TW202218821A - Corkscrew machine, arranged equipment and testing system - Google Patents

Corkscrew machine, arranged equipment and testing system Download PDF

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TW202218821A
TW202218821A TW109138816A TW109138816A TW202218821A TW 202218821 A TW202218821 A TW 202218821A TW 109138816 A TW109138816 A TW 109138816A TW 109138816 A TW109138816 A TW 109138816A TW 202218821 A TW202218821 A TW 202218821A
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clamping
material pipe
bodies
processing device
carrier
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TW109138816A
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TWI748733B (en
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陳泳任
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健鼎科技股份有限公司
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Abstract

The invention discloses a corkscrew machine, arranged equipment and a testing system. The corkscrew machine is used to pull the plug body of the material tube assembly from the material tube body of the material tube assembly. The corkscrew machine comprises a processing device, a carrier, and two holding mechanisms. The carrier is used to carry a plurality of material tube assemblies. The two holding mechanisms are arranged facing each other, and the carrier is located between the two holding mechanisms, and each holding mechanism comprises a moving device and a clamping device. When the plurality of material tube assemblies be carried by the carrier, the processing device can control the moving devices to push against at least one end of the plurality of material tube assemblies, so that the plurality of the end surfaces of the material tube components are flush with each other. The processing device can control the holding mechanism and the clamping device to holds at least one material tube assembly and pulls the plug bodies of each material tube assembly away from the material tube body.

Description

拔塞機台、整料設備及測試系統Plug-pulling machine, monolithic equipment and testing system

本發明涉及一種整料機台、整料設備及測試系統,特別是一種用來對多個用來承載晶片的料管進行整理的整料機台、包含該整料機台的整料設備及包含該整料設備的測試系統。The invention relates to a monolithic machine, monolithic equipment and a testing system, in particular to a monolithic machine used for arranging a plurality of material tubes used to carry wafers, a monolithic device comprising the monolithic machine and the Test system containing this monolithic device.

近十年來,隨著PCB及封裝IC相關產業的高速發展,單一個PCB上設置的封裝IC的數量,也隨之增加,因此,對於相關IC測試廠商而言,如何加速封裝IC的測試速度,成為了重要的課題之一。In the past ten years, with the rapid development of PCB and packaged IC related industries, the number of packaged ICs set on a single PCB has also increased. Therefore, for related IC test manufacturers, how to speed up the test speed of packaged ICs? become one of the important topics.

現有常見的各式封裝IC,在運送過程中,大多是被設置於中空料管中,中空料管的兩端則是設置有塞體,而封裝IC據以被限制於中空料管中。當相關機台欲對各中空料管中的多個封裝IC進行測試時,相關人員必須先將各個中空料管的至少一個塞體拔除,藉此,相關測試機台則能快速地取出位於中空料管中的多個封裝IC。利用人工的方式逐一將中空料管的塞體拔除的方式,不但費時,且使得測試成本高昂。In the process of transportation, most of the conventional packaged ICs are disposed in the hollow material tube, and the two ends of the hollow material pipe are provided with plugs, and the packaged IC is limited in the hollow material pipe accordingly. When the relevant machine wants to test multiple packaged ICs in each hollow material tube, the relevant personnel must first remove at least one plug of each hollow material pipe, so that the relevant testing machine can quickly take out the Multiple packaged ICs in a tube. The method of manually removing the plug bodies of the hollow material tubes one by one is not only time-consuming, but also leads to high testing costs.

本發明公開一種拔塞機台、整料設備及測試系統,主要用以改善現有技術中,以人工的方式,逐一將中空料管的塞體拔除的方式,需要耗費大量人力及時間所帶來的問題。The invention discloses a plug-pulling machine, monolithic equipment and a testing system, which are mainly used to improve the manual method of removing the plug bodies of the hollow material pipes one by one in the prior art, which requires a lot of manpower and time. The problem.

本發明的其中一實施例公開一種拔塞機台,其用以將一料管組件的一料管本體的至少一端所設置的一塞體拔離料管本體,拔塞機台包含:一處理裝置、一載台及兩個固持機構。載台用以承載多個料管組件;兩個固持機構彼此相面對地設置,而載台位於兩個固持機構之間,各個固持機構包含:一前後移動裝置及一夾持裝置。各前後移動裝置電性連接處理裝置。各夾持裝置與前後移動裝置連接,處理裝置能控制前後移動裝置,而使前後移動裝置帶動夾持裝置向前或向後移動;夾持裝置電性連接處理裝置,處理裝置能控制夾持裝置,而使夾持裝置夾持設置於載台的多個料管組件的一端。其中,載台設置有多個料管組件時,處理裝置能控制兩個前後移動裝置作動,以推抵設置於載台上的多個料管組件的至少一端,而使設置於載台上的多個料管組件的一端面相互齊平;處理裝置能於設置於載台上的多個料管組件的端面相互齊平時,控制至少一個固持機構作動,而使至少一個夾持裝置將設置於載台上的各個料管組件的至少一個塞體拔離料管本體。One of the embodiments of the present invention discloses a plugging machine, which is used for pulling a plug provided on at least one end of a material pipe body of a material pipe assembly away from the material pipe body. The plugging machine includes: a processing device, a stage and two holding mechanisms. The carrier is used to carry a plurality of material tube assemblies; the two holding mechanisms are arranged facing each other, and the carrier is located between the two holding mechanisms. Each holding mechanism includes: a forward and backward moving device and a clamping device. Each of the forward and backward moving devices is electrically connected to the processing device. Each clamping device is connected with the front and rear moving device, and the processing device can control the front and rear moving device, so that the front and rear moving device drives the clamping device to move forward or backward; the clamping device is electrically connected to the processing device, and the processing device can control the clamping device, And the clamping device clamps one end of the plurality of material tube assemblies arranged on the carrier. Wherein, when the carrier is provided with a plurality of material tube assemblies, the processing device can control the operation of the two forward and backward moving devices to push against at least one end of the plurality of material pipe assemblies arranged on the carrier, so that the One end face of the plurality of material pipe assemblies is flush with each other; the processing device can control at least one holding mechanism to act when the end faces of the plurality of material pipe assemblies arranged on the carrier are flush with each other, so that the at least one clamping device will be disposed on the platform. At least one plug of each material tube assembly on the carrier is pulled away from the material pipe body.

本發明的其中一實施例公開一種整料設備,其包含一拔塞機台及一整料機台,整料機台用以使多個料管組件彼此相互並排地設置,且使相互並排地設置的多個料管本體所分別具有的一凹槽朝向同一方向,拔塞機台用以將通過整料機台後而並排地設置的多個料管組件所分別包含的至少一個塞體拔離相對應的料管本體。拔塞機台用以將一料管組件的一料管本體的至少一端所設置的一塞體拔離料管本體,拔塞機台包含:一處理裝置、一載台及兩個固持機構。載台用以承載多個料管組件;兩個固持機構彼此相面對地設置,而載台位於兩個固持機構之間,各個固持機構包含:一前後移動裝置及一夾持裝置。各前後移動裝置電性連接處理裝置。各夾持裝置與前後移動裝置連接,處理裝置能控制前後移動裝置,而使前後移動裝置帶動夾持裝置向前或向後移動;夾持裝置電性連接處理裝置,處理裝置能控制夾持裝置,而使夾持裝置夾持設置於載台的多個料管組件的一端。其中,載台設置有多個料管組件時,處理裝置能控制兩個前後移動裝置作動,以推抵設置於載台上的多個料管組件的至少一端,而使設置於載台上的多個料管組件的一端面相互齊平;處理裝置能於設置於載台上的多個料管組件的端面相互齊平時,控制至少一個固持機構作動,而使至少一個夾持裝置將設置於載台上的各個料管組件的至少一個塞體拔離料管本體。One embodiment of the present invention discloses a monolithic equipment, which includes a plugging machine and a monolithic machine, and the monolithic machine is used to arrange a plurality of material tube assemblies side by side with each other, and make the A groove of the plurality of material pipe bodies arranged respectively faces the same direction, and the plug-pulling machine is used to pull out at least one plug body respectively included in the plurality of material pipe assemblies arranged side by side after passing through the whole material machine table. away from the corresponding barrel body. The plugging machine table is used to pull out a plug body provided at at least one end of a material pipe body of a material pipe assembly from the material pipe body. The carrier is used to carry a plurality of material tube assemblies; the two holding mechanisms are arranged facing each other, and the carrier is located between the two holding mechanisms. Each holding mechanism includes: a forward and backward moving device and a clamping device. Each of the forward and backward moving devices is electrically connected to the processing device. Each clamping device is connected with the front and rear moving device, and the processing device can control the front and rear moving device, so that the front and rear moving device drives the clamping device to move forward or backward; the clamping device is electrically connected to the processing device, and the processing device can control the clamping device, And the clamping device clamps one end of the plurality of material tube assemblies arranged on the carrier. Wherein, when the carrier is provided with a plurality of material tube assemblies, the processing device can control the operation of the two forward and backward moving devices to push against at least one end of the plurality of material pipe assemblies arranged on the carrier, so that the One end face of the plurality of material pipe assemblies is flush with each other; the processing device can control at least one holding mechanism to act when the end faces of the plurality of material pipe assemblies arranged on the carrier are flush with each other, so that the at least one clamping device will be disposed on the platform. At least one plug of each material tube assembly on the carrier is pulled away from the material pipe body.

本發明的其中一實施例公開一種測試系統,其包含:一整料設備、一交換設備及一測試設備。整料設備包含一拔塞機台及一整料機台,整料機台用以使多個料管組件彼此相互並排地設置,且使相互並排地設置的多個料管本體所分別具有的一凹槽朝向同一方向,拔塞機台用以將通過整料機台後而並排地設置的多個料管組件所分別包含的至少一個塞體拔離相對應的料管本體。交換設備鄰近於整料設備設置,交換設備用以將通過多個拔塞機台的各個料管本體內所容置的多個晶片移載至一金屬料管本體中。測試設備鄰近於交換設備設置,測試設備用以對設置於各個金屬料管本體中的多個晶片進行一測試。拔塞機台用以將一料管組件的一料管本體的至少一端所設置的一塞體拔離料管本體,拔塞機台包含:一處理裝置、一載台及兩個固持機構。載台用以承載多個料管組件;兩個固持機構彼此相面對地設置,而載台位於兩個固持機構之間,各個固持機構包含:一前後移動裝置及一夾持裝置。各前後移動裝置電性連接處理裝置。各夾持裝置與前後移動裝置連接,處理裝置能控制前後移動裝置,而使前後移動裝置帶動夾持裝置向前或向後移動;夾持裝置電性連接處理裝置,處理裝置能控制夾持裝置,而使夾持裝置夾持設置於載台的多個料管組件的一端。其中,載台設置有多個料管組件時,處理裝置能控制兩個前後移動裝置作動,以推抵設置於載台上的多個料管組件的至少一端,而使設置於載台上的多個料管組件的一端面相互齊平;處理裝置能於設置於載台上的多個料管組件的端面相互齊平時,控制至少一個固持機構作動,而使至少一個夾持裝置將設置於載台上的各個料管組件的至少一個塞體拔離料管本體。One of the embodiments of the present invention discloses a testing system, which includes: a monolithic equipment, an exchange equipment and a testing equipment. The monolithic equipment includes a plug-pulling machine and a monolithic machine. The monolithic machine is used to arrange a plurality of material pipe assemblies side by side with each other, and to make the plurality of material pipe bodies arranged side by side have the A groove faces the same direction, and the plug-pulling machine is used to pull out at least one plug body respectively included in a plurality of material pipe assemblies arranged side by side after passing through the whole material machine table from the corresponding material pipe body. The exchange device is disposed adjacent to the monolithic device, and the exchange device is used for transferring a plurality of wafers accommodated in the respective feed tube bodies of the plurality of plugging machines into a metal feed tube body. The test equipment is disposed adjacent to the exchange equipment, and the test equipment is used to perform a test on a plurality of wafers disposed in each metal tube body. The plugging machine table is used to pull out a plug body provided at at least one end of a material pipe body of a material pipe assembly from the material pipe body. The carrier is used to carry a plurality of material tube assemblies; the two holding mechanisms are arranged facing each other, and the carrier is located between the two holding mechanisms. Each holding mechanism includes: a forward and backward moving device and a clamping device. Each of the forward and backward moving devices is electrically connected to the processing device. Each clamping device is connected with the front and rear moving device, and the processing device can control the front and rear moving device, so that the front and rear moving device drives the clamping device to move forward or backward; the clamping device is electrically connected to the processing device, and the processing device can control the clamping device, And the clamping device clamps one end of the plurality of material tube assemblies arranged on the carrier. Wherein, when the carrier is provided with a plurality of material tube assemblies, the processing device can control the operation of the two forward and backward moving devices to push against at least one end of the plurality of material pipe assemblies arranged on the carrier, so that the One end face of the plurality of material pipe assemblies is flush with each other; the processing device can control at least one holding mechanism to act when the end faces of the plurality of material pipe assemblies arranged on the carrier are flush with each other, so that the at least one clamping device will be disposed on the platform. At least one plug of each material tube assembly on the carrier is pulled away from the material pipe body.

綜上所述,本發明的拔塞機台、整料設備及測試系統,可以快速地使多個料管組件的塞體與料管本體相互分離,而可節省大量的人力及時間。To sum up, the plug-pulling machine, the monolithic equipment and the testing system of the present invention can quickly separate the plug bodies and the feed-tube bodies of multiple feed-tube assemblies from each other, thereby saving a lot of manpower and time.

為能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與附圖,但是此等說明與附圖僅用來說明本發明,而非對本發明的保護範圍作任何的限制。In order to further understand the features and technical content of the present invention, please refer to the following detailed description and accompanying drawings of the present invention, but these descriptions and drawings are only used to illustrate the present invention, rather than make any claims to the protection scope of the present invention. limit.

於以下說明中,如有指出請參閱特定圖式或是如特定圖式所述,其僅是用以強調於後續說明中,所述及的相關內容大部份出現於該特定圖式中,但不限制該後續說明中僅可參考所述特定圖式。In the following description, if it is indicated to refer to a specific figure or as described in a specific figure, it is only used to be emphasized in the subsequent description, and most of the related content mentioned appears in the specific figure, However, it is not limited that only the specific drawings may be referred to in this subsequent description.

請一併參閱圖1及圖2,圖1顯示為本發明的拔塞機台S11的示意圖,圖2顯示為料管組件的分解示意圖。拔塞機台S11用以將一料管組件A的一料管本體A1的至少一端所設置的一塞體A2拔離料管本體A1。拔塞機台S11包含:一載台1、一處理裝置2及兩個固持機構。兩個固持機構分別定義為一第一固持機構3及一第二固持機構4。載台1設置於第一固持機構3及第二固持機構4之間,載台1用以承載多個料管組件A。處理裝置2例如可以是包含各式電腦、伺服器、微處理器等,於此不加以限制。處理裝置2電性連接第一固持機構3及第二固持機構4,處理裝置2能控制第一固持機構3及第二固持機構4作動。Please refer to FIG. 1 and FIG. 2 together. FIG. 1 is a schematic diagram of the plugging machine S11 of the present invention, and FIG. 2 is an exploded schematic diagram of the material tube assembly. The plugging machine S11 is used for pulling out a plug body A2 provided on at least one end of a material pipe body A1 of a material pipe assembly A from the material pipe body A1. The plugging machine S11 includes: a carrier 1 , a processing device 2 and two holding mechanisms. The two holding mechanisms are respectively defined as a first holding mechanism 3 and a second holding mechanism 4 . The carrier 1 is disposed between the first holding mechanism 3 and the second holding mechanism 4 , and the carrier 1 is used for carrying a plurality of material tube assemblies A. As shown in FIG. The processing device 2 may include, for example, various computers, servers, microprocessors, etc., which are not limited thereto. The processing device 2 is electrically connected to the first holding mechanism 3 and the second holding mechanism 4 , and the processing device 2 can control the operation of the first holding mechanism 3 and the second holding mechanism 4 .

如圖2所示,各個料管組件A包含料管本體A1及兩個塞體A2,料管本體A1為中空結構,且料管本體A1的一側內凹形成有所述凹槽A3,料管本體A1內用以設置多個晶片C,料管本體A1的兩端形成有兩個開口A11,兩個塞體A2卡合於兩個開口A11。各個晶片C具有一晶片本體C1及多個接腳C2。料管本體A1內區隔有一晶片容置區A12及兩個接腳容置區A13,晶片容置區A12的兩端連接兩個接腳容置區A13,晶片容置區A12用以容置各個晶片C的晶片本體C1,各個接腳容置區A13用以容置各個晶片C的部分接腳C2。如圖3所示,各個塞體A2固定於料管本體A1的一端時,塞體A2的一部分是凸出於料管本體A1的一側。As shown in FIG. 2, each feed tube assembly A includes a feed tube body A1 and two plug bodies A2. The feed tube body A1 is a hollow structure, and the groove A3 is concavely formed on one side of the feed tube body A1. The tube body A1 is used for arranging a plurality of wafers C. Two openings A11 are formed at both ends of the tube body A1, and the two plugs A2 are engaged with the two openings A11. Each chip C has a chip body C1 and a plurality of pins C2. A chip accommodating area A12 and two pin accommodating areas A13 are partitioned in the material tube body A1. Both ends of the chip accommodating area A12 are connected to the two pin accommodating areas A13. The chip accommodating area A12 is used for accommodating the two pin accommodating areas A13. The chip body C1 of each chip C and each pin accommodating area A13 are used for accommodating part of the pins C2 of each chip C. As shown in FIG. As shown in FIG. 3 , when each plug body A2 is fixed to one end of the feed tube body A1, a part of the plug body A2 protrudes from one side of the feed tube body A1.

請一併參閱圖3至圖5,圖3顯示為本發明的拔塞機台的第一固持機構的示意圖,圖4為圖3的局部放大示意圖,圖5為本發明的拔塞機台的第一固持機構的局部放大示意圖。第一固持機構3包含:一第一前後移動裝置31及一第一夾持裝置32。第一前後移動裝置31電性連接處理裝置2。第一前後移動裝置31與第一夾持裝置32相連接,處理裝置2能控制第一前後移動裝置31作動,而使第一夾持裝置32向前或向後移動。具體來說,第一前後移動裝置31例如可以是包含一驅動模組311及至少一移動件312,驅動模組311電性連接處理裝置2,移動件312與驅動模組311相連接,移動件312與第一夾持裝置32相連接。處理裝置2能控制驅動模組311,而使移動件312帶動第一夾持裝置32向前或向後移動。在實際應用中,所述驅動模組311例如可以是氣缸或是油壓缸等。在不同的實施例中,第一前後移動裝置31也可以是包含有滑軌及滑塊。Please refer to FIG. 3 to FIG. 5 together. FIG. 3 is a schematic diagram of the first holding mechanism of the plugging machine of the present invention, FIG. 4 is a partial enlarged schematic view of FIG. 3 , and FIG. A partial enlarged schematic view of the first holding mechanism. The first holding mechanism 3 includes: a first forward and backward moving device 31 and a first clamping device 32 . The first forward and backward moving device 31 is electrically connected to the processing device 2 . The first forward and backward moving device 31 is connected with the first clamping device 32 , and the processing device 2 can control the first forward and backward moving device 31 to act so as to make the first clamping device 32 move forward or backward. Specifically, the first front and rear moving device 31 may include, for example, a driving module 311 and at least one moving part 312 , the driving module 311 is electrically connected to the processing device 2 , the moving part 312 is connected with the driving module 311 , and the moving part 312 is connected to the processing device 2 . 312 is connected to the first clamping device 32 . The processing device 2 can control the driving module 311 so that the moving member 312 drives the first clamping device 32 to move forward or backward. In practical applications, the driving module 311 can be, for example, an air cylinder or a hydraulic cylinder. In different embodiments, the first forward and backward moving device 31 may also include a sliding rail and a sliding block.

第一夾持裝置32電性連接處理裝置2,處理裝置2能控制第一夾持裝置32,而使第一夾持裝置32夾持料管組件A的一端。在實際應用中,第一夾持裝置32例如可以是用來夾持設置於載台1上的多個料管組件A的多個料管本體A1,但不以此為限。在不同的實施例中,第一夾持裝置32也可以是用來夾持設置於載台1上的多個料管組件A的多個塞體A2。The first clamping device 32 is electrically connected to the processing device 2 , and the processing device 2 can control the first clamping device 32 so that the first clamping device 32 can clamp one end of the material tube assembly A. As shown in FIG. In practical applications, the first clamping device 32 may be, for example, used to clamp the plurality of material pipe bodies A1 of the plurality of material pipe assemblies A disposed on the carrier 1 , but not limited thereto. In different embodiments, the first clamping device 32 may also be a plurality of plug bodies A2 for clamping a plurality of material tube assemblies A arranged on the carrier 1 .

在實際應用中,第一夾持裝置32可以包含一軌道321、兩個滑塊322、多個上夾持構件323及多個下夾持構件324。軌道321設置於第一前後移動裝置31的滑塊322上。多個上夾持構件323與其中一個滑塊322相互連接。多個下夾持構件324與另一個滑塊322相互連接,而處理裝置2能控制兩個滑塊322於軌道321上向彼此相互靠近或彼此相互遠離的方向移動,據以使多個上夾持構件323及多個下夾持構件324向彼此相互靠近或彼此相互遠離的方向移動。In practical applications, the first clamping device 32 may include a rail 321 , two sliding blocks 322 , a plurality of upper clamping members 323 and a plurality of lower clamping members 324 . The track 321 is disposed on the slider 322 of the first forward and backward moving device 31 . A plurality of upper clamping members 323 are interconnected with one of the sliders 322 . The plurality of lower clamping members 324 are connected with another sliding block 322, and the processing device 2 can control the two sliding blocks 322 to move on the track 321 in the direction of approaching each other or moving away from each other, so as to make the plurality of upper clamping members 322 move. The holding member 323 and the plurality of lower holding members 324 move in the directions of approaching each other or moving away from each other.

如圖4及圖5所示,各個上夾持構件323的一端可以是具有一上凹槽3231,各個上夾持構件323的一端可以是對應具有一下凹槽3241。各個上凹槽3231及各個下凹槽3241的外型及尺寸是對應於單一個料管組件A的外型設計,而彼此相面對地設置的一個上夾持構件323及一個下夾持構件324能共同夾持一個料管組件A。當料管組件A被上夾持構件323及下夾持構件324共同夾持時,料管組件A的一部分將是對應位於上凹槽3231及下凹槽3241中。As shown in FIGS. 4 and 5 , one end of each upper clamping member 323 may have an upper groove 3231 , and one end of each upper clamping member 323 may have a corresponding lower groove 3241 . The shape and size of each upper groove 3231 and each lower groove 3241 correspond to the external design of a single material tube assembly A, and an upper clamping member 323 and a lower clamping member are arranged facing each other. 324 can collectively hold a material tube assembly A. When the material pipe assembly A is jointly clamped by the upper clamping member 323 and the lower clamping member 324 , a part of the material pipe assembly A will be located in the upper groove 3231 and the lower groove 3241 correspondingly.

如圖4及圖5所示,值得一提的是,在較佳的實施應用中,第一夾持裝置32還可以包含多個上限位結構325及多個下限位結構326。各個上限位結構325的一部分位於各個上凹槽3231中,各個下限位結構326的一部分位於各個下凹槽3241中。在具體的實施例中,例如可以是單一個上夾持構件323中設置有單一個或是兩個以上的上限位結構325,單一個下夾持構件324中設置有單一個或是兩個以上的下限位結構326。多個上夾持構件323及多個下夾持構件324共同夾持多個料管本體A1時,多個上限位結構325及多個下限位結構326則能共同固持多個料管組件A的料管本體A1。As shown in FIGS. 4 and 5 , it is worth mentioning that, in a preferred implementation and application, the first clamping device 32 may further include a plurality of upper limit structures 325 and a plurality of lower limit structures 326 . A part of each upper limit structure 325 is located in each upper groove 3231 , and a part of each lower limit structure 326 is located in each lower groove 3241 . In a specific embodiment, for example, a single upper clamping member 323 may be provided with a single or more than two upper limit structures 325 , and a single lower clamping member 324 may be provided with a single or more than two upper limit structures 325 . The lower limit structure 326. When the plurality of upper clamping members 323 and the plurality of lower clamping members 324 jointly hold the plurality of material pipe bodies A1, the plurality of upper limit structures 325 and the plurality of lower limit structures 326 can jointly hold the plurality of material pipe assemblies A. Material tube body A1.

在實際應用中,各個上限位結構325及各個下限位結構326可以是完全相同的構件,但不以此為限。在具體的實施例中,各個上限位結構325的末端及各個下限位結構326的末端,可以都是呈現為尖狀,藉此,各個上限位結構325及各個下限位結構326可以更好地抵壓料管本體A1,而使料管本體A1不易於塞體A2被拔離時滑動。In practical applications, each of the upper limit structures 325 and each of the lower limit structures 326 may be completely identical components, but not limited thereto. In a specific embodiment, the end of each upper limit structure 325 and the end of each lower limit structure 326 may both be pointed, so that each upper limit structure 325 and each lower limit structure 326 can better meet the The material pipe body A1 is pressed, so that the material pipe body A1 is not easy to slide when the plug body A2 is pulled out.

請復參圖1、圖2、圖4及圖5,當塞體A2固定於料管本體A1的一端時,塞體A2的一部分是凸出於料管本體A1的一側。因此,當多個上夾持構件323及多個下夾持構件324共同夾持設置於載台1的多個料管本體A1時,處理裝置2將可以控制第一前後移動裝置31作動,而使凸出於各個料管本體A1的各個塞體A2,被相對應的上夾持構件323及下夾持構件324推抵,進而與相對應的料管本體A1相互分離。Please refer to Figure 1, Figure 2, Figure 4 and Figure 5 again, when the plug body A2 is fixed to one end of the feed tube body A1, a part of the plug body A2 protrudes from one side of the feed tube body A1. Therefore, when the plurality of upper clamping members 323 and the plurality of lower clamping members 324 jointly clamp the plurality of material tube bodies A1 arranged on the carrier 1, the processing device 2 can control the operation of the first forward and backward moving device 31, and Each plug body A2 protruding from each material pipe body A1 is pushed by the corresponding upper clamping member 323 and the lower clamping member 324, and then separated from the corresponding material pipe body A1.

請一併參閱圖6至圖8,圖6顯示為本發明的拔塞機台的第二固持機構的示意圖,圖7為圖6的局部放大示意圖,圖8為本發明的拔塞機台的第二固持機構及料管組件的側面示意圖。第二固持機構4包含:一第二前後移動裝置41及一第二夾持裝置42。第二前後移動裝置41電性連接處理裝置2(如圖1所示)。第二夾持裝置42與第二前後移動裝置41連接,處理裝置2能控制第二前後移動裝置41,而使第二前後移動裝置41帶動第二夾持裝置42向前或向後移動。第二前後移動裝置41例如可以是包含一驅動模組411及一移動件412。驅動模組411電性連接處理裝置2,移動件412與驅動模組411相連接,移動件412與第二夾持裝置42相連接。處理裝置2能控制驅動模組411,而使移動件412帶動第二夾持裝置42向前或向後移動。在不同的實施例中,第二夾持裝置42可以是包含滑軌及滑塊。Please refer to FIG. 6 to FIG. 8 together. FIG. 6 is a schematic diagram of the second holding mechanism of the corking machine according to the present invention. FIG. 7 is a partial enlarged schematic view of FIG. 6 . A schematic side view of the second holding mechanism and the material tube assembly. The second holding mechanism 4 includes: a second forward and backward moving device 41 and a second clamping device 42 . The second forward and backward moving device 41 is electrically connected to the processing device 2 (as shown in FIG. 1 ). The second clamping device 42 is connected to the second front and rear moving device 41 , and the processing device 2 can control the second front and rear moving device 41 , so that the second front and rear moving device 41 drives the second clamping device 42 to move forward or backward. The second front and rear moving device 41 may include, for example, a driving module 411 and a moving member 412 . The driving module 411 is electrically connected to the processing device 2 , the moving member 412 is connected to the driving module 411 , and the moving member 412 is connected to the second clamping device 42 . The processing device 2 can control the driving module 411 so that the moving member 412 drives the second clamping device 42 to move forward or backward. In different embodiments, the second clamping device 42 may include a sliding rail and a sliding block.

第二夾持裝置42電性連接處理裝置2,處理裝置2能控制第二夾持裝置42,而使第二夾持裝置42夾持料管組件A的一端。在實際應用中,第二夾持裝置42可以是用來夾持設置於載台1(如圖1所示)上的多個料管組件A所包含的多個塞體A2(如圖2所示),但不以此為限。在不同的實施例中,第二夾持裝置42也可以是用來夾持設置於載台1上的多個料管組件A的料管本體A1(如圖2所示)。The second clamping device 42 is electrically connected to the processing device 2 , and the processing device 2 can control the second clamping device 42 so that the second clamping device 42 can clamp one end of the material tube assembly A. In practical applications, the second clamping device 42 may be used to clamp the multiple plugs A2 (as shown in FIG. 2 ) included in the multiple material tube assemblies A set on the carrier 1 (as shown in FIG. 1 ). shown), but not limited thereto. In different embodiments, the second clamping device 42 can also be used to clamp the material pipe body A1 (as shown in FIG. 2 ) of the plurality of material pipe assemblies A disposed on the carrier 1 .

第二夾持裝置42可以是包含一軌道421、兩個滑塊422、多個上夾持構件423及多個下夾持構件424。軌道421固定設置於第二前後移動裝置41,其中一個滑塊422與多個上夾持構件423相連接,另一個滑塊422與多個下夾持構件424相連接。處理裝置2能控制兩個滑塊422,於軌道421上向彼此相互靠近或彼此相互遠離的方向移動,據以夾持或不再夾持多個料管組件A(如圖2所示)。The second clamping device 42 may include a rail 421 , two sliding blocks 422 , a plurality of upper clamping members 423 and a plurality of lower clamping members 424 . The rails 421 are fixedly arranged on the second front and rear moving device 41 , wherein one sliding block 422 is connected with a plurality of upper clamping members 423 , and the other sliding block 422 is connected with a plurality of lower clamping members 424 . The processing device 2 can control the two sliders 422 to move on the track 421 in the direction of approaching each other or moving away from each other, so as to clamp or not clamp the plurality of material tube assemblies A (as shown in FIG. 2 ).

如圖7及圖8所示,在實際應用中,各個上夾持構件423包含一上插入結構4231,各個下夾持構件424包含一下插入結構4241。各個上插入結構4231具有至少兩個導引斜面4231A及一尖端部4231B,尖端部4231B位於兩個導引斜面4231A之間,各個下插入結構4241具有至少兩個導引斜面4241A及一尖端部4241B,各個下插入結構4241的尖端部4241B位於下插入結構4241的兩個導引斜面4241A之間。As shown in FIG. 7 and FIG. 8 , in practical applications, each upper clamping member 423 includes an upper insertion structure 4231 , and each lower clamping member 424 includes a lower insertion structure 4241 . Each upper insertion structure 4231 has at least two guiding slopes 4231A and a tip portion 4231B, the tip portion 4231B is located between the two guiding slopes 4231A, and each lower insertion structure 4241 has at least two guiding slopes 4241A and a tip portion 4241B , the tip portion 4241B of each lower insertion structure 4241 is located between the two guiding slopes 4241A of the lower insertion structure 4241 .

如圖8及圖9所示,當載台1上設置有多個料管組件A時,處理裝置2將控制第二夾持裝置42的多個上夾持構件423及多個下夾持構件424向相互靠近的方向移動,據以使各個上插入結構4231的尖端部4231B及各個下插入結構4241的尖端部4241B,分別對應插入於相鄰的料管組件A的塞體A2與料管本體A1之間。As shown in FIGS. 8 and 9 , when a plurality of material tube assemblies A are installed on the carrier 1 , the processing device 2 will control the plurality of upper clamping members 423 and the plurality of lower clamping members of the second clamping device 42 424 move toward each other, so that the tip portion 4231B of each upper insertion structure 4231 and the tip portion 4241B of each lower insertion structure 4241 are respectively inserted into the plug body A2 and the feed tube body of the adjacent feed tube assembly A, respectively. between A1.

如圖10及圖11所示,當上插入結構4231的尖端部4231B及下插入結構4241的尖端部4241B分別插入相對應的塞體A2與料管本體A1之間時,處理裝置2將持續地控制上夾持構件423及下夾持構件424相彼此相互靠近的方向作動,而塞體A2及料管本體A1則將沿著尖端部4231B、4241B兩旁的兩個導引斜面4231A、4241A移動,藉此,塞體A2的至少一部分將脫料管本體A1。當上夾持構件423及下夾持構件424共同夾持塞體A2時,處理裝置2將控制第二前後移動裝置41作動,而使上夾持構件423及下夾持構件424一同向遠離料管本體A1的方向移動,藉此,使塞體A2完全脫離料管本體A1。As shown in FIG. 10 and FIG. 11 , when the tip portion 4231B of the upper insertion structure 4231 and the tip portion 4241B of the lower insertion structure 4241 are respectively inserted between the corresponding plug body A2 and the feed tube body A1, the processing device 2 will continue to The upper clamping member 423 and the lower clamping member 424 are controlled to move in the direction of approaching each other, and the plug body A2 and the material tube body A1 will move along the two guiding slopes 4231A and 4241A on both sides of the tip portions 4231B and 4241B. Thereby, at least a part of the plug body A2 will be the stripper body A1. When the upper clamping member 423 and the lower clamping member 424 jointly clamp the plug body A2, the processing device 2 will control the second forward and backward moving device 41 to act, so that the upper clamping member 423 and the lower clamping member 424 move away from the material together. The direction of the tube body A1 is moved, whereby the plug body A2 is completely separated from the feed tube body A1.

如圖7及圖8所示,在實際應用中,第二夾持裝置42還可以包含多個上止擋結構425及多個下止擋結構426,各個上止擋結構425及各個下止擋結構426相面對地設置,各個上止擋結構425能與各個下止擋結構426相互卡合,並據以限制相對應的塞體A2的活動範圍。如圖8及圖11所示,具體來說,各個上止擋結構425可以是柱狀結構,各個下止擋結構426可以是形成於下夾持構件424的凹槽;當上夾持構件423及下夾持構件424向彼此相互靠近的方向移動時,呈柱狀結構的上止擋結構425的一部分將對應伸入相對應的凹槽(下止擋結構426)中。As shown in FIG. 7 and FIG. 8 , in practical applications, the second clamping device 42 may further include a plurality of upper stop structures 425 and a plurality of lower stop structures 426 , each upper stop structure 425 and each lower stop The structures 426 are arranged facing each other, and each of the upper stop structures 425 and each of the lower stop structures 426 can be engaged with each other, so as to limit the movement range of the corresponding plug body A2. As shown in FIG. 8 and FIG. 11 , specifically, each upper stopper structure 425 may be a columnar structure, and each lower stopper structure 426 may be a groove formed in the lower clamping member 424; when the upper clamping member 423 When the lower clamping members 424 move toward each other, a part of the upper stopper structure 425 in the columnar structure will correspondingly protrude into the corresponding groove (lower stopper structure 426 ).

如圖11所示,當上夾持構件423的一部分與下夾持構件424相互卡合時,上插入結構4231及下插入結構4241可以是未插入相鄰的塞體A2與料管本體A1之間,此時,處理裝置2可以是控制第一夾持裝置32、第二夾持裝置42中的至少一個作動,據以多個料管組件A向靠近相鄰的上夾持構件423及下夾持構件424的方向移動,從而使多個料管組件A的塞體A2的一端面A21大致齊平地設置,如此,將可確保多個上插入結構4231及多個下插入結構4241能夠同時插入相對應的多個塞體A2與多個料管本體A1之間。As shown in FIG. 11 , when a part of the upper clamping member 423 and the lower clamping member 424 are engaged with each other, the upper insertion structure 4231 and the lower insertion structure 4241 may not be inserted between the adjacent plug body A2 and the feed tube body A1 At this time, the processing device 2 may control the operation of at least one of the first clamping device 32 and the second clamping device 42, so that the plurality of material tube assemblies A move toward the adjacent upper clamping members 423 and the lower clamping members 423. The direction of the clamping member 424 is moved, so that the one end faces A21 of the plug bodies A2 of the plurality of material tube assemblies A are arranged substantially flush, so that the plurality of upper insertion structures 4231 and the plurality of lower insertion structures 4241 can be inserted at the same time. Between the corresponding plurality of plug bodies A2 and the plurality of material pipe bodies A1.

在不同的實施例中,拔塞機台S11也可以是不具有上止擋結構425及下止擋結構426,而處理裝置2可以是在控制第一夾持裝置32及第二夾持裝置42作動,以分別夾持多個料管組件A之前,先控制第一夾持裝置32的上夾持構件423及下夾持構件424相互靠近,並控制第二夾持裝置42的上夾持構件323及下夾持構件324相互靠近,接著,再控制第一前後移動裝置31及第二前後移動裝置41作動,藉此,使第一夾持裝置32的上夾持構件323、第一夾持裝置32的下夾持構件324抵靠於多個料管組件A的一端,而使第二夾持裝置42的上夾持構件423及第二夾持裝置42的下夾持構件424抵靠於多個料管組件A的另一端,如此,將可使設置於載台1上的料管組件A的各端面A21(如圖2所示)相互齊平。In different embodiments, the plugging machine S11 may not have the upper stopper structure 425 and the lower stopper structure 426 , and the processing device 2 may control the first clamping device 32 and the second clamping device 42 The upper clamping member 423 and the lower clamping member 424 of the first clamping device 32 are controlled to approach each other, and the upper clamping member 42 of the second clamping device 42 is controlled to move closer to each other. 323 and the lower clamping member 324 are close to each other, and then, the first front-rear moving device 31 and the second front-rear moving device 41 are controlled to operate, whereby the upper clamping member 323 and the first clamping member 323 of the first clamping device 32 and the first clamping member 323 are controlled to operate. The lower clamping member 324 of the device 32 abuts against one end of the plurality of material pipe assemblies A, so that the upper clamping member 423 of the second clamping device 42 and the lower clamping member 424 of the second clamping device 42 are abutted against. In this way, the other ends of the plurality of material pipe assemblies A can make the end faces A21 (as shown in FIG. 2 ) of the material pipe assemblies A arranged on the carrier 1 be flush with each other.

依上所述,通過多個上止擋結構425及多個下止擋結構426的設計,多個料管組件A在塞體A2被拔離之前,各塞體A2的端面A21會是呈現為相互齊平的狀態,如此,將可以確保於後續作業中,第二夾持裝置42可以正確地夾持多個料管組件A2的塞體A2,而可避免發生第二夾持裝置42未正確地夾持塞體A2,而夾傷料管本體A1,甚至夾壞料管本體A1內的晶片C的問題。According to the above, through the design of the plurality of upper stop structures 425 and the plurality of lower stop structures 426 , before the plug bodies A2 of the plurality of material tube assemblies A are pulled out, the end faces A21 of the plug bodies A2 will appear as In the state of being flush with each other, in this way, it can be ensured that in subsequent operations, the second clamping device 42 can correctly clamp the plug bodies A2 of the plurality of material tube assemblies A2, and the occurrence of incorrect second clamping devices 42 can be avoided. The problem is that the plug body A2 is tightly clamped, the feed tube body A1 is pinched, and even the wafer C in the feed tube body A1 is damaged.

需特別說明的是,於上述本實施例的說明中,是以第二夾持裝置42包含多個上止擋結構425及多個下止擋結構426為例,但不以此為限;在不同的實施例中,第一夾持裝置32也可以是包含有多個上止擋結構425及多個所述下止擋結構426。It should be noted that, in the above description of the present embodiment, the second clamping device 42 includes a plurality of upper stop structures 425 and a plurality of lower stop structures 426 as an example, but not limited to this; In different embodiments, the first clamping device 32 may also include a plurality of upper stop structures 425 and a plurality of the lower stop structures 426 .

請一併參閱圖8、圖9及圖12,在實際應用中,拔塞機台S11還可以包含至少一排料裝置5。排料裝置5電性連接處理裝置2(如圖1所示),而處理裝置2能控制排料裝置5及兩個夾持裝置,以先使設置於載台1的多個料管組件A的塞體A2與相對應的料管本體A1相互分離後,再使排料裝置5推抵被夾持裝置夾持的多個塞體A2,以使多個塞體A2落入一指定區域(例如是各式集料槽等)。Please refer to FIG. 8 , FIG. 9 and FIG. 12 together. In practical applications, the plugging machine S11 may further include at least one discharging device 5 . The discharging device 5 is electrically connected to the processing device 2 (as shown in FIG. 1 ), and the processing device 2 can control the discharging device 5 and the two clamping devices, so as to make the plurality of material tube assemblies A set on the carrier 1 first. After the plug body A2 and the corresponding material tube body A1 are separated from each other, the discharge device 5 is pushed against the plurality of plug bodies A2 clamped by the clamping device, so that the plurality of plug bodies A2 fall into a designated area ( For example, all kinds of aggregate troughs, etc.).

在其中一實施例中,排料裝置5可以是鄰近於第二夾持裝置42設置,且排料裝置5可以是包含有一本體51、多個彈性件52及多個推桿53。本體51與多個上夾持構件423相連接,多個彈性件52設置於本體51中,推桿53可伸縮地設置於所述本體51中,各個推桿53的一端與一個彈性件52相連接。In one embodiment, the discharging device 5 may be disposed adjacent to the second clamping device 42 , and the discharging device 5 may include a body 51 , a plurality of elastic members 52 and a plurality of push rods 53 . The main body 51 is connected with a plurality of upper clamping members 423 , a plurality of elastic pieces 52 are arranged in the main body 51 , and the push rods 53 are telescopically arranged in the main body 51 , and one end of each push rod 53 is connected to an elastic piece 52 . connect.

如圖9所示,當上夾持構件423及下夾持構件424夾持料管組件A時,各個推桿53將被相對應的料管本體A1抵壓而向本體51的方向移動,各個彈性件52則是受推桿53推抵而呈現為彈性變形的狀態。通過推桿53及彈性件52的相互配合,可以使多個料管組件A更穩定地設置於所述載台1上。As shown in FIG. 9 , when the upper clamping member 423 and the lower clamping member 424 clamp the material pipe assembly A, each push rod 53 will be pressed by the corresponding material pipe body A1 and move in the direction of the main body 51 . The elastic member 52 is pushed by the push rod 53 and is in a state of elastic deformation. Through the cooperation of the push rod 53 and the elastic member 52 , the plurality of material tube assemblies A can be more stably arranged on the carrier 1 .

如圖12所示,當處理裝置2控制第一固持機構3及第二固持機構4作動,而使上夾持構件423及下夾持構件424夾持塞體A2,並使料管本體A1與塞體A2相互分離時,原本抵靠於料管本體A1外側的推桿53,將受其所連接的彈性件52所產生的彈性回復力,而向塞體A2的方向移動,並據以抵壓於塞體A2的一側,於此同時,處理裝置2可以是控制第二夾持裝置42作動,而使上夾持構件423及下夾持構件424向彼此相互遠離的方向移動,並據以不再夾持塞體A2,藉此,塞體A2將因為被推桿53推抵而向下落至指定區域。As shown in FIG. 12 , when the processing device 2 controls the operation of the first holding mechanism 3 and the second holding mechanism 4, the upper clamping member 423 and the lower clamping member 424 clamp the plug body A2, and the feed tube body A1 and the When the plug bodies A2 are separated from each other, the push rod 53 originally abutting against the outer side of the material tube body A1 will be moved in the direction of the plug body A2 by the elastic restoring force generated by the elastic member 52 connected to it, and will push the plug body A2 accordingly. At the same time, the processing device 2 can control the operation of the second clamping device 42 to move the upper clamping member 423 and the lower clamping member 424 in a direction away from each other, and according to the Therefore, the plug body A2 is no longer clamped, whereby the plug body A2 will fall down to the designated area due to being pushed by the push rod 53 .

在不同的實施例中,排料裝置5也可以是包含有多個噴嘴(圖未示),多個噴嘴通過一電子閥與一供氣設備相連接。多個噴嘴鄰近多個上夾持構件423或多個下夾持構件424設置,處理裝置2能控制電子閥作動,而使供氣設備提供的氣體能通過多個噴嘴向被多個上夾持構件423及多個下夾持構件424所夾持的多個塞體A2吹送。當處理裝置2控制第一夾持裝置32及第二夾持裝置42作動,而使多個塞體A2與多個料管本體A1相互分離時,處理裝置2將控制電子閥及第二夾持裝置42作動,而使多個上夾持構件423及多個下夾持構件424不再夾持塞體A2,而塞體A2將被多個噴嘴所吹送的氣體吹落至指定區域。In different embodiments, the discharging device 5 may also include a plurality of nozzles (not shown), and the plurality of nozzles are connected to a gas supply device through an electronic valve. A plurality of nozzles are arranged adjacent to a plurality of upper clamping members 423 or a plurality of lower clamping members 424, and the processing device 2 can control the electronic valve to actuate, so that the gas provided by the gas supply equipment can pass through the plurality of nozzles to the plurality of upper clamping members. The plurality of plug bodies A2 held by the member 423 and the plurality of lower holding members 424 are blown. When the processing device 2 controls the operation of the first clamping device 32 and the second clamping device 42 to separate the plurality of plug bodies A2 and the plurality of material pipe bodies A1 from each other, the processing device 2 will control the electronic valve and the second clamping device The device 42 is actuated so that the plurality of upper clamping members 423 and the plurality of lower clamping members 424 no longer clamp the plug body A2, and the plug body A2 blows the gas blown by the plurality of nozzles to a designated area.

請復參圖1及圖7,在較佳的實施例中,拔塞機台S11還可以是包含有至少一感測裝置6及一警示裝置7。感測裝置6及警示裝置7電性連接處理裝置2。感測裝置6鄰近於至少其中一個夾持裝置設置。感測裝置6可以是包含有多個感測器61,多個感測器61鄰近於夾持裝置的多個上夾持構件或下夾持構件設置。當兩個固持機構將設置於載台1的多個料管組件A的至少一端的多個塞體A2與多個料管本體A1相互分離時,處理裝置2能控制感測裝置6感測至少一個夾持裝置是否僅夾持多個塞體A2;若處理裝置2通過感測裝置6的感測結果,判斷夾持裝置僅夾持多個塞體A2,則處理裝置2可以是控制夾持裝置及前述排料裝置5,以使排料裝置5推抵多個塞體A2,而使多個塞體A2落入指定區域;若處理裝置2通過感測裝置6的感測結果,判斷夾持裝置不是僅夾持多個塞體A2(亦即,任一個塞體A2的一部分仍與相對應的料管本體A1相互卡合),處理裝置2將控制警示裝置7作動,而使警示裝置7發出相對應的提示資訊,舉例來說,警示裝置7可以是對應發出特定的聲響、發出特定顏色的光束、於顯示裝置上顯示出特定的警示視窗等。簡單來說,感測裝置6可以是用來感測夾持裝置是否有正確地使多個塞體A2與多個料管本體A1相互分離。Referring back to FIG. 1 and FIG. 7 , in a preferred embodiment, the plug-pulling machine S11 may also include at least one sensing device 6 and a warning device 7 . The sensing device 6 and the warning device 7 are electrically connected to the processing device 2 . The sensing device 6 is arranged adjacent to at least one of the clamping devices. The sensing device 6 may include a plurality of sensors 61 , and the plurality of sensors 61 are disposed adjacent to a plurality of upper clamping members or lower clamping members of the clamping device. When the two holding mechanisms separate the plurality of plug bodies A2 and the plurality of material pipe bodies A1 disposed at at least one end of the plurality of material pipe assemblies A of the carrier 1 from each other, the processing device 2 can control the sensing device 6 to sense at least one Whether a clamping device only clamps multiple plug bodies A2; if the processing device 2 judges that the clamping device only clamps multiple plug bodies A2 through the sensing result of the sensing device 6, then the processing device 2 can control the clamping The device and the aforementioned discharging device 5, so that the discharging device 5 pushes against the plurality of plug bodies A2, so that the plurality of plug bodies A2 fall into the designated area; if the processing device 2 passes the sensing result of the sensing device 6, it is determined that the The holding device does not only hold a plurality of plug bodies A2 (that is, a part of any plug body A2 is still engaged with the corresponding material tube body A1), the processing device 2 will control the warning device 7 to act, so that the warning device 7 sends out corresponding prompt information. For example, the warning device 7 may be corresponding to emit a specific sound, emit a light beam of a specific color, display a specific warning window on the display device, and the like. In short, the sensing device 6 can be used to sense whether the clamping device has correctly separated the plurality of plug bodies A2 and the plurality of material pipe bodies A1 from each other.

在不同的實施例中,處理裝置2還可以是在兩個夾持裝置夾持設置於載台1的多個料管組件A時,控制感測裝置6作動,以通過感測裝置6感測各個夾持裝置是否正確地夾持多個料管組件A。舉例來說,感測裝置6可以是用來感測夾持裝置所夾持的多個料管本體A1的凹槽A3是否都是朝向同一方向,或者,感測裝置6也可以是用來感測夾持裝置的各個上夾持構件及下夾持構件是否都有夾持一個料管組件A。在實際應用中,各個感測器例如可是各式光電感測器,但不以此為限。In different embodiments, the processing device 2 may also control the sensing device 6 to actuate when the two clamping devices clamp a plurality of material tube assemblies A disposed on the carrier 1 , so as to sense the sensing device 6 Whether each gripping device properly grips multiple material tube assemblies A. For example, the sensing device 6 can be used to sense whether the grooves A3 of the plurality of material tube bodies A1 held by the holding device are all facing the same direction, or the sensing device 6 can also be used to sense Check whether each upper clamping member and lower clamping member of the clamping device has a material tube assembly A. In practical applications, each sensor may be, for example, various photoelectric sensors, but not limited thereto.

請參閱圖13,其顯示為本發明的整料設備的示意圖。整料設備S1包含一拔塞機台S11及一整料機台S12。整料機台S12用以使多個料管組件A彼此相互並排地設置,且使相互並排地設置的多個料管本體A1所分別具有的一凹槽A3朝向同一方向。拔塞機台S11用以將通過整料機台S12後的並排地設置的多個料管組件A所分別包含的至少一個塞體A2拔離相對應的料管本體A1。。關於拔塞機台S11的詳細說明請參前述說明,於此不再贅述。Please refer to FIG. 13 , which is a schematic diagram of the monolithic apparatus of the present invention. The monolithic equipment S1 includes a plugging machine S11 and a monolithic machine S12. The monolithic machine S12 is used for arranging the plurality of material pipe assemblies A side by side with each other, and making a groove A3 respectively possessed by the plurality of material pipe bodies A1 arranged side by side face the same direction. The plug-pulling machine S11 is used to pull out at least one plug body A2 included in the plurality of material pipe assemblies A arranged side by side after passing through the monolithic material machine station S12 from the corresponding material pipe body A1. . For the detailed description of the plug-pulling machine S11, please refer to the foregoing description, which will not be repeated here.

請一併參閱圖14及圖15,圖14顯示為本發明的測試系統的示意圖,圖15顯示為本發明的測試系統的金屬料管本體的示意圖。測試系統S包含:一整料設備S1、一交換設備S2及一測試設備S3。整料設備S1包含一整料機台S12及一拔塞機台S11。整料機台S12用以使多個料管組件A彼此相互並排地設置,且使相互並排地設置的多個料管本體A1所分別具有的一凹槽A3朝向同一方向。拔塞機台S11用以將通過整料機台S12後的並排地設置的多個料管組件A所分別包含的至少一個塞體A2拔離相對應的料管本體A1。交換設備鄰近於整料設備S1設置,交換設備S2用以將通過多個拔塞機台S11的各個料管本體A1內所承載的多個晶片C,移載至一金屬料管本體S21中。測試設備S3鄰近於交換設備S2設置,測試設備S3用以對設置於各個金屬料管本體S21中的多個晶片進行一測試。如圖15所示,金屬料管本體S21可以是包含有多個容置通道S211,各個容置通道S211是用來容置多個晶片C。Please refer to FIG. 14 and FIG. 15 together. FIG. 14 is a schematic diagram of the testing system of the present invention, and FIG. 15 is a schematic diagram of the metal tube body of the testing system of the present invention. The testing system S includes: a monolithic equipment S1, a switching equipment S2 and a testing equipment S3. The monolithic equipment S1 includes a monolithic machine S12 and a plugging machine S11. The monolithic machine S12 is used for arranging the plurality of material pipe assemblies A side by side with each other, and making a groove A3 respectively possessed by the plurality of material pipe bodies A1 arranged side by side face the same direction. The plug-pulling machine S11 is used to pull out at least one plug body A2 included in the plurality of material pipe assemblies A arranged side by side after passing through the monolithic material machine station S12 from the corresponding material pipe body A1. The exchange equipment is disposed adjacent to the monolithic equipment S1, and the exchange equipment S2 is used to transfer the plurality of wafers C carried in the respective material pipe bodies A1 passing through the plurality of plugging machines S11 to a metal material pipe body S21. The test equipment S3 is disposed adjacent to the exchange equipment S2, and the test equipment S3 is used to perform a test on a plurality of wafers disposed in each metal tube body S21. As shown in FIG. 15 , the metal tube body S21 may include a plurality of accommodating channels S211 , and each accommodating channel S211 is used for accommodating a plurality of wafers C. As shown in FIG.

綜上所述,本發明的拔塞機台、整料設備及測試系統,通過處理裝置、載台及兩個固持機構的相互配合,可以快速地使多個料管組件的塞體與相對應的料管本體相互分離,從而可以提升拔塞的效率,並且大幅節省人力成本。To sum up, the plug-pulling machine, the monolithic equipment and the testing system of the present invention can quickly make the plug bodies of a plurality of material pipe assemblies correspond to each other through the cooperation of the processing device, the carrier and the two holding mechanisms. The material tube bodies are separated from each other, which can improve the efficiency of plug pulling and greatly save labor costs.

以上所述僅為本發明的較佳可行實施例,非因此侷限本發明的專利範圍,故舉凡運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的保護範圍內。The above descriptions are only preferred feasible embodiments of the present invention, which do not limit the scope of the present invention. Therefore, any equivalent technical changes made by using the contents of the description and drawings of the present invention are included in the protection scope of the present invention. .

S:測試系統 S1:整料設備 S11:拔塞機台 1:載台 2:處理裝置 3:第一固持機構 31:第一前後移動裝置 311:驅動模組 312:移動件 32:第一夾持裝置 321:軌道 322:滑塊 323:上夾持構件 3231:上凹槽 324:下夾持構件 3241:下凹槽 325:上限位結構 326:下限位結構 4:第二固持機構 41:第二前後移動裝置 411:驅動模組 412:移動件 42:第二夾持裝置 421:軌道 422:滑塊 423:上夾持構件 4231:上插入結構 4231A:導引斜面 4231B:尖端部 424:下夾持構件 4241:下插入結構 4241A:導引斜面 4241B:尖端部 425:上止擋結構 426:下止擋結構 5:排料裝置 51:本體 52:彈性件 53:推桿 6:感測裝置 61:感測器 7:警示裝置 S12:整料機台 S2:交換設備 S21:金屬料管本體 S211:容置通道 S3:測試設備 A:料管組件 A1:料管本體 A11:開口 A12:晶片容置區 A13:接腳容置區 A2:塞體 A21:端面 A3:凹槽 C:晶片 C1:晶片本體 C2:接腳 S: Test System S1: Monolithic equipment S11: corkscrew machine 1: stage 2: Processing device 3: The first holding mechanism 31: The first front and rear moving device 311: Drive Module 312: Moving Parts 32: The first clamping device 321: Orbit 322: Slider 323: Upper clamping member 3231: Upper groove 324: Lower clamping member 3241: Lower groove 325: Upper limit structure 326: Lower limit structure 4: The second holding mechanism 41: Second front and rear moving device 411: Drive Module 412: Moving parts 42: Second clamping device 421: Orbit 422: Slider 423: Upper clamping member 4231: Insert structure on top 4231A: Guide Bevel 4231B: Tip 424: Lower clamping member 4241: Lower insert structure 4241A: Guide Bevel 4241B: Tip 425: Upper stop structure 426: Lower stop structure 5: Discharge device 51: Ontology 52: Elastic 53: Putter 6: Sensing device 61: Sensor 7: Warning device S12: Monolithic machine S2: swap device S21: Metal tube body S211: accommodating channel S3: Test Equipment A: Material tube assembly A1: Material tube body A11: Opening A12: Chip accommodating area A13: Pin accommodating area A2: Plug body A21: End face A3: Groove C: wafer C1: wafer body C2: pin

圖1為本發明的拔塞機台的示意圖。FIG. 1 is a schematic diagram of the plugging machine of the present invention.

圖2本發明的料管組件的分解示意圖。Figure 2 is an exploded schematic view of the material tube assembly of the present invention.

圖3顯示為本發明的拔塞機台的第一固持機構的示意圖。FIG. 3 is a schematic diagram of the first holding mechanism of the plugging machine of the present invention.

圖4為圖3的局部放大示意圖。FIG. 4 is a partial enlarged schematic view of FIG. 3 .

圖5為本發明的拔塞機台的第一固持機構的局部放大示意圖。FIG. 5 is a partial enlarged schematic view of the first holding mechanism of the plugging machine of the present invention.

圖6顯示為本發明的拔塞機台的第二固持機構的示意圖FIG. 6 is a schematic diagram showing the second holding mechanism of the corkscrew table of the present invention.

圖7為圖6的局部放大示意圖FIG. 7 is a partial enlarged schematic view of FIG. 6

圖8為本發明的拔塞機台的第二固持機構及料管組件的側面示意圖8 is a schematic side view of the second holding mechanism and the material tube assembly of the plugging machine of the present invention

圖9至圖12為本發明的拔塞機台的第二固持機構將料管組件的塞體拔離料管本體的作動示意圖。9 to 12 are schematic diagrams of the action of the second holding mechanism of the plug pulling machine of the present invention to pull the plug body of the material pipe assembly out of the material pipe body.

圖13為本發明的整料設備的示意圖。Figure 13 is a schematic diagram of the monolithic apparatus of the present invention.

圖14顯示為本發明的測試系統的示意圖。FIG. 14 shows a schematic diagram of the testing system of the present invention.

圖15顯示為本發明的測試系統的金屬料管本體的示意圖。Figure 15 shows a schematic view of the metal barrel body of the testing system of the present invention.

1:載台 1: stage

2:處理裝置 2: Processing device

3:第一固持機構 3: The first holding mechanism

4:第二固持機構 4: The second holding mechanism

7:警示裝置 7: Warning device

A:料管組件 A: Material tube assembly

S11:拔塞機台 S11: corkscrew machine

Claims (13)

一種拔塞機台,其用以將一料管組件的一料管本體的至少一端所設置的一塞體拔離所述料管本體,所述拔塞機台包含: 一處理裝置; 一載台,其用以承載多個所述料管組件; 兩個固持機構,兩個所述固持機構彼此相面對地設置,而所述載台位於兩個所述固持機構之間,各個所述固持機構包含: 一前後移動裝置,其電性連接所述處理裝置;及 一夾持裝置,其與所述前後移動裝置連接,所述處理裝置能控制所述前後移動裝置,而使所述前後移動裝置帶動所述夾持裝置向前或向後移動;所述夾持裝置電性連接所述處理裝置,所述處理裝置能控制所述夾持裝置,而使所述夾持裝置夾持設置於所述載台的多個所述料管組件的一端; 其中,所述載台設置有多個所述料管組件時,所述處理裝置能控制兩個所述前後移動裝置作動,以推抵設置於所述載台上的多個所述料管組件的至少一端,而使設置於所述載台上的多個所述料管組件的一端面相互齊平;所述處理裝置能於設置於所述載台上的多個所述料管組件的所述端面相互齊平時,控制至少一個所述固持機構作動,而使至少一個所述夾持裝置將設置於所述載台上的各個所述料管組件的至少一個所述塞體拔離所述料管本體。 A plug-pulling machine, which is used to pull out a plug body provided on at least one end of a material-pipe body of a material-pipe assembly from the material-pipe body, the plug-pulling machine comprising: a processing device; a carrier, which is used for carrying a plurality of the material tube assemblies; Two holding mechanisms, the two holding mechanisms are arranged facing each other, and the carrier is located between the two holding mechanisms, each of the holding mechanisms includes: a forward and backward moving device electrically connected to the processing device; and a clamping device connected to the front and rear moving device, the processing device can control the front and rear moving device, so that the front and rear moving device drives the clamping device to move forward or backward; the clamping device The processing device is electrically connected, and the processing device can control the clamping device, so that the clamping device clamps one end of the plurality of material tube assemblies arranged on the carrier; Wherein, when the carrier is provided with a plurality of the material pipe assemblies, the processing device can control two of the front and rear moving devices to act so as to push against the plurality of the material pipe assemblies disposed on the carrier table at least one end of each of the material pipe assemblies arranged on the carrier platform is flush with each other; the processing device can be placed on the When the end faces are flush with each other, at least one of the holding mechanisms is controlled to act, so that at least one of the clamping devices pulls out at least one of the plug bodies of each of the material pipe assemblies arranged on the carrier from the place. Describe the tube body. 如請求項1所述的拔塞機台,其中,兩個所述固持機構分別定義為一第一固持機構及一第二固持機構,所述第一固持機構及所述第二固持機構所包含的所述前後移動裝置分別定義為一第一前後移動裝置及一第二前後移動裝置,所述第一固持機構及所述第二固持機構所包含的所述夾持裝置分別定義為一第一夾持裝置及一第二夾持裝置,所述第一夾持裝置用以夾持設置於所述載台上的多個所述料管本體,所述第二夾持裝置用以夾持設置於所述載台上的多個所述料管組件所包含的多個所述塞體。The corkscrew machine according to claim 1, wherein the two holding mechanisms are respectively defined as a first holding mechanism and a second holding mechanism, and the first holding mechanism and the second holding mechanism include The front and rear moving devices are respectively defined as a first front and rear moving device and a second front and rear moving device, and the clamping devices included in the first holding mechanism and the second holding mechanism are respectively defined as a first A clamping device and a second clamping device, the first clamping device is used for clamping a plurality of the material pipe bodies arranged on the carrier, and the second clamping device is used for clamping and setting A plurality of the plugs included in the plurality of the material tube assemblies on the carrier. 如請求項2所述的拔塞機台,其中,所述第一夾持裝置包含多個上夾持構件及多個下夾持構件,各個所述上夾持構件的一端具有一上凹槽,各個所述上夾持構件的一端具有一下凹槽;所述處理裝置能控制多個所述上夾持構件及多個所述下夾持構件相互靠近,而使多個所述上夾持構件及多個所述下夾持構件共同夾持設置於所述載台的多個所述料管本體,而多個所述料管本體則是對應位於多個所述上凹槽及多個所述下凹槽中;多個所述上夾持構件及多個所述下夾持構件共同夾持設置於所述載台的多個所述料管本體時,所述處理裝置能控制所述第一前後移動裝置作動,而使多個所述塞體與多個所述料管本體相互分離。The plugging machine according to claim 2, wherein the first clamping device comprises a plurality of upper clamping members and a plurality of lower clamping members, and one end of each of the upper clamping members has an upper groove , one end of each of the upper clamping members has a lower groove; the processing device can control a plurality of the upper clamping members and a plurality of the lower clamping members to approach each other, so that a plurality of the upper clamping members can be The member and a plurality of the lower clamping members jointly clamp a plurality of the material pipe bodies arranged on the carrier, and the plurality of the material pipe bodies are correspondingly located in the plurality of the upper grooves and the plurality of the material pipe bodies. In the lower groove; when a plurality of the upper clamping members and a plurality of the lower clamping members jointly clamp a plurality of the material pipe bodies arranged on the carrier, the processing device can control all of them. The first back-and-forth moving device is actuated to separate the plurality of plug bodies and the plurality of material pipe bodies from each other. 如請求項3所述的拔塞機台,其中,所述第一夾持裝置還包含多個上限位結構及多個下限位結構,各個所述上限位結構的一部分位於各個所述上凹槽中,各個所述下限位結構的一部分位於各個所述下凹槽中,多個所述上夾持構件及多個所述下夾持構件共同夾持多個所述料管本體時,多個所述上限位結構及多個所述下限位結構共能固持多個所述料管組件的所述料管本體。The plugging machine according to claim 3, wherein the first clamping device further comprises a plurality of upper limit structures and a plurality of lower limit structures, and a part of each of the upper limit structures is located in each of the upper grooves , a part of each of the lower limit structures is located in each of the lower grooves, and when a plurality of the upper clamping members and a plurality of the lower clamping members jointly clamp a plurality of the material pipe bodies, a plurality of The upper limit structure and the plurality of lower limit structures together can hold the material pipe bodies of the plurality of material pipe assemblies. 如請求項2所述的拔塞機台,其中,所述第二夾持裝置包含多個上夾持構件及多個下夾持構件,各個所述上夾持構件包含一上插入結構,各個所述下夾持構件包含一下插入結構;所述處理裝置能控制多個所述上夾持構件及多個所述下夾持構件相互靠近,而使多個所述上插入結構及多個所述下插入結構分別插入設置於所述載台上的多個所述料管本體與多個所述塞體之間;多個所述上插入結構及多個所述下插入結構位於多個所述料管本體與多個所述塞體之間時,所述處理裝置能控制所述第二前後移動裝置作動,而使多個所述塞體與多個所述料管本體相互分離。The plugging machine according to claim 2, wherein the second clamping device includes a plurality of upper clamping members and a plurality of lower clamping members, each of the upper clamping members includes an upper insertion structure, and each of the upper clamping members includes an upper insertion structure. The lower clamping member includes a lower insertion structure; the processing device can control a plurality of the upper clamping members and a plurality of the lower clamping members to approach each other, so that the plurality of the upper insertion structures and the plurality of the lower clamping members can be controlled. The lower insertion structures are respectively inserted between the plurality of the material pipe bodies and the plurality of the plug bodies arranged on the carrier; the plurality of the upper insertion structures and the plurality of the lower insertion structures are located in the plurality of When between the material tube body and the plurality of the plug bodies, the processing device can control the movement of the second forward and backward moving device, so that the plurality of the plug bodies and the plurality of the material tube bodies are separated from each other. 如請求項5所述的拔塞機台,其中,各個所述上插入結構具有至少兩個導引斜面及一尖端部,所述尖端部位於兩個所述導引斜面之間,各個所述下插入結構具有至少兩個導引斜面及一尖端部,各個所述下插入結構的所述尖端部位於所述下插入結構的兩個所述導引斜面之間。The corking machine according to claim 5, wherein each of the upper insertion structures has at least two guide slopes and a tip portion, the tip portion is located between the two guide slopes, and each of the guide slopes The lower insertion structure has at least two guiding slopes and a tip portion, and the tip portion of each lower insertion structure is located between the two guiding slopes of the lower insertion structure. 如請求項5所述的拔塞機台,其中,所述第二夾持裝置還包含一軌道、兩個滑塊、多個上止擋結構及多個下止擋結構,多個所述上夾持構件、多個所述上止擋結構與其中一個所述滑塊相互連接,多個所述下夾持構件、多個所述下止擋結構與另一個所述滑塊相互連接,兩個所述滑塊能受所述處理裝置控制而於所述軌道上向彼此相互靠近或相互遠離的方向移動;各個所述上止擋結構及各個所述下止擋結構相面對地設置,各個所述上止擋結構的一部分能與各個下止擋結構的一部分相互卡合,並據以限制相對應的多個所述料管組件相對於所述第二夾持裝置的活動範圍。The plugging machine according to claim 5, wherein the second clamping device further comprises a rail, two sliding blocks, a plurality of upper stop structures and a plurality of lower stop structures, and a plurality of the upper stop structures The clamping member, the plurality of upper stop structures and one of the sliding blocks are connected to each other, the plurality of the lower clamping members and the plurality of the lower stop structures are connected to the other sliding block, and the two are connected to each other. Each of the sliding blocks can be controlled by the processing device to move on the rails in the direction of approaching or moving away from each other; each of the upper stop structures and each of the lower stop structures are arranged facing each other, A part of each of the upper stop structures can be mutually engaged with a part of each of the lower stop structures, so as to limit the movement range of the corresponding plurality of the material pipe assemblies relative to the second clamping device. 如請求項1所述的拔塞機台,其中,所述拔塞機台還包含至少一感測裝置及一警示裝置,所述感測裝置及所述警示裝置電性連接所述處理裝置,所述感測裝置鄰近於至少其中一個所述夾持裝置設置;當所述夾持裝置夾持設置於所述載台上的多個所述料管組件時,所述處理裝置能控制所述感測裝置感測所述夾持裝置是否正確地夾持多個所述料管組件。The plugging machine according to claim 1, wherein the plugging machine further comprises at least one sensing device and a warning device, the sensing device and the warning device are electrically connected to the processing device, The sensing device is disposed adjacent to at least one of the clamping devices; when the clamping device clamps a plurality of the material tube assemblies disposed on the carrier, the processing device can control the A sensing device senses whether the gripping device properly grips a plurality of the material tube assemblies. 如請求項1所述的拔塞機台,其中,所述拔塞機台還包含至少一感測裝置及一警示裝置,所述感測裝置及所述警示裝置電性連接所述處理裝置,所述感測裝置鄰近於至少其中一個所述夾持裝置設置;當兩個所述固持機構將設置於所述載台的多個所述料管組件的至少一端的多個所述塞體與多個所述料管本體相互分離時,所述處理裝置能控制所述感測裝置感測至少一個所述夾持裝置是否僅夾持多個所述塞體。The plugging machine according to claim 1, wherein the plugging machine further comprises at least one sensing device and a warning device, the sensing device and the warning device are electrically connected to the processing device, The sensing device is disposed adjacent to at least one of the clamping devices; when two of the retaining mechanisms connect a plurality of the plug bodies disposed at at least one end of the plurality of the material pipe assemblies of the carrier with the When a plurality of the material tube bodies are separated from each other, the processing device can control the sensing device to sense whether at least one of the clamping devices only clamps the plurality of the plug bodies. 如請求項1所述的拔塞機台,其中,所述拔塞機台還包含至少一排料裝置,其鄰近於至少一個所述夾持裝置設置,所述排料裝置電性連接所述處理裝置,所述處理裝置能控制所述排料裝置及至少一所述夾持裝置,而使兩個所述夾持裝置使多個所述塞體與多個所述料管本體相互分離時,至少一個所述夾持裝置所夾持的多個所述塞體能被所述排料裝置推抵而落入一指定區域。The plugging machine according to claim 1, wherein the plugging machine further comprises at least one discharge device disposed adjacent to at least one of the clamping devices, and the discharge device is electrically connected to the A processing device, the processing device can control the discharging device and at least one of the clamping devices, and when the two clamping devices separate the plurality of the plug bodies and the plurality of the material pipe bodies from each other , a plurality of the plug bodies held by at least one of the holding devices can be pushed by the discharging device and fall into a designated area. 如請求項10所述的拔塞機台,其中,所述排料裝置包含一本體、多個彈性件及多個推桿,所述本體與所述夾持裝置相連接,各個所述彈性件設置於所述本體中,各個所述推桿的一端與各個所述彈性件相互固定,各個所述推桿的一部分外露於所述本體;所述夾持裝置夾持設置於所述載台的多個所述料管組件時,各個所述推桿的一端是抵靠於其中一個所述料管本體,且各個所述彈性件呈現為受壓狀態;兩個所述夾持裝置使多個所述料管組件的各個所述塞體與各個所述料管本體相互分離時,各個所述彈性件受壓所產生的彈性回復力,將使各個所述推桿推抵被所述夾持裝置夾持的多個所述塞體。The plugging machine according to claim 10, wherein the discharging device comprises a main body, a plurality of elastic parts and a plurality of push rods, the main body is connected with the clamping device, and each of the elastic parts Set in the main body, one end of each of the push rods and each of the elastic members are fixed to each other, and a part of each of the push rods is exposed to the main body; When there are multiple material pipe assemblies, one end of each of the push rods is against one of the material pipe bodies, and each of the elastic members is in a pressurized state; When each of the plug bodies of the material pipe assembly and each of the material pipe bodies are separated from each other, the elastic restoring force generated by the compression of each of the elastic members will push each of the push rods against the clamped A plurality of the plug bodies held by the device. 一種整料設備,其包含如請求項1至11中任一項所述的拔塞機台及一整料機台,所述整料機台用以使多個所述料管組件彼此相互並排地設置,且使相互並排地設置的多個所述料管本體所分別具有的一凹槽朝向同一方向,所述拔塞機台用以將通過所述整料機台後而並排地設置的多個所述料管組件所分別包含的至少一個所述塞體拔離相對應的所述料管本體。A monolithic equipment, comprising the plugging machine according to any one of claims 1 to 11 and a monolithic machine, the monolithic machine is used to make a plurality of the material tube assemblies side by side with each other and make a groove respectively possessed by a plurality of the material pipe bodies arranged side by side face the same direction, and the plugging machine is used for At least one of the plug bodies respectively included in the plurality of the material pipe assemblies is pulled out from the corresponding material pipe body. 一種測試系統,其包含: 一整料設備,其包含如請求項1至11中任一項所述的拔塞機台及一整料機台,所述整料機台用以使多個所述料管組件彼此相互並排地設置,且使相互並排地設置的多個所述料管本體所分別具有的一凹槽朝向同一方向,所述拔塞機台用以將通過所述整料機台後而並排地設置的多個所述料管組件所分別包含的至少一個所述塞體拔離相對應的所述料管本體; 一交換設備,其鄰近於所述整料設備設置,所述交換設備用以將通過多個所述拔塞機台的各個所述料管本體內所容置的多個晶片移載至一金屬料管本體中; 一測試設備,其鄰近於所述交換設備設置,所述測試設備用以對設置於各個所述金屬料管本體中的多個所述晶片進行一測試。 A test system comprising: A monolithic equipment, comprising the plugging machine according to any one of claims 1 to 11 and a monolithic machine, the monolithic machine is used to make a plurality of the material tube assemblies side by side with each other and make a groove respectively possessed by a plurality of the material pipe bodies arranged side by side face the same direction, and the plugging machine is used for At least one of the plug bodies respectively included in the plurality of the material pipe assemblies is pulled out of the corresponding material pipe body; An exchange device is disposed adjacent to the monolithic device, and the exchange device is used for transferring a plurality of wafers accommodated in each of the barrel bodies passing through the plurality of the corkscrew stations to a metal in the tube body; A test device is disposed adjacent to the exchange device, and the test device is used to perform a test on a plurality of the wafers disposed in each of the metal tube bodies.
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