TW202210842A - Probe assembly - Google Patents

Probe assembly Download PDF

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TW202210842A
TW202210842A TW109131000A TW109131000A TW202210842A TW 202210842 A TW202210842 A TW 202210842A TW 109131000 A TW109131000 A TW 109131000A TW 109131000 A TW109131000 A TW 109131000A TW 202210842 A TW202210842 A TW 202210842A
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Taiwan
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blank area
ground layer
head section
probe assembly
disposed
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TW109131000A
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Chinese (zh)
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TWI739592B (en
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謝明翔
周嘉南
魏豪
劉佳容
余佳安
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旺矽科技股份有限公司
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Priority to TW109131000A priority Critical patent/TWI739592B/en
Priority to CN202110966250.0A priority patent/CN114236198B/en
Priority to US17/469,412 priority patent/US11543430B2/en
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Publication of TWI739592B publication Critical patent/TWI739592B/en
Publication of TW202210842A publication Critical patent/TW202210842A/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06722Spring-loaded
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755Material aspects
    • G01R1/06761Material aspects related to layers

Abstract

A probe assembly adapted to test high speed signal transmission lines of printed circuit boards. The probe assembly includes two pogo-pins for providing high-frequency differential test signals, and there is no metal layer (grounding layer) at both sides of the pogo-pins. Experiments have demonstrated that when two pogo-pins are subjected to test the DUT, the test signal will be coupled to the metal layers at both sides of the pogo-pins to induce a radiation resonance, resulting in an energy loss on a specific frequency band, which in turn reduces the effective bandwidth of the probe assembly. In the present invention, the metal layer on both sides of the pogo-pins of the probe assembly of the present invention is appropriately reduced, so that the aforementioned radiation resonance phenomenon can be eliminated.

Description

探針組件Probe Assembly

本發明是關於一種探針組件,特別是一種應用於高速差動訊號測試之探針組件。The present invention relates to a probe assembly, in particular to a probe assembly used for high-speed differential signal testing.

傳統差動訊號量測的探針結構係將多根探針設置在印刷電路板上,其探針排列型式分別為GSS、SSG、SGS、GSSG和GSGSG,其中G代表接地探針,S代表訊號探針。隨著印刷電路板的走線布局設計愈來愈緊湊與多樣化,未來或有可能會發生待測物之測試接點沒有包含接地點的態樣,導致上述包含有接地探針之探針結構均無法使用。換言之,先前技術並不存在以SS架構為基礎的探針設計方案。The probe structure of traditional differential signal measurement is to set multiple probes on the printed circuit board. The probes are arranged in the form of GSS, SSG, SGS, GSSG and GSGSG, where G represents the ground probe and S represents the signal probe. As the layout design of printed circuit boards becomes more and more compact and diverse, it may happen in the future that the test contacts of the DUT do not include ground points, resulting in the above-mentioned probe structure including ground probes are not available. In other words, there is no probe design scheme based on the SS architecture in the prior art.

有鑑於此,本發明提出一種探針組件,其包含介電層、第一訊號線路、第二訊號線路、第一彈簧針、第二彈簧針、第一上接地層、第二上接地層以及下接地層。In view of this, the present invention provides a probe assembly comprising a dielectric layer, a first signal line, a second signal line, a first pogo pin, a second pogo pin, a first upper ground layer, a second upper ground layer, and lower ground plane.

介電層包含上表面、下表面、第一側面、第二側面與第三側面,第一側面與第二側面彼此相對,第三側面位於第一側面與第二側面之間。介電層之上表面包含第一上空白區、第二上空白區、第一上接地區與第二上接地區,且介電層之下表面包含第一下空白區與第二下空白區。第一訊號線路設置於介電層之上表面,第一訊號線路包含第一頭部區段與第一尾部區段,第一頭部區段之一端連接於第一尾部區段,第一頭部區段之另一端指向第三側面。第一上空白區與第一下空白區位於第一頭部區段與第一側面之間。第一上接地區位於第一尾部區段與第一側面之間。第二訊號線路,設置於介電層之上表面且與第一訊號線路相間隔。第二訊號線路包含第二頭部區段與第二尾部區段,第二頭部區段之一端連接於第二尾部區段,第二頭部區段之另一端指向第三側面。第二上空白區與第二下空白區位於第二頭部區段與第二側面之間。第二上接地區位於第二尾部區段與第二側面之間。第一彈簧針設置於第一頭部區段。第二彈簧針設置於第二頭部區段。第一上接地層設置於第一上接地區,第二上接地層設置於第二上接地區,下接地層則是設置於介電層之下表面但不通過第一下空白區與第二下空白區。The dielectric layer includes an upper surface, a lower surface, a first side surface, a second side surface and a third side surface, the first side surface and the second side surface are opposite to each other, and the third side surface is located between the first side surface and the second side surface. The upper surface of the dielectric layer includes a first upper blank area, a second upper blank area, a first upper connection area and a second upper connection area, and the lower surface of the dielectric layer includes a first lower blank area and a second lower blank area . The first signal line is disposed on the upper surface of the dielectric layer, the first signal line includes a first header section and a first tail section, one end of the first header section is connected to the first tail section, and the first header section The other end of the section points to the third side. The first upper blank area and the first lower blank area are located between the first header section and the first side surface. The first upper ground region is located between the first tail section and the first side. The second signal line is arranged on the upper surface of the dielectric layer and is spaced apart from the first signal line. The second signal line includes a second head section and a second tail section, one end of the second head section is connected to the second tail section, and the other end of the second head section points to the third side surface. The second upper blank area and the second lower blank area are located between the second head section and the second side surface. The second upper ground region is located between the second tail section and the second side. The first pogo pin is arranged on the first head section. The second pogo pin is arranged on the second head section. The first upper ground layer is arranged on the first upper ground area, the second upper ground layer is arranged on the second upper ground area, and the lower ground layer is arranged on the lower surface of the dielectric layer but does not pass through the first lower blank area and the second upper ground layer. blank space below.

本發明還提出一種探針組件,包含介電層、第一訊號線路、第二訊號線路、第一彈簧針、第二彈簧針、上接地層以及下接地層。介電層包含本體部分與凸出部分,其中凸出部分係自本體部分之一側面沿一第一方向朝遠離所述側面之方向凸出。第一訊號線路設置於介電層之上表面,第一訊號線路包含第一頭部區段與第一尾部區段,第一頭部區段設置於凸出部分,第一尾部區段設置於本體部分,第一頭部區段之一端連接於第一尾部區段,第一頭部區段之另一端指向凸出部分之一端面。第二訊號線路設置於介電層之上表面且與第一訊號線路相間隔。第二訊號線路包含第二頭部區段與第二尾部區段,其中第二頭部區段設置於介電層之凸出部分,第二尾部區段設置於介電層之本體部分。第二頭部區段之一端連接於第二尾部區段,另一端則指向凸出部分之端面。第一彈簧針設置於第一頭部區段。第二彈簧針設置於第二頭部區段。上接地層設置於介電層之本體部分之上表面,下接地層則設置於介電層之本體部分之下表面以及凸出部分之下表面。The present invention also provides a probe assembly including a dielectric layer, a first signal line, a second signal line, a first pogo pin, a second pogo pin, an upper ground layer and a lower ground layer. The dielectric layer includes a body portion and a protruding portion, wherein the protruding portion protrudes from a side surface of the body portion along a first direction toward a direction away from the side surface. The first signal line is arranged on the upper surface of the dielectric layer, the first signal line includes a first head section and a first tail section, the first head section is arranged on the protruding part, and the first tail section is arranged on the In the body part, one end of the first head section is connected to the first tail section, and the other end of the first head section points to an end surface of the protruding part. The second signal line is disposed on the upper surface of the dielectric layer and is spaced apart from the first signal line. The second signal line includes a second head section and a second tail section, wherein the second head section is disposed on the protruding portion of the dielectric layer, and the second tail section is disposed on the body portion of the dielectric layer. One end of the second head section is connected to the second tail section, and the other end points to the end face of the protruding part. The first pogo pin is arranged on the first head section. The second pogo pin is arranged on the second head section. The upper ground layer is arranged on the upper surface of the body portion of the dielectric layer, and the lower ground layer is arranged on the lower surface of the body portion of the dielectric layer and the lower surface of the protruding portion.

本發明之其中一特點在於沒有包含接地探針,因而可以適用於測試接點不具接地點之待測裝置。本發明之另一特點在於彈簧針兩側的接地層(金屬層)經過縮減,因此在測試過程中,測試訊號不會耦合到兩側的接地層而產生輻射共振使得探針組件之有效頻寬下降。One of the features of the present invention is that it does not include grounding probes, so it can be applied to the device under test whose test contacts do not have a grounding point. Another feature of the present invention is that the ground layers (metal layers) on both sides of the pogo pin are reduced, so during the testing process, the test signal will not be coupled to the ground layers on both sides to generate radiation resonance, which increases the effective bandwidth of the probe assembly decline.

在本案說明書與申請專利範圍中,「上」或「下」僅是用來說明其在圖式中所呈現的方位,並非限制其實際位向。In the description of the present application and the scope of the patent application, "up" or "down" is only used to describe the orientation shown in the drawings, and does not limit the actual orientation.

圖式中各元件的相對大小、厚薄僅為例示,並非限制各元件的實際相對尺寸關係。The relative size and thickness of each element in the drawings are only examples, and do not limit the actual relative size relationship of each element.

參照圖1與圖2,分別為本發明之第一實施例之立體示意圖(一)與立體示意圖(二),其繪示出一探針組件100。探針組件100包含介電層11、第一訊號線路12、第二訊號線路13、第一彈簧針123、第二彈簧針133、第一上接地層141、第二上接地層142以及下接地層16。探針組件100可以適用於對印刷電路板的高速訊號傳輸線進行差動訊號測試,尤其特別適用於測試接點不具有接地點的印刷電路板。Referring to FIG. 1 and FIG. 2 , there are respectively a three-dimensional schematic diagram (1) and a three-dimensional schematic diagram (2) of the first embodiment of the present invention, which illustrate a probe assembly 100 . The probe assembly 100 includes a dielectric layer 11 , a first signal line 12 , a second signal line 13 , a first pogo pin 123 , a second pogo pin 133 , a first upper ground layer 141 , a second upper ground layer 142 and a lower connection Formation 16. The probe assembly 100 can be suitable for differential signal testing of high-speed signal transmission lines of printed circuit boards, and is especially suitable for printed circuit boards whose test contacts do not have a ground point.

介電層11包含上表面111、下表面112、第一側面113、第二側面114與第三側面115,第一側面113與第二側面114彼此相對,第三側面115位於第一側面113與第二側面114之間。介電層11之上表面111包含第一上空白區111A、第二上空白區111B、第一上接地區111G1與第二上接地區111G2,且介電層11之下表面112包含第一下空白區112A與第二下空白區112B。The dielectric layer 11 includes an upper surface 111 , a lower surface 112 , a first side 113 , a second side 114 and a third side 115 . The first side 113 and the second side 114 are opposite to each other, and the third side 115 is located between the first side 113 and the third side 115 . between the second side surfaces 114 . The upper surface 111 of the dielectric layer 11 includes a first upper blank area 111A, a second upper blank area 111B, a first upper connection area 111G1 and a second upper connection area 111G2, and the lower surface 112 of the dielectric layer 11 includes a first lower area The blank area 112A and the second lower blank area 112B.

第一訊號線路12設置於介電層11之上表面111,其包含第一頭部區段121與第一尾部區段122。第一頭部區段121之一端連接於第一尾部區段122,另一端則指向第三側面115。第一上空白區111A以及第一下空白區112A位於第一頭部區段121與第一側面113之間。進一步來說,第一下空白區112A設置於下表面112,且對應上表面111的第一上空白區111A位置,即第一下空白區112A設置於下表面112,且對應在上表面111的第一頭部區段121與第一側面113之間的部位。第一上接地區111G1位於第一尾部區段122與介電層11之第一側面113之間,且第一上接地層141係設置於第一上接地區111G1。The first signal line 12 is disposed on the upper surface 111 of the dielectric layer 11 , and includes a first head section 121 and a first tail section 122 . One end of the first head section 121 is connected to the first tail section 122 , and the other end is directed to the third side surface 115 . The first upper blank area 111A and the first lower blank area 112A are located between the first header section 121 and the first side surface 113 . Further, the first lower blank area 112A is arranged on the lower surface 112 and corresponds to the position of the first upper blank area 111A of the upper surface 111 , that is, the first lower blank area 112A is arranged on the lower surface 112 and corresponds to the position of the first upper blank area 111A of the upper surface 111 . The area between the first head section 121 and the first side surface 113 . The first upper ground region 111G1 is located between the first tail section 122 and the first side surface 113 of the dielectric layer 11 , and the first upper ground layer 141 is disposed on the first upper ground region 111G1 .

第二訊號線路13設置於介電層11之上表面111且與第一訊號線路12相間隔。第二訊號線路13包含第二頭部區段131與第二尾部區段132,其中第二頭部區段131之一端連接於第二尾部區段132,第二頭部區段131之另一端則指向第三側面115。第二上空白區111B以及第二下空白區112B位於第二頭部區段131與第二側面114之間。進一步來說,第二下空白區112B設置於下表面112,且對應上表面111的第二上空白區111B位置,即第二下空白區112B設置於下表面112,且對應在上表面111的第二頭部區段131與第二側面114之間的部位。第二上接地區111G2位於第二尾部區段132與第二側面114之間,且第二上接地層142係設置於第二上接地區111G2。The second signal line 13 is disposed on the upper surface 111 of the dielectric layer 11 and is spaced apart from the first signal line 12 . The second signal line 13 includes a second head section 131 and a second tail section 132 , wherein one end of the second head section 131 is connected to the second tail section 132 and the other end of the second head section 131 Then it points to the third side surface 115 . The second upper blank area 111B and the second lower blank area 112B are located between the second head section 131 and the second side surface 114 . Further, the second lower blank area 112B is disposed on the lower surface 112 and corresponds to the position of the second upper blank area 111B of the upper surface 111 , that is, the second lower blank area 112B is disposed on the lower surface 112 and corresponds to the position of the second upper blank area 111B on the upper surface 111 . The area between the second head section 131 and the second side surface 114 . The second upper ground region 111G2 is located between the second tail section 132 and the second side surface 114, and the second upper ground layer 142 is disposed on the second upper ground region 111G2.

第一彈簧針123係設置於第一訊號線路12之第一頭部區段121。在部分實施例中,第一彈簧針123係透過焊錫焊接的方式設置於第一訊號線路12之第一頭部區段121上。第一彈簧針123包含一針身部123B與一伸縮部123T,伸縮部123T位於針身部123B的一端,且伸縮部123T於自由狀態下係凸出介電層11之第三側面115。第二彈簧針133則是設置於第二訊號線路13之第二頭部區段131。在部分實施例中,第二彈簧針133係透過焊錫焊接的方式設置於第二訊號線路13之第二頭部區段131上。第二彈簧針133包含一針身部133B與一伸縮部133T,伸縮部133T位於針身部133B的一端,且伸縮部133T於自由狀態下係凸出介電層11之第三側面115。在執行測試的過程中時,第一彈簧針123之伸縮部123T與第二彈簧針133之伸縮部133T係分別接觸待測裝置的二個差動訊號測試接點,藉此將差動測試訊號傳送至待測裝置而對待測裝置進行測試。在部分實施例中,伸縮部123T、133T於自由狀態下係凸出介電層11之第三側面115,而伸縮部123T位於針身部123B的一端及伸縮部133T位於針身部133B的設置位置,可以與介電層11之第三側面115切齊,或者設置於介電層11之上表面111上而未與第三側面115切齊,或者超過第三側面115而凸出第三側面115,並不受限制。也就是說,伸縮部123T位於針身部123B的一端及伸縮部133T位於針身部133B的設置位置與第三側面115的相對位置,可以為針身部123B、133B的一端切齊第三側面115,或者在第三側面115朝向或遠離介電層11之上表面111的一側,並沒有特別的限制。The first pogo pin 123 is disposed on the first head section 121 of the first signal line 12 . In some embodiments, the first pogo pin 123 is disposed on the first header section 121 of the first signal line 12 by soldering. The first pogo pin 123 includes a body portion 123B and a telescopic portion 123T. The telescopic portion 123T is located at one end of the body portion 123B, and the telescopic portion 123T protrudes from the third side surface 115 of the dielectric layer 11 in a free state. The second pogo pin 133 is disposed on the second head section 131 of the second signal line 13 . In some embodiments, the second pogo pin 133 is disposed on the second head section 131 of the second signal line 13 by soldering. The second pogo pin 133 includes a body portion 133B and a telescopic portion 133T. The telescopic portion 133T is located at one end of the body portion 133B, and the telescopic portion 133T protrudes from the third side surface 115 of the dielectric layer 11 in a free state. During the testing process, the retractable portion 123T of the first pogo pin 123 and the retractable portion 133T of the second pogo pin 133 are in contact with the two differential signal test contacts of the device under test respectively, so as to transmit the differential test signal It is transmitted to the device under test and the device under test is tested. In some embodiments, the retractable parts 123T and 133T protrude from the third side surface 115 of the dielectric layer 11 in the free state, and the retractable part 123T is located at one end of the needle body part 123B and the retractable part 133T is located at the needle body part 133B. The position can be aligned with the third side 115 of the dielectric layer 11 , or disposed on the upper surface 111 of the dielectric layer 11 but not aligned with the third side 115 , or beyond the third side 115 and protruding from the third side 115, and is not limited. That is to say, the telescopic portion 123T is located at one end of the needle body portion 123B and the telescopic portion 133T is located at the relative position of the needle body portion 133B and the third side surface 115, and one end of the needle body portions 123B and 133B may be aligned with the third side surface. 115 , or the side of the third side 115 facing or away from the upper surface 111 of the dielectric layer 11 , and there is no particular limitation.

下接地層16係設置於介電層11之下表面112,且會覆蓋下表面112之第一下空白區112A與第二下空白區112B以外的區域。在此需特別說明,下接地層16會覆蓋第一彈簧針123之針身部123B與第二彈簧針133之針身部133B的下方,也就是會覆蓋第一下空白區112A與第二下空白區112B之間的部分。如此一來,整個第一訊號線路12與第二訊號線路13的阻抗匹配可以延伸到幾乎與待測裝置相接觸之處。The lower ground layer 16 is disposed on the lower surface 112 of the dielectric layer 11 and covers the area other than the first lower blank area 112A and the second lower blank area 112B of the lower surface 112 . It should be noted here that the lower ground layer 16 will cover the bottom of the needle body 123B of the first pogo pin 123 and the needle body 133B of the second pogo pin 133 , that is, it will cover the first lower blank area 112A and the second lower blank area 112A. The portion between the blank areas 112B. In this way, the impedance matching of the entire first signal line 12 and the second signal line 13 can be extended to almost contact with the device under test.

在本實施例中,第一上接地層141、第二上接地層142以及下接地層16均沒有覆蓋到第一彈簧針123之針身部123B以及第二彈簧針133針身部133B沿其長度方向的二側的部分,因此當使用本實施例之探針組件100對印刷電路板進行差動訊號測試時,測試訊號不會耦合到第一彈簧針123以及第二彈簧針133兩側的接地層,有效避免輻射共振的產生。In this embodiment, the first upper ground layer 141 , the second upper ground layer 142 and the lower ground layer 16 do not cover the needle body portion 123B of the first pogo pin 123 and the needle body portion 133B of the second pogo pin 133 along it. The parts on the two sides in the length direction, so when the probe assembly 100 of this embodiment is used to test the differential signal of the printed circuit board, the test signal will not be coupled to the two sides of the first pogo pin 123 and the second pogo pin 133 The ground plane can effectively avoid the generation of radiation resonance.

在部分實施例中,第一上接地層141、第二上接地層142以及下接地層16係共地。在部分實施例中,介電層11之上表面111更包含第三上接地區111G3,其位於第一尾部區段122與第二尾部區段132之間。探針組件100更包含第三上接地層143,其設置於第三上接地區111G3,且第一上接地層141、第二上接地層142、第三上接地層143以及下接地層16係共地。In some embodiments, the first upper ground layer 141 , the second upper ground layer 142 and the lower ground layer 16 are grounded in common. In some embodiments, the upper surface 111 of the dielectric layer 11 further includes a third upper ground region 111G3 located between the first tail section 122 and the second tail section 132 . The probe assembly 100 further includes a third upper ground layer 143, which is disposed in the third upper ground region 111G3, and the first upper ground layer 141, the second upper ground layer 142, the third upper ground layer 143, and the lower ground layer 16 are connected to each other. common ground.

在部分實施例中,介電層11係設置有複數導電通孔119,其中至少一導電通孔119電性連接第一上接地層141與下接地層16,至少一導電通孔119電性連接第二上接地層142與下接地層16,且至少一導電通孔119電性連接第三上接地層143與下接地層16。如此一來第一上接地層141、第二上接地層142、第三上接地層143以及下接地層16即可透過導電通孔119而實現共地。In some embodiments, the dielectric layer 11 is provided with a plurality of conductive vias 119 , wherein at least one conductive via 119 is electrically connected to the first upper ground layer 141 and the lower ground layer 16 , and at least one conductive via 119 is electrically connected The second upper ground layer 142 and the lower ground layer 16 , and at least one conductive via 119 is electrically connected to the third upper ground layer 143 and the lower ground layer 16 . In this way, the first upper ground layer 141 , the second upper ground layer 142 , the third upper ground layer 143 and the lower ground layer 16 can be grounded together through the conductive vias 119 .

在部分實施例中,第一頭部區段121沿第一方向(例如圖中的X軸方向)延伸而具有一長度L1。第一上空白區111A沿第一方向(X軸方向)具有一寬度W1,且第一下空白區112A沿第一方向(X軸方向)具有一寬度W2。在部分實施例中,寬度W1實質上等於寬度W2,且寬度W1與W2實質上等於長度L1。此外,在部分實施例中,第二頭部區段131沿第一方向(X軸方向)延伸而具有一長度L2。第二上空白區111B沿第一方向(X軸方向)具有一寬度W3,且第二下空白區112B沿第一方向(X軸方向)具有一寬度W4。在部分實施例中,寬度W3實質上等於W4,且寬度W3與W4實質上等於長度L2。In some embodiments, the first head section 121 extends along a first direction (eg, the X-axis direction in the figure) and has a length L1 . The first upper blank area 111A has a width W1 along the first direction (X-axis direction), and the first lower blank area 112A has a width W2 along the first direction (X-axis direction). In some embodiments, the width W1 is substantially equal to the width W2, and the widths W1 and W2 are substantially equal to the length L1. In addition, in some embodiments, the second head section 131 extends along the first direction (X-axis direction) to have a length L2. The second upper blank area 111B has a width W3 along the first direction (X-axis direction), and the second lower blank area 112B has a width W4 along the first direction (X-axis direction). In some embodiments, the width W3 is substantially equal to W4, and the widths W3 and W4 are substantially equal to the length L2.

在部分實施例中,第一上空白區111A沿上表面111之法線方向的投影與第一下空白區112A沿下表面112之法線方向的投影完全重合,且第二上空白區111B沿上表面111之法線方向之投影亦與第二下空白區112B沿下表面112之法線方向之投影重合。惟需特別說明,所有加工程序均存在一定程度的加工誤差,第一上空白區111A沿上表面111之法線方向的投影與第一下空白區112A沿下表面112之法線方向的投影之間仍可能存在加工誤差所致的些微差異,對於所屬技術領域中具有通常知識者而言,上述些許差異單純源自加工誤差而非源自設計上的不同,因此仍應視為重合。同理,第二上空白區111B沿上表面111之法線方向之投影與第二下空白區112B沿下表面112之法線方向之投影之間亦然。In some embodiments, the projection of the first upper blank area 111A along the normal direction of the upper surface 111 completely coincides with the projection of the first lower blank area 112A along the normal direction of the lower surface 112 , and the second upper blank area 111B is along the The projection of the normal direction of the upper surface 111 also coincides with the projection of the second lower blank area 112B along the normal direction of the lower surface 112 . It should be noted that all processing procedures have a certain degree of processing error. The projection of the first upper blank area 111A along the normal direction of the upper surface 111 and the projection of the first lower blank area 112A along the normal direction of the lower surface 112 are different. There may still be slight differences caused by machining errors. For those with ordinary knowledge in the technical field, the above-mentioned slight differences are purely due to machining errors rather than design differences, so they should still be regarded as overlapping. Similarly, the same is true between the projection of the second upper blank area 111B along the normal direction of the upper surface 111 and the projection of the second lower blank area 112B along the normal direction of the lower surface 112 .

參照圖3與圖4,分別為本發明之第二實施例之立體示意圖(一)與立體示意圖(二),其繪示出一探針組件200。在本實施例中,第一彈簧針123之針身部123B的長度等於第一頭部區段121沿X軸方向之長度L1,但第一上空白區111A與第一下空白區112A沿X軸方向之寬度W1與寬度W2係小於L1。此外,第二彈簧針133之針身部133B的長度等於第二頭部區段131沿X軸方向之長度L2,但第二上空白區111B與第二下空白區112B沿X軸方向之寬度W3與W4係小於L2。進一步參照圖9至圖11,分別為W1=W2=W3=W4=0 mm、W1=W2=W3=W4=0.5 mm以及W1=W2=W3=W4=0.8 mm時的插入損失相對於測試頻率的曲線圖。如圖9所示,當W1=W2=W3=W4=0 mm時,相當於第一彈簧針123之針身部123B與第二彈簧針133之針身部133B兩側都是接地層,此時在特定頻率附近(圖中所示為15GHz)會因為前述輻射共振的緣故而有能量損失。如圖10所示,當W1=W2= W3=W4=0.5 mm時,第一彈簧針123之針身部123B與第二彈簧針133之針身部133B兩側的接地層減少,輻射共振現象降低,因此特定頻率附近的能量損失大幅減少。再如圖11所示,當W1、W2、W3與W4進一步從0.5mm增加至0.8mm時,第一彈簧針123之針身部123B與第二彈簧針133之針身部133B兩側的接地層更進一步地減少,此時輻射共振的影響已趨近於零,所有測試頻率均未發現明顯的能量損失。同理,第一實施例之探針組件100的第一彈簧針123與第二彈簧針133兩側的接地層相較上述W1=W2=W3=W4=0.8 mm時的態樣更加減少,輻射共振的影響同樣趨近於零,因此第一實施例之探針組件100的插入損失相對於測試頻率的曲線圖也會如圖11所示般在所有測試頻率均不會出現明顯的能量損失。惟需特別說明,本實施例僅需注意第一上空白區111A、第一下空白區112A、第二上空白區111B與第二下空白區112B的寬度W1、W2、W3與W4對於輻射共振的影響,並不需要特別顧及第一彈簧針123之針身部123B與第二彈簧針133之針身部133B的長度。Referring to FIG. 3 and FIG. 4 , which are respectively a schematic perspective view (1) and a schematic perspective view (2) of the second embodiment of the present invention, a probe assembly 200 is shown. In this embodiment, the length of the needle body 123B of the first pogo pin 123 is equal to the length L1 of the first head section 121 along the X-axis direction, but the first upper blank area 111A and the first lower blank area 112A are along the X axis The width W1 and the width W2 in the axial direction are smaller than L1. In addition, the length of the needle body 133B of the second pogo pin 133 is equal to the length L2 of the second head section 131 along the X-axis direction, but the width of the second upper blank area 111B and the second lower blank area 112B along the X-axis direction W3 and W4 are smaller than L2. Referring further to Figures 9 to 11, insertion loss versus test frequency for W1=W2=W3=W4=0 mm, W1=W2=W3=W4=0.5 mm, and W1=W2=W3=W4=0.8 mm, respectively curve graph. As shown in FIG. 9 , when W1=W2=W3=W4=0 mm, it is equivalent to the ground plane on both sides of the needle body 123B of the first pogo pin 123 and the needle body 133B of the second pogo pin 133 . At a certain frequency (15GHz shown in the figure) there is energy loss due to the aforementioned radiative resonance. As shown in FIG. 10 , when W1=W2=W3=W4=0.5 mm, the ground planes on both sides of the needle body 123B of the first pogo pin 123 and the needle body 133B of the second pogo pin 133 decrease, resulting in the phenomenon of radiation resonance. reduced, so the energy loss around a certain frequency is greatly reduced. As shown in FIG. 11, when W1, W2, W3 and W4 are further increased from 0.5mm to 0.8mm, the contacts on both sides of the needle body 123B of the first pogo pin 123 and the needle body 133B of the second pogo pin 133 are The formation was reduced even further, at which point the effect of radiative resonance had approached zero, and no significant energy loss was found at all frequencies tested. In the same way, the ground layers on both sides of the first pogo pin 123 and the second pogo pin 133 of the probe assembly 100 of the first embodiment are more reduced than the above-mentioned state of W1=W2=W3=W4=0.8 mm, and the radiation The influence of resonance is also close to zero, so the graph of the insertion loss of the probe assembly 100 of the first embodiment versus the test frequency will not show significant energy loss at all test frequencies as shown in FIG. 11 . It should be noted that, in this embodiment, only the widths W1, W2, W3 and W4 of the first upper blank area 111A, the first lower blank area 112A, the second upper blank area 111B and the second lower blank area 112B need to be considered for the radiation resonance. It is not necessary to particularly consider the lengths of the needle body portion 123B of the first pogo pin 123 and the needle body portion 133B of the second pogo pin 133 .

在此需特別說明,上述實施例中W1=W2=W3=W4僅為一特例,W1、W2、W3與W4彼此可以不相同,只要滿足W1≧0.8 mm、W2≧0.8 mm、W3≧0.8 mm以及W4≧0.8 mm即可達到避免輻射共振的功效。It should be noted here that W1=W2=W3=W4 in the above embodiment is only a special case, W1, W2, W3 and W4 can be different from each other, as long as W1≧0.8 mm, W2≧0.8 mm, W3≧0.8 mm And W4≧0.8 mm can achieve the effect of avoiding radiation resonance.

參照圖5與圖6,分別為本發明之第三實施例之立體示意圖(一)與立體示意圖(二),其繪示出一探針組件300。探針組件300包含介電層21、第一訊號線路22、第二訊號線路23、第一彈簧針223、第二彈簧針233、上接地層24以及下接地層26。探針組件300同樣可適用於對印刷電路板的高速訊號傳輸線進行差動訊號測試,尤其特別適用於測試接點不具有接地點的印刷電路板。Referring to FIG. 5 and FIG. 6 , which are respectively a three-dimensional schematic diagram (1) and a three-dimensional schematic diagram (2) of the third embodiment of the present invention, which illustrate a probe assembly 300 . The probe assembly 300 includes a dielectric layer 21 , a first signal line 22 , a second signal line 23 , a first pogo pin 223 , a second pogo pin 233 , an upper ground layer 24 and a lower ground layer 26 . The probe assembly 300 is also suitable for performing differential signal testing on high-speed signal transmission lines of a printed circuit board, and is especially suitable for a printed circuit board whose test contacts do not have a ground point.

如圖所示,介電層21包含一上表面211、一下表面212,且介電層21可區分為一本體部分21A與一凸出部分21B。本體部分21A具有一側面215,凸出部分21B係自本體部分21A之側面215沿一第一方向(例如圖中的X軸方向)朝遠離側面215之方向延伸凸出。在部分實施例中,凸出部分21B係自本體部分21A之側面215之中心沿第一方向(X軸方向)朝遠離側面215之方向延伸凸出。As shown in the figure, the dielectric layer 21 includes an upper surface 211 and a lower surface 212 , and the dielectric layer 21 can be divided into a body portion 21A and a protruding portion 21B. The body portion 21A has a side surface 215 , and the protruding portion 21B extends and protrudes from the side surface 215 of the body portion 21A along a first direction (eg, the X-axis direction in the figure) away from the side surface 215 . In some embodiments, the protruding portion 21B extends and protrudes from the center of the side surface 215 of the main body portion 21A along the first direction (X-axis direction) toward the direction away from the side surface 215 .

第一訊號線路22設置於介電層21之上表面211,其中第一訊號線路22包含第一頭部區段221與第一尾部區段222。第一頭部區段221設置於介電層21之凸出部分21B,第一尾部區段222設置於介電層21之本體部分21A。第一頭部區段221之一端連接於第一尾部區段222,另一端則指向凸出部分21B之一端面21B1。The first signal line 22 is disposed on the upper surface 211 of the dielectric layer 21 , wherein the first signal line 22 includes a first head section 221 and a first tail section 222 . The first head section 221 is disposed on the protruding portion 21B of the dielectric layer 21 , and the first tail section 222 is disposed on the body portion 21A of the dielectric layer 21 . One end of the first head section 221 is connected to the first tail section 222, and the other end is directed to an end surface 21B1 of the protruding portion 21B.

第二訊號線路23設置於介電層21之上表面211且與第一訊號線路22相間隔。第二訊號線路23包含第二頭部區段231與第二尾部區段232,其中第二頭部區段231設置於介電層21之凸出部分21B,第二尾部區段232設置於介電層21之本體部分21A。第二頭部區段231之一端連接於第二尾部區段232,其另一端則指向凸出部分21B之端面21B1。The second signal line 23 is disposed on the upper surface 211 of the dielectric layer 21 and is spaced apart from the first signal line 22 . The second signal line 23 includes a second head section 231 and a second tail section 232 , wherein the second head section 231 is disposed on the protruding portion 21B of the dielectric layer 21 , and the second tail section 232 is disposed between the The body portion 21A of the electrical layer 21 is formed. One end of the second head section 231 is connected to the second tail section 232 , and the other end thereof points to the end surface 21B1 of the protruding portion 21B.

第一彈簧針223係設置於第一訊號線路22之第一頭部區段221。第一彈簧針223包含一針身部223B與一伸縮部223T,伸縮部223T位於針身部223B的一端,且伸縮部223T於自由狀態下係凸出介電層21之凸出部分21B之端面21B1。第二彈簧針233係設置於第二訊號線路23之第二頭部區段231。第二彈簧針233之包含一針身部233B與一伸縮部233T,伸縮部233T位於針身部233B的一端,且伸縮部233T於自由狀態下係凸出介電層21之凸出部分21B之端面21B1。The first pogo pin 223 is disposed on the first head section 221 of the first signal line 22 . The first pogo pin 223 includes a needle body portion 223B and a telescopic portion 223T. The telescopic portion 223T is located at one end of the needle body portion 223B, and the telescopic portion 223T protrudes from the end surface of the protruding portion 21B of the dielectric layer 21 in a free state. 21B1. The second pogo pin 233 is disposed on the second head section 231 of the second signal line 23 . The second pogo pin 233 includes a body portion 233B and a telescopic portion 233T, the telescopic portion 233T is located at one end of the body portion 233B, and the telescopic portion 233T protrudes from the protruding portion 21B of the dielectric layer 21 in a free state End face 21B1.

上接地層24設置於介電層21之本體部分21A之上表面,下接地層26則設置於介電層21之本體部分21A之下表面以及凸出部分21B之下表面。在本實施例中,整個第一訊號線路22與第二訊號線路23的阻抗匹配同樣可以延伸到幾乎與待測裝置相接觸之處。The upper ground layer 24 is disposed on the upper surface of the body portion 21A of the dielectric layer 21 , and the lower ground layer 26 is disposed on the lower surface of the body portion 21A and the lower surface of the protruding portion 21B of the dielectric layer 21 . In this embodiment, the impedance matching of the entire first signal line 22 and the second signal line 23 can also extend to almost contact with the device under test.

如圖5所示,探針組件300包含有三個上接地層24,分別位於第一訊號線路22之第一尾部區段222與鄰近第一訊號線路22之介電層21邊緣之間、第一訊號線路22之第一尾部區段222與第二訊號線路23之第二尾部區段232之間、以及位於第二訊號線路23之第二尾部區段232與鄰近第二訊號線路23之介電層21邊緣之間。在部分實施例中,上接地層24與下接地層26共地。在部分實施例中,介電層21更包含至少一導電通孔219,導電通孔219係電性連接上接地層24與下接地層26,如此一來上接地層24以及下接地層26即可透過導電通孔219而實現共地。As shown in FIG. 5 , the probe assembly 300 includes three upper ground layers 24 , which are respectively located between the first tail section 222 of the first signal line 22 and the edge of the dielectric layer 21 adjacent to the first signal line 22 . between the first tail section 222 of the signal line 22 and the second tail section 232 of the second signal line 23 , and between the second tail section 232 of the second signal line 23 and the dielectric adjacent to the second signal line 23 between the edges of layer 21. In some embodiments, the upper ground layer 24 and the lower ground layer 26 share a ground. In some embodiments, the dielectric layer 21 further includes at least one conductive via 219 , and the conductive via 219 is electrically connected to the upper ground layer 24 and the lower ground layer 26 , so that the upper ground layer 24 and the lower ground layer 26 are Common ground can be achieved through conductive vias 219 .

在部分實施例中,第一彈簧針223之針身部223B與第二彈簧針233之針身部233B沿第一方向(X軸方向)分別具有長度L3與L4。上接地層24具有一第一邊緣241與一第二邊緣242,第一邊緣241與第二邊緣242分別位於介電層21之凸出部分21B之兩側且相鄰於介電層21之本體部分21A之側面215。下接地層26具有一第三邊緣261與一第四邊緣262,第三邊緣261與第四邊緣262分別位於介電層21之凸出部分21B之兩側且相鄰於介電層21之本體部分21A之側面215。第一邊緣241與凸出部分21B之端面21B1之間沿第一方向(X軸方向)具有一第一距離D1,第二邊緣242與凸出部分21B之端面21B1之間沿第一方向(X軸方向)具有一第二距離D2,第三邊緣261與凸出部分21B之端面21B1之間沿第一方向(X軸方向)具有一第三距離D3,第四邊緣262與凸出部分21B之端面21B1之間沿第一方向(X軸方向)具有一第四距離D4。其中D1=D2=D3=D4。在部分實施例中,L3=L4=D1=D2=D3=D4。In some embodiments, the body portion 223B of the first pogo pin 223 and the body portion 233B of the second pogo pin 233 have lengths L3 and L4 along the first direction (X-axis direction), respectively. The upper ground layer 24 has a first edge 241 and a second edge 242 . The first edge 241 and the second edge 242 are respectively located on both sides of the protruding portion 21B of the dielectric layer 21 and are adjacent to the body of the dielectric layer 21 . Side 215 of portion 21A. The lower ground layer 26 has a third edge 261 and a fourth edge 262 . The third edge 261 and the fourth edge 262 are respectively located on both sides of the protruding portion 21B of the dielectric layer 21 and are adjacent to the body of the dielectric layer 21 . Side 215 of portion 21A. There is a first distance D1 between the first edge 241 and the end surface 21B1 of the protruding portion 21B along the first direction (X-axis direction), and there is a first distance D1 between the second edge 242 and the end surface 21B1 of the protruding portion 21B along the first direction (X-axis direction). axis direction) has a second distance D2, there is a third distance D3 along the first direction (X-axis direction) between the third edge 261 and the end surface 21B1 of the protruding portion 21B, the fourth edge 262 and the protruding portion 21B have a third distance D3. There is a fourth distance D4 between the end surfaces 21B1 along the first direction (X-axis direction). Where D1=D2=D3=D4. In some embodiments, L3=L4=D1=D2=D3=D4.

在部分實施例中,本體部分21A與凸出部分21B係透過對單一片介電層進行機械加工所形成。例如對一矩形的介電層的同一側的兩個角隅進行L形切割。切除兩個角隅後,位於兩切除部分之間的介電層部分即為凸出部分21B,而凸出部分21B以外的介電層部分即為本體部分21A。In some embodiments, the body portion 21A and the protruding portion 21B are formed by machining a single dielectric layer. For example, an L-shaped cut is performed on two corners on the same side of a rectangular dielectric layer. After the two corners are cut off, the portion of the dielectric layer between the two cut portions is the protruding portion 21B, and the portion of the dielectric layer outside the protruding portion 21B is the body portion 21A.

參照圖7與圖8,其分別為本發明之第四實施例之立體示意圖(一)與立體示意圖(二),其繪示出一探針組件400。本實施例與第三實施例的主要差異在於D1、D2、D3與D4均小於第一彈簧針223之針身部223B的長度L3及/或第二彈簧針233之針身部233B的長度L4。參照圖9至圖11,分別為D1=D2=D3=D4= 0 mm、D1=D2=D3=D4= 0.5 mm以及D1=D2=D3=D4= 0.8 mm時的插入損失相對於測試頻率的曲線圖。如圖9所示,當D1=D2=D3=D4= 0 mm時,相當於第一彈簧針223之針身部223B與第二彈簧針233之針身部233B兩側都是接地層,此時在特定頻率附近(圖中所示為15GHz)會因為前述輻射共振的緣故而有能量損失。如圖10所示,當D1=D2=D3=D4= 0.5 mm時,第一彈簧針223之針身部223B與第二彈簧針233之針身部233B兩側的接地層減少,輻射共振現象降低,因此特定頻率附近的能量損失大幅減少。再如圖11所示,當 D1、D2、D3與D4進一步從0.5 mm增加至0.8 mm時,第一彈簧針223之針身部223B與第二彈簧針233之針身部233B兩側的接地層更進一步地減少,此時輻射共振的影響已趨近於零,所有測試頻率均未發現明顯的能量損失。同理,第三實施例之探針組件300的第一彈簧針223之針身部223B與第二彈簧針233之針身部233B兩側的接地層相較上述D1=D2=D3=D4= 0.8 mm時的態樣更加地減少,輻射共振的影響同樣趨近於零,因此第三實施例之探針組件300的插入損失相對於測試頻率的曲線圖也會如圖11所示般在所有測試頻率均不會發現明顯的能量損失。惟需特別說明,本實施例僅需注意D1=D2=D3=D4的大小即可,並不需要特別顧及第一彈簧針223之針身部223B與第二彈簧針233之針身部233B的長度。Referring to FIG. 7 and FIG. 8 , which are respectively a perspective view (1) and a perspective view (2) of the fourth embodiment of the present invention, which illustrate a probe assembly 400 . The main difference between this embodiment and the third embodiment is that D1 , D2 , D3 and D4 are all smaller than the length L3 of the body 223B of the first pogo pin 223 and/or the length L4 of the body 233B of the second pogo pin 233 . Referring to FIGS. 9 to 11 , the insertion loss at the time of D1=D2=D3=D4=0 mm, D1=D2=D3=D4=0.5 mm and D1=D2=D3=D4=0.8 mm with respect to the test frequency Graph. As shown in FIG. 9 , when D1=D2=D3=D4=0 mm, it is equivalent to the ground plane on both sides of the needle body 223B of the first pogo pin 223 and the needle body 233B of the second pogo pin 233 . At a certain frequency (15GHz shown in the figure) there is energy loss due to the aforementioned radiative resonance. As shown in FIG. 10 , when D1=D2=D3=D4= 0.5 mm, the ground planes on both sides of the needle body 223B of the first pogo pin 223 and the needle body 233B of the second pogo pin 233 are reduced, resulting in the phenomenon of radiation resonance. reduced, so the energy loss around a certain frequency is greatly reduced. As shown in FIG. 11, when D1, D2, D3 and D4 are further increased from 0.5 mm to 0.8 mm, the contacts on both sides of the needle body 223B of the first pogo pin 223 and the needle body 233B of the second pogo pin 233 are The formation was reduced even further, at which point the effect of radiative resonance had approached zero, and no significant energy loss was found at all frequencies tested. Similarly, the ground layers on both sides of the needle body 223B of the first pogo pin 223 and the needle body 233B of the second pogo pin 233 of the probe assembly 300 of the third embodiment are compared to the above D1=D2=D3=D4= The shape at 0.8 mm is further reduced, and the influence of radiation resonance also approaches zero. Therefore, the curve of the insertion loss of the probe assembly 300 of the third embodiment versus the test frequency is also shown in FIG. 11. No significant energy loss was found at any test frequency. It should be noted that, in this embodiment, it is only necessary to pay attention to the size of D1=D2=D3=D4, and it is not necessary to pay special attention to the size of the needle body 223B of the first pogo pin 223 and the needle body 233B of the second pogo pin 233. length.

在此需特別說明,上述實施例中D1=D2=D3=D4僅為一特例,D1、D2、D3與D4彼此可以不相同,只要滿足D1≧0.8 mm,D2≧0.8 mm,D3≧0.8 mm以及D4≧0.8 mm即可達到避免輻射共振的功效。此外,介電層21在本體部分21A的側面215到凸出部分21B之端面21B1之間沿第一方向(X軸方向)的距離不限制一定要等於D1、D2、D3與D4。在部分實施例中,側面215到端面21B1的距離可以小於D1、D2、D3與D4,但仍可視為第一邊緣241與第二邊緣242相鄰於介電層21之本體部分21A之側面215,第三邊緣261與第四邊緣262相鄰於介電層21之本體部分21A之側面215。It should be noted here that D1=D2=D3=D4 in the above embodiment is only a special case, D1, D2, D3 and D4 can be different from each other, as long as D1≧0.8 mm, D2≧0.8 mm, D3≧0.8 mm And D4≧0.8 mm can achieve the effect of avoiding radiation resonance. In addition, the distance along the first direction (X-axis direction) of the dielectric layer 21 between the side surface 215 of the body portion 21A and the end surface 21B1 of the protruding portion 21B is not limited to be equal to D1, D2, D3 and D4. In some embodiments, the distance from the side surface 215 to the end surface 21B1 may be smaller than D1 , D2 , D3 and D4 , but it can still be considered that the first edge 241 and the second edge 242 are adjacent to the side surface 215 of the body portion 21A of the dielectric layer 21 , the third edge 261 and the fourth edge 262 are adjacent to the side surface 215 of the body portion 21A of the dielectric layer 21 .

參照圖5與圖7,在部分實施例中,考量加工便利性以及凸出部分21B的機械強度,第一彈簧針223之針身部223B與凸出部分21B的側邊邊緣之間保留一局部區域21B7,第二彈簧針233之針身部233B與凸出部分21B的側邊邊緣之間亦保留一局部區域21B9。在部分實施例中,在加工精度允許兼且機械強度符合實際應用需求的前提下,亦可以不保留局部區域21B7以及局部區域21B9。Referring to FIGS. 5 and 7 , in some embodiments, considering the convenience of processing and the mechanical strength of the protruding portion 21B, a portion is reserved between the needle body 223B of the first pogo pin 223 and the side edge of the protruding portion 21B In the area 21B7, a partial area 21B9 is also reserved between the needle body 233B of the second pogo pin 233 and the side edge of the protruding portion 21B. In some embodiments, the partial area 21B7 and the partial area 21B9 may not be reserved under the premise that the machining accuracy allows and the mechanical strength meets the actual application requirements.

在部分實施例中,亦可以先在一矩形的介電層的兩表面分別形成上接地層與下接地層,然後再將第一訊號線路22、第二訊號線路23、第一彈簧針223與第二彈簧針233形成於介電層的其中一表面,後續只要再對介電層的同一側的兩個角隅進行L形切割而移除該處的介電層部分以及接地層部分,如此便可形成探針組件200。In some embodiments, an upper ground layer and a lower ground layer may be formed on two surfaces of a rectangular dielectric layer, respectively, and then the first signal line 22 , the second signal line 23 , the first pogo pin 223 and the The second pogo pin 233 is formed on one of the surfaces of the dielectric layer. Subsequently, only two corners on the same side of the dielectric layer are L-cut to remove the dielectric layer portion and the ground layer portion, and so on. The probe assembly 200 can be formed.

於此需再次強調,本發明之探針組件為全新設計,也就是沒有包含接地探針,因而可適用於測試接點不具有接地點之待測裝置。此外,本發明用來提供差動訊號之第一彈簧針與第二彈簧針的兩側的接地層(金屬層)經過適當削減,因此在測試過程中,測試訊號不會耦合到兩側的接地層而產生輻射共振。惟需特別說明,只需要適當削減第一彈簧針與第二彈簧針的兩側的接地層(金屬層)即可避免輻射共振的影響,輻射共振與第一彈簧針與第二彈簧針的長度並沒有任何關係。It should be emphasized again here that the probe assembly of the present invention is a brand-new design, that is, it does not include a grounding probe, so it can be applied to the device under test whose test contact does not have a grounding point. In addition, the ground layers (metal layers) on both sides of the first pogo pin and the second pogo pin for providing the differential signal in the present invention are properly cut, so that the test signal will not be coupled to the ground planes on both sides during the testing process. Radiation resonance occurs in the formation. It is only necessary to specify that the ground layer (metal layer) on both sides of the first pogo pin and the second pogo pin needs to be appropriately reduced to avoid the influence of radiation resonance. The radiation resonance is related to the length of the first pogo pin and the second pogo pin. It doesn't matter.

雖然本發明已以實施例揭露如上然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之專利申請範圍所界定者為準。Although the present invention has been disclosed by the above examples, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the invention shall be determined by the scope of the appended patent application.

100、200:探針組件 11:介電層 111:上表面 111A:第一上空白區 111B:第二上空白區 111G1:第一上接地區 111G2:第二上接地區 111G3:第三上接地區 112:下表面 112A:第一下空白區 112B:第二下空白區 113:第一側面 114:第二側面 115:第三側面 119:導電通孔 12:第一訊號線路 121:第一頭部區段 122:第一尾部區段 123:第一彈簧針 123B:針身部 123T:伸縮部 13:第二訊號線路 131:第二頭部區段 132:第二尾部區段 133:第二彈簧針 133B:針身部 133T:伸縮部 141:第一上接地層 142:第二上接地層 143:第三上接地層 16:下接地層 300、400:探針組件 21:介電層 21A:本體部分 21B:凸出部分 21B1:端面 21B7:局部區域 21B9:局部區域 211:上表面 212:下表面 215:側面 219:導電通孔 22:第一訊號線路 221:第一頭部區段 222:第一尾部區段 223:第一彈簧針 223B:針身部 223T:伸縮部 23:第二訊號線路 231:第二頭部區段 232:第二尾部區段 233:第二彈簧針 233B:針身部 233T:伸縮部 24:上接地層 241:第一邊緣 242:第二邊緣 26:下接地層 261:第三邊緣 262:第四邊緣 D1:第一距離 D2:第二距離 D3:第三距離 D4:第四距離 L1:長度 L2:長度 L3:長度 L4:長度 W1:寬度 W2:寬度 W3:寬度 W4:寬度100, 200: Probe assembly 11: Dielectric layer 111: Upper surface 111A: First upper blank area 111B: Second upper blank area 111G1: The first touch-up area 111G2: Second touch-up area 111G3: The third pick-up area 112: Lower surface 112A: First lower blank area 112B: Second lower blank area 113: The first side 114: Second side 115: Third side 119: Conductive vias 12: The first signal line 121: first header section 122: First tail section 123: First pogo pin 123B: Needle body 123T: Telescopic part 13: The second signal line 131: Second head section 132: Second tail section 133: Second pogo pin 133B: Needle body 133T: Telescopic part 141: The first upper ground plane 142: Second upper ground plane 143: The third upper ground plane 16: Lower ground plane 300, 400: Probe assembly 21: Dielectric layer 21A: Body part 21B: Protruding part 21B1: End face 21B7: Local area 21B9: Local area 211: Upper surface 212: Lower Surface 215: Side 219: Conductive Vias 22: The first signal line 221: first header segment 222: First tail section 223: First pogo pin 223B: Needle body 223T: Telescopic part 23: The second signal line 231: Second header section 232: Second tail section 233: Second pogo pin 233B: Needle body 233T: Telescopic part 24: Upper ground plane 241: First Edge 242: Second Edge 26: Lower ground plane 261: Third Edge 262: Fourth Edge D1: first distance D2: Second distance D3: The third distance D4: Fourth distance L1: length L2: length L3: length L4: length W1: width W2: width W3: width W4: width

[圖1] 為本發明第一實施例之立體示意圖(一)。 [圖2] 為本發明第一實施例之立體示意圖(二)。 [圖3] 為本發明第二實施例之立體示意圖(一)。 [圖4] 為本發明第二實施例之立體示意圖(二)。 [圖5] 為本發明第三實施例之立體示意圖(一)。 [圖6] 為本發明第三實施例之立體示意圖(二)。 [圖7] 為本發明第四實施例之立體示意圖(一)。 [圖8] 為本發明第四實施例之立體示意圖(二)。 [圖9] 為空白區的寬度W1/W2/W3/W4或各上接地層、下接地層的邊緣與凸出部分之端面的第一距離D1/第二距離D2/第三距離D3/第四距離D4為0 mm時,探針組件之插入損失相對於測試頻率的曲線圖。 [圖10] 為空白區的寬度W1/W2/W3/W4或第一距離D1/第二距離D2/第三距離D3/第四距離D4為0.5 mm時,探針組件之插入損失相對於測試頻率的曲線圖。 [圖11] 為空白區的寬度W1/W2/W3/W4或第一距離D1/第二距離D2/第三距離D3/第四距離D4為0.8 mm時,探針組件之插入損失相對於測試頻率的曲線圖。[FIG. 1] is a three-dimensional schematic diagram (1) of the first embodiment of the present invention. [FIG. 2] is a three-dimensional schematic diagram (2) of the first embodiment of the present invention. [FIG. 3] is a three-dimensional schematic diagram (1) of the second embodiment of the present invention. [FIG. 4] is a perspective view (2) of the second embodiment of the present invention. [FIG. 5] is a three-dimensional schematic diagram (1) of the third embodiment of the present invention. [FIG. 6] is a three-dimensional schematic diagram (2) of the third embodiment of the present invention. [FIG. 7] is a perspective view (1) of the fourth embodiment of the present invention. [FIG. 8] is a perspective view (2) of the fourth embodiment of the present invention. [Fig. 9] is the width W1/W2/W3/W4 of the blank area or the first distance D1/second distance D2/third distance D3/th Graph of the insertion loss of the probe assembly versus the test frequency when the four-distance D4 is 0 mm. [Fig. 10] When the width W1/W2/W3/W4 of the blank area or the first distance D1/second distance D2/third distance D3/fourth distance D4 is 0.5 mm, the insertion loss of the probe assembly is relative to the test Frequency graph. [Fig. 11] When the width W1/W2/W3/W4 of the blank area or the first distance D1/second distance D2/third distance D3/fourth distance D4 is 0.8 mm, the insertion loss of the probe assembly relative to the test Frequency graph.

100:探針組件100: Probe Assembly

11:介電層11: Dielectric layer

111:上表面111: Upper surface

111A:第一上空白區111A: First upper blank area

111B:第二上空白區111B: Second upper blank area

111G1:第一上接地區111G1: The first touch-up area

111G2:第二上接地區111G2: Second touch-up area

111G3:第三上接地區111G3: The third pick-up area

113:第一側面113: The first side

114:第二側面114: Second side

115:第三側面115: Third side

119:導電通孔119: Conductive vias

12:第一訊號線路12: The first signal line

121:第一頭部區段121: first header section

122:第一尾部區段122: First tail section

123:第一彈簧針123: First pogo pin

123B:針身部123B: Needle body

123T:伸縮部123T: Telescopic part

13:第二訊號線路13: The second signal line

131:第二頭部區段131: Second head section

132:第二尾部區段132: Second tail section

133:第二彈簧針133: Second pogo pin

133B:針身部133B: Needle body

133T:伸縮部133T: Telescopic part

141:第一上接地層141: The first upper ground plane

142:第二上接地層142: Second upper ground plane

143:第三上接地層143: The third upper ground plane

L1:長度L1: length

L2:長度L2: length

W1:寬度W1: width

W3:寬度W3: width

Claims (10)

一種探針組件,包含: 一介電層,包含一上表面、一下表面、一第一側面、一第二側面與一第三側面,該第一側面與該第二側面彼此相對,該第三側面位於該第一側面與該第二側面之間,該上表面包含一第一上空白區、一第二上空白區、一第一上接地區與一第二上接地區,且該下表面包含一第一下空白區與一第二下空白區; 一第一訊號線路,設置於該上表面,該第一訊號線路包含一第一頭部區段與一第一尾部區段,該第一頭部區段之一端連接於該第一尾部區段,該第一頭部區段之另一端指向該第三側面,該第一上空白區與該第一下空白區位於該第一頭部區段與該第一側面之間,該第一上接地區位於該第一尾部區段與該第一側面之間; 一第二訊號線路,設置於該上表面且與該第一訊號線路相間隔,該第二訊號線路包含一第二頭部區段與一第二尾部區段,該第二頭部區段之一端連接於該第二尾部區段,該第二頭部區段之另一端指向該第三側面,該第二上空白區與該第二下空白區位於該第二頭部區段與該第二側面之間,該第二上接地區位於該第二尾部區段與該第二側面之間; 一第一彈簧針,設置於該第一頭部區段,該第一彈簧針包含一針身部與一伸縮部; 一第二彈簧針,設置於該第二頭部區段,該第二彈簧針包含一針身部與一伸縮部; 一第一上接地層,設置於該第一上接地區; 一第二上接地層,設置於該第二上接地區;及 一下接地層,設置於該下表面但不通過該第一下空白區與該第二下空白區。A probe assembly comprising: A dielectric layer includes an upper surface, a lower surface, a first side, a second side and a third side, the first side and the second side are opposite to each other, and the third side is located between the first side and the Between the second side surfaces, the upper surface includes a first upper blank area, a second upper blank area, a first upper connection area and a second upper connection area, and the lower surface includes a first lower blank area with a second lower blank area; a first signal line disposed on the upper surface, the first signal line includes a first head section and a first tail section, one end of the first head section is connected to the first tail section , the other end of the first head section points to the third side face, the first upper blank area and the first lower blank area are located between the first head section and the first side face, the first upper blank area a grounding region is located between the first tail section and the first side surface; a second signal line, disposed on the upper surface and spaced from the first signal line, the second signal line includes a second head section and a second tail section, the second head section is One end is connected to the second tail section, the other end of the second head section points to the third side surface, the second upper blank area and the second lower blank area are located on the second head section and the first between the two side surfaces, the second upper ground area is located between the second tail section and the second side surface; a first pogo pin, disposed on the first head section, the first pogo pin includes a body part and a telescopic part; a second pogo pin, disposed on the second head section, the second pogo pin includes a body part and a telescopic part; a first upper ground layer disposed on the first upper ground area; a second upper ground layer disposed on the second upper ground region; and A lower ground layer is disposed on the lower surface but does not pass through the first lower blank area and the second lower blank area. 如請求項1所述之探針組件,其中該第一上接地層、該第二上接地層與該下接地層共地。The probe assembly of claim 1, wherein the first upper ground layer, the second upper ground layer and the lower ground layer share a ground. 如請求項2所述之探針組件,其中該介電層更包含一第三上接地區,位於該第一尾部區段與該第二尾部區段之間,該探針組件更包含一第三上接地層,設置於該第三上接地區,其中該第一上接地層、該第二上接地層、該第三上接地層與該下接地層共地。The probe assembly of claim 2, wherein the dielectric layer further includes a third upper ground region between the first tail section and the second tail section, the probe assembly further includes a first Three upper ground layers are disposed in the third upper ground region, wherein the first upper ground layer, the second upper ground layer, the third upper ground layer and the lower ground layer share the ground. 如請求項3所述之探針組件,其中該介電層更包含複數導電通孔,至少一該導電通孔電性連接該第一上接地層與該下接地層,至少一該導電通孔電性連接該第二上接地層與該下接地層,且至少一該導電通孔電性連接該第三上接地層與該下接地層。The probe assembly according to claim 3, wherein the dielectric layer further comprises a plurality of conductive vias, at least one of the conductive vias electrically connects the first upper ground layer and the lower ground layer, and at least one of the conductive vias The second upper ground layer and the lower ground layer are electrically connected, and at least one of the conductive vias is electrically connected to the third upper ground layer and the lower ground layer. 如請求項1所述之探針組件,其中該第一上空白區沿一第一方向具有一寬度W1,該第一下空白區沿該第一方向具有一寬度W2,該第二上空白區沿該第一方向具有一寬度W3,該第二下空白區沿該第一方向具有一寬度W4,其中W1≧0.8 mm,W2≧0.8 mm,W3≧0.8 mm,且W4≧0.8 mm。The probe assembly of claim 1, wherein the first upper blank area has a width W1 along a first direction, the first lower blank area has a width W2 along the first direction, and the second upper blank area The second lower blank area has a width W4 along the first direction, wherein W1≧0.8 mm, W2≧0.8 mm, W3≧0.8 mm, and W4≧0.8 mm. 如請求項1至5任一項所述之探針組件,其中該第一上空白區沿該上表面之法線方向之投影與該第一下空白區沿該下表面之法線方向之投影重合,且該第二上空白區沿該上表面之法線方向之投影亦與該第二下空白區沿該下表面之法線方向之投影重合。The probe assembly according to any one of claims 1 to 5, wherein the projection of the first upper blank area along the normal direction of the upper surface and the projection of the first lower blank area along the normal direction of the lower surface and the projection of the second upper blank area along the normal direction of the upper surface also coincides with the projection of the second lower blank area along the normal direction of the lower surface. 一種探針組件,包含: 一介電層,包含一本體部分與一凸出部分,該凸出部分自該本體部分之一側面沿一第一方向朝遠離該側面之方向凸出; 一第一訊號線路,設置於該介電層之上表面,該第一訊號線路包含一第一頭部區段與一第一尾部區段,該第一頭部區段設置於該凸出部分,該第一尾部區段設置於該本體部分,該第一頭部區段之一端連接於該第一尾部區段,該第一頭部區段之另一端指向該凸出部分之一端面; 一第二訊號線路,設置於該介電層之上表面且與該第一訊號線路相間隔,該第二訊號線路包含一第二頭部區段與一第二尾部區段,該第二頭部區段設置於該凸出部分,該第二尾部區段設置於該本體部分,該第二頭部區段之一端連接於該第二尾部區段,該第二頭部區段之另一端指向該端面; 一第一彈簧針,設置於該第一頭部區段,該第一彈簧針包含一針身部與一伸縮部; 一第二彈簧針,設置於該第二頭部區段,該第二彈簧針包含一針身部與一伸縮部; 一上接地層,設置於該本體部分之上表面;及 一下接地層,設置於該本體部分之下表面與該凸出部分之下表面。A probe assembly comprising: a dielectric layer including a body portion and a protruding portion, the protruding portion protruding from a side surface of the body portion along a first direction toward a direction away from the side surface; A first signal line is disposed on the upper surface of the dielectric layer, the first signal line includes a first head section and a first tail section, and the first head section is disposed on the protruding portion , the first tail section is arranged on the body part, one end of the first head section is connected to the first tail section, and the other end of the first head section points to an end face of the protruding part; a second signal line, disposed on the upper surface of the dielectric layer and spaced from the first signal line, the second signal line includes a second header section and a second tail section, the second header A section is arranged on the protruding part, the second tail section is arranged on the body part, one end of the second head section is connected to the second tail section, and the other end of the second head section to the end face; a first pogo pin, disposed on the first head section, the first pogo pin includes a body part and a telescopic part; a second pogo pin, disposed on the second head section, the second pogo pin includes a body part and a telescopic part; an upper ground layer disposed on the upper surface of the body portion; and A lower ground layer is disposed on the lower surface of the body portion and the lower surface of the protruding portion. 如請求項7所述之探針組件,其中該上接地層與該下接地層共地。The probe assembly of claim 7, wherein the upper ground layer and the lower ground layer share a ground. 如請求項8所述之探針組件,其中該介電層更包含一導電通孔,該導電通孔電性連接該上接地層與該下接地層。The probe assembly as claimed in claim 8, wherein the dielectric layer further comprises a conductive via electrically connecting the upper ground layer and the lower ground layer. 如請求項7所述之探針組件,其中該上接地層具有一第一邊緣與一第二邊緣,該第一邊緣與該第二邊緣分別位於該凸出部分之兩側且相鄰於該本體部分之側面;該下接地層具有一第三邊緣與一第四邊緣,該第三邊緣與該第四邊緣分別位於該凸出部分之兩側且相鄰於本體部分之側面;該第一邊緣與該端面之間沿該第一方向具有一第一距離D1,該第二邊緣與該端面之間沿該第一方向具有一第二距離D2,該第三邊緣與該端面之間沿該第一方向具有一第三距離D3,該第四邊緣與該端面之間沿該第一方向具有一第四距離D4,其中D1≧0.8 mm,D2≧0.8 mm,D3≧0.8 mm,且D4≧0.8 mm。The probe assembly of claim 7, wherein the upper ground layer has a first edge and a second edge, the first edge and the second edge are respectively located on both sides of the protruding portion and adjacent to the protruding portion the side surface of the body part; the lower ground layer has a third edge and a fourth edge, the third edge and the fourth edge are respectively located on both sides of the protruding part and adjacent to the side surface of the body part; the first edge There is a first distance D1 along the first direction between the edge and the end surface, a second distance D2 along the first direction between the second edge and the end surface, and a second distance D2 between the third edge and the end surface along the first direction The first direction has a third distance D3, and the fourth edge and the end face have a fourth distance D4 along the first direction, wherein D1≧0.8 mm, D2≧0.8 mm, D3≧0.8 mm, and D4≧ 0.8 mm.
TW109131000A 2020-09-09 2020-09-09 Probe assembly TWI739592B (en)

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US20220074970A1 (en) 2022-03-10
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US11543430B2 (en) 2023-01-03

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