WO2023109011A1 - Coating system and coating production line - Google Patents
Coating system and coating production line Download PDFInfo
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- WO2023109011A1 WO2023109011A1 PCT/CN2022/094494 CN2022094494W WO2023109011A1 WO 2023109011 A1 WO2023109011 A1 WO 2023109011A1 CN 2022094494 W CN2022094494 W CN 2022094494W WO 2023109011 A1 WO2023109011 A1 WO 2023109011A1
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- Prior art keywords
- film
- coating
- unwinding device
- drying
- module
- Prior art date
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- 238000000576 coating method Methods 0.000 title claims abstract description 100
- 239000011248 coating agent Substances 0.000 title claims abstract description 99
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 238000001035 drying Methods 0.000 claims abstract description 47
- 239000010409 thin film Substances 0.000 claims abstract description 26
- 238000005507 spraying Methods 0.000 claims abstract description 22
- 238000004804 winding Methods 0.000 claims abstract description 21
- 239000007788 liquid Substances 0.000 claims abstract description 10
- 238000004140 cleaning Methods 0.000 claims abstract description 8
- 239000010408 film Substances 0.000 claims description 178
- 238000003825 pressing Methods 0.000 claims description 18
- 238000012545 processing Methods 0.000 claims description 15
- 230000007246 mechanism Effects 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 10
- 230000008569 process Effects 0.000 claims description 9
- 238000009501 film coating Methods 0.000 claims description 8
- 239000007888 film coating Substances 0.000 claims description 6
- 239000002699 waste material Substances 0.000 claims description 6
- 239000010865 sewage Substances 0.000 claims description 4
- 238000004064 recycling Methods 0.000 claims description 3
- 239000011247 coating layer Substances 0.000 abstract description 25
- 238000009713 electroplating Methods 0.000 description 12
- 239000004033 plastic Substances 0.000 description 8
- 229920003023 plastic Polymers 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 239000007921 spray Substances 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
Definitions
- the invention relates to the technical field of material processing, in particular to a coating system and a coating production line.
- the thin film When coating the thin film, it is pre-treated by magnetron, evaporation and other types of processing techniques.
- the thickness of the metal film surface of the film processed by magnetron and evaporation processes is insufficient or uneven, and the film surface resistance of the film is about 2000 milliohms.
- the film surface resistance of the film is too high.
- the thickness of the coating layer is increased so that the surface resistance of the film is lower than 500 milliohms.
- the existing solution uses electroplating.
- the thickness of the coating layer of the film still cannot reach the required thickness range.
- problems such as burning holes, perforation or film breakage will occur in the film, which affects the pass rate of film processing.
- a kind of coating system, described coating system comprises:
- Unwinding device capable of receiving and conveying film
- a coating pool is used to accommodate the coating solution for the coating treatment of the film conveyed by the unwinding device
- a spraying device capable of cleaning the film coated by the coating pool
- a drying device used for drying the film after cleaning the spraying device
- the winding device is capable of conveying and storing the film processed by the drying device.
- the film when the film needs to be coated, the film is moved out from the unwinding device and stored in the unwinding device. It can be understood that the film is pre-stretched by the unwinding device and the winding device.
- the coating solution in the coating tank can evenly adhere to the film, thereby increasing the thickness of the coating layer of the film.
- the speed at which the unwinding device conveys the film the thickness of the coating layer on the film can be increased differently.
- the speed at which the film moves is lower.
- This solution can better avoid problems such as burning holes, perforation or film breakage in the thin film that exists when the thickness of the coating layer is increased by increasing the current in electroplating.
- the unwinding device includes a winding reel, and the reel can rotate around its own axis, so that the film is wound on the reel.
- the unwinding device further includes multiple sets of rollers arranged at intervals, and the rollers are used for conveying the film.
- the unwinding device further includes a pressing mechanism, the pressing mechanism is rotatably arranged on the unwinding device, the pressing mechanism includes a touch head, and the touch pressure A head is used to press against the film on the reel.
- the unwinding device is provided with a mobile module and a distance measuring module capable of communicating with each other, the distance measuring module is used to measure the thickness of the film on the reel, and the mobile module uses and driving the unwinding device to move on a horizontal plane in a direction perpendicular to the conveying direction of the film.
- the side of the coating pool close to the unwinding device is provided with a detection channel through which the film can pass, the detection channel communicates with the coating pool, and the detection channel is provided with multiple An image processing module is used to detect the surface quality of the film, and the image processing module can communicate with the unwinding device.
- the spraying device is connected with a sewage treatment pipeline for recycling waste liquid used by the spraying device.
- the drying device includes a drying module and an air duct module, and the air duct module is used to evenly blow the heat of the drying module to the film.
- the drying device further includes a first sensor, the first sensor is used to detect the temperature generated by the drying module, and the first sensor is electrically connected to the drying module.
- a coating production line including the coating system.
- Fig. 1 is the module schematic diagram of the coating system in an embodiment of the present invention
- Fig. 2 is a schematic structural view of a coating system in an embodiment of the present invention.
- Fig. 3 is a schematic structural view of an unwinding device in an embodiment of the present invention.
- Fig. 4 is a schematic structural diagram of a drying device in an embodiment of the present invention.
- Coating tank 210. Detection channel; 211. Image processing module;
- drying device 400, drying device; 410, drying module; 420, air duct module; 430, first sensor;
- first and second are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features.
- the features defined as “first” and “second” may explicitly or implicitly include at least one of these features.
- “plurality” means at least two, such as two, three, etc., unless otherwise specifically defined.
- the first feature may be in direct contact with the first feature or the first and second feature may be in direct contact with the second feature through an intermediary. touch.
- “above”, “above” and “above” the first feature on the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature.
- “Below”, “beneath” and “beneath” the first feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is less horizontally than the second feature.
- the thin film When coating the thin film, it is pre-treated by magnetron, evaporation and other types of processing techniques.
- the thickness of the metal film surface of the film processed by magnetron and evaporation processes is insufficient or uneven, and the film surface resistance of the film is about 2000 milliohms.
- the film surface resistance of the film is too high.
- the thickness of the coating layer is increased so that the surface resistance of the film is lower than 500 milliohms.
- the existing solution uses electroplating. During the electroplating process, if the electric current is set to the current limited during the electroplating process, the thickness of the coating layer of the film still cannot reach the required thickness range. However, when the thickness of the coating layer of the film is increased by increasing the current during electroplating, problems such as burning holes, perforation or film breakage will occur in the film, which affects the pass rate of film processing.
- the researchers plan to use chemical coating to increase the thickness of the film.
- the film needs to be flattened in advance, and the film passes through the coating tank at a constant speed.
- the moving rate of the film By controlling the moving rate of the film, the thickness of the coating layer attached to the film by the coating solution in the coating tank is different, and the faster the moving rate of the film is. Faster, the lower the thickness of the coating layer.
- the researchers proposed a coating system, and then proposed a coating production line including the coating system.
- the coating system proposed by the researchers is capable of coating multiple metal layers on thin films.
- the present invention will be exemplified by thin film copper plating in the following text.
- the film mentioned in the present invention refers to a thickness of 3.2um-8um, of course, the thickness of the film is not limited thereto.
- Fig. 1 shows the module schematic diagram of the film coating system in one embodiment of the present invention
- Fig. 2 is the structural representation of the film coating system in one embodiment of the present invention, the film coating provided by one embodiment of the present invention
- the system includes: an unwinding device 100 , a coating tank 200 , a spraying device 300 , a drying device 400 and a winding device 500 .
- the films that have not been coated by the coating pool 200 are stored in the unwinding device 100
- the films that have been coated are stored in the winding device 500 .
- the film is pre-coated, the film is pre-stretched by the unwinding device 100 and the winding device 500 .
- the film moves from the unwinding device 100 to the winding device 500 at a constant speed.
- the coating tank 200 is used for coating the film entering the winding device 500 from the unwinding device 100;
- the spraying device 300 is used for cleaning the film to remove residual coating liquid on the film;
- the drying device 400 is used for cleaning
- the final film is dried so that the winding device 500 can accommodate the coated film.
- the unwinding device 100 can accommodate and convey the film at a constant speed; the coating pool 200 is arranged on the output side of the unwinding device 100, and is used to store the coating solution for the film coating process delivered by the unwinding device 100, wherein the coating solution can be It is an electroless copper plating solution and an additive; the spray device 300 can clean the film after being coated by the coating pool 200; the drying device 400 is used to dry the film after the spray device 300 is cleaned; the winding device 500 is arranged in the drying The output side of the drying device can convey and store the film processed by the drying device 400 at a uniform speed.
- the working principle of the coating system in this embodiment is: the unwinding device 100 and the winding device 500 flatten the film in advance, so that when the film passes through the coating pool 200, the coating solution can evenly adhere to the film.
- the film is removed from the unwinding device 100 and stored in the unwinding device 100 .
- the coating solution in the coating tank 200 can evenly adhere to the film, thereby increasing the thickness of the coating layer of the film.
- the speed at which the film is conveyed by the unwinding device 100 the thickness of the coating layer on the film can be increased differently. The thicker the film layer is, the lower the speed at which the film moves.
- the solution in this example does not have problems such as hole burning, perforation or film breakage.
- the existing film has problems such as burning holes, perforation or film breakage.
- the unwinding device 100 includes a coil 110 , wherein the coil 110 can rotate around its own axis, so that the film is wound on the coil 110 .
- the reel 110 is arranged on the inflatable shaft and can rotate around the inflatable shaft.
- the inflatable shaft rotates at a constant speed through a driving element, such as a motor, and the through hole controls the rotating speed of the driving element so that the film on the coil 110 can move at a constant speed.
- the unwinding device 100 drives the film, since there is still a distance between the unwinding device 100 and the coating tank 200, the gravity of the film itself will cause the film to bend downward, which may affect the flatness of the film surface.
- the unwinding device 100 also includes multiple sets of rollers 120 arranged at intervals, as shown in FIG. 2 , and the rollers 120 are used for conveying the film. That is to say, the multiple sets of rollers 120 can support and convey the film, thereby better preventing the film from bending downwards.
- Each set of rollers 120 can include upper rollers and lower rollers that are arranged oppositely, there is a conveying channel between the upper rollers and the lower rollers, and the film is conveyed from the conveying channel; or each group of rollers 120 can also be a single roller wheel composition.
- the unwinding device 100 also includes a pressing mechanism 130, wherein the pressing mechanism 130 is rotatably arranged on the unwinding device 100, and the pressing mechanism 130 includes a contact pressing head 131, which touches the pressing head 131 is used for pressing the film on the reel 110 .
- the pressing mechanism 130 can be arranged on the unwinding device 100 through a rotating shaft connection, and can also be driven by a driving element, such as a motor, to rotate the pressing mechanism around the unwinding device 100; the touch head 131 includes a pressure sensor , enabling the embodiment to detect and adjust the pressure applied to the membrane.
- the unwinding device 100 is provided with a mobile module 140 and a distance measuring module 150 capable of communicating with each other, wherein the distance measuring module 150 is used to measure the thickness of the film on the reel 110,
- the moving module is used to drive the unwinding device 100 to move on the horizontal plane in a direction perpendicular to the film conveying direction.
- the thickness of the film detected by the ranging module 150 changes uniformly, but when the film deviates, the thickness of the film measured by the ranging module 150 will change.
- the thickness of each layer of film is X
- the number of layers of film on the reel 110 of the unwinding device 100 is 10 at present
- the thickness that the ranging module 150 can detect is 10X.
- the ranging module 150 may include a plurality of laser ranging sensors, and the laser ranging sensors may be distributed and arranged on the edge of the reel 110 of the unwinding device 100 .
- the transfer module may include a servo motor, and the unwinding device 100 may be driven to move through the connection between the servo motor and the lead screw.
- the transfer module can also be a linear motor or other similar driving elements for translational movement.
- the structure of the unwinding device 100 is similar to that of the unwinding system, and may include a coil 110 and a roller 120 in the unwinding system. The difference is that the coil 110 in the unwinding device 100 uses The coated film is wound, and the reel 110 in the unwinding system is used to remove the pre-coated film.
- a pressing mechanism 130, a moving module 140 and a distance measuring module 150 may also be provided in the unwinding device 100, and its working principle is similar to that of the device in the unwinding system.
- the film When the film is stored in the unwinding device 100, since the film is wound sequentially, it is difficult to judge the surface quality of the film itself. If there is a problem with the surface quality of the film itself, the film needs to be removed in time to reduce the loss of film production.
- the surface quality of the film includes film breakage, perforation or flatness. For this reason, researchers think of performing surface quality inspection on the thin film before the thin film is sent to the coating tank 200 .
- the side of the coating pool 200 close to the unwinding device 100 is provided with a detection channel 210 for the film to pass through, wherein the detection channel 210 communicates with the coating pool 200, and the detection channel 210 is provided with multiple groups of images.
- the processing module 211 is used to detect the surface quality of the film, and the image processing module 211 can communicate with the unwinding device 100 .
- the image processing module 211 can recognize the surface quality of the film in real time. If the image processing module 211 recognizes that the surface quality of the film is abnormal, it can control the unwinding device 100 to stop working and the film to stop conveying.
- the image processing module 211 When the image processing module 211 is arranged, it can be arranged on the upper surface of the film and the lower surface of the film, so that the surface quality of the two surfaces of the film can be identified and processed.
- the coating solution may still remain on the surface of the thin film, which needs to be cleaned by the spraying device 300 .
- the coating liquid contains metal materials, if the waste liquid after spraying is discharged directly, on the one hand, it may pollute the water source; on the other hand, it may also cause a large waste of materials. For this reason, researchers think of recycling the waste liquid after cleaning the spraying device 300 .
- the shower device 300 is connected with a sewage treatment pipeline 310 for recovering waste liquid used by the shower device 300 .
- the spraying device 300 rinses the film, pure water can be used; the spraying device 300 can include a plurality of spraying holes, so as to remove residual coating solution on the film as much as possible.
- the drying device 400 includes a drying module 410 and an air channel module 420 , wherein the air channel module 420 is used to evenly blow the heat of the drying module 410 to the film.
- the drying device 400 further includes a first sensor 430 , wherein the first sensor 430 is used to detect the temperature generated by the drying module 410 , and the first sensor 430 is electrically connected to the drying module 410 .
- the first sensor 430 may be a temperature sensor, and when the first sensor 430 detects an abnormal temperature, it may control the drying module 410 to reduce the drying temperature.
- a coating production line is also proposed, wherein the coating production line includes the above-mentioned coating system.
- the unwinding speed of the unwinding system in the coating system is 3-5m/min
- the shaft diameter of the reel 110 is 80-100mm
- the pressure setting of the touch head 131 can be 2kg/m 2
- the material can be selected plastics, such as PFA material plastics, PP material plastics or PVC material plastics
- the width of the coating tank 200 can be 1350mm ⁇ 1650mm
- the groove depth can be 500mm ⁇ 600mm
- the length is 3m ⁇ 4m
- the spraying device 300 can include 4 washing tanks, wherein the material of the washing tanks can be plastic, such as PFA plastic, PP plastic or PVC plastic
- the width of each washing tank can be 1500mm-1650mm, and the depth It can be 600mm-700mm, the length is 3m-5m
- the diameter of the spray pipe can be 10-20mm
- the spray port is
- the researchers detected the film after the film production of the coating system, and found that the film produced by the present invention can completely improve the disadvantages of the pinpoint-shaped perforated hole in the coating.
- the copper layer is continuous without pinholes. Relying on the coating system proposed in the present invention, it is suitable for industrial production of thin film coating, and then the copper deposition speed on the magnetron or evaporated copper film is greatly improved, the coating time is shortened, and the thin film can also obtain a fine and continuous copper coating layer.
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- Chemical Kinetics & Catalysis (AREA)
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Abstract
The present invention relates to a coating system and a coating production line. The coating system comprises: an unwinding apparatus capable of accommodating and conveying at a constant speed a thin film; a coating pool disposed at an output side of the unwinding apparatus and used to store coating liquid, so as to carry out coating on the thin film conveyed by the unwinding device; a spraying apparatus capable of cleaning the thin film coated by the coating pool; a drying apparatus used to dry the thin film cleaned by the spraying apparatus; and a winding apparatus disposed at an output side of the drying apparatus and capable of conveying at a constant speed and accommodating the thin film processed by the drying apparatus. When a thin film needs to be coated, the thin film is moved out from the unwinding apparatus and is accommodated in the unwinding apparatus. It can be understood that the thin film is pre-leveled by the unwinding apparatus and the winding apparatus. When the thin film passes through the coating pool at a constant speed, the coating liquid of the coating pool can be uniformly attached to the thin film, so that the thickness of the coating layer of the thin film is increased. By means of controlling the speed at which the thin film is conveyed by the unwinding apparatus, the thickness of a coating layer on thin film can be increased.
Description
本发明涉及材料加工技术领域,特别是涉及镀膜系统和镀膜生产线。The invention relates to the technical field of material processing, in particular to a coating system and a coating production line.
在对薄膜进行镀膜处理时,预先通过磁控、蒸镀等类型加工工艺处理。磁控和蒸镀这些加工工艺处理后的薄膜的金属膜面厚度不足或不均匀,薄膜的膜面方阻在2000毫欧左右,薄膜的膜面方阻过高,为此需要将薄膜上的镀膜层的厚度增加,以使得薄膜的膜面方阻低于500毫欧。When coating the thin film, it is pre-treated by magnetron, evaporation and other types of processing techniques. The thickness of the metal film surface of the film processed by magnetron and evaporation processes is insufficient or uneven, and the film surface resistance of the film is about 2000 milliohms. The film surface resistance of the film is too high. The thickness of the coating layer is increased so that the surface resistance of the film is lower than 500 milliohms.
为了增加薄膜的镀膜层厚度,现有的方案采用电镀的方式处理。在电镀的过程中,如果电镀时电流设定为电镀处理时限定的电流,此时薄膜的镀膜层厚度仍然达不到要求的厚度范围。而以增大电镀时的电流方式来增加薄膜的镀膜层厚度时,又会导致薄膜出现烧孔、穿孔或断膜等问题,这影响了薄膜加工的合格率。In order to increase the thickness of the coating layer of the film, the existing solution uses electroplating. During the electroplating process, if the electric current is set to the current limited during the electroplating process, the thickness of the coating layer of the film still cannot reach the required thickness range. However, when the thickness of the coating layer of the film is increased by increasing the current during electroplating, problems such as burning holes, perforation or film breakage will occur in the film, which affects the pass rate of film processing.
发明内容Contents of the invention
基于此,有必要针对现有的采用电镀的方式增加薄膜镀膜层厚度的方案中存在薄膜出现烧孔、穿孔或断膜等问题,提出一种镀膜系统。进而还提出一种包括该镀膜系统的镀膜生产线。Based on this, it is necessary to propose a coating system to solve the problems of burning holes, perforation or film breakage in the existing solutions of increasing the thickness of the thin film coating layer by means of electroplating. Furthermore, a coating production line comprising the coating system is also proposed.
一种镀膜系统,所述镀膜系统包括:A kind of coating system, described coating system comprises:
放卷装置,能够收容以及传送薄膜;Unwinding device, capable of receiving and conveying film;
镀膜池,用于收容镀膜液,以对所述放卷装置传送过来的所述薄膜镀膜处 理;A coating pool is used to accommodate the coating solution for the coating treatment of the film conveyed by the unwinding device;
喷淋装置,能够清洗被所述镀膜池镀膜后的所述薄膜;a spraying device capable of cleaning the film coated by the coating pool;
烘干装置,用于对所述喷淋装置清洗后的所述薄膜烘干处理;a drying device, used for drying the film after cleaning the spraying device;
收卷装置,能够传送和收容被所述烘干装置处理后的所述薄膜。The winding device is capable of conveying and storing the film processed by the drying device.
上述镀膜系统,当需要将薄膜镀膜时,薄膜从放卷装置移出,并收容在放卷装置。可以理解为薄膜被放卷装置和收卷装置预先拉平。当薄膜匀速通过镀膜池时,镀膜池的镀膜液能够均匀地附着在薄膜上,从而使得薄膜的镀膜层厚度增加。通过控制放卷装置传送薄膜的速率,能够使得薄膜上的镀膜层的厚度增加的不同,薄膜层的厚度越厚时,薄膜移动的速率越低。薄膜上的镀膜层增加厚度后,依次被喷淋装置清洗、烘干装置烘干最后被收容在收卷装置内。本方案能够较好地避免电镀中以增大电流的方式增加镀膜层的厚度时存在的薄膜出现烧孔、穿孔或断膜等问题。In the above coating system, when the film needs to be coated, the film is moved out from the unwinding device and stored in the unwinding device. It can be understood that the film is pre-stretched by the unwinding device and the winding device. When the film passes through the coating tank at a constant speed, the coating solution in the coating tank can evenly adhere to the film, thereby increasing the thickness of the coating layer of the film. By controlling the speed at which the unwinding device conveys the film, the thickness of the coating layer on the film can be increased differently. When the thickness of the film layer is thicker, the speed at which the film moves is lower. After the coating layer on the film increases in thickness, it is cleaned by the spraying device, dried by the drying device, and finally stored in the winding device. This solution can better avoid problems such as burning holes, perforation or film breakage in the thin film that exists when the thickness of the coating layer is increased by increasing the current in electroplating.
在其中一个实施例中,所述放卷装置包括卷料盘,所述卷料盘能够绕自身轴线转动,以使所述薄膜被缠绕于所述卷料盘。In one embodiment, the unwinding device includes a winding reel, and the reel can rotate around its own axis, so that the film is wound on the reel.
在其中一个实施例中,所述放卷装置还包括多组间隔设置的辊轮,所述辊轮用于传送所述薄膜。In one of the embodiments, the unwinding device further includes multiple sets of rollers arranged at intervals, and the rollers are used for conveying the film.
在其中一个实施例中,所述放卷装置还包括抵压机构,所述抵压机构可转动地设置在所述放卷装置,所述抵压机构包括触碰压头,所述触碰压头用于抵压所述卷料盘上的所述薄膜。In one of the embodiments, the unwinding device further includes a pressing mechanism, the pressing mechanism is rotatably arranged on the unwinding device, the pressing mechanism includes a touch head, and the touch pressure A head is used to press against the film on the reel.
在其中一个实施例中,所述放卷装置设置有能够相互通信的移动模块和测距模块,所述测距模块用于测量所述卷料盘上所述薄膜的厚度,所述移动模块用于驱动所述放卷装置在水平面上沿与所述薄膜传送方向垂直的方向移动。In one of the embodiments, the unwinding device is provided with a mobile module and a distance measuring module capable of communicating with each other, the distance measuring module is used to measure the thickness of the film on the reel, and the mobile module uses and driving the unwinding device to move on a horizontal plane in a direction perpendicular to the conveying direction of the film.
在其中一个实施例中,所述镀膜池靠近所述放卷装置的一侧设置有可供所 述薄膜通过的检测通道,所述检测通道与所述镀膜池连通,所述检测通道设置有多组图像处理模组,以用于检测所述薄膜的表面质量,所述图像处理模组能够与所述放卷装置通信。In one of the embodiments, the side of the coating pool close to the unwinding device is provided with a detection channel through which the film can pass, the detection channel communicates with the coating pool, and the detection channel is provided with multiple An image processing module is used to detect the surface quality of the film, and the image processing module can communicate with the unwinding device.
在其中一个实施例中,所述喷淋装置连通有污水处理管道,以用于回收处理所述喷淋装置使用过的废液。In one of the embodiments, the spraying device is connected with a sewage treatment pipeline for recycling waste liquid used by the spraying device.
在其中一个实施例中,所述烘干装置包括烘干模块和风道模块,所述风道模块用于将所述烘干模块的热量均匀吹向所述薄膜。In one of the embodiments, the drying device includes a drying module and an air duct module, and the air duct module is used to evenly blow the heat of the drying module to the film.
在其中一个实施例中,所述烘干装置还包括第一传感器,所述第一传感器用于检测所述烘干模块产生的温度,所述第一传感器与所述烘干模块电性连接。In one embodiment, the drying device further includes a first sensor, the first sensor is used to detect the temperature generated by the drying module, and the first sensor is electrically connected to the drying module.
一种镀膜生产线,包括所述的镀膜系统。A coating production line, including the coating system.
图1为本发明一实施例中的镀膜系统的模块示意图;Fig. 1 is the module schematic diagram of the coating system in an embodiment of the present invention;
图2为本发明一实施例中镀膜系统的结构示意图;Fig. 2 is a schematic structural view of a coating system in an embodiment of the present invention;
图3为本发明一实施例中放卷装置的结构示意图;Fig. 3 is a schematic structural view of an unwinding device in an embodiment of the present invention;
图4为本发明一实施例中烘干装置的结构示意图。Fig. 4 is a schematic structural diagram of a drying device in an embodiment of the present invention.
附图标号说明:Explanation of reference numbers:
100、放卷装置;110、卷料盘;120、辊轮;130、抵压机构;100. Unwinding device; 110. Coil tray; 120. Roller; 130. Pressing mechanism;
131、触碰压头;140、移动模块;150、测距模块;131. Touching the pressure head; 140. The mobile module; 150. The ranging module;
200、镀膜池;210、检测通道;211、图像处理模组;200. Coating tank; 210. Detection channel; 211. Image processing module;
300、喷淋装置;310、污水处理管道;300. Spraying device; 310. Sewage treatment pipeline;
400、烘干装置;410、烘干模块;420、风道模块;430、第一传感器;400, drying device; 410, drying module; 420, air duct module; 430, first sensor;
500、收卷装置。500. Winding device.
为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图对本发明的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本发明。但是本发明能够以很多不同于在此描述的其它方式来实施,本领域技术人员可以在不违背本发明内涵的情况下做类似改进,因此本发明不受下面公开的具体实施例的限制。In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.
在本发明的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial" , "radial", "circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device or Elements must have certain orientations, be constructed and operate in certain orientations, and therefore should not be construed as limitations on the invention.
此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本发明的描述中,“多个”的含义是至少两个,例如两个,三个等,除非另有明确具体的限定。In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of these features. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.
在本发明中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或成一体;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系,除非另有明确的限定。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection" and "fixation" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , or integrated; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components or the interaction relationship between two components, unless otherwise specified limit. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.
在本发明中,除非另有明确的规定和限定,第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触,或第一和第二特征通过中间媒介间接接触。而且,第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方,或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方,或仅仅表示第一特征水平高度小于第二特征。In the present invention, unless otherwise clearly specified and limited, the first feature may be in direct contact with the first feature or the first and second feature may be in direct contact with the second feature through an intermediary. touch. Moreover, "above", "above" and "above" the first feature on the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. "Below", "beneath" and "beneath" the first feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is less horizontally than the second feature.
需要说明的是,当元件被称为“固定于”或“设置于”另一个元件,它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件,它可以是直接连接到另一个元件或者可能同时存在居中元件。本文所使用的术语“垂直的”、“水平的”、“上”、“下”、“左”、“右”以及类似的表述只是为了说明的目的,并不表示是唯一的实施方式。It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions are for the purpose of illustration only and are not intended to represent the only embodiments.
在对薄膜进行镀膜处理时,预先通过磁控、蒸镀等类型加工工艺处理。磁控和蒸镀这些加工工艺处理后的薄膜的金属膜面厚度不足或不均匀,薄膜的膜面方阻在2000毫欧左右,薄膜的膜面方阻过高,为此需要将薄膜上的镀膜层的厚度增加,以使得薄膜的膜面方阻低于500毫欧。为了增加薄膜的镀膜层厚度,现有的方案采用电镀的方式处理。在电镀的过程中,如果电镀时电流设定为电镀处理时限定的电流,此时薄膜的镀膜层厚度仍然达不到要求的厚度范围。而以增大电镀时的电流方式来增加薄膜的镀膜层厚度时,又会导致薄膜出现烧孔、穿孔或断膜等问题,这影响了薄膜加工的合格率。When coating the thin film, it is pre-treated by magnetron, evaporation and other types of processing techniques. The thickness of the metal film surface of the film processed by magnetron and evaporation processes is insufficient or uneven, and the film surface resistance of the film is about 2000 milliohms. The film surface resistance of the film is too high. The thickness of the coating layer is increased so that the surface resistance of the film is lower than 500 milliohms. In order to increase the thickness of the coating layer of the film, the existing solution uses electroplating. During the electroplating process, if the electric current is set to the current limited during the electroplating process, the thickness of the coating layer of the film still cannot reach the required thickness range. However, when the thickness of the coating layer of the film is increased by increasing the current during electroplating, problems such as burning holes, perforation or film breakage will occur in the film, which affects the pass rate of film processing.
研究人员在分析上述情况后,拟采用化学镀膜的方式来增加薄膜的厚度。在化学镀膜的方式中,需要预先将薄膜拉平,薄膜以匀速的方式经过镀膜池,通过控制薄膜的移动速率,从而使得镀膜池中镀膜液附着在薄膜上的镀膜层厚度不同,薄膜移动速率越快,镀膜层的厚度越低。基于化学镀膜的思路,研究 人员提出一种镀膜系统,进而还提出一种包括该镀膜系统的镀膜生产线。After analyzing the above situation, the researchers plan to use chemical coating to increase the thickness of the film. In the chemical coating method, the film needs to be flattened in advance, and the film passes through the coating tank at a constant speed. By controlling the moving rate of the film, the thickness of the coating layer attached to the film by the coating solution in the coating tank is different, and the faster the moving rate of the film is. Faster, the lower the thickness of the coating layer. Based on the idea of chemical coating, the researchers proposed a coating system, and then proposed a coating production line including the coating system.
研究人员提出的镀膜系统,能够将多种金属层镀膜在薄膜上。本发明将会在后文中以薄膜镀铜的方式举例说明。本发明中提到的薄膜指的是厚度在3.2um~8um,当然薄膜的厚度不限与此。The coating system proposed by the researchers is capable of coating multiple metal layers on thin films. The present invention will be exemplified by thin film copper plating in the following text. The film mentioned in the present invention refers to a thickness of 3.2um-8um, of course, the thickness of the film is not limited thereto.
参阅图1和图2所示,图1示出了本发明一实施例中的镀膜系统的模块示意图,图2为本发明一实施例中镀膜系统的结构示意图,本发明一实施例提供的镀膜系统包括:放卷装置100、镀膜池200、喷淋装置300、烘干装置400以及收卷装置500。其中未经过镀膜池200镀膜处理的薄膜被收容在放卷装置100,经过镀膜处理的薄膜被收容在收卷装置500。在薄膜预先镀膜时,薄膜被放卷装置100和收卷装置500预先拉平。在薄膜镀膜时,放卷装置100和收卷装置500工作时,薄膜从放卷装置100上匀速移动至收卷装置500。镀膜池200用于对从放卷装置100进入到收卷装置500的薄膜进行镀膜处理;喷淋装置300用于对薄膜清洗,以去除薄膜上残留的镀膜液;烘干装置400用于对清洗后的薄膜烘干处理,以便于收卷装置500收容镀膜处理后的薄膜。Referring to Fig. 1 and shown in Fig. 2, Fig. 1 shows the module schematic diagram of the film coating system in one embodiment of the present invention, Fig. 2 is the structural representation of the film coating system in one embodiment of the present invention, the film coating provided by one embodiment of the present invention The system includes: an unwinding device 100 , a coating tank 200 , a spraying device 300 , a drying device 400 and a winding device 500 . Among them, the films that have not been coated by the coating pool 200 are stored in the unwinding device 100 , and the films that have been coated are stored in the winding device 500 . When the film is pre-coated, the film is pre-stretched by the unwinding device 100 and the winding device 500 . During film coating, when the unwinding device 100 and the winding device 500 are working, the film moves from the unwinding device 100 to the winding device 500 at a constant speed. The coating tank 200 is used for coating the film entering the winding device 500 from the unwinding device 100; the spraying device 300 is used for cleaning the film to remove residual coating liquid on the film; the drying device 400 is used for cleaning The final film is dried so that the winding device 500 can accommodate the coated film.
具体地,放卷装置100能够收容以及匀速传送薄膜;镀膜池200设置在放卷装置100的输出侧,并用于储存镀膜液,以对放卷装置100传送过来的薄膜镀膜处理,其中镀膜液可以为化学镀铜镀液及添加剂;喷淋装置300能够清洗被镀膜池200镀膜后的薄膜;烘干装置400用于对喷淋装置300清洗后的薄膜烘干处理;收卷装置500设置在烘干装置的输出侧,能够匀速传送和收容被烘干装置400处理后的薄膜。Specifically, the unwinding device 100 can accommodate and convey the film at a constant speed; the coating pool 200 is arranged on the output side of the unwinding device 100, and is used to store the coating solution for the film coating process delivered by the unwinding device 100, wherein the coating solution can be It is an electroless copper plating solution and an additive; the spray device 300 can clean the film after being coated by the coating pool 200; the drying device 400 is used to dry the film after the spray device 300 is cleaned; the winding device 500 is arranged in the drying The output side of the drying device can convey and store the film processed by the drying device 400 at a uniform speed.
本实施例中的镀膜系统的工作原理为:放卷装置100和收卷装置500预先将薄膜拉平,以使得薄膜经过镀膜池200时,镀膜液能够均匀地附着在薄膜上。当需要将薄膜镀膜时,薄膜从放卷装置100移出,并收容在放卷装置100。当薄 膜匀速通过镀膜池200时,镀膜池200的镀膜液能够均匀地附着在薄膜上,从而使得薄膜的镀膜层厚度增加。通过控制放卷装置100传送薄膜的速率,能够使得薄膜上的镀膜层的厚度增加的不同,薄膜层的厚度越厚时,薄膜移动的速率越低。薄膜上的镀膜层增加厚度后,依次被喷淋装置300清洗、烘干装置400烘干最后被收容在收卷装置500内。本实例中的方案相比现有的电镀方案而言,不会出现烧孔、穿孔或断膜等问题。在本方案中,当需要增大或减小薄膜的镀膜层厚度时,只需要通过放卷装置100和收卷装置500控制薄膜的移动速率即可,从而避免电镀中以增大电流的方式增加镀膜层的厚度时存在的薄膜出现烧孔、穿孔或断膜等问题。The working principle of the coating system in this embodiment is: the unwinding device 100 and the winding device 500 flatten the film in advance, so that when the film passes through the coating pool 200, the coating solution can evenly adhere to the film. When the film needs to be coated, the film is removed from the unwinding device 100 and stored in the unwinding device 100 . When the film passes through the coating tank 200 at a constant speed, the coating solution in the coating tank 200 can evenly adhere to the film, thereby increasing the thickness of the coating layer of the film. By controlling the speed at which the film is conveyed by the unwinding device 100 , the thickness of the coating layer on the film can be increased differently. The thicker the film layer is, the lower the speed at which the film moves. After the coating layer on the film increases in thickness, it is washed by the spraying device 300 in sequence, dried by the drying device 400 and finally stored in the winding device 500 . Compared with the existing electroplating solutions, the solution in this example does not have problems such as hole burning, perforation or film breakage. In this solution, when it is necessary to increase or decrease the thickness of the coating layer of the film, it is only necessary to control the moving speed of the film through the unwinding device 100 and the winding device 500, so as to avoid increasing the current in electroplating. When the thickness of the coating layer is changed, the existing film has problems such as burning holes, perforation or film breakage.
在放卷装置100收容薄膜时,为了防止薄膜表面发生折叠从而影响薄膜表面的平整,进而影响镀膜时薄膜表面镀膜层的厚度。研究人员想到将薄膜缠绕收容在放卷装置100。具体地,参阅图2所示,放卷装置100包括卷料盘110,其中卷料盘110能够绕自身轴线转动,以使薄膜被缠绕于卷料盘110。卷料盘110设置在气涨轴上,并能够绕气涨轴转动。通过驱动元件,例如电机,使得气涨轴匀速转动,通孔控制驱动元件的转速从而实现卷料盘110上面的薄膜能够匀速地移动。When the film is accommodated in the unwinding device 100, in order to prevent the surface of the film from being folded, the smoothness of the film surface is affected, and the thickness of the coating layer on the film surface is affected during coating. The researchers thought of winding and storing the film in the unwinding device 100 . Specifically, referring to FIG. 2 , the unwinding device 100 includes a coil 110 , wherein the coil 110 can rotate around its own axis, so that the film is wound on the coil 110 . The reel 110 is arranged on the inflatable shaft and can rotate around the inflatable shaft. The inflatable shaft rotates at a constant speed through a driving element, such as a motor, and the through hole controls the rotating speed of the driving element so that the film on the coil 110 can move at a constant speed.
在放卷装置100传动薄膜的过程中,由于放卷装置100与镀膜池200之间还存在间距,此时薄膜自身的重力会导致薄膜向下弯曲,因此可能影响薄膜表面的平整。为此放卷装置100还包括多组间隔设置的辊轮120,参阅图2所示,辊轮120用于传送薄膜。也就是说,多组辊轮120能够支撑以及传送薄膜,进而较好地避免薄膜向下弯曲。每组辊轮120可以包括相对设置的上辊轮和下辊轮,上辊轮和下辊轮之间存在传送通道,薄膜从该传送通道内传送;或者每组辊轮120也可以是单个辊轮构成。When the unwinding device 100 drives the film, since there is still a distance between the unwinding device 100 and the coating tank 200, the gravity of the film itself will cause the film to bend downward, which may affect the flatness of the film surface. For this reason, the unwinding device 100 also includes multiple sets of rollers 120 arranged at intervals, as shown in FIG. 2 , and the rollers 120 are used for conveying the film. That is to say, the multiple sets of rollers 120 can support and convey the film, thereby better preventing the film from bending downwards. Each set of rollers 120 can include upper rollers and lower rollers that are arranged oppositely, there is a conveying channel between the upper rollers and the lower rollers, and the film is conveyed from the conveying channel; or each group of rollers 120 can also be a single roller wheel composition.
在放卷装置100中的卷料盘110在传送薄膜时,为了使得薄膜尽可能地平整,需要施加给薄膜更大的拉力。尽管卷料盘110在缠绕的过程中也施加给薄膜相应的作用力,但是该作用力较弱,薄膜也会出现表面不平整的情况。为此研究人员想到在缠绕在放卷装置100上的薄膜施加抵压作用力,如此能够使得从放卷装置100传送出的薄膜能够被更好地拉平,从而保证薄膜上的镀膜层均匀。具体地,参阅图3所示,放卷装置100还包括抵压机构130,其中抵压机构130可转动地设置在放卷装置100,抵压机构130包括触碰压头131,触碰压头131用于抵压卷料盘110上的薄膜。需要说明的是抵压机构130可以通过转轴连接的方式设置在放卷装置100,也可以通过驱动元件,例如电机的方式驱动抵压架构绕放卷装置100转动;触碰压头131包括压力传感器,能够实施例检测和调整施加于薄膜上的压力。When the reel 110 in the unwinding device 100 is conveying the film, in order to make the film as flat as possible, a greater pulling force needs to be applied to the film. Although the reel 110 also exerts a corresponding force on the film during the winding process, the force is relatively weak, and the surface of the film will be uneven. For this reason, the researchers thought of exerting a pressing force on the film wound on the unwinding device 100, so that the film conveyed from the unwinding device 100 can be better flattened, so as to ensure that the coating layer on the film is uniform. Specifically, as shown in FIG. 3 , the unwinding device 100 also includes a pressing mechanism 130, wherein the pressing mechanism 130 is rotatably arranged on the unwinding device 100, and the pressing mechanism 130 includes a contact pressing head 131, which touches the pressing head 131 is used for pressing the film on the reel 110 . It should be noted that the pressing mechanism 130 can be arranged on the unwinding device 100 through a rotating shaft connection, and can also be driven by a driving element, such as a motor, to rotate the pressing mechanism around the unwinding device 100; the touch head 131 includes a pressure sensor , enabling the embodiment to detect and adjust the pressure applied to the membrane.
在镀膜系统中传送薄膜时,由于系统本身制造精度的原因或者系统施加在薄膜上的原因,因此薄膜的实际传送方向与系统本身传送薄膜的方向出现偏差,可以理解为薄膜实际的传送方向与系统的传送方向出现倾斜。如果不对该偏差进行纠正,则系统施加与薄膜上的作用力可能发生改变,从而导致薄膜断裂。为此,一实施例中,参阅图3所示,放卷装置100设置有能够相互通信的移动模块140和测距模块150,其中测距模块150用于测量卷料盘110上薄膜的厚度,移动模块用于驱动放卷装置100在水平面上沿与薄膜传送方向垂直的方向移动。在薄膜未发生偏移的情况下,测距模块150检测的薄膜厚度为均匀变化,而当薄膜出现偏移后,测距模块150测量的薄膜厚度会发生变化。比如说,每层薄膜的厚度为X,目前薄膜在放卷装置100的卷料盘110上的层数为10层,测距模块150能够检测的厚度为10X。在正常情况下,卷料盘110绕一圈后,测距模块150测量的薄膜厚度变为9X,而当薄膜出现偏差时,在卷料盘110还未旋转 一圈的情况下,测距模块150测量的薄膜厚度变为9X,此时表示薄膜出现偏差。因此需要通过移动模块140来调整放卷装置100移动,使得放卷装置100传送薄膜的方向与薄膜实际传送的方向重合。测距模块150可以包括多个激光测距传感器,激光测距传感器可以分布设置在放卷装置100的卷料盘110的边缘。移载模块可以包括伺服电机,通过伺服电机与丝杠的连接可以驱动放卷装置100移动。当然移载模块还可以是直线电机等其他类似实现平移移动的驱动元件。When the film is conveyed in the coating system, due to the manufacturing accuracy of the system itself or the reason that the system is applied to the film, there is a deviation between the actual conveying direction of the film and the direction of the film conveyed by the system itself. It can be understood that the actual conveying direction of the film is different from that of the system. The direction of transmission is skewed. If this misalignment is not corrected, the force that the system exerts on the membrane may change, causing the membrane to break. To this end, in one embodiment, referring to Fig. 3, the unwinding device 100 is provided with a mobile module 140 and a distance measuring module 150 capable of communicating with each other, wherein the distance measuring module 150 is used to measure the thickness of the film on the reel 110, The moving module is used to drive the unwinding device 100 to move on the horizontal plane in a direction perpendicular to the film conveying direction. When the film does not deviate, the thickness of the film detected by the ranging module 150 changes uniformly, but when the film deviates, the thickness of the film measured by the ranging module 150 will change. For example, the thickness of each layer of film is X, the number of layers of film on the reel 110 of the unwinding device 100 is 10 at present, and the thickness that the ranging module 150 can detect is 10X. Under normal circumstances, after the coiling reel 110 makes one turn, the thickness of the film measured by the distance measuring module 150 becomes 9X, and when the film deviates, the distance measuring module will The film thickness measured at 150 becomes 9X, which indicates that the film is deviated. Therefore, it is necessary to adjust the movement of the unwinding device 100 through the moving module 140 so that the direction in which the film is conveyed by the unwinding device 100 coincides with the direction in which the film is actually conveyed. The ranging module 150 may include a plurality of laser ranging sensors, and the laser ranging sensors may be distributed and arranged on the edge of the reel 110 of the unwinding device 100 . The transfer module may include a servo motor, and the unwinding device 100 may be driven to move through the connection between the servo motor and the lead screw. Of course, the transfer module can also be a linear motor or other similar driving elements for translational movement.
在另一实施例中,放卷装置100与放卷系统的结构类似,可以包括放卷系统中的卷料盘110和辊轮120,不同的是,放卷装置100中的卷料盘110用于将镀膜后的薄膜缠绕,而放卷系统中卷料盘110用于将镀膜前薄膜移出。放卷装置100中也可以设置抵压机构130以及移动模块140和测距模块150,其工作原理与放卷系统中设置该装置的工作原理类似。In another embodiment, the structure of the unwinding device 100 is similar to that of the unwinding system, and may include a coil 110 and a roller 120 in the unwinding system. The difference is that the coil 110 in the unwinding device 100 uses The coated film is wound, and the reel 110 in the unwinding system is used to remove the pre-coated film. A pressing mechanism 130, a moving module 140 and a distance measuring module 150 may also be provided in the unwinding device 100, and its working principle is similar to that of the device in the unwinding system.
薄膜收容在放卷装置100中时,由于薄膜依次缠绕,因此薄膜本身的表面质量较难判断。如果薄膜表面质量本身存在问题,则需要及时地剔除该薄膜,以降低薄膜生产损失。薄膜的表面质量包括断膜、穿孔或者平整度等。为此研究人员想到在薄膜传送至镀膜池200之前,预先对薄膜进行表面质量检测。具体地,参阅图2所示,镀膜池200靠近放卷装置100的一侧设置有可供薄膜通过的检测通道210,其中检测通道210与镀膜池200连通,检测通道210设置有多组图像处理模组211,以用于检测薄膜的表面质量,图像处理模组211能够与放卷装置100通信。在本实施例中,图像处理模组211能够实时地识别薄膜的表面质量,如果图像处理模组211识别薄膜表面质量异常时,此时可以控制放卷装置100停止工作,薄膜也被停止传送。图像处理模组211在布置时,可以布置在薄膜上表面和薄膜下表面,从而能够对薄膜两个表面的表面质量进行识别处理。When the film is stored in the unwinding device 100, since the film is wound sequentially, it is difficult to judge the surface quality of the film itself. If there is a problem with the surface quality of the film itself, the film needs to be removed in time to reduce the loss of film production. The surface quality of the film includes film breakage, perforation or flatness. For this reason, researchers think of performing surface quality inspection on the thin film before the thin film is sent to the coating tank 200 . Specifically, as shown in FIG. 2 , the side of the coating pool 200 close to the unwinding device 100 is provided with a detection channel 210 for the film to pass through, wherein the detection channel 210 communicates with the coating pool 200, and the detection channel 210 is provided with multiple groups of images. The processing module 211 is used to detect the surface quality of the film, and the image processing module 211 can communicate with the unwinding device 100 . In this embodiment, the image processing module 211 can recognize the surface quality of the film in real time. If the image processing module 211 recognizes that the surface quality of the film is abnormal, it can control the unwinding device 100 to stop working and the film to stop conveying. When the image processing module 211 is arranged, it can be arranged on the upper surface of the film and the lower surface of the film, so that the surface quality of the two surfaces of the film can be identified and processed.
当薄膜经过镀膜池200镀膜处理后,薄膜的表面可能还会残留镀膜液,为此需要经过喷淋装置300进行清洗。由于镀膜液中含有金属材料,如果直接将喷淋后的废液排放,一方面可能会污染水源;另一方面也可能造成较大的材料浪费。为此,研究人员想到将喷淋装置300清洗后的废液进行回收。具体地,喷淋装置300连通有污水处理管道310,以用于回收处理喷淋装置300使用过的废液。喷淋装置300冲洗薄膜时,可以采用纯水;喷淋装置300可以包括多个喷淋孔,以尽可能地将去除薄膜上残留的镀膜液。After the thin film is coated by the coating tank 200 , the coating solution may still remain on the surface of the thin film, which needs to be cleaned by the spraying device 300 . Since the coating liquid contains metal materials, if the waste liquid after spraying is discharged directly, on the one hand, it may pollute the water source; on the other hand, it may also cause a large waste of materials. For this reason, researchers think of recycling the waste liquid after cleaning the spraying device 300 . Specifically, the shower device 300 is connected with a sewage treatment pipeline 310 for recovering waste liquid used by the shower device 300 . When the spraying device 300 rinses the film, pure water can be used; the spraying device 300 can include a plurality of spraying holes, so as to remove residual coating solution on the film as much as possible.
镀膜后的薄膜经过喷淋装置300清洗后,需要将薄膜烘干处理,从而便于对镀膜后的薄膜收容。在薄膜的烘干过程中,需要考虑烘干装置400的热量能够分布均匀,为此研究人员想到在烘干装置400内设置风道模块420。具体地,参阅图4所示,烘干装置400包括烘干模块410和风道模块420,其中风道模块420用于将烘干模块410的热量均匀吹向薄膜。After the coated film is cleaned by the spray device 300 , the film needs to be dried to facilitate storage of the coated film. During the drying process of the film, it is necessary to consider that the heat of the drying device 400 can be evenly distributed, so the researchers thought of setting the air duct module 420 in the drying device 400 . Specifically, referring to FIG. 4 , the drying device 400 includes a drying module 410 and an air channel module 420 , wherein the air channel module 420 is used to evenly blow the heat of the drying module 410 to the film.
进一步地,为了防止烘干装置400的产生的烘干温度过高,从而影响薄膜的表面质量,为此可以通过设置传感器的方式来调节。具体地,参阅图4所示,烘干装置400还包括第一传感器430,其中第一传感器430用于检测烘干模块410产生的温度,第一传感器430与烘干模块410电性连接。第一传感器430可以为温度传感器,当第一传感器430检测到温度异常时,可以控制烘干模块410以降低烘干温度。Further, in order to prevent the drying temperature generated by the drying device 400 from being too high, thereby affecting the surface quality of the film, it can be adjusted by setting a sensor. Specifically, referring to FIG. 4 , the drying device 400 further includes a first sensor 430 , wherein the first sensor 430 is used to detect the temperature generated by the drying module 410 , and the first sensor 430 is electrically connected to the drying module 410 . The first sensor 430 may be a temperature sensor, and when the first sensor 430 detects an abnormal temperature, it may control the drying module 410 to reduce the drying temperature.
在本发明中还提出一种镀膜生产线,其中镀膜生产线包括上述提到的镀膜系统。在本镀膜生产线中,镀膜系统中的放卷系统的放卷速度为3~5m/min,卷料盘110的轴径为80~100mm,触碰压头131的压力设定可以为2kg/m
2;镀膜池200在镀铜时,材质可以选择塑料,例如PFA材质塑料、PP材质塑料或者PVC材质塑料,镀膜池200的宽度可以为1350mm~1650mm,槽深可以为500mm~ 600mm,长度为3m~4m;喷淋装置300可以包括4个水洗槽,其中水洗槽的材质可以为塑料,例如PFA材质塑料、PP材质塑料或者PVC材质塑料;每个水洗槽的宽度可以为1500mm~1650mm,槽深可以为600mm~700mm,长度为3m~5m,喷淋管的直径可以为10~20mm,喷淋口2mm~5mm,喷淋管的数量为30~50个;烘干装置400中的风道模块420中风口处的孔径为3mm~5mm,风速为2m/s。
In the present invention, a coating production line is also proposed, wherein the coating production line includes the above-mentioned coating system. In this coating production line, the unwinding speed of the unwinding system in the coating system is 3-5m/min, the shaft diameter of the reel 110 is 80-100mm, and the pressure setting of the touch head 131 can be 2kg/m 2 ; when the coating tank 200 is copper-plated, the material can be selected plastics, such as PFA material plastics, PP material plastics or PVC material plastics, the width of the coating tank 200 can be 1350mm~1650mm, the groove depth can be 500mm~600mm, and the length is 3m ~4m; the spraying device 300 can include 4 washing tanks, wherein the material of the washing tanks can be plastic, such as PFA plastic, PP plastic or PVC plastic; the width of each washing tank can be 1500mm-1650mm, and the depth It can be 600mm-700mm, the length is 3m-5m, the diameter of the spray pipe can be 10-20mm, the spray port is 2mm-5mm, and the number of spray pipes is 30-50; the air duct module in the drying device 400 The hole diameter at the air outlet of 420 is 3mm-5mm, and the wind speed is 2m/s.
在通过本系统对薄膜镀铜时,研究人员对镀膜系统镀膜生产后薄膜检测发现,本发明生产的薄膜可完全改善镀膜针尖状穿孔孔弊病,膜面在50倍晶相显微镜观察下,膜面铜层连续无针状穿孔出现。依靠本发明中提出的镀膜系统可适合于薄膜镀膜工业化生产,进而使得磁控或蒸镀铜膜上沉铜速度大大提高,缩短镀膜时间,薄膜也能够获得结晶细致连续的镀铜层。When the film is copper-plated by this system, the researchers detected the film after the film production of the coating system, and found that the film produced by the present invention can completely improve the disadvantages of the pinpoint-shaped perforated hole in the coating. The copper layer is continuous without pinholes. Relying on the coating system proposed in the present invention, it is suitable for industrial production of thin film coating, and then the copper deposition speed on the magnetron or evaporated copper film is greatly improved, the coating time is shortened, and the thin film can also obtain a fine and continuous copper coating layer.
以上实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above embodiments can be combined arbitrarily. To make the description concise, all possible combinations of the technical features in the above embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, they should be It is considered to be within the range described in this specification.
以上实施例仅表达了本发明的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。因此,本发明专利的保护范围应以所附权利要求为准。The above examples only express several implementation modes of the present invention, and the description thereof is relatively specific and detailed, but it should not be construed as limiting the scope of the patent for the invention. It should be noted that, for those skilled in the art, several modifications and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent for the present invention should be based on the appended claims.
Claims (10)
- 一种镀膜系统,其特征在于,所述镀膜系统包括:A kind of coating system, is characterized in that, described coating system comprises:放卷装置,能够收容以及匀速传送薄膜;The unwinding device can accommodate and convey the film at a constant speed;镀膜池,设置在所述放卷装置的输出侧,所述镀膜池用于存储镀膜液,以对所述放卷装置传送过来的所述薄膜镀膜处理;A coating pool, arranged on the output side of the unwinding device, the coating pool is used to store coating liquid, so as to process the thin film delivered by the unwinding device;喷淋装置,能够清洗被所述镀膜池镀膜后的所述薄膜;a spraying device capable of cleaning the film coated by the coating pool;烘干装置,用于对所述喷淋装置清洗后的所述薄膜烘干处理;a drying device, used for drying the film after cleaning the spraying device;收卷装置,设置在所述烘干装置的输出侧,能够匀速传送和收容被所述烘干装置处理后的所述薄膜。The winding device is arranged on the output side of the drying device, and can convey and store the film processed by the drying device at a uniform speed.
- 根据权利要求1所述的镀膜系统,其特征在于,所述放卷装置包括卷料盘,所述卷料盘能够绕自身轴线转动,以使所述薄膜被缠绕于所述卷料盘。The coating system according to claim 1, wherein the unwinding device comprises a coil, and the coil can rotate around its own axis, so that the film is wound on the coil.
- 根据权利要求2所述的镀膜系统,其特征在于,所述放卷装置还包括多组间隔设置的辊轮,所述辊轮用于传送所述薄膜。The coating system according to claim 2, wherein the unwinding device further comprises multiple groups of rollers arranged at intervals, and the rollers are used to convey the film.
- 根据权利要求3所述的镀膜系统,其特征在于,所述放卷装置还包括抵压机构,所述抵压机构可转动地设置在所述放卷装置,所述抵压机构包括触碰压头,所述触碰压头用于抵压所述卷料盘上的所述薄膜。The coating system according to claim 3, wherein the unwinding device further includes a pressing mechanism, the pressing mechanism is rotatably arranged on the unwinding device, and the pressing mechanism includes a touch pressure head, and the touch pressure head is used for pressing the film on the reel.
- 根据权利要求4所述的镀膜系统,其特征在于,所述放卷装置设置有能够相互通信的移动模块和测距模块,所述测距模块用于测量所述卷料盘上所述薄膜的厚度,所述移动模块用于驱动所述放卷装置在水平面上沿与所述薄膜传送方向垂直的方向移动。The coating system according to claim 4, wherein the unwinding device is provided with a mobile module and a distance measuring module capable of communicating with each other, and the distance measuring module is used to measure the distance of the film on the reel. thickness, the moving module is used to drive the unwinding device to move on a horizontal plane in a direction perpendicular to the film conveying direction.
- 根据权利要求1所述的镀膜系统,其特征在于,所述镀膜池靠近所述放卷装置的一侧设置有可供所述薄膜通过的检测通道,所述检测通道与所述镀膜池连通,所述检测通道设置有多组图像处理模组,以用于检测所述薄膜的表面质量,所述图像处理模组能够与所述放卷装置通信。The coating system according to claim 1, wherein a detection channel for the film to pass through is provided on the side of the coating pool close to the unwinding device, and the detection channel communicates with the coating pool, The detection channel is provided with multiple sets of image processing modules for detecting the surface quality of the film, and the image processing modules can communicate with the unwinding device.
- 根据权利要求1所述的镀膜系统,其特征在于,所述喷淋装置连通有污水处理管道,以用于回收处理所述喷淋装置使用过的废液。The coating system according to claim 1, wherein the spraying device is connected with a sewage treatment pipeline for recycling waste liquid used by the spraying device.
- 根据权利要求1所述的镀膜系统,其特征在于,所述烘干装置包括烘干模块和风道模块,所述风道模块用于将所述烘干模块的热量均匀吹向所述薄膜。The film coating system according to claim 1, wherein the drying device comprises a drying module and an air duct module, and the air duct module is used to evenly blow the heat of the drying module to the film.
- 根据权利要求8所述的镀膜系统,其特征在于,所述烘干装置还包括第一传感器,所述第一传感器用于检测所述烘干模块产生的温度,所述第一传感器与所述烘干模块电性连接。The coating system according to claim 8, wherein the drying device further comprises a first sensor, the first sensor is used to detect the temperature generated by the drying module, and the first sensor and the The drying module is electrically connected.
- 一种镀膜生产线,其特征在于,包括如权利要求1~9中任意一项所述的镀膜系统。A coating production line, characterized by comprising the coating system according to any one of claims 1-9.
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