TW202204233A - Transmission mechanism for horizontally conveying substrates including a plurality of roller sets, a plurality of anti-drop crawler belts, and a plurality of transmission crawler belts - Google Patents

Transmission mechanism for horizontally conveying substrates including a plurality of roller sets, a plurality of anti-drop crawler belts, and a plurality of transmission crawler belts Download PDF

Info

Publication number
TW202204233A
TW202204233A TW109124251A TW109124251A TW202204233A TW 202204233 A TW202204233 A TW 202204233A TW 109124251 A TW109124251 A TW 109124251A TW 109124251 A TW109124251 A TW 109124251A TW 202204233 A TW202204233 A TW 202204233A
Authority
TW
Taiwan
Prior art keywords
transmission mechanism
roller
substrate
horizontally conveying
track
Prior art date
Application number
TW109124251A
Other languages
Chinese (zh)
Inventor
施振四
陳柏廷
謝明哲
簡勝德
Original Assignee
台郡科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 台郡科技股份有限公司 filed Critical 台郡科技股份有限公司
Priority to TW109124251A priority Critical patent/TW202204233A/en
Priority to CN202011025572.7A priority patent/CN113942860A/en
Publication of TW202204233A publication Critical patent/TW202204233A/en

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H5/00Feeding articles separated from piles; Feeding articles to machines
    • B65H5/06Feeding articles separated from piles; Feeding articles to machines by rollers or balls, e.g. between rollers
    • B65H5/068Feeding articles separated from piles; Feeding articles to machines by rollers or balls, e.g. between rollers between one or more rollers or balls and stationary pressing, supporting or guiding elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H5/00Feeding articles separated from piles; Feeding articles to machines
    • B65H5/36Article guides or smoothers, e.g. movable in operation
    • B65H5/38Article guides or smoothers, e.g. movable in operation immovable in operation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00Parts for transporting or guiding the handled material
    • B65H2404/10Rollers
    • B65H2404/15Roller assembly, particular roller arrangement
    • B65H2404/154Rollers conveyor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00Handled material; Storage means
    • B65H2701/10Handled articles or webs
    • B65H2701/19Specific article or web
    • B65H2701/1928Printing plate

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A transmission mechanism for horizontally conveying substrates includes: a plurality of roller sets arranged in sequence along the traveling direction of the substrate, each roller set including a plurality of supporting rollers for conveying the substrate; two guiding rollers used to guide the substrate when conveying the substrate; at least one central crawler belt drive wheel arranged between the supporting rollers; and at least one side crawler belt drive wheel arranged between the supporting roller and the guiding roller; a plurality of anti-drop crawler belts connected between the central crawler belt drive wheels of the two roller sets, whereby the central crawler belt drive wheels drive the anti-drop crawler belts; and a plurality of transmission crawler belts connected between the side crawler belt transmission wheels of the two roller sets, whereby the side crawler belt transmission wheels drive the transmission crawler belts.

Description

水平式輸送基板之傳動機構 Transmission mechanism for horizontal conveying of substrates

本發明是有關於一種水平式輸送基板之傳動機構,且特別是有關於一種具有防掉板履帶的零卡板水平式輸送基板之傳動機構。 The present invention relates to a transmission mechanism for horizontally conveying substrates, and in particular, to a transmission mechanism for horizontally conveying substrates with zero-jamming plates with an anti-drop track.

隨著電子產品日趨小型化與高速性能化,電路板已從單面板發展為雙面板與多層板。其中,雙面電路板與多層電路板具有較多之線路面積、較高之裝配密度而得到廣泛應用。 With the increasing miniaturization and high-speed performance of electronic products, circuit boards have developed from single-sided to double-sided and multi-layered boards. Among them, double-sided circuit boards and multi-layer circuit boards are widely used because of their larger circuit area and higher assembly density.

多層電路板之製作工序繁多,一般包括內層線路製作、內層檢查、壓合、鑽孔、電鍍、製作外層導電線路、線路電鍍、外層檢查、防焊、表面加工與切割成型等工序。為提高生產效率,通常採用基板輸送系統將上一工序製作完成之基板輸送至下一工序之工作台加以製作。 There are many production processes for multi-layer circuit boards, generally including inner layer circuit production, inner layer inspection, lamination, drilling, electroplating, production of outer layer conductive circuit, circuit plating, outer layer inspection, solder mask, surface processing and cutting and forming and other processes. In order to improve production efficiency, a substrate conveying system is usually used to transport the substrates produced in the previous process to the workbench in the next process for production.

請參考圖1a及圖1b,其顯示第一種習知輸送基板之傳動機構。該傳動機構9可提供窄寬幅的基板2擺放兩邊同時作業,例如寬度為200~300mm硬板製品或軟板製品。為了防止輸送基板的過程中掉板,所以滾輪91之間排列非常緊密。雖然無掉板的風險,但是滾輪91之間隙過小,該基板2被噴嘴92噴灑的範圍有限。 Please refer to FIG. 1a and FIG. 1b, which show a first conventional transmission mechanism for conveying substrates. The transmission mechanism 9 can provide a narrow and wide substrate 2 placed on both sides for simultaneous operation, such as a hard board product or a flexible board product with a width of 200-300 mm. In order to prevent the board from falling off in the process of conveying the substrate, the rollers 91 are arranged very closely. Although there is no risk of dropping the plate, the gap between the rollers 91 is too small, and the spraying range of the substrate 2 by the nozzle 92 is limited.

請參考圖3a及圖3b,其顯示第二種習知輸送基板之傳動機構。該傳動機構8也可提供窄寬幅的基板2擺放兩邊同時作業,例如寬度為200~300mm硬板製品或軟板製品。第二種傳動機構8移除部分滾輪81,可為第一種傳動機構的5~10倍間距(pitch)。雖然提升該基板2被噴嘴82噴灑的範圍,但是在輸送基 板的過程中卻有掉板的風險,如圖4所示。 Please refer to FIG. 3a and FIG. 3b, which show the second conventional transmission mechanism for conveying the substrate. The transmission mechanism 8 can also provide a narrow and wide substrate 2 placed on both sides for simultaneous operation, such as a hard board product or a soft board product with a width of 200-300 mm. The second type of transmission mechanism 8 removes part of the rollers 81 , which can be 5-10 times the pitch of the first type of transmission mechanism. Although the range in which the substrate 2 is sprayed by the nozzles 82 is increased, when the substrate is conveyed There is a risk of dropping the board during the process of the board, as shown in Figure 4.

中華民國專利公告號I351377揭示一種基板輸送系統,其包括第一傳送裝置、第二傳送裝置與轉移裝置。該第一傳送裝置包括複數個間隔分佈之第一傳送單元,該第二傳送裝置包括複數個間隔分佈之第二傳送單元。相鄰兩個第一傳送單元之間形成第一通道,相鄰兩個第二傳送單元之間形成第二通道。該轉移裝置包括升降裝置及複數根固定於升降裝置之承載件。所述升降裝置相對第一通道與第二通道相對滑動設置,使承載件可沿第一通道與第二通道運動。該基板輸送系統方便轉換基板傳送方向,傳送效率高。 ROC Patent Publication No. I351377 discloses a substrate conveying system, which includes a first conveying device, a second conveying device and a transferring device. The first conveying device includes a plurality of first conveying units distributed at intervals, and the second conveying device includes a plurality of second conveying units distributed at intervals. A first channel is formed between two adjacent first conveying units, and a second channel is formed between two adjacent second conveying units. The transfer device includes a lifting device and a plurality of carriers fixed on the lifting device. The lifting device is slidably disposed relative to the first channel and the second channel, so that the carrier can move along the first channel and the second channel. The substrate conveying system is convenient to change the conveying direction of the substrate and has high conveying efficiency.

然而,上述專利文獻並未解決既可提升該基板被噴灑的範圍,卻無掉板的風險。 However, the above-mentioned patent documents do not address that the sprayed area of the substrate can be increased without the risk of falling off the substrate.

因此,便有需要提供一種水平式輸送基板之傳動機構,可解決前述的問題。 Therefore, there is a need to provide a transmission mechanism for horizontally conveying substrates, which can solve the aforementioned problems.

本發明之一目的是提供一種具有防掉板履帶的水平式輸送基板之傳動機構,既可提升該基板被噴灑範圍,卻無掉板的風險。 An object of the present invention is to provide a transmission mechanism for horizontally conveying a substrate with an anti-dropping track, which can improve the spraying range of the substrate without the risk of dropping the plate.

依據上述之目的,本發明提供一種水平式輸送基板之傳動機構,包括:多個滾輪組,沿該基板行進方向依序排列,每組滾輪組包括:多個支撐用的滾輪,設置於該滾輪組之一中央區域,用以輸送該基板;兩個導正用的滾輪,設置於該滾輪組之兩側邊區域,用以在輸送該基板時,導正該基板;至少一個中央履帶傳動輪,設置於該些支撐用的滾輪之間;以及至少一個側邊履帶傳動輪,設置於該支撐用的滾輪與該導正用的滾輪之間;多條防掉板履帶,連接於該兩個滾輪組的該中央履帶傳動輪之間,藉此該中央履帶傳動輪帶動該防掉板履帶;以及多條傳動履帶,連接於該兩個滾輪組的該側邊履帶傳動輪之間,藉此該側邊履帶傳動輪帶動該傳動履帶。 In accordance with the above purpose, the present invention provides a transmission mechanism for horizontally conveying substrates, comprising: a plurality of roller groups arranged in sequence along the traveling direction of the substrate, each group of roller groups including: a plurality of supporting rollers, arranged on the rollers A central area of the group is used for conveying the substrate; two guide rollers are arranged on both sides of the roller group to guide the substrate when conveying the substrate; at least one central crawler belt drive wheel , arranged between the supporting rollers; and at least one side crawler belt drive wheel, arranged between the supporting rollers and the guiding rollers; a plurality of anti-drop shoe tracks, connected to the two between the central track drive wheels of the roller set, whereby the central track drive wheel drives the anti-drop plate track; and a plurality of drive tracks connected between the side track drive wheels of the two roller sets, thereby The side track drive wheel drives the drive track.

該導正用的滾輪之直徑大於該支撐用的滾輪之直 徑。 The diameter of the guiding roller is larger than the diameter of the supporting roller path.

該中央履帶傳動輪之直徑小於該支撐用的滾輪之直徑。該防掉板履帶之高度低於該支撐用的滾輪之高度。 The diameter of the central track drive wheel is smaller than the diameter of the supporting rollers. The height of the anti-fall shoe track is lower than the height of the supporting rollers.

該防掉板履帶與該支撐用的滾輪之高度差為2mm。 The height difference between the anti-drop shoe track and the supporting roller is 2mm.

該防掉板履帶之材質為抗酸鹼材質。 The material of the anti-drop shoe track is acid and alkali resistant material.

該抗酸鹼材質為鐵氟龍(PTFE)、鐵氟龍(FFD)、鐵氟龍(PFA)或鐵氟龍(ETFE)。 The acid and alkali resistant material is Teflon (PTFE), Teflon (FFD), Teflon (PFA) or Teflon (ETFE).

該側邊履帶傳動輪之直徑小於或等於該中央履帶傳動輪之直徑。 The diameter of the side crawler pulley is less than or equal to the diameter of the central crawler pulley.

該支撐用的滾輪、該導正用的滾輪、該中央履帶傳動輪及該側邊履帶傳動輪之材質為抗異物反沾材質。 The supporting rollers, the guiding rollers, the central crawler drive wheel and the side crawler drive wheels are made of anti-foreign material and anti-sticking materials.

該抗異物反沾材質為鐵氟龍(PFA)。 The anti-foreign body anti-stick material is Teflon (PFA).

該多條防掉板履帶為細絲狀。 The plurality of anti-drop shoe tracks are in the shape of filaments.

根據本發明之水平式輸送基板之傳動機構,該些導正用的滾輪在輸送該基板時,可導正該基板。該多條防掉板履在輸送該基板時,可防止該基板掉板。相較先前技術,該些支撐用的滾輪間距較大,可提升該基板被噴灑範圍。該防掉板履帶之抗酸鹼材質可避免掉板時該基板上殘留藥劑損壞該防掉板履帶。該支撐用的滾輪、該導正用的滾輪、該中央履帶傳動輪及該側邊履帶傳動輪之抗異物反沾材質可避免輸送該基板時造成沾黏。 According to the transmission mechanism for horizontally conveying the substrate of the present invention, the rollers for guiding can guide the substrate when conveying the substrate. The plurality of anti-falling shoes can prevent the substrate from falling off when the substrate is transported. Compared with the prior art, the distance between the supporting rollers is larger, which can increase the spraying range of the substrate. The acid and alkali resistant material of the anti-dropping shoe track can prevent the residual chemical on the base plate from damaging the anti-dropping shoe track when the shoe is dropped. The anti-foreign material and anti-sticking materials of the supporting roller, the guiding roller, the central crawler drive wheel and the side crawler drive wheel can avoid sticking when conveying the substrate.

1:傳動機構 1: Transmission mechanism

10:滾輪組 10: Roller set

11:支撐用的滾輪 11: Rollers for support

12:導正用的滾輪 12: Roller for guiding

13:中央履帶傳動輪 13: Central track drive wheel

14:側邊履帶傳動輪 14: Side track drive wheel

15:防掉板履帶 15: Anti-drop shoe track

16:傳動履帶 16: Transmission track

17:噴嘴 17: Nozzle

2:基板 2: Substrate

8:傳動機構 8: Transmission mechanism

81:滾輪 81: Roller

82:噴嘴 82: Nozzle

9:傳動機構 9: Transmission mechanism

91:滾輪 91: Roller

92:噴嘴 92: Nozzle

D:間距 D: Spacing

d:高度差 d: height difference

圖1a及圖1b為第一種習知輸送基板之傳動機構之上視及側視示意圖,其顯示基板被輸送。 1a and 1b are schematic top and side views of a first conventional transmission mechanism for conveying substrates, which show that the substrates are being conveyed.

圖2為第一種習知輸送基板之傳動機構之滾輪之剖面示意圖,其顯示基板被噴灑的範圍。 FIG. 2 is a schematic cross-sectional view of the roller of the first conventional transmission mechanism for conveying the substrate, which shows the area where the substrate is sprayed.

圖3a及圖3b為第二種習知輸送基板之傳動機構之上視及側視示意圖,其顯示基板被輸送。 3a and 3b are schematic top and side views of a second conventional transmission mechanism for conveying substrates, showing the substrate being conveyed.

圖4為第二種習知輸送基板之傳動機構之滾輪之剖面示意圖,其顯示基板被噴灑的範圍。 FIG. 4 is a schematic cross-sectional view of the roller of the second conventional transmission mechanism for conveying the substrate, which shows the range where the substrate is sprayed.

圖5a及圖5b為本發明之一實施例之水平式輸送基板之傳動機構之平面及立體示意圖。 5a and 5b are schematic plan and perspective views of a transmission mechanism for horizontally transporting substrates according to an embodiment of the present invention.

圖6a及圖6b為本發明之一實施例之水平式輸送基板之傳動機構之上視及側視示意圖,其顯示基板被輸送。 6a and 6b are schematic top and side views of a transmission mechanism for horizontally conveying substrates according to an embodiment of the present invention, which show that the substrates are being conveyed.

圖7為本發明之一實施例之水平式輸送基板之滾輪剖面示意圖,其顯示基板被噴灑的範圍。 7 is a schematic cross-sectional view of a roller for horizontally conveying a substrate according to an embodiment of the present invention, which shows the range where the substrate is sprayed.

為讓本發明之上述目的、特徵和特點能更明顯易懂,茲配合圖式將本發明相關實施例詳細說明如下。 In order to make the above objects, features and characteristics of the present invention more obvious and easy to understand, the relevant embodiments of the present invention are described in detail as follows in conjunction with the drawings.

圖5a及圖5b為本發明之一實施例之水平式輸送基板之傳動機構之平面及立體示意圖。該基板可為電路板、硬板或軟板。該傳動機構1包括:多個滾輪組10、多條防掉板履帶15及多條傳動履帶16。該多個滾輪組10沿該基板行進方向依序排列。每組滾輪組10包括:多個支撐用的滾輪11、兩個導正用的滾輪12、至少一個中央履帶傳動輪13及至少一個側邊履帶傳動輪14。 5a and 5b are schematic plan and perspective views of a transmission mechanism for horizontally transporting substrates according to an embodiment of the present invention. The substrate can be a circuit board, a rigid board or a flexible board. The transmission mechanism 1 includes: a plurality of roller sets 10 , a plurality of anti-drop shoe crawlers 15 and a plurality of transmission crawlers 16 . The plurality of roller sets 10 are sequentially arranged along the traveling direction of the substrate. Each set of rollers 10 includes: a plurality of rollers 11 for supporting, two rollers 12 for guiding, at least one central track drive wheel 13 and at least one side track drive wheel 14 .

請參考圖5a及圖5b,該些支撐用的滾輪11設置於該滾輪組10之一中央區域,用以輸送該基板。該些支撐用的滾輪11為實心滾輪。例如,該支撐用的滾輪11之直徑約30mm。該兩個導正用的滾輪12設置於該滾輪組之兩側邊區域,用以在輸送該基板時,導正該基板。例如,該導正用的滾輪12之直徑約45mm。該中央履帶傳動輪13設置於該些支撐用的滾輪11之間。例如,該中央履帶傳動輪13之直徑約28~30mm。該側邊履帶傳動輪14設置於該支撐用的滾輪11與該導正用的滾輪12之間。例如,該側邊履帶傳動輪14之直徑約28mm。 Please refer to FIG. 5a and FIG. 5b, the supporting rollers 11 are arranged in a central area of the roller set 10 for conveying the substrate. These supporting rollers 11 are solid rollers. For example, the diameter of the supporting roller 11 is about 30 mm. The two guide rollers 12 are disposed on the two side regions of the roller set to guide the substrate when the substrate is conveyed. For example, the diameter of the guide roller 12 is about 45mm. The central crawler drive wheel 13 is arranged between the supporting rollers 11 . For example, the diameter of the central crawler pulley 13 is about 28-30 mm. The side track drive wheel 14 is arranged between the support roller 11 and the guide roller 12 . For example, the diameter of the side track drive wheel 14 is about 28 mm.

請再參考圖5a及圖5b,該多條防掉板履帶15連接 於該兩個滾輪組10的該中央履帶傳動輪13之間,藉此該中央履帶傳動輪13可帶動該防掉板履帶15。在輸送基板時,該防掉板履帶15可防止基板掉板。在本實施例中,該多條防掉板履帶15可為細絲狀。例如,該細絲狀防掉板履帶15之長度可約250mm。該防掉板履帶15之材質可為抗酸鹼材質,例如鐵氟龍(PTFE)、鐵氟龍(FFD)、鐵氟龍(PFA)或鐵氟龍(ETFE)等材質。或者,該防掉板履帶15可鍍上一層抗酸鹼陶瓷膜(例如氧化鋁)或抗酸鹼金屬膜(例如鈦金屬)。該防掉板履帶15之抗酸鹼材質可避免掉板時該基板上殘留藥劑損壞該防掉板履帶15。該多條傳動履帶16連接於該兩個滾輪組10的該側邊履帶傳動輪14之間,藉此該側邊履帶傳動輪14可帶動該傳動履帶16。該中央履帶傳動輪13之直徑小於該支撐用的滾輪11之直徑。 Please refer to FIG. 5a and FIG. 5b again, the plurality of anti-drop shoe tracks 15 are connected Between the central crawler drive wheels 13 of the two roller sets 10 , the central crawler drive wheel 13 can drive the anti-drop track 15 . When the substrate is transported, the anti-falling shoe track 15 can prevent the substrate from falling off the plate. In this embodiment, the plurality of anti-drop shoe tracks 15 may be in the shape of filaments. For example, the length of the filament-shaped anti-fall shoe track 15 may be about 250 mm. The material of the anti-drop shoe track 15 can be an acid and alkali resistant material, such as Teflon (PTFE), Teflon (FFD), Teflon (PFA) or Teflon (ETFE) and the like. Alternatively, the anti-falling shoe track 15 can be coated with a layer of acid-alkali-resistant ceramic film (eg, aluminum oxide) or an acid-alkali-resistant metal film (eg, titanium metal). The acid and alkali resistant material of the anti-dropping shoe track 15 can prevent the residual chemical on the base plate from damaging the anti-dropping shoe track 15 when the shoe is dropped. The plurality of drive tracks 16 are connected between the side track drive wheels 14 of the two roller sets 10 , whereby the side track drive wheels 14 can drive the drive tracks 16 . The diameter of the central crawler pulley 13 is smaller than the diameter of the supporting rollers 11 .

請參考圖6a、圖6b及圖7,該些支撐用的滾輪11之間距(pitch)D為習知傳動機構之間距的10倍,可提升該基板2被噴嘴17噴灑的範圍。該導正用的滾輪12之直徑大於該支撐用的滾輪11之直徑,用以在輸送該基板2時,該導正用的滾輪12可導正該基板2。該中央履帶傳動輪13之直徑小於該支撐用的滾輪11之直徑,可使該防掉板履帶15之高度低於該支撐用的滾輪11之高度,例如該防掉板履帶15與該支撐用的滾輪11之高度差d為2mm,藉此在輸送該基板2時,該防掉板履帶15不會防礙該些支撐用的滾輪11輸送該基板2,卻可防止該基板2掉板。該側邊履帶傳動輪14之直徑小於或等於該中央履帶傳動輪13之直徑。該支撐用的滾輪11、該導正用的滾輪12、該中央履帶傳動輪13及該側邊履帶傳動輪14之材質可為抗異物反沾材質,例如鐵氟龍(PTFE)、鐵氟龍(FFD)或鐵氟龍(PFA)材質。或者,該支撐用的滾輪11、該導正用的滾輪12、該中央履帶傳動輪13及該側邊履帶傳動輪14可鍍上一層抗異物反沾酸鹼陶瓷膜(例如二氧化矽)或抗異物反沾金屬膜(例如鈦金屬)。該支撐用的滾輪11、該導正用的滾輪12、該中央履帶傳動輪13及該側邊履帶傳動輪14之抗異 物反沾材質可避免輸送該基板2時造成沾黏。 6a , 6b and 7 , the pitch D between the supporting rollers 11 is 10 times the pitch D of the conventional transmission mechanism, which can increase the spraying range of the substrate 2 by the nozzle 17 . The diameter of the guiding roller 12 is larger than the diameter of the supporting roller 11 , so that the guiding roller 12 can guide the substrate 2 when the substrate 2 is conveyed. The diameter of the central track drive wheel 13 is smaller than the diameter of the support roller 11, so that the height of the anti-drop shoe track 15 can be lower than the height of the support roller 11, such as the drop shoe track 15 and the support track 15. The height difference d of the rollers 11 is 2 mm, so that when the substrate 2 is conveyed, the anti-dropping track 15 will not hinder the rollers 11 for supporting to convey the substrate 2, but can prevent the substrate 2 from falling off. The diameter of the side crawler pulley 14 is smaller than or equal to the diameter of the central crawler pulley 13 . The supporting rollers 11 , the guiding rollers 12 , the central track drive wheel 13 and the side track drive wheels 14 can be made of anti-foreign material anti-sticking materials, such as Teflon (PTFE), Teflon (FFD) or Teflon (PFA) material. Alternatively, the supporting roller 11, the guiding roller 12, the central crawler drive wheel 13 and the side crawler drive wheel 14 can be coated with a layer of anti-foreign object anti-staining acid-base ceramic film (such as silicon dioxide) or Anti-foreign object anti-stick metal film (such as titanium metal). The resistance of the supporting roller 11, the guiding roller 12, the central crawler drive wheel 13 and the side crawler drive wheel 14 The material anti-stick material can avoid sticking when the substrate 2 is transported.

根據本發明之水平式輸送基板之傳動機構,該些導正用的滾輪在輸送該基板時,可導正該基板。該多條防掉板履在輸送該基板時,可防止該基板掉板。相較先前技術,該些支撐用的滾輪間距較大,可提升該基板被噴灑的範圍。該防掉板履帶之抗酸鹼材質可避免掉板時該基板上殘留藥劑損壞該防掉板履帶。該支撐用的滾輪、該導正用的滾輪、該中央履帶傳動輪及該側邊履帶傳動輪之抗異物反沾材質可避免輸送該基板時造成沾黏。 According to the transmission mechanism for horizontally conveying the substrate of the present invention, the rollers for guiding can guide the substrate when conveying the substrate. The plurality of anti-falling shoes can prevent the substrate from falling off when the substrate is transported. Compared with the prior art, the distance between the supporting rollers is larger, which can increase the spraying range of the substrate. The acid and alkali resistant material of the anti-dropping shoe track can prevent the residual chemical on the base plate from damaging the anti-dropping shoe track when the shoe is dropped. The anti-foreign material and anti-sticking materials of the supporting roller, the guiding roller, the central crawler drive wheel and the side crawler drive wheel can avoid sticking when conveying the substrate.

綜上所述,乃僅記載本發明為呈現解決問題所採用的技術手段之較佳實施方式或實施例而已,並非用來限定本發明專利實施之範圍。即凡與本發明專利申請範圍文義相符,或依本發明專利範圍所做的均等變化與修飾,皆為本發明專利範圍所涵蓋。 To sum up, the present invention merely describes the preferred embodiments or examples of the technical means adopted by the present invention to solve the problem, and is not intended to limit the scope of the patent implementation of the present invention. That is, all the equivalent changes and modifications that are consistent with the context of the scope of the patent application of the present invention, or made in accordance with the scope of the patent of the present invention, are all covered by the scope of the patent of the present invention.

1:傳動機構 1: Transmission mechanism

11:支撐用的滾輪 11: Rollers for support

12:導正用的滾輪 12: Roller for guiding

13:中央履帶傳動輪 13: Central track drive wheel

14:側邊履帶傳動輪 14: Side track drive wheel

15:防掉板履帶 15: Anti-drop shoe track

16:傳動履帶 16: Transmission track

2:基板 2: Substrate

Claims (11)

一種水平式輸送基板之傳動機構,包括: A transmission mechanism for horizontally conveying substrates, comprising: 多個滾輪組,沿該基板行進方向依序排列,每組滾輪組包括: A plurality of roller sets are arranged in sequence along the traveling direction of the substrate, and each set of roller sets includes: 多個支撐用的滾輪,設置於該滾輪組之一中央區域,用以輸送該基板; A plurality of supporting rollers are arranged in a central area of the roller set for conveying the substrate; 兩個導正用的滾輪,設置於該滾輪組之兩側邊區域,用以在輸送該基板時,導正該基板; Two guide rollers are arranged on both sides of the roller set to guide the substrate when the substrate is conveyed; 至少一個中央履帶傳動輪,設置於該些支撐用的滾輪之間;以及 at least one central track drive wheel, disposed between the supporting rollers; and 至少一個側邊履帶傳動輪,設置於該支撐用的滾輪與該導正用的滾輪之間; At least one side crawler drive wheel is arranged between the supporting roller and the guiding roller; 多條防掉板履帶,連接於該兩個滾輪組的該中央履帶傳動輪之間,藉此該中央履帶傳動輪帶動該防掉板履帶;以及 A plurality of anti-drop shoe tracks are connected between the central track drive wheels of the two roller sets, whereby the central track drive wheels drive the drop shoe tracks; and 多條傳動履帶,連接於該兩個滾輪組的該側邊履帶傳動輪之間,藉此該側邊履帶傳動輪帶動該傳動履帶。 A plurality of drive tracks are connected between the side track drive wheels of the two roller sets, whereby the side track drive wheels drive the drive tracks. 如申請專利範圍第1項所述之水平式輸送基板之傳動機構,其中該導正用的滾輪之直徑大於該支撐用的滾輪之直徑。 The transmission mechanism for horizontally conveying substrates as described in item 1 of the scope of the application, wherein the diameter of the guiding roller is larger than the diameter of the supporting roller. 如申請專利範圍第1項所述之水平式輸送基板之傳動機構,其中該中央履帶傳動輪之直徑小於該支撐用的滾輪之直徑。 The transmission mechanism for horizontally conveying substrates as described in claim 1, wherein the diameter of the central crawler belt drive wheel is smaller than the diameter of the supporting rollers. 如申請專利範圍第3項所述之水平式輸送基板之傳動機構,其中該防掉板履帶之高度低於該支撐用的滾輪之高度。 The transmission mechanism for horizontally conveying substrates as described in item 3 of the scope of the patent application, wherein the height of the anti-falling shoe track is lower than the height of the supporting rollers. 如申請專利範圍第4項所述之水平式輸送基板之傳動機構,其中該防掉板履帶與該支撐用的滾輪之高度差為2mm。 The transmission mechanism for horizontally conveying substrates as described in item 4 of the scope of the patent application, wherein the height difference between the anti-falling shoe track and the supporting roller is 2mm. 如申請專利範圍第1項所述之水平式輸送基板之傳動機構,其中該防掉板履帶之材質為抗酸鹼材質。 The transmission mechanism for horizontally conveying substrates as described in item 1 of the scope of the patent application, wherein the material of the anti-falling shoe track is an acid and alkali resistant material. 如申請專利範圍第6項所述之水平式輸送基板之傳動機構,其中該抗酸鹼材質為鐵氟龍(PTFE)、鐵氟龍(FFD)、鐵氟龍(PFA)或鐵氟龍(ETFE)。 The transmission mechanism for horizontally conveying substrates as described in item 6 of the scope of the patent application, wherein the acid and alkali resistant material is Teflon (PTFE), Teflon (FFD), Teflon (PFA) or Teflon ( ETFE). 如申請專利範圍第1項所述之水平式輸送基板之傳動機構,其中該側邊履帶傳動輪之直徑小於或等於該中央履帶傳動輪之直徑。 The transmission mechanism for horizontally conveying substrates as described in claim 1, wherein the diameter of the side crawler belt drive wheels is smaller than or equal to the diameter of the central crawler belt pulley. 如申請專利範圍第1項所述之水平式輸送基板之傳動機構,其中該支撐用的滾輪、該導正用的滾輪、該中央履帶傳動輪及該側邊履帶傳動輪之材質為抗異物反沾材質。 The transmission mechanism for horizontally conveying substrates as described in item 1 of the scope of the patent application, wherein the supporting rollers, the guiding rollers, the central crawler drive wheels and the side crawler drive wheels are made of materials that are resistant to foreign objects. Dip the material. 如申請專利範圍第9項所述之水平式輸送基板之傳動機構,其中該抗異物反沾材質為鐵氟龍(PTFE)、鐵氟龍(FFD)或鐵氟龍(PFA)。 The transmission mechanism for horizontally conveying substrates as described in item 9 of the scope of the patent application, wherein the anti-foreign object anti-sticking material is Teflon (PTFE), Teflon (FFD) or Teflon (PFA). 如申請專利範圍第1項所述之水平式輸送基板之傳動機構,其中該多條防掉板履帶為細絲狀。 The transmission mechanism for horizontally conveying substrates as described in item 1 of the scope of the patent application, wherein the plurality of anti-drop shoe tracks are in the shape of filaments.
TW109124251A 2020-07-17 2020-07-17 Transmission mechanism for horizontally conveying substrates including a plurality of roller sets, a plurality of anti-drop crawler belts, and a plurality of transmission crawler belts TW202204233A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW109124251A TW202204233A (en) 2020-07-17 2020-07-17 Transmission mechanism for horizontally conveying substrates including a plurality of roller sets, a plurality of anti-drop crawler belts, and a plurality of transmission crawler belts
CN202011025572.7A CN113942860A (en) 2020-07-17 2020-09-25 Transmission mechanism for horizontal conveying substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW109124251A TW202204233A (en) 2020-07-17 2020-07-17 Transmission mechanism for horizontally conveying substrates including a plurality of roller sets, a plurality of anti-drop crawler belts, and a plurality of transmission crawler belts

Publications (1)

Publication Number Publication Date
TW202204233A true TW202204233A (en) 2022-02-01

Family

ID=79327192

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109124251A TW202204233A (en) 2020-07-17 2020-07-17 Transmission mechanism for horizontally conveying substrates including a plurality of roller sets, a plurality of anti-drop crawler belts, and a plurality of transmission crawler belts

Country Status (2)

Country Link
CN (1) CN113942860A (en)
TW (1) TW202204233A (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6413340A (en) * 1987-07-02 1989-01-18 Nec Corp Wafer conveying device
TW482177U (en) * 2000-12-16 2002-04-01 Songtex Technology Company Ltd Transmission roll device
TW561071B (en) * 2002-06-05 2003-11-11 Sumitomo Precision Prod Co Nozzle device and substrate processing device with the nozzle device
JP2006298642A (en) * 2005-03-23 2006-11-02 Seiko Epson Corp Ink jet recording device
KR100783069B1 (en) * 2007-02-16 2007-12-07 세메스 주식회사 Apparatus for transferring a substrate and apparatus for treating the substrate including the same
CN203349646U (en) * 2013-05-23 2013-12-18 江阴江顺铝型材成套设备制造有限公司 Device preventing short bar of hot shearing furnace from falling
CN208345294U (en) * 2018-06-22 2019-01-08 厦门市铂联科技股份有限公司 A kind of anti-lost panel assembly for flexible circuit board horizontal transmission line

Also Published As

Publication number Publication date
CN113942860A (en) 2022-01-18

Similar Documents

Publication Publication Date Title
JP4753313B2 (en) Substrate processing equipment
JP4745040B2 (en) Substrate transport apparatus and substrate processing apparatus
KR100596050B1 (en) Glass substrate transferring system
JPWO2015129803A1 (en) Conveying device and conveyor device
JP2008159782A (en) Vacuum dryer
JP2008285323A (en) Conveyor for base plate material
TW200849447A (en) Systems and methods for transport through curved conveyance sections
TW202204233A (en) Transmission mechanism for horizontally conveying substrates including a plurality of roller sets, a plurality of anti-drop crawler belts, and a plurality of transmission crawler belts
JP2008137733A (en) Conveyor for surface treating device
TW201420464A (en) Transporting apparatus
JP4972618B2 (en) Substrate transfer device
KR20060088286A (en) System for manufacturing multi-layered thin film
CN103488052B (en) Exposure device
JP2004094142A (en) Wide width exposing device
JP4705794B2 (en) Wiring board transport mechanism
TWI609825B (en) Tape transmitting device
TW202202421A (en) Transmission mechanism for horizontally or vertically conveying substrate and substrate conveying device disposing a plurality of embedded magnetic blocks in marginal areas at two sides of both the first mesh-like track and the second mesh-like track
TWI718587B (en) Bar-type substrate transportation device and method
TWI855365B (en) Reel-to-reel circuit board manufacturing apparatus
TWI229048B (en) Transportation device for substrate materials
TWI684739B (en) Substrate baking apparatus and baking method
JP7205906B2 (en) Parts feeder
WO2023167022A1 (en) Circuit board, method for manufacturing circuit pattern, and etching device
CN211140832U (en) Substrate conveying device
TWM598018U (en) Warp-limiting mechanism and production apparatus for flexible metal substrate