TW202146157A - Grinding device, grinding method and cassette including a bearing table, a grinding head unit, a cassette, a cassette holding portion, a conveying portion and a fixing portion - Google Patents

Abstract

This invention aims to automatically replace a grinding belt. A grinding device of this invention includes: a bearing table on which a workpiece is placed; a grinding head unit arranged on the upper side of the bearing table in a vertical direction; a cassette which accommodates the grinding belt inside and is arranged detachably on the grinding head unit; a cassette holding portion on which the cassette is placed; a conveying portion for conveying the cassette between the grinding head unit and the cassette holding portion; and a fixing portion arranged on the grinding head unit and used for fixing the cassette on the grinding head unit. The fixing portion includes: a rod-shaped portion; and an actuator which moves the rod-shaped portion between a position in contact with the cassette and a position not in contact with the cassette. The cassette includes: a first reel on which the grinding belt before use is wound; a second reel on which the grinding belt after use is wound; and a frame in which the first reel and the second reel are arranged. The polishing head unit includes a first drive shaft inserted into the first reel, and a second drive shaft inserted into the second reel. The fixing portion presses the cassette with the rod-shaped portion in a case where the first drive shaft is inserted into the first reel and the second drive shaft is inserted into the second reel, and thus fix the cassette to the polishing head unit.

Description

Grinding device, grinding method and cassette

The present invention relates to a grinding device, a grinding method and a cassette.

Patent Document 1 discloses a repairing apparatus for substrate defects that grinds protrusion defects generated on the substrate by moving a tape member having a polishing layer formed thereon. The repairing device is provided with: a height measuring part before grinding, which measures the height of the protruding defect; a pressing part, which presses the abrasive layer of the belt member against the protruding defect to grind the protruding defect; and a height measuring part after grinding, which measures the protruding defect by means of The height of the protrusion after grinding by the pressing part. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2003-266292

[Problems to be Solved by Invention]

In the invention described in Patent Document 1, since the belt member is manually mounted, the device needs to be stopped when the belt member is replaced, and there is a problem that the production efficiency is lowered. In addition, the industry is facing an increasing demand for automation in the manufacturing industry, and the invention described in Patent Document 1 in which the belt member is manually replaced has a problem that it cannot cope with automation.

The present invention has been made in view of such circumstances, and an object thereof is to provide a polishing device, a polishing method, and a cassette capable of automatically replacing a polishing belt. [means to solve the problem]

In order to solve the above-mentioned problems, the polishing apparatus of the present invention is, for example, a polishing apparatus for polishing protruding defects of a workpiece using a polishing belt, and is characterized by comprising: a stage on which the workpiece is placed; and a polishing head unit provided on the carrier. The upper side in the vertical direction of the table; a cassette, the interior of which is provided with the above-mentioned grinding belt, and is detachably provided in the above-mentioned grinding head unit; a cassette holding part, which is provided with the above-mentioned cassette; the cassette is conveyed between the head unit and the cassette holding part; and a fixing part provided on the grinding head unit for fixing the cassette to the grinding head unit, having a rod-shaped part and a rod-shaped part An actuator that moves between a position in contact with the cassette and a position not in contact; the cassette has: a first reel on which the abrasive tape before use is wound; and a second reel on which The above-mentioned abrasive tape after being wound up for use; and a frame having the above-mentioned first reel and the above-mentioned second reel disposed therein; the above-mentioned grinding head unit has: a first drive shaft inserted into the above-mentioned first reel; and a second drive shaft inserted into the second reel; the fixing portion is used in a state where the first drive shaft is inserted into the first reel and the second drive shaft is inserted into the second reel The said rod-shaped part presses the said cassette, and fixes the said cassette to the said polishing head unit.

According to the polishing apparatus of the present invention, the transport section transports the cassette with the polishing tape provided therein between the polishing head unit and the cassette holding section. The fixed part uses a rod in a state where the first drive shaft provided in the grinding head unit is inserted into the first reel of the cassette and the second drive shaft provided in the grinding head unit is inserted into the second reel of the cassette The shaped portion presses the cassette to fix the cassette to the grinding head unit. Thereby, the polishing belt can be replaced automatically.

The conveying unit may have a first axis extending along a first direction included in the horizontal direction, and a second axis extending along a second axis included in the horizontal direction and substantially perpendicular to the first direction. extending in the direction; the cassette is in the shape of a rectangular parallelepiped, and is arranged inside the cassette holding part with the largest surface along the first direction; the conveying part has: a first conveying part that makes the cassette along the first direction The said 1st axis|shaft moves between the said cassette holding|maintenance part and a delivery position; and the 2nd conveyance part moves the said cassette along the said 2nd axis|shaft between the said delivery position and the said polishing head unit. Thereby, the cassette can be conveyed stably and accurately without rotating it.

A hole may be provided on the bottom surface of the cassette; the first conveying portion may have a pin protruding upward, and the pin may move along the first axis when inserted into the hole; and the second conveying portion may include: a placing portion that mounts the cassette; a vertical moving unit that pushes upward the cassette placed on the placing portion; and a holding portion that holds the cassette when the cassette is pushed upward the upper surface of the cassette; the up-and-down moving unit has: a push-up portion abutting on the cassette; and a lift actuator that moves the push-up portion up and down; if the lift-up actuator moves the push-up portion When the push-up portion is pushed up, the cassette is held by the push-up portion and the holding portion, and the pin is pulled out from the hole. Thereby, when carrying out the conveyance by the 1st conveyance part, the situation in which the cassette is displaced and conveyance fails can be avoided.

It may also be provided with: a first grinding tape detection part, which has a first sensor provided in the above-mentioned grinding head unit, and a first reflector provided in the inside of the above-mentioned cassette; the above-mentioned first sensor has light-emitting An element and a light-receiving element; the first reflecting plate is provided adjacent to the first reel, and reflects light emitted from the first sensor toward the light-receiving element. Thereby, the grinding|polishing process can be performed continuously without the situation of a grinding|polishing belt being absent. Furthermore, since the first sensor has the light-emitting element and the light-receiving element, it is not necessary to provide the light-receiving element in the cassette, and space can be saved.

It may also be provided with: a second abrasive tape detection portion having a second sensor provided in the cassette holding portion, and a second reflector provided inside the cassette; the second sensor has A light-emitting element and a light-receiving element; the second reflector reflects the light emitted from the second sensor toward the second sensor. Thereby, it is possible to detect whether or not there is enough abrasive tape before use in the cassette provided in the cassette holder.

A plurality of rotating bodies whose outer peripheral surfaces are circular may be respectively provided on the outer sides of the two opposing surfaces of the cassette; the cassette holding portion has a track on which the rotating bodies abut. Thereby, the load at the time of inserting a cassette into the cassette holding|maintenance part is reduced. In addition, it is possible to prevent the device from being stopped due to conveyance errors.

In order to solve the above-mentioned problems, the polishing method of the present invention is characterized by including, for example, the steps of moving the first conveying portion upward, and inserting the pins provided in the first conveying portion into the bottom surface of the cassette provided in the cassette holding portion; The step of moving the first conveying part along a first axis extending in the first direction included in the horizontal direction, and placing the bottom surface of the cassette on the placing part of the second conveying part; using the second The abutting part of the conveying part pushes up the cassette, the abutting part and the holding part provided in the second conveying part hold the cassette, and the pin is pulled out from the hole; 2. The conveying part moves along a second axis extending in a second direction included in the horizontal direction and substantially perpendicular to the first direction, and presses the cassette against the grinding head unit; The cylinder of the unit moves, and the rod-shaped portion of the cylinder is used to press the cassette to fix the cassette to the grinding head unit; after the cassette is fixed to the grinding head unit, the abutting portion is downward The step of moving; and the step of moving the second conveying part along the second axis in the direction away from the grinding head unit. Thereby, the polishing belt can be replaced automatically.

In order to solve the above problems, the cassette of the present invention is, for example, provided with a grinding belt for grinding the protruding defects of the workpiece, and a grinding head disposed on the vertical upper side of the stage on which the workpiece is mounted in a detachable manner. The unit installer is characterized by having a frame, which is a frame in the shape of a rectangular parallelepiped with a cavity inside, and has a plate-shaped portion, which is a plate-shaped member having a rectangular shape, and is detachably provided on the plate-shaped portion The box-shaped box-shaped part; the bottom surface of the above-mentioned frame is provided with a hole. Thereby, the automatic conveyance of a cassette becomes easy. In addition, it is possible to prevent the device from being stopped due to conveyance errors.

The frame may also have pins arranged on the plate-like portion and positioning members arranged on the box-like portion; the plate-like portion is formed with grooves on both sides; The box-shaped portion is fixed to the pin inside the positioning member, whereby the box-shaped portion is provided on the plate-shaped portion. Thereby, the fastening strength of the plate-shaped part and the box-shaped part can be improved, and the damage of the cassette during automatic conveying can be prevented. Moreover, by aligning the groove and covering the box-shaped portion with the plate-shaped portion, the plate-shaped portion and the box-shaped portion can be assembled with high accuracy.

The inside of the above-mentioned frame may also be provided with: a first reel on which the above-mentioned polishing tape before use is wound; a second reel on which the above-mentioned grinding tape after use is wound; and a reflector; the reflector is adjacent to Set on the above-mentioned first reel. Thereby, the grinding|polishing process can be performed continuously without the situation of a grinding|polishing belt being absent. Furthermore, since the first sensor has the light-emitting element and the light-receiving element, it is not necessary to provide the light-receiving element in the cassette, and space can be saved.

A plurality of rotating bodies whose outer peripheral surfaces are circular may be respectively provided on the outer sides of the surfaces of the plate-shaped portion and the box-shaped portion facing the plate-shaped portion. Thereby, the load at the time of inserting a cassette into the cassette holding|maintenance part is reduced. In addition, it is possible to prevent the device from being stopped due to conveyance errors. [Effect of invention]

According to the present invention, the polishing belt can be replaced automatically.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The polishing apparatus of the present invention is an apparatus for correcting the defects of the workpiece by polishing the protruding defects on the color filter of the liquid crystal display device (hereinafter referred to as the workpiece) by using a polishing tape with a polishing layer on the surface.

FIG. 1 is a perspective view showing the outline of the polishing apparatus 1 according to the first embodiment. The polishing apparatus 1 mainly includes a cassette storage unit 10 (corresponding to the cassette holding portion of the present invention), a cassette moving unit 20 (corresponding to the first conveying portion of the present invention), and a cassette conveying unit 30 (corresponding to the present invention. 2nd conveyance part), the polishing head unit 40 , the cassette 50 , the stage unit 70 , and the optical microscope 90 .

The stage unit 70 mainly includes a stage 71 , a drive shaft 72 , and a bridge 80 . The stage 71 is a plate-shaped member having a rectangular shape in plan view, and a workpiece is placed on the upper surface.

The bridge 80 is a gate type, and is provided so as to cover the stage 71 . The bridge 80 has a beam 81 extending (extended) in the y direction on the upper side (+z side) of the stage 71 . A drive shaft 82 is provided on the beam 81 , and the grinding head unit 40 and the optical microscope 90 are mainly provided on the drive shaft 82 . The grinding head unit 40 and the optical microscope 90 can move in the y direction along the drive shaft 82 provided on the beam 81 . Also, the bridge 80 can move in the x-direction along the drive shaft 72 .

Optical microscope 90 is a microscope for observing workpieces, with a magnifying optical system for magnifying observation, or CCD (Charge-coupled Device, photosensitive coupling element), CMOS (Complementary Metal-Oxide-Semiconductor, complementary metal oxide semiconductor), etc. Photographic elements, etc.

The present invention is characterized in that the polishing apparatus 1 has an automatic replacement mechanism for the polishing belt. FIG. 2 is a perspective view showing the outline of the polishing belt automatic exchange mechanism of the polishing apparatus 1 . In addition, in FIG. 2, the cassette 50 is installed in the cassette conveying unit 30 and the grinding head unit 40 for the purpose of explanation, but in fact, it is only installed in either the cassette conveying unit 30 or the grinding head unit 40. By.

The automatic polishing belt replacement mechanism mainly includes a cassette storage unit 10 , a cassette moving unit 20 , a cassette conveying unit 30 , a polishing head unit 40 , and a cassette 50 . The cassette storage unit 10 , the cassette moving unit 20 , and the cassette conveying unit 30 are installed on the side of the loader (not shown) that shares the workpiece toward the stage 71 . However, the arrangement of the cassette storage unit 10 , the cassette moving unit 20 and the cassette conveying unit 30 is not limited to this.

The cassette 50 is automatically conveyed between the cassette storage unit 10 and the grinding head unit 40 by the cassette moving unit 20 and the cassette conveying unit 30 (corresponding to the conveying part of the present invention). In addition, the cassette 50 is arranged inside the cassette storage unit 10 with the largest surface along the x direction, and moves along the x direction and the y direction with the largest surface along the x direction, and is removed from the cassette The storage unit 10 is conveyed to the polishing head unit 40 and is detachably installed in the polishing head unit 40 .

FIG. 3 is a schematic exploded perspective view showing the cassette 50 . The cassette 50 mainly includes a frame 51 , a mounting member 52 , reels 53 and 54 , guide rollers 55 and 56 , reflection plates 57 and 58 , and a bearing 59 . A polishing tape T is provided inside the cassette 50 .

The frame 51 has a rectangular parallelepiped shape with a cavity inside, and has a plate-like portion 51a and a box-like portion 51b. The plate-like portion 51a has a rectangular plate shape, and grooves 51c are formed on both sides. The box-shaped portion 51b is box-shaped, and the upper surface thereof is opened. By making the frame 51 into a rectangular parallelepiped shape, automatic conveyance can be easily performed.

The attachment member 52 attaches the box-shaped part 51b to the plate-shaped part 51a so that attachment or detachment is possible. The mounting member 52 mainly includes a pin 52a and a positioning piece 52b that can be attached to and detached from the pin 52a. The pin 52a is provided in the plate-shaped part 51a, and the positioning member 52b is provided in the box-shaped part 51b.

The positioning member 52b has a cylindrical hole (not shown) and a fixed portion (not shown) that can move inside the hole. The alignment groove 51c covers the box-shaped portion 51b on the plate-shaped portion 51a, inserts the pin 52a into the hole of the positioning member 52b, and makes the fixing portion abut against the pin 52a, thereby fixing the pin 52a to the positioning member 52b. Inside, the plate-shaped part 51a and the box-shaped part 51b are assembled. By fixing the pin 52a to the inside of the positioning member 52b, the engagement strength (shear strength and tensile strength) becomes high. In addition, by covering the box-like portion 51b with the plate-like portion 51a by the alignment groove 51c, even if the plate-like portion 51a and the box-like portion 51b are repeatedly attached and detached or the cassette 50 is vibrated, the plate-like portion 51a and the box can be connected to each other. The positional relationship of the shaped portion 51b is kept constant.

The positioning member 52b is provided with a button 52c. If the button 52c is pressed while the positioning member 52b holds the pin 52a, the fixing portion is separated from the pin 52a, and the pin 52a can be detached from the positioning member 52b. In addition, the form of the attachment member 52 is not limited to this.

The reels 53, 54, the guide rollers 55, 56, and the reflection plates 57, 58 are mainly provided inside the frame 51 assembled in the above-mentioned manner.

The reels 53 and 54 are rotatably provided on the plate-like portion 51a. The grinding tape T before use is wound on the reel 53 , and the grinding tape T after use is wound on the reel 54 . In addition, guide rollers 55 and 56 are provided in the plate-like portion 51a, with which the polishing tape T is brought into contact with the outer peripheral surface.

Moreover, reflection plates 57 and 58 are provided in the plate-shaped part 51a. The reflector 57 is provided adjacent to the reel 53 , and constitutes a first abrasive tape detection unit 63 that detects the remaining amount of the abrasive tape T wound around the reel 53 . The first abrasive tape detection unit 63 will be described in detail later.

The reflector 58 constitutes a second abrasive tape detection portion 61 that detects whether the cassette 50 is inserted into the cassette storage unit 10 . The second abrasive tape detection unit 61 will be described in detail later.

Bearings 59 (corresponding to the rotating body of the present invention) are respectively provided on the outer surface 51d of the plate-like portion 51a (the back side of the drawing in FIG. 3 is not visible) and the box-like portion 51b facing the plate-like portion 51a. The outer surface 51f of the bottom plate 51e. The bearing 59 is, for example, a ball bearing, the outer peripheral surface is circular, and the outer peripheral surface is rotatable. A shaft (not shown) is provided on the surfaces 51 d and 51 f , and when the shaft is inserted into the hollow portion of the bearing 59 , the outer ring of the bearing 59 rotates with respect to the frame 51 .

Furthermore, in this embodiment, the bearing 59 is used as the rotating body, but the rotating body is not limited to the bearing 59 .

Return to the description of FIG. 1 . The cassette storage unit 10 is a component for storing the cassette 50 before or after use. A baffle plate is provided on the safety frame (not shown) covering the grinding device 1 , and the cassette 50 provided in the cassette storage unit 10 can be exchanged through the baffle plate.

4 and 5 are schematic perspective views showing the cassette storage unit 10 . FIG. 5 is a view of FIG. 4 viewed from the back side. The cassette storage unit 10 mainly includes frames 11 , 12 , a bottom plate 13 , a link plate 14 , a rail 15 , a ball roller 16 , a magnet catch 17 , and a stopper bolt 18 .

The frames 11 and 12 are arranged on the bottom panel 13 . In addition, the connecting plate 14 is provided between the frames 11 and 12 . In the present embodiment, five connecting plates 14 are provided, and the five connecting plates 14 are arranged substantially in parallel.

The frame 11 has holes 11a, 11b, 11c, 11d, and the frame 12 has holes 12a, 12b, 12c, 12d. When viewed from the x direction, the hole 11a and the hole 12a overlap, the hole 11b and the hole 12b overlap, the hole 11c and the hole 12c overlap, and the hole 11d and the hole 12d overlap. Moreover, the connection plate 14 is provided in the both sides of the holes 11a, 11b, 11c, and 11d, respectively, as viewed from the x-direction.

The bottom plate 13 is provided with slits 13a, 13b, 13c, 13d, respectively, so that the positions in the y direction overlap with the holes 11a, 11b, 11c, and 11d.

Viewed from the x direction, two rails 15 are provided adjacent to the connecting plate 14 on both sides of the holes 11a, 11b, 11c, 11d and the slits 13a, 13b, 13c, 13d, respectively. The track 15 supports the bearing 59 of the cassette 50 . That is, the cassette storage unit 10 has four slots into which the cassettes 50 can be inserted.

When the cassette 50 is inserted into the cassette storage unit 10 from the holes 11 a , 11 b , 11 c , and 11 d , the bearing 59 rotates on the rail 15 , and the front end of the ball roller 16 abuts on the cassette 50 . The cassette 50 inserted into the cassette storage unit 10 is attracted by the magnetic attraction 17 provided on the frame 12 , and abuts against the stop bolt 18 provided on the frame 12 to determine the position in the x-direction.

Moreover, the sensor 62 is provided in the frame 12 . The sensor 62 and the reflection plate 58 constitute the second polishing tape detection part 61 . The sensor 62 has a light-emitting element and a light-receiving element. The light irradiated from the sensor 62 is reflected on the reflector 58 and received by the sensor 62 , thereby detecting whether there is enough grinding tape T before use in the cassette 50 .

Return to the description of FIG. 1 . The cassette moving unit 20 is a unit for carrying the cassette 50 into the cassette storage unit 10 , or for carrying out the cassette 50 from the cassette storage unit 10 .

FIG. 6 is a schematic perspective view showing the cassette moving unit 20 . The cassette moving unit 20 is provided on the lower side of the table 21 on which the cassette storage unit 10 is placed. Slits 21a, 21b, 21c, and 21d are provided at positions overlapping the slits 13a, 13b, 13c, and 13d in the stage 21, respectively.

The cassette moving unit 20 mainly includes ball screw drive units 22 and 24 , Cableveyor (registered trademark) 23 and 25 , and a moving unit 26 . The moving unit 26 mainly includes a base 26a, a vertical moving unit 26b, a plate-shaped portion 26c, and a pin 26d.

The ball screw drive unit 22 is provided with a ball screw (not shown) inside, and has a holding member 22 a provided along the x-direction. The ball screw drive unit 22 has a drive portion 22b that rotates the ball screw. The drive unit 22b includes, for example, a servo motor or a stepping motor. With the rotation of the ball screw, the base 26a, that is, the moving unit 26 can move in the x-direction.

The ball screw drive unit 24 is provided with a ball screw (not shown) inside, and has a holding member 24 a provided along the y direction. The ball screw drive unit 24 has a drive portion 24b that rotates the ball screw. The drive unit 24b includes, for example, a servo motor or a stepping motor. With the rotation of the ball screw, the ball screw driving unit 22 and the moving unit 26 can move in the y direction. That is, the moving unit 26 can move along the x-direction and the y-direction.

The Cableveyor (registered trademark) 23 bends the unillustrated cable provided on the base 26a along with the movement of the moving unit 26 in the x direction. In addition, the Cableveyor (registered trademark) 25 bends the unillustrated cable provided on the base 26a along with the movement of the moving unit 26 in the y direction.

The plate-shaped portion 26c is provided on the upper end of the vertical movement unit 26b. Moreover, the pin 26d is provided in the plate-shaped part 26c. The vertical movement unit 26b moves the plate-like portion 26c and the pin 26d in the z direction. The pin 26d protrudes upward from the plate-like portion 26c, and when the bottom surface of the cassette 50 abuts on the plate-like portion 26c, the pin 26d is inserted into the hole 51g (refer to FIG. 9 ) provided in the bottom surface of the cassette 50 .

FIG. 7 is a diagram schematically showing a state in which the cassette 50 is conveyed by the moving unit 26 . The moving unit 26 is moved in the y direction (here, the -y direction) (arrow A in FIG. 7 ), the plate-like portion 26c and the pin 26d are arranged on the lower side (-z side) of the cassette 50, and the plate The shape part 26c and the pin 26d move upward (+z direction) (arrow B of FIG. 7). As a result, the cassette 50 is placed on the plate-like portion 26c. Then, when the moving unit 26 is moved in the −x direction (arrow C in FIG. 7 ), the cassette moving unit 20 will carry out the cassette 50 from the cassette storage unit 10 to the cassette conveying unit 30 .

The cassette conveying unit 30 mainly includes a ball screw drive unit 31 , a Cableveyor (registered trademark) 32 , and a moving unit 33 . The moving unit 33 mainly includes a base 33a, a vertical moving unit 33b, and a holding portion 33c.

The ball screw drive unit 31 is provided with a ball screw (not shown) inside, and has a holding member 31 a provided along the y direction. The ball screw drive unit 31 has a drive portion 31b that rotates the ball screw. The drive unit 31b includes, for example, a servo motor or a stepping motor. With the rotation of the ball screw, the moving unit 33 can move in the y direction. The Cableveyor (registered trademark) 32 bends the unillustrated cable provided on the base 33a along with the movement of the moving unit 33 in the y direction.

The base 33a is an L-shaped or T-shaped member having a portion along the horizontal direction and a portion along the vertical (vertical) direction. The vertical movement unit 33b and the holding portion 33c are provided on the base 33a.

8 and 9 are perspective views showing the outline of the cassette conveying unit 30 . Fig. 9 is a view of Fig. 8 viewed from the back side. In the base 33a, the plate-shaped placing portion 33d on which the cassette 50 is placed is extended along the horizontal direction (here, the x-direction). A slit 33e is provided along the longitudinal direction in the mounting part 33d.

The vertical movement unit 33b pushes the cassette 50 placed on the placement portion 33d in the upward direction (+z direction). As shown in FIG. 9, the vertical movement unit 33b has a rod-shaped push-up portion 33g that pushes up the cassette 50, and a drive mechanism 133h that connects the placement portion 33d and the base 33a. The drive mechanism 33h has, for example, a link mechanism. When the drive mechanism 33h moves left and right (x direction), the push-up portion 33g moves up and down (z direction).

The holding portion 33c is provided to protrude upward from the base 33a, and has an abutting portion 33f along the horizontal direction. 8 and 9 show a state in which the cassette 50 is not pulled up. When the cassette 50 is pulled up by the vertical moving unit 33b, the upper surface of the cassette 50 comes into contact with the contact portion 33f.

FIGS. 10 and 11 are diagrams showing a state in which the cassette 50 is transferred from the cassette moving unit 20 to the cassette conveying unit 30 . FIG. 10 shows a state immediately after the cassette 50 is placed on the cassette moving unit 20, and FIG. 11 shows a state where the push-up portion 33g pushes up the cassette 50. As shown in FIG. In FIGS. 10 and 11, only the main parts of the cassette moving unit 20 and the cassette conveying unit 30 are shown.

When the cassette 50 moves in the -x direction together with the cassette moving unit 20, the cassette 50 moves in the -x direction along the upper surface of the placement portion 33d. FIG. 10 shows a state in which the cassette 50 has finished moving in the −x direction and the cassette 50 is placed on the placing portion 33d.

After that, when the drive mechanism 33h pushes up the push-up portion 33g (refer to the arrow in FIG. 10 ), as shown in FIG. 11 , the push-up portion 33g comes into contact with the cassette 50 through the slit 33e, and the push-up portion 33g pushes the card. Cartridge 50 is pushed up.

When the push-up portion 33 g pushes up the cassette 50 , the pin 26 d is pulled out from the hole 51 g provided on the bottom surface of the cassette 50 . After the pin 26d is pulled out from the hole 51g, the cassette moving unit 20 is moved in the +x direction (see the arrow in FIG. 11 ). Thereby, the cassette 50 is transferred from the cassette moving unit 20 to the cassette conveying unit 30 .

Return to the description of FIG. 1 . After transferring the cassette 50 from the cassette moving unit 20 to the cassette conveying unit 30 , the Cableveyor (registered trademark) 32 moves the cassette 50 together with the moving unit 33 in the +y direction, and the cassette 50 is attached to the grinding head unit 40.

The polishing head unit 40 is disposed on the upper side of the stage 71 in the vertical direction, and can move along the x-direction and the y-direction. In addition, the polishing head unit 40 is provided with a z-axis unit 49 that moves the polishing head unit 40 in the z direction. In FIG. 1 , the grinding head unit 40 is disposed at the replacement position of the replacement cassette 50 .

FIG. 12 is a perspective view showing the outline of the cassette conveying unit 30 and the polishing head unit 40 . The position in the x-direction of the grinding head unit 40 in the replacement position is substantially the same as the position in the x-direction of the cassette 50 when the cassette 50 is transferred from the cassette moving unit 20 to the cassette conveying unit 30 .

The grinding head unit 40 mainly includes a base 41 , a rotating shaft 42 , a drive shaft 43 , a cassette fixing unit 44 , a grinding head 45 , a head driving unit 46 , and pins 47 and 48 . The rotating shaft 42 , the driving shaft 43 , the cassette fixing unit 44 , the grinding head 45 and the head driving unit 46 are provided on the base 41 . Moreover, the sensor 64 which comprises the 1st polishing tape detection part 63 is provided in the base 41. As shown in FIG.

The drive shaft 43 is connected to an actuator (not shown), and drives the reel 54 to rotate. An encoder for rotation detection is provided on the rotating shaft 42 . The rotating shaft 42 is inserted into the reel 53 (refer to FIG. 3 ), and the drive shaft 43 is inserted into the reel 54 (refer to FIG. 3 ).

The cassette fixing unit 44 fixes the cassette 50 to the base 41 in a state in which the rotating shaft 42 is inserted into the reel 53 and the drive shaft 43 is inserted into the reel 54 . The cassette fixing unit 44 has a rod-shaped portion 44 a abutting against the cassette 50 . The rod-shaped portion 44a is rod-shaped and protrudes in the −y direction. Here, the term "rod-shaped" refers to an elongated shape as a whole, regardless of the cross-sectional shape (for example, the cross-sectional shape includes a circular shape or a rectangular shape). The cassette fixing unit 44 moves the rod-shaped portion 44a in the up-down direction (z direction).

The polishing head 45 presses the back surface of the polishing tape T, and presses the polishing layer of the polishing tape T to the workpiece. The grinding head 45 is moved in the up-down direction by the head driving unit 46 .

The pins 47 and 48 are parts for positioning the cassette 50 when the cassette 50 is mounted on the grinding head unit 40 . The pin 48 has a small-diameter portion 48a inserted into a hole 51j (see FIGS. 3 , 9 , 10 , and 11 ) of the cassette 50 , and a pin body 48b having the small-diameter portion 48a provided at the front end thereof.

FIG. 13 is a perspective view showing a state in which the cassette 50 is attached to the grinding head unit 40 . When the moving unit 33 is moved in the +y direction with the polishing head 45 (not visible in FIG. 13 ) disposed at the retracted position, the rotating shaft 42 (not visible in FIG. 13 ) is inserted into the cassette provided The drive shaft 43 (not visible in FIG. 13 ) is inserted into the reel 54 (not visible in FIG. 13 ) of the reel 53 (not visible in FIG. 13 ) of the cassette 50 of the transport unit 30 . Moreover, the end surface (surface 51d, see FIG. 3 ) of the cassette 50 is in contact with the pin 47 and the front end of the pin body 48b, and the small diameter portion 48a is inserted into the hole 51j. In this state, when the cassette fixing unit 44 moves the rod-shaped portion 44a in the downward direction (-z direction), the rod-shaped portion 44a abuts on the recessed portion 51h of the cassette 50 and presses the cassette 50 downward. Thereby, the cassette 50 is installed in the polishing head unit 40 .

FIGS. 14 and 15 are schematic perspective views showing the polishing head unit 40 and the cassette 50 when the cassette 50 is attached to the polishing head unit 40 . In FIG. 14, the grinding|polishing head 45 is located in the retracted position. When the polishing head 45 moves downward, as shown in FIG. 15 , the polishing head 45 moves to the polishing position where the polishing layer of the polishing tape T is pressed against the workpiece.

When the grinding head 45 is located at the grinding position, the grinding tape T unrolled from the reel 53 is guided by the guide roller 55, folded back by the grinding head 45 and pressed against the workpiece. In this state, the reel 54 is rotated to move the polishing tape T, thereby polishing the protruding defects of the workpiece. After grinding, the grinding tape T is guided by the guide roller 56 and wound around the reel 54 .

The first polishing tape detection part 63 has a sensor 64 provided in the polishing head unit, and a reflector 57 provided in the inside of the cassette 50 . The sensor 64 has a light-emitting element and a light-receiving element. The light emitted from the sensor 64 is reflected on the reflection plate 57 toward the light receiving element. The reflector 57 is disposed adjacent to the reel 53 , and the first abrasive tape detection unit 63 detects the remaining amount of the abrasive tape T wound on the reel 53 . As shown in FIGS. 14 and 15 , when the remaining amount of the polishing tape T wound on the reel 53 is below a certain amount, the light emitted from the sensor 64 is reflected by the reflector 57 and received by the sensor 64 .

FIG. 16 is a block diagram showing the electrical configuration of the polishing apparatus 1 . The polishing apparatus 1 mainly includes a control unit 101 , a memory unit 102 , an input unit 103 , an output unit 104 , and a communication unit 105 .

The control unit 101 is a program control device such as a CPU (Central Processing Unit) of an arithmetic device, and operates according to a program stored in the memory unit 102 .

In addition, the control unit 101, the cassette storage unit 10, the cassette moving unit 20, the cassette conveying unit 30, the polishing head unit 40, the second polishing tape detection unit 61, the first polishing tape detection unit 63, and the stage unit 70 and other connections.

The control unit 101 includes a drive control unit 101a and a head control unit 101b as main functional units. The drive control unit 101 a controls the cassette storage unit 10 , the cassette moving unit 20 , the cassette transport unit 30 and the polishing head unit 40 , and transports the cassette 50 from the cassette storage unit 10 to the polishing head unit 40 to transport the cassette. 50 is attached to the grinding head unit 40 . The head control unit 101b controls the polishing head unit 40 to perform polishing processing of the workpiece. The processing performed by each functional unit of the control unit 101 will be described in detail later.

The memory unit 102 is a nonvolatile memory, a volatile memory, or the like, holds programs and the like executed by the control unit 101 , and operates as a working memory of the control unit 101 . The input unit 103 includes an input device such as a keyboard or a mouse. The output unit 104 is a display or the like. The communication unit 105 obtains data from other devices (eg, inspection devices) via a network or a storage medium, and sends the data to the control unit 101 , and simultaneously transmits data generated by the control unit 101 to other devices via a network or the like.

FIG. 17 is a block diagram showing the electrical configuration of the cassette storage unit 10 . The cassette storage unit 10 mainly has a sensor 109 .

FIG. 18 is a block diagram showing the electrical configuration of the cassette moving unit 20 . The cassette moving unit 20 mainly includes: a lift cylinder 201 that moves the plate-like portion 26c and the pin 26d in the up-down direction; an X driving portion 202 that drives the ball screw driving unit 22 to move the moving unit 26 in the x-direction; Y The driving part 203 , which drives the ball screw driving unit 24 to move the moving unit 26 along the y direction; and the sensor 204 . In addition, in the present embodiment, the plate-like portion 26c and the pin 26d are moved in the vertical direction using the lift cylinder 201, but various actuators other than the lift cylinder 201 may be used to move the plate-like portion 26c and the pin 26d in the vertical direction. direction move.

FIG. 19 is a block diagram showing the electrical configuration of the cassette conveying unit 30 . The cassette conveying unit 30 mainly includes: a cassette elevating cylinder 301 (corresponding to the elevating cylinder of the present invention), which moves the push-up portion 33g up and down; y-direction movement; and sensor 303. In addition, in the present embodiment, the push-up portion 33g is moved in the up-down direction using the cassette lift cylinder 301, but various actuators other than the lift cylinder 201 may be used to move the plate-shaped portion 26c and the pin 26d in the up-down direction. move.

FIG. 20 is a block diagram showing the electrical configuration of the polishing head unit 40 . The grinding head unit 40 mainly includes: a cassette fixing cylinder 401 (corresponding to the actuator of the present invention), which is included in the cassette fixing unit 44 so that the rod-shaped portion 44 a is in contact with the cassette 50 at the position where the rod-shaped portion 44 a abuts. The head lift cylinder 402, which is included in the head driving unit 46, moves the grinding head 45 up and down between the retracted position and the grinding position; the grinding belt driving part 403 makes The driving shaft 43 rotates to move the grinding belt T; the height measuring unit 404 measures the height of the protruding defect of the workpiece; the driving part 405 makes the grinding head unit 40 move along the driving shaft 82; The z-axis unit 49 moves the grinding head unit 40 in the z-direction; and the sensor 407 . In addition, in this embodiment, although the rod-shaped part 44a was moved in the up-down direction using a cylinder, the rod-shaped part 44a may be moved in an up-down direction using various actuators other than a cylinder.

FIG. 21 is a block diagram showing the electrical configuration of the stage unit 70 . The stage unit 70 mainly includes an X drive part 701 for moving the bridge 80 along a drive shaft 72 extending in the x direction, and a sensor 704 .

Furthermore, the sensors 109, 204, 303, 407, 704 include a plurality of sensors.

Hereinafter, the processing performed by the control unit 101 will be described. The feature of this embodiment is that the cassette 50 is automatically replaced. Therefore, first, the process of attaching the cassette 50 provided in the cassette storage unit 10 to the polishing head unit 40 will be described.

FIG. 22 is a flowchart showing the flow of the mounting process of the cassette 50 by the control unit 101 . At this time, the polishing head unit 40 is arranged at the replacement position of the replacement cassette 50 (refer to FIG. 1 ). First, the drive control unit 101 a determines which slot of the cassette storage unit 10 the cassette 50 is arranged in based on the signal from the magnetic attraction 17 , and selects the slot from which the cassette 50 is arranged to be taken out from among the slots arranged with the cassette 50 . (step S10).

Next, the drive control unit 101a moves the moving unit 26 (see FIGS. 6 and 7 ) in the y direction via the Y drive unit 203, and arranges the moving unit 26 under the slot selected in step S10 (step S11, see FIG. 7 arrow A). At this time, the driving control unit 101a detects the position of the moving unit 26 in the x-direction based on the outputs of the sensors 109 and 204 .

Then, the drive control part 101a moves the plate-shaped part 26c and the pin 26d upward by the lift cylinder 201, and inserts the pin 26d into the hole 51g (step S12, refer to the arrow B of FIG. 7). Thereby, the cassette 50 can move together with the moving unit 26 . At this time, the driving control unit 101a detects the position of the moving unit 26 in the z direction based on the output of the sensor 204 .

Next, the drive control unit 101a moves the moving unit 26 in the -x direction via the X drive unit 202 to place the cassette 50 on the placing portion 33d of the cassette conveying unit 30 (step S13, see arrows C and FIG. 7 ). Figure 8, 9). At this time, the drive control unit 101 a detects the position of the moving unit 26 , that is, the x-direction of the cassette 50 based on the output of the sensor 303 .

Then, the drive control part 101a moves the push-up part 33g upward by the cassette lift cylinder 301, pushes up the cassette 50 to fix the cassette 50 to the moving unit 33, and pulls out the pin 26d from the hole 51g. At this time, the drive control unit 101a detects the position of the cassette 50 in the z direction based on the output of the sensor 303 . In addition, after the pin 26d is pulled out from the hole 51g, the drive control unit 101a moves the moving unit 26 in the +x direction by the X drive unit 202 to retract the moving unit 26 to the lower side of the cassette storage unit 10 (step S14). , refer to Figures 10, 11). Thereby, the cassette 50 is transferred from the cassette moving unit 20 to the cassette conveying unit 30 . Furthermore, the position where the cassette 50 is delivered from the cassette moving unit 20 to the cassette conveying unit 30 is taken as the delivery position.

Next, the drive control part 101a moves the moving unit 33 in the +y direction by the drive part 302, and makes the cassette 50 provided in the moving unit 33 abut on the polishing head unit 40 (step S15, see FIGS. 12, 13). At this time, the rotating shaft 42 is inserted into the reel 53 and the drive shaft 43 is inserted into the reel 54 .

Next, the drive control unit 101a moves the rod-shaped portion 44a downward by the cartridge fixing cylinder 401, and the rod-shaped portion 44a presses the cartridge 50 downward, thereby attaching the cartridge 50 to the polishing head unit 40 (step S16). , refer to Figures 13, 14). At this time, the polishing head 45 is arranged at the retracted position on the upper side (+z side).

Then, the drive control part 101a moves the push-up part 33g downward by the cassette lift cylinder 301, and separates the cassette 50 from the moving unit 33. Then, the drive control unit 101a moves the moving unit 33 in a direction away from the polishing head unit 40 (-y direction) via the driving unit 302 to separate the cassette 50 from the polishing head unit 40 (step S17). Thereby, the mounting process of the cassette 50 is completed.

After the cassette 50 is attached to the polishing head unit 40 , the control unit 101 performs a repairing step of pressing the polishing tape T against the protruding defects to grind the protruding defects. FIG. 23 is a flowchart showing the flow of the processing of the repair step performed by the control unit 101 .

First, the head control unit 101 b moves the stage 71 (see FIG. 1 ) by the X driving unit 701 , and moves the polishing head unit 40 along the drive shaft 82 by the driving unit 405 , so that the polishing head unit 40 is removed from the cassette 50 The replacement position is moved to the position where the repair step is performed (step S20 ). Then, the head control unit 101b places the workpiece on the stage (step S21). For example, a workpiece is loaded onto a stage by a loader (not shown), a lift pin (not shown) provided on the stage is raised, the workpiece is placed on the upper side of the lift pin, and the lift pin is moved after the loader retreats. By descending, the workpiece is placed on the stage.

Furthermore, the sequence of step S20 and step S21 may be reversed. In addition, step S20 is not required when the cassette mounting process is not performed before the polishing step.

Next, the head control part 101b moves the stage 71 by the X drive part 701 and the Y drive part 702, and arrange|positions a protrusion defect below the polishing head 45 (step S22). At this time, the head control unit 101b detects the positions of the stage in the x-direction, y-direction, and z-direction based on the output of the sensor 704 . Further, the head control unit 101b moves the stage based on the defect information. Furthermore, the defect information is information related to the defect position of the workpiece W, which can be obtained through the communication unit 105 and stored in the memory unit 102 .

Next, the head control part 101b measures the height of the protrusion defect by the height measurement unit 404 (step S23). Then, the head control unit 101b moves the polishing head unit 40 in the −z direction by the z-axis unit 49 based on the height measured in step S23 (step S24 , see FIG. 15 ).

Next, the head control unit 101b moves the polishing head 45 from the retracted position to the polishing position by the head lift cylinder 402, and presses the protrusion defect with the polishing tape T. Then, while the polishing belt T presses the protrusion defect, the polishing belt T is driven by the polishing belt driving part 403 to rotate the drive shaft 43 to polish the protrusion defect (step S25 ). At this time, the head control unit 101b determines the polishing amount based on the height measured in step S23, and polishes the protrusion defects with the determined polishing amount. The head control unit 101b moves the polishing head 45 from the polishing position to the retracted position by the head lift cylinder 402 after polishing with a predetermined polishing amount.

Then, the head control unit 101b measures the height of the protrusion defect using the height measuring unit 404, and determines whether or not the polishing process for the protrusion defect is completed (step S26). In the case where the polishing process of the protrusion defect is not completed (NO in step S26 ), the head control unit 101 b returns the process to step S25 .

When the polishing process of the protruding defect is completed (YES in step S26 ), the head control unit 101 b moves the polishing head unit 40 in the +z direction via the z-axis unit 49 (step S27 ).

The head control unit 101b judges, based on the defect information, whether or not polishing has been completed for all the protruding defects of the workpiece (step S28). In the case where the polishing has not been completed for all the protruding defects (NO in step S28 ), the head control unit 101 b returns the process to step S22 . That is, the head control unit 101b moves the stage so as to arrange the projection defect to be polished next under the polishing head 45 based on the defect information. When grinding has been completed for all protruding defects (YES in step S28 ), the head control unit 101b uses a loader (not shown) to unload the workpiece from the stage (step S29 ), and ends a series of processes.

When the polishing process is performed multiple times using the polishing tape T, the amount of the polishing tape T before use is wound around the reel 53 decreases. After the correction step is completed, the head control unit 101b determines whether or not the remaining amount of the polishing tape T wound on the reel 53 is equal to or less than a predetermined amount based on the signal from the first polishing tape detection unit 63 . When the remaining amount of the polishing tape T wound on the reel 53 is less than or equal to a predetermined amount, the control unit 101 removes the cassette 50 from the polishing head unit 40 and transfers it to the cassette storage unit 10 .

FIG. 24 is a flowchart showing the flow of the disassembly process of the cassette 50 by the control unit 101 .

First, the head control unit 101b moves the stage by the X driving unit 701, the Y driving unit 702, and the Z driving unit 703, and moves the polishing head unit 40 along the drive shaft 82 by the driving unit 405, thereby causing the polishing head unit to move. The 40 is moved to the replacement position of the cassette 50 (refer to FIG. 1 ) (step S30 ).

Next, the head control unit 101b moves the moving unit 33 in the +y direction via the driving unit 302 so that the moving unit 33 abuts on the cassette 50 provided in the polishing head unit 40 . Moreover, the head control part 101b moves the rod-shaped part 44a upward by the cassette fixing cylinder 401, and isolate|separates the rod-shaped part 44a and the cassette 50. As shown in FIG. Then, the drive control unit 101a moves the push-up portion 33g upward by the cassette lift cylinder 301, pushes up the cassette 50 so that the upper surface of the cassette 50 abuts on the contact portion 33f, and fixes the cassette 50 to the moving unit 33 (step S31 , see FIG. 13 ). At this time, the drive control unit 101a detects the position of the cassette 50 in the z direction based on the output of the sensor 303 . Thereby, the cassette 50 can be detached from the polishing head unit 40 .

Next, the drive control unit 101a moves the moving unit 33 in the -y direction via the drive unit 302, detaches the cassette 50 from the polishing head unit 40, and simultaneously moves the moving unit 33 (ie, the cassette 50) to the delivery position ( Step S32, refer to FIG. 12). At this time, the drive control part 101a detects the position of the moving unit 33 in the y direction based on the output of the sensor 303 .

Then, the drive control unit 101a moves the moving unit 26 in the -x direction via the X drive unit 202 . Then, the drive control part 101a moves the push-up part 33g downward by the cassette lift cylinder 301, and inserts the pin 26d into the hole 51g (step S33, refer FIG. 10). At this time, the drive control unit 101a detects the position of the cassette 50 in the z direction based on the output of the sensor 303 . Thereby, the cassette 50 is transferred from the cassette conveying unit 30 to the cassette moving unit 20 .

Then, based on the signal from the magnetic attraction 17, the drive control unit 101a determines which slot of the cassette storage unit 10 to place the cassette 50, and selects the insertion slot of the recovery cassette 50 from the slots where the cassette 50 is not arranged. slot (step S34).

Next, the driving control unit 101a moves the moving unit 26 in the +x direction by the X driving unit 202, and moves the moving unit 26 in the y direction by the Y driving unit 203, so that the moving unit 26 is moved to the selected step S34. the lower side of the slot (step S35 , see FIG. 7 ). At this time, the drive control part 101a detects the position of the moving unit 26 in the x-direction and the y-direction based on the outputs of the sensors 109 and 204 . Moreover, the drive control part 101 a moves the moving unit 26 along the x direction based on the signal from the magnetic attraction 17 until the cassette 50 is arranged inside the cassette storage unit 10 . Thereby, the cassette 50 is carried into the cassette storage unit 10 .

When the moving unit 26 is inserted into the cassette storage unit 10 from any one of the holes 11a, 11b, 11c, 11d, the bearing 59 rotates on the rail 15, so when the cassette 50 is inserted into the cassette storage unit 10 less load. Moreover, the positioning of the y-direction of the cassette 50 is performed by the front end of the ball roller 16 being in contact with the cassette 50 .

Then, the drive control part 101a determines whether the cassette 50 has been arranged inside the slot of the cassette storage unit 10 based on the signal from the magnetic attraction 17 . After the cassette 50 is arranged in the slot, the lift cylinder 201 moves the plate-shaped portion 26c and the pin 26d downward, and the pin 26d is pulled out from the hole 51g. At this time, the drive control part 101a detects the position of the moving unit 26 in the z direction based on the output of the sensor 204 . Then, the magnetic attraction 17 provided on the frame 12 attracts the cassette 50 to fix the cassette 50 to the cassette storage unit 10 (step S36 , refer to FIGS. 5 and 6 ).

Thereby, the disassembly process of the cassette 50 is completed. Then, the mounting process of the cassette 50 shown in FIG. 22 is performed. The cassette 50 is automatically replaced by the disassembly process and the installation process of the cassette 50 .

According to this embodiment, by using the cassette moving unit 20 and the cassette conveying unit 30 to automatically convey the cassette 50 between the cassette storage unit 10 and the polishing head unit 40, the polishing tape T can be automatically exchanged. Therefore, there is no situation where there is no polishing belt T, and the polishing apparatus 1 can be continuously and automatically operated.

Moreover, according to the present embodiment, in a state where the polishing tape T is set in the cassette 50 and the reels 53 and 54 are inserted into the rotating shaft 42 and the driving shaft 43, respectively, the rod-shaped portion 44 a is fixed by the cassette fixing cylinder 401 . The rod-shaped portion 44 a presses the cassette 50 by pressing down, whereby the cassette 50 can be automatically fixed to the grinding head unit 40 .

When the cassette 50 is fixed to the polishing head unit 40, the polishing head 45 needs to be pre-arranged at the retracted position. However, for example, when a toggle clamp is used like the conventional manual replacement, the fixing of the cassette 50 and the lowering of the grinding head 45 are performed simultaneously, and the automatic replacement of the cassette 50 cannot be handled.

On the other hand, by disposing the cassette fixing cylinder 401 and the head lift cylinder 402 separately as in the present embodiment, only the cassette fixing cylinder 401 can be moved when the cassette 50 is replaced, and the cassette 50 can be automatically replaced .

Moreover, according to this embodiment, the cassette 50 is arranged so that the largest surface of the cassette 50 is along the x direction, the cassette moving unit 20 is used for conveying in the x direction, and the cassette conveying unit 30 is used for conveying in the y direction. Thereby, the cassette 50 can be conveyed with high precision without rotating the cassette 50 .

Furthermore, according to the present embodiment, by moving the moving unit 26 in the x-direction in a state where the pin 26d is inserted into the hole 51g provided in the bottom surface of the cassette 50, the cassette 50 can be conveyed without shifting during conveyance. state of failure.

Moreover, according to this embodiment, since the cassette 50 is made into a rectangular parallelepiped shape, automatic conveyance of the cassette 50 becomes easy. In addition, the frame 51 is constituted by the plate-like portion 51a and the box-like portion 51b, and these are attached by the mounting member 52 constituted by the pin 52a and the positioning piece 52b, so that the cassette 50 can be strengthened and the plate-like portion 51a can be raised. The strength of the engagement with the box-shaped portion 51b prevents damage to the cassette 50 being automatically conveyed. Moreover, by covering the box-shaped part 51b with the plate-shaped part 51a by the alignment groove 51c, the plate-shaped part 51a and the box-shaped part 51b can be assembled with high precision.

Furthermore, according to the present embodiment, the bearing 59 is provided on the surfaces 51d and 51f, respectively, and the bearing 59 is rotated on the rail 15 to move the cassette 50, so that the load when the cassette 50 is loaded into the cassette storage unit 10 can be reduced. . Moreover, since the front end of the ball roller 16 is in contact with the cassette 50 when the cassette 50 is carried in, the y-direction positioning of the cassette 50 can be performed.

Furthermore, according to the present embodiment, since the reflector 57 is disposed adjacent to the reel 53, the light emitted from the sensor 64 is reflected on the reflector 57 toward the light receiving element, so that the sensor 64 can receive light based on whether the sensor 64 receives light or not. Then, the remaining amount of the polishing tape T wound around the reel 53 is detected. Thereby, as long as the cassette 50 is replaced when the remaining amount of the polishing tape T becomes less than or equal to the predetermined amount, there is no situation where the polishing tape T is absent, and the polishing process can be continuously performed. In addition, since the sensor 64 has a light-emitting element and a light-receiving element, it is only necessary to provide a reflector in the cassette 50, and the light-receiving element does not need to be provided, so that space saving can be achieved.

In addition, according to the present embodiment, by reflecting the light irradiated from the sensor 62 on the reflector 58 , it is possible to detect whether there is enough grinding before use in the cassette 50 based on whether the sensor 62 receives the light or not. with T. Thereby, the unused cassettes 50 can be determined from among the cassettes 50 provided in the cassette storage unit 10 .

Furthermore, in this embodiment, the cassette storage unit 10 has four slots, but the number of slots of the cassette storage unit 10 is not limited to this. The cassette storage unit 10 may have a total of two slots so that at least one cassette 50 before use and one cassette 50 after use are respectively loaded.

In addition, in the present embodiment, in the ball screw drive units 22 and 24, the moving unit 26 is moved by a servo motor or a stepping motor, and in the ball screw drive unit 31, the moving unit 33 is moved by a servo motor or a stepping motor. The method of moving the moving units 26 and 33 is not limited to this. For example, the moving units 26 and 33 may be moved separately by belt drive or linear motor drive.

Moreover, in this embodiment, the cassette moving unit 20 conveys the cassette 50 along the x direction, and the cassette conveying unit 30 conveys the cassette 50 along the y direction, but the conveyance direction of the cassette 50 is not limited to this. For example, the cassette storage unit 10 may be installed below the cassette conveyance unit 30, and after the conveyance unit conveys the cassette 50 in the z direction, the cassette 50 may be conveyed in the y direction. However, in order to convey the cassette 50 with high precision, it is preferable to convey the cassette 50 along the horizontal direction (x direction and y direction).

The embodiments of the present invention have been described in detail above with reference to the drawings, but the specific configuration is not limited to the embodiments, and design changes and the like are included within the scope of the gist of the present invention.

In addition, in the present invention, the term "substantially" includes not only the exact same situation, but also the concept of error or deformation to the extent that the identity is not lost. For example, the so-called "substantially parallel" and "substantially orthogonal" are not limited to those strictly parallel and orthogonal. Moreover, for example, when only the case of parallel, orthogonal, etc. is described, not only the case of strict parallel, orthogonal, etc., but also the case of substantially parallel, substantially orthogonal, etc. are included. In addition, in the present invention, the term "nearby", for example, when it is in the vicinity of A, means a concept that is close to A and includes or does not include A.

1: Grinding device 10: Cassette storage unit 11,12: Frame 11a, 11b, 11c, 11d, 12a, 12b, 12c, 12d: holes 13: Bottom panel 13a, 13b, 13c, 13d: slits 14: Link Board 15: Orbit 16: Ball Roller 17: Magnetic suction 18: Stop Bolt 20: Cassette moving unit 21: Desk 21a, 21b, 21c, 21d: slits 22, 24: Ball screw drive unit 22a, 24a: Retaining members 22b, 24b: drive part 23,25: Cableveyor (registered trademark) 26: Mobile Unit 26a: Pedestal 26b: Move unit up and down 26c: Plate part 26d: pin 30: Cassette transport unit 31: Ball screw drive unit 31a: Retention member 31b: drive part 32: Cableveyor (registered trademark) 33: Mobile Unit 33a: Pedestal 33b: Move unit up and down 33c: Retention Department 33d: Loading part 33e: Slit 33f: abutment 33g: push up 33h: drive mechanism 40: Grinding head unit 41: Pedestal 42: Rotary axis 43: Drive shaft 44: cassette fixing unit 44a: Rod 45: Grinding head 46: Head drive unit 47, 48: Pins 48a: Small diameter section 48b: pin body 49: z-axis unit 50: cassette 51: Frame 51a: Plate part 51b: Box-shaped part 51c: Slot 51d, 51f: face 51e: Bottom plate 51g: hole 51h: Recess 51j: hole 52: Installation components 52a: pin 52b: Positioning piece 52c: Button 53,54: Reel 55,56: Guide rollers 57,58: Reflector 59: Bearings 61: The second grinding belt detection part 62: Sensor 63: The first grinding belt detection part 64: Sensor 70: Stage unit 71: Carrier 101: Control Department 101a: Drive Control Department 101b: Head Control 102: Memory Department 103: Input section 104: Output part 105: Communications Department 109: Sensor 201: Lifting Cylinder 202: X Drive Department 203: Y Drive Department 204: Sensor 301: Cassette lift cylinder 302: Drive Department 303: Sensor 401: Cassette fixing cylinder 402: Head lift cylinder 403: Grinding belt drive 404: Height measurement unit 405: Drive Department 406:z drive department 407: Sensor 701: X Drive Department 704: Sensor

1 is a perspective view showing the outline of the polishing apparatus 1 according to the first embodiment. FIG. 2 is a perspective view showing the outline of the polishing tape automatic exchange mechanism of the polishing apparatus 1 . FIG. 3 is an exploded perspective view showing the outline of the cassette 50 . FIG. 4 is a perspective view showing the outline of the cassette storage unit 10 . FIG. 5 is a perspective view showing the outline of the cassette storage unit 10 . FIG. 6 is a perspective view showing the outline of the cassette moving unit 20 . FIG. 7 is a diagram schematically showing a state in which the cassette 50 is conveyed by the moving unit 26 . FIG. 8 is a perspective view showing the outline of the cassette conveying unit 30 . FIG. 9 is a perspective view showing the outline of the cassette conveying unit 30 . FIG. 10 is a diagram showing a state in which the cassette 50 is transferred from the cassette moving unit 20 to the cassette conveying unit 30 . FIG. 11 is a diagram showing a state in which the cassette 50 is transferred from the cassette moving unit 20 to the cassette conveying unit 30 . 12 is a perspective view showing the outline of the cassette conveying unit 30 and the polishing head unit 40 . FIG. 13 is a perspective view showing a state in which the cassette 50 is attached to the polishing head unit 40 . 14 is a perspective view showing the outline of the polishing head unit 40 and the cassette 50 when the cassette 50 is attached to the polishing head unit 40 . 15 is a perspective view showing the outline of the polishing head unit 40 and the cassette 50 when the cassette 50 is attached to the polishing head unit 40 . FIG. 16 is a block diagram showing the electrical configuration of the polishing apparatus 1 . FIG. 17 is a block diagram showing the electrical configuration of the cassette storage unit 10 . FIG. 18 is a block diagram showing the electrical configuration of the cassette moving unit 20 . FIG. 19 is a block diagram showing the electrical configuration of the cassette conveying unit 30 . FIG. 20 is a block diagram showing the electrical configuration of the polishing head unit 40 . FIG. 21 is a block diagram showing the electrical configuration of the stage unit 70 . FIG. 22 is a flowchart showing the flow of the mounting process of the cassette 50 by the control unit 101 . FIG. 23 is a flowchart showing the flow of the processing of the repair step performed by the control unit 101 . FIG. 24 is a flowchart showing the flow of the disassembly process of the cassette 50 by the control unit 101 .

1: Grinding device

10: Cassette storage unit

20: Cassette moving unit

30: Cassette transport unit

40: Grinding head unit

49: z-axis unit

50: cassette

70: Stage unit

71: Carrier

72,82: Drive shaft

80: Bridge frame

81: Beam

90: Optical Microscopy

Claims (11)

A grinding device, which uses a grinding belt to grind the protruding defects of a workpiece, is characterized in that it has: a stage, which mounts the above-mentioned workpiece; a grinding head unit, which is arranged on the upper side in the vertical direction of the above-mentioned carrier; a cassette, the inside of which is provided with the above-mentioned grinding belt, and is disposed on the above-mentioned grinding head unit in a detachable manner; a cassette holder, which is provided with the above-mentioned cassette; a conveying part that conveys the cassette between the grinding head unit and the cassette holding part; and a fixing part provided on the grinding head unit and fixing the cassette to the grinding head unit, and having a rod-shaped part, and a position where the rod-shaped part abuts on the cartridge and a position where it does not contact actuators that move between; The cassette has: a first reel on which the polishing tape before use is wound; a second reel on which the polishing tape after use is wound; and a frame on which the first reel and the above-mentioned polishing tape are provided. 2nd reel; The above-mentioned grinding head unit has: a first drive shaft inserted into the first reel; and a second drive shaft inserted into the second reel, The fixing portion presses the cassette with the rod-shaped portion to fix the cassette in a state in which the first drive shaft is inserted into the first reel and the second drive shaft is inserted into the second reel. in the above grinding head unit. The grinding device of claim 1, wherein, The said conveying part has a 1st axis extending along a first direction included in the horizontal direction; and a second axis extending along a second direction included in the horizontal direction and substantially orthogonal to the first direction ; The above-mentioned cassette is in the shape of a rectangular parallelepiped, and is disposed inside the above-mentioned cassette holding portion with the largest surface along the above-mentioned first direction; The said conveyance part has: the 1st conveyance part which moves the said cassette between the said cassette holding part and the delivery position along the said 1st axis; and the 2nd conveyance part which moves the said cassette along the said 2nd The shaft moves between the above-mentioned transfer position and the above-mentioned grinding head unit. The grinding device of claim 2, wherein, A hole is arranged on the bottom surface of the above-mentioned cassette; The first conveying portion has a pin protruding upward, and the pin can move along the first axis in a state of being inserted into the hole; The said 2nd conveyance part has: the mounting part which mounts the said cassette; the vertical movement unit which pushes the said cassette mounted on the said mounting part in the upward direction; Keep the upper surface of the above cassette while pushing up; The up-down moving unit has: a push-up portion abutting on the cassette; and a lift actuator for moving the push-up portion up and down; When the lift-up actuator pushes up the push-up portion, the cassette is held by the push-up portion and the holding portion, and the pin is pulled out from the hole. As the grinding device of any one of claims 1 to 3, it has: The first grinding tape detection part has a first sensor disposed in the above-mentioned grinding head unit, and a first reflecting plate disposed in the inside of the above-mentioned cassette; The first sensor has a light-emitting element and a light-receiving element; The said 1st reflection plate is provided adjacent to the said 1st reel, and reflects the light emitted from the said 1st sensor to the said light receiving element. The grinding device of any one of claims 1 to 4, comprising: a second abrasive tape detection part, which has a second sensor disposed in the cassette holding part, and a second reflector disposed inside the cassette; The second sensor has a light-emitting element and a light-receiving element; The second reflection plate reflects the light emitted from the second sensor toward the second sensor. The grinding device of any one of claims 1 to 5, wherein, A plurality of rotating bodies whose outer peripheral surfaces are circular are respectively arranged on the outer sides of the two opposite surfaces of the above-mentioned cassette; The said cassette holding|maintenance part has the rail which the said rotary body contacts. A grinding method is characterized in that comprising: The step of moving the first conveying part upward, and inserting the pins provided in the first conveying part into the bottom surface of the cassette provided in the cassette holding part; the step of moving the first conveying part along a first axis extending in the first direction included in the horizontal direction, and placing the bottom surface of the cassette on the placing part of the second conveying part; Steps of pushing up the cassette by the contact part of the second conveying part, holding the cassette by the contact part and the holding part provided in the second conveying part, and extracting the pin from the hole ; The step of moving the second conveying portion along a second axis extending in a second direction included in the horizontal direction and substantially perpendicular to the first direction, and pressing the cassette against the polishing head unit; The step of moving the cylinder provided in the above-mentioned grinding head unit, pressing the above-mentioned cassette with the rod-shaped part of the above-mentioned cylinder, and fixing the above-mentioned cassette to the above-mentioned grinding head unit; The step of moving the abutting portion downward after fixing the cassette on the grinding head unit; and The step of moving the second conveying part along the second axis in a direction away from the polishing head unit. A cassette, which is provided with a grinding belt for grinding the protruding defects of the workpiece, and is arranged on a grinding head unit in a detachable manner, and the grinding head unit is arranged on the upper side of the vertical direction of the platform on which the workpiece is placed , which is characterized by: A frame, which is a cuboid-shaped frame with a cavity inside, and has a rectangular-shaped plate-shaped member, that is, a plate-shaped portion, and a box-shaped box-shaped portion detachably disposed on the plate-shaped portion; A hole is provided on the bottom surface of the frame. As in the cassette of claim 8, wherein, The frame has pins arranged on the plate-like portion and a positioning member arranged on the box-like portion; The plate-shaped portion is formed with grooves on both sides; The box-shaped portion is provided on the plate-shaped portion by aligning the grooves, covering the box-shaped portion with the plate-shaped portion, and fixing the box-shaped portion to the pin inside the positioning member. The cassette of claim 8 or 9, wherein, The inside of the above-mentioned frame is provided with: a first reel, which winds the above-mentioned polishing tape before use; a second reel, which winds the above-mentioned grinding tape after use; and a reflector; The said reflector is installed adjacent to the said 1st reel. The cassette according to any one of Claims 8 to 10, wherein a plurality of rotating bodies whose outer peripheral surfaces are circular are respectively provided on the outer sides of the surfaces of the plate-shaped portion and the box-shaped portion facing the plate-shaped portion. .

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