TW202325100A - Reel to reel plasma desmear machine - Google Patents

Abstract

The invention relates to a reel to reel plasma desmear machine. Primarily, a machine is provided with a reel to reel unit, and the reel to reel unit forms a feeding path. Furthermore, the machine is arranged with a tension adjustment unit, a plasma desmear unit and a correction unit along the feeding path. Thereby when a substrate passes through the tension adjustment unit along the feeding path, the physical tension adjustment design can maintain a stable tension adjustment effect, and when the substrate is fed to the plasma desmear unit, the temperature of an electrode can be quickly raised or lowered to reach an ideal working temperature by means of a cooling water conduction design inside the tubular electrode to improve the reaction efficiency of the process. Then the offset of the substrate is gradually corrected by the correction unit to avoid wrinkles on the substrate, so as to effectively improve the performance of the desmear process and the reel to reel operation for the substrate.

Description

Roll to Roll Plasma Desmearing Machine

The invention relates to the technical field of plasma desmear removal, in particular to a roll-to-roll plasma desmear machine equipment.

Press, flexible copper foil substrate [FCCL] has the advantages of lightness, thinness and flexibility, and is widely used in mobile phones, digital cameras, LCD TVs, notebook computers and 5G electronic products, as a flexible circuit board, when used in After the flexible copper foil base material is drilled, the polymer base material will generate slag on the hole wall due to the high heat during drilling, causing problems such as poor signal transmission of the line.

Existing methods for cleaning smear on soft copper foil substrates include chemical and plasma treatment. Due to the cumbersome steps of chemical smear removal and low removal efficiency, plasma smear removal is more popular. The existing plasma desmearing equipment mainly uses a flat plate as an electrode. When it is used, it will conduct electricity and heat the plate electrode to form an electric field between the two electrodes. When the gas passes through the two electrodes, it will become plasma and bombard it. The scum on the surface of the substrate and the wall of the hole is used to break the chemical bond of the slag and produce a reduction reaction to achieve the effect of removing the scum. However, the flat plate electrode takes a long time to heat up, and the heating speed is slow, and the heat dissipation speed is also relatively slow, so it is prone to temperature unevenness, and it is difficult to quickly reach the ideal working temperature, resulting in a decrease in productivity and other defects.

Furthermore, since the flexible copper foil base material is flexible and can be rolled into rolls, it can be transported and processed by roll-to-roll equipment. The existing roll-to-roll equipment mainly uses electronic instruments to control the feeding speed and tension of the base material. However, the corrosive gas system generated during the operation of the plasma desmearing equipment is likely to cause the failure of the electronic equipment, resulting in frequent downtime for maintenance, which not only increases the maintenance cost, but also affects the production efficiency. In addition, the existing roll-to-roll equipment is used for substrate conveying During the process, the deviation correction device will be used to correct the deviation of the substrate. However, the Y-axis deviation correction device used in the existing roll-to-roll equipment will correct the substrate to the position once when the deviation of the substrate is detected, so the deviation correction A large amount is prone to damage such as wrinkles on the substrate.

The reason is that, in view of the fact that the existing roll-to-roll and plasma desmearing equipment still have the above-mentioned deficiencies in use and implementation, the present inventor has made use of his many years of experience and knowledge in related fields of manufacturing and design, and through many ingenious ideas , develop the present invention.

The present invention relates to a roll-to-roll plasma desmear machine, and its main purpose is to provide a device that can quickly raise and lower the temperature of the electrode to reach the ideal working temperature, so as to improve the reaction efficiency and production capacity of the plasma desmear process.

Yet another object of the present invention is to provide a physical tension adjustment that is suitable for difficult working environments, reduces failure rates, and maintains tension adjustment stability.

Another object of the present invention is to provide a method that can gradually correct the offset of the substrate, so that the substrate will not be wrinkled during the correction process, so as to improve the quality of the product during roll-to-roll.

In order to achieve the above-mentioned implementation purpose, the present inventor has developed the following roll-to-roll plasma desmearing machine, which is mainly equipped with a machine table, and an inlet port and an outlet port are formed on the machine table, and the machine table There is a roll-to-roll unit, and the roll-to-roll unit is constructed with a feeding path between the inlet end and the outlet end of the machine, and a plasma desmearing unit is arranged on the feeding path, the plasma degum The slag unit consists of a plasma reaction chamber arranged on the machine, and a number of spaced and adjacent coil electrodes are arranged in the plasma reaction chamber, and a gap is formed between the two coil electrodes. The coiled electrode is a tubular electrode with a tube hole inside that is bent and coiled on the same plane to form a ring shape, and the tube hole of the coiled electrode is filled with fluid, and the coiled electrode is connected to a power supply module Group and a temperature control module are connected.

In the roll-to-roll plasma desmearing machine described above, at least one tension adjustment unit is further provided on the feeding path of the roll-to-roll unit, and the tension adjustment unit includes a displacement detector, a Connecting rod, a tension control wheel and a pneumatic cylinder, so that the displacement detector and pneumatic cylinder are fixed on the machine table, and one end of the connecting rod is assembled with the detection shaft of the displacement detector, The other end of the connecting rod is set with the tension control wheel, and the output shaft of the air cylinder is set between the two ends of the connecting rod.

In the roll-to-roll plasma desmearing machine as described above, a deviation correction unit is further provided on the feeding path of the roll-to-roll unit, and the deviation correction unit includes a movable frame, and is assembled on the movable frame. There is at least one correcting roller, and the movable frame is assembled with a rotating power source fixed on the machine table, and the machine table is provided with a deviation correction sensor at a position adjacent to the movable frame.

In the roll-to-roll plasma desmearing machine as described above, the roll-to-roll unit includes an unwinding wheel, a winding wheel and a counting wheel, so that the unwinding wheel is arranged on the side of the machine At the entrance end, the winding wheel is arranged at the exit end of the machine, and the unwinding wheel and the winding wheel are respectively connected to a rotating power source fixed on the machine, and the The counting rollers are arranged between the unwinding wheel and the winding wheel, and are arranged to form the feeding path.

The above-mentioned roll-to-roll plasma desmearing machine, wherein, the inlet end and the outlet end of the machine are located on the same side of the machine.

In this way, when the substrate passes through the tension adjustment unit along the feeding path, the physical tension adjustment design can maintain a stable tension adjustment effect. When the substrate is fed to the plasma desmear unit, the cooling water is conducted in the tubular electrode The design can make the electrode heat up and down quickly to reach the ideal working temperature, so as to improve the reaction efficiency of the process, and then gradually correct the offset of the substrate through the correction unit to avoid wrinkles on the substrate, so as to achieve effective Improves the efficiency of substrate desmearing and roll-to-roll operations.

In order to enable a more complete and clear disclosure of the technical means of the present invention and the effects it can achieve, the detailed description is as follows. Please also refer to the disclosed drawings and drawing numbers:

First of all, as shown in the first figure, the roll-to-roll plasma desmearing machine of the present invention is mainly equipped with a machine (1), and an inlet port (11) is formed on the machine (1) and an outlet port (12), and the inlet port (11) and the outlet port (12) are located on the same side of the machine (1), and a roll-to-roll unit (2) is provided on the machine (1), And make the roll-to-roll unit (2) construct a feeding path from the inlet end (11) to the outlet end (12) of the machine (1), and at least one tension adjustment unit (3) is arranged along the feeding path , a plasma desmear unit (4) and a deviation correction unit (5); wherein:

The roll-to-roll unit (2) comprises an unwinding wheel (21), a winding wheel (22) and a counting roll (23), so that the unwinding wheel (21) is arranged on the machine (1 ) at the inlet end (11), and the winding wheel (22) is arranged at the outlet end (12) of the machine (1), and the unwinding wheel (21) and the winding wheel (22) They are respectively connected to a rotating power source such as a motor fixed on the machine (1), and the counting rollers (23) are arranged between the unwinding wheel (21) and the winding wheel (22) to form the feed route;

The tension adjustment unit (3) includes a displacement detector (31), a connecting rod (32), a tension control wheel (33) and a pneumatic cylinder, so that the displacement detector (31) The pneumatic cylinder is fixed on the machine (1), and one end of the connecting rod (32) is assembled with the detection shaft (311) of the displacement detector (31), and the connecting rod (32) The tension control wheel (33) is set at the other end, and the output shaft (34) of the pneumatic cylinder is set between the two ends of the connecting rod (32);

The plasma desmearing unit (4) includes a plasma reaction chamber (41) arranged on the machine (1), and several intervals are arranged in the plasma reaction chamber (41) and are set up side by side The coiled electrode (42), and a gap is formed between the two coiled electrodes (42), please refer to the second and third figures together, the coiled electrode (42) is equipped with a tube inside The tubular electrode (42) of the hole (421) is bent and coiled into a ring shape on the same plane, and fluids such as cooling water are filled in the tube hole (421) of the coiled electrode (42), and the coiled electrode (42) Connect with a power supply module and a temperature control module, so that the coil electrode (42) is powered by the power supply module, and the cooling water temperature is controlled by the temperature control module;

A correction unit (5) comprises a movable frame (51), and at least one correcting roller (52) is set on the movable frame (51), and the movable frame (51) is fixed with a Rotary power sources (53) such as motors of the machine platform (1) are assembled together, and the machine platform (1) is provided with a deviation correction sensor (54) at the position adjacent to the movable frame (51) in addition.

Accordingly, the rotation power source of the roll-to-roll unit (2), the displacement detector (31) of the tension adjustment unit (3) and the temperature control module of the air cylinder and the plasma desmear unit (4) The group and the power supply module, as well as the rotating power source (53) and the deviation correction sensor (54) of the deviation correction unit (5) are connected with a control unit. When using and implementing, one end of the base material (6) such as flexible copper foil base material [FCCL] is wound on the unwinding wheel (21) provided at the inlet end (11) of the machine (1), and then the base material The material (6) is wound around the counting roller (23) of the roll-to-roll unit (2), and is wound with the tension control wheel (33) of the tension adjustment unit (3), so that the base material (6) Through the gap formed between the two coiled electrodes (42) of the plasma desmear unit (4), the base material (6) is wound around the correction roller (52) of the deviation correction unit (5), and the The end of the base material (6) is wound on the take-up wheel (22) provided at the exit end (12) of the machine (1).

Thereby, when the operation of the present invention is activated by the control unit, the unwinding wheel (21) and the winding wheel (22) of the roll-to-roll unit (2) are driven to drive the base material (6) by the connected rotating power source. ) from the inlet end (11) of the machine (1) along the feeding path to the outlet end (12), at this time, the displacement detector (31) of the tension adjustment unit (3) will detect the winding The tension of the substrate (6) of the tension control wheel (33) changes, and the detected information is sent to the control unit. When the displacement detector (31) detects that the tension of the substrate (6) is insufficient, The control unit will drive the pneumatic cylinder to move so that the output shaft (34) of the pneumatic cylinder pushes against the tension control wheel (33) to move, so as to adjust the tension of the tension control wheel (33). Material (6) tension effect.

When the substrate (6) passes through the gap between the two coil electrodes (42) of the plasma desmear unit (4), it will be bombarded by the plasma generated between the two coil electrodes (42), so that the substrate (6) The chemical bonds of the smear on the surface and the hole wall are broken and reduction reactions are produced to achieve the effect of removing smear, and when the plasma desmear unit (4) is activated, the temperature control module will pass through the electrode (42) The cooling water in the tube hole (421) is controlled for heating and cooling. Since the cross-sectional area of the tubular electrode (42) is small, the temperature of the electrode (42) can be raised and lowered rapidly to reach the ideal working temperature and reduce the temperature gradient. In order to improve the uniformity of removing smear and ensure the stability of the process.

Furthermore, when the base material (6) completes the operation of removing smear, it will pass through the deviation correction unit (5), and the deviation correction unit (5) is located at the center of the correction roller (52) in the direction of travel of the base material (6). As a reference, when the substrate (6) has no deviation, the correction roller (52) will be in a parallel stop state. If the substrate (6) deviates to the right, please refer to the fourth figure shows that the deviation correction sensor (54) of the deviation correction unit (5) will detect the deviation state of the substrate (6), and send a signal to the control unit, so that the control unit drives the rotation of the deviation correction unit (5) The power source (53) drives the movable frame (51) and the correcting rollers (52) set on it to rotate counterclockwise, so that the direction of travel of the substrate (6) is gradually corrected to the left, otherwise, when the substrate (6) When shifting to the left, please also refer to the fifth figure, the control unit will drive the rotating power source (53) to drive the movable frame (51) and its correction roller (52) to rotate clockwise, so that the base The traveling direction of the material (6) is gradually corrected to the right, and by means of the gradual offset correction method, it is possible to avoid excessive distortion angles, which may cause wrinkle damage to the base material (6).

Under the guidance of the correction of the correction unit (5), the base material (6) can be neatly wound on the winding wheel (22) at the outlet end (12) of the machine (1), so that the base material (6) The edges of the two sides of the material (6) are aligned. In addition, by placing the unwinding wheel (21) at the entrance (11) of the machine (1) and the winding wheel (22) at the exit (12) on the machine The table (1) is designed on the same side, so that the substrate (6) can be replaced conveniently before and after processing, so as to effectively shorten the loading and unloading time.

The aforementioned embodiments or drawings do not limit the implementation of the roll-to-roll plasma desmearing machine of the present invention, and any appropriate changes or modifications made by those with ordinary knowledge in the technical field should be considered as not departing from the present invention the scope of the patent.

As can be seen from the above structure and implementation, the present invention has the following advantages:

1. In the roll-to-roll plasma desmearing machine of the present invention, the electrode of the plasma desmearing unit is made into a tubular shape, and the tubular electrode is filled with cooling water, so that it can be used in the design of a small cross-sectional area of the tubular electrode , can make the electrode heat up and down quickly to achieve the ideal working temperature effect, and then improve the reaction efficiency and stability of the process, so as to improve the productivity and quality of plasma desmearing.

2. The roll-to-roll plasma desmearing machine of the present invention is equipped with a tension adjustment unit on the feeding path to be suitable for the processing of substrates of various tension materials, and the physical tension adjustment design of the pneumatic cylinder can be used to Maintain the stability of tension adjustment in various difficult working environments such as corrosive gas, and reduce the failure maintenance rate.

3. The roll-to-roll plasma desmearing machine of the present invention is equipped with a deviation correction unit on the feeding path, and the deviation correction unit is used to gradually correct the offset of the substrate, so as to avoid excessive twisting angles and damage to the substrate. Wrinkle damage occurs.

4. The roll-to-roll plasma desmearing machine of the present invention sets the unwinding wheel and the winding wheel on the same side of the machine, thereby improving the convenience of replacing the substrate before and after processing, and further Effectively shorten the loading and unloading time.

In summary, the embodiment of the present invention can indeed achieve the expected effect, and the specific structure disclosed by it has not only never been seen in similar products, nor has it been disclosed before the application. It has fully complied with the provisions of the Patent Law and It is really convenient to file an application for a patent for invention according to the law, to ask for the review, and to grant the patent.

1: machine

11: Entry port

12: Export port

2: Roll-to-roll unit

21: unwinding wheel

22: Rewinding wheel

23: roller

3: Tension adjustment unit

31: Displacement detector

311: Detection axis

32: Connecting rod

33: Tension control wheel

34: output shaft

4: Plasma desmear unit

41: Plasma reaction chamber

42: electrode

421: tube hole

5: Correction unit

51: Movable frame

52: Correction roller

53: rotating power source

54: Correction sensor

6: Substrate

The first figure: the front view of the present invention

The second figure: the front view of the coil electrode of the present invention

Figure 3: Partial cross-sectional view of the coil electrode of the present invention

Figure 4: Schematic diagram of the correction state of the substrate shifted to the right according to the present invention

Figure 5: Schematic diagram of the correction state of the base material shifting to the left according to the present invention

1: machine

11: Entry port

12: Export port

2: Roll-to-roll unit

21: unwinding wheel

22: Rewinding wheel

23: roller

3: Tension adjustment unit

31: Displacement detector

311: Detection axis

32: Connecting rod

33: Tension control wheel

34: output shaft

4: Plasma desmear unit

41: Plasma reaction chamber

42: electrode

5: Correction unit

51: Movable frame

52: Correction roller

53: rotating power source

54: Correction sensor

6: Substrate

Claims (5)

A roll-to-roll plasma desmearing machine is mainly equipped with a machine table, and an inlet port and an outlet port are formed on the machine table, and a roll-to-roll unit is provided on the machine table, and the roll-to-roll unit is arranged on the machine table. The roll unit constructs a feeding path between the inlet end and the outlet end of the machine, and a plasma desmearing unit is arranged on the feeding path. The plasma reaction chamber is provided with a number of spaced and adjacent coil electrodes set up side by side in the plasma reaction chamber, and a gap is formed between the two coil electrodes. The coil electrode is composed of a tube hole inside The tubular electrode is bent and coiled on the same plane to form a ring shape, and the tube hole of the coiled electrode is filled with fluid, and the coiled electrode is connected with a power supply module and a temperature control module. The roll-to-roll plasma desmearing machine as described in Claim 1, wherein at least one tension adjustment unit is further provided on the feeding path of the roll-to-roll unit, and the tension adjustment unit includes a displacement detection unit device, a connecting rod, a tension control wheel and a pneumatic cylinder, so that the displacement detector and the pneumatic cylinder are fixed on the machine table, and one end of the connecting rod is connected to the detection shaft of the displacement detector Assembling, the tension control wheel is assembled at the other end of the connecting rod, and the output shaft of the pneumatic cylinder is arranged between the two ends of the connecting rod. The roll-to-roll plasma desmearing machine as described in claim 1, wherein, a deviation correction unit is further provided on the feeding path of the roll-to-roll unit, and the deviation correction unit includes a movable frame, and the movable frame The upper group is provided with at least one correcting roller, and the movable frame is combined with a rotating power source fixed on the machine table, and the machine table is provided with a deviation correction sensor at a position adjacent to the movable frame . The roll-to-roll plasma desmearing machine as described in claim 1, wherein the roll-to-roll unit includes an unwinding wheel, a winding wheel and a counting roll, so that the unwinding wheel is set on the At the entrance end of the machine table, the winding wheel is arranged at the exit end of the machine table, and the unwinding wheel and the winding wheel are respectively connected to a rotating power source fixed on the machine table, In addition, the number of rollers is arranged between the unwinding wheel and the winding wheel to form the feeding path. The roll-to-roll plasma desmear machine as described in Claim 1, wherein the inlet and outlet of the machine are located on the same side of the machine.

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