TW202202421A - Transmission mechanism for horizontally or vertically conveying substrate and substrate conveying device disposing a plurality of embedded magnetic blocks in marginal areas at two sides of both the first mesh-like track and the second mesh-like track - Google Patents
Transmission mechanism for horizontally or vertically conveying substrate and substrate conveying device disposing a plurality of embedded magnetic blocks in marginal areas at two sides of both the first mesh-like track and the second mesh-like track Download PDFInfo
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- TW202202421A TW202202421A TW109123441A TW109123441A TW202202421A TW 202202421 A TW202202421 A TW 202202421A TW 109123441 A TW109123441 A TW 109123441A TW 109123441 A TW109123441 A TW 109123441A TW 202202421 A TW202202421 A TW 202202421A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0417—Feeding with belts or tapes
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Abstract
Description
本發明是有關於一種水平式或直立式輸送基板之傳動機構,且特別是有關於一種基板輸送設備,其包括水平式或直立式輸送基板之傳動機構的第一及第二網狀履帶可帶動該基板平穩地前進,進而使藥水與該基板表面均勻反應,並降低或杜絕異物反沾。 The present invention relates to a transmission mechanism for horizontally or vertically conveying substrates, and in particular, to a substrate conveying device, which includes the first and second mesh crawler belts of the transmission mechanism for horizontally or vertically conveying substrates that can be driven The substrate moves forward smoothly, so that the liquid medicine reacts with the surface of the substrate uniformly, and the back-sticking of foreign objects is reduced or prevented.
隨著電子產品日趨小型化與高速性能化,電路板已從單面板發展為雙面板與多層板。其中,雙面電路板與多層電路板具有較多之線路面積、較高之裝配密度而得到廣泛應用。 With the increasing miniaturization and high-speed performance of electronic products, circuit boards have developed from single-sided to double-sided and multi-layered boards. Among them, double-sided circuit boards and multi-layer circuit boards are widely used because of their larger circuit area and higher assembly density.
多層電路板之製作工序繁多,一般包括內層線路製作、內層檢查、壓合、鑽孔、電鍍、製作外層導電線路、線路電鍍、外層檢查、防焊、表面加工與切割成型等工序。為提高生產效率,通常採用基板輸送系統將上一工序製作完成之基板輸送至下一工序之工作台加以製作。 There are many production processes for multi-layer circuit boards, generally including inner layer circuit production, inner layer inspection, lamination, drilling, electroplating, production of outer layer conductive circuit, circuit plating, outer layer inspection, solder mask, surface processing and cutting and forming. In order to improve production efficiency, a substrate conveying system is usually used to transport the substrates produced in the previous process to the workbench in the next process for production.
請參考圖1a及圖1b,其顯示第一種習知輸送基板之傳動機構。當該基板2為片狀硬板製品或軟板製品時,該傳動機構9為了防止輸送基板的過程中掉板,所以滾輪91之間排列非常緊密,需大數量的葉片滾輪帶動基板2前進。然而,滾輪91保養不易且具有異物反沾的風險。再者,該基板2被噴嘴92噴灑的範圍小,如圖2所示。
Please refer to FIG. 1a and FIG. 1b, which show a first conventional transmission mechanism for conveying substrates. When the
請參考圖3a及圖3b,其顯示第二種習知輸送基板之傳動機構。當該基板2為捲狀軟板製品或硬板製品時,由於該傳動機構8具有前後傳動輪80帶動並支撐該基板2,因此該基板2
之中間區域不需葉片滾輪,即可採寬間距(pitch)的滾輪81支撐該基板2。雖然提升該基板2被噴嘴82噴灑的範圍,但滾輪仍具有異物反沾的風險,如圖4所示。
Please refer to FIG. 3a and FIG. 3b, which show the second conventional transmission mechanism for conveying the substrate. When the
中華民國專利公告號I351377揭示一種基板輸送系統,其包括第一傳送裝置、第二傳送裝置與轉移裝置。該第一傳送裝置包括複數個間隔分佈之第一傳送單元,該第二傳送裝置包括複數個間隔分佈之第二傳送單元。相鄰兩個第一傳送單元之間形成第一通道,相鄰兩個第二傳送單元之間形成第二通道。該轉移裝置包括升降裝置及複數根固定於升降裝置之承載件。所述升降裝置相對第一通道與第二通道相對滑動設置,使承載件可沿第一通道與第二通道運動。該基板輸送系統方便轉換基板傳送方向,傳送效率高。 ROC Patent Publication No. I351377 discloses a substrate conveying system, which includes a first conveying device, a second conveying device and a transferring device. The first conveying device includes a plurality of first conveying units distributed at intervals, and the second conveying device includes a plurality of second conveying units distributed at intervals. A first channel is formed between two adjacent first conveying units, and a second channel is formed between two adjacent second conveying units. The transfer device includes a lifting device and a plurality of carriers fixed on the lifting device. The lifting device is slidably disposed relative to the first channel and the second channel, so that the carrier can move along the first channel and the second channel. The substrate conveying system is convenient to change the conveying direction of the substrate and has high conveying efficiency.
然而,上述專利文獻並未解決滾輪具有異物反沾的風險。 However, the above-mentioned patent documents do not address the risk of foreign matter back-sticking of the rollers.
因此,便有需要提供一種水平式或直立式輸送基板之傳動機構,可解決前述的問題。 Therefore, there is a need to provide a transmission mechanism for conveying substrates horizontally or vertically, which can solve the aforementioned problems.
本發明之一目的是提供一種水平式或直立式輸送基板之傳動機構,其之第一及第二網狀履帶可帶動該基板平穩地前進,並降低或杜絕異物反沾。 An object of the present invention is to provide a transmission mechanism for horizontally or vertically conveying substrates, wherein the first and second mesh crawler belts can drive the substrates to move forward smoothly, and reduce or prevent foreign objects from sticking back.
依據上述之目的,本發明提供一種水平式或直立式輸送基板之傳動機構,包括:兩個第一傳動輪;一第一網狀履帶,其連接該兩個第一滾輪,藉此該兩個第一滾輪沿該基板之一前進方向而帶動該第一網狀履帶;兩個第二傳動輪,其相對該兩第一傳動輪而設置;以及一第二網狀履帶,其連接該兩個第二滾輪,藉此該兩個第二滾輪也沿該基板之該前進方向而帶動該第二網狀履帶;其中該第一及第二網狀履帶之兩側的邊緣區域皆設置有多個埋入式磁塊,當該第一及第二網狀履帶之該些埋入式磁塊彼此吸附時,該基板之兩側的邊緣區域被夾於該第一網狀履帶之兩側的邊緣區域與該第二網狀履帶之兩側的邊緣區域之間,藉此該第 一及第二網狀履帶動該基板前進。 According to the above purpose, the present invention provides a transmission mechanism for conveying substrates horizontally or vertically, comprising: two first transmission wheels; A first roller drives the first mesh crawler along a forward direction of the base plate; two second transmission wheels are arranged opposite to the two first transmission wheels; and a second mesh crawler connects the two the second roller, whereby the two second rollers also drive the second mesh crawler along the advancing direction of the base plate; wherein the edge regions on both sides of the first and second mesh crawler are provided with a plurality of Embedded magnet blocks, when the embedded magnet blocks of the first and second mesh crawler tracks are attracted to each other, the edge regions on both sides of the base plate are sandwiched between the edges on both sides of the first mesh crawler track area and the edge areas on both sides of the second mesh track, whereby the first The first and second mesh crawlers drive the base plate forward.
本發明之水平式輸送基板之傳動機構的第一及第二網狀履帶可帶動該基板平穩地前進,並使用網狀履帶取代滾輪的設計,增加基板被噴灑範圍,降低或杜絕異物反沾,避免先前技術之滾輪反沾所造成的基板表面缺陷。再者,相較先前技術的滾輪,網狀履帶易於保養。 The first and second meshed crawler belts of the transmission mechanism for horizontally conveying the substrate of the present invention can drive the substrate to move forward smoothly, and the meshed crawler belt is used to replace the design of the rollers, so as to increase the spraying range of the substrate, reduce or prevent foreign objects from sticking back, The surface defects of the substrate caused by the reverse dip of the roller in the prior art are avoided. Furthermore, the mesh track is easier to maintain than the rollers of the prior art.
本發明更提供一種基板輸送設備,包括:多個功能藥水槽;多個傳動機構,其為上述直立式輸送基板之傳動機構,並分別設置於該些功能藥水槽內;多個藥水溢流空曝區,設置於該些功能藥水槽之基板入口處外及基板出口處外;以及多個擋水滾輪,設置於該些功能藥水槽之基板入口處內外及基板出口處內外。 The present invention further provides a substrate conveying equipment, comprising: a plurality of functional medicine water tanks; a plurality of transmission mechanisms, which are the transmission mechanisms for the above-mentioned vertical conveying substrates, and are respectively arranged in the functional medicine water tanks; The exposure area is arranged outside the entrance of the substrate and outside the outlet of the substrate; and a plurality of water blocking rollers are arranged inside and outside the entrance of the substrate and the outlet of the substrate of the functional medicine tank.
根據本發明之基板輸送設備,其直立式輸送基板之傳動機構的第一及第二網狀履帶可帶動該基板平穩地前進,進而使藥水與該基板表面均勻反應,並使用網狀履帶以降低或杜絕異物反沾。再者,相較於滾輪,網狀履帶易於保養。該第一及第二網狀履帶之抗異物反沾材質可避免輸送該基板時造成沾黏。另外,該些擋水滾輪之抗異物反沾材質可避免輸送該基板時造成沾黏。 According to the substrate conveying equipment of the present invention, the first and second meshed crawler belts of the vertical transmission mechanism for conveying the substrates can drive the substrates to move forward smoothly, so that the liquid medicine reacts with the surface of the substrates uniformly, and the meshed crawler belts are used to reduce the Or prevent foreign objects from sticking. Furthermore, compared to rollers, mesh tracks are easier to maintain. The anti-foreign and anti-sticking materials of the first and second mesh crawlers can avoid sticking when the substrate is transported. In addition, the anti-foreign material anti-sticking material of the water blocking rollers can avoid sticking when the substrate is transported.
1:傳動機構 1: Transmission mechanism
11a:第一傳動輪 11a: The first transmission wheel
11b:第一傳動輪 11b: The first transmission wheel
12:第一網狀履帶 12: The first mesh track
13a:第一傳動輪 13a: The first transmission wheel
13b:第一傳動輪 13b: The first transmission wheel
14:第二網狀履帶 14: Second mesh track
15:埋入式磁塊 15: Buried magnets
17:噴嘴 17: Nozzle
2:基板 2: Substrate
3:基板輸送設備 3: Substrate conveying equipment
31:功能藥水槽 31: Functional Potion Tank
32:藥水溢流空曝區 32: Potion overflow empty exposure area
33:擋水滾輪 33: Water blocking roller
8:傳動機構 8: Transmission mechanism
80:傳動輪 80: Transmission wheel
81:滾輪 81: Roller
82:噴嘴 82: Nozzle
9:傳動機構 9: Transmission mechanism
91:滾輪 91: Roller
92:噴嘴 92: Nozzle
D1:第一間距 D1: The first spacing
D2:第二間距 D2: The second spacing
E1:邊緣區域 E1: Edge area
E2:邊緣區域 E2: Edge area
F:前進方向 F: Forward direction
M:中央區域 M: Central area
W:寬度 W: width
圖1a及圖1b為第一種習知輸送基板之傳動機構之上視及側視示意圖,其顯示基板被輸送。 1a and 1b are schematic top and side views of a first conventional transmission mechanism for conveying substrates, which show that the substrates are being conveyed.
圖2為第一種習知輸送基板之傳動機構之滾輪之剖面示意圖,其顯示基板被噴灑的範圍。 FIG. 2 is a schematic cross-sectional view of the roller of the first conventional transmission mechanism for conveying the substrate, which shows the area where the substrate is sprayed.
圖3a及圖3b為第二種習知輸送基板之傳動機構之上視及側視示意圖,其顯示基板被輸送。 3a and 3b are schematic top and side views of a second conventional transmission mechanism for conveying substrates, showing the substrate being conveyed.
圖4為第二種習知輸送基板之傳動機構之滾輪之剖面示意圖,其 顯示基板被噴灑的範圍。 4 is a schematic cross-sectional view of a roller of a second conventional transmission mechanism for conveying substrates, which is Displays the area where the substrate is sprayed.
圖5a及圖5b為本發明之第一實施例之水平式輸送基板之傳動機構之上視及側視示意圖,其顯示基板被輸送。 5a and 5b are schematic top and side views of the transmission mechanism for horizontally conveying substrates according to the first embodiment of the present invention, which show that the substrates are being conveyed.
圖6為本發明之第一實施例之水平式輸送基板之網狀履帶之剖面示意圖,其顯示基板被噴灑的範圍。 6 is a schematic cross-sectional view of the mesh crawler for horizontally conveying substrates according to the first embodiment of the present invention, which shows the range where the substrates are sprayed.
圖7a及圖7b為本發明之第二實施例之水平式輸送基板之傳動機構之上視及側視示意圖,其顯示基板被輸送。 7a and 7b are schematic top and side views of a transmission mechanism for horizontally conveying substrates according to a second embodiment of the present invention, which show that the substrates are being conveyed.
圖8為本發明之第二實施例之水平式輸送基板之網狀履帶之剖面示意圖,其顯示基板被噴灑的範圍。 8 is a schematic cross-sectional view of a mesh crawler for horizontally conveying substrates according to a second embodiment of the present invention, which shows the range where the substrates are sprayed.
圖9為本發明之一實施例之第一及第二網狀履帶之部分平面示意圖。 9 is a partial plan view of the first and second mesh crawler tracks according to an embodiment of the present invention.
圖10為本發明之一實施例之第一及第二網狀履帶與基板之部分剖面示意圖。 10 is a partial cross-sectional schematic diagram of the first and second mesh crawler tracks and the base plate according to an embodiment of the present invention.
圖11a為本發明之一實施例之基板輸送設備之上視示意圖。 FIG. 11a is a schematic top view of a substrate conveying apparatus according to an embodiment of the present invention.
圖11b為本發明之一實施例之基板輸送設備之直立式輸送基板之傳動機構之立體示意圖。 FIG. 11b is a schematic perspective view of a transmission mechanism for vertically conveying substrates of a substrate conveying apparatus according to an embodiment of the present invention.
為讓本發明之上述目的、特徵和特點能更明顯易懂,茲配合圖式將本發明相關實施例詳細說明如下。 In order to make the above objects, features and characteristics of the present invention more obvious and easy to understand, the relevant embodiments of the present invention are described in detail as follows in conjunction with the drawings.
圖5a及圖5b為本發明之第一實施例之水平式輸送基板之傳動機構之上視及側視示意圖,其顯示基板2被輸送。圖6為本發明之第一實施例之水平式輸送基板之網狀履帶之剖面示意圖,其顯示基板2被噴嘴17噴灑的範圍。第一實施例之基板可為片狀之電路板、硬板或軟板。圖7a及圖7b為本發明之第二實施例之水平式輸送基板之傳動機構之上視及側視示意圖,其顯示基板2被輸送。圖8為本發明之第二實施例之水平式輸送基板之網狀履帶之剖面示意圖,其顯示基板2被噴嘴17噴灑的範圍。第二
實施例之基板2可為捲狀之電路板、硬板或軟板。
5a and 5b are schematic top and side views of the transmission mechanism for horizontally conveying the substrate according to the first embodiment of the present invention, which show that the
請再參考圖5b及圖7b,該水平式輸送基板之傳動機構1包括:兩個第一傳動輪11a、11b、一第一網狀履帶12、兩個第二傳動輪13a、13b及一第二網狀履帶14。該第一網狀履帶12連接該兩個第一滾輪11a、11b,藉此該兩個第一滾輪11a、11b沿該基板2之一前進方向F而帶動該第一網狀履帶12。該兩個第二傳動輪13a、13b相對該兩第一傳動輪11a、11b而設置。該第二網狀履帶14連接該兩個第二滾輪13a、13b,藉此該兩個第二滾輪13a、13b也沿該基板2之該前進方向F而帶動該第二網狀履帶14。
5b and 7b again, the
請參考圖9及圖10,該第一及第二網狀履帶12、14之兩側的邊緣區域E1、E2皆設置有多個埋入式磁塊15,例如該第一及第二網狀履帶12、14之寬度W為260mm,該些埋入式磁塊15之窄寬為5mm,該邊緣區域E1、E2之寬度大於5mm。該第一及第二網狀履帶12、14之寬度W大體上相同於該基板2之寬度W,且當該第一及第二網狀履帶12、14之該些埋入式磁塊15彼此吸附時,該基板2之兩側的邊緣區域M被夾於該第一網狀履帶12之兩側的邊緣區域E1、E2與該第二網狀履帶14之兩側的邊緣區域E1、E2之間,藉此該第一及第二網狀履帶12、14可帶動該基板2前進。該第一及第二網狀履帶12、14為中空網狀設計,可降低異物反沾。再者,該第一及第二網狀履帶12、14之材質為抗異物反沾材質,例如鐵氟龍(PTFE)、鐵氟龍(FFD)或鐵氟龍(PFA)材質。或者,該第一及第二網狀履帶12、14可鍍上一層抗異物反沾酸鹼陶瓷膜(例如二氧化矽)或抗異物反沾金屬膜(例如鈦金屬),則可杜絕異物反沾。
Please refer to FIG. 9 and FIG. 10 , the edge regions E1 and E2 on both sides of the first and second meshed crawler tracks 12 and 14 are provided with a plurality of embedded
請再參考圖9,在本實施例中,該第一及第二網狀履帶12、14之同一側的邊緣區域E1及同一側的邊緣區域E2上,相鄰的埋入式磁塊15之間的磁性相反,例如同一側的邊緣區域E1上的該些埋入式磁塊15之磁性排列依序為N極、S極、N極、S極等。在該第一及第二網狀履帶12、14之不同側的邊緣區域E1、
E2上,相對的該兩個埋入式磁塊之間的磁性也是相反,例如在不同側的邊緣區域E1及邊緣區域E2上,相對的的該兩個埋入式磁塊15之磁性分別為N極及S極,或者N極及S極。當該第一及第二網狀履帶12、14帶動該基板2前進時,該第一網狀履帶12之邊緣區域E1、E2上的該些埋入式磁塊15與該第二網狀履帶14之對應吸附的邊緣區域E1、E2上的該些埋入式磁塊15須具有相反磁性。或者,該第一網狀履帶12之邊緣區域E1、E2上的該些埋入式磁塊15具有磁性或導磁性之一,而該第二網狀履帶14之對應吸附的邊緣區域E1、E2上的該些埋入式磁塊15須具有磁性或導磁性之另一。上述埋入式磁塊15之磁性配置可使該第一及第二網狀履帶12、14之該些埋入式磁塊15彼此快速且正確吸附。該些埋入式磁塊15可為電磁鐵或永久磁鐵。
Referring again to FIG. 9 , in this embodiment, on the edge region E1 and the edge region E2 on the same side of the first and second
在另一實施例中,當該第一及第二網狀履帶12、14帶動該基板2前進時,該第一網狀履帶12之邊緣區域E1、E2上的該些埋入式磁塊15具有磁性即可,而該第二網狀履帶14之對應吸附的邊緣區域E1、E2上的該些埋入式磁塊15則具有相反磁性,上述埋入式磁塊15之磁性配置可使該第一及第二網狀履帶12、14之該些埋入式磁塊15彼此正確吸附。在又一實施例中,當該第一及第二網狀履帶12、14帶動該基板2前進時,該第一網狀履帶12之邊緣區域E1、E2上的該些埋入式磁塊15具有磁性或導磁性之一者即可,而該第二網狀履帶14之對應吸附的邊緣區域E1、E2上的該些埋入式磁塊15須具有磁性或導磁性之另一者,上述埋入式磁塊15之磁性配置亦可使該第一及第二網狀履帶12、14之該些埋入式磁塊15彼此正確吸附。
In another embodiment, when the first and second
請再參考圖10,該第一網狀履帶12之中央區域M與與該基板2之中央區域M之間具有第一間距D1,例如第一間距D1為2mm。同樣地,該第二網狀履帶14之中央區域M與該基板2之中央區域M之間也具有第二間距D2,例如第二間距D2為2mm。該第一間距D1與第二間距D2的總和為4mm,可允許該基
板2之中央區域M在該第一網狀履帶12之中央區域M與該第二網狀履帶14之中央區域M的間距(亦即等於該第一及第二間距間距D1、D2的總和加上該基板2之厚度)內移動,以避免該第一及第二網狀履帶12、14摩擦或損壞該基板2之中央區域。
Referring to FIG. 10 again, there is a first distance D1 between the central area M of the
本發明之水平式輸送基板之傳動機構的第一及第二網狀履帶可帶動該基板平穩地前進,並使用網狀履帶取代滾輪的設計,增加基板被噴灑的範圍,降低或杜絕異物反沾,避免先前技術之滾輪反沾所造成的基板表面缺陷。再者,相較先前技術的滾輪,網狀履帶易於保養。 The first and second mesh-shaped crawler belts of the transmission mechanism for horizontally conveying the substrate of the present invention can drive the substrate to move forward smoothly, and the mesh-shaped crawler belt is used to replace the design of the rollers, so as to increase the range of the substrate to be sprayed, and reduce or prevent foreign objects from sticking back. , to avoid the surface defects of the substrate caused by the reverse dip of the roller in the prior art. Furthermore, the mesh track is easier to maintain than the rollers of the prior art.
圖11a為本發明之一實施例之基板輸送設備之上視示意圖。圖11b為本發明之一實施例之直立式輸送基板之傳動機構之立體示意圖。該基板輸送設備3包括:多個功能藥水槽31、多個傳動機構1、多個藥水溢流空曝區32及多個擋水滾輪33。該些功能藥水槽31,依藥水作業參數,使藥水與該基板2表面反應。該些功能藥水槽31之材質可為不銹鋼(SUS)、聚丙烯(PP)、聚氯乙烯(PVC)等。該傳動機構1為本發明之直立式輸送基板之傳動機構,並分別設置於該些功能藥水槽31內。該兩第一傳動輪11a、11b及該兩第二傳動輪13a、13b為迴流式網狀履帶傳動輪,用以分別帶動該第一及第二網狀履帶12、14。例如,該兩第一傳動輪11a、11b及該兩第二傳動輪13a、13b為實心滾輪,該兩第一傳動輪11a、11b及該兩第二傳動輪13a、13b之輪間距約20mm,且其之材質可為高結晶聚丙烯(HCPP)。
FIG. 11a is a schematic top view of a substrate conveying apparatus according to an embodiment of the present invention. FIG. 11 b is a schematic perspective view of a transmission mechanism for vertically conveying substrates according to an embodiment of the present invention. The
在本實施例中,該基板2可為捲狀之電路板或軟板。當該第一及第二網狀履帶12、14之該些埋入式磁塊15彼此吸附時,該基板2之兩側的邊緣區域被夾於該第一網狀履帶12之兩側的邊緣區域與該第二網狀履帶14之該些邊緣區域之間,藉此該第一及第二網狀履帶12、14可帶動該基板2前進。由於該基板2被保持在該第一網狀履帶12與該第二網狀履帶14之間,因此該基板2可平穩地前進,進而使藥水與該基板2表面均勻反應。再者,
該第一及第二網狀履帶12、14之中央區域與該基板2之中央區域之間分別具有第一及第二間距。該第一及第二間距可分別為2mm,該第一及第二間距的總和為4mm,可允許該基板2之中央區域在該第一網狀履帶12之中央區域與該第二網狀履帶14之中央區域的間距內浮動,以避免該第一及第二網狀履帶12、14摩擦或損壞該基板2之中央區域。例如,該第一及第二網狀履帶12、14之厚度約0.08~0.25mm,且其之材質為抗異物反沾材質,例如鐵氟龍(PTFE)、鐵氟龍(FFD)或鐵氟龍(PFA)材質。或者,該第一及第二網狀履帶12、14可鍍上一層抗異物反沾酸鹼陶瓷膜(例如二氧化矽)或抗異物反沾金屬膜(例如鈦金屬),可杜絕異物反沾。
In this embodiment, the
該些藥水溢流空曝區32設置於該些功能藥水槽31之基板入口處外及基板出口處外,依照溢流量設置,用以避免前後功能藥水槽31之間的污染。該些藥水溢流空曝區32之材質可為不銹鋼(SUS)、聚丙烯(PP)、聚氯乙烯(PVC)等。該些擋水滾輪33設置於該些功能藥水槽31之基板入口處內外及基板出口處內外,用以減少藥水溢流量。部分之擋水滾輪33位於該些藥水溢流空曝區32內。例如,該些擋水滾輪33之直徑約20mm,且其之材質可為抗異物反沾材質,例如鐵氟龍(PTFE)、鐵氟龍(FFD)或鐵氟龍(PFA)材質。或者,該些擋水滾輪33可鍍上一層抗異物反沾酸鹼陶瓷膜(例如二氧化矽)或抗異物反沾金屬膜(例如鈦金屬)。
The potion overflow
根據本發明之基板輸送設備,其直立式輸送基板之傳動機構的第一及第二網狀履帶可帶動該基板平穩地前進,進而使藥水與該基板表面均勻反應,並使用網狀履帶以降低或杜絕異物反沾。再者,相較於滾輪,網狀履帶易於保養。該第一及第二網狀履帶之抗異物反沾材質可避免輸送該基板時造成沾黏。另外,該些擋水滾輪之抗異物反沾材質可避免輸送該基板時造成沾黏。 According to the substrate conveying equipment of the present invention, the first and second meshed crawler belts of the vertical transmission mechanism for conveying the substrates can drive the substrates to move forward smoothly, so that the liquid medicine reacts with the surface of the substrates uniformly, and the meshed crawler belts are used to reduce the Or prevent foreign objects from sticking. Furthermore, compared to rollers, mesh tracks are easier to maintain. The anti-foreign and anti-sticking materials of the first and second mesh crawlers can avoid sticking when the substrate is transported. In addition, the anti-foreign material anti-sticking material of the water blocking rollers can avoid sticking when the substrate is transported.
綜上所述,乃僅記載本發明為呈現解決問題所採用的技術手段之較佳實施方式或實施例而已,並非用來限定本發明 專利實施之範圍。即凡與本發明專利申請範圍文義相符,或依本發明專利範圍所做的均等變化與修飾,皆為本發明專利範圍所涵蓋。 To sum up, the present invention only describes the preferred embodiments or examples of the technical means adopted by the present invention to solve the problem, and is not intended to limit the present invention. Scope of patent enforcement. That is, all the equivalent changes and modifications that are consistent with the context of the scope of the patent application of the present invention, or made in accordance with the scope of the patent of the present invention, are all covered by the scope of the patent of the present invention.
1:傳動機構 1: Transmission mechanism
11a:第一傳動輪 11a: The first transmission wheel
11b:第一傳動輪 11b: The first transmission wheel
12:第一網狀履帶 12: The first mesh track
13a:第一傳動輪 13a: The first transmission wheel
13b:第一傳動輪 13b: The first transmission wheel
14:第二網狀履帶 14: Second mesh track
15:埋入式磁塊 15: Buried magnets
2:基板 2: Substrate
Claims (15)
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JPH09298228A (en) * | 1996-05-02 | 1997-11-18 | Hitachi Ltd | Substrate transportation device, substrate transportation method and manufacture device for semiconductor integrated circuit device provided with substrate transportation device |
CN2394781Y (en) * | 1999-10-12 | 2000-09-06 | 罗文发 | Film automatic continuous transporting and printing device for screen printer |
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