CN119487613A - 信息处理方法、计算机程序以及信息处理装置 - Google Patents

信息处理方法、计算机程序以及信息处理装置 Download PDF

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Publication number
CN119487613A
CN119487613A CN202380049967.6A CN202380049967A CN119487613A CN 119487613 A CN119487613 A CN 119487613A CN 202380049967 A CN202380049967 A CN 202380049967A CN 119487613 A CN119487613 A CN 119487613A
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CN
China
Prior art keywords
semiconductor manufacturing
manufacturing apparatus
data
sensor
information processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380049967.6A
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English (en)
Chinese (zh)
Inventor
高良穰二
吉田晃一
赛松
舟久保隆男
纪野国祐太
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Tokyo Electron Ltd
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Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of CN119487613A publication Critical patent/CN119487613A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Software Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Evolutionary Computation (AREA)
  • Computing Systems (AREA)
  • Medical Informatics (AREA)
  • Data Mining & Analysis (AREA)
  • Mathematical Physics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Artificial Intelligence (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Semiconductor Integrated Circuits (AREA)
CN202380049967.6A 2022-07-04 2023-06-30 信息处理方法、计算机程序以及信息处理装置 Pending CN119487613A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-107851 2022-07-04
JP2022107851 2022-07-04
PCT/JP2023/024372 WO2024009902A1 (ja) 2022-07-04 2023-06-30 情報処理方法、コンピュータプログラム及び情報処理装置

Publications (1)

Publication Number Publication Date
CN119487613A true CN119487613A (zh) 2025-02-18

Family

ID=89453506

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380049967.6A Pending CN119487613A (zh) 2022-07-04 2023-06-30 信息处理方法、计算机程序以及信息处理装置

Country Status (6)

Country Link
US (1) US20250124357A1 (https=)
JP (1) JPWO2024009902A1 (https=)
KR (1) KR20250033233A (https=)
CN (1) CN119487613A (https=)
TW (1) TW202420403A (https=)
WO (1) WO2024009902A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150253762A1 (en) 2012-09-26 2015-09-10 Hitachi Kokusai Electric Inc. Integrated management system, management device, method of displaying information for substrate processing apparatus, and recording medium
JP7458808B2 (ja) * 2020-02-07 2024-04-01 東京エレクトロン株式会社 プロセス推定システム、プロセスデータ推定方法及びプログラム
JP7325356B2 (ja) * 2020-02-20 2023-08-14 東京エレクトロン株式会社 情報処理システム及びシミュレーション方法
EP4207006A4 (en) * 2020-08-31 2023-09-27 Fujitsu Limited MODEL GENERATION PROGRAM, MODEL GENERATION METHOD AND MODEL GENERATION APPARATUS

Also Published As

Publication number Publication date
JPWO2024009902A1 (https=) 2024-01-11
US20250124357A1 (en) 2025-04-17
WO2024009902A1 (ja) 2024-01-11
TW202420403A (zh) 2024-05-16
KR20250033233A (ko) 2025-03-07

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