TW202233400A - Pressing method and pressing equipment - Google Patents

Abstract

The invention provides a pressing method and pressing equipment. The pressing method includes: providing a component with a die on a substrate and covered with a heat sink as a pressed object; providing an upper mold device, the upper mold device cooperating with the lower molds below to press together the object to be pressed; the upper mold device includes a driving module that provides a driving force and a pressing module that is provided with a compression mold, and the driving force makes the compression mold press the pressed object. The driving force is measured by a load-measuring unit, thereby improving the quality of the pressing process.

Description

Pressing method and pressing equipment

The present invention relates to a lamination method and lamination equipment, in particular to a lamination method and lamination equipment for laminating a pressed object with a die on a substrate and covered with a heat sink.

Press, in the general chip packaging process, adhesive is often applied on a substrate, and then a die is attached to the substrate, and a layer of heat dissipation glue must be applied on the die, and then a heat sink is attached to the substrate. It is implanted on the heat dissipation glue and covers the die and the substrate; recently, the heat dissipation glue has been gradually replaced by a heat dissipation glue pad with heat dissipation function, but in the process of implanting the heat sink All the same, the heat sink on the base plate must be pressed together, so that the heat sink can be firmly positioned on the base plate and covered on the heat dissipation pad.

In the prior art, an upper mold cooperates with a lower mold to jointly press an assembly with chips on a substrate and covered with a heat sink. Although the pressing effect of the pressed object formed on the assembly can be achieved, it is difficult to control the pressure. The quality of the press fit is difficult to control because the force of the pressing force is easy to vary with the stability of the output of the driving device. In order to effectively control the quality of the press fit, it is necessary to develop a suitable mechanism and measurement method for mass production. The quality is stable in the automatic pressing operation.

In other words, the purpose of the present invention is to provide a pressing method that solves at least one disadvantage of the prior art.

Another object of the present invention is to provide a pressing device that solves at least one disadvantage of the prior art.

Another object of the present invention is to provide a pressing device for performing the pressing method.

The pressing method according to the purpose of the present invention includes: providing a component with a die on a substrate and covered with a heat sink as a pressed object; providing an upper mold device, the upper mold device cooperates with a lower mold to jointly press the receiving device Pressing object; the upper mold device includes a driving module that provides a driving force and a pressing module that is provided with a pressing die, and the driving force causes the pressing die to press against the pressed object: the driving force is A load-weight measuring unit measures

According to another object of the present invention, the pressing equipment includes: a driving module whose driving force is measured by a load-measuring unit and a pressing die unit provided with a pressing die are co-located on an upper die device, the upper die device A pressing object is pressed together with the lower die; a plurality of the pressing mould units are arranged on a mould seat of a pressing module; the driving force makes the pressing mould press against the pressed object.

According to another object of the present invention, the pressing equipment includes: performing the pressing method as described above.

In the pressing method and the pressing device according to the embodiment of the present invention, since the driving force of the driving module that presses the pressed object against the pressing force is measured by the weight measuring unit, the driving force can be grasped. It can improve the quality of the pressing process.

The embodiment of the present invention is described by taking an upper mold device of a heat sink pressing device for a heat sink planting process as an example. In practice, in use, a lower mold F is used to jointly press a pressure object E. The pressure Item E can be a component in which a chip is carried on a substrate in the process of planting a heat sink in a semiconductor process, and a layer of heat-dissipating glue is applied or a heat-dissipating glue pad is adhered and then a heat-dissipating fin is attached. The following is only the upper mold device of the present invention. Parts are examples for illustration.

Please refer to FIGS. 1 and 2. In the embodiment of the present invention, the upper mold device is provided with:

A driving module AB is provided with a rectangular fixing seat A, and a plurality of driving elements B formed by, for example, pneumatic cylinders propelled by gas and arranged in a matrix are arranged under the fixing seat A, and each driving element B is provided with The driving rod B1 which can be independently driven for up and down displacement;

A pressing module CD is located below the driving module AB, and is provided with a rectangular die base C. The die base C is provided with a plurality of pressing die units D arranged in a matrix and corresponding to the driving member B above. The two short sides of the driving module AB are provided with a plurality of rollers A1 spaced apart, and the two short sides of the pressing module CD are provided with a plurality of rollers C1 spaced apart; When the bottom end of the driving rod B1 of the component B is not driven, the top ends of the pressing mould units D on the pressing module CD corresponding to the lower part are in a separated state and maintain a distance d; A rectangular mold frame C2 is arranged below the mold base C.

Please refer to FIG. 3 , since the structures of the stamping units D are the same, one of the stamping units D will be described next as a representative. The die pressing unit D is provided with a pressing rod assembly D1 and a fixing component D2, and a load measuring unit D3 is provided on the top of the upper end of the die pressing unit D. As shown in FIG.

Please refer to Figures 3, 4, and 5. The pressing rod assembly D1 is provided with a pressing rod D11, the upper end of the pressing rod D11 is provided with the load weighing unit D3, and the lower end is provided with a pressing die D12; wherein:

The pressure rod D11 is in the shape of a hollow tube and is provided with a pipe D111 in the center of the pipe. The upper end of the pipe D111 is located at the lower end of the load weighing unit D3. A chamber D115 is formed by a fixing seat D114 at the lower end of the pressing rod D11 and is located between the fixing seat D114 and the pressing die D12, and the other side of the pipe wall D112 opposite to the slot D113 is provided with an air hole D116 that communicates with the outside; The load weighing unit D3 is provided with a cover D31 covering the top of the upper end of the pressing rod D11. The upper end of a load weighing device D32 in the cover D31 is provided with a pressing contact D33 protruding out of the cover D31 , the lower end of the load weighing device D32 is provided with a bottom pad D34 embedded in the upper port of the pipe D111 of the pressing rod D11; The load weighing unit D3 on the die unit D acts, and the driving force indirectly drives the press die D12 under the pressing rod D11 of the die unit D to the object under pressure through the load weighing unit D3. E is pressed against;

The stamper D12 is made of a non-metallic material with pressure resistance and high temperature resistance, such as polyetherimide (PEI, Polyetherimide). When the pressing object E is pressed together, the heating from the lower die F conducts the pressing object E to the temperature of the pressing die D12. The temperature sensing element D121 is linearly passed through the pipe D111 of the pressing rod D11 and passes through the groove. The port D113 extends to the outside, the die D12 around the temperature sensing element D121 is provided with a plurality of air passages D122, one end of each air passage D122 communicates with the chamber D115 of the fixing seat D114 at the lower end of the pressing rod D11, The other end communicates with the area below the die D12, and the gas can be passed from the air hole D116 of the pressure rod D11 to the chamber D115 through the pipe D111, and then diffused from the chamber D115 to the air passages D122 to the die D12 The pressure object E below is blown against the pressure object E to assist the stamper D12 to be smoothly separated from the pressure object E when the pressing die D12 is about to rise.

The fixing assembly D2 is provided with a first positioning unit D21 for maintaining the horizontal and radial positioning of the pressing rod D11 and for pivoting the pressing rod D11 up and down for displacement, and a second positioning unit for maintaining the vertical and longitudinal positioning of the pressing rod D11 D22; of which,

The first positioning unit D21 is provided with a shaft sleeve D211 and a pivot seat D212; the shaft sleeve D211 is provided with a shaft hole D213 for the upward and downward displacement of the pressing rod D11 to pivot in a vertical Z-axis direction, and is mounted on the shaft sleeve The upper end of D211 is provided with a flange portion D214 with a circular radial sectional diameter larger than the outer diameter of the bushing D211; the pivot seat D212 is provided with a pivot hole D215 for the pivoting of the bushing D211, and the lower end of the pivot seat D212 is provided with a pivot hole D215. A flange seat D216 extending radially outward from the pivot seat D212 is provided; the radial width of the flange seat D216 is larger than the radial width of the pivot seat D212. The second positioning unit D22 is provided with a first positioning seat D221 and a second positioning seat D222; the first positioning seat D221 is located adjacent to the load weighing unit D3 below, and is provided with a first positioning seat D221 which is two separate components from each other A fastener D2211 and a second fastener D2212 are opposite to each other and are screwed against the outer diameter of the pressure rod D11 to clamp and fasten, wherein the first fastener D2211 is provided with an air guide hole D2213 corresponding to the The air hole D116 is communicated with it, and positive pressure gas can be input through the air hole D2213 to enter the pipe D111 of the pressure rod D11 through the air hole D116; the second positioning seat D222 is located below the first positioning seat D221, and is provided with A first supporting frame D2221 and a second supporting frame D2222 for separating two components, the first supporting frame D2221 and the second supporting frame D2222 are opposite to each other and radially surround a displacement interval D2223 outside the outer diameter of the pressing rod D11 In addition, the upper end of the first support frame D2221 forms an arc-shaped section D2224 to enclose a part of the outer diameter of the displacement section D2223, and the lower end is fixed to the protrusion of the pivot seat D212 of the first positioning unit D21 On the edge seat D216; the lower end of the second support frame D2222 is fixed on the flange seat D216 of the pivot seat D212 of the first positioning unit D21, and a shaft pin D2225 that can be moved up and down is protruding from the upper end, the shaft The upper end of the pin D2225 is used for fixing the bottom of the second fastener D2212.

An elastic element D23 composed of a spring is disposed between the first positioning unit D21 and the second positioning unit D22. The elastic element D23 is sleeved outside the pressing rod D11 and is located in the displacement range D2223. The lower end of the elastic element D23 abuts against On the upper surface of the flange portion D214 of the shaft sleeve D211 of the first positioning unit D21, the upper end abuts against the lower bottom edge of the first fastener D2211 of the second positioning unit D22;

The pressing rod D11 is linked with the first fastener D2211 and the shaft pin D2225 of the second positioning unit D22. When moving up and down, the shaft pin D2225 keeps the pressing rod D11 from rotating, and the elastic element D23 provides compression When the driving force driving the pressing rod D11 to move downward is eliminated, the first fastener D2211 of the second positioning unit D22 on the top will move up in conjunction with the pressing rod D11 to return to its original position.

Both sides of the flange portion D214 of the shaft sleeve D211 of the first positioning unit D21 form mutually parallel flange opposite sides D217; The flange opposite side D217 corresponds to the outer diameter opposite side D218 and is aligned up and down; the first positioning seat D221 and the second positioning seat D222 of the second positioning unit D22 are respectively clamped on the flange. The opposite sides D217 and the outer diameter opposite sides D218 are superimposed on two sides, so as to limit the relative pivoting of the shaft sleeve D211 and the pivot seat D212.

The fixing component D2 is embedded in a circular groove-shaped positioning portion C3 formed on the upper surface of the die base C with the flange base D216 of the pivot base D212 of the first positioning unit D21 , and has an approximately rectangular shape. A frame-shaped fixing member D4 is sleeved on the outside of the second positioning seat D222 of the second positioning unit D22 and the shaft sleeve D211 of the first positioning unit D21, and is screwed to the upper surface of the mold base C, the The fixing member D4 is in the shape of a sheet, and is provided with a hollow-shaped set of holes D41 with an inner diameter smaller than the outer diameter of the flange seat D216 of the pivot base D212, so that the fixing member D4 is placed against the inner edge of the set of holes D41. Simultaneously press on the upper surface of the flange seat D216, and restrict the pivot seat D212 in the positioning portion C3 of the mold seat C;

The bottom C31 of the positioning portion C3 is provided with a circular hollow through hole C32, the bottom C31 is cushioned with an annular gasket D5, and the center of the gasket D5 is provided with the through hole C32 corresponding to the bottom C31 of the positioning portion C3 and a hollow hole D51 of approximately the same size, the through hole C32 and the hollow hole D51 are larger than the outer diameter of the shaft sleeve D211 of the first positioning unit D21, and the shaft sleeve D211 is inserted therein; the lower end of the pressure rod D11 The fixed seat D114 and the fixed die D12 are accommodated in a mold chamber C21 separated from the mold frame C2 below the mold seat C, and a square opening C22 is formed below the mold chamber C21. Then it communicates with the through hole C32; the press die D12 can be moved up and down in the die chamber C21 by the press rod D11 to move up and down.

The inner diameter part of the sleeve hole D41 of the fixing member D4 is larger than the outer diameter of the bushing D211, and the inner edge of the fixing member D4 is formed with four radially outwardly concave hollowed-out micro-adjustments distributed in a 90-degree cross. In section D42, each fine-tuning section D42 is provided with a fine-tuning member D6 composed of headless screws, and the fine-tuning member D6 is screwed on the upper surface of the flange seat D216 of the pivot seat D212 of the first positioning unit D21, and downwards The first positioning unit D21 can be linked with the second positioning unit D22 and the The pressing die D12 at the lower end of the pressing rod D11 is inclined to one side to adjust the level of the bottom surface of the pressing die D12; since the die base C is made of aluminum, in order to prevent the bottom of the positioning portion C3 from being dented and damaged due to long-term screwing Therefore, the iron gasket D5 is provided. In other embodiments of the present invention, the gasket D5 can also be omitted.

In the pressing method and the pressing device according to the embodiment of the present invention, since the driving force of the driving module AB, which presses the pressing object E against the pressing die D12, is measured by the load weight measuring unit D3, the driving force is Gaining mastery can improve the quality of the lamination process.

However, the above are only preferred embodiments of the present invention, and should not limit the scope of the present invention, that is, any simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the contents of the description of the invention, All still fall within the scope of the patent of the present invention.

AB: drive module A: Fixed seat A1: Roller B: Driver B1: Drive lever CD: Press-fit module C: mold base C1: Roller C2: Mold frame C21: Mold room C22: Opening C3: Positioning part C31: Bottom C32: Through hole D: Stamping unit D1: Pressure rod assembly D11: Pressure lever D111: Pipes D112: Pipe Wall D113: Notch D114: Fixed seat D115: Compartment room D116: Air holes D12: Stamping D121: Temperature sensor D122: Airway D2: Fixed components D21: The first positioning unit D211: Bushing D212: Pivot seat D213: Shaft hole D214: Flange D215: pivot hole D216: Flange seat D217: Flange-to-edge D218: Outside diameter opposite side D22: Second positioning unit D221: The first positioning seat D2211: The first fastener D2212: Second Fastener D2213: Air guide hole D222: Second positioning seat D2221: The first armrest D2222: Second armrest D2223: Displacement interval D2224: Arc section D2225: Axle pin D23: Elastic element D3: Load weighing unit D31: Cover D32: Load Weigher D33: Press contact D34: Bottom pad D4: Fixtures D41: Set of holes D42: Fine-tuning interval D5: Gasket D51: Hole D6: Trimming d: spacing E: Pressurized F: Lower die

Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein: Fig. 1 is a perspective view illustrating an upper die device in an embodiment of the present invention; Figure 2 is a side view illustrating the upper die assembly; Fig. 3 is a perspective view illustrating one of several stamping units in this embodiment; Figure 4 is a side view illustrating one of said die units; and Fig. 5 is a cross-sectional view illustrating one of the die units.

B1: Drive lever

C: mold base

C2: Mold frame

C21: Mold room

C22: Opening

C3: Positioning part

C31: Bottom

C32: Through hole

D11: Pressure lever

D111: Pipes

D112: Pipe Wall

D113: Notch

D114: Fixed seat

D115: Compartment room

D116: Air holes

D12: Stamping

D121: Temperature sensor

D122: Airway

D21: The first positioning unit

D211: Bushing

D212: Pivot seat

D213: Shaft hole

D214: Flange

D215: pivot hole

D216: Flange seat

D2211: The first fastener

D2212: Second Fastener

D2213: Air guide hole

D2221: The first armrest

D2222: Second armrest

D2223: Displacement interval

D2225: Axle pin

D23: Elastic element

D31: Cover

D32: Load Weigher

D33: Press contact

D34: Bottom pad

D4: Fixtures

D41: Set of holes

D5: Gasket

D51: Hole

D6: Trimming

E: Pressurized

F: Lower die

Claims (16)

A pressing method comprising: Provide a set of substrates carrying a die and covered with a heat sink pieces as objects under pressure; An upper mold device is provided, and the upper mold device cooperates with the lower mold to press the pressed object together; The upper mold device includes a driving module that provides a driving force and a pressing module that is provided with a pressing die, and the driving force makes the pressing die press against the pressed object: The driving force is measured by a load-weight measuring unit. The pressing method as claimed in claim 1, wherein the pressing mold is subjected to a temperature sensing element to sense the temperature of the pressing object and the temperature of the pressing mold conducted by heating from the lower mold. The pressing method according to claim 1, wherein the pressurized object under the die is blown against the pressurized object to assist the pressurized die to be smoothly separated from the pressurized object when the press-fit is about to rise. The pressing method of claim 1, wherein the pressing module maintains the horizontal radial positioning with a first positioning unit, and maintains the vertical and longitudinal positioning of the pressing rod with a second positioning unit. The pressing method according to claim 1, wherein the pressing module is provided with a pressing rod assembly, the pressing rod assembly is provided with a pressing rod, and the lower end of the pressing rod is provided with the pressing mold; the upper mold device is provided for driving the pressing A restoring force when the driving force of the rod downward movement is eliminated. The pressing method according to claim 1, wherein the bottom surface of the die is adjusted by adjusting the screw contact degree of the two opposite fine adjustment pieces. A pressing device, comprising: a driving module whose driving force is measured by a load-weight measuring unit and a pressing moulding unit provided with a pressing mould, which are co-located on an upper moulding device, and the upper moulding device cooperates with the lower moulding to press together A pressed object is combined; a plurality of the pressing mold units are arranged on a mold seat of a pressing module; the driving force makes the pressing mold press against the pressed object. The pressing device according to claim 7, wherein the pressing mold is provided with a temperature sensing element, and the temperature sensing element extends from a slot to the outside through a pipe of the pressing rod with a sensing line. The pressing device according to claim 7, wherein the pressing die unit is provided with a pressing rod assembly, the pressing rod assembly is provided with a pressing rod, and the load weighing unit is arranged above the pressing rod. The pressing device according to claim 7, wherein the pressing die unit is provided with a pressing rod assembly, the pressing rod assembly is provided with a pressing rod, and the lower end of the pressing rod is provided with the pressing mold. The pressing device of claim 10, wherein the pressing rod is provided with a pipe, and the pipe is provided with a notch communicating with the outside. The pressing equipment according to claim 10, wherein the pressing rod is provided with a pipe, a pipe wall is provided with an air hole communicating with the outside, the lower end of the pipe is connected to the lower end of the pressing rod, and a fixed seat is formed between the fixed seat and the An accommodating chamber between the compression molds, the compression mold is provided with an air channel, one end of the air channel communicates with the chamber, and the other end communicates with the area below the compression mold. The pressing equipment according to claim 10, wherein the load measuring unit is provided with a cover sleeve covering the top of the upper end of the pressing rod, and the upper end of the load weight measuring device in the cover sleeve is provided with a protrusion protruding outside the cover sleeve A pressure contact piece is provided, the lower end of the load weighing device is provided with a bottom pad embedded in the upper port of the pipe of the pressure rod. The pressing device of claim 10, wherein the upper die device is provided with an elastic element that is acted on by the pressing rod when the driving force driving the pressing rod to move downward is eliminated. The pressing device according to claim 7, wherein a plurality of rollers spaced apart are provided on both sides of the driving module or one of the pressing modules. A press-fitting device for performing the press-fitting method according to any one of claims 1 to 6.

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