CN116529861A - Protective film assembly frame holding device - Google Patents

Protective film assembly frame holding device Download PDF

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Publication number
CN116529861A
CN116529861A CN202180077475.9A CN202180077475A CN116529861A CN 116529861 A CN116529861 A CN 116529861A CN 202180077475 A CN202180077475 A CN 202180077475A CN 116529861 A CN116529861 A CN 116529861A
Authority
CN
China
Prior art keywords
mark
pellicle
frame
end portion
distal end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180077475.9A
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Chinese (zh)
Inventor
米泽良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
V Technology Co Ltd
Original Assignee
V Technology Co Ltd
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Filing date
Publication date
Application filed by V Technology Co Ltd filed Critical V Technology Co Ltd
Publication of CN116529861A publication Critical patent/CN116529861A/en
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70975—Assembly, maintenance, transport or storage of apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Epidemiology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Projection-Type Copiers In General (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

The invention provides a pellicle holding device capable of accurately holding a pellicle frame even if the pellicle frame is deformed. The device comprises: a frame (10) that is a frame-like member formed by combining a plurality of rod-like members into a substantially rectangular shape; a plurality of protective film assembly holding members (21) provided in the frame (10); and a driving unit provided for each of the pellicle holding members (21) and configured to move the pellicle holding member between a first position in which the pellicle holding member is inserted into the groove and a second position in which the pellicle holding member is not inserted into the groove. The pellicle holding member (21) has a plate-like or rod-like distal end portion, a part of which is inserted into the groove when the pellicle holding member (21) is in the first position. The distal end portion has a distal end surface which is inserted into the groove when the barrier film assembly gripping member (21) is in the first position and which extends in a second direction substantially orthogonal to the first direction which is the moving direction of the barrier film assembly gripping member. The tip end portion is provided with a mark indicating a distance from the tip end surface.

Description

Protective film assembly frame holding device
Technical Field
The present invention relates to a pellicle frame holding apparatus.
Background
Patent document 1 discloses a pellicle frame holding device that holds a pellicle frame using a pellicle frame holding portion provided in a frame body, places an adhesive member of a pellicle in contact with a mask, places a measuring portion at a first position overlapping the mask near a tip, measures a first distance as a distance to a surface of the mask, moves the measuring portion to a second position overlapping the pellicle frame near the tip, and measures a second distance as a distance to the pellicle.
Prior art literature
Patent literature
Patent document 1: japanese patent application laid-open No. 2019-128501.
Disclosure of Invention
Problems to be solved by the invention
In the invention described in patent document 1, although the distance in the height direction (direction substantially orthogonal to the pellicle film) such as the distance to the pellicle film can be accurately measured, the distance in the depth direction (direction substantially parallel to the pellicle film) cannot be measured, and there is a risk that the holding of the pellicle frame cannot be accurately performed when the pellicle frame is deformed.
The present invention has been made in view of such circumstances, and an object thereof is to provide a pellicle frame holding apparatus that can grasp whether or not a pellicle frame can be accurately held.
Solution for solving the problem
In order to solve the above-described problems, a pellicle frame holding apparatus of the present invention holds a pellicle, for example, having: a substantially hollow cylindrical pellicle frame having a groove formed in a side surface thereof; and a pellicle film provided on a first surface substantially orthogonal to the side surface of the pellicle frame so as to cover the hollow portion of the pellicle frame, wherein the pellicle holding device includes: a frame body which is a frame-shaped member formed by combining a plurality of rod-shaped members into a substantially rectangular shape; a plurality of pellicle assembly holding members provided in the frame; and a driving unit provided for each of the pellicle holding members, the driving unit moving the pellicle holding member in a first direction between a first position in which the pellicle holding member is inserted into the groove and a second position in which the pellicle holding member is not inserted into the groove, the pellicle holding member having a plate-like or rod-like distal end portion in which a part of the pellicle holding member is inserted into the groove when the pellicle holding member is in the first position, and a mark being provided at the distal end portion, the mark indicating a position of the distal end portion in the first direction.
According to the pellicle frame holding apparatus of the present invention, the pellicle holding member has a plate-like or rod-like distal end portion, a portion of which is inserted into the groove of the pellicle frame. A mark indicating a position of the barrier film assembly holding member in a first direction, which is a moving direction of the barrier film assembly holding member, is provided at the tip end portion. Thus, it is possible to grasp whether or not the tip end portion is accurately inserted into the groove, that is, whether or not the pellicle frame can be accurately grasped.
Alternatively, the tip portion is formed of metal, and the mark is provided on the tip portion by providing a coating layer on a surface of the tip portion. This makes it possible to easily provide a mark on the pellicle holding member.
Optionally, the protective film component frame is an aluminum alloy subjected to black anodic oxidation treatment, and the coating layer is black. Thereby, the color of the mark is matched with the protective film assembly frame, and the visibility of the mark can be improved.
Alternatively, the tip portion is formed of metal, and the mark is provided on the tip portion by cutting off a part of a surface of the tip portion to form a recess. This makes it possible to prevent the mark from disappearing from the tip end portion.
Optionally, the pellicle frame is an aluminum alloy subjected to black anodizing treatment, and the marks are formed by coloring the inside of the concave portion black. Thereby, the color of the mark is matched with the protective film assembly frame, and the visibility of the mark can be improved.
Alternatively, the tip end portion has a tip end surface extending in a second direction substantially orthogonal to the first direction, the tip end surface being inserted into the groove when the barrier film assembly gripping member is in the first position, the mark indicating a distance from the tip end surface. Thus, it is possible to grasp whether or not the distal end surface is in contact with the bottom surface of the groove, that is, whether or not the pellicle frame can be accurately grasped.
Alternatively, the mark is not provided in a tip region sandwiched between the tip surface and a boundary line, the boundary line being a virtual line substantially along the second direction, the boundary line being disposed at a position separated from the tip surface by a predetermined distance in the first direction. This prevents the mark from being shaved off and dust from being generated.
Optionally, the tip portion is plate-shaped, the mark is provided on a widest surface of the tip portion, the mark has a first mark, a second mark, and a third mark arranged along the boundary line, and lengths of the first mark, the second mark, and the third mark in the first direction are respectively different. This makes it possible to easily know how much the distal end portion is moved again, and to accurately insert the distal end portion into the groove.
Optionally, the mark has two first marks, two second marks and two third marks, and the first marks, the second marks and the third marks are respectively disposed on both sides of a center line of the protective film assembly holding member in a long side direction. Thus, even if the reflection plate or the like is provided on the upper side in the vertical direction of the distal end portion, the mark can be reliably seen.
Alternatively, when the frame is extended in the horizontal direction, the mark is provided at a position visible from above or obliquely above. Thus, the mark can be easily seen.
Alternatively, there is provided a photographing part photographing the mark, the photographing part being disposed at a position higher than the frame when the frame is extended in a horizontal direction. This eliminates the need for an operator to visually mark the inside space, and can prevent dust from being generated.
Alternatively, the frame body may have a first vertical frame and a second vertical frame in a bar shape held substantially parallel to each other with a space therebetween, the barrier film assembly holding member may be provided to the first vertical frame and the second vertical frame, respectively, the image pickup unit may be provided adjacent to the first vertical frame and the second vertical frame, respectively, and the image pickup unit may be provided outside a region sandwiched between the first vertical frame and the second vertical frame when viewed from a vertical upper side. This can avoid a situation where the mark cannot be photographed due to shielding by the pellicle frame.
Effects of the invention
According to the present invention, it is possible to grasp whether or not the pellicle frame can be accurately grasped.
Drawings
Fig. 1 is a front view schematically showing a pellicle film holding apparatus 1 according to a first embodiment.
Fig. 2 is a perspective view schematically showing the pellicle assembly 100.
Fig. 3 is a cross-sectional view A-A of fig. 2.
Fig. 4 is a schematic view of the pellicle gripping unit 20.
Fig. 5 is a diagram showing an example of the mark 23.
Fig. 6 is a diagram schematically showing a case where the distal end portion 21a is accurately inserted into the groove 101d of the G10-sized glass pellicle frame 101.
Fig. 7 is a diagram schematically showing a case where the distal end portion 21a is not correctly inserted into the groove 101d of the G10-sized glass pellicle frame 101.
Fig. 8 is a diagram schematically showing a case where the distal end portion 21a is accurately inserted into the groove 101d of the pellicle frame 101 for glass having a smaller size than G10.
Fig. 9 is a diagram schematically showing a case where the tip end portion 21a is not correctly inserted into the groove 101d of the pellicle frame 101 for glass having a smaller size than G10.
Fig. 10 is a diagram schematically showing a mark 23A according to a modification.
Fig. 11 is a schematic diagram of a mark 23B according to a modification.
Fig. 12 is a diagram schematically showing a case where the mark 23B is viewed from obliquely above.
Fig. 13 is a schematic diagram of a mark 23C according to a modification.
Fig. 14 is a schematic diagram of a modified example of the mark 23D.
Fig. 15 is a diagram schematically showing a mark 23E according to a modification.
Fig. 16 is a perspective view schematically showing the protective film assembly holding device 2 and the protective film assembly sticking device 3.
Fig. 17 is a plan view schematically showing the protective film assembly gripping device 2 and the protective film assembly sticking device 3.
Fig. 18 is a diagram showing a case where the photographing section 32 photographs the pellicle film assembly gripping member 21 provided in the vertical frame section 11, where (a) is a top view and (B) is a side view.
Fig. 19 is a diagram schematically showing a case where the pellicle assembly 100 is deformed.
Fig. 20 is a diagram schematically showing a case where the pellicle assembly 100 is deformed.
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same elements are denoted by the same reference numerals, and overlapping portions will not be described.
< first embodiment >, first embodiment
Fig. 1 is a front view schematically showing a pellicle film holding apparatus 1 according to a first embodiment. The protective film assembly holding device 1 is provided in a protective film assembly sticking device, not shown. The pellicle assembly adhering apparatus is an apparatus for adhering the pellicle assembly 100 held by the pellicle holding apparatus 1 to a substantially plate-shaped mask (not shown) held substantially in the vertical direction.
Hereinafter, the horizontal direction is defined as a direction along the xy plane, and the vertical direction orthogonal to the xy plane is defined as the z direction. In addition, the x-direction is orthogonal to the y-direction.
First, the pellicle assembly 100 will be described. Fig. 2 is a perspective view schematically showing the pellicle assembly 100. Fig. 3 is a cross-sectional view A-A of fig. 2. The pellicle assembly 100 mainly includes a pellicle assembly frame 101, a pellicle film 102 stretched over the pellicle assembly frame 101, and an adhesive member 103 (see fig. 3) formed on the lower surface of the pellicle assembly frame 101.
The pellicle frame 101 is a frame-like (substantially hollow cylindrical) member having a substantially rectangular outer periphery. The pellicle frame 101 has a substantially rectangular shape in plan view (as viewed from above the paper surface of fig. 2), and has a hollow portion 101e in the central portion. The hollow portion 101e of the pellicle frame 101 has a size equal to that of the photomask (for example, about 520mm×800mm to 1620mm×1780 mm). The width of the frame-like portion of the pellicle frame 101 is about several tens of mm, and the thickness is about 2mm to 10 mm.
The pellicle assembly frame 101 has generally parallel upper and lower surfaces 101a, 101b. Further, a groove 101d is formed in a side surface 101c of the pellicle frame 101 orthogonal to the upper surface 101a and the lower surface 101b. The pellicle holding member 21 (described in detail later) provided in the housing 10 is inserted into the groove 101d.
The slots 101d vary depending on the size of the pellicle assembly frame 101. For example, in the case of the pellicle frame 101 for G10 glass (1620 mm×1780 mm), the depth d is approximately 3mm and the width w is approximately 1.5mm to 2mm. In the case of the pellicle frame 101 for glass smaller than G10, the depth d is approximately 2mm and the width w is approximately 1.5mm to 2mm.
In the present embodiment, the pellicle frame 101 is an aluminum alloy subjected to black anodizing treatment, but the material of the pellicle frame 101 is not limited thereto. For example, the pellicle frame 101 may be formed using a metal such as iron, invar, titanium, or a titanium alloy.
The protective film 102 is a film of submicron thickness. The pellicle 102 is stretched over the upper surface 101a of the pellicle frame 101 so as to cover the hollow portion 101e of the pellicle frame 101. When the pellicle frame 101 is attached to a photomask substrate, the pellicle 102 is disposed at a predetermined distance from the pattern forming surface (surface) of the mask.
The adhesive member 103 is provided on the lower surface 101b of the pellicle assembly frame 101. The adhesive member 103 is formed in a rim shape on the entire periphery of the pellicle frame 101. The adhesive member 103 may be a known adhesive member, for example, a hot melt adhesive.
A release layer (liner sheet) for protecting the adhesive is attached to the lower end surface of the adhesive member 103. The release layer is provided with a plurality of projections protruding from the pellicle frame 101, and is provided in a pellicle storage container (not shown) by adhesion, or the like.
The pellicle 100 is carried into the inside of the pellicle assembly attaching apparatus in a state of being placed in the pellicle assembly housing container. At this time, the upper surface 101a and the lower surface 101b of the pellicle assembly frame 101 are substantially along the horizontal direction.
The description returns to fig. 1. The pellicle gripping apparatus 1 mainly includes a housing 10, a pellicle gripping unit 20, and a measuring unit 31. The pellicle holding unit 20 and the measuring unit 31 are provided in the housing 10.
First, the operation of the pellicle assembly attaching apparatus (not shown) in which the pellicle assembly holding apparatus 1 is provided will be briefly described. In addition to the pellicle gripping device 1, a mask (not shown) held in a substantially vertical direction by a holding portion (not shown) is provided inside the pellicle assembly attaching device. When the pellicle 100 is carried into the inside of the pellicle assembly attaching apparatus in a substantially horizontal direction in a state of being placed in a pellicle assembly container (not shown), the frame 10 is substantially in a vertical direction. Then, the frame 10 is rotated to be in a substantially horizontal direction, the pellicle 100 is gripped by the pellicle gripping unit 20, and the frame 10 is moved upward in the vertical direction to peel off the release layer (not shown) from the pellicle 100. The frame 10 is rotated in a state where the pellicle assembly 100 with the adhesive member 103 (not shown in fig. 1) exposed is held, so that the frame 10 is in a state where the frame 10 is substantially in the vertical direction, and the frame 10 is moved in parallel to adhere the adhesive member 103 to the mask.
Next, the structure of the pellicle holding apparatus 1 will be described. The frame 10 is a frame-like member formed by combining a plurality of rod-like members into a substantially rectangular shape. The frame 10 mainly includes vertical frame portions 11, 12, upper frame portions 13, 14, and a frame 15 provided outside the vertical frame portions 11, 12 and the upper frame portions 13, 14. The vertical frame portions 11, 12, the upper frame portions 13, 14, and the frame 15 are formed of a metal such as iron or aluminum.
When the pellicle 100 is gripped by the pellicle gripping unit 20, the frame 10 extends in the horizontal direction (substantially along the xy plane) as shown in fig. 1.
The vertical frame portions 11 and 12 are bar-shaped members provided along the y-direction in the longitudinal direction, and are provided so as to be movable along the lower end portion 15a and the upper end portion 15b (i.e., along the x-direction) of the frame 15. The mechanism for moving the vertical frame portions 11, 12 in the x direction can use various known techniques. When the frame 10 is extended in the vertical direction, the vertical frame portions 11 and 12 are extended substantially in the vertical direction.
The upper frame portions 13 and 14 are bar-shaped members provided along the x-direction in the longitudinal direction, and are provided so as to be movable along the longitudinal frame portions 11 and 12 (i.e., along the y-direction), respectively. The mechanism for moving the upper frame portions 13 and 14 in the y direction can use various known techniques. When the frame 10 is extended in the vertical direction, the upper frame portions 13 and 14 are extended substantially horizontally near the upper ends of the vertical frame portions 11 and 12.
The form of the upper frame portions 13 and 14 is not limited to this. For example, the upper frame portion may be formed of a single bar-like member extending substantially horizontally, and the vicinity of both ends of the single bar-like member may be provided in the vertical frame portions 11, 12.
By making the vertical frame portions 11, 12 and the upper frame portions 13, 14 movable in this manner, the size of the frame constituted by the vertical frame portions 11, 12, the upper frame portions 13, 14, and the lower end portion 15a can be changed to correspond to the various sizes of the pellicle assembly 100. The pellicle 100 may be, for example, a size of 420mm×720mm, a size of 700mm×800mm, a size of 520mm×680mm, a size of 750mm×1300mm, or a size of 1520mm×1680 mm.
The frame 10 is provided to be movable in the vertical direction and the horizontal direction by a not-shown movement mechanism (including an actuator). The housing 10 is provided with a not-shown rotation shaft provided near the-y-side end, and is rotatable by a not-shown movement mechanism (including an actuator). The mechanism for moving and rotating the housing 10 is well known, and therefore, the description thereof will be omitted.
In standby (when the pellicle assembly 100 is carried in, etc.), the frame 10 is in a state in which the surface formed by the frame 15 extends in the vertical direction (the frame 10 extends in the vertical direction). When the pellicle 100 is carried into the pellicle assembly attaching apparatus and is positioned, the frame 10 is rotated about the rotation axis, and the surface formed by the frame 15 is set in a state in which it extends in the horizontal direction (the frame 10 is set in a state in which it extends in the horizontal direction). Thereby, the pellicle assembly gripping unit 20 can grip the pellicle assembly 100.
When the pellicle 100 is gripped by the pellicle gripping unit 20, the frame 10 moves upward in the vertical direction, and the adhesive member 103 is separated from the release layer. The adhesive member 103 has a property of strong adhesion to sudden strong force but weak adhesion to sustained weak force, and thus the treatment of releasing the adhesive member 103 from the release layer is slowly performed for about 30 minutes to 1 hour.
When the adhesive member 103 is separated from the release layer, the frame 10 rotates about the rotation axis, and the frame 10 is set in a state extending in the vertical direction. Thereby, the pellicle assembly 100 can be attached to the mask. When the pellicle 100 is attached to the mask, the frame 10 is tilted with respect to the vertical direction so that the distance between the lower surface 101b on the upper end side and the mask is closer than the distance between the lower surface 101b on the lower end side and the mask. When the pellicle assembly 100 is attached to a mask, the frame 10 is arranged in a state of extending in the vertical direction so as to be parallel to the horizontal direction.
The pellicle clamping unit 20 has a plurality of pellicle clamping members 21 that clamp the side surfaces 101c of the pellicle frame 101. The pellicle holding member 21 is provided at the vertical frame portions 11, 12, the upper frame portions 13, 14, the lower end portion 15a, and the upper end portion 15b.
In the example shown in fig. 1, 5 barrier film module holding members 21 are provided in the vertical frame portions 11, 12, 1 barrier film module holding member 21 is provided in the upper frame portions 13, 14, 5 barrier film module holding members 21 are provided in the lower end portion 15a, and 1 barrier film module holding member 21 is provided in the upper end portion 15b, but the positions and the number of the barrier film module holding members 21 are not limited thereto.
The used barrier film assembly holding member 21 differs according to the size of the barrier film assembly 100. In fig. 1, only the pellicle holding member 21 that abuts the pellicle 100 (here, the side surface 101 c) among the pellicle holding members 21 provided in the housing 10 is used.
The pellicle holding member 21 is provided so as to be movable in the horizontal direction or the vertical direction between an insertion position where a part of the insertion groove 101d is inserted and a retracted position where the holding member is not in contact with the side surface 101 c. Fig. 4 is a schematic view of the pellicle gripping unit 20.
The pellicle holding member 21 is a plate-like or rod-like member made of metal. In the present embodiment, the pellicle holding member 21 is made of stainless steel (for example, SUS 304).
The pellicle holding member 21 is formed by bending a plate-like member, and mainly includes a distal end portion 21a, a bending portion 21b, and a holding portion 21c provided with a driving member 22. When the pellicle holding member 21 is at the insertion position, a part of the distal end portion 21a is inserted into the groove 10d.
In the present embodiment, the pellicle holding member 21 is bent at substantially right angles at both ends of the bending portion 21 b. However, the bending angle of the pellicle holding member 21 is not limited to a substantially right angle.
The distal end portion 21a has a distal end surface 21d that is inserted into the groove 101d when the barrier film assembly holding member 21 is in the insertion position. The distal end surface 21d is an end surface of a plate-like member, and extends in a direction substantially orthogonal to the moving direction of the barrier film assembly holding member 21. For example, the movement direction of the barrier film assembly holding member 21 provided in the vertical frame portions 11, 12 is the x direction, and the distal end surface 21d is provided substantially along the y direction (substantially parallel to the yz plane). When the pellicle holding member 21 is accurately inserted into the groove 101d, the distal end surface 21d abuts against the bottom surface of the groove 101d.
A mark (not shown in fig. 4) indicating the position of the distal end portion 21a in the moving direction (x direction in fig. 4) of the barrier film assembly holding member 21 is provided on the distal end portion 21a. In the present embodiment, a mark indicating a distance from the distal end surface 21d is provided at the distal end portion 21a. The mark is provided at a position that can be seen from above when the frame 10 is extended in the horizontal direction. In the present embodiment, the distal end portion 21a has a plate shape, and a mark is provided on a surface 21f which is the widest surface of the distal end portion 21a and which is a surface on the upper side (+z side) in the vertical direction. By looking at the mark, the operator can confirm the position of the distal end portion 21a in the x direction, and can confirm whether or not the pellicle holding member 21 is correctly inserted into the groove 101d. As for the marks, they will be described in detail later.
The pellicle holding member 21 (holding portion 21 c) is provided with a driving member 22. The driving member 22 has a lever 22a and an actuator 22b that moves the lever 22 a. The pellicle holding member 21 is coupled to the lever 22 a. The actuator 22b is provided in the housing 10 (not shown in fig. 4).
The pellicle holding member 21 is moved by the driving member 22 in the horizontal direction between an insertion position (see the solid line in fig. 4) where the pellicle holding member 21 is inserted into the groove 101d, and a retracted position (see the one-dot chain line in fig. 4) where the pellicle holding member 21 is not inserted into the groove 101d and the pellicle holding member 21 does not interfere with the pellicle frame 101.
The pellicle holding members 21 are provided with measurement units 24 for measuring the height (z-direction position) of the pellicle frame 101. The measuring section 24 mainly includes an ultrasonic sensor 24a and a reflecting plate 24b. The measuring unit 24 is not essential, and the form of the measuring unit 24 is not limited thereto.
The ultrasonic sensor 24a is a distance measuring sensor that transmits ultrasonic waves to an object and receives reflected waves thereof, and measures the distance to the object based on the time interval between signal transmission and reflected wave reception. The ultrasonic sensor 24a is already known, and thus a detailed description thereof is omitted.
The reflection plate 24b is provided on the upper side (+z side) of the pellicle assembly holding member 21. The reflection plate 24b reflects the ultrasonic wave transmitted from the ultrasonic sensor 24 a. The tip end portion 24c of the reflection plate 24b is inclined at approximately 45 degrees with respect to the xy plane. Accordingly, the ultrasonic wave transmitted from the ultrasonic sensor 24a is reflected downward (-z direction) (refer to the two-dot chain line of fig. 4).
The description returns to fig. 1. The measuring unit 31 includes a distance measuring sensor (e.g., an ultrasonic sensor) and a reflecting plate, and measures the height (z-direction position) of the mask/pellicle frame 101. The measuring section 31 is provided in the housing 10, and is provided in the upper frame sections 13, 14. The measuring section 31 is provided at a position different from the pellicle holding member 21 when viewed from a direction (z direction in this case) substantially orthogonal to the extending direction of the rod-like members (for example, the upper frame sections 13 and 14) constituting the frame 10.
The two measuring portions 31 are provided near the upper side and near the left end of the housing 10, respectively, and near the upper side and near the right end of the housing 10. However, the positions and the number of the measurement portions 31 are not limited to those shown in fig. 1.
The measuring section 31 is provided so as to be movable in the vertical direction between a first position (see the solid line in fig. 1) where the vicinity of the tip overlaps the mask, and a second position (see the two-dot chain line in fig. 1) where the vicinity of the tip overlaps the pellicle assembly frame 101.
Next, a mark provided on the pellicle holding member 21 will be described. The following will describe the marking by taking the pellicle film holding member 21 provided in the vertical frame 12 as an example. Fig. 5 is a diagram showing an example of the mark 23.
First, the material of the mark 23 will be described. The mark 23 is provided on the pellicle assembly holding member 21 by providing a coating layer on the surface of the pellicle assembly holding member 21. This makes it possible to easily provide the mark 23 on the pellicle holding member 21. In this embodiment, a fluororesin having resistance to a solvent such as isopropyl alcohol is used for the coating layer.
Further, the coating layer used for the mark 23 is preferably black. The portion of the pellicle holding member 21 where the mark 23 is not provided is metallic (e.g., silver). By setting the mark 23 to black, the color of the mark 23 is made to coincide with the black pellicle frame 101, and the portion where the metal color of the mark 23 is not provided can be made conspicuous.
In fig. 5, although the coating layer is provided on the surfaces of the distal end portion 21a, the bent portion 21b, and the holding portion 21c of the pellicle gripping member 21, at least the coating layer (i.e., the mark 23) may be provided on the distal end portion 21a, and the coating layer may not be provided on the surfaces of the bent portion 21b and the holding portion 21 c.
Next, the shape of the mark 23 will be described. The mark 23 is not provided in the distal region R sandwiched between the distal surface 21d and the boundary line 21 g. The boundary line 21g is a virtual line extending substantially along the extending direction (here, y direction) of the distal end surface 21d, and is disposed at a position separated from the distal end surface 21d by a predetermined distance (distance l in fig. 5) in a direction substantially orthogonal to the distal end surface 21d (here, x direction). Since the boundary line 21g and the tip region R are virtual lines and regions, they are indicated by broken lines in fig. 4.
The distance l between the distal end surface 21d and the boundary line 21G is preferably 3mm or more, which is the depth d of the groove 101d provided in the pellicle frame 101 for large glass (G10 glass). In the present embodiment, the distance l is set to approximately 3mm. Thus, when the distal end portion 21a is inserted into the groove 101d, the mark 23 can be prevented from contacting the pellicle frame 101 (edge portion of the groove 101 d).
When the mark 23 comes into contact with the edge portion of the groove 101d, there is a possibility that the mark 23 is shaved off by the edge to generate dust. Since it is necessary to prevent dust generation (preferably, no dust generation) as much as possible by attaching the pellicle 100 to the mask, it is preferable that the mark 23 is not provided in the tip region R that is likely to contact the groove 101 d.
The marks 23 have a first mark 23a, a second mark 23b, and a third mark 23c arranged along the boundary line 21 g. The first mark 23a, the second mark 23b, and the third mark 23c are different in length in at least the x direction.
In the present embodiment, the first mark 23a, the second mark 23b, and the third mark 23c have square shapes, the length of each side of the first mark 23a is approximately 1mm, the length of each side of the second mark 23b is approximately 1.5mm, and the length of each side of the third mark 23c is approximately 2mm. Therefore, the first mark 23a indicates a distance of approximately 4mm from the distal end surface 21d, the second mark 23b indicates a distance of approximately 4.5mm from the distal end surface 21d, and the third mark 23c indicates a distance of approximately 5mm from the distal end surface 21 d. In this way, the distance from the distal end surface 21d is indicated by the mark 23.
In the present embodiment, the first mark 23a, the second mark 23b, and the third mark 23c have square shapes, but the shapes of the first mark 23a, the second mark 23b, and the third mark 23c are not limited to square shapes, and may be rectangular shapes including rectangular shapes, semicircular shapes, or semi-elliptical shapes.
Fig. 6 is a diagram schematically showing a case where the tip end portion 21a of the pellicle holding member 21 is accurately inserted into the groove 101d of the G10-sized glass pellicle frame 101.
Since the depth d of the groove 101d and the distance l between the distal end surface 21d and the boundary line 21g are substantially the same, when the distal end portion 21a is accurately inserted into the groove 101d, the opening (side surface 101 c) of the groove 101d overlaps the boundary line 21g when viewed from above. Therefore, the boundary line 21g is not visible when viewed from above, and only the first mark 23a, the second mark 23b, and the third mark 23c can be seen.
Fig. 7 is a diagram schematically showing a case where the distal end portion 21a is not correctly inserted into the groove 101d of the G10-sized glass pellicle frame 101.
Since the depth d of the groove 101d and the distance l between the tip surface 21d and the boundary line 21g are substantially the same, when the tip portion 21a is not correctly inserted into the groove 101d, the boundary line 21g can be seen when viewed from above. By comparing the distance l' between the side surface 101c and the boundary line 21g with the lengths of the first mark 23a, the second mark 23b, and the third mark 23c in the x direction, the gap between the bottom surface of the groove 101d and the tip surface 21d, that is, the degree to which the tip portion 21a is moved again, can be known, and the tip portion 21a can be accurately inserted into the groove 101d. In the example shown in fig. 7, the distance l' is approximately equal to the length of the first mark 23a in the x direction, and therefore, it is clear that the gap between the bottom surface and the distal end surface 21d of the groove 101d is approximately 1mm.
Fig. 8 is a diagram schematically showing a case where the distal end portion 21a is accurately inserted into the groove 101d of the pellicle frame 101 for glass having a smaller size than G10.
Since the depth d of the groove 101d is smaller than the distance l between the distal end surface 21d and the boundary line 21g by 1mm, the distance l' between the side surface 101c and the boundary line 21g substantially coincides with the length of the first mark 23a in the x direction when the distal end portion 21a is accurately inserted into the groove 101d.
Fig. 9 is a diagram schematically showing a case where the distal end portion 21a is not correctly inserted into the groove 101d of the pellicle frame 101 for glass having a smaller size than G10.
When the distal end portion 21a is not correctly inserted into the groove 101d, the distance l' between the side surface 101c and the boundary line 21g is greater than the length of the first mark 23a in the x direction. By comparing the distance l' between the side surface 101c and the boundary line 21g with the lengths of the first mark 23a, the second mark 23b, and the third mark 23c in the x direction, it is possible to know the gap between the bottom surface of the groove 101d and the distal end surface 21d, that is, to know how much the distal end portion 21a is moved again, and to accurately insert the distal end portion 21a into the groove 101d. In the example shown in fig. 9, the distance l' is substantially equal to the length of the second mark 23b in the x direction, and therefore, it is clear that the gap between the bottom surface and the distal end surface 21d of the groove 101d is substantially 0.5mm.
According to the present embodiment, by looking at the mark 23, it is possible to grasp the position of the distal end portion 21a, and further, whether or not the distal end portion 21a is correctly inserted into the groove 101d. When the distal end portion of the mark 23 is not provided in the groove, it is not known whether or not the distal end portion is inserted into the groove to a deep position, but by providing the mark 23 in the distal end portion 21a, it is possible to confirm whether or not the pellicle frame 101 is accurately gripped by merely looking at the mark 23.
Further, according to the present embodiment, the distance between the bottom surface and the distal end surface 21d of the groove 101d can be known by looking at only the mark 23. Therefore, when the distal end portion 21a is not correctly inserted into the groove 101d, the pellicle frame 101 can be accurately gripped by the pellicle gripping member 21 by moving the vertical frame portions 11, 12 and the upper frame portions 13, 14, or by moving the driving member 22 to move the pellicle gripping member 21.
Fig. 19 and 20 are diagrams schematically showing a case where the pellicle assembly 100 is deformed. In the case shown in fig. 19, the pellicle 100 is deformed such that the central portions of the respective sides of the pellicle 100 are recessed. In the structure in which the pellicle frame 101 is bonded with the pellicle film 102 to form the pellicle assembly 100, the deformation as shown in fig. 19 is likely to occur, and the size of the recess is approximately 1 to 2mm. Since the depth of the groove 101d is approximately 2mm to 3mm, the pellicle 100 may not be accurately held by the pellicle holding member 21 inserted near the center of the +x side of the pellicle 100.
In the case shown in fig. 20, the pellicle 100 is deformed such that the +x side edge of the pellicle 100 is displaced from the-x side edge (approximately 2 mm). In this case, the pellicle 100 may not be accurately held by the pellicle holding member 21 inserted near the-x side end of the +y side of the pellicle 100.
If the frame 10 is moved upward in the extending direction or the frame 10 is rotated in a state where the pellicle frame 101 cannot be accurately held by the pellicle holding member 21, the pellicle 100 may be dropped from the frame 10. In contrast, it is possible to grasp whether or not the pellicle frame 101 can be accurately gripped before the frame 10 is moved in parallel and rotated, and therefore, an accident in which the pellicle 100 falls can be prevented.
Further, according to the present embodiment, since the mark 23 is not provided in the tip region R where insertion of the slit 101d is possible, dust generated by the shaving off of the pellicle holding member 21 and the pellicle frame 101 when the pellicle holding member 21 is inserted into the slit 101d can be prevented.
The grooves 101d are often formed by cutting, but there is a possibility that irregularities may be generated on the machined surface by cutting. When the adhesive member 103 is separated from the release layer, the frame 10 is moved upward in the vertical direction in a state in which the distal end portion 21a is inserted into the groove 101d, and therefore the surface 21f is in contact with the machined surface of the cutting process, and a force of about 1kgf is continuously applied to the surface 21 f. Since the mark 23 is provided on the surface 21f, if the mark 23 is provided on the tip region R, the mark 23 is likely to be scraped off by the convex portion of the finished surface to generate dust. In contrast, the mark 23 is not provided in the distal end region R, so that dust can be prevented from being generated.
In the present embodiment, the mark 23 is provided on the tip portion 21a by providing a coating layer on the surface, but the form of the mark is not limited to this. For example, the mark may be provided on the tip end portion 21a by cutting off a part of the surface of the tip end portion 21a of the pellicle holding member 21 to form a concave portion. In this case, the mark does not disappear from the tip portion 21a. In order to improve visibility, the inside of the concave portion is preferably colored with ink or the like. In particular, it is preferable to color the inside of the concave portion with black so that the black pellicle frame 101 matches the color of the mark.
In the present embodiment, the depth d of the groove 101d of the G10-sized glass pellicle frame 101 and the distance l between the distal end surface 21d and the boundary line 21G are substantially the same (3 mm), but the distance l may be equal to or greater than the depth d of the groove 101d of the G10-sized glass pellicle frame 101 (equal to or greater than 3 mm). For example, when the distance between the distal surface 21d and the boundary line 21g is 4mm, if the distance between the side surface 101c and the boundary line 21g is substantially equal to the length of the first mark 23a in the x direction, it is known that the distal end portion 21a is correctly inserted into the groove 101d, and if the distance between the side surface 101c and the boundary line 21g is greater than the length of the first mark 23a in the x direction, it is known that the distal end portion 21a is incorrectly inserted into the groove 101d.
In the present embodiment, the distal end portion 21a is a plate-shaped member formed by bending a plate-shaped member, but the form of the distal end portion 21a is not limited thereto. For example, the tip end portion 21a may have a rod shape. The pellicle holding member 21 may or may not be bent. However, in order to improve visibility, it is preferable that the mark is provided at a position that can be seen from above or obliquely above when the frame 10 is extended in the horizontal direction.
In the present embodiment, the mark 23 is provided on the surface 21f which is the widest surface of the distal end portion 21a and is the surface on the upper side (+z side) in the vertical direction, but the surface on which the mark 23 is provided is not limited to the surface 21f. For example, the mark 23 may be provided on a surface 21e which is the widest surface of the distal end portion 21a other than the surface 21f. When the mark 23 is provided on the surface 21e, the mark 23 can be seen when the housing 10 is extended in the vertical direction.
In the present embodiment, the mark 23 having three marks, i.e., the first mark 23a, the second mark 23b, and the third mark 23c, is used, but a mark having one or two marks among the first mark 23a, the second mark 23b, and the third mark 23c may be used, or a mark having a mark other than the first mark 23a, the second mark 23b, and the third mark 23c (for example, a mark having a length of each side of approximately 2.5 mm) may be used.
In the present embodiment, the mark 23 indicating the distance from the distal end surface 21d is provided at the distal end portion 21a, but the mark may be a position of the distal end portion 21a in the moving direction of the barrier film assembly holding member 21. For example, when the barrier film holder 21 moves in the x direction, the distal end portion 21a may be divided into a plurality of regions adjacent to each other in the x direction (each region is provided in a band-like extending manner in the y direction), and a mark having a different color may be given to each region, thereby forming a mark indicating the position of the barrier film holder 21 in the movement direction. In this case, the position of the distal end portion 21a in the x direction can be grasped from the color of the visible mark, and whether or not the distal end portion 21a is correctly inserted into the groove 101d can be grasped.
Modification 1 of the mark
In the first embodiment, the mark 23 is formed by forming a coating layer except for the portions of the first mark 23a, the second mark 23b, and the third mark 23c, but the form of the mark having the first mark 23a, the second mark 23b, and the third mark 23c is not limited thereto.
Fig. 10 is a diagram schematically showing a mark 23A according to a modification. The mark 23A is formed by providing a coating layer only on portions of the first mark 23d, the second mark 23e, and the third mark 23 f. The positions and shapes of the first mark 23d, the second mark 23e, and the third mark 23f are the same as those of the first mark 23a, the second mark 23b, and the third mark 23 c. By looking at the mark 23A, it can be grasped whether or not the distal end portion 21a is correctly inserted into the groove 101d.
The mark 23A may be formed by cutting off a part of the surface of the tip portion 21a to form a recess and coloring the inside.
Modification 2 of the mark
Modification 2 of the mark is a form in which the mark has a plurality of first marks 23a, second marks 23b, and third marks 23c. Fig. 11 is a schematic diagram of a mark 23B according to a modification.
The marks 23B have two first marks 23a, two second marks 23B, and two third marks 23c. The first mark 23a, the second mark 23b, and the third mark 23c are provided on both sides of the center line 21h of the barrier film assembly holding member 21 in the longitudinal direction, respectively.
Fig. 12 is a diagram schematically showing a case where the mark 23B is viewed from obliquely above. When the mark 23B is viewed from obliquely above, there is a possibility that a part of the mark 23B is blocked from view by the reflection plate 24B. For example, as shown in fig. 12, when the mark 23B is viewed from the front side at an angle of about 45 degrees, the rear side of the center line 21h of the mark 23B cannot be seen.
Even in such a case, by providing the first mark 23a, the second mark 23b, and the third mark 23c on both sides of the center line 21h, the first mark 23a, the second mark 23b, and the third mark 23c can be reliably seen.
Further, by disposing the smallest first mark 23a near both ends of the barrier film assembly holding member 21 that is easy to see, and disposing the largest third mark 23c near the center line 21h, visibility can be improved. However, the arrangement of the first mark 23a, the second mark 23b, and the third mark 23c is not limited to the configuration shown in fig. 11 and 12.
Modification 3 of the mark
Modification 3 of the mark is a form in which the mark does not have the first mark, the second mark, and the third mark. Fig. 13 is a schematic diagram of a mark 23C according to a modification.
The mark 23C has lines 23g, 23h, 23i, 23j substantially parallel to the tip surface 21 d. The line 23g is provided on the boundary line 21g, and the line 23i is provided at a position substantially 1mm away from the boundary line 21g in the +x direction. The lines 23h and 23j are thinner and shorter than the lines 23g and 23i, and are provided at positions separated from the lines 23g and 23i by approximately 0.5mm toward the +x side of the lines 23g and 23i, respectively.
The lines 23g, 23h, 23i, 23j are disposed near both ends of the pellicle holding member 21, so that the mark 23C can be reliably seen even if the reflecting plate 24b is provided on the pellicle holding member 21.
In addition, the lines 23g, 23h, 23i, 23j may be lines of the same length and thickness. The lines 23g, 23h, 23i, 23j may be two lines separated from each other at the center, or may be one continuous line. Further, the positions and the number of lines constituting the mark 23C are not limited thereto.
In addition, when the rod-shaped distal end portion 21a is used, the area where the mark can be provided is small, and therefore, the mark 23C of the present modification constituted only by a line is preferably used. Since the mark 23C is not provided in the tip region R, the mark 23C may be formed by a coating layer, or the mark 23C may be formed by cutting off a part of the surface of the tip portion 21 a.
Modification of the mark 4 >
Modification 4 of the mark is a form in which the mark is provided in the tip region R. Fig. 14 is a schematic diagram of a modified example of the mark 23D.
The mark 23D has three lines 23k, 23l, 23m. The line 23k is located at a position substantially 1mm away from the distal end surface 21d in the +x direction, the line 23l is located at a position substantially 2mm away from the distal end surface 21d in the +x direction, and the line 23m is located at a position substantially 3mm away from the distal end surface 21d in the +x direction.
Since the depth d of the groove 101d and the distance between the tip surface 21d and the line 23m are substantially the same, when the tip portion 21a is accurately inserted into the groove 101d, the opening (side surface 101 c) of the groove 101d overlaps the line 23m when viewed from above, and the lines 23k, 23l, 23m cannot be seen.
In contrast, when the distal end portion 21a is not inserted into the groove 101d correctly, any one of the lines 23k, 23l, 23m can be seen when viewed from above. Further, the gap between the bottom surface and the distal end surface 21d of the groove 101d can be known depending on whether any of the lines 23k, 23l, 23m can be seen. For example, when the lines 23l and 23m can be seen, it is found that the gap between the bottom surface and the distal end surface 21d of the groove 101d is 2mm or more.
The lines 23k, 23l, 23m are also disposed near both ends of the pellicle holding member 21, so that the mark 23D can be reliably seen even if the reflecting plate 24b is provided on the pellicle holding member 21.
In the present modification, since the mark 23D is provided in the distal end region R, it is preferable to provide a mark formed by cutting off a part of the surface of the distal end portion 21a to become a concave portion, not a mark formed by coating the surface of the distal end portion 21 a. When the pellicle holding member 21 is inserted into the groove 101d, it is difficult to remove the pellicle holding member 21 and the pellicle frame 101, and dust can be generated.
Modification 5 of the mark
Modification 5 of the mark is a form in which the mark is also provided in the tip region R. Fig. 15 is a diagram schematically showing a mark 23E according to a modification.
The mark 23E has two lines 23n and graduation marks 23o, 23p, 23q which abut against the distal end face 21d and are inclined with respect to the distal end face 21 d. The graduations 23o, 23p, and 23q are provided along a direction (x-direction) substantially orthogonal to the tip end surface 21 d. The graduation mark 23o is provided at a position where the line 23n and the boundary line 21g (a distance from the distal end surface 21d is approximately 3 mm) intersect. The graduation mark 23p is provided at a position where the line 23n intersects with a virtual line drawn at a position at a distance of approximately 2mm from the tip end surface 21 d. The graduation mark 23q is provided at a position where the line 23n intersects with a virtual line drawn at a position at a distance of approximately 1mm from the tip end surface 21 d.
When the distal end portion 21a is accurately inserted into the groove 101d, the position where the line 23n and the graduation line 23o intersect when viewed from above overlaps the opening (side surface 101 c) of the groove 101 d.
In contrast, when the distal end portion 21a is not inserted into the groove 101d correctly, the position where the line 23n and the graduation mark 23o intersect when viewed from above is exposed. Further, by referring to the graduation marks 23o, 23p, and 23q, the gap between the bottom surface and the distal end surface 21d of the groove 101d can be known. For example, when viewed from above, if the side surface 101c is located in the vicinity of the position where the line 23n and the graduation mark 23p intersect, the gap between the bottom surface of the groove 101d and the distal end surface 21d is approximately 0.5mm.
Further, since the mark 23E is provided in the tip region in the present modification, it is preferable to provide a mark formed by cutting off a part of the surface of the tip portion 21a to provide a recess, as in the mark 23D.
< second embodiment >
In the first embodiment, the mark 23 is visually confirmed, but the method of confirming the mark 23 is not limited to visual confirmation.
The second embodiment of the present invention is a method of confirming the mark 23 with the imaging unit. The following describes a pellicle assembly sticking apparatus 3 having a pellicle assembly gripping apparatus 2 according to a second embodiment. The same portions as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
Fig. 16 is a perspective view schematically showing the protective film assembly holding device 2 and the protective film assembly sticking device 3. Fig. 17 is a plan view schematically showing the protective film assembly gripping device 2 and the protective film assembly sticking device 3. Fig. 16 and 17 show only the main parts, and the partial structures are omitted. Fig. 16 shows a case where the frame 10 is extended in the vertical direction, and fig. 17 shows a case where the frame 10 is extended in the horizontal direction.
The pellicle holding apparatus 2 is provided inside the pellicle attaching apparatus 3, and mainly includes a housing 10, a pellicle holding unit 20, a measuring unit 31, imaging units 32, 33, 34, and a table 40 (not shown in fig. 17).
The pellicle 100 is inserted into the inner space 3b of the pellicle assembly sticking apparatus 3 from the opening 3a of the pellicle assembly sticking apparatus 3 by the transport apparatus 110. The pellicle assembly 100 inserted into the internal space 3b is mounted on the table 40. The table 40 has a not-shown moving mechanism and can move in the horizontal direction and the vertical direction. The protective film assembly sticking apparatus 3 has a laser irradiation unit, not shown, and performs positioning of the protective film assembly 100 by moving the table 40 based on laser light irradiated from the laser irradiation unit.
When the positioning of the pellicle 100 is completed, the frame 10 extending in the vertical direction as shown in fig. 16 is rotated to extend in the horizontal direction as shown in fig. 17, and then the pellicle 100 is gripped by the pellicle gripping member 21.
The imaging units 32, 33, 34 have imaging elements such as CCDs and CMOS, and can continuously capture images of the object. The imaging units 32 and 33 are provided adjacent to the opening 3a, but are preferably provided outside the internal space 3 b. The imaging unit 34 is disposed inside the internal space 3 b.
The imaging units 32, 33, 34 are members for imaging the mark 23, and when the frame 10 is extended in the horizontal direction, the imaging units 32, 33, 34 are disposed at a position higher than the frame 10. Since the mark 23 is provided at a position visible from above or obliquely above when the housing 10 is extended in the horizontal direction, the mark 23 can be imaged by the imaging units 32, 33, 34.
The imaging unit 32 is provided adjacent to the vertical frame unit 11, and the imaging unit 33 is provided adjacent to the vertical frame unit 12. The imaging units 32 and 33 are disposed outside the region sandwiched between the vertical frame 11 and the vertical frame 12 when viewed from the vertical upper side.
Fig. 17 shows a case where the frame 10 holds the G10-sized protective film assembly 100 for glass, and the distance between the vertical frame 11 and the vertical frame 12 is the widest. The imaging unit 32 is provided at the x-direction position of the vertical frame 11 or at the x-side position of the vertical frame 11 when the vertical frame 11 is located at the most-x side, and the imaging unit 33 is provided at the x-direction position of the vertical frame 12 or at the more +x-side position of the vertical frame 12 when the vertical frame 12 is located at the most +x side.
Fig. 18 is a diagram showing a case where the photographing section 32 photographs the pellicle film assembly gripping member 21 provided in the vertical frame section 11, where (a) is a top view and (B) is a side view. In fig. 18, the direction of the optical axis when the photographing unit 32 photographs the mark 23 is schematically indicated by a thick arrow. The imaging unit 32 is provided on the-x side of the position in the x direction of the vertical frame unit 11, and therefore the imaging unit 32 can reliably image the mark 23. If the imaging unit 32 is provided on the x-side of the x-direction position of the vertical frame unit 11, the imaging unit may be blocked by the corner of the upper surface 101a and the side surface 101c, as indicated by the broken line arrow in fig. 18, and the mark 23 may not be imaged. In contrast, when the imaging units 32 and 33 are provided outside the region sandwiched between the vertical frame portion 11 and the vertical frame portion 12 as viewed from the vertical upper side, the imaging units 32 and 33 can reliably capture the marks 23 of the protective film assembly holding members 21 provided in the vertical frame portions 11 and 12, respectively.
The description returns to fig. 17. The imaging unit 34 is disposed adjacent to the lower end 15a of the frame 15. The imaging unit 34 is provided outside the lower end portion 15a (-y side) when viewed from the vertical upper side. Therefore, the photographing section 34 can reliably photograph the mark 23 of the barrier film assembly holding member 21 provided at the lower end portion 15 a.
The images captured by the imaging units 32, 33, 34 are displayed on a monitor (not shown) provided outside the internal space 3b. The imaging units 32, 33, 34 and the monitor are connected via a network not shown.
The imaging units 32, 33, 34 may be configured to be capable of adjusting the orientation of the optical axis. This enables shooting for each mark 23. Further, since the imaging unit 34 is provided inside the internal space 3b, a cover is preferably provided around the imaging unit 34 so that dust does not fall into the internal space 3b.
According to the present embodiment, the mark 23 can be confirmed by the images captured by the imaging units 32, 33, 34, and thus the operator is not required to view the mark 23 in the internal space 3b. Therefore, it is possible to prevent dust from being generated and to grasp whether or not the distal end portion 21a is correctly inserted into the groove 101d.
Further, according to the present embodiment, since the mark 23 is made black, the metallic color portion of the distal end portion 21a where the mark 23 is not provided is made conspicuous in the image captured by the imaging units 32, 33, 34, and it becomes easy to confirm the mark 23. Further, since the mark 23 is black, it is possible to prevent glare from occurring in the images captured by the imaging units 32, 33, and 34.
The mark 23 has a first mark 23a, a second mark 23b, and a third mark 23c having square shapes, but the first mark 23a, the second mark 23b, and the third mark 23c have rectangular shapes in the images captured by the imaging units 32, 33, and 34. For example, the lengths of the first mark 23a, the second mark 23b, and the third mark 23c of the mark 23 in the captured image become longer as they are away from the imaging unit 32. Further, the approximate position of the photographed mark 23 can be grasped from the lengths in the depth direction of the first mark 23a, the second mark 23b, and the third mark 23c in the image.
The marks provided on the pellicle holding member 21 are not limited to the marks 23, and any of the marks 23A to 23E may be provided on the pellicle holding member 21. When the pellicle gripping member 21 disposed closest to the imaging units 32, 33, 34 is imaged, the angle at which the pellicle gripping member 21 is viewed from the imaging units 32, 33, 34 is approximately 45 degrees. In the case of using the mark 23B shown in fig. 12, even if a part of the mark 23B is blocked by the reflection plate 24B, the first mark 23a, the second mark 23B, and the third mark 23c can be reliably imaged by the imaging units 32, 33, 34.
While the embodiments of the present invention have been described in detail with reference to the drawings, specific configurations are not limited to the embodiments, and design changes and the like without departing from the scope of the gist of the present invention are also included. As long as those skilled in the art are able to appropriately change, add, change, and the like, the elements of the embodiment.
In the present invention, "substantially" means not only the exact same but also the concept of errors and deformations to the extent that the identity is not lost. For example, the substantially parallel is not limited to the case of strictly parallel, but is a concept including an error of several degrees or so. For example, when simply representing parallelism, orthogonality, or the like, it is assumed that not only strictly parallelism, orthogonality, or the like, but also approximately parallelism, approximately orthogonality, or the like is included. In the present invention, "vicinity" means a region including a certain range (which can be arbitrarily specified) in the vicinity of a position as a reference. For example, in the case of the vicinity of a, a region representing a certain range in the vicinity of a may or may not include a.
Description of the reference numerals
1. 2: protective film component holding device
3: protective film component pasting device
3a: an opening part
3b: interior space
10: frame body
11. 12: longitudinal frame part
13. 14: upper frame part
15: frame (B)
15a: lower end part
15b: upper end portion
20: protective film component holding part
21: protective film component holding member
21a: tip end portion
21b: bending part
21c: holding part
21d: top end face
21e, 21f: flour with a plurality of grooves
21g: boundary line
21h: center line
22: driving member
22a: rod
22b: actuator with a spring
23. 23A, 23B, 23C, 23D, 23E: marking
23a, 23d: first mark
23b, 23e: second mark
23c, 23f: third mark
23o, 23p, 23q: scale mark
24: measuring part
24a: ultrasonic sensor
24b: reflecting plate
24c: tip end portion
31: measuring part
32. 33, 34: image pickup unit
40: working table
100: protective film assembly
101: protective film assembly frame
101a: upper surface of
101b: lower surface of
101c: side surface
101d: groove(s)
101e: hollow part
102: protective film
103: adhesive member
110: conveying device

Claims (12)

1. A pellicle frame holding apparatus that holds a pellicle assembly, the pellicle assembly having: a substantially hollow cylindrical pellicle frame having a groove formed in a side surface thereof; and a pellicle film provided on a first surface substantially orthogonal to the side surface of the pellicle frame so as to cover the hollow portion of the pellicle frame, wherein the pellicle holding device includes:
A frame body which is a frame-shaped member formed by combining a plurality of rod-shaped members into a substantially rectangular shape;
a plurality of pellicle assembly holding members provided in the frame; and
a driving part provided for each of the barrier film assembly holding members, for moving the barrier film assembly holding member in a first direction between a first position where the barrier film assembly holding member is inserted into the groove and a second position where the barrier film assembly holding member is not inserted into the groove,
the pellicle holding member has a plate-like or rod-like distal end portion of which a portion is inserted into the groove when the pellicle holding member is in the first position,
a mark is provided on the tip end portion, the mark indicating a position of the tip end portion in the first direction.
2. The pellicle frame holding apparatus of claim 1,
the tip end portion is formed of a metal,
the mark is provided at the tip portion by providing a coating layer on a surface of the tip portion.
3. The pellicle frame holding apparatus of claim 2,
the protective film component frame is made of aluminum alloy which is subjected to black anodic oxidation treatment,
The coating layer is black.
4. The pellicle frame holding apparatus of claim 1,
the tip end portion is formed of a metal,
the mark is provided on the tip portion by cutting a portion of a surface of the tip portion to form a recess.
5. The pellicle frame holding apparatus of claim 4,
the protective film component frame is made of aluminum alloy which is subjected to black anodic oxidation treatment,
the mark is formed by coloring the inside of the concave portion black.
6. The pellicle frame holding apparatus of any one of claims 1 to 5,
the distal end portion has a distal end surface extending in a second direction substantially orthogonal to the first direction, the distal end surface being inserted into the groove when the barrier film assembly holding member is in the first position,
the mark represents a distance from the tip end face.
7. The pellicle frame holding apparatus of claim 6,
the mark is not provided in a tip region sandwiched between the tip surface and a boundary line, the boundary line being a virtual line extending substantially along the second direction, and the boundary line being disposed at a position separated from the tip surface by a predetermined distance in the first direction.
8. The pellicle frame holding apparatus of claim 7,
the top end portion is in the shape of a plate,
the mark is provided on the widest face of the tip portion,
the marks having a first mark, a second mark and a third mark arranged along the boundary line,
the lengths of the first mark, the second mark, and the third mark in the first direction are respectively different.
9. The pellicle frame holding apparatus of claim 8,
the mark having two of each of the first mark, the second mark and the third mark,
the first mark, the second mark, and the third mark are provided on both sides of a center line of the barrier film assembly holding member in the longitudinal direction, respectively.
10. The pellicle frame holding apparatus of any one of claims 1 to 9,
when the frame is extended in the horizontal direction, the mark is provided at a position visible from above or obliquely above.
11. The pellicle frame holding apparatus of claim 10,
has a photographing part for photographing the mark,
When the frame is extended in the horizontal direction, the imaging unit is disposed at a position higher than the frame.
12. The pellicle frame holding apparatus of claim 11,
the frame body has a first and a second bar-shaped vertical frames which are kept approximately parallel at intervals,
the protective film component holding members are respectively arranged on the first longitudinal frame and the second longitudinal frame,
the photographing part is disposed adjacent to the first and second vertical frames,
the imaging unit is disposed outside a region sandwiched between the first vertical frame and the second vertical frame when viewed from the upper side in the vertical direction.
CN202180077475.9A 2020-12-24 2021-11-11 Protective film assembly frame holding device Pending CN116529861A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020215543A JP2022101135A (en) 2020-12-24 2020-12-24 Pellicle frame gripping device
JP2020-215543 2020-12-24
PCT/JP2021/041615 WO2022137874A1 (en) 2020-12-24 2021-11-11 Pellicle frame grasping device

Publications (1)

Publication Number Publication Date
CN116529861A true CN116529861A (en) 2023-08-01

Family

ID=82158981

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180077475.9A Pending CN116529861A (en) 2020-12-24 2021-11-11 Protective film assembly frame holding device

Country Status (5)

Country Link
JP (1) JP2022101135A (en)
KR (1) KR20230121724A (en)
CN (1) CN116529861A (en)
TW (1) TW202226407A (en)
WO (1) WO2022137874A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4677632B2 (en) * 2005-07-08 2011-04-27 レーザーテック株式会社 Pellicle liner or pellicle peeling apparatus, peeling method, and pattern substrate manufacturing method
JP2011158585A (en) * 2010-01-29 2011-08-18 Shin-Etsu Chemical Co Ltd Pellicle and method for manufacturing the same
JP2012103638A (en) * 2010-11-15 2012-05-31 Shin Etsu Chem Co Ltd Pellicle handling tool
KR102501357B1 (en) * 2015-02-19 2023-02-17 브이 테크놀로지 씨오. 엘티디 Pellicle frame gripping device and pellicle frame gripping method
JP6921412B2 (en) * 2018-01-25 2021-08-18 株式会社ブイ・テクノロジー Pellicle frame gripping device and pellicle frame gripping method

Also Published As

Publication number Publication date
TW202226407A (en) 2022-07-01
KR20230121724A (en) 2023-08-21
JP2022101135A (en) 2022-07-06
WO2022137874A1 (en) 2022-06-30

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