TW202242354A - Vibration sensor - Google Patents

Abstract

The present disclosure may disclose a vibration sensor, including: vibration units, a shell body and an acoustic transducer, the acoustic transducer may be physically connected with the shell body, the vibration units may be installed within the shell body; the vibration units may include a quality block, an elastic membrane, and a supporting frame. The quality block and the supporting frame may be respectively physically connected with the two sides of the elastic membrane, and the supporting frame may be physically connected with the acoustic transducer. The supporting frame, the elastic membrane and the acoustic transducer form an acoustic cavity which is acoustically connected with the acoustic transducer.

Description

vibration sensor

This application relates to the field of acoustics, in particular to a vibration sensor.

This application claims the priority of the Chinese patent application with application number 202110445739.3 filed on April 23, 2021, the priority of the Chinese patent application with application number 202110917789.7 filed on August 11, 2021, and The priority of the Chinese patent application with application number 202121875653.6 filed on August 11, 2021, the entire content of which is incorporated herein by reference.

A vibration sensor is an energy conversion device that converts vibration signals into electrical signals. The sensitivity of the vibration sensor will affect the quality of the sound it transmits. However, the current vibration sensor is limited by the difficulty of processing, and the performance of the general device is not ideal, and the sensitivity is not high. It is therefore desirable to provide a vibration sensor with higher sensitivity.

An embodiment of the present invention provides a vibration sensor, the vibration sensor includes: a vibration unit, a casing and an acoustic transducer, the acoustic transducer is physically connected to the casing, and the vibration unit is arranged on In the housing; the vibration unit includes a mass block, an elastic membrane and a support frame, the mass block and the support frame are respectively physically connected to both sides of the elastic film, and the support frame is connected to the acoustic transducer The device is physically connected; the support frame, the elastic membrane and the acoustic transducer form an acoustic cavity, and the acoustic cavity is in acoustic communication with the acoustic transducer.

In some embodiments, the cross-sectional area of the proof mass along the direction perpendicular to the thickness of the proof mass is greater than the cross-sectional area of the acoustic cavity along the direction perpendicular to the height of the acoustic cavity, and the elastic membrane is perpendicular to the cross-sectional area of the acoustic cavity The cross-sectional area of the thickness direction of the elastic film is larger than the cross-sectional area of the acoustic cavity along the height direction perpendicular to the acoustic cavity; the housing is configured to vibrate based on an external vibration signal; the mass block is configured to respond Due to the vibration of the housing, the area where the elastic membrane contacts the support frame undergoes compression deformation, and the elastic membrane can vibrate to change the volume of the acoustic cavity; the acoustic transducer An electrical signal is generated based on a change in volume of the acoustic cavity.

In some embodiments, the support frame includes a ring structure.

In some embodiments, the cross-sectional area of the proof mass in the direction perpendicular to the thickness of the proof mass is greater than or equal to the cross-sectional area of the outer ring of the ring structure in the direction perpendicular to the height of the acoustic cavity, and the elasticity A cross-sectional area of the membrane in a direction perpendicular to the thickness of the elastic membrane is greater than or equal to a cross-sectional area of the outer ring of the ring structure in a direction perpendicular to the height of the acoustic cavity.

In some embodiments, the cross-sectional area of the mass block along the direction perpendicular to the thickness of the mass block is equal to the cross-sectional area of the elastic membrane along the direction perpendicular to the thickness of the elastic film.

In some embodiments, the support frame is a rigid material.

In some embodiments, the support frame is made of metal material or plastic material.

In some embodiments, the support frame further includes a base plate, the ring structure is located on the base plate, the ring structure is integrally formed with the base plate, and a through hole is formed on the base plate; A sound inlet hole is provided, and the through hole communicates with the sound inlet hole.

In some embodiments, the thickness of the support frame is 1 um to 1000 um; and/or, the difference between the inner diameter and the outer diameter of the annular structure is 1 um to 300 um.

In some embodiments, the thickness of the support frame is 10um to 200um; and/or, the difference between the inner diameter and the outer diameter of the annular structure is 10um to 100um.

In some embodiments, the elastic film has a thickness of 10 um to 1000 um.

In some embodiments, the thickness of the elastic film is 100um to 300um.

In some embodiments, the elastic film includes at least one of foam, silicon rubber and silicon rubber.

In some embodiments, the mass has a thickness of 10 um to 1000 um.

In some embodiments, the mass has a thickness of 100um to 300um.

In some embodiments, the vibration unit further includes another elastic membrane and another support frame, the other elastic membrane is physically connected to the side of the mass block away from the elastic membrane, and the other support The frame is physically connected to a side of the other elastic membrane that is away from the mass block, and the other supporting frame is physically connected to the housing.

In some embodiments, the other elastic membrane and the elastic membrane are arranged symmetrically with respect to the proof mass.

In some embodiments, the vibration sensor further includes a sealing structure for sealing the gap between the elastic membrane and the support frame, and/or for sealing the support frame and the gap between the acoustic transducer.

In some embodiments, the sealing structure includes at least one of silicone gel material, silicone rubber material and silicone glue material.

In some embodiments, the Shore hardness of the sealing structure is less than or equal to 40HA; and/or, the Young's modulus of the sealing structure is less than or equal to 10 MPa.

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings that need to be used in the description of the embodiments. Apparently, the accompanying drawings in the following description are only some examples or embodiments of the present invention, and for those skilled in the art, the present invention can also be translated according to these drawings without making progressive efforts. The invention applies to other similar scenarios. Unless apparent from context or otherwise stated, like reference symbols in the drawings represent like structures or operations.

It should be understood that "system", "device", "unit" and/or "module" as used herein is a method for distinguishing different elements, components, parts, parts or assemblies of different levels. However, the words may be replaced by other expressions if other words can achieve the same purpose.

As indicated in the specification and claims, words such as "a", "an", "an" and/or "the" do not refer to the singular, and may also include the plural, unless the context clearly indicates an exception. Generally speaking, the terms "comprising" and "comprising" only suggest the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list, and the method or device may also contain other steps or elements.

The flow chart is used in the present invention to illustrate the operations performed by the system according to the embodiment of the present invention. It should be understood that the preceding or following operations are not necessarily performed in the exact order. Instead, various steps may be processed in reverse order or simultaneously. At the same time, other operations can also be added to these processes, or operations of a certain step or several steps can be removed from these processes.

An embodiment of the present invention provides a vibration sensor. The vibration unit of the vibration sensor can include a mass block, an elastic film and a support frame, the mass block and the support frame can be physically connected to both sides of the elastic film respectively, the support frame can be physically connected with the acoustic transducer, the support frame, the elastic The membrane and the acoustic transducer form an acoustic cavity. The cross-sectional area of the mass block along the thickness direction perpendicular to the mass block and the cross-sectional area of the elastic film along the thickness direction perpendicular to the elastic film can be larger than the cross-sectional area of the acoustic cavity along the height direction perpendicular to the acoustic cavity, and can be larger than the acoustic cavity along the vertical The cross-sectional area in the height direction of the acoustic cavity. With such an arrangement, the mass block responds to the vibration of the housing, causing compression deformation in the contact area between the elastic membrane and the support frame, thereby carrying out vibration pickup and transmission. This vibration pickup and transmission method can improve the performance of the vibration sensor. sensitivity. In addition, the support frame is made of rigid material, which is easy to process, can more accurately limit the height of the acoustic cavity, effectively improves the sensitivity of the vibration sensor, and simplifies the processing process of the vibration unit and improves the processing efficiency.

FIG. 1 is a schematic diagram of a vibration sensor according to some embodiments of the present invention. As shown in FIG. 1 , the vibration sensor 100 may include a vibration unit 110 , an acoustic transducer 120 and a housing 130 . In some embodiments, the vibration unit 110 , the acoustic transducer 120 and the housing 130 may be connected by means of physical connection, for example, welding, clamping, gluing or integral molding or any combination thereof.

In some embodiments, the vibration sensor 100 may be applied to a microphone (eg, an air conduction microphone or a bone conduction microphone). When used as a microphone, the vibration sensor 100 can receive vibration signals of tissues such as bone and skin or air vibration signals generated when the user speaks, and convert the vibration signals into electrical signals containing sound information. In some embodiments, the vibration sensor 100 can be applied to earphones (for example, air conduction earphones and bone conduction earphones), hearing aids, hearing aids, glasses, helmets, augmented reality (AR) devices, virtual reality ( VR) devices, etc. or any combination thereof.

The housing 130 may be a hollow structure, the vibration unit 110 may be located in the housing, and the housing 130 may be physically connected to the acoustic transducer 120 . In some embodiments, the housing 130 is configured to generate vibration based on an external vibration signal, and can transmit the vibration to the vibration unit 110 . In some embodiments, the shape of the casing 130 may be a regular or irregular three-dimensional structure such as a cuboid, a cylinder, or a circular truncated cone. In some embodiments, the material of the housing 130 may include metal (eg, copper, stainless steel, etc.), alloy, plastic, etc., or any combination thereof. In some embodiments, the housing 130 may have a certain thickness to ensure sufficient strength, so as to better protect the components of the vibration sensor 100 (eg, the vibration unit 110 ) disposed in the housing.

The vibration unit 110 may be configured to receive, transmit and convert vibration signals. In some embodiments, at least part of the vibration unit 110 and the acoustic transducer 120 may form an acoustic cavity. The acoustic cavity may be in acoustic communication with the acoustic transducer 120 . Acoustic communication may be communication capable of transmitting sound pressure, sound wave or vibration signals. When the vibration sensor 100 is in operation, the vibration unit 110 may vibrate in response to the vibration of the casing 130 and transmit the vibration to the acoustic transducer 120 through the acoustic cavity.

The acoustic transducer 120 is configured to receive vibration signals and convert the received vibration signals into electrical signals. In some embodiments, the acoustic transducer 120 may generate electrical signals based on changes in the volume of the acoustic cavity.

For a detailed description of the vibration sensor 100 , reference may be made to the detailed description of FIGS. 2 to 12 .

It should be noted that the above description about the vibration sensor 100 and its components is only for illustration and description, and does not limit the scope of application of this specification. Various modifications and changes can be made to the vibration sensor 100 by those skilled in the art under the guidance of this specification. In some embodiments, the vibration sensor 100 may further include other components, such as a power supply, lead wires, etc., to provide the acoustic transducer 120 with electrical energy, output electrical signals, and the like. Such modifications and changes are still within the scope of the present invention.

FIG. 2 is a schematic structural diagram of a vibration sensor 200 according to some embodiments of the present invention. As shown in FIG. 2 , the vibration sensor 200 may include a housing 210 , a vibration unit 220 and an acoustic transducer 260 . In some embodiments, the housing 210 may be connected with the acoustic transducer 260 to enclose a hollow structure. The connection between the casing 210 and the acoustic transducer 260 may be a physical connection. In some embodiments, the vibration unit 220 may be located within the enclosed hollow structure. The housing 210 is configured to generate vibration based on an external vibration signal, and the vibration unit 220 can pick up, convert and transmit the vibration (for example, convert the vibration into compression of air in the acoustic cavity), so that the acoustic transducer 260 generates an electrical signal.

In some embodiments, the vibration unit 220 may include a mass 221 , an elastic membrane 222 and a support frame 223 . The mass block 221 and the supporting frame 223 are physically connected to both sides of the elastic membrane 222 respectively. For example, the mass block 221 and the support frame 223 may be respectively connected to the upper surface and the lower surface of the elastic membrane 222 . The supporting frame 223 is physically connected to the acoustic transducer 260 , for example, the upper end of the supporting frame 223 may be connected to the lower surface of the elastic membrane 222 , and the lower end thereof may be connected to the acoustic transducer 260 . The support frame 223 , the elastic membrane 222 and the acoustic transducer 260 may form an acoustic cavity 224 . For example, as shown in FIG. 2, the acoustic cavity 224 may be formed by an elastic membrane 222, an acoustic transducer 260, and a support frame 223 comprising a ring structure. For another example, as shown in FIG. 5 , the acoustic cavity 224 may be formed by an elastic membrane 222 , an acoustic transducer 260 , and a support frame 223 including a ring structure and a bottom plate. The acoustic cavity 224 is in acoustic communication with the acoustic transducer 260 . For example, the acoustic transducer 260 may be provided with a sound inlet 261, the sound inlet 261 may refer to a hole on the acoustic transducer 260 for receiving the volume change signal of the acoustic cavity, and the acoustic cavity 224 may be connected to the acoustic transducer 260. The sound inlet hole 261 provided on the top is connected. Acoustic communication of acoustic cavity 224 with acoustic transducer 260 may cause acoustic transducer 260 to sense changes in the volume of acoustic cavity 224 and generate electrical signals based on the change in volume of acoustic cavity 224 . With such an arrangement, the casing 210 vibrates based on the external vibration signal, the mass 221 is configured to respond to the vibration of the casing 210 to cause the elastic membrane 222 to change the volume of the acoustic cavity 224, and the acoustic transducer 260 is based on the volume of the acoustic cavity 224. The change in volume generates an electrical signal. The mass block 221, the elastic membrane 222 and the supporting frame together constitute a mass-spring-damping system, such a vibration unit 220 can effectively improve the sensitivity of the vibration sensor.

In some embodiments, the cross-sectional area of the mass block 221 along the thickness direction perpendicular to the mass block 221 (as indicated by the arrow in FIG. 2 ) is greater than that of the acoustic cavity 224 along the height direction perpendicular to the acoustic cavity 224 (as indicated by the arrow in FIG. 2 ). direction) cross-sectional area. In some embodiments, the cross-sectional area of the elastic film 222 along the direction perpendicular to the thickness of the elastic film 222 is greater than the cross-sectional area of the acoustic cavity 224 along the direction perpendicular to the height of the acoustic cavity 224 . The mass block 221 is configured to compress and deform the area where the elastic membrane 222 contacts the support frame 223 in response to the vibration of the housing 210 , and the elastic membrane 222 can vibrate to change the volume of the acoustic cavity 224 . Acoustic transducer 260 generates electrical signals based on changes in the volume of acoustic cavity 224 .

It should be noted that when the cross-sectional area of the acoustic cavity 224 along the direction perpendicular to the height of the acoustic cavity 224 changes with different heights, the section area of the acoustic cavity 224 described in this specification along the direction perpendicular to the height of the acoustic cavity 224 The area may refer to the area of the section of the side of the acoustic cavity 224 close to the elastic membrane 222 along the direction perpendicular to the height of the acoustic cavity 224 .

In some other embodiments, the cross-sectional area of the proof mass along the direction perpendicular to the thickness of the proof mass is smaller than the cross-sectional area of the acoustic cavity along the direction perpendicular to the height of the acoustic cavity. Please refer to FIG. 11 and related descriptions for details.

Fig. 3 is a schematic diagram of the connection between the elastic membrane and the support frame according to some embodiments of the present invention. As shown in Figures 2 and 3, when the mass 221 vibrates, only the region 250 where the elastic film 222 contacts the support frame 223 undergoes compression deformation, and the contact portion between the elastic film 222 and the support frame 223 is equivalent to a spring, such a structure The sensitivity of the vibration sensor 200 can be increased (for details, please refer to the related descriptions of FIG. 10 , FIG. 11 and FIG. 12 ).

The vibration sensor 200 may convert vibration signals into electrical signals. As an example only, the external vibration signal may include the vibration signal when a person speaks, the vibration signal generated by the skin moving with the human body or other devices (such as speakers) close to the skin, and the vibration signal generated by the object in contact with the vibration sensor 200. Vibration signals, etc., or any combination thereof. When the vibration sensor 200 is working, the external vibration signal can be transmitted to the vibration unit 220 through the housing 210 , and in response to the vibration of the housing 210 , the mass 221 of the vibration unit 220 vibrates driven by the elastic membrane 222 . The vibration of the mass 221 and the elastic membrane 222 can cause the volume change of the acoustic cavity 224 , and the acoustic transducer 260 can convert the vibration signal into an electrical signal based on the volume change of the acoustic cavity 240 . Further, the electrical signal generated by the acoustic transducer 260 may be transmitted to an external electronic device. For example, the acoustic transducer 260 may be wired (eg, electrically connected) or wirelessly connected to an internal element (eg, a processor) of an external electronic device. The electrical signal generated by the acoustic transducer 260 can be transmitted to external electronic devices in a wired or wireless manner. In some embodiments, the external electronic device may include a mobile device, a wearable device, a virtual reality device, an augmented reality device, etc., or any combination thereof. In some embodiments, mobile devices may include smartphones, tablet computers, personal digital assistants (PDAs), gaming devices, navigation devices, etc., or any combination thereof. In some embodiments, wearable devices may include smart bracelets, earphones, hearing aids, smart helmets, smart watches, smart clothing, smart backpacks, smart accessories, etc., or any combination thereof. In some embodiments, the virtual reality device and/or the augmented reality device may include a virtual reality helmet, virtual reality glasses, virtual reality goggles, augmented reality helmet, augmented reality glasses, augmented reality goggles, etc. or any combination thereof. For example, virtual reality devices and/or augmented reality devices may include Google Glass, Oculus Rift, Hololens, Gear VR, and the like.

In some embodiments, as shown in FIG. 2 , the acoustic cavity 224 can directly communicate with the sound inlet hole 261 of the acoustic transducer 260 to form an acoustic connection between the acoustic cavity and the acoustic transducer. In some other embodiments, as shown in FIG. 5 and FIG. 6 , the acoustic cavity 224 can communicate with the sound inlet hole 261 of the acoustic transducer 260 through the through hole provided on the support frame 223 to form the acoustic cavity 224 and Acoustic connection of the acoustic transducer 260 .

In some embodiments, the cross-sectional area of the through hole on the support frame 223 may be different from the cross-sectional area of the sound inlet hole 261 of the acoustic transducer 260 . In some embodiments, the cross-sectional shape of the through hole on the support frame 223 may be different from the cross-sectional shape of the sound inlet hole 261 of the acoustic transducer 260 . In some embodiments, the cross-sectional area of the through hole on the support frame 223 and the sound inlet hole 261 of the acoustic transducer 260 may be different but the cross-sectional shape is the same. For example, the cross-sectional area of the through hole may be smaller than the cross-sectional area of the sound inlet hole 261 , and the cross-sectional shape of the through hole and the sound inlet hole are both circular. In some embodiments, the through hole on the support frame 223 and the sound inlet hole 261 of the acoustic transducer 260 can be arranged in alignment. For example, the central axis of the through hole and the central axis of the sound inlet hole 261 may completely coincide. In some embodiments, the through hole on the support frame 223 and the sound inlet hole 261 of the acoustic transducer 260 may not be aligned. For example, there may be a certain distance between the central axis of the through hole and the central axis of the sound inlet hole 261 . It should be noted that the description of a single sound inlet 261 as shown in FIG. 2 is for illustration only and is not intended to limit the scope of the present invention. It should be understood that the vibration sensor 200 may include more than one sound inlet hole 261 . For example, the vibration sensor 200 may include a plurality of sound inlet holes 261 arranged in an array.

In some embodiments, the physical connection between the mass block 221 and the elastic membrane 222, the physical connection between the support frame 223 and the elastic membrane 222, and the physical connection between the support frame 223 and the acoustic transducer 260 may include welding, gluing, etc. or any combination thereof.

In some embodiments, the cross-sectional shape of the elastic film 222 perpendicular to the thickness direction of the elastic film 222 can be rectangular, circular, hexagonal or irregular, etc. In some embodiments, the mass block 221 is perpendicular to the mass The cross-sectional shape of the block 221 in the thickness direction may be a rectangle, a circle, a hexagon, or an irregular shape. In some embodiments, the cross-sectional shape of the elastic film 222 along the direction perpendicular to the thickness of the elastic film 222 may be the same as the cross-sectional shape of the proof mass 221 along the direction perpendicular to the thickness of the proof mass 221 . In other embodiments, in some embodiments, the cross-sectional shape of the elastic film 222 along the direction perpendicular to the thickness of the elastic film 222 may be different from the cross-sectional shape of the proof mass 221 along the direction perpendicular to the thickness of the proof mass 221 .

In some embodiments, the elastic film 222 may be a material with a certain viscosity, and is respectively bonded to the mass block 221 and the support frame 223 . In some embodiments, the elastic film 222 may be a material with good elasticity (ie, prone to elastic deformation), so that the vibrating unit 220 may vibrate in response to the vibration of the casing 210 . As an example only, the material of the elastic film 222 may include foam, polydimethylsiloxane, silicone rubber, silicone rubber, etc. or any combination thereof.

In some embodiments, the thickness a of the elastic membrane 222 may be the distance between the lower surface of the elastic membrane 222 and its upper surface. In some embodiments, the thickness a of the elastic membrane 222 may be greater than a first thickness threshold (eg, 10 um). In some embodiments, the thickness a of the elastic membrane 222 may be less than a second thickness threshold (eg, 1000 um). For example, the thickness a of the elastic film 222 may be 10um˜1000um. For another example, the thickness a of the elastic film 222 may be 20 um-900 um. For another example, the thickness a of the elastic film 222 may be 30 um-800 um. For another example, the thickness a of the elastic film 222 may be 40 um-700 um. For another example, the thickness a of the elastic film 222 may be 50 um-600 um. For another example, the thickness a of the elastic film 222 may be 60 um-500 um. For another example, the thickness a of the elastic film 222 may be 70 um-400 um. Another example. For another example, the thickness a of the elastic film 222 may be 100 um-300 um.

In some embodiments, the material of the proof mass 221 may be a material with a density greater than a certain density threshold (eg, 8 g/cm 3 ). For example, the material of the mass block 221 may be metal, alloy and the like. Merely as an example, the material of the proof mass 221 may include lead, copper, silver, tin, stainless steel, etc. or any combination thereof. Since the density of the material of the mass block 221 is higher, the size is smaller. Therefore, the size of the vibration sensor 200 can be reduced to a certain extent by making the mass block 221 with a material with a density greater than a certain density threshold. In some embodiments, the material density of the mass block 221 is 8g/cm3-100g/cm3. Preferably, the material density of the mass block 221 is 8g/cm3~70g/cm3. More preferably, the material density of the mass block 221 is 8g/cm3-50g/cm3. More preferably, the material density of the mass block 221 is 8g/cm3~30g/cm3. In some embodiments, the mass block 221 and the elastic membrane 222 may be made of different materials, and then connected together by means of physical connection (eg, glue connection). In some embodiments, the mass block 221 and the elastic membrane 222 may also be made of the same material and made by integral molding.

The thickness b of the proof mass 221 may be the distance between the lower surface of the proof mass 221 and its upper surface. In some embodiments, the thickness b of the proof mass 221 may be greater than a third thickness b threshold (eg, 10 um). In some embodiments, the thickness b of the proof mass 221 may be smaller than a fourth threshold thickness b (for example, 1000 um). For example, the thickness b of the proof mass 221 may be 10um-1000um. For another example, the thickness b of the proof mass 221 may be 20um-900um. For another example, the thickness b of the proof mass 221 may be 30um-800um. For another example, the thickness b of the proof mass 221 may be 40um-700um. For another example, the thickness b of the proof mass 221 may be 50um-600um. For another example, the thickness b of the proof mass 221 may be 60um-500um. For another example, the thickness b of the proof mass 221 may be 70um-400um. For another example, the thickness b of the proof mass 221 may be 100um-300um.

In some embodiments, the support frame 223 can be made of rigid material (eg, metal, plastic, etc.) to support the elastic membrane 222 and the mass block 221 . By setting the support frame 223 as a rigid material, the rigid support frame 223 cooperates with the elastic membrane 222 and the mass block 221 to change the volume of the acoustic cavity, the rigid support frame 223 is easy to process, and a support frame 223 with a smaller thickness can be processed , so that it is more convenient to precisely limit the height of the acoustic cavity 224 (for example, the height of the acoustic cavity 224 can be made smaller), thereby improving the sensitivity of the vibration sensor 220 . As an example only, the material of the support frame 223 may include copper, stainless steel, alloy, plastic, etc. or any combination thereof.

The thickness c of the support frame 223 may be the distance between the lower surface of the support frame 223 and the upper surface thereof. In some embodiments, the thickness c of the support frame 223 may be greater than a fifth thickness c threshold (eg, 1 um). In some embodiments, the thickness c of the support frame 223 may be smaller than a sixth thickness c threshold (eg, 1000 um). For example, the thickness c of the support frame 223 may be 1um˜1000um. For another example, the thickness c of the support frame 223 may be 2 um-900 um. For another example, the thickness c of the support frame 223 may be 3um˜800um. For another example, the thickness c of the support frame 223 may be 4um˜700um. For another example, the thickness c of the support frame 223 may be 5um˜600um. For another example, the thickness c of the support frame 223 may be 6um˜500um. For another example, the thickness c of the support frame 223 may be 7um˜400um. For another example, the thickness c of the support frame 223 may be 8um˜300um. For another example, the thickness c of the support frame 223 may be 10um˜200um.

In some embodiments, the height of the acoustic cavity 224 may be equal to the thickness of the support frame 223 . In other embodiments, the height of the acoustic cavity 224 may be smaller than the thickness of the supporting frame 223 .

In some embodiments, the support frame 223 may comprise a ring structure. The support frame 223 includes a ring structure, which may be that the support frame 223 itself is a ring structure (as shown in FIG. 2 ), or that the support frame 223 includes a ring structure and a bottom plate (see FIGS. 5 and 6 and their related descriptions for details). It may be that the support frame 223 includes ring structures and other structures. When the support frame 223 includes a ring structure, the acoustic cavity 224 may be located in the hollow portion of the ring structure, and the elastic membrane 222 may be disposed above the ring structure and close the hollow portion of the ring structure to form the acoustic cavity 224 .

It can be understood that the ring structure may include a circular ring structure, a triangular ring structure, a rectangular ring structure, a hexagonal ring structure, an irregular ring structure and the like. In the present invention, the annular structure may include an inner edge and an outer edge surrounding the inner edge. The shape of the inner and outer edges of the ring can be the same. For example, the inner edge and the outer edge of the ring structure can be both circular, and the ring structure at this time is a circular ring structure; The structure is a hexagonal ring. The shape of the inner and outer edges of the annular structure can be different. For example, the inner edge of the annular structure may be circular, and the outer edge of the annular structure may be rectangular.

The cross-sectional area of the mass block 221 along the thickness direction perpendicular to the mass block 221 is greater than the cross-sectional area of the acoustic cavity 224 along the height direction perpendicular to the acoustic cavity 224, it can be understood that the mass block 221 can open the upper end of the acoustic cavity 224 (as shown in Figure 2 shown) for complete coverage. The cross-sectional area of the elastic membrane 222 along the direction perpendicular to the thickness of the elastic membrane 222 may be greater than the cross-sectional area of the acoustic cavity 224 along the height direction perpendicular to the acoustic cavity 224, it can be understood that the mass 221 and the elastic membrane 222 can connect the upper end of the acoustic cavity 224 The opening (shown in Figure 2) is fully covered. Through the design of the cross-sectional area of the mass block 221 along the thickness direction perpendicular to the mass block 221, the cross-sectional area of the mass block 221 along the thickness direction perpendicular to the mass block 221, and the cross-sectional area of the elastic film 222 along the thickness direction perpendicular to the elastic film 222 , the area where the vibration unit 220 can be deformed is the area where the elastic membrane 222 is in contact with the supporting frame 223 .

In some embodiments, the outer edge of the proof mass 221 and the outer edge of the elastic membrane 222 may both be located on the support frame 223 . As an example only, when the support frame 223 includes a ring structure, the outer edge of the mass block 221 and the outer edge of the elastic membrane 222 may both be located on the upper surface of the ring structure, or the outer edge of the mass block 221 and the outer edge of the elastic membrane 222 may be flush with the outer ring of the ring structure. In some embodiments, the outer edge of the proof mass 221 and the outer edge of the elastic membrane 222 may both be located on the outer side of the support frame 223 . For example, when the support frame 223 includes a ring structure, the outer edge of the mass block 221 and the outer edge of the elastic membrane 222 may both be located outside the outer ring of the ring structure.

In some embodiments, when the support frame 223 is a ring structure, the cross-sectional area of the mass block 221 along the thickness direction perpendicular to the mass block 221 may be larger than the cross-sectional area of the outer ring of the ring structure along the height direction perpendicular to the acoustic cavity 224, The cross-sectional area of the elastic film 222 in a direction perpendicular to the thickness of the elastic film 222 may be greater than the cross-sectional area of the outer ring of the ring structure in a direction perpendicular to the height of the acoustic cavity 224 . In some embodiments, the cross-sectional area of the mass block 221 along the direction perpendicular to the thickness of the mass block 221 may be equal to the cross-sectional area of the outer ring of the ring structure along the direction perpendicular to the height of the acoustic cavity 224, and the elastic membrane 222 is perpendicular to the elastic film 222. The cross-sectional area in the thickness direction of the ring structure may be equal to the cross-sectional area of the outer ring of the annular structure along the height direction perpendicular to the acoustic cavity 224 .

In some embodiments, the difference between the inner and outer diameters of the annular structure may be greater than a first difference threshold (eg, 1 um). In some embodiments, the difference between the inner and outer diameters of the annular structure may be less than a second difference threshold (eg, 300um). For example, the difference between the inner diameter and the outer diameter of the annular structure may be 1 um~300 um. For another example, the difference between the inner diameter and the outer diameter of the annular structure may be 5 um-200 um. For another example, the difference between the inner diameter and the outer diameter of the annular structure may be 10 um-100 um. By limiting the difference between the inner diameter and the outer diameter of the annular structure, the area of the contact area between the elastic membrane 222 and the support frame 223 can be defined. Therefore, by setting the difference between the inner diameter and the outer diameter of the annular structure within the above-mentioned range , can improve the sensitivity of the vibration sensor.

The size relationship between the cross-sectional area of the mass block 221 along the thickness direction perpendicular to the mass block 221 and the cross-sectional area of the outer ring of the annular structure along the height direction perpendicular to the acoustic cavity 224, and the elastic membrane 222 along the thickness direction perpendicular to the elastic membrane 222 The relationship between the cross-sectional area of the ring structure and the cross-sectional area of the outer ring of the ring structure along the direction perpendicular to the height of the acoustic cavity 224 can change the size of the area where the elastic membrane 222 is in contact with the support frame 223, thereby changing the area where compression deformation occurs . The size of the area can affect the equivalent stiffness of the vibration unit 220 , thereby affecting the resonant frequency of the vibration unit 220 . By adjusting the size of the area where compression deformation occurs, the equivalent stiffness of the vibration unit 220 can be adjusted, thereby adjusting the resonant frequency of the vibration unit 220 to improve the sensitivity of the vibration sensor 200 .

In some embodiments, to facilitate processing, the cross-sectional area of the proof mass 221 along the direction perpendicular to the thickness of the proof mass 221 may be substantially equal to the cross-sectional area of the elastic film 222 along the direction perpendicular to the thickness of the elastic film 222 . Through such an arrangement, the mass block 221 and the elastic membrane 222 can be cut together during processing, thereby improving production efficiency.

FIG. 4 is a frequency response graph of a vibration sensor according to some embodiments of the present invention. As shown in FIG. 4 , it shows the frequency response curve of the vibration sensor shown in FIG. 2 , where the abscissa is the vibration frequency (in Hz), and the ordinate is the sensitivity of the vibration sensor (in dB). As shown in FIG. 4 , within the vibration frequency range of 400Hz-1000Hz, the sensitivity of the vibration sensor 200 is about -16dB to -13dB. Compared with vibration sensors of other structures, the vibration sensor 200 has higher sensitivity in the same frequency range.

Fig. 5 is a schematic structural diagram of a vibration sensor according to some embodiments of the present invention, and Fig. 6 is a schematic structural diagram of a support frame shown in Fig. 5 . As shown in FIG. 5 , the vibration sensor 500 may include a housing 510 , a vibration unit 520 and an acoustic transducer 560 . The vibration unit 520 may include a mass 521 , an elastic membrane 522 and a support frame 523 . The elastic membrane 522 , the support frame 523 and the acoustic transducer 560 may form an acoustic cavity 524 . The arrangement, size, shape, etc. of the above-mentioned components in FIG. 5 may be similar to the corresponding components of the vibration sensor 200 shown in FIG. 2 . As shown in FIG. 5 and FIG. 6 , the support frame 523 of the vibration sensor 500 includes an annular structure 523-1 and a bottom plate 523-2, and the annular structure 523-1 is located on the bottom plate 523-2. The bottom plate 523 - 2 has a through hole 523 - 3 , and the through hole 523 - 3 is used to communicate with the sound inlet hole, so that the acoustic cavity 524 can be in acoustic communication with the acoustic transducer 560 . In some embodiments, the ring structure 523-1 and the bottom plate 523-2 can be integrally formed, and the ring structure 523-1 and the bottom plate 523-2 can be manufactured by stamping.

FIG. 7 is a schematic structural diagram of a vibration sensor according to some embodiments of the present invention. As shown in FIG. 7 , the vibration sensor 700 may include a housing 710 , a vibration unit 720 and an acoustic transducer 760 . The vibration unit 720 may include a mass 721 , an elastic membrane 722 , a support frame 723 and an acoustic cavity 724 . The arrangement, size, shape, etc. of the above-mentioned components in FIG. 7 may be similar to the corresponding components of the vibration sensor 500 shown in FIG. 5 . As shown in FIG. 7 , the vibration sensor 700 further includes a sealing structure 730 . The sealing structure 730 can be used to seal the gap between the elastic membrane 722 and the support frame 723 , and the sealing structure 730 can also be used to seal the gap between the support frame 723 and the acoustic transducer 760 . The sealing structure 730 can effectively prevent the acoustic cavity 724 from leaking, thereby effectively improving the sensitivity of the vibration sensor. In some embodiments, the sealing structure 730 can be disposed around the support frame 723 . In the embodiment shown in FIG. 7 , the vibration unit 720 of the vibration sensor 700 includes a bottom plate 723 - 2 and a support frame 723 of an annular structure 723 - 1 , and a sealing structure 730 can be disposed around the annular structure 723 - 1 . It can be understood that the sealing structure can also be applied to the support frame which itself is a ring structure as shown in FIG. 2 .

In some embodiments, the sealing structure 730 includes one of silicone gel material, silicone rubber material and silicone glue material or any combination thereof. In some embodiments, the Shore hardness of the sealing structure 730 is less than or equal to a predetermined hardness threshold. For example, the Shore hardness of the sealing structure 730 is less than or equal to 40HA. For another example, the Shore hardness of the sealing structure 730 is less than or equal to 25HA. In some embodiments, the Young's modulus of the sealing structure 730 may be less than or equal to a predetermined modulus value. For example, the Young's modulus of the sealing structure 730 may be less than or equal to 10 MPa. For another example, the Young's modulus of the sealing structure 730 may be less than or equal to 1 MPa. The sealing effect of the sealing structure 730 can be ensured by setting the Shore hardness and/or Young's modulus of the sealing structure 730 .

FIG. 8 is a schematic structural diagram of a vibration sensor according to some embodiments of the present invention. As shown in FIG. 8 , the vibration sensor 800 may include a housing 810 , a vibration unit 820 and an acoustic transducer 860 . The vibration unit 820 may include a mass 821 , an elastic membrane 822 and a support frame 823 . The elastic membrane 822 , the support frame 823 and the acoustic transducer 860 can form an acoustic cavity 824 . The arrangement, size, shape, etc. of the above-mentioned components in FIG. 8 may be similar to the corresponding components of the vibration sensor 200 shown in FIG. 2 . The vibration unit 820 may also include another elastic membrane 825 and another support frame 826, the other elastic membrane 825 is physically connected to the side of the mass 821 away from the elastic membrane 822, and the other support frame 826 is connected to the side of the other elastic membrane 825. The side away from the proof mass 821 is physically connected. That is to say, the other supporting frame 826 and the mass block 821 can be physically connected to both sides of the other elastic membrane 825 respectively. Another support frame 826 is physically connected to the housing 810 . Through the setting of another supporting frame 826 and another elastic film 825, the transverse sensitivity of the vibration sensor 800 can be reduced, and the longitudinal sensitivity of the vibration sensor 800 can be increased, thereby improving the direction selectivity of the sensitivity. Another elastic membrane 825 is similar to the elastic membrane 222 shown in FIG. 2 in material and arrangement, and another support frame 826 is similar in material to the support frame 223 shown in FIG. 2 . The structure of the supporting frame 823 and another supporting frame 826 may be the same or different. For example, both the support frame 823 and the other support frame 826 may be ring structures. For another example, the supporting frame 823 may include a bottom plate and an annular structure, while another supporting frame 826 may itself be an annular structure.

In some embodiments, the cross-sectional area of the other elastic film 825 along the direction perpendicular to the thickness of the other elastic film 825 may be exactly the same as the cross-sectional area of the elastic film 822 along the direction perpendicular to the thickness of the elastic film 822 . In some embodiments, the cross-sectional shape of the other elastic film 825 along the direction perpendicular to the thickness of the other elastic film 825 may be the same as the cross-sectional shape of the elastic film 822 along the direction perpendicular to the thickness of the elastic film 822, and the above-mentioned cross-sectional area may be slightly different .

In some embodiments, the other elastic membrane 825 and the elastic membrane 822 are arranged symmetrically with respect to the mass block 821 . The symmetrical arrangement can be understood as the positions of the elastic membrane 822 and the other elastic membrane 825 are respectively located on both sides of the mass block 821, and the thickness of the elastic membrane 822 is the same as that of the other elastic membrane 825, and the edge of the elastic membrane 822 is perpendicular to the elastic The cross-sectional area of the film 822 in the thickness direction is the same as the area of the cross-section of the other elastic film 825 in the direction perpendicular to the thickness of the other elastic film 825 . As shown in FIG. 8 , another elastic membrane 825 and an elastic membrane 822 can be respectively fixed on the upper and lower surfaces of the proof mass.

Fig. 9 is a schematic structural diagram of a vibration sensor according to some embodiments of the present invention. As shown in Figure 9, the vibration sensor 900 may include a vibration unit 920, a housing 910 and an acoustic transducer 960, the acoustic transducer 960 is physically connected to the housing 910, and the vibration unit 920 may be disposed in the housing 910; The vibration unit may include a mass 921 , an elastic support 922 and an acoustic cavity 923 , and both ends of the elastic support 922 are physically connected to the mass 921 and the acoustic transducer 960 respectively. In some embodiments, the elastic support member 922 may be a material with certain elasticity. For example, polymer elastic materials such as polytetrafluoroethylene and polydimethylsiloxane are included. The acoustic cavity 923 may be formed by the mass 921 , the elastic support 922 and the acoustic transducer 960 . The acoustic cavity 923 is in acoustic communication with the acoustic transducer 960 , for example, the acoustic cavity 923 is in communication with the sound inlet hole of the acoustic transducer 960 . The housing 910 is configured to generate vibration based on an external vibration signal. The mass block 921 is configured to respond to the vibration of the housing 910 so that the area where the elastic support 922 is in contact with the mass block 921 undergoes compression deformation, and the mass block 921 can vibrate so that the volume of the acoustic cavity 923 changes, and the acoustic transducer 960 generates an electrical signal based on the change in volume of the acoustic cavity 923 . Since the elastic supporting member 922 is made of elastic material, it may be difficult to process.

Compared with the vibration sensor 900 shown in FIG. 9, the vibration sensor 200 shown in FIG. 2 replaces the elastic support member 922 of the vibration sensor 900 shown in FIG. structure. The support frame 223 can be made of rigid materials, and the processing difficulty of the support frame 223 and the elastic membrane 222 is lower than that of the elastic support member 922 , so that the dimensional processing accuracy of the support frame 223 is higher. In some embodiments, the thickness of the support frame 223 may be smaller than that of the elastic support member 922 , so that the size of the acoustic cavity 224 of the vibration sensor 200 is smaller, so that the sensitivity of the vibration sensor 200 is higher. Taking the ring-shaped support frame 223 and the ring-shaped elastic support member 922 as an example, since the processing difficulty of the support frame 223 is relatively low, the cross-sectional area of the support frame 223 along the thickness direction perpendicular to it can be larger than that of the elastic support member 922 along the vertical direction. The cross-sectional area in its thickness direction is made smaller, which makes the area for compressive deformation smaller, so that the equivalent stiffness of the vibrating element 220 of the vibration sensor 200 is smaller, and the smaller equivalent stiffness means smaller The resonant frequency makes the vibration sensor 200 more sensitive. See below for a detailed description of the relationship between the area of compression deformation and the equivalent stiffness:

The overall equivalent stiffness k of the elastic region is k=(𝐸×𝑆)/ℎ, where E represents Young's modulus, S represents the area of the deformed region, and h represents the thickness of the elastic membrane 222 . Therefore, the reduction of the area of the deformation region can reduce the equivalent stiffness, thereby reducing the resonance frequency, so as to achieve the effect of improving sensitivity.

Taking the sensitivity calculation method of the vibration sensor 200 shown in FIG. 2 as an example, the sensitivity of the vibration sensor 200 can be directly proportional to the ratio of the air pressure change of the acoustic cavity 224 to the initial air pressure of the acoustic cavity 224, or directly proportional to the The ratio of the volume change of 224 to the initial volume of the acoustic cavity 224. For example, the sensitivity s of the vibration sensor 200 can be expressed as: s∝∆p/p0=∆V/V0

Wherein, Δp is the air pressure change of the acoustic cavity 224 , p0 is the initial air pressure of the acoustic cavity 224 , ΔV is the volume change of the acoustic cavity 224 , and V0 is the initial volume of the acoustic cavity 224 . In some embodiments, the acoustic transducer 260 may include at least one sound inlet, and the initial volume V0 of the acoustic cavity 224 includes the volume of the at least one sound inlet.

FIG. 10 is a schematic diagram of the vibration of the vibration sensor 200 shown in some embodiments of the present invention. As shown in FIG. The height direction can be substantially parallel to the vibration direction. Since the cross-sectional area of the mass 221 along the thickness direction perpendicular to the mass 221 (parallel to the vibration direction of the mass 221) and the cross-section of the elastic film 222 along the thickness direction perpendicular to the elastic film 222 (parallel to the vibration direction of the mass) The areas are larger than the cross-sectional area of the acoustic cavity 224 along the direction perpendicular to the height of the acoustic cavity 224 (parallel to the vibration direction of the mass), and the volume of the acoustic cavity 224 changes due to the vertical vibration of the mass 221 along its vibration direction. Since the shape of the volume change of the acoustic cavity 224 caused by the mass 221 can be approximately cylindrical (or cuboid), the volume change ∆V of the acoustic cavity 224 can be expressed as: ∆V≈∆hA0 (2),

Wherein, ∆h is the vibration amplitude of the mass block, and A0 is the cross-sectional area of the acoustic cavity 224 perpendicular to the vibration direction of the mass block.

Further, according to formulas (1) and (2), the sensitivity s of the vibration sensor 200 can be expressed as: s∝∆p/p0=∆hA0/V0 (3),

Wherein, Δp is the air pressure change of the acoustic cavity 224 , p0 is the initial air pressure of the acoustic cavity 224 , and V0 is the initial volume of the acoustic cavity 224 . In some embodiments, the acoustic transducer 260 may include at least one sound inlet 261 , and the initial volume V0 of the acoustic cavity 224 includes the volume of the at least one sound inlet 261 .

It can be seen from formula (3) that the sensitivity of the vibration sensor 200 can be proportional to the product of the vibration amplitude ∆h of the mass 221 and the cross-sectional area A0 of the acoustic cavity 224 perpendicular to the vibration direction of the mass 221 and the acoustic cavity 224 The ratio of the initial volume V0. When the resonant frequency is constant, since the sensitivity of the vibration sensor 221 is inversely proportional to the initial volume of the acoustic cavity 224 , reducing the height of the acoustic cavity 224 can improve the sensitivity of the vibration sensor 200 .

In some embodiments, the sensitivity s of the vibration sensor 200 can be made greater than a preset sensitivity threshold by designing the structural parameters of the vibration sensor 200 . For example, the resonant frequency of the vibration sensor 200 can be designed by designing the structural parameters of the vibration sensor 200 , thereby affecting the vibration amplitude Δh of the mass block 221 , so that the sensitivity of the vibration sensor 200 can meet requirements. In some embodiments, the sensitivity s of the vibration sensor 200 can be made greater than a preset sensitivity threshold by setting the initial volume V0 of the acoustic cavity 224 and/or the cross-sectional area A0 of the acoustic cavity 224 perpendicular to the vibration direction of the proof mass 221 . The preset sensitivity threshold can be adjusted by designers according to actual needs.

Fig. 11 is a schematic structural diagram of a vibration sensor according to some embodiments of the present invention. As shown in FIG. 11 , the vibration sensor 1100 may include a housing 1110 , a vibration unit 1120 and an acoustic transducer 1160 . The vibration unit 1120 may be disposed in the housing 1110 . The vibration unit 1120 may include a mass 1121 , an elastic membrane 1122 and an elastic support 1123 . The mass block 1121 and the elastic support member 1123 are physically connected to both sides of the elastic membrane 1122 respectively. For example, the mass block 1121 and the elastic support member 1123 may be respectively connected to the upper surface and the lower surface of the elastic membrane 1122 . The elastic support 1123 is physically connected with the acoustic transducer 1160 . The acoustic cavity 1124 is formed by elastic supports, elastic membranes and acoustic transducers. The acoustic cavity 1124 is in acoustic communication with the acoustic transducer 1160, for example, the acoustic cavity 1124 is in communication with the sound inlet 1161 of the acoustic transducer 1160, so that the acoustic transducer 1160 senses the volume change of the acoustic cavity 1124, and based on the acoustic The change in volume of cavity 1124 generates an electrical signal.

As shown in FIG. 11 , the mass is disposed above the acoustic cavity 1124 through the elastic membrane 1122 , and the cross-sectional area of the mass 1121 along the direction perpendicular to the thickness of the mass is smaller than the cross-sectional area of the acoustic cavity 1124 along the direction perpendicular to the height of the acoustic cavity. As an example only, the cross-sectional area of the mass 1121 along the direction perpendicular to the thickness of the proof mass 1121 is less than or equal to 2/3 of the cross-sectional area of the acoustic cavity 1124 along the direction perpendicular to the height of the acoustic cavity 1124 . For another example, the cross-sectional area of the proof mass 1121 along the direction perpendicular to the thickness of the proof mass 1121 is less than or equal to 1/3 of the cross-sectional area of the acoustic cavity 1124 along the direction perpendicular to the height of the acoustic cavity 1124 .

One of the differences between the vibration sensor 1100 shown in FIG. 11 and the vibration sensor 200 shown in FIG. 2 is that the cross-sectional area of the mass block 1121 of the vibration sensor 1100 along the thickness direction perpendicular to the mass block 1121 is related to the vibration sense. The mass block 221 of the detector 200 has different cross-sectional areas along the direction perpendicular to the thickness of the mass block 221 , and the materials of the elastic support 1123 of the vibration sensor 1100 and the support frame 223 of the vibration sensor 200 are different. Then when the mass block vibrates, the deformation of the elastic membrane is different (please refer to Fig. 10 and Fig. 11 for comparison).

As shown in Figure 11, since the cross-sectional area of the mass block 1121 perpendicular to its vibration direction is smaller than the cross-sectional area of the acoustic cavity 1124 perpendicular to the vibration direction of the mass block 1121, the vertical vibration of the mass block 1121 along its vibration direction will drive the elastic film 1122 The deformation causes the volume of the acoustic cavity 1124 to change. Since the shape of the volume change of the acoustic cavity 1124 caused by the deformation of the elastic film 1122 can be approximated as a prism, the volume change ΔV of the acoustic cavity 1124 can be expressed as: ∆V≈1/3 ∆h(A1+A0+√A1A0) （4），

Wherein, Δh is the vibration amplitude of the mass 1121 , A1 is the cross-sectional area of the mass 1121 perpendicular to its vibration direction, and A0 is the cross-sectional area of the acoustic cavity 1124 perpendicular to the vibration direction of the mass 1121 .

Further, according to formulas (1) and (2), the sensitivity s of the vibration sensor 1100 can be expressed as: s∝∆p/p0=(∆h(A1+A0+√A1A0))/3V0 (5).

＞

，即圖2所示振動感測器200的靈敏度大於圖11所示振動感測器1100的靈敏度。 From formulas (3) and (5), it can be seen that in the initial volume V0 of the acoustic cavity (for example, the acoustic cavity 224, the acoustic cavity 1124), the vibration direction perpendicular to the mass (for example, the mass 221, the mass 1121) Under the premise of a certain cross-sectional area A0 and the vibration amplitude ∆h of the mass, when the cross-sectional area A1 of the mass perpendicular to its vibration direction is smaller than the cross-sectional area A0 of the acoustic cavity perpendicular to the vibration direction of the mass, At the same resonant frequency (i.e. same ∆h),

>

, that is, the sensitivity of the vibration sensor 200 shown in FIG. 2 is greater than the sensitivity of the vibration sensor 1100 shown in FIG. 11 .

To sum up, since the volume change of the acoustic cavity (for example, the acoustic cavity 224, the acoustic cavity 1124) is larger than ∆V/V0 under the same amplitude of the mass (for example, the mass 221, the mass 1121), it can be set by setting The cross-sectional area of the mass block perpendicular to its vibration direction is greater than or equal to the cross-sectional area of the acoustic cavity perpendicular to the vibration direction of the mass block, thereby improving the sensitivity of the vibration sensor.

FIG. 12 is a frequency response graph of a vibration sensor according to some embodiments of the present invention. As shown in FIG. 12 , the solid line is the frequency response curve of the vibration sensor 200 shown in some embodiments of the present invention, and the dotted line is the frequency response curve of the vibration sensor 1100 . When the resonant frequencies are equal, the sensitivity of the vibration sensor 200 of the present invention is higher than that of the vibration sensor 1100 .

In some embodiments, the sensitivity of the vibration sensor 200 of the present invention is greater than or equal to -40dB in the frequency range of less than 1000Hz. Preferably, within the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -38dB. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -36dB. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -34dB. More preferably, the sensitivity of the vibration sensor 200 is greater than or equal to -32dB within the frequency range of less than 1000Hz. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -30 dB. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -28dB. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -27dB. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -26dB. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -24dB. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -22dB. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -20 dB. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -18 dB. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -16dB. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -14dB. More preferably, the sensitivity of the vibration sensor 200 is greater than or equal to 12dB within the frequency range of less than 1000Hz. More preferably, in the frequency range of less than 1000 Hz, the sensitivity of the vibration sensor 200 is greater than or equal to -10 dB.

The basic concept has been described above, obviously, for those with ordinary knowledge in the field, the above detailed disclosure is only an example, and does not constitute a limitation to the present invention. Although not explicitly stated herein, various modifications, improvements and amendments to the present invention may be made by those having ordinary skill in the art. Such modifications, improvements and corrections are suggested in the present invention, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of the present invention.

Meanwhile, the present invention uses specific words to describe the embodiments of the present invention. For example, "one embodiment", "an embodiment", and/or "some embodiments" means a certain feature, structure or characteristic related to at least one embodiment of the present invention. Therefore, it should be emphasized and noted that two or more references to "an embodiment" or "an embodiment" or "an alternative embodiment" in different places in this specification do not necessarily refer to the same embodiment . In addition, certain features, structures or characteristics of one or more embodiments of the present invention may be properly combined.

Furthermore, it will be understood by those skilled in the art that various aspects of the present invention may be illustrated and described in several patentable categories or situations, including any new and useful process, machine, product or combination of substances, Or any new and useful improvements to them. Correspondingly, various aspects of the present invention may be entirely executed by hardware, may be entirely executed by software (including firmware, resident software, microcode, etc.), or may be executed by a combination of hardware and software. The above hardware or software may be referred to as "data block", "module", "engine", "unit", "component" or "system". Additionally, aspects of the present invention can be embodied as a computer product comprising computer readable program code on one or more computer readable media.

In addition, unless clearly stated in the scope of the patent application, the order of processing elements and sequences, the use of numbers and letters, or the use of other names in the present invention are not used to limit the order of the flow and methods of the present invention. While the above disclosure discusses by way of example some embodiments of the invention that are presently believed to be useful, it should be understood that such details are for illustrative purposes only and that the appended claims are not limited to the disclosed embodiments, but rather, The scope of the patent application is intended to cover all modifications and equivalent combinations that conform to the spirit and scope of the embodiments of the present invention. For example, although the above-described system components can be implemented by hardware devices, they can also be implemented by only software solutions, such as installing the described system on an existing server or mobile device.

In the same way, it should be noted that in order to simplify the expression of the disclosure of the present invention and help the understanding of one or more embodiments of the invention, in the foregoing description of the embodiments of the present invention, sometimes multiple features are combined into one embodiment , drawings or descriptions thereof. However, this disclosure does not imply that the object of the invention requires more features than those mentioned in the claims. Indeed, embodiment features are less than all features of a single foregoing disclosed embodiment.

In some embodiments, numbers describing the quantity of components and attributes are used. It should be understood that such numbers used in the description of the embodiments use the modifiers "about", "approximately" or "substantially" in some examples. grooming. Unless otherwise stated, "about", "approximately" or "substantially" indicates that the stated figure allows for a variation of ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximations that may vary depending upon the desired characteristics of individual embodiments. In some embodiments, numerical parameters should take into account the specified number of significant digits and adopt the general digit reservation method. Although the numerical ranges and parameters used to demonstrate the breadth of scope in some embodiments of the invention are approximations, in specific embodiments such numerical values are set as precisely as practicable.

The entire contents of each patent, patent application, published patent application, and other material, such as articles, books, specifications, publications, documents, etc., cited in this application are hereby incorporated by reference into this application. Application history documents that are inconsistent with or conflict with the content of this application, as well as documents (currently or hereafter appended to this application) that limit the broadest scope of this application's claimed patent scope, are excluded. It should be noted that if there is any inconsistency or conflict between the descriptions, definitions, and/or terms used in the attached materials of the application and the contents of the application, the descriptions, definitions and/or terms of the application shall be Use shall prevail.

Finally, it should be understood that the embodiments described in the present invention are only intended to illustrate the principles of the embodiments of the present invention. Other modifications are also possible within the scope of the present invention. Accordingly, by way of illustration and not limitation, alternative configurations of the embodiments of the present invention may be considered consistent with the teachings of the present invention. Accordingly, the embodiments of the present invention are not limited to the embodiments of the present invention explicitly shown and described.

100: Vibration sensor 110: vibration unit 120: Acoustic transducer 130: Shell 200: vibration sensor 210: Shell 220: vibration unit 221: mass block 222: elastic film 223: support frame 224: Acoustic cavity 260: Acoustic transducer 261: sound inlet 500: Vibration sensor 510: Shell 520: vibration unit 521: mass block 522: elastic film 523: support frame 523-1: ring structure 523-2: Bottom plate 523-3: through hole 524: Acoustic cavity 560: Acoustic transducer 700: vibration sensor 710: shell 720: vibration unit 721: mass block 722: elastic film 723: support frame 723-1: ring structure 723-2: Bottom plate 724: Acoustic cavity 730: sealed structure 760:Acoustic transducer 800: vibration sensor 810: Shell 820: vibration unit 821: mass block 822: elastic film 823: support frame 824: Acoustic cavity 825: elastic film 826: support frame 860:Acoustic transducer 900: vibration sensor 910: Shell 920: vibration unit 921: mass block 922: elastic support 923: Acoustic cavity 960:Acoustic transducer 1100: vibration sensor 1110: Shell 1120: vibration unit 1121: mass block 1122: elastic film 1124: Acoustic cavity 1123: elastic support 1161: sound inlet 1160: Acoustic transducer a: The thickness of the elastic membrane b: Thickness of mass block c: Thickness of the support frame

The invention will be further illustrated by way of exemplary embodiments which will be described in detail by means of the drawings. These embodiments are not limiting, and in these embodiments, the same reference numerals represent the same structure, wherein:

[FIG. 1] is a schematic diagram of a vibration sensor according to some embodiments of the present invention;

[Fig. 2] is a schematic structural diagram of a vibration sensor according to some embodiments of the present invention;

[Figure 3] is a schematic diagram of the connection between the elastic film and the support frame according to some embodiments of the present invention;

[ FIG. 4 ] is a frequency response graph of a vibration sensor according to some embodiments of the present invention;

[Fig. 5] is a schematic structural diagram of a vibration sensor according to some embodiments of the present invention;

[Fig. 6] is a schematic structural view of the support frame of the vibration sensor shown in Fig. 5 according to the present invention;

[Fig. 7] is a schematic structural diagram of a vibration sensor according to some embodiments of the present invention;

[Fig. 8] is a schematic structural diagram of a vibration sensor according to some embodiments of the present invention;

[ FIG. 9 ] is a schematic diagram of vibration of a vibration sensor according to some embodiments of the present invention;

[Fig. 10] is a schematic structural diagram of a vibration sensor according to some embodiments of the present invention;

[FIG. 11] is a schematic structural view of a vibration sensor according to some embodiments of the present invention; and

[ FIG. 12 ] is a comparison diagram of frequency response curves of different vibration sensors according to some embodiments of the present invention.

200: vibration sensor

210: shell

220: vibration unit

221: mass block

222: elastic film

223: support frame

224: Acoustic cavity

260: Acoustic transducer

261: sound inlet

a: The thickness of the elastic membrane

b: Thickness of mass block

c: Thickness of the support frame

Claims (10)

A vibration sensor comprising: A vibration unit, a housing and an acoustic transducer, the acoustic transducer is physically connected to the housing, and the vibration unit is arranged in the housing; The vibration unit includes a mass block, an elastic membrane and a support frame, the mass block and the support frame are respectively physically connected to both sides of the elastic membrane, and the support frame is physically connected to the acoustic transducer; The support frame, the elastic membrane and the acoustic transducer form an acoustic cavity, and the acoustic cavity is in acoustic communication with the acoustic transducer. Such as the vibration sensor of claim 1, wherein, The cross-sectional area of the mass block along the direction perpendicular to the thickness of the mass block is greater than the cross-sectional area of the acoustic cavity along the height direction perpendicular to the acoustic cavity, and the elastic film is vertical to the thickness direction of the elastic film The cross-sectional area is greater than the cross-sectional area of the acoustic cavity along the height direction perpendicular to the acoustic cavity; the housing is configured to vibrate based on an external vibration signal; The mass is configured to compressively deform an area where the elastic membrane is in contact with the support frame in response to the vibration of the housing, and the elastic membrane is capable of vibrating so that the acoustic cavity change in volume; The acoustic transducer generates an electrical signal based on a change in volume of the acoustic cavity. Such as the vibration sensor of claim 2, wherein, The support frame includes a ring structure. Such as the vibration sensor of claim 3, wherein, The cross-sectional area of the mass block along the thickness direction perpendicular to the mass block is greater than or equal to the cross-sectional area of the outer ring of the annular structure along the height direction perpendicular to the acoustic cavity, and the elastic membrane is perpendicular to the The cross-sectional area of the elastic membrane in the thickness direction is greater than or equal to the cross-sectional area of the outer ring of the annular structure along the height direction perpendicular to the acoustic cavity. Such as the vibration sensor of claim 4, wherein, A cross-sectional area of the mass block along a direction perpendicular to the thickness of the mass block is equal to a cross-sectional area of the elastic film along a direction perpendicular to the thickness of the elastic film. Such as the vibration sensor of claim 1, wherein, The support frame is rigid material. Such as the vibration sensor of claim 3, wherein, The support frame also includes a bottom plate, the annular structure is located on the bottom plate, the annular structure is integrally formed with the bottom plate, and the bottom plate has a through hole; The acoustic transducer is provided with a sound inlet; The through hole communicates with the sound inlet hole. Such as the vibration sensor of claim 3, wherein, The thickness of the support frame is 1um to 1000um; and / or, The difference between the inner diameter and the outer diameter of the annular structure is 1um to 300um. Such as the vibration sensor of claim 1, wherein, The thickness of the elastic film is 10um to 1000um; and / or, The thickness of the mass block is 10um to 1000um. Such as the vibration sensor of claim 1, wherein, The vibration unit also includes another elastic film and another support frame, the other elastic film is physically connected to the side of the mass block away from the elastic film, the other support frame is connected to the other A side of the elastic membrane away from the mass block is physically connected, and the other support frame is physically connected to the housing.

Images