) 2025-02-18
JPWO2024009902A1 (https=) 2024-01-11
US20250124357A1 (en) 2025-04-17
WO2024009902A1 (ja) 2024-01-11
KR20250033233A (ko) 2025-03-07

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