TW202200994A - 缺陷檢查裝置 - Google Patents

缺陷檢查裝置 Download PDF

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Publication number
TW202200994A
TW202200994A TW110122717A TW110122717A TW202200994A TW 202200994 A TW202200994 A TW 202200994A TW 110122717 A TW110122717 A TW 110122717A TW 110122717 A TW110122717 A TW 110122717A TW 202200994 A TW202200994 A TW 202200994A
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TW
Taiwan
Prior art keywords
images
defect
inspection
image
workpiece
Prior art date
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TW110122717A
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English (en)
Chinese (zh)
Inventor
舘知宏
Original Assignee
日商安永股份有限公司
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Application filed by 日商安永股份有限公司 filed Critical 日商安永股份有限公司
Publication of TW202200994A publication Critical patent/TW202200994A/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW110122717A 2020-06-22 2021-06-22 缺陷檢查裝置 TW202200994A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020106959A JP2022001851A (ja) 2020-06-22 2020-06-22 欠陥検査装置
JP2020-106959 2020-06-22

Publications (1)

Publication Number Publication Date
TW202200994A true TW202200994A (zh) 2022-01-01

Family

ID=79244333

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110122717A TW202200994A (zh) 2020-06-22 2021-06-22 缺陷檢查裝置

Country Status (3)

Country Link
JP (1) JP2022001851A (ja)
TW (1) TW202200994A (ja)
WO (1) WO2021261302A1 (ja)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3312849B2 (ja) * 1996-06-25 2002-08-12 松下電工株式会社 物体表面の欠陥検出方法
US7105848B2 (en) * 2002-04-15 2006-09-12 Wintriss Engineering Corporation Dual level out-of-focus light source for amplification of defects on a surface
JP5417306B2 (ja) * 2010-11-29 2014-02-12 株式会社日立ハイテクノロジーズ 欠陥検査方法および欠陥検査装置
JP6635712B2 (ja) * 2015-08-21 2020-01-29 キヤノン株式会社 検査方法、検査装置、画像処理装置、プログラム及び記録媒体

Also Published As

Publication number Publication date
WO2021261302A1 (ja) 2021-12-30
JP2022001851A (ja) 2022-01-06

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