TW202218964A - First-in and first-out transportation equipment and methods of use thereof - Google Patents

Abstract

A first-in and first-out transportation equipment and methods of use thereof for a plurality of substrates are provided. The first-in and first-out transportation equipment has a clamping-stacking device, a robotic arm and a pick-up device. The clamping-stacking device transfers each substrate to each clamp, and drives each clamp to fix each substrate to form a substrate-clamp assembly, then makes the substrate-clamp assemblies along the predetermined direction from 1 to N sequentially stacked on a first movable carrier. The robotic arm transfers the substrate-clamp assemblies to the pick-up device. The pick-up device transfers the substrate-clamp assemblies along the predetermined direction from 1 to N sequentially to a second movable carrier. A substrate fetching mechanism arranged corresponding to the second movable carrier drives each clamp to release each substrate, and each substrate is transferred from each clamp to a substrate collection table.

Description

First-in first-out transportation equipment and method of use

The present invention relates to a transport device for circuit boards, and more particularly, to a first-in-first-out transport device and a method of using the same.

As the demand for various printed circuit boards expands, manufacturers must also increase production to meet the demand. Therefore, in recent years, many factories have successively introduced automated equipment for production to reduce the burden of manpower, and in a relatively short time. A large amount of output can be obtained within the machine, and because the machine will not tire, it can reduce many defective rates compared to manual production.

However, the printed circuit board needs to go through the drying process of the baking oven in the production process. Therefore, if the automatic drying process is to be introduced, the printed circuit board must be stacked in batches to improve the drying efficiency; but how to control the batch stacking process? The production time of each circuit board is the same, so that the finished product of each circuit board is the same, which is the key point to be improved.

In view of this, the inventor of the present invention has devoted himself to the research and application of the theory in view of the above-mentioned prior art, and tried his best to solve the above-mentioned problems, which has become the goal of the present inventor's development.

The present invention provides a first-in-first-out transportation equipment and a method for using the same, which utilizes a plurality of substrates to perform each process in sequence from 1 to N along a predetermined direction, so as to facilitate subsequent tracking of the relationship between product problems and substrate process conditions .

In an embodiment of the present invention, the present invention provides a first-in, first-out transportation device for a plurality of substrates. The first-in, first-out transportation device includes: a clamping and stacking device, including: a plurality of clamps; a clamp conveying table, sequentially The plurality of fixtures are transferred; a substrate feeding table transfers the plurality of substrates in sequence; a first transfer mechanism is arranged between the fixture transfer table and the substrate feeding table, and the first transfer mechanism includes a first moving a carrier; and an assembling mechanism disposed corresponding to the first moving carrier, the assembling mechanism is used to first move each of the fixtures out of the fixture conveying table, and then move each of the substrates from the substrate feeding table to each On the jig, each of the jigs is driven to clamp each of the substrates to form a substrate jig assembly, and then a plurality of the substrate jig assemblies are sequentially stacked and arranged in the first movement along a predetermined direction from 1 to N. a mechanical arm; and a reclaiming device, including: a placing mechanism, the mechanical arm is used to move the plurality of substrate clamp assemblies arranged in sequence from 1 to N along the predetermined direction to the place Placement mechanism; a second transfer mechanism, including a second movable support set corresponding to the placement mechanism, and the configuration position of the second movable support relative to the placement mechanism is the same as that of the first movable support. In the configuration position of the assembling mechanism, the placing mechanism is used for sequentially transferring a plurality of the substrate clamp assemblies along the predetermined direction from 1 to N to the second moving support; a substrate collecting table; and a substrate taking The mechanism is disposed corresponding to the second moving support frame, and the substrate taking mechanism is used to drive each of the clamps to release each of the substrates, and then transfer each of the substrates from each of the clamps to the substrate collection table.

In an embodiment of the present invention, the present invention provides a method for using a first-in, first-out transportation device, the steps of which include: a) providing a clamping and stacking device, the clamping and stacking device comprising a plurality of clamps and a clamp conveying table, The fixture conveying table transfers the plurality of fixtures in sequence; b) provides a plurality of substrates, the clamping stacking device further includes a substrate feeding table, and the substrate feeding table sequentially transfers the plurality of substrates; c) the clamping stacking device It also includes a first transfer mechanism and an assembly mechanism. The first transfer mechanism includes a first moving support frame. The assembly mechanism first moves each of the clamps out of the clamp conveying table, and then moves each of the substrates by The substrate feeding table is transferred to each of the clamps, and drives each of the clamps to be clamped to each of the substrates to form a substrate clamp assembly, and then a plurality of the substrate clamp assemblies are arranged in sequence from 1 to N along a predetermined direction Arranged in layers on the first moving support; d) provide a robotic arm and a reclaiming device, the reclaiming device includes a placing mechanism, and the robotic arm will be sequentially stacked and arranged from 1 to N along the predetermined direction The plurality of the substrate clamp assemblies are transferred to the placing mechanism; e) the reclaiming device further includes a second transfer mechanism, the second transfer mechanism includes a second moving carrier, the second moving carrier is relative to the The disposition position of the placing mechanism is the same as the disposition position of the first moving support relative to the assembling mechanism, and the placing mechanism sequentially transfers the plurality of substrate clamp assemblies along the predetermined direction from 1 to N to the second moving the rack; and f) the reclaiming device further includes a substrate collecting table and a substrate taking mechanism, the substrate taking mechanism drives each of the clamps to release each of the substrates, and then each of the substrates is removed from each of the substrates. a transfer of the jig to the substrate collection table.

Based on the above, the plurality of substrates and the plurality of fixtures are first assembled into a plurality of substrate fixture assemblies arranged in sequence from 1 to N along the predetermined direction by using the clamping and stacking device, and then the robotic arm transports the substrates through the fixtures of the substrate fixture assembly and enters the baking process. Furnace and other process stations, and finally, through the reclaiming device, the multiple substrate fixture components are separated into multiple substrates and multiple fixtures in sequence from 1 to N along the predetermined direction, so that the production time of the stacked substrates is the same and the order of entry and exit is different. Change, so that the finished products of each substrate maintain the same order and enter the subsequent process processing.

Based on the above, each clamp includes a push-up alignment structure, and any two adjacent substrate clamp assemblies are separated by the push-up alignment structure to prevent the stacking of the clamps from being skewed or causing the substrate to be crushed by the clamps above.

The detailed description and technical content of the present invention will be described below with the accompanying drawings, but the accompanying drawings are only used for illustration purposes and are not intended to limit the present invention.

Please refer to FIG. 1 to FIG. 34 , the present invention provides a first-in-first-out transportation device and a method of using the same. The first-in-first-out transportation device mainly includes a gripping and stacking device 100 , a mechanical arm 200 and a reclaiming device 300, and FIFO transport equipment is used for multiple substrates A.

As shown in FIG. 1 , it is the steps of the method of using the FIFO transportation equipment of the present invention. First, as shown in FIG. 2 , the robotic arm 200 of the FIFO transport equipment of the present invention moves among the clamping stacking device 100 , the plurality of baking ovens B and the reclaiming device 300 .

In addition, as shown in FIG. 3 to FIG. 8 , the clamp 10 is used for clamping and fixing a substrate A. The clamp 10 includes a carrier plate 11 , a plurality of clamping structures 12 and a top-aligning structure 13 , and the plurality of clamping structures 12 are installed on the The carrier plate 11 is also used for clamping the substrate A, and the abutting alignment structure 13 is connected to the carrier plate 11 and formed on the outer side of the substrate A. As shown in FIG.

Further description is as follows, a plurality of limiting members 14 are protruded on the carrier plate 11 , and the limiting members 14 are used to jointly limit the substrate A within the area surrounded by the limiting members 14 , and the substrate A is a printed circuit plate. Each clamping structure 12 includes a fixing piece 121 and a clamping elastic piece 122. The fixing piece 121 is connected with the carrier plate 11 so that each clamping structure 12 is fixed on the supporting plate 11. The clamping elastic piece 122 is provided with a clamping portion 1221. and a pressing portion 1222, the clamping portion 1221 is a strip and is located at the front end of the clamping elastic piece 122, and can clamp the substrate A together with the carrier plate 11 through its own elastic force when it is closed, and the pressing portion 1223 is located in the clamping portion 1223. When the pressing portion 1223 is pushed downward by an external force, the rear end of the elastic sheet 122 will drive the clamping portion 1221 to open so that the substrate A can be put in.

The abutting and aligning structure 13 includes a plurality of penetrating parts 131 and a plurality of receiving parts 132 , each receiving part 132 is corresponding to each penetrating part 131 , and each penetrating part 131 includes a pad body 1311 and a penetrating part 131 . A plug 1312 of the pad body 1311, each receiving part 132 includes a column body 1321 and a socket 1322 disposed in the column body 1321, please refer to FIG. 4 to FIG. 6, each column body 1321 corresponds to each pad respectively The bodies 1311 are attached to each other, and the pins 1312 correspond to the insertion holes 1322 respectively, so that the clamps 10 will not be too skewed or slipped after being stacked, and the clamps 10 can be separated to prevent the substrate A from being damaged by the upper The jig 10 is directly contacted to cause pressure loss.

After that, the steps of the method for using the FIFO transport equipment of the present invention are as follows. First, as shown in step a in FIG. 1 , FIG. 2 , and FIGS. 9 to 11 , a clamping and stacking device 100 is provided. The clamping and stacking device 100 includes the above-mentioned plurality of clamps 10 and a clamp conveying table 20 . The transport table 20 sequentially transports the plurality of jigs 10 .

Among them, the FIFO transport equipment in this embodiment is used for transporting a plurality of clamps 10 arranged in a horizontal stack, and the clamp conveying table 20 is a lifting platform that can be lifted up and down and is used for stacking the plurality of clamps 10 .

Second, as shown in step b of FIG. 1 , FIG. 2 , and FIGS. 9 to 11 , a plurality of substrates A are provided, and the clamping stacking device 100 further includes a substrate feeding table 30 , and the substrate feeding table 30 sequentially transfers the plurality of substrates A .

Third, as shown in step c in FIG. 1 , FIG. 2 , and FIGS. 12 to 18 , the clamping stacking device 100 further includes a first transfer mechanism 40 and an assembly mechanism 50 , and the first transfer mechanism 40 includes a The first moving support frame 41, the assembly mechanism 50 first moves each fixture 10 out of the fixture conveying table 20, then transfers each substrate A from the substrate feeding table 30 to each fixture 10, and drives each fixture 10 to be clamped on each fixture 10. A substrate A constitutes a substrate holder assembly 400, and then a plurality of substrate holder assemblies 400 are sequentially stacked and arranged on the first moving support 41 along a predetermined direction d from 1 to N, and any two adjacent substrate holder assemblies The spaces 400 are separated by the abutting alignment structure 13 .

The detailed description is as follows. The fixture conveying table 20 and the substrate feeding table 30 are respectively disposed on the left and right sides of the first moving rack 41 . The first moving rack 41 includes a stacking rack 411 that can be lifted up and down and used to stack multiple substrate fixture assemblies. 400.

In addition, the assembling mechanism 50 includes a fixture transferring structure 51 , a substrate fixture assembling structure 52 and a driving structure 53 . The fixture transferring structure 51 and the substrate fixture assembling structure 52 are disposed on the driving structure 53 and simultaneously move laterally through the driving structure 53 . .

Furthermore, as shown in FIG. 12 , the clamp transfer structure 51 transfers each clamp 10 from the clamp conveying table 20 to the first moving support frame 41 , and the clamp transfer structure 51 includes a plurality of clamping jaws 511 , and the plurality of clamping jaws 511 are used for common clamping. Each substrate A is fixed for transfer.

Also, as shown in FIGS. 13 to 15 , the substrate holder assembly structure 52 transfers each substrate A from the substrate feeding table 30 to each holder 10 , and then drives each holder 10 to be clamped to each substrate A to form a substrate Clamp assembly 400 .

The substrate clamp assembly structure 52 includes a plurality of suction nozzles 521 and a plurality of collapsible push rods 522. Each suction nozzle 521 is used for jointly sucking the substrate A, and each collapsible push rod 522 is used for jointly pressing each clamping elastic piece The pressing parts 1222 of the 122 open the clamping structures 12 to place the substrate A.

The operation process of the clamping stacking device 100 of this embodiment is as follows. As shown in FIG. 11 , the clamp transfer structure 51 first clamps the top clamp 10 on the clamp conveying table 20 through the drive structure 53 and transfers it to the first transfer mechanism 40 . At the same time, the substrate clamp assembling structure 52 is also moved to the top of the substrate feeding table 30 through the driving structure 53, and the clamp conveying table 20 will move upward by a distance of the clamp 10 for the next clamping; as shown in FIG. 12, then the clamp is transferred The structure 51 places the fixture 10 on the first moving support frame 41 downward, and at the same time, the substrate fixture assembly structure 52 adsorbs the substrate A on the substrate feeding table 30 downward; as shown in FIG. 13 , the fixture transfer structure 51 and the substrate fixture assembly structure 52 At the same time, it rises upward, and moves to the top of the clamp conveying table 20 and the first moving support frame 41 through the driving structure 53 .

As shown in FIG. 14 , the clamp transfer structure 51 is then downwardly clamped for the second time to clamp the clamp 10 on the top of the clamp conveying table 20 , and the substrate clamp assembly structure 52 downwardly places the adsorbed substrate A on the first clamp 10 . On the fixture 10 on the moving support frame 41, when the substrate fixture assembly structure 52 moves downward, each collapsible push rod 522 will firstly push down the pressing portion 1222 of each clamping elastic piece 122, so that each clamping portion 1221 is opened to insert the substrate A; as shown in FIG. 15 , the substrate clamp assembly structure 52 then places the substrate A on the clamp 10 . At this time, each collapsible push rod 522 will collapse upward and continue to push each pressing portion 1222 .

As shown in FIG. 16 , the clamp transfer structure 51 clamps the clamped clamp 10 upward again, and the substrate clamp assembly structure 52 is upwardly separated from the clamp 10 on the first moving support frame 41 ; as shown in FIG. 17 , at this time, the clamp conveying table 20 will The distance of one clamp 10 is raised upward for the next clamping, and the first moving support 41 is lowered down by one clamp 10 for the next placement; as shown in FIG. 18 , this process can be repeated in sequence by repeating the cycle The substrates A are put into the fixtures 10 respectively, and the assembled substrate fixture assemblies 400 are stacked on the first transfer mechanism 40 .

Fourth, as shown in step d of FIG. 1 , FIGS. 20 to 21 and FIGS. 22 to 24 , a robotic arm 200 and a reclaiming device 300 are provided. The reclaiming device 300 includes a placing mechanism 60 , and the robotic arm 200 The plurality of substrate holder assemblies 400 stacked in sequence from 1 to N along the predetermined direction d are transferred to the placement mechanism 60 .

Wherein, the robotic arm 200 firstly transfers the plurality of substrate clamp assemblies 400 stacked in sequence from 1 to N along the predetermined direction d from the first moving rack 41 to the baking oven B for baking, and then moves the substrate clamp assemblies 400 along the predetermined direction d to the baking oven B for baking. d The plurality of substrate clamp assemblies 400 stacked in sequence from 1 to N are transferred from the baking oven B to the placing mechanism 60 .

Fifth, as shown in step e of FIG. 1 , FIGS. 20 to 21 and FIGS. 25 to 26 , the reclaiming device 300 further includes a second transfer mechanism 70 , and the second transfer mechanism 70 includes a second moving bearing The arrangement position of the rack 71 and the second moving rack 71 relative to the placement mechanism 60 is the same as the arrangement position of the first moving rack 41 relative to the assembly mechanism 50, and the placement mechanism 60 moves the plurality of substrate clamp assemblies 400 along the predetermined direction d. They are sequentially transferred to the second moving carrier 71 from 1 to N.

Wherein, the placing mechanism 60 of this embodiment is disposed above the second moving support frame 71 , and the placing mechanism 60 includes a first pair of claw hooks 61 and a second pair of claw hooks 62 , the first pair of claw hooks 61 and the second pair of claw hooks 62 . The counter-claw hooks 62 clamp the plurality of substrate clamp assemblies 400 in turn.

In addition, the arrangement position of the second movable bracket 71 relative to the placing mechanism 60 is the same as the arrangement position of the first movable bracket 41 relative to the assembling mechanism 50 , that is, when the first movable bracket 41 is arranged below the assembling mechanism 50 , The second moving rack 71 is also arranged below the placing mechanism 60, so that the plurality of substrate clamp assemblies 400 can be transferred from the first moving rack 41 to the second moving rack in a state in which the plurality of substrate clamp assemblies 400 are arranged in layers from 1 to N along the predetermined direction d. 71.

Further description is as follows, as shown in FIGS. 24 to 34 , the first pair of claw hooks 61 clamps the first substrate clamp assembly 400 in the sequence, the second pair of claw hooks 62 clamps the second substrate clamp assembly 400 in the sequence, and the first pair of claw hooks 62 clamps the second substrate clamp assembly 400 in the sequence. The claw hooks 61 and the first substrate clamp assembly 400 in the release sequence are transferred to the second moving support 71 , and then the first pair of claw hooks 61 clamps the third substrate clamp assembly 400 in the sequence, and the second pair of claw hooks 62 are released in the sequence. The second substrate holder assembly 400 is transferred to the second moving rack 71 , so that each substrate holder assembly 400 can be sequentially transferred to the second moving rack 71 along the predetermined direction d from 1 to N.

Sixth, as shown in step f of FIG. 1 , FIGS. 20 to 21 and FIGS. 27 to 34 , the reclaiming device 300 further includes a substrate collecting table 80 and a substrate taking mechanism 90 , and the substrate taking mechanism 90 drives each The jig 10 is released from each substrate A, and then each substrate A is transferred from each jig 10 to the substrate collecting table 80 .

Wherein, the second moving support frame 71 and the substrate collecting table 80 in this embodiment are juxtaposed to the left and right of each other.

The detailed description is as follows. The substrate taking mechanism 90 includes a substrate taking structure 91 and a moving structure 92 that drives the substrate taking structure 91 to move between the second moving support frame 71 and the substrate collecting table 80. The substrate taking structure 91 is used to drive each A jig 10 is released from each substrate A, and then each substrate A is transferred from each jig 10 to the substrate collecting table 80 .

In addition, the substrate-receiving structure 91 includes a plurality of suction nozzles 911 and a plurality of collapsible push rods 912 , each suction nozzle 911 is used to jointly suck the substrate A, and each of the collapsible push rods 912 is used to jointly push each clamping elastic piece 122 Each of the pressing portions 1222 of the 100 opens each of the clamping structures 12 so as to place the substrate A.

Thereby, the FIFO transport equipment of the present invention utilizes the clamping stacking device 100 to first assemble the plurality of substrates A and the plurality of fixtures 10 into a plurality of substrate fixture assemblies 400 that are sequentially stacked from 1 to N along the predetermined direction d , the robot arm 200 transports the substrate A through the fixture 10 of the substrate fixture assembly 400 and enters the baking oven B and other process stations, and finally separates the plurality of substrate fixture components 400 along the predetermined direction d from 1 to N through the reclaiming device 300 in sequence. By forming a plurality of substrates A and a plurality of fixtures 10, the production time of the stacked substrates A can be the same and the order of entry and exit is unchanged, so that the finished products of each substrate A maintain the same order and enter the subsequent process processing, thereby facilitating the follow-up tracking of product problems and problems. substrate process conditions.

In addition, when the clamps 10 are stacked and arranged, they are separated by the abutting alignment structure 13 , so as to avoid the stacking of the clamps 10 being skewed or causing the substrate A to be damaged by the clamps 10 above.

Furthermore, each clamping structure 12 can clamp the substrate A on the carrier plate 11 , and the substrate A can be restrained in each limiting member 14 through each limiting member 14 to avoid sliding, and the plug 1312 on the connecting member 131 And the socket 1322 on the receiving part 131 can prevent the clamp 10 from being too skewed or slipping off when it is stacked.

To sum up, the FIFO transport equipment and its using method of the present invention have never been seen in similar products or used publicly, and have industrial applicability, novelty and progress, and fully meet the requirements for patent application, and are proposed in accordance with the Patent Law Application, please check carefully and grant the patent in this case to protect the rights of the inventor.

100: Clamp stacking device 200: Robotic Arm 300: Reclaimer 400: Substrate Fixture Assembly 10: Fixtures 11: Carrier plate 12: Clamping structure 121: fixed piece 122: Clamping shrapnel 1221: Clamping part 1222: Pressing part 13: Abutting the alignment structure 131: Pass-through parts 1311: Pad body 1312: latch 132: Undertaking parts 1321: Cylinder 1322: jack 14: Limiter 20: Fixture conveying table 30: Substrate feeding table 40: The first transfer mechanism 41: The first mobile carrier 411: Stacking Rack 412: Hanger 4121: Card slot 50: Assembly mechanism 51: Fixture transfer structure 511: Gripper 52: Substrate fixture assembly structure 521: Nozzle 522: Collapsible putter 53: Drive structure 60: Placement mechanism 61: The first pair of claw hooks 62: Second pair of claw hooks 70: Second transfer mechanism 71: Second mobile carrier 80: Substrate collection table 90: Take the substrate mechanism 91: Take the substrate structure 911: Nozzle 912: Collapsible Push Rod 92: Moving Structures A: Substrate B: Oven d: predetermined direction a~f: steps

FIG. 1 is a flow chart of the steps of the method of using the FIFO transport equipment of the present invention.

FIG. 2 is a three-dimensional schematic diagram of the FIFO transport equipment of the present invention.

FIG. 3 is a three-dimensional schematic view of the fixture of the present invention.

FIG. 4 is another perspective view of the fixture of the present invention.

Figure 5 is a side sectional view of the fixture of the present invention.

FIG. 6 is a schematic perspective view of the clamps of the present invention before they are stacked.

Fig. 7 is a side sectional view of the clamps of the present invention when they are stacked.

FIG. 8 is a three-dimensional schematic view of the clamps of the present invention when they are stacked.

FIG. 9 is a three-dimensional schematic view of the clamping stacking device of the present invention.

FIG. 10 is another perspective view of the clamping stacking device of the present invention.

Figures 11 to 18 are diagrams (1) to (8) of the use states of the clamping stacking device of the present invention.

Figures 19 to 21 are diagrams (1) to (3) of the use states of the robotic arm of the present invention.

Fig. 22 is a perspective view of the reclaiming device of the present invention.

Fig. 23 is another perspective view of the reclaiming device of the present invention.

Figures 24 to 34 are diagrams (1) to (10) of the use states of the reclaiming device of the present invention.

100: Clamp stacking device

200: Robotic Arm

300: Reclaimer

B: Oven

Claims (10)

A first-in, first-out transportation device for a plurality of substrates, the first-in, first-out transportation device comprising: A clamping and stacking device, comprising: plural fixtures; A fixture conveying table, which transfers the plurality of fixtures in sequence; a substrate feeding table for sequentially transferring the plurality of substrates; a first transfer mechanism, disposed between the fixture conveying table and the substrate feeding table, the first transfer mechanism includes a first moving carrier; and An assembling mechanism is disposed corresponding to the first moving support, and the assembling mechanism is used to first move each of the fixtures out of the fixture conveying table, and then transfer each of the substrates from the substrate feeding table to each of the fixtures, and drive each of the clamps to be clamped on each of the substrates to form a substrate clamp assembly, and then make a plurality of the substrate clamp assemblies sequentially stacked and arranged on the first moving support frame from 1 to N along a predetermined direction; a robotic arm; and A reclaiming device, including: a placing mechanism, the robotic arm is used for transferring a plurality of the substrate clamp assemblies sequentially stacked from 1 to N along the predetermined direction to the placing mechanism; a second transfer mechanism, including a second moving support set corresponding to the placing mechanism, the disposition position of the second moving support relative to the placing mechanism is the same as that of the first moving support relative to the assembly the configuration position of the mechanism, the placing mechanism is used for sequentially transferring the plurality of substrate clamp assemblies to the second moving support along the predetermined direction from 1 to N; a substrate collection table; and A substrate taking mechanism is disposed corresponding to the second moving support frame, and the substrate taking mechanism is used to drive each of the clamps to release each of the substrates, and then transfer each of the substrates from each of the clamps to the substrate set Material table. The first-in, first-out transportation equipment as claimed in claim 1, wherein each of the clamps includes a push-up alignment structure, and any two adjacent substrate clamp assemblies are separated by the push-up alignment structure, and each The fixture further includes a carrier plate and a plurality of clamping structures mounted on the carrier plate, and each of the abutting alignment structures is connected to each of the carrier plates and formed on the outer side of each of the plurality of substrates. The first-in-first-out transportation equipment according to claim 2, wherein the clamp conveying table and the substrate feeding table are respectively arranged on the left and right sides of the first moving support frame, and the clamp conveying table is a supporting table that can be lifted up and down and used together In order to stack the plurality of clamps, the first moving support frame includes a stack of racks that can be lifted up and down, and is used for stacking the plurality of the substrate clamp assemblies. The FIFO transport device as claimed in claim 3, wherein the assembling mechanism comprises a clamp transfer structure and a substrate clamp assembly structure, and the clamp transfer structure transfers each clamp from the clamp conveying table to the first moving support The substrate clamp assembly structure transfers each of the substrates from the substrate feeding table to each of the clamps, and then drives each of the clamps to be clamped to each of the substrates to form the substrate clamp assembly. The FIFO transport device as claimed in claim 4, wherein each of the clamping structures includes a fixing piece and a clamping elastic piece, the fixing piece is connected with the carrying plate, and the clamping elastic piece can pass through its own elastic clip The base plate is fixed, the clamping elastic piece is provided with a clamping part and a pressing part, the clamping part is a strip block and is located at one end of the clamping elastic piece, the pressing part is located at the other end of the clamping elastic piece, the clamping part is located at the other end of the clamping elastic piece, the The clamp transfer structure includes a plurality of clamping jaws, and the plurality of clamping jaws are used to jointly clamp each of the substrates for transfer. The substrate clamp assembly structure includes a plurality of suction nozzles and a plurality of collapsible push rods, and each of the suction nozzles is used to jointly The substrate is adsorbed, and each of the collapsible push rods is used for jointly pressing each of the pressing portions of each of the clamping elastic pieces to open each of the clamping structures to place the substrate. The FIFO transport equipment as claimed in claim 5, wherein the assembling mechanism further comprises a driving structure, the clamp transfer structure and the substrate clamp assembling structure are disposed on the driving structure, and simultaneously perform lateral movement through the driving structure move. The FIFO transport device as claimed in claim 2, wherein the second moving rack and the substrate collecting table are juxtaposed left and right with each other, the second moving rack can be lifted up and down and used for stacking the plurality of fixtures. The first-in-first-out transportation equipment as claimed in claim 7, wherein the placing mechanism is disposed above the second moving support, the placing mechanism comprises a first pair of claw hooks and a second pair of claw hooks, the first pair of claw hooks The pair of claw hooks and the second pair of claw hooks alternately clamp a plurality of the substrate clamp assemblies and sequentially transfer the substrate clamp assemblies to the second moving support along the predetermined direction from 1 to N. The FIFO transport equipment as claimed in claim 8, wherein the substrate taking mechanism comprises a substrate taking structure and a moving structure that drives the substrate taking structure to move between the second moving support frame and the substrate collecting table, The substrate taking structure is used to drive each of the clamps to release from each of the substrates, and then transfer each of the substrates from each of the clamps to the substrate collection table. A method of using a first-in-first-out transportation equipment, the steps of which include: a) providing a clamping stacking device, the clamping stacking device includes a plurality of clamps and a clamp conveying table, and the clamp conveying table transfers the plurality of clamps in sequence; b) providing a plurality of substrates, the clamping stacking device further includes a substrate feeding table, and the substrate feeding table transfers the plurality of substrates in sequence; c) The clamping and stacking device further includes a first transfer mechanism and an assembly mechanism, the first transfer mechanism includes a first moving support frame, and the assembly mechanism first moves each of the clamps out of the clamp conveying table, Then each of the substrates is transferred from the substrate feeding table to each of the fixtures, and each of the fixtures is driven to be clamped to each of the substrates to form a substrate fixture assembly, and then a plurality of the substrate fixture components are arranged along a The predetermined directions are sequentially stacked and arranged on the first moving support frame from 1 to N; d) provide a robotic arm and a reclaiming device, the reclaiming device includes a placing mechanism, and the robotic arm transfers the plurality of substrate clamp assemblies sequentially stacked from 1 to N along the predetermined direction to the placing mechanism; e) The reclaiming device further includes a second transfer mechanism, the second transfer mechanism includes a second moving support, and the arrangement position of the second moving support relative to the placing mechanism is the same as that of the first moving the arrangement position of the carrier relative to the assembling mechanism, and the placing mechanism sequentially transfers the plurality of substrate clamp assemblies along the predetermined direction from 1 to N to the second moving carrier; and f) The reclaiming device further includes a substrate collecting table and a substrate taking mechanism, the substrate taking mechanism drives each of the clamps to release each of the substrates, and then transfers each of the substrates from each of the clamps to The substrate collection table.

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