TW202226407A - Pellicle frame grasping device - Google Patents

Abstract

With the present invention, a pellicle frame can be correctly grasped even if warped. The present invention comprises: a frame body that is a frame-shaped member in which a plurality of rod-shaped members are assembled in a substantially rectangular shape; a plurality of pellicle grasping members provided to the frame body; and a drive unit provided to each of the pellicle grasping members, the drive unit moving the pellicle grasping member between a first position at which the pellicle grasping member is inserted in a groove, and a second position at which the pellicle grasping member is not inserted in the groove. Each pellicle grasping member has a plate-shaped or rod-shaped tip part, a portion of which being inserted in the groove when the pellicle grasping member is in the first position. The tip part has a tip face that is inserted in the groove when the pellicle grasping member is in the first position, the tip face being extended in a second direction that is substantially perpendicular to a first direction, which is the direction in which the pellicle grasping member moves. The tip part is provided with a marker that indicates the distance from the tip face.

Description

Film frame holding device

The present invention relates to a film frame holding device.

Patent Document 1 discloses a film frame holding device that uses a film holding portion provided in a frame to hold a film frame, abutting a film adhesive member with a mask, and disposes a measuring portion near the front end of a first portion overlapping the mask. Position, measure the distance from the mask surface, that is, the first distance, move the measuring part to the second position near the front end overlapping the film frame, and measure the distance to the film, that is, the second distance. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2019-128501

[Problems to be Solved by Invention]

In the invention described in Patent Document 1, the distance in the height direction (direction substantially perpendicular to the film of the thin film) such as the distance from the film of the thin film can be accurately measured, but the depth direction (the direction substantially parallel to the film of the thin film cannot be measured). ), when the film frame is deformed, it may be impossible to accurately hold the film frame.

The present invention has been made in view of such matters, and an object of the present invention is to provide a film frame holding device capable of grasping whether or not the film frame can be accurately held. [means to solve the problem]

In order to solve the above-mentioned problems, the film frame holding device of the present invention is, for example, a film holding device comprising: a substantially hollow cylindrical film frame with grooves formed on the side surfaces; and a film film covering the film frame. The hollow part is provided on the first surface that is substantially orthogonal to the side surface of the film frame; it is characterized by comprising: a frame body that combines a plurality of rod-shaped members into a substantially rectangular frame-shaped member; a plurality of films A gripping member, etc., provided in the frame body; and a driving portion, which is provided on each of the film gripping members, and inserts the film gripping member into the groove at the first position of the film gripping member, and the groove. moving in the first direction between the second positions in which the film holding member is not inserted; the film holding member has a plate-shaped or rod-shaped front end partially inserted into the groove when the film holding member is in the first position The said front-end|tip part is provided with the mark which shows the position of the said front-end|tip part in the said 1st direction.

According to the film frame holding device of the present invention, the film holding member has a plate-shaped or rod-shaped front end portion which is partially inserted into the groove of the film frame. A mark showing the position of the film holding member in the moving direction of the film holding member, that is, in the first direction is provided at the front end portion. Thereby, it can be grasped whether the front end portion is accurately inserted into the groove, that is, whether the film frame can be accurately grasped.

The front end portion is formed of metal, and the mark can be provided on the front end portion by providing a coating layer on the surface of the front end portion. Thereby, the mark can be easily provided on the film holding member.

The above-mentioned film frame is an aluminum alloy treated with black acid-resistant aluminum, and the above-mentioned coating layer can be black. Thereby, the color of the film frame and the mark can be matched, and the visibility of the mark can be improved.

The front end portion is formed of metal, and the mark can be provided on the front end portion by cutting a part of the surface of the front end portion to form a recessed portion. Thereby, the mark can be prevented from disappearing from the front end portion.

The above-mentioned film frame is an aluminum alloy to which black acid-resistant aluminum treatment is applied, and the above-mentioned mark can be formed by coloring the inside of the above-mentioned concave portion black. Thereby, the color of the film frame and the mark can be matched, and the visibility of the mark can be improved.

The front end portion has a front end surface, the front end surface is inserted into the groove when the film holding member is in the first position, and extends in a second direction substantially perpendicular to the first direction, and the mark may indicate The distance from the above-mentioned front end face. Thereby, it can be grasped whether the front end surface is in contact with the bottom surface of the groove, that is, whether the film frame can be accurately held.

The mark may not be provided in the front end region sandwiched between the front end surface and the boundary line, and the boundary line is an imaginary line substantially along the second direction, and is arranged in the first direction from the front end surface. A predetermined distance. Location. Thereby, it is possible to prevent the generation of dust caused by cutting marks.

The front end portion is plate-shaped, the mark is provided on the widest surface of the front end portion, and the mark includes a first mark, a second mark, and a third mark arranged along the boundary line, the first mark, and the second mark. The length in the above-mentioned first direction may be different for each of the above-mentioned third marks. Thereby, it can be further easily understood how far the front end portion is moved and the front end portion is surely inserted into the groove.

The above-mentioned marks have two each of the above-mentioned first mark, the above-mentioned second mark and the above-mentioned third mark, respectively, and the above-mentioned first mark, the above-mentioned second mark and the above-mentioned third mark may be respectively provided in the longitudinal direction of the film holding member. both sides of the centerline. Thereby, even if a reflector etc. are provided in the vertical direction upper side of a front-end|tip part, a mark can be visually recognized reliably.

When the frame body is extended in the horizontal direction, the mark can be set at a position that can be seen from above or obliquely above. Thereby, the mark can be visually recognized easily.

The imaging part is provided for imaging the mark, and when the frame body is extended in the horizontal direction, the imaging part can be installed at a position higher than the frame body. Thereby, in the inner space, the operator does not need to visually mark, and the generation of dust can be prevented.

The frame body has a rod-shaped first vertical frame and a second vertical frame held substantially parallel to each other with an interval therebetween, the film holding member is provided on each of the first vertical frame and the second vertical frame, and the imaging portion is connected to each of the first vertical frame and the second vertical frame. The first vertical frame and the second vertical frame are provided adjacent to each other, and the imaging portion may be provided outside the region sandwiched between the first vertical frame and the second vertical frame when viewed from a vertical upper side. In this way, it can be avoided that the mark is blocked by the film frame and cannot be photographed. [Effect of invention]

According to the present invention, it is possible to grasp whether or not the film frame can be accurately held.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each of the drawings, the same elements are denoted by the same symbols, and descriptions of overlapping parts are omitted.

<First Embodiment> FIG. 1 is a schematic front view showing a film holding device 1 according to the first embodiment. The film holding device 1 is installed in a film sticking device (not shown). The film attaching device attaches the film 100 held by the film holding device 1 to a substantially plate-shaped mask (not shown) held substantially in the vertical direction.

Hereinafter, let the horizontal direction be the direction along the xy plane, and let the vertical direction orthogonal to the xy plane be the z direction. In addition, the x direction is orthogonal to the y direction.

First, the thin film 100 will be described. FIG. 2 is a schematic perspective view showing the film 100 . FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2 . The film 100 mainly includes a film frame 101 , a film 102 stretched on the film frame 101 , and an adhesive member 103 (refer to FIG. 3 ) formed on the lower surface of the film frame 101 .

The film frame 101 is a frame-shaped (substantially hollow cylindrical) member having a substantially rectangular outer periphery. The film frame 101 has a substantially rectangular shape in plan view (viewed from the upper side of the paper surface of FIG. 2 ), and has a hollow portion 101e in the center portion. The size of the hollow portion 101e of the film frame 101 is approximately the same as the size of the photomask (eg, about 520 mm×800 mm to 1620 mm×1780 mm). The width of the frame-shaped portion of the film frame 101 is about several tens of mm, and the thickness is about 2 mm to 10 mm.

The film frame 101 has a substantially parallel upper surface 101a and a lower surface 101b. In addition, grooves 101d are formed on the side surfaces 101c orthogonal to the upper surface 101a and the lower surface 101b of the film frame 101 . The film holding member 21 (described in detail later) provided in the frame body 10 is inserted into the groove 101d.

The grooves 101d vary according to the size of the film frame 101 . For example, in the case of the film frame 101 for G10 glass (1620 mm×1780 mm), the depth d is approximately 3 mm, and the width w is approximately 1.5 mm to 2 mm. Moreover, in the case of the glass film frame 101 smaller than G10, the depth d is approximately 2 mm, and the width w is approximately 1.5 mm to 2 mm.

In this embodiment, the film frame 101 is an aluminum alloy treated with black acid-resistant aluminum, but the material of the film frame 101 is not limited to this. For example, the thin film frame 101 may be formed of metals such as iron, nickel steel, titanium, and titanium alloys.

The thin film 102 is a thin film of sub-micron thickness. The film 102 of the film is stretched on the upper surface 101a of the film frame 101 so as to cover the hollow portion 101e of the film frame 101 . If the film frame 101 is attached to the mask substrate, the film 102 of the film is spaced apart from the pattern forming surface (surface) of the mask at a predetermined interval.

The adhesive member 103 is disposed on the lower surface 101b of the film frame 101 . The adhesive member 103 is formed in the shape of a frame around the entire circumference of the film frame 101 . As the adhesive member 103, known ones, such as hot melt adhesives, can be used.

A release layer (a liner sheet) for protecting the adhesive is attached to the lower end surface of the adhesive member 103 . The release layer is provided with a plurality of protrusions protruding from the film frame 101 , and is provided in a film container (not shown) by lamination and adhesion.

The film 100 is carried into the film sticking device in a state of being placed on the film container. At this time, the upper surface 101a and the lower surface 101b of the film frame 101 are substantially along the horizontal direction.

Return to the description of FIG. 1 . The film holding device 1 mainly includes a frame body 10 , a film holding part 20 , and a measuring part 31 . The film holding part 20 and the measuring part 31 are provided in the frame body 10 .

First, the operation of the film sticking device (not shown) in which the film holding device 1 is provided will be briefly described. Inside the film sticking device, in addition to the film holding device 1 , a mask (not shown) held by a holding portion (not shown) in a substantially vertical direction is provided. When the film 100 is carried into the film sticking device substantially in the horizontal direction from the state where the film 100 is placed on the film storage container (not shown), the frame body 10 is substantially in the vertical direction. After that, the frame body 10 is rotated to be in a state substantially in the horizontal direction, the film 100 is held by the film holding part 20, the frame body 10 is moved vertically upward, and the release layer (not shown) is peeled off from the film 100. ). Rotate the frame body 10 in a state of holding the film 100 exposing the adhesive member 103 (not shown in FIG. 1 ), so that the frame body 10 is substantially in the vertical direction, move the frame body 10 in parallel, and attach the adhesive member 103 on the mask.

Next, the structure of the film holding apparatus 1 is demonstrated. The frame body 10 is a frame-shaped member formed by combining a plurality of rod-shaped members into a substantially rectangular shape. The frame body 10 mainly includes vertical frame portions 11 , 12 , upper frame portions 13 , 14 , and a frame 15 provided on the outer sides of the vertical frame portions 11 , 12 and the upper frame portions 13 , 14 . The vertical frame portions 11 and 12, the upper frame portions 13 and 14, and the frame 15 are formed of metal such as iron, aluminum, or the like.

When the film holding part 20 holds the film 100 , as shown in FIG. 1 , the frame body 10 is extended in the horizontal direction (substantially along the xy plane).

The vertical frame parts 11 and 12 are rod-shaped members whose longitudinal direction is provided along the y direction, and are provided movably along the lower end part 15 a and the upper end part 15 b of the frame 15 (ie, along the x direction). As the mechanism for moving the vertical frame portions 11 and 12 in the x direction, various known techniques can be used. In addition, when the frame body 10 is extended in the vertical direction, the vertical frame parts 11 and 12 are extended in the vertical direction substantially.

The upper frame parts 13 and 14 are rod-shaped members whose longitudinal direction is arranged along the x-direction, and are respectively movably arranged along the vertical frame parts 11 and 12 (ie, along the y-direction). The mechanism for moving the upper frame portions 13, 14 in the y-direction can use various techniques that are already known. When the frame body 10 is extended in the vertical direction, the upper frame parts 13 and 14 are extended substantially horizontally in the vicinity of the upper ends of the vertical frame parts 11 and 12 .

In addition, the form of the upper frame parts 13 and 14 is not limited to this. For example, the upper frame portion is constituted by one rod-shaped member extending substantially horizontally, and the vicinity of both ends of the one rod-shaped member may be provided in the vertical frame portions 11 and 12 .

In this way, by moving the vertical frame portions 11, 12 and the upper frame portions 13, 14, the size of the frame constituted by the vertical frame portions 11, 12, the upper frame portions 13, 14, and the lower end portion 15a can be changed to correspond to various sizes the film 100. Furthermore, the film 100 can be, for example, 420 mm×720 mm, 700 mm×800 mm, 520 mm×680 mm, 750 mm×1300 mm, 1520 mm×1680 mm of size.

The frame body 10 is provided so as to be movable in the vertical direction and the horizontal direction by a movement mechanism (including an actuator) not shown. Moreover, the housing|casing 10 has the rotation shaft which is not shown in figure provided in the end vicinity of -y side, and is provided so that rotation is possible by the movement mechanism (including an actuator) which is not shown in figure. Since the mechanism for moving and rotating the frame body 10 is well known, the description is omitted.

During standby (when the film 100 is loaded, etc.), the frame body 10 is in a state in which the surface formed by the frame 15 is extended in the vertical direction (the frame body 10 is extended in the vertical direction). The film 100 is loaded into the film sticking device, and when the positioning is completed, the frame body 10 rotates around the rotation axis, and the surface formed by the frame 15 extends in the horizontal direction (the frame body 10 extends in the horizontal direction). state. Thereby, the film holding part 20 can hold the film 100 .

When the film holding part 20 holds the film 100, the frame body 10 moves to the upper side in the vertical direction, and the adhesive member 103 is separated from the release layer. Since the adhesive member 103 has a strong adhesive force against a sudden strong force and a weak adhesive force against a weak continuous force, the process of removing the adhesive member 103 from the release layer is performed slowly over about 30 minutes to 1 hour.

When the adhesive member 103 is separated from the release layer, the frame body 10 will rotate around the rotation axis, and the frame body 10 will be in a state of being extended in the vertical direction. Thereby, the film 100 can be attached to the mask. When attaching the film 100 to the mask, the frame 10 is inclined relative to the vertical direction in such a way that the distance between the lower surface 101b of the upper end side and the mask is shorter than the distance between the lower surface 101b of the lower end side and the mask. In addition, when the film 100 is attached to the mask, the frame body 10 is made to be parallel to the horizontal direction from the state extended in the vertical direction.

The film holding part 20 has a plurality of film holding members 21 for holding the side surface 101 c of the film frame 101 . The film holding member 21 is provided in the vertical frame parts 11 and 12, the upper frame parts 13 and 14, the lower end part 15a, and the upper end part 15b.

In the example shown in FIG. 1, five film holding members 21 are provided on the vertical frame portions 11, 12, respectively, one film holding member 21 is provided on the upper frame portions 13, 14, respectively, and five film holding members 21 are provided on the lower end portion 15a. Each film holding member 21 is provided with one film holding member 21 on the upper end portion 15b, but the position and number of the film holding members 21 are not limited to this.

The film holding member 21 used is different depending on the size of the film 100 . In FIG. 1 , among the film holding members 21 provided in the frame body 10 , only the film holding member 21 abutting on the film 100 (here, the side surface 101 c ) is used.

The film holding member 21 is provided so as to be movable in the horizontal direction or the vertical direction between an insertion position where a part of the film holding member 21 is inserted into the groove 101d, and a retracted position where it is not in contact with the side surface 101c. FIG. 4 is a diagram showing the outline of the film holding part 20 .

The film holding member 21 is a metal plate-shaped or rod-shaped member. In the present embodiment, the film holding member 21 is made of stainless steel (eg, SUS 304).

The film holding member 21 is formed by bending a plate-like member, and mainly includes a front end portion 21a, a curved portion 21b, and a holding portion 21c provided with a driving member 22. When the film holding member 21 is at the insertion position, a part of the front end portion 21a is inserted into the groove 101d.

In the present embodiment, the film holding member 21 is bent at a substantially right angle at both ends of the bent portion 21b. However, the bending angle of the film holding member 21 is not limited to a substantially right angle.

The front end portion 21a has a front end surface 21d inserted into the groove 101d when the film holding member 21 is in the insertion position. The front end surface 21d is an end surface of the plate-like member, and is extended in a direction substantially orthogonal to the moving direction of the film holding member 21 . For example, about the film holding member 21 provided in the vertical frame parts 11 and 12, the moving direction is the x direction, and the front end surface 21d is substantially along the y direction (installed substantially parallel to the yz plane). When the film holding member 21 is surely inserted into the groove 101d, the front end surface 21d and the bottom surface of the groove 101d come into contact with each other.

The leading end portion 21a is provided with a mark (not shown in Fig. 4 ) showing the position of the leading end portion 21a in the moving direction (x direction in Fig. 4 ) of the leading end portion 21a. In this embodiment, the mark which shows the distance from the front-end|tip surface 21d is provided in the front-end|tip part 21a. When the frame body 10 is extended in the horizontal direction, the mark is set at a position that can be seen from above. In the present embodiment, the front end portion 21a has a plate shape, and a mark is provided on the surface 21f which is the widest surface of the front end portion 21a and is the surface on the upper side (+z side) in the vertical direction. An operator can confirm the position of the x direction of the front-end|tip part 21a by the visual mark, and can confirm whether the film holding member 21 is inserted into the groove|channel 101d more reliably. The marking will be described in detail later.

The drive member 22 is provided in the film holding member 21 (holding part 21c). The drive member 22 has a rod 22a and an actuator 22b that moves the rod 22a. The film holding member 21 is connected to the rod 22a. The actuator 22b is provided in the housing|casing 10 (illustration omitted in FIG. 4).

The film holding member 21 is inserted into the groove 101d by the driving member 22 at the insertion position (refer to the solid line in FIG. 4 ), and the film holding member 21 is not inserted into the groove 101d and the film holding member 21 does not interfere with the film frame. Move in the horizontal direction between the retracted positions of 101 (refer to the one-dot chain line in Figure 4).

The film holding members 21 are respectively provided with measuring sections 24 that measure the height (position in the z direction) of the film frame 101 . The measurement unit 24 mainly includes an ultrasonic sensor 24a and a reflection plate 24b. In addition, the measurement part 24 is not essential, and the form of the measurement part 24 is not limited to this.

The ultrasonic sensor 24a is a distance measuring sensor that transmits ultrasonic waves toward an object and receives the reflected waves, and measures the distance to the object based on the time interval between signal transmission and reflected wave reception. Since the ultrasonic sensor 24a is already known, the detailed description is omitted.

The reflection plate 24b is provided on the upper side (+z side) of the film holding member 21 . The reflection plate 24b reflects the ultrasonic waves transmitted from the ultrasonic sensor 24a. The front end portion 24c of the reflection plate 24b is inclined by approximately 45 degrees with respect to the xy plane. Therefore, the ultrasonic waves transmitted by the ultrasonic sensor 24a are reflected downward (-z direction) (refer to the two-dot chain line in Fig. 4).

Return to the description of FIG. 1 . The measuring unit 31 has a distance measuring sensor (eg, an ultrasonic sensor) and a reflector, and measures the height (position in the z direction) of the mask or the film frame 101 . The measuring part 31 is provided in the frame body 10 , and in this case, it is provided in the upper frame parts 13 and 14 . The measurement portion 31 is provided at a position different from the film holding member 21 when viewed from a direction (here, the z direction) substantially orthogonal to the extending direction of the rod-shaped members (eg, the upper frame portions 13 and 14 ) constituting the frame body 10 . .

The two measurement parts 31 are provided in the vicinity of the upper side and the vicinity of the left end of the housing 10, respectively, and are provided in the vicinity of the upper side and the vicinity of the right end of the housing 10, respectively. However, the positions and the number of the measurement parts 31 are not limited to the one shown in FIG. 1 .

The measuring section 31 is in the vertical direction between the first position near the front end overlapping the mask (see the solid line in FIG. 1 ) and the second position near the front end overlapping the film frame 101 (see the two-dot chain line in FIG. 1 ). Removably set.

Next, the marks provided on the film holding member 21 will be described. Hereinafter, the marking will be described by taking the film holding member 21 provided in the vertical frame portion 12 as an example. FIG. 5 is a diagram showing an example of the mark 23 .

First, the material of the mark 23 will be described. By providing the coating layer on the surface of the film holding member 21 , the mark 23 is provided on the film holding member 21 . Thereby, the marker 23 can be easily provided on the film holding member 21 . In the present embodiment, a fluororesin having resistance to solvents such as isopropyl alcohol is used for the coating layer.

In addition, the coating layer used for the mark 23 is desirably black. The portion of the film holding member 21 where the mark 23 is not provided is metallic (for example, silver). By making the mark 23 black, the color of the black film frame 101 and the mark 23 can be matched, and the metallic color part where the mark 23 is not provided can be conspicuous.

In addition, in FIG. 5, the coating layer is provided on the surface of the front end portion 21a, the bending portion 21b, and the holding portion 21c of the film holding member 21, but as long as at least the coating layer (ie, the mark 23) is provided on the front end portion 21a, The coating layer may not be provided on the surfaces of the curved portion 21b and the holding portion 21c.

Next, the shape of the mark 23 will be described. The mark 23 is not provided in the front end region R sandwiched between the front end surface 21d and the boundary line 21g. The boundary line 21g is an imaginary line substantially along the extending direction of the front end surface 21d (here, the y direction), and is disposed at a predetermined distance from the front end surface 21d in a direction substantially orthogonal to the front end surface 21d (here, the x direction). The position of the distance (distance l in Figure 5). Since the boundary line 21g and the front end region R are imaginary lines and regions, they are shown as dotted lines in FIG. 4 .

The distance l between the front end surface 21d and the boundary line 21g is desirably 3 mm or more, the depth d of the groove 101d provided in the film frame 101 for large glass (G10 glass). In this embodiment, the distance l is approximately 3 mm. Thereby, when the leading end portion 21a is inserted into the groove 101d, the marker 23 can be prevented from contacting the film frame 101 (edge portion of the groove 101d).

If the mark 23 comes into contact with the edge portion of the groove 101d, the mark 23 may be cut by the edge, and dust may be generated. Since the film 100 is attached to the mask, it is necessary to prevent the generation of dust as much as possible (it is desirable not to generate dust), so it is desirable not to provide the mark 23 in the front end region R that may contact the groove 101d.

The marker 23 has a first marker 23a, a second marker 23b, and a third marker 23c arranged along the boundary line 21g. The first marker 23a, the second marker 23b, and the third marker 23c have different lengths in at least the x-direction.

In this embodiment, the first mark 23a, the second mark 23b, and the third mark 23c are square-shaped, the length of each side of the first mark 23a is approximately 1 mm, and the length of each side of the second mark 23b is approximately 1.5 mm. mm, and the length of each side of the third mark 23c is approximately 2 mm. Therefore, the first mark 23a indicates that the distance from the front end face 21d is approximately 4 mm, the second mark 23b indicates that the distance from the front end face 21d is approximately 4.5 mm, and the third mark 23c indicates that the distance from the front end face 21d is approximately 5 mm. In this way, the distance from the front end face 21d is indicated by the reference numeral 23 .

Furthermore, in the present embodiment, the first mark 23a, the second mark 23b, and the third mark 23c are square-shaped, but the shapes of the first mark 23a, the second mark 23b, and the third mark 23c are not limited to the square shape. , which can be a rectangular shape including a rectangular shape, or a semicircular shape or a semielliptical shape.

FIG. 6 is a diagram schematically showing a state in which the front end portion 21 a of the film holding member 21 is securely inserted into the groove 101 d of the film frame 101 for glass of G10 size.

Since the depth d of the groove 101d and the distance l between the front end surface 21d and the boundary line 21g are approximately the same, if the front end portion 21a is securely inserted into the groove 101d, when viewed from above, the opening of the groove 101d (the side surface 101c) It overlaps with the boundary line 21g. Therefore, when viewed from above, the boundary line 21g cannot be visually recognized, and only the first marker 23a, the second marker 23b, and the third marker 23c can be visually recognized.

FIG. 7 is a diagram schematically showing a state in which the front end portion 21a is not securely inserted into the groove 101d of the film frame 101 for glass of the G10 size.

Since the depth d of the groove 101d and the distance l between the front end surface 21d and the boundary line 21g are substantially the same, when the front end 21a is not inserted into the groove 101d surely, the boundary line 21g can be seen when viewed from above. Furthermore, by comparing the distance l' between the side surface 101c and the boundary line 21g and the lengths of the first mark 23a, the second mark 23b, and the third mark 23c in the x direction, it can be seen that the distance between the bottom surface of the groove 101d and the front end surface 21d is The gap is how far the distal end portion 21a is further moved to securely insert the distal end portion 21a into the groove 101d. In the example shown in FIG. 7, since the distance 1' is substantially the same as the length of the first mark 23a in the x direction, it can be seen that the gap between the bottom surface of the groove 101d and the front end surface 21d is approximately 1 mm.

FIG. 8 is a diagram schematically showing a state in which the front end portion 21a is surely inserted into the groove 101d of the film frame 101 for glass with a size smaller than G10.

Since the depth d of the groove 101d is smaller than the distance l between the front end surface 21d and the boundary line 21g, the difference is 1 mm. Therefore, if the front end portion 21a is accurately inserted into the groove 101d, the distance l′ between the side surface 101c and the boundary line 21g and The lengths of the first marks 23a in the x-direction are substantially the same.

FIG. 9 is a diagram schematically showing a state in which the front end portion 21a is not securely inserted into the groove 101d of the film frame 101 for glass with a size smaller than G10.

When the front end portion 21a is not securely inserted into the groove 101d, the distance l' between the side surface 101c and the boundary line 21g is larger than the length of the first mark 23a in the x direction. Furthermore, by comparing the distance l' between the side surface 101c and the boundary line 21g and the lengths of the first mark 23a, the second mark 23b, and the third mark 23c in the x direction, it can be seen that the distance between the bottom surface of the groove 101d and the front end surface 21d is The gap is how far the distal end portion 21a is further moved to securely insert the distal end portion 21a into the groove 101d. In the example shown in FIG. 9, since the distance 1' is substantially the same as the length of the second mark 23b in the x direction, it can be seen that the gap between the bottom surface of the groove 101d and the front end surface 21d is approximately 0.5 mm.

According to the present embodiment, the position of the front end portion 21a can be grasped by the visual recognition mark 23, and it can be further grasped whether or not the front end portion 21a has been inserted into the groove 101d with certainty. When inserting the front end without the mark 23 into the groove, there is no way to know whether the front end is inserted deep into the groove, but by setting the mark 23 on the front end 21a, it can be confirmed only by looking at the mark 23. Whether the film frame 101 can be accurately held.

Moreover, according to the present embodiment, the distance between the bottom surface of the groove 101d and the front end surface 21d can be recognized only by visualizing the mark 23 . Therefore, when the front end portion 21a is not securely inserted into the groove 101d, the film holding member 21 is moved by moving the vertical frame portions 11, 12 or the upper frame portions 13, 14, or the film is moved by moving the driving member 22. The holding member 21 allows the film frame 101 to be accurately held by the film holding member 21 .

19 and 20 are diagrams schematically showing how the film 100 is deformed. In the case shown in FIG. 19 , the film 100 is deformed so that the center portion of each side of the film 100 becomes a concave portion. In the structure of the film 100 formed by the film 102 attached to the film frame 101, the deformation as shown in FIG. 19 is easy to occur, and the size of the depression is about 1-2 mm. Since the depth of the groove 101d is approximately 2 mm to 3 mm, there is a possibility that the film 100 cannot be accurately held by the film holding member 21 inserted into the vicinity of the center of the +x side of the film 100 .

Moreover, in the case shown in FIG. 20, the film 100 is deformed so that the position of the +x side of the film 100 and the position of the -x side are displaced (approximately 2 mm). In this case, there is a possibility that the film 100 cannot be accurately held by the film holding member 21 inserted in the vicinity of the -x side end of the +y side of the film 100 .

If the frame body 10 is moved upward in the extension direction or the frame body 10 is rotated in a state where the film frame 101 cannot be accurately grasped by the film holding member 21 , the film 100 may fall from the frame body 10 . On the other hand, since it is possible to know whether the film frame 101 can be accurately grasped before the frame body 10 is moved in parallel or in a rotational movement, it is possible to prevent the accident of falling of the film 100 .

Furthermore, according to the present embodiment, by not providing the mark 23 in the front end region R that may be inserted into the groove 101d, the film holding member 21 or the film frame 101 can be prevented from being cut when the film holding member 21 is inserted into the groove 101d. produce dust.

Although the grooves 101d are often formed by cutting, there is a possibility that unevenness may be generated on the finished surface due to the cutting. When the adhesive member 103 is separated from the release layer, since the frame body 10 is moved vertically upward in a state where the front end 21a is inserted into the groove 101d, the surface 21f is in contact with the finished surface of the cutting process, and the surface 21f is continuously applied about approx. The power of 1kgf. Since the mark 23 is provided on the surface 21f, if the mark 23 is provided in the front end region R, there is a high possibility that dust will be generated by cutting the mark 23 on the convex portion of the finished surface. On the other hand, by not providing the mark 23 in the front end region R, the generation of dust can be prevented.

In addition, in this embodiment, the mark 23 is provided in the front-end|tip part 21a by providing a coating layer on the surface, but the form of a mark is not limited to this. For example, by cutting a part of the surface of the front end portion 21a of the film holding member 21 to form a recess, the mark can be provided on the front end portion 21a. In this case, the mark does not disappear from the front end portion 21a. Furthermore, in order to improve visibility, it is desirable to color the inside of the recessed portion with ink or the like. In particular, it is desirable to color the inside of the recess with black so that the black film frame 101 matches the color of the mark.

Furthermore, in this embodiment, the depth d of the groove 101d of the film frame 101 for the glass of G10 size and the distance l between the front end surface 21d and the boundary line 21g are approximately the same (3 mm), but the distance l is the glass of G10 size The depth d of the groove 101d of the thin film frame 101 to be used is sufficient (3 mm or more). For example, when the distance between the front end surface 21d and the boundary line 21g is 4 mm, if the distance between the side surface 101c and the boundary line 21g is substantially the same as the length of the first mark 23a in the x direction, it can be seen that the front end portion 21a is securely inserted into the In the groove 101d, if the distance between the side surface 101c and the boundary line 21g is greater than the length of the first mark 23a in the x direction, it can be seen that the front end portion 21a is not securely inserted into the groove 101d.

In addition, in this embodiment, although the front-end|tip part 21a is a plate-shaped member formed by bending a plate-shaped member, the form of the front-end|tip part 21a is not limited to this. For example, the front end portion 21a may be rod-shaped. In addition, the film holding member 21 may or may not be bent. However, in order to improve visibility, it is desirable that the mark is provided at a position where it can be seen from above or obliquely above when the frame body 10 is extended in the horizontal direction.

In addition, in this embodiment, the mark 23 is provided on the surface 21f which is the widest surface of the front end portion 21a and is the surface on the upper side (+z side) in the vertical direction, but the surface on which the mark 23 is provided is not limited to the surface 21f . For example, the mark 23 may be provided on the surface 21e which is the widest surface of the front end portion 21a other than the surface 21f. When the mark 23 is provided on the surface 21e, the mark 23 can also be visually recognized when the frame body 10 is extended in the vertical direction.

In addition, in the present embodiment, the three markers 23 having the first marker 23a, the second marker 23b, and the third marker 23c in total are used, but the marker 23 having the first marker 23a, the second marker 23b, and the third marker 23c may be used For the one or two marks, marks having marks other than the first mark 23a, the second mark 23b, and the third mark 23c (for example, marks with a length of approximately 2.5 mm on each side) may also be used.

Moreover, in this embodiment, although the mark 23 which shows the distance from the front-end surface 21d is provided in the front-end|tip part 21a, the mark only needs to show the position of the front-end|tip part 21a in the moving direction of the film holding member 21. For example, when the film holding member 21 moves in the x-direction, the front end portion 21a is divided into a plurality of adjacent regions in the x-direction (each region extends in a strip shape in the y-direction). The marks of different colors serve as marks indicating the positions in the moving direction of the film holding member 21 . In this case, the position of the front end portion 21a in the x-direction can be grasped according to the color of the visible mark, and it can be further grasped whether the front end portion 21a is surely inserted into the groove 101d.

<Variation 1 of the mark> In the first embodiment, the marking 23 is formed by forming a coating layer on a portion other than the first marking 23a, the second marking 23b and the third marking 23c, but the marking 23 has the first marking 23a, the second marking 23b and the third marking 23a. The form of the mark of the mark 23c is not limited to this.

FIG. 10 is a diagram showing the outline of the mark 23A of the modification. The mark 23A is formed by providing a coating layer only in the part of the 1st mark 23d, the 2nd mark 23e, and the 3rd mark 23f. The positions and shapes of the first marker 23d, the second marker 23e, and the third marker 23f are the same as those of the first marker 23a, the second marker 23b, and the third marker 23c. Whether or not the distal end portion 21a is inserted into the groove 101d can be grasped by the visual mark 23A.

In addition, the mark 23A can be formed by cutting a part of the surface of the front-end|tip part 21a to form a recessed part, and coloring the inside.

<Variation 2 of the mark> Modification 2 of the mark is a form in which the mark has a plurality of first marks 23a, second marks 23b, and third marks 23c. FIG. 11 is a diagram showing the outline of the mark 23B of the modification.

The marker 23B has two first markers 23a, second markers 23b, and third markers 23c, respectively. The 1st mark 23a, the 2nd mark 23b, and the 3rd mark 23c are provided in the both sides of the center line 21h along the longitudinal direction of the film holding member 21, respectively.

FIG. 12 is a diagram schematically showing a state in which the mark 23B is viewed obliquely from above. If the mark 23B is viewed from obliquely above, a part of the mark 23B may be hidden by the reflector 24b and cannot be seen. For example, as shown in FIG. 12, when the mark 23B is viewed from the near front side at an angle of about 45 degrees, the inner side of the center line 21h of the mark 23B cannot be visually recognized.

Even in such a case, since the first mark 23a, the second mark 23b and the third mark 23c are respectively provided on both sides of the center line 21h, the first mark 23a, the second mark 23b and the third mark can be visually recognized with certainty. 23c.

Moreover, visibility can be improved by arrange|positioning the smallest 1st mark 23a in the vicinity of both ends of the film holding member 21 which is easy to see, and providing the largest 3rd mark 23c in the center line 21h vicinity. However, the arrangement of the first marker 23a, the second marker 23b, and the third marker 23c is not limited to those shown in FIGS. 11 and 12 .

<Variation 3 of Marking> Variation 3 of the mark is a form in which the mark does not have the first mark, the second mark, and the third mark. FIG. 13 is a diagram showing the outline of the mark 23C of the modification.

The mark 23C has lines 23g, 23h, 23i, 23j substantially parallel to the front end surface 21d. The line 23g is provided on the boundary line 21g, and the line 23i is provided at a position approximately 1 mm from the boundary line 21g in the +x direction. The lines 23h and 23j are thinner and shorter than the lines 23g and 23i, and are respectively located at the +x sides of the lines 23g and 23i which are approximately 0.5 mm away from the lines 23g and 23i.

Since the lines 23g, 23h, 23i, and 23j are arranged in the vicinity of both ends of the film holding member 21, even if the reflecting plate 24b is provided on the film holding member 21, the mark 23C can be visually recognized with certainty.

Furthermore, the lines 23g, 23h, 23i, and 23j may have the same length and thickness. In addition, the lines 23g, 23h, 23i, and 23j are two lines spaced apart in the center, and may be a continuous line. In addition, the position and the number of lines constituting the mark 23C are not limited to this.

Furthermore, in the case of using the rod-shaped distal end portion 21a, since the area in which the marker can be provided is narrow, it is desirable to use the marker 23C of this modification which is composed of only lines. In addition, since the mark 23C is not provided in the front end region R, the mark 23C may be formed by a coating layer, or a part of the surface of the front end portion 21a may be cut to form the mark 23C.

<Variation 4 of the mark> Variation 4 of the mark is a form in which the mark is provided in the front end region R. As shown in FIG. FIG. 14 is a diagram showing the outline of the marker 23D of the modification.

The mark 23D has three lines 23k, 23l, 23m. The line 23k is provided at a position approximately 1 mm from the front end surface 21d in the +x direction, the line 23l is provided at a position approximately 2 mm from the front end surface 21d in the +x direction, and the line 23m is provided approximately 3 mm from the front end surface 21d in the +x direction. position in mm.

Since the depth d of the groove 101d and the distance between the front end surface 21d and the line 23m are approximately the same, if the front end portion 21a is securely inserted into the groove 101d, when viewed from above, the opening (side 101c) of the groove 101d and the line The 23m overlap, and the lines 23k, 23l, and 23m cannot be visually recognized.

On the other hand, when the front end portion 21a is not securely inserted into the groove 101d, any one of the lines 23k, 23l, and 23m is visible when viewed from above. Furthermore, the gap between the bottom surface of the groove 101d and the front end surface 21d can be understood by any of the visibility lines 23k, 23l, and 23m. For example, in the case of the visible lines 231 and 23m, it can be seen that the gap between the bottom surface of the groove 101d and the front end surface 21d is 2 mm or more.

Since the lines 23k, 23l, and 23m are also arranged in the vicinity of both ends of the film holding member 21, even if the reflecting plate 24b is provided on the film holding member 21, the mark 23D can be visually recognized with certainty.

Furthermore, in this modification, since the marking 23D is provided in the front end region R, it is desirable to use a marking formed by cutting a part of the surface of the front end portion 21a to form a recess, not by coating the surface of the front end portion 21a. the mark formed. When the film holding member 21 is inserted into the groove 101d, it is possible to cut the film holding member 21 or the film frame 101 without generating dust.

<Variation 5 of Marking> Variation 5 of the mark is a form in which the mark is also provided in the front end region R. As shown in FIG. FIG. 15 is a diagram showing the outline of the mark 23E of the modified example.

The mark 23E has two lines 23n that abut on the front end surface 21d and are inclined with respect to the front end surface 21d, and scale lines 23o, 23p, and 23q. The graduation lines 23o, 23p, and 23q are provided along the direction (x direction) substantially orthogonal to the front end surface 21d. The scale line 23o is provided at the position where the line 23n and the boundary line 21g (the distance from the front end surface 21d is approximately 3 mm) intersect. The scale line 23p is provided at the position where the line 23n intersects with an imaginary line drawn at a distance of approximately 2 mm from the front end surface 21d. The scale line 23q is provided at the position where the line 23n intersects with an imaginary line drawn at a position at a distance of approximately 1 mm from the front end surface 21d.

When the front end portion 21a is surely inserted into the groove 101d, the position where the line 23n and the graduation line 23o intersect when viewed from above overlaps with the opening (the side surface 101c) of the groove 101d.

On the other hand, when the front end portion 21a is not securely inserted into the groove 101d, when viewed from above, the exposed line 23n and the graduation line 23o intersect with each other. Furthermore, by referring to the graduation lines 23o, 23p, and 23q, the gap between the bottom surface of the groove 101d and the front end surface 21d can be understood. For example, when viewed from above, if the side surface 101c is in the vicinity of the position where the line 23n and the scale line 23p intersect, it can be seen that the gap between the bottom surface of the groove 101d and the front end surface 21d is approximately 0.5 mm.

In addition, since the marking 23E is also provided in the front end region in this modification example, it is desirable to use a marking formed by cutting a part of the surface of the front end portion 21a to provide a recessed portion, similarly to the marking 23D.

<Second Embodiment> In the first embodiment, the marks 23 are visually confirmed, but the method of confirming the marks 23 is not limited to the visual inspection.

In the second embodiment of the present invention, the mark 23 is confirmed by the imaging unit. Hereinafter, the film sticking apparatus 3 provided with the film holding apparatus 2 of 2nd Embodiment is demonstrated. In addition, the same code|symbol is attached|subjected to the same part as 1st Embodiment, and a detailed description is abbreviate|omitted.

FIG. 16 is a perspective view showing the outline of the film holding device 2 and the film sticking device 3 . FIG. 17 is a plan view showing the outline of the film holding device 2 and the film sticking device 3 . In FIG. 16 and FIG. 17, only the main part is shown, and illustration of a part of a structure is abbreviate|omitted. 16, the case where the frame body 10 is extended in the vertical direction is shown, and in FIG. 17, the case where the frame body 10 is extended and installed in the horizontal direction is shown.

The film holding device 2 is provided inside the film sticking device 3 and mainly includes a frame body 10 , a film holding part 20 , a measuring part 31 , imaging parts 32 , 33 , and 34 , and a platform 40 (not shown in FIG. 17 ).

The film 100 is inserted into the inner space 3b of the film attaching device 3 from the opening 3a of the film attaching device 3 by the conveying device 110 . The film 100 inserted into the inner space 3 b is placed on the stage 40 . The platform 40 has a moving mechanism not shown, and can move in the horizontal direction and the vertical direction. The film attaching device 3 has a laser irradiation part (not shown), and the positioning of the film 100 is performed by moving the stage 40 based on the laser irradiated by the laser irradiation part.

When the positioning of the film 100 is completed, the frame body 10 extending in the vertical direction is rotated as shown in FIG. 16 , and the film 100 is held by the film holding member 21 after being extended in the horizontal direction as shown in FIG. 17 .

The imaging units 32, 33, and 34 have imaging elements such as CCD and CMOS, and can continuously capture images of the object. The imaging parts 32 and 33 are provided adjacent to the opening part 3a, but are preferably provided outside the interior space 3b. The imaging unit 34 is provided inside the interior space 3b.

The photographing parts 32 , 33 and 34 are the photographing marks 23 , and are provided at a position higher than the casing 10 when the casing 10 is extended in the horizontal direction. Since the mark 23 is provided at a position that can be viewed from above or obliquely above when the frame body 10 is extended in the horizontal direction, the mark 23 can be photographed by the imaging units 32 , 33 , and 34 .

The imaging portion 32 is provided adjacent to the vertical frame portion 11 , and the imaging portion 33 is provided adjacent to the vertical frame portion 12 . In addition, the imaging units 32 and 33 are provided outside the area sandwiched between the vertical frame section 11 and the vertical frame section 12 when viewed from the upper side in the vertical direction.

FIG. 17 shows the case where the frame body 10 holds the film 100 for glass of the G10 size, and the interval between the vertical frame portion 11 and the vertical frame portion 12 is the widest at this time. The imaging portion 32 is provided at the position in the x direction of the vertical frame portion 11 when the vertical frame portion 11 is located on the most -x side or on the −x side, and the imaging portion 33 is provided when the vertical frame portion 12 is located on the most +x side. The position in the x direction of the vertical frame portion 12 is on the +x side or more.

18 : is a figure which shows the state where the imaging part 32 image|photographs the film holding member 21 provided in the vertical frame part 11, (A) is a top view, (B) is a side view. In FIG. 18 , the direction of the optical axis when the imaging unit 32 captures the mark 23 is schematically indicated by a thick arrow. Since the imaging portion 32 is provided on the +x side relative to the position of the vertical frame portion 11 in the x direction, the imaging portion 32 can reliably capture the mark 23 . If it is assumed that the imaging portion 32 is disposed on the −x side relative to the position of the vertical frame portion 11 in the x direction, as shown by the dashed arrow in FIG. Yu. On the other hand, when viewed from the upper side in the vertical direction, by providing the imaging units 32 and 33 on the outer side of the area sandwiched between the vertical frame section 11 and the vertical frame section 12 , the imaging units 32 and 33 can be accurately photographed and provided in the vertical frame respectively. The mark 23 of the film holding member 21 of the frame parts 11 and 12.

Return to the description of FIG. 17 . The imaging unit 34 is provided adjacent to the lower end portion 15 a of the frame 15 . Moreover, the imaging part 34 is provided in the outer side (-y side) of the lower end part 15a, when seeing from the upper side in the vertical direction. Therefore, the imaging part 34 can reliably image the mark 23 of the film holding member 21 provided in the lower end part 15a.

The images captured by the imaging units 32, 33, and 34 are displayed on a monitor (not shown) provided outside the interior space 3b. The imaging units 32, 33, and 34 are connected to the monitor via a network (not shown).

The photographing parts 32, 33, and 34 may be configured to adjust the direction of the optical axis. Thereby, each mark 23 can be photographed. Furthermore, since the imaging portion 34 is provided inside the interior space 3b, it is desirable to provide a cover around the imaging portion 34 in order to prevent dust from falling into the interior space 3b.

According to this embodiment, since the mark 23 can be confirmed using the images captured by the imaging units 32, 33, and 34, the operator does not need to visually observe the mark 23 in the interior space 3b. Therefore, the generation of dust can be prevented, and it can be grasped whether the front end portion 21a is surely inserted into the groove 101d.

In addition, according to the present embodiment, since the mark 23 is made black, in the images captured by the imaging units 32, 33, and 34, the metallic portion of the distal end portion 21a where the mark 23 is not provided is conspicuous, and the mark 23 can be easily recognized. In addition, since the mark 23 is made black, it is possible to prevent the occurrence of glare in the images captured by the imaging units 32, 33, and 34.

In addition, although the mark 23 has the square-shaped first mark 23a, the second mark 23b and the third mark 23c, in the images captured by the imaging units 32, 33 and 34, the first mark 23a, the second mark 23b and the third mark Mark 23c has a rectangular shape. For example, the depth direction length of the first mark 23a, the second mark 23b, and the third mark 23c of the marks 23 in the photographed image becomes longer as the distance from the imaging unit 32 increases. Moreover, the approximate position of the image|photographed mark 23 can be grasped from the depth direction length of the 1st mark 23a, the 2nd mark 23b, and the 3rd mark 23c in an image.

In addition, the mark provided on the film holding member 21 is not limited to the mark 23, and any of the marks 23A to 23E may be provided on the film holding member 21. When photographing the film holding member 21 disposed closest to the photographing portions 32, 33, and 34, the angle of the film holding member 21 viewed from the photographing portions 32, 33, and 34 is approximately 45 degrees. In the case where the marker 23B shown in FIG. 12 is used, even if a part of the marker 23B is covered by the reflector 24b, the first marker 23a, the second marker 23b and the third marker 23b can be reliably captured by the imaging units 32, 33, and 34. Mark 23c.

As mentioned above, although embodiment of this invention was described in detail with reference to drawings, a specific structure is not limited to this embodiment, and design changes etc. are included in the range which does not deviate from the summary of this invention. The manufacturer can appropriately modify, add, and convert each element of the embodiment.

In addition, in the present invention, "substantially" is a concept that includes not only the exact same situation, but also an error or deformation to the extent that the sameness is not lost. For example, the term "substantially parallel" is not limited to being strictly parallel, and includes, for example, a concept of an error of about several degrees. Moreover, for example, when it expresses only the case of being parallel, orthogonal, etc., not only the case of strict parallel, orthogonal, etc., but also the case of substantially parallel, substantially orthogonal, etc. are included. In addition, in the present invention, "nearby" means an area including a certain range (which can be arbitrarily determined) in the vicinity of the reference position. For example, in the case of the vicinity of A, it is an area representing a certain range in the vicinity of A, and the concept of A may or may not be included.

1, 2: Film holding device 3: Film attachment device 3a: Opening 3b: Internal space 10: Frame 11, 12: Vertical frame 13, 14: Upper frame 15: Box 15a: lower end 15b: upper end 20: Film holding part 21: Film holding member 21a: Front end 21b: Bending part 21c: Retention Department 21d: Front face 21e, 21f: face 21g: Boundary line 21h: Centerline 22: Drive member 22a: Rod 22b: Actuator 23, 23A, 23B, 23C, 23D, 23E: Mark 23a, 23d: 1st mark 23b, 23e: Mark 2 23c, 23f: 3rd mark 23g, 23h, 23i, 23j, 23k, 23l, 23m, 23n:Line 23o, 23p, 23q: tick marks 24: Measurement Department 24a: Ultrasonic sensor 24b: Reflector 24c: Front end 31: Measurement Department 32, 33, 34: Filming Department 40: Platform 100: Film 101: Film Frame 101a: Upper surface 101b: Lower surface 101c: Side 101d: Groove 101e: hollow part 102: Membrane of Thin Films 103: Adhesive components 110: Conveying device

1] It is a schematic front view which shows the film holding apparatus 1 of 1st Embodiment. FIG. 2 is a perspective view showing the outline of the film 100 . [Fig. 3] is a cross-sectional view taken along line A-A of Fig. 2. [Fig. FIG. 4 is a diagram showing the outline of the film holding part 20 . FIG. 5 is a diagram showing an example of the mark 23 . 6] It is a figure which shows typically the state which the front-end|tip part 21a is reliably inserted in the groove|channel 101d of the film frame 101 for glass for G10 size. [ Fig. 7] Fig. 7 is a diagram schematically showing a state in which the front end portion 21a is not securely inserted into the groove 101d of the film frame 101 for glass of the G10 size. [ Fig. 8] Fig. 8 is a diagram schematically showing a state in which the front end portion 21a is surely inserted into the groove 101d of the film frame 101 for glass having a size smaller than G10. [ Fig. 9] Fig. 9 is a diagram schematically showing a state in which the front end portion 21a is not securely inserted into the groove 101d of the film frame 101 for glass having a size smaller than G10. FIG. 10 is a diagram showing the outline of the mark 23A of the modified example. FIG. 11 is a diagram showing the outline of the mark 23B of the modification. [ Fig. 12 ] A diagram schematically showing a state in which the mark 23B is seen obliquely from above. 13 is a diagram showing the outline of the mark 23C of the modified example. FIG. 14 is a diagram showing the outline of the marker 23D of the modification. FIG. 15 is a diagram showing the outline of the mark 23E of the modification. 16 is a perspective view showing the outline of the film holding device 2 and the film sticking device 3 . 17 is a plan view showing the outline of the film holding device 2 and the film sticking device 3 . 18 is a view showing a state in which the imaging unit 32 images the film holding member 21 provided in the vertical frame portion 11 , (A) is a plan view, and (B) is a side view. [ FIG. 19 ] A diagram schematically showing a state of deformation of the film 100 . FIG. 20 is a diagram schematically showing the deformation of the thin film 100 .

1: Film holding device

10: Frame

11,12: Vertical frame

13,14: Upper frame

15: Box

15a: lower end

15b: upper end

20: Film holding part

21: Film holding member

31: Measurement Department

100: Film

101: Film Frame

101a: Upper surface

101b: Lower surface

101c: Side

102: Membrane of Thin Films

Claims (12)

A film frame holding device for holding a film, the film having: a substantially hollow cylindrical film frame with grooves formed on the side surface; and a film film provided on the film so as to cover the hollow portion of the film frame The first side of the frame that is substantially orthogonal to the above-mentioned sides; It is characterized by: A frame body, which is a frame-shaped member that combines a plurality of rod-shaped members into a substantially rectangular shape; A plurality of film holding members, etc., are provided in the above-mentioned frame; and A driving part is provided on each of the film gripping members, and causes the film gripping member to be inserted into the groove between a first position where the film gripping member is inserted, and a second position where the film gripping member is not inserted into the groove. move along the first direction; The film holding member has a plate-shaped or rod-shaped front end portion partially inserted into the groove when the film holding member is in the first position, The said front-end|tip part is provided with the mark which shows the position of the said front-end|tip part in the said 1st direction. The film frame holding device of claim 1, wherein the front end portion is formed of metal, By providing a coating layer on the surface of the said front-end|tip part, the said mark is provided in the said front-end|tip part. The film frame holding device of claim 2, wherein The above-mentioned film frame is an aluminum alloy treated with black acid-resistant aluminum, The above-mentioned coating layer is black. The film frame holding device of claim 1, wherein The above-mentioned front end portion is formed of metal, By cutting a part of the surface of the said front-end|tip part, a recessed part is formed, and the said mark is provided in the said front-end|tip part. The film frame holding device of claim 4, wherein The above-mentioned film frame is an aluminum alloy treated with black acid-resistant aluminum, The said mark is formed by coloring the inside of the said recessed part black. The film frame holding device of any one of claims 1 to 5, wherein The front end portion has a front end surface, and the front end surface is inserted into the groove when the film holding member is in the first position, and extends in a second direction substantially perpendicular to the first direction, The above-mentioned marks indicate the distances from the above-mentioned front end surfaces. The film frame holding device of claim 6, wherein The mark is not provided in a front end region sandwiched between the front end surface and a boundary line, and the boundary line is an imaginary line substantially along the second direction, and is arranged at a predetermined distance from the front end surface in the first direction. the location. The film frame holding device of claim 7, wherein The front end portion is in the shape of a plate, the above-mentioned mark is placed on the widest face of the above-mentioned front end, The above-mentioned mark has a first mark, a second mark and a third mark arranged along the above-mentioned boundary line, The length of the said 1st direction is different among the said 1st mark, the said 2nd mark, and the said 3rd mark. The film frame holding device of claim 8, wherein The above-mentioned marks have two of the above-mentioned first marks, the above-mentioned second marks and the above-mentioned third marks, respectively, The said 1st mark, the said 2nd mark, and the said 3rd mark are respectively provided in the both sides of the center line along the longitudinal direction of the said film holding member. The film frame holding device of any one of claims 1 to 9, wherein When the frame body is extended in the horizontal direction, the mark is set at a position that can be seen from above or obliquely above. According to the film frame holding device of claim 10, It has a photographing section for photographing the above marks, When the frame body is extended in the horizontal direction, the photographing part is arranged at a position higher than the frame body. The film frame holding device of claim 11, wherein The frame body has a first vertical frame and a second vertical frame held in a substantially parallel bar shape with an interval therebetween, The said film holding member is provided in each of the said 1st vertical frame and the said 2nd vertical frame, The imaging unit is provided adjacent to the first vertical frame and the second vertical frame, respectively, The said imaging part is provided in the outer side of the area|region sandwiched between the said 1st vertical frame and the said 2nd vertical frame, when seeing from the upper side in the vertical direction.

Images