CN201648515U - Winding vacuum coating device - Google Patents
Winding vacuum coating device Download PDFInfo
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- CN201648515U CN201648515U CN2010201505246U CN201020150524U CN201648515U CN 201648515 U CN201648515 U CN 201648515U CN 2010201505246 U CN2010201505246 U CN 2010201505246U CN 201020150524 U CN201020150524 U CN 201020150524U CN 201648515 U CN201648515 U CN 201648515U
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Abstract
The utility model discloses a winding vacuum coating device, which comprises an unwinding device, a coating chamber, and a vacuum cavity body of the winding device. The coating chamber is provided with a coating roll. The unwinding device comprises an unwinding roll and an active feeding roll-wheel pair; a tension releasing roll is arranged between the feeding roll-wheel pair and the coating roll, and leads the material volume to keep relaxed state between the feeding roll-wheel pair and the tension releasing roll. The winding device comprises an active winding roll; a feeding roll-wheel pair is arranged between the coating roll and the winding roll, and the tension releasing roll is arranged between the feeding roll-wheel pair and the winding roll; the material keeps relaxed state between the feeding roll-wheel pair and the tension releasing roll, so tension change of the unwinding roll and the winding roll caused by gradual change of material volume diameter can not transmitted to the coating roll, therefore, the surface tension of the coated material winding around the coating roll is constant, so as to lead even coating of film and good coating effect.
Description
Technical field:
The utility model relates to the vacuum coating film equipment technical field, particularly a kind of winding-type vacuum coater.
Background technology:
As plastic materials such as PET, PE, PI, be coated with the product of functional membrane on the banding substrates such as flexible high molecular material, carbonaceous material, of many uses at modern industry and high-tech sector.The plating functional membrane adopts the winding film plating mode more on banding substrate.
Processing the said products generally need adopt multiple technologies such as ion beam sputtering, magnetron sputtering, electron beam evaporation deposition under high vacuum environment.Vacuum coating film equipment can obtain one or more layers uniform settled layer at conductive base and non-conductive substrate, can be applied to EMI, flexible circuit board, industries such as optical coating.At present, the vacuum plating unit of widespread usage is big to being made up of vacuum chamber, vacuum acquiring system, reel system, plating system and automatic control system.Its schedule of operation is as follows: material loading, and---closing door for vacuum chamber---opened the pump housing of vacuum acquiring system, vacuumized---and fill working gas, open plating system---explained hereafter--and stop the pump housing, open door for vacuum chamber, take out product---next working cycle.
As the base material band of functional membrane film goods support, in coating process, need to guarantee to reach the even and undamaged requirement continuously of no oblique stretching, high-flatness and rete.Yet, existing winding-type vacuum coater, its wind2 is generally main drive, i.e. Zhu Dong let off roll device and wind-up roll device initiatively are in the working process, coil in the material-coil coil-diameter of let off roll and reduce gradually, coil in the material-coil coil-diameter of wind-up roll and increase gradually, if the rotational line constant airspeed of wind2, then the tension force of substrate surface will change and change with material-coil coil-diameter, this can cause rete inhomogeneous, influences coating effects.For avoiding causing the uneven defective of rete because of substrate tension changes, generally have at present and adopt powder clutch and set up photoelectricity or the tension force sensing shaft of radio detection etc. realizes adjusting to wind2 rotational line speed, thereby realization tension control, but this causes the device structure complexity, with high costs, and because the response time-delay of sensing circuit, response error etc., its tension control effect is still undesirable.
Summary of the invention:
The purpose of this utility model is to provide a kind of tension control effective at the deficiencies in the prior art, even film layer, the winding-type vacuum coater that coating effects is good.
The purpose of this utility model realizes by following technical measures:
Winding-type vacuum coater comprises the vacuum cavity that is provided with vacuum acquiring system, is provided with unwinding device, coating chamber and wrap-up in the described vacuum cavity; Described coating chamber is provided with the film coating roller that is connected with the drive-motor output shaft, and the film coating apparatus of coating chamber is over against the periphery of described film coating roller; Described unwinding device comprises a let off roll, described let off roll and one unreels the feeding running roller to being connected, the output shaft that described right one of them running roller and that unreels the feeding running roller unreels the feeding motor is connected, and described unreeling between feeding running roller pair and the described film coating roller is provided with the release of tension roller; Described wrap-up comprises the wind-up roll that is connected with a winding motor output shaft, it is right to be provided with rolling feeding running roller between described film coating roller and the wind-up roll, one of them right running roller of this rolling feeding running roller is connected with the output shaft of a rolling feeding motor, also is provided with the release of tension roller between this rolling feeding running roller pair and the described wind-up roll.
Further technical scheme of the present utility model comprises:
Described release of tension roller below is provided with optoelectronic switch, described optoelectronic switch and described drive-motor, unreels feeding motor, rolling feeding motor, winding motor and all is electrically connected.
Wherein, the circumferential surface of described release of tension roller convexes with positioning baffle, and described release of tension roller both sides are respectively arranged with pressure roller.
Wherein, described let off roll is provided with magnetic powder brake.
Wherein, described winding motor is an either-rotation motor, and the output shaft of this winding motor is provided with powder clutch.
According to above-described; be provided with the branch film device between described unwinding device and the film coating roller; described minute film device comprise branch film running roller to the protective membrane wind-up roll; the film running roller was to being arranged at the position near film coating roller in described minute; divide the film running roller to being provided with magnetic powder brake; described protective membrane wind-up roll is connected with the output shaft of a protective membrane winding motor, and described protective membrane winding motor is provided with automatic speed governor.
Further, the outer side near unwinding device of described coating chamber is provided with washing unit.
Further, be provided with film covering device between described film coating roller and the wrap-up, described film covering device comprise the overlay film running roller to the protective membrane let off roll, described overlay film running roller is to being arranged at the position near film coating roller.
Wherein, be arranged at intervals with the dividing plate of separating coating chamber in the described coating chamber, it is area of isolation that two dividing plates enclose the zone of covering, and described area of isolation both sides are coating film area, described film coating apparatus is arranged in the described coating film area, is provided with the air pressure holding pump in the described area of isolation.
Also be provided with film coating apparatus in the described area of isolation.
The utility model beneficial effect is: the utility model comprises the vacuum cavity that is provided with vacuum acquiring system, is provided with unwinding device, coating chamber and wrap-up in the described vacuum cavity; Described coating chamber is provided with the film coating roller that is connected with the drive-motor output shaft, and the film coating apparatus of coating chamber is over against the periphery of described film coating roller; Described unwinding device comprises a let off roll, described let off roll and one unreels the feeding running roller to being connected, the output shaft that described right one of them running roller and that unreels the feeding running roller unreels the feeding motor is connected, and described unreeling between feeding running roller pair and the described film coating roller is provided with the release of tension roller; Described wrap-up comprises the wind-up roll that is connected with a winding motor output shaft, it is right to be provided with rolling feeding running roller between described film coating roller and the wind-up roll, one of them right running roller of this rolling feeding running roller is connected with the output shaft of a rolling feeding motor, also is provided with the release of tension roller between this rolling feeding running roller pair and the described wind-up roll.Because material is between unwinding device and film coating roller, and all there is one section to keep relaxed state between wrap-up and the film coating roller, so the tension variation that let off roll and wind-up roll produce because of material-coil coil-diameter gradually changes can not be passed to film coating roller, so pile warp film coating roller and by the material of plated film, it has constant surface tension, thereby make the rete plating even, coating effects is good.
Description of drawings:
The utility model is described in further detail to utilize accompanying drawing, but the embodiment in the accompanying drawing does not constitute any restriction of the present utility model.
Fig. 1 is the structural representation of a kind of winding-type vacuum coater of the present utility model;
Fig. 2 is the release of tension roller of a kind of winding-type vacuum coater of the present utility model and the structural representation of pressure roller.
Comprise among Fig. 1 and Fig. 2:
1---vacuum cavity 11---air pressure holding pump 12---film coating roller
13---let off roll 14---wind-up roll 15---dividing plates
16---area of isolation 17---coating film area 18---film coating apparatus
2------release of tension roller 31---pressure rollers that unreel the feeding running roller to 3
32---positioning baffle 4---optoelectronic switch 51---divides the film running roller right
52---the overlay film running roller is right for protective membrane wind-up roll 6---washing unit 71---
72---protective membrane let off roll 8---material 81---protective membranes
Rolling feeding running roller is right for 9---auxiliary transfer rollers 10---
Embodiment:
Below in conjunction with accompanying drawing the utility model is further described, sees illustrated in figures 1 and 2ly, this is preferred embodiment of the present utility model:
Winding-type vacuum coater comprises the vacuum cavity 1 that is provided with vacuum acquiring system, is provided with unwinding device, coating chamber and wrap-up in the described vacuum cavity 1; Described coating chamber is provided with the film coating roller 12 that is connected with the drive-motor output shaft, and the film coating apparatus 18 of coating chamber is over against the periphery of described film coating roller 12; Described unwinding device comprises a let off roll 13, described let off roll 13 and one unreels the feeding running roller and is connected 2, the described feeding running roller that unreels is connected the output shaft that one of them running roller and of 2 unreels the feeding motor, described unreel the feeding running roller to 2 and described film coating roller 12 between be provided with release of tension roller 3; Described wrap-up comprises the wind-up roll 14 that is connected with a winding motor output shaft, be provided with rolling feeding running roller between described film coating roller 12 and the wind-up roll 14 to 10, this rolling feeding running roller is connected with the output shaft of a rolling feeding motor one of them running roller of 10, this rolling feeding running roller to 10 and described wind-up roll 24 between also be provided with release of tension roller 3.Wherein, described release of tension roller 3 be make the material twist in unreel the feeding running roller to 2 or rolling feeding running roller to 10 with release of tension roller 3 between the maintenance relaxed state running roller.
During the utility model work, base material material 8 volumes to be coated are put in let off roll 13, pinch 2 through unreeling the feeding running roller, material 8 is drawn from let off roll 13, and this unreel the feeding running roller to 2 and release of tension roller 3 between keep relaxed state, the described release of tension roller 3 of material 8 pile warps and be around in the periphery of described film coating roller 12, under the rotation of described film coating roller 12 drives in coating chamber by film coating apparatus 18 plated films; The material 8 of finishing plated film described rolling feeding running roller to 10 pinching under, drawn coating chamber from film coating roller 12 surfaces, and this rolling feeding running roller to 10 and adjacent with it release of tension roller 3 between keep relaxed state, last under the rotation of described wind-up roll 14 and rolling in described wind-up roll 14.Because material 8 is between unwinding device and film coating roller 12, and all there is one section to keep relaxed state between wrap-up and the film coating roller 12, so the tension variation that let off roll 13 and wind-up roll 14 produce because of material-coil coil-diameter gradually changes can not be passed to film coating roller 12, so pile warp film coating roller 12 and by the material 8 of plated film, its surface tension is mainly by the pulling force decision of rolling feeding running roller to 10 clampings pulling material 8, under the situation of film coating roller 12 linear velocity constant, material 8 constant tensions during plated film, thereby make the rete plating even, coating effects is good.
As mentioned above, can be pulled smoothly under to 10 clamping at rolling feeding running roller in order to make material 8, described film coating roller 12 and described rolling feeding running roller are consistent to 10 linear velocity; When making work material 8 rolling feeding running roller to 10 and release of tension roller 3 between remain relaxed state, described rolling feeding running roller to 10 and the linear velocity of wind-up roll 14 be consistent.
See shown in Figure 1ly, described release of tension roller 3 belows are provided with optoelectronic switch 4, described optoelectronic switch 4 and described drive-motor, unreel feeding motor, rolling feeding motor, winding motor and all are electrically connected.Described optoelectronic switch 4 is to utilize detected material to the blocking or reflect of light beam, by the synchronization loop gating circuit, thus the transmitter that inspected object has or not; Optoelectronic switch 4 is converted to optical signal with received current and penetrates on projector, receptor is again according to the strong and weak of the light that receives or there is unmatchful target object to survey.Optoelectronic switch 4 described in the utility model is arranged at release of tension roller 3 belows, when the bottom position of corresponding material 8 slack strand, normal feeding, because material 8 is lax sagging, optoelectronic switch 4 is blocked, and drive-motor, unreels the running of all switching on of feeding motor, rolling feeding motor and winding motor; When unusual feeding takes place when, the slack strand of material 8 is tightened up, and then optoelectronic switch 4 is connected owing to no material 8 blocks, thereby produces control signal, make described drive-motor, unreel the feeding motor, rolling feeding motor and winding motor stall, this has improved working reliability of the present utility model.In like manner, all sent back the utility model idle running for fear of a Roll Sushi material 8, described unreel the feeding running roller right below a pair of optoelectronic switch 4 also is set.
See shown in Figure 2ly, the circumferential surface of release of tension roller 3 described in the utility model convexes with positioning baffle 32, and described release of tension roller 3 both sides are respectively arranged with pressure roller 31.Each release of tension roller 3 is respectively arranged with described positioning baffle 32 near the position at two ends, distance between these two positioning baffles 32 is complementary with material 8 fabric widths to be transmitted, described positioning baffle 32 has avoided material 8 to be offset along described release of tension roller 3 axial disturbances, has avoided taking place tiltedly to stretch and influence coating effects in the process that transmits material 8.31 of described pressure rollers are used to increase the contact area of material 8 and release of tension roller 3, thus when prolonging the described release of tension of material 8 pile warps roller 3 by the length of described positioning baffle 32 constraints, thereby strengthen the locating effect of positioning baffle 32.
Wherein, the utility model can be according to the size of described vacuum cavity 1, and the material of material 8 and a plurality of auxiliary transfer rollers 9 rationally are set in the transfer path of material 8, so that material 8 keeps in transport process is smooth.Simultaneously, in order to produce material 8 skews in the process of further avoiding transmitting material 8, the circumferential surface of described auxiliary transfer roller 9 also can be convexly equipped with described positioning baffle 32.
Wherein, described let off roll 13 is provided with magnetic powder brake.Magnetic powder brake is that a kind of magnetic with high magnetic diffusivity is the work media, is the new type auto controlling elements of the superior performance of control device with the magnetizing current, and its principle of work is to produce magnetic field after connecting direct supply, the working medium magnetic forms the magnetic chain under the magnetic line of force effect, the purpose of brake torque is characterized in rapid reaction, the linear lag is good, control moment is constant, and running steadily, and is simple in structure, noiselessness, easy to maintenance, have fast braking, functions such as tension control.Described let off roll 13 is a driven roll, and described magnetic powder brake is for fear of unreeling the feeding running roller when shutting down feeding to 2, let off roll 13 because of inertia continue rotation cause material 8 let off roll 13 with unreel the feeding running roller and pile up between to 2 and tie a knot.The let off roll 13 that is provided with magnetic powder brake stop bit rapidly when shutting down.For the work effect of the magnetic powder brake that strengthens let off roll 13, the utility model also can be installed powder clutchs to 2 unreeling the feeding running roller, and this powder clutch and the interlock of described magnetic powder brake are to guarantee let off roll 13 and to unreel the feeding running roller to 2 run-in synchronisms.
Wherein, described winding motor is an either-rotation motor, and the output shaft of this winding motor is provided with powder clutch, also that is to say, described winding motor can be realized rotating.This be because, the plated film product is according to the rete characteristic, and service requirements, and two kinds of rolling modes of the outside rolling of inside rolling of rete and rete are arranged when rolling, winding motor that can two-way rotation has increased the scope of application of the present utility model.
See shown in Figure 1; can be provided with the branch film device between described unwinding device and the film coating roller 12; described minute film device comprises that branch film running roller is to 51 and protective membrane wind-up roll 52; the film running roller was to 51 positions that are arranged near film coating roller 12 in described minute; divide the film running roller to be provided with magnetic powder brake to 51; described protective membrane wind-up roll 52 is connected with the output shaft of a protective membrane winding motor, and described protective membrane winding motor is provided with automatic speed governor.
In order to protect material 8 surfaces to be coated, keep its degree of cleaning, now a lot of substrate surfaces are covered with protective membrane 81, must remove this protective membrane 81 when plated film.To 51 o'clock, protective membrane 81 separated with material 8 base materials and is spurred rollings by described protective membrane wind-up roll 52 material 8 through described minute film running roller, and base material then is sent to film coating roller 12, and protective membrane 81 then is sent to described protective membrane wind-up roll 52 and rolling.Wherein, in order to make isolating protective membrane 81 entirely by rolling, described protective membrane wind-up roll 52 and branch film running roller also can be provided with auxiliary transfer roller 9 as required between 51.
Protective membrane 81 its coil diameter when rolling can increase gradually; if the invariablenes turning speed of protective membrane wind-up roll 52; then the tension force of protective membrane 81 can increase and increase gradually with coil diameter; this can exert an influence to material 8 tension force of minute film running roller to 51 places; so automatic speed governor is set at described protective membrane winding motor; this automatic speed governor can change the rotating speed of adjusting the protective membrane winding motor according to protective membrane 81 coil diameters, to eliminate the tension variation that causes because of the coil diameter variation.Simultaneously, 51 places also are provided with magnetic powder brake, stablize material 8 through the tension force of undue film running roller by the damping force that this magnetic powder brake produces, the constant tension during with assurance material 8 plated films 51 o'clock at described minute film running roller.
Wherein, the outer side near unwinding device of described coating chamber is provided with washing unit 6.Material 8 may be infected with spots such as dust in transport process; perhaps at base material with after protective membrane 81 separates; base material remained on surface to be coated has dirt settling; these spots or residual dirt settling will influence coating effects; so described washing unit 6 was set before material 8 enters coating chamber, is used to remove the spot on surface to be coated.Described washing unit 6 can be the ion cleaning system, also can be the corona washing unit, and described ion cleaning system or power supply washing unit are the prior aries of material preprocessing technical field, repeat no more its principle and working process here.
See shown in Figure 1ly, be provided with film covering device between described film coating roller 12 and the wrap-up, described film covering device comprises the overlay film running roller to 71 and protective membrane let off roll 72, and described overlay film running roller is to 71 positions that are arranged near film coating roller 12.In order to protect the good rete of plating, now a lot of plated film products are covered with protective membrane 81 in coated surface, and film covering device described in the utility model is to paste protective membrane 81 for the film surface at material 8.Protective membrane to be pasted 81 volumes are put in described protective membrane let off roll 72, during overlay film, from protective membrane let off roll 72 protective membrane 81 are pulled out, and enter the film surface that described overlay film running roller is covered on material 8 before to 71 described; To 71 extruding, protective membrane 81 is fitted with material 8 and is finished overlay film through the overlay film running roller.In order to make the protective membrane 81 that pastes reach best protection effect; described overlay film running roller is arranged at the position of closing on coating chamber to 71; after material 8 is finished plated film like this; send from coating chamber; can be pasted protective membrane 81 to 71 by described overlay film running roller; thereby avoid the rete of plating in wrapup procedure, to be polluted and scratch, improved product processing quality.
Wherein, coating technique of the present utility model can adopt ion beam sputtering, magnetron sputtering, electron beam evaporation deposition or other vacuum coating technology, also that is to say, described film coating apparatus 18 can be ion beam sputtering source, magnetron sputtering target, e-book vapor deposition source or other vacuum coater, this is the known technology in vacuum plating field, no longer describes in detail here.
Wherein, be arranged at intervals with the dividing plate 15 of separating coating chamber in the coating chamber described in the utility model, two dividing plates 15 to enclose the zone of covering be area of isolation 16, described area of isolation 16 both sides are coating film area 17, described film coating apparatus is arranged in the described coating film area 17, is provided with air pressure holding pump 11 in the described area of isolation 16.In the coating process, two kinds of working gass often need to annotate, mix and crossed contamination for fear of two kinds of different working gass, coating chamber of the present utility model is provided with area of isolation 16, and in described area of isolation 16, air pressure holding pump 11 is set, this air pressure holding pump 11 is used to keep the air pressure that area of isolation 16 interior air pressure are lower than coating film area 17, like this, the working gas that overflows from dividing plate 15 edges can enter described area of isolation 17, and being extracted out coating chamber through the bleeding point of described air pressure holding pump 11, this has guaranteed coating effects.
Certainly, also can in described area of isolation 16 film coating apparatus 18 also be set, like this, carry out single working gas when filling plated film, insulated chamber also can participate in plated film, and this helps improving working efficiency of the present utility model.
Should be noted that at last; above embodiment is only in order to the explanation the technical solution of the utility model; but not to the restriction of the utility model protection domain; although the utility model has been done to explain with reference to preferred embodiment; those of ordinary skill in the art is to be understood that; can make amendment or be equal to replacement the technical solution of the utility model, and not break away from the essence and the scope of technical solutions of the utility model.
Claims (10)
1. winding-type vacuum coater comprises the vacuum cavity that is provided with vacuum acquiring system, is provided with unwinding device, coating chamber and wrap-up in the described vacuum cavity, it is characterized in that:
Described coating chamber is provided with the film coating roller that is connected with the drive-motor output shaft, and the film coating apparatus of coating chamber is over against the periphery of described film coating roller,
Described unwinding device comprises a let off roll, described let off roll and one unreels the feeding running roller to being connected, the output shaft that described right one of them running roller and that unreels the feeding running roller unreels the feeding motor is connected, and described unreeling between feeding running roller pair and the described film coating roller is provided with the release of tension roller
Described wrap-up comprises the wind-up roll that is connected with a winding motor output shaft, it is right to be provided with rolling feeding running roller between described film coating roller and the wind-up roll, one of them right running roller of this rolling feeding running roller is connected with the output shaft of a rolling feeding motor, also is provided with the release of tension roller between this rolling feeding running roller pair and the described wind-up roll.
2. winding-type vacuum coater according to claim 1, it is characterized in that: described release of tension roller below is provided with optoelectronic switch, described optoelectronic switch and described drive-motor, unreels feeding motor, rolling feeding motor, winding motor and all is electrically connected.
3. winding-type vacuum coater according to claim 2 is characterized in that: the circumferential surface of described release of tension roller convexes with positioning baffle, and described release of tension roller both sides are respectively arranged with pressure roller.
4. winding-type vacuum coater according to claim 3 is characterized in that: described let off roll is provided with magnetic powder brake.
5. winding-type vacuum coater according to claim 4 is characterized in that: described winding motor is an either-rotation motor, and the output shaft of this winding motor is provided with powder clutch.
6. according to any described winding-type vacuum coater of claim 1～5; it is characterized in that: be provided with the branch film device between described unwinding device and the film coating roller; described minute film device comprise branch film running roller to the protective membrane wind-up roll; the film running roller was to being arranged at the position near film coating roller in described minute; divide the film running roller to being provided with magnetic powder brake; described protective membrane wind-up roll is connected with the output shaft of a protective membrane winding motor, and described protective membrane winding motor is provided with automatic speed governor.
7. winding-type vacuum coater according to claim 6 is characterized in that: the outer side near unwinding device of described coating chamber is provided with washing unit.
8. winding-type vacuum coater according to claim 7; it is characterized in that: be provided with film covering device between described film coating roller and the wrap-up; described film covering device comprise the overlay film running roller to the protective membrane let off roll, described overlay film running roller is to being arranged at the position near film coating roller.
9. winding-type vacuum coater according to claim 8, it is characterized in that: be arranged at intervals with the dividing plate of separating coating chamber in the described coating chamber, it is area of isolation that two dividing plates enclose the zone of covering, described area of isolation both sides are coating film area, described film coating apparatus is arranged in the described coating film area, is provided with the air pressure holding pump in the described area of isolation.
10. winding-type vacuum coater according to claim 9 is characterized in that: also be provided with film coating apparatus in the described area of isolation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201505246U CN201648515U (en) | 2010-03-30 | 2010-03-30 | Winding vacuum coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201505246U CN201648515U (en) | 2010-03-30 | 2010-03-30 | Winding vacuum coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201648515U true CN201648515U (en) | 2010-11-24 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201505246U Expired - Lifetime CN201648515U (en) | 2010-03-30 | 2010-03-30 | Winding vacuum coating device |
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| Country | Link |
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| CN (1) | CN201648515U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101798681A (en) * | 2010-03-30 | 2010-08-11 | 袁惠芬 | Winding-type vacuum coater |
| CN107177820A (en) * | 2017-06-12 | 2017-09-19 | 哈尔滨光宇电源股份有限公司 | High-speed and continuous type vacuum vapor deposition lithium equipment and the method that base material evaporation lithium is realized using it |
| EP3453533A4 (en) * | 2016-07-29 | 2019-07-24 | Jiangyin Ruixing Technology Co., Ltd | Vacuum dry plate cleaning and laminating machine |
| CN114525492A (en) * | 2022-02-28 | 2022-05-24 | 广东腾胜科技创新有限公司 | Vacuum winding coating equipment with film tearing and coating device and coating method |
-
2010
- 2010-03-30 CN CN2010201505246U patent/CN201648515U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101798681A (en) * | 2010-03-30 | 2010-08-11 | 袁惠芬 | Winding-type vacuum coater |
| CN101798681B (en) * | 2010-03-30 | 2011-10-26 | 袁惠芬 | Winding-type vacuum coater |
| EP3453533A4 (en) * | 2016-07-29 | 2019-07-24 | Jiangyin Ruixing Technology Co., Ltd | Vacuum dry plate cleaning and laminating machine |
| CN107177820A (en) * | 2017-06-12 | 2017-09-19 | 哈尔滨光宇电源股份有限公司 | High-speed and continuous type vacuum vapor deposition lithium equipment and the method that base material evaporation lithium is realized using it |
| CN107177820B (en) * | 2017-06-12 | 2019-05-24 | 哈尔滨光宇电源股份有限公司 | Method high speed continuous type vacuum vapor deposition lithium equipment and realize substrate vapor deposition lithium using it |
| CN114525492A (en) * | 2022-02-28 | 2022-05-24 | 广东腾胜科技创新有限公司 | Vacuum winding coating equipment with film tearing and coating device and coating method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20101124 Effective date of abandoning: 20111026 |