CN101798681B - Winding-type vacuum coater - Google Patents
Winding-type vacuum coater Download PDFInfo
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- CN101798681B CN101798681B CN2010101394708A CN201010139470A CN101798681B CN 101798681 B CN101798681 B CN 101798681B CN 2010101394708 A CN2010101394708 A CN 2010101394708A CN 201010139470 A CN201010139470 A CN 201010139470A CN 101798681 B CN101798681 B CN 101798681B
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Abstract
The invention relates to a winding-type vacuum coater which comprises a vacuum cavity, wherein the vacuum cavity is provided with an unwinding device, a coating chamber and a winding device; the coating chamber is provided with a coating roller connected with the output shaft of a drive motor; the unwinding device comprises an unwinding roller and an active feed rolling wheel pair; a tension release roller is arranged between the active feed rolling wheel pair and the coating roller and used for keeping the loose state of the material roll between the feed rolling wheel pair and the tension release roller; the winding device comprises an active winding roller; a feed rolling wheel pair is arranged between the coating roller and the winding roller; and a tension release roller is arranged between the feed rolling wheel pair and the winding roller. Since the material is kept loose between the feed rolling wheel pair and the tension release roller, the tension change of the unwinding roller and the winding roller due to the gradual change of the material roll diameter can not be transferred to the coating roller, thus, the surface tension of the coated material winding the coating roller is constant, so that the film is uniformly coated with favorable effect.
Description
Technical field:
The present invention relates to the vacuum coating film equipment technical field, particularly a kind of winding-type vacuum coater.
Background technology:
As plastic materials such as PET, PE, PI, be coated with the product of functional membrane on the banding substrates such as flexible high molecular material, carbonaceous material, of many uses at modern industry and high-tech sector.The plating functional membrane adopts the winding film plating mode more on banding substrate.
Processing the said products generally need adopt multiple technologies such as ion beam sputtering, magnetron sputtering, electron beam evaporation deposition under high vacuum environment.Vacuum coating film equipment can obtain one or more layers uniform settled layer at conductive base and non-conductive substrate, can be applied to EMI, flexible circuit board, industries such as optical coating.At present, the vacuum plating unit of widespread usage is big to being made up of vacuum chamber, vacuum acquiring system, reel system, plating system and automatic control system.Its schedule of operation is as follows: material loading, and---closing door for vacuum chamber---opened the pump housing of vacuum acquiring system, vacuumized---and fill working gas, open plating system---explained hereafter---and stop the pump housing, open door for vacuum chamber, take out product---next working cycle.
As the base material band of functional membrane film goods support, in coating process, need to guarantee to reach the even and undamaged requirement continuously of no oblique stretching, high-flatness and rete.Yet, existing winding-type vacuum coater, its wind2 is generally main drive, i.e. Zhu Dong let off roll device and wind-up roll device initiatively are in the working process, coil in the material-coil coil-diameter of let off roll and reduce gradually, coil in the material-coil coil-diameter of wind-up roll and increase gradually, if the rotational line constant airspeed of wind2, then the tension force of substrate surface will change and change with material-coil coil-diameter, this can cause rete inhomogeneous, influences coating effects.For avoiding causing the uneven defective of rete because of substrate tension changes, generally have at present and adopt powder clutch and set up photoelectricity or the tension force sensing shaft of radio detection etc. realizes adjusting to wind2 rotational line speed, thereby realization tension control, but this causes the device structure complexity, with high costs, and because the response time-delay of sensing circuit, response error etc., its tension control effect is still undesirable.
Summary of the invention:
The objective of the invention is to provides a kind of tension control effective at the deficiencies in the prior art, even film layer, the winding-type vacuum coater that coating effects is good.
Purpose of the present invention realizes by following technical measures:
Winding-type vacuum coater comprises the vacuum cavity that is provided with vacuum acquiring system, is provided with unwinding device, coating chamber and wrap-up in the described vacuum cavity; Described coating chamber is provided with the film coating roller that is connected with the drive-motor output shaft, and the film coating apparatus of coating chamber is over against the periphery of described film coating roller; Described unwinding device comprises a let off roll, described let off roll and one unreels the feeding running roller to being connected, the output shaft that described right one of them running roller and that unreels the feeding running roller unreels the feeding motor is connected, and described unreeling between feeding running roller pair and the described film coating roller is provided with the release of tension roller; Described wrap-up comprises the wind-up roll that is connected with a winding motor output shaft, it is right to be provided with rolling feeding running roller between described film coating roller and the wind-up roll, one of them right running roller of this rolling feeding running roller is connected with the output shaft of a rolling feeding motor, also is provided with the release of tension roller between this rolling feeding running roller pair and the described wind-up roll.
Further technical scheme of the present invention comprises:
Described release of tension roller below is provided with optoelectronic switch, described optoelectronic switch and described drive-motor, unreels feeding motor, rolling feeding motor, winding motor and all is electrically connected.
Wherein, the circumferential surface of described release of tension roller convexes with positioning baffle, and described release of tension roller both sides are respectively arranged with pressure roller.
Wherein, described let off roll is provided with magnetic powder brake.
Wherein, described winding motor is an either-rotation motor, and the output shaft of this winding motor is provided with powder clutch.
According to above-described; be provided with the branch film device between described unwinding device and the film coating roller; described minute film device comprise branch film running roller to the protective membrane wind-up roll; the film running roller was to being arranged at the position near film coating roller in described minute; divide the film running roller to being provided with magnetic powder brake; described protective membrane wind-up roll is connected with the output shaft of a protective membrane winding motor, and described protective membrane winding motor is provided with automatic speed governor.
Further, the outer side near unwinding device of described coating chamber is provided with washing unit.
Further, be provided with film covering device between described film coating roller and the wrap-up, described film covering device comprise the overlay film running roller to the protective membrane let off roll, described overlay film running roller is to being arranged at the position near film coating roller.
Wherein, be arranged at intervals with the dividing plate of separating coating chamber in the described coating chamber, it is area of isolation that two dividing plates enclose the zone of covering, and described area of isolation both sides are coating film area, described film coating apparatus is arranged in the described coating film area, is provided with the air pressure holding pump in the described area of isolation.
Also be provided with film coating apparatus in the described area of isolation.
Beneficial effect of the present invention is: the present invention includes the vacuum cavity that is provided with vacuum acquiring system, be provided with unwinding device, coating chamber and wrap-up in the described vacuum cavity; Described coating chamber is provided with the film coating roller that is connected with the drive-motor output shaft, and the film coating apparatus of coating chamber is over against the periphery of described film coating roller; Described unwinding device comprises a let off roll, described let off roll and one unreels the feeding running roller to being connected, the output shaft that described right one of them running roller and that unreels the feeding running roller unreels the feeding motor is connected, and described unreeling between feeding running roller pair and the described film coating roller is provided with the release of tension roller; Described wrap-up comprises the wind-up roll that is connected with a winding motor output shaft, it is right to be provided with rolling feeding running roller between described film coating roller and the wind-up roll, one of them right running roller of this rolling feeding running roller is connected with the output shaft of a rolling feeding motor, also is provided with the release of tension roller between this rolling feeding running roller pair and the described wind-up roll.Because material is between unwinding device and film coating roller, and all there is one section to keep relaxed state between wrap-up and the film coating roller, so the tension variation that let off roll and wind-up roll produce because of material-coil coil-diameter gradually changes can not be passed to film coating roller, so pile warp film coating roller and by the material of plated film, it has constant surface tension, thereby make the rete plating even, coating effects is good.
Description of drawings:
The invention will be further described to utilize accompanying drawing, but the embodiment in the accompanying drawing does not constitute any limitation of the invention.
Fig. 1 is the structural representation of a kind of winding-type vacuum coater of the present invention;
Fig. 2 is the release of tension roller of a kind of winding-type vacuum coater of the present invention and the structural representation of pressure roller.
Comprise among Fig. 1 and Fig. 2:
1---vacuum cavity 11---air pressure holding pump 12---film coating roller
13---let off roll 14---wind-up roll 15---dividing plates
16---area of isolation 17---coating film area 18---film coating apparatus
2------release of tension roller 31---pressure rollers that unreel the feeding running roller to 3
32---positioning baffle 4---optoelectronic switch 51---divides the film running roller right
52---the overlay film running roller is right for protective membrane wind-up roll 6---washing unit 71---
72---protective membrane let off roll 8---material 81---protective membranes
Rolling feeding running roller is right for 9---auxiliary transfer rollers 10---
Embodiment:
The present invention is further illustrated below in conjunction with accompanying drawing, sees illustrated in figures 1 and 2ly, and this is preferred embodiment of the present invention:
Winding-type vacuum coater comprises the vacuum cavity 1 that is provided with vacuum acquiring system, is provided with unwinding device, coating chamber and wrap-up in the described vacuum cavity 1; Described coating chamber is provided with the film coating roller 12 that is connected with the drive-motor output shaft, and the film coating apparatus 18 of coating chamber is over against the periphery of described film coating roller 12; Described unwinding device comprises a let off roll 13, described let off roll 13 and one unreels the feeding running roller and is connected 2, the described feeding running roller that unreels is connected the output shaft that one of them running roller and of 2 unreels the feeding motor, described unreel the feeding running roller to 2 and described film coating roller 12 between be provided with release of tension roller 3; Described wrap-up comprises the wind-up roll 14 that is connected with a winding motor output shaft, be provided with rolling feeding running roller between described film coating roller 12 and the wind-up roll 14 to 10, this rolling feeding running roller is connected with the output shaft of a rolling feeding motor one of them running roller of 10, this rolling feeding running roller to 10 and described wind-up roll 24 between also be provided with release of tension roller 3.Wherein, described release of tension roller 3 be make the material twist in unreel the feeding running roller to 2 or rolling feeding running roller to 10 with release of tension roller 3 between the maintenance relaxed state running roller.
When the present invention works, base material material 8 volumes to be coated are put in let off roll 13, pinch 2 through unreeling the feeding running roller, material 8 is drawn from let off roll 13, and this unreel the feeding running roller to 2 and release of tension roller 3 between keep relaxed state, the described release of tension roller 3 of material 8 pile warps and be around in the periphery of described film coating roller 12, under the rotation of described film coating roller 12 drives in coating chamber by film coating apparatus 18 plated films; The material 8 of finishing plated film described rolling feeding running roller to 10 pinching under, drawn coating chamber from film coating roller 12 surfaces, and this rolling feeding running roller to 10 and adjacent with it release of tension roller 3 between keep relaxed state, last under the rotation of described wind-up roll 14 and rolling in described wind-up roll 14.Because material 8 is between unwinding device and film coating roller 12, and all there is one section to keep relaxed state between wrap-up and the film coating roller 12, so the tension variation that let off roll 13 and wind-up roll 14 produce because of material-coil coil-diameter gradually changes can not be passed to film coating roller 12, so pile warp film coating roller 12 and by the material 8 of plated film, its surface tension is mainly by the pulling force decision of rolling feeding running roller to 10 clampings pulling material 8, under the situation of film coating roller 12 linear velocity constant, material 8 constant tensions during plated film, thereby make the rete plating even, coating effects is good.
As mentioned above, can be pulled smoothly under to 10 clamping at rolling feeding running roller in order to make material 8, described film coating roller 12 and described rolling feeding running roller are consistent to 10 linear velocity; When making work material 8 rolling feeding running roller to 10 and release of tension roller 3 between remain relaxed state, described rolling feeding running roller to 10 and the linear velocity of wind-up roll 14 be consistent.
See shown in Figure 1ly, described release of tension roller 3 belows are provided with optoelectronic switch 4, described optoelectronic switch 4 and described drive-motor, unreel feeding motor, rolling feeding motor, winding motor and all are electrically connected.Described optoelectronic switch 4 is to utilize detected material to the blocking or reflect of light beam, by the synchronization loop gating circuit, thus the transmitter that inspected object has or not; Optoelectronic switch 4 is converted to optical signal with received current and penetrates on projector, receptor is again according to the strong and weak of the light that receives or there is unmatchful target object to survey.Optoelectronic switch 4 of the present invention is arranged at release of tension roller 3 belows, when the bottom position of corresponding material 8 slack strand, normal feeding, because material 8 is lax sagging, optoelectronic switch 4 is blocked, and drive-motor, unreels the running of all switching on of feeding motor, rolling feeding motor and winding motor; When unusual feeding takes place when, the slack strand of material 8 is tightened up, and then optoelectronic switch 4 is connected owing to no material 8 blocks, thereby produces control signal, make described drive-motor, unreel the feeding motor, rolling feeding motor and winding motor stall, this has improved working reliability of the present invention.In like manner, all sent back the present invention idle running for fear of a Roll Sushi material 8, described unreel the feeding running roller right below a pair of optoelectronic switch 4 also is set.
See shown in Figure 2ly, the circumferential surface of release of tension roller 3 of the present invention convexes with positioning baffle 32, and described release of tension roller 3 both sides are respectively arranged with pressure roller 31.Each release of tension roller 3 is respectively arranged with described positioning baffle 32 near the position at two ends, distance between these two positioning baffles 32 is complementary with material 8 fabric widths to be transmitted, described positioning baffle 32 has avoided material 8 to be offset along described release of tension roller 3 axial disturbances, has avoided taking place tiltedly to stretch and influence coating effects in the process that transmits material 8.31 of described pressure rollers are used to increase the contact area of material 8 and release of tension roller 3, thus when prolonging the described release of tension of material 8 pile warps roller 3 by the length of described positioning baffle 32 constraints, thereby strengthen the locating effect of positioning baffle 32.
Wherein, the present invention can be according to the size of described vacuum cavity 1, and the material of material 8 and a plurality of auxiliary transfer rollers 9 rationally are set in the transfer path of material 8, so that material 8 keeps in transport process is smooth.Simultaneously, in order to produce material 8 skews in the process of further avoiding transmitting material 8, the circumferential surface of described auxiliary transfer roller 9 also can be convexly equipped with described positioning baffle 32.
Wherein, described let off roll 13 is provided with magnetic powder brake.Magnetic powder brake is that a kind of magnetic with high magnetic diffusivity is the work media, is the new type auto controlling elements of the superior performance of control device with the magnetizing current, and its principle of work is to produce magnetic field after connecting direct supply, the working medium magnetic forms the magnetic chain under the magnetic line of force effect, the purpose of brake torque is characterized in rapid reaction, the linear lag is good, control moment is constant, and running steadily, and is simple in structure, noiselessness, easy to maintenance, have fast braking, functions such as tension control.Described let off roll 13 is a driven roll, and described magnetic powder brake is for fear of unreeling the feeding running roller when shutting down feeding to 2, let off roll 13 because of inertia continue rotation cause material 8 let off roll 13 with unreel the feeding running roller and pile up between to 2 and tie a knot.The let off roll 13 that is provided with magnetic powder brake stop bit rapidly when shutting down.For the work effect of the magnetic powder brake that strengthens let off roll 13, the present invention also can install powder clutchs to 2 unreeling the feeding running roller, and this powder clutch and the interlock of described magnetic powder brake are to guarantee let off roll 13 and to unreel the feeding running roller to 2 run-in synchronisms.
Wherein, described winding motor is an either-rotation motor, and the output shaft of this winding motor is provided with powder clutch, also that is to say, described winding motor can be realized rotating.This be because, the plated film product is according to the rete characteristic, and service requirements, and two kinds of rolling modes of the outside rolling of inside rolling of rete and rete are arranged when rolling, winding motor that can two-way rotation has increased the scope of application of the present invention.
See shown in Figure 1; can be provided with the branch film device between described unwinding device and the film coating roller 12; described minute film device comprises that branch film running roller is to 51 and protective membrane wind-up roll 52; the film running roller was to 51 positions that are arranged near film coating roller 12 in described minute; divide the film running roller to be provided with magnetic powder brake to 51; described protective membrane wind-up roll 52 is connected with the output shaft of a protective membrane winding motor, and described protective membrane winding motor is provided with automatic speed governor.
In order to protect material 8 surfaces to be coated, keep its degree of cleaning, now a lot of substrate surfaces are covered with protective membrane 81, must remove this protective membrane 81 when plated film.To 51 o'clock, protective membrane 81 separated with material 8 base materials and is spurred rollings by described protective membrane wind-up roll 52 material 8 through described minute film running roller, and base material then is sent to film coating roller 12, and protective membrane 81 then is sent to described protective membrane wind-up roll 52 and rolling.Wherein, in order to make isolating protective membrane 81 entirely by rolling, described protective membrane wind-up roll 52 and branch film running roller also can be provided with auxiliary transfer roller 9 as required between 51.
Wherein, the outer side near unwinding device of described coating chamber is provided with washing unit 6.Material 8 may be infected with spots such as dust in transport process; perhaps at base material with after protective membrane 81 separates; base material remained on surface to be coated has dirt settling; these spots or residual dirt settling will influence coating effects; so described washing unit 6 was set before material 8 enters coating chamber, is used to remove the spot on surface to be coated.Described washing unit 6 can be the ion cleaning system, also can be the corona washing unit, and described ion cleaning system or power supply washing unit are the prior aries of material preprocessing technical field, repeat no more its principle and working process here.
See shown in Figure 1ly, be provided with film covering device between described film coating roller 12 and the wrap-up, described film covering device comprises the overlay film running roller to 71 and protective membrane let off roll 72, and described overlay film running roller is to 71 positions that are arranged near film coating roller 12.In order to protect the good rete of plating, now a lot of plated film products are covered with protective membrane 81 in coated surface, and film covering device of the present invention is to paste protective membrane 81 for the film surface at material 8.Protective membrane to be pasted 81 volumes are put in described protective membrane let off roll 72, during overlay film, from protective membrane let off roll 72 protective membrane 81 are pulled out, and enter the film surface that described overlay film running roller is covered on material 8 before to 71 described; To 71 extruding, protective membrane 81 is fitted with material 8 and is finished overlay film through the overlay film running roller.In order to make the protective membrane 81 that pastes reach best protection effect; described overlay film running roller is arranged at the position of closing on coating chamber to 71; after material 8 is finished plated film like this; send from coating chamber; can be pasted protective membrane 81 to 71 by described overlay film running roller; thereby avoid the rete of plating in wrapup procedure, to be polluted and scratch, improved product processing quality.
Wherein, coating technique of the present invention can adopt ion beam sputtering, magnetron sputtering, electron beam evaporation deposition or other vacuum coating technology, also that is to say, described film coating apparatus 18 can be ion beam sputtering source, magnetron sputtering target, e-book vapor deposition source or other vacuum coater, this is the known technology in vacuum plating field, no longer describes in detail here.
Wherein, be arranged at intervals with the dividing plate 15 of separating coating chamber in the coating chamber of the present invention, two dividing plates 15 to enclose the zone of covering be area of isolation 16, described area of isolation 16 both sides are coating film area 17, described film coating apparatus is arranged in the described coating film area 17, is provided with air pressure holding pump 11 in the described area of isolation 16.In the coating process, two kinds of working gass often need to annotate, mix and crossed contamination for fear of two kinds of different working gass, coating chamber of the present invention is provided with area of isolation 16, and in described area of isolation 16, air pressure holding pump 11 is set, this air pressure holding pump 11 is used to keep the air pressure that area of isolation 16 interior air pressure are lower than coating film area 17, like this, the working gas that overflows from dividing plate 15 edges can enter described area of isolation 17, and being extracted out coating chamber through the bleeding point of described air pressure holding pump 11, this has guaranteed coating effects.
Certainly, also can in described area of isolation 16 film coating apparatus 18 also be set, like this, carry out single working gas when filling plated film, insulated chamber also can participate in plated film, and this helps improving working efficiency of the present invention.
Should be noted that at last; above embodiment is only in order to illustrate technical scheme of the present invention; but not limiting the scope of the invention; although the present invention has been done to explain with reference to preferred embodiment; those of ordinary skill in the art is to be understood that; can make amendment or be equal to replacement technical scheme of the present invention, and not break away from the essence and the scope of technical solution of the present invention.
Claims (10)
1. winding-type vacuum coater comprises the vacuum cavity that is provided with vacuum acquiring system, is provided with unwinding device, coating chamber and wrap-up in the described vacuum cavity, it is characterized in that:
Described coating chamber is provided with the film coating roller that is connected with the drive-motor output shaft, and the film coating apparatus of coating chamber is over against the periphery of described film coating roller,
Described unwinding device comprises a let off roll, described let off roll and one unreels the feeding running roller to being connected, the output shaft that described right one of them running roller and that unreels the feeding running roller unreels the feeding motor is connected, and described unreeling between feeding running roller pair and the described film coating roller is provided with the release of tension roller
Described wrap-up comprises the wind-up roll that is connected with a winding motor output shaft, it is right to be provided with rolling feeding running roller between described film coating roller and the wind-up roll, one of them right running roller of this rolling feeding running roller is connected with the output shaft of a rolling feeding motor, also is provided with the release of tension roller between this rolling feeding running roller pair and the described wind-up roll.
2. winding-type vacuum coater according to claim 1, it is characterized in that: described release of tension roller below is provided with optoelectronic switch, described optoelectronic switch and described drive-motor, unreels feeding motor, rolling feeding motor, winding motor and all is electrically connected.
3. winding-type vacuum coater according to claim 2 is characterized in that: the circumferential surface of described release of tension roller convexes with positioning baffle, and described release of tension roller both sides are respectively arranged with pressure roller.
4. winding-type vacuum coater according to claim 3 is characterized in that: described let off roll is provided with magnetic powder brake.
5. winding-type vacuum coater according to claim 4 is characterized in that: described winding motor is an either-rotation motor, and the output shaft of this winding motor is provided with powder clutch.
6. according to any described winding-type vacuum coater of claim 1～5; it is characterized in that: be provided with the branch film device between described unwinding device and the film coating roller; described minute film device comprise branch film running roller to the protective membrane wind-up roll; the film running roller was to being arranged at the position near film coating roller in described minute; divide the film running roller to being provided with magnetic powder brake; described protective membrane wind-up roll is connected with the output shaft of a protective membrane winding motor, and described protective membrane winding motor is provided with automatic speed governor.
7. winding-type vacuum coater according to claim 6 is characterized in that: the outer side near unwinding device of described coating chamber is provided with washing unit.
8. winding-type vacuum coater according to claim 7; it is characterized in that: be provided with film covering device between described film coating roller and the wrap-up; described film covering device comprise the overlay film running roller to the protective membrane let off roll, described overlay film running roller is to being arranged at the position near film coating roller.
9. winding-type vacuum coater according to claim 8, it is characterized in that: be arranged at intervals with the dividing plate of separating coating chamber in the described coating chamber, it is area of isolation that two dividing plates enclose the zone of covering, described area of isolation both sides are coating film area, described film coating apparatus is arranged in the described coating film area, is provided with the air pressure holding pump in the described area of isolation.
10. winding-type vacuum coater according to claim 9 is characterized in that: also be provided with film coating apparatus in the described area of isolation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101394708A CN101798681B (en) | 2010-03-30 | 2010-03-30 | Winding-type vacuum coater |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101394708A CN101798681B (en) | 2010-03-30 | 2010-03-30 | Winding-type vacuum coater |
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| CN101798681A CN101798681A (en) | 2010-08-11 |
| CN101798681B true CN101798681B (en) | 2011-10-26 |
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| CN2010101394708A Expired - Fee Related CN101798681B (en) | 2010-03-30 | 2010-03-30 | Winding-type vacuum coater |
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| CN102286725B (en) * | 2011-06-30 | 2013-06-26 | 东莞市华科制造工程研究院有限公司 | Novel adjustable substrate delivery roll device |
| CN102994965B (en) * | 2011-09-13 | 2014-10-01 | 核工业西南物理研究院 | Magnetron sputtering reeling coater for large-area flexible substrate |
| CN103361623B (en) * | 2013-07-30 | 2016-07-06 | 林正亮 | A kind of winding vaporation-type vacuum coating equipment |
| KR101376160B1 (en) * | 2013-12-05 | 2014-03-21 | 엠에스티코리아(주) | Apparatus for processing film by roll??to??roll method |
| CN103741109B (en) * | 2013-12-31 | 2015-09-09 | 北京工业大学 | A kind of fiber magnetron sputtering continuous gold-plating belongs to the apparatus and method of conducting function film |
| CN105922710B (en) * | 2016-06-17 | 2018-05-25 | 江阴瑞兴科技有限公司 | A kind of metal sheet hot coating surface laminating adhesive unit |
| CN105904827B (en) * | 2016-06-17 | 2018-05-25 | 江阴瑞兴科技有限公司 | The hot-dip metal plated plate laminating adhesive production line of one-step method |
| CN106079843B (en) * | 2016-07-29 | 2018-11-13 | 江阴瑞兴科技有限公司 | A kind of vacuum dry clean plank coating machine |
| CN106335268B (en) * | 2016-10-20 | 2018-05-01 | 江阴瑞兴科技有限公司 | A kind of online laminating adhesive unit of high-velocity wire coating plate |
| JP6950506B2 (en) * | 2017-12-11 | 2021-10-13 | 住友金属鉱山株式会社 | Processing equipment and processing method for long substrates |
| CN111058000B (en) * | 2019-12-25 | 2022-06-24 | 复阳固态储能科技(溧阳)有限公司 | High-speed volume to volume vacuum lithium film apparatus for producing of tertiary evaporation |
| WO2021249216A1 (en) * | 2020-06-09 | 2021-12-16 | 江苏菲沃泰纳米科技股份有限公司 | Coating support, coating apparatus, and coating method therefor |
| CN112093544B (en) * | 2020-08-15 | 2022-05-03 | 洛阳生波尔真空装备有限公司 | Tension control method based on winding coating machine process under high vacuum environment |
| CN112853303A (en) * | 2020-12-31 | 2021-05-28 | 广东欣丰科技有限公司 | Vacuum winding coating device and processing method thereof |
| CN114635119A (en) * | 2022-02-28 | 2022-06-17 | 广东腾胜科技创新有限公司 | Vacuum winding coating equipment with film coating and tearing device and coating method thereof |
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| CN101413109A (en) * | 2008-11-18 | 2009-04-22 | 昆明理工大学 | Vacuum multifunctional continuous film coating apparatus |
| CN201648515U (en) * | 2010-03-30 | 2010-11-24 | 袁惠芬 | Winding vacuum coating device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4803742B2 (en) * | 2007-02-07 | 2011-10-26 | 株式会社アルバック | Winding type vacuum deposition system |
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|---|---|---|---|---|
| CN101413109A (en) * | 2008-11-18 | 2009-04-22 | 昆明理工大学 | Vacuum multifunctional continuous film coating apparatus |
| CN201648515U (en) * | 2010-03-30 | 2010-11-24 | 袁惠芬 | Winding vacuum coating device |
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| CN101798681A (en) | 2010-08-11 |
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