JP5043446B2 - Sheet sticking device and sticking method - Google Patents

Description

  The present invention relates to a sheet sticking apparatus and a sticking method used as an apparatus or method for sticking a protective sheet on the surface of a semiconductor wafer or sticking a label on the surface of various products.

  When an adhesive sheet temporarily attached to a belt-like release sheet at a predetermined interval is affixed to an adherend, the adhesive sheet needs to be peeled off from the release sheet. It is disclosed.

  In the same document 1, when the adhesive sheet (label 12A) temporarily attached at a predetermined interval on the strip-shaped release sheet (band-shaped mount 12B) is peeled off, the release sheet is peeled off from the tip of the peeling means (release plate 28). The adhesive sheet is peeled off by suddenly turning back and the peeled adhesive sheet is detected by a sensor (peeling confirmation sensor 34) provided immediately downstream of the peeling means. In addition, the member name and code | symbol in parenthesis are the member name and code | symbol used by patent document 1 (same also in the following paragraph).

JP 2002-326616 A

  However, in the detection method using the conventional sensor (peeling confirmation sensor 34), the sensor disposed immediately downstream of the peeling means (peeling plate 28) as shown in FIG. The pressing means 50 such as a roller for applying a pressing force to the sheet cannot be disposed immediately downstream of the peeling means (peeling plate 28).

  Further, in order to avoid the positional interference between the pressing means and the sensor as described above, the sensor 51 is arranged below the pressing means 50 as in the sheet sticking apparatus of FIG. It is also possible to adopt a configuration in which the sensor 51 detects the adhesive sheet 53 that has been fed out. However, in such a case, if the pressing means 50 becomes dirty over time as shown in FIG. 4B, the sensor 51 may malfunction. In other words, the sensor 51 detects the dirt on the pressing means 50 and determines that the label feeding has been performed normally even though the label has not been fed, and reliably detects the peeling failure of the adhesive sheet 53. There are cases where it is not possible. When the adhesive sheet 53 is pasted by passing the adherend 55 through the lower side of the pressing means 50 as in the sheet pasting apparatus in FIG. 4, the sensor 51 disposed below the pressing means 50 is attached. This obstructs the movement of the body 55. Furthermore, in order to avoid the obstruction, a drive mechanism or the like for retracting the sensor 51 from the movement path of the support means 54 is required, and the device configuration becomes complicated.

  The present invention has been made to solve the above-mentioned problems, and the object of the present invention is to operate the pressing means for pressing the adhesive sheet against the adherend and the support means for supporting and transporting the adherend. An object of the present invention is to provide a sheet sticking apparatus and a sheet sticking method capable of reliably detecting a peeling failure of an adhesive sheet with a simple device configuration without hindering.

In order to achieve the above object, the sheet sticking apparatus of the present invention includes a feeding means for feeding out an adhesive sheet temporarily attached to a strip-shaped release sheet at a predetermined interval, and folding the release sheet to release the adhesive sheet. A peeling means; a detecting means for detecting the adhesive sheet; a pressing means for pressing the adhesive sheet against the adherend; and a support means for supporting and transporting the adherend. The detection means is provided, the detection means is disposed at a position facing the release sheet surface folded by the release means, and detects an adhesive sheet that has not been peeled off by the release means as a peeling failure. .

  In the sheet sticking device of the present invention, the feeding unit may be configured to perform re-feeding by rewinding the peeling sheet by a predetermined amount when a defective peeling of the adhesive sheet is detected by the detecting unit.

  The sheet sticking device of the present invention may further include tension adjusting means for the release sheet, and the tension adjusting means may be configured to increase the tension of the release sheet during the re-feeding.

In the sheet sticking method of the present invention, the adhesive sheet temporarily attached at a predetermined interval on the strip-like release sheet is fed out, and the adherend is supported by the supporting means provided with the detecting means of the adhesive sheet, and conveyed, the release sheet is peeled off the adhesive sheet is folded with a release means, a sheet sticking method for sticking pressing the peeled adhesive sheet to the adherend, the a position facing the release sheet surface which is folded back by the peeling means A detecting means is arranged, and the detecting means detects an adhesive sheet that has not been peeled off by the peeling means as a peeling failure.

  According to the present invention, since the detection means for detecting the adhesive sheet is arranged so as to face the release sheet surface folded back by the release means, the detection means uses the adhesive sheet with the clean release sheet surface as the back. Since it detects, the malfunction of a sensor is lost and the peeling defect of an adhesive sheet can be detected reliably. In addition, when the detection means is provided in the inside of the peeling means for peeling the adhesive sheet or in the support means for supporting and transporting the adherend, the sensor presses and supports the adhesive sheet against the adherend It does not interfere with the operation of the means. Therefore, a drive mechanism for retracting the sensor from the moving path of the support means is unnecessary, and the device configuration can be simplified.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is an explanatory diagram of a sheet sticking apparatus to which the present invention is applied and its control system, and FIG. 2 is an explanatory diagram of an embodiment of the present invention in which a sensor is provided on a peel plate.

  As shown in FIG. 1, in the sheet sticking apparatus 1, an original fabric R having a configuration in which a plurality of adhesive sheets S are temporarily attached on a strip-like release sheet RL at a predetermined interval is supported by a support shaft 2. This raw fabric R is sandwiched between a tension adjusting roller 3 as a tension adjusting means by a pinch roller 4, folded back by a peel plate 5 as a peeling means, and then sandwiched by a feeding roller 6 as a feeding means by a pinch roller 7. It is wound around the take-up shaft 8 so as to be taken up. Further, the tension adjusting roller 3 and the feeding roller 6 are applied with rotational force by motors M1 and M2 capable of controlling the torque of the output shaft, respectively. It is extended intermittently in the direction of the winding shaft 8.

  The peel plate 5 is configured to peel the adhesive sheet S from the release sheet RL by abruptly folding the release sheet RL at its front end 5A, and only the release sheet RL after the adhesive sheet S is peeled off. Passes between the feeding roller 6 and the pinch roller 7 and is wound around the winding shaft 8 to which a rotational force is applied by the motor M3. On the other hand, the adhesive sheet S peeled from the release sheet RL is fed out below a pressing roller 9 as pressing means disposed in front of the peel plate 5.

  A semiconductor wafer as an adherend (hereinafter abbreviated as “wafer W”) is adsorbed and supported on the upper surface of a support table 10 as support means. The support table 10 is slidably installed on a rail 12 via a slider 11 attached to the lower surface of the support table 10, and a screw shaft 13 that is rotationally driven by a motor M 4 and a nut member 14 that engages with the screw shaft 13. It is possible to move in the left-right direction in FIG. With such a configuration, the adhesive sheet S is fed out in synchronization with the moving speed of the support table 10 moving in the left direction in FIG. 1, and the pressing roller 9 presses the adhesive sheet S, and the upper surface of the wafer W The adhesive sheet S is affixed.

  As shown in FIG. 2, a sensor 15 as a detection unit is provided inside the peel plate 5, and the sensor 15 faces the peel sheet RL surface folded by the peel plate 5. 5 Adhesive sheet S received in installation hole 16 drilled in the lower surface and not peeled off by peel plate 5, that is, adhesive sheet S passing through peel plate front end 5A is monitored, and such adhesive sheet S is peeled off. It is configured to detect a failure and output a detection signal to the control means 17. The sensor 15 can also be provided on the left side of the wafer W of the support table 10 as shown in FIG. 1, and in this case as well, the sensor 15 supports the release sheet RL that is folded back by the peel plate 5. It is installed in the upper surface of the table 10 and similarly detects a peeling failure of the adhesive sheet S.

  The control unit 17 controls the tension adjusting roller 3, the feeding roller 6, and the take-up shaft 8 based on the detection signal of the peeling failure from the sensor 15. For example, when the separation failure of the adhesive sheet S is detected by the sensor 15, the motors M 1, M 2, and M 3 are rotated in the reverse direction (rotation in the direction opposite to the feeding direction of the original fabric R), and the rollers 3 and 6 and the windings are rotated. The take-up shaft 8 is set to rewind the release sheet RL by a predetermined amount and perform re-feeding.

  The control means 17 also has a function of setting to increase the tension of the release sheet RL at the time of re-feeding, or to increase the tension of the release sheet RL after the re-feeding. In this sheet sticking apparatus 1, when the release sheet RL is fed by the tension adjusting roller 3 and the feeding roller 6, the torque balance applied to the output shafts of the motors M1 and M2 is controlled by the control means 17, and the tension adjusting roller 3 and the feeding roller are controlled. 6 to control the tension applied to the release sheet RL interposed therebetween. Thereby, the tension | tensile_strength of peeling sheet RL can be strengthened and it becomes easy to peel again the adhesive sheet S which could not be peeled.

  Furthermore, the control means 17 counts the number of re-feeds by a counter (not shown), and if the peeling failure of the adhesive sheet S is detected by the sensor 15 even if the re-feeding is performed a predetermined number of times, it is determined that the peeling failure occurs. The motors M1, M2, and M3 are controlled so that the pasting operation for the adhesive sheet S is not performed and the through operation for feeding the next adhesive sheet S is performed. Further, the control means 17 counts the through operation by another count (not shown), and when the through operation is continuously performed a predetermined number of times, outputs an abnormal signal, sounds an alarm, blinks the abnormal lamp, etc. Announce the occurrence of an abnormal situation.

  Next, the operation of the sheet sticking device configured as described above will be described.

  First, a transfer device (not shown) places the wafer W on the upper surface of the support table 10 as shown in FIG. 1, and a suction unit (not shown) sucks and holds the wafer W. When the support table 10 advances to the left in FIG. 1 at a predetermined speed and a sensor (not shown) detects that the tip of the wafer W has moved to a predetermined position, the control means 17 detects each motor M1, M2, M3. , Command rotation. Then, the tension adjusting roller 3, the feeding roller 6, and the take-up shaft 8 are rotated in synchronization with the moving speed of the support table 10, whereby the adhesive sheet S is peeled off from the release sheet RL by the peel plate 5 and peeled off. An adhesive sheet S is attached to the wafer W.

  Here, when the sensor 15 of the peel plate 5 or the sensor 15 of the support table 10 detects the peeling failure of the adhesive sheet S as shown in FIG. 2, each motor M1, M2, M3 is reversed based on a command from the control means 17. The release sheet RL is rewound by a predetermined amount until the leading end portion of the adhesive sheet S that has rotated and has failed to peel exceeds the peel plate front end portion 5A. Then, the torque balance applied to the output shafts of the motors M1 and M2 is controlled by the control means 17, and the tension applied to the release sheet RL interposed between the tension adjusting roller 3 and the feeding roller 6 is increased to perform re-feeding. As a result, when the peeling failure is resolved and the adhesive sheet S is normally fed out as shown in FIG. 1, the pasting operation is performed. However, if the peeling failure is not resolved and the peeling failure is detected again by the sensor 15, the re-feeding is repeated a predetermined number of times. If the peeling failure is still detected, the adhesive sheet S that has a peeling failure is detected. The pasting operation is not performed, and the next adhesive sheet S is fed out to perform the pasting operation.

  The tension of the release sheet S after the re-feeding may be returned to the original tension before the strengthening. However, if the peeling failure occurs even once, the peeling failure may occur next time, so the re-feeding is performed. After that, it is desirable to feed out the adhesive sheet S in a state where the tension of the release sheet RL is increased.

  As described above, according to the sheet sticking device 1 of the present embodiment, since the sensor 15 that detects the adhesive sheet S is arranged so as to face the release sheet RL surface folded back by the peel plate 5, Since the sensor 15 detects the adhesive sheet S with the surface of the release sheet RL having no dirt back, the malfunction of the sensor 15 is eliminated, and the peeling failure of the adhesive sheet S can be reliably detected. Further, since the sensor 15 is provided inside the peel plate 5 or on the support table 10, the sensor 15 does not hinder the operation of the pressing roller 9 and the support table 10. Therefore, a drive mechanism for retracting the sensor 15 from the movement path of the support table 10 is not necessary, and the device configuration can be simplified.

  In the sheet sticking apparatus 1 according to the embodiment, even when the feeding roller 6 performs the re-feeding a predetermined number of times, the sticking operation for the adhesive sheet S is detected when the sensor 15 detects the peeling failure of the adhesive sheet S. However, if the sensor 15 detects a peeling failure of the adhesive sheet S and the sensor 15 detects a peeling failure of the adhesive sheet S, the adhesive sheet S is used. It is also possible to adopt a configuration in which the pasting operation is not performed, and the through operation for immediately feeding the next adhesive sheet is performed.

  As mentioned above, although embodiment of this invention was disclosed, this invention is not limited to this. For example, the wafer W is targeted as an adherend, but instead of this, a glass plate, a steel plate, a resin plate or other plate-like members, and other various products can also be targeted. Or a compound wafer. Further, the adherend is not limited to a circular one, but may be a polygonal shape. The adhesive sheet also includes a label having a pressure-sensitive adhesive on the back surface, and the present invention may be applied as an apparatus or method for attaching the label to various products.

  Further, the sensor 15 described in the present embodiment as the detection means is not limited as long as it can detect a non-contact type such as a photoelectric sensor, a contact type such as a limit switch, or other adhesive sheets. Absent.

  Further, the pressing means may be a blade material or a fluid pressure instead of the pressing roller 9 and is not limited as long as it can apply a pressing force to the adhesive sheet.

  Further, the tension adjusting means does not prevent the tension from being adjusted using an air cylinder, a suction device, or the like other than the motor capable of controlling the torque of the output shaft.

Explanatory drawing of the sheet sticking apparatus to which this invention is applied, and its control system. Explanatory drawing of embodiment of this invention which provided the sensor in the peel plate. Explanatory drawing of the conventional system which provided the sensor in the immediate downstream of the peeling means. (A) is explanatory drawing of the malfunction at the time of providing a sensor under a press means, (b) is A arrow directional view in (a).

Explanation of symbols

1 Sheet sticking device 3 Tension adjusting roller (Tension adjusting means)
5 Peel plate (peeling means)
5A Peel plate front end 6 Feeding roller (feeding means)
10 Support table (support means)
15 Sensor (detection means)
17 Control means RL Release sheet S Adhesive sheet W Wafer (Substrate)

Claims (4)

A feeding means for feeding out the adhesive sheet temporarily attached to the strip-shaped release sheet at a predetermined interval;
Peeling means for folding the release sheet and peeling the adhesive sheet;
Detecting means for detecting the adhesive sheet;
A pressing means for pressing the adhesive sheet against the adherend ;
Supporting means for supporting and transporting the adherend,
The support means is provided with the detection means;
The detection unit is arranged at a position facing the release sheet surface folded back by the release unit, and detects an adhesive sheet that has not been released by the release unit as a release failure. 2. The sheet sticking apparatus according to claim 1 , wherein the feeding unit rewinds the peeling sheet by rewinding a predetermined amount when the peeling failure of the adhesive sheet is detected by the detecting unit. The sheet sticking device further includes tension adjusting means for the release sheet,
The sheet sticking apparatus according to claim 2 , wherein the tension adjusting unit increases the tension of the release sheet during the re-feeding. The adhesive sheet temporarily attached to the strip-shaped release sheet is fed out at a predetermined interval, and the adherend is supported and conveyed by the support means provided with the detection means of the adhesive sheet, and the release sheet is folded by the release means. the adhesive sheet was peeled off, a sheet sticking method for sticking pressing the peeled adhesive sheet to the adherend,
Sheet sticking method characterized in that the said detection means at a position facing the release sheet surface which is folded back by the peeling means arranged, an adhesive sheet was not peeled off in the peeling means the detection means detects a defective peeling.

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