KR20250033233A - 정보 처리 방법, 컴퓨터 프로그램 및 정보 처리 장치 - Google Patents

정보 처리 방법, 컴퓨터 프로그램 및 정보 처리 장치 Download PDF

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Publication number
KR20250033233A
KR20250033233A KR1020257002178A KR20257002178A KR20250033233A KR 20250033233 A KR20250033233 A KR 20250033233A KR 1020257002178 A KR1020257002178 A KR 1020257002178A KR 20257002178 A KR20257002178 A KR 20257002178A KR 20250033233 A KR20250033233 A KR 20250033233A
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KR
South Korea
Prior art keywords
semiconductor manufacturing
manufacturing device
data
sensor
information processing
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Pending
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KR1020257002178A
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English (en)
Korean (ko)
Inventor
조지 다카요시
고오이치 요시다
총 사이
다카오 후나쿠보
유타 기노쿠니
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도쿄엘렉트론가부시키가이샤
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Publication of KR20250033233A publication Critical patent/KR20250033233A/ko
Pending legal-status Critical Current

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • H01L21/67253—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Software Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Evolutionary Computation (AREA)
  • Computing Systems (AREA)
  • Medical Informatics (AREA)
  • Data Mining & Analysis (AREA)
  • Mathematical Physics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Artificial Intelligence (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Semiconductor Integrated Circuits (AREA)
KR1020257002178A 2022-07-04 2023-06-30 정보 처리 방법, 컴퓨터 프로그램 및 정보 처리 장치 Pending KR20250033233A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2022-107851 2022-07-04
JP2022107851 2022-07-04
PCT/JP2023/024372 WO2024009902A1 (ja) 2022-07-04 2023-06-30 情報処理方法、コンピュータプログラム及び情報処理装置

Publications (1)

Publication Number Publication Date
KR20250033233A true KR20250033233A (ko) 2025-03-07

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ID=89453506

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257002178A Pending KR20250033233A (ko) 2022-07-04 2023-06-30 정보 처리 방법, 컴퓨터 프로그램 및 정보 처리 장치

Country Status (6)

Country Link
US (1) US20250124357A1 (https=)
JP (1) JPWO2024009902A1 (https=)
KR (1) KR20250033233A (https=)
CN (1) CN119487613A (https=)
TW (1) TW202420403A (https=)
WO (1) WO2024009902A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014050808A1 (ja) 2012-09-26 2014-04-03 株式会社日立国際電気 統合管理システム、管理装置、基板処理装置の情報表示方法及び記録媒体

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7458808B2 (ja) * 2020-02-07 2024-04-01 東京エレクトロン株式会社 プロセス推定システム、プロセスデータ推定方法及びプログラム
JP7325356B2 (ja) * 2020-02-20 2023-08-14 東京エレクトロン株式会社 情報処理システム及びシミュレーション方法
EP4207006A4 (en) * 2020-08-31 2023-09-27 Fujitsu Limited MODEL GENERATION PROGRAM, MODEL GENERATION METHOD AND MODEL GENERATION APPARATUS

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014050808A1 (ja) 2012-09-26 2014-04-03 株式会社日立国際電気 統合管理システム、管理装置、基板処理装置の情報表示方法及び記録媒体

Also Published As

Publication number Publication date
CN119487613A (zh) 2025-02-18
JPWO2024009902A1 (https=) 2024-01-11
US20250124357A1 (en) 2025-04-17
WO2024009902A1 (ja) 2024-01-11
TW202420403A (zh) 2024-05-16

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