JPH11220005A - Wafer processing system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the throughput and suppress the production of defective wafers. SOLUTION: A wafer processing system which has two rows of etching sections 30 etches a film formed on the surface of a wafer 9. A film-thickness measuring section 70 is provided above an indexer section 10. The film-thickness measuring section 70 measures the thicknesses of the wafer before and after the etching during transfer of the wafer 9 by a transfer robot 11 inside the indexer section 10. This can ensure fast measurement of the amount of etching for each etching, which results in improvement of the throughput and minimization of the production of defective wafers.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for changing the thickness of a film formed on the surface of a semiconductor substrate for manufacturing a semiconductor device or a glass substrate for manufacturing a liquid crystal panel (hereinafter, collectively referred to as a "substrate"). The present invention relates to a substrate processing apparatus that performs a process for causing a substrate to be processed.

[0002]

2. Description of the Related Art Various processes are performed on a substrate to form a pattern or the like. Among these processes, there is a process for changing the thickness of a film formed on a substrate, such as an etching process. However, in recent years, the demand for miniaturization of a pattern on a substrate has been increased, and in order to form such a fine pattern, it is indispensable to manage the amount of change in film thickness in a process of changing the film thickness.

Therefore, for example, in the case of performing an etching process, an operator measures the thickness of the substrate film using a film thickness gauge separately installed before putting the substrate into the substrate processing apparatus. The substrate is transported again to the film thickness meter to measure the thickness of the substrate film. Then, the amount of etching on the substrate is determined from the difference in film thickness before and after the processing,
If the etching amount is not an appropriate value, an operation of adjusting the processing conditions is performed.

[0004]

In the above-described management of the etching amount, that is, the film thickness change amount, it is necessary for an operator to transport a substrate to be processed to a separately provided film thickness meter, and it is necessary to carry out the measurement. The operation of the substrate processing apparatus needs to be stopped because it is necessary to insert or remove a new substrate or dummy substrate.

In order to prevent a decrease in throughput due to the stoppage of the operation, the inspection of the amount of change in film thickness is performed only several times a day. Therefore, if an abnormality is found in the inspection of the film thickness change amount, it is necessary to spend time to determine which one of the many substrates from the previous inspection to the current inspection has become a defective substrate. Need to confirm.

Further, in order to properly maintain the amount of change in film thickness, it is necessary to change the condition setting of the substrate processing apparatus depending on the film thickness and film quality of the film formed on the surface of the substrate. Since the film thickness change amount cannot be inspected frequently, there is a limitation that the film thickness of the substrate to be processed between one inspection and the next inspection must be constant. As a result, if substrates having different film thicknesses or the like are erroneously processed, there arises a problem that all substrates of that type become defective substrates.

Accordingly, the present invention provides a substrate processing apparatus capable of solving the above-described various problems, that is, capable of appropriately managing the change in the thickness of a film formed on the surface of a substrate. It is intended to provide.

[0008]

According to a first aspect of the present invention, there is provided a substrate processing apparatus for performing a predetermined process on a substrate, comprising: transport means for transporting the substrate along a transport path oriented in a predetermined direction; A plurality of processing units that include a film thickness change processing unit that changes the thickness of a film formed on the surface of the substrate using a processing liquid, and are disposed along both sides of the transport path; Film thickness measuring means for measuring the thickness of the film before and after processing on the transport path, wherein the transport means transfers the substrate to the plurality of processing units.

According to a second aspect of the present invention, in the substrate processing apparatus according to the first aspect, the film thickness change processing unit performs an etching process for changing a thickness of an oxide film formed on a surface of the substrate.

According to a third aspect of the present invention, there is provided the substrate processing apparatus according to the first or second aspect, wherein the thickness of the film before and after the processing of the film thickness change processing unit is based on the measurement result from the film thickness measuring means. Means for determining the amount of change in

According to a fourth aspect of the present invention, there is provided the substrate processing apparatus according to the third aspect, wherein the processing conditions of the substrate in the film thickness change processing unit are changed based on the obtained change amount of the film thickness. Means are further provided.

According to a fifth aspect of the present invention, there is provided the substrate processing apparatus according to any one of the first to fourth aspects, wherein the film thickness measuring means measures the thickness of the film before the processing of the film thickness change processing unit. The apparatus further includes checking means for checking the type of the film based on the result.

According to a sixth aspect of the present invention, in the substrate processing apparatus according to the fifth aspect, the processing conditions of the substrate in the film thickness change processing section are changed based on a result of the confirmation by the confirmation means.

According to a seventh aspect of the present invention, there is provided the substrate processing apparatus according to any one of the first to sixth aspects, wherein the transport path passes before and after the processing in the film thickness change processing unit. A transit position is set, and the film thickness measuring means is configured as a single film thickness measuring unit that measures the film thickness both before and after the process at the common transit position.

The invention according to claim 8 is the substrate processing apparatus according to any one of claims 1 to 6, wherein the substrate is taken in and out of a substrate container for accommodating a plurality of substrates and the transfer means is provided. The film thickness measuring means is disposed above the entrance / exit means, and serves as a single film thickness measuring unit for measuring the film thickness both before and after the process. It is configured.

According to a ninth aspect of the present invention, there is provided the substrate processing apparatus according to any one of the first to sixth aspects, wherein a position corresponding to a stage before the film thickness change processing unit and a position corresponding to a stage after the film thickness change processing unit. And a first film thickness measurement unit that measures the film thickness of the substrate at a position corresponding to a stage prior to the film thickness change processing unit. ,
A second film thickness measuring unit for measuring the film thickness of the substrate at a position corresponding to a stage subsequent to the film thickness change processing unit.

According to a tenth aspect of the present invention, in the substrate processing apparatus according to any one of the first to ninth aspects, the film thickness measuring means includes: a measuring end for measuring a thickness of a film on the substrate; A position information storage unit for storing position information where the measurement end should be located with respect to the substrate; and a moving unit for moving the measurement end based on the position information.

The invention according to an eleventh aspect is the substrate processing apparatus according to any one of the first to ninth aspects, wherein the film thickness measuring means acquires an image of a predetermined range of the substrate, And an area determining means for determining an area to be measured on the substrate, and a film thickness calculating means for obtaining a film thickness in the area to be measured.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS <1. First Embodiment> FIG.
1 is a plan view showing a configuration of a substrate processing apparatus 1 according to a first embodiment of the present invention. The substrate processing apparatus 1 performs an etching process on a semiconductor substrate 9 in a single-wafer manner on a film such as an oxide film formed in advance on the surface of the substrate 9. Thereby, the film thickness is reduced to an appropriate value.

In the substrate processing apparatus 1, an indexer section 10 for placing an unprocessed substrate 9 or a processed substrate 9 in a state accommodated in a carrier 91, an etching processing section 30 for performing an etching process on the substrate 9, and a substrate 9 has a cleaning processing unit 40 for performing a cleaning process and a drying process, and each processing unit that is the etching processing unit 30 and the cleaning processing unit 40 is configured as shown in FIG.
They are arranged in two rows in the X direction shown therein. Further, the indexer unit 10 is provided with an in / out robot 11 for taking the substrate 9 in and out of the carrier 91, and a transfer robot 61 for transferring the substrate 9 to / from the in / out robot 11.
Are arranged so as to be able to move along the transport path extending in the X direction between the processing units arranged in two rows in the X direction.

Further, a transfer robot 62 for transferring the substrate 9 to and from each processing unit is provided on both sides in the X direction of each processing unit.
a, 62b and 62c are arranged, and the indexer unit 1
The arrangement is such that the delivery robot 62a, the etching processing unit 30, the delivery robot 62b, the cleaning processing unit 40, and the delivery robot 62c are arranged in two rows in this order from 0. Of these transfer robots, the transfer robot 62a and the transfer robot 62 located at both ends in the X direction
c can transfer the substrate 9 to and from the transfer robot 61 movable in the X direction.

In the substrate processing apparatus 1, the robot 11 further moves above and below the robot 11 in the indexer unit 10.
Is provided with a film thickness measuring unit 70 for measuring the thickness of the film formed on the surface of the substrate 9 held by the device.

FIG. 2 shows the substrate 9 in the substrate processing apparatus 1.
FIG. 3 is a schematic diagram showing a transfer path of FIG. Hereinafter, each configuration and processing operation of the substrate processing apparatus 1 will be described with reference to FIG.

The indexer unit 10 mounts and arranges the carriers 91 in the Y direction shown in FIG. 1, and carries out the substrate 9 into and out of the substrate processing apparatus 1 in a state where a predetermined number of the substrates 9 are stored in the carrier 91. Will be

The indexer unit 10 is provided with an in / out robot 11 which can move in the Y direction. The in / out robot 11 can move in the Y direction, and can move the chuck holding the substrate 9 in the X and Z directions. By moving the substrate 9
Into and out of each carrier 91.

When the unprocessed substrate 9 is taken out of the carrier 91 by the loading / unloading robot 11, it is transferred to the transfer robot 61 movable in the X direction. Then, the transfer robot 61 transfers the held substrate 9 in the (+ X) direction along the transfer path Ca shown in FIG.

The hand holding the substrate 9 of the transfer robot 61 can move freely within a predetermined range in a horizontal plane (in the XY plane), and the transfer robot 61 moves the substrate 9 most (+ X). After being conveyed to the direction side, the substrate 9 is transferred to one of the transfer robots 62a existing on the (± Y) side by operating the hand.

The delivery robot 62a allows the hand holding the substrate 9 to move within a predetermined range in the horizontal plane.
The substrate 9 received from the transfer robot 61 is carried into the etching unit 30.

As shown in FIG. 1, the etching section 30 holds the substrate 9 and rotates the turntable 31 about an axis in the Z direction, and applies an etching chemical to the substrate 9 held on the turntable 31. And a cup 34 for collecting surplus chemical liquid scattered from the rotating substrate 9. With such a configuration, the substrate 9 placed on the turntable 31 from the delivery robot 62a is applied with a chemical solution while being rotated, and is subjected to an etching process.

When the etching process is completed, the delivery robot 62b takes out the substrate 9 from the etching unit 30 and carries the substrate 9 into the cleaning unit 40. The delivery robot 62b has the same configuration as the delivery robot 62a.

The cleaning section 40 has substantially the same configuration as the etching section 30, but differs in that the cleaning of the substrate 9 with pure water or the like and the drying of the cleaned substrate 9 are performed.

The substrate 9 which has been subjected to the cleaning and drying processes in the cleaning section 40 is taken out of the cleaning section 40 by the delivery robot 62c, and the taken-out substrate 9 is returned to the transport robot 61. The transfer robot 62c has the same configuration as the transfer robot 62a.

The transfer robot 61 having received the substrate 9 from the transfer robot 62 c transfers the substrate 9 to the in / out robot 11, and the in / out robot 11 accommodates the processed substrate 9 in the carrier 91, so that one substrate 9 is processed. Is completed.

The two transfer paths Cb shown in FIG. 2 are from the transfer of the substrate 9 from the transfer robot 61 to the transfer robot 62a until the transfer of the substrate 9 in the order of the transfer robot 62c, the transfer robot 61 and the in / out robot 11. The transport route is shown.

As described above, in the substrate processing apparatus 1, the transfer robot 61 transfers and processes the substrate indirectly to the plurality of processing units arranged in two rows along both sides of the transfer path Ca. Is performed.

The configuration and processing operation of the substrate processing apparatus 1 according to the present invention have been described above. Next, the thickness of a film (such as an oxide film) formed on the surface of the substrate 9 in the substrate processing apparatus 1 will be described. The configuration and operation for measurement will be described.

FIG. 3 is a perspective view showing a state of the film thickness measuring section 70 attached to the indexer section 10 of the substrate processing apparatus 1. The film thickness measuring section 70 has a measuring end 71 and a film thickness meter 72.
Are connected by an optical fiber, and the measurement end portion 71 is disposed above the entry / exit robot 11 and measures the thickness of the film of the substrate 9 held by the entry / exit robot 11. The thickness gauge 72 is arranged at a position away from the measurement end 71.

As shown in FIG. 2, the position where the measuring end 71 is located is determined by the transfer path Ca from which the substrate 9 is transferred from the transfer robot 11 to the transfer robot 61 and the cleaning processing unit 4.
The substrate 9 from 0 moves in and out of the transfer robot 61
The position where the thickness of the film of the substrate 9 can be measured at the common route position P with the transport path Cb passed to the position 1. Therefore, the substrate processing apparatus 1 can measure the film thickness of both substrates 9 before and after the etching process.

FIG. 4 is a block diagram showing a configuration for processing information from the film thickness measuring section 70. As shown in FIG. 4, the substrate processing apparatus 1 has an etching amount calculating unit 81 connected to a film thickness measuring unit 70. The etching amount calculating unit 81 stores an etching amount which is a change amount of the film thickness. A display unit 82 for displaying and an etching condition correction unit 8 for correcting an etching condition which is a processing condition in the etching processing unit 30.
3 are connected. Further, the etching condition correction unit 83 controls the operation of the etching processing unit 30 by the control unit 3.
3 is connected to the third etching condition storage means 33a.

As shown in FIG. 4, the measuring end 71 of the film thickness measuring section 70 has a lens portion 73, and the lens portion 73 and the film thickness meter 72 are connected by an optical fiber 74. The lens portion 73 measures the main surface 9f of the substrate 9 on which a film is formed at the time of measurement, that is, when the substrate 9 is at the above-mentioned common pass position P.
And plays a role of emitting measurement light from the optical fiber 74 toward the main surface 9f and returning reflected light from the main surface 9f to the optical fiber 74. The lens unit 73 is moved in the horizontal direction (X-
(Y direction). Thus, irradiation of measurement light and acquisition of reflected light can be performed on an arbitrary portion of the main surface 9f. Further, the drive mechanism 75 is isolated from the inside of the indexer unit 10 by a bellows 76 made of resin.

The film thickness meter 72 connected to the optical fiber 74 supplies the measuring light to the optical fiber 74, and the main surface 9f.
Is obtained from the optical fiber 74, and the thickness of the film on the main surface 9f is obtained by wavelength analysis of the obtained reflected light.

As described above, since the film thickness measuring section 70 is provided in the indexer section 10, the thickness of the substrate 9 before the etching process and the thickness of the substrate 9 after the etching process can be reduced. The thickness can be measured by one film thickness measuring unit.

Next, the measuring operation in the film thickness measuring section 70 will be described.

FIG. 5 is a block diagram showing a configuration for controlling the operation of the film thickness measuring section 70, and FIG. 6 is a flowchart showing the flow of the operation.

The drive mechanism 75 is a two-axis drive mechanism that can move the lens portion 73 along a horizontal plane parallel to the main surface 9f of the substrate 9. And this drive mechanism 7
5 is controlled by the position control unit 84.

The position control section 84 has a film thickness management position storage section 84a for storing a film thickness management position which is a position of a specific area on the substrate 9, and the position is controlled when the film thickness measurement operation is started. The control unit 84 changes the film thickness management position storage unit 84a to the lens unit 7
3 reads the position information to be located (step S1).
1).

FIG. 7 is a view showing a pattern formed by a film on the substrate 9. Generally, a TEG (Test Element Group) is provided on the substrate 9 as a specific area for controlling the film thickness.
Are provided, and reference numeral 92 illustrates such a region.

When the position information is read out from the film thickness management position storage unit 84a, the position control unit 84 drives the driving mechanism 75 to move the lens unit 73 to a position where the film thickness of the region 92 on the substrate 9 can be measured. It is arranged (step S12).
Then, when the lens unit 73 is arranged at a predetermined position, a signal indicating the completion of the arrangement is transmitted to the film thickness meter 72, and the film thickness measuring unit 70 measures the film thickness of the region 92 (step S13).

As described above, in the substrate processing apparatus 1, a specific pattern of a predetermined substrate pattern such as the center or the outer periphery of the substrate 9 is specified based on the film thickness management position stored in the film thickness management position storage section 84a in advance. The film thickness of the region can be appropriately measured using the driving mechanism 75 and the position control unit 84. Therefore, by changing the film thickness management position in accordance with the type of the substrate 9 to be processed, a predetermined area can be directly measured for different types of substrates 9, so that efficient and accurate film thickness management can be performed. . The input of the type of the substrate 9 may be input by an operator, and may be performed by the film type checking unit 8 shown in FIG.
The input from 3a (the operation will be described later) may be used.

FIG. 8 is a diagram showing another embodiment of the film thickness measuring section 70, and shows only the configuration corresponding to FIG. In addition,
The same components as those in FIG. 5 are denoted by the same reference numerals. The configuration for calculating the etching amount is the same as the configuration shown in FIG. FIG. 9 is a flowchart showing a flow of the operation of the film thickness measuring unit 70 shown in FIG.

The film thickness measuring unit 70 shown in FIG. 8 is largely different from that shown in FIG. 5 in that the tip of the measuring end 71 is an area sensor 73a. An image signal from the area sensor 73a is sent via the line 74a. Further, the film thickness meter 72 has a measurement region determining unit 72a for analyzing the image signal and a film thickness calculating unit 72b for calculating the film thickness based on the image signal.

In the measurement by the film thickness measuring section 70 shown in FIG. 8, first, position information is read from the film thickness management position storage section 84a (step S21), and the position control section 84 controls the driving mechanism 75. The area sensor 73a is moved to a position where an image of a predetermined area on the substrate 9 can be captured (Step S22). When the area sensor 73a is arranged at a target position, the position controller 84 sends a signal indicating the completion of the arrangement to the film thickness meter 72, and the area sensor 73a acquires an image (step S23).

The area on the substrate 9 captured by the area sensor 73a is not limited to the area 92 dedicated to film thickness measurement shown in FIG. May be a region that has been set.
Here, the image captured by the area sensor 73a is a film thickness meter 72.
The measurement area determination unit 72a analyzes the pattern of the image and checks whether the area sensor 73a is located at a predetermined position (step S24).

When it is determined that the area sensor 73a is not located at the predetermined position, the position control unit 84 reads out the position information of the next candidate from the film thickness management position storage unit 84a and sets the area sensor 73a at the position of the next candidate. (Step S
25, S26). Thereafter, an image is obtained again (step S23).

If it is confirmed that the area sensor 73a is located at a predetermined position, the measurement area determination unit 72
“a” extracts a specific pattern in an image and determines an area to be measured (steps S25 and S27). FIG. 10 shows FIG.
8 shows an example of an image 931 when the area sensor 73a captures an area 93 shown in FIG. The measurement area determination unit 72a specifies an area 932 having a certain size such as a land from the circuit pattern in the image 931 and determines it as an area to be measured. Then, the film thickness calculator 72b calculates the thickness of the film formed on the substrate 9 from the information such as the pixel density in the determined area 932 (Step S28).

As described above, in the film thickness measuring section 70 shown in FIG. 8, not only the region for managing a specific film thickness such as the center or the outer periphery of the substrate 9 but also the actual device formed on the substrate 9 Even in the case of a structure, an area to be measured can be specified and accurate measurement can be performed. Thereby, efficient and accurate film thickness control is realized.

When the area sensor 73a is used, it is not necessary to strictly adjust the relative positional relationship between the substrate 9 and the area sensor 73a. It is also possible to measure the film thickness. In this case, since the area sensor 73a does not move, higher-speed measurement is realized.

Also, a method is provided in which a wide area sensor and a local area sensor are provided, a position where the local area sensor is to be located is determined by the wide area sensor, and the film thickness is measured by the local area sensor. Is also possible.

Further, a lens portion may be provided at the measurement end portion 71 and an area sensor may be provided at the film thickness meter 72 so that the lens portion and the area sensor are connected by an optical fiber.

Next, the operation of the substrate processing apparatus 1 after calculating the film thickness will be described with reference to FIG.

The measurement result, which is the thickness of the film before and after the etching process measured by the film thickness measuring unit 70, is input to the etching amount calculating unit 81. The difference between the film thicknesses is obtained by the etching amount calculation unit 81, and the etching amount, which is the change amount of the film thickness before and after the etching process, is obtained. The obtained etching amount is displayed on the display unit 82 so as to be presented to an operator who operates and manages the substrate processing apparatus 1.

The etching amount calculated by the etching amount calculating unit 81 is also sent to the etching condition correcting unit 83, and it is checked whether the etching amount is an appropriate value. As a result, if the etching amount is proper, the operation of the substrate processing apparatus 1 is continued as it is, but if it is clear that the etching amount is not proper, the etching condition correction unit 83 changes the etching condition. . Specifically, the conditions such as the concentration, components, and temperature of the chemical solution and the amount of the chemical solution are changed.

The changed etching conditions are sent to and stored in the etching condition storage means 33a of the etching processing unit 30. Thus, the control unit 33 that controls the operation of the etching processing unit 30 performs the etching processing with reference to the changed etching conditions. Specifically, the concentration, component, and temperature of the chemical solution applied to the substrate 9 are corrected,
Correction of the amount of the chemical is performed.

The processing operation and the film thickness measuring operation of the substrate processing apparatus 1 according to the present invention have been described above. In this substrate processing apparatus 1, the film thickness is applied to the indexer unit 10 which is a common transit position of the substrate 9 before and after etching. Since the measurement unit 70 is provided, the film thickness can be measured each time the substrate 9 is taken out of the carrier 91 and each time the substrate 9 is stored in the carrier 91. As a result, the etching amount can be checked each time the etching process is performed, and even if an inappropriate etching process is detected, only the substrate related to the process becomes defective, and the defective substrate is removed. It does not occur in large numbers. In other words, it is possible to appropriately manage the life of the chemical solution, and to minimize the occurrence of defective substrates even if a substrate having a slightly different film quality is supplied for each lot.

Further, in the substrate processing apparatus 1, since the film thickness measurement is automatically performed during the transfer of the substrate 9, the operator stops the substrate processing apparatus and transports the substrate to the film thickness meter as in the related art. No hassle or waste of time. As a result, the throughput can be improved.

Further, in the substrate processing apparatus 1, the thickness of the film of the substrate 9 before and after the etching process can be measured by one film thickness measuring section 70, so that compared with the case where two film thickness measuring sections are provided. Naturally, the cost of the device can be reduced.

Next, another mode of use of the substrate processing apparatus 1 will be described.

In the above-described operation for confirming the etching amount, the result of the film thickness measurement from the film thickness measuring unit 70 is input to the etching amount calculating unit 81 as shown in FIG. The following operation can be performed by inputting the information to the film type confirmation unit 83a in the condition correction unit 83.

First, based on the film thickness of the substrate 9 before processing measured by the film thickness measuring unit 70, the substrate 9 to be processed
The film type confirming unit 83a confirms in advance whether or not the film thickness or film quality of the film is compatible with the processing state of the etching processing unit 30. As a result, inappropriate etching can be prevented beforehand, and the occurrence of defective substrates can be prevented.

Next, from the results of checking the thickness of the film on the substrate 9 before the processing, it is determined that the film thickness and the film quality do not conform to the processing conditions, and the film type conforming to other predetermined processing conditions is determined. If it is determined that the processing condition is satisfied, the etching condition correction unit 83 changes the processing condition of the etching processing unit 30 to an appropriate one. This makes it possible to automatically perform appropriate processing on a plurality of types of film thickness and film quality.

For example, when the substrate processing apparatus 1 capable of processing two types of substrates 9 is performing continuous processing on one of these substrates 9, Even if 9 is erroneously mixed, the film type confirmation unit 83a determines from the film thickness measurement result from the film thickness measurement unit 70 that the substrate 9 should not be processed under the current processing conditions. Further, when it is confirmed from the film thickness measurement result that the substrate 9 is another type, the etching condition correction unit 83 changes the content of the etching condition storage unit 33a, and the processing of the other type 9 substrate 9 is continued. Is done.

As described above, the substrate processing apparatus 1 can not only confirm the etching amount each time the substrate 9 is processed, but also automatically and appropriately cope with the etching processing for a plurality of types of film-like substrates 9. You can also.

<2. Second Embodiment> FIG. 11 is a plan view schematically showing a configuration of a substrate processing apparatus 1a according to a second embodiment of the present invention. The substrate processing apparatus 1a is an apparatus that performs an etching process on a substrate 9 having a film formed on the surface in advance in a single-wafer manner.

Except that this substrate processing apparatus 1a has two film thickness measuring units, the apparatus configuration and the processing operation are the first.
This is the same as the substrate processing apparatus 1 according to the embodiment. Therefore, the transport path of the substrate 9 is the same as the transport path shown in FIG. In FIG. 11, the same components as those shown in FIG. 1 are denoted by the same reference numerals.

In order to measure the thickness of the film on the substrate 9, the substrate processing apparatus 1 a mounts a device having the same configuration as that of the film thickness measuring unit in the first embodiment above the transport path Ca of the transport robot 61. Film thickness measuring unit 70a and second film thickness measuring unit 70b
It has two as. Further, the first film thickness measuring unit 70a is provided between the two transfer robots 62a,
The film thickness measuring unit 70b is provided between the two transfer robots 62c.

Therefore, the first film thickness measuring section 70a is
Can measure the thickness of the film of the substrate 9 immediately before being transferred from the transfer robot 61 to the transfer robot 62a on the transfer path Ca shown in FIG. Transfer robot 6
It is possible to measure the thickness of the film of the substrate 9 immediately after the transfer to 1. That is, the first film thickness measuring unit 7
0a measures the unprocessed substrate 9 at a position corresponding to the stage before the etching process, and the second film thickness measurement unit 7
0b measures the processed substrate 9 at a position corresponding to the stage after the etching process.

FIG. 12 shows the first film thickness measuring section 70a and the second film thickness measuring section 70a.
FIG. 9 is a block diagram illustrating a configuration for processing a measurement result by a film thickness measurement unit 70b. The content of the processing is the same as that of the first embodiment except that there are two film thickness measuring units. That is, the etching amount is calculated by the etching amount calculation unit 81 from the difference in film thickness before and after the processing, and if the etching amount is inappropriate, the etching condition correction unit 83 corrects the processing conditions. Then, the corrected etching condition is stored in the etching condition storage unit 33a in the control unit 33 of the etching processing unit 30. As a result, the concentration, components, temperature, amount, etc., of the chemical solution applied to the substrate 9 in the etching processing unit 30 are adjusted, and an appropriate process is performed on the substrate 9 to be processed next.

Further, as shown by the broken line arrow in FIG. 12, the film type confirmation unit 83a confirms the processing conditions in advance based on the film thickness measurement result from the first film thickness measurement unit 70a, or performs the etching condition correction unit. 83 can change the processing conditions as in the first embodiment.

As described above, in the substrate processing apparatus 1a, the first film is formed so that the film thickness of the substrate 9 at the position corresponding to the stage before and after the etching unit 30 can be measured. Thickness measuring unit 70a and second film thickness measuring unit 7
Since 0b is arranged, the amount of etching can be checked every time each substrate 9 is processed, and even if an inappropriate etching process is performed, it can be quickly found. When an inappropriate etching process is found by the operation of the etching condition correction unit 83, the processing condition is automatically and quickly corrected.

Further, since these film thickness measuring units are arranged on the transport path, the throughput does not decrease due to the film thickness measurement.

Further, by confirming the thickness of the film of the unprocessed substrate from the first film thickness measuring section 70a, inappropriate etching can be prevented, and the processing conditions can be automatically changed.

<3. Modifications> Although the substrate processing apparatus according to the present invention has been described above, the present invention is not limited to the above-described embodiment, and various modifications can be made.

For example, in the above embodiment, a substrate processing apparatus for performing an etching process has been described. However, a process in which a film is formed in advance on the surface of a substrate and the thickness of the film is changed by using a processing liquid or the like. The present invention can be used as long as it is a device for performing the above.

In the first embodiment, the film thickness measuring section 70 is disposed at the common transit position P in the indexer section 10, but may be disposed at any common transit position before and after the etching process. For example, the film thickness measuring unit 70 may be arranged so as to measure the film thickness of the substrate 9 when the transfer robot 61 is located closest to the (−X) side.

In the second embodiment, two separate and independent film thickness measuring units are provided, but they need not be completely independent. For example, although two measurement ends 71 are provided, the film thickness gauge 72 may be configured to be commonly used.

Further, if the first film thickness measuring section 70a can measure the film thickness of the unprocessed substrate 9, that is, the first film thickness measuring section 70a is located at a position corresponding to the stage prior to the film thickness changing process. The second film thickness measurement unit 70b can measure the thickness of the film of the processed substrate 9, that is, the process of changing the film thickness. It may be placed anywhere as long as measurement can be performed on a substrate at a position corresponding to a later stage.

[0087]

According to the first to eleventh aspects of the present invention, there is provided a substrate processing apparatus in which a plurality of processing units including a film thickness change processing unit are arranged along both sides of a conveyance path arranged in a predetermined direction. It is possible to measure the thickness of the film of the substrate before and after the processing of the change processing unit. Thus, the thickness of the film before and after the processing can be measured without lowering the throughput.

According to the third aspect of the present invention, the change in the film thickness can be obtained every time the processing is performed.
It is possible to quickly confirm whether appropriate processing is being performed. As a result, inappropriate processing conditions are not left, and the occurrence of defective substrates can be minimized.

According to the fourth aspect of the present invention, since the processing conditions of the substrate can be changed based on the amount of change in the thickness of the film, inappropriate processing conditions can be quickly corrected.

According to the fifth aspect of the present invention, since the type of film can be confirmed before processing, inappropriate processing can be prevented beforehand, and occurrence of defective substrates can be prevented.

Further, according to the invention of claim 6, since the processing conditions of the substrate are changed based on the confirmation result, it is possible to appropriately process the substrate having a plurality of kinds of film thicknesses.

Further, according to the invention of claims 7 and 8,
Since the thickness of the film on the substrate before and after the processing can be measured by a single film thickness measuring unit, the cost of the substrate processing apparatus can be reduced.

According to the tenth aspect, the thickness of the film can be measured at an appropriate position on the substrate based on the position information.

According to the eleventh aspect of the present invention, since the area to be measured on the substrate is determined from the image, accurate film thickness measurement can be performed.

[Brief description of the drawings]

FIG. 1 is a plan view showing a substrate processing apparatus according to a first embodiment of the present invention.

FIG. 2 is a view showing a substrate transfer path in the substrate processing apparatus shown in FIG.

FIG. 3 is a perspective view showing an arrangement position of a film thickness measuring unit.

FIG. 4 is a block diagram showing a configuration for processing a film thickness measurement result.

FIG. 5 is a block diagram illustrating a configuration for controlling the operation of a film thickness measurement unit.

FIG. 6 is a flowchart showing a flow of an operation at the time of film thickness measurement.

FIG. 7 is a diagram showing a measurement area on a substrate.

FIG. 8 is a block diagram showing another example of the configuration for controlling the operation of the film thickness measurement unit.

FIG. 9 is a flowchart showing another example of the operation flow when measuring the film thickness.

FIG. 10 is a diagram illustrating an example of a device structure.

FIG. 11 is a plan view showing an arrangement position of a film thickness measurement unit in a substrate processing apparatus according to a second embodiment of the present invention.

FIG. 12 is a block diagram showing a configuration for processing a film thickness measurement result.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1, 1a Substrate processing apparatus 9 Substrate 11 In / out robot 30 Etching processing part 40 Cleaning processing part 61 Transfer robot 70 Film thickness measuring part 70a First film thickness measuring part 70b Second film thickness measuring part 72a Measurement area determining part 72b Film thickness calculation Unit 73 lens unit 73a area sensor 75 drive mechanism 81 etching amount calculation unit 83 etching condition correction unit 83a film type confirmation unit 84 position control unit 84a film thickness management position storage unit Ca transport path P common transit position

Claims (11)

[Claims] 1. A substrate processing apparatus for performing a predetermined process on a substrate, comprising: transport means for transporting the substrate along a transport path oriented in a predetermined direction; A plurality of processing units disposed along both sides of the transport path, and the thickness of the film before and after the processing of the film thickness change processing unit. A substrate processing apparatus, comprising: a film thickness measuring unit that measures a thickness on a transport path, wherein the transport unit transfers the substrate to the plurality of processing units. 2. The substrate processing apparatus according to claim 1, wherein the thickness change processing unit performs an etching process for changing a thickness of an oxide film formed on a surface of the substrate. Processing equipment. 3. The substrate processing apparatus according to claim 1, wherein a change amount of the film thickness before and after the processing of the film thickness change processing unit is obtained based on a measurement result from the film thickness measurement unit. Substrate processing apparatus, further comprising: 4. The substrate processing apparatus according to claim 3, further comprising a change unit configured to change a processing condition of the substrate in the film thickness change processing unit based on the obtained change amount of the film thickness. A substrate processing apparatus characterized by the above-mentioned. 5. The substrate processing apparatus according to claim 1, wherein the film thickness is measured based on a measurement result of the film thickness before the film thickness change processing unit performs processing by the film thickness measurement unit. A substrate processing apparatus, further comprising a confirmation unit for confirming a type of the substrate. 6. The substrate processing apparatus according to claim 5, wherein a processing condition of the substrate in the film thickness change processing unit is changed based on a result of the confirmation by the confirmation unit. 7. The substrate processing apparatus according to claim 1, wherein a common route position is set in the transport path before and after the processing in the film thickness change processing unit. The substrate processing apparatus, wherein the film thickness measuring means is configured as a single film thickness measuring unit that measures the film thickness both before and after the processing at the common route position. 8. The substrate processing apparatus according to claim 1, wherein the substrate is taken in and out of a substrate storage device that stores a plurality of substrates, and the substrate is transferred to and from the transfer unit. The apparatus further includes an access unit that performs delivery, wherein the film thickness measurement unit is disposed above the access unit,
A substrate processing apparatus configured as a single film thickness measurement unit that measures the film thickness both before and after processing. 9. The substrate processing apparatus according to claim 1, wherein: a position corresponding to a stage before the film thickness change processing unit;
A position corresponding to a later stage is different from each other, and the film thickness measuring means measures a film thickness of the substrate at a position corresponding to a stage earlier than the film thickness change processing unit. A film thickness measuring unit; and a second film thickness measuring unit that measures a film thickness of the substrate at a position corresponding to a stage subsequent to the film thickness change processing unit. Substrate processing equipment. 10. The substrate processing apparatus according to claim 1, wherein the film thickness measuring unit is configured to measure a thickness of a film on the substrate, and to measure a thickness of the film on the substrate. A substrate processing apparatus comprising: position information storage means for storing position information where the measurement end should be located; and movement means for moving the measurement end based on the position information. 11. The substrate processing apparatus according to claim 1, wherein the film thickness measuring unit is configured to obtain an image of a predetermined range of the substrate, and to perform measurement on the substrate from the image. A substrate processing apparatus, comprising: a region determining unit that determines a region to be measured; and a film thickness calculating unit that calculates a film thickness in the region to be measured.