TWI809884B - Pressing equipment - Google Patents

Abstract

The present invention provides a pressing device, comprising: an upper mold device that cooperates with the lower mold below to press together a pressed object; There is a pressing rod assembly, the pressing rod assembly is provided with a pressing rod, and a pressing die is provided at the lower end of the pressing rod; the pressing die unit is provided with a fixing assembly located on a mold base, and the fixing assembly is provided with a horizontal diameter for maintaining the pressing rod. One of a first positioning unit for positioning in the direction or a second positioning unit for maintaining the vertical and longitudinal positioning of the pressing bar; thereby improving the quality of the pressing process.

Description

Pressing equipment

The invention relates to a pressing device, especially a pressing device for pressing a pressed object with a crystal grain on a substrate and a cooling fin.

Press, in the general chip packaging process, glue is often coated on a substrate first, and then a die is adhered to the substrate, and a layer of heat dissipation glue must be coated on the top of the die, and then a heat sink is adhered to The method is planted on the heat dissipation glue and covered above the die and the substrate; recently, the heat dissipation glue has been gradually replaced by a heat dissipation pad with heat dissipation function, but in the process of planting the heat sink All the same, the heat sink on the substrate must be press-fitted so that the heat sink can be firmly positioned above the substrate and covered on the heat dissipation pad.

In the previous technical example, an upper mold was used to cooperate with the lower mold to jointly press the component on the substrate with the crystal grains and complete the covering of the heat sink. Although the pressing effect of the pressed object formed by the component can be achieved, the Because the upper mold is fixed and the lower mold is driven upward, and the upper mold is equipped with a counterweight as a pressure unit to control the pressing pressure, the upper and lower molds that can move up and down are subject to displacement frictional resistance, adding Under the influence of the stability of the output force of the upper and lower die drive devices, it is difficult to control the quality of the pressing, and the positioning balance of the die itself also affects the force on different parts of the surface of the pressed object, in order to effectively control the quality of the pressing , it is necessary to develop and improve the quality in order to stabilize the quality in the automatic pressing operation of the mass production process.

Therefore, the object of the present invention is to provide a pressing device which solves at least one shortcoming of the prior art.

The pressing equipment according to the object of the present invention includes: an upper mold device that cooperates with the lower mold below to press together a pressed object, the upper mold device is provided with a pressing unit that is subjected to a driving force, and the pressing unit A pressing rod assembly is provided, the pressing rod assembly is provided with a pressing rod, and a pressing die is provided at the lower end of the pressing rod; the pressing die unit is provided with a fixing assembly located on a die base, and the fixing assembly is provided with a One of a first positioning unit for radial positioning or a second positioning unit for maintaining vertical and longitudinal positioning of the pressing rod.

In the pressing equipment of the embodiment of the present invention, since the die unit is provided with a fixing assembly located on a mold base, the fixing assembly is provided with a first positioning unit for maintaining the horizontal and radial positioning of the pressing rod to maintain the pressing rod One of the second positioning units for vertical and longitudinal positioning, so the die under the pressure rod can be stabilized and maintained in horizontal radial positioning or vertical and longitudinal positioning, so that the positioning of the die itself is balanced and the surface of the pressed object is different The force of the parts is balanced, thereby improving the quality of the pressing process.

In the embodiment of the present invention, an upper mold device of a heat sink pressing equipment in a heat sink manufacturing process is taken as an example for illustration. In practice, when in use, it cooperates with the lower die F below to press together a pressed object E. The pressed Object E can be a submount in the process of planting heat sinks in the semiconductor manufacturing process, on which a die is mounted and coated with a layer of heat dissipation glue, or a heat dissipation pad is attached and then covered with a heat sink. The following is only the upper mold device of the present invention. The part is described for the embodiment.

Please refer to Fig. 1, 2, in the embodiment of the present invention, this upper mold device is provided with:

A driving module AB is provided with a rectangular fixed seat A, and under the fixed seat A, there are a plurality of driving parts B formed of, for example, cylinders and arranged in a matrix. Drive rod B1 for up and down displacement;

A pressing module CD is located below the driving module AB, and is provided with a rectangular mold base C, on which a plurality of compression mold units D arranged in a matrix and respectively corresponding to the upper driving part B are arranged on the mold base C. The two short sides of the drive module AB are provided with a plurality of rollers A1 at intervals, and the two short sides of the pressing module CD are provided with a plurality of rollers C1 at intervals; each drive of the drive module AB When the bottom end of the driving rod B1 of part B is not being driven, the top ends of the pressing die units D on the pressing die sets CD corresponding to the lower parts are separated and keep a distance d; A rectangular mold frame C2 is arranged below the mold base C.

Please refer to FIG. 3 , since the structures of the die units D are the same, one of the die units D will be described as a representative. The die unit D is provided with a pressing rod assembly D1 and a fixing assembly D2, and a load measuring unit D3 is arranged on the upper end of the die unit D.

Please refer to Figures 3, 4, and 5, the compression rod assembly D1 is provided with a compression rod D11, the upper end of the compression rod D11 is provided with the load measuring unit D3, and the lower end is provided with a compression mold D12; wherein:

The pressure rod D11 is in the shape of a hollow tube and is provided with a pipe D111 in the center of the pipe. The upper end of the pipe D111 is located at the lower end of the load measuring unit D3. A fixed seat D114 at the lower end of the pressure rod D11 forms a chamber D115 between the fixed seat D114 and the die D12, and the tube wall D112 is provided with an air hole D116 communicating with the outside on the other side of the notch D113; The load measuring unit D3 is provided with a cover D31 covering the top of the upper end of the pressure rod D11, and the upper end of a load measuring device D32 inside the cover D31 is provided with a pressure contact piece D33 protruding from the cover D31. The lower end of the load measuring device D32 is provided with a bottom pad D34 embedded in the upper port of the pipe D111 of the pressure rod D11; The load measuring unit D3 on the die unit D acts, and the driving force indirectly drives the die D12 below the pressing rod D11 of the die unit D to the pressed object through the linkage of the load measuring unit D3 E for compression;

The die D12 is made of a non-metallic material with pressure and high temperature resistance, such as polyetherimide (PEI, Polyetherimide), which is provided with a temperature sensing element D121 for sensing the contact between the die D12 and the subject. When the pressing object E is pressed together, the temperature from the heating of the lower mold F is transmitted through the pressing object E to the pressing die D12, and the temperature sensing part D121 is linearly passed through the pipe D111 of the pressing rod D11 and from the groove The port D113 extends to the outside, and the die D12 around the temperature sensing element D121 is provided with a plurality of air passages D122, one end of each air passage D122 communicates with the chamber D115 of the fixing seat D114 at the lower end of the pressing rod D11, The other end communicates with the area below the die D12, and the gas can be passed through the air hole D116 of the pressure rod D11 to the chamber D115 through the pipe D111, and diffused from the chamber D115 to each of the air passages D122 to the die D12. Gas is blown against the object under pressure E to assist the die D12 to separate from the object under pressure E smoothly when it is about to rise after pressing.

The fixing assembly D2 is provided with a first positioning unit D21 which maintains the horizontal and radial positioning of the pressure rod D11 and is pivotally arranged for the upward and downward displacement of the pressure rod D11, and a second positioning unit which maintains the vertical and longitudinal positioning of the pressure rod D11 D22; where,

The first positioning unit D21 is provided with a shaft sleeve D211 and a pivot seat D212; the shaft sleeve D211 is provided with a shaft hole D213 for the upper and lower displacement of the pressure rod D11 to be pivoted vertically in the Z axis, and on the shaft sleeve The upper end of D211 is provided with a flange portion D214 with a circular radial cross-sectional diameter larger than the outer diameter of the shaft sleeve D211; the pivot seat D212 is provided with a pivot hole D215 for the shaft sleeve D211 to pivot, and at the lower end of the pivot seat D212 There is a flange seat D216 extending radially outward from the pivot seat D212; the radial width of the flange seat D216 is larger than the radial width of the pivot seat D212. The second positioning unit D22 is provided with a first positioning seat D221 and a second positioning seat D222; the first positioning seat D221 is located adjacent to the lower part of the load measuring unit D3, and is provided with a first positioning seat D221 which is separated from each other. A fastener D2211 and a second fastener D2212 face each other in the radial direction and are fastened to the outer diameter of the pressure rod D11 by clamping and fastening, wherein the first fastener D2211 is provided with an air guide hole D2213 corresponding to the pressure rod D11. The air hole D116 communicates with it, and the positive pressure gas can be input through the air hole D2213 and enter the pipeline D111 of the pressure rod D11 through the air hole D116; the second positioning seat D222 is located below the first positioning seat D221, and is provided with mutual A first supporting frame D2221 and a second supporting frame D2222 are used to separate the two components. The first supporting frame D2221 and the second supporting frame D2222 face each other and surround a displacement area D2223 outside the outer diameter of the pressing rod D11 in the radial direction. In addition, the upper end of the first support frame D2221 forms an arc-shaped section D2224 to enclose a part of the outer ring diameter of the displacement section D2223, and the lower end is fixed to the protrusion of the pivot seat D212 of the first positioning unit D21. On the edge seat D216; the lower end of the second support frame D2222 is fixed on the flange seat D216 of the pivot seat D212 of the first positioning unit D21, and a shaft pin D2225 protruding from the upper end can be used for vertical displacement. The pin D2225 is used for fixing the bottom of the second fastener D2212 with its upper end surface.

An elastic element D23 composed of a spring is arranged between the first positioning unit D21 and the second positioning unit D22. The elastic element D23 is sleeved outside the pressing rod D11 and is located in the displacement zone D2223. The lower end of the elastic element D23 abuts against On the upper surface of the flange portion D214 of the sleeve D211 of the first positioning unit D21, the upper end abuts against the lower bottom edge of the first fastener D2211 of the second positioning unit D22;

The pressing rod D11 links the first fastener D2211 and the pivot pin D2225 of the second positioning unit D22. When moving up and down, the pivot pin D2225 prevents the pressing rod D11 from rotating, and the elastic element D23 provides compression When the restoring force for driving the pressing rod D11 to move down is eliminated, the first fastener D2211 of the second positioning unit D22 that pushes up moves up the pressing rod D11 to return to its original position.

Both sides of the flange part D214 of the bushing D211 of the first positioning unit D21 form mutually parallel flange opposite sides D217; Said that the flange opposite side D217 corresponds to the outer diameter opposite side D218 and is stacked and aligned up and down; the first positioning seat D221 and the second positioning seat D222 of the second positioning unit D22 are respectively clamped on the flange Two sides of the opposite side D217 and the outer diameter opposite side D218 are overlapped to limit the relative pivoting of the sleeve D211 and the pivot seat D212 .

The fixing assembly D2 is embedded in a circular groove-shaped positioning part C3 recessed on the upper surface of the mold base C by the flange seat D216 of the pivot seat D212 of the first positioning unit D21, and is approximately rectangular. A frame-shaped fixing piece D4 is set on the second positioning seat D222 of the second positioning unit D22 and the shaft sleeve D211 of the first positioning unit D21, and is screwed on the upper surface of the mold base C. The fixing part D4 is sheet-shaped, and it is provided with a set of hollow holes D41 whose inner diameter is smaller than the outer diameter of the flange seat D216 of the pivot seat D212, so that the fixing part D4 is close to the inner edge of the set of holes D41 Simultaneously press on the upper surface of the flange seat D216, and limit the pivot seat D212 in the positioning part C3 of the mold seat C;

The bottom C31 of the positioning part C3 is provided with a circular hollow through hole C32, and the bottom C31 is provided with a circular pad D5, and the center of the pad D5 corresponds to the through hole C32 of the bottom C31 of the positioning part C3. And a hollow hole D51 of approximately the same size, the through hole C32 and the hollow hole D51 are larger than the outer diameter of the shaft sleeve D211 of the first positioning unit D21, and the shaft sleeve D211 is inserted therein; the lower end of the pressure rod D11 The fixed seat D114 and the fixed die D12 are accommodated in a mold chamber C21 separated in the mold frame C2 below the mold base C. The lower part of the mold chamber C21 has a square opening C22, and the upper part Then it communicates with the through hole C32; the die D12 can be moved up and down in the die chamber C21 in conjunction with the pressure rod D11.

The inner diameter of the sleeve hole D41 of the fixing member D4 is partly larger than the outer diameter of the shaft sleeve D211, and the inner edge of the fixing member D4 forms four radially outwardly concave fine-tuning shapes distributed in a 90-degree cross. Section D42, each fine-tuning section D42 is provided with a fine-tuning piece D6 composed of a headless screw, and the fine-tuning piece D6 is screwed on the upper surface of the flange seat D216 of the pivot seat D212 of the first positioning unit D21, and downwards Arrived at the upper surface of the washer D5, by adjusting the degree of downward screwing of the two opposing trimmers D6 to the washer D5, the first positioning unit D21 can be linked to the second positioning unit D22 and The die D12 at the lower end of the pressure rod D11 is tilted to one side to adjust the level of the bottom surface of the die D12; since the die base C is made of aluminum, in order to prevent the bottom of the positioning part C3 from being sunken and damaged due to long-term screw contact , Therefore, the gasket D5 made of iron is only provided. In other embodiments of the present invention, the gasket D5 can also be omitted.

The pressing equipment of the embodiment of the present invention, since the die unit D is provided with a fixing assembly D2 located on a mold base C, the fixing assembly D2 is provided with a first positioning unit for maintaining the horizontal and radial positioning of the pressing rod D11 D21 maintains one of the second positioning units D22 for the vertical and longitudinal positioning of the depression rod D11, so the die D12 below the depression rod D11 can be stabilized and maintained in the horizontal radial positioning or vertical and longitudinal positioning, so that the die D12 itself The positioning balance of the pressure balance promotes the force balance of different parts on the surface of the pressed object, thereby improving the quality of the pressing process.

But the above-mentioned ones are only preferred embodiments of the present invention, and the scope of implementation of the present invention cannot be limited with this, that is, all simple equivalent changes and modifications made according to the patent scope of the present invention and the contents of the description of the invention, All still belong to the scope covered by the patent of the present invention.

AB: Driver module A: Fixed seat A1:Roller B: Driver B1: drive rod CD: Compression module C: mold base C1: Roller C2: mold frame C21: mold chamber C22: opening C3: Positioning department C31: Bottom C32: Through hole D: Die unit D1: Pressure rod assembly D11: pressure rod D111: Pipeline D112: pipe wall D113: notch D114: fixed seat D115: Containment room D116: Stomata D12: Die D121: temperature sensor D122: Airway D2: fixed components D21: The first positioning unit D211: shaft sleeve D212: Pivot seat D213: shaft hole D214: Flange D215: pivot hole D216: flange seat D217: Flange to side D218: Outer diameter across sides D22: The second positioning unit D221: The first positioning seat D2211: The first fastener D2212: Second fastener D2213: air guide hole D222: The second positioning seat D2221: The first support frame D2222: Second support frame D2223: Displacement interval D2224: Arc interval D2225: Shaft pin D23: elastic element D3: load measuring unit D31: Hood D32: Load measuring device D33: pressure contact D34: Bottom pad D4:Fixer D41: Holes D42: fine-tuning interval D5: Gasket D51: Perforated D6: Trimmer d: spacing E: pressure object F: lower mold

Other features and effects of the present invention will be clearly presented in the implementation manner with reference to the drawings, wherein: Fig. 1 is a perspective view illustrating an upper mold device in an embodiment of the present invention; Figure 2 is a side view illustrating the upper die assembly; Fig. 3 is a perspective view illustrating one of several die units in this embodiment; Figure 4 is a side view illustrating one of said die units; and Fig. 5 is a sectional view illustrating one of the die units.

B1: drive rod

C: mold base

C2: mold frame

C21: mold chamber

C22: opening

C3: Positioning department

C31: Bottom

C32: Through hole

D11: pressure rod

D111: Pipeline

D112: pipe wall

D113: notch

D114: fixed seat

D115: Containment room

D116: Stomata

D12: Die

D121: temperature sensor

D122: Airway

D21: The first positioning unit

D211: shaft sleeve

D212: Pivot seat

D213: shaft hole

D214: Flange

D215: pivot hole

D216: flange seat

D2211: The first fastener

D2212: Second fastener

D2213: air guide hole

D2221: The first support frame

D2222: Second support frame

D2223: Displacement interval

D2225: Shaft pin

D23: elastic element

D31: Hood

D32: Load measuring device

D33: pressure contact

D34: Bottom pad

D4:Fixer

D41: Holes

D5: Gasket

D51: Perforated

D6: Trimmer

E: pressure object

F: lower mold

Claims (12)

A pressing device, comprising: an upper mold device that cooperates with the lower mold below to press a pressed object together, the upper mold device is provided with a pressing mold unit that is acted by a driving force, and the pressing mold unit is provided with a pressing rod Assemblies, the pressing rod assembly is provided with a pressing rod, the lower end of the pressing rod is provided with a pressing die; the pressing die unit is provided with a fixing assembly located on a mold base, and the fixing assembly is provided with a horizontal and radial positioning of the pressing rod One of a first positioning unit or a second positioning unit for maintaining the vertical and longitudinal positioning of the pressing bar. Pressing equipment as described in Claim 1, wherein, the first positioning unit is provided with a shaft sleeve and a pivot seat; A pivot hole is provided for pivoting the shaft sleeve, and a flange seat is provided at the lower end of the pivot seat. According to claim 2, the pressing device, wherein, the fixing assembly is embedded in a positioning portion of the mold base with the flange seat of the pivot seat of the first positioning unit, and is fixed with a fixing piece. It is arranged on the upper surface of the mold base, and the pivot base is restricted in the positioning part of the mold base. The press-fitting equipment as described in Claim 3, wherein, the fixing member is provided with a set of holes with an inner diameter smaller than the outer diameter of the flange seat of the pivot seat, and the inner edge of the fixing member forms a plurality of fine-tuning intervals, each of which A fine adjustment part is arranged in the fine adjustment section, and the fine adjustment part is screwed on the upper surface of the flange seat of the pivot seat of the first positioning unit, and reaches down to the upper surface of a gasket at the bottom of the positioning part. The pressing equipment as described in claim 1, wherein the second positioning unit is provided with a first positioning seat and a second positioning seat; the first positioning seat clamps and fixes the outer diameter of the pressing rod, and the second positioning seat It is located below the first positioning seat, and is provided with a first supporting frame and a second supporting frame, which are two separate components, facing each other and radially surrounding the outer diameter of the pressure rod outside a displacement interval; the first positioning An elastic element is arranged between the unit and the second positioning unit, and the elastic element is set outside the outer diameter of the pressing rod and located in the displacement zone. The press-fitting equipment as described in claim 5, wherein, the lower end of the second support frame is fixed on a flange seat of a pivot seat of the first positioning unit, and a pivot pin protrudes from the upper end, and the first positioning unit The seat is provided with a first fastener and a second fastener to clamp the outer diameter of the pressure rod, and the upper end of the shaft pin is used for fixing the bottom of the second fastener; the upper end of the first support frame forms an arc The section encloses a part of the outer ring diameter of the displacement section, and the lower end is fixed on the flange seat of the pivot seat of the first positioning unit. The press-bonding device as claimed in claim 1, wherein the pressed object is a component with a die on a substrate and covered with a heat sink. Pressing equipment as described in claim 1, wherein, the upper mold device is provided with a driving module and a pressing module; the driving module is provided with a plurality of driving parts, and each driving part provides a driving force; the The pressing module is provided with a plurality of the die units; the die base is provided with a mold frame, the die base is provided with a certain positioning part, and the bottom of the positioning part is provided with a through hole; the die holder at the lower end of the pressing rod Placed in a mold chamber separated by the mold frame, the mold chamber has an opening at the bottom and communicates with the through hole at the top; the die can be moved up and down in the mold chamber by the pressing rod. The pressing device as described in claim 1, wherein the die is provided with a temperature sensing element, and the temperature sensing element extends from a notch to the outside with a sensing line passing through a pipe of the pressing rod. The pressing device as claimed in claim 1, wherein a load measuring unit is arranged above the pressing rod, and the driving force is measured by the load measuring unit. The pressing equipment as described in claim 1, wherein, the pipe wall of the pressure rod is provided with an air hole communicating with the outside, and the lower end of the pipe communicates with a fixed seat at the lower end of the pressure rod formed between the fixed seat and the pressure rod. A chamber between the dies, the die is provided with an air passage, one end of the air passage communicates with the chamber, and the other end communicates with the area below the die. Pressing equipment as described in claim 1, wherein, the upper mold device is provided with a driving module and a pressing module; the driving module is provided with a plurality of driving parts, and each driving part provides a driving force; the The pressing module is provided with a plurality of the pressing units; the driving module or one of the pressing modules is provided with a plurality of rollers at intervals on both sides.

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