KR20210117970A - Fluid Shutoff Valve - Google Patents

Abstract

The present invention is to provide a fluid shutoff valve capable of maintaining a shielding function by removing reaction byproducts accumulated on an upper surface of a shielding plate. Disclosed is a fluid shutoff valve comprising: a valve housing formed between a housing upper hole and a housing lower hole and having a fluid passage through which a fluid flows and a receiving space formed outside the fluid passage and connected to the fluid passage; a first shielding module located in a first standby position of the receiving space and having a first shielding plate moving to a shielding position of the fluid passage to shield the fluid passage; a second shielding module located in a second standby position of the receiving space and moving to the shielding position to alternately shield the fluid passage with the first shielding module; and a first spraying module for spraying cleaning gas on an upper surface of the first shielding plate and a second spraying module for spraying cleaning gas on an upper surface of the second shielding plate.

Description

Fluid Shutoff Valve

The present invention relates to a fluid shutoff valve that is installed in a process chamber or process pipe of a semiconductor manufacturing line or a display manufacturing line and temporarily blocks the flow of a fluid including exhaust gas or reaction by-products.

A semiconductor manufacturing line or a display manufacturing line includes process equipment, a process pipe, and a vacuum pump, and the process equipment and the vacuum pump may be connected to each other by the process pipe. The process equipment includes a process chamber, and the inside of the process chamber is formed in a vacuum by a vacuum pump. The inside of the process chamber is maintained in a vacuum state, and a process process such as deposition or etching is performed. The process chamber may be maintained in a state cut off from atmospheric pressure by blocking the fluid shutoff valve during maintenance of process equipment, maintenance of process piping, or maintenance of a vacuum pump.

The fluid shutoff valve is required to maintain a shielding force when shutting off. When a leak occurs in the fluid shutoff valve, contamination inside the process chamber and maintenance process may be delayed.

In addition, there is a case in which the process chamber must be repeatedly maintained in a vacuum state and an atmospheric pressure state during the progress of the manufacturing process, and maintenance of the parts coupled between the process chamber and the vacuum pump is often required. In this case, the vacuum pump By sealing the fluid shutoff valve located on the upper part of the fluid shutoff valve, it is possible to maintain the pressures above and below the fluid shutoff valve at atmospheric pressure and vacuum, respectively.

In addition, unlike the above case, the fluid shutoff valve is blocked during replacement and maintenance of the vacuum pump to keep the upper part of the fluid shutoff valve in a vacuum state. In this case, the fluid shutoff valve must repeatedly shut off, and in particular, no leakage occurs during the shutoff. That is, the blocking function of the fluid shutoff valve is very important.

In addition, the fluid shutoff valve is also used in a process in which a lot of process reaction by-products (process powder) are generated. The fluid shut-off valve must be securely closed so that leakage does not occur in performing the shut-off. However, when the fluid shutoff valve is used in a process with many reaction byproducts, reaction byproducts may accumulate or adhere to the shielding plate that blocks the fluid. In this case, the fluid shutoff valve may not reliably shut off, causing a leak and lowering process efficiency.

An object of the present invention is to provide a fluid shutoff valve capable of maintaining a shielding function by removing reaction byproducts accumulated on the upper surface of the shielding plate.

Another object of the present invention is to provide a fluid shutoff valve that can extend the maintenance cycle of the fluid shutoff valve by configuring at least two shielding plates that move alternately to block the flow of fluid.

The fluid shutoff valve of the present invention comprises: a valve housing formed between a housing upper hole and a housing lower hole and having a fluid passage through which a fluid is introduced and flowing, and an accommodation space formed outside the fluid passage and connected to the fluid passage; A first shielding module positioned in a first standby position of the accommodating space and having a first shielding plate that moves to a shielding position of the fluid passage to shield the fluid passage, and is located in a second standby position of the accommodating space, , a second shielding module moving to the shielding position to alternately shield the fluid passage with the first shielding module, a first spraying module spraying a cleaning gas to the first shielding plate, and cleaning the second shielding plate It characterized in that it comprises a second injection module for supplying gas.

In addition, the fluid shutoff valve of the present invention includes a valve housing formed between the housing upper hole and the housing lower hole and having a fluid passage through which a fluid flows and a receiving space formed outside the fluid passage and connected to the fluid passage, , a first shielding module positioned in a first standby position of the accommodation space, and having a first shielding plate moving to a shielding position of the fluid passage to shield the fluid passage, and the first shielding located in the standby position It characterized in that it comprises a first injection module for injecting the cleaning gas to the plate.

In addition, the fluid shutoff valve of the present invention is formed between the upper hole of the housing and the lower hole of the housing, the valve housing having a fluid passage through which a fluid gas is introduced and flowing, and an accommodation space formed outside the fluid passage and connected to the fluid passage. and a shielding module positioned at a standby position of the accommodation space, moving to a shielding position of the fluid passage, shielding the fluid passage, and spraying a cleaning gas to a shielding module including a shielding plate and the shielding plate positioned in the standby position It is characterized in that it includes a spray module.

The fluid shutoff valve of the present invention can maintain the shielding function of the shielding plate by removing reaction byproducts accumulated on the upper surface of the shielding plate.

In addition, since the fluid shutoff valve of the present invention injects or sucks the cleaning gas to the upper surface of the shielding plate, it may be possible to remove reaction byproducts accumulated on the upper surface of the shielding plate without being separated from the vacuum pipe.

In addition, since the fluid shutoff valve of the present invention includes at least two shielding plates that are operated independently of each other, when one shields the fluid path, it is possible to remove reaction byproducts from the upper surface of the other shielding plate.

In addition, the fluid shutoff valve of the present invention can remove reaction by-products from the upper surface of the shield plate during the manufacturing process, thereby increasing process efficiency.

1 is a plan view of a fluid shutoff valve according to an embodiment of the present invention.
FIG. 2A is a vertical cross-sectional view taken along line AA of FIG. 1 .
FIG. 2B is an enlarged view of FIG. 2A .
Figure 3a is an exploded perspective view of the first shielding module of Figure 1;
3B is a vertical cross-sectional view of the first shielding module of FIG. 3A ;
4 is a horizontal cross-sectional view of the first pneumatic cylinder of FIG. 1 ;
FIG. 5 is a vertical cross-sectional view of the first injection module of FIG. 1 ;
6 is a bottom view of the first injection module of FIG. 5 .
7 is a vertical cross-sectional view of a fluid shutoff valve according to another embodiment of the present invention.
8 is a process diagram illustrating the operation of the fluid shutoff valve according to the embodiment of FIG. 7 .
9A is a vertical cross-sectional view of a fluid shutoff valve according to another embodiment of the present invention.
9B is a vertical cross-sectional view taken along CC of FIG. 9A.
10 is a vertical cross-sectional view of a fluid shutoff valve according to another embodiment of the present invention.
11 is a process diagram illustrating an operation of the fluid shutoff valve according to the embodiment of FIG. 10 .
12 is a plan view of a fluid shutoff valve according to another embodiment of the present invention.
13 is a vertical cross-sectional view taken along DD of FIG. 12 .
14 is an enlarged view of “E” of FIG. 13 .
15 is a horizontal cross-sectional view taken along the FF of FIG. 14 .
FIG. 16 is a horizontal cross-sectional view taken along line GG of FIG. 14 .
17 is a vertical cross-sectional view of a fluid shutoff valve according to another embodiment of the present invention.
18 is a plan view of a fluid shutoff valve according to another embodiment of the present invention.
19 is a vertical cross-sectional view taken along the HH of FIG. 18 .
FIG. 20 is a vertical cross-sectional view illustrating a state in which a shield plate blocks a fluid passage in the fluid shutoff valve of FIG. 18 .
21 is a vertical cross-sectional view of a fluid shutoff valve according to another embodiment of the present invention.

Hereinafter, a fluid shutoff valve according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

First, a fluid shutoff valve according to an embodiment of the present invention will be described.

1 is a plan view of a fluid shutoff valve according to an embodiment of the present invention. FIG. 2A is a vertical cross-sectional view taken along line A-A of FIG. 1 . FIG. 2B is an enlarged view of "B" in FIG. 2A. Figure 3a is an exploded perspective view of the first shielding module of Figure 1; 3B is a vertical cross-sectional view of the first shielding module of FIG. 3A ; 4 is a horizontal cross-sectional view of the first pneumatic cylinder of FIG. 1 ; FIG. 5 is a vertical cross-sectional view of the first injection module of FIG. 1 ; 6 is a bottom view of the first injection module of FIG. 5 .

The fluid shutoff valve 100 according to an embodiment of the present invention, with reference to FIGS. 1 to 6 , a valve housing 110 , a first shielding module 120 , a second shielding module 130 , and a first injection It may include a module 140 , a second injection module 150 , and an inflow prevention cylinder 160 . In addition, the fluid shutoff valve 100 may further include a lower outlet pipe 170 . Meanwhile, the fluid shutoff valve 100 may include only the first shielding module 120 and the first spraying module 140 or the second shielding module 130 and the second spraying module 150 .

The fluid shutoff valve 100 may have a fluid passage 110a penetrating from the top to the bottom in the center of the valve housing 110 . The fluid shutoff valve 100 may be coupled to the process pipe so that the fluid path 110a communicates with an internal path of the process pipe (not shown). Also, the fluid shutoff valve 100 may be coupled to the process chamber so as to communicate with the inside of the process chamber at a lower portion of the process chamber (not shown).

The fluid shutoff valve 100 may include a first shielding module 120 and a second shielding module 130 to temporarily block the fluid passageway 110a alternately. The first shielding module 120 and the second shielding module 130 may alternately shield the fluid passage 110a. In this case, the first shielding module 120 may shield the fluid passage 110a while repeatedly moving the shielding position (a) and the first standby position (b) in a configuration for shielding the fluid passage 110a. In addition, the second shielding module 130 may shield the fluid passage 110a while the configuration for shielding the fluid passage 110a moves repeatedly between the shielding position (a) and the second standby position (c). Here, the shielding position (a) is a position at which the corresponding components of the first shielding module 120 and the second shielding module 130 are moved to shield the fluid passage 110a, and the first standby position (b) and The second standby position (c) is a standby position when the corresponding configuration of the first shielding module 120 and the second shielding module 130 does not shield the fluid passage 110a, respectively. In addition, in the first standby position (b) and the second standby position (c), the corresponding configuration of the first shielding module 120 and the second shielding module 130 is the first injection module 140 or the second injection, respectively. It is a position cleaned by the cleaning gas sprayed from the module 150 .

The valve housing 110 may include a fluid passage 110a extending vertically and an accommodation space 110b extending from the outer circumference side in the fluid passage 110a in the circumferential direction. The valve housing 110 may be provided with a housing upper hole 110c and a housing lower hole 110d that are respectively opened upward and downward from the fluid passage 110a. In addition, the valve housing 110 may include a first shielding hole 110e, a second shielding hole 110f, a first injection hole 110g, and a second injection hole 110h. The valve housing 110 may be formed by combining the upper housing 111 and the lower housing 112 formed to be separated from each other in the horizontal direction. In addition, the valve housing 110 may further include an upper connection pipe 115 .

The fluid passage 110a extends vertically inside the valve housing 110 and may be formed between an upper housing upper hole 110c and a lower housing lower hole 110d. The fluid passage 110a provides a passage through which a fluid including exhaust gas and reaction by-product particles generated in a semiconductor process line flows from the top to the bottom. The housing upper hole 110c provides a path through which the fluid flows into the fluid passage 110a, and the housing lower hole 110d provides a path through which the fluid flows into the lower portion of the fluid passage 110a. The housing lower hole 110d may have a larger diameter than the housing upper hole 110c. The housing lower hole 110d may provide a space to which the upper portion of the inflow prevention cylinder 160 is coupled.

In addition, the accommodation space 110b provides a space in which some or all of the first shielding module 120 and the second shielding module 130 are accommodated in the valve housing 110 . The accommodating space 110b is formed in a shape surrounding the outer side of the fluid passage 110a, and may be integrally formed with the fluid passage 110a to communicate with each other.

The first shielding hole 110e may be formed to penetrate into the accommodating space 110b at an upper portion of one side of the valve housing 110 with respect to the fluid passage 110a. The first shielding hole 110e may provide a space to which a part of the first shielding module 120 is coupled.

The second shielding hole 110f may be formed to penetrate into the accommodation space 110b from the upper portion of the other side of the valve housing 110 with respect to the fluid passage 110a. The second shielding hole 110f may provide a space to which a part of the second shielding module 130 is coupled.

The first injection hole 110g may be formed to penetrate from the upper portion of one side of the valve housing 110 to the receiving space 110b of the first standby position b with respect to the fluid passage 110a. That is, the first injection hole 110g may be formed to penetrate from the upper surface of the upper housing 111 to the lower surface. The first injection hole 110g may be formed at a position corresponding to the first standby position b in the accommodation space 110b. The first injection hole 110g may provide a space to which the first injection module 140 is coupled. Accordingly, the first injection hole 110g may be formed in a shape corresponding to the shape of the first injection module 140 . For example, when the first spraying module 140 is formed in a cylindrical shape, the first spraying hole 110g is formed in a cylindrical shape, and an inner diameter of the first spraying module 140 has a shape corresponding to the outer diameter of the first spraying module 140 . can be formed. In addition, a step may be formed in the middle of the first injection hole 110g according to the shape of the outer surface of the first injection module 140 . The first injection hole 110g may support the first injection module 140 more stably.

The second injection hole 110h may be formed to penetrate from the upper portion of the other side of the valve housing 110 to the accommodating space 110b of the second standby position c based on the fluid passage 110a. That is, the second injection hole 110h may be formed to penetrate from the upper surface to the lower surface of the upper housing 111 . The second injection hole 110h may be formed at a position corresponding to the second standby position c in the accommodation space 110b. The second injection hole 110h may provide a space to which the second injection module 150 is coupled. The second injection hole 110h, like the first injection hole 110g, may be formed in a shape corresponding to the shape of the second injection module 150 . Although not specifically illustrated, the second injection hole 110h may be formed with a step in the middle according to the shape of the outer surface of the second injection module 150 in the same manner as the first injection hole 110g. The second injection hole 110h may support the second injection module 150 more stably.

The upper connection pipe 115 is coupled to the housing upper hole 110c so as to extend upward. The upper connection pipe 115 may be connected to a process pipe. The upper connection pipe 115 may provide a path through which the fluid flows into the fluid passage 110a.

Meanwhile, although not specifically shown, the valve housing 110 may further include a cleaning gas discharge passage (not shown) through which the cleaning gas injected from the first injection module 140 or the second injection module 150 is discharged. can That is, the cleaning gas discharge passage may be formed as a passage penetrating from the accommodation space 110b to the outer surface of the valve housing 110 . The cleaning gas discharge passage may be connected to a process pipe or a separate gas treatment device through a separate discharge pipe (not shown). Accordingly, the cleaning gas injected from the first injection module 140 or the second injection module 150 is discharged to the outside through the cleaning gas discharge passage, and the pressure of the accommodation space 110b is not increased.

The first shielding module 120 may include a first pneumatic cylinder 121 , a first rotating shaft 124 , a first transport body 125 , and a first shielding plate 128 . The first shielding module 120 may be located on one side of the valve housing 110 with respect to the fluid passage 110a. That is, in the first shielding module 120, the first pneumatic cylinder 121 rotates the first rotating shaft 124 to move the first shielding plate 128 from the first standby position (b) to the shielding position (a). It can be moved along an arc-shaped path. Here, the first standby position (b) is a standby position when the first shielding plate 128 does not block the fluid passage 110a, and is based on the fluid passage 110a in the receiving space 110b. It may be a position on one side. In addition, the shielding position (a) is a position at which the first shielding plate 128 is moved to shield the fluid passage 110a, and may be a position spaced apart from the lower portion of the housing upper hole 110c.

The first pneumatic cylinder 121 includes a first pneumatic housing 122 and a first pneumatic piston 123 . In the first pneumatic cylinder 121 , the first pneumatic piston 123 linearly moves by the pneumatic pressure supplied from the outside, and may rotate the first rotating shaft 124 . The first pneumatic cylinder 121 may be located on one side of the valve housing 110 with respect to the fluid passage 110a. The first pneumatic cylinder 121 may be located at an outer upper portion of the valve housing 110 .

The first pneumatic housing 122 may include a first piston passage 122a and a first rotation hole 122b. The first pneumatic housing 122 is formed in a substantially rectangular block shape, the first piston passage 122a is horizontal, and the first rotation hole 122b is the first shielding hole 110e of the valve housing 110 . ) and may be coupled to the upper surface of the valve housing 110 to penetrate.

The first piston passage 122a may be formed in a U-shape, and may be formed in a horizontal direction inside the first pneumatic housing 122 . The first piston passage (122a) may be formed so that both ends are opened to one side of the first pneumatic housing (122). A separate pneumatic pipe (not shown) is connected to both ends of the first piston passage 122a, and pneumatic pressure may be supplied or discharged through the pneumatic pipe.

The first rotation hole 122b may be formed as a hole extending from the lower surface of the first pneumatic housing 122 upward to a predetermined height. The first rotation hole 122b may be formed to extend to a height higher than the height of the first piston passage 122a. The first rotation hole 122b may be connected to the first shield hole 110e of the valve housing 110 and provide a path through which the first rotation shaft 124 is inserted.

The first pneumatic piston 123 may be formed as a block having a cross-sectional area smaller than the vertical cross-sectional area of the first piston passage 122a and a predetermined length. The first pneumatic piston 123 may be formed to a length required to rotate the first rotation shaft 124 from the first standby position (b) to the shielding position (a). The first pneumatic piston 123 may have teeth formed in the longitudinal direction on a surface opposite to the first rotation hole 122b.

The first pneumatic piston 123 may move from one side to the other side by pneumatic pressure inside the first piston passage 122a. The first pneumatic piston 123 may be formed in one or two, and may be located in parallel passages forming the first piston passage 122a. When the first pneumatic piston 123 is formed as one, it can be positioned and moved in any one of the first piston passages 122a positioned on one side or the other side of the first rotation hole 122b. In addition, when the first pneumatic piston 123 is formed of two, as shown in FIG. 4 , the first pneumatic piston 123 is positioned on both sides of the first rotation hole 122b to move in opposite directions. When the first pneumatic piston 123 is formed of two, the force for rotating the first rotation shaft 124 is increased, so that the first rotation shaft 124 can be easily rotated.

The first rotation shaft 124 may be formed in a cylindrical shape having a predetermined length. In addition, the first rotation shaft 124 may have teeth formed on a circumferential surface of an upper portion opposite to the first pneumatic piston 123 . One side of the first rotation shaft 124 is connected to the first pneumatic cylinder 121 to rotate, and the other side may extend into the accommodation space 110b of the valve housing 110 . More specifically, the upper portion of the first rotation shaft 124 may be rotated by being inserted into the first rotation hole 122b and the first shielding hole 110e, and the lower portion may be exposed to the accommodation space 110b. A portion of an upper outer peripheral surface of the first rotation shaft 124 may be exposed to the first piston passage 122a through one side and the other side of the first rotation hole 122b. In addition, the first rotation shaft 124 has teeth formed on the exposed circumferential surface may be engaged with the teeth of the first pneumatic piston 123 . The first rotation shaft 124 may rotate at a predetermined angle according to the forward/backward movement of the first pneumatic piston 123 . That is, the first rotating shaft 124 may convert the linear motion of the first pneumatic piston 123 into a rotational motion.

The first transfer member 125 may include a first transfer bar 126 and a first transfer ring 127 . The first transport member 125 may rotate so that one side is coupled to the first rotation shaft 124 and the other side has an arc-shaped trajectory. The first transfer member 125 may be repeatedly moved between the first transfer ring 127 between the first standby position (b) and the shielding position (a) by the rotation of the first rotation shaft 124 . The first transfer bar 126 and the first transfer ring 127 may be integrally formed.

The first transfer bar 126 has a bar shape having a predetermined length, and one side may be coupled to a lower portion of the first rotation shaft 124 . In addition, the other side of the first transfer bar 126 may extend in the direction of the first standby position (b).

The first transfer ring 127 has a ring shape, and may be formed in a ring shape having a predetermined inner diameter. The first conveying ring 127 may have a step formed on the inner circumferential surface from the upper side to the lower side. The first transfer ring 127 may have an outer side coupled to the first transfer bar 126 .

The first shielding plate 128 may be formed in a disk shape, and an outer diameter may be smaller than an inner diameter of the first conveying ring 127 . The first shielding plate 128 may have a ring-shaped first O-ring groove 128a formed along the outer side from the upper surface. The first O-ring groove 128a may have an inner diameter greater than an inner diameter of the housing upper hole 110c. A first O-ring 129 may be inserted and fixed into the first O-ring groove 128a. The first O-ring 129 may protrude from the upper surface of the first shielding plate 128 . Accordingly, when the first shielding plate 128 shields the fluid passage 110a, the first O-ring 129 may contact the lower surface of the valve housing 110 to shield the fluid passage 110a.

The first shielding plate 128 may be inserted into the first transfer ring 127 . The first shielding plate 128 may be supported by being seated on a step formed on the inner circumferential surface of the first transfer ring 127 . The first shielding plate 128 may be coupled to the first transfer ring 127 such that its upper surface is flush with the upper surface of the first transfer ring 127 or has a lower height. Accordingly, the first shielding plate 128 may have a thickness equal to or smaller than the height from the step to the upper surface of the first transfer ring 127 .

The first shielding plate 128 may be moved between the first standby position (b) and the shielding position (a) by the first transfer member 125 . The first shielding plate 128 is moved to the upper portion of the first transfer ring 127 after being transferred to the shielding position (a) and comes into contact with the periphery of the housing upper hole 110c of the valve housing 110 to make contact with the housing upper hole. The lower part of (110c) can be shielded. Also, the first shielding plate 128 may be separated from the housing upper hole 110c and seated on the upper surface of the first transport body 125 to open the fluid passage 110a.

The second shielding module 130 may include a second pneumatic cylinder 131 , a second rotation shaft 134 , a second transfer body 135 , and a second shielding plate 138 . The second shielding module 130 may have the same configuration as the first shielding module 120 . However, the second shielding module 130 may have a position coupled to the valve housing 110 on the other side opposite to the first shielding module 120 with respect to the fluid passage 110a. Therefore, in the following description, the second shielding module 130 and the first shielding module 120 will be mainly described.

In the second shielding module 130, the second pneumatic cylinder 131 rotates the second rotating shaft 134 to move the second shielding plate 138 from the second standby position (c) to the shielding position (a). can Here, the second standby position (c) is a standby position when the second shielding plate 138 does not block the fluid passage 110a, and is based on the fluid passage 110a in the accommodating space 110b. It may be a location on the other side. In the second shielding module 130 , the second rotation shaft 134 rotates in the opposite direction to the first rotation shaft 124 , and the second transfer member 135 and the second shield plate 138 rotate in the opposite direction. can

The second pneumatic cylinder 131 has a second pneumatic housing 132 and a second pneumatic piston 133 . The second pneumatic cylinder 131 may be located on the other side of the outer upper portion of the valve housing 110 with respect to the fluid passage 110a.

The second pneumatic housing 132 may include a second piston passage 132a and a second rotation hole 132b. The second piston passage 132a may be formed in a U-shape, and may be formed in a horizontal direction inside the second pneumatic housing 132 . The second rotation hole 132b is connected to the second shield hole 110f of the valve housing 110 and may provide a path through which the second rotation shaft 134 is inserted.

The second pneumatic piston 133 may be formed to a length required to rotate the second rotation shaft 134 from the second standby position (c) to the shielding position (a).

The second rotation shaft 134 may have teeth formed on a circumferential surface of an upper portion opposite to the second pneumatic piston 133 . The upper portion of the second rotation shaft 134 may be rotatably inserted into the second rotation hole 132b and the second shielding hole 110f, and the lower portion may be exposed to the accommodation space 110b. A portion of the outer peripheral surface of the second rotation shaft 134 may be exposed to the second piston passage 132a through one side and the other side of the second rotation hole 132b. In addition, the second rotation shaft 134 has teeth formed on the exposed circumferential surface may be engaged with the teeth of the second pneumatic piston 133 . The second rotation shaft 134 may rotate at a predetermined angle according to the forward/backward movement of the second pneumatic piston 133 . That is, the second rotating shaft 134 may convert the linear motion of the second pneumatic piston 133 into a rotational motion.

The second transfer member 135 may include a second transfer bar 136 and a second transfer ring 137 . As for the second transfer member 135 , the second transfer ring 137 may repeatedly move between the second standby position (c) and the shielding position (a) by the rotation of the second rotation shaft 134 . One side of the second transfer bar 136 may be coupled to a lower portion of the second rotation shaft 134 . In addition, the other side of the second transfer bar 136 may extend in the direction of the second standby position (c). The second transfer ring 137 may have an outer side coupled to the second transfer bar 136 .

The second shielding plate 138 may have a ring-shaped second O-ring groove 138a formed along the outer side of the upper surface. A second O-ring 139 may be inserted and fixed into the second O-ring groove 138a. Accordingly, when the second shielding plate 138 shields the fluid passage 110a, the second O-ring 139 may contact the lower surface of the valve housing 110 to block the fluid passage 110a. The second shielding plate 138 may be inserted into the second conveying ring 137 . The second shielding plate 138 may be coupled to the second transfer ring 137 such that its upper surface is flush with the upper surface of the second transfer ring 137 or has a lower height. The second shielding plate 138 may move between the second standby position (c) and the shielding position (a) by the second transfer member 135 .

The second shielding plate 138 may shield the housing upper hole 110c of the valve housing 110 while being moved to the upper portion of the second transfer ring 137 after being transferred to the shielding position (a). In addition, the second shielding plate 138 may be separated from the housing upper hole 110c and seated on the upper surface of the second transport member 135 to open the fluid passage 110a.

The first spray module 140 may include a first spray body 141 and a first spray plate 142 . In addition, the first injection module 140 may further include a first gas supply pipe 143 .

The first injection module 140 may be coupled to the valve housing 110 at an upper portion of the first standby position (b). That is, the first injection module 140 may be coupled to the first injection hole 110g of the valve housing 110 . The first injection module 140 injects a cleaning gas to the upper surface of the first shielding plate 128 located at the first standby position (b) of the receiving space 110b to be applied to the upper surface of the first shielding plate 128 . Adhering reaction by-product particles can be removed. The first injection module 140 may be connected to a cleaning gas supply device (not shown) that supplies the cleaning gas to receive the cleaning gas. On the other hand, the first injection module 140 is connected to a suction device (not shown) including a vacuum pump to suck the fluid containing the reaction by-product particles to remove the reaction by-product particles attached to the upper surface of the shielding plate. . Therefore, hereinafter, the meaning that the first injection module 140 injects the cleaning gas may include the meaning that the first injection module 140 sucks the fluid including the reaction by-product particles.

The first injection module 140 may inject the cleaning gas to the upper surface of the first shielding plate 128 when the fluid passage 110a is blocked or separated from the receiving space 110b. For example, when the second shielding module 130 shields the fluid passage 110a, the first spraying module 140 may spray the cleaning gas to the first shielding plate 128 . Also, when the inflow prevention cylinder 160 separates the fluid passage 110a from the accommodating space 110b , the first injection module 140 may inject the cleaning gas to the first shielding plate 128 .

The first injection body 141 may include a first gas supply hole 141a and a first gas guide groove 141b. The first injection body 141 may be coupled to the first injection hole 110g of the valve housing 110 . The first injection body 141 may be formed in a block shape having a predetermined thickness and diameter or width. The first injection body 141 may be formed in various shapes that can be inserted into and coupled to the first injection hole 110g. The first injection body 141 may be formed in a cylindrical shape or a polyhedral shape such as a hexahedron and an octahedron. In addition, the first injection body 141 may have a first body step (141c) formed at a predetermined height in the upper direction from the lower surface along the outer peripheral surface or the outer surface.

The first gas supply hole 141a may be formed to penetrate from the upper surface to the lower surface of the first injection body 141 . The first gas supply hole 141a may be formed in the center with respect to the plane of the first injection body 141 . The first gas supply hole 141a may have an appropriate diameter required to supply a cleaning gas in an amount required for cleaning the first shielding plate 128 .

The first gas guide groove 141b may be formed as a groove having a predetermined depth in the upper direction from the lower surface of the first injection body 141 . The first gas guide groove 141b may be formed such that the first gas supply hole 141a is positioned at the center of the upper bottom surface. That is, the first gas guide groove 141b may be formed outside the lower end of the first gas supply hole 141a. In addition, the first gas guide groove 141b may be formed in a shape such that the depth decreases toward the outside of the first injection body 141 . That is, the upper surface of the first gas guide groove 141b may be formed to be inclined downward while going outward from the first gas supply hole 141a. The first gas guide groove 141b may guide the cleaning gas supplied from the first gas supply hole 141a to flow outward.

The first injection plate 142 may include a first gas injection hole 142a. In addition, the first spray plate 142 may further include a first coupling groove (142b). The first spray plate 142 may be coupled to a lower surface of the first spray body 141 . The first injection plate 142 may form a cleaning gas passage d through which the cleaning gas flows together with the first gas guide groove 141b of the first injection body 141 . The cleaning gas passage d may be formed in a shape in which the height decreases from the center toward the outside.

The first gas injection hole 142a may be formed to penetrate from the upper surface to the lower surface of the first injection plate 142 . A plurality of the first gas injection holes 142a may be spaced apart from each other. The first gas injection hole 142a may be radially spaced apart from the center of the first injection plate 142 to the outside. At this time, although not specifically illustrated, the first injection hole 110g may have a larger diameter as it is positioned outside. In addition, a relatively large number of the first gas injection holes 142a may be formed along a position corresponding to the upper portion of the first O-ring 129 of the first shielding plate 128 positioned below. The cleaning gas flows to the outside of the first injection plate 142 in the cleaning gas passage d through the first gas supply hole 141a and is more smoothly injected through the first injection hole 110g located outside. can In addition, the first injection plate 142 may inject more cleaning gas to the upper portion of the first O-ring 129 . Since the first O-ring 129 is made of a resin material, a relatively large number of reaction byproduct particles may be attached thereto. In addition, since the first O-ring 129 is in direct contact with the lower surface of the valve housing 110 and shields the fluid passage 110a, it may affect the shielding performance. The first injection plate 142 may efficiently remove reaction by-product particles attached to the first O-ring 129 while spraying a relatively large amount of the cleaning gas to the first O-ring 129 .

The first coupling groove 142b may be formed to a predetermined depth in a downward direction from the upper surface of the first spray plate 142 . In addition, the first coupling groove 142b may be formed in an area and shape corresponding to the lower surface of the first injection body 141 . The first injection plate 142 may be stably coupled to the first injection body 141 while the first coupling groove 142b is inserted into the lower portion of the first injection body 141 . When the first body step 141c is formed in the lower portion of the first injection body 141, the first coupling groove 142b may be formed to a depth corresponding to the height of the first body step 141c. . Accordingly, the first coupling groove 142b may be coupled to the first body step 141c.

The first gas supply pipe 143 may be coupled to the first gas supply hole 141a to supply a cleaning gas to the first gas supply hole 141a. Although not specifically illustrated, the first gas supply pipe 143 may be connected to a solenoid valve and a cleaning gas supply means. The supply of the cleaning gas to the first gas supply pipe 143 may be controlled by a solenoid valve and a cleaning gas supply means.

The second spray module 150 may include a second spray body 151 and a second spray plate 152 . In addition, the second injection module 150 may further include a second gas supply pipe 153 . The second injection module 150 may inject a cleaning gas to the upper surface of the second shielding plate 138 when the fluid passage 110a is blocked or separated from the accommodation space 110b. For example, when the first shielding module 120 shields the fluid passage 110a, the second spraying module 150 may spray the cleaning gas to the second shielding plate 138 . Also, when the inflow prevention cylinder 160 separates the fluid passage 110a from the accommodation space 110b , the second injection module 150 may inject the cleaning gas to the second shielding plate 138 . The second injection module 150 may have the same configuration as the first injection module 140 . However, the second injection module 150 may be coupled to the valve housing 110 at the other side opposite to the first injection module 140 with respect to the fluid passage 110a.

Hereinafter, the second injection module 150 will be described with a focus on portions different from the first injection module 140 .

The second injection module 150 may be coupled to the valve housing 110 at an upper portion of the second standby position (c). That is, the second injection module 150 may be coupled to the second injection hole 110h of the valve housing 110 . The second injection module 150 injects a cleaning gas to the upper surface of the second shielding plate 138 located at the second standby position (c) to remove reaction by-product particles attached to the upper surface of the second shielding plate 138 . can be removed

The second injection body 151 may include a second gas supply hole 151a and a second gas guide groove 151b. The second injection body 151 may be coupled to the second injection hole 110h of the valve housing 110 . In addition, the second injection body 151 may have a second body step 151c formed at a predetermined height in the upper direction from the lower surface along the outer circumferential surface or the outer surface.

The second gas supply hole 151a may be formed to penetrate from the upper surface to the lower surface of the second injection body 151 . The second gas guide groove 151b may be formed as a groove having a predetermined depth in the upper direction from the lower surface of the second injection body 151 .

The second injection plate 152 may include a second gas injection hole 152a. In addition, the second injection plate 152 may further include a second coupling groove (152b). The second gas injection hole 152a may be formed to penetrate from the upper surface to the lower surface of the second injection plate 152 . The second coupling groove 152b may be formed to a predetermined depth in a downward direction from the upper surface of the second spray plate 152 .

The second gas supply pipe 153 may be coupled to the second gas supply hole 151a to supply a cleaning gas to the second gas supply hole 151a.

The inflow prevention cylinder 160 may include an inflow prevention housing 161 and an inflow prevention piston 162 . In addition, the inflow prevention cylinder 160 may further include an inflow blocking means 166 . The inflow prevention cylinder 160 may include a lower fluid passage 160a penetrating from the upper center to the lower portion.

The inflow prevention cylinder 160 may be coupled to the housing lower hole 110d of the valve housing 110 . The lower fluid passage 160a of the inflow prevention cylinder 160 may be positioned below the fluid passage 110a of the valve housing 110 to communicate with each other. The inflow prevention cylinder 160 may support and raise the lower surface of the first shielding plate 128 or the second shielding plate 138 positioned at the shielding position (a) to shield the fluid passage 110a. In addition, the inflow prevention cylinder 160 may separate the fluid passage 110a from the accommodation space 110b when the manufacturing process is in progress. In this case, the first shielding plate 128 and the second shielding plate 138 may be positioned at the first standby position (b) and the second standby position (c), respectively. In the inflow prevention cylinder 160, the fluid flowing through the fluid passage 110a during the manufacturing process is discharged to the process pipe through the lower fluid passage 160a, and the fluid containing the reaction by-product particles is introduced into the receiving space 110b. it can be prevented Accordingly, the inflow prevention cylinder 160 includes the first shielding module 120 and the second shielding module 130 and the first spraying module 140 and the second spraying module 150 accommodated in the receiving space 110b. Contamination by reaction by-product particles can be prevented.

The inflow prevention housing 161 may include a prevention piston passage 161a, a prevention passage opening hole 161b, a first prevention passage 161c, and a second prevention passage 161d. In addition, the inflow prevention housing 161 may further include a blocking gas passage 161e.

The inflow prevention housing 161 may be formed in a ring shape as a whole, and may have a lower fluid passage 160a therein. The inflow prevention housing 161 may be coupled to a lower central portion of the valve housing 110 . The lower fluid passage 160a may be positioned under the fluid passage 110a of the valve housing 110 to communicate.

The prevention piston passage 161a may be formed in a ring shape having a predetermined width and height inside the inflow prevention housing 161 . The prevention piston passage 161a may be formed at a height greater than the vertical movement distance of the inflow prevention piston 162 .

The prevention passage opening hole 161b may be formed to be opened from an upper portion of the prevention piston passage 161a to an upper portion of the inflow prevention housing 161 to a predetermined width. The entire prevention passage opening hole 161b may be formed in a ring shape corresponding to the prevention piston passage 161a.

Meanwhile, in the inflow prevention housing 161 , a piston movement space 161f may be formed inwardly from the upper portion of the prevention passage opening hole 161b. The piston movement space 161f may provide a space in which a part of the inflow prevention piston 162 rises or descends. Accordingly, the piston movement space 161f may be formed in a shape corresponding to the shape of the inflow prevention piston 162 .

The first prevention passage 161c may be formed to be opened from an upper outer peripheral surface of the prevention piston passage 161a to a side surface of the inflow prevention housing 161 . The first prevention passage 161c may provide a path for supplying or discharging pneumatic pressure to the upper portion of the prevention piston passage 161a. That is, the first prevention passage (161c) may supply the pneumatic pressure required to lower the inflow prevention piston (162). In addition, the first prevention passage 161c provides a path through which the air pressure supplied to the upper portion of the prevention piston passage 161a is discharged when the inflow prevention piston 162 rises. The first prevention passage 161c may be connected to an external pneumatic supply means and may be supplied with pneumatic pressure.

The second prevention passage 161d may be formed to be opened from the lower or lower surface of the outer peripheral surface of the prevention piston passage 161a to the side surface of the inflow prevention housing 161 . The second prevention passage 161d may provide a path for supplying or discharging pneumatic pressure to the lower portion of the prevention piston passage 161a. The second prevention passage 161d may supply pneumatic pressure required to raise the inflow prevention piston 162 . In addition, the second prevention passage 161d provides a path through which the air pressure supplied to the lower portion of the prevention piston passage 161a is discharged when the inflow prevention piston 162 descends. The second prevention passage 161d may be connected to an external pneumatic supply means and may be supplied with pneumatic pressure.

The blocking gas passage 161e may be formed in a lower portion of the inflow prevention housing 161 to penetrate from the outer surface to the inner surface. The blocking gas passage 161e blocks the inflow of reaction by-product particles between the inflow prevention housing 161 and the inflow prevention piston 162, and the reaction byproduct particles are formed on the inner circumferential surface of the fluid passage 110a or the lower fluid passage 160a. It can be prevented from depositing on the surface or causing corrosion. More specifically, the inflow prevention housing 161 and the inflow prevention piston 162 may be spaced apart from each other in the fluid passage 110a direction. Accordingly, the blocking gas supplied from the blocking gas passage 161e flows in a direction perpendicular to the separation gap to prevent reaction by-product particles from flowing into the separation gap, and reaction by-product particles are prevented from entering the inner circumferential surface or inflow of the valve housing 110 . It is possible to prevent deposition or corrosion on the inner peripheral surface of the cylinder 160 .

The inflow prevention piston 162 may include a prevention piston body 163 and an prevention piston rod 164 . The inflow prevention piston 162 may be coupled to the inflow prevention housing 161 to move up and down, and may shield the accommodation space 110b from the fluid passage 110a. The inflow prevention piston 162 supports the lower surface of the first shielding plate 128 or the second shielding plate 138 while rising, so that the first shielding plate 128 or the second shielding plate 138 is connected to the valve housing 110 . ) to be more firmly in contact with the lower surface of the fluid passage 110a.

The prevention piston body 163 may be formed in a ring shape, and may have a width corresponding to the width of the prevention piston passage 161a and a height smaller than the height of the prevention piston passage 161a. The prevention piston body 163 may be formed to have a height smaller than a height obtained by subtracting the movement distance of the inflow prevention piston 162 from the height of the prevention piston passage 161a. Therefore, the prevention piston body 163 can move up and down in the interior of the prevention piston passage (161a). The prevention piston body 163 may move up and down inside the prevention piston passage 161a by the pneumatic pressure supplied through the first prevention passage 161c and the second prevention passage 161d.

The prevention piston rod 164 is formed in a ring shape and may be formed to extend upwardly from the prevention piston body 163 . The prevention piston rod 164 may be formed at an appropriate height by reflecting the height and the movement distance of the inflow prevention piston 162 from the prevention piston body 163 to the lower surface of the housing upper hole 110c of the valve housing 110. have. The prevention piston rod 164 may move from the bottom to the top together with the prevention piston body 163 to shield the accommodation space 110b from the fluid passage 110a. The prevention piston rod 164 supports the lower surface of the first shielding plate 128 or the second shielding plate 138 while rising so that the first shielding plate 128 or the second shielding plate 138 is connected to the valve housing 110 . ) can be brought into contact with the lower surface of the fluid inlet passage.

The prevention piston rod 164 has a ring shape having a bent area or a stepped area, and may be formed to have a different thickness for each area. The prevention piston rod 164 may be formed in a ring shape having the same thickness. The prevention piston rod 164 may be formed in various shapes according to the shapes of the inflow prevention housing 161 and the prevention piston passage 161a and the prevention passage opening hole 161b.

The anti-piston rod 164 may have a rod O-ring groove 164a formed on its upper surface in a circumferential direction. A piston O-ring 165 may be coupled to the rod O-ring groove 164a. The piston O-ring 165 may contact the inner upper surface of the valve housing 110 to increase the shielding force of the preventive piston rod 164 . In addition, the piston O-ring 165 may contact the lower surface of the first shielding plate 128 or the second shielding plate 138 to increase the shielding force of the preventive piston rod 164 .

The inflow blocking means 166 may include an inflow blocking ring 167 and an inflow blocking flange 168 . The inflow blocking means 166 is located inside the inflow prevention cylinder 160 to block the reaction byproduct particles from flowing into the inflow prevention cylinder 160, and the reaction byproduct particles are introduced into the fluid passageway 110a or the lower fluid passageway ( It is possible to prevent deposition or corrosion on the inner peripheral surface of 160a).

The inflow blocking ring 167 has a ring shape and may be formed to have a height corresponding to the heights of the inflow prevention housing 161 and the inflow prevention piston 162 . The inflow blocking ring 167 may be located inside the inflow prevention housing 161 and the inflow prevention piston 162 . The inflow blocking ring 167 may have an outer circumferential surface spaced apart from an inner circumferential surface of the inflow prevention housing 161 and the inflow prevention piston 162 by a predetermined distance. Accordingly, the inflow blocking ring 167 may have a blocking gas flow path 167a through which the blocking gas flows between the inflow prevention housing 161 and the inflow prevention piston 162 on the outer circumferential surface.

The blocking gas passage 167a may be formed in a ring shape along an outer circumferential surface of the inflow blocking ring 167 and may be connected to the blocking gas passage 161e at a lower portion. The blocking gas passage 167a allows the blocking gas supplied from the blocking gas passage 161e to flow between the upper portion of the inflow prevention piston 162 and the upper portion of the inflow blocking ring 167 . The blocking gas blocks the reaction byproduct particles flowing through the fluid passage 110a from flowing between the inflow prevention piston 162 and the upper portion and the upper portion of the inflow blocking ring 167 . In addition, the blocking gas may block the reaction by-product particles from flowing between the inflow prevention housing 161 and the inflow prevention piston 162 , and the reaction byproduct particles may flow through the fluid passage 110a or the inner circumferential surface of the lower fluid passage 160a. It can be prevented from depositing on the surface or causing corrosion.

In addition, the inlet blocking ring 167 may have an inner diameter greater than the inner diameter of the housing upper hole 110c. Accordingly, the inflow blocking ring 167 may provide a fluid passage 110a through which the inner circumferential surface does not protrude inward than the housing upper hole 110c, and the fluid flows without being disturbed by the flow.

The inflow blocking flange 168 is formed as a ring-shaped flange, and may be coupled to extend from the lower end of the inflow blocking ring 167 to the outer circumferential direction. The inflow blocking flange 168 may be coupled to a lower portion of the blocking gas passage 161e in the lower portion of the inflow prevention housing 161 . The inflow blocking flange 168 may block the lower end of the blocking gas flow path 167a so that the blocking gas of the blocking gas flow path 167a flows upward.

The lower outlet pipe 170 may have a hollow inside and may be formed in a tubular shape open up and down. The lower outlet pipe 170 may be coupled to a lower portion of the inflow prevention cylinder 160 . The lower outlet pipe 170 may be connected to a process pipe. Accordingly, the lower outlet pipe 170 allows the fluid passage 110a to be connected to the process pipe. Meanwhile, the lower outlet pipe 170 may be integrally formed with the inflow prevention housing 161 of the inflow prevention cylinder 160 .

Next, a fluid shutoff valve according to another embodiment of the present invention will be described.

7 is a vertical cross-sectional view of a back pressure shut-off valve according to another embodiment of the present invention.

In the fluid shutoff valve 200 according to another embodiment of the present invention, referring to FIG. 7 , a bypass gas passage 200a through which a fluid flows is formed in comparison with the fluid shutoff valve 100 according to FIGS. 1 to 6 . can That is, the fluid shutoff valve 200 includes the first shielding module 120 and the second shielding module 130 and the first spraying module 140 and the second of the fluid shutoff valve 100 according to FIGS. 1 to 6 . It may include a bypass gas passage 200a together with the injection module 150 . Accordingly, the fluid shutoff valve 200 may further include a bypass connection pipe 280 forming a bypass gas passage 200a and a bypass passage blocking means 290 .

Hereinafter, the fluid shutoff valve 200 according to another embodiment of the present invention will be mainly described with a configuration different from the fluid shutoff valve 100 according to FIGS. 1 to 6 .

The bypass gas passage 200a may be formed through the bypass connection pipe 280 and the lower outlet pipe 170 while passing through the valve housing 210 . The valve housing 210 may include an upper bypass passage 200b and a lower bypass passage 200c that form a part of the bypass gas passage 200a.

The bypass gas passage 200a allows exhaust gas from the vacuum chamber to the vacuum pump when the vacuum pump is operated in a state where the fluid passage 110a is blocked by the first shielding plate 128 or the second shielding plate 138 . A bypass route may be provided. The bypass gas passage 200a may bypass the first shielding plate 128 or the second shielding plate 138 from the upper portion of the fluid passage 110a to provide a passage to flow to the lower portion of the fluid passage 110a. That is, the bypass gas passage 200a is connected to the fluid passage 110a at the upper portion of the shielding position (a), passes through the receiving space 110b, and is connected to the fluid passage 110a at the lower portion of the shielding position (a). and a passage through which the fluid flows in parallel with the fluid passage 110a may be provided. The bypass gas passage 200a may be opened when it is slowly pumped by a vacuum pump at the beginning of a manufacturing process or during a process chamber set-up process. Accordingly, a gas that does not contain reaction by-product particles may be introduced into the bypass gas passage 200a. For example, only the purging gas or the process gas may flow into the bypass gas passage 200a.

In addition, the bypass gas passage 200a may be formed in a state connected to the accommodation space 110b. In this case, the fluid shutoff valve 200 allows the cleaning gas injected through the first injection module 140 or the second injection module 150 to pass through the bypass gas passage 200a to the outside of the accommodation space 110b. It is not necessary to provide a separate discharge path mentioned in the embodiment of FIG. Meanwhile, the bypass gas passage 200a may be formed as a passage blocked from the accommodation space 110b by a separate connection pipe (not shown) in the accommodation space 110b of the valve housing 210 . That is, the connection pipe may connect between the upper bypass passage 200b whose upper end is located above the accommodation space 110b and the lower bypass passage 200c located below the accommodation space 110b.

The upper bypass passage 200b may extend from the inner circumferential surface of the housing upper hole 110c to the inside of the valve housing 210 and may be formed to penetrate into the accommodation space 110b. The upper bypass passage 200b may be formed in a right-angled shape extending in the lower direction after extending in the horizontal direction. In addition, the upper bypass passage 200b may be formed in a curved shape extending in the horizontal direction and then extending in the lower direction again.

The lower bypass passage 200c may be formed to penetrate downwardly in the accommodation space 110b of the valve housing 210 . The lower bypass passage 200c may be located below the upper bypass passage 200b.

The bypass connection pipe 280 may have one end connected to the lower bypass passage 200c and the other end connected to the lower outlet passage 170a of the lower outlet pipe 170 . The lower outlet passage 170a may be formed to penetrate from the outer circumferential surface to the inner circumferential surface of the lower outlet pipe 170 . Accordingly, the bypass connection pipe 280 may connect the lower bypass passage 200c of the valve housing 210 and the lower outlet passage 170a of the lower outlet pipe 170 to form a bypass gas passage 200a. . On the other hand, the bypass connection pipe 280 may be formed to extend directly to the lower portion of the fluid passage 110a through the lower outlet pipe 170 . In addition, the bypass connection pipe 280 may extend to the fluid passage 110a through the inflow prevention cylinder 160 .

The bypass passage blocking means 290 may be formed as a means for opening and closing the bypass gas passage 200a. For example, the bypass passage blocking means 290 is formed in a plate shape or a block, and may be installed in the upper bypass passage 200b. The bypass passage blocking means 290 may move up and down inside the upper bypass passage 200b and block the upper bypass passage 200b. Although not specifically shown, the bypass passage blocking means 290 may be moved up and down by a pneumatic cylinder (not shown). In addition, the bypass passage blocking means 290 may include a blade and rotate to block the upper bypass passage 200b. At this time, the bypass passage blocking means 290 may block the upper bypass passage 200b while rotating by an electric motor (not shown).

Next, the operation of the fluid shutoff valve according to another embodiment of the present invention will be described.

8A and 8B are process diagrams illustrating the operation of the fluid shutoff valve according to the embodiment of FIG. 7 .

Hereinafter, the operation of the fluid shutoff valve 200 according to the embodiment of FIG. 7 will be described. As described above, the fluid shutoff valve 200 is different from the fluid shutoff valve 100 of FIGS. 1 to 6 in that it has a bypass gas passage 200a. Accordingly, the operation of the fluid shutoff valve 200 except for the operation involving the bypass gas passage 200a may be equally applied to the fluid shutoff valve 100 of FIGS. 1 to 6 .

First, as shown in (a) of Figure 8a, the first shielding module 120 operates the first pneumatic cylinder 121 to rotate the first transfer body 125 and move the first shielding plate 128. It is located in the shielding position (a) of the lower portion of the housing upper hole (110c). At this time, the first pneumatic cylinder 121 is operated by the pneumatic supplied from the outside. The inflow prevention cylinder 160 raises the first shielding plate 128 together with the inflow prevention piston 162 by pneumatic pressure supplied from the outside. The first shielding plate 128 rises from the first transfer member 125 and is in contact with the bottom surface of the valve housing 210 to shield the fluid passage 110a. At this time, the bypass passage blocking means 290 maintains the state in which the upper bypass passage 200b is blocked.

Meanwhile, the second injection module 150 may inject the cleaning gas to the upper surface of the second shielding plate 138 through the second gas injection hole 152a. The cleaning gas may be removed by cleaning particles including reaction by-product particles existing on the upper surface of the second shielding plate 138 . Since the fluid passage 110a is blocked by the first shielding plate 128 , the cleaning gas does not flow into the process chamber through the fluid passage 110a. Also, the cleaning gas does not affect the vacuum of the process chamber. The cleaning gas may be introduced into the lower side of the fluid passage 110a through the bypass gas passage 200a and discharged through the process pipe. Meanwhile, when the bypass gas passage 200a is not formed, a separate cleaning gas discharge passage may be formed to discharge the cleaning gas to the outside. The second injection module 150 may stop spraying the cleaning gas after cleaning the upper surface of the second shielding plate 138 by spraying the cleaning gas for an appropriate time.

Next, as shown in (b) of FIG. 8A , the bypass passage blocking means 290 may open the upper bypass passage 200b. At this time, the vacuum pump is in an operating state, and the vacuum degree of the process chamber is increased. More specifically, before the process chamber is operated, the first shielding plate 128 is gradually exhausted from the process chamber and the process pipe located on the upper side (or the front side) of the first shielding plate 128 , and after a certain period of time has elapsed. It can be made to achieve a vacuum equalization pressure with the process piping and vacuum pump located in the lower (or rear side) of the.

Next, as shown in FIG. 8A (c), the first shielding module 120 operates the first pneumatic cylinder 121 to rotate the first transfer body 125 and the first shielding plate 128 to the first standby position (b) of the accommodation space (110b). At this time, the inflow prevention cylinder 160 lowers the first shielding plate 128 together with the inflow prevention piston 162 in advance to seat the first shielding plate 128 on the first transfer body 125 . In the fluid passage 110a, the fluid flows from the top to the bottom. At this time, the bypass passage blocking means 290 blocks the upper bypass passage 200b to prevent fluid from flowing into the bypass gas passage 200a.

After the first shielding plate 128 is transferred to the first standby position (b), the inflow prevention cylinder 160 raises the inflow prevention piston 162 to insert the piston O-ring 165 around the housing upper hole 110c. make contact with Accordingly, the inflow prevention piston 162 shields the receiving space 110b from the fluid passage 110a and prevents the reaction byproduct particles of the fluid from flowing into the receiving space 110b. In addition, the blocking gas flowing into the blocking gas passage 167a through the blocking gas passage 161e flows upward and is discharged into the fluid passage 110a. Accordingly, the blocking gas may prevent the reaction by-product particles from being introduced between the inflow prevention housing 161 and the inflow prevention piston 162 .

On the other hand, when a separate bypass passage closing means (not shown) for shielding the bypass gas passage 200a from the fluid passage 110a is provided, the first injection module 140 and the second injection module 150 The cleaning gas may be sprayed to the first shielding plate 128 and the second shielding plate 138 , respectively. In this case, the cleaning gas injected from the first injection module 140 and the second injection module 150 may be discharged through a separate cleaning gas discharge passage.

More specifically, the first injection module 140 may inject the cleaning gas to the upper surface of the first shielding plate 128 through the first gas injection hole 142a. In addition, the second injection module 150 may inject the cleaning gas to the upper surface of the second shielding plate 138 through the second gas injection hole 152a. The cleaning gas may be removed by cleaning particles including reaction by-product particles existing on the upper surface of the first shielding plate 128 or the second shielding plate 138 .

Next, as shown in (d) of FIG. 8b, the second shielding module 130 operates the second pneumatic cylinder 131 to rotate the second transfer body 135 and the second shielding plate 138 is positioned from the second standby position (c) to the shielding position (a). When a shielding condition of the fluid passage 110a occurs, the second shielding module 130 operates.

The inflow prevention cylinder 160 raises the second shielding plate 138 together with the inflow prevention piston 162 . The second shielding plate 138 rises from the second transfer member 135 and is in contact with the bottom surface of the valve housing 210 to shield the fluid passage 110a. At this time, the bypass passage blocking means 290 maintains the state in which the upper bypass passage 200b is blocked.

In addition, the first shielding plate 128 is transferred to the first standby position (b) is positioned. The first injection module 140 injects the cleaning gas to the upper surface of the first shielding plate 128 through the first gas injection hole 142a. The cleaning gas may be removed by cleaning particles including reaction by-product particles existing on the upper surface of the first shielding plate 128 . Since the fluid passage 110a is blocked by the second shielding plate 138 , the cleaning gas does not flow into the process chamber through the fluid passage 110a. Also, the cleaning gas does not affect the vacuum formation of the process chamber. The cleaning gas may be introduced into the lower side of the fluid passage 110a through the bypass gas passage 200a and discharged through the process pipe. Meanwhile, when the bypass gas passage 200a is not formed, a separate cleaning gas discharge passage may be formed to discharge the cleaning gas to the outside.

The first injection module 140 may stop spraying the cleaning gas after cleaning the upper surface of the first shielding plate 128 by spraying the cleaning gas for an appropriate time.

Next, as shown in (e) of Figure 8b, the bypass passage blocking means 290 may open the upper bypass passage (200b). At this time, the vacuum pump is in an operating state, and the vacuum degree of the process chamber is increased. More specifically, the second shielding plate 138 is gradually exhausted from the process chamber and the process pipe located on the upper side (or the front side) of the second shielding plate 138 before the process chamber is operated, and after a certain period of time has elapsed. It can be made to achieve a vacuum equalization pressure with the process piping and vacuum pump located in the lower (or rear side) of the.

Next, as shown in (f) of Figure 8b, the second shielding module 130 operates the second pneumatic cylinder 131 to rotate the second transfer body 135 and the second shielding plate 138 to the second standby position (c) of the accommodation space (110b). At this time, the inflow prevention cylinder 160 lowers the second shielding plate 138 together with the inflow prevention piston 162 in advance to seat it on the second transfer body 135 . In the fluid passage 110a, the fluid flows from the top to the bottom. At this time, the bypass passage blocking means 290 blocks the upper bypass passage 200b to prevent fluid from flowing into the bypass gas passage 200a. After the second shielding plate 138 is transferred to the second standby position (c), the inflow prevention cylinder 160 raises the inflow prevention piston 162 so that the piston O-ring 165 moves around the housing upper hole 110c. make contact with

Next, as shown in FIG. 8A (a), the first shielding module 120 positions the first shielding plate 128 from the first standby position (b) to the shielding position (a). The first shielding plate 128 rises from the first transfer member 125 to shield the fluid passage 110a. At this time, the bypass passage blocking means 290 maintains the state in which the upper bypass passage 200b is blocked.

In addition, the second shielding plate 138 is transferred to the second standby position (c). The second injection module 150 injects the cleaning gas to the upper surface of the second shielding plate 138 through the second gas injection hole 152a. The cleaning gas may be removed by cleaning particles including reaction by-product particles existing on the upper surface of the second shielding plate 138 . The cleaning gas may be introduced into the lower side of the fluid passage 110a through the bypass gas passage 200a and discharged through the process pipe. Meanwhile, when the bypass gas passage 200a is not formed, a separate cleaning gas discharge passage may be formed to discharge the cleaning gas to the outside.

Next, a fluid shutoff valve according to another embodiment of the present invention will be described.

9A is a vertical cross-sectional view of a fluid shutoff valve according to another embodiment of the present invention. 9B is a vertical cross-sectional view taken along line C-C of FIG. 9A.

Referring to FIGS. 9A and 9B , the fluid shutoff valve 300 according to another embodiment of the present invention is compared with the fluid shutoff valve 100 according to FIGS. 1 to 6 , the first shielding module 120 . and only the first injection module 140 . The fluid shutoff valve 300 does not include the second shield module 130 and the second injection module 150 . The valve housing 310 may include only the first standby position b in the accommodation space 110b. Accordingly, the fluid shutoff valve 300 may be formed to be the same as or similar to the fluid shutoff valve 100 illustrated in FIGS. 1 to 6 , except that the structure of the valve housing 310 is changed. The valve housing 310 may have a relatively small diameter compared to the valve housing 110 of FIGS. 1 to 6 . Accordingly, the valve housing 310 may be formed such that the first shielding module 120 and the first injection module 140 are coupled or accommodated. A detailed description of other parts of the fluid shutoff valve 300 will be omitted.

On the other hand, when the fluid shutoff valve 300 includes only one of the first shielding module 120 , the first spraying module 140 , and the second shielding module 130 and the second spraying module 150 , the shielding It can be expressed as a module and a spray module. In this case, the fluid shutoff valve 300 may allow the shielding module 120 to transfer the shielding plate 128 from the standby position (b) to the shielding position (a) along an arc-shaped path.

The fluid shutoff valve 300 may be slightly different when the first injection module 140 operates. The first injection module 140 may operate when the inflow prevention piston 162 of the inflow prevention cylinder 160 spatially separates the fluid passage 110a and the accommodation space 110b. That is, the first injection module 140 may operate when the first shielding plate 128 is positioned at the first standby position b and the receiving space 110b is shielded from the fluid passage 110a. The first injection module 140 may spray a cleaning gas to the first shielding plate 128 to remove reaction byproduct particles.

Next, a fluid shutoff valve according to another embodiment of the present invention will be described.

10 is a vertical cross-sectional view of a fluid shutoff valve according to another embodiment of the present invention.

Referring to FIG. 10 , a fluid shutoff valve 400 according to another embodiment of the present invention is provided according to the fluid shutoff valve 200 of FIG. 7 compared to the fluid shutoff valve 300 according to FIGS. 9A and 9B . It may further include a gas bypass passage (200a). That is, the fluid shutoff valve 400 may be formed to include a gas bypass passage 200a of the fluid shutoff valve 200 according to FIG. 7 in addition to the fluid shutoff valve 300 according to FIGS. 9A and 9B . .

The valve housing 410 of the fluid shutoff valve 400 may include an upper bypass passage 200b and a lower bypass passage 200c. In the valve housing 410 , the portion where the second shielding module 130 and the second injection module 150 are formed may be omitted. In addition, the fluid shutoff valve 400 may include a bypass connection pipe 280 and a bypass passage blocking means 290 . Since the configurations of the fluid shutoff valve 400 have been described in the fluid shutoff valve 200 of FIG. 7 and the fluid shutoff valve 300 of FIGS. 9A and 9B , a detailed description thereof will be omitted.

Next, the operation of the fluid shutoff valve according to another embodiment of the present invention will be described.

11 is a vertical cross-sectional view illustrating an operation of the fluid shutoff valve of FIG. 10 .

Hereinafter, the operation of the fluid shutoff valve 400 according to the embodiment of FIG. 10 of the present invention will be described. The fluid shutoff valve 400 is different from the fluid shutoff valve 300 of FIGS. 9A and 9B in that it has a bypass gas passage 200a. Accordingly, the action of the fluid shutoff valve 400 except for the action involving the bypass gas passage 200a may be equally applied to the fluid shutoff valve 300 of FIGS. 9A and 9B .

Also, the fluid shutoff valve 400 of FIG. 10 may operate similarly to the fluid shutoff valve of FIG. 7 .

First, as shown in Fig. 11 (a), the first shielding module 120 operates the first pneumatic cylinder 121 to rotate the first transfer body 125 and move the first shielding plate 128. It is located in the shielding position (a) of the lower portion of the housing upper hole (110c). At this time, the first pneumatic cylinder 121 is operated by the pneumatic supplied from the outside. The inflow prevention cylinder 160 raises the first shielding plate 128 together with the inflow prevention piston 162 by pneumatic pressure supplied from the outside. The first shielding plate 128 rises from the first transfer member 125 and is in contact with the bottom surface of the valve housing 410 to shield the fluid passage 110a. At this time, the bypass passage blocking means 290 maintains the state in which the upper bypass passage 200b is blocked.

Next, as shown in FIG. 11B , the bypass passage blocking means 290 may open the upper bypass passage 200b. At this time, the vacuum pump is in an operating state, and the vacuum degree of the process chamber is increased. More specifically, before the process chamber is operated, the first shielding plate 128 is gradually exhausted from the process chamber and the process pipe located on the upper side (or the front side) of the first shielding plate 128 , and after a certain period of time has elapsed. It can be made to achieve a vacuum equalization pressure with the process piping and vacuum pump located in the lower (or rear side) of the.

Next, as shown in FIG. 11 (c), the first shielding module 120 operates the first pneumatic cylinder 121 to rotate the first transfer body 125 and the first shielding plate 128 to the first standby position (b) of the accommodation space (110b). At this time, the inflow prevention cylinder 160 lowers the first shielding plate 128 together with the inflow prevention piston 162 in advance to seat the first shielding plate 128 on the first transfer body 125 . In the fluid passage 110a, the fluid flows from the top to the bottom. At this time, the bypass passage blocking means 290 blocks the upper bypass passage 200b to prevent fluid from flowing into the bypass gas passage 200a.

The first injection module 140 injects the cleaning gas to the upper surface of the first shielding plate 128 through the first gas injection hole 142a. The cleaning gas may be removed by cleaning particles including reaction by-product particles existing on the upper surface of the first shielding plate 128 . The cleaning gas may be introduced into the lower side of the fluid passage 110a through the bypass gas passage 200a and discharged through the process pipe.

In the fluid shutoff valve 400 according to the embodiment of FIG. 10 , in the first injection module 140 , the first shielding plate 128 is in the first standby position (b), and the inflow prevention cylinder 160 is the fluid passageway ( When shielding 110a) from the accommodation space 110b, the cleaning gas may be sprayed. Accordingly, the fluid shutoff valve 400 may be different from the fluid shutoff valve 200 according to the embodiment of FIG. 7 in the timing of spraying the cleaning gas.

Next, a fluid shutoff valve according to another embodiment of the present invention will be described.

12 is a plan view of a fluid shutoff valve according to another embodiment of the present invention. 13 is a vertical cross-sectional view taken along line D-D of FIG. 12 . 14 is an enlarged view of “E” of FIG. 13 . FIG. 15 is a horizontal cross-sectional view taken along line F-F of FIG. 14 . FIG. 16 is a horizontal cross-sectional view taken along line G-G of FIG. 14 .

A fluid shutoff valve 500 according to another embodiment of the present invention, with reference to FIGS. 12 to 16 , a valve housing 510 , a first shielding module 120 , a second shielding module 130 , and a first It may include an injection module 540 , a second injection module 550 , and an inflow prevention cylinder 160 . In addition, the fluid shutoff valve 500 may further include a lower outlet pipe 170 .

In contrast to the fluid shutoff valve 100 according to FIGS. 1 to 6 , the fluid shutoff valve 500 according to another embodiment of the present invention includes a first ejection module 540 and a second ejection module 550 and these The structure of the accommodating valve housing 510 is formed differently. In addition, the fluid shutoff valve 500 may have the same or similar configuration to the fluid shutoff valve 100 according to FIGS. 1 to 6 . Therefore, hereinafter, the fluid shutoff valve 500 will be mainly described with reference to the structures of the first injection module 540 , the second injection module 550 , and the valve housing 510 . In addition, the fluid shutoff valve 500 is given the same reference numerals for the same or similar components as the fluid shutoff valve 100 according to FIGS. 1 to 6 , and a detailed description thereof is omitted.

The valve housing 510 includes a housing upper hole 110c, a housing lower hole 110d, a first shielding hole 110e, a second shielding hole 110f, a first spraying hole 510g, and a second spraying hole ( 510h), a first injection receiving groove 510i and a second injection receiving groove 510j may be provided. The valve housing 510 may be formed by combining an upper housing 511 and a lower housing 512 that are separated from each other in a horizontal direction.

The first injection hole 510g may be formed to a predetermined depth downward from the first standby position b positioned on one side of the valve housing 510 with respect to the fluid passage 110a. That is, the first injection hole 510g may be formed to a predetermined depth in the direction from the upper surface to the lower surface of the upper housing 511 at a position corresponding to the center of the first standby position (b). The first injection hole 510g may provide a path through which the cleaning gas supplied to the first injection module 540 flows. Accordingly, the first injection hole 510g may have a relatively small diameter or width, unlike the first injection hole 110g of the fluid shutoff valve 110 of FIGS. 1 to 6 . For example, the first injection hole 510g may have a smaller diameter than that of the first injection module 540 . The first injection hole 510g may have a diameter required to supply the cleaning gas in an amount required by the first injection module 540 .

The second injection hole 510h may be formed to a predetermined depth downward from the center of the second standby position c located on the other side of the valve housing 510 with respect to the fluid passage 110a. The second injection hole 510h may be formed to a predetermined depth in a direction from an upper surface to a lower surface of the upper housing 511 . The second injection hole 510h may provide a path through which the cleaning gas supplied to the second injection module 550 flows. The second injection hole 510h may be formed in the same shape and size as the first injection hole 510g.

The first injection accommodating groove 510i may be formed in a groove shape in which an upper bottom surface is penetrated and connected to a lower end of the first injection hole 510g, and is opened to an upper portion of the accommodating space 110b. That is, the first injection receiving groove 510i is formed to extend from the bottom surface of the upper housing 511 to the lower end of the first injection hole 510g in the upper surface direction, and can be connected through the first injection hole 510g. have. The first injection receiving groove 510i may be positioned to have the same center as the center of the first standby position b positioned on one side of the valve housing 510 with respect to the fluid passage 110a. The first injection receiving groove 510i may be formed to have a larger diameter than the first injection hole 510g. The first injection receiving groove 510i may be formed to have a size required to accommodate the first injection module 540 . That is, the first injection receiving groove 510i may be formed with an inner diameter corresponding to the outer diameter of the first spraying module 540 . The first injection accommodating groove 510i may be formed as an inclined surface whose height is lowered toward the outside with the upper bottom surface as the center.

The second injection accommodating groove 510j may have an upper end connected to the lower end of the second injection hole 510h, and may be formed in a groove shape that is opened to the upper portion of the accommodating space 110b. That is, the second injection accommodating groove 510j is formed to extend from the bottom surface of the upper housing 511 to the lower end of the second injection hole 510h in the upper surface direction, and can be connected through the second injection hole 510h. have. The second injection receiving groove 510j may be located to have the same center as the center of the second standby position c located on one side of the valve housing 510 with respect to the fluid passage 110a. The second injection receiving groove 510j may be formed to have a larger diameter than the second injection hole 510h. The second injection receiving groove 510j may be formed to have a size required to accommodate the second injection module 550 . That is, the second injection receiving groove 510j may be formed with an inner diameter corresponding to the outer diameter of the second injection module 550 . The second injection receiving groove 510j may be formed as an inclined surface whose height is lowered toward the outside with the upper bottom surface as the center.

The first spray module 540 may include a first spray plate 542 . In addition, the first injection module 540 may further include a first injection support bar 544 . The first injection module 540 is accommodated in the first injection receiving groove 510i, a first shielding plate (b) positioned at the first standby position (b) for the cleaning gas supplied through the first injection hole (510g). 128) to supply a cleaning gas to the upper surface.

The first injection plate 542 may include a first gas injection hole 542a. The first injection plate 542 is formed in a plate shape having a predetermined thickness, and may be formed in a shape corresponding to the planar shape of the first injection receiving groove 510i. The first injection plate 542 may be coupled to the inside of the first injection receiving groove 510i such that the upper surface thereof is spaced apart from the upper and lower surface of the first injection receiving groove 510i. The first injection plate 542 may form a cleaning gas passage d through which the cleaning gas flows together with the upper and lower surfaces of the first injection receiving groove 510i. The cleaning gas passage d may be formed in a disk shape from the first injection hole 510g toward the outer circumferential surface of the first injection plate 542 . The first injection plate 542 may inject the cleaning gas supplied to the first injection receiving groove 510i through the first injection hole 510g to the shielding plate 128 located in the receiving space 110b. . The cleaning gas passage d may be formed in a shape in which the height decreases from the center toward the outside.

The first gas injection hole 542a may be formed to penetrate from the upper surface to the lower surface of the first injection plate 542 . The first gas injection hole 542a has a ring shape while being spaced apart in a circumferential direction at a position corresponding to the center of the first injection plate 542 and the upper portion of the first O-ring 129 of the first shielding plate 128 . It may be formed to be disposed. In addition, a plurality of the first gas injection holes 542a may be additionally formed between the center and the circumferential ring. Although not specifically illustrated, the first injection hole 510g may have a relatively large diameter of the first injection hole 510g positioned in the circumferential ring. The first injection plate 542 efficiently sprays the reaction by-product particles attached to the first O-ring 129 while spraying the cleaning gas relatively more to the first O-ring 129 than to the central region of the first shielding plate 128 . can be removed

The first injection support bar 544 is formed in a column shape, and may be coupled between an upper surface of the first injection plate 542 and an upper bottom surface of the first injection receiving groove 510i. The first spraying support bar 544 may be formed of at least two circumferentially spaced apart from the upper surface of the first spraying plate 542 . The first injection support bar 544 may preferably be formed in three or four. The first injection support bar 544 maintains a constant distance between the upper surface of the first injection plate 542 and the upper and lower surface of the first injection receiving groove 510i so that the cleaning gas passage d is formed at a constant height. can make it happen Also, although not specifically illustrated, the first injection support bar 544 may provide a path through which a bolt for coupling the first injection plate 542 to the valve housing 510 passes.

The second spray module 550 may include a second spray plate 552 . In addition, the second injection module 550 may further include a second injection support bar 554 . The second injection module 550 is accommodated in the second injection receiving groove 510j, a second shielding plate (c) positioned at the second standby position (c) for the cleaning gas supplied through the second injection hole (510h). 138) to supply a cleaning gas to the upper surface.

The second injection module 550 is accommodated in the second injection receiving groove 510j, except that the cleaning gas is injected to the second shielding plate 138 located at the second standby position (c). It may be formed in the same or similar configuration to the injection module 540 . Accordingly, the second injection plate 552 may be formed the same as or similar to the first injection plate 542 and may include a second gas injection hole 552a identical to or similar to the first gas injection hole 542a. have. That is, the second gas injection hole 522a has a circumferential direction at a position corresponding to the center of the second injection plate 552 and the upper portion of the second O-ring 139 located on the upper surface of the second shielding plate 138 . It may be arranged in a ring shape while being spaced apart from each other. In addition, the second injection support bar 554 may be formed the same as or similar to the first injection support bar 544 . That is, the second injection support bar 554 is formed in a column shape, and is spaced apart from each other in the circumferential direction between the upper surface of the second injection plate 552 and the upper bottom surface of the second injection receiving groove 510j. can be formed into dogs.

Next, a fluid shutoff valve according to another embodiment of the present invention will be described.

17 is a vertical cross-sectional view of a fluid shutoff valve according to another embodiment of the present invention.

Referring to FIG. 17 , the fluid shutoff valve 600 according to another embodiment of the present invention may include a valve housing 610 , a first shielding module 120 , and a first injection module 540 . The fluid shutoff valve 600 does not include the second shielding module 130 and the second spraying module 550 as compared to the fluid shutoff valve 500 according to FIGS. 12 to 16 . In addition, the valve housing 610 may include only the first standby position (b) in the accommodation space (110b). The fluid shutoff valve 600 may be formed to be the same as or similar to the fluid shutoff valve 500 illustrated in FIGS. 12 to 16 , except that the structure of the valve housing 610 is changed. Therefore, hereinafter, the fluid shutoff valve 600 will be mainly described with a configuration different from the fluid shutoff valve 100 according to FIGS. 1 to 6 . In addition, the fluid shutoff valve 600 is given the same reference numerals for the same or similar components as the fluid shutoff valve 100 according to FIGS. 1 to 6 , and a detailed description thereof is omitted.

In addition, the fluid shutoff valve 600 may be different from the fluid shutoff valve 500 according to FIGS. 12 to 16 when the first injection module 540 operates. For example, the first injection module 540 may operate when the inflow prevention piston 162 of the inflow prevention cylinder 160 spatially separates the fluid passage 110a and the accommodation space 110b. That is, the first injection module 540 may operate when the first shielding plate 128 is positioned at the first standby position b and the receiving space 110b is shielded from the fluid passage 110a. The first injection module 540 may spray a cleaning gas to the first shielding plate 128 to remove reaction byproduct particles.

In addition, the valve housing 610 may be formed to have a relatively small diameter compared to the valve housing 510 according to FIGS. 12 to 16 . Accordingly, the valve housing 610 may be formed such that only the first shielding module 120 and the first injection module 540 are coupled or accommodated.

The first shielding module 120 of the fluid shutoff valve 600 may rotate the first shielding plate 128 from the standby position (b) to the shielding position (a). In this case, the first injection module 540 may inject the cleaning gas when the first shielding plate 128 is located in the standby position (b).

Meanwhile, in the above, the fluid shutoff valve according to the embodiments of the present invention includes the first shielding module 120 or the second shielding module 130 using the first shielding plate 128 and the second shielding plate 138 . The rotational axis 124 or the second rotational axis 134 is rotated about the configuration of the first standby position (b) or the second standby position (c) to the shielding position (a) has been described as a center.

In addition, the fluid shutoff valve according to the embodiment of the present invention may also be applied to a structure for linearly moving the shield plate from the standby position to the shielding position (a). In this case, the shielding module may be provided with a pneumatic cylinder, an elastic spring or a driving motor to linearly move the shielding plate from the standby position to the shielding position (a). In this case, the injection module may inject the cleaning gas when the shielding plate is located in the standby position.

In addition, the fluid shutoff valve may be formed of at least two shielding modules and a spraying module as in the above embodiment, and the shielding modules may be positioned symmetrically with respect to the shielding position (a) or spaced apart at a predetermined angle. can In addition, the injection module may also be located above each shielding plate.

Hereinafter, fluid shutoff valves according to another exemplary embodiment of the present invention will be described having a structure in which the above-described shielding plate moves linearly from the standby position to the shielding position.

Next, a fluid shutoff valve according to another embodiment of the present invention will be described.

18 is a plan view of a fluid shutoff valve according to another embodiment of the present invention. 19 is a vertical cross-sectional view taken along line G-G of FIG. 18 . FIG. 20 is a vertical cross-sectional view illustrating a state in which the shield plate blocks the fluid passage 110a in the fluid shutoff valve of FIG. 18 .

The fluid shutoff valve 700 according to another embodiment of the present invention may include a valve housing 710 , a shielding module 720 , and an injection module 740 , with reference to FIGS. 18 to 19 . In addition, the fluid shutoff valve 700 may further include a lower outlet pipe 170 . Meanwhile, although not specifically shown, the fluid shutoff valve 700 includes the bypass gas passage 200a, the bypass connection pipe 280, and the bypass passage blocking means of the fluid shutoff valve 200 according to the embodiment of FIG. 290) may be further included.

The fluid shutoff valve 700 may be formed such that the shielding module 720 for blocking the fluid passage 110a linearly moves from the standby position to the shielding position similarly to the fluid shutoff valve 600 of FIG. 17 . That is, the fluid shutoff valve 700 blocks the fluid passage 110a while repeatedly moving the shielding plate 728 of the shielding module 720 in a straight path between the shielding position (a) and the standby position (b). can In the fluid shutoff valve 700, since the shielding plate 728 of the shielding module 720 moves linearly, in the structure of the valve housing 710 and the shielding module 720, the fluid shutoff valves ( 100, 200, 300, 400, 500) and may have some differences.

In addition, the injection module 740 of the fluid shutoff valve 700 may be formed to be the same as or similar to the first injection module 540 of the fluid shutoff valve 500 according to the embodiment of FIGS. 12 to 16 . That is, the spray module 740 may include a spray plate 742 and a spray support bar 744 . The spray plate 742 may be formed to be the same as or similar to the first spray plate 542 of the first spray module 540 . The injection plate 742 may include a gas injection hole 742a. In addition, the injection support bar 744 may be formed to be the same as or similar to the first injection support bar 544 of the first injection module 540 . In addition, the injection module 740 of the fluid shutoff valve 700 may be formed to be the same as or similar to the first injection module 140 of the fluid shutoff valve 100 according to the embodiment of FIGS. 1 to 6 . A detailed description of the injection module 740 will be omitted.

Hereinafter, the fluid shutoff valve 700 will be described focusing on differences from the fluid shutoff valve 500 according to the embodiment of FIGS. 12 to 16 . In addition, the fluid shutoff valve 700 has the same configuration as the fluid shutoff valve 500 according to the embodiment of FIGS. 12 to 16 or the fluid shutoff valve 100 according to the embodiment of FIGS. 1 to 6 is the same view. Reference numerals may be given, and detailed descriptions may be omitted. In addition, the fluid shutoff valve 700 has the same configuration as the fluid shutoff valve 500 according to the embodiment of FIGS. 12 to 16 or the fluid shutoff valve 100 according to the embodiment of FIGS. 1 to 6 by reference numerals. may be given and a detailed description may be omitted. 18 to 19 showing the fluid shutoff valve 700, reference numerals may be omitted for the same configuration shown in FIGS. 12 to 16 or 1 to 6 .

The valve housing 710 may include a fluid passage 110a extending up and down on one side and an accommodation space 110b extending from the fluid passage 110a to the other side. The valve housing 710 may have a substantially rectangular shape since the fluid passage 110a and the receiving space 110b are respectively located on one side and the other side.

The valve housing 710 may include a housing upper hole 110c and a housing lower hole 110d that are respectively opened upward and downward from the fluid passage 110a. In addition, the valve housing 710 may include a housing shielding hole 710e, an injection hole 710g, and an injection receiving groove 710i. In addition, the valve housing 710 may further include an upper connection pipe 115 .

The housing shielding hole 710e may be formed to penetrate into the accommodation space 110b from the other side of the valve housing 710 with respect to the fluid passage 110a. The housing shielding hole 710e may provide a space to which a part of the shielding module 720 is coupled.

The injection hole 710g and the injection receiving groove 710i may be formed in the same or similar manner to the first injection hole 510g and the first injection receiving groove 510i of FIG. 13 , respectively. That is, the injection hole 710g may be formed to a predetermined depth downward from the standby position located on one side of the valve housing 710 . In addition, the injection receiving groove 710i may be formed in a groove shape in which an upper bottom surface is penetrated and connected to a lower end of the injection hole 710g, and is opened to an upper portion of the receiving space 110b.

In the valve housing 710 , a shielding O-ring groove 710f may be formed in the upper bottom surface of the valve housing 710 at the shielding position (a), that is, in the shielding bottom region (d). The shielding O-ring groove 710f may be formed in a ring shape along the circumference of the fluid passage 110a, and may be formed to open downward of the shielding bottom area d. A shielding O-ring 719 may be coupled to the shielding O-ring groove 710f. Meanwhile, the shielding O-ring groove 710f and the shielding O-ring 719 may be formed on the shielding plate 128 of the shielding module 220 as in the fluid shutoff valve 100 of FIGS. 1 to 6 .

The shielding module 720 may include a shielding pneumatic cylinder 721 , a shielding transport ring 724 , and a shielding plate 728 . Meanwhile, the shielding module 720 may be formed with an elastic spring or a driving motor instead of a pneumatic cylinder as described above.

The shielding module 720 may be located on the other side with respect to the fluid passage 110a of the valve housing 710 . As shown in FIGS. 19 and 20, the shielding module 720 includes a shielding pneumatic cylinder 721 coupled to the valve housing 710 through a housing shielding hole 710e, and a shielding transfer ring 724. and the shielding plate 728 may be moved linearly. That is, the shielding module 720 may linearly move the shielding plate 728 repeatedly to the shielding position (a) and the standby position (b).

The shielding pneumatic cylinder 721 may be formed as a general pneumatic cylinder. For example, the shielded pneumatic cylinder 721 may include a shielded pneumatic housing 722 and a shielded pneumatic piston 723 . The shielding pneumatic housing 722 may be formed in a cylindrical shape having a space in which air pressure flows in and out. The shielding pneumatic piston 723 is formed in a bar shape, and one side may flow inside the shielding pneumatic housing 722 , and the other side may flow into the receiving space 110b.

One side of the shielding transport ring 724 is coupled to the shielding pneumatic piston 723 , and may be linearly moved in the direction of the fluid passage 110a in the receiving space 110b. That is, the shielding transport ring 724 may repeatedly move between the standby position (b) and the shielding position (a) by the forward and backward movement of the shielding pneumatic piston 723 . The shielding transport ring 724 may be formed in a ring shape having a predetermined inner diameter. The shielding conveying ring 724 may be formed so that an inner peripheral surface is stepped.

The shielding plate 728 is formed in a disk shape, and an outer diameter may be formed to have a diameter corresponding to the outer diameter of the shielding transfer ring 724 . The shielding plate 728 may have a flat top surface. The shield plate 728 may seal the fluid passage 110a while the upper surface is in contact with the shield O-ring 719 of the valve housing 710 . Meanwhile, although not specifically illustrated, the shielding plate 728 may have a shielding O-ring groove 128a formed on its upper surface like the shielding plate 128 of FIGS. 1 to 6 . In addition, a shielding O-ring 719 may be coupled to the shielding O-ring groove 128a.

Next, a fluid shutoff valve according to another embodiment of the present invention will be described.

21 is a vertical cross-sectional view of a fluid shutoff valve according to another embodiment of the present invention.

Referring to FIG. 21 , the fluid shutoff valve 800 according to another embodiment of the present invention may include a valve housing 710 , a shield module 720 , an injection module 740 , and an inflow prevention cylinder 160 . can In addition, the fluid shutoff valve 800 may further include a lower outlet pipe 170 . Meanwhile, although not specifically illustrated, the fluid shutoff valve 800 may further include a bypass gas passage 200a of the fluid shutoff valve 100 according to the embodiment of FIGS. 1 to 6 .

The fluid shutoff valve 800 includes the fluid shutoff valve 700 according to the embodiment of FIGS. 18 to 20 and the inflow prevention cylinder 160 of the fluid shutoff valve 100 according to the embodiment of FIGS. 1 to 6 . It can be formed by combining. The valve housing 710 of the fluid shutoff valve 800 may be formed to be the same as or similar to the lower structure of the valve housing 110 shown in FIG. 2A so that the inflow prevention cylinder 160 may be coupled thereto. Also, in the fluid shutoff valve 800 , the ejection module 740 may be formed in the structure of the first ejection module 140 of the fluid shutoff valve 100 of FIGS. 1 to 6 . Since the configurations of the fluid shutoff valve 800 have been described in the above embodiments, a detailed description thereof will be omitted.

As described above, embodiments according to the technical idea of the present invention have been described with reference to the accompanying drawings, but those of ordinary skill in the art to which the present invention pertains will have other specific forms without changing the technical spirit or essential features of the present invention. It will be understood that it can be implemented as It should be understood that the embodiments described above are illustrative in all respects and not restrictive.

100, 200, 300, 400, 500, 600, 700, 800: fluid shutoff valve
110, 210, 310, 410, 510, 610, 710: valve housing
110a: fluid passage 110b: receiving space
110c: housing upper hole 110d: housing lower hole
110e, 710e: first shielding hole 110f: second shielding hole
110g, 510g: first injection hole 110h; 510h: second injection hole
510i: first injection receiving groove 510j: second injection receiving groove
120: first shielding module 720: shielding module
121: first pneumatic cylinder 122: first pneumatic housing
122a: first piston passage 122b: first rotation hole
123: first pneumatic piston 124: first rotating shaft
125: first transfer body 126: first transfer bar
127: first transfer ring 128: first shielding plate
129: first o-ring 728: shield plate
130: second shielding module
131: second pneumatic cylinder 132: second pneumatic housing
132a: second piston passage 132b: second rotation hole
133: second pneumatic piston 134: second rotation shaft
135: second transfer body 136: second transfer bar
137: second transfer ring 138: second shielding plate
139: second O-ring 140, 540: first injection module
740: injection module 141: first injection body
141a: first gas supply hole 141b: first gas guide groove
141c: first body step 142, 542: first injection plate
742: injection plate 744: injection support bar
142a, 542a: first gas injection hole 142b: first coupling groove
143: first gas supply pipe 544: first injection support bar
150, 550: second injection module 151: second injection body
151a: second gas supply hole 151b: second gas guide groove
151c: second body step 152, 552: second injection plate
152a, 552a: second gas injection hole 152b: second coupling groove
153: second gas supply pipe 554: second injection support bar
160: inflow prevention cylinder 160a: lower fluid passage
161: anti-inlet housing 161a: anti-piston passageway
161b: prevention passage opening hole 161c: first prevention passage
161d: second prevention passage 161e: blocking gas passage
162: prevention piston 163: prevention piston body
164: prevention piston rod 164a: rod o-ring groove
165: piston o-ring 166: inlet blocking means
167: inlet blocking ring 167a: blocking gas flow path
168: inlet blocking flange 170: lower outlet pipe
170a: lower outlet passage 200a: bypass gas passage
200b: upper bypass passage 200c: lower bypass passage
280: bypass connector 290: bypass passage blocking means

Claims (20)

a valve housing formed between the housing upper hole and the housing lower hole and having a fluid passage through which a fluid flows and a receiving space formed outside the fluid passage and connected to the fluid passage;
a first shielding module located in a first standby position of the accommodation space and having a first shielding plate moving to a shielding position of the fluid passageway to shield the fluid passageway;
a second shielding module located in a second standby position of the receiving space and moving to the shielding position to alternately shield the fluid passage with the first shielding module;
a first spraying module for spraying a cleaning gas on the upper surface of the first shielding plate; and
and a second injection module for injecting a cleaning gas onto the upper surface of the second shielding plate. 2. The method of claim 1
The first shielding module is
a first pneumatic cylinder located on one side of the fluid passage from the outside of the valve housing;
a first rotating shaft having one side connected to the first pneumatic cylinder and rotating, and the other side extending into the accommodation space of the valve housing;
Further comprising a first transfer member coupled to the first rotation shaft on one side, and the other side rotates in an arc-shaped trajectory to repeatedly move between the first standby position and the shielding position,
The first shielding plate is seated on the other side of the first transport body and is moved up and down in the shielding position to shield the fluid passage,
The second shielding module is
a second pneumatic cylinder located on the other side of the fluid passage from the outside of the valve housing;
a second rotation shaft having one side connected to the second pneumatic cylinder and rotating, and the other side extending into the accommodation space of the valve housing;
Further comprising a second transfer member coupled to the second rotation shaft on one side and the other side rotates in an arc-shaped trajectory to repeatedly move between the second standby position and the shielding position,
The second shielding plate is seated on the other side of the second transfer member and moves up and down from the shielding position to block the fluid passage. The method of claim 1,
The valve housing includes a first injection hole penetrating from an upper portion of the fluid passage to a first standby position of the accommodation space and a second injection hole penetrating from an upper portion of the other side of the fluid passage to a second standby position of the accommodation space. includes,
The first injection module is
A first injection body having a first gas supply hole penetrating from the upper surface to the lower surface and through which the cleaning gas is introduced, and a first gas guide groove formed in the upper direction from the lower surface and having the first gas supply hole in the center;
a first gas injection hole penetrating from the upper surface to the lower surface and injecting the cleaning gas to the first shielding plate, and a first injection plate coupled to a lower portion of the first gas guide groove;
The second injection module is
a second injection body having a second gas supply hole penetrating from the upper surface to the lower surface and through which the cleaning gas is introduced, and a second gas guide groove formed in the upper direction from the lower surface and having the second gas supply hole in the center;
and a second gas injection hole penetrating from the upper surface to the lower surface through which the cleaning gas is injected, and a second injection plate coupled to a lower portion of the second gas guide groove. 4. The method of claim 3,
The first gas guide groove and the second gas guide groove are formed in a shape that decreases in depth toward the outside of the first injection body and the second injection body,
A plurality of the first gas injection hole and the second gas injection hole are respectively formed to be radially spaced apart from the centers of the first and second injection plates. The method of claim 1,
In the valve housing, a first injection hole formed to a predetermined depth in a downward direction from an upper surface of the first standby position and an upper bottom surface are connected through and connected to a lower end of the first injection hole, and a lower portion is opened to the upper portion of the accommodation space. A first injection receiving groove, a second injection hole formed to a predetermined depth in a downward direction from the upper surface of the second standby position, and an upper bottom surface are connected through and connected to the lower end of the second injection hole, and the lower portion is opened to the upper portion of the accommodation space It includes a second injection receiving groove,
The first injection module is
A first injection plate having a plurality of first gas injection holes penetrating from the upper surface to the lower surface, and horizontally coupled to the first injection receiving groove so that the upper surface is spaced apart from the upper and lower surface of the first injection receiving groove, ,
The second injection module is
A second injection plate having a plurality of second gas injection holes penetrating from the upper surface to the lower surface and horizontally coupled to the second injection receiving groove such that the upper surface is spaced apart from the upper and lower surface of the second injection receiving groove Features a fluid shutoff valve. 6. The method of claim 5,
The first gas injection hole is disposed in a ring shape while being spaced apart in a circumferential direction at a position corresponding to the center of the first injection plate and an upper portion of the first O-ring located on the upper surface of the first shielding plate,
The second gas injection hole is arranged in a ring shape while being spaced apart in a circumferential direction at a position corresponding to the center of the second injection plate and an upper portion of the second O-ring located on the upper surface of the second shielding plate. fluid shutoff valve. 6. The method of claim 5,
The first gas injection module further includes at least two first injection support bars that are formed in a columnar shape and are spaced apart from each other in the circumferential direction between the upper surface of the first injection plate and the upper and lower surface of the first injection receiving groove,
The second gas injection module is formed in a column shape, and further comprises at least two second injection support bars spaced apart from each other in the circumferential direction between the upper surface of the second injection plate and the upper bottom surface of the second injection receiving groove. Features a fluid shutoff valve. 7. The method according to claim 3 or 6,
the first injection module injects the cleaning gas to an upper surface of the first shielding plate when the second shielding plate blocks the fluid passage in the shielding position and the first shielding plate is positioned in the first standby position; ,
The second injection module is configured such that the first shielding plate shields the fluid passage in the shielding position, and when the second shielding plate is positioned in the second standby position, the cleaning gas is sprayed onto the upper surface of the second shielding plate. A fluid shutoff valve, characterized in that formed. The method of claim 1,
coupled to the housing lower hole of the valve housing,
The fluid passage is shielded by supporting and raising the lower surface of the first shielding plate or the second shielding plate located in the shielding position,
and an inflow prevention cylinder separating the fluid passage from the accommodation space when the first shield plate and the second shield plate are positioned in the first standby position and the second standby position, respectively. 10. The method of claim 9,
When the inflow prevention cylinder separates the fluid passage from the receiving space,
The first injection module injects the cleaning gas to the upper surface of the first shielding plate located in the first standby position,
The second injection module injects the cleaning gas to the upper surface of the second shielding plate located in the second standby position. The method of claim 1,
a bypass gas passage connected to the fluid passage at an upper portion of the shielding position, passing through the receiving space, and connected to the fluid passage at a lower portion of the shielding position, in parallel with the fluid passage, as a passage through which the fluid flows;
The fluid shutoff valve further comprising a bypass passage blocking means for opening and closing the bypass gas passage. 12. The method of claim 11,
The bypass gas passage provides a path through which the cleaning gas injected from the first injection module and the second injection module is discharged to the outside of the accommodation space. a valve housing formed between the housing upper hole and the housing lower hole and having a fluid passage through which a fluid flows and a receiving space formed outside the fluid passage and connected to the fluid passage;
a first shielding module located in a first standby position of the receiving space and having a first shielding plate moving to a shielding position of the fluid passage to shield the fluid passage; and
and a first injection module for injecting a cleaning gas to the first shielding plate. 14. The method of claim 13,
coupled to the housing lower hole of the valve housing,
The first shielding plate positioned in the shielding position is supported and raised to shield the fluid passage,
and an inflow prevention cylinder separating the fluid passage from the accommodating space when the first shielding plate is positioned in the first standby position. 15. The method of claim 14,
When the inflow prevention cylinder separates the fluid passage from the receiving space,
The first injection module injects the cleaning gas to the upper surface of the first shielding plate located in the first standby position. A valve housing formed between the housing upper hole and the housing lower hole and having a fluid passage through which a fluid gas flows, and an accommodation space formed outside the fluid passage and connected to the fluid passage;
a shielding module located in a standby position of the accommodation space, moving to a shielding position of the fluid passageway to shield the fluid passageway, and including a shielding plate;
and an injection module for injecting a cleaning gas to the shielding plate located in the standby position. 17. The method of claim 16,
wherein the shielding module transports the shielding plate from the standby position to the shielding position along an arc-shaped path or in a straight path. 17. The method of claim 16,
The valve housing is
A spray hole formed to a predetermined depth in the lower direction from the standby position located on one side and an upper bottom surface that penetrates through and is connected to the lower end of the spray hole, and includes a spray receiving groove whose lower part is opened to the upper part of the receiving space,
The spray module
A fluid shutoff valve comprising a plurality of gas injection holes penetrating from an upper surface to a lower surface, and a spray plate coupled to the injection receiving groove in a horizontal direction so that the upper surface is spaced apart from the upper and lower surface of the injection receiving groove. 19. The method of claim 18,
The valve housing further includes a housing shielding hole formed by penetrating into the receiving space from the other side of the valve housing,
The shielding module includes a shielding pneumatic cylinder coupled to the valve housing through the housing shielding hole, and linearly moving the shielding plate. 17. The method of claim 16,
The fluid shutoff valve further comprising an inflow prevention cylinder coupled to a lower portion of the valve housing.

Images