TW202210224A - Processing device capable of accurately detecting a depth at which a cutting blade cuts into a workpiece - Google Patents

Abstract

An object of the present invention is to provide a processing device capable of accurately detecting a depth at which a cutting blade cuts into a workpiece. The solution of the present invention is to provide a processing device comprising a setup unit for detecting a tip position of a cutting blade by using the light emitted by a light emitting portion and received by a light-receiving portion; a correction unit for detecting the position of the holding surface and storing the difference between the tip position of the cutting blade detected by the setup unit and the Z direction of the holding surface position as a compensation; and a control unit. When the change amount of the temperature measured by the temperature measuring device has exceeded the threshold value from an arbitrary time point, the control unit detects the position of the holding surface and updates the compensation value by the correction unit, and detects the tip position of the cutting blade by the setup unit again. The processing device further comprises a holding work table having a holding surface for holding the workpiece; a cutting unit using the cutting blade to cut the workpiece held by the holding work table; a Z feed unit for moving the cutting unit in a Z direction perpendicular to the holding surface; a temperature measuring device disposed in the processing device for measuring the temperature; and a camera unit for shooting the workpiece held by the holding work table. The correction unit moves the cutting unit in the Z direction and detects the position of the cutting unit in the Z direction when electrically connected with the holding work table as the height of the holding surface. The correction unit stores the height of the camera unit in the Z direction as the height of the holding surface when the camera unit is focused on the holding surface.

Description

Processing device

The present invention relates to a processing device.

There is known a method of detecting a reference position when the cutting insert contacts the holding surface of the holding table by energizing the cutting insert and the holding table (see, for example, Patent Document 1). In addition, there is known a method in which a light-emitting portion and a light-receiving portion are provided with a width in which the cutting insert penetrates, and the tip position of the cutting insert is detected by the light received by the light-receiving portion, thereby obtaining the cutting insert. Reference position (see, for example, Patent Document 2). prior art literature Patent Literature

Patent Document 1: Japanese Utility Model Registration No. 2597808 Patent Document 2: Japanese Patent No. 4590058

The problem to be solved by the invention

However, in the method of detecting by energization between the cutting insert and the holding table, since the holding table is cut with the cutting insert, there are problems such as the possibility of clogging of the cutting insert, or the use of the light-receiving portion and light emission. Compared with the part method, the detection of the reference position takes time and reduces productivity. Therefore, conventionally, an operation called sensor set up has been performed. When the holding table is replaced, the height of the holding surface is detected by energizing the cutting insert and the holding table, and then the holding surface is energized. The light-receiving part and the light-emitting part detect the position of the front end of the cutting edge of the cutting insert, and detect the positional relationship between the holding surface, the light-emitting part, and the light-receiving part. In addition, as long as the holding table is not replaced again in the subsequent processing, the positional relationship detected by the sensor alignment setting method is fixed, and only the detection by the light-emitting part and the light-receiving part is used for detection. And control the cutting depth of the cutting insert to the workpiece. However, in practice, the relative positional relationship between the positions of the light-emitting portion and the light-receiving portion and the position of the holding surface varies due to temperature fluctuations in the processing apparatus, and the following problems have been associated with this situation. The detection performed by the light-emitting part and the light-receiving part cannot accurately detect and control the depth of the cutting insert cutting into the workpiece.

The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a machining apparatus capable of accurately detecting the depth of the cutting insert into a workpiece. means of solving problems

In order to solve the above-mentioned problems and achieve the object, the processing apparatus of the present invention includes: a holding table having a holding surface for holding a workpiece; a cutting unit for cutting the workpiece held on the holding table with a cutting blade; A Z feeding unit moves the cutting unit in the Z direction perpendicular to the holding surface; a setting unit has a light-emitting part and a light-receiving part provided to leave a width for the cutting insert to penetrate, and the light-receiving part is provided by the light-receiving part. The received light detects the position of the front end of the cutting insert; the correction unit detects the position of the Z direction of the holding surface, and calculates the difference between the front end position of the cutting insert detected by the setting unit and the Z direction of the holding surface The memory is the correction value; the temperature measuring device is installed in the processing device and measures the temperature; the photographing unit is used to photograph the workpiece that has been held on the holding table; and the control unit is driven by each unit, When the amount of fluctuation of the temperature measured by the temperature measuring device has exceeded a threshold value from an arbitrary point in time, the control unit performs again the process of detecting the height of the holding surface by the correction unit and performing the correction value. The operation of updating, and the detection of the front end position of the cutting insert by the setting unit.

The correction unit may move the cutting unit in the Z direction, and detect the position of the cutting unit in the Z direction when electrical continuity with the holding table is performed, and detect it as the height of the holding surface.

The correction unit may also memorize the height of the photographing unit in the Z direction when the focus of the photographing unit has been focused on the holding surface as the height of the holding surface. Invention effect

The present invention can accurately detect the depth of the cutting insert cutting into the workpiece.

Form for carrying out the invention

The form (embodiment) for implementing this invention is demonstrated in detail, referring drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include components that can be easily assumed by those skilled in the art, and components that are substantially the same. In addition, the configurations described below can be appropriately combined. In addition, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[Embodiment 1] The processing apparatus 1 of Embodiment 1 of this invention is demonstrated based on drawing. FIG. 1 is a perspective view showing a configuration example of a processing apparatus 1 according to the first embodiment. FIG. 2 is a cross-sectional view showing a configuration example of the setting unit 40 of FIG. 1 . FIG. 3 is a cross-sectional view showing a configuration example of the correction unit 50 of FIG. 1 . FIG. 4 is a cross-sectional view showing an example of the positional relationship between the holding table 10 , the cutting unit 20 , and the setting unit 40 of FIG. 1 .

As shown in FIG. 1 , the processing apparatus 1 includes a holding table 10 , a cutting unit 20 , a Z feed unit 30 , a setting unit 40 , a correction unit 50 , temperature measuring devices 61 , 62 , and 63 , an imaging unit 70 , and a control unit 80 .

The workpiece 100 , which is the object to be processed by the processing apparatus 1 of the first embodiment, is, for example, a disk-shaped semiconductor wafer or an optical device wafer using silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like as a base material. The workpiece 100 is formed with wafer-sized devices in a region defined by a plurality of predetermined dividing lines formed in a grid shape on the flat front surface. In Embodiment 1, as shown in FIG. 1 , the adhesive tape 101 is attached to the back side of the front side and the back side of the workpiece 100, and the annular frame 102 is attached to the outer edge of the adhesive tape 101. The present invention is not limited to this. Moreover, in this invention, the to-be-processed object 100 may be a rectangular package board|substrate, a ceramic board, a glass board, etc. which have a plurality of devices sealed with resin.

The holding table 10 includes a disk-shaped frame body 11 having a recessed portion formed therein, and a disk-shaped suction portion 12 fitted into the recessed portion. The frame body 11 is formed of a material having conductivity, and in Embodiment 1, it is formed of stainless steel. The suction part 12 holding the table 10 is formed of porous ceramics having a plurality of porous holes or the like, and is connected to a vacuum suction source (not shown) through a vacuum suction path (not shown). As shown in FIG. 1, the upper surface of the adsorption|suction part 12 which holds the table 10 is the holding surface 14 which holds the workpiece 100 placed. The holding surface 14 is arranged on the same plane as the upper surface 13 of the frame body 11 holding the table 10 , and is formed parallel to the XY plane, which is a horizontal plane. The holding table 10 is freely movable in the X direction, which is one direction of the horizontal direction, by an X feeding unit (not shown), and is revolved by a rotation driving source (not shown) in the vertical direction and is relative to the holding table 10 . The axis parallel to the vertical Z direction of the surface 14 is rotatably provided.

As shown in FIG. 1 , the cutting unit 20 includes a cutting insert 21 and a main shaft 22 . The cutting insert 21 is installed at the front end of the main shaft 22, and is subjected to a rotational motion around an axis that is the other direction of the horizontal direction and is parallel to the Y-axis direction orthogonal to the X-axis direction. The workpiece 100 of the table 10 is cut. With respect to the workpiece 100 held by the holding table 10 , the cutting unit 20 can be movably installed in the Y direction by the Y feed unit, and can be freely moved in the Z direction by the Z feed unit 30 . set up.

The cutting insert 21 has an annular cutting edge, and the cutting edge is formed of abrasive grains such as diamond or CBN (Cubic Boron Nitride), and a bonding material (bonding material) such as metal or resin, and is formed to be predetermined. thickness. The cutting insert 21 has conductivity. The cutting insert 21 always maintains a certain sharpness or higher by generating a spontaneous edge by abrading the cutting edge as the cutting progresses. The main shaft 22 is electrically conductive, and is electrically connected to the cutting insert 21 at the front end.

The machining apparatus 1 sets the cutting insert 21 at a predetermined position with respect to the workpiece 100 held on the holding table 10 by the X feeding unit, the Y feeding unit, and the Z feeding unit 30, and causes the cutting insert 21 to be set at a predetermined position. The cutting insert 21 relatively moves along the planned dividing line while rotating, whereby the workpiece 100 is cut with the cutting insert 21 to form a cutting groove along the planned dividing line.

The X-feed unit, the Y-feed unit, and the Z-feed unit 30 are respectively provided with an X-direction position detection unit (not shown) for detecting the position of the holding table 10 in the X-direction, and a position detection unit in the Y-direction of the cutting unit 20 , respectively. The illustrated Y-direction position detection means and the Z-direction position detection means 31 that detect the Z-direction position of the cutting means 20 are shown. The X-direction position detection unit, the Y-direction position detection unit, and the Z-direction position detection unit 31 each output the detected position to the control unit 80 . Further, the Z-direction position detection unit 31 outputs the detected position to the front end position detection unit 48 of the setting unit 40 described later and the holding surface position detection unit 55 of the correction unit 50 described later.

The X-direction position detection unit, the Y-direction position detection unit, and the Z-direction position detection unit 31 may be constituted by a linear scale and a reading head. The linear scales are respectively parallel to the X direction, the Y direction, or the Z direction. The pickup head is movably installed in the X-axis direction, the Y-axis direction, or the Z-axis direction by the X-feed unit, the Y-feed unit, or the Z-feed unit 30, and reads the scale of the linear scale. Furthermore, the X-direction position detection unit, the Y-direction position detection unit, and the Z-direction position detection unit 31 are not limited to the configuration having a linear scale and a reading head in the present invention, and they may be respectively provided in the X feed. Encoder for the motor of the unit, Y feed unit or Z feed unit 30.

As shown in FIG. 2 , the setting unit 40 includes a groove member 41 , a light-emitting portion 42 , a light-receiving portion 43 , a light source 44 , a photoelectric conversion portion 45 , a reference voltage setting portion 46 , a voltage comparison portion 47 , and a tip position detection portion 48 .

As shown in FIG. 2 , the groove member 41 has a base 41-1 and a pair of side wall portions 41-2 erected from the base 41-1. The pair of side wall portions 41 - 2 are arranged with an interval in the Y direction, which is the direction of the rotation axis of the cutting insert 21 , and the interval therebetween has a width wider than the thickness of the cutting edge of the cutting insert 21 . A groove 41-3 is formed between the pair of side wall portions 41-2, and the front end 25 of the lower side of the cutting edge of the cutting insert 21 in which the groove 41-3 is rotatable penetrates.

As shown in FIG. 2 , the light-emitting portion 42 is provided on one side wall portion 41-2, and emits light toward the other side wall portion 41-2. The light-emitting portion 42 is optically connected to the light source 44 by an optical fiber or the like, and emits light from the light source 44 .

As shown in FIG. 2 , the light receiving portion 43 is provided at a position facing the light emitting portion 42 in the Y direction on the other side wall portion 41 - 2 , and receives light from the light emitting portion 42 . The light-receiving portion 43 is optically connected to the light-receiving element by an optical fiber or the like, and the light-receiving element detects the light reaching the light-receiving portion 43 . The light receiving unit 43 is optically connected to the photoelectric conversion unit 45 by an optical fiber or the like, and transmits the light received from the light emitting unit 42 to the photoelectric conversion unit 45 .

The photoelectric conversion unit 45 outputs a voltage corresponding to the light amount of the light transmitted from the light receiving unit 43 to the voltage comparison unit 47 . When the cutting edge of the cutting insert 21 shields the space between the light-emitting portion 42 and the light-receiving portion 43 by increasing the amount by which the cutting edge of the cutting insert 21 penetrates into the groove 41-3, the output voltage from the photoelectric conversion portion 45 increases. gradually decrease. In Embodiment 1, the photoelectric conversion unit 45 outputs a voltage of 5V (maximum voltage) when the light receiving rate is 100%, which is the ratio of the light receiving amount of the light receiving unit 43 to the light emitting amount of the light emitting unit 42, and when the light receiving rate is 0% It will output a voltage of 0V (minimum voltage). The photoelectric conversion unit 45 is set so that when the light receiving amount of the light receiving unit 43 becomes a predetermined light amount, that is, when the front end 25 of the cutting edge of the cutting insert 21 reaches a predetermined position between the light emitting unit 42 and the light receiving unit 43, the output voltage becomes A predetermined reference voltage (3V in Embodiment 1).

The reference voltage setting unit 46 outputs the set predetermined reference voltage to the voltage comparison unit 47 . As described above, the predetermined reference voltage is 3V in the first embodiment. The voltage comparison unit 47 compares the output voltage from the photoelectric conversion unit 45 with the reference voltage set by the reference voltage setting unit 46, and when the output voltage from the photoelectric conversion unit 45 reaches the reference voltage, outputs a signal indicating that to the front end position detection unit 48 . The tip position detection unit 48 acquires the Z-direction position of the cutting unit 20 from the Z-direction position detection unit 31 at the timing when the above-mentioned signal is output from the voltage comparison unit 47 . The leading end position detection unit 48 detects the acquired position in the Z direction of the cutting unit 20 as the position of the leading end 25 of the cutting edge of the cutting insert 21 (the leading end position Z1 in FIG. 4 ), and detects the leading end of the cutting insert 21 . The position Z1 is output to the control unit 80 .

In Embodiment 1, the setting unit 40 includes a computer system. The setting unit 40 has an arithmetic processing device, a memory device, and an input/output interface device. The aforementioned arithmetic processing device has a microprocessor such as a CPU (Central Processing Unit), and the aforementioned memory device has a ROM (Read Only Memory, Read Only Memory) device. Only Memory) or RAM (Random Access Memory, Random Access Memory). In the first embodiment, the functions of the photoelectric conversion unit 45 , the reference voltage setting unit 46 , the voltage comparison unit 47 and the tip position detection unit 48 can be executed by the arithmetic processing device of the computer system included in the setting unit 40 and stored in the It is realized by the computer program of the memory device of the computer system included in the setting unit 40 .

As shown in FIG. 3 , the correction unit 50 includes an electric circuit 51 , a switch 52 , a power supply 53 , a current meter 54 , a holding surface position detection unit 55 , and a correction value calculation unit 56 .

The electrical circuit 51 is a circuit that conducts conduction between the lower side of the frame body 11 holding the table 10 and the proximal end side of the main shaft 22 of the cutting unit 20 . The switch 52 , the power source 53 and the ammeter 54 are provided on the electrical circuit 51 . The switch 52 switches between a closed state and an open state. The closed state is a state in which the frame body 11 and the main shaft 22 are electrically connected through the electrical circuit 51 , and the open state is a state in which the frame body 11 and the main shaft through the electrical circuit 51 are electrically connected 22 is the state where the electrical conduction is cut off. The power supply 53 applies a voltage to the electrical circuit 51 . The ammeter 54 detects the current value flowing in the electrical circuit 51 and outputs the detection result of the current value to the holding surface position detection unit 55 .

When the electrical circuit 51 is in the closed state of the switch 52, when the front end 25 of the cutting edge of the cutting insert 21 contacts the upper surface 13 of the frame body 11 and is electrically connected, the electric circuit 51 is electrically connected to the frame body 11, the cutting insert 21 and the main shaft 22. Together, a closed loop is formed, so current flows internally according to the voltage applied by the power source 53 . On the other hand, in the electrical circuit 51, when the switch 52 is turned off, or when the front end 25 of the cutting edge of the cutting insert 21 is not in contact with the upper surface 13 of the casing 11, since a closed circuit is not formed, the current does not flow. will flow internally.

The holding surface position detection unit 55 acquires the Z-direction position (height) of the cutting unit 20 from the Z-direction position detection unit 31 when the current value detected by the ammeter 54 reaches a predetermined threshold value or more. The holding surface position detection unit 55 detects the acquired Z-direction position of the cutting unit 20 as the Z-direction position of the holding surface 14 measured from the tip end 25 of the cutting edge of the cutting insert 21 (the position of the holding surface 14 height, the holding surface position Z2 in FIG. 4 ), and the detected holding surface position Z2 is output to the control unit 80 .

The correction value calculation unit 56 acquires the distal end position Z1 of the cutting insert 21 detected by the distal end position detection unit 48 of the setting unit 40 from the control unit 80 . The correction value calculation unit 56 acquires the holding surface position Z2 detected by the holding surface position detection unit 55 . The correction value calculation unit 56 calculates the difference in the Z direction between the tip position Z1 of the cutting insert 21 and the holding surface position Z2 , and outputs the difference as a correction value ΔZ (see FIG. 4 ) to the control unit 80 and stores the difference. The correction value ΔZ is a parameter indicating the positional relationship between the light-emitting portion 42 and the light-receiving portion 43 and the holding surface 14 in the Z direction. The correction value calculation unit 56 always calculates the correction value ΔZ once after the holding table 10 is replaced. Here, since the machining apparatus 1 does not need to update the correction value ΔZ when the difference in the Z direction between the front end position Z1 of the cutting insert 21 and the holding surface position Z2 does not change, in order to improve productivity and reduce the cutting and holding of the cutting insert 21 If there is a concern that the surface 14 is blocked, the setting unit 40 can detect the front end position Z1 of the cutting insert 21 without performing the detection operation of the holding surface position Z2, and the Z direction of the front end 25 of the cutting edge of the cutting insert 21 can be detected. (cut-in direction) position to readjust.

In Embodiment 1, the correction unit 50 includes the same computer system as the setting unit 40 . The correction unit 50 has the same arithmetic processing device, memory device, and input/output interface device as the setting unit 40 . In the first embodiment, the respective functions of the holding surface position detection unit 55 and the correction value calculation unit 56 can be executed by the arithmetic processing device of the computer system included in the correction unit 50 and stored in the computer system included in the correction unit 50. The computer program of the memory device is realized.

In Embodiment 1, as shown in FIGS. 1 and 4 , the temperature measuring device 61 is installed inside the member supporting and holding the table 10 , and measures the temperature T1 of the holding table 10 and the vicinity of the holding table 10 . In the present invention, the temperature measuring device 61 is not limited to this, and may be installed inside the holding table 10 or may be installed in contact with the outside of the holding table 10 . The temperature measuring device 61 outputs the measured temperature T1 to the control unit 80 .

In Embodiment 1, the temperature measuring device 62 is installed in the vicinity of the main shaft 22 of the cutting unit 20 as shown in FIGS. 1 and 4 , and measures the temperature T2 of the cutting unit 20 and the vicinity of the cutting unit 20 . In the present invention, the temperature measuring device 62 is not limited to this, and may be provided in contact with the outside of the cutting unit 20 , or may be provided inside a member that supports the cutting unit 20 . The temperature measuring device 62 outputs the measured temperature T2 to the control unit 80 .

In Embodiment 1, as shown in FIGS. 1 and 4 , the temperature measuring device 63 is installed inside the member supporting the installation unit 40 , and measures the temperature T3 of the installation unit 40 and the vicinity of the installation unit 40 . In the present invention, the temperature measuring device 63 is not limited to this, and may be installed inside the installation unit 40 or may be installed in contact with the outside of the installation unit 40 . The temperature measuring device 63 outputs the measured temperature T3 to the control unit 80 .

In Embodiment 1, the temperature measuring devices 61, 62, and 63 measure the temperatures T1, T2, and T3 continuously or at regular intervals when the main power supply of the processing apparatus 1 is turned on. In Embodiment 1, the temperature measuring devices 61, 62, and 63 can use a thermocouple that measures temperature based on deformation of a bimetal, or an electric thermometer that measures temperature based on a change in resistance. In Embodiment 1, although the temperature measuring devices 61 , 62 , and 63 are installed in the processing apparatus 1 , the temperature fluctuation is large, and the temperature in the processing apparatus 1 is affected by the temperature at the tip position Z1 of the cutting insert 21 , the holding surface position Z2 , and the correction. The components that are greatly affected by the fluctuation of the value ΔZ are the vicinity of the holding table 10 , the cutting unit 20 and the setting unit 40 or the members supporting these components, etc., but the present invention is not limited to this, and It can be installed at any position in the processing apparatus 1 . In addition, in Embodiment 1, although the temperature measuring devices 61, 62, and 63 are installed at three places in the processing apparatus 1, the present invention is not limited to this, and may be installed at one place or may be installed at 2 locations, but also 4 or more locations.

In Embodiment 1, the imaging unit 70 is fixed to the cutting unit 20 so as to move integrally with the cutting unit 20 . The imaging unit 70 is provided with an imaging element for imaging the front surface of the workpiece 100 before the cutting process held on the holding table 10 and the planned dividing line. The imaging element may be, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit 70 captures an image of the front surface of the workpiece 100 held on the holding table 10 before cutting to obtain an image for performing calibration and the like, and outputs the obtained image to the control unit 80 , wherein the aforementioned calibration is to perform the alignment of the workpiece 100 and the cutting insert 21 .

The control part 80 is a structure which controls each component of the processing apparatus 1 individually, and makes the processing apparatus 1 perform each operation|movement related to cutting processing etc. with respect to the to-be-processed object 100. The control unit 80 has a position information storage unit 81 . The control unit 80 causes the position information storage unit 81 to store the position information data 200 (see FIG. 5 ). The control unit 80 refers to the position information data 200 stored in the position information storage unit 81, and compares the temperatures T1, T2, T3 acquired from the temperature measuring devices 61, 62, and 63, and the stored positions as positions at an arbitrary time point. The temperatures T1 , T2 , and T3 of the information data 200 are compared, and it is determined whether the variation of the temperatures T1 , T2 , and T3 has exceeded a threshold since the time point when the information data 200 was memorized as the position information data 200 . Here, the fluctuation amounts of the temperatures T1, T2, and T3 are the temperatures T1, T2, and T3 acquired from the temperature measuring devices 61, 62, and 63 at arbitrary time points, and the temperatures T1, T2 memorized as the position information data 200. , T3 difference. The threshold value, which is a criterion for determining the amount of fluctuation of the temperatures T1, T2, and T3, is based on, for example, a member that supports the components in which the temperature measuring devices 61, 62, and 63 are placed in the Z-direction when their positions in the Z direction move by about ±1 μm. The amount of temperature increase or the amount of temperature decrease at the time of expansion or contraction of about ±1 μm is appropriately determined in advance, and may be, for example, ±1°C. In addition, the threshold value which is the judgment criterion of the fluctuation amount of temperature T1, T2, T3 may mutually be the same, and may be different from each other. The control part 80 may acquire each information contained in the position information data 200, for example, when the holding table 10 is replaced.

FIG. 5 is a diagram showing an example of the position information data 200 stored in the position information storage unit 81 of FIG. 1 . In the first embodiment, as shown in FIG. 5 , the position information storage unit 81 stores the following data in correspondence with each other as the position information data 200 : the temperature T1 obtained by the control unit 80 from the temperature measuring devices 61 , 62 , and 63 , T2 and T3, the leading end position Z1 of the cutting insert 21 obtained from the leading end position detecting unit 48 , the holding surface position Z2 obtained from the holding surface position detecting unit 55 , and the correction value ΔZ obtained from the correction value calculating unit 56 .

The control unit 80 includes the same computer system as the setting unit 40 and the correction unit 50 in the first embodiment. The control unit 80 has the same arithmetic processing device, memory device, and input/output interface device as the setting unit 40 and the correction unit 50 . In Embodiment 1, the function of the control unit 80 can be realized by the arithmetic processing device of the computer system included in the control unit 80 executing a computer program stored in the memory device of the computer system included in the control unit 80 . In the first embodiment, the function of the position information storage unit 81 can be realized by a storage device of a computer system included in the control unit 80 .

The processing apparatus 1 further includes a cassette mounting table 91, a cleaning unit 92, and a transfer unit not shown. The cassette mounting table 91 is a mounting table for mounting the cassettes 95 , which are containers for accommodating a plurality of workpieces 100 , and moves the mounted cassettes 95 up and down in the Z-axis direction. The cleaning unit 92 cleans the workpiece 100 after cutting, and removes foreign matter such as chips adhering to the workpiece 100 . The transfer unit (not shown) transfers the workpiece 100 before cutting from the cassette 95 to the holding table 10, and transfers the workpiece 100 after cutting from the holding table 10 to the cleaning unit 92 , and the cleaned workpiece 100 is transported from the cleaning unit 92 to the cassette 95 .

Next, this specification will describe an example of the operation processing of the processing apparatus 1 of Embodiment 1 based on the drawings. FIG. 6 is a flowchart showing an example of a program of operation processing of the processing apparatus 1 according to the first embodiment.

When the processing apparatus 1 is activated by switching the main power supply from OFF to ON, when the holding table 10 or the cutting insert 21 is replaced, or when an order is received from an administrator or operator of the processing apparatus 1 . At the time of the operation command, steps 1001 to 1006 in FIG. 6 are executed in order to correct the tip position Z1 , the holding surface position Z2 and the correction value ΔZ of the cutting insert 21 before starting the cutting process of the workpiece 100 .

The temperature measuring devices 61, 62, and 63 of the processing apparatus 1 measure the temperatures T1, T2, and T3, and output the measurement results to the control unit 80 (step 1001 in FIG. 6 ). The machining apparatus 1 lowers the cutting unit 20 by the Z feed unit 30 so that the leading end 25 of the cutting edge of the cutting insert 21 penetrates into the groove 41 - 3 of the setting unit 40 , and is detected by the leading end position detection unit 48 of the setting unit 40 . The tip position Z1 of the cutting insert 21 is detected and output to the control unit 80 (step 1002 in FIG. 6 ).

The machining device 1 lowers the cutting unit 20 by the Z feed unit 30 , so that the front end 25 of the cutting edge of the cutting insert 21 contacts the upper surface 13 of the frame body 11 holding the table 10 , and the correction unit 50 moves. The holding surface position detection unit 55 detects the holding surface position Z2 and outputs it to the control unit 80 (step 1003 in FIG. 6 ).

The machining apparatus 1 calculates the correction value calculation unit 56 of the correction unit 50 based on the tip position Z1 of the cutting insert 21 detected in step 1002 and the holding surface position Z2 detected in step 1003 . The correction value ΔZ is output to the control unit 80 (step 1004 in FIG. 6 ).

Furthermore, in the present invention, as long as the processing apparatus 1 executes the step 1004 after the step 1002 and the step 1003, the step 1001 to the step 1004 may be executed in any order.

The control unit 80 of the processing apparatus 1 associates the following data with each other and stores them in the position information memory unit 81 as the position information data 200 : the temperatures T1 , T2 , T3 measured in step 1001 , the temperatures T1 , T2 , and T3 detected in step 1002 The detected tip position Z1 of the cutting insert 21, the holding surface position Z2 detected in step 1003, and the correction value ΔZ calculated in step 1004 (step 1005 in FIG. 6 ).

The processing apparatus 1 conveys the workpiece 100 to the holding surface 14 of the holding table 10 , sucks and holds the workpiece 100 by the holding table 10 , and captures the image of the workpiece 100 on the holding table 10 with the imaging unit 70 . The calibration is completed by facing the front surface, etc., wherein the above-mentioned calibration is to perform the alignment of the workpiece 100 and the cutting insert 21 . After the calibration is completed, the processing device 1 will refer to the position information data 200 stored in the position information memory unit 81 in step 1005 , and adjust the Z of the front end 25 of the cutting edge of the cutting insert 21 by the Z feed unit 30 . The position of the direction (cut-in direction) (step 1006 of FIG. 6 ).

The machining apparatus 1 starts cutting of the workpiece 100 with the cutting insert 21 whose position in the Z direction has been adjusted in step 1006 (step 1007 in FIG. 6 ). The machining device 1 rotates the cutting insert 21 whose position in the Z direction has been adjusted in step 1006, and adjusts the position of the cutting insert 21 in the Y direction (indexing feed direction) to the dividing line by the Y feed unit, By the X feed unit, the cutting insert 21 and the workpiece 100 on the holding table 10 are relatively moved in the X direction (machining feed direction) along the line to be divided, so that the workpiece is aligned along the line to be divided. 100 for cutting.

The temperature measuring devices 61 , 62 , and 63 of the processing apparatus 1 also measure the temperatures T1 , T2 , and T3 continuously or at regular intervals after the start of the machining of the workpiece 100 (step 1007 ), and use the measurement results. output to the control unit 80 . Each time the temperature T1, T2, T3 is output from the temperature measuring devices 61, 62, and 63, the control unit 80 of the processing apparatus 1 compares the output temperatures T1, T2, T3 with the immediately preceding step 1005. The temperature T1, T2, T3 stored in the position information data 200 is compared, and it is determined whether the fluctuation amount of the temperature T1, T2, T3 has exceeded the threshold value since the time point of the immediately preceding step 1005 (the step of FIG. 6 ). 1008).

When the amount of fluctuation of at least any one of the temperatures T1, T2, and T3 exceeds the threshold value from the time point in the immediately preceding step 1005 (Yes in the step 1008 ), the machining device 1 causes the cutting insert to be 21 Retract from the workpiece 100 to interrupt the machining of the workpiece 100 (step 1009 in FIG. 6 ), and regard the temperatures T1, T2, T3 measured in the immediately preceding step 1008 as the step Steps 1002 to 1006 are carried out again, and the front end position Z1, the holding surface position Z2 and the correction value ΔZ of the cutting insert 21 are updated, and the Z direction ( Readjust the position of the cut-in direction).

The processing apparatus 1 continues to be processed if none of the fluctuations in the temperatures T1, T2, and T3 exceeds the threshold value from the time point in the immediately preceding step 1005 (NO in step 1008 ). The cutting process of the object 100 (step 1010 of FIG. 6 ). The processing apparatus 1 repeats step 1008 until the cutting of the workpiece 100 is completed (NO in step 1011 in FIG. 6 ), and when the cutting of the workpiece 100 is completed (in step 1011 in FIG. 6 ) "Yes"), that is, a series of action processing is ended.

In addition, the processing apparatus 1 does not replace the holding table 10 or the cutting insert 21 in a state where the main power is turned ON, but, for example, applies the same kind of workpiece to the workpiece 100 previously cut. When the 100 performs cutting processing again, the control unit 80 compares the temperatures T1 , T2 , T3 measured by the temperature measuring devices 61 , 62 , and 63 and the temperatures T1 , T2 last memorized as the position information data 200 . , and T3 are compared to determine whether the fluctuations of the temperatures T1 , T2 , and T3 exceed the threshold value since the time point last memorized as the position information data 200 . The processing device 1 performs the same steps as the above-mentioned steps 1002 to 1006 again when the amount of variation of at least any one of the temperatures T1, T2, and T3 has exceeded the threshold value since the time point that was last memorized as the position information data 200. After the operation process, the tip position Z1, the holding surface position Z2, and the correction value ΔZ of the cutting insert 21 are updated, and the position in the Z direction (cutting direction) of the tip 25 of the cutting edge of the cutting insert 21 is readjusted. On the other hand, the machining apparatus 1 considers only the cutting due to the cutting insert 21 when the fluctuation amount of any one of the temperatures T1 , T2 , and T3 does not exceed the threshold value since the last time point stored as the position information data 200 . For the change of the leading end position Z1 caused by the wear of the blade, only the detection of the leading end position Z1 of the cutting insert 21 by the setting unit 40 is carried out, and the correction value finally memorized as the position information data 200 is used by the control unit 80 . The holding surface position Z2, which is the reference position of the cutting insert 21 during cutting, is calculated by ΔZ, and the position of the front end 25 of the cutting edge of the cutting insert 21 in the Z direction (cutting direction) is adjusted based on the calculated holding surface position Z2.

Furthermore, in Embodiment 1, although the control unit 80 determines whether or not to execute the borrowing again based on the result of the determination as to whether the fluctuations of the temperatures T1, T2, and T3 from the time point last memorized as the position information data 200 exceed the threshold value or not. The detection operation of the front end position Z1 of the cutting insert 21 by the setting unit 40, the detection operation of the holding surface position Z2 by the correction unit 50, and the update operation of the correction value ΔZ are not limited in the present invention. Here, it is also possible to determine whether to perform the detection operation or the update operation again based on the determination result of whether the fluctuation amounts of the temperatures T1 , T2 , and T3 from an arbitrary time point exceed the threshold value.

The processing apparatus 1 according to the first embodiment having the above-described configuration can make it possible for the control unit 80 to detect when the fluctuation amounts of the temperatures T1, T2, and T3 measured by the temperature measuring devices 61, 62, and 63 have exceeded the threshold value. , the correction value ΔZ, which is the difference between the front end position Z1 of the cutting insert 21 and the holding surface position Z2, is updated, and the Z direction (cutting direction) of the front end 25 of the cutting edge of the cutting insert 21 is adjusted according to the updated correction value ΔZ. Therefore, according to the correction value ΔZ appropriately updated according to the fluctuations of the temperatures T1, T2, and T3, the depth of the cutting insert 21 cutting into the workpiece 100 can be accurately detected and controlled.

In addition, in the processing apparatus 1 of the first embodiment, when the fluctuations of the temperatures T1, T2, and T3 measured by the temperature measuring devices 61, 62, and 63 do not exceed the thresholds, the values calculated immediately before are used as they are and stored in the memory. The correction value ΔZ, and only the detection of the front end position Z1 of the cutting insert 21 by the setting unit 40 is performed to adjust the position of the front end 25 of the cutting edge of the cutting insert 21 in the Z direction (cutting direction). In the past, the following sensor alignment was performed: after the position of the holding surface was detected by contacting the holding surface when the holding table was replaced, the tip position of the blade was detected by the light-emitting part and the light-receiving part, and The positional relationship between the holding surface and the light-emitting part and the light-receiving part is memorized. Furthermore, in the past, it was assumed that the positional relationship would not change in the future, and only the detection by the light-emitting part and the light-receiving part was used to adjust the position of the tip of the cutting edge in the Z direction (cutting direction) of the cutting insert. If the positional relationship between the holding surface and the light-emitting portion and the light-receiving portion has changed due to temperature changes, it is impossible to accurately detect and control the depth of penetration of the cutting insert into the workpiece. Therefore, since the processing apparatus 1 of the first embodiment detects the height of the holding surface 14 (the position of the holding surface) again when the fluctuation amounts of the temperatures T1, T2, and T3 measured by the temperature measuring devices 61, 62, and 63 have exceeded the threshold value. Z2) and the height (tip position Z1) of the cutting insert 21 detected by the setting unit 40 are updated with the correction value ΔZ, so that the depth of penetration of the cutting insert 21 into the workpiece 100 can be detected and controlled more accurately than before. In addition, in the processing apparatus 1 according to the first embodiment, the correction unit 50 executes the detection process of the holding surface position Z2 by the correction unit 50 to update the correction value ΔZ only when the fluctuation amounts of the temperatures T1, T2, and T3 exceed the threshold values. Therefore, the chance of the cutting insert 21 coming into contact with the upper surface 13 of the frame body 11 holding the table 10 can be minimized, thereby reducing the possibility of clogging of the cutting insert 21 .

In addition, in the machining apparatus 1 of the first embodiment, the correction unit 50 detects the position of the cutting unit 20 in the Z direction when the cutting unit 20 is moved in the Z direction and the electrical continuity between the table 10 is detected and held as the holding surface 14 . height (holds face position Z2). Therefore, the machining apparatus 1 according to the first embodiment can accurately detect and control the depth of penetration of the cutting insert 21 into the workpiece 100 .

[Embodiment 2] A processing apparatus 1 according to Embodiment 2 of the present invention will be described. In the processing apparatus 1 of the second embodiment, the imaging unit 70 that moves integrally with the cutting unit 20 substantially performs the function of detecting the holding surface position Z2 performed by the correction unit 50 in the first embodiment. Specifically, in Embodiment 2, the imaging unit 70 acquires from the Z-direction position detection unit 31 that the imaging unit 70 has been focused on the upper frame 11 holding the table 10 on the same plane as the holding surface 14 . The Z-direction position of the cutting unit 20 at the surface 13 is output, and the obtained Z-direction position of the cutting unit 20 is output to the control unit 80 .

Here, since the height of the photographing unit 70 in the Z direction can be calculated by considering the difference between the positions of the cutting unit 20 and the photographing unit 70 in the Z direction, the cutting when the focus of the photographing unit 70 is focused on the upper surface 13 The position of the unit 20 in the Z direction corresponds to the detected value of the height of the imaging unit 70 in the Z direction. Also, since the holding surface position Z2 can be calculated by further considering the distance between the photographing unit 70 and the upper surface 13 of the frame body 11 holding the table 10, which is calculated according to the focus of the photographing unit 70, the photographing unit 70 has been The position of the cutting unit 20 in the Z direction when the focal point is focused on the upper surface 13 corresponds to the detected value of the holding surface position Z2. In view of this, the control unit 80 may regard the position in the Z direction of the cutting unit 20 when the focus of the imaging unit 70 has been focused on the upper surface 13 as substantially the same as the holding surface position Z2.

In the processing apparatus 1 of the second embodiment, the position in the Z direction of the cutting unit 20 when the focal point of the imaging unit 70 has been focused on the height of the holding surface 14 is regarded as the same as the holding surface position Z2. Therefore, compared with the first embodiment, it can be By avoiding contact of the cutting inserts 21 with the upper surface 13 of the frame body 11 holding the table 10, the possibility of clogging of the cutting inserts 21 is further prevented and productivity is improved. In addition, the processing apparatus 1 of the second embodiment performs the same operation as the first embodiment, and has the following effect: when the holding table 10 is replaced, the cutting insert 21 is detected by cutting into the frame body 11 of the holding surface 14 . After the height of the holding surface 14 (holding surface position Z2), the conventional device that adjusts the depth of penetration of the cutting insert into the workpiece only by detection by the light-emitting portion and the light-receiving portion can accurately detect and control the cutting insert 21 pair. The cutting depth of the workpiece 100.

In addition, this invention is not limited to the invention of the said embodiment. That is, various deformation|transformation can be carried out in the range which does not deviate from the summary of this invention.

1: Processing device 10: Keep the workbench 11: Frame 12: Adsorption part 13: Upper surface 14: Keep Faces 20: Cutting unit 21: Cutting inserts 22: Spindle 25: Front end of cutting edge 30: Z feed unit 31: Z direction position detection unit 40: Setup Unit 41: Groove member 41-1: Abutment 41-2: Side wall part 41-3: Ditch 42: Light-emitting part 43: Light Receiver 44: Light source 45: Photoelectric conversion department 46: Reference voltage setting section 47: Voltage comparison part 48: Front end position detection section 50: Correction unit 51: Electrical circuit 52: switch 53: Power 54: Galvanometer 55: Holding surface position detection section 56: Correction value calculation section 61, 62, 63: Thermometer 70: Shooting unit 80: Control Department 81: Location Information Memory Department 91: Cassette stage 92: Washing unit 95: cassette 100: processed object 101: Adhesive tape 102: Frames 200: Location information data 1001~1011: Steps T1, T2, T3: temperature X,Y,Z: direction Z1: Front end position of cutting insert Z2: keep face position ΔZ: correction value

FIG. 1 is a perspective view showing a configuration example of a processing apparatus according to Embodiment 1. FIG. FIG. 2 is a cross-sectional view showing a configuration example of the installation unit of FIG. 1 . FIG. 3 is a cross-sectional view showing a configuration example of the correction unit of FIG. 1 . FIG. 4 is a cross-sectional view showing an example of the positional relationship between the holding table, the cutting unit, and the setting unit in FIG. 1 . FIG. 5 is a diagram showing an example of position information data stored in the position information storage unit of FIG. 1 . FIG. 6 is a flowchart showing an example of a program of operation processing of the processing apparatus according to Embodiment 1. FIG.

10: Keep the workbench

14: Keep Faces

20: Cutting unit

21: Cutting inserts

22: Spindle

25: Front end of cutting edge

30: Z feed unit

31: Z direction position detection unit

40: Setup Unit

61, 62, 63: Thermometer

T1, T2, T3: temperature

X,Y,Z: direction

Z1: Front end position of cutting insert

Z2: keep face position

△Z: correction value

Claims (3)

A processing device, comprising: The holding table has a holding surface for holding the processed object; a cutting unit, which uses a cutting blade to cut the workpiece that has been held on the holding table; The Z feed unit moves the cutting unit in the Z direction perpendicular to the holding surface; a setting unit, which has a light-emitting part and a light-receiving part arranged to leave a width for the cutting insert to penetrate, and detects the front end position of the cutting insert by the light received by the light-receiving part; The correction unit detects the position in the Z direction of the holding surface, and memorizes the difference between the front end position of the cutting insert detected by the setting unit and the Z direction of the holding surface as a correction value; A temperature measuring device, which is arranged in the processing device and measures the temperature; A photographing unit for photographing the processed objects that have been held on the holding table; and The control unit drives each unit, When the amount of fluctuation of the temperature measured by the temperature measuring device has exceeded a threshold value from an arbitrary point in time, the control unit performs again: the height of the holding surface is detected by the correction unit and the correction value is performed. The operation of updating, and the detection of the front end position of the cutting insert by the setting unit. The processing apparatus of claim 1, wherein the correction unit moves the cutting unit in the Z direction and detects the position of the cutting unit in the Z direction when electrical continuity with the holding table is detected as the position of the holding surface. high. The processing device of claim 1, wherein the correction unit memorizes the height of the photographing unit in the Z direction when the focal point of the photographing unit is focused on the holding surface as the height of the holding surface.

Images