TW202146796A - Fluid shutoff valve - Google Patents

Abstract

The present invention discloses fluid shutoff valve comprising a valve housing having a fluid passage through which a fluid flows and an accommodation space formed outside the fluid passage, a first shielding module having a first shielding plate which is located at a first standby position of the accommodation space and move to the shielding position to shield the fluid passage, a second shielding module having a second shielding plate which is located at a second standby position of the accommodation space and move to the shielding position to alternately shield the fluid passage with the first shielding module, a first injection module for injecting cleaning gas onto the first shielding plate and a second injection module for injecting cleaning gas onto the second shielding plate.

Description

Fluid stop valve

The present invention relates to a fluid shut-off valve that temporarily blocks the flow of a fluid including exhaust gas and reaction by-products, which is provided in a process chamber or process piping of a semiconductor production line or a display production line.

A semiconductor production line or a display production line includes a process device, process piping, and a vacuum pump, and the process device and the vacuum pump can be connected by the process piping. The process device includes a process chamber, and a vacuum is formed inside the process chamber by a vacuum pump. The interior of the process chamber is kept in a vacuum state, and processes such as evaporation or etching are performed. When maintaining process equipment, maintaining process piping, or maintaining vacuum pumps, the above-mentioned process chamber can be maintained in a state of being blocked from the atmosphere by a blocking fluid shut-off valve.

The above-mentioned fluid shut-off valve needs to maintain the shielding force when blocking. In the event of a leak in the fluid shut-off valve described above, it is possible to cause contamination inside the process chamber and delays in the maintenance process.

In addition, during the above-mentioned manufacturing process, the process chamber needs to be repeatedly maintained in a vacuum state and an atmospheric pressure state, and maintenance of components connected between the process chamber and the vacuum pump is frequently required. In the above case, the fluid shut-off valve at the upper portion of the vacuum pump is sealed, so that the pressures of the upper and lower portions of the fluid shut-off valve can be maintained at atmospheric pressure or a vacuum state, respectively.

In addition, unlike the above, when replacing and maintaining the vacuum pump, it is necessary to block the fluid shut-off valve to keep the upper part of the fluid shut-off valve in a vacuum state. In this case, the above-mentioned fluid shut-off valve needs to repeatedly perform shielding, and in particular, when shielding is performed, leakage cannot occur. That is, the shielding function of the above-mentioned fluid shut-off valve is extremely important.

In addition, the fluid shut-off valve described above will also be used in processes where a large amount of process reaction by-products (process powders) are generated. In the process of performing the shielding by the above-mentioned fluid shut-off valve, the shielding is precisely accomplished in a manner to prevent leakage. However, when the above-mentioned fluid shut-off valve is used in a process in which there are many reaction by-products, there is a possibility that the reaction by-products may be deposited or fixed on the shielding plate for blocking the fluid. In this case, the above-mentioned fluid shut-off valve is not properly shielded and leaks occur, resulting in a decrease in process efficiency.

[Problems to be Solved by Invention]

An object of the present invention is to provide a fluid shut-off valve capable of maintaining a shielding function by removing reaction by-products deposited on an upper surface of a shielding plate.

Furthermore, an object of the present invention is to provide a fluid shut-off valve in which the maintenance period of the fluid shut-off valve can be extended by constituting at least two shielding plates that alternately move and block the flow of the fluid. [Technical means to solve problems]

The fluid shut-off valve of the present invention is characterized in that it includes: a valve cover, including a fluid channel and a receiving space, the fluid channel is formed between the upper hole of the cover and the lower hole of the cover to allow fluid to flow in and flow, and the receiving space is formed in The outer side of the fluid channel is connected to the fluid channel; the first shielding module includes a first shielding plate, and the first shielding plate is located in the first waiting position of the receiving space and moves to the shielding position of the fluid channel to shield the fluid channel; the second shielding module includes a second shielding plate, the second shielding plate is located in the second waiting position of the receiving space, and moves to the shielding position to alternately shield the fluid channel with the first shielding module; The first spraying module is used for spraying the cleaning gas to the first shielding plate; and the second spraying module is used for spraying the cleaning gas to the second shielding plate.

In addition, the fluid shut-off valve of the present invention is characterized by comprising: a valve cover, including a fluid passage and a accommodating space, the fluid passage is formed between the upper hole of the casing and the lower hole of the casing to allow fluid to flow in and flow, the accommodating space is formed on the outside of the fluid channel and is connected to the fluid channel; the first shielding module includes a first shielding plate, and the first shielding plate is located in the first waiting position of the receiving space and moves to the shielding position of the fluid channel to shield the fluid channel; and a first spraying module for spraying cleaning gas to the first shielding plate.

In addition, the fluid shut-off valve of the present invention is characterized by comprising: a valve cover, including a fluid passage and a storage space, the fluid passage is formed between the upper hole of the cover and the lower hole of the cover, and is used for fluid gas to flow in and flow, and the above-mentioned storage The space is formed on the outside of the fluid channel and is connected with the fluid channel; the shielding module includes a shielding plate, and the shielding plate is located at the waiting position of the receiving space and moves to the shielding position of the fluid channel to shield the fluid channel; and The spraying module is used for spraying cleaning gas to the shielding plate located at the waiting position. [Compared to the efficacy of the prior art]

The fluid shut-off valve of the present invention can maintain the shielding function of the shielding plate by removing reaction by-products accumulated on the upper surface of the shielding plate.

In addition, the fluid shut-off valve of the present invention sprays the cleaning gas to or sucks the cleaning gas from the upper surface of the shielding plate, so that reaction by-products deposited on the upper surface of the shielding plate can be removed without being separated from the vacuum piping or the like.

Furthermore, the fluid shut-off valve of the present invention includes at least two shielding plates that operate independently of each other. Therefore, when one shields the fluid path, the other can remove reaction by-products on the upper surface of the shielding plate.

In addition, the fluid shut-off valve of the present invention can remove reaction by-products on the upper surface of the shielding plate during the manufacturing process, thereby increasing the process efficiency.

Hereinafter, referring to the drawings, the fluid shut-off valve according to the preferred embodiment of the present invention will be described in detail.

First, a fluid shut-off valve according to an embodiment of the present invention will be described.

FIG. 1 is a top view of a fluid shut-off valve according to an embodiment of the present invention. FIG. 2a is a vertical cross-sectional view along A-A of FIG. 1 . Figure 2b is an enlarged view of "B" of Figure 2a. FIG. 3 a is an isolated perspective view of the first shielding module of FIG. 1 . FIG. 3b is a vertical cross-sectional view of the first shielding module of FIG. 3a. FIG. 4 is a horizontal cross-sectional view of the first pneumatic cylinder of FIG. 1 . FIG. 5 is a vertical cross-sectional view of the first injection module of FIG. 1 . FIG. 6 is a bottom view of the first injection module of FIG. 5 .

1 to 6 , a fluid shut-off valve 100 according to an embodiment of the present invention may include a valve housing 110 , a first shielding module 120 , a second shielding module 130 , a first injection module 140 , and a second injection module 150 And the inflow prevention cylinder 160. In addition, the above-mentioned fluid shut-off valve 100 may further include a lower outflow pipe 170 . On the other hand, the fluid shut-off valve 100 can only include the first shielding module 120 , the first spraying module 140 or the second shielding module 130 and the second spraying module 150 .

The fluid shut-off valve 100 may include a fluid channel 110a, and the fluid channel 110a is in the center of the valve housing 110 and penetrates from the upper part to the lower part. The fluid shut-off valve 100 is coupled to the process piping so that the fluid passage 110a and the internal passage of the process piping (not shown) communicate with each other. In addition, the fluid shut-off valve 100 is combined with the process chamber in such a manner that the lower part of the process chamber (not shown) communicates with the inside of the process chamber.

The aforementioned fluid shut-off valve 100 may include a first shielding module 120 and a second shielding module 130 to temporarily and alternately shield the fluid passage 110a. The first shielding module 120 and the second shielding module 130 can alternately shield the fluid channel 110a. In this case, the structure of the first shielding module 120 for shielding the fluid channel 110a can be repeatedly moved in the shielding position a and the first waiting position b to shield the fluid channel 110a. In addition, the structure of the second shielding module 130 to shield the fluid channel 110a can be repeatedly moved in the shielding position a and the second waiting position c to shield the fluid channel 110a. The above-mentioned shielding position a is the position where the corresponding structures of the first shielding module 120 and the second shielding module 130 move to shield the fluid channel 110a, and the first waiting position b and the second waiting position c are the first shielding module The corresponding structures of 120 and the second shielding module 130 are not the waiting positions when shielding the fluid channel 110a, respectively. In addition, the above-mentioned first waiting position b and second waiting position c are the corresponding structures of the first shielding module 120 and the second shielding module 130 that are sprayed in the first spraying module 140 or the second spraying module 150 respectively. Clean gas purge location.

The valve housing 110 may include: a fluid passage 110a extending up and down inside; and a receiving space 110b extending along the circumferential direction on the outer peripheral side of the fluid passage 110a. The valve housing 110 may include a housing upper hole 110c and a housing lower hole 110d, which are opened at the upper and lower parts of the valve housing 110, respectively. In addition, the valve housing 110 may include a first shielding hole 110e, a second shielding hole 110f, a first injection hole 110g, and a second injection hole 110h. The valve housing 110 may be formed by combining an upper housing 111 and a lower housing 112 which are separated from each other in the horizontal direction. In addition, the above-mentioned valve housing 110 may further include an upper connecting pipe 115 .

The fluid passage 110a may extend up and down inside the valve housing 110, and may be formed in an upper housing upper hole 110c and a lower housing lower hole 110d. The above-described fluid passage 110a provides a path through which particles including exhaust gas and reaction by-products generated in a semiconductor production line flow from an upper portion to a lower portion. The cover upper hole 110c provides a path for the fluid to flow into the fluid channel 110a, and the cover lower hole 110d provides a path for the fluid to flow out to the lower part of the fluid channel 110a. The diameter of the lower casing hole 110d may be larger than the diameter of the casing upper hole 110c. The above-mentioned housing lower hole 110d may provide a space combined with the upper portion of the inflow prevention cylinder 160 .

In addition, the accommodating space 110 b provides a space for accommodating part or all of the first shielding module 120 and the second shielding module 130 inside the valve housing 110 . The accommodating space 110b has a shape surrounding the outer side of the fluid passage 110a, and may be integrally formed with the fluid passage 110a to communicate with each other.

The first shielding hole 110e may be formed to penetrate from the upper portion of the valve housing 110 to the accommodating space 110b with the fluid passage 110a as a reference. The above-mentioned first shielding hole 110e may provide a space to be combined with a part of the first shielding module 120 .

The second shielding hole 110f may be formed to penetrate from the upper part of the other side of the valve housing 110 to the accommodating space 110b with the fluid passage 110a as a reference. The above-mentioned second shielding hole 110f may provide a space for combining with a part of the second shielding module 130 .

The first injection hole 110g can penetrate from the upper part of one side of the valve housing 110 to the accommodation space 110b of the first waiting position b with the fluid passage 110a as a reference. That is, the first injection hole 110 g can penetrate from the upper surface of the upper cover 111 to the lower surface. The first injection hole 110g may be formed at a position corresponding to the first waiting position b in the receiving space 110b. The above-mentioned first spray holes 110g can provide a space for the first spray modules 140 to be combined. Therefore, the above-mentioned first injection holes 110 g may have a shape corresponding to the shape of the first injection module 140 . For example, in the case that the first spraying module 140 has a cylindrical shape, the first spraying hole 110g may be a barrel shape, and the inner diameter may correspond to the outer diameter of the first spraying module 140 . In addition, the above-mentioned first injection holes 110g may form a height difference in the middle according to the shape of the outer surface of the first injection module 140 . The above-mentioned first injection holes 110g can support the first injection module 140 more stably.

The second injection hole 110h can penetrate from the upper part of the other side of the valve housing 110 to the accommodating space 110b of the second waiting position c with the fluid passage 110a as a reference. That is, the said 2nd injection hole 110h can penetrate from the upper surface of the upper cover 111 to the lower surface. The above-mentioned second ejection hole 110h may be formed at a position corresponding to the second waiting position c in the accommodating space 110b. The above-mentioned second spray holes 110h can provide a space for combining the second spray modules 150 . Similar to the first injection hole 110 g , the second injection hole 110 h may have a shape corresponding to that of the second injection module 150 . Although not shown in detail, like the first injection hole 110g, the above-mentioned second injection hole 110h may form a height difference in the middle according to the shape of the outer side surface of the second injection module 150 . The above-mentioned second spray holes 110h can support the second spray module 150 more stably.

The above-mentioned upper connecting pipe 115 is coupled to the housing upper hole 110c so as to extend in the upper direction. The above-mentioned upper connecting pipe 115 may be connected to process piping. The above-described upper connecting pipe 115 may provide a path for inflow to the fluid channel 110a.

On the other hand, although not specifically shown, the valve housing 110 may further include a cleaning gas discharge passage (not shown) for discharging the cleaning gas sprayed from the first spraying module 140 or the second spraying module 150 . That is, the above-mentioned cleaning gas discharge passage may be formed by a passage penetrating from the accommodating space 110b to the outer surface of the valve housing 110 . The above-mentioned cleaning gas discharge passage may be connected to process piping or an additional gas treatment device through an additional discharge pipe (not shown). Therefore, the cleaning gas sprayed from the first spraying module 140 or the second spraying module 150 is discharged to the outside through the cleaning gas discharge channel without increasing the pressure of the accommodating space 110b.

The above-mentioned first shielding module 120 may include a first pneumatic cylinder 121 , a first rotating shaft 124 , a first transfer body 125 and a first shielding plate 128 . The above-mentioned first shielding module 120 may be located on the upper part of the valve housing 110, on the side of the fluid channel 110a as a reference. That is, in the first shielding module 120 described above, the first air cylinder 121 rotates the first rotating shaft 124 to move the first shielding plate 128 from the first waiting position b to the shielding position a along an arcuate path. The first waiting position b is a waiting position when the first shielding plate 128 does not shield the fluid channel 110a, and may be a position on one side of the accommodating space 110b based on the fluid channel 110a. In addition, the shielding position a is a position where the first shielding plate 128 moves to shield the fluid passage 110a, and is a position separated from the lower part of the housing upper hole 110c.

The first pneumatic cylinder 121 includes a first pneumatic housing 122 and a first pneumatic piston 123 . The first pneumatic cylinder 121 linearly moves the first pneumatic piston 123 by the air pressure supplied from the outside, and rotates the first rotating shaft 124 . The above-mentioned first pneumatic cylinder 121 may be located on the outside of the valve housing 110, on the side with the fluid passage 110a as a reference. The above-mentioned first pneumatic cylinder 121 may be located at the upper outer side of the valve housing 110 .

The above-mentioned first pneumatic housing 122 may include a first piston passage 122a and a first rotation hole 122b. The first pneumatic housing 122 can be substantially in the shape of a straight hexahedron, and the first piston passage 122a is formed along the horizontal direction, so that the first rotating hole 122b penetrates the first shielding hole 110e of the valve housing 110 and is connected to the valve housing. 110 is combined with the upper face.

The above-mentioned first piston passage 122 may be in a U-shape, and may be formed in a horizontal direction inside the first pneumatic housing 122 . Both ends of the first piston passage 122a may be open to one side of the first pneumatic housing 122 . Both ends of the first piston passage 122a may be connected with additional pneumatic pipes (not shown), and air pressure can be supplied or discharged through the pneumatic pipes.

The first rotation hole 122b may be formed by a hole extending at a predetermined height from the lower surface of the first pneumatic housing 122 toward the upper direction. Preferably, the extension height of the first rotation hole 122b may be greater than the height of the first piston passage 122a. The above-mentioned first rotation hole 122b may be connected with the first shielding hole 110e of the valve housing 110 to provide a path for inserting the first rotation shaft 124 .

The above-mentioned first pneumatic piston 123 may be formed of a block having a cross-sectional area smaller than the vertical cross-sectional area of the first piston passage 122a and having a predetermined length. The above-described first air piston 123 may be formed by a length required to rotate the first rotating shaft 124 from the first waiting position b to the shielding position a. The first pneumatic piston 123 may have teeth formed along the longitudinal direction on the surface facing the first rotation hole 122b.

The above-mentioned first pneumatic piston 123 can be moved from one side to the other side by air pressure inside the first piston passage 122a. The above-mentioned first pneumatic piston 123 may be formed one or two, and may be located at a parallel position where the first piston passage 122a is formed. When the above-mentioned first pneumatic piston 123 is formed in one piece, it can move in one arrangement of the first piston passage 122a located on one side or the other side of the first rotation hole 122b. Moreover, when the said 1st pneumatic piston 123 is formed in two pieces, as shown in FIG. 4, it is located in the both sides of the 1st rotation hole 122b, and moves in the opposite direction. When the above-described two first air pistons 123 are formed, the force for rotating the first rotating shaft 124 increases, and therefore, the first rotating shaft 124 can be easily rotated.

The above-mentioned first rotation shaft 124 may have a cylindrical shape having a predetermined length. In addition, the above-mentioned first rotating shaft 124 may have a tooth portion formed on the circumferential surface of the upper portion facing the first pneumatic piston 123 . One side of the first rotating shaft 124 can be connected with the first pneumatic cylinder 121 to rotate, and the other side can extend toward the receiving space 110 b of the valve housing 110 . More specifically, the upper part of the first rotating shaft 124 can be inserted into the first rotating hole 122b and the first shielding hole 110e for rotation, and the lower part can be exposed to the accommodating space 110b. A part of the upper outer peripheral surface of the first rotation shaft 124 may be exposed to the first piston passage 122a through one side and the other side of the first rotation hole 122b. In addition, the teeth formed on the exposed outer peripheral surface of the first rotating shaft 124 may be meshed with the teeth of the first pneumatic piston 123 . The first rotating shaft 124 can be rotated by a predetermined angle according to the forward and backward movement of the first pneumatic piston 123 . That is, the above-mentioned first rotating shaft 124 can convert the linear motion of the first pneumatic piston 123 into rotational motion.

The first transfer body 125 can include a first transfer rod 126 and a first transfer ring 127. One side of the first transfer body 125 can be combined with the first rotating shaft 124, and the other side rotates in an arc-shaped trajectory. . The first transfer body 125 can repeatedly move the first transfer ring 127 between the first waiting position b and the shielding position a by the rotation of the first rotating shaft 124 . The above-mentioned first transfer rod 126 and the first transfer ring 127 may be integrally formed.

The first transfer rod 126 may be in the shape of a rod having a predetermined length, and one side may be coupled with the lower portion of the first rotating shaft 124 . Also, the other side of the first transfer rod 126 may extend in the direction of the first waiting position b.

The above-mentioned first transfer ring 127 may have a ring shape, or may be formed in a ring shape having a predetermined inner diameter. The above-mentioned first transfer ring 127 may have a step formed on the inner peripheral surface from the upper part to the inner part of the lower part. The outer side of the first transfer ring 127 can be combined with the first transfer rod 126 .

The first shielding plate 128 may be in the shape of a circular plate, and the outer diameter may be smaller than the inner diameter of the first transfer ring 127 . The above-mentioned first shielding plate 128 may have a ring-shaped first O-ring groove 128a formed on the upper surface thereof toward the outside. The inner diameter of the first O-ring groove 128a may be larger than the inner diameter of the upper hole 110c of the housing. The first O-ring 129 can be inserted and fixed into the first O-ring groove 128a. The above-mentioned first O-ring 129 may protrude more than the upper surface of the first shielding plate 128 . Therefore, when the above-described first shielding plate 128 shields the fluid passage 110a, the first O-ring 129 may be in contact with the lower surface of the valve housing 110 to shield the fluid passage 110a.

The first shielding plate 128 can be inserted into the inner side of the first transfer ring 127 . The above-mentioned first shielding plate 128 can be placed on a step formed on the inner peripheral surface of the first transfer ring 127 and supported. The upper surface of the first shielding plate 128 is coupled to the first transfer ring 127 so that the upper surface and the upper surface of the first transfer ring 127 form the same plane or have a height lower than that of the upper surface of the first transfer ring 127 . Therefore, the thickness of the first shielding plate 128 may be equal to or smaller than the height from the step of the first transfer ring 127 to the upper surface.

The first shielding plate 128 can be moved between the first waiting position b and the shielding position a by the first transfer body 125 . After the first shielding plate 128 is moved to the shielding position a, it moves to the upper part of the first transfer ring 127 and comes into contact with the periphery of the casing upper hole 110c of the valve casing 110 to shield the lower part of the casing upper hole 110c. In addition, the first shielding plate 128 can be separated from the housing upper hole 110c and placed on the upper surface of the first transfer body 125 to open the fluid passage 110a.

The second shielding module 130 may include a second pneumatic cylinder 131 , a second rotating shaft 134 , a second transfer body 135 and a second shielding plate 138 . The structure of the second shielding module 130 may be the same as that of the first shielding module 120 . However, the position where the second shielding module 130 is combined with the valve housing 110 may be the other side opposite to the first shielding module 120 based on the fluid channel 110a. Therefore, the following description will focus on the difference between the second shielding module 130 and the first shielding module 120 described above.

In the second shielding module 130, the second air cylinder 131 can rotate the second rotating shaft 134 to move the second shielding plate 138 from the second waiting position c to the shielding position a. The second waiting position c is the waiting position when the second shielding plate 138 does not shield the fluid channel 110a, and may be the position on the other side within the receiving space 110b based on the fluid channel 110a. The second shielding module 130 can rotate the second rotating shaft 134 in the opposite direction to the first rotating shaft 124, and can rotate the second transfer body 135 and the second shielding plate 138 in the opposite direction.

The second pneumatic cylinder 131 can include a second pneumatic housing 132 and a second pneumatic piston 133 . The above-mentioned second pneumatic cylinder 131 may be located on the upper part of the outer side of the valve housing 110 and on the other side with reference to the fluid passage 110a.

The above-mentioned second pneumatic housing 132 may include a second piston passage 132a and a second rotation hole 132b. The above-mentioned second piston passage 132 a may be substantially U-shaped, and may be formed in a horizontal direction inside the second pneumatic housing 132 . The above-mentioned second rotation hole 132b may be connected with the second shielding hole 110f of the valve housing 110 to provide a path for inserting the second rotation shaft 134 .

The above-described second air piston 133 may be formed by a length required to rotate the second rotating shaft 134 from the second waiting position c to the shielding position a.

The above-mentioned second rotating shaft 134 has a tooth portion formed on the circumferential surface of the upper portion facing the second pneumatic piston 133 . The upper part of the second rotating shaft 134 is rotatably inserted into the second rotating hole 132b and the second shielding hole 110f, and the lower part is exposed to the accommodating space 110b. A part of the outer peripheral surface of the upper portion of the second rotating shaft 134 may be exposed to the second piston passage 132a through one side and the other side of the second rotating hole 132b. In addition, the teeth formed on the exposed circumferential surface of the second rotating shaft 134 can be meshed with the teeth of the second pneumatic piston 133 . The second rotating shaft 134 can be rotated by a predetermined angle according to the forward and backward movement of the second pneumatic piston 133 . That is, the above-mentioned second rotating shaft 134 can convert the linear motion of the second pneumatic piston 133 into rotational motion.

The second transfer body 135 can include a second transfer rod 136 and a second transfer ring 137. The second transfer body 135 can be moved by the second rotating shaft 134 to make the second transfer ring 137 in the second waiting position c and the shielding position a repeatedly move between. One side of the above-mentioned second transfer rod 136 may be combined with the lower portion of the second rotating shaft 134 . In addition, the other side of the second transfer rod 136 may extend in the direction of the second waiting position c. The outer side of the second transfer ring 137 can be combined with the second transfer rod 136 .

The second shielding plate 138 may have a ring-shaped second O-ring groove 138a formed on the upper surface thereof toward the outside. The second O-ring 139 can be inserted and fixed into the second O-ring groove 138a. Therefore, when the above-described second shielding plate 138 shields the fluid passage 110a, the second O-ring 139 may be in contact with the lower surface of the valve housing 110 to shield the fluid passage 110a. The second shielding plate 138 can be inserted into the inner side of the second transfer ring 137 . The upper surface of the second shielding plate 138 is coupled to the second transfer ring 137 so that the upper surface of the second transfer ring 137 is the same plane or the height is lower than the height of the upper surface of the second transfer ring 137 . The second shielding plate 138 can be moved between the second waiting position c and the shielding position a by the second transfer body 135 .

After the second shielding plate 138 is moved to the shielding position a, it can move to the upper part of the second transfer ring 137 and shield the upper cover hole 110c of the valve cover 110 . In addition, the second shielding plate 138 can be separated from the housing upper hole 110c and placed on the upper surface of the second transfer body 135 to open the fluid passage 110a.

The above-mentioned first spraying module 140 may include a first spraying body 141 and a first spraying plate 142 . In addition, the above-mentioned first injection module 140 may further include a first air supply pipe 143 .

The above-mentioned first injection module 140 may be combined with the valve housing 110 at the upper portion of the first waiting position b. That is, the above-mentioned first injection module 140 may be combined with the first injection holes 110 g of the valve housing 110 . The first spraying module 140 can spray cleaning gas to the upper surface of the first shielding plate 128 located at the first waiting position b of the accommodating space 110b to remove reaction by-product particles attached to the upper surface of the first shielding plate 128 . The above-mentioned first spray module 140 may be connected to a cleaning gas supply device (not shown) for supplying cleaning gas to receive cleaning gas. On the other hand, the above-mentioned first injection module 140 can be connected with a suction device (not shown) including a vacuum pump to suck the fluid including the reaction by-product particles to remove the reaction by-product particles attached to the upper surface of the shielding plate. Therefore, hereinafter, the meaning of the first spraying module 140 spraying the cleaning gas may include the meaning that the first spraying module 140 sucks the fluid including the reaction by-product particles.

When the fluid channel 110 a is shielded or separated from the receiving space 110 b , the first spraying module 140 can spray cleaning gas to the upper surface of the first shielding plate 128 . For example, when the second shielding module 130 shields the fluid channel 110 a, the first spraying module 140 can spray cleaning gas to the first shielding plate 128 . When the above-mentioned inflow prevention cylinder 160 separates the fluid channel 110 a and the accommodating space 110 b , the first spraying module 140 can spray cleaning gas to the first shielding plate 128 .

The above-mentioned first spray body 141 may include a first gas supply hole 141a and a first gas guide groove 141b. The above-mentioned first injection body 141 may be combined with the first injection hole 110 g of the valve housing 110 . The above-described first spray body 141 may have a block shape having a prescribed thickness and diameter or width. The above-mentioned first injection body 141 may have various shapes that are inserted into and combined with the first injection hole 110g. The above-mentioned first spray body 141 may have a cylindrical shape or a polyhedral shape such as a hexahedron and an octahedron. In addition, the first spray body 141 may face the outer peripheral surface or the outer side surface, and the first body step 141c may be formed at a predetermined height from the lower portion to the upper direction.

The above-mentioned first air supply hole 141a may penetrate from the upper surface to the lower surface of the first injection body 141 . Preferably, the above-mentioned first air supply hole 141a is formed in the center based on the plane of the first spray body 141 . The above-mentioned first air supply hole 141 a can be formed with an appropriate diameter to supply the cleaning gas in an amount required for cleaning the first shielding plate 128 .

The above-mentioned first gas guide groove 141b may be formed by a groove having a predetermined depth from the upper direction of the first injection body 141 . In the first gas guide groove 141b, a first gas supply hole 141a may be formed in the center of the upper bottom surface. That is, the above-mentioned first gas guide groove 141b may be formed at the lower end of the first gas supply hole 141a toward the outside. In addition, the first gas guide groove 141b may have a shape whose depth gradually decreases as it approaches the outer side of the first injection body 141 . That is, the upper surface of the above-mentioned first gas guide groove 141b may be inclined downward from the first air supply hole 141a toward the outside. The first gas guide grooves 141b can guide the cleaning gas supplied from the first gas supply holes 141a to flow to the outside.

The above-mentioned first injection plate 142 may include first gas injection holes 142a. In addition, the above-mentioned first spray plate 142 may further include a first collection groove 142b. The above-mentioned first spray plate 142 may also be combined with the lower surface of the first spray body 141 . The first spraying plate 142 described above may form a cleaning gas channel d through which the cleaning gas flows together with the first gas guiding grooves 141b of the first spraying body 141 . The above-mentioned cleaning gas passage d may have a shape whose height gradually decreases from the center to the outside.

The first gas injection holes 142a may penetrate from the upper surface to the lower surface of the first injection plate 142 . A plurality of the above-mentioned first gas injection holes 142a may be formed to be spaced apart from each other. The above-mentioned first gas injection holes 142a may be radially spaced from the center of the first injection plate 142 to the outside. In this case, although not specifically shown, the above-mentioned first injection hole 110g can be formed so that the diameter increases toward the outside. Also, the above-described first gas injection holes 142a may be formed in a relatively large number according to positions corresponding to the upper portion of the first O-ring 129 of the first shielding plate 128 located at the lower portion. Through the above-mentioned first air supply holes 141a, the cleaning gas can flow from the cleaning gas passage d to the outside of the first spray plate 142, and can be sprayed more smoothly through the first spray holes 110g located on the outside. In addition, the above-mentioned first spray plate 142 can spray more cleaning gas to the upper part of the first O-ring 129 . Since the first O-ring 129 is made of resin, a relatively large number of reaction by-product particles can be attached. Also, the above-mentioned first O-ring 129 can directly contact the lower surface of the valve housing 110 and shield the fluid passage 110a, and thus can influence the shielding performance. The above-mentioned first spray plate 142 sprays a relatively large amount of cleaning gas to the first O-ring 129 and effectively removes reaction by-product particles adhering to the first O-ring 129 .

The above-described first collection groove 142b may be formed at a predetermined depth from the upper portion of the first ejection plate 142 toward the lower direction. In addition, the above-mentioned first collection groove 142b can be formed in an area and a shape corresponding to the lower surface of the first injection body 141 . As the first collecting groove 142b is inserted into the lower part of the first spraying body 141 , the above-mentioned first spraying plate 142 can be stably combined with the first spraying body 141 . In the case where the first body step 141c is formed in the lower part of the first spray body 141, the first collecting groove 142b can be formed at a depth corresponding to the height of the first body step 141c. Therefore, the above-mentioned first collection groove 142b may be combined with the first body step 141c.

The above-mentioned first air supply pipe 143 may be combined with the first air supply hole 141a to supply the cleaning gas to the first air supply hole 141a. Although not specifically shown, the above-mentioned first gas supply pipe 143 may be connected with the solenoid valve and the cleaning gas supply unit. The above-mentioned first gas supply pipe 143 can control the supply of cleaning gas through a solenoid valve and a cleaning gas supply unit.

The above-mentioned second spraying module 150 may include a second spraying body 151 and a second spraying plate 152 . In addition, the above-mentioned second injection module 150 may further include a second air supply pipe 153 . When the shielding fluid channel 110 a is separated from the receiving space 110 b , the second spraying module 150 can spray cleaning gas to the upper surface of the second shielding plate 138 . For example, when the above-mentioned first shielding module 120 shields the fluid channel 110 a, the second spraying module 150 can spray the inclined gas to the second shielding plate 138 . Moreover, when the above-mentioned inflow prevention cylinder 160 separates the fluid channel 110 a and the containing space 110 b , the second spraying module 150 can spray cleaning gas to the second shielding plate 138 . The structure of the second spraying module 150 can be the same as that of the first spraying module 140 . However, the position where the second injection module 150 is combined with the valve housing 110 may be the other side opposite to the first injection module 140 based on the fluid channel 110a.

The following description will focus on the difference between the second injection module 150 and the first injection module 140 described above.

The above-mentioned second injection module 150 may be combined with the valve housing 110 at the upper portion of the second waiting position c. That is, the above-mentioned second injection module 150 may be combined with the second injection holes 110h of the valve housing 110 . The second spraying module 150 can spray cleaning gas to the upper surface of the second shielding plate 138 at the second waiting position c to remove reaction by-product particles adhering to the upper surface of the second shielding plate 138 .

The above-mentioned second spray body 151 may include a second gas supply hole 151a and a second gas guide groove 151b. The above-mentioned second injection body 151 may be combined with the second injection hole 110h of the valve housing 110 . In addition, the second injection main body 151 is formed with a second main body step 151c at a predetermined height along the outer peripheral surface or the outer surface from the lower surface to the upper direction.

The second air supply hole 151a may penetrate from the upper surface to the lower surface of the second injection body 151 . The above-described second gas guide groove 151b may be formed as a groove having a predetermined depth from the upper direction of the second injection body 151 .

The above-mentioned second injection plate 152 may include second gas injection holes 152a. In addition, the above-mentioned second ejection plate 152 may further include a second coupling groove 152b. The second gas injection holes 152 a may penetrate from the upper surface to the lower surface of the second injection plate 152 . The above-described second coupling groove 152b may be formed at a predetermined depth from the upper portion of the second ejection plate 152 toward the lower direction.

The above-mentioned second air supply pipe 153 may be combined with the second air supply hole 151a to supply the cleaning gas to the second air supply hole 151a.

The above-mentioned inflow prevention cylinder 160 may include an inflow prevention cover 161 and an inflow prevention piston 162 . Also, the above-mentioned inflow prevention cylinder 160 may further include an inflow blocking unit 166 . The above-mentioned inflow prevention cylinder 160 may include a lower fluid passage 160a penetrating from a central upper portion to a lower portion.

The above-mentioned inflow prevention cylinder 160 may be combined with the housing lower hole 110d of the valve housing 110 . The lower fluid passages 160a of the above-mentioned inflow prevention cylinder 160 may be located at the lower portion of the fluid passages 110a of the valve housing 110 and communicate with each other. The above-mentioned inflow prevention cylinder 160 may support the lower surface of the first shielding plate 128 or the second shielding plate 138 located at the shielding position a to ascend and shield the fluid passage 110a. In addition, during the manufacturing process, the inflow prevention cylinder 160 can separate the fluid passage 110a and the accommodating space 110b. In this case, the above-mentioned first shielding plate 128 and second shielding plate 138 may be located at the first waiting position b and the second waiting position c, respectively. In the manufacturing process, the inflow prevention cylinder 160 can discharge the fluid flowing in the fluid passage 110a to the process piping through the lower fluid passage 160a, thereby preventing the fluid including reaction by-product particles from flowing into the storage space 110b. Therefore, the above-mentioned inflow prevention cylinder 160 can prevent the first shielding module 120, the second shielding module 130, the first injection module 140, and the second injection module 150 accommodated in the accommodation space 110b from being polluted by reaction by-product particles .

The above-mentioned inflow prevention cover 161 may include a piston prevention passage 161a, a passage prevention opening hole 161b, a first prevention passage 161c, and a second prevention passage 161d. Also, the above-mentioned inflow prevention cover 161 may further include a blocking gas passage 161e.

The inflow prevention cover 161 may have a ring shape as a whole, and a lower fluid passage 160a may be provided inside. The above-described inflow prevention cover 161 may be combined with the lower center portion of the valve cover 110 . The above-mentioned lower fluid passage 160a may be located at the lower part of the fluid passage 110a of the valve housing 110 for communication.

The above-described piston preventing passage 161a may be formed in a ring shape having a predetermined width or height inside the inflow preventing cover 161 . The above-described piston preventing passage 161 a can be formed at a height greater than the vertical movement distance of the inflow preventing piston 162 .

The above-mentioned passage preventing hole 161b may be formed to be opened by a predetermined width from the upper portion of the piston preventing passage 161a to the upper portion of the inflow preventing cover 161 . The above-mentioned preventing passage opening hole 161b may have a shape corresponding to the preventing piston passage 161a as a whole.

On the other hand, the inflow prevention cover 161 may form the piston movement space 161f from the upper part of the passage prevention opening hole 161b to the inner side. The above-described piston moving space 161f may provide a space into which a part of the piston 162 is prevented from rising or falling. Therefore, the piston moving space 161f may have a shape corresponding to the shape of the inflow preventing piston 162 .

The first preventing passage 161c may be formed to open from the upper portion of the outer peripheral surface of the piston preventing passage 161a to the side surface of the inflow preventing cover 161 . The above-described first preventing passage 161c may provide a path for supplying or discharging air pressure to the upper portion of the preventing piston passage 161a. That is, the above-described first preventing passage 161c can supply the air pressure required for lowering the inflow preventing piston 162 . Also, the first preventing passage 161c provides a path for discharging the air pressure supplied to the upper portion of the preventing piston passage 161a when the inflow preventing piston 162 ascends. The above-mentioned first preventing passage 161c may be connected to an external air pressure supply unit and receive air pressure.

The above-described second preventing passage 161d may be formed to open from the lower portion or the lower portion of the outer peripheral surface of the piston preventing passage 161a facing the side surface of the inflow preventing cover 161 . The above-described second prevention passage 161d may provide a path for supplying or discharging air pressure to the lower portion of the prevention piston passage 161a. The above-mentioned second prevention passage 161d can supply the air pressure required for raising the inflow prevention piston 162 . Further, the above-described second preventing passage 161d provides a path for discharging the air pressure supplied to the lower part of the preventing piston passage 161a when the inflow preventing piston 162 descends. The above-mentioned second preventing passage 161d may be connected to an external air pressure supply unit and receive air pressure.

The above-mentioned barrier gas passage 161e may be formed so as to penetrate from the outer side to the inner side surface in the lower part of the inflow prevention cover 161 . The above-mentioned blocking gas channel 161e can prevent the reaction by-product particles from flowing into between the inflow preventing cover 161 and the inflow preventing piston 162, and can prevent the reaction by-product particles from evaporating on the inner peripheral surface of the fluid channel 110a or the lower fluid channel 160a or causing corrosion. . More specifically, the above-described inflow prevention housing 161 and inflow prevention piston 162 may include spaced gaps spaced apart from each other in the direction of the fluid passage 110a. Therefore, the air barrier gas supplied from the barrier gas passage 161e flows in a direction perpendicular to the separation gap, and the reaction by-product particles are prevented from flowing into the separation gap, and the reaction by-product particles can be prevented from being evaporated on the inner circumference of the valve housing 110 surface or prevent flow into the inner peripheral surface of the cylinder 160 or cause corrosion.

The above-mentioned inflow preventing piston 162 may include a preventing piston body 163 and an preventing piston rod 164 . The above-mentioned inflow prevention piston 162 may be combined with the inflow prevention cover 161 and move up and down, and may shield the accommodation space 110b from the fluid passage 110a. The above-mentioned inflow prevention piston 162 supports the lower surface of the first shielding plate 128 or the second shielding plate 138 during the ascending process to make the first shielding plate 128 or the second shielding plate 138 more firmly in contact with the fluid passage 110a of the valve housing 110. contact with the lower surface.

The above-described preventing piston body 163 may have a ring shape, and can be formed with a width corresponding to the width of the preventing piston passage 161a and a height smaller than the height of the preventing piston passage 161a. The height of the above-described piston preventing body 163 may be smaller than the height at which the moving distance of the inflow preventing piston 162 is removed at the height of the piston preventing passage 161a. Therefore, the above-described preventing piston body 163 can be prevented from moving up and down in the piston passage 161a. The above-described preventing piston body 163 may move up and down inside the preventing piston passage 161a by the air pressure supplied through the first preventing passage 161c and the second preventing passage 161d.

The above-mentioned anti-piston rod 164 may be in the shape of a ring, and may be formed by extending upward from the anti-piston body 163 . The above-mentioned anti-piston rod 164 can be formed at an appropriate height by reflecting the height from the anti-piston body 163 to the lower surface of the housing upper hole 110c of the valve housing 110 and the moving distance of the inflow-preventing piston 162 . The above-described anti-piston rod 164 may shield the fluid passage 110a from the fluid passage 110a together with the preventing piston body 163 from moving from the lower part to the upper part. The above-mentioned anti-piston rod 164 can support the lower surface of the first shielding plate 128 or the second shielding plate 138 during the ascending process so that the first shielding plate 128 or the second shielding plate 138 is in contact with the lower surface of the fluid inflow channel of the valve housing 110 . get in touch with.

The above-mentioned anti-piston rod 164 may have a ring shape having a curved area or a height difference area, and the thickness of each area is different. The above-mentioned anti-piston rod 164 may be in the shape of a ring with the same thickness. The above-described piston preventing rod 164 may be formed in various shapes according to the shapes of the inflow preventing cover 161 , the piston preventing passage 161 a and the passage preventing opening hole 161 b.

A rod O-ring groove 164a may be formed along the circumferential direction on the upper surface of the above-mentioned anti-piston rod 164 . The above-mentioned rod O-ring groove 164a may be combined with the piston O-ring 165 . The above-mentioned piston O-ring 165 may be in contact with the inner upper surface of the valve housing 110 to increase the shielding force of the anti-piston rod 164 . In addition, the above-mentioned piston O-ring 165 can be in contact with the first shielding plate 128 or the second shielding plate 138 to increase the shielding force of the anti-piston rod 164 .

The above-mentioned inflow blocking unit 166 may include an inflow blocking ring 167 and an inflow blocking flange 168 . The inflow blocking unit 166 can be located inside the inflow prevention cylinder 160 to prevent the reaction by-product particles from flowing into the inflow prevention cylinder 160, and can prevent the reaction by-product particles from evaporating on the inner peripheral surface of the fluid channel 110a or the lower fluid channel 160a or causing the reaction by-product particles to evaporate. corrosion.

The above-mentioned inflow blocking ring 167 may have a ring shape, and the height may correspond to the heights of the inflow preventing cover 161 and the inflow preventing piston 162 . The above-mentioned inflow blocking ring 167 may be located inside the inflow preventing housing 161 and the inflow preventing piston 162 . The outer diameter of the inflow blocking ring 167 may be such that the outer peripheral surface is separated from the inner peripheral surface of the inflow prevention cover 161 and the inflow prevention piston 162 by a predetermined interval. Therefore, the inflow blocking ring 167 can form a blocking gas flow path 167 a for allowing gas to flow between the outer peripheral surface and the inner peripheral surfaces of the inflow preventing cover 161 and the inflow preventing piston 162 .

The above-mentioned barrier gas flow path 167a may be formed in a ring shape along the outer peripheral surface of the inflow barrier ring 167, and may be connected to the barrier gas passage 161e at the lower part. The barrier gas flow path 167 a allows the barrier gas supplied from the barrier gas passage 161 e to flow between the upper portion of the inflow prevention piston 162 and the upper portion of the inflow barrier ring 167 . The above-mentioned barrier gas prevents the reaction by-product particles flowing through the fluid passage 110 a from flowing into between the upper portion of the inflow preventing piston 162 and the upper portion of the inflow barrier ring 167 . In addition, the above-mentioned blocking gas can prevent the reaction by-product particles from flowing into the space between the inflow preventing cover 161 and the inflow preventing piston 162, and can prevent the reaction by-product particles from evaporating on the inner peripheral surface of the fluid channel 110a or the lower fluid channel 160a or causing the corrosion.

In addition, the inner diameter of the inflow blocking ring 167 may be larger than the inner diameter of the upper hole 110c of the housing. Therefore, the inner peripheral surface of the above-mentioned inflow blocking ring 167 does not protrude further inward than the housing upper hole 110c, and the fluid passage 110a is provided without being affected by the fluid flow.

The inflow blocking flange 168 may be formed of a ring-shaped flange, and is coupled to the inflow blocking ring 167 so as to extend toward the outer peripheral surface from the lower end thereof. The above-mentioned inflow blocking flange 168 may be combined with the lower part of the blocking gas passage 161e at the lower part of the inflow prevention housing 161 . The inflow blocking flange 168 can block the lower end of the blocking gas flow path 167a to allow the blocking gas in the blocking gas flow path 167a to flow upward.

The inside of the lower outflow pipe 170 may be hollow, and may be in the shape of a pipe that is open up and down. The above-mentioned lower outflow pipe 170 may be combined with the lower portion of the inflow prevention cylinder 160 . The said lower outflow pipe 170 may be connected with the piping for a process. Therefore, the above-mentioned lower outflow pipe 170 connects the fluid passage 110a to the process piping. On the other hand, the above-mentioned lower outflow pipe 170 may be integrally formed with the inflow prevention cover 161 of the inflow prevention cylinder 160 .

Next, a fluid shut-off valve according to another embodiment of the present invention will be described.

7 is a vertical cross-sectional view of a back pressure shut-off valve according to another embodiment of the present invention.

Referring to FIG. 7 , compared with the fluid shut-off valve 100 of FIGS. 1 to 6 , the fluid shut-off valve 200 of another embodiment of the present invention may form a bypass gas passage 200 a for fluid flow. That is, the above-mentioned fluid shut-off valve 200 may include the first shielding module 120 , the second shielding module 130 , the first injection module 140 , the second injection module 150 and the bypass of the fluid shut-off valve 100 of FIGS. 1 to 6 . Gas channel 200a. Therefore, the above-mentioned fluid shut-off valve 200 may further include a bypass connecting pipe 280 and a bypass passage blocking unit 290 forming the bypass gas passage 200a.

The following description will focus on the structure of the fluid shut-off valve 200 according to another embodiment of the present invention, which is different from the fluid shut-off valve 100 of FIGS. 1 to 6 .

The bypass gas passage 200 a can pass through the valve housing 210 and be formed by the bypass connecting pipe 280 and the lower outflow pipe 170 . The valve housing 210 described above may include an upper bypass passage 200b and a lower bypass passage 200c that form part of the bypass gas passage 200a.

The bypass gas passage 200a may provide a bypass path for the exhaust gas to flow from the vacuum chamber to the vacuum pump when the vacuum pump operates in a state where the fluid passage 110a is shielded by the first shielding plate 128 or the second shielding plate 138. The above-described bypass gas channel 200a may provide a path for bypassing the first shielding plate 128 or the second shielding plate 138 at the upper portion of the fluid channel 110a to flow to the lower portion of the fluid channel 110a. That is, the above-mentioned bypass gas channel 200a may be connected to the fluid channel 110a at the upper part of the shielding position a, pass through the receiving space 110b to be connected to the fluid channel 110a at the lower part of the shielding position a, and be connected in parallel with the fluid channel 110a to provide fluid flow. channel. The bypass gas channel 200a may be opened when slowly pumped by a vacuum pump at the initial stage of the manufacturing process or during the set-up of the process chamber. Therefore, the above-mentioned bypass gas channel 200a can flow a gas that does not include reaction by-product particles. For example, the above-mentioned bypass gas channel 200a can only flow cleaning gas or process gas.

In addition, the bypass gas passage 200a may be in a state of being connected to the accommodating space 110b. In this case, the above-mentioned fluid shut-off valve 200 provides a means for discharging the cleaning gas injected by the first injection module 140 or the second injection module 150 to the outside of the accommodation space 110b through the bypass gas passage 200a and to the process piping. Therefore, there is no need to provide the additional discharge channels mentioned in the embodiment of FIG. 1 . On the other hand, in the accommodating space 110b of the valve housing 210, the bypass gas passage 200a may be a passage that is blocked from the accommodating space 110b by an additional connecting pipe (not shown). That is, the upper end of the said connection piping may connect between the upper bypass passage 200b located in the upper part of the accommodating space 110b, and the lower bypass passage 200c located in the lower part of the accommodating space 110b.

The above-mentioned upper bypass passage 200b may extend from the inner peripheral surface of the housing upper hole 110c to the inside of the valve housing 210, and may penetrate into the accommodating space 110b. The above-mentioned upper bypass passage 200b may have a right-angle shape extending in the lower direction after extending in the horizontal direction. Also, the above-mentioned upper bypass passage 200b may have a curved shape extending in the horizontal direction and extending downward again.

The above-mentioned lower bypass passage 200c may be formed by penetrating downward from the accommodating space 110b of the valve housing 210 . The above-mentioned lower bypass passage 200c may be located at a lower portion of the upper bypass passage 200b.

One end of the bypass connecting pipe 280 may be connected to the lower bypass passage 200c, and the other end may be connected to the lower outflow passage 170a of the lower outflow passage 170a of the lower outflow pipe 170. The lower outflow channel 170a may be formed by penetrating the outer peripheral surface of the lower outflow pipe 170 to the inner peripheral surface. Therefore, the bypass connecting pipe 280 can connect the lower bypass passage 200c of the valve housing 210 and the lower outflow passage 170a of the lower outflow pipe 170 to form the bypass gas passage 200a. On the other hand, the bypass connecting pipe 280 may be formed by penetrating the lower outflow pipe 170 and extending directly to the lower part of the fluid passage 110a. In addition, the bypass connecting pipe 280 may pass through the inflow prevention cylinder 160 and extend toward the fluid passage 110a.

The bypass passage blocking unit 290 may be a unit for opening and closing the bypass gas passage 200a. For example, the above-mentioned bypass channel blocking unit 290 may be a plate or block, and may be disposed on the upper bypass channel 200b. The above-mentioned bypass passage blocking unit 290 can move up and down inside the upper bypass passage 200b and block the upper bypass passage 200b. Although not specifically shown, the above-mentioned bypass passage blocking unit 290 may be moved up and down by a pneumatic cylinder (not shown). Also, the above-mentioned bypass passage blocking unit 290 may include a blade, which may block the upper bypass passage 200b by being rotated. In this case, the above-mentioned bypass passage blocking unit 290 may be rotated by an electric motor (not shown) and block the upper bypass passage 200b.

Next, the operation of the fluid shut-off valve according to another embodiment of the present invention will be described.

8a and 8b are process diagrams showing the operation of the fluid shut-off valve of the embodiment of FIG. 7 .

Hereinafter, the operation of the fluid shutoff valve 200 of the embodiment shown in FIG. 7 will be described. As described above, compared to the fluid shut-off valve 100 of FIGS. 1 to 6 , the above-described fluid shut-off valve 200 is different in that it includes the bypass gas passage 200a. Therefore, during the operation of the fluid shut-off valve 200 described above, actions other than the actions involved in the bypass gas passage 200a can also be similarly applied to the fluid shut-off valve 100 of FIGS. 1 to 6 .

First, as shown in part (a) of FIG. 8a , the first shielding module 120 operates the first pneumatic cylinder 121 to rotate the first transfer body 125 so that the first shielding plate 128 is positioned in the upper hole 110c of the housing. Lower shield position a. In this case, the above-mentioned first air cylinder 121 is operated by air pressure supplied from the outside. The inflow prevention cylinder 160 raises the first shield plate 128 together with the inflow prevention piston 162 by the air pressure supplied from the outside. The first shielding plate 128 is raised from the first transfer body 125 to come into contact with the bottom surface of the valve housing 210 and shield the fluid passage 110a. In this case, the above-mentioned bypass passage blocking unit 290 maintains a state of shielding the upper bypass passage 200b.

On the other hand, the second spraying module 150 can spray cleaning gas to the upper surface of the second shielding plate 138 through the second gas spraying holes 152a. The cleaning gas described above can be removed by washing a plurality of particles including reaction by-product particles existing on the upper surface of the second shielding plate 138 . The above-mentioned fluid channel 110a is in a state of being shielded by the first shielding plate 128, therefore, the cleaning gas will not flow into the process chamber through the fluid channel 110a. In addition, the above-mentioned cleaning gas does not affect the vacuum of the process chamber. The above-mentioned cleaning gas can flow into the lower side of the fluid channel 110a through the bypass gas channel 200a and be discharged from the process piping. On the other hand, in the case where the above-described bypass gas passage 200a is not formed, the cleaning gas may be discharged to the outside by forming an additional cleaning gas discharge passage. The second spraying module 150 can spray the cleaning gas for an appropriate time to clean the upper surface of the second shielding plate 138, and then interrupt the spraying of the cleaning gas.

Next, as shown in part (b) of FIG. 8a , the bypass channel blocking unit 290 described above may open the upper bypass channel 200b. In this case, the above-mentioned vacuum pump is activated, and the vacuum degree of the process chamber will increase. More specifically, prior to the activation of the above-mentioned process chamber, the process chamber and process piping located on the upper or front side of the first shield plate 128 are slowly exhausted, and after a predetermined time has elapsed, the process chamber and the process pipe located at the lower part of the first shield plate 128 are gradually exhausted. (or rear side) process piping and vacuum pump to create a vacuum equal pressure.

Next, as shown in part (c) of FIG. 8 a , the first shielding module 120 operates the first pneumatic cylinder 121 to rotate the first transfer body 125 , so that the first shielding plate 128 is moved to the second portion of the accommodating space 110 b . A wait for position b to move. In this case, the above-mentioned inflow prevention cylinder 160 lowers the first shield plate 128 together with the inflow prevention piston 162 in advance, and sets the first shield plate 128 on the first transfer body 125 . The above-mentioned fluid passage 110a allows the fluid to flow from the upper part to the lower part. In this case, the above-mentioned bypass passage blocking unit 290 blocks the upper bypass passage 200b to prevent fluid from flowing into the bypass gas passage 200a.

After the first shielding plate 128 is moved to the first waiting position b, the inflow prevention cylinder 160 raises the inflow prevention piston 162 to bring the piston O-ring 165 into contact with the periphery of the housing upper hole 110c. Therefore, the inflow prevention piston 162 shields the accommodating space 110b from the fluid passage 110a, and prevents the reaction by-product particles of the fluid from flowing into the accommodating space 110b. Then, the barrier gas flowing into the barrier gas flow path 167a through the barrier gas passage 161e flows upward and is discharged to the fluid passage 110a. Therefore, the above-mentioned barrier gas can prevent the reaction by-product particles from flowing into between the inflow preventing cover 161 and the inflow preventing piston 162 .

On the other hand, in the case of having an additional bypass channel closing unit (not shown) for shielding the above-mentioned bypass gas channel 200a and the fluid channel 110a, the first injection module 140 and the second injection module 150 may spray cleaning gas to the first shielding plate 128 and the second shielding plate 138, respectively. In this case, the cleaning gas sprayed from the first spraying module 140 and the second spraying module 150 described above may be discharged through the additional cleaning gas discharge passage.

More specifically, the first spraying module 140 can spray the cleaning gas to the upper surface of the first shielding plate 128 through the first gas spraying holes 142a. In addition, the second spraying module 150 can spray cleaning gas to the upper surface of the second shielding plate 138 through the second gas spraying holes 152a. The cleaning gas described above can be removed by washing a plurality of particles including reaction by-product particles existing on the upper surface of the first shielding plate 128 or the second shielding plate 138 .

Next, as shown in part (d) of FIG. 8 b , the second shielding module 130 operates the second pneumatic cylinder 131 to rotate the second transfer body 135 and move the second shielding plate 138 from the second waiting position c moves to the shielding position a. If the above-mentioned shielding of the fluid channel 110a occurs, the second shielding module 130 operates.

The above-mentioned inflow prevention cylinder 160 and the inflow prevention piston 162 make up the second shield plate 138 . The second shielding plate 138 is raised from the second transfer body 135 to come into contact with the bottom surface of the valve housing 210 and shield the fluid passage 110a. In this case, the above-mentioned bypass passage blocking unit 290 maintains a state of shielding the upper bypass passage 200b.

Then, the above-mentioned first shield plate 128 is transferred and installed to the first waiting position b. The first spraying module 140 sprays the cleaning gas to the upper surface of the first shielding plate 128 through the first gas spraying holes 142a. The cleaning gas described above can be removed by washing a plurality of particles including reaction by-product particles existing on the upper surface of the first shielding plate 128 . The above-mentioned fluid channel 110a is in a state of being shielded by the second shielding plate 138, therefore, the cleaning gas will not flow into the process chamber through the fluid channel 110a. In addition, the above-mentioned cleaning gas will not affect the vacuum formation of the process chamber. The above-mentioned cleaning gas can flow into the lower side of the fluid channel 110a through the bypass gas channel 200a and be discharged from the process piping. On the other hand, in the case where the above-mentioned bypass gas passage 200a is not formed, the cleaning gas may be discharged to the outside by forming an additional cleaning gas discharge passage.

The first spraying module 140 can clean the upper surface of the first shielding plate 128 by spraying the cleaning gas for an appropriate time, and then the spraying of the cleaning gas can be terminated.

Next, as shown in part (e) of FIG. 8b, the above-mentioned bypass channel blocking unit 290 may open the upper bypass channel 200b. In this case, the above-mentioned vacuum pump is in the activated state, therefore, the vacuum degree of the process chamber will be increased. More specifically, prior to the activation of the process chamber, the process chamber and process piping located on the upper (or front side) of the second shield plate 138 may be slowly exhausted, and after a predetermined time elapses, the process chamber and the process piping located at the upper part (or the front side) of the second shield plate 138 may be exhausted. The process piping and vacuum pump on the lower or rear side of the 138 create a vacuum isobaric pressure.

Next, as shown in part (f) of FIG. 8 b , the second shielding module 130 operates the second pneumatic cylinder 131 to rotate the second transfer body 135 and move the second shielding plate 138 to the second portion of the accommodating space 110 b Wait for position c to move. In this case, the inflow prevention cylinder 160 previously lowers the second shield plate 138 together with the inflow prevention piston 162 and places it on the second transfer body 135 . The above-mentioned fluid passage 110a allows the fluid to flow from the upper part to the lower part. In this case, the above-mentioned bypass passage blocking unit 290 blocks the upper bypass passage 200b to prevent fluid from flowing into the bypass gas passage 200a. After the second shielding plate 138 is moved to the second waiting position c, the inflow prevention cylinder 160 raises the inflow prevention piston 162 to bring the piston O-ring 165 into contact with the periphery of the housing upper hole 110c.

Next, as shown in part (a) of FIG. 8 a , the first shielding module 120 moves the first shielding plate 128 from the first waiting position b to the shielding position a. The first shielding plate 128 is raised from the first transfer body 125 to shield the fluid passage 110a. In this case, the above-mentioned bypass passage blocking unit 290 maintains a state of shielding the upper bypass passage 200b.

And the said 2nd shielding board 138 is moved to the 2nd waiting position c, and is installed. The above-mentioned second spraying module 150 sprays the cleaning gas to the upper surface of the second shielding plate 138 through the second gas spraying holes 152a. The above cleaning gas can be removed by washing a plurality of particles including reaction by-product particles existing on the upper surface of the second shielding plate 138 . The above-mentioned cleaning gas can flow into the lower side of the fluid channel 110a through the bypass gas channel 200a and be discharged from the process piping. On the other hand, in the case where the bypass gas passage 200a is not formed as described above, the cleaning gas may be discharged to the outside by forming an additional cleaning gas discharge passage.

Next, a fluid shut-off valve according to another embodiment of the present invention will be described.

Fig. 9a is a vertical cross-sectional view of a fluid shut-off valve according to another embodiment of the present invention, and Fig. 9b is a vertical cross-sectional view taken along line C-C of Fig. 9a.

Referring to FIGS. 9 a and 9 b , compared with the fluid shut-off valve 100 of FIGS. 1 to 6 , the fluid shut-off valve 300 of another embodiment of the present invention only includes the first shielding module 120 and the first injection module 140 . The above-mentioned fluid shut-off valve 300 does not include the second shielding module 130 and the second injection module 150 . The valve housing 310 may include only the first waiting position b in the accommodating space 110b. Therefore, the above-described fluid shut-off valve 300 may be formed the same as or similar to the fluid shut-off valve 100 of FIGS. 1 to 6 except that the structure of the valve housing 310 is changed. The diameter of the valve housing 310 described above is relatively small compared to the valve housing 110 of FIGS. 1 to 6 . Therefore, the valve housing 310 can be formed in such a manner that the first shielding module 120 and the first spraying module 140 are combined or accommodated. The detailed description of other parts of the above-mentioned fluid shut-off valve 300 is omitted.

On the other hand, in the case where the above-mentioned fluid shut-off valve 300 only includes the first shielding module 120 , the first injection module 140 and one of the second shielding module 130 and the second injection module 150 , it can be expressed as a shielding mods and jet mods. In this case, in the fluid shut-off valve 300 described above, the shielding module 120 can move the shielding plate 128 from the waiting position b to the shielding position a along an arc-shaped path.

The above-mentioned fluid shut-off valve 300 is somewhat different in the timing of the operation of the first injection module 140 . The above-mentioned first injection module 140 operates when the inflow prevention piston 162 of the inflow prevention cylinder 160 separates the fluid passage 110a from the accommodating space 110b. That is, when the first shielding plate 128 is located at the first waiting position b and the accommodating space 110b is shielded from the fluid channel 110a, the above-mentioned first injection module 140 can operate. The first spraying module 140 can spray cleaning gas to the first shielding plate 128 to remove reaction by-product particles.

Next, a fluid shut-off valve according to another embodiment of the present invention will be described.

10 is a vertical cross-sectional view of a fluid shut-off valve according to another embodiment of the present invention.

10 , compared with the fluid shut-off valve 300 of FIGS. 9 a and 9 b , the fluid shut-off valve 400 of another embodiment of the present invention may further include the gas bypass passage 200 a of the fluid shut-off valve 200 of FIG. 7 . That is, in the fluid shut-off valve 400 described above, the gas bypass passage 200 a including the fluid shut-off valve 200 of FIG. 7 may be added to the fluid shut-off valve 300 of FIGS. 9 a and 9 b .

The valve housing 410 of the above-mentioned fluid shut-off valve 400 may include an upper bypass passage 200b and a lower bypass passage 200c. The above-mentioned valve housing 410 may omit the parts forming the second shielding module 130 and the second spraying module 150 . In addition, the above-mentioned fluid shut-off valve 400 may include a bypass connecting pipe 280 and a bypass channel blocking unit 290 . The structure of the above-mentioned fluid shut-off valve 400 has already been described in the fluid shut-off valve 200 of FIG. 7 and the fluid shut-off valve 300 of FIGS. 9 a and 9 b , and thus detailed descriptions will be omitted.

Next, the operation of the fluid shut-off valve according to another embodiment of the present invention will be described.

FIG. 11 is a vertical cross-sectional view showing the operation of the fluid shutoff valve of FIG. 10 .

Hereinafter, the operation of the fluid shut-off valve 400 according to another embodiment of the present invention will be described. Compared to the fluid shut-off valve 300 of Figures 9a and 9b, the above-described fluid shut-off valve 400 differs in that it includes the bypass gas passage 200a. Therefore, in the function of the above-described fluid shut-off valve 400, the functions other than the function of the bypass gas passage 200a may be equally applicable to the fluid shut-off valve 300 of Figs. 9a and 9b.

Also, the fluid shut-off valve 400 of FIG. 10 may operate the same or similarly to the fluid shut-off valve of FIG. 7 .

First, as shown in part (a) of FIG. 11 , the first shielding module 120 operates the first pneumatic cylinder 121 to rotate the first transfer body 125 , and causes the first shielding plate 128 to extend toward the cover upper hole 110c. The lower shield position a moves. In this case, the above-mentioned first air cylinder 121 is operated by air pressure supplied from the outside. The inflow prevention cylinder 160 raises the first shield plate 128 together with the inflow prevention piston 162 by the air pressure supplied from the outside. The first shielding plate 128 is raised from the first transfer body 125 to come into contact with the bottom surface of the valve housing 410 and shield the fluid passage 110a. In this case, the above-mentioned bypass passage blocking unit 290 maintains a state of shielding the upper bypass passage 200b.

Next, as shown in part (b) of FIG. 11 , the bypass passage blocking unit 290 described above may open the upper bypass passage 200b. In this case, the above-mentioned vacuum pump is in the activated state, and the vacuum degree of the process chamber will also increase. More specifically, prior to the activation of the above-mentioned process chamber, the process chamber and process piping located on the upper (or front side) of the first shield plate 128 are slowly exhausted, and after a predetermined time has elapsed, the process chamber and the process pipe located at the upper part (or the front side) of the first shield plate 128 are exhausted. The process piping and vacuum pump at the bottom (or rear side) of the device create a vacuum equal pressure.

Next, as shown in FIG. 11( c ), the first shielding module 120 operates the first pneumatic cylinder 121 to rotate the first transfer body 125 , and causes the first shielding plate 128 to move toward the first shielding plate 128 in the accommodating space 110b. Wait for position b to move. In this case, the above-mentioned inflow prevention cylinder 160 lowers the first shield plate 128 together with the inflow prevention piston 162 in advance, and sets the first shield plate 128 on the first transfer body 125 . The above-mentioned fluid passage 110a allows the fluid to flow from the upper part to the lower part. In this case, the above-mentioned bypass passage blocking unit 290 shields the upper bypass passage 200b to prevent fluid from flowing into the bypass gas passage 200a.

The first spraying module 140 sprays the cleaning gas to the upper surface of the first shielding plate 128 through the first gas spraying holes 142a. The above-mentioned cleaning gas can be removed by washing a plurality of particles including reaction by-product particles existing on the upper surface of the first shielding plate 128 . The above-mentioned cleaning gas can flow into the lower side of the fluid channel 110a through the bypass gas channel 200a and be discharged from the process piping.

In the fluid shut-off valve 400 of the embodiment of FIG. 10 , when the first shielding plate 128 is in the first waiting position b and the inflow prevention cylinder 160 shields the fluid channel 110a from the receiving space 110b, the first spray module 140 can spray the cleaning gas . Therefore, the above-mentioned fluid shut-off valve 400 is different from the fluid shut-off valve 200 of the embodiment of FIG. 7 in terms of the period of spraying the cleaning gas.

Next, a fluid shut-off valve according to still another embodiment of the present invention will be described.

FIG. 12 is a top view of a fluid shut-off valve according to still another embodiment of the present invention. FIG. 13 is a vertical cross-sectional view along D-D of FIG. 12 . Fig. 14 is an enlarged view of "E" of Fig. 13 . FIG. 15 is a horizontal cross-sectional view taken along line F-F of FIG. 14 . FIG. 16 is a horizontal cross-sectional view along G-G of FIG. 14 .

12 to 16 , a fluid shut-off valve 500 according to another embodiment of the present invention may include a valve housing 510 , a first shielding module 120 , a second shielding module 130 , a first injection module 540 , and a second injection module 550 and inflow prevention cylinder 160. In addition, the above-mentioned fluid shut-off valve 500 may further include a lower outflow pipe 170 .

Compared with the fluid shut-off valve 100 shown in FIGS. 1 to 6 , the fluid shut-off valve 500 according to another embodiment of the present invention is different in the structures of the first injection module 540 , the second injection module 550 and the valve housing 510 accommodating them. . Also, the remaining structure of the above-described fluid shut-off valve 500 may be formed the same as or similar to the fluid shut-off valve 100 of FIGS. 1 to 6 . Therefore, in the following, the fluid shut-off valve 500 will be described focusing on the structures of the first injection module 540 , the second injection module 550 , and the valve housing 510 . In addition, the same reference numerals are assigned to the same or similar structures of the fluid shut-off valve 500 as those of the fluid shut-off valve 100 in FIGS. 1 to 6 , and detailed descriptions are omitted.

The valve cover 510 may include an upper cover hole 110c, a lower cover hole 110d, a first shielding hole 110e, a second shielding hole 110f, a first injection hole 510g, a second injection hole 510h, a first injection receiving groove 510i, and a second injection hole The receiving groove 510j. The valve housing 510 may be formed by combining an upper housing 511 and a lower housing 512 which are separated from each other in the horizontal direction.

The first injection hole 510g is formed at a predetermined depth downward from the first waiting position b on one side of the valve housing 510 with reference to the fluid passage 110a. That is, the first injection hole 510g may be formed at a predetermined depth from the upper surface of the upper cover 511 toward the lower surface at a position corresponding to the center of the first waiting position b. The first spray hole 510g may provide a path through which the cleaning gas supplied to the first spray module 540 flows. Therefore, the first injection hole 510g described above may be formed with a relatively small diameter or width, unlike the first injection hole 110g of the fluid shut-off valve 110 of FIGS. 1 to 6 . For example, the diameter of the first spray hole 510 g may be smaller than the diameter of the first spray module 540 . The above-mentioned first injection holes 510g can be formed with an appropriate diameter to supply the cleaning gas in an amount required by the first injection module 540 .

The second injection hole 510h may be formed at a predetermined depth downward from the center of the second waiting position c on the other side of the valve housing 510 with reference to the fluid passage 110a. The above-mentioned second injection hole 510h may be formed at a predetermined depth from the upper surface of the upper cover 511 toward the lower surface direction. The above-mentioned second spray holes 510h may provide a path through which the cleaning gas supplied to the second spray module 550 flows. The shape and size of the second injection hole 510h may be the same as the first injection hole 510g.

The upper bottom surface of the first ejection accommodating groove 510i can be connected to the lower end of the first ejection hole 510g so as to have a groove shape open to the upper part of the accommodating space 110b. That is, the first ejection receiving groove 510i may extend from the bottom surface of the upper cover 511 toward the upper surface direction to the lower end of the first ejection hole 510g, and may be connected to the first ejection hole 510g so as to penetrate therethrough. The center of the first ejection accommodating groove 510i may be the same as the center of the first waiting position b on one side of the valve housing 510 based on the fluid passage 110a. The diameter of the first injection receiving groove 510i may be larger than the diameter of the first injection hole 510g. The above-mentioned first injection accommodating groove 510i can be formed in a size required for accommodating the first injection module 540 . That is, the inner diameter of the above-mentioned first injection accommodating groove 510i may correspond to the outer diameter of the first injection module 540 . The above-mentioned first ejection receiving groove 510i may have an inclined surface, so that the height of the upper bottom surface gradually decreases as it approaches the outer side from the center.

The upper end of the second ejection accommodating groove 510j can be connected to the lower end of the second ejection hole 510h so as to pass through the second ejection hole 510h, and can have a groove shape open to the upper part of the accommodating space 110b. That is, the second ejection receiving groove 510j can extend from the bottom surface of the upper cover 511 toward the upper surface direction to the lower end of the second ejection hole 510h, and can be connected to the second ejection hole 510h so as to penetrate therethrough. The center of the second ejection accommodating groove 510j may be the same as the center of the second waiting position c on one side of the valve housing 510 based on the fluid passage 110a. The diameter of the second ejection receiving groove 510j may be larger than the diameter of the second ejection hole 510h. The above-mentioned second ejection accommodating groove 510j can be formed in a size required for accommodating the second ejection module 550 . That is, the inner diameter of the second ejection receiving groove 510j may be the same as the outer diameter of the second ejection module 550 . The above-mentioned second ejection receiving groove 510j may have an inclined surface, so that the upper bottom surface approaches the outer side from the center, and the height thereof gradually decreases.

The above-mentioned first spraying module 540 may include a first spraying plate 542 . In addition, the above-mentioned first spraying module 540 may further include a first spraying support rod 544 . The first spray module 540 is accommodated in the first spray accommodating groove 510i, and supplies the cleaning gas supplied through the first spray holes 510g to the upper surface of the first shielding plate 128 at the first waiting position b.

The above-mentioned first injection plate 542 may include first gas injection holes 542a. The first ejection plate 542 may be formed in a plate shape having a predetermined thickness, and may have a shape corresponding to the planar shape of the first ejection accommodating groove 510i. The upper surface of the first ejection plate 542 can be combined with the inside of the first ejection accommodating groove 510i so as to be spaced apart from the upper bottom surface of the first ejection accommodating groove 510i. The first spray plate 542 may form a cleaning gas channel d through which the cleaning gas flows together with the upper bottom surface of the first spray receiving groove 510i. The cleaning gas passage d may be formed in a disk shape from the first injection hole 510g toward the outer peripheral surface of the first injection plate 542 . The first spray plate 542 can spray the cleaning gas supplied to the first spray receiving groove 510i through the first spray hole 510g to the shield plate 128 located in the receiving space 110b. The above-mentioned cleaning gas passage d may have a shape whose height gradually decreases toward the outer side from the center.

The above-mentioned first gas injection holes 542a may be formed to penetrate from the upper surface to the lower surface of the first injection plate 542 . The first gas injection holes 542a may be arranged in a ring shape at positions corresponding to the center of the first injection plate 542 and the upper portion of the first O-ring 129 of the first shielding plate 128 , spaced apart in the circumferential direction. In addition, a plurality of the first gas injection holes 542a may be additionally formed between the center and the circumferential ring. Although not specifically shown, among the first injection holes 510g described above, the diameters of the first injection holes 510g located in the circumferential ring are relatively large. Compared with the central area of the first shielding plate 128, the first spray plate 542 can spray relatively more cleaning gas to the first O-ring 129, and can effectively remove the reaction pair attached to the first O-ring 129. product particles.

The first spraying support rod 544 can be in the shape of a column, and can be combined between the upper surface of the first spraying plate 542 and the upper bottom surface of the first spraying receiving groove 510i. The first spraying support rods 544 may be formed at least two, and the two first spraying support rods 544 may be spaced from the outer side of the upper surface of the first spraying plate 542 along the circumferential direction. Preferably, the above-mentioned first spraying support rods 544 can be formed in three or four pieces. The first spraying support rod 544 can maintain a constant interval between the upper surface of the first spraying plate 542 and the upper bottom surface of the first spraying accommodating groove 510i so that the cleaning gas passage d can be formed at a predetermined height. Also, although not specifically shown, the above-described first injection support rod 544 may provide a path through which bolts for coupling the first injection plate 542 with the valve housing 510 pass.

The above-mentioned second spraying module 550 may include a second spraying plate 552 . In addition, the above-mentioned second spraying module 550 may further include a second spraying support rod 554 . The second spraying module 550 is accommodated in the second spraying accommodating groove 510j, and supplies the cleaning gas supplied through the second spraying holes 510h to the upper surface of the second shielding plate 138 at the second waiting position c.

The second spraying module 550 can have the same or similar structure as the first spraying module 540 except that it is accommodated in the second spraying accommodating groove 510j to spray the cleaning gas to the second shielding plate 138 located at the second waiting position c form. Therefore, the above-described second injection plate 552 is formed the same as or similar to the first injection plate 542, and may include second gas injection holes 552a that are the same as or similar to the first gas injection holes 542a. That is, the above-mentioned second gas injection holes 522a may be spaced in the circumferential direction at positions corresponding to the center of the second injection plate 552 and the upper part of the second O-ring 139 located on the upper surface of the second shield plate 138 . Ring shape configuration. Also, the above-described second spray support rod 554 may be formed the same as or similar to the first spray support rod 544 . That is, the second spraying support rods 554 may be in the shape of a column, and at least two may be formed, and the two second spraying support rods 554 are located on the upper surface of the second spraying plate 552 and the upper bottom surface of the second spraying accommodating groove 510j Between them, the joints are spaced apart along the circumferential direction.

Next, a fluid shut-off valve according to still another embodiment of the present invention will be described.

17 is a vertical cross-sectional view of a fluid shut-off valve according to still another embodiment of the present invention.

Referring to FIG. 17 , a fluid shut-off valve 600 according to another embodiment of the present invention may include a valve housing 610 , a first shielding module 120 , and a first injection module 540 . Compared with the fluid shut-off valve 500 of FIGS. 12 to 16 , the above-mentioned fluid shut-off valve 600 does not include the second shielding module 130 and the second injection module 550 . In addition, the valve housing 610 may include only the first waiting position b in the accommodating space 110b. The above-described fluid shut-off valve 600 may be formed the same as or similarly to the fluid shut-off valve 500 of FIGS. 12 to 16 , except for changes in the structure of the valve housing 610 . Therefore, the following description will focus on the structure of the fluid shut-off valve 600 described above, which is different from the fluid shut-off valve 100 of FIGS. 1 to 6 . In addition, in the above-described fluid shut-off valve 600, the same or similar structures as those of the fluid shut-off valve 100 in FIGS. 1 to 6 are given the same reference numerals and detailed descriptions thereof are omitted.

In addition, the above-mentioned fluid shut-off valve 600 is different from the fluid shut-off valve 500 shown in FIGS. 12 to 16 in the timing of the operation of the first injection module 540 . For example, when the inflow prevention piston 162 of the inflow prevention cylinder 160 separates the fluid passage 110a and the receiving space 110b, the first injection module 540 can operate. That is, when the first shielding plate 128 is located at the first waiting position b and the accommodating space 110b is shielded from the fluid channel 110a, the above-mentioned first injection module 540 can operate. The first spraying module 540 can spray cleaning gas to the first shielding plate 128 to remove reaction by-product particles.

Also, the valve housing 610 described above may be formed of a relatively small diameter as compared to the valve housing 510 of FIGS. 12-16 . Therefore, the valve housing 610 can be formed in such a manner that only the first shielding module 120 and the first injection module 540 are combined or accommodated.

The first shielding module 120 of the fluid shut-off valve 600 can rotate and move the first shielding plate 128 from the waiting position b to the shielding position a. In this case, when the first shielding plate 128 is located at the waiting position b, the first spraying module 540 can spray the cleaning gas.

On the other hand, as described above, in the fluid shut-off valve of the embodiment of the present invention, the first shielding module 120 or the second shielding module 130 is used to make the first shielding plate 128 and the second shielding plate 138 rotate at the first A configuration in which the shaft 124 or the second rotation shaft 134 is rotated to move from the first waiting position b or the second waiting position c to the shielding position a will be described as the center.

Additionally, the fluid shut-off valve of the embodiment of the present invention can also be applied to a structure in which the shielding plate is moved linearly from the waiting position to the shielding position a. In this case, the shielding module may include a pneumatic cylinder, a spring or a driving motor to linearly move the shielding plate from the waiting position to the shielding position a. In this case, when the shielding plate is in the waiting position, the above-mentioned spraying module can spray the cleaning gas.

Also, as in the above-mentioned embodiment, in the above-mentioned fluid shut-off valve, at least two shielding modules and injection modules are formed, and a plurality of shielding modules are arranged symmetrically with the shielding position a as the center or at a predetermined angle. In addition, the above-mentioned injection module may also be located on the upper part of each shielding plate.

Hereinafter, a fluid shut-off valve according to yet another embodiment of the present invention in which the shielding plate described above has a structure in which the shielding plate moves linearly from the waiting position to the shielding position will be described.

Next, a fluid shut-off valve according to still another embodiment of the present invention will be described.

18 is a top view of a fluid shut-off valve according to still another embodiment of the present invention. FIG. 19 is a vertical cross-sectional view along G-G of FIG. 18 . FIG. 20 is a vertical cross-sectional view of a state where the shielding plate shields the fluid passage 110a in the fluid shutoff valve of FIG. 18 .

Referring to FIGS. 18 to 19 , a fluid shut-off valve 700 according to yet another embodiment of the present invention may include a valve housing 710 , a shielding module 720 and a spraying module 740 . In addition, the above-mentioned fluid shut-off valve 700 may further include a lower outflow pipe 170 . On the other hand, although not specifically shown, the above-mentioned fluid shut-off valve 700 may further include the bypass gas passage 200a, the bypass connecting pipe 280 and the bypass passage blocking unit 290 of the fluid shut-off valve 200 of the embodiment of FIG. 7 .

Similar to the fluid shut-off valve 600 of FIG. 17 , the above-described fluid shut-off valve 700 can linearly move the shielding module 720 for shielding the fluid channel 110 a from the waiting position to the shielding position. That is, the above-mentioned fluid shut-off valve 700 enables the shielding plate 728 of the shielding module 720 to repeatedly move through a linear path between the shielding position a and the waiting position b to shield the fluid passage 110a. Since the shielding plate 728 of the shielding module 720 moves linearly, in the structure of the valve housing 710 and the shielding module 720, the fluid shut-off valve 700 is different from the fluid shut-off valves 100, 200, 300, There are some differences between 400 and 500.

Also, the injection module 740 of the above-mentioned fluid shut-off valve 700 may be formed the same as or similar to the first injection module 540 of the fluid shut-off valve 500 of the embodiment of FIGS. 12 to 16 . That is, the above-mentioned spraying module 740 may include a spraying plate 742 and a spraying support rod 744 . The above-described jetting plate 742 may be formed the same as or similar to the first jetting plate 542 of the first jetting module 540 . The above-described injection plate 742 may include gas injection holes 742a. Also, the above-mentioned spraying support rods 744 may be formed the same as or similar to the first spraying support rods 544 of the first spraying module 540 . Also, the injection module 740 of the above-mentioned fluid shut-off valve 700 may be formed the same as or similar to the first injection module 140 of the fluid shut-off valve 100 of the embodiment of FIGS. 1 to 6 . The detailed description of the above-mentioned injection module 740 is omitted.

The following description will focus on the differences between the above-described fluid shut-off valve 700 and the fluid shut-off valve 500 of the embodiment shown in FIGS. 12 to 16 . In addition, in the above-described fluid shut-off valve 700, the same reference numerals are assigned to the same structures as those of the fluid shut-off valve 500 of the embodiment of FIGS. 12 to 16 or the fluid shut-off valve 100 of the embodiment of FIGS. 1 to 6 and omitted. Specific instructions. In addition, in the above-mentioned fluid shut-off valve 700, the same structural drawings as those of the fluid shut-off valve 500 of the embodiment of FIG. 12 to FIG. 16 or the fluid shut-off valve 100 of the embodiment of FIG. 1 to FIG. 6 are marked and the details are omitted. instruction. In addition, in FIGS. 18 to 19 showing the above-described fluid shut-off valve 700 , reference numerals may be omitted for the same structures shown in FIGS. 12 to 16 or FIGS. 1 to 6 .

The valve cover 710 may include a fluid channel 110a and a receiving space 110b, the fluid channel 110a extends up and down one side of the valve cover 710, and the receiving space 110b extends from the fluid channel 110a to the other side. In the valve housing 710 described above, the fluid passage 110a and the accommodating space 110b are located on one side and the other side, respectively, and therefore, may have a substantially rectangular shape.

The valve housing 710 may include a housing upper hole 110c and a housing lower hole 110d that open to the upper and lower portions of the fluid passage 110a, respectively. In addition, the valve housing 710 may include a housing shielding hole 710e, an injection hole 710g, and an injection receiving groove 710i. In addition, the above-mentioned valve housing 710 may further include an upper connecting pipe 115 .

The above-mentioned cover shielding hole 710e is formed by taking the fluid passage 110a as a reference and penetrating from the other side surface of the valve cover 710 toward the accommodating space 110b. The above-mentioned housing shielding hole 710e may provide a space for a part of the shielding module 720 to be combined.

The above-mentioned ejection holes 710g and ejection receiving grooves 710i may be formed the same as or similar to the first ejection holes 510g and the first ejection receiving grooves 510i of FIG. 13 , respectively. That is, the above-mentioned injection hole 710g can be formed with a predetermined depth from the waiting position on one side of the valve housing 710 to the lower direction. In addition, the upper bottom surface of the ejection accommodating groove 710i can be connected to the lower end of the ejection hole 710g so as to have a groove shape open to the upper part of the accommodating space 110b.

The valve housing 710 described above may have a shielding O-ring groove 710f formed on the upper bottom surface of the valve housing 710 in the shielding position a, that is, the shielding bottom surface region d. The above-mentioned shield O-ring groove 710f may be formed in a ring shape along the periphery of the fluid passage 110a, and may be opened toward the lower direction of the shield bottom surface area d. The above-mentioned shield O-ring groove 710f may be combined with the shield O-ring 719 . On the other hand, as shown in the fluid shut-off valve 100 of FIGS. 1 to 6 , the shielding O-ring groove 710f and the shielding O-ring 719 can be formed on the shielding plate 128 of the shielding module 220 .

The above-mentioned shielding module 720 may include a shielding air cylinder 721 , a shielding transfer ring 724 and a shielding plate 728 . On the other hand, as described above, the shielding module 720 described above may include a spring or a drive motor.

The above-mentioned shielding module 720 may be located on the other side with reference to the fluid passage 110 a of the valve housing 710 . As shown in FIG. 19 and FIG. 20 , the shielding module 720 may include a shielding air cylinder 721 combined with the valve cover 710 through the shielding hole 710e of the cover, so that the shielding transfer ring 724 and the shielding plate 728 can be moved linearly. That is, the above-mentioned shielding module 720 can repeatedly and linearly move the shielding plate 728 to the shielding position a and the waiting position b.

The above-mentioned shielding air cylinder 721 may be formed of a general iso-air cylinder. For example, the above-mentioned shielded pneumatic cylinder 721 may include a shielded pneumatic housing 722 and a shielded pneumatic piston 723 . The above-mentioned shielding pneumatic housing 722 may be in the shape of a barrel in which a space through which the air pressure flows in and out may be formed. The above-mentioned shielding pneumatic piston 723 can be in the shape of a rod, one side can flow inside the shielding pneumatic housing 722, and the other side can flow into the interior of the receiving space 110b.

One side of the shielding transfer ring 724 can be combined with the shielding pneumatic piston 723, and can move linearly from the receiving space 110b along the direction of the fluid channel 110a. That is, the above-mentioned shield transfer ring 724 can be repeatedly moved between the waiting position b and the shield position a by the forward and backward movement of the shield air piston 723 . The above-mentioned shield transfer ring 724 may have a ring shape having a predetermined inner diameter. The inner peripheral surface of the above-mentioned shield transfer ring 724 is formed to have a height difference.

The above-mentioned shielding plate 728 may be in the shape of a circular plate, and the outer diameter may correspond to the outer diameter of the shielding transfer ring 724 . The upper surface of the shielding plate 728 can be formed in a flat surface. The upper surface of the above-mentioned shielding plate 728 may be in contact with the shielding O-ring 719 of the valve housing 710 and seal the fluid passage 110a. On the other hand, although not specifically shown, as shown in the shielding plate 128 of FIGS. 1 to 6 , a shielding O-ring groove 128 a may be formed on the upper surface of the shielding plate 728 . Also, the above-mentioned shielding O-ring groove 128a may be combined with the shielding O-ring 719 .

Next, a fluid shut-off valve according to still another embodiment of the present invention will be described.

21 is a vertical cross-sectional view of a fluid shut-off valve according to still another embodiment of the present invention.

Referring to FIG. 21 , a fluid shut-off valve 800 according to another embodiment of the present invention may include a valve housing 710 , a shielding module 720 , an injection module 740 and an inflow prevention cylinder 160 . In addition, the above-mentioned fluid shut-off valve 800 may further include a lower outflow pipe 170 . On the other hand, although not specifically shown, the above-described fluid shut-off valve 800 may further include the bypass gas passage 200a of the fluid shut-off valve 100 of the embodiment of FIGS. 1 to 6 .

The above-mentioned fluid shut-off valve 800 may be formed by combining the fluid shut-off valve 700 of the embodiment of FIG. 18 to FIG. 20 and the inflow prevention cylinder 160 of the fluid shut-off valve 100 of the embodiment of FIGS. 1 to 6 . The valve housing 710 of the above-mentioned fluid shut-off valve 800 is the same as or similar to the lower structure of the valve housing 110 shown in FIG. In addition, in the above-mentioned fluid shut-off valve 800 , the injection module 740 can be formed in the structure of the first injection module 140 of the fluid shut-off valve 100 shown in FIGS. 1 to 6 . The structure of the above-described fluid shutoff valve 800 has been described in the above-described embodiment, and therefore, a detailed description thereof will be omitted.

The embodiments of the technical idea of the present invention have been described above with reference to the drawings. Those skilled in the art to which the present invention pertains can implement the present invention into other specific forms without changing the essential features of the technical idea of the present invention. . The embodiments described above are illustrative in all respects, and are not intended to limit the present invention.

100, 200, 300, 400, 500, 600, 700, 800: Fluid shut-off valve 110, 210, 310, 410, 510, 610, 710: valve housing 110a: fluid channel 110b: receiving space 110c: upper cover hole 110d: cover lower hole 110e, 710e: first shielding hole 110f: second shielding hole 110g, 510g: the first injection hole 110h, 510h: the second injection hole 510i: first ejection receiving tank 510j: second ejection receiving tank 120: The first shielding module 720: The shielding module 121: The first pneumatic cylinder 122: The first pneumatic housing 122a: first piston passage 122b: first rotation hole 123: The first pneumatic piston 124: The first rotating shaft 125: First transfer body 126: First transfer rod 127: The first transfer ring 128: The first shielding plate 129: First O-ring 728: Shield plate 130: Second shielding module 131: Second pneumatic cylinder 132: Second pneumatic housing 132a: second piston passage 132b: second rotation hole 133: Second pneumatic piston 134: Second rotating shaft 135: Second transfer body 136: Second transfer rod 137: The second transfer ring 138: The second shielding plate 139: The second O-ring 140, 540: The first injection module 740: Injection module 141: The first injection body 141a: first air supply hole 141b: first air guide groove 141c: first body step 142, 542: first jet plate 742: Jet Plate 744: Jet Support Rod 142a, 542a: first gas injection hole 142b: first bonding groove 143: The first air supply pipe 544: The first injection support rod 150, 550: the second injection module 151: the second injection body 151a: Second air supply hole 151b: Second air guide groove 151c: Second body step 152, 552: Second jet plate 152a, 552a: second gas injection hole 152b: second bonding groove 153: Second air supply pipe 554: Second spray support rod 160: Inflow prevention cylinder 160a: Lower fluid passage 161: Inflow prevention cover 161a: Piston passage prevention 161b: prevention passage opening hole 161c: first prevention passage 161d: second preventing passage 161e: blocking gas passage 162: Inflow preventing piston 163: Preventing piston body 164: Anti-piston rod 164a: Rod O-ring groove 165: Piston O-ring 166: Inflow blocking unit 167: Inflow blocking ring 167a: Blocking gas flow path 168: Inflow blocking flange 170: Lower outflow pipe 170a: lower outflow channel 200a: bypass gas channel 200b: upper bypass passage 200c: lower bypass passage 280: Bypass connecting pipe 290: Bypass channel blocking unit

FIG. 1 is a top view of a fluid shut-off valve according to an embodiment of the present invention. FIG. 2a is a vertical cross-sectional view along A-A of FIG. 1 . Fig. 2b is an enlarged view of B of Fig. 2a. FIG. 3 a is an isolated perspective view of the first shielding module of FIG. 1 . FIG. 3b is a vertical cross-sectional view of the first shielding module of FIG. 3a. FIG. 4 is a horizontal cross-sectional view of the first pneumatic cylinder of FIG. 1 . FIG. 5 is a vertical cross-sectional view of the first injection module of FIG. 1 . FIG. 6 is a bottom view of the first injection module of FIG. 5 . 7 is a vertical cross-sectional view of a fluid shut-off valve according to still another embodiment of the present invention. FIGS. 8 a and 8 b are process diagrams showing the operation of the fluid shutoff valve of the embodiment of FIG. 7 . 9a is a vertical cross-sectional view of a fluid shut-off valve according to another embodiment of the present invention. Figure 9b is a vertical cross-sectional view taken along line C-C of Figure 9a. 10 is a vertical cross-sectional view of a fluid shut-off valve according to another embodiment of the present invention. FIG. 11 is a process diagram showing the operation of the fluid shut-off valve of the embodiment of FIG. 10 . FIG. 12 is a top view of a fluid shut-off valve according to still another embodiment of the present invention. FIG. 13 is a vertical cross-sectional view along D-D of FIG. 12 . Fig. 14 is an enlarged view of "E" of Fig. 13 . FIG. 15 is a horizontal cross-sectional view taken along line F-F of FIG. 14 . FIG. 16 is a horizontal cross-sectional view along G-G of FIG. 14 . 17 is a vertical cross-sectional view of a fluid shut-off valve according to still another embodiment of the present invention. 18 is a top view of a fluid shut-off valve according to still another embodiment of the present invention. FIG. 19 is a vertical cross-sectional view along G-G of FIG. 18 . FIG. 20 is a vertical cross-sectional view of a state in which the shielding plate shields the fluid passage in the fluid shutoff valve of FIG. 18 . 21 is a vertical cross-sectional view of a fluid shut-off valve according to another embodiment of the present invention.

100: Fluid shut-off valve

110: Valve cover

110e: first shield hole

110f: Second shield hole

110g: the first injection hole

110h: Second injection hole

120: The first shielding module

121: The first pneumatic cylinder

124: The first rotation axis

130: Second shielding module

131: The second pneumatic cylinder

140: The first jet module

150: Second jet module

A-A: Line

a: shield position

b: first waiting position

c: second waiting position

Claims (20)

A fluid shut-off valve, comprising: The valve cover includes a fluid channel and a accommodating space, the fluid channel is formed between the upper hole of the cover and the lower hole of the outer cover, and is used for fluid to flow in and flow, and the accommodating space is formed on the outside of the fluid channel and is connected with the fluid channel ; The first shielding module includes a first shielding plate, the first shielding plate is located in the first waiting position of the receiving space, and moves to the shielding position of the fluid channel to shield the fluid channel; The second shielding module includes a second shielding plate, the second shielding plate is located in the second waiting position of the receiving space, and moves to the shielding position to alternately shield the fluid channel with the first shielding module; a first spraying module for spraying cleaning gas to the upper surface of the first shielding plate; and The second spraying module is used for spraying cleaning gas to the upper surface of the second shielding plate. The fluid shut-off valve of claim 1, wherein, The above-mentioned first shielding module further includes: a first pneumatic cylinder, located on one side of the fluid passage outside the valve housing; a first rotating shaft, one side of which is connected to the first pneumatic cylinder and rotates, and the other side extends toward the accommodating space of the valve housing; and One side of the first transfer body is coupled with the first rotating shaft, and the other side rotates in an arc-shaped trajectory to repeatedly move between the first waiting position and the shielding position, The first shielding plate is placed on the other side of the first transfer body, moves up and down at the shielding position and shields the fluid passage, The above-mentioned second shielding module further includes: The second pneumatic cylinder is located on the other side of the fluid passage on the outside of the valve housing; a second rotating shaft, one side of which is connected to the second pneumatic cylinder and rotates, and the other side extends toward the accommodating space of the valve housing; and One side of the second transfer body is coupled with the second rotating shaft, and the other side rotates in an arc-shaped trajectory to repeatedly move between the second waiting position and the shielding position, The second shielding plate is placed on the other side of the second transfer body, moves up and down at the shielding position, and shields the fluid passage. The fluid shut-off valve of claim 1, wherein, The valve housing includes a first injection hole and a second injection hole, the first injection hole penetrates at the upper part of one side of the fluid passage to the first waiting position of the receiving space, and the second injection hole is formed on the other side of the fluid passage. The upper part of the side penetrates to the second waiting position of the above-mentioned accommodating space, The above-mentioned first injection module includes: The first spray body includes a first air supply hole and a first gas guide groove, the first air supply hole penetrates from the upper surface to the lower surface for inflow of the cleaning gas, and the first gas guide groove is formed from the lower surface to the upper direction , forming the above-mentioned first air supply hole in the center; and The first spray plate includes first gas spray holes penetrating from the upper surface to the lower surface for spraying the cleaning gas to the first shield plate, and is combined with the lower part of the first gas guide groove, The above-mentioned second injection module includes: The second spray body includes a second gas supply hole and a second gas guide groove, the second gas supply hole penetrates from the upper surface to the lower surface for inflow of the cleaning gas, and the second gas guide groove is formed from the lower surface to the upper direction , forming the above-mentioned second air supply hole in the center; and The second injection plate includes a second gas injection hole, which penetrates from the upper surface to the lower surface, is used for injecting the cleaning gas, and is combined with the lower part of the second gas guide groove. The fluid shut-off valve of claim 3, wherein, The first gas guide groove and the second gas guide groove have a shape such that the depth decreases as they approach the outside of the first injection body and the second injection body. The plurality of first gas injection holes and the plurality of second gas injection holes are respectively formed radially spaced from the center of the first injection plate and the second injection plate toward the outside. The fluid shut-off valve of claim 1, wherein, The valve housing described above includes: The first injection hole is formed at a predetermined depth from the upper portion of the first waiting position toward the lower direction; a first ejection accommodating groove, the bottom surface of the upper part is connected with the lower end of the first ejection hole in a way of penetrating, and the lower part is open toward the upper part of the accommodating space; The second injection hole is formed at a predetermined depth from the upper portion of the second waiting position toward the lower direction; and The second ejection accommodating groove is connected to the bottom surface of the upper part so as to pass through the lower end of the second ejection hole, and the lower part opens toward the upper part of the accommodating space, The first injection module includes a first injection plate, the first injection plate includes a plurality of first gas injection holes penetrating from the upper surface to the lower surface, and the upper surface is separated from the upper bottom surface of the first injection receiving groove. The way is combined with the above-mentioned first ejection receiving groove along the horizontal direction, The second injection module includes a second injection plate, the second injection plate includes a plurality of second gas injection holes penetrating from the upper surface to the lower surface, and the upper surface is separated from the upper bottom surface of the second injection receiving groove. It is combined with the above-mentioned second ejection accommodating groove along the horizontal direction. The fluid shut-off valve of claim 5, wherein, The first gas injection holes are arranged in a ring shape at a center of the first injection plate and a position corresponding to the upper part of the first O-ring located on the upper surface of the first shield plate along the circumferential direction, and are arranged in a ring shape, The second gas injection holes are arranged in a ring shape spaced apart in the circumferential direction at the center of the second injection plate and a position corresponding to the upper part of the second O-ring located on the upper surface of the second shield plate. The fluid shut-off valve of claim 5, wherein, The first gas injection module also includes at least two first injection support rods, the at least two first injection support rods are in the shape of columns, and are located on the upper surface of the first injection plate and the upper bottom surface of the first injection receiving groove. spaced and combined in the circumferential direction, The above-mentioned second gas injection module also includes at least 2 second injection support rods, and at least 2 second injection support rods are in the shape of columns, and are located between the upper surface of the above-mentioned second injection plate and the upper bottom surface of the second injection receiving groove. Spaced and combined in the circumferential direction. A fluid shut-off valve as claimed in claim 3 or 6, wherein, When the second shielding plate shields the fluid passage at the shielding position and the first shielding plate is at the first waiting position, the first spraying module sprays the cleaning gas to the upper surface of the first shielding plate, When the first shielding plate shields the fluid passage at the shielding position and the second shielding plate is at the second waiting position, the second spraying module sprays cleaning gas to the upper surface of the second shielding plate. The fluid shut-off valve according to claim 1, further comprising an inflow prevention cylinder, the inflow prevention cylinder is combined with the lower cover hole of the valve cover, and supports the first shielding plate or the second shielding plate located at the shielding position by supporting the first shielding plate or the second shielding plate at the shielding position. When the first shielding plate and the second shielding plate are located at the first waiting position and the second waiting position, respectively, the fluid channel and the receiving space are separated. The fluid shut-off valve of claim 9, wherein, When the inflow prevention cylinder separates the fluid passage and the accommodating space, the first injection module injects the cleaning gas to the upper surface of the first shielding plate located at the first waiting position, The second spraying module sprays the cleaning gas to the upper surface of the second shielding plate located at the second waiting position. The fluid shut-off valve according to claim 1, further comprising: a bypass gas passage connected to the fluid passage at the upper portion of the shielding position, penetrating the receiving space to be connected to the fluid passage at the lower portion of the shielding position, and juxtaposed with the fluid passage as a path for the fluid to flow; and The bypass channel blocking unit is used for opening and closing the bypass gas channel. The fluid shut-off valve according to claim 11, wherein the bypass gas passage provides a path for the cleaning gas sprayed by the first spraying module and the second spraying module to be discharged to the outside of the receiving space. A fluid shut-off valve, comprising: The valve cover includes a fluid channel and a accommodating space, the fluid channel is formed between the upper hole of the cover and the lower hole of the outer cover, and is used for fluid to flow in and flow, and the accommodating space is formed on the outside of the fluid channel and is connected with the fluid channel ; a first shielding module, comprising a first shielding plate, the first shielding plate is located in the first waiting position of the receiving space and moves to the shielding position of the fluid channel to shield the fluid channel; and The first spraying module is used for spraying cleaning gas to the first shielding plate. The fluid shut-off valve according to claim 13, further comprising an inflow prevention cylinder, the inflow prevention cylinder is combined with the lower hole of the cover of the valve cover, and the first shielding plate at the shielding position is supported to be raised and moved upwards. The fluid channel is shielded, and when the first shielding plate is located at the first waiting position, the fluid channel and the receiving space are separated. The fluid shut-off valve of claim 14, wherein when the inflow prevention cylinder separates the fluid passage and the accommodating space, the first injection module is directed to the upper surface of the first shielding plate located at the first waiting position The above cleaning gas is sprayed. A fluid shut-off valve, comprising: The valve cover includes a fluid channel and a receiving space, the fluid channel is formed between the upper hole of the cover and the lower hole of the cover, and is used for fluid gas to flow in and flow, and the receiving space is formed on the outside of the fluid channel and is opposite to the fluid channel. connect; a shielding module, comprising a shielding plate, the shielding plate is located in the waiting position of the receiving space and moves to the shielding position of the fluid channel to shield the fluid channel; and The spraying module is used for spraying cleaning gas to the shielding plate located at the waiting position. The fluid shut-off valve of claim 16, wherein the shielding module moves the shielding plate along an arcuate path or along a straight path from the waiting position to the shielding position. The fluid shut-off valve of claim 16, wherein, The valve housing described above includes: an injection hole formed at a predetermined depth in the downward direction at the waiting position on one side; and an ejection accommodating groove, the upper bottom surface is connected to the lower end of the ejection hole so as to pass through, and the lower part is open to the upper part of the accommodating space, The injection module includes an injection plate, the injection plate includes a plurality of gas injection holes penetrating from an upper surface to a lower surface, and the upper surface is spaced apart from the upper bottom surface of the injection storage tank along the horizontal direction. Combine. The fluid shut-off valve of claim 18, wherein, The valve cover further includes a cover shielding hole, which penetrates from the other side of the valve cover to the receiving space, The shielding module includes a shielding air cylinder which is combined with the valve cover through the shielding hole of the outer cover, and the shielding air cylinder makes the shielding plate move linearly. The fluid shut-off valve of claim 16, further comprising an inflow prevention cylinder combined with the lower portion of the valve housing.

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