TW202346614A - Cemented carbide and cutting tool using same - Google Patents

Cemented carbide and cutting tool using same Download PDF

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TW202346614A
TW202346614A TW112102618A TW112102618A TW202346614A TW 202346614 A TW202346614 A TW 202346614A TW 112102618 A TW112102618 A TW 112102618A TW 112102618 A TW112102618 A TW 112102618A TW 202346614 A TW202346614 A TW 202346614A
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phase
cemented carbide
less
particles
vanadium
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宮坂宣夫
山川隆洋
広瀬和弘
内野克哉
山本剛志
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日商住友電工硬質合金股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C29/00Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
    • C22C29/02Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides
    • C22C29/06Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds
    • C22C29/08Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds based on tungsten carbide

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Powder Metallurgy (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

This cemented carbide comprises: a first phase comprising tungsten carbide particles; and a second phase including cobalt as a main component. The total content of the first phase and the second phase in the cemented carbide is 97 vol% or more, the average value of the circle-equivalent diameters of the tungsten carbide particles is 0.8 [mu]m or less, the cobalt content of the cemented carbide is 3-10 mass%, the vanadium content of the cemented carbide is 0.01-0.30 mass%, and the maximum value of the vanadium content in an interface region between the second phase and the (0001) crystal planes of the tungsten carbide particles is 15 at% or less.

Description

超硬合金及使用其之切削工具Cemented carbide and cutting tools using it

本發明係關於一種超硬合金及使用其之切削工具。The present invention relates to a cemented carbide and a cutting tool using the same.

於印刷電路基板之開孔中,以ϕ1 mm以下之小徑之開孔為主流。因此,作為用於小徑鑽孔器等工具之超硬合金,使用有包含硬質相為平均粒徑1 μm以下之碳化鎢粒子的所謂微粒超硬合金(例如,專利文獻1~專利文獻3)。 [先前專利文獻] [專利文獻] Among the openings of printed circuit boards, openings with a diameter of ϕ1 mm or less are the mainstream. Therefore, as cemented carbide used for tools such as small-diameter drills, so-called fine-grained cemented carbide containing tungsten carbide particles with a hard phase having an average particle diameter of 1 μm or less is used (for example, Patent Documents 1 to 3). . [Previous Patent Document] [Patent Document]

[專利文獻1]日本專利特開2007-92090號公報 [專利文獻2]日本專利特開2012-52237號公報 [專利文獻3]日本專利特開2012-117100號公報 [Patent Document 1] Japanese Patent Application Publication No. 2007-92090 [Patent Document 2] Japanese Patent Application Publication No. 2012-52237 [Patent Document 3] Japanese Patent Application Publication No. 2012-117100

本發明之超硬合金 具備包含碳化鎢粒子之第1相、及包含鈷作為主成分之第2相,且 上述超硬合金之上述第1相及上述第2相之合計含有率為97體積%以上, 上述碳化鎢粒子之圓相當徑之平均值為0.8 μm以下, 上述超硬合金之鈷含有率為3質量%以上10質量%以下, 上述超硬合金之釩含有率為0.01質量%以上0.30質量%以下, 上述碳化鎢粒子之(0001)結晶面與上述第2相之界面區域中之釩含有率之最大值為15原子%以下。 Superhard alloy of the present invention It has a first phase containing tungsten carbide particles and a second phase containing cobalt as a main component, and The total content of the above-mentioned first phase and the above-mentioned second phase in the above-mentioned cemented carbide is 97% by volume or more, The average circular equivalent diameter of the above-mentioned tungsten carbide particles is 0.8 μm or less, The cobalt content of the above-mentioned cemented carbide is not less than 3% by mass and not more than 10% by mass, The vanadium content of the above-mentioned cemented carbide is not less than 0.01% by mass and not more than 0.30% by mass, The maximum value of the vanadium content in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase is 15 atomic % or less.

本發明之切削工具具備包含上述超硬合金之刀尖。The cutting tool of the present invention has a cutting edge made of the above-mentioned cemented carbide.

[本發明所欲解決之問題][Problems to be solved by this invention]

近年來,隨著5G(第5代移動通信系統)之擴大,資訊不斷高容量化。因此,要求印刷電路基板具有更高之耐熱性。為了提昇印刷電路基板之耐熱性,開發有一種提高構成印刷電路基板之樹脂或玻璃填料之耐熱性之技術。另一方面,由此使得印刷電路基板更難切割。因此,於印刷電路基板之微細加工中,有切削工具容易產生磨耗或折損之傾向。In recent years, with the expansion of 5G (fifth generation mobile communication system), the capacity of information has continued to increase. Therefore, printed circuit boards are required to have higher heat resistance. In order to improve the heat resistance of printed circuit boards, a technology has been developed to improve the heat resistance of resin or glass fillers constituting printed circuit boards. On the other hand, this makes the printed circuit board more difficult to cut. Therefore, in the microprocessing of printed circuit boards, cutting tools tend to be easily worn or broken.

因此,本發明之目的在於提供一種尤其於用作印刷電路基板之微細加工中所使用之切削工具之材料之情形時,亦可提供具有較長之工具壽命之切削工具的超硬合金及具備其之切削工具。 [本發明之效果] Therefore, an object of the present invention is to provide a cemented carbide and a cutting tool having a longer tool life, especially when used as a material for cutting tools used in micromachining of printed circuit boards. of cutting tools. [Effects of the present invention]

根據本發明之超硬合金,能夠提供一種切削工具,該切削工具尤其於用於印刷電路基板之微細加工之情形時,亦具有較長之工具壽命。The cemented carbide according to the present invention can provide a cutting tool that has a long tool life, especially when used for micromachining of printed circuit substrates.

[本發明之實施方式之說明] 首先,例舉本發明之實施方式來進行說明。 (1)本發明之超硬合金 具備包含碳化鎢粒子之第1相、及包含鈷作為主成分之第2相,且 上述超硬合金之上述第1相及上述第2相之合計含有率為97體積%以上, 上述碳化鎢粒子之圓相當徑之平均值為0.8 μm以下, 上述超硬合金之鈷含有率為3質量%以上10質量%以下, 上述超硬合金之釩含有率為0.01質量%以上0.30質量%以下, 上述碳化鎢粒子之(0001)結晶面與上述第2相之界面區域中之釩含有率之最大值為15原子%以下。 [Description of embodiments of the present invention] First, embodiments of the present invention will be described with examples. (1) Super hard alloy of the present invention It has a first phase containing tungsten carbide particles and a second phase containing cobalt as a main component, and The total content of the above-mentioned first phase and the above-mentioned second phase in the above-mentioned cemented carbide is 97% by volume or more, The average circular equivalent diameter of the above-mentioned tungsten carbide particles is 0.8 μm or less, The cobalt content of the above-mentioned cemented carbide is not less than 3% by mass and not more than 10% by mass, The vanadium content of the above-mentioned cemented carbide is not less than 0.01% by mass and not more than 0.30% by mass, The maximum value of the vanadium content in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase is 15 atomic % or less.

根據本發明之超硬合金,可提供一種切削工具,該切削工具尤其於用於印刷電路基板之微細加工之情形時,亦具有較長之工具壽命。The cemented carbide according to the present invention can provide a cutting tool that has a long tool life, especially when used for micromachining of printed circuit substrates.

(2)較佳為於上述(1)中,上述超硬合金具備第3相,該第3相含有包含10原子%以上之釩的第3相粒子,且 上述超硬合金之上述第3相之含有率超過0體積%且為1體積%以下, 上述第3相粒子之圓相當徑之最大值為0.5 μm以下。 (2) In the above (1), preferably, the cemented carbide has a third phase containing third phase particles containing 10 atomic % or more of vanadium, and The content of the third phase in the above-mentioned cemented carbide exceeds 0% by volume and is less than 1% by volume, The maximum value of the circle equivalent diameter of the third phase particles is 0.5 μm or less.

藉此,不存在可能成為折損起點之圓相當徑超過0.5 μm之粗大之第3相粒子,故使用該超硬合金之切削工具之耐折損性得到提昇。Thereby, there are no coarse third-phase particles with a circle-equivalent diameter exceeding 0.5 μm that may become the starting point of breakage, so the breakage resistance of cutting tools using this cemented carbide is improved.

(3)較佳為於上述(1)或(2)中,上述界面區域中之鉻含有率之最大值為20原子%以下。(3) In the above (1) or (2), it is preferable that the maximum value of the chromium content in the interface region is 20 atomic % or less.

藉此,可抑制因界面區域存在鉻而使WC粒子與Co粒子之界面強度降低。因此,於該超硬合金中,不易因界面強度降低而發生WC粒子之脫落,使用該超硬合金之切削工具可具有優異之耐磨耗性及耐折損性。This can prevent the interface strength between WC particles and Co particles from decreasing due to the presence of chromium in the interface region. Therefore, in this cemented carbide, it is difficult for WC particles to fall off due to a reduction in interface strength, and cutting tools using this cemented carbide can have excellent wear resistance and breakage resistance.

(4)本發明之切削工具具備包含上述(1)至(3)中任一項之超硬合金之刀尖。(4) The cutting tool of the present invention is provided with a cutting edge containing the cemented carbide in any one of the above (1) to (3).

本發明之切削工具尤其於用於印刷電路基板之微細加工之情形時,亦可具有較長之工具壽命。The cutting tool of the present invention can also have a longer tool life, especially when used for micro-machining of printed circuit substrates.

[本發明之實施方式之詳情] 以下,參照圖式,對本發明之超硬合金及切削工具之具體例進行說明。於本發明之圖式中,相同參照符號表示相同部分或相當部分。又,為使圖式明確及簡化,長度、寬度、厚度、深度等尺寸關係進行了適當變更,不一定表示實際之尺寸關係。 [Details of embodiments of the present invention] Hereinafter, specific examples of the cemented carbide and cutting tool of the present invention will be described with reference to the drawings. In the drawings of the present invention, the same reference characters represent the same or equivalent parts. In addition, in order to clarify and simplify the drawings, dimensional relationships such as length, width, thickness, and depth have been appropriately changed, and they do not necessarily represent actual dimensional relationships.

於本發明中,「A~B」這種形式之記法意指範圍之上限下限(即A以上B以下),於A未記載單位,僅B記載有單位之情形時,A之單位與B之單位相同。In the present invention, the notation in the form of "A~B" means the upper and lower limits of the range (that is, A is above A and B is below). When A does not record the unit and only B records the unit, the unit of A is the same as the unit of B. The units are the same.

於本發明中,於數值範圍下限及上限分別記載有1個以上之數值之情形時,視作亦揭示出下限所記載之任意1個數值與上限所記載之任意1個數值之組合。例如,於記載有a1以上、b1以上、c1以上作為下限,且記載有a2以下、b2以下、c2以下作為上限之情形時,視作亦揭示出a1以上a2以下、a1以上b2以下、a1以上c2以下、b1以上a2以下、b1以上b2以下、b1以上c2以下、c1以上a2以下、c1以上b2以下、c1以上c2以下。In the present invention, when the lower limit and the upper limit of a numerical range are each described with more than one numerical value, it is deemed to also disclose the combination of any one numerical value described in the lower limit and any one numerical value described in the upper limit. For example, when a1 or more, b1 or more, c1 or more are described as the lower limit, and a2 or less, b2 or less, c2 or less are described as the upper limit, it is deemed to also reveal that a1 or more, a2 or less, a1 or more, b2 or less, a1 or more below c2, above b1 but below a2, above b1 but below b2, above b1 but below c2, above c1 but below a2, above c1 but below b2, above c1 but below c2.

於本發明中,在藉由化學式表示化合物等之情形時,若未對原子比做出特別限定,則視作包括先前公知之所有原子比,不一定僅限於化學計量範圍內之原子比。In the present invention, when a compound or the like is represented by a chemical formula, unless the atomic ratio is specifically limited, it is deemed to include all previously known atomic ratios, and is not necessarily limited to atomic ratios within the stoichiometric range.

於本發明中之結晶學記載中,分別以[]表示個別方位,以<>表示集合方位,以()表示個別面,以{}表示集合面。又,結晶學上之指數為負之情況通常藉由在數字上方標註"-"(短橫)來表達,而於本發明中,係在數字之前標註負號。In the crystallographic description in the present invention, [] is used to represent individual orientations, <> is used to represent collective orientations, () is used to represent individual planes, and {} is used to represent collective planes. In addition, when the crystallographic index is negative, it is usually expressed by placing a "-" (dash) above the number. However, in the present invention, a negative sign is placed before the number.

[實施方式1:超硬合金] 本發明之一實施方式(以下亦記為「本實施方式」)之超硬合金 具備包含碳化鎢粒子之第1相、及包含鈷作為主成分之第2相,且 該超硬合金之該第1相及該第2相之合計含有率為97體積%以上, 該碳化鎢粒子之圓相當徑之平均值為0.8 μm以下, 該超硬合金之鈷含有率為3質量%以上10質量%以下, 該超硬合金之釩含有率為0.01質量%以上0.30質量%以下, 該碳化鎢粒子之(0001)結晶面與該第2相之界面區域中之釩含有率之最大值為15原子%以下。 [Embodiment 1: Cemented carbide] Cemented carbide according to one embodiment of the present invention (hereinafter also referred to as “this embodiment”) It has a first phase containing tungsten carbide particles and a second phase containing cobalt as a main component, and The total content of the first phase and the second phase of the cemented carbide is 97% by volume or more, The average circular equivalent diameter of the tungsten carbide particles is 0.8 μm or less, The cobalt content of the cemented carbide is not less than 3% by mass and not more than 10% by mass, The vanadium content of the cemented carbide is not less than 0.01% by mass and not more than 0.30% by mass, The maximum value of the vanadium content in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase is 15 atomic % or less.

根據本實施方式之超硬合金,可提供一種切削工具,該切削工具尤其於用於印刷電路基板之微細加工之情形時,亦具有較長之工具壽命。其原因尚不明確,推測如以下之(i)~(v)。The cemented carbide according to this embodiment can provide a cutting tool that has a long tool life, especially when used for micromachining of printed circuit boards. The reason is not yet clear, but it is speculated to be as follows (i) to (v).

(i)本實施方式之超硬合金具備包含複數個碳化鎢粒子(以下,亦記為「WC粒子」)之第1相、及包含鈷作為主成分之第2相,且該超硬合金之第1相及第2相之合計含有率為97體積%以上。藉此,超硬合金具有較高之硬度及強度,使用該超硬合金之切削工具可具有優異之耐磨耗性及耐折損性。(i) The cemented carbide of this embodiment has a first phase including a plurality of tungsten carbide particles (hereinafter also referred to as "WC particles") and a second phase including cobalt as a main component, and the cemented carbide has The total content of the first phase and the second phase is 97% by volume or more. Thus, the cemented carbide has high hardness and strength, and cutting tools using the cemented carbide can have excellent wear resistance and breakage resistance.

(ii)於本實施方式之超硬合金中,WC粒子之圓相當徑之平均值為0.8 μm以下。藉此,超硬合金具有較高之硬度,使用該超硬合金之切削工具可具有優異之耐磨耗性。又,該超硬合金具有優異之強度,使用該超硬合金之切削工具可具有優異之耐折損性。(ii) In the cemented carbide according to this embodiment, the average value of the circle equivalent diameter of the WC particles is 0.8 μm or less. Thereby, the cemented carbide has higher hardness, and cutting tools using the cemented carbide can have excellent wear resistance. In addition, the cemented carbide has excellent strength, and cutting tools using the cemented carbide can have excellent breakage resistance.

(iii)本實施方式之超硬合金之鈷含有率為3質量%以上10質量%以下。藉此,超硬合金具有較高之硬度及強度。使用該超硬合金之切削工具可具有優異之耐磨耗性及耐折損性。(iii) The cobalt content of the cemented carbide according to this embodiment is 3% by mass or more and 10% by mass or less. As a result, cemented carbide has higher hardness and strength. Cutting tools using this cemented carbide can have excellent wear resistance and breakage resistance.

(iv)本實施方式之超硬合金之釩含有率為0.01質量%以上0.30質量%以下。藉此,粗大之WC粒子之產生受到抑制,超硬合金之組織變得緻密化。因此,該超硬合金具有優異之硬度及強度,使用該超硬合金之切削工具可具有優異之耐磨耗性及耐折損性。(iv) The vanadium content of the cemented carbide according to this embodiment is 0.01 mass% or more and 0.30 mass% or less. Thereby, the generation of coarse WC particles is suppressed, and the structure of the cemented carbide becomes densified. Therefore, the cemented carbide has excellent hardness and strength, and cutting tools using the cemented carbide can have excellent wear resistance and breakage resistance.

(v)於本實施方式之超硬合金中,碳化鎢粒子之(0001)結晶面與第2相之界面區域中之釩含有率之最大值為15原子%以下。藉此,於該界面區域中,釩稠化地存在之釩稠化層之形成受到抑制。因此,可抑制因釩稠化層而使WC粒子與第2相之界面強度降低。因此,於該超硬合金中,不易因界面強度降低而發生WC粒子之脫落,使用該超硬合金之切削工具可具有優異之耐磨耗性及耐折損性。(v) In the cemented carbide of this embodiment, the maximum value of the vanadium content in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase is 15 atomic % or less. This suppresses the formation of a vanadium-densified layer in which vanadium is concentrated in the interface region. Therefore, it is possible to suppress a decrease in the interface strength between the WC particles and the second phase due to the vanadium thickened layer. Therefore, in this cemented carbide, it is difficult for WC particles to fall off due to a reduction in interface strength, and cutting tools using this cemented carbide can have excellent wear resistance and breakage resistance.

<超硬合金之組成> <<第1相、第2相及第3相之含有率>> 本實施方式之超硬合金具備包含碳化鎢粒子之第1相、及包含鈷作為主成分之第2相。該超硬合金之第1相及第2相之合計含有率為97體積%以上。藉此,超硬合金具有較高之硬度及強度,使用該超硬合金之切削工具可具有優異之耐磨耗性及耐折損性。 <Composition of cemented carbide> <<Content ratio of the 1st phase, 2nd phase and 3rd phase>> The cemented carbide according to this embodiment includes a first phase containing tungsten carbide particles and a second phase containing cobalt as a main component. The total content of the first phase and the second phase of the cemented carbide is 97% by volume or more. Thus, the cemented carbide has high hardness and strength, and cutting tools using the cemented carbide can have excellent wear resistance and breakage resistance.

超硬合金之第1相及第2相之合計含有率之下限為97體積%以上,較佳為98體積%以上,更佳為99體積%以上。超硬合金之第1相及第2相之合計含有率之上限較佳為100體積%以下。超硬合金之第1相及第2相之合計含有率較佳為97體積%以上100體積%以下,更佳為98體積%以上100體積%以下,進而較佳為99體積%以上100體積%以下。超硬合金較佳為包含第1相及第2相。The lower limit of the total content rate of the first phase and the second phase of the cemented carbide is 97 volume % or more, preferably 98 volume % or more, more preferably 99 volume % or more. The upper limit of the total content rate of the first phase and the second phase of cemented carbide is preferably 100 volume % or less. The total content rate of the first phase and the second phase of the cemented carbide is preferably 97 volume % or more and 100 volume % or less, more preferably 98 volume % or more and 100 volume % or less, and still more preferably 99 volume % or more and 100 volume % the following. The cemented carbide preferably contains a first phase and a second phase.

就提昇硬度之觀點而言,超硬合金之第1相之含有率之下限較佳為82體積%以上,更佳為85體積%以上,進而較佳為87體積%以上。超硬合金之第1相之含有率之上限未達100體積%,就提昇耐折損性之觀點而言,較佳為95體積%以下,更佳為94體積%以下,進而較佳為93體積%以下,進而更佳為90體積%以下。超硬合金之第1相之含有率較佳為82體積%以上95體積%以下,更佳為85體積%以上93體積%以下,進而較佳為87體積%以上90體積%以下。From the viewpoint of increasing the hardness, the lower limit of the content rate of the first phase of the cemented carbide is preferably 82 volume % or more, more preferably 85 volume % or more, and further preferably 87 volume % or more. The upper limit of the content rate of the first phase of cemented carbide is less than 100 volume %. From the viewpoint of improving the breakage resistance, it is preferably 95 volume % or less, more preferably 94 volume % or less, and still more preferably 93 volume %. % or less, and more preferably 90 volume % or less. The content rate of the first phase of the cemented carbide is preferably 82 volume % or more and 95 volume % or less, more preferably 85 volume % or more and 93 volume % or less, further preferably 87 volume % or more and 90 volume % or less.

就提昇耐折損性之觀點而言,超硬合金之第2相之含有率之下限較佳為5體積%以上,更佳為7體積%以上,進而較佳為9體積%以上。就提昇硬度之觀點而言,超硬合金之第2相之含有率之上限較佳為18體積%以下,更佳為16體積%以下,進而較佳為14體積%以下。超硬合金之第2相之含有率較佳為5體積%以上18體積%以下,更佳為7體積%以上16體積%以下,進而較佳為9體積%以上14體積%以下。From the viewpoint of improving the breakage resistance, the lower limit of the content rate of the second phase of the cemented carbide is preferably 5 volume % or more, more preferably 7 volume % or more, and further preferably 9 volume % or more. From the viewpoint of increasing the hardness, the upper limit of the content rate of the second phase of the cemented carbide is preferably 18 volume % or less, more preferably 16 volume % or less, and still more preferably 14 volume % or less. The content rate of the second phase of the cemented carbide is preferably from 5% to 18% by volume, more preferably from 7% to 16% by volume, further preferably from 9% to 14% by volume.

本實施方式之超硬合金除第1相及第2相以外,還可具備第3相,該第3相含有包含10原子%以上之釩的第3相粒子。In addition to the first phase and the second phase, the cemented carbide of this embodiment may further include a third phase containing third phase particles containing 10 atomic % or more of vanadium.

於超硬合金包含第3相之情形時,超硬合金之第3相之含有率較佳為超過0體積%且為1體積%以下。藉此,可抑制因第3相之存在而使超硬合金之耐折損性降低。超硬合金之第3相之含有率之下限超過0體積%。超硬合金之第3相之含有率之上限較佳為1體積%以下,更佳為0.8體積以下,進而較佳為0.7體積%以下。於超硬合金包含第3相之情形時,超硬合金之第3相之含有率較佳為超過0體積%且為1體積%以下,更佳為超過0體積%且為0.8體積%以下,進而較佳為超過0體積%且為0.7體積%以下。When the cemented carbide contains the third phase, the content rate of the third phase of the cemented carbide is preferably more than 0% by volume and 1% by volume or less. This can prevent the cemented carbide from being reduced in fracture resistance due to the presence of the third phase. The lower limit of the content rate of the third phase of cemented carbide exceeds 0 volume %. The upper limit of the content rate of the third phase of cemented carbide is preferably 1 volume % or less, more preferably 0.8 volume % or less, and still more preferably 0.7 volume % or less. When the cemented carbide contains the third phase, the content rate of the third phase of the cemented carbide is preferably more than 0 volume % and 1 volume % or less, more preferably more than 0 volume % and 0.8 volume % or less. Furthermore, it is more preferable that it exceeds 0 volume% and is 0.7 volume% or less.

關於本實施方式之超硬合金,只要顯示出本發明之效果即可,可包含除第1相、第2相及第3相以外之不可避免之雜質。作為該不可避免之雜質,例如可例舉:鐵、鉬、硫。超硬合金之該不可避免之雜質之含有率較佳為未達0.1質量%。超硬合金之該不可避免之雜質之含有率可利用ICP發光分析(Inductively Coupled Plasma,感應耦合電漿)Emission Spectroscopy(發射光譜儀)(測定裝置:島津製作所「ICPS-8100」(商標))進行測定。The cemented carbide of this embodiment may contain unavoidable impurities other than the first phase, the second phase, and the third phase as long as it exhibits the effects of the present invention. Examples of the unavoidable impurities include iron, molybdenum, and sulfur. The content of the unavoidable impurities in the cemented carbide is preferably less than 0.1% by mass. The content rate of this unavoidable impurity in cemented carbide can be measured using ICP luminescence analysis (Inductively Coupled Plasma, Inductively Coupled Plasma) Emission Spectroscopy (measuring device: Shimadzu Corporation "ICPS-8100" (trademark)) .

超硬合金之第1相、第2相及第3相各者之含有率係按照下述(A1)~(D1)之順序進行測定。The content ratio of each of the first phase, the second phase and the third phase of the cemented carbide is measured in the order of (A1) to (D1) below.

(A1)使用離子切片機等,自超硬合金切出厚度50 nm以下之薄片樣品,對該薄片樣品之表面進行鏡面加工。作為鏡面加工之方法,例如可例舉:利用鑽石膏進行研磨之方法、使用聚焦離子束裝置(FIB裝置)之方法、使用截面拋光儀裝置(CP裝置)之方法、及將該等組合之方法等。(A1) Use an ion microtome, etc. to cut a thin slice sample with a thickness of less than 50 nm from the cemented carbide, and perform mirror processing on the surface of the thin slice sample. Examples of methods of mirror processing include: polishing using diamond paste, methods using focused ion beam equipment (FIB equipment), methods using cross-section polishing equipment (CP equipment), and methods combining these wait.

(B1)對於上述薄片樣品之鏡面加工面,利用附穿透式電子顯微鏡(TEM:Transmission Electron Microscopy)之EDX(能量色散X射線光譜法:Energy Dispersive X-ray Spectroscopy),進行鎢(W)、鈷(Co)、鉻(Cr)、及釩(V)之元素映射,獲得各元素之映射圖像。將測定條件設為觀察倍率10萬倍、加速電壓200 kV。元素映射之像素數設為125×125。準備5個視野之該元素映射圖像。5個視野之元素映射圖像之拍攝區域各不相同。拍攝區域可任意地設定。(B1) For the mirror-finished surface of the above-mentioned thin slice sample, use EDX (Energy Dispersive X-ray Spectroscopy) with a transmission electron microscope (TEM: Transmission Electron Microscopy) to conduct tungsten (W), Element mapping of cobalt (Co), chromium (Cr), and vanadium (V) to obtain the mapping image of each element. The measurement conditions were set to an observation magnification of 100,000 times and an acceleration voltage of 200 kV. The number of pixels in the element mapping is set to 125×125. Prepare 5 fields of view mapping images of this element. The shooting areas of the element mapping images of the 5 fields of view are different. The shooting area can be set arbitrarily.

於上述元素映射圖像中,相對於鎢(W)、鈷(Co)、鉻(Cr)及釩(V)之合計原子數,包含70原子%以上之鎢之區域相當於第1相之存在區域。於上述元素映射圖像中,相對於鎢、鈷、鉻及釩之合計原子數,包含70原子%以上之鈷之區域相當於第2相之存在區域。於上述元素映射圖像中,相對於鎢、鈷、鉻及釩之合計原子數,包含10原子%以上之釩之區域相當於第3相之存在區域。再者,碳化鎢粒子與第2相之界面區域中存在之釩之稠化層、及第2相彼此之界面區域中存在之釩之稠化層由於為具有數原子(例如1~5個原子左右)水準之一定厚度之層狀,故於觀察倍率10萬倍下未檢測出。In the above element mapping image, a region containing more than 70 atomic % of tungsten relative to the total number of atoms of tungsten (W), cobalt (Co), chromium (Cr), and vanadium (V) corresponds to the existence of the first phase. area. In the above element mapping image, the region containing more than 70 atomic % of cobalt relative to the total number of atoms of tungsten, cobalt, chromium, and vanadium corresponds to the region where the second phase exists. In the above element mapping image, a region containing more than 10 atomic % of vanadium relative to the total number of atoms of tungsten, cobalt, chromium, and vanadium corresponds to the region where the third phase exists. Furthermore, the condensed layer of vanadium present in the interface region between the tungsten carbide particles and the second phase, and the condensed layer of vanadium present in the interface region between the second phases, have several atoms (for example, 1 to 5 atoms). (left or right) layer with a certain thickness, so it was not detected under the observation magnification of 100,000 times.

(C1)對於上述(B1)中所獲得之各元素之5個視野之元素映射圖像,使用圖像解析軟體(ImageJ,version 1.51j8:https://imagej.nih.gov/ij/),以全部視野作為分母測定第1相、第2相及第3相各者之面積%。(C1) For the element mapping image of the five fields of view of each element obtained in the above (B1), use image analysis software (ImageJ, version 1.51j8: https://imagej.nih.gov/ij/), The area % of each of the first phase, the second phase, and the third phase was measured using the entire visual field as the denominator.

(D1)算出5個視野中所獲得之第1相之面積%之平均值。該平均值相當於超硬合金之第1相之含有率(體積%)。算出5個視野中所獲得之第2相之面積%之平均值。該平均值相當於超硬合金之第2相之含有率(體積%)。算出5個視野中所獲得之第3相之面積%之平均值。該平均值相當於超硬合金之第3相之含有率(體積%)。(D1) Calculate the average value of the area % of the first phase obtained in the 5 fields of view. This average value corresponds to the content rate (volume %) of the first phase of cemented carbide. Calculate the average of the area % of the second phase obtained in the 5 fields of view. This average value corresponds to the content rate (volume %) of the second phase of cemented carbide. Calculate the average of the area % of the third phase obtained in the 5 fields of view. This average value corresponds to the content rate (volume %) of the third phase of cemented carbide.

於申請人之測定中,確認到只要對同一試樣進行測定,則即便變更測定區域之選取部位而進行複數次上述測定,測定結果之偏差亦較小,即便任意設定測定視野,測定結果亦不具有任意性。In the applicant's measurement, it was confirmed that as long as the same sample is measured, even if the selected part of the measurement area is changed and the above measurement is performed a plurality of times, the deviation of the measurement result is small, and even if the measurement field of view is arbitrarily set, the measurement result will not be consistent. It is arbitrary.

<<第1相> <<第1相之組成>> 第1相包含碳化鎢粒子。此處,碳化鎢粒子不僅包括「純粹之WC粒子(不含任何雜質元素之WC,亦包括雜質元素之含量未達檢測極限之WC)」,還包括「於不損害本發明之效果之範圍內,於內部刻意地或者不可避免地含有雜質元素之WC粒子」。第1相之雜質之含有率(於構成雜質之元素為2種以上之情形時,為該等之合計濃度)未達0.1質量%。第1相之雜質元素之含有率可藉由ICP發光分析進行測定。 <<Phase 1> <<Composition of the first phase>> The first phase contains tungsten carbide particles. Here, tungsten carbide particles include not only "pure WC particles (WC that does not contain any impurity elements, but also WC whose content of impurity elements does not reach the detection limit)", but also "within the range that does not impair the effects of the present invention. , WC particles that intentionally or unavoidably contain impurity elements inside." The content rate of the impurities in the first phase (when there are two or more elements constituting the impurities, the total concentration thereof) is less than 0.1% by mass. The content rate of impurity elements in the first phase can be measured by ICP luminescence analysis.

<<碳化鎢粒子之圓相當徑之平均值>> 於本實施方式中,碳化鎢粒子之圓相當徑之平均值(以下亦記為「WC粒子之平均粒徑」)為0.8 μm以下。藉此,超硬合金具有較高之硬度,使用該超硬合金之切削工具可具有優異之耐磨耗性。又,該超硬合金具有優異之強度,使用該超硬合金之切削工具可具有優異之耐折損性。於本發明中,碳化鎢粒子之圓相當徑之平均值意指於超硬合金之剖面測得之WC粒子之圓相當徑之個數基準之算術平均。 <<Average of equivalent circle diameters of tungsten carbide particles>> In this embodiment, the average value of the circular equivalent diameter of the tungsten carbide particles (hereinafter also referred to as the "average particle diameter of the WC particles") is 0.8 μm or less. Thereby, the cemented carbide has higher hardness, and cutting tools using the cemented carbide can have excellent wear resistance. In addition, the cemented carbide has excellent strength, and cutting tools using the cemented carbide can have excellent breakage resistance. In the present invention, the average value of the equivalent circular diameter of tungsten carbide particles means the arithmetic mean of the numerical basis of the equivalent circular diameter of WC particles measured on the cross-section of cemented carbide.

就提昇耐磨耗性之觀點而言,WC粒子之平均粒徑之下限較佳為0.2 μm以上,更佳為0.3 μm以上,進而較佳為0.4 μm以上。就提昇耐磨耗性及耐折損性之觀點而言,WC粒子之平均粒徑之上限為0.8 μm以下,較佳為0.5 μm以下,更佳為0.6 μm以下,進而較佳為0.4 μm以下。WC粒子之平均粒徑較佳為0.2 μm以上0.8 μm以下,更佳為0.2 μm以上0.6 μm以下,進而較佳為0.2 μm以上0.5 μm以下。From the viewpoint of improving wear resistance, the lower limit of the average particle diameter of WC particles is preferably 0.2 μm or more, more preferably 0.3 μm or more, and further preferably 0.4 μm or more. From the viewpoint of improving wear resistance and breakage resistance, the upper limit of the average particle diameter of WC particles is 0.8 μm or less, preferably 0.5 μm or less, more preferably 0.6 μm or less, and still more preferably 0.4 μm or less. The average particle diameter of the WC particles is preferably 0.2 μm or more and 0.8 μm or less, more preferably 0.2 μm or more and 0.6 μm or less, further preferably 0.2 μm or more and 0.5 μm or less.

碳化鎢粒子之圓相當徑之平均值係按照下述(A2)~(D2)之順序進行測定。 (A2)對超硬合金之任意之剖面進行鏡面加工。作為鏡面加工之方法,例如可例舉:利用鑽石膏進行研磨之方法、使用聚焦離子束裝置(FIB裝置)之方法、使用截面拋光儀裝置(CP裝置)之方法、及將該等組合之方法等。 The average value of the circle-equivalent diameter of the tungsten carbide particles is measured according to the following procedures (A2) to (D2). (A2) Mirror processing of any cross-section of cemented carbide. Examples of mirror processing methods include: polishing using diamond paste, using a focused ion beam device (FIB device), a method using a cross-section polisher device (CP device), and a combination of these methods wait.

(B2)藉由掃描式電子顯微鏡(日立高新技術股份有限公司製造之「S-3400N」)對超硬合金之加工面進行拍攝。準備3張拍攝圖像。3張拍攝圖像各者之拍攝區域不同。拍攝區域可任意地設定。將條件設為觀察倍率10000倍、加速電壓10 kV、反射電子圖像。(B2) Photograph the machined surface of cemented carbide using a scanning electron microscope ("S-3400N" manufactured by Hitachi High-Technology Co., Ltd.). Prepare 3 captured images. The shooting area of each of the 3 captured images is different. The shooting area can be set arbitrarily. The conditions were set to an observation magnification of 10,000 times, an accelerating voltage of 10 kV, and a reflected electron image.

(C2)利用圖像解析軟體(ImageJ,version 1.51j8:https://imagej.nih.gov/ij/)將上述(B2)中所獲得之3張反射電子圖像錄入電腦,進行二值化處理。二值化處理係藉由於錄入圖像後,點擊電腦畫面上之「Make Binary」之顯示,而於上述圖像解析軟體中預先設定好之條件下執行。於二值化處理後之圖像中,可根據色彩之濃淡區分第1相與第2相。例如,於二值化處理後之圖像中,第1相以黑色區域表示,第2相以白色區域表示。再者,於超硬合金包含第3相之情形時,於二值化處理後之圖像中,第3相以與第2相相同之色調(白色)表示。(C2) Use image analysis software (ImageJ, version 1.51j8: https://imagej.nih.gov/ij/) to input the three reflection electron images obtained in (B2) above into the computer and perform binarization. handle. Binarization processing is performed under the conditions preset in the above image analysis software by clicking the "Make Binary" display on the computer screen after inputting the image. In the binarized image, the first phase and the second phase can be distinguished according to the intensity of the color. For example, in the binarized image, the first phase is represented by a black area and the second phase is represented by a white area. Furthermore, when the cemented carbide contains a third phase, the third phase is represented by the same color tone (white) as the second phase in the image after the binarization process.

(D2)對於所獲得之3張拍攝圖像,使用上述圖像解析軟體,測定3張拍攝圖像中之全部碳化鎢粒子(黑色區域)各自之圓相當徑(Heywood徑:等面積圓直徑)。算出3個測定視野中之所有碳化鎢粒子之圓相當徑之個數基準之算術平均值。於本發明中,該算術平均值相當於WC粒子之圓相當徑之平均值。(D2) For the three captured images obtained, use the above-mentioned image analysis software to measure the equivalent circular diameter (Heywood diameter: equal-area circle diameter) of all tungsten carbide particles (black areas) in the three captured images. . Calculate the arithmetic average of the number-based equivalent diameters of all tungsten carbide particles in the three measurement fields of view. In the present invention, the arithmetic mean value is equivalent to the mean value of the circle-equivalent diameter of the WC particles.

於申請人之測定中,確認到只要對同一試樣進行測定,則即便變更測定區域之選取部位而進行複數次上述測定,測定結果之偏差亦較小,即便任意設定測定視野,測定結果亦不具有任意性。In the applicant's measurement, it was confirmed that as long as the same sample is measured, even if the selected part of the measurement area is changed and the above measurement is performed a plurality of times, the deviation of the measurement result is small, and even if the measurement field of view is arbitrarily set, the measurement result will not be consistent. It is arbitrary.

<第2相> 第2相包含鈷作為主成分。第2相係使第1相之碳化鎢粒子彼此結合之結合相。 <Phase 2> The second phase contains cobalt as a main component. The second phase is a bonded phase in which the tungsten carbide particles of the first phase are bonded to each other.

於本發明中,「包含鈷作為主成分之第2相」意指於第2相中,鈷相對於鎢、鉻、釩及鈷之合計之百分比為70質量%以上。於第2相中,可將鈷相對於鎢、鉻、釩及鈷之合計之百分比之下限設為70質量%以上、80質量%以上、或90質量%以上。可將該百分比之上限設為未達100質量%。可將該百分比設為70質量%以上且未達100質量%、80質量%以上且未達100質量%、或90質量%以上且未達100質量%。In the present invention, "the second phase containing cobalt as a main component" means that in the second phase, the percentage of cobalt relative to the total of tungsten, chromium, vanadium and cobalt is 70 mass % or more. In the second phase, the lower limit of the percentage of cobalt relative to the total of tungsten, chromium, vanadium, and cobalt may be 70 mass% or more, 80 mass% or more, or 90 mass% or more. The upper limit of the percentage may be set to less than 100% by mass. The percentage may be 70 mass% or more and less than 100 mass%, 80 mass% or more but less than 100 mass%, or 90 mass% or more but less than 100 mass%.

確認到於本發明之超硬合金之第2相中,只要鈷相對於鎢、鉻、釩及鈷之合計之百分比為70質量%以上,則第2相發揮作為結合相之功能,而無損本發明之效果。It was confirmed that in the second phase of the cemented carbide of the present invention, as long as the percentage of cobalt relative to the total of tungsten, chromium, vanadium and cobalt is 70 mass % or more, the second phase functions as a binding phase without impairing the original component. The effect of the invention.

第2相中之鈷相對於鎢、鉻、釩及鈷之合計之百分比可藉由ICP發光分光分析法(使用機器:島津製作所製造之「ICPS-8100」(商標))進行測定。The percentage of cobalt in the second phase relative to the total of tungsten, chromium, vanadium and cobalt can be measured by ICP luminescence spectrometry (machine used: "ICPS-8100" (trademark) manufactured by Shimadzu Corporation).

第2相除鈷以外,還可包含鉻(Cr)、鎢(W)、釩(V)、鐵(Fe)、鎳(Ni)、碳(C)等。第2相可包含:鈷;以及選自由鉻、鎢、釩、鐵、鎳及碳所組成之群中之至少一種。第2相可包含:鈷;選自由鉻、鎢、釩、鐵、鎳及碳所組成之群中之至少一種;以及雜質。作為該雜質,例如可例舉:錳(Mn)、鎂(Mg)、鈣(Ca)、鉬(Mo)、硫(S)、鈦(Ti)、鋁(Al)等。於第2相包含釩之情形時,假定第2相之釩含有率不會超過5原子%。即,可將第2相之釩含有率設為5原子%以下。In addition to cobalt, the second phase may also include chromium (Cr), tungsten (W), vanadium (V), iron (Fe), nickel (Ni), carbon (C), etc. The second phase may include: cobalt; and at least one selected from the group consisting of chromium, tungsten, vanadium, iron, nickel and carbon. The second phase may include: cobalt; at least one selected from the group consisting of chromium, tungsten, vanadium, iron, nickel and carbon; and impurities. Examples of the impurities include manganese (Mn), magnesium (Mg), calcium (Ca), molybdenum (Mo), sulfur (S), titanium (Ti), aluminum (Al), and the like. When the second phase contains vanadium, it is assumed that the vanadium content rate of the second phase does not exceed 5 atomic %. That is, the vanadium content rate of the second phase can be set to 5 atomic % or less.

<第3相> <<第3相之組成>> 本實施方式之超硬合金具備第3相,該第3相含有包含10原子%以上之釩的第3相粒子,該硬合金之該第3相之含有率超過0體積%且為1體積%以下,該第3相粒子之圓相當徑之最大值較佳為0.5 μm以下。藉此,不存在可能成為折損起點之圓相當徑超過0.5 μm之粗大之第3相粒子,因此使用該超硬合金之切削工具之耐折損性得到提昇。 <Phase 3> <<Composition of the third phase>> The cemented carbide of this embodiment has a third phase containing third phase particles containing 10 atomic % or more of vanadium, and the content of the third phase in the cemented carbide exceeds 0% by volume and is 1% by volume. Hereinafter, the maximum value of the circular equivalent diameter of the third phase particles is preferably 0.5 μm or less. Thereby, there are no coarse third-phase particles with a circle equivalent diameter exceeding 0.5 μm that may become the starting point of breakage, so the breakage resistance of cutting tools using this cemented carbide is improved.

第3相含有包含10原子%以上之釩的第3相粒子。推測第3相係來自於超硬合金之製造步驟中作為晶粒生長抑制劑所添加之碳化釩(VC)之釩(V)之微細析出相。於本發明中,具有數原子水準之一定厚度之釩稠化層不相當於第3相。The third phase contains third phase particles containing 10 atomic % or more of vanadium. It is speculated that the third phase originates from the fine precipitation phase of vanadium (V) in vanadium carbide (VC) added as a grain growth inhibitor in the cemented carbide manufacturing process. In the present invention, the vanadium-densified layer having a certain thickness on the order of several atoms does not correspond to the third phase.

於本發明中,「包含10原子%以上之釩之第3相粒子」意指於第3相粒子中,釩相對於鎢、鉻、釩及鈷之合計之百分比為10原子%以上。In the present invention, "third phase particles containing 10 atomic % or more of vanadium" means that in the third phase particles, the percentage of vanadium relative to the total of tungsten, chromium, vanadium and cobalt is 10 atomic % or more.

第3相粒子除釩以外,還可包含鎢、鈷、鉻、碳等。第3相粒子可包含:釩;以及選自由鎢、鈷、鉻、及碳所組成之群中之至少一種。第3相粒子可包含:釩;選自由鎢、鈷、鉻、及碳所組成之群中之至少一種;以及雜質。作為該雜質,例如可例舉:鐵、鎳、錳、鈮、鎂、鈣、鉬、硫、鈦、鋁等。In addition to vanadium, the third phase particles may also contain tungsten, cobalt, chromium, carbon, etc. The third phase particles may include: vanadium; and at least one selected from the group consisting of tungsten, cobalt, chromium, and carbon. The third phase particles may include: vanadium; at least one selected from the group consisting of tungsten, cobalt, chromium, and carbon; and impurities. Examples of the impurities include iron, nickel, manganese, niobium, magnesium, calcium, molybdenum, sulfur, titanium, aluminum, and the like.

於第3相粒子中,釩相對於鎢、鉻、釩及鈷之合計之百分比之下限為10原子%以上,可將其設為20原子%以上、或30原子%以上。可將該百分比之上限設為100原子%以下。可將該百分比設為10原子%以上100原子%以下、20原子%以上100原子%以下、或30原子%以上100原子%以下。In the third phase particles, the lower limit of the percentage of vanadium relative to the total of tungsten, chromium, vanadium, and cobalt is 10 atomic % or more, and may be 20 atomic % or more, or 30 atomic % or more. The upper limit of the percentage can be set to 100 atomic % or less. The percentage may be 10 atomic % or more and 100 atomic % or less, 20 atomic % or more and 100 atomic % or less, or 30 atomic % or more and 100 atomic % or less.

第3相粒子中之釩相對於鎢、鉻、釩及鈷之合計之百分比之測定方法如下所述。The method for measuring the percentage of vanadium in the third phase particles relative to the total of tungsten, chromium, vanadium and cobalt is as follows.

首先,按照與超硬合金之第1相、第2相及第3相各者之含有率之測定方法之(A1)~(B1)相同之順序進行元素映射分析,獲得5個視野之元素映射圖像。於各元素映射圖像中,特定出相對於鎢、鈷、鉻及釩之合計原子數,包含10原子%以上之釩之區域。該區域對應於第3相粒子。First, perform element mapping analysis in the same order as (A1) to (B1) for measuring the content rates of the first phase, second phase and third phase of cemented carbide to obtain element mapping in five fields of view. images. In each element mapping image, a region containing 10 atomic % or more of vanadium relative to the total number of atoms of tungsten, cobalt, chromium, and vanadium is specified. This region corresponds to phase 3 particles.

將特定出之第3相粒子放大至觀察倍率200萬倍,藉由EDX點分析,對第3相粒子中之釩之原子數相對於鎢、鈷、鉻及釩之合計原子數之百分比(以下,亦記為「第3相粒子之釩含有率」)進行測定。對5個第3相粒子進行該測定。算出5個第3相粒子之釩含有率之平均值。該平均值相當於本發明中之第3相粒子中的釩相對於鎢、鉻、釩及鈷之合計之百分比。The specified third phase particles were magnified to an observation magnification of 2 million times, and through EDX point analysis, the percentage of the number of atoms of vanadium in the third phase particles relative to the total number of atoms of tungsten, cobalt, chromium and vanadium (below , also written as "vanadium content rate of third phase particles") was measured. This measurement was performed on five third-phase particles. The average value of the vanadium content of the five third phase particles was calculated. This average value corresponds to the percentage of vanadium in the third phase particles in the present invention relative to the total of tungsten, chromium, vanadium and cobalt.

於申請人之測定中,確認到只要對同一試樣進行測定,則即便變更測定區域之選取部位而進行複數次上述測定,測定結果之偏差亦較小,即便任意設定測定視野,測定結果亦不具有任意性。In the applicant's measurement, it was confirmed that as long as the same sample is measured, even if the selected part of the measurement area is changed and the above measurement is performed a plurality of times, the deviation of the measurement result is small, and even if the measurement field of view is arbitrarily set, the measurement result will not be consistent. It is arbitrary.

<<第3相粒子之圓相當徑之最大值>> 於本實施方式中,第3相粒子之圓相當徑之最大值(以下,亦記為「第3相粒子之最大值」)較佳為0.5 μm以下。 <<The maximum value of the circle equivalent diameter of the third phase particle>> In this embodiment, the maximum value of the circular equivalent diameter of the third phase particles (hereinafter also referred to as the "maximum value of the third phase particles") is preferably 0.5 μm or less.

於超硬合金具備第3相之情形時,第3相粒子之最大值之上限較佳為0.5 μm以下,更佳為0.4 μm以下,進而較佳為0.3 μm以下,進而更佳為0.2 μm以下,特佳為0.1 μm以下。第3相粒子之圓相當徑之最大值之下限並無特別限定,可設為超過0 μm。第3相之圓相當徑之最大值較佳為超過0 μm且為0.5 μm以下,更佳為超過0 μm且為0.4 μm以下,進而較佳為超過0 μm且為0.3 μm以下,進而更佳為超過0 μm且為0.2 μm以下,特佳為超過0 μm且為0.1 μm以下。When the cemented carbide has a third phase, the upper limit of the maximum value of the third phase particles is preferably 0.5 μm or less, more preferably 0.4 μm or less, further preferably 0.3 μm or less, still more preferably 0.2 μm or less. , the best value is below 0.1 μm. The lower limit of the maximum value of the circular equivalent diameter of the third phase particles is not particularly limited, but may be set to exceed 0 μm. The maximum value of the circle equivalent diameter of the third phase is preferably more than 0 μm and less than 0.5 μm, more preferably more than 0 μm and less than 0.4 μm, still more preferably more than 0 μm and less than 0.3 μm, still more preferably It is more than 0 μm and not more than 0.2 μm, and particularly preferably it is more than 0 μm and not more than 0.1 μm.

第3相粒子之圓相當徑之最大值係按照下述(A3)~(B3)之順序進行測定。The maximum value of the circle equivalent diameter of the third phase particles is measured according to the following procedures (A3) to (B3).

(A3)按照與上述超硬合金之第1相、第2相及第3相各者之含有率之測定方法之(A1)~(C1)相同之順序,使用上述圖像解析軟體(ImageJ)分析5個視野之元素映射圖像,特定出第3相。(A3) Use the above image analysis software (ImageJ) in the same procedure as (A1) to (C1) for measuring the content ratio of each of the first phase, the second phase and the third phase of the cemented carbide. Analyze the elemental mapping images of 5 fields of view to identify the third phase.

(B3)使用上述圖像解析軟體,測定5個測定區域中之全部第3相粒子各自之圓相當徑(Heywood徑:等面積圓直徑)。5個測定視野中之全部第3相粒子之圓相當徑之最大值相當於本發明中之第3相粒子之圓相當徑之最大值。(B3) Using the above-mentioned image analysis software, measure the circular equivalent diameter (Heywood diameter: equal-area circle diameter) of all third-phase particles in the five measurement areas. The maximum value of the equivalent circular diameter of all the third phase particles in the five measurement fields is equivalent to the maximum value of the equivalent circular diameter of the third phase particles in the present invention.

於申請人之測定中,確認到只要對同一試樣進行測定,則即便變更測定區域之選取部位而進行複數次上述測定,測定結果之偏差亦較小,即便任意設定測定視野,測定結果亦不具有任意性。In the applicant's measurement, it was confirmed that as long as the same sample is measured, even if the selected part of the measurement area is changed and the above measurement is performed a plurality of times, the deviation of the measurement result is small, and even if the measurement field of view is arbitrarily set, the measurement result will not be consistent. It is arbitrary.

<<鈷含有率>> 本實施方式之超硬合金之鈷含有率為3質量%以上10質量%以下。藉此,超硬合金具有較高之硬度及強度。使用該超硬合金之切削工具可具有優異之耐磨耗性及耐折損性。 <<Cobalt content>> The cobalt content of the cemented carbide according to this embodiment is 3% by mass or more and 10% by mass or less. As a result, cemented carbide has higher hardness and strength. Cutting tools using this cemented carbide can have excellent wear resistance and breakage resistance.

就提昇耐折損性之觀點而言,超硬合金之鈷含有率之下限為3質量%以上,較佳為4質量%以上。就提昇硬度之觀點而言,超硬合金之鈷含有率之上限為10質量%以下,較佳為9質量%以下,更佳為8質量%以下。超硬合金之鈷含有率較佳為4質量%以上10質量%以下,更佳為3質量%以上9質量%以下,進而較佳為3質量%以上8質量%以下。From the viewpoint of improving the breakage resistance, the lower limit of the cobalt content rate of the cemented carbide is 3 mass % or more, and preferably 4 mass % or more. From the viewpoint of increasing the hardness, the upper limit of the cobalt content rate of the cemented carbide is 10 mass% or less, preferably 9 mass% or less, and more preferably 8 mass% or less. The cobalt content of the cemented carbide is preferably 4% by mass or more and 10% by mass or less, more preferably 3% by mass or more and 9% by mass or less, and still more preferably 3% by mass or more and 8% by mass or less.

超硬合金中之鈷含量可藉由ICP發光分光分析法進行測定。The cobalt content in cemented carbide can be determined by ICP luminescence spectrometry.

<<釩含有率>> 本實施方式之超硬合金之釩含有率為0.01質量%以上0.30質量%以下。藉此,粗大之WC粒子之產生受到抑制,超硬合金之組織變得緻密化。因此,該超硬合金具有優異之硬度及強度,使用該超硬合金之切削工具可具有優異之耐磨耗性及耐折損性。 <<Vanadium content>> The vanadium content of the cemented carbide according to this embodiment is 0.01% by mass or more and 0.30% by mass or less. Thereby, the generation of coarse WC particles is suppressed, and the structure of the cemented carbide becomes densified. Therefore, the cemented carbide has excellent hardness and strength, and cutting tools using the cemented carbide can have excellent wear resistance and breakage resistance.

就抑制粗大之WC粒子之產生之觀點而言,超硬合金之釩含有率之下限為0.01質量%以上,較佳為0.05質量%以上,更佳為0.10質量%以上。就抑制界面強度降低之觀點而言,超硬合金之釩含有率之上限為0.30質量%以下,較佳為0.20質量%以下。超硬合金之釩含有率較佳為0.01質量%以上0.20質量%以下,進而較佳為0.10質量%以上0.20質量%以下。From the viewpoint of suppressing the generation of coarse WC particles, the lower limit of the vanadium content rate of cemented carbide is 0.01 mass% or more, preferably 0.05 mass% or more, and more preferably 0.10 mass% or more. From the viewpoint of suppressing a decrease in interface strength, the upper limit of the vanadium content rate of cemented carbide is 0.30 mass% or less, preferably 0.20 mass% or less. The vanadium content rate of the cemented carbide is preferably 0.01 mass% or more and 0.20 mass% or less, and further preferably 0.10 mass% or more and 0.20 mass% or less.

超硬合金之釩之含有率可藉由ICP發光分光分析法進行測定。The vanadium content of cemented carbide can be measured by ICP luminescence spectrometry.

<<鉻含有率>> 本實施方式之超硬合金可包含鉻(Cr)。本實施方式之超硬合金之鉻含有率較佳為0.2質量%以上0.8質量%以下。鉻具有抑制碳化鎢粒子之晶粒生長之作用。於超硬合金之鉻含有率處於上述範圍內之情形時,可有效地抑制原料之微粒碳化鎢粒子直接殘留於所獲得之超硬合金中,且可有效地抑制粗大粒子之產生,而提昇工具壽命。 <<Chromium content>> The cemented carbide of this embodiment may contain chromium (Cr). The chromium content of the cemented carbide according to this embodiment is preferably 0.2 mass% or more and 0.8 mass% or less. Chromium has the effect of inhibiting the grain growth of tungsten carbide particles. When the chromium content of the cemented carbide is within the above range, the fine tungsten carbide particles of the raw material can be effectively suppressed from directly remaining in the obtained cemented carbide, and the generation of coarse particles can be effectively suppressed, thereby improving the tool. lifespan.

超硬合金之鉻含有率之下限較佳為0.2質量%以上,更佳為0.3質量%以上。超硬合金之鉻含有率之上限較佳為0.8質量%以下,更佳為0.5質量%以下。超硬合金之鉻含有率較佳為0.2質量%以上0.8質量%以下,進而較佳為0.3質量%以上0.5質量%以下。The lower limit of the chromium content rate of the cemented carbide is preferably 0.2 mass% or more, more preferably 0.3 mass% or more. The upper limit of the chromium content rate of the cemented carbide is preferably 0.8 mass% or less, more preferably 0.5 mass% or less. The chromium content of the cemented carbide is preferably 0.2 mass% or more and 0.8 mass% or less, and further preferably 0.3 mass% or more and 0.5 mass% or less.

超硬合金之鉻含有率可藉由ICP發光分光分析法進行測定。The chromium content of cemented carbide can be measured by ICP luminescence spectrometry.

<界面區域中之釩含有率> 於本實施方式之超硬合金中,碳化鎢粒子之(0001)結晶面與第2相之界面區域(以下,亦記為「WC/第2相界面區域」)中之釩含有率之最大值為15原子%以下。藉此,於該界面區域中,釩稠化地存在之釩稠化層之形成受到抑制。因此,可抑制因釩稠化層而使WC粒子與第2相之界面強度降低。因此,於該超硬合金中,不易因界面強度降低而發生WC粒子之脫落,使用該超硬合金之切削工具可具有優異之耐磨耗性及耐折損性。再者,先前之超硬合金之上述界面中之釩稠化層之量較多,界面強度呈降低之趨勢。 <Vanadium content rate in interface region> In the cemented carbide of this embodiment, the maximum value of the vanadium content in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase (hereinafter also referred to as "WC/second phase interface region") It is 15 atomic % or less. This suppresses the formation of a vanadium-densified layer in which vanadium is concentrated in the interface region. Therefore, it is possible to suppress a decrease in the interface strength between the WC particles and the second phase due to the vanadium thickened layer. Therefore, in this cemented carbide, it is difficult for WC particles to fall off due to a reduction in interface strength, and cutting tools using this cemented carbide can have excellent wear resistance and breakage resistance. Furthermore, the amount of vanadium thickened layer in the above-mentioned interface of the previous cemented carbide was relatively large, and the interface strength showed a decreasing trend.

於超硬合金中,於WC/第2相界面區域中存在釩稠化層之情形時,WC粒子之(0001)結晶面與和該WC粒子之(0001)結晶面相鄰之其他WC粒子之界面區域(以下,亦記為「WC/WC界面區域」)中亦可能存在釩稠化層。確認到於本實施方式之超硬合金中,當WC/第2相界面區域中之釩含有率之最大值為15原子%以下時,WC/WC界面區域中之釩含有率之最大值亦為15原子%以下。因此,若WC/第2相界面區域中之釩含有率之最大值為15原子%以下,則WC/WC界面區域中之釩含有率之最大值亦為15原子%以下,從而可於WC/WC界面區域中抑制釩稠化層之形成。因此,亦可抑制因釩稠化層而使WC粒子彼此之界面強度降低。In cemented carbide, when there is a vanadium-densified layer in the WC/second phase interface region, the (0001) crystal plane of the WC particle and other WC particles adjacent to the (0001) crystal plane of the WC particle A vanadium-densified layer may also exist in the interface region (hereinafter, also referred to as "WC/WC interface region"). In the cemented carbide of this embodiment, it was confirmed that when the maximum value of the vanadium content rate in the WC/second phase interface region is 15 atomic % or less, the maximum value of the vanadium content rate in the WC/WC interface region is also 15 atomic% or less. Therefore, if the maximum value of the vanadium content rate in the WC/second phase interface region is 15 atomic % or less, the maximum value of the vanadium content rate in the WC/WC interface region is also 15 atomic % or less, so that the WC/second phase interface region can have a maximum vanadium content rate of 15 atomic % or less. Inhibits the formation of vanadium thickened layer in the WC interface area. Therefore, it is also possible to suppress a decrease in the interface strength between WC particles due to the vanadium thickened layer.

WC/第2相界面區域中之釩含有率之最大值之上限較佳為15原子%以下,更佳為14原子%以下,進而較佳為13原子%以下,進而更佳為12原子%以下,特佳為11原子%以下。WC/第2相界面區域中之釩含有率之最大值之下限並無特別限定,例如可設為1原子%以上、或2原子%以上。WC/第2相界面區域中之釩含有率之最大值較佳為1原子%以上15原子%以下,更佳為1原子%以上12原子%以下,進而較佳為2原子%以上15原子%以下,進而更佳為2原子%以上12原子%以下。The upper limit of the maximum value of the vanadium content in the WC/second phase interface region is preferably 15 atomic % or less, more preferably 14 atomic % or less, further preferably 13 atomic % or less, still more preferably 12 atomic % or less. , particularly preferably 11 atomic % or less. The lower limit of the maximum vanadium content rate in the WC/second phase interface region is not particularly limited, but may be, for example, 1 atomic % or more, or 2 atomic % or more. The maximum value of the vanadium content in the WC/second phase interface region is preferably 1 atomic % or more and 15 atomic % or less, more preferably 1 atomic % or more and 12 atomic % or less, and still more preferably 2 atomic % or more and 15 atomic % or more. or less, and more preferably 2 atomic % or more and 12 atomic % or less.

WC/第2相界面區域中之釩含有率之最大值係按照下述(A4)~(D4)之順序進行測定。The maximum value of the vanadium content rate in the WC/second phase interface region is measured in the following order (A4) to (D4).

(A4)使用離子切片機等,自超硬合金切出厚度50 nm以下之薄片樣品。對該薄片樣品之表面進行鏡面加工。作為鏡面加工之方法,例如可例舉:利用鑽石膏進行研磨之方法、使用聚焦離子束裝置(FIB裝置)之方法、使用截面拋光儀裝置(CP裝置)之方法、及將該等組合之方法等。(A4) Use an ion microtome, etc. to cut a thin sample with a thickness of less than 50 nm from the cemented carbide. The surface of the thin sample was mirror-finished. Examples of methods of mirror processing include: polishing using diamond paste, methods using focused ion beam equipment (FIB equipment), methods using cross-section polishing equipment (CP equipment), and methods combining these wait.

(B4)利用穿透式電子顯微鏡(TEM)觀察上述薄片樣品之鏡面加工面,獲得WC粒子之電子繞射圖像。將觀察倍率設為200萬倍。(B4) Use a transmission electron microscope (TEM) to observe the mirror-processed surface of the above-mentioned thin slice sample to obtain the electron diffraction image of the WC particles. Set the observation magnification to 2 million times.

(C4)於電子繞射圖像中,識別WC粒子之(0001)結晶面。藉由附TEM之EDX(能量色散X射線光譜法:Energy Dispersive X-ray Spectroscopy),對自識別到(0001)結晶面之該WC粒子之[11-20]或[10-10]之方位進行觀察之情形時的該WC粒子之(0001)結晶面與和該WC粒子相鄰之第2相的界面區域進行線分析。於線分析中,分別對鎢(W)、鈷(Co)、鉻(Cr)及釩(V)各者之原子數之百分比(原子%)進行測定。該原子數之百分比意指將W、Co、Cr及V之合計原子數設為100原子%之情形時的各元素之原子數之百分比。(C4) In the electron diffraction image, identify the (0001) crystal plane of WC particles. By using EDX (Energy Dispersive X-ray Spectroscopy) with TEM, the orientation of [11-20] or [10-10] of the WC particles self-identified to the (0001) crystal plane was carried out. Line analysis was performed on the interface region between the (0001) crystal plane of the WC particle and the second phase adjacent to the WC particle in the observed situation. In line analysis, the atomic number percentage (atomic %) of each of tungsten (W), cobalt (Co), chromium (Cr) and vanadium (V) is measured. The atomic number percentage means the atomic number percentage of each element when the total atomic number of W, Co, Cr, and V is 100 atomic %.

使用圖1對線分析之具體順序進行說明。圖1模式性地示出上述薄片樣品之穿透式電子顯微鏡(TEM)圖像。於圖1中,線分析之測定區域R係符號R所表示之矩形區域。The specific sequence of line analysis will be explained using Figure 1. Figure 1 schematically shows a transmission electron microscope (TEM) image of the above-mentioned thin slice sample. In FIG. 1 , the measurement area R of the line analysis is a rectangular area represented by the symbol R.

如圖1所示,於WC粒子1之(0001)結晶面與和該WC粒子1之(0001)結晶面相鄰之第2相2的界面中,選取大致為直線且該大致直線部分之長度為25 nm以上之部分。線分析係沿著與大致直線部分垂直之方向(圖1之箭頭B方向)進行。關於線分析之距離,係以該大致直線部分為中心,距WC粒子側及第2相側分別為20 nm。線分析之寬度係25 nm,步進間距係0.4 nm。再者,如圖1所示,以不含第3相粒子3之方式設定線分析之測定區域R。As shown in Figure 1 , in the interface between the (0001) crystal plane of the WC particle 1 and the second phase 2 adjacent to the (0001) crystal plane of the WC particle 1, select a substantially straight line and the length of the substantially straight line portion It is the part above 25 nm. Line analysis is performed along the direction perpendicular to the approximately straight line portion (arrow B direction in Figure 1). The distance for line analysis is 20 nm from the WC particle side and the second phase side, centered on the substantially straight line portion. The width of the line analysis is 25 nm and the step pitch is 0.4 nm. Furthermore, as shown in FIG. 1 , the measurement region R of the line analysis is set so as not to include the third phase particles 3 .

基於線分析結果,算出將W、Cr、V及Co之合計原子數設為100原子%之情形時的釩之百分比(原子%)之最大值。將該最大值作為WC粒子之(0001)結晶面與第2相之界面區域之釩含有率之最大值。Based on the line analysis results, the maximum value of the vanadium percentage (atomic %) was calculated when the total number of atoms of W, Cr, V, and Co was 100 atomic %. This maximum value is regarded as the maximum value of the vanadium content in the interface region between the (0001) crystal plane of the WC particles and the second phase.

(D4)於5個不同之WC粒子之(0001)結晶面與第2相之界面區域中進行上述(C4)之測定。算出5個界面區域之釩含有率之平均值。該平均值相當於本發明之超硬合金中之碳化鎢粒子之(0001)結晶面與第2相之界面區域中之釩含有率之最大值。因此,於超硬合金中,當上述5個界面區域之釩含有率之平均值為15原子%以下時,該超硬合金之碳化鎢粒子之(0001)結晶面與第2相之界面區域中之釩含有率之最大值為15原子%以下。(D4) The above-mentioned measurement (C4) was performed in the interface region between the (0001) crystal plane and the second phase of five different WC particles. Calculate the average value of the vanadium content in the five interface areas. This average value corresponds to the maximum value of the vanadium content in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase in the cemented carbide of the present invention. Therefore, in cemented carbide, when the average value of the vanadium content in the above five interface regions is 15 atomic % or less, the interface region between the (0001) crystal plane of the tungsten carbide particles of the cemented carbide and the second phase The maximum vanadium content is less than 15 atomic %.

於申請人之測定中,確認到只要對同一試樣進行測定,則即便變更測定區域之選取部位而進行複數次上述測定,測定結果之偏差亦較小,即便任意設定測定視野,測定結果亦不具有任意性。In the applicant's measurement, it was confirmed that as long as the same sample is measured, even if the selected part of the measurement area is changed and the above measurement is performed a plurality of times, the deviation of the measurement result is small, and even if the measurement field of view is arbitrarily set, the measurement result will not be consistent. It is arbitrary.

確認到於本發明之超硬合金之碳化鎢粒子之(0001)結晶面與第2相之界面區域中,只要釩相對於鎢、鉻、釩及鈷之合計之百分比之最大值為15原子%以下,則界面強度之降低受到抑制,而無損本發明之效果。It was confirmed that in the interface region between the (0001) crystal plane and the second phase of the tungsten carbide particles of the cemented carbide of the present invention, as long as the maximum percentage of vanadium relative to the total of tungsten, chromium, vanadium and cobalt is 15 atomic % below, the decrease in interface strength is suppressed without impairing the effect of the present invention.

<界面區域中之鉻含有率> 於本實施方式之超硬合金中,碳化鎢粒子之(0001)結晶面與第2相之界面區域中之鉻含有率之最大值較佳為20原子%以下。藉此,於該界面區域中,鉻稠化地存在之鉻稠化層之形成受到抑制。因此,可抑制因鉻稠化層而使WC粒子與第2相之界面強度降低。因此,於該超硬合金中,不易因界面強度降低而發生WC粒子之脫落,使用該超硬合金之切削工具可具有優異之耐磨耗性及耐折損性。 <Chromium content rate in interface area> In the cemented carbide of this embodiment, the maximum value of the chromium content in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase is preferably 20 atomic % or less. This suppresses the formation of a chromium-condensed layer in which chromium is concentrated in the interface region. Therefore, it is possible to suppress a decrease in the interface strength between the WC particles and the second phase due to the chromium-concentrated layer. Therefore, in this cemented carbide, it is difficult for WC particles to fall off due to a reduction in interface strength, and cutting tools using this cemented carbide can have excellent wear resistance and breakage resistance.

於超硬合金中,於WC/第2相界面區域中存在鉻之稠化層之情形時,在WC粒子之(0001)結晶面與和該WC粒子之(0001)結晶面相鄰之其他WC粒子的界面區域(WC/WC界面區域)中亦可能存在鉻之稠化層。確認到於本實施方式之超硬合金中,當WC/第2相界面區域中之鉻含有率之最大值為20原子%以下時,WC/WC界面區域中之鉻含有率之最大值亦為20原子%以下。因此,若WC/第2相界面區域中之鉻含有率之最大值為20原子%以下,則WC/WC界面區域中之鉻含有率之最大值亦為20原子%以下,於WC/WC界面區域中,鉻稠化地存在之鉻稠化層之形成受到抑制。因此,可抑制因鉻稠化層而使WC粒子彼此之界面強度降低。In cemented carbide, when there is a condensed layer of chromium in the WC/second phase interface region, the (0001) crystal plane of the WC particle and other WC adjacent to the (0001) crystal plane of the WC particle There may also be a thickened layer of chromium in the interface area of the particles (WC/WC interface area). In the cemented carbide of this embodiment, it was confirmed that when the maximum value of the chromium content rate in the WC/second phase interface region is 20 atomic % or less, the maximum value of the chromium content rate in the WC/WC interface region is also 20 atomic % or less. Therefore, if the maximum value of the chromium content rate in the WC/second phase interface region is 20 atomic % or less, the maximum value of the chromium content rate in the WC/WC interface region is also 20 atomic % or less. At the WC/WC interface In this area, the formation of a chromium-densified layer where chromium is concentrated is suppressed. Therefore, it is possible to suppress a decrease in the interface strength between WC particles due to the chromium-concentrated layer.

WC/第2相界面區域中之鉻含有率之最大值之上限較佳為20原子%以下,更佳為18原子%以下,進而較佳為16原子%以下,進而更佳為15原子%以下,特佳為14原子%以下。WC/第2相界面區域中之鉻含有率之最大值之下限並無特別限定,例如可設為1原子%以上、或2原子%以上。WC/第2相界面區域中之鉻含有率之最大值較佳為1原子%以上20原子%以下,更佳為1原子%以上15原子%以下,進而較佳為2原子%以上20原子%以下,進而更佳為2原子%以上15原子%以下。The upper limit of the maximum value of the chromium content rate in the WC/second phase interface region is preferably 20 atomic % or less, more preferably 18 atomic % or less, further preferably 16 atomic % or less, still more preferably 15 atomic % or less. , particularly preferably 14 atomic % or less. The lower limit of the maximum chromium content rate in the WC/second phase interface region is not particularly limited, but may be, for example, 1 atomic % or more, or 2 atomic % or more. The maximum value of the chromium content rate in the WC/second phase interface region is preferably 1 atomic % or more and 20 atomic % or less, more preferably 1 atomic % or more and 15 atomic % or less, and still more preferably 2 atomic % or more and 20 atomic % or more. or less, and more preferably 2 atomic % or more and 15 atomic % or less.

WC/第2相界面區域中之鉻含有率之最大值係藉由於上述WC/第2相界面區域中之釩含有率之測定方法(A4)~(D4)中,算出將W、Cr、V及Co之合計原子數設為100原子%之情形時之鉻之百分比(原子%)來代替將W、Cr、V及Co之合計原子數設為100原子%之情形時之釩之百分比(原子%)而獲得。The maximum value of the chromium content in the WC/second phase interface region is calculated by combining W, Cr, and V in the above-mentioned measurement methods (A4) to (D4) of the vanadium content in the WC/second phase interface region. The percentage of chromium (atomic %) when the total atomic number of W, Cr, V, and Co is 100 atomic % is used instead of the percentage of vanadium (atomic %) when the total atomic number of W, Cr, V, and Co is 100 atomic %. %) obtained.

於申請人之測定中,確認到只要對同一試樣進行測定,則即便變更測定區域之選取部位而進行複數次上述測定,測定結果之偏差亦較小,即便任意設定測定視野,測定結果亦不具有任意性。In the applicant's measurement, it was confirmed that as long as the same sample is measured, even if the selected part of the measurement area is changed and the above measurement is performed a plurality of times, the deviation of the measurement result is small, and even if the measurement field of view is arbitrarily set, the measurement result will not be consistent. It is arbitrary.

確認到於本發明之超硬合金之碳化鎢粒子之(0001)結晶面與第2相之界面區域中,只要鉻相對於鎢、鉻、釩及鈷之合計之百分比之最大值為20原子%以下,則界面強度之降低受到抑制,而無損本發明之效果。It was confirmed that in the interface region between the (0001) crystal plane and the second phase of the tungsten carbide particles of the cemented carbide of the present invention, as long as the maximum percentage of chromium relative to the total of tungsten, chromium, vanadium and cobalt is 20 atomic % below, the decrease in interface strength is suppressed without impairing the effect of the present invention.

<超硬合金之製造方法> 為了使超硬合金之碳化鎢粒子之(0001)結晶面與第2相之界面區域中之釩含有率降低,而考慮減少作為晶粒生長抑制劑而添加之釩之量。然而,若減少釩之添加量,則晶粒生長抑制效果不足,WC粒子會發生異常晶粒生長。這成為超硬合金之強度降低之主要因素。本發明人等進行了銳意研究,結果新發現一種超硬合金之製造方法,該超硬合金之製造方法可抑制粗大之WC粒子之產生,故可添加充分之量之釩,並且使上述界面區域中之釩含有率降低。以下,對本實施方式之超硬合金之製造方法之詳情進行說明。 <Manufacturing method of cemented carbide> In order to reduce the vanadium content in the interface region between the (0001) crystal plane of the cemented carbide tungsten carbide particles and the second phase, it is considered to reduce the amount of vanadium added as a grain growth inhibitor. However, if the added amount of vanadium is reduced, the grain growth suppressing effect is insufficient, and abnormal grain growth occurs in WC particles. This becomes the main factor that reduces the strength of cemented carbide. The inventors of the present invention have conducted intensive research, and as a result have newly discovered a method of manufacturing cemented carbide. This method of manufacturing cemented carbide can suppress the generation of coarse WC particles, so a sufficient amount of vanadium can be added, and the above-mentioned interface area can be made The vanadium content in the product decreases. Hereinafter, the details of the manufacturing method of the cemented carbide according to this embodiment will be described.

本實施方式之超硬合金代表性而言可藉由依序進行原料粉末之準備步驟、混合步驟、成形步驟、燒結步驟(包括預燒結步驟及正式燒結步驟)、反覆熱處理步驟、冷卻步驟來製造。以下,對各步驟進行說明。Typically, the cemented carbide of this embodiment can be produced by sequentially performing a raw material powder preparation step, a mixing step, a shaping step, a sintering step (including a pre-sintering step and a main sintering step), repeated heat treatment steps, and a cooling step. Each step is explained below.

<<準備步驟>> 準備步驟係準備構成超硬合金之材料之全部原料粉末之步驟。作為原料粉末,可例舉:作為第1相之原料的碳化鎢粉末(以下亦記為「WC粉末」)、作為第2相之原料的鈷粉末(以下亦記為「Co粉末」)、作為晶粒生長抑制劑之碳化釩粉末(以下亦記為「VC粉末」)。又,可視需要準備作為晶粒生長抑制劑之碳化鉻粉末(以下亦記為「Cr 3C 2粉末」)。碳化鎢粉末、鈷粉末、碳化釩粉末及碳化鉻粉末可使用市售者。 <<Preparation Step>> The preparation step is the step of preparing all raw material powders constituting the cemented carbide material. Examples of raw material powders include tungsten carbide powder (hereinafter also referred to as "WC powder") as a raw material for the first phase, cobalt powder (hereinafter also referred to as "Co powder") as a raw material for the second phase, Vanadium carbide powder (hereinafter also referred to as "VC powder") as a grain growth inhibitor. In addition, if necessary, chromium carbide powder (hereinafter also referred to as "Cr 3 C 2 powder") as a grain growth inhibitor may be prepared. Commercially available tungsten carbide powder, cobalt powder, vanadium carbide powder and chromium carbide powder can be used.

可將碳化鎢粉末之平均粒徑設為0.2 μm以上1.0 μm以下。WC粉末較佳為20%累積體積粒徑d20與80%累積體積粒徑d80之比d20/d80為0.2以上1以下。此種WC粉末之粒徑均勻,微粒WC粒子之含量較少。因此,若使用該WC粉末製作超硬合金,則於燒結步驟中,可抑制因溶解再析出而產生粗大之WC粒子。上述「20%累積體積粒徑d20」意指晶粒之體積基準之累積粒度分佈中自小徑側起之累積20%粒徑。上述「80%累積體積粒徑d80」意指晶粒之體積基準之累積粒度分佈中自小徑側起之累積80%粒徑。The average particle diameter of the tungsten carbide powder can be 0.2 μm or more and 1.0 μm or less. The WC powder preferably has a ratio d20/d80 of 20% cumulative volume particle diameter d20 and 80% cumulative volume particle diameter d80 of 0.2 or more and 1 or less. The particle size of this kind of WC powder is uniform, and the content of fine WC particles is small. Therefore, if the WC powder is used to produce cemented carbide, the generation of coarse WC particles due to dissolution and re-precipitation during the sintering step can be suppressed. The above "20% cumulative volume particle size d20" means the cumulative 20% particle size from the small diameter side in the cumulative particle size distribution based on the volume of the crystal grains. The above "80% cumulative volume particle size d80" means the cumulative 80% particle size from the small diameter side in the cumulative particle size distribution based on the volume of the crystal grains.

可將鈷粉末之平均粒徑設為0.5 μm以上1.5 μm以下。可將碳化釩粉末之平均粒徑設為0.1 μm以上0.5 μm以下。藉由使用微細之VC粉末,可於後續之預燒結步驟中,使VC粉末於混合粉末中充分擴散。可將碳化鉻粉末之平均粒徑設為1.0 μm以上2.0 μm以下。The average particle diameter of the cobalt powder can be 0.5 μm or more and 1.5 μm or less. The average particle size of the vanadium carbide powder can be 0.1 μm or more and 0.5 μm or less. By using fine VC powder, the VC powder can be fully diffused in the mixed powder in the subsequent pre-sintering step. The average particle diameter of the chromium carbide powder can be 1.0 μm or more and 2.0 μm or less.

於本發明中,上述原料粉末之平均粒徑意指藉由FSSS(Fisher Sub-Sieve Sizer,費氏微粒測量)法測得之平均粒徑。該平均粒徑可使用Fisher Scientific公司製造之「Sub-Sieve Sizer Model 95」(商標)進行測定。上述WC粉末之粒徑之分佈可使用Microtrac公司製造之粒度分佈測定裝置(商品名:MT3300EX)進行測定。In the present invention, the average particle size of the above-mentioned raw material powder means the average particle size measured by the FSSS (Fisher Sub-Sieve Sizer) method. The average particle diameter can be measured using "Sub-Sieve Sizer Model 95" (trademark) manufactured by Fisher Scientific. The particle size distribution of the above-mentioned WC powder can be measured using a particle size distribution measuring device (trade name: MT3300EX) manufactured by Microtrac.

<<混合步驟>> 混合步驟係將準備步驟中所準備之各原料粉末混合之步驟。藉由混合步驟,獲得各原料粉末混合而成之混合粉末。混合粉末中之各原料粉末之含有率可考慮超硬合金之第1相、第2相及第3相等各成分之含有率來適當調整。 <<Mixing Steps>> The mixing step is a step of mixing the respective raw material powders prepared in the preparation step. Through the mixing step, a mixed powder obtained by mixing each raw material powder is obtained. The content rate of each raw material powder in the mixed powder can be appropriately adjusted taking into account the content rate of each component such as the first phase, the second phase, and the third phase of the cemented carbide.

混合粉末中之碳化鎢粉末之含有率例如可設為88.85質量%以上99.83質量%以下。The content rate of the tungsten carbide powder in the mixed powder can be, for example, 88.85 mass % or more and 99.83 mass % or less.

混合粉末中之鈷粉末之含有率例如可設為3質量%以上10質量%以下。The content of the cobalt powder in the mixed powder can be, for example, 3% by mass or more and 10% by mass or less.

混合粉末中之碳化釩粉末之含有率例如可設為0.01質量%以上0.37質量%以下。The content of the vanadium carbide powder in the mixed powder can be, for example, 0.01 mass% or more and 0.37 mass% or less.

混合粉末中之碳化鉻粉末之含有率例如可設為0.20質量%以上0.92質量%以下。The content of the chromium carbide powder in the mixed powder can be, for example, 0.20 mass% or more and 0.92 mass% or less.

於混合中使用球磨機。可將混合時間設為15小時以上36小時以下。藉此,可抑制原料粉末之粉碎,可一面維持原料粉末之粒徑,一面使VC粉末充分分散於混合粉末中。Use a ball mill for mixing. The mixing time can be set from 15 hours to 36 hours. Thereby, the pulverization of the raw material powder can be suppressed, and the VC powder can be fully dispersed in the mixed powder while maintaining the particle size of the raw material powder.

於混合步驟之後,可視需要對混合粉末進行造粒。藉由對混合粉末進行造粒,而於下述成形步驟時,容易將混合粉末填充至模頭或模具中。於造粒中,可應用公知之造粒方法,例如可使用噴霧乾燥器等市售之造粒機。After the mixing step, the mixed powder may be granulated if necessary. By granulating the mixed powder, the mixed powder can be easily filled into a die or mold in the following molding step. In the granulation, a known granulation method can be applied, for example, a commercially available granulator such as a spray dryer can be used.

<<成形步驟>> 成形步驟係使混合步驟中所獲得之混合粉末成形為規定之形狀,而獲得成形體之步驟。成形步驟中之成形方法及成形條件可採用一般之方法及條件,並無特別限制。作為規定之形狀,例如可例舉採用切削工具形狀(例如小徑鑽孔器之形狀)。 <<Forming steps>> The molding step is a step of molding the mixed powder obtained in the mixing step into a predetermined shape to obtain a formed body. The forming method and forming conditions in the forming step can adopt general methods and conditions and are not particularly limited. As the predetermined shape, for example, a cutting tool shape (such as the shape of a small-diameter drill) can be used.

<<燒結步驟>> 燒結步驟包括預燒結步驟及正式燒結步驟。於預燒結步驟中,將成形體於燒結溫度800~1000℃下保持2小時。環境採用真空。燒結溫度800~1000℃係WC不會發生晶粒生長之溫度範圍。藉由於WC不會發生晶粒生長之溫度範圍內保持2小時,可使混合粉末中之VC擴散至整個鈷中。藉此,於正式燒結步驟中,VC於整個超硬合金中發揮均勻之晶粒生長抑制效果,而抑制粗大WC粒子之產生。 <<Sinter step>> The sintering step includes a pre-sintering step and a formal sintering step. In the pre-sintering step, the formed body is maintained at a sintering temperature of 800 to 1000°C for 2 hours. The environment adopts vacuum. The sintering temperature of 800 to 1000°C is the temperature range in which grain growth does not occur in WC. By keeping the WC in a temperature range where grain growth does not occur for 2 hours, the VC in the mixed powder can be diffused into the entire cobalt. Thus, in the formal sintering step, VC exerts a uniform grain growth inhibition effect throughout the cemented carbide, thereby inhibiting the generation of coarse WC particles.

然後,進行正式燒結步驟。於正式燒結步驟中,使預燒結步驟後之成形體於氬氣(Ar)環境下、燒結溫度1350~1450℃下保持1~2小時而獲得超硬合金。藉此,粗大WC粒子之產生受到抑制。又,可降低所獲得之超硬合金中之微粒WC粒子之含量。Then, proceed to the formal sintering step. In the formal sintering step, the formed body after the pre-sintering step is maintained in an argon (Ar) environment at a sintering temperature of 1350-1450°C for 1 to 2 hours to obtain a cemented carbide. Thereby, the generation of coarse WC particles is suppressed. In addition, the content of fine WC particles in the obtained cemented carbide can be reduced.

藉由進行預燒結步驟及正式燒結步驟,可使釩充分固溶於鈷中。By performing the pre-sintering step and the main sintering step, vanadium can be fully solid-soluble in cobalt.

<<反覆熱處理步驟>> 然後,對於燒結步驟中所獲得之超硬合金進行急冷。以冷卻速度-60℃/分鐘以上,自正式燒結步驟中之溫度急冷至VC以固相形式析出之1100℃,並於1100℃下保持30分鐘。藉由此種急冷,於冷卻時容易產生之固溶於鈷中之釩之移動受到抑制。因此,於超硬合金中,均勻地形成WC粒子與第2相之界面區域(WC/第2相界面區域)或WC粒子彼此間之界面區域(WC/WC界面區域)中之釩含有率較大之區域(相當於「釩稠化層」)、及/或VC之微細析出相(以下,亦記為「VC微細析出相」)。以下,將以冷卻速度-60℃/分鐘以上使超硬合金急冷至1100℃並於1100℃下保持30分鐘之步驟亦記為「急冷步驟」。 <<Repeated heat treatment steps>> Then, the cemented carbide obtained in the sintering step is quenched. With a cooling rate of -60°C/min or above, quench from the temperature in the formal sintering step to 1100°C where VC precipitates in solid phase, and maintain at 1100°C for 30 minutes. By such rapid cooling, the movement of vanadium dissolved in cobalt, which is likely to occur during cooling, is suppressed. Therefore, in cemented carbide, the vanadium content in the interface region between WC particles and the second phase (WC/second phase interface region) or the interface region between WC particles (WC/WC interface region) is uniformly formed. A large area (corresponding to the "vanadium thickened layer"), and/or a fine precipitated phase of VC (hereinafter also referred to as "VC fine precipitated phase"). Hereinafter, the step of quenching the cemented carbide to 1100°C at a cooling rate of -60°C/min or more and maintaining it at 1100°C for 30 minutes is also referred to as the "quenching step".

繼而,將超硬合金加熱至1250℃,並於1250℃下保持10~20分鐘。藉由將1250℃下之保持時間設為20分鐘以下,可使表面積較大之釩稠化層中之釩優先固溶於鈷中。另一方面,VC微細析出相中之釩向鈷中之固溶受到抑制,可使VC微細析出相之至少一部分殘留於合金中。以下,將使超硬合金加熱至1250℃並於1250℃下保持10~20分鐘之步驟亦記為「熱處理步驟」。Then, the cemented carbide is heated to 1250°C and maintained at 1250°C for 10 to 20 minutes. By setting the holding time at 1250°C to less than 20 minutes, the vanadium in the vanadium thickened layer with a large surface area can be preferentially dissolved in the cobalt. On the other hand, the solid solution of vanadium in the VC fine precipitated phase into cobalt is suppressed, so that at least part of the VC fine precipitated phase can remain in the alloy. Hereinafter, the step of heating the cemented carbide to 1250°C and maintaining it at 1250°C for 10 to 20 minutes is also referred to as the "heat treatment step".

繼而,以冷卻速度-60℃/min以上將超硬合金急冷至1100℃,並於1100℃下保持30分鐘(相當於急冷步驟)。藉此,於上述熱處理步驟中,固溶於鈷中之釩之移動受到抑制。因此,於超硬合金中,均勻地形成釩稠化層、及/或VC微細析出相。Then, the cemented carbide is quenched to 1100°C at a cooling rate of -60°C/min or more, and maintained at 1100°C for 30 minutes (equivalent to a quenching step). Thereby, during the heat treatment step, the movement of vanadium dissolved in cobalt is suppressed. Therefore, in the cemented carbide, a vanadium thickened layer and/or a VC fine precipitated phase are uniformly formed.

交替地反覆進行上述急冷步驟及熱處理步驟各2次以上。藉此,最終於WC/第2相界面區域、及WC/WC界面區域中存在之釩稠化層中之釩濃度之最大值變小。即,超硬合金之碳化鎢粒子之(0001)結晶面與第2相之界面區域中之釩含有率、及WC粒子之(0001)結晶面與和該WC粒子之(0001)結晶面相鄰之WC粒子的界面區域中之釩含有率降低。進而,該超硬合金即便於包含VC粒子之情形時,該VC粒子亦較為微細,並均勻地分散於超硬合金中。The above-described quenching step and heat treatment step are alternately repeated two or more times each. As a result, the maximum value of the vanadium concentration in the vanadium thickened layer existing in the WC/second phase interface region and the WC/WC interface region becomes smaller. That is, the vanadium content in the interface region between the (0001) crystal plane of the tungsten carbide particles of the cemented carbide and the second phase, and the (0001) crystal plane of the WC particles are adjacent to the (0001) crystal plane of the WC particles. The vanadium content rate in the interface region of the WC particles decreases. Furthermore, even when the cemented carbide contains VC particles, the VC particles are relatively fine and uniformly dispersed in the cemented carbide.

<<冷卻步驟>> 繼而,對反覆熱處理步驟後之超硬合金進行冷卻。冷卻條件採用一般條件即可,並無特別限制。 <<Cooling step>> Then, the cemented carbide after repeated heat treatment steps is cooled. The cooling conditions can be general conditions and are not particularly limited.

根據上述之超硬合金之製造方法,WC粒子之異常晶粒生長受到抑制,故可獲得不含粗大之WC粒子,且界面區域中之釩含有率降低之超硬合金。該超硬合金具有優異之耐磨耗性及耐折損性。According to the above-mentioned manufacturing method of cemented carbide, abnormal grain growth of WC particles is suppressed, so it is possible to obtain a cemented carbide that does not contain coarse WC particles and has a reduced vanadium content in the interface region. This super hard alloy has excellent wear resistance and breakage resistance.

[實施方式2:切削工具] 本實施方式之切削工具含有包含實施方式1之超硬合金之刀尖。於本發明中,刀尖意指參與切削之部分,意指超硬合金中由刀尖稜線與自該刀尖稜線向超硬合金側沿該刀尖稜線之切線之垂線之距離為2 mm的假想面所圍成之區域。 [Embodiment 2: Cutting Tool] The cutting tool of this embodiment includes a cutting edge made of the cemented carbide of Embodiment 1. In the present invention, the tool tip refers to the part involved in cutting, which means the distance between the tool tip ridge line and the perpendicular line from the tool tip ridge line to the cemented carbide side along the tangent line of the tool tip ridge line in cemented carbide is 2 mm. The area enclosed by the imaginary surface.

作為切削工具,例如可例示:切削刀具、鑽孔器、端銑刀、銑削加工用刀尖更換型切削刀片、車削加工用刀尖更換型切削刀片、金屬用鋸、齒輪切製工具、鉸刀或螺絲攻等。如圖2所示,本實施方式之切削工具10於印刷電路基板加工用小徑鑽孔器之情形時,尤其可發揮優異之效果。圖2所示之切削工具10之刀尖11包含實施方式1之超硬合金。Examples of cutting tools include cutting tools, drills, end mills, interchangeable cutting inserts for milling, interchangeable cutting inserts for turning, metal saws, gear cutting tools, and reamers. Or screw tapping, etc. As shown in FIG. 2 , the cutting tool 10 of the present embodiment can particularly exhibit excellent effects when used as a small-diameter drill for processing printed circuit boards. The cutting tool tip 11 of the cutting tool 10 shown in FIG. 2 contains the cemented carbide of the first embodiment.

本實施方式之超硬合金可構成該等工具之整體,亦可構成一部分。此處,「構成一部分」表示將本實施方式之超硬合金硬焊於任意基材之規定位置而製成刀尖部之態樣等。The cemented carbide in this embodiment can constitute the entirety of these tools, or can also constitute a part. Here, "constituting a part" means a state in which the cemented carbide of the present embodiment is brazed to a predetermined position on an arbitrary base material to form a tip portion.

<<硬質膜>> 本實施方式之切削工具可進而具備將包含超硬合金之基材之表面之至少一部分被覆之硬質膜。作為硬質膜,例如可使用:類鑽碳或鑽石。 <<Hard film>> The cutting tool of this embodiment may further include a hard film covering at least part of the surface of the base material containing cemented carbide. As the hard film, for example, diamond-like carbon or diamond can be used.

[備註1] 本發明之超硬合金之第1相及第2相之合計含有率較佳為97體積%以上100體積%以下。 本發明之超硬合金之第1相之含有率較佳為82體積%以上95體積%以下。 本發明之超硬合金之第2相之含有率較佳為5體積%以上18體積%以下。 本發明之超硬合金之第3相之含有率較佳為超過0體積%且為0.8體積%以下。 [Note 1] The total content of the first phase and the second phase in the cemented carbide of the present invention is preferably not less than 97% by volume and not more than 100% by volume. The content of the first phase in the cemented carbide of the present invention is preferably 82 volume % or more and 95 volume % or less. The content of the second phase in the cemented carbide of the present invention is preferably 5% by volume or more and 18% by volume or less. The content of the third phase in the cemented carbide of the present invention is preferably more than 0% by volume and 0.8% by volume or less.

[備註2] 本發明之超硬合金中,碳化鎢粒子之圓相當徑之平均值較佳為0.2 μm以上0.8 μm以下。 本發明之超硬合金中,碳化鎢粒子之圓相當徑之平均值較佳為0.2 μm以上0.6 μm以下。 [Note 2] In the cemented carbide of the present invention, the average value of the circle equivalent diameter of the tungsten carbide particles is preferably 0.2 μm or more and 0.8 μm or less. In the cemented carbide of the present invention, the average value of the circle equivalent diameter of the tungsten carbide particles is preferably 0.2 μm or more and 0.6 μm or less.

[備註3] 於本發明之超硬合金之第2相中,鈷相對於鎢、鉻、釩及鈷之合計之百分比較佳為70質量%以上。 [Note 3] In the second phase of the cemented carbide of the present invention, the percentage of cobalt relative to the total of tungsten, chromium, vanadium and cobalt is preferably 70 mass % or more.

[備註4] 本發明之超硬合金之鈷含有率較佳為4質量%以上10質量%以下。 本發明之超硬合金之鈷含有率較佳為3質量%以上9質量%以下。 [Note 4] The cobalt content of the cemented carbide of the present invention is preferably 4% by mass or more and 10% by mass or less. The cobalt content of the cemented carbide of the present invention is preferably 3% by mass or more and 9% by mass or less.

[備註5] 本發明之超硬合金之鉻含有率較佳為0.2質量%以上0.8質量%以下。 本發明之超硬合金之鉻含有率較佳為0.3質量%以上0.5質量%以下。 [Note 5] The chromium content of the cemented carbide of the present invention is preferably 0.2 mass% or more and 0.8 mass% or less. The chromium content of the cemented carbide of the present invention is preferably 0.3% by mass or more and 0.5% by mass or less.

[備註6] 本發明之超硬合金中,碳化鎢粒子之(0001)結晶面與第2相之界面區域中之釩含有率之最大值較佳為1原子%以上15原子%以下。 本發明之超硬合金中,碳化鎢粒子之(0001)結晶面與第2相之界面區域中之釩含有率之最大值較佳為1原子%以上12原子%以下。 [Note 6] In the cemented carbide of the present invention, the maximum value of the vanadium content in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase is preferably 1 atomic % or more and 15 atomic % or less. In the cemented carbide of the present invention, the maximum value of the vanadium content in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase is preferably 1 atomic % or more and 12 atomic % or less.

[備註7] 碳化鎢粒子之(0001)結晶面與第2相之界面區域中之鉻含有率之最大值較佳為1原子%以上20原子%以下。 碳化鎢粒子之(0001)結晶面與第2相之界面區域中之鉻含有率之最大值較佳為1原子%以上15原子%以下。 [實施例] [Note 7] The maximum value of the chromium content in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase is preferably 1 atomic % or more and 20 atomic % or less. The maximum value of the chromium content rate in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase is preferably 1 atomic % or more and 15 atomic % or less. [Example]

藉由實施例,進而更具體地對本實施方式進行說明。但,本實施方式並不限定於該等實施例。This embodiment will be described more specifically with reference to examples. However, this embodiment is not limited to these Examples.

於本實施例中,變更原料粉末之調配比、以及製造條件而製作試樣1~試樣12及試樣1-1~試樣1-10之超硬合金。製作具備包含該超硬合金之刀尖的小徑鑽孔器,並對其進行評價。In this example, the mixing ratio of the raw material powder and the manufacturing conditions were changed to produce cemented carbide samples 1 to 12 and 1-1 to 1-10. A small-diameter drill equipped with a tip containing this cemented carbide was produced and evaluated.

<試樣之製作> <<準備步驟>> 作為原料粉末,準備表1之「混合粉末」欄所示之組成之粉末。WC粉末之平均粒徑為0.4 μm,d20/d80為0.3以上。Co粉末之平均粒徑為1 μm,VC粉末之平均粒徑為0.3 μm,Cr 3C 2粉末之平均粒徑為1 μm。WC粉末、Co粉末、Cr 3C 2粉末及VC粉末為市售品。 <Preparation of sample> <<Preparation step>> As raw material powder, prepare a powder having the composition shown in the "Mixed Powder" column of Table 1. The average particle size of WC powder is 0.4 μm, and d20/d80 is above 0.3. The average particle size of Co powder is 1 μm, the average particle size of VC powder is 0.3 μm, and the average particle size of Cr 3 C 2 powder is 1 μm. WC powder, Co powder, Cr 3 C 2 powder and VC powder are commercial products.

<<混合步驟>> 按照表1之「混合粉末」之「質量%」所示之調配量將各原料粉末混合,製作混合粉末。表1之「混合粉末」欄之「質量%」表示各原料粉末相對於原料粉末之合計質量之比率。混合係藉由球磨機進行15小時。使用噴霧乾燥器將所獲得之混合粉末乾燥,製成造粒粉末。 <<Mixing Steps>> Mix each raw material powder according to the compounding amount shown in "mass %" of "Mixed Powder" in Table 1 to prepare a mixed powder. The "mass %" in the "Mixed Powder" column of Table 1 represents the ratio of each raw material powder to the total mass of the raw material powders. Mixing was performed by means of a ball mill for 15 hours. The obtained mixed powder was dried using a spray dryer to prepare granulated powder.

<<成形步驟>> 將所獲得之造粒粉末加壓成形,製作ϕ3.4 mm之圓桿形狀之成形體。 <<Forming steps>> The obtained granulated powder was press-molded to produce a rod-shaped molded body with a diameter of 3.4 mm.

<<燒結步驟>> 繼而,對成形體進行預燒結步驟。將成形體放入至燒結爐中,於真空中,於表1之「預燒結」之「溫度」欄所記載之溫度下保持2小時。表1之「預燒結」欄之「無」這一記載表示未進行預燒結步驟。 <<Sinter step>> Next, the formed body is subjected to a pre-sintering step. The molded body was put into a sintering furnace and maintained in a vacuum at the temperature listed in the "Temperature" column of "Pre-sintering" in Table 1 for 2 hours. The record "None" in the "Pre-sintering" column of Table 1 indicates that the pre-sintering step was not performed.

繼而,進行正式燒結步驟。於Ar環境下,將預燒結步驟後之成形體於表1之「正式燒結」之「溫度」欄所記載之溫度下保持1小時,獲得超硬合金。Then, the formal sintering step is performed. In an Ar environment, the formed body after the pre-sintering step was maintained at the temperature recorded in the "Temperature" column of "Full sintering" in Table 1 for 1 hour to obtain a cemented carbide.

<<反覆熱處理步驟>> 繼而,對在燒結步驟中所獲得之超硬合金交替地進行急冷步驟及熱處理步驟各2次。即,依序進行急冷步驟、熱處理步驟、急冷步驟、熱處理步驟。 <<Repeated heat treatment steps>> Next, the cemented carbide obtained in the sintering step was alternately subjected to a quenching step and a heat treatment step twice each. That is, a quenching step, a heat treatment step, a quenching step, and a heat treatment step are performed in this order.

於急冷步驟中,將超硬合金以冷卻速度-60℃/min以上急冷至1100℃,並於1100℃下保持30分鐘。於熱處理步驟中,將超硬合金加熱至1250℃,並於1250℃下保持20分鐘。In the quenching step, the cemented carbide is quenched to 1100°C at a cooling rate of -60°C/min or more, and maintained at 1100°C for 30 minutes. In the heat treatment step, the cemented carbide is heated to 1250°C and held at 1250°C for 20 minutes.

表1之「反覆熱處理」欄之「無」這一記載表示未進行反覆熱處理步驟。The description "None" in the "Repeated Heat Treatment" column of Table 1 indicates that the repeated heat treatment step was not performed.

<<冷卻步驟>> 繼而,於氬(Ar)氣環境中,使反覆熱處理步驟後之超硬合金緩冷,獲得各試樣之超硬合金。 <<Cooling step>> Then, in an argon (Ar) gas environment, the cemented carbide after repeated heat treatment steps is slowly cooled to obtain the cemented carbide of each sample.

[表1] 表1 試樣No. 混合粉末 混合步驟 預燒結 正式燒結 反覆熱處理 WC粉末 Co粉末 VC粉末 Cr 3C 2粉末 時間 溫度 時間 溫度 時間 有/無 質量% 質量% 質量% 質量% hr hr hr 1 89.53 10.00 0.01 0.46 15 1000 2 1420 1 2 96.17 3.00 0.37 0.46 15 1000 2 1420 1 3 96.30 3.00 0.24 0.46 15 1000 2 1420 1 4 91.30 8.00 0.24 0.46 15 1000 2 1420 1 5 91.17 8.00 0.37 0.46 15 1000 2 1420 1 6 96.30 3.00 0.24 0.46 15 800 2 1420 1 7 89.17 10.00 0.37 0.46 15 1000 2 1420 1 8 91.30 8.00 0.24 0.46 15 1000 2 1420 1 9 95.84 3.00 0.24 0.92 15 1000 2 1420 1 10 96.17 3.00 0.37 0.46 15 800 2 1420 1 11 91.30 3.00 0.24 0.69 15 1000 2 1420 1 12 96.17 3.00 0.01 0.46 15 1000 2 1420 1 1-1 96.17 3.00 0.37 0.46 15 - 1420 1 1-2 98.17 1.00 0.37 0.46 15 1000 2 1420 1 1-3 87.17 12.00 0.37 0.46 15 1000 2 1420 1 1-4 96.54 3.00 0 0.46 15 1000 2 1420 1 1-5 96.05 3.00 0.49 0.46 15 1000 2 1420 1 1-6 96.17 3.00 0.37 0.46 15 1000 2 1500 1 1-7 96.17 3.00 0.37 0.46 15 1000 2 1420 1 1-8 96.17 3.00 0.37 0.46 15 - 1420 1 1-9 89.53 10.00 0.01 0.46 15 - 1420 1 1-10 96.17 3.00 0.01 0.46 15 1000 2 1420 1 [Table 1] Table 1 Sample No. mixed powder Mixing step pre-sintered Formal sintering Repeated heat treatment WC powder Co powder VC powder Cr 3 C 2 powder time temperature time temperature time yes/no mass % mass % mass % mass % hr hr hr 1 89.53 10.00 0.01 0.46 15 1000 2 1420 1 have 2 96.17 3.00 0.37 0.46 15 1000 2 1420 1 have 3 96.30 3.00 0.24 0.46 15 1000 2 1420 1 have 4 91.30 8.00 0.24 0.46 15 1000 2 1420 1 have 5 91.17 8.00 0.37 0.46 15 1000 2 1420 1 have 6 96.30 3.00 0.24 0.46 15 800 2 1420 1 have 7 89.17 10.00 0.37 0.46 15 1000 2 1420 1 have 8 91.30 8.00 0.24 0.46 15 1000 2 1420 1 have 9 95.84 3.00 0.24 0.92 15 1000 2 1420 1 have 10 96.17 3.00 0.37 0.46 15 800 2 1420 1 have 11 91.30 3.00 0.24 0.69 15 1000 2 1420 1 have 12 96.17 3.00 0.01 0.46 15 1000 2 1420 1 have 1-1 96.17 3.00 0.37 0.46 15 without - 1420 1 have 1-2 98.17 1.00 0.37 0.46 15 1000 2 1420 1 have 1-3 87.17 12.00 0.37 0.46 15 1000 2 1420 1 have 1-4 96.54 3.00 0 0.46 15 1000 2 1420 1 have 1-5 96.05 3.00 0.49 0.46 15 1000 2 1420 1 have 1-6 96.17 3.00 0.37 0.46 15 1000 2 1500 1 have 1-7 96.17 3.00 0.37 0.46 15 1000 2 1420 1 without 1-8 96.17 3.00 0.37 0.46 15 without - 1420 1 without 1-9 89.53 10.00 0.01 0.46 15 without - 1420 1 have 1-10 96.17 3.00 0.01 0.46 15 1000 2 1420 1 without

<超硬合金之評價> 針對各試樣之超硬合金,測定超硬合金之第1相、第2相及第3相之含有率(示於表2中「第1相(體積%)」、「第2相(體積%)」、「第3相(體積%)」欄中)、超硬合金之鈷含有率(示於表2中「Co(質量%)」欄中)、超硬合金之釩含有率(示於表2中「V(質量%)」欄中)、第2相中之相對於鎢、鉻、釩及鈷之合計之鈷之百分比(示於表2中「Co/第2相(質量%)」欄中)、WC粒子之圓相當徑之平均值(示於表2中「WC粒子平均粒徑(μm)」欄中)、第3相粒子之圓相當徑之最大值(示於表2中「第3相最大粒徑(μm)」欄中)、碳化鎢粒子之(0001)結晶面與第2相之界面區域中之釩含有率之最大值(示於表2中「WC/第2相界面區域」之「V最大(原子%)」欄中)、該界面區域中之鉻含有率之最大值(示於表2中「界面區域」之「Cr最大(原子%)」欄中)。各項目之測定方法如實施方式1所示。將結果示於表2中。 <Evaluation of Cemented Carbide> For the cemented carbide of each sample, the content rates of the first phase, the second phase and the third phase of the cemented carbide were measured (shown in Table 2 as "1st phase (volume %)", "2nd phase (volume %)" %)", "3rd phase (volume %)" column), the cobalt content rate of cemented carbide (shown in the "Co (mass %)" column in Table 2), the vanadium content rate of cemented carbide (shown in In the "V (mass %)" column in Table 2), the percentage of cobalt in the second phase relative to the total of tungsten, chromium, vanadium and cobalt (shown in "Co/Second Phase (mass %)" in Table 2 )" column), the average value of the circular equivalent diameter of WC particles (shown in the "WC particle average particle diameter (μm)" column in Table 2), the maximum value of the circular equivalent diameter of the third phase particles (shown in the table 2), the maximum value of the vanadium content in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase (shown in Table 2 "WC/ The maximum value of the chromium content rate in the interface area (shown in the "Cr Max (atomic %)" column of "Interface Area" in Table 2 middle). The measurement method of each item is as shown in Embodiment 1. The results are shown in Table 2.

<切削試驗> 對各試樣之圓桿進行加工,製作刀徑ϕ0.2 mm之小徑鑽孔器(印刷電路基板加工用旋轉工具)。目前,以僅將刀部插入至不鏽鋼柄而成形出鑽孔器為主流,但為了進行評價,藉由對ϕ3.4 mm之圓桿之前端進行開刃加工來進行鑽孔器之製作。使用該鑽孔器,進行市售之車輛用印刷線路基板之開孔加工。 <Cutting test> The round rod of each sample was processed to produce a small diameter drill (rotary tool for printed circuit board processing) with a tool diameter of ϕ0.2 mm. Currently, it is mainstream to form a drill by inserting only the blade into the stainless steel shank. However, for evaluation, the drill was produced by sharpening the front end of a φ3.4 mm round rod. Use this drill to drill holes in commercially available printed circuit boards for vehicles.

於耐磨耗性之評價試驗中,開孔加工之條件設為轉速160 krpm、進給速度2.7 m/min。對進行了10000個開孔後之鑽孔器測定磨耗痕跡之寬度(μm)。使用圖3,對本實施例中之磨耗痕跡之寬度進行說明。圖3係自本實施例中所製作之小徑鑽孔器之前端側觀察到之圖。如圖3所示,上述磨耗痕跡之寬度意指自鑽孔器中心C起之距離為0.08 mm之部位處之磨耗痕跡W之寬度L1。將結果示於表2之「切削試驗之耐磨耗性(μm)」欄中。於本實施例中,於磨耗痕跡之寬度為22 μm以下之情形時,判斷為耐磨耗性良好,於磨耗痕跡之寬度為20 μm以下之情形時,判斷為耐磨耗性更加良好。In the wear resistance evaluation test, the conditions for drilling were set to a rotation speed of 160 krpm and a feed speed of 2.7 m/min. The width of the wear mark (μm) was measured on the drill after 10,000 holes were drilled. The width of the wear mark in this example will be described using FIG. 3 . FIG. 3 is a view from the front end side of the small-diameter drill produced in this embodiment. As shown in Figure 3, the width of the above-mentioned wear mark means the width L1 of the wear mark W at a distance of 0.08 mm from the center C of the drill. The results are shown in the column "Wear resistance of cutting test (μm)" in Table 2. In this example, when the width of the wear mark is 22 μm or less, the wear resistance is judged to be good, and when the width of the wear mark is 20 μm or less, the wear resistance is judged to be even better.

於耐折損性之評價試驗中,開孔加工之條件設為轉速100 krpm、進給速度3.6 m/min。進行最大5000個開孔,測定直至折損為止之開孔次數。將結果示於表2之「切削試驗之耐折損性(次)」欄中。結果為5000次意指於5000次之開孔時間點未產生折損。於本實施例中,於直至折損為止之開孔次數為3000次以上之情形時,判斷為耐折損性良好,於開孔次數為5000次之情形時,判斷為耐折損性更加良好。In the fracture resistance evaluation test, the conditions for drilling were set to a rotation speed of 100 krpm and a feed speed of 3.6 m/min. Carry out a maximum of 5,000 holes and measure the number of holes until breakage. The results are shown in the "Break resistance of cutting test (times)" column of Table 2. The result of 5000 times means that no breakage occurred at the time of 5000 times of drilling. In this example, when the number of drillings until breakage is 3,000 or more, the breakage resistance is judged to be good, and when the number of drillings is 5,000, the breakage resistance is judged to be even better.

[表2] 表2 試樣No. 超硬合金 WC粒子 第3相 WC/第2相界面區域 切削試驗 第1相 第2相 第3相 第1相+第2相 Co V Co/第2相 平均粒徑 最大粒徑 V最大 Cr最大 耐磨耗性 耐折損性 體積% 體積% 體積% 體積% 質量% 質量% 質量% μm μm 原子% 原子% μm 1 82.0 18.0 0.0 100.0 10 0.01 93 0.8 0 2 15 21.8 5000 2 94.0 5.0 0.8 99.0 3 0.30 90 0.3 0.5 12 15 19.3 3790 3 94.0 5.0 0.0 99.0 3 0.20 86 0.3 0.4 10 15 19.2 5000 4 85.0 15.0 0.0 100.0 8 0.20 85 0.4 0.2 10 15 19.6 5000 5 84.0 15.0 0.5 99.0 8 0.30 92 0.2 0.2 9 14 19.9 5000 6 94.0 5.0 0.5 99.0 3 0.20 90 0.3 0.5 9 15 19.2 3852 7 82.0 18.0 0.0 100.0 10 0.30 90 0.3 0.3 10 14 21.2 5000 8 84.0 15.0 0.6 99.0 8 0.20 93 0.5 0.4 11 15 19.5 4501 9 94.0 5.0 0.3 99.0 3 0.20 83 0.4 0.2 11 22 21 4167 10 94.0 5.0 0.7 99.0 3 0.30 90 0.3 0.5 15 16 20.3 3548 11 94.0 5.0 0.3 99.0 3 0.20 83 0.4 0.2 11 20 19.6 4088 12 94.0 5.0 0.6 99.0 3 0.01 88 0.3 0.4 10 15 19.2 3804 1-1 91.0 5.0 1.3 96.0 3 0.30 96 0.3 1.0 13 15 20.8 1657 1-2 95.0 2.0 1.0 97.0 1 0.30 85 0.3 0.7 4 9 折損 1 1-3 78.0 22.0 0.0 100.0 12 0.30 93 0.3 0.4 10 12 23.1 5000 1-4 95.0 5.0 0.0 100.0 3 0 91 0.9 0 0 14 21.9 2523 1-5 93.0 5.0 0.6 98.0 3 0.40 89 0.3 0.9 17 0 22.3 947 1-6 94.0 5.0 0.5 99.0 3 0.30 90 1.0 0.9 12 14 19.5 1095 1-7 94.0 5.0 0.6 99.0 3 0.30 92 0.3 0.2 17 16 22.4 2874 1-8 92.0 5.0 1.0 97.0 3 0.30 90 0.6 0.9 18 21 22.6 761 1-9 82.0 18.0 0.0 100.0 10 0.01 93 0.9 0 2 20 22.1 1382 1-10 94.0 5.0 0.6 99.0 3 0.01 89 0.3 0.3 16 24 22.1 2020 [Table 2] Table 2 Sample No. super carbide WC particles Phase 3 WC/second phase interface area Cutting test Phase 1 Phase 2 Phase 3 Phase 1 + Phase 2 Co V Co/Phase 2 average particle size maximum particle size Vmax Crmax Wear resistance Resistance to breakage Volume % Volume % Volume % Volume % mass % mass % mass % μm μm atom% atom% μm Second-rate 1 82.0 18.0 0.0 100.0 10 0.01 93 0.8 0 2 15 21.8 5000 2 94.0 5.0 0.8 99.0 3 0.30 90 0.3 0.5 12 15 19.3 3790 3 94.0 5.0 0.0 99.0 3 0.20 86 0.3 0.4 10 15 19.2 5000 4 85.0 15.0 0.0 100.0 8 0.20 85 0.4 0.2 10 15 19.6 5000 5 84.0 15.0 0.5 99.0 8 0.30 92 0.2 0.2 9 14 19.9 5000 6 94.0 5.0 0.5 99.0 3 0.20 90 0.3 0.5 9 15 19.2 3852 7 82.0 18.0 0.0 100.0 10 0.30 90 0.3 0.3 10 14 21.2 5000 8 84.0 15.0 0.6 99.0 8 0.20 93 0.5 0.4 11 15 19.5 4501 9 94.0 5.0 0.3 99.0 3 0.20 83 0.4 0.2 11 twenty two twenty one 4167 10 94.0 5.0 0.7 99.0 3 0.30 90 0.3 0.5 15 16 20.3 3548 11 94.0 5.0 0.3 99.0 3 0.20 83 0.4 0.2 11 20 19.6 4088 12 94.0 5.0 0.6 99.0 3 0.01 88 0.3 0.4 10 15 19.2 3804 1-1 91.0 5.0 1.3 96.0 3 0.30 96 0.3 1.0 13 15 20.8 1657 1-2 95.0 2.0 1.0 97.0 1 0.30 85 0.3 0.7 4 9 damaged 1 1-3 78.0 22.0 0.0 100.0 12 0.30 93 0.3 0.4 10 12 23.1 5000 1-4 95.0 5.0 0.0 100.0 3 0 91 0.9 0 0 14 21.9 2523 1-5 93.0 5.0 0.6 98.0 3 0.40 89 0.3 0.9 17 0 22.3 947 1-6 94.0 5.0 0.5 99.0 3 0.30 90 1.0 0.9 12 14 19.5 1095 1-7 94.0 5.0 0.6 99.0 3 0.30 92 0.3 0.2 17 16 22.4 2874 1-8 92.0 5.0 1.0 97.0 3 0.30 90 0.6 0.9 18 twenty one 22.6 761 1-9 82.0 18.0 0.0 100.0 10 0.01 93 0.9 0 2 20 22.1 1382 1-10 94.0 5.0 0.6 99.0 3 0.01 89 0.3 0.3 16 twenty four 22.1 2020

<探討> 試樣1~試樣12之超硬合金及切削工具相當於實施例。確認到該等試樣具有優異之耐磨耗性及耐折損性。 <Discussion> The cemented carbide and cutting tools of Samples 1 to 12 are equivalent to the Examples. It was confirmed that these samples had excellent wear resistance and breakage resistance.

試樣1-1~試樣1-10之超硬合金及切削工具相當於比較例。確認到該等試樣之耐磨耗性及/或耐折損性不足。The cemented carbide and cutting tools of Samples 1-1 to 1-10 are equivalent to comparative examples. It was confirmed that the wear resistance and/or breakage resistance of these samples were insufficient.

如上所述,對本發明之實施方式及實施例進行了說明,但起初便亦預定上述各實施方式及實施例之構成之適當組合或各種變化。 應認為此次所揭示之實施方式及實施例在所有方面均為例示,而非用以進行限制。本發明之範圍由申請專利範圍所示,而非由上述實施方式及實施例所示,意圖包括與申請專利範圍同等之含義、及範圍內之所有變更。 As mentioned above, the embodiments and examples of the present invention have been described. However, appropriate combinations or various changes of the configurations of the above-described embodiments and examples are initially intended. It should be considered that the implementation modes and examples disclosed this time are illustrative in all respects and are not intended to be limiting. The scope of the present invention is shown by the scope of the patent application, rather than by the above-mentioned embodiments and examples, and is intended to include meanings equivalent to the scope of the patent application and all changes within the scope.

(0001):結晶面 1:碳化鎢粒子 2:第2相 3:第3相粒子 10:切削工具 11:刀尖 B:方向 C:鑽孔器中心 L1:寬度 R:測定區域 W:磨耗痕跡 (0001):Crystalline surface 1: Tungsten carbide particles 2: Phase 2 3: 3rd phase particles 10:Cutting tools 11: Tip of the knife B: Direction C:Drill center L1: Width R: Measurement area W: Wear marks

圖1係用以對WC(tungsten carbide,碳化鎢)/第2相界面區域中之釩含有率之測定方法進行說明之圖。 圖2係表示本實施方式之切削工具(小徑鑽孔器)之一例之圖。 圖3係用以對實施例中測得之磨耗痕跡之寬度進行說明之圖。 FIG. 1 is a diagram for explaining a method of measuring the vanadium content in the WC (tungsten carbide)/second phase interface region. FIG. 2 is a diagram showing an example of a cutting tool (small diameter drill) according to this embodiment. FIG. 3 is a diagram for explaining the width of the wear mark measured in the Example.

(0001):結晶面 (0001):Crystalline surface

1:碳化鎢粒子 1: Tungsten carbide particles

2:第2相 2: Phase 2

3:第3相粒子 3: 3rd phase particles

B:方向 B: Direction

R:測定區域 R: Measurement area

Claims (4)

一種超硬合金,其具備包含碳化鎢粒子之第1相、及包含鈷作為主成分之第2相,且 上述超硬合金之上述第1相及上述第2相之合計含有率為97體積%以上, 上述碳化鎢粒子之圓相當徑之平均值為0.8 μm以下, 上述超硬合金之鈷含有率為3質量%以上10質量%以下, 上述超硬合金之釩含有率為0.01質量%以上0.30質量%以下, 上述碳化鎢粒子之(0001)結晶面與上述第2相之界面區域中之釩含有率之最大值為15原子%以下。 A cemented carbide having a first phase containing tungsten carbide particles and a second phase containing cobalt as a main component, and The total content of the above-mentioned first phase and the above-mentioned second phase in the above-mentioned cemented carbide is 97% by volume or more, The average circular equivalent diameter of the above-mentioned tungsten carbide particles is 0.8 μm or less, The cobalt content of the above-mentioned cemented carbide is not less than 3% by mass and not more than 10% by mass, The vanadium content of the above-mentioned cemented carbide is not less than 0.01% by mass and not more than 0.30% by mass, The maximum value of the vanadium content in the interface region between the (0001) crystal plane of the tungsten carbide particles and the second phase is 15 atomic % or less. 如請求項1之超硬合金,其中上述超硬合金具備第3相,該第3相含有包含10原子%以上之釩的第3相粒子, 上述超硬合金之上述第3相之含有率超過0體積%且為1體積%以下, 上述第3相粒子之圓相當徑之最大值為0.5 μm以下。 The cemented carbide of claim 1, wherein the cemented carbide has a third phase, and the third phase contains third phase particles containing more than 10 atomic % of vanadium, The content of the third phase in the above-mentioned cemented carbide exceeds 0% by volume and is less than 1% by volume, The maximum value of the circle equivalent diameter of the third phase particles is 0.5 μm or less. 如請求項1或請求項2之超硬合金,其中上述界面區域中之鉻含有率之最大值為20原子%以下。For example, in the cemented carbide of Claim 1 or Claim 2, the maximum chromium content rate in the above-mentioned interface region is 20 atomic % or less. 一種切削工具,其具備包含如請求項1至請求項3中任一項之超硬合金之刀尖。A cutting tool having a tip including the cemented carbide according to any one of claims 1 to 3.
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