WO2022137874A1

WO2022137874A1 - Pellicle frame grasping device

Info

Publication number: WO2022137874A1
Application number: PCT/JP2021/041615
Authority: WO
Inventors: 良米澤
Original assignee: 株式会社ブイ・テクノロジー
Priority date: 2020-12-24
Filing date: 2021-11-11
Publication date: 2022-06-30
Also published as: JP2022101135A; TW202226407A; CN116529861A; KR20230121724A

Abstract

With the present invention, a pellicle frame can be correctly grasped even if warped.　The present invention comprises: a frame body (10) that is a frame-shaped member in which a plurality of rod-shaped members are assembled in a substantially rectangular shape; a plurality of pellicle grasping members (21) provided to the frame body (10); and a drive unit provided to each of the pellicle grasping members (21), the drive unit moving the pellicle grasping member between a first position at which the pellicle grasping member is inserted in a groove, and a second position at which the pellicle grasping member is not inserted in the groove. Each pellicle grasping member (21) has a plate-shaped or rod-shaped tip part, a portion of which being inserted in the groove when the pellicle grasping member (21) is in the first position. The tip part has a tip face that is inserted in the groove when the pellicle grasping member (21) is in the first position, the tip face being extended in a second direction that is substantially perpendicular to a first direction, which is the direction in which the pellicle grasping member moves. The tip part is provided with a marker that indicates the distance from the tip face.

Description

Pellicle frame gripping device

The present invention relates to a pellicle frame gripping device.

In Patent Document 1, the pellicle frame is gripped by using the pellicle gripping portion provided on the frame body, the adhesive member of the pellicle and the mask are brought into contact with each other, and the measuring portion is arranged at the first position where the vicinity of the tip overlaps with the mask. Then, the first distance, which is the distance to the surface of the mask, is measured, the measuring unit is moved to the second position where the vicinity of the tip overlaps with the pellicle frame, and the second distance, which is the distance to the pellicle film, is measured. A frame gripping device is disclosed.

Japanese Unexamined Patent Publication No. 2019-128501

In the invention described in Patent Document 1, the distance in the height direction (direction substantially orthogonal to the pellicle film) such as the distance to the pellicle film can be accurately measured, but is substantially parallel to the pellicle film. The distance (direction) cannot be measured, and if the pellicle frame is distorted, the pellicle frame may not be gripped accurately.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a pellicle frame gripping device capable of grasping whether or not a pellicle frame can be gripped accurately.

In order to solve the above problems, the pellicle frame gripping device according to the present invention has, for example, a substantially hollow cylindrical pellicle frame having a groove formed on a side surface thereof and a first surface substantially orthogonal to the side surface of the pellicle frame. A pellicle gripping device for gripping a pellicle having a pellicle film provided so as to cover the hollow portion of the pellicle frame, and a frame body which is a frame-shaped member in which a plurality of rod-shaped members are combined in a substantially rectangular shape. A plurality of pellicle gripping members provided on the frame body, a first position of a drive unit provided for each pellicle gripping member into which the pellicle gripping member is inserted into the groove, and the pellicle gripping member. A drive unit for moving the pellicle gripping member in the first direction to and from a second position not inserted into the groove is provided, and the pellicle gripping member is one when the pellicle gripping member is in the first position. The portion has a plate-shaped or rod-shaped tip portion to be inserted into the groove, and the tip portion is provided with a marker indicating the position of the tip portion in the first direction.

According to the pellicle frame gripping device according to the present invention, the pellicle gripping member has a plate-shaped or rod-shaped tip portion in which a part of the pellicle gripping member is inserted into the groove of the pellicle frame. A marker indicating the position of the pellicle gripping member in the first direction, which is the moving direction of the pellicle gripping member, is provided at the tip portion. This makes it possible to know whether the tip is accurately inserted into the groove, that is, whether the pellicle frame can be accurately gripped.

The tip portion may be formed of metal, and the marker may be provided on the tip portion by providing a coating layer on the surface of the tip portion. As a result, the marker can be easily provided on the pellicle gripping member.

The pellicle frame is an aluminum alloy treated with black alumite, and the coating layer may be black. As a result, the colors of the pellicle frame and the marker can be matched, and the visibility of the marker can be improved.

The tip portion is formed of metal, and the marker may be provided on the tip portion by scraping a part of the surface of the tip portion to form a recess. This makes it possible to prevent the marker from disappearing from the tip portion.

The pellicle frame is an aluminum alloy treated with black alumite, and the marker may be formed by coloring the inside of the recess in black. As a result, the colors of the pellicle frame and the marker can be matched, and the visibility of the marker can be improved.

The tip portion is a tip surface that is inserted into the groove when the pellicle gripping member is in the first position, and has a tip surface extending in a second direction substantially orthogonal to the first direction. However, the marker may indicate the distance from the tip surface. Thereby, it is possible to grasp whether the tip surface is in contact with the bottom surface of the groove, that is, whether the pellicle frame can be accurately gripped.

The marker is sandwiched between the tip surface and a boundary line which is a virtual line substantially along the second direction and is arranged at a predetermined distance in the first direction from the tip surface. It is not necessary to provide it in the tip region. As a result, it is possible to prevent the marker from being scraped and dust being generated.

The tip portion has a plate shape, the marker is provided on the widest surface of the tip portion, and the marker is a first marker, a second marker, and a third marker arranged along the boundary line. The first marker, the second marker, and the third marker may have different lengths in the first direction. This makes it possible to easily know how much the tip should be moved to correctly insert the tip into the groove.

The marker has two each of the first marker, the second marker, and the third marker, and the first marker, the second marker, and the third marker are in the longitudinal direction of the pellicle gripping member. It may be provided on both sides of the center line along the line. As a result, even if the reflector or the like is provided on the upper side in the vertical direction of the tip portion, the marker can be reliably visually recognized.

The marker may be provided at a position that can be visually recognized from above or diagonally above when the frame is extended in the horizontal direction. As a result, the marker can be easily visually recognized.

An image pickup unit for imaging the marker is provided, and the image pickup unit may be provided at a position higher than the frame body when the frame body is extended in the horizontal direction. As a result, it is not necessary for the operator to visually check the marker in the internal space, and it is possible to prevent the generation of dust.

The frame has a rod-shaped first vertical frame and a second vertical frame that are held substantially parallel to each other at intervals, and the pellicle gripping member is attached to each of the first vertical frame and the second vertical frame. The image pickup unit is provided adjacent to the first vertical frame and the second vertical frame, respectively, and the image pickup unit is provided with the first vertical frame and the image pickup unit when viewed from above in the vertical direction. It may be provided outside the area sandwiched between the second vertical frame and the second vertical frame. As a result, it is possible to avoid a situation in which the marker cannot be imaged because it is blocked by the pellicle frame.

According to the present invention, it is possible to grasp whether or not the pellicle frame can be accurately gripped.

It is a front view which shows the outline of the pellicle gripping apparatus 1 which concerns on 1st Embodiment. It is a perspective view which shows the outline of the pellicle 100. FIG. 2 is a cross-sectional view taken along the line AA of FIG. It is a figure which shows the outline of the pellicle grip part 20. It is a figure which shows an example of a marker 23. It is a figure which shows typically the state that the tip portion 21a is correctly inserted into the groove 101d of the pellicle frame 101 for G10 size glass. It is a figure which shows typically the appearance that the tip portion 21a is not correctly inserted in the groove 101d of the pellicle frame 101 for G10 size glass. It is a figure which shows typically the state that the tip portion 21a is correctly inserted into the groove 101d of the pellicle frame 101 for glass smaller than G10 size. It is a figure which shows typically the appearance that the tip portion 21a is not correctly inserted in the groove 101d of the pellicle frame 101 for glass smaller than G10 size. It is a figure which shows the outline of the marker 23A which concerns on a modification. It is a figure which shows the outline of the marker 23B which concerns on a modification. It is a figure which shows typically the state of visually recognizing the marker 23B from diagonally above. It is a figure which shows the outline of the marker 23C which concerns on a modification. It is a figure which shows the outline of the marker 23D which concerns on a modification. It is a figure which shows the outline of the marker 23E which concerns on a modification. It is a perspective view which shows the outline of the pellicle gripping device 2 and the pellicle sticking device 3. It is a top view which shows the outline of the pellicle gripping device 2 and the pellicle sticking device 3. It is a figure which shows the state which the image pickup part 32 takes an image of the pellicle gripping member 21 provided in the vertical frame part 11, (A) is a plan view, (B) is a side view. It is a figure which shows typically how the pellicle 100 is distorted. It is a figure which shows typically how the pellicle 100 is distorted.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each drawing, the same elements are designated by the same reference numerals, and the description of overlapping portions will be omitted.

<First Embodiment>
FIG. 1 is a front view showing an outline of the pellicle gripping device 1 according to the first embodiment. The pellicle gripping device 1 is provided in a pellicle attaching device (not shown). The pellicle attaching device attaches the pellicle 100 gripped by the pellicle gripping device 1 to a substantially plate-shaped mask (not shown) held substantially along the vertical direction.

Hereinafter, the horizontal direction is defined as the direction along the xy plane, and the vertical direction orthogonal to the xy plane is defined as the z direction. Further, the x direction and the y direction are orthogonal to each other.

First, the pellicle 100 will be described. FIG. 2 is a perspective view showing an outline of the pellicle 100. FIG. 3 is a sectional view taken along the line AA of FIG. The pellicle 100 mainly has a pellicle frame 101, a pellicle film 102 stretched on the pellicle frame 101, and an adhesive member 103 (see FIG. 3) formed on the lower surface of the pellicle frame 101.

The pellicle frame 101 is a frame-shaped (substantially hollow cylindrical) member having a substantially rectangular outer circumference. The pellicle frame 101 has a substantially rectangular shape in a plan view (viewed from above the paper surface of FIG. 2), and has a hollow portion 101e in the central portion. In the pellicle frame 101, the size of the hollow portion 101e is about the same as the size of the photomask (for example, about 520 mm × 800 mm to 1620 mm × 1780 mm). The width of the frame-shaped portion of the pellicle frame 101 is about several tens of mm, and the thickness is about 2 mm to 10 mm.

The pellicle frame 101 has a substantially parallel upper surface 101a and a lower surface 101b. Further, a groove 101d is formed on the side surface 101c orthogonal to the upper surface 101a and the lower surface 101b of the pellicle frame 101. A pellicle gripping member 21 (detailed later) provided in the frame body 10 is inserted into the groove 101d.

The groove 101d differs depending on the size of the pellicle frame 101. For example, in the case of the pellicle frame 101 for G10 glass (1620 mm × 1780 mm), the depth d is about 3 mm and the width w is about 1.5 mm to 2 mm. Further, in the case of the pellicle frame 101 for glass smaller than G10, the depth d is about 2 mm and the width w is about 1.5 mm to 2 mm.

In the present embodiment, the pellicle frame 101 is an aluminum alloy treated with black alumite, but the material of the pellicle frame 101 is not limited to this. For example, the pellicle frame 101 may be formed of a metal such as iron, Invar, titanium, or a titanium alloy.

The pellicle film 102 is a thin film having a submicron thickness. The pellicle film 102 is stretched on the upper surface 101a of the pellicle frame 101 so as to cover the hollow portion 101e of the pellicle frame 101. When the pellicle frame 101 is attached onto the photomask substrate, the pellicle film 102 is provided at a predetermined distance from the pattern forming surface (surface) of the mask.

The adhesive member 103 is provided on the lower surface 101b of the pellicle frame 101. The adhesive member 103 is formed in a frame shape on the entire circumference of the pellicle frame 101. As the adhesive member 103, a known one can be used, for example, a hot melt adhesive.

A release layer (liner sheet) for protecting the adhesive is attached to the lower end surface of the adhesive member 103. The release layer is provided with a plurality of convex portions protruding from the pellicle frame 101, and is provided in a pellicle storage container (not shown) by sticking, adhesion, or the like.

The pellicle 100 is carried into the inside of the pellicle affixing device in a state of being placed on the pellicle storage container. At this time, the upper surface 101a and the lower surface 101b of the pellicle frame 101 are substantially along the horizontal direction.

Return to the explanation in Fig. 1. The pellicle gripping device 1 mainly includes a frame body 10, a pellicle gripping unit 20, and a measuring unit 31. The pellicle gripping unit 20 and the measuring unit 31 are provided on the frame body 10.

First, the operation of the pellicle sticking device (not shown) provided inside the pellicle gripping device 1 will be briefly described. In addition to the pellicle gripping device 1, a mask (not shown) held substantially along the vertical direction by a holding portion (not shown) is provided inside the pellicle attaching device. When the pellicle 100 is carried into the inside of the pellicle affixing device substantially along the horizontal direction while being placed on the pellicle storage container (not shown), the frame body 10 is substantially along the vertical direction. After that, the frame body 10 is rotated so as to be substantially along the horizontal direction, the pellicle 100 is gripped by the pellicle gripping portion 20, and the frame body 10 is moved upward in the vertical direction to be released from the pellicle 100 (shown in the figure). Peel off. While holding the exposed pellicle 100 with the adhesive member 103 (not shown in FIG. 1), the frame body 10 is rotated so that the frame body 10 is substantially along the vertical direction, and the frame body 10 is moved in parallel to adhere. The member 103 is attached to the mask.

Next, the configuration of the pellicle gripping device 1 will be described. The frame body 10 is a frame-shaped member in which a plurality of rod-shaped members are combined into a substantially rectangular shape. The frame body 10 mainly has

vertical frame portions

11 and 12,

upper frame portions

13 and 14, and a frame 15 provided outside the

vertical frame portions

11 and 12 and the

upper frame portions

13 and 14. The

vertical frame portions

11, 12, the

upper frame portions

13, 14 and the frame 15 are made of metal, for example, iron, aluminum, or the like.

When the pellicle gripping portion 20 grips the pellicle 100, the frame body 10 is extended in the horizontal direction (approximately along the xy plane) as shown in FIG.

The

vertical frame portions

11 and 12 are rod-shaped members provided along the y direction in the longitudinal direction, and can be moved along the lower end portion 15a and the upper end portion 15b of the frame 15 (that is, along the x direction). It will be provided. As a mechanism for moving the

vertical frame portions

11 and 12 in the x direction, various techniques already known can be used. When the frame body 10 is extended in the vertical direction, the

vertical frame portions

11 and 12 are extended substantially along the vertical direction.

The

upper frame portions

13 and 14 are rod-shaped members provided along the x direction in the longitudinal direction, and are provided so as to be movable along the

vertical frame portions

11 and 12, respectively (that is, along the y direction). As a mechanism for moving the

upper frame portions

13 and 14 in the y direction, various techniques already known can be used. When the frame body 10 is extended in the vertical direction, the

upper frame portions

13 and 14 are extended substantially horizontally in the vicinity of the upper ends of the

vertical frame portions

11 and 12.

The form of the

upper frame portions

13 and 14 is not limited to this. For example, the upper frame portion may be composed of one rod-shaped member extending substantially horizontally, and the vicinity of both ends of the one rod-shaped member may be provided in the

vertical frame portions

11 and 12.

By making the

vertical frame portions

11, 12 and the

upper frame portions

13, 14 movable in this way, the size of the frame composed of the

vertical frame portions

11, 12, the

upper frame portions

13, 14 and the lower end portion 15a can be reduced. It can be varied to accommodate pellicle 100 of various sizes. The pellicle 100 has, for example, a size of 420 mm × 720 mm, a size of 700 mm × 800 mm, a size of 520 mm × 680 mm, a size of 750 mm × 1300 mm, and a size of 1520 mm × 1680 mm. The ones can be mentioned.

The frame body 10 is provided so as to be movable in the vertical direction and the horizontal direction by a movement mechanism (including an actuator) (not shown). Further, the frame body 10 has a rotation shaft (not shown) provided near the end on the −y side, and is rotatably provided by a movement mechanism (including an actuator) (not shown). Since the mechanism for moving and rotating the frame body 10 is known, the description thereof will be omitted.

During standby (when the pellicle 100 is carried in, etc.), the frame body 10 is in a state in which the surface formed by the frame body 15 is extended in the vertical direction (the frame body 10 is extended in the vertical direction). .. When the pellicle 100 is carried into the pellicle sticking device and the alignment is completed, the frame body 10 is rotated around the rotation axis, and the surface formed by the frame body 15 is extended in the horizontal direction (frame body 10). Is extended in the horizontal direction). As a result, the pellicle gripping portion 20 can grip the pellicle 100.

When the pellicle gripping portion 20 grips the pellicle 100, the frame body 10 moves upward in the vertical direction, and the adhesive member 103 is separated from the release layer. Since the adhesive member 103 has a property that the adhesive force is strong against a sudden strong force but weak against a sustained force, the process of separating the adhesive member 103 from the release layer takes about 30 minutes to 1 hour. It is done slowly.

When the adhesive member 103 is separated from the release layer, the frame body 10 is rotated about the rotation axis, and the frame body 10 is extended in the vertical direction. This makes it possible to attach the pellicle 100 to the mask. When the pellicle 100 is attached to the mask, the frame 10 is tilted in the vertical direction so that the distance between the lower surface 101b on the upper end side and the mask is closer than the distance between the lower surface 101b on the lower end side and the mask. Further, when the pellicle 100 is attached to the mask, the frame body 10 is extended in the vertical direction and parallel to the horizontal direction.

The pellicle gripping portion 20 has a plurality of pellicle gripping members 21 that grip the side surface 101c of the pellicle frame 101. The pellicle gripping member 21 is provided on the

vertical frame portions

11, 12, the

upper frame portions

13, 14, the lower end portion 15a, and the upper end portion 15b.

In the example shown in FIG. 1, the

vertical frame portions

11 and 12 are each provided with five pellicle gripping members 21, and the

upper frame portions

13 and 14 are each provided with one pellicle gripping member 21 at the lower ends. The portion 15a is provided with five pellicle gripping members 21, and the upper end portion 15b is provided with one pellicle gripping member 21, but the position and number of the pellicle gripping members 21 are not limited to this.

The pellicle gripping member 21 to be used differs depending on the size of the pellicle 100. In FIG. 1, among the pellicle gripping members 21 provided on the frame body 10, only the pellicle gripping member 21 that is in contact with the pellicle 100 (here, the side surface 101c) is used.

The pellicle gripping member 21 is provided so as to be movable in the horizontal direction or the vertical direction between the insertion position where a part of the pellicle gripping member 21 is inserted into the groove 101d and the retracted position where the pellicle gripping member 21 does not abut on the side surface 101c. FIG. 4 is a diagram showing an outline of the pellicle grip portion 20.

The pellicle gripping member 21 is a metal plate-shaped or rod-shaped member. In this embodiment, the pellicle gripping member 21 is made of stainless steel (for example, SUS304).

The pellicle gripping member 21 is formed by bending a plate-shaped member, and mainly has a tip portion 21a, a bent portion 21b, and a holding portion 21c provided with a driving member 22. A part of the tip portion 21a is inserted into the groove 101d when the pellicle gripping member 21 is in the insertion position.

In the present embodiment, the pellicle gripping member 21 is bent at substantially right angles at both ends of the bent portion 21b. However, the bending angle of the pellicle gripping member 21 is not limited to a substantially right angle.

The tip portion 21a has a tip surface 21d that is inserted into the groove 101d when the pellicle gripping member 21 is in the insertion position. The tip surface 21d is an end surface of the plate-shaped member, and extends in a direction substantially orthogonal to the moving direction of the pellicle gripping member 21. For example, for the pellicle gripping members 21 provided on the

vertical frame portions

11 and 12, the moving direction is the x direction, and the tip surface 21d is substantially along the y direction (provided substantially parallel to the yz plane). .. When the pellicle gripping member 21 is correctly inserted into the groove 101d, the tip surface 21d comes into contact with the bottom surface of the groove 101d.

The tip portion 21a is provided with a marker (not shown in FIG. 4) indicating the position of the tip portion 21a in the moving direction (x direction in FIG. 4) of the pellicle gripping member 21. In the present embodiment, a marker indicating the distance from the tip surface 21d is provided on the tip portion 21a. The marker is provided at a position that can be visually recognized from above when the frame body 10 is extended in the horizontal direction. In the present embodiment, the tip portion 21a has a plate shape, and a marker is provided on the surface 21f which is the widest surface of the tip portion 21a and which is the upper surface (+ z side) in the vertical direction. By visually recognizing the marker, the operator can confirm the position of the tip portion 21a in the x direction, and thus whether the pellicle gripping member 21 is correctly inserted into the groove 101d. The markers will be described in detail later.

The pellicle gripping member 21 (holding portion 21c) is provided with a driving member 22. The drive member 22 includes a rod 22a and an actuator 22b for moving the rod 22a. The pellicle gripping member 21 is connected to the rod 22a. The actuator 22b is provided on the frame body 10 (not shown in FIG. 4).

The pellicle gripping member 21 has an insertion position where the pellicle gripping member 21 is inserted into the groove 101d by the drive member 22 (see the solid line in FIG. 4), the pellicle gripping member 21 is not inserted into the groove 101d, and the pellicle gripping member 21 is a pellicle. It is moved horizontally between the retracted position that does not interfere with the frame 101 (see the alternate long and short dash line in FIG. 4).

Each of the pellicle gripping members 21 is provided with a measuring unit 24 for measuring the height (position in the z direction) of the pellicle frame 101. The measuring unit 24 mainly has an ultrasonic sensor 24a and a reflector 24b. The measuring unit 24 is not essential, and the form of the measuring unit 24 is not limited to this.

An ultrasonic sensor 24a is a distance measuring sensor that transmits ultrasonic waves toward an object, receives the reflected wave, and measures the distance to the target based on the time interval between the signal transmission and the reflected wave reception. be. Since the ultrasonic sensor 24a is already known, detailed description thereof will be omitted.

The reflector 24b is provided on the upper side (+ z side) of the pellicle gripping member 21. The reflector 24b reflects the ultrasonic waves transmitted from the ultrasonic sensors 24a. The tip portion 24c of the reflector 24b is tilted approximately 45 degrees with respect to the xy plane. Therefore, the ultrasonic wave transmitted from the ultrasonic sensor 24a is reflected downward (in the −z direction) (see the two-dot chain line in FIG. 4).

Return to the explanation in Fig. 1. The measuring unit 31 has a distance measuring sensor (for example, an ultrasonic sensor) and a reflector, and measures the height (position in the z direction) of the mask or the pellicle frame 101. The measuring unit 31 is provided on the frame body 10, here the

upper frame units

13 and 14. The measuring unit 31 is located at a position different from that of the pellicle gripping member 21 when viewed from a direction (here, the z direction) substantially orthogonal to the extending direction of the rod-shaped members (for example, the upper frame portions 13 and 14) constituting the frame body 10. It will be provided.

The two measuring units 31 are provided near the upper side and the left end of the frame body 10, respectively, and near the upper side and the right end of the frame body 10. However, the position and number of the measuring units 31 are not limited to the form shown in FIG.

The measuring unit 31 can move vertically between the first position where the vicinity of the tip overlaps the mask (see the solid line in FIG. 1) and the second position where the vicinity of the tip overlaps the pellicle frame 101 (see the two-dot chain line in FIG. 1). It is provided in.

Next, the marker provided on the pellicle gripping member 21 will be described. Hereinafter, the marker will be described using the pellicle gripping member 21 provided on the vertical frame portion 12 as an example. FIG. 5 is a diagram showing an example of the marker 23.

First, the material of the marker 23 will be described. By providing the coating layer on the surface of the pellicle gripping member 21, the marker 23 is provided on the pellicle gripping member 21. As a result, the marker 23 can be easily provided on the pellicle gripping member 21. In the present embodiment, a fluororesin having resistance to a solvent such as isopropyl alcohol is used for the coating layer.

Further, it is desirable that the coating layer used for the marker 23 is black. The portion of the pellicle gripping member 21 where the marker 23 is not provided is metallic (for example, silver). By making the marker 23 black, the colors of the black pellicle frame 101 and the marker 23 can be matched, and the metal-colored portion where the marker 23 is not provided can be made conspicuous.

In FIG. 5, a coating layer is provided on the surfaces of the tip portion 21a, the bent portion 21b, and the holding portion 21c of the pellicle gripping member 21, but at least the coating layer (that is, the marker 23) is provided on the tip portion 21a. The coating layer may not be provided on the surfaces of the bent portion 21b and the holding portion 21c.

Next, the shape of the marker 23 will be described. The marker 23 is not provided in the tip region R sandwiched between the tip surface 21d and the boundary line 21g. The boundary line 21g is a virtual line substantially along the extending direction (here, the y direction) of the tip surface 21d, and is a predetermined distance in a direction substantially orthogonal to the tip surface 21d (here, the x direction) from the tip surface 21d. (Distance l in FIG. 5) It is arranged at a distant position. Since the boundary line 21g and the tip region R are imaginary lines and regions, they are shown by dotted lines in FIG.

It is desirable that the distance l between the tip surface 21d and the boundary line 21g is 3 mm or more, which is the depth d of the groove 101d provided in the pellicle frame 101 for large glass (G10 glass). In the present embodiment, the distance l is approximately 3 mm. Thereby, when the tip portion 21a is inserted into the groove 101d, the marker 23 can be prevented from touching the pellicle frame 101 (edge portion of the groove 101d).

If the marker 23 touches the edge portion of the groove 101d, the marker 23 may be scraped by the edge and dust may be generated. Since the pellicle 100 is attached to the mask and it is necessary to prevent the generation of dust as much as possible (it is desirable that no dust is generated), the marker 23 should not be provided in the tip region R where there is a risk of touching the groove 101d. Is desirable.

The marker 23 has a first marker 23a, a second marker 23b, and a third marker 23c arranged along the boundary line 21g. The first marker 23a, the second marker 23b, and the third marker 23c have different lengths in at least the x direction.

In the present embodiment, the first marker 23a, the second marker 23b, and the third marker 23c have a square shape, the length of each side of the first marker 23a is approximately 1 mm, and each side of the second marker 23b. The length is about 1.5 mm, and the length of each side of the third marker 23c is about 2 mm. Therefore, the first marker 23a indicates that the distance from the tip surface 21d is approximately 4 mm, the second marker 23b indicates that the distance from the tip surface 21d is approximately 4.5 mm, and the third marker 23c indicates that the distance from the tip surface 21d is approximately 4.5 mm. It shows that the distance from the surface 21d is about 5 mm. In this way, the marker 23 indicates the distance from the tip surface 21d.

In the present embodiment, the first marker 23a, the second marker 23b, and the third marker 23c are square, but the shapes of the first marker 23a, the second marker 23b, and the third marker 23c are square. The shape is not limited to the above, and may be a rectangular shape including a rectangular shape, or may be a semicircular shape or a semi-elliptical shape.

FIG. 6 is a diagram schematically showing how the tip portion 21a of the pellicle gripping member 21 is correctly inserted into the groove 101d of the pellicle frame 101 for G10 size glass.

Since the depth d of the groove 101d and the distance l between the tip surface 21d and the boundary line 21g are substantially the same, if the tip portion 21a is correctly inserted into the groove 101d, the opening of the groove 101d when viewed from above. (Side surface 101c) and the boundary line 21g overlap. Therefore, when viewed from above, the boundary line 21g cannot be visually recognized, and only the first marker 23a, the second marker 23b, and the third marker 23c can be visually recognized.

FIG. 7 is a diagram schematically showing how the tip portion 21a is not correctly inserted into the groove 101d of the pellicle frame 101 for G10 size glass.

Since the depth d of the groove 101d, the distance l between the tip surface 21d and the boundary line 21g are substantially the same, if the tip portion 21a is not correctly inserted into the groove 101d, the boundary line 21g is viewed from above. Can be seen. Then, by comparing the distance l'between the side surface 101c and the boundary line 21g with the lengths of the first marker 23a, the second marker 23b, and the third marker 23c in the x direction, the bottom surface and the tip surface 21d of the groove 101d are obtained. It is possible to know the gap between the two, that is, how much the tip portion 21a should be moved to correctly insert the tip portion 21a into the groove 101d. In the example shown in FIG. 7, since the distance l'and the length of the first marker 23a in the x direction substantially match, it can be seen that the gap between the bottom surface of the groove 101d and the tip surface 21d is approximately 1 mm.

FIG. 8 is a diagram schematically showing how the tip portion 21a is correctly inserted into the groove 101d of the pellicle frame 101 for glass smaller than the G10 size.

Since the depth d of the groove 101d is smaller than the distance l between the tip surface 21d and the boundary line 21g and the difference is 1 mm, if the tip portion 21a is correctly inserted into the groove 101d, the side surface 101c and the boundary line 21g will be formed. Distance l'consistently coincides with the length of the first marker 23a in the x direction.

FIG. 9 is a diagram schematically showing how the tip portion 21a is not correctly inserted into the groove 101d of the pellicle frame 101 for glass smaller than the G10 size.

If the tip portion 21a is not correctly inserted into the groove 101d, the distance l'between the side surface 101c and the boundary line 21g becomes larger than the length of the first marker 23a in the x direction. Then, by comparing the distance l'between the side surface 101c and the boundary line 21g with the lengths of the first marker 23a, the second marker 23b, and the third marker 23c in the x direction, the bottom surface and the tip surface 21d of the groove 101d are obtained. It is possible to know the gap between the two, that is, how much the tip portion 21a should be moved to correctly insert the tip portion 21a into the groove 101d. In the example shown in FIG. 9, since the distance l'and the length of the second marker 23b in the x direction substantially match, it can be seen that the gap between the bottom surface of the groove 101d and the tip surface 21d is approximately 0.5 mm.

According to the present embodiment, by visually recognizing the marker 23, it is possible to grasp the position of the tip portion 21a and, by extension, whether the tip portion 21a is correctly inserted into the groove 101d. When inserting the tip portion without the marker 23 into the groove, there is no means to know whether the tip portion is inserted all the way into the groove, but by providing the marker 23 at the tip portion 21a, the marker 23 can be visually recognized. It is possible to confirm whether the pellicle frame 101 can be accurately gripped just by doing so.

Further, according to the present embodiment, the distance between the bottom surface of the groove 101d and the tip surface 21d can be known only by visually recognizing the marker 23. Therefore, when the tip portion 21a is not correctly inserted into the groove 101d, the pellicle gripping member 21 is moved or the drive member 22 is moved by moving the

vertical frame portions

11 and 12 and the

upper frame portions

13 and 14. By moving the pellicle gripping member 21 by moving the pellicle gripping member 21, the pellicle gripping member 21 can accurately grip the pellicle frame 101.

FIGS. 19 and 20 are diagrams schematically showing how the pellicle 100 is distorted. In the case shown in FIG. 19, the pellicle 100 is distorted so that the central portion of each side of the pellicle 100 is concave. Due to the structure in which the pellicle film 102 is attached to the pellicle frame 101 to form the pellicle 100, distortion as shown in FIG. 19 is likely to occur, and the size of the dent is approximately 1 to 2 mm. Since the depth of the groove 101d is approximately 2 mm to 3 mm, the pellicle gripping member 21 inserted near the center of the + x side side of the pellicle 100 may not be able to accurately grip the pellicle 100.

Further, in the case shown in FIG. 20, the pellicle 100 is distorted so that the + x side side and the −x side position of the pellicle 100 deviate from each other (about 2 mm). In this case, the pellicle gripping member 21 inserted in the vicinity of the −x side end of the + y side side of the pellicle 100 may not be able to accurately grip the pellicle 100.

If the frame body 10 is moved upward in the extension direction or the frame body 10 is rotated while the pellicle frame 101 cannot be accurately gripped by the pellicle gripping member 21, the pellicle 100 may fall from the frame body 10. be. On the other hand, since it is possible to grasp whether the pellicle frame 101 is accurately gripped before the frame body 10 is translated or rotated, it is possible to prevent an accident in which the pellicle 100 falls.

Further, according to the present embodiment, the marker 23 is not provided in the tip region R that may be inserted into the groove 101d, so that when the pellicle gripping member 21 is inserted into the groove 101d, the pellicle is inserted. It is possible to prevent the gripping member 21 and the pellicle frame 101 from being scraped to generate dust.

The groove 101d is often formed by cutting, but there is a risk that unevenness may occur on the finished surface due to cutting. When the adhesive member 103 is separated from the mold release layer, the surface 21f comes into contact with the finished surface of the cutting process to move the frame body 10 upward in the vertical direction with the tip portion 21a inserted into the groove 101d, and the surface 21f comes into contact with the surface 21f. Continues to apply a force of about 1 kgf. Since the marker 23 is provided on the surface 21f, if the marker 23 is provided on the tip region R, the marker 23 may be scraped by the convex portion of the finished surface to generate dust. On the other hand, by not providing the marker 23 in the tip region R, it is possible to prevent the generation of dust.

In the present embodiment, the marker 23 is provided on the tip portion 21a by providing a coating layer on the surface, but the form of the marker is not limited to this. For example, a marker may be provided on the tip portion 21a by scraping a part of the surface of the tip portion 21a of the pellicle gripping member 21 to form a recess. In this case, the marker does not disappear from the tip portion 21a. Then, in order to improve visibility, it is desirable to color the inside of the concave portion with ink or the like. In particular, it is desirable to color the inside of the recess with black so that the black pellicle frame 101 and the marker have the same color.

Further, in the present embodiment, the depth d of the groove 101d of the pellicle frame 101 for G10 size glass and the distance l between the tip surface 21d and the boundary line 21g are substantially the same (3 mm), but the distance l. May be as long as the depth d or more (3 mm or more) of the groove 101d of the pellicle frame 101 for G10 size glass. For example, when the distance between the tip surface 21d and the boundary line 21g is 4 mm, if the distance between the side surface 101c and the boundary line 21g and the length of the first marker 23a in the x direction substantially match, the tip portion 21a is formed in the groove 101d. Is correctly inserted, and if the distance between the side surface 101c and the boundary line 21g is larger than the length of the first marker 23a in the x direction, it can be seen that the tip portion 21a is not correctly inserted into the groove 101d.

Further, in the present embodiment, the tip portion 21a is a plate-shaped member formed by bending a plate-shaped member, but the form of the tip portion 21a is not limited to this. For example, the tip portion 21a may have a rod shape. Further, the pellicle gripping member 21 may or may not be bent. However, in order to improve visibility, it is desirable that the marker is provided at a position where it can be visually recognized from above or diagonally above when the frame body 10 is extended in the horizontal direction.

Further, in the present embodiment, the marker 23 is provided on the surface 21f which is the widest surface of the tip portion 21a and is the surface on the upper side (+ z side) in the vertical direction, but the surface on which the marker 23 is provided is provided. It is not limited to the surface 21f. For example, the marker 23 may be provided on the surface 21e, which is the widest surface of the tip portion 21a other than the surface 21f. When the marker 23 is provided on the surface 21e, the marker 23 can be visually recognized even when the frame body 10 is extended in the vertical direction.

Further, in the present embodiment, the marker 23 having the three first marker 23a, the second marker 23b, and the third marker 23c is used, but among the first marker 23a, the second marker 23b, and the third marker 23c. A marker having one or two may be used, or a marker other than the first marker 23a, the second marker 23b, and the third marker 23c (for example, a marker having a length of about 2.5 mm on each side) may be used. You may use the marker which has.

Further, in the present embodiment, the marker 23 indicating the distance from the tip surface 21d is provided on the tip portion 21a, but the marker may indicate the position of the tip portion 21a in the moving direction of the pellicle gripping member 21. For example, when the pellicle gripping member 21 moves along the x direction, the tip portion 21a is divided into a plurality of regions adjacent to the x direction (each region extends in a band shape along the y direction). By adding marks having different colors for each region, it may be used as a marker indicating the position of the pellicle gripping member 21 in the moving direction. In this case, depending on the color of the visible mark, it is possible to grasp the position of the tip portion 21a in the x direction, and thus whether or not the tip portion 21a is correctly inserted into the groove 101d.

<Marker modification 1>
In the first embodiment, the marker 23 is formed by removing the portions of the first marker 23a, the second marker 23b and the third marker 23c to form the coating layer, but the first marker 23a and the second marker 23b are formed. And the form of the mark having the third marker 23c is not limited to this.

FIG. 10 is a diagram showing an outline of the marker 23A according to the modified example. The marker 23A is formed by providing a coating layer only on the portions of the first marker 23d, the second marker 23e, and the third marker 23f. The positions and shapes of the first marker 23d, the second marker 23e, and the third marker 23f are the same as those of the first marker 23a, the second marker 23b, and the third marker 23c. By visually recognizing the marker 23A, it is possible to grasp whether the tip portion 21a is correctly inserted into the groove 101d.

The marker 23A may be formed by scraping a part of the surface of the tip portion 21a to form a concave portion and coloring the inside thereof.

<Marker modification 2>
Modification 2 of the marker is a form in which the marker has a plurality of the first marker 23a, the second marker 23b, and the third marker 23c. FIG. 11 is a diagram showing an outline of the marker 23B according to the modified example.

The marker 23B has two first markers 23a, two second markers 23b, and two third markers 23c. The first marker 23a, the second marker 23b, and the third marker 23c are provided on both sides of the center line 21h along the longitudinal direction of the pellicle gripping member 21, respectively.

FIG. 12 is a diagram schematically showing how the marker 23B is visually recognized from diagonally above. When the marker 23B is viewed from diagonally above, a part of the marker 23B may be obstructed by the reflector 24b and may not be visible. For example, as shown in FIG. 12, when the marker 23B is looked down from the front side at an angle of about 45 degrees, the back side of the center line 21h of the marker 23B cannot be visually recognized.

Even in such a case, by providing the first marker 23a, the second marker 23b, and the third marker 23c on both sides of the center line 21h, the first marker 23a, the second marker 23b, and the third marker 23c can be formed. You can definitely see it.

Further, the visibility can be improved by arranging the smallest first marker 23a near both ends of the pellicle gripping member 21 which is easy to see and providing the largest third marker 23c near the center line 21h. .. However, the arrangement of the first marker 23a, the second marker 23b, and the third marker 23c is not limited to the form shown in FIGS. 11 and 12.

<Marker modification 3>
Modification 3 of the marker is a form in which the marker does not have the first marker, the second marker, and the third marker. FIG. 13 is a diagram showing an outline of the marker 23C according to the modified example.

The marker 23C has

lines

23g, 23h, 23i, 23j substantially parallel to the tip surface 21d. The line 23g is provided on the boundary line 21g, and the line 23i is provided at a position approximately 1 mm away from the boundary line 21g in the + x direction. The

lines

23h and 23j are thinner and shorter than the

lines

23g and 23i, and are provided on the + x side of the

lines

23g and 23i at positions approximately 0.5 mm away from the

lines

23g and 23i, respectively.

Since the

lines

23g, 23h, 23i, and 23j are arranged near both ends of the pellicle gripping member 21, the marker 23C can be reliably visually recognized even if the reflector 24b is provided on the pellicle gripping member 21. ..

Note that the

lines

23g, 23h, 23i, and 23j may be lines of the same length and thickness. Further, the

lines

23g, 23h, 23i, and 23j are two lines whose centers are separated from each other, but may be one continuous line. Further, the position and number of lines constituting the marker 23C are not limited to this.

When the rod-shaped tip portion 21a is used, it is desirable to use the marker 23C of this modification, which is composed only of lines, because the area where the marker can be provided is narrow. Further, since the marker 23C is not provided in the tip region R, the marker 23C may be formed by a coating layer, or a part of the surface of the tip portion 21a may be scraped to form the marker 23C.

<Marker modification 4>
Modification 4 of the marker is a form in which the marker is provided in the tip region R. FIG. 14 is a diagram showing an outline of the marker 23D according to the modified example.

The marker 23D has three

lines

23k, 23l, and 23m. The line 23k is provided at a position approximately 1 mm away from the tip surface 21d in the + x direction, the line 23l is provided at a position approximately 2 mm away from the tip surface 21d in the + x direction, and the line 23m is provided approximately 3 mm in the + x direction from the tip surface 21d. It is installed at a remote position.

Since the distance d between the depth d of the groove 101d, the tip surface 21d, and the line 23m is substantially the same, if the tip portion 21a is correctly inserted into the groove 101d, the opening (side surface) of the groove 101d when viewed from above. 101c) and the line 23m overlap, and the

lines

23k, 23l, and 23m cannot be visually recognized.

On the other hand, when the tip portion 21a is not correctly inserted into the groove 101d, any of the

lines

23k, 23l, and 23m can be visually recognized when viewed from above. Then, the gap between the bottom surface of the groove 101d and the tip surface 21d can be known depending on whether any one of the

lines

23k, 23l, and 23m can be visually recognized. For example, when the lines 23l and 23m can be visually recognized, it can be seen that the gap between the bottom surface of the groove 101d and the tip surface 21d is 2 mm or more.

Since the

lines

23k, 23l, and 23m are also arranged near both ends of the pellicle gripping member 21, the marker 23D can be reliably visually recognized even if the reflector 24b is provided on the pellicle gripping member 21.

In this modification, since the marker 23D is provided in the tip region R, a part of the surface of the tip portion 21a is scraped to form a concave portion instead of a marker formed by coating the surface of the tip portion 21a. It is desirable to use a marker to be formed. When the pellicle gripping member 21 is inserted into the groove 101d, the pellicle gripping member 21 and the pellicle frame 101 can be scraped to prevent dust from being generated.

<Deformation example 5 of marker>
Modification 5 of the marker is a form in which the marker is also provided in the tip region R. FIG. 15 is a diagram showing an outline of the marker 23E according to the modified example.

The marker 23E has two lines 23n that are in contact with the tip surface 21d and are inclined with respect to the tip surface 21d, and scale lines 23o, 23p, and 23q. The scale lines 23o, 23p, and 23q are provided along a direction (x direction) substantially orthogonal to the tip surface 21d. The scale line 23o is provided at a position where the line 23n and the boundary line 21g (distance from the tip surface 21d is approximately 3 mm) intersect. The scale line 23p is provided at a position where the line 23n intersects with a virtual line drawn at a position where the distance from the tip surface 21d is approximately 2 mm. The scale line 23q is provided at a position where the line 23n intersects with a virtual line drawn at a position where the distance from the tip surface 21d is approximately 1 mm.

If the tip portion 21a is correctly inserted into the groove 101d, the position where the line 23n and the scale line 23o intersect and the opening (side surface 101c) of the groove 101d overlap when viewed from above.

On the other hand, when the tip portion 21a is not correctly inserted into the groove 101d, the position where the line 23n and the scale line 23o intersect is exposed when viewed from above. Then, by referring to the scale lines 23o, 23p, and 23q, the gap between the bottom surface of the groove 101d and the tip surface 21d can be known. For example, when viewed from above, if the side surface 101c is near the position where the line 23n and the scale line 23p intersect, it can be seen that the gap between the bottom surface of the groove 101d and the tip surface 21d is approximately 0.5 mm.

In this modification as well, since the marker 23E is provided in the tip region, it is desirable that the marker is formed by scraping a part of the surface of the tip portion 21a to provide a recess, like the marker 23D.

<Second embodiment>
In the first embodiment, the marker 23 is visually confirmed, but the method for confirming the marker 23 is not limited to visual inspection.

The second embodiment of the present invention is a mode in which the marker 23 is confirmed by the imaging unit. Hereinafter, the pellicle pasting device 3 having the pellicle gripping device 2 according to the second embodiment will be described. The same parts as those in the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.

FIG. 16 is a perspective view showing an outline of the pellicle gripping device 2 and the pellicle attaching device 3. FIG. 17 is a plan view showing an outline of the pellicle gripping device 2 and the pellicle attaching device 3. In FIGS. 16 and 17, only the main part is shown, and some configurations are omitted. Further, FIG. 16 shows a state in which the frame body 10 is extended in the vertical direction, and FIG. 17 shows a state in which the frame body 10 is extended in the horizontal direction.

The pellicle gripping device 2 is provided inside the pellicle attaching device 3, and mainly includes a frame body 10, a pellicle gripping section 20, a measuring section 31, an

imaging section

32, 33, 34, and a stage 40 (FIG. 17). (Not shown).

The pellicle 100 is inserted into the internal space 3b of the pellicle sticking device 3 from the opening 3a of the pellicle sticking device 3 by the transport device 110. The pellicle 100 inserted in the internal space 3b is placed on the stage 40. The stage 40 has a moving mechanism (not shown) and can move in the horizontal direction and the vertical direction. The pellicle attaching device 3 has a laser irradiation unit (not shown), and aligns the pellicle 100 by moving the stage 40 based on the laser emitted from the laser irradiation unit.

After the alignment of the pellicle 100 is completed, the frame body 10 extending in the vertical direction is rotated as shown in FIG. 16, and is extended in the horizontal direction as shown in FIG. 17, and then the pellicle gripping member 21 is used. To grip the pellicle 100 with.

The

image pickup units

32, 33, and 34 have an image pickup element such as a CCD or CMOS, and can continuously capture an image of an object. Although the

imaging units

32 and 33 are provided adjacent to the opening 3a, it is desirable that the

imaging units

32 and 33 be provided outside the internal space 3b. The image pickup unit 34 is provided inside the internal space 3b.

The

image pickup units

32, 33, and 34 image the marker 23, and are provided at a position higher than the frame body 10 when the frame body 10 is extended in the horizontal direction. Since the marker 23 is provided at a position that can be visually recognized from above or diagonally above when the frame body 10 is extended in the horizontal direction, the marker 23 can be imaged by the

image pickup units

32, 33, and 34.

The image pickup unit 32 is provided adjacent to the vertical frame portion 11, and the image pickup unit 33 is provided adjacent to the vertical frame portion 12. Further, the

image pickup units

32 and 33 are provided outside the region sandwiched between the vertical frame portion 11 and the vertical frame portion 12 when viewed from the upper side in the vertical direction.

FIG. 17 shows a state when the frame body 10 grips the pellicle 100 for G10 size glass, and at this time, the distance between the vertical frame portion 11 and the vertical frame portion 12 is the widest. The image pickup unit 32 is provided at the position in the x direction of the vertical frame portion 11 when the vertical frame portion 11 is located most on the −x side, or on the −x side of the vertical frame portion 11, and the image pickup unit 33 is provided on the vertical frame portion 12. Is provided at the position in the x direction of the vertical frame portion 12 when is located on the + x side most, or on the + x side of the vertical frame portion 12.

18A and 18B are views showing how the image pickup unit 32 images the pellicle gripping member 21 provided on the vertical frame portion 11, where FIG. 18A is a plan view and FIG. 18B is a side view. In FIG. 18, the direction of the optical axis when the image pickup unit 32 takes an image of the marker 23 is schematically indicated by a thick arrow. Since the image pickup unit 32 is provided on the −x side of the position of the vertical frame portion 11 in the x direction, the image pickup unit 32 can reliably image the marker 23. Assuming that the image pickup unit 32 is provided on the −x side of the vertical frame unit 11 in the x direction, as shown by the dotted arrow in FIG. 18, the marker is blocked by the corner between the upper surface 101a and the side surface 101c. 23 may not be able to take an image. On the other hand, when viewed from the upper side in the vertical direction, by providing the

imaging units

32 and 33 outside the region sandwiched between the vertical frame portion 11 and the vertical frame portion 12, the

imaging units

32 and 33 are respectively vertical frame portions. The marker 23 of the pellicle gripping member 21 provided on the 11th and 12th can be reliably imaged.

Return to the explanation in Fig. 17. The image pickup unit 34 is provided adjacent to the lower end portion 15a of the frame 15. Further, the image pickup unit 34 is provided on the outside (−y side) of the lower end portion 15a when viewed from the upper side in the vertical direction. Therefore, the image pickup unit 34 can reliably image the marker 23 of the pellicle gripping member 21 provided at the lower end portion 15a.

The images captured by the

imaging units

32, 33, and 34 are displayed on a monitor (not shown) provided outside the internal space 3b. The

image pickup units

32, 33, 34 and the monitor are connected via a network (not shown).

The

imaging units

32, 33, and 34 may be configured so that the direction of the optical axis can be adjusted. As a result, imaging can be performed for each marker 23. Since the image pickup unit 34 is provided inside the internal space 3b, it is desirable to provide a cover around the image pickup unit 34 so that dust does not fall into the internal space 3b.

According to the present embodiment, since the marker 23 can be confirmed by the images captured by the

image pickup units

32, 33, and 34, the operator does not need to visually check the marker 23 in the internal space 3b. Therefore, it is possible to grasp whether the tip portion 21a is correctly inserted into the groove 101d while preventing the generation of dust.

Further, according to the present embodiment, in order to make the marker 23 black, the metal-colored portion of the tip portion 21a where the marker 23 is not provided is conspicuous in the images captured by the

image pickup units

32, 33, and 34, and the marker 23 is conspicuous. Can be easily confirmed. Further, since the marker 23 is blackened, it is possible to prevent flare from occurring in the images captured by the

image pickup units

32, 33, and 34.

Further, although the marker 23 has a square first marker 23a, a second marker 23b, and a third marker 23c, in the images captured by the

imaging units

32, 33, and 34, the first marker 23a, the second marker 23b, and the second marker 23b are present. The 3 marker 23c becomes rectangular. For example, as the distance from the image pickup unit 32 increases, the lengths of the first marker 23a, the second marker 23b, and the third marker 23c of the marker 23 in the captured image become longer in the depth direction. Then, the approximate position of the imaged marker 23 can be grasped from the lengths of the first marker 23a, the second marker 23b, and the third marker 23c in the depth direction in the image.

The marker provided on the pellicle gripping member 21 is not limited to the marker 23, and any of the markers 23A to 23E may be provided on the pellicle gripping member 21. When the pellicle gripping member 21 provided closest to the

image pickup units

32, 33, 34 is imaged, the angle at which the

image pickup units

32, 33, 34 look down on the pellicle gripping member 21 is approximately 45 degrees. When the marker 23B as shown in FIG. 12 is used, even if a part of the marker 23B is obstructed by the reflector 24b, the first marker 23a, the second marker 23b, and the third marker 23c are captured by the

image pickup units

32 and 33. , 34 can be reliably imaged.

Although the embodiment of the present invention has been described in detail with reference to the drawings, the specific configuration is not limited to this embodiment and includes design changes and the like within a range not deviating from the gist of the present invention. .. Those skilled in the art can appropriately change, add, convert, and the like each element of the embodiment.

Further, in the present invention, "abbreviation" is a concept that includes not only the case of being exactly the same but also an error or deformation to the extent that the identity is not lost. For example, substantially parallel is not limited to the case of strictly parallel, and is a concept including an error of, for example, several degrees. Further, for example, in the case of simply expressing parallel, orthogonal, etc., not only the case of strictly parallel, orthogonal, etc., but also the case of substantially parallel, substantially orthogonal, etc. is included. Further, in the present invention, the "neighborhood" means to include a region of a certain range (which can be arbitrarily determined) near the reference position. For example, in the case of the vicinity of A, it is a concept indicating that it is a region in a certain range near A and may or may not include A.

1, 2: Pellicle gripping device 3: Pellicle sticking device 3a: Opening 3b: Internal space 10: Frame 11, 12: Vertical frame portion 13, 14: Upper frame portion 15: Frame 15a: Lower end portion 15b: Upper end portion 20 : Pellicle gripping portion 21: Pellicle gripping member 21a: Tip portion 21b: Bending portion 21c: Holding portion 21d:

Tip surface

21e, 21f: Surface 21g: Boundary line 21h: Center line 22: Drive member 22a: Rod 22b:

Actuator

23, 23A, 23B, 23C, 23D, 23E:

Markers

23a, 23d:

First marker

23b, 23e:

Second marker

23c, 23f: Third marker 23o, 23p, 23q: Scale line 24: Measuring unit 24a: Ultrasonic sensor 24b : Reflector 24c: Tip 31: Measuring

unit

32, 33, 34: Imaging unit 40: Stage 100: Pellicle 101: Pellicle frame 101a: Top surface 101b: Bottom surface 101c: Side surface 101d: Groove 101e: Hollow part 102: Pellicle film 103 : Adhesive member 110: Conveyor device

Claims

A pellicle having a substantially hollow cylindrical pellicle frame having a groove formed on a side surface thereof, and a pellicle film provided on a first surface substantially orthogonal to the side surface of the pellicle frame so as to cover the hollow portion of the pellicle frame. It is a pellicle gripping device that grips
A frame body that is a frame-shaped member in which a plurality of rod-shaped members are combined into a substantially rectangular shape,
A plurality of pellicle gripping members provided on the frame body,
The pellicle is a drive unit provided for each pellicle gripping member, and is between a first position where the pellicle gripping member is inserted into the groove and a second position where the pellicle gripping member is not inserted into the groove. A drive unit that moves the grip member in the first direction,
Equipped with
The pellicle gripping member has a plate-shaped or rod-shaped tip portion that is partially inserted into the groove when the pellicle gripping member is in the first position.
A pellicle frame gripping device, characterized in that the tip portion is provided with a marker indicating the position of the tip portion in the first direction.
The tip is made of metal
The pellicle frame gripping device according to claim 1, wherein the marker is provided on the tip portion by providing a coating layer on the surface of the tip portion.
The pellicle frame is an aluminum alloy that has been treated with black alumite.
The pellicle frame gripping device according to claim 2, wherein the coating layer is black.
The tip is made of metal
The pellicle frame gripping device according to claim 1, wherein the marker is provided on the tip portion by scraping a part of the surface of the tip portion to form a concave portion.
The pellicle frame is an aluminum alloy that has been treated with black alumite.
The pellicle frame gripping device according to claim 4, wherein the marker is formed by coloring the inside of the recess in black.
The tip portion is a tip surface that is inserted into the groove when the pellicle gripping member is in the first position, and has a tip surface extending in a second direction substantially orthogonal to the first direction. death,
The pellicle frame gripping device according to any one of claims 1 to 5, wherein the marker indicates a distance from the tip surface.
The marker is sandwiched between the tip surface and a boundary line which is a virtual line substantially along the second direction and is arranged at a predetermined distance in the first direction from the tip surface. The pellicle frame gripping device according to claim 6, wherein the pellicle frame gripping device is not provided in the tip region.
The tip is plate-shaped and has a plate shape.
The marker is provided on the widest surface of the tip portion, and the marker is provided on the widest surface of the tip portion.
The marker has a first marker, a second marker, and a third marker arranged along the boundary line.
The pellicle frame gripping device according to claim 7, wherein the first marker, the second marker, and the third marker have different lengths in the first direction.
The marker has two each of the first marker, the second marker, and the third marker.
The pellicle frame gripping according to claim 8, wherein the first marker, the second marker, and the third marker are provided on both sides of a center line along the longitudinal direction of the pellicle gripping member, respectively. Device.
The pellicle frame according to any one of claims 1 to 9, wherein the marker is provided at a position that can be visually recognized from above or diagonally above when the frame is extended in the horizontal direction. Gripping device.
It is provided with an imaging unit that captures the marker.
The pellicle frame gripping device according to claim 10, wherein the imaging unit is provided at a position higher than the frame body when the frame body is extended in the horizontal direction.
The frame has a rod-shaped first vertical frame and a second vertical frame that are held substantially parallel to each other at intervals.
The pellicle gripping member is provided in each of the first vertical frame and the second vertical frame.
The image pickup unit is provided adjacent to the first vertical frame and the second vertical frame, respectively.
The pellicle according to claim 11, wherein the image pickup unit is provided outside the region sandwiched between the first vertical frame and the second vertical frame when viewed from the upper side in the vertical direction. Frame gripping device.