KR20230121724A - Pellicle frame gripping device - Google Patents

Abstract

Even if the pellicle frame is distorted, the pellicle frame can be accurately gripped. A frame body 10, which is a frame-shaped member in which a plurality of rod-shaped members are combined in a substantially rectangular shape, a plurality of pellicle gripping members 21 installed in the frame body 10, and a pellicle gripping member 21 A drive unit provided for each unit includes a drive unit that moves the pellicle gripping member between a first position where the pellicle gripping member is inserted into the groove and a second position where the pellicle gripping member is not inserted into the groove. The pellicle gripping member 21 has a plate-shaped or bar-shaped tip part of which is inserted into the groove when the pellicle gripping member 21 is in the first position. The distal end portion is a distal end face inserted into the groove when the pellicle gripping member 21 is in the first position, and has a distal end face extending in a second direction substantially perpendicular to the first direction, which is the moving direction of the pellicle gripping member. have A marker indicating the distance from the tip surface is provided at the tip portion.

Description

Pellicle frame gripping device

The present invention relates to a pellicle frame gripping device.

In Patent Document 1, a pellicle frame is gripped using a pellicle gripper provided on a frame body, an adhesive member of the pellicle and a mask are brought into contact with each other, and the measurement unit is located near the tip. Place it at a first position overlapping the mask, measure a first distance, which is the distance to the surface of the mask, move the measurement unit to a second position where the vicinity of the tip overlaps the pellicle frame, and measure the distance to the pellicle film. Disclosed is a pellicle frame gripping device that measures a second distance of .

Japanese Patent Laid-Open No. 2019-128501

In the invention described in Patent Document 1, it is possible to accurately measure distances in the height direction (direction substantially perpendicular to the pellicle film) such as the distance to the pellicle film, but for the distance in the depth direction (direction substantially parallel to the pellicle film) If measurement fails and the pellicle frame is distorted, there is a risk that the pellicle frame cannot be accurately gripped.

The present invention has been made in view of such a situation, and an object of the present invention is to provide a pellicle frame gripping device capable of ascertaining whether or not the pellicle frame can be gripped accurately.

In order to solve the above problems, a device for holding a pellicle frame according to the present invention is, for example, a substantially hollow normal pellicle frame having a groove formed on a side surface, and substantially orthogonal to the side surface of the pellicle frame. A pellicle gripping device for gripping a pellicle having a pellicle film installed on a first surface thereof to cover a hollow portion of the pellicle frame, comprising a frame body that is a frame-shaped member in which a plurality of rod-shaped members are combined in a substantially rectangular shape; , a plurality of pellicle gripping members installed on the frame body, and a driving unit installed for each pellicle gripping member, wherein the pellicle gripping member is inserted into the groove at a first position and the pellicle gripping member is inserted into the groove and a drive unit for moving the pellicle gripping member in a first direction between a second position where the pellicle gripping member is in the first position, and a part of the pellicle gripping member is in the groove when the pellicle gripping member is in the first position. It has a plate-shaped or rod-shaped tip to be inserted, and a marker indicating a position of the tip in the first direction is provided on the tip.

According to the pellicle frame gripping device of the present invention, the pellicle gripping member has a plate-shaped or rod-shaped distal end part of which is inserted into the groove of the pellicle frame. At the distal end, a marker indicating the position of the pellicle gripping member in the first direction, which is the moving direction of the pellicle gripping member, is provided. This makes it possible to ascertain whether the distal end is correctly inserted into the groove, that is, whether or not the pellicle frame can be accurately gripped.

The tip portion may be formed of metal, and the marker may be provided on the tip portion by providing a coating layer on the surface of the tip portion. As a result, the marker can be easily attached to the pellicle gripping member.

The pellicle frame is an aluminum alloy treated with black almite, and the coating layer may be black. This makes it possible to match the color of the pellicle frame and the marker, thereby increasing the visibility of the marker.

The tip portion may be formed of metal, and the marker may be attached to the tip portion by shaving a part of the surface of the tip portion to form a concave portion. This makes it possible to prevent the marker from disappearing from the tip.

The pellicle frame may be an aluminum alloy subjected to a black alumite treatment, and the marker may be formed by coloring the inside of the concave portion black. This makes it possible to match the color of the pellicle frame and the marker, thereby increasing the visibility of the marker.

The distal end portion has a distal end surface that is inserted into the groove when the pellicle gripping member is in the first position and extends in a second direction substantially orthogonal to the first direction, A marker may indicate the distance from the front end face. In this way, it is possible to ascertain whether the front end surface is in contact with the bottom surface of the groove, that is, whether or not the pellicle frame can be accurately gripped.

The marker is a boundary line that is a virtual line substantially along the second direction with the front end surface, and may not be provided in a front end area sandwiched between the boundary line disposed at a position away from the front end surface by a predetermined distance in the first direction. As a result, it is possible to prevent the marker from being scraped off and generating dust.

The tip portion has a plate shape, the marker is provided on the widest surface of the tip portion, the marker has a first marker, a second marker, and a third marker arranged along the boundary line, the first marker , the second marker, and the third marker may each have different lengths in the first direction. In this way, if the tip is moved further to some extent, it is easy to know whether or not the tip is correctly inserted into the groove.

The markers each have two first markers, two second markers, and two third markers, and the first markers, the second markers, and the third markers are in the longitudinal direction of the pellicle gripping member. It may be provided on both sides of the center line along the . As a result, even if a reflector or the like is provided above the tip in the vertical direction, the marker can be reliably recognized.

The marker may be provided at a position where it can be visually recognized from above or obliquely when the frame body is extended horizontally. In this way, the marker can be easily visually recognized.

An imaging unit for capturing an image of the marker may be provided, and the imaging unit may be provided at a position higher than the frame body when the frame body is extended in a horizontal direction. This eliminates the need for the operator to visually see the marker in the interior space, and can prevent the generation of dust.

The frame body has a rod-shaped first vertical frame and a second vertical frame held substantially in parallel at intervals, and the pellicle holding member is installed on each of the first vertical frame and the second vertical frame, The image capturing unit is installed adjacent to the first vertical frame and the second vertical frame, respectively, and the image capturing unit is located outside the region sandwiched between the first vertical frame and the second vertical frame when viewed from above in a vertical direction. may be installed on In this way, it is possible to avoid a situation in which an image of the marker cannot be captured due to being blocked by the pellicle frame.

According to the present invention, it is possible to determine whether or not the pellicle frame can be accurately gripped.

1 is a schematic front view of a pellicle gripping device 1 according to a first embodiment.
2 is a perspective view showing the outline of the pellicle 100.
FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2 .
FIG. 4 is a schematic diagram of the pellicle gripping unit 20. As shown in FIG.
5 is a diagram showing an example of the marker 23 .
Fig. 6 is a diagram schematically showing how the distal end 21a is correctly inserted into the groove 101d of the pellicle frame 101 for glass of size G10.
Fig. 7 is a diagram schematically showing how the distal end 21a is not correctly inserted into the groove 101d of the pellicle frame 101 for glass of size G10.
Fig. 8 is a diagram schematically showing a state in which the distal end 21a is correctly inserted into the groove 101d of the pellicle frame 101 for glass smaller than the G10 size.
Fig. 9 is a diagram schematically showing how the distal end 21a is not correctly inserted into the groove 101d of the pellicle frame 101 for glass smaller than the G10 size.
Fig. 10 is a diagram showing the outline of a marker 23A related to a modified example.
Fig. 11 is a diagram showing the outline of a marker 23B related to a modified example.
Fig. 12 is a diagram schematically showing how the marker 23B is visually recognized obliquely from above.
Fig. 13 is a diagram showing the outline of a marker 23C related to a modified example.
14 is a diagram showing the outline of a marker 23D related to a modified example.
Fig. 15 is a diagram showing the outline of a marker 23E related to a modified example.
Fig. 16 is a perspective view schematically showing a pellicle gripping device 2 and a pellicle sticking device 3;
17 is a plan view schematically illustrating the pellicle gripping device 2 and the pellicle sticking device 3. As shown in FIG.
Fig. 18 is a view showing how the imaging section 32 captures an image of the pellicle gripping member 21 installed on the vertical frame section 11, where (A) is a plan view and (B) is a side view.
19 is a diagram schematically showing how the pellicle 100 is distorted.
20 is a diagram schematically showing how the pellicle 100 is distorted.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail with reference to drawings. In each figure, the same code|symbol is attached|subjected to the same element, and description of overlapping parts is abbreviate|omitted.

<First Embodiment>

1 is a schematic front view of a pellicle gripping device 1 according to a first embodiment. The pellicle gripping device 1 is installed in a pellicle sticking device (not shown). The pellicle sticking device attaches the pellicle 100 held by the pellicle holding device 1 to a substantially plate-shaped mask (not shown) held substantially along the vertical direction.

Hereinafter, the horizontal direction is the direction along the xy plane, and the vertical direction orthogonal to the xy plane is the z direction. In addition, the x direction and the y direction are orthogonal.

First, the pellicle 100 will be described. 2 is a perspective view showing the outline of the pellicle 100. FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2 . The pellicle 100 mainly includes a pellicle frame 101, a pellicle film 102 extended on the pellicle frame 101, and an adhesive member formed on the lower surface of the pellicle frame 101. (103) (see Fig. 3).

The pellicle frame 101 is a frame-shaped (substantially hollow cylinder) member having a substantially rectangular outer periphery. The pellicle frame 101 has a substantially rectangular shape in plan view (viewed from the top of the paper in Fig. 2), and has a hollow portion 101e in the center. In the pellicle frame 101, the size of the hollow portion 101e is about the same as the size of a photomask (for example, about 520 mm x 800 mm to about 1620 mm x 1780 mm). The width of the frame-shaped portion of the pellicle frame 101 is about several tens of mm, and the thickness is about 2 mm to 10 mm.

The pellicle frame 101 has an upper surface 101a and a lower surface 101b that are substantially parallel. In addition, a groove 101d is formed on the side surface 101c orthogonal to the upper surface 101a and the lower surface 101b of the pellicle frame 101. A pellicle gripping member 21 (described later) installed in the frame body 10 is inserted into the groove 101d.

The groove 101d differs depending on the size of the pellicle frame 101. For example, in the case of the pellicle frame 101 for G10 glass (1620 mm x 1780 mm), the depth d is approximately 3 mm, and the width w is approximately 1.5 mm to 2 mm. Further, in the case of the pellicle frame 101 for glass smaller than G10, the depth d is approximately 2 mm, and the width w is approximately 1.5 mm to 2 mm.

In this embodiment, the pellicle frame 101 is an aluminum alloy treated with black alumite, but the material of the pellicle frame 101 is not limited to this. For example, the pellicle frame 101 may be formed of a metal such as iron, invar, titanium, or titanium alloy.

The pellicle film 102 is a thin film with a submicron thickness. The pellicle film 102 is extended on the upper surface 101a of the pellicle frame 101 so as to cover the hollow portion 101e of the pellicle frame 101 . When the pellicle frame 101 is attached to a photomask substrate, the pellicle film 102 is installed away from the pattern formation surface (surface) of the mask by a predetermined distance.

The adhesive member 103 is installed on the lower surface 101b of the pellicle frame 101 . The adhesive member 103 is formed in a frame shape around the entire periphery of the pellicle frame 101 . As the adhesive member 103, a known one can be used, for example, a hot melt adhesive.

On the lower face of the adhesive member 103, a release layer (liner sheet) for protecting the adhesive is attached. The release layer has a plurality of convex portions protruding from the pellicle frame 101, and is attached to a pellicle storage container (not shown) by bonding, bonding, or the like.

The pellicle 100 is carried into the pellicle sticking device in a state of being placed in the pellicle storage container. At this time, the upper surface 101a and the lower surface 101b of the pellicle frame 101 substantially follow the horizontal direction.

Returning to the description of FIG. 1 . The pellicle gripping device 1 mainly includes a frame body 10 , a pellicle gripping unit 20 , and a measurement unit 31 . The pellicle gripping unit 20 and the measurement unit 31 are installed on the frame body 10 .

First, the operation of the pellicle sticking device (not shown) in which the pellicle gripping device 1 is installed will be briefly described. Inside the pellicle sticking device, in addition to the pellicle gripping device 1, a mask (not shown) held substantially along the vertical direction by a holder (not shown) is provided. When the pellicle 100 is carried into the pellicle sticking device substantially along the horizontal direction in a state of being placed in a pellicle storage container (not shown), the frame body 10 substantially follows the vertical direction. Thereafter, the frame body 10 is rotated to a state substantially along the horizontal direction, the pellicle gripper 20 grips the pellicle 100, and the frame body 10 is vertically upward. to peel off the release layer (not shown) from the pellicle 100. The frame body 10 is rotated while the adhesive member 103 (not shown in FIG. 1) is holding the exposed pellicle 100, and the frame body 10 is in a state substantially along the vertical direction, The body 10 is moved in parallel to attach the adhesive member 103 to the mask.

Next, the configuration of the pellicle gripping device 1 will be described. The frame body 10 is a frame-shaped member in which a plurality of rod-shaped members are combined in a substantially rectangular shape. The frame body 10 mainly includes the vertical frame parts 11 and 12, the upper frame parts 13 and 14, and the outer sides of the vertical frame parts 11 and 12 and the upper frame parts 13 and 14. It has a rim 15 installed on. The vertical frame portions 11 and 12, the upper frame portions 13 and 14, and the frame 15 are made of metal, such as iron or aluminum.

When the pellicle gripper 20 grips the pellicle 100, the frame body 10 extends in the horizontal direction (approximately along the xy plane) as shown in FIG.

The vertical frame portions 11 and 12 are rod-shaped members whose longitudinal direction is provided along the y-direction, and move along the lower end 15a and upper end 15b of the frame 15 (that is, along the x-direction). can be installed As a mechanism for moving the vertical frame portions 11 and 12 in the x direction, various known techniques can be used. Further, when the frame body 10 is stretched in the vertical direction, the vertical frame portions 11 and 12 are extended substantially along the vertical direction.

The upper frame portions 13 and 14 are rod-shaped members provided along the x-direction in the longitudinal direction, and are respectively provided to be movable along the vertical frame portions 11 and 12 (that is, along the y-direction). As a mechanism for moving the upper frame portions 13 and 14 in the y direction, various techniques known in the art can be used. The upper frames 13 and 14 are extended substantially horizontally near the upper ends of the vertical frame portions 11 and 12 when the frame body 10 is extended in the vertical direction.

In addition, the shape of the upper frames 13 and 14 is not limited to this. For example, the upper frame portion may be composed of one rod-shaped member stretched substantially horizontally, and the vicinity of both ends of this one rod-shaped member may be provided on the vertical frame portions 11 and 12.

By making the vertical frame parts 11 and 12 and the upper frame parts 13 and 14 movable in this way, the frame formed by the vertical frame parts 11 and 12, the upper frame parts 13 and 14 and the lower part 15a By changing the size of , it is possible to correspond to pellicles 100 of various sizes. In addition, the pellicle 100 has, for example, a size of 420 mm x 720 mm, a size of 700 mm x 800 mm, a size of 520 mm x 680 mm, and a size of 750 mm x 1300 mm. of, and ones with a size of 1520 mm x 1680 mm.

The frame body 10 is installed to be movable in the vertical direction and the horizontal direction by a moving mechanism (actuator is included) not shown. In addition, the frame body 10 has a rotation shaft (not shown) provided near the -y side end, and is installed so as to be able to rotate by a moving mechanism (including an actuator) not shown. Since the mechanism for moving and rotating the frame body 10 is known, description thereof is omitted.

During standby (when carrying in the pellicle 100, etc.), the frame body 10 is in a state in which the plane formed by the frame 15 is stretched in the vertical direction (the frame body 10 is stretched in the vertical direction). is in When the pellicle 100 is carried into the pellicle sticking device and the alignment is completed, the frame body 10 is rotated about the pivot axis, and the surface formed by the frame 15 is horizontally extended (frame The body 10 is in a state where it is extended in the horizontal direction. This allows the pellicle gripping unit 20 to grip the pellicle 100 .

When the pellicle gripper 20 grips the pellicle 100, the frame body 10 moves upward in the vertical direction, and the adhesive member 103 is released from the release layer. Since the adhesive member 103 has a strong adhesive force to sudden strong force, but weak adhesive force to weak and sustained force, the process of separating the adhesive member 103 from the release layer is performed slowly over 30 minutes to 1 hour. It is done.

When the adhesive member 103 is released from the release layer, the frame body 10 is rotated about the rotational axis, and the frame body 10 is in a state of extending in the vertical direction. This makes it possible to attach the pellicle 100 to the mask. When attaching the pellicle 100 to the mask, the frame body ( 10) tilt. Also, when attaching the pellicle 100 to the mask, the frame body 10 is stretched in the vertical direction and parallel to the horizontal direction.

The pellicle gripping unit 20 has a plurality of pellicle gripping members 21 gripping the side surface 101c of the pellicle frame 101 . The pellicle gripping members 21 are installed on the vertical frame parts 11 and 12, the upper frame parts 13 and 14, the lower end 15a and the upper end 15b.

In the example shown in Fig. 1, five pellicle gripping members 21 are respectively installed on the vertical frame portions 11 and 12, and one pellicle gripping member 21 is installed on the upper frame portions 13 and 14, respectively. , Five pellicle gripping members 21 are installed on the lower end 15a, and one pellicle gripping member 21 is installed on the upper end 15b, but the position and number of the pellicle gripping members 21 are not limited to

Depending on the size of the pellicle 100, the pellicle gripping member 21 used is different. In FIG. 1 , of the pellicle gripping members 21 installed on the frame body 10, only the pellicle gripping member 21 that is in contact with the pellicle 100 (side surface 101c in this case) is used.

The pellicle gripping member 21 is installed so as to be movable in a horizontal direction or a vertical direction between an insertion position where a part is inserted into the groove 101d and a retracted position where it does not come into contact with the side surface 101c. FIG. 4 is a schematic diagram of the pellicle gripping unit 20. As shown in FIG.

The pellicle gripping member 21 is a plate-shaped or rod-shaped member made of metal. In this embodiment, the pellicle gripping member 21 is made of stainless steel (for example, SUS304).

The pellicle gripping member 21 is formed by bending a plate-like member, and mainly includes a tip portion 21a, a bent portion 21b, and a holding portion 21c in which the drive member 22 is provided. have A part of the distal end 21a is inserted into the groove 101d when the pellicle gripping member 21 is in the insertion position.

In this embodiment, the pellicle gripping member 21 is bent at substantially right angles at both ends of the bent portion 21b. However, the bending angle of the pellicle gripping member 21 is not limited to a substantially right angle.

The front end portion 21a has a front end surface 21d that is inserted into the groove 101d when the pellicle gripping member 21 is in the insertion position. The front end face 21d is an end face of the plate-shaped member, and extends in a direction substantially orthogonal to the moving direction of the pellicle gripping member 21 . For example, for the pellicle gripping member 21 installed on the vertical frame portions 11 and 12, the movement direction is the x direction, and the tip surface 21d is substantially along the y direction (approximately parallel to the yz plane). installed). When the pellicle gripping member 21 is correctly inserted into the groove 101d, the front end surface 21d abuts against the bottom surface of the groove 101d.

The distal end 21a is provided with a marker (not shown in FIG. 4) indicating a position of the distal end 21a in the moving direction of the pellicle gripping member 21 (x direction in FIG. 4). In this embodiment, a marker indicating the distance from the front end surface 21d is provided on the front end 21a. The marker is installed in a position that can be visually recognized from above when the frame body 10 is extended in the horizontal direction. In this Embodiment, the tip part 21a is plate-shaped, and the marker is provided on the surface 21f which is the widest surface of the tip part 21a, and is a surface on the vertical direction upper side (+z side). When the operator visually recognizes the marker, it is possible to confirm the position of the distal end 21a in the x direction and whether or not the pellicle gripping member 21 is correctly inserted into the groove 101d. The marker will be described in detail later.

A driving member 22 is installed on the pellicle gripping member 21 (holding portion 21c). The drive member 22 has a rod 22a and an actuator 22b that moves the rod 22a. The pellicle gripping member 21 is connected to the rod 22a. The actuator 22b is attached to the frame body 10 (not shown in Fig. 4).

The pellicle gripping member 21 is provided with an insertion position where the pellicle gripping member 21 is inserted into the groove 101d by the drive member 22 (see Fig. 4, solid line), and the pellicle gripping member 21 ) is not inserted into the groove 101d and the pellicle gripping member 21 is moved in the horizontal direction between a retracted position where it does not interfere with the pellicle frame 101 (see Fig. 4, dashed-dotted line).

A measuring unit 24 for measuring the height (position in the z direction) of the pellicle frame 101 is installed on each pellicle gripping member 21 . The measuring unit 24 mainly has an ultrasonic sensor 24a and a reflector 24b. In addition, the measuring part 24 is not essential, and the form of the measuring part 24 is not limited to this either.

The ultrasonic sensor 24a is a range sensor that transmits ultrasonic waves toward an object, receives the reflected wave, and measures the distance to the target based on the time interval between signal transmission and reception of the reflected wave. Since the ultrasonic sensor 24a is already known, detailed description thereof is omitted.

The reflector 24b is provided on the upper side (+z side) of the pellicle gripping member 21 . The reflector 24b reflects ultrasonic waves transmitted from the ultrasonic sensor 24a. The front end 24c of the reflecting plate 24b is inclined by approximately 45 degrees with respect to the xy plane. Therefore, the ultrasonic waves transmitted from the ultrasonic sensor 24a are reflected downward (-z direction) (refer to the two-dot chain line in Fig. 4).

Returning to the description of FIG. 1 . The measurement unit 31 has a range sensor (eg, an ultrasonic sensor) and a reflector, and measures the height (position in the z direction) of the mask or pellicle frame 101 . The measuring unit 31 is installed on the frame body 10, here, on the upper frames 13 and 14. The measurement unit 31 grips the pellicle when viewed from a direction substantially orthogonal to the extending direction of the rod-shaped members (e.g., the upper frames 13 and 14) constituting the frame body 10 (here, the z direction). It is installed in a different position from the member 21.

The two measurement units 31 are installed near the upper side and near the left end of the frame body 10, respectively, and are provided near the upper side and near the right end of the frame body 10, respectively. However, the position and number of the measurement part 31 are installed are not limited to the form shown in FIG.

The measuring unit 31 is vertical between a first position where the vicinity of the tip overlaps the mask (solid line in FIG. 1) and a second position where the vicinity of the tip overlaps the pellicle frame 101 (see Fig. 12 dashed line) installed to be movable.

Next, the marker installed on the pellicle gripping member 21 will be described. Hereinafter, the marker will be described using the pellicle gripping member 21 installed on the vertical frame portion 12 as an example. 5 is a diagram showing an example of the marker 23 .

First, the material of the marker 23 will be described. By providing a coating layer on the surface of the pellicle holding member 21 , the marker 23 is installed on the pellicle holding member 21 . Accordingly, the marker 23 can be easily attached to the pellicle gripping member 21 . In this embodiment, a fluororesin resistant to solvents such as isopropyl alcohol is used for the coating layer.

In addition, it is preferable that the coating layer used for the marker 23 is black. A portion of the pellicle gripping member 21 where the marker 23 is not provided is a metallic color (for example, silver). By making the marker 23 black, the color of the black pellicle frame 101 and the marker 23 can be matched, and the metal-colored portion where the marker 23 is not attached can be conspicuous.

5, coating layers are provided on the surfaces of the distal end 21a, the bent portion 21b, and the retaining portion 21c of the pellicle gripping member 21, but at least the coating layer (i.e., the marker 23) It just needs to be provided on the tip part 21a, and the coating layer does not need to be provided on the surface of the bent part 21b and the retaining part 21c.

Next, the shape of the marker 23 will be described. The marker 23 is not provided in the tip region R sandwiched between the tip face 21d and the boundary line 21g. The boundary line 21g is a virtual line substantially along the extension direction (here, the y direction) of the front end surface 21d, and extends from the front end surface 21d to the direction substantially orthogonal to the front end surface 21d (here, the x direction) They are arranged at positions separated by a predetermined distance (distance 1 in FIG. 5). Since the boundary line 21g and the tip region R are imaginary lines and regions, they are indicated by dotted lines in FIG. 4 .

The distance 1 between the front end surface 21d and the boundary line 21g is preferably 3 mm or more, which is the depth d of the groove 101d provided in the pellicle frame 101 for large-sized glass (G10 glass). In this embodiment, the distance 1 is approximately 3 mm. This makes it possible to prevent the marker 23 from coming into contact with the pellicle frame 101 (the edge portion of the groove 101d) when the distal end 21a is inserted into the groove 101d.

If the marker 23 comes into contact with the edge portion of the groove 101d, the marker 23 may be scraped by the edge and dust may be generated. The pellicle 100 is attached to the mask, and it is necessary to extremely prevent the generation of dust (preferably not to generate dust), so a marker 23 is placed in the tip region R that may contact the groove 101d. ) is preferably not installed.

The marker 23 has the 1st marker 23a, the 2nd marker 23b, and the 3rd marker 23c lined up along the boundary line 21g. The 1st marker 23a, the 2nd marker 23b, and the 3rd marker 23c differ in the length of at least x direction.

In this embodiment, the first marker 23a, the second marker 23b, and the third marker 23c have a square shape, and the length of each side of the first marker 23a is approximately 1 mm. , the length of each side of the second marker 23b is approximately 1.5 mm, and the length of each side of the third marker 23c is approximately 2 mm. Accordingly, the first marker 23a indicates that the distance from the front end surface 21d is approximately 4 mm, the second marker 23b indicates that the distance from the front end surface 21d is approximately 4.5 mm, and the third marker 23b indicates that the distance from the front end surface 21d is approximately 4.5 mm. The marker 23c indicates that the distance from the tip face 21d is approximately 5 mm. In this way, the distance from the front end surface 21d is indicated by the marker 23.

In the present embodiment, the first marker 23a, the second marker 23b, and the third marker 23c had a square shape, but the first marker 23a, the second marker 23b, and the third marker The shape of (23c) is not limited to a square shape, and may be a rectangular shape including a rectangular shape, or may be a semicircular shape or a semielliptical shape.

Fig. 6 is a diagram schematically showing how the distal end 21a of the pellicle gripping member 21 is properly inserted into the groove 101d of the pellicle frame 101 for glass of size G10.

Since the depth d of the groove 101d and the distance 1 between the tip surface 21d and the boundary line 21g are approximately the same, if the tip 21a is correctly inserted into the groove 101d, when viewed from above, the groove 101d ) overlaps with the opening (side surface 101c) and the boundary line 21g. Therefore, when viewed from above, the boundary line 21g cannot be visually recognized, and only the first marker 23a, the second marker 23b, and the third marker 23c can be visually recognized.

Fig. 7 is a diagram schematically showing how the distal end 21a is not correctly inserted into the groove 101d of the pellicle frame 101 for glass of size G10.

Since the depth d of the groove 101d and the distance 1 between the tip face 21d and the boundary line 21g are approximately the same, when the tip 21a is not correctly inserted into the groove 101d, when viewed from above, The boundary line 21g can be visually recognized. Then, by comparing the distance l' between the side surface 101c and the boundary line 21g and the lengths in the x direction of the first marker 23a, the second marker 23b, and the third marker 23c, The gap between the bottom surface and the front end face 21d, that is, by moving the front end 21a further to some extent, it is possible to know whether or not the front end 21a is correctly inserted into the groove 101d. In the example shown in Fig. 7, since the distance l' and the length of the first marker 23a in the x direction substantially coincide, it can be seen that the gap between the bottom surface of the groove 101d and the tip surface 21d is approximately 1 mm. there is.

Fig. 8 is a diagram schematically showing a state in which the distal end 21a is correctly inserted into the groove 101d of the pellicle frame 101 for glass smaller than the G10 size.

Since the depth d of the groove 101d is smaller than the distance l between the front end surface 21d and the boundary line 21g, and the difference is 1 mm, if the front end 21a is correctly inserted into the groove 101d, the side surface 101c ) and the boundary line 21g approximately coincide with the length of the first marker 23a in the x direction.

Fig. 9 is a diagram schematically showing how the distal end 21a is not correctly inserted into the groove 101d of the pellicle frame 101 for glass smaller than the G10 size.

When the tip 21a is not correctly inserted into the groove 101d, the distance 1' between the side surface 101c and the boundary line 21g becomes larger than the length of the first marker 23a in the x direction. Then, by comparing the distance l' between the side surface 101c and the boundary line 21g and the lengths in the x direction of the first marker 23a, the second marker 23b, and the third marker 23c, The gap between the bottom surface and the front end face 21d, that is, by moving the front end 21a further to some extent, it is possible to know whether or not the front end 21a is correctly inserted into the groove 101d. In the example shown in Fig. 9, since the distance l' and the length of the second marker 23b in the x direction are approximately the same, it can be seen that the gap between the bottom surface of the groove 101d and the tip surface 21d is approximately 0.5 mm. there is.

According to this embodiment, by visually recognizing the marker 23, it is possible to grasp the position of the distal end 21a and thus whether or not the distal end 21a is correctly inserted into the groove 101d. In the case of inserting the tip without the marker 23 into the groove, there is no means for determining whether the tip is inserted all the way into the groove. Only by doing so, it can be confirmed whether the pellicle frame 101 can be accurately gripped.

Further, according to the present embodiment, the distance between the bottom surface of the groove 101d and the front end surface 21d can be known only by visually recognizing the marker 23 . Therefore, when the distal end 21a is not properly inserted into the groove 101d, the pellicle gripping member 21 is moved by moving the vertical frame portions 11 and 12 and the upper frame portions 13 and 14, or , By moving the driving member 22 to move the pellicle gripping member 21 or the like, the pellicle frame 101 can be accurately gripped by the pellicle gripping member 21 .

19 and 20 are views schematically showing how the pellicle 100 is distorted. In the case shown in Fig. 19, the pellicle 100 is distorted so that the central portion of each side of the pellicle 100 is concave. Due to the structure in which the pellicle film 102 is attached to the pellicle frame 101 to form the pellicle 100, distortion as shown in FIG. 19 tends to occur, and the size of the concavity is approximately 1 to 2 mm. Since the depth of the groove 101d is approximately 2 mm to 3 mm, the pellicle 100 cannot be accurately gripped by the pellicle gripping member 21 inserted near the center of the +x-side side of the pellicle 100. There are concerns.

In addition, in the case shown in Fig. 20, the pellicle 100 is distorted so that the +x side and -x side positions of the pellicle 100 are shifted (approximately 2 mm). In this case, there is a risk that the pellicle 100 cannot be accurately gripped by the pellicle gripping member 21 inserted near the -x side end of the +y side side of the pellicle 100.

When the frame body 10 is moved upward in the extension direction or the frame body 10 is rotated in a state where the pellicle frame 101 cannot be accurately gripped by the pellicle gripping member 21, the frame body 10 ), there is a possibility that the pellicle 100 may fall. On the other hand, since it is possible to determine whether the pellicle frame 101 can be accurately gripped before the frame body 10 is moved in parallel or rotationally, an accident in which the pellicle 100 falls can be prevented.

Further, according to the present embodiment, by not providing the marker 23 in the tip region R that may be inserted into the groove 101d, when the pellicle gripping member 21 is inserted into the groove 101d, It is possible to prevent the pellicle gripping member 21 or the pellicle frame 101 from being chipped and generating dust.

The groove 101d is often formed by cutting, but there is a possibility that unevenness may occur on the finished surface due to cutting. When the adhesive member 103 is separated from the release layer, the frame body 10 is moved vertically upward in a state where the tip portion 21a is inserted into the groove 101d, so that the surface 21f finishes the cutting process. It comes into contact with the surface, and a force of about 1 kgf continues to be applied to the surface 21f. Since the marker 23 is installed on the surface 21f, if the marker 23 is installed in the tip region R, the marker 23 may be scraped off by the convex portion of the finished surface and dust may be generated. On the other hand, the generation of dust can be prevented by not providing the marker 23 in the tip region R.

Further, in this embodiment, the marker 23 is provided on the front end portion 21a by providing a coating layer on the surface, but the shape of the marker is not limited to this. For example, a marker may be provided on the tip portion 21a of the pellicle gripping member 21 by cutting a part of the surface of the tip portion 21a to form a concave portion. In this case, the marker does not disappear from the distal end 21a. In order to improve visibility, it is preferable to color the inside of the concave portion with ink or the like. In particular, it is preferable to color the inside of the concave portion black, and to match the color of the black pellicle frame 101 and the marker.

Further, in the present embodiment, the depth d of the groove 101d of the pellicle frame 101 for glass of G10 size and the distance 1 between the front end face 21d and the boundary line 21g were approximately the same (3 mm), The distance 1 may be greater than or equal to the depth d of the groove 101d of the pellicle frame 101 for glass of size G10 (3 mm or more). For example, when the distance between the front end surface 21d and the boundary line 21g is 4 mm, if the distance between the side surface 101c and the boundary line 21g and the length of the first marker 23a in the x direction are approximately the same, If it can be seen that the tip 21a is correctly inserted into the groove 101d, and the distance between the side surface 101c and the boundary line 21g is greater than the length of the first marker 23a in the x direction, the groove 101d It can be seen that the distal end 21a is not inserted correctly.

Further, in the present embodiment, the tip portion 21a is a plate-shaped member formed by bending a plate-shaped member, but the shape of the tip portion 21a is not limited to this. For example, the distal end 21a may be rod-shaped. In addition, the pellicle gripping member 21 may or may not be bent. However, in order to improve visibility, the marker is preferably installed in a position where it can be visually recognized from above or obliquely when the frame body 10 is extended in the horizontal direction.

Further, in the present embodiment, the marker 23 is provided on the surface 21f which is the widest surface of the distal end 21a and is the surface on the vertical direction upper side (+z side), but the surface on which the marker 23 is provided is It is not limited to the surface 21f. For example, the marker 23 may be provided also on the surface 21e which is the widest surface of the distal end 21a other than the surface 21f. When the marker 23 is provided on the surface 21e, the marker 23 can be visually recognized even when the frame body 10 is stretched in the vertical direction.

In addition, in this embodiment, the marker 23 having three first markers 23a, second markers 23b, and third markers 23c was used, but the first markers 23a and the second markers ( 23b) and a marker having one or two of the third marker 23c may be used, and markers other than the first marker 23a, the second marker 23b, and the third marker 23c (for example, , a marker whose length of each side is approximately 2.5 mm) may be used.

Further, in the present embodiment, the marker 23 indicating the distance from the tip surface 21d is provided on the tip portion 21a. It would be nice to indicate the location. For example, when the pellicle gripping member 21 moves along the x direction, the distal end 21a is adjacent to a plurality of areas in the x direction (each area is stretched in a band shape along the y direction). ), and attaching a mark of a different color for each region, it is good as a marker indicating the position of the pellicle gripping member 21 in the moving direction. In this case, it is possible to grasp the position of the tip 21a in the x direction and whether or not the tip 21a is correctly inserted into the groove 101d according to the color of the mark that can be visually recognized.

<Modified Example 1 of Marker>

In the first embodiment, the markers 23 were formed by taking out portions of the first marker 23a, the second marker 23b, and the third marker 23c to form a coating layer, but the first marker 23a, The shape of the mark having the second marker 23b and the third marker 23c is not limited to this.

Fig. 10 is a diagram showing the outline of a marker 23A related to a modified example. 23 A of markers are formed by providing a coating layer only at the part of the 1st marker 23d, the 2nd marker 23e, and the 3rd marker 23f. The position and shape of the 1st marker 23d, the 2nd marker 23e, and the 3rd marker 23f are the same as the 1st marker 23a, the 2nd marker 23b, and the 3rd marker 23c. By visually recognizing the marker 23A, it is possible to ascertain whether the distal end 21a is correctly inserted into the groove 101d.

Alternatively, the marker 23A may be formed by cutting a part of the surface of the tip portion 21a to form a concave portion and coloring the inside thereof.

<Modified Example 2 of Marker>

Modification 2 of the marker is a type in which the marker has a plurality of first markers 23a, second markers 23b, and third markers 23c. Fig. 11 is a diagram showing the outline of a marker 23B related to a modified example.

The marker 23B has two each of the 1st marker 23a, the 2nd marker 23b, and the 3rd marker 23c. The first marker 23a, the second marker 23b, and the third marker 23c are provided on both sides of the center line 21h along the longitudinal direction of the pellicle gripping member 21, respectively.

Fig. 12 is a diagram schematically showing how the marker 23B is visually recognized obliquely from above. When the marker 23B is viewed obliquely from above, there is a possibility that a part of the marker 23B is blocked by the reflecting plate 24b and cannot be visually recognized. For example, as shown in Fig. 12, when looking down at the marker 23B from the front at an angle of about 45 degrees, the wrong side of the center line 21h of the marker 23B cannot be visually recognized.

Even in this case, by providing the first marker 23a, the second marker 23b, and the third marker 23c on both sides of the center line 21h, respectively, the first marker 23a, the second marker 23b and The third marker 23c can be reliably recognized.

In addition, visibility is improved by arranging the smallest first marker 23a near both ends of the pellicle gripping member 21, which are easily visible, and placing the largest third marker 23c near the center line 21h. there is a number However, arrangement|positioning of the 1st marker 23a, the 2nd marker 23b, and the 3rd marker 23c is not limited to the form shown in FIGS. 11 and 12. FIG.

<Modified Example 3 of Marker>

Modification 3 of the marker is a type in which the marker does not have the first marker, the second marker, and the third marker. Fig. 13 is a diagram showing the outline of a marker 23C related to a modified example.

The marker 23C has lines 23g, 23h, 23i, and 23j substantially parallel to the front end surface 21d. The line 23g is provided on the boundary line 21g, and the line 23i is provided at a position away from the boundary line 21g by approximately 1 mm in the +x direction. The lines 23h and 23j are thinner and shorter than the lines 23g and 23i, and are provided on the +x side of the lines 23g and 23i at positions approximately 0.5 mm away from the lines 23g and 23i.

Since the lines 23g, 23h, 23i, and 23j are disposed near both ends of the pellicle gripping member 21, even if the reflector 24b is provided on the pellicle gripping member 21, the marker 23C I can definitely admit it.

Further, the lines 23g, 23h, 23i, and 23j may be lines of the same length and thickness. Further, the lines 23g, 23h, 23i, and 23j are two lines spaced apart in the center, but may be one continuous line. In addition, the position and number of lines constituting the marker 23C are not limited to this.

In the case of using the rod-shaped tip 21a, it is preferable to use the marker 23C of this modified example composed only of lines because the area where the marker can be placed is narrow. In addition, since the marker 23C is not provided in the tip region R, the marker 23C may be formed by a coating layer, or a part of the surface of the tip portion 21a may be shaved to form the marker 23C.

<Modified Example 4 of Marker>

Modification 4 of the marker is a form in which the marker is provided in the tip region R. 14 is a diagram showing the outline of a marker 23D related to a modified example.

The marker 23D has three lines 23k, 23l, and 23m. The wire 23k is provided at a position approximately 1 mm away from the end face 21d in the +x direction, the wire 23l is provided at a position approximately 2 mm away from the end face 21d in the +x direction, and the wire 23m is provided at a position away from the front end face 21d by approximately 3 mm in the +x direction.

Since the depth d of the groove 101d and the distance between the end surface 21d and the line 23m are approximately the same, if the tip 21a is correctly inserted into the groove 101d, when viewed from above, the groove 101d The opening (side surface 101c) and the line 23m overlap, and the lines 23k, 23l, and 23m cannot be visually recognized.

On the other hand, when the tip 21a is not correctly inserted into the groove 101d, any of the lines 23k, 23l, and 23m can be visually recognized when viewed from above. Then, the gap between the bottom surface of the groove 101d and the front end surface 21d can be known by which one of the lines 23k, 23l, and 23m can be visually recognized. For example, when the lines 23l and 23m can be visually recognized, it can be seen that the gap between the bottom surface of the groove 101d and the tip surface 21d is 2 mm or more.

Since the lines 23k, 23l, and 23m are also arranged near both ends of the pellicle gripping member 21, the marker 23D is reliably recognized even if the reflector 24b is installed on the pellicle gripping member 21. I can.

In this modification, since the marker 23D is provided in the tip region R, it is not a marker formed by coating the surface of the tip portion 21a, but a marker formed by cutting a part of the surface of the tip portion 21a into a concave portion. It is preferable to When the pellicle gripping member 21 is inserted into the groove 101d, the pellicle gripping member 21 or the pellicle frame 101 is scraped off, making it difficult to generate dust.

<Modified Example 5 of Marker>

Modification 5 of the marker is a mode in which the marker is also provided in the tip region R. Fig. 15 is a diagram showing the outline of a marker 23E related to a modified example.

The marker 23E has two lines 23n that come into contact with the front end surface 21d and are inclined with respect to the front end surface 21d, and scale lines 23o, 23p, and 23q. The grid lines 23o, 23p, and 23q are provided along a direction (x direction) substantially orthogonal to the front end face 21d. The grid line 23o is provided at a position where the line 23n and the boundary line 21g (the distance from the front end surface 21d is approximately 3 mm) intersect. The scale line 23p is provided at a position where the distance from the line 23n and the front end face 21d intersects a virtual line drawn at a position of approximately 2 mm. The scale line 23q is provided at a position where the distance from the line 23n and the front end face 21d intersects a virtual line drawn at a position of approximately 1 mm.

When the tip 21a is correctly inserted into the groove 101d, the intersection of the line 23n and the grid line 23o overlaps with the opening (side surface 101c) of the groove 101d when viewed from above.

On the other hand, when the tip 21a is not properly inserted into the groove 101d, the position where the line 23n and the grid line 23o intersect is exposed when viewed from above. Then, by referring to the grid lines 23o, 23p, and 23q, the gap between the bottom surface of the groove 101d and the tip surface 21d can be known. For example, when viewed from above, if the side surface 101c is in the vicinity of the intersection of the line 23n and the grid line 23p, the gap between the bottom surface of the groove 101d and the tip surface 21d is approximately It can be seen that it is 0.5 mm.

In addition, since the marker 23E is also provided in the tip region in this modified example, it is preferable to set it as a marker formed by shaving a part of the surface of the tip portion 21a and providing a concave portion similarly to the marker 23D.

<Second Embodiment>

In the first embodiment, the marker 23 was confirmed visually, but the method for confirming the marker 23 is not limited to visual observation.

In the second embodiment of the present invention, the marker 23 is confirmed by the imaging unit. Hereinafter, a pellicle sticking device 3 having a pellicle gripping device 2 according to the second embodiment will be described. In addition, about the same part as 1st Embodiment, the same code|symbol is attached|subjected and detailed description is abbreviate|omitted.

Fig. 16 is a perspective view schematically showing the pellicle gripping device 2 and the pellicle sticking device 3; 17 is a plan view schematically illustrating the pellicle gripping device 2 and the pellicle sticking device 3. As shown in FIG. In FIGS. 16 and 17, only the main parts are shown, and illustration of some components is omitted. 16 shows the frame body 10 extending in the vertical direction, and FIG. 17 shows the frame body 10 extending in the horizontal direction.

The pellicle gripping device 2 is installed inside the pellicle sticking device 3, and mainly consists of the frame body 10, the pellicle gripping unit 20, the measurement unit 31, and the imaging unit 32. , 33, 34) and a stage 40 (not shown in Fig. 17).

The pellicle 100 is inserted from the opening 3a of the pellicle sticking device 3 into the internal space 3b of the pellicle sticking device 3 by the transport device 110 . The pellicle 100 inserted into the inner space 3b is placed on the stage 40 . The stage 40 has a moving mechanism not shown, and is movable in the horizontal direction and the vertical direction. The pellicle sticking device 3 has a laser irradiation unit (not shown), and positions the pellicles 100 by moving the stage 40 based on the laser irradiated from the laser irradiation unit.

When the positioning of the pellicle 100 is completed, as shown in FIG. 16, the frame body 10 that is vertically extended is rotated, and as shown in FIG. 17, the pellicle holding member 21 is rotated horizontally and The pellicle 100 is gripped by using.

The imaging units 32, 33, and 34 have imaging devices such as CCD and CMOS, and can continuously capture images of objects. The imaging units 32 and 33 are provided adjacent to the opening 3a, but are preferably installed outside the inner space 3b. The imaging unit 34 is installed inside the inner space 3b.

The imaging units 32, 33, and 34 are for imaging the marker 23, and are installed at positions higher than the frame body 10 when the frame body 10 is extended in the horizontal direction. When the frame body 10 is extended horizontally, since the marker 23 is provided at a position where it can be visually recognized from above or obliquely, the image capturing units 32, 33, 34 capture the marker 23 I can.

The imaging unit 32 is installed adjacent to the vertical frame unit 11 , and the imaging unit 33 is installed adjacent to the vertical frame unit 12 . In addition, the imaging units 32 and 33 are provided outside the region sandwiched between the vertical frame unit 11 and the vertical frame unit 12 when viewed from above in the vertical direction.

17 shows a state when the frame body 10 grips the pellicle 100 for glass of G10 size, and at this time, the distance between the vertical frame part 11 and the vertical frame part 12 is the widest. . The imaging unit 32 is provided at a position in the x direction of the vertical frame unit 11 when the vertical frame unit 11 is most positioned on the -x side or on the -x side from that, and the imaging unit 33 is provided at the position in the x direction of the vertical frame part 12 when the vertical frame part 12 is located most on the +x side or on the +x side from that.

Fig. 18 is a view showing how the imaging section 32 captures an image of the pellicle gripping member 21 installed on the vertical frame section 11, where (A) is a plan view and (B) is a side view. 18, the direction of the optical axis when the imaging unit 32 images the marker 23 is schematically indicated by a thick arrow. Since the imaging unit 32 is provided on the -x side of the vertical frame unit 11 in the x direction, the imaging unit 32 can image the marker 23 reliably. If the imaging unit 32 is installed on the -x side of the vertical frame unit 11 in the x direction, as shown by the dotted line arrow in FIG. As a result, there is a possibility that the marker 23 cannot be imaged. In contrast, when viewed from above in the vertical direction, by providing the image pickup units 32 and 33 outside the vertical frame portion 11 and the region sandwiched between the vertical frame portions 12, the image pickup portions 32 and 33 are positioned vertically, respectively. The marker 23 of the pellicle gripping member 21 installed on the frame portions 11 and 12 can be reliably imaged.

Returning to the description of FIG. 17 . The imaging unit 34 is provided adjacent to the lower end 15a of the frame 15 . Moreover, the imaging part 34 is provided on the outer side (-y side) of the lower end part 15a when seen from the vertical direction upper side. Therefore, the imaging unit 34 can reliably take an image of the marker 23 of the pellicle gripping member 21 provided on the lower end 15a.

Images captured by the imaging units 32, 33, and 34 are displayed on a monitor (not shown) installed outside the inner space 3b. The imaging units 32, 33, 34 and the monitor are connected via a network not shown.

The imaging units 32, 33, and 34 may be configured such that the direction of the optical axis is adjustable. In this way, imaging can be performed for each marker 23 . In addition, since the imaging unit 34 is installed inside the interior space 3b, it is preferable to provide a cover around the imaging unit 34 so that dust does not fall into the interior space 3b.

According to this embodiment, since the marker 23 can be confirmed by the images captured by the imaging units 32, 33 and 34, the operator does not need to see the marker 23 in the interior space 3b. Therefore, it is possible to ascertain whether the distal end 21a is properly inserted into the groove 101d while preventing the generation of dust.

In addition, according to the present embodiment, since the marker 23 is blackened, in the image captured by the imaging units 32, 33, 34, the metal-colored portion of the tip portion 21a where the marker 23 is not provided By making it conspicuous, confirmation of the marker 23 becomes easy. Also, since the marker 23 is blackened, it is possible to prevent flare from occurring in images captured by the imaging units 32, 33, and 34.

In addition, although the marker 23 has a square first marker 23a, a second marker 23b, and a third marker 23c, in the images captured by the imaging units 32, 33, 34, 1 marker 23a, the 2nd marker 23b, and the 3rd marker 23c become rectangular shape. For example, in the depth direction of the first marker 23a, the second marker 23b, and the third marker 23c of the marker 23 in the captured image as the distance from the imaging unit 32 increases. The length gets longer. And the roughly position of the imaged marker 23 can be grasped|ascertained by the length of the depth direction of the 1st marker 23a in an image, the 2nd marker 23b, and the 3rd marker 23c.

Note that the markers installed on the pellicle gripping member 21 are not limited to the marker 23, and any of the markers 23A to 23E may be installed on the pellicle gripping member 21. In the case of capturing an image of the pellicle gripping member 21 provided closest to the imaging units 32, 33, and 34, the angle at which the pellicle gripping member 21 is viewed from the imaging units 32, 33, and 34 is approximately becomes 45°. In the case of using the marker 23B as shown in FIG. 12, even if a part of the marker 23B is blocked by the reflector 24b, the first marker 23a, the second marker 23b and the third marker ( 23c) can be reliably captured by the imaging units 32, 33, and 34.

As mentioned above, although embodiment of this invention has been described in detail with reference to drawings, the specific structure is not limited to this embodiment, A design change etc. which do not deviate from the summary of this invention are included. If it is a person skilled in the art, it is possible to appropriately change, add, convert, etc. each element of embodiment.

In addition, in the present invention, "approximately" is a concept including not only strictly identical cases but also errors and deformations to the extent that identity is not lost. For example, "substantially parallel" is not limited to strictly parallel, but is a concept including, for example, a certain degree of error. In addition, for example, in the case of expressing only parallel, orthogonal, etc., it shall include the case of substantially parallel, substantially orthogonal, etc. as well as the case of strictly parallel, orthogonal, etc.. In the present invention, "nearby" means including an area within a certain range (which can be arbitrarily determined) near the reference position. For example, in the case of the vicinity of A, it is a concept indicating that the area within the range close to A may or may not include A.

1, 2: pellicle gripping device
3: Pellicle sticking device
3a: opening 3b: inner space
10: Frame body
11, 12: vertical frame part (frame part)
13, 14: upper frame part
15: border
15a: lower part 15b: upper part
20: pellicle gripping part
21: pellicle gripping member
21a: tip portion 21b: bent portion
21c: retaining part 21d: end surface
21e, 21f: cotton
21g: border line 21h: center line
22: driving member
22a: rod 22b: actuator
23, 23A, 23B, 23C, 23D, 23E: Marker
23a, 23d: first marker 23b, 23e: second marker
23c, 23f: Third marker
23o, 23p, 23q: grid lines
24: measuring part
24a: ultrasonic sensor 24b: reflector
24c: distal end
31: measuring part
32, 33, 34: imaging unit 40: stage
100: pellicle ((pellicle) 101: pellicle frame
101a: upper surface 101b: lower surface
101c: side
101d: groove 101e: hollow part
102: pellicle film 103: adhesive member
110: transport device

Claims (12)

A pellicle gripping a pellicle having a substantially hollow normal pellicle frame having grooves formed on its side surface and a pellicle film installed on a first surface substantially orthogonal to the side surface of the pellicle frame so as to cover the hollow portion of the pellicle frame. As a gripping device,
A frame body that is a frame-shaped member in which a plurality of rod-shaped members are combined in a substantially rectangular shape;
A plurality of pellicle gripping members installed on the frame body;
A driving unit provided for each pellicle holding member to control the pellicle holding member between a first position where the pellicle gripping member is inserted into the groove and a second position where the pellicle gripping member is not inserted into the groove. A drive unit for moving in one direction is provided;
The pellicle gripping member has a plate-shaped or bar-shaped tip part of which is inserted into the groove when the pellicle gripping member is in the first position,
The pellicle frame holding device according to claim 1 , wherein a marker indicating a position of the tip portion in the first direction is provided on the tip portion. According to claim 1,
The front end is formed of metal,
A pellicle frame holding device, characterized in that the marker is installed on the front end by providing a coating layer on the surface of the front end. According to claim 2,
The pellicle frame is an aluminum alloy treated with black almite,
The pellicle frame holding device, characterized in that the coating layer is black. According to claim 1,
The front end is formed of metal,
The pellicle frame holding device according to claim 1, wherein the marker is installed on the tip portion by cutting a part of the surface of the tip portion to form a concave portion. According to claim 4,
The pellicle frame is an aluminum alloy treated with black almite,
The marker is formed by coloring the inside of the concave portion black. According to any one of claims 1 to 5,
The tip portion has a tip face that is inserted into the groove when the pellicle gripping member is in the first position and extends in a second direction substantially perpendicular to the first direction,
The pellicle frame holding device, characterized in that the marker indicates the distance from the front end surface. According to claim 6,
The marker is a boundary line that is an imaginary line substantially along the second direction with the front end surface, and is not installed in a front end area sandwiched between the boundary line disposed at a position away from the front end surface by a predetermined distance in the first direction. A pellicle frame gripping device. According to claim 7,
The tip is plate-shaped,
The marker is installed on the widest surface of the distal end,
The markers have a first marker, a second marker, and a third marker lined up along the boundary line,
The pellicle frame holding device, wherein the first marker, the second marker, and the third marker have different lengths in the first direction. According to claim 8,
The marker has two of each of the first marker, the second marker, and the third marker,
The pellicle frame holding device according to claim 1 , wherein the first marker, the second marker, and the third marker are respectively provided on both sides of a center line of the pellicle holding member in a longitudinal direction. According to any one of claims 1 to 9,
The pellicle frame holding device according to claim 1, wherein the marker is provided at a position where it can be viewed from above or obliquely when the frame body is extended horizontally. According to claim 10,
An imaging unit for imaging the marker is provided;
The pellicle frame holding device according to claim 1, wherein the imaging unit is installed at a position higher than the frame body when the frame body is extended in a horizontal direction. According to claim 11,
The frame body has a rod-shaped first vertical frame and a second vertical frame held substantially in parallel at intervals,
The pellicle gripping member is installed on each of the first vertical frame and the second vertical frame,
The imaging unit is installed adjacent to the first vertical frame and the second vertical frame, respectively;
The pellicle frame holding device according to claim 1 , wherein the imaging unit is provided outside a region sandwiched between the first vertical frame and the second vertical frame when viewed from above in a vertical direction.