TW202130508A - Insulating layer for multilayer printed circuit board, multilayer printed circuit board including the same, and method for fabricating the same - Google Patents

Insulating layer for multilayer printed circuit board, multilayer printed circuit board including the same, and method for fabricating the same Download PDF

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TW202130508A
TW202130508A TW109134589A TW109134589A TW202130508A TW 202130508 A TW202130508 A TW 202130508A TW 109134589 A TW109134589 A TW 109134589A TW 109134589 A TW109134589 A TW 109134589A TW 202130508 A TW202130508 A TW 202130508A
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layer
group
resin layer
polymer resin
patterned
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文程昱
金公謙
鄭遇載
黃智賢
趙安寶
安廷爀
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南韓商Lg化學股份有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/381Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0017Etching of the substrate by chemical or physical means
    • H05K3/0023Etching of the substrate by chemical or physical means by exposure and development of a photosensitive insulating layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4652Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
    • H05K3/4655Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern by using a laminate characterized by the insulating layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0786Using an aqueous solution, e.g. for cleaning or during drilling of holes
    • H05K2203/0793Aqueous alkaline solution, e.g. for cleaning or etching

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

The present disclosure provides an insulating layer for a multilayer printed circuit board, a multilayer printed circuit board including the same, and a method for fabricating the same. The insulating layer of the present disclosure includes a polymer resin layer containing a melamine derivative, and thus may have excellent adhesion to a patterned metal layer.

Description

多層印刷電路板用之絕緣層、含彼之多層印刷電路板、及其製法Insulation layer for multilayer printed circuit board, multilayer printed circuit board containing it, and manufacturing method thereof

本申請案主張2019年10月24日向韓國智慧財產局(Korean Intellectual Property Office)提出申請之韓國專利申請案10-2019-0132823號的申請日之權益,其整體內容係併入本文中。This application claims the rights and interests of the filing date of Korean Patent Application No. 10-2019-0132823, which was filed with the Korean Intellectual Property Office on October 24, 2019, the entire content of which is incorporated herein.

本揭示內容係關於多層印刷電路板用之絕緣層、含彼之多層印刷電路板、及其製法。具體而言,本揭示內容係關於對於圖案化金屬層具有優異的黏著性之多層印刷電路板用之絕緣層、含彼之多層印刷電路板、及其製法。This disclosure relates to insulating layers for multilayer printed circuit boards, multilayer printed circuit boards containing them, and manufacturing methods thereof. Specifically, the present disclosure relates to an insulating layer for a multilayer printed circuit board with excellent adhesion to a patterned metal layer, a multilayer printed circuit board containing it, and a manufacturing method thereof.

最近的電子裝置逐漸變得尺寸更小,更輕、及高功能性。為滿足電子裝置領域之此等近來需求,半導體元件需要安裝在電子裝置內部。近年來,此趨勢已隨著半導體元件尺寸愈來愈小及其積體密度提高而實現。Recent electronic devices have gradually become smaller, lighter, and highly functional. In order to meet these recent demands in the field of electronic devices, semiconductor components need to be installed inside the electronic devices. In recent years, this trend has been realized as the size of semiconductor components has become smaller and their integrated density has increased.

為了使半導體元件於電子裝置中接收電信號,電氣佈線是必要的,於該情況下,為求穩定電信號傳輸,需要半導體元件與電氣佈線之絕緣。In order for the semiconductor element to receive electrical signals in the electronic device, electrical wiring is necessary. In this case, in order to achieve stable electrical signal transmission, insulation between the semiconductor element and the electrical wiring is required.

於此,增層半導體封裝程序(build-up semiconductor packaging process)不只用於半導體元件之間的電氣佈線連接,亦用於在該等元件之間形成絕緣層。此半導體封裝程序的優點在於其可改善功能性元件之積體密度,使電子裝置的尺寸更小、更輕以及高功能性,達到電功能之結構整合,以及減少組裝時間期間及成本。Here, the build-up semiconductor packaging process is not only used for electrical wiring connections between semiconductor components, but also used for forming an insulating layer between these components. The advantage of this semiconductor packaging process is that it can improve the integrated density of functional components, make electronic devices smaller, lighter, and highly functional, achieve structural integration of electrical functions, and reduce assembly time and cost.

在增層半導體封裝程序中,為了在絕緣層上形成微電路,重要的是確保增層絕緣層與形成有電路之傳導層之間的黏著性。近年來,因可藉由雷射鑽孔形成之絕緣層圖案的限制所致,已使用以弱鹼溶液顯影而形成精細圖案的方法。In the build-up semiconductor packaging process, in order to form a microcircuit on the insulating layer, it is important to ensure the adhesion between the build-up insulating layer and the conductive layer on which the circuit is formed. In recent years, due to the limitation of insulating layer patterns that can be formed by laser drilling, a method of developing fine patterns with weak alkaline solutions has been used.

因此,已知三聚氰胺之結構能有效改善黏著性且係廣泛使用。然而,因三聚氰胺之高度安定結構使其不溶於大部分溶劑,因而其未能良好分散或溶解,且不易以弱鹼溶液顯影。基於此因素,三聚氰胺難以用於製造精細圖案。Therefore, it is known that the structure of melamine can effectively improve adhesion and is widely used. However, the highly stable structure of melamine makes it insoluble in most solvents, so it cannot be well dispersed or dissolved, and it is not easy to develop with weak alkaline solutions. Based on this factor, it is difficult to use melamine to make fine patterns.

本揭示內容之一目的係提供對於圖案化金屬層具有優異的黏著性之多層印刷電路板用之絕緣層、含彼之多層印刷電路板、及其製法。One purpose of the present disclosure is to provide an insulating layer for a multilayer printed circuit board with excellent adhesion to a patterned metal layer, a multilayer printed circuit board containing it, and a manufacturing method thereof.

根據本揭示內容之一態樣,提供多層印刷電路板用之絕緣層,該絕緣層包括含有鹼溶性樹脂(alkali-soluble resin)、熱固性黏合劑(thermosetting binder)、及三聚氰胺衍生物(melamine derivative)之圖案化聚合物樹脂層,其中,該三聚氰胺衍生物具有下列化學式1之結構:According to one aspect of the present disclosure, an insulating layer for a multilayer printed circuit board is provided. The insulating layer includes an alkali-soluble resin, a thermosetting binder, and a melamine derivative. The patterned polymer resin layer, wherein the melamine derivative has the structure of the following chemical formula 1:

[化學式1][Chemical formula 1]

Figure 02_image001
Figure 02_image001

其中,A為含有1至6個羧基之烷基、或含有1至6個羧基之胺基。Wherein, A is an alkyl group containing 1 to 6 carboxyl groups, or an amino group containing 1 to 6 carboxyl groups.

根據本揭示內容另一態樣,提供多層印刷電路板,其包含:絕緣層、以及位於該絕緣層上之圖案化金屬層。According to another aspect of the present disclosure, a multilayer printed circuit board is provided, which includes an insulating layer and a patterned metal layer on the insulating layer.

根據本揭示內容另一態樣,提供製造該絕緣層之方法,該方法包括下列步驟:於基材上形成含有鹼溶性樹脂、熱固性黏合劑及三聚氰胺衍生物之聚合物樹脂層;於該聚合物樹脂層上形成圖案化層;顯影及固化其上形成有該圖案化層之該聚合物樹脂層;以及藉由從經固化之聚合物樹脂層移除該圖案化層而形成圖案化聚合物樹脂層,其中,該三聚氰胺衍生物具有下列化學式1之結構:According to another aspect of the present disclosure, there is provided a method of manufacturing the insulating layer. The method includes the following steps: forming a polymer resin layer containing an alkali-soluble resin, a thermosetting adhesive, and a melamine derivative on a substrate; A patterned layer is formed on the resin layer; the polymer resin layer on which the patterned layer is formed is developed and cured; and the patterned polymer resin is formed by removing the patterned layer from the cured polymer resin layer Layer, wherein the melamine derivative has the structure of the following chemical formula 1:

[化學式1][Chemical formula 1]

Figure 02_image001
Figure 02_image001

其中,A為含有1至6個羧基之烷基、或含有1至6個羧基之胺基。Wherein, A is an alkyl group containing 1 to 6 carboxyl groups, or an amino group containing 1 to 6 carboxyl groups.

本說明書全文中,應暸解除非另外指明,否則當任何部分稱為「包含」任何組分時,其不排除其他組分,而是可進一步包含其他組分。Throughout this specification, it should be understood that unless otherwise specified, when any part is referred to as "comprising" any component, it does not exclude other components, but may further include other components.

本說明書全文中,當任何構件稱為於另一構件「上」時,其不僅指任何構件與另一構件接觸的情況,且亦指此二構件之間存在第三構件的情況。Throughout this specification, when any component is referred to as being "on" another component, it not only refers to the situation where any component is in contact with another component, but also refers to the situation where a third component exists between the two components.

下文茲更詳細說明本揭示內容。Hereinafter, the present disclosure will be explained in more detail.

根據本揭示內容之一實施態樣的多層印刷電路板用之絕緣層包括含有鹼溶性樹脂、熱固性黏合劑、及三聚氰胺衍生物之圖案化聚合物樹脂層,其中,該三聚氰胺衍生物具有下列化學式1之結構:The insulating layer for a multilayer printed circuit board according to one embodiment of the present disclosure includes a patterned polymer resin layer containing an alkali-soluble resin, a thermosetting adhesive, and a melamine derivative, wherein the melamine derivative has the following chemical formula 1 The structure:

[化學式1][Chemical formula 1]

Figure 02_image001
Figure 02_image001

其中,A為含有1至6個羧基之烷基、或含有1至6個羧基之胺基。Wherein, A is an alkyl group containing 1 to 6 carboxyl groups, or an amino group containing 1 to 6 carboxyl groups.

下文茲詳細描述各組分。Hereinafter, each component is described in detail.

鹼溶性樹脂Alkali-soluble resin

根據本揭示內容之一實施態樣,圖案化聚合物樹脂層含有鹼溶性樹脂。According to one embodiment of the present disclosure, the patterned polymer resin layer contains alkali-soluble resin.

根據本揭示內容之一實施態樣,鹼溶性樹脂可包括:一或更多酸性官能基(acidic functional group);以及一或更多經一或更多胺基取代之環狀醯亞胺官能基(cyclic imide functional group)。酸性官能基之實例無特別限制,但可包括羧基或酚基(phenol group)。鹼溶性樹脂可包括至少兩個酸性官能基,因此該聚合物樹脂層可展現較高的鹼顯影性(alkali developability)且該聚合物樹脂層之顯影速率(developing rate)可受控制。According to one embodiment of the present disclosure, the alkali-soluble resin may include: one or more acidic functional groups; and one or more cyclic amide functional groups substituted with one or more amine groups (cyclic imide functional group). Examples of the acidic functional group are not particularly limited, but may include a carboxyl group or a phenol group. The alkali-soluble resin may include at least two acidic functional groups, so the polymer resin layer can exhibit higher alkali developability and the developing rate of the polymer resin layer can be controlled.

經胺基取代之環狀醯亞胺官能基在該官能基之結構中可含有至少兩個胺基及環狀醯亞胺基。當鹼溶性樹脂含有至少兩個經胺基取代之環狀醯亞胺官能基時,該鹼溶性樹脂可具有其中大量活性氫原子係在所存在的胺基中之結構,因而可改善熱固化期間其與熱固性黏合劑之反應性,同時,固化密度可提高,因而提高耐熱可靠度及機械性質。The cyclic amide functional group substituted with an amine group may contain at least two amine groups and a cyclic amide group in the structure of the functional group. When the alkali-soluble resin contains at least two cyclic amide functional groups substituted with amine groups, the alkali-soluble resin may have a structure in which a large number of active hydrogen atoms are in the existing amine groups, thereby improving the thermal curing period Its reactivity with thermosetting adhesives, and at the same time, the curing density can be increased, thereby improving the reliability of heat resistance and mechanical properties.

此外,當多個環狀醯亞胺官能基存在於鹼溶性樹脂中時,其極性會因該環狀醯亞胺官能基中所含的羰基及三級胺基而提高,因而提高鹼溶性樹脂之界面黏著性。因此,含有鹼溶性樹脂之聚合物樹脂層可提高與層合於其上之金屬層之界面黏著性。具體而言,聚合物樹脂層可具有比層合於金屬層上之載體膜(carrier film)與該金屬層之間的界面黏著性更高之黏著性,因此如後述,載體膜與金屬層之間可能物理性分離。In addition, when multiple cyclic amide functional groups are present in the alkali-soluble resin, their polarity will be increased due to the carbonyl group and tertiary amine group contained in the cyclic amide functional group, thereby increasing the alkali-soluble resin The interface adhesion. Therefore, the polymer resin layer containing alkali-soluble resin can improve the interfacial adhesion with the metal layer laminated on it. Specifically, the polymer resin layer may have higher adhesiveness than the interfacial adhesiveness between the carrier film laminated on the metal layer and the metal layer. Therefore, as described later, the carrier film and the metal layer May be physically separated.

更具體而言,經胺基取代之環狀醯亞胺官能基可包括以下式1表示之官能基:More specifically, the cyclic imine functional group substituted by an amino group may include a functional group represented by the following formula 1:

[式1][Formula 1]

Figure 02_image005
Figure 02_image005

其中,R1 為具有1至10個碳原子、或1至5個碳原子、或1至3個碳原子之伸烷基(alkylene group)或烯基,且「*」意指鍵結點。伸烷基為由烷烴衍生之二價官能基,其實例包括直鏈、支鏈或環狀基團,諸如亞甲基、伸乙基、伸丙基、伸異丁基、伸二級丁基、伸三級丁基、伸戊基、伸己基等。伸烷基中所含的一或多個氫原子可經另一取代基取代,該取代基之實例包括具有1至10個碳原子之烷基、具有2至10個碳原子之烯基、具有2至10個碳原子之炔基、具有6至12個碳原子之芳基、具有2至12個碳原子之雜芳基、具有6至12個碳原子之芳基烷基、鹵素原子、氰基、胺基、甲脒基(amidino group)、硝基、醯胺基、羰基、羥基、磺醯基、胺基甲酸基(carbamate group)、具有1至10個碳原子之烷氧基等。Wherein, R 1 is an alkylene group or alkenyl group having 1 to 10 carbon atoms, or 1 to 5 carbon atoms, or 1 to 3 carbon atoms, and "*" means a bonding point. Alkylene is a divalent functional group derived from alkane, examples of which include linear, branched or cyclic groups, such as methylene, ethylene, propylene, isobutyl, dibutylene, Tertiary butyl, pentylene, hexylene, etc. One or more hydrogen atoms contained in the alkylene group may be substituted by another substituent. Examples of the substituent include an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, Alkynyl groups of 2 to 10 carbon atoms, aryl groups of 6 to 12 carbon atoms, heteroaryl groups of 2 to 12 carbon atoms, arylalkyl groups of 6 to 12 carbon atoms, halogen atoms, cyano Group, amine group, amidino group, nitro group, amide group, carbonyl group, hydroxyl group, sulfonyl group, carbamate group, alkoxy group having 1 to 10 carbon atoms, etc.

本文所使用之用語「經取代」意指鍵結另一官能基以代替化合物中的氫原子,且欲取代之位置並無限制,只要其係氫原子被取代的位置(即,氫原子可經取代基取代的位置)即可。當二或更多個氫原子經取代時,該二或更多個取代基可彼此相同或不同。The term "substituted" as used herein means to bond another functional group to replace the hydrogen atom in the compound, and the position to be substituted is not limited, as long as it is the position where the hydrogen atom is substituted (ie, the hydrogen atom can be replaced by The position where the substituent is substituted). When two or more hydrogen atoms are substituted, the two or more substituents may be the same or different from each other.

烯基意指上述伸烷基在其中間或末端含有至少一個碳-碳雙鍵,其實例包括乙烯、丙烯、丁烯、己烯、乙炔等。烯基中之一或多個氫原子可以如同伸烷基中之相同方式經取代基取代。Alkenyl means that the above-mentioned alkylene group contains at least one carbon-carbon double bond in the middle or terminal, and examples thereof include ethylene, propylene, butene, hexene, acetylene and the like. One or more hydrogen atoms in the alkenyl group may be substituted with a substituent in the same manner as in an alkylene group.

較佳的,經胺基取代之環狀醯亞胺官能基可為以下式表示之官能基:Preferably, the cyclic imine functional group substituted by an amino group may be a functional group represented by the following formula:

[式2][Equation 2]

Figure 02_image007
Figure 02_image007

其中,「*」表示鍵結點。Among them, "*" represents the bond point.

如上述,鹼溶性樹脂包括經胺基取代之環狀醯亞胺官能基以及酸性官能基。具體而言,酸性官能基可鍵結至經胺基取代之環狀醯亞胺官能基的至少一末端。在該情況下,經胺基取代之環狀醯亞胺官能基及酸性官能基可透過經取代或未經取代之伸烷基或者經取代或未經取代之伸芳基(arylene group)彼此鍵結。例如,酸性官能基可透過經取代或未經取代之伸烷基或者經取代或未經取代之伸芳基而鍵結至該經胺基取代之環狀醯亞胺官能基中所含的胺基之末端。酸性官能基可透過經取代或未經取代之伸烷基或者經取代或未經取代之伸芳基而鍵結至該經胺基取代之環狀醯亞胺官能基中所含的醯亞胺官能基之末端。As mentioned above, the alkali-soluble resin includes a cyclic amide functional group substituted with an amine group and an acidic functional group. Specifically, the acidic functional group can be bonded to at least one end of the cyclic imine functional group substituted with an amino group. In this case, the cyclic imine functional group and the acidic functional group substituted by the amino group can be bonded to each other through a substituted or unsubstituted alkylene group or a substituted or unsubstituted arylene group Knot. For example, the acidic functional group can be bonded to the amine contained in the amino-substituted cyclic imine functional group through a substituted or unsubstituted alkylene group or a substituted or unsubstituted arylene group The end of the base. The acidic functional group can be bonded to the amide contained in the cyclic amide functional group substituted by the amino group through the substituted or unsubstituted alkylene group or the substituted or unsubstituted arylene group The end of the functional group.

更具體而言,經胺基取代之環狀醯亞胺官能基中所含的胺基之末端可指式1中之胺基中所含的氮原子,而經胺基取代之環狀醯亞胺官能基中所含的醯亞胺官能基之末端可指式1中之環狀醯亞胺官能基中所含的氮原子。More specifically, the end of the amine group contained in the cyclic amide group substituted by the amino group may refer to the nitrogen atom contained in the amine group in Formula 1, and the cyclic amide group substituted by the amino group The end of the amide functional group contained in the amine functional group may refer to the nitrogen atom contained in the cyclic amide functional group in Formula 1.

伸烷基為由烷烴衍生之二價官能基,其實例包括直鏈、支鏈或環狀基團,諸如亞甲基、伸乙基、伸丙基、伸異丁基、伸二級丁基、伸三級丁基、伸戊基、伸己基等。伸烷基中所含的一或多個氫原子可經另一取代基取代,該取代基之實例包括具有1至10個碳原子之烷基、具有2至10個碳原子之烯基、具有2至10個碳原子之炔基、具有6至12個碳原子之芳基、具有2至12個碳原子之雜芳基、具有6至12個碳原子之芳基烷基、鹵素原子、氰基、胺基、甲脒基、硝基、醯胺基、羰基、羥基、磺醯基、胺基甲酸基、具有1至10個碳原子之烷氧基等。Alkylene is a divalent functional group derived from alkane, and examples thereof include linear, branched or cyclic groups such as methylene, ethylene, propylene, isobutyl, dibutylene, Tertiary butyl, pentylene, hexylene, etc. One or more hydrogen atoms contained in the alkylene group may be substituted by another substituent. Examples of the substituent include an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, Alkynyl groups of 2 to 10 carbon atoms, aryl groups of 6 to 12 carbon atoms, heteroaryl groups of 2 to 12 carbon atoms, arylalkyl groups of 6 to 12 carbon atoms, halogen atoms, cyano Group, amino group, formamidino group, nitro group, amide group, carbonyl group, hydroxyl group, sulfonyl group, carbamate group, alkoxy group having 1 to 10 carbon atoms, etc.

伸芳基意指由芳烴(arene)衍生之二價官能基,其實例包括環狀基團,諸如苯基、萘基等。伸芳基中所含的一或多個氫原子可經另一取代基取代,該取代基之實例包括具有1至10個碳原子之烷基、具有2至10個碳原子之烯基、具有2至10個碳原子之炔基、具有6至12個碳原子之芳基、具有2至12個碳原子之雜芳基、具有6至12個碳原子之芳基烷基、鹵素原子、氰基、胺基、甲脒基、硝基、醯胺基、羰基、羥基、磺醯基、胺基甲酸基、具有1至10個碳原子之烷氧基等。Arylene group means a divalent functional group derived from arene, and examples thereof include cyclic groups such as phenyl, naphthyl and the like. One or more hydrogen atoms contained in the arylene group may be substituted with another substituent. Examples of the substituent include an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, Alkynyl groups of 2 to 10 carbon atoms, aryl groups of 6 to 12 carbon atoms, heteroaryl groups of 2 to 12 carbon atoms, arylalkyl groups of 6 to 12 carbon atoms, halogen atoms, cyano Group, amino group, formamidino group, nitro group, amide group, carbonyl group, hydroxyl group, sulfonyl group, carbamate group, alkoxy group having 1 to 10 carbon atoms, etc.

製造鹼溶性樹脂的方法之實例無特別限制,但鹼溶性樹脂可例如藉由環狀不飽和醯亞胺化合物與胺化合物之間的反應而製造。在此情況下,環狀不飽和醯亞胺化合物及胺化合物中之至少一者可含有於其末端取代之酸性官能基。即,環狀不飽和醯亞胺化合物或胺化合物之末端、或此二化合物之末端可經酸性官能基取代。酸官能基之細節係如前文所述。The example of the method of producing the alkali-soluble resin is not particularly limited, but the alkali-soluble resin can be produced, for example, by a reaction between a cyclic unsaturated imidine compound and an amine compound. In this case, at least one of the cyclic unsaturated amide compound and the amine compound may contain an acidic functional group substituted at its terminal. That is, the terminal of the cyclic unsaturated amide compound or the amine compound, or the terminal of these two compounds may be substituted with an acidic functional group. The details of the acid functional group are as described above.

環狀醯亞胺化合物(cyclic imide compound)為含有上述環狀醯亞胺官能基的化合物,而環狀不飽和醯亞胺化合物(cyclic unsaturated imide compound)係指環狀醯亞胺化合物中含有至少一個不飽和鍵(即,雙鍵或三鍵)的化合物。The cyclic imide compound is a compound containing the above-mentioned cyclic imide functional group, and the cyclic unsaturated imide compound means that the cyclic imide compound contains at least A compound with an unsaturated bond (ie, a double bond or a triple bond).

鹼溶性樹脂可藉由胺化合物中所含之胺基與環狀不飽和醯亞胺化合物中所含之雙鍵或三鍵之間的反應而製造。The alkali-soluble resin can be produced by the reaction between the amine group contained in the amine compound and the double bond or triple bond contained in the cyclic unsaturated amide compound.

用於環狀不飽和醯亞胺化合物與胺化合物之間的反應之重量比的實例無特別限制,但例如,以100重量份之環狀不飽和醯亞胺化合物為基準計,胺化合物可以10至80重量份、或30至60重量份之量混合且用以反應。Examples of the weight ratio used in the reaction between the cyclic unsaturated amide compound and the amine compound are not particularly limited, but for example, based on 100 parts by weight of the cyclic unsaturated amide compound, the amine compound may be 10 To 80 parts by weight, or 30 to 60 parts by weight, are mixed and used for reaction.

環狀不飽和醯亞胺化合物之實例包括N取代之順丁烯二醯亞胺化合物(N-substituted maleimide compound)。用語「N取代」意指代替氫原子之官能基係鍵結至順丁烯二醯亞胺化合物中所含的氮原子。根據N取代之順丁烯二醯亞胺化合物之數目而定,N取代之順丁烯二醯亞胺化合物可分類成單官能N取代之順丁烯二醯亞胺化合物及多官能N取代之順丁烯二醯亞胺化合物。Examples of the cyclic unsaturated amide compound include N-substituted maleimide compound (N-substituted maleimide compound). The term "N substitution" means that the functional group replacing the hydrogen atom is bonded to the nitrogen atom contained in the maleimide compound. According to the number of N-substituted maleimide compounds, N-substituted maleimide compounds can be classified into monofunctional N-substituted maleimide compounds and polyfunctional N-substituted maleimide compounds Maleic imine compound.

單官能N取代之順丁烯二醯亞胺化合物(monofunctional N-substituted maleimide compound)為一順丁烯二醯亞胺化合物中所含之氮原子係經官能基取代的化合物,而多官能N取代之順丁烯二醯亞胺化合物(polyfunctional N-substituted maleimide compound)為二或更多順丁烯二醯亞胺化合物各者中所含的氮原子係透過官能基鍵結的化合物。The monofunctional N-substituted maleimide compound (monofunctional N-substituted maleimide compound) is a compound in which the nitrogen atom contained in a maleimide compound is substituted by a functional group, and the polyfunctional N-substituted maleimide compound The polyfunctional N-substituted maleimide compound is a compound in which the nitrogen atoms contained in each of two or more maleimide compounds are bonded through a functional group.

在單官能N取代之順丁烯二醯亞胺化合物中,取代順丁烯二醯亞胺化合物中所含之氮原子的官能基可包括但不限於各種已知之脂族、脂環族、或芳族官能基,且取代氮原子之官能基可包括其中脂族、脂環族、或芳族官能基係經酸性官能基取代的官能基。酸官能基之細節係如前文所述。In the monofunctional N-substituted maleimide compound, the functional group that replaces the nitrogen atom contained in the maleimide compound may include, but is not limited to, various known aliphatic, cycloaliphatic, or The aromatic functional group, and the functional group substituted for the nitrogen atom may include a functional group in which an aliphatic, alicyclic, or aromatic functional group is substituted with an acidic functional group. The details of the acid functional group are as described above.

單官能N取代之順丁烯二醯亞胺化合物之具體實例包括鄰甲基苯基順丁烯二醯亞胺(o-methylphenyl maleimide)、對羥基苯基順丁烯二醯亞胺(p-hydroxyphenyl maleimide)、對羧基苯基順丁烯二醯亞胺(p-carboxyphenyl maleimide)、十二基順丁烯二醯亞胺(dodecyl maleimide)等。Specific examples of monofunctional N-substituted maleimide compounds include o-methylphenyl maleimide (o-methylphenyl maleimide), p-hydroxyphenyl maleimide (p- hydroxyphenyl maleimide, p-carboxyphenyl maleimide, dodecyl maleimide, etc.

在多官能N取代之順丁烯二醯亞胺化合物中,中介(mediate)二或更多順丁烯二醯亞胺化合物各者中所含的氮原子之間的鍵之官能基可包括但不限於各種已知之脂族、脂環族、或芳族官能基。在一具體實例中,可使用4,4'-二苯甲烷官能基(4,4'-diphenylmethane functional group)等。取代氮原子之官能基可包括其中脂族、脂環族、或芳族官能基係經酸性官能基取代之官能基。酸性官能基之細節係如前文所述。In the polyfunctional N-substituted maleimide compound, the functional group that mediates the bond between the nitrogen atoms contained in each of the two or more maleimide compounds may include but It is not limited to various known aliphatic, cycloaliphatic, or aromatic functional groups. In a specific example, 4,4'-diphenylmethane functional group (4,4'-diphenylmethane functional group) and the like can be used. The functional group substituted for the nitrogen atom may include a functional group in which an aliphatic, alicyclic, or aromatic functional group is substituted with an acidic functional group. The details of the acidic functional group are as described above.

多官能N取代之順丁烯二醯亞胺化合物之具體實例包括4,4'-二苯甲烷雙順丁烯二醯亞胺(4,4'-diphenylmethane bismaleimide)(BMI-1000、BMI-1100等,可購自Daiwakasei Industry Co., Ltd.)、甲苯雙順丁烯二醯亞胺(phenylmethane bismaleimide)、間伸苯基甲烷雙順丁烯二醯亞胺(m-phenylene methane bismaleimide)、雙酚A二苯基醚雙順丁烯二醯亞胺(bisphenol A diphenyl ether bismaleimide)、3,3'-二甲基-5,5'-二乙基-4,4'-二苯甲烷雙順丁烯二醯亞胺(3,3'-dimethyl-5,5'-diethyl-4,4'-diphenylmethane bismaleimide)、4-甲基-1,3-伸苯基雙順丁烯二醯亞胺(4-methyl-1,3-phenylene bismaleimide)、1,6'-雙順丁烯二醯亞胺-(2,2,4-三甲基)己烷(1,6'-bismaleimide-(2,2,4-trimethyl)hexane)等。Specific examples of multifunctional N-substituted maleimide compounds include 4,4'-diphenylmethane bismaleimide (4,4'-diphenylmethane bismaleimide) (BMI-1000, BMI-1100) Etc., available from Daiwakasei Industry Co., Ltd.), toluene bismaleimide (phenylmethane bismaleimide), m-phenylene methane bismaleimide (m-phenylene methane bismaleimide), double Phenol A diphenyl ether bismaleimide (bisphenol A diphenyl ether bismaleimide), 3,3'-dimethyl-5,5'-diethyl-4,4'-diphenylmethane bis-cis 3,3'-dimethyl-5,5'-diethyl-4,4'-diphenylmethane bismaleimide, 4-methyl-1,3-phenylmethane bismaleimide (4-methyl-1,3-phenylene bismaleimide), 1,6'-bismaleimide-(2,2,4-trimethyl)hexane (1,6'-bismaleimide-(2 ,2,4-trimethyl)hexane) and so on.

作為胺化合物,可使用分子結構中含有至少一胺基(-NH2 )之一級胺化合物。更佳的,可使用經胺基取代之羧酸化合物、含二或更多胺基之多官能胺化合物、或其混合物。As the amine compound, a primary amine compound containing at least one amine group (-NH 2) in the molecular structure can be used. More preferably, a carboxylic acid compound substituted with an amine group, a multifunctional amine compound containing two or more amine groups, or a mixture thereof can be used.

在經胺基取代之羧酸化合物中,羧酸化合物可為分子中含有羧酸(-COOH)官能基的化合物,且視鍵結至該羧酸官能基之烴的種類而定,其可包括所有脂族、脂環族、或芳族羧酸。由於大量的為酸官能基之羧酸官能基係透過經胺基取代之羧酸化合物而包含在鹼溶性樹脂中,因此可改善該鹼溶性樹脂的顯影性質。Among the carboxylic acid compounds substituted with an amine group, the carboxylic acid compound may be a compound containing a carboxylic acid (-COOH) functional group in the molecule, and depends on the type of hydrocarbon bonded to the carboxylic acid functional group, which may include All aliphatic, cycloaliphatic, or aromatic carboxylic acids. Since a large amount of carboxylic acid functional groups which are acid functional groups are contained in the alkali-soluble resin through the carboxylic acid compound substituted with amine groups, the development properties of the alkali-soluble resin can be improved.

用語「經取代」意指鍵結另一官能基以代替化合物中之氫原子,且羧酸化合物經胺基取代的位置並無限制,只要其為氫原子可被取代的位置即可。作為取代基之胺基的數目可為1或更多。The term "substituted" means to bond with another functional group to replace the hydrogen atom in the compound, and the position where the carboxylic acid compound is substituted by the amino group is not limited, as long as it is a position where the hydrogen atom can be substituted. The number of amine groups as substituents may be 1 or more.

經胺基取代之羧酸化合物的具體實例包括20種已知為蛋白胺基酸(proteinogenic amino acid)之α-胺基酸、4-胺基丁酸(4-aminobutanoic acid)、5-胺基戊酸(5-aminopentanoic acid)、6-胺基己酸(6-aminohexanoic acid)、7-胺基庚酸(7-amino heptanoic acid)、8-胺基辛酸(8-aminooctanoic acid)、4-胺基苯甲酸(4-aminobenzoic acid)、4-胺基苯乙酸(4-aminophenylacetic acid)、4-胺基環己烷羧酸(4-aminocyclohexane carboxylic acid)等。Specific examples of amino-substituted carboxylic acid compounds include 20 kinds of α-amino acids known as proteinogenic amino acids, 4-aminobutanoic acid, and 5-aminobutanoic acid. 5-aminopentanoic acid, 6-aminohexanoic acid, 7-amino heptanoic acid, 8-aminooctanoic acid, 4- 4-aminobenzoic acid, 4-aminophenylacetic acid, 4-aminocyclohexane carboxylic acid, etc.

此外,含有二或更多胺基之多官能胺化合物可為分子中含有二或更多胺基(-NH2 )之化合物,且視與胺基鍵結之烴的類型而定,其可包括所有脂族、脂環族、或芳族多官能胺。可透過含有二或更多胺基之多官能胺化合物而改善鹼溶性樹脂之可撓性、韌性、銅箔黏著性(copper foil adhesion)等。In addition, the polyfunctional amine compound containing two or more amine groups may be a compound containing two or more amine groups (-NH 2 ) in the molecule, and depends on the type of hydrocarbon bonded to the amine group, which may include All aliphatic, cycloaliphatic, or aromatic polyfunctional amines. The flexibility, toughness and copper foil adhesion of alkali-soluble resins can be improved through multifunctional amine compounds containing two or more amine groups.

含有二或更多胺基之多官能胺化合物之具體實例包括1,3-環己二胺(1,3-cyclohexanediamine)、1,4-環己二胺(1,4-cyclohexanediamine)、1,3-雙(胺基甲基)-環己烷(1,3-bis(aminomethyl)-cyclohexane)、1,4-雙(胺基甲基)-環己烷(1,4-bis(aminomethyl)-cyclohexane)、雙(胺基甲基)-降莰烯(bis(aminomethyl)-norbornene)、八氫-4,7-亞甲基茚-1(2)(octahydro-4,7-methanoindene-1(2))、5(6)-二甲胺(5(6)-dimethanamine)、4,4'-亞甲基雙(環己胺)(4,4'-methylenebis(cyclohexylamine))、4,4'-亞甲基雙(2-甲基環己胺)(4,4'-methylenebis(2-methylcyclohexylamine))、異佛酮二胺(isophoronediamine)、1,3-苯二胺(1,3-phenylenediamine)、1,4-苯二胺、2,5-二甲基-1,4-苯二胺(2,5-dimethyl-1,4-phenylenediamine)、2,3,5,6-四甲基-1,4-苯二胺(2,3,5,6-tetramethyl-1,4-phenylenediamine)、2,4,5,6-四氟-1,3-苯二胺(2,4,5,6-tetrafluoro-1,3-phenylenediamine)、2,3,5,6-四氟-1,4-苯二胺、4,6-二胺基間苯二酚(4,6-diaminoresorcinol)、2,5-二胺基-1,4-苯二硫酚(2,5-diamino-1,4-benzenedithiol)、3-胺基苄胺(3-aminobenzylamine)、4-胺基苄胺、間茬二胺(m-xylenediamine)、對茬二胺(p-xylenediamine)、1,5-二胺基萘(1,5-diaminonaphthalene)、2,7-二胺基茀(2,7-diaminofluorene)、2,6-二胺基蒽醌(2,6-diaminoanthraquinone)、間聯甲苯胺(m-tolidine)、鄰聯甲苯胺(o-tolidine)、3,3',5,5'-四甲基聯苯胺(3,3',5,5'-tetramethylbenzidine) (TMB)、鄰聯大茴香胺(o-dianisidine)、4,4'-亞甲基雙(2-氯苯胺)(4,4'-methylenebis(2-chloroaniline))、3,3'-二胺基聯苯胺(3,3'-diaminobenzidine)、2,2'-雙(三氟甲基)-聯苯胺(2,2'-bis(trifluoromethyl)-benzidine)、4,4'-二胺基八氟聯苯(4,4'-diaminooctafluorobiphenyl)、4,4'-二胺基-對聯三苯(4,4'-diamino-p-terphenyl)、3,3'-二胺基二苯甲烷(3,3'-diaminodiphenylmethane)、3,4'-二胺基二苯甲烷(3,4'-diaminodiphenylmethane)、4,4'-二胺基二苯甲烷、4,4'-二胺基-3,3'-二甲基二苯甲烷(4,4'-diamino-3,3'-dimethyldiphenylmethane)、4,4'-亞甲基雙(2-乙基-6-甲基苯胺)(4,4'-methylenebis(2-ethyl-6-methylaniline))、4,4'-亞甲基雙(2,6-二乙基苯胺)(4,4'-methylenebis(2,6-diethylaniline))、3,3'-二胺基二苯基酮(3,3'-diaminobenzophenone)、4,4'-二胺基二苯基酮(4,4'-diaminobenzophenone)、4,4'-乙二苯胺(4,4'-ethylenedianiline)、4,4'-二胺基-2,2'-二甲基聯苄(4,4'-diamino-2,2'-dimethylbibenzyl)、2,2'-雙(3-胺基-4-羥基苯基)丙烷(2,2'-bis(3-amino-4-hydroxyphenyl)propane)、2,2'-雙(3-胺基苯基)-六氟丙烷(2,2'-bis(3-aminophenyl)-hexafluoropropane)、2,2'-雙(4-胺基苯基)-六氟丙烷(2,2'-bis(4-aminophenyl)-hexafluoropropane)、2,2'-雙(3-胺基-4-甲基苯基)-六氟丙烷(2,2'-bis(3-amino-4-methylphenyl)-hexafluoropropane)、2,2'-雙(3-胺基-4-羥基苯基)-六氟丙烷(2,2'-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane)、α,α'-雙(4-胺基苯基)-1,4-二異丙苯(α,α'-bis(4-aminophenyl)-1,4-diisopropylbenzene)、1,3-雙-[2-(4-胺基苯基)-2-丙基]苯(1,3-bis-[2-(4-aminophenyl)-2-propyl]benzene)、1,1'-雙(4-胺基苯基)-環己烷(1,1'-bis(4-aminophenyl)-cyclohexane)、9,9'-雙(4-胺基苯基)-茀(9,9'-bis(4-aminophenyl)-fluorene)、9,9'-雙(4-胺基-3-氯苯基)茀(9,9'-bis(4-amino-3-chlorophenyl) fluorene)、9,9'-雙(4-胺基-3-氟苯基)茀(9,9'-bis(4-amino-3-fluorophenyl)fluorene)、9,9'-雙(4-胺基-3-甲基苯基)茀(9,9'-bis(4-amino-3-methylphenyl)fluorene)、3,4'-二胺基二苯基醚(3,4'-diaminodiphenyl ether)、4,4'-二胺基二苯基醚、1,3-雙(3-胺基苯氧基)-苯(1,3-bis(3-aminophenoxy)-benzene)、1,3-雙(4-胺基苯氧基)-苯(1,3-bis(4-aminophenoxy)- benzene)、1,4-雙(4-胺基苯氧基)-苯(1,4-bis(4-aminophenoxy)- benzene)、1,4-雙(4-胺基-2-三氟甲基苯氧基)-苯(1,4-bis(4-amino-2-trifluoromethylphenoxy)-benzene)、4,4'-雙(4-胺基苯氧基)-聯苯(4,4'-bis(4-aminophenoxy)-biphenyl)、2,2'-雙-[4-(4-胺基苯氧基)-苯基]丙烷(2,2'-bis-[4-(4-aminophenoxy)-phenyl]propane)、2,2'-雙-[4-(4-胺基苯氧基)-苯基]六氟丙烷(2,2'-bis-[4-(4-aminophenoxy)-phenyl]hexafluoropropane)、雙(2-胺基苯基)硫醚(bis(2-aminophenyl)sulfide)、雙(4-胺基苯基)硫醚(bis(4-aminophenyl) sulfide)、雙(3-胺基苯基)碸(bis(3-aminophenyl)sulfone)、雙(4-胺基苯基)碸(bis(4-aminophenyl)sulfone)、雙(3-胺基-4-羥基)碸(bis(3-amino-4-hydroxy)sulfone)、雙[4-(3-胺基苯氧基)-苯基]碸(bis[4-(3-aminophenoxy)-phenyl]sulfone)、雙-[4-(4-胺基苯氧基)-苯基]碸(bis-[4-(4-aminophenoxy)-phenyl]sulfone)、鄰聯甲苯胺碸(o-tolidine sulfone)、3,6-二胺基咔唑(3,6-diaminocarbazole)、1,3,5-參(4-胺基苯基)-苯(1,3,5-tris(4-aminophenyl)-benzene)、1,3-雙(3-胺基丙基)-四甲基二矽氧烷(1,3-bis(3-aminopropyl)-tetramethyldisiloxane)、4,4'-二胺基苯甲醯胺苯(4,4'-diaminobenzanilide)、2-(3-胺基苯基)-5-胺基苯并咪唑(2-(3-aminophenyl)-5-aminobenzimidazole)、2-(4-胺基苯基)-5-胺基苯并㗁唑(2-(4-aminophenyl)-5-aminobenzoxazole)、1-(4-胺基苯基)-2,3-二氫-1,3,3-三甲基-1H-茚-5-胺(1-(4-aminophenyl)-2,3-dihydro-1,3,3-trimethyl-1H-inden-5-amine)、4,6-二胺基間苯二酚(4,6-diaminoresorcinol)、2,3,5,6-吡啶四胺(2,3,5,6-pyridine tetraamine)、含有矽氧烷結構之多官能胺(polyfunctional amine)(PAM-E、KF-8010、X-22-161A、X-22-161B、KF-8012、KF-8008、X-22-1660B-3及X-22-9409,彼等為Shin-Etsu Silicone Co., Ltd.之產品)、含有矽氧烷結構之多官能胺(Dow Corning 3055,其為Dow Corning之產品)、含有聚醚(polyether)結構之多官能胺(Huntsman and BASF)等。Specific examples of polyfunctional amine compounds containing two or more amine groups include 1,3-cyclohexanediamine (1,3-cyclohexanediamine), 1,4-cyclohexanediamine (1,4-cyclohexanediamine), 1, 3-bis(aminomethyl)-cyclohexane (1,3-bis(aminomethyl)-cyclohexane), 1,4-bis(aminomethyl)-cyclohexane (1,4-bis(aminomethyl) -cyclohexane), bis(aminomethyl)-norbornene, octahydro-4,7-methylene indene-1(2)(octahydro-4,7-methanoindene-1 (2)), 5(6)-dimethanamine (5(6)-dimethanamine), 4,4'-methylenebis(cyclohexylamine)(4,4'-methylenebis(cyclohexylamine)), 4, 4'-methylenebis(2-methylcyclohexylamine) (4,4'-methylenebis(2-methylcyclohexylamine)), isophoronediamine (isophoronediamine), 1,3-phenylenediamine (1,3 -phenylenediamine), 1,4-phenylenediamine, 2,5-dimethyl-1,4-phenylenediamine (2,5-dimethyl-1,4-phenylenediamine), 2,3,5,6-tetra Methyl-1,4-phenylenediamine (2,3,5,6-tetramethyl-1,4-phenylenediamine), 2,4,5,6-tetrafluoro-1,3-phenylenediamine (2,4 ,5,6-tetrafluoro-1,3-phenylenediamine), 2,3,5,6-tetrafluoro-1,4-phenylenediamine, 4,6-diaminoresorcinol (4,6-diaminoresorcinol ), 2,5-diamino-1,4-benzenedithiol, 3-aminobenzylamine, 4-aminobenzylamine , M-xylenediamine, p-xylenediamine, 1,5-diaminonaphthalene, 2,7-diaminonaphthalene (2,7- diaminofluorene), 2,6-diaminoanthraquinone, m-tolidine, o-tolidine, 3,3',5,5'- Tetramethylbenzidine (3,3',5 ,5'-tetramethylbenzidine) (TMB), o-dianisidine (o-dianisidine), 4,4'-methylenebis(2-chloroaniline) (4,4'-methylenebis(2-chloroaniline)), 3,3'-diaminobenzidine (3,3'-diaminobenzidine), 2,2'-bis(trifluoromethyl)-benzidine (2,2'-bis(trifluoromethyl)-benzidine), 4, 4'-diaminooctafluorobiphenyl (4,4'-diaminooctafluorobiphenyl), 4,4'-diamino-p-terphenyl (4,4'-diamino-p-terphenyl), 3,3'-di Aminodiphenylmethane (3,3'-diaminodiphenylmethane), 3,4'-diaminodiphenylmethane (3,4'-diaminodiphenylmethane), 4,4'-diaminodiphenylmethane, 4,4' -Diamino-3,3'-dimethyldiphenylmethane (4,4'-diamino-3,3'-dimethyldiphenylmethane), 4,4'-methylene bis(2-ethyl-6-methyl) Phenylamine) (4,4'-methylenebis(2-ethyl-6-methylaniline)), 4,4'-methylenebis(2,6-diethylaniline) (4,4'-methylenebis(2, 6-diethylaniline)), 3,3'-diaminobenzophenone (3,3'-diaminobenzophenone), 4,4'-diaminobenzophenone (4,4'-diaminobenzophenone), 4, 4'-ethylenedianiline (4,4'-ethylenedianiline), 4,4'-diamino-2,2'-dimethylbibenzyl (4,4'-diamino-2,2'-dimethylbibenzyl), 2,2'-bis(3-amino-4-hydroxyphenyl)propane (2,2'-bis(3-amino-4-hydroxyphenyl)propane), 2,2'-bis(3-aminobenzene) Yl)-hexafluoropropane (2,2'-bis(3-aminophenyl)-hexafluoropropane), 2,2'-bis(4-aminophenyl)-hexafluoropropane (2,2'-bis(4- aminophenyl)-hexafluoropropane), 2,2'-bis(3-amino-4-methylphenyl)-hexafluoropropane (2,2'-bis(3-amino-4-methylphenyl)-hexafluoroprop ane), 2,2'-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane (2,2'-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane), α,α'- Bis(4-aminophenyl)-1,4-diisopropylbenzene (α,α'-bis(4-aminophenyl)-1,4-diisopropylbenzene), 1,3-bis-[2-(4- Aminophenyl)-2-propyl]benzene (1,3-bis-[2-(4-aminophenyl)-2-propyl]benzene), 1,1'-bis(4-aminophenyl)- Cyclohexane (1,1'-bis(4-aminophenyl)-cyclohexane), 9,9'-bis(4-aminophenyl)-fluorene (9,9'-bis(4-aminophenyl)-fluorene) , 9,9'-bis(4-amino-3-chlorophenyl) fluorene (9,9'-bis(4-amino-3-chlorophenyl) fluorene), 9,9'-bis(4-amino -3-fluorophenyl) fluorene (9,9'-bis(4-amino-3-fluorophenyl)fluorene), 9,9'-bis(4-amino-3-methylphenyl)fluorene (9, 9'-bis(4-amino-3-methylphenyl)fluorene), 3,4'-diaminodiphenyl ether (3,4'-diaminodiphenyl ether), 4,4'-diaminodiphenyl ether , 1,3-bis(3-aminophenoxy)-benzene (1,3-bis(3-aminophenoxy)-benzene), 1,3-bis(4-aminophenoxy)-benzene (1 ,3-bis(4-aminophenoxy)-benzene), 1,4-bis(4-aminophenoxy)-benzene (1,4-bis(4-aminophenoxy)-benzene), 1,4-bis( 4-amino-2-trifluoromethylphenoxy)-benzene (1,4-bis(4-amino-2-trifluoromethylphenoxy)-benzene), 4,4'-bis(4-aminophenoxy) )-Biphenyl (4,4'-bis(4-aminophenoxy)-biphenyl), 2,2'-bis-[4-(4-aminophenoxy)-phenyl]propane(2,2'- bis-[4-(4-aminophenoxy)-phenyl]propane), 2,2'-bis-[4-(4-aminophenoxy)-phenyl]hexafluoropropane(2,2'-bis- [4-(4-aminophenoxy)-phenyl]hexafluoro propane), bis(2-aminophenyl)sulfide, bis(4-aminophenyl) sulfide, bis(3-amine) Bis(3-aminophenyl)sulfone, bis(4-aminophenyl)sulfone, bis(3-aminophenyl)sulfone, bis(3-aminophenyl)sulfone 3-amino-4-hydroxy)sulfone), bis[4-(3-aminophenoxy)-phenyl]sulfone (bis[4-(3-aminophenoxy)-phenyl]sulfone), bis-[4- (4-aminophenoxy)-phenyl]sulfone (bis-[4-(4-aminophenoxy)-phenyl]sulfone), o-tolidine sulfone, 3,6-diamino Carbazole (3,6-diaminocarbazole), 1,3,5-ginseng (4-aminophenyl)-benzene (1,3,5-tris(4-aminophenyl)-benzene), 1,3-bis( 3-aminopropyl)-tetramethyldisiloxane (1,3-bis(3-aminopropyl)-tetramethyldisiloxane), 4,4'-diaminobenzanilide (4,4'-diaminobenzanilide) ), 2-(3-aminophenyl)-5-aminobenzimidazole (2-(3-aminophenyl)-5-aminobenzimidazole), 2-(4-aminophenyl)-5-aminobenzene 2-(4-aminophenyl)-5-aminobenzoxazole, 1-(4-aminophenyl)-2,3-dihydro-1,3,3-trimethyl-1H-indene-5 -Amine (1-(4-aminophenyl)-2,3-dihydro-1,3,3-trimethyl-1H-inden-5-amine), 4,6-diaminoresorcinol (4,6- diaminoresorcinol), 2,3,5,6-pyridine tetraamine (2,3,5,6-pyridine tetraamine), polyfunctional amine (PAM-E, KF-8010, X -22-161A, X-22-161B, KF-8012, KF-8008, X-22-1660B-3 and X-22-9409, which are products of Shin-Etsu Silicone Co., Ltd.), containing Polyfunctional amine with siloxane structure (D ow Corning 3055, which is a product of Dow Corning), polyether structure-containing polyfunctional amines (Huntsman and BASF), etc.

此外,鹼溶性樹脂可包括至少一以下式3表示之重複單元及至少一以下式4表示之重複單元:In addition, the alkali-soluble resin may include at least one repeating unit represented by the following formula 3 and at least one repeating unit represented by the following formula 4:

[式3][Equation 3]

Figure 02_image009
Figure 02_image009

其中,R2 為直接鍵(direct bond)、具有1至20個碳原子之伸烷基、具有1至20個碳原子之烯基、或具有6至20個碳原子之伸芳基,且「*」表示鍵結點,Wherein, R 2 is a direct bond, an alkylene group having 1 to 20 carbon atoms, an alkenyl group having 1 to 20 carbon atoms, or an aryl group having 6 to 20 carbon atoms, and "*" represents the bond point,

[式4][Equation 4]

Figure 02_image011
Figure 02_image011

其中,R3 為直接鍵、具有1至20個碳原子之伸烷基、具有1至20個碳原子之烯基、或具有6至20個碳原子之伸芳基;R4 為-H、-OH、-NR5 R6 、鹵素、或具有1至20個碳原子之烷基;R5 及R6 可各自獨立地為氫、具有1至20個碳原子之烷基、或具有6至20個碳原子之芳基,且「*」表示鍵結點。Wherein, R 3 is a direct bond, an alkylene group having 1 to 20 carbon atoms, an alkenyl group having 1 to 20 carbon atoms, or an aryl group having 6 to 20 carbon atoms; R 4 is -H, -OH, -NR 5 R 6 , halogen, or an alkyl group having 1 to 20 carbon atoms; R 5 and R 6 may each independently be hydrogen, an alkyl group having 1 to 20 carbon atoms, or having 6 to An aryl group with 20 carbon atoms, and "*" indicates the point of bonding.

較佳的,於式3中,R2 可為伸苯基(phenylene),而於式4中,R3 可為伸苯基且R4 可為-OH。Preferably, in Formula 3, R 2 can be phenylene, and in Formula 4, R 3 can be phenylene and R 4 can be -OH.

並且,鹼溶性樹脂除了以式3表示之重複單元及以式4表示之重複單元以外,可進一步包括乙烯基系重複單元(vinyl-based repeating unit)。乙烯基系重複單元為分子中含有至少一個乙烯基之乙烯基系單體的同元聚合物中所含的重複單元,乙烯基系單體的實例無特別限制,且包括乙烯、丙烯、異丁烯、丁二烯、苯乙烯、丙烯酸、甲基丙烯酸、順丁烯二酸酐、順丁烯二醯亞胺等。In addition, the alkali-soluble resin may further include a vinyl-based repeating unit in addition to the repeating unit represented by Formula 3 and the repeating unit represented by Formula 4. The vinyl-based repeating unit is a repeating unit contained in a homopolymer of a vinyl-based monomer containing at least one vinyl group in the molecule. Examples of the vinyl-based monomer are not particularly limited and include ethylene, propylene, isobutylene, Butadiene, styrene, acrylic acid, methacrylic acid, maleic anhydride, maleimide, etc.

含有至少一以式3表示之重複單元及至少一以式4表示之重複單元的鹼溶性樹脂可藉由含有以下式5表示之重複單元的聚合物、以下式6表示之胺、與以下式7表示之胺之間的反應而製造:The alkali-soluble resin containing at least one repeating unit represented by formula 3 and at least one repeating unit represented by formula 4 can be obtained by a polymer containing a repeating unit represented by the following formula 5, an amine represented by the following formula 6 and the following formula 7. Manufactured by the reaction between the amines:

[式5][Equation 5]

Figure 02_image013
Figure 02_image013

[式6][Equation 6]

Figure 02_image015
Figure 02_image015

[式7][Equation 7]

Figure 02_image017
Figure 02_image017

於式5至7中,R2 至R4 係如上文關於式3及4所定義,而「*」表示鍵結點。In formulas 5 to 7, R 2 to R 4 are as defined above for formulas 3 and 4, and "*" represents a bonding point.

含有以式5表示之重複單元的聚合物之具體實例無特別限制,且包括SMA (Cray Valley)、Xiran (Polyscope)、Scripset (Solenis)、Isobam (Kuraray)、聚酐樹脂(Polyanhydride resin)(Chevron Phillips Chemical Company)、Maldene (Lindau Chemicals)等。Specific examples of the polymer containing the repeating unit represented by Formula 5 are not particularly limited, and include SMA (Cray Valley), Xiran (Polyscope), Scripset (Solenis), Isobam (Kuraray), Polyanhydride resin (Chevron Phillips Chemical Company), Maldene (Lindau Chemicals), etc.

此外,含有至少一以式3表示之重複單元及至少一以式4表示之重複單元的鹼溶性樹脂可藉由以下式8表示之化合物與以下式9表示之化合物之間的反應而製造:In addition, the alkali-soluble resin containing at least one repeating unit represented by formula 3 and at least one repeating unit represented by formula 4 can be produced by the reaction between the compound represented by the following formula 8 and the compound represented by the following formula 9:

[式8][Equation 8]

Figure 02_image019
Figure 02_image019

[式9][Equation 9]

Figure 02_image021
Figure 02_image021

於式8及9中,R2 至R4 係如上文關於式3及4所定義。In formulas 8 and 9, R 2 to R 4 are as defined above for formulas 3 and 4.

此外,作為鹼溶性樹脂,可使用為人熟知且常用之分子中含有羧基或酚基(phenol group)的含羧基之樹脂或含酚基之樹脂。較佳的,可使用含羧基之樹脂或含羧基之樹脂與含酚基之樹脂的混合物。In addition, as the alkali-soluble resin, a well-known and commonly used carboxyl group-containing resin or phenol group-containing resin containing a carboxyl group or a phenol group in the molecule can be used. Preferably, a carboxyl group-containing resin or a mixture of a carboxyl group-containing resin and a phenol group-containing resin can be used.

含羧基之樹脂(carboxyl group-containing resin)可為以下(1)至(7)中所列之樹脂的任一者,但不限於此:The carboxyl group-containing resin can be any one of the following resins listed in (1) to (7), but is not limited thereto:

(1)藉由使多官能環氧樹脂(polyfunctional epoxy resin)與飽和或不飽和單羧酸(monocarboxylic acid)反應、然後與多元酸酐(polybasic acid anhydride)反應所獲得之含羧基之樹脂,(1) A carboxyl group-containing resin obtained by reacting a polyfunctional epoxy resin with a saturated or unsaturated monocarboxylic acid and then reacting with a polybasic acid anhydride,

(2)藉由使雙官能環氧樹脂(bifunctional epoxy resin)與雙官能酚(bifunctional phenol)及/或二羧酸(dicarboxylic acid)反應、然後與多元酸酐反應所獲得之含羧基之樹脂,(2) A carboxyl group-containing resin obtained by reacting bifunctional epoxy resin with bifunctional phenol and/or dicarboxylic acid and then reacting with polybasic acid anhydride,

(3)藉由使多官能酚系樹脂(polyfunctional phenolic resin)與分子中具有一環氧基之化合物反應、然後與多元酸酐反應所獲得之含羧基之樹脂,(3) A carboxyl group-containing resin obtained by reacting a polyfunctional phenolic resin with a compound having an epoxy group in the molecule, and then reacting with a polybasic acid anhydride,

(4)藉由使分子中具有二或更多醇式羥基(alcoholic hydroxyl group)之化合物與多元酸酐反應所獲得之含羧基之樹脂,(4) A carboxyl group-containing resin obtained by reacting a compound having two or more alcoholic hydroxyl groups in the molecule with a polybasic acid anhydride,

(5)藉由使二胺與二酐(dianhydride)反應所獲得之聚醯胺酸樹脂(polyamic acid resin)或該聚醯胺酸樹脂之共聚物樹脂,(5) Polyamic acid resin or copolymer resin of the polyamic acid resin obtained by reacting diamine and dianhydride,

(6)藉由丙烯酸之反應所獲得之聚丙烯酸樹脂(polyacrylic acid resin)或該聚丙烯酸樹脂之共聚物,及(6) A polyacrylic acid resin or a copolymer of the polyacrylic acid resin obtained by the reaction of acrylic acid, and

(7)藉由以弱酸、二胺、咪唑、或二甲亞碸對聚順丁烯二酸酐樹脂(polymaleic anhydride resin)(藉由使順丁烯二酸酐反應而獲得)及該聚順丁烯二酸酐之共聚物之酐(anhydride)進行開環作用(ring-opening)所製備的樹脂。(7) A polymaleic anhydride resin (obtained by reacting maleic anhydride) with a weak acid, diamine, imidazole, or dimethylene oxide, and the polymaleic anhydride resin A resin prepared by ring-opening the anhydride of a copolymer of dianhydrides.

含羧基之樹脂之更具體實例包括CCR-1291H (Nippon Kayaku)、SHA-1216CA60 (Shin-A T&C)、Noverite K-700 (Lubrizol)、或其二或更多者的混合物。More specific examples of the carboxyl group-containing resin include CCR-1291H (Nippon Kayaku), SHA-1216CA60 (Shin-A T&C), Noverite K-700 (Lubrizol), or a mixture of two or more thereof.

含酚基之樹脂(phenolic group-containing resin)的實例無特別限制,但包括酚醛樹脂(novolac resin),諸如酚系酚醛樹脂(phenol novolac resin)、甲酚酚醛樹脂(cresol novolac resin)、雙酚F(bisphenol F)(BPF)酚醛樹脂、或雙酚A系樹脂(bisphenol A based resin)諸如4,4'-(1-(4-(2-(4-羥基苯基)丙-2-基)苯基)乙-1,1-二基)二酚(4,4'-(1-(4-(2-(4-hydroxyphenyl)propan-2-yl)phenyl)ethane-1,1-diyl)diphenol),彼等可單獨或組合使用。Examples of phenolic group-containing resins are not particularly limited, but include novolac resins, such as phenol novolac resins, cresol novolac resins, and bisphenol resins. F (bisphenol F) (BPF) phenolic resin, or bisphenol A based resin such as 4,4'-(1-(4-(2-(4-hydroxyphenyl)prop-2-yl )Phenyl)ethane-1,1-diyl)diphenol (4,4'-(1-(4-(2-(4-hydroxyphenyl)propan-2-yl)phenyl)ethane-1,1-diyl )diphenol), they can be used alone or in combination.

鹼溶性樹脂可具有以KOH滴定(KOH titration)測定為50 mgKOH/g至250 mgKOH/g、或70 mgKOH/g至200 mgKOH/g之酸值(acid value)。鹼溶性樹脂之酸值的測量方法之實例無特別限制,但例如可使用以下方法。製備濃度為0.1 N之KOH溶液(溶劑:甲醇)作為鹼溶液,及製備(α-萘酚)苯甲醇(alpha-naphtholbenzein)(pH:0.8至8.2為黃色,或10.0為藍綠色)作為指示劑(indicator)。隨後,取樣約1 g至2 g之鹼溶性樹脂並溶於50 g之二甲基甲醯胺(DMF)溶劑中,然後於其中加入指示劑,隨後用該鹼溶液滴定。於滴定完成時,根據所使用之鹼溶液的量測定酸值,其單位為mg KOH/g。The alkali-soluble resin may have an acid value of 50 mgKOH/g to 250 mgKOH/g, or 70 mgKOH/g to 200 mgKOH/g as determined by KOH titration. Examples of the method for measuring the acid value of the alkali-soluble resin are not particularly limited, but, for example, the following method can be used. Prepare a KOH solution (solvent: methanol) with a concentration of 0.1 N as an alkali solution, and prepare (α-naphthol) benzyl alcohol (alpha-naphtholbenzein) (pH: 0.8 to 8.2 for yellow, or 10.0 for blue-green) as an indicator (indicator). Subsequently, about 1 g to 2 g of alkali-soluble resin was sampled and dissolved in 50 g of dimethylformamide (DMF) solvent, and then an indicator was added thereto, followed by titration with the alkali solution. When the titration is completed, the acid value is determined according to the amount of alkali solution used, and the unit is mg KOH/g.

若鹼溶性樹脂之酸值過度降低至低於50 mgKOH/g,則鹼溶性樹脂的顯影性質會降低,因此使得難以進行顯影程序。此外,若鹼溶性樹脂之酸值過度提高至高於250 mgKOH/g時,會因極性提高而發生與其他樹脂相分離(phase separation)。If the acid value of the alkali-soluble resin is excessively reduced below 50 mgKOH/g, the development properties of the alkali-soluble resin will be reduced, thus making it difficult to perform the development process. In addition, if the acid value of the alkali-soluble resin is excessively increased to more than 250 mgKOH/g, phase separation from other resins will occur due to the increased polarity.

熱固性黏合劑Thermosetting adhesive

根據本揭示內容之一實施態樣,圖案化聚合物樹脂層含有熱固性黏合劑(thermosetting binder)。According to one embodiment of the present disclosure, the patterned polymer resin layer contains a thermosetting binder.

熱固性黏合劑可包括環氧基以及選自由下列所組成之群組中之至少一官能基:氧呾基(oxetanyl group)、環狀醚基(cyclic ether group)、環狀硫醚基(cyclic thioether group)、氰基、順丁烯二醯亞胺基(maleimide group)及苯并㗁𠯤基(benzoxazine group),彼等為熱可固化官能基(heat-curable functional group)。即,熱固性黏合劑必定包含環氧基,除了環氧基之外還可包含氧呾基、環狀醚基、環狀硫醚基、氰基、順丁烯二醯亞胺基、苯并㗁𠯤基、或其二或更多者的混合物。The thermosetting adhesive may include an epoxy group and at least one functional group selected from the group consisting of: oxetanyl group, cyclic ether group, and cyclic thioether group. group), cyano group, maleimide group and benzoxazine group, which are heat-curable functional groups. That is, the thermosetting adhesive must contain an epoxy group, and in addition to the epoxy group, it may also contain an oxo group, a cyclic ether group, a cyclic thioether group, a cyano group, a maleimide group, and a benzo 𠯤 base, or a mixture of two or more of them.

該熱固性黏合劑可藉由透過熱固化而與鹼溶性樹脂等形成交聯而確保絕緣層之耐熱性或機械性質。The thermosetting adhesive can ensure the heat resistance or mechanical properties of the insulating layer by forming crosslinks with alkali-soluble resins and the like through thermal curing.

更具體而言,作為熱固性黏合劑,可使用分子中含有上述二或更多官能基之多官能樹脂化合物。More specifically, as the thermosetting adhesive, a polyfunctional resin compound containing the above-mentioned two or more functional groups in the molecule can be used.

多官能樹脂化合物可包括分子中含有二或更多環狀醚基及/或環狀硫醚基(下文稱為環狀(硫)醚基)之樹脂。The polyfunctional resin compound may include a resin containing two or more cyclic ether groups and/or cyclic thioether groups (hereinafter referred to as cyclic (thio)ether groups) in the molecule.

分子中含有二或更多環狀(硫)醚基之熱固性黏合劑可包括分子中具有至少兩個3員、4員或5員環狀醚基及/或至少兩個環狀硫醚基之化合物。Thermosetting adhesives containing two or more cyclic (thio) ether groups in the molecule may include those having at least two 3-membered, 4-membered, or 5-membered cyclic ether groups and/or at least two cyclic thioether groups in the molecule. Compound.

分子中具有二或更多環狀硫醚基之化合物的實例包括雙酚A型環硫化物樹脂(bisphenol A episulfide resin) YL 7000 (由Japan Epoxy Resin製造)等。Examples of the compound having two or more cyclic sulfide groups in the molecule include bisphenol A episulfide resin YL 7000 (manufactured by Japan Epoxy Resin) and the like.

此外,多官能樹脂化合物可包括分子中含有至少兩環氧基之多官能環氧化合物(polyfunctional epoxy compound)、分子中含有至少兩氧呾基之多官能氧呾化合物、分子中含有二或更多硫醚基之環硫化物樹脂、分子中含有至少兩氰基之多官能氰酸酯化合物、或分子中含有至少兩苯并㗁𠯤基之多官能苯并㗁𠯤化合物。In addition, the polyfunctional resin compound may include a polyfunctional epoxy compound containing at least two epoxy groups in the molecule, a polyfunctional epoxy compound containing at least two oxygen groups in the molecule, and a polyfunctional epoxy compound containing two or more in the molecule. Sulfide-based episulfide resins, polyfunctional cyanate compounds containing at least two cyano groups in the molecule, or polyfunctional benzophenone compounds containing at least two benzothio groups in the molecule.

多官能環氧化合物之具體實例包括雙酚A型環氧樹脂、氫化雙酚A型環氧樹脂、溴化雙酚A型環氧樹脂(brominated bisphenol A-type epoxy resin)、雙酚F型環氧樹脂、雙酚S型環氧樹脂、酚醛型環氧樹脂(novolac-type epoxy resin)、酚系酚醛型環氧樹脂(phenol novolac-type epoxy resin)、甲酚酚醛型環氧樹脂(cresol novolac-type epoxy resin)、N-環氧丙基型環氧樹脂(N-glycidyl-type epoxy resin)、雙酚A酚醛型環氧樹脂(bisphenol A novolac-type epoxy resin)、聯茬酚型環氧樹脂(bixylenol-type epoxy resin)、聯苯酚型環氧樹脂(biphenol-type epoxy resin)、螯合物型環氧樹脂(chelate-type epoxy resin)、乙二醛型環氧樹脂(glyoxal-type epoxy resin)、含胺基之環氧樹脂、橡膠改質之環氧樹脂(rubber-modified epoxy resin)、二環戊二烯酚型環氧樹脂(dicyclopentadiene phenolic-type epoxy resin)、酞酸二環氧丙酯樹脂(diglycidylphthalate resin)、雜環環氧樹脂(heterocyclic epoxy resin)、四環氧丙基茬酚基乙烷樹脂(tetraglycidyl xylenoylethane resin)、聚矽氧改質之環氧樹脂(silicone-modified epoxy resin)、ε-己內酯改質之環氧樹脂(ε-caprolactone-modified epoxy resin)等。此外,為了賦予阻燃性,可使用結構中引入諸如磷之原子者。當該等環氧樹脂經熱固化時,彼等改善固化塗層之性質,諸如黏著性、焊料耐熱性(solder heat resistance)、無電鍍覆抗性(electroless plating resistance)。Specific examples of the polyfunctional epoxy compound include bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, brominated bisphenol A-type epoxy resin, and bisphenol F type epoxy resin. Oxygen resin, bisphenol S type epoxy resin, novolac-type epoxy resin, phenol novolac-type epoxy resin, cresol novolac epoxy resin -type epoxy resin), N-glycidyl-type epoxy resin, bisphenol A novolac-type epoxy resin, joint phenolic epoxy Resin (bixylenol-type epoxy resin), biphenol-type epoxy resin, chelate-type epoxy resin, glyoxal-type epoxy resin resin), amine-containing epoxy resin, rubber-modified epoxy resin, dicyclopentadiene phenolic-type epoxy resin, phthalic acid epoxy resin Diglycidylphthalate resin, heterocyclic epoxy resin, tetraglycidyl xylenoylethane resin, silicone-modified epoxy resin resin), ε-caprolactone-modified epoxy resin, etc. In addition, in order to impart flame retardancy, a structure having atoms such as phosphorus introduced into the structure can be used. When the epoxy resins are thermally cured, they improve the properties of the cured coating, such as adhesion, solder heat resistance, and electroless plating resistance.

多官能氧呾化合物(polyfunctional oxetane compound)之實例包括多官能氧呾,諸如雙[(3-甲基-3-氧呾基甲氧基)甲基]醚(bis[(3-methyl-3-oxetanylmethoxy)methyl]ether)、雙[(3-乙基-3-氧呾基甲氧基)甲基]醚(bis[(3-ethyl-3-oxetanylmethoxy)methyl]ether)、1,4-雙[(3-甲基-3-氧呾基甲氧基)甲基]苯(1,4-bis[(3-methyl-3-oxetanylmethoxy)methyl]benzene)、1,4-雙[(3-乙基-3-氧呾基甲氧基)甲基]苯(1,4-bis[(3-ethyl-3-oxetanylmethoxy)methyl]benzene)、(3-甲基-3-氧呾基)甲基丙烯酸酯(3-methyl-3-oxetanyl)methylacrylate)、(3-乙基-3-氧呾基)甲基丙烯酸酯((3-ethyl-3-oxetanyl)methylacrylate)、(3-甲基-3-氧呾基)甲基甲基丙烯酸酯(3-methyl-3-oxetanyl) methylmethacrylate)、(3-乙基-3-氧呾基)甲基甲基丙烯酸酯((3-ethyl-3-oxetanyl)methylmethacrylate)、或其寡聚物(oligomer)或共聚物,以及氧呾醇(oxetane alcohol)與含羥基之樹脂諸如酚醛樹脂、聚(對-羥基苯乙烯)、cardo雙酚(cardo bisphenol)、杯芳烴(calixarene)、杯間苯二酚芳烴(calixresorcin arene)或矽倍半氧烷的醚化產物(etherification product)等。其他實例包括具有氧呾環之不飽和單體與(甲基)丙烯酸烷酯的共聚物。Examples of polyfunctional oxetane compounds include polyfunctional oxetane compounds such as bis[(3-methyl-3-oxetanemethoxy)methyl]ether (bis[(3-methyl-3-methyl-3- oxetanylmethoxy)methyl]ether), bis[(3-ethyl-3-oxetanylmethoxy)methyl]ether), bis[(3-ethyl-3-oxetanylmethoxy)methyl]ether), 1,4-bis [(3-methyl-3-oxetanylmethoxy)methyl]benzene (1,4-bis[(3-methyl-3-oxetanylmethoxy)methyl]benzene), 1,4-bis[(3- Ethyl-3-oxetanylmethoxy)methyl]benzene (1,4-bis[(3-ethyl-3-oxetanylmethoxy)methyl]benzene), (3-methyl-3-oxetanylmethoxy)methyl]benzene 3-methyl-3-oxetanyl methylacrylate, (3-ethyl-3-oxetanyl) methylacrylate, (3-ethyl-3-oxetanyl) methylacrylate, (3-methyl- 3-oxetanyl) methylmethacrylate (3-methyl-3-oxetanyl) methylmethacrylate), (3-ethyl-3-oxetanyl) methylmethacrylate ((3-ethyl-3- oxetanyl methylmethacrylate), or its oligomer or copolymer, as well as oxetane alcohol and hydroxyl-containing resins such as phenolic resin, poly(p-hydroxystyrene), cardo bisphenol , Calixarene, calixresorcin arene, or etherification product of silsesquioxane, etc. Other examples include copolymers of unsaturated monomers having an oxygen ring and alkyl (meth)acrylates.

多官能氰酸酯化合物之實例包括雙酚A型氰酸酯樹脂、雙酚E型氰酸酯樹脂、雙酚F型氰酸酯樹脂、雙酚S型氰酸酯樹脂、雙酚M型氰酸酯樹脂、酚醛型氰酸酯樹脂、酚系酚醛型氰酸酯樹脂、甲酚酚醛型氰酸酯樹脂、雙酚A酚醛型氰酸酯樹脂、聯苯酚型氰酸酯樹脂、或其寡聚物或共聚物。Examples of polyfunctional cyanate ester compounds include bisphenol A type cyanate ester resins, bisphenol E type cyanate ester resins, bisphenol F type cyanate ester resins, bisphenol S type cyanate ester resins, and bisphenol M type cyanate ester resins. Acid ester resin, novolak type cyanate ester resin, phenol novolak type cyanate ester resin, cresol novolak type cyanate ester resin, bisphenol A novolak type cyanate ester resin, biphenol type cyanate ester resin, or its oligomer Polymer or copolymer.

多官能順丁烯二醯亞胺化合物之實例包括4,4'-二苯甲烷雙順丁烯二醯亞胺(4,4'-diphenylmethanebismaleimide)、甲苯雙順丁烯二醯亞胺(phenylmethane bismaleimide)、間甲苯雙順丁烯二醯亞胺(m-phenylmethane bismaleimide)、雙酚A二苯基醚雙順丁烯二醯亞胺(bisphenol A diphenyl ether bismaleimide)、3,3'-二甲基-5,5'-二乙基-4,4'-二苯甲烷雙順丁烯二醯亞胺(3,3'-dimethyl-5,5'-diethyl-4,4'-diphenylmethane bismaleimide)、4-甲基-1,3-伸苯基雙順丁烯二醯亞胺(4-methyl-1,3-phenylenebismaleimide)、1,6'-雙順丁烯二醯亞胺-(2,2,4-三甲基)己烷(1,6'-bismaleimide-(2,2,4-trimethyl)hexane)等。Examples of polyfunctional maleimide compounds include 4,4'-diphenylmethane bismaleimide (4,4'-diphenylmethanebismaleimide), toluene bismaleimide (phenylmethane bismaleimide) ), m-phenylmethane bismaleimide, bisphenol A diphenyl ether bismaleimide, 3,3'-dimethyl -5,5'-diethyl-4,4'-diphenylmethane bismaleimide (3,3'-dimethyl-5,5'-diethyl-4,4'-diphenylmethane bismaleimide), 4-methyl-1,3-phenylenebismaleimide (4-methyl-1,3-phenylenebismaleimide), 1,6'-bismaleimide-(2,2 ,4-Trimethyl)hexane (1,6'-bismaleimide-(2,2,4-trimethyl)hexane) and so on.

多官能苯并㗁𠯤化合物(polyfunctional benzoxazine compound)之實例包括雙酚A型苯并㗁𠯤樹脂、雙酚F型苯并㗁𠯤樹脂、酚酞型苯并㗁𠯤樹脂(phenolphthalein-type benzoxazine resin)、硫二酚型苯并㗁𠯤樹脂(thiodiphenol-type benzoxazine resin)、二環戊二烯型苯并㗁𠯤樹脂(dicyclopentadiene-type benzoxazine resin)、3,3'-(亞甲基-1,4-伸聯苯基)雙(3,4-二氫-2H-1,3-苯并㗁𠯤)樹脂(3,3'-(methylene-1,4-diphenylene)bis(3,4-dihydro-2H-1,3-benzoxazine) resin)等。Examples of polyfunctional benzoxazine compounds include bisphenol A type benzoxazine resin, bisphenol F type benzoxazine resin, phenolphthalein-type benzoxazine resin, Thiodiphenol-type benzoxazine resin, dicyclopentadiene-type benzoxazine resin, 3,3'-(methylene-1,4- Biphenyl) bis(3,4-dihydro-2H-1,3-benzodihydro-2H) resin (3,3'-(methylene-1,4-diphenylene)bis(3,4-dihydro-2H -1,3-benzoxazine) resin) etc.

多官能樹脂化合物之更具體實例包括YDCN-500-80P (Kukdo Chemical Co., Ltd.)、酚系酚醛型氰酸酯樹脂PT-30S (LONZA Ltd.)、甲苯型順丁烯二醯亞胺樹脂BMI-2300 (Daiwa Kasei Kogyo Co., Ltd.)、P-d型苯并㗁𠯤樹脂(Shikoku Chemicals Corporation)等。More specific examples of the polyfunctional resin compound include YDCN-500-80P (Kukdo Chemical Co., Ltd.), phenolic phenolic cyanate resin PT-30S (LONZA Ltd.), toluene maleimide Resin BMI-2300 (Daiwa Kasei Kogyo Co., Ltd.), Pd-type benzo 㗁𠯤 resin (Shikoku Chemicals Corporation), etc.

聚合物樹脂層可包含以100重量份之鹼溶性樹脂計為1至150重量份、10至100重量份、或20至50重量份之量的熱固性黏合劑。若熱固性黏合劑之含量過高,聚合物樹脂層之顯影性質會降低,且聚合物樹脂層之強度會降低。另一方面,若熱固性黏合劑之含量過低,不只聚合物樹脂層會過度顯影,而且塗布期間之均勻性亦會變差。The polymer resin layer may include a thermosetting adhesive in an amount of 1 to 150 parts by weight, 10 to 100 parts by weight, or 20 to 50 parts by weight based on 100 parts by weight of the alkali-soluble resin. If the content of the thermosetting adhesive is too high, the developing properties of the polymer resin layer will decrease, and the strength of the polymer resin layer will decrease. On the other hand, if the content of the thermosetting adhesive is too low, not only the polymer resin layer will be overdeveloped, but the uniformity during coating will also deteriorate.

三聚氰胺衍生物Melamine derivatives

根據本揭示內容之一實施態樣,圖案化聚合物樹脂層含有三聚氰胺衍生物。三聚氰胺衍生物具有優異的相容性,同時改善絕緣層與稍後形成於絕緣層上之圖案化金屬層之間的黏著性。因此,三聚氰胺衍生物使得容易製備聚合物樹脂組成物。According to one embodiment of the present disclosure, the patterned polymer resin layer contains a melamine derivative. Melamine derivatives have excellent compatibility and at the same time improve the adhesion between the insulating layer and the patterned metal layer formed on the insulating layer later. Therefore, the melamine derivative makes it easy to prepare the polymer resin composition.

根據本揭示內容之一實施態樣,三聚氰胺衍生物具有以下化學式1之結構。因此,三聚氰胺衍生物之分子中含有1至6個羧基(其為具有相對高反應性之酸性官能基),因而可與熱固性黏合劑積極反應。因此,三聚氰胺衍生物可進一步提高絕緣層與圖案化金屬層之間的黏著性。此外,即使使用弱鹼溶液,三聚氰胺衍生物亦可容易地顯影,因而可用於形成絕緣層。According to one embodiment of the present disclosure, the melamine derivative has the structure of Chemical Formula 1 below. Therefore, the melamine derivative contains 1 to 6 carboxyl groups (which are acidic functional groups with relatively high reactivity) in the molecule, and thus can actively react with the thermosetting adhesive. Therefore, the melamine derivative can further improve the adhesion between the insulating layer and the patterned metal layer. In addition, even if a weak alkaline solution is used, the melamine derivative can be easily developed and thus can be used to form an insulating layer.

[化學式1][Chemical formula 1]

Figure 02_image001
Figure 02_image001

於以上化學式1中,A為含有1至6、1至5、2至6、1至4、2至5、3至6、1至3、2至4、3至5或4至6個羧基之烷基,或含有1至6、1至5、2至6、1至4、2至5、3至6、1至3、2至4、3至5、或4至6個羧基之胺基。三聚氰胺衍生物可藉由各種方法製造,且三聚氰胺衍生物之製法無限制,只要三聚氰胺衍生物具有化學式1之結構即可。In the above chemical formula 1, A contains 1 to 6, 1 to 5, 2 to 6, 1 to 4, 2 to 5, 3 to 6, 1 to 3, 2 to 4, 3 to 5 or 4 to 6 carboxyl groups Alkyl groups, or amines containing 1 to 6, 1 to 5, 2 to 6, 1 to 4, 2 to 5, 3 to 6, 1 to 3, 2 to 4, 3 to 5, or 4 to 6 carboxyl groups base. The melamine derivative can be manufactured by various methods, and the method for preparing the melamine derivative is not limited, as long as the melamine derivative has the structure of Chemical Formula 1.

於化學式1中,A可含有1至4或1至2個硫原子。In Chemical Formula 1, A may contain 1 to 4 or 1 to 2 sulfur atoms.

根據本揭示內容之一實施態樣,聚合物樹脂層可含有以100重量份之鹼溶性樹脂為基準計為3至30重量份或10至30重量份之量的三聚氰胺衍生物。當三聚氰胺衍生物之含量在上述範圍內時,絕緣層可具有對於圖案化金屬層之優異黏著性。According to an embodiment of the present disclosure, the polymer resin layer may contain the melamine derivative in an amount of 3 to 30 parts by weight or 10 to 30 parts by weight based on 100 parts by weight of the alkali-soluble resin. When the content of the melamine derivative is within the above range, the insulating layer can have excellent adhesion to the patterned metal layer.

根據本揭示內容之一實施態樣,三聚氰胺衍生物於25℃在非質子性溶劑中可具有5至20之溶解度。非質子性溶劑(aprotic solvent)可為二甲亞碸、N-甲基吡咯啶酮(N-methyl pyrrolidone)、二甲基乙醯胺(dimethylacetamide)、及二甲基甲醯胺(dimethylformamide)中之一或多者。「溶解度(solubility)」可意指可最大地溶於100 g之溶劑中的三聚氰胺衍生物之質量(g)。即,例如,10至20 g之三聚氰胺衍生物可溶於100 g之二甲亞碸。According to one aspect of the present disclosure, the melamine derivative can have a solubility of 5 to 20 in an aprotic solvent at 25°C. The aprotic solvent can be dimethyl sulfide, N-methyl pyrrolidone, dimethylacetamide, and dimethylformamide One or more. "Solubility" can mean the mass (g) of the melamine derivative that can be dissolved in 100 g of solvent at the maximum. That is, for example, 10 to 20 g of a melamine derivative can be dissolved in 100 g of dimethyl sulfoxide.

多層印刷電路板Multilayer printed circuit board

根據本揭示內容另一實施態樣之多層印刷電路板包括:絕緣層;以及位於該絕緣層上之圖案化金屬層(patterned metal layer)。A multilayer printed circuit board according to another embodiment of the present disclosure includes: an insulating layer; and a patterned metal layer on the insulating layer.

於根據本揭示內容之一實施態樣的多層印刷電路板中,圖案化金屬層可具有根據IPC-TM-650標準於該多層印刷電路板在135℃之溫度及85%之濕度靜置48小時之後測量為0.4 kgf/cm至1.2 kgf/cm、0.5 kgf/cm至1.0 kgf/cm、0.5 kgf/cm至0.7 kgf/cm、或0.51 kgf/cm至0.54 kgf/cm的剝離強度。當圖案化金屬層具有在上述範圍內之剝離強度時,絕緣層可具有優異的金屬黏著性。In the multilayer printed circuit board according to one embodiment of the present disclosure, the patterned metal layer may be allowed to stand for 48 hours on the multilayer printed circuit board at a temperature of 135°C and a humidity of 85% according to the IPC-TM-650 standard. Then, the peel strength was measured at 0.4 kgf/cm to 1.2 kgf/cm, 0.5 kgf/cm to 1.0 kgf/cm, 0.5 kgf/cm to 0.7 kgf/cm, or 0.51 kgf/cm to 0.54 kgf/cm. When the patterned metal layer has a peel strength within the above range, the insulating layer may have excellent metal adhesion.

由於藉由根據本揭示內容之一實施態樣的方法所製造之絕緣層含有具有化學式1之結構的三聚氰胺衍生物,該絕緣層對於形成於該絕緣層上之圖案化金屬層可具有優異的黏著性。Since the insulating layer manufactured by the method according to one embodiment of the present disclosure contains the melamine derivative having the structure of Chemical Formula 1, the insulating layer can have excellent adhesion to the patterned metal layer formed on the insulating layer sex.

製造絕緣層之方法Method of manufacturing insulating layer

本揭示內容亦提供製造絕緣層之方法,該方法包括下列步驟:於基材上形成含有鹼溶性樹脂、熱固性黏合劑及三聚氰胺衍生物之聚合物樹脂層;於該聚合物樹脂層上形成圖案化層;顯影及固化其上形成有該圖案化層之該聚合物樹脂層;以及藉由從經固化之聚合物樹脂層移除該圖案化層而形成圖案化聚合物樹脂層,其中,該三聚氰胺衍生物具有化學式1之結構。The present disclosure also provides a method for manufacturing an insulating layer. The method includes the following steps: forming a polymer resin layer containing an alkali-soluble resin, a thermosetting adhesive, and a melamine derivative on a substrate; and forming a pattern on the polymer resin layer Layer; developing and curing the polymer resin layer on which the patterned layer is formed; and forming a patterned polymer resin layer by removing the patterned layer from the cured polymer resin layer, wherein the melamine The derivative has the structure of Chemical Formula 1.

圖1為顯示根據本揭示內容之一實施態樣的製造絕緣層之方法的示意圖。參見圖1,根據本揭示內容之一實施態樣的製造絕緣層之方法包括下列步驟:(1)於基材100上形成聚合物樹脂層200;(2)於聚合物樹脂層200上形成圖案化層(patterned layer)300;(3-1)使聚合物樹脂層200顯影,及(3-2)使經顯影之聚合物樹脂層固化;以及(4)移除圖案化層300。FIG. 1 is a schematic diagram showing a method of manufacturing an insulating layer according to an embodiment of the present disclosure. Referring to FIG. 1, the method of manufacturing an insulating layer according to one embodiment of the present disclosure includes the following steps: (1) forming a polymer resin layer 200 on a substrate 100; (2) forming a pattern on the polymer resin layer 200 (3-1) develop the polymer resin layer 200, and (3-2) cure the developed polymer resin layer; and (4) remove the patterned layer 300.

下文茲詳細描述各步驟。The steps are described in detail below.

(1)(1) 於基材上形成含有鹼溶性樹脂、熱固性黏合劑及三聚氰胺衍生物之聚合物樹脂層的步驟Step of forming a polymer resin layer containing alkali-soluble resin, thermosetting adhesive and melamine derivative on a substrate

根據本揭示內容之一實施態樣,用作絕緣層之基底的聚合物樹脂層係首先形成於基材上。According to one embodiment of the present disclosure, the polymer resin layer used as the base of the insulating layer is first formed on the substrate.

基材可為電路板諸如覆銅積層物(copper clad laminate)、薄片(sheet)、多層印刷電路板(multilayer printed circuit board)、或半導體材料諸如矽晶圓。聚合物樹脂層之厚度可為1 µm至500 µm、或3 µm至500 µm、或3 µm至200 µm、或1 µm至60 µm、或5 µm至30 µm。The substrate may be a circuit board such as a copper clad laminate, a sheet, a multilayer printed circuit board, or a semiconductor material such as a silicon wafer. The thickness of the polymer resin layer can be 1 µm to 500 µm, or 3 µm to 500 µm, or 3 µm to 200 µm, or 1 µm to 60 µm, or 5 µm to 30 µm.

聚合物樹脂層可含有鹼溶性樹脂、熱固性黏合劑及三聚氰胺衍生物。具體而言,於製備含有鹼溶性樹脂、熱固性黏合劑及具有化學式1之結構的三聚氰胺衍生物之聚合物樹脂組成物之後,可使用彼形成聚合物樹脂層。The polymer resin layer may contain an alkali-soluble resin, a thermosetting adhesive, and a melamine derivative. Specifically, after preparing a polymer resin composition containing an alkali-soluble resin, a thermosetting adhesive, and a melamine derivative having the structure of Chemical Formula 1, they can be used to form a polymer resin layer.

含有鹼溶性樹脂、熱固性黏合劑及具有化學式1之結構的三聚氰胺衍生物之聚合物樹脂組成物的細節係如前文所述。The details of the polymer resin composition containing the alkali-soluble resin, the thermosetting adhesive, and the melamine derivative having the structure of Chemical Formula 1 are as described above.

形成聚合物樹脂層之方法無限制。然而,例如,聚合物樹脂層之形成可使用將聚合物樹脂組成物直接施加至基材上且乾燥或固化之方法,或者將聚合物樹脂組成物施加至另外的載體膜(carrier film)上且乾燥或固化、並將施加有聚合物樹脂組成物之載體膜層合至基材上然後移除之方法。較佳的,可使用將黏著劑層形成於基材上、然後以聚合物樹脂組成物直接塗布該黏著劑層之方法;或將聚合物樹脂組成物施加至載體膜上以形成聚合物樹脂層、然後將該聚合物樹脂層與基材上之黏著劑層層合在一起之方法;或將聚合物樹脂組成物施加至載體膜上以形成聚合物樹脂層、然後將黏著劑層形成於該聚合物樹脂層上、且將基材與該黏著劑層層合在一起之方法。The method of forming the polymer resin layer is not limited. However, for example, the formation of the polymer resin layer may use a method of directly applying the polymer resin composition to the substrate and drying or curing, or applying the polymer resin composition to another carrier film and A method of drying or curing, laminating the carrier film applied with the polymer resin composition to the substrate and then removing it. Preferably, a method of forming an adhesive layer on a substrate and then directly coating the adhesive layer with a polymer resin composition can be used; or applying the polymer resin composition to the carrier film to form the polymer resin layer , Then the polymer resin layer and the adhesive layer on the substrate are laminated together; or the polymer resin composition is applied to the carrier film to form the polymer resin layer, and then the adhesive layer is formed on the A method of laminating the base material and the adhesive layer on the polymer resin layer.

黏著劑層之實例無特別限制,可使用半導體元件以及電氣及電子材料之領域中廣為人知的各種黏著劑層而無限制。例如,可使用可去黏合暫時性黏著劑(debondable temporary adhesive)或晶粒附著膜(die attach film,DAF)。Examples of the adhesive layer are not particularly limited, and various adhesive layers that are widely known in the fields of semiconductor devices and electrical and electronic materials can be used without limitation. For example, a debondable temporary adhesive or die attach film (DAF) can be used.

(2)(2) 於聚合物樹脂層上形成圖案化層之步驟Steps of forming a patterned layer on the polymer resin layer

根據本揭示內容之一實施態樣,在形成於基材上之聚合物樹脂層上形成圖案化層。According to one embodiment of the present disclosure, a patterned layer is formed on the polymer resin layer formed on the substrate.

如本文所使用之用語「圖案化層(patterned layer)」係指位於聚合物樹脂層上以使一部分的聚合物樹脂層曝光而其他部分的聚合物樹脂層不曝光之層,由此可藉由使曝光的部分顯影而於聚合物樹脂層上形成圖案。即,圖案化層用作為光阻遮罩(resist mask)而使一部分的聚合物樹脂層曝光而使該部分可顯影,且保護其他部分的聚合物樹脂層不顯影,以使圖案化層的圖案可完全轉移至聚合物樹脂層上。As used herein, the term "patterned layer" refers to a layer located on the polymer resin layer so that a part of the polymer resin layer is exposed and the other part of the polymer resin layer is not exposed. The exposed part is developed to form a pattern on the polymer resin layer. That is, the patterned layer is used as a resist mask to expose a part of the polymer resin layer to make the part developable, and to protect other parts of the polymer resin layer from developing, so that the pattern of the patterned layer Can be completely transferred to the polymer resin layer.

形成圖案化層之方法無特別限制。例如,圖案化層可使用光敏性樹脂層(photosensitive resin layer)形成。The method of forming the patterned layer is not particularly limited. For example, the patterned layer can be formed using a photosensitive resin layer.

在聚合物樹脂層上形成圖案化層之步驟可包括下列步驟:在聚合物樹脂層上形成光敏性樹脂層;以及使該光敏性樹脂層曝光,且使該光敏性樹脂層的未曝光部分鹼顯影(alkali-developing)以形成圖案化層。The step of forming a patterned layer on the polymer resin layer may include the following steps: forming a photosensitive resin layer on the polymer resin layer; and exposing the photosensitive resin layer, and making the unexposed part of the photosensitive resin layer alkaline Alkali-developing to form a patterned layer.

在聚合物樹脂層上形成光敏性樹脂層的方法之實例無特別限制。然而,例如,可使用膜型光敏性樹脂(諸如光敏性乾膜光阻(photosensitive dry film resist))係層合於聚合物樹脂層上之方法;或光敏性樹脂組成物係藉由噴淋(spray)或浸漬(dipping)法而塗布於聚合物樹脂層且對經塗布之組成物加壓之方法。The example of the method of forming the photosensitive resin layer on the polymer resin layer is not particularly limited. However, for example, a method of laminating a film-type photosensitive resin (such as photosensitive dry film resist) on a polymer resin layer; or a photosensitive resin composition by spraying ( spray) or dipping (dipping) method to coat the polymer resin layer and pressurize the coated composition.

光敏性樹脂層含有其分子結構及物理性質因光之作用而改變的聚合物。作為光敏性樹脂層,可使用光敏性乾膜光阻(DFR)或光敏性液態光阻(photosensitive liquid resist)。光敏性樹脂層可展現光敏性及鹼溶性(alkali solubility)。因此,光敏性樹脂層之分子結構可因以光照射該光敏性樹脂層的曝光程序而改變,且光敏性樹脂層可藉由使鹼性顯影劑與其接觸的顯影程序而蝕刻或移除。The photosensitive resin layer contains a polymer whose molecular structure and physical properties are changed by the action of light. As the photosensitive resin layer, a photosensitive dry film resist (DFR) or a photosensitive liquid resist (photosensitive liquid resist) can be used. The photosensitive resin layer can exhibit photosensitivity and alkali solubility. Therefore, the molecular structure of the photosensitive resin layer can be changed by the exposure process of irradiating the photosensitive resin layer with light, and the photosensitive resin layer can be etched or removed by the development process of bringing the alkaline developer into contact with it.

因此,當一部分的光敏性樹脂層選擇性曝光然後進行鹼顯影時,經曝光之部分未被顯影,只有未曝光部分會被選擇性蝕刻及移除。因此,於曝光後保持完整未被鹼顯影之光敏性樹脂層部分可為圖案化層。Therefore, when a part of the photosensitive resin layer is selectively exposed and then subjected to alkali development, the exposed part is not developed, and only the unexposed part is selectively etched and removed. Therefore, the portion of the photosensitive resin layer that remains intact and not developed by alkali after exposure can be a patterned layer.

即,使光敏性樹脂層選擇性曝光之方法的實例包括使所形成之具有預定圖案的光罩與光敏性樹脂層接觸並以UV光照射該光敏性樹脂層之方法;或遮罩中所含之預定圖案係透過投影物鏡(projection objective lens)成像於光敏性樹脂層上、然後以UV光照射之方法;或光敏性樹脂層係使用雷射二極體(laser diode)作為光源而直接成像,然後以UV光照射之方法。在該情況下,光敏性樹脂層可以劑量為5 mJ/cm2 至600 mJ/cm2 之UV光照射。That is, examples of the method of selectively exposing the photosensitive resin layer include a method of bringing a formed photomask having a predetermined pattern into contact with the photosensitive resin layer and irradiating the photosensitive resin layer with UV light; or a method contained in the mask The predetermined pattern is imaged on the photosensitive resin layer through a projection objective lens and then irradiated with UV light; or the photosensitive resin layer is directly imaged by using a laser diode as the light source, Then irradiate with UV light. In this case, the photosensitive resin layer may be irradiated with UV light at a dose of 5 mJ/cm 2 to 600 mJ/cm 2.

此外,於曝光之後使光敏性樹脂層鹼顯影之方法的實例包括以鹼顯影劑處理光敏性樹脂層之方法。鹼顯影劑(alkali developer)之實例無特別限制。然而,例如,可使用諸如氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、氫氧化四甲銨、或胺之鹼的水溶液(以經調整之濃度及溫度)。此外,可使用市售鹼顯影劑。雖然所使用之鹼顯影劑的具體用量無特別限制,但需調整鹼顯影劑之濃度及溫度以免對圖案化層造成損壞。例如,可使用溫度為25至35℃之0.5至3%之碳酸鈉的水溶液。In addition, examples of the method of alkali-developing the photosensitive resin layer after exposure include a method of treating the photosensitive resin layer with an alkali developer. Examples of the alkali developer (alkali developer) are not particularly limited. However, for example, an aqueous solution of alkali such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, tetramethylammonium hydroxide, or amine (at adjusted concentration and temperature ). In addition, a commercially available alkali developer can be used. Although the specific amount of the alkali developer used is not particularly limited, the concentration and temperature of the alkali developer need to be adjusted to avoid damage to the patterned layer. For example, a 0.5 to 3% aqueous solution of sodium carbonate at a temperature of 25 to 35°C can be used.

於聚合物樹脂層上形成之圖案化層的厚度可為1 µm至500 µm、或3 µm至500 µm、或3 µm至200 µm、或1 µm至60 µm、或5 µm至30 µm。若圖案化層之厚度過度增加,聚合物樹脂層的解析度會降低。The thickness of the patterned layer formed on the polymer resin layer can be 1 µm to 500 µm, or 3 µm to 500 µm, or 3 µm to 200 µm, or 1 µm to 60 µm, or 5 µm to 30 µm. If the thickness of the patterned layer is excessively increased, the resolution of the polymer resin layer will decrease.

(3)(3) 顯影及固化聚合物樹脂層之步驟Steps of developing and curing polymer resin layer

根據本揭示內容之一實施態樣,使其上形成有圖案化層之聚合物樹脂層顯影及固化。具體而言,使一部分已透過圖案化層而曝光之聚合物樹脂層顯影以於該聚合物樹脂層上形成圖案,然後熱固化或光固化該聚合物樹脂層。According to one embodiment of the present disclosure, the polymer resin layer on which the patterned layer is formed is developed and cured. Specifically, a part of the polymer resin layer exposed through the patterned layer is developed to form a pattern on the polymer resin layer, and then the polymer resin layer is thermally cured or photocured.

即,於使透過圖案化層而曝光之聚合物樹脂層顯影的步驟中,因圖案化層未被顯影劑移除,故該圖案化層保持完整且用作光阻遮罩。此外,鹼顯影劑可透過圖案化層之開口與圖案化層及下方之聚合物樹脂層接觸。此時,因聚合物樹脂層藉由含有鹼溶性樹脂而具有鹼溶性(其意指聚合物樹脂層被鹼顯影劑溶解),故而與顯影劑接觸之聚合物樹脂層部分可被溶解及移除。That is, in the step of developing the polymer resin layer exposed through the patterned layer, since the patterned layer is not removed by the developer, the patterned layer remains intact and serves as a photoresist mask. In addition, the alkali developer can contact the patterned layer and the polymer resin layer underneath through the openings of the patterned layer. At this time, since the polymer resin layer has alkali solubility by containing alkali-soluble resin (which means that the polymer resin layer is dissolved by the alkali developer), the part of the polymer resin layer in contact with the developer can be dissolved and removed .

因此,透過圖案化層曝光之聚合物樹脂層意指其表面未接觸圖案化層之聚合物樹脂層部分。使透過圖案化層曝光之聚合物樹脂層鹼顯影的步驟可包括使鹼顯影劑通過圖案化層且接觸下方之聚合物樹脂層的步驟。Therefore, the polymer resin layer exposed through the patterned layer means the portion of the polymer resin layer whose surface is not in contact with the patterned layer. The step of alkali-developing the polymer resin layer exposed through the patterned layer may include the step of passing an alkali developer through the patterned layer and contacting the polymer resin layer underneath.

經由使聚合物樹脂層顯影之步驟,聚合物樹脂層可經圖案化而具有與圖案化層之圖案相同之形狀。Through the step of developing the polymer resin layer, the polymer resin layer can be patterned to have the same shape as the pattern of the patterned layer.

聚合物樹脂層如上述經顯影之後,可使其固化。具體而言,聚合物樹脂層可經熱固化或光固化。當包括使聚合物樹脂層固化之步驟時,可使隨後移除圖案化層期間對於聚合物樹脂層的損壞最小化。After the polymer resin layer is developed as described above, it can be cured. Specifically, the polymer resin layer may be cured by heat or light. When the step of curing the polymer resin layer is included, damage to the polymer resin layer during subsequent removal of the patterned layer can be minimized.

透過使聚合物樹脂層固化之步驟,含有酯鍵之主鏈可形成於聚合物樹脂嵌段中。形成酯鍵之方法的實例包括透過丙烯酸系樹脂(其中,丙烯酸係酯鍵結(ester-bonded))而使聚合物樹脂層光固化的方法,或使聚合物樹脂層熱固化以藉由羧酸與環氧基之間的反應形成酯鍵的方法。Through the step of curing the polymer resin layer, the main chain containing the ester bond can be formed in the polymer resin block. Examples of the method of forming ester bonds include a method of photocuring the polymer resin layer through an acrylic resin (among which, acrylic ester-bonded), or a method of thermally curing the polymer resin layer by carboxylic acid The reaction with epoxy groups to form ester bonds.

於該情況下,熱固化之具體條件無限制,且可視移除圖案化層之方法而調整至較佳條件。例如,藉由以光阻去除溶液(photoresist stripper solution)處理而移除圖案化層時,使聚合物樹脂層熱固化之步驟可於60至150℃之溫度進行5分鐘至2小時。若聚合物樹脂層之熱固化溫度過低或其熱固化時間變短,聚合物樹脂層會被去除溶液損壞。另一方面,若聚合物樹脂層之熱固化溫度高或其熱固化時間變長,會難以藉由去除溶液移除圖案化層,聚合物樹脂層會發生過度翹曲(warpage)。In this case, the specific conditions of thermal curing are not limited, and can be adjusted to better conditions depending on the method of removing the patterned layer. For example, when the patterned layer is removed by treatment with a photoresist stripper solution, the step of thermally curing the polymer resin layer can be performed at a temperature of 60 to 150° C. for 5 minutes to 2 hours. If the thermal curing temperature of the polymer resin layer is too low or the thermal curing time becomes shorter, the polymer resin layer will be damaged by the removal solution. On the other hand, if the thermal curing temperature of the polymer resin layer is high or the thermal curing time becomes longer, it will be difficult to remove the patterned layer by the removing solution, and the polymer resin layer will be excessively warpaged.

作為另一實例,當透過去膠渣程序(desmear process)移除圖案化層時,使聚合物樹脂層熱固化之步驟可於150至230℃之溫度進行1小時至4小時。As another example, when the patterned layer is removed through a desmear process, the step of thermally curing the polymer resin layer can be performed at a temperature of 150 to 230° C. for 1 hour to 4 hours.

(4)(4) 移除圖案化層之步驟Steps to remove the patterned layer

根據本揭示內容之一實施態樣,圖案化聚合物樹脂層係藉由從經固化之聚合物樹脂層移除圖案化層而形成。According to one embodiment of the present disclosure, the patterned polymer resin layer is formed by removing the patterned layer from the cured polymer resin layer.

為移除圖案化層,較佳可使用能儘可能只移除圖案化層而不移除下方之聚合物樹脂層之方法。In order to remove the patterned layer, it is preferable to use a method capable of removing only the patterned layer without removing the underlying polymer resin layer as much as possible.

圖案化層之移除可藉由以光阻去除溶液處理而進行。The removal of the patterned layer can be performed by processing with a photoresist removal solution.

以光阻去除溶液處理圖案化層之方法的實例無特別限制。然而,例如,作為光阻去除溶液,可使用諸如氫氧化鉀及氫氧化鈉之鹼的水溶液(以經調整之濃度及溫度)。此外,亦可使用市售產品,諸如Resistrip產品群(可由Atotech購得),或ORC-731、ORC-723K、ORC-740、或SLF-6000 (可由Orchem Corporation購得)。所使用之光阻去除溶液的具體用量無特別限制,但需調整光阻去除溶液之濃度及溫度以免對下方之聚合物樹脂層之圖案造成損壞。例如,可使用25℃至60℃之1%至5%的氫氧化鈉水溶液。The example of the method of treating the patterned layer with the photoresist removal solution is not particularly limited. However, for example, as the photoresist removal solution, an aqueous alkali solution (at adjusted concentration and temperature) such as potassium hydroxide and sodium hydroxide can be used. In addition, commercially available products, such as the Resistrip product group (available from Atotech), or ORC-731, ORC-723K, ORC-740, or SLF-6000 (available from Orchem Corporation), can also be used. The specific amount of the photoresist removal solution used is not particularly limited, but the concentration and temperature of the photoresist removal solution need to be adjusted to avoid damage to the pattern of the polymer resin layer below. For example, a 1% to 5% sodium hydroxide aqueous solution at 25°C to 60°C can be used.

使用去膠渣程序去除圖案化層之方法的實例無特別限制。例如,為去除圖案化層,視各程序條件可使用市售產品,諸如Sweller化學品諸如Securiganth E、Securiganth HP、Securiganth BLG、Securiganth MV SWELLER、或Securiganth SAP SWELLER,過錳酸鹽化學品諸如Securiganth P 500、Securiganth MV ETCH P、或Securiganth SAP ETCH P,或還原劑化學品諸如Securiganth E Reduction Cleaner、Securiganth HP Reduction Cleaner、Securiganth BLG Reduction Cleaner、Securiganth MV Reduction Cleaner、或Securiganth SAP Reduction Cleaner,彼等為可自Atotech購得之去膠渣程序化學品;或Sweller化學品諸如ORC-310A、ORC-315A、ORC-315H或ORC-312,過錳酸鹽化學品諸如ORC-340B,或還原劑化學品諸如ORC-370或ORC-372,彼等為可自Orchem Corporation購得之去膠渣程序化學品。Examples of the method of removing the patterned layer using the desmear program are not particularly limited. For example, to remove the patterned layer, commercially available products such as Sweller chemicals such as Securiganth E, Securiganth HP, Securiganth BLG, Securiganth MV SWELLER, or Securiganth SAP SWELLER, and permanganate chemicals such as Securiganth P can be used depending on the process conditions. 500, Securiganth MV ETCH P, or Securiganth SAP ETCH P, or reducing agent chemicals such as Securiganth E Reduction Cleaner, Securiganth HP Reduction Cleaner, Securiganth BLG Reduction Cleaner, Securiganth MV Reduction Cleaner, or Securiganth SAP Reduction Cleaner. Desmear process chemicals purchased by Atotech; or Sweller chemicals such as ORC-310A, ORC-315A, ORC-315H or ORC-312, permanganate chemicals such as ORC-340B, or reducing agent chemicals such as ORC -370 or ORC-372, which are desmear process chemicals available from Orchem Corporation.

根據本揭示內容之一實施態樣,於移除圖案化層步驟之後,可進一步包括使圖案化聚合物樹脂層固化之步驟。According to one embodiment of the present disclosure, after the step of removing the patterned layer, the step of curing the patterned polymer resin layer may be further included.

若上述聚合物樹脂層之固化為初次固化,則可在如上述移除圖案化層的步驟之後於圖案化聚合物樹脂層進行二次固化。從而可改善最終製造之絕緣層的化學抗性。If the curing of the polymer resin layer is the first curing, the patterned polymer resin layer can be cured for the second time after the step of removing the patterned layer as described above. Thereby, the chemical resistance of the finally manufactured insulating layer can be improved.

二次固化之方法的實例無特別限制,可使用熱固化或光固化法而無限制。二次固化可於150℃至250℃之溫度進行0.1小時至10小時。Examples of the method of secondary curing are not particularly limited, and thermal curing or light curing methods can be used without limitation. The secondary curing can be performed at a temperature of 150°C to 250°C for 0.1 hour to 10 hours.

根據本揭示內容之一實施態樣,於形成圖案化聚合物樹脂層之後,可進一步包括對圖案化聚合物樹脂層進行粗糙化處理(roughening treatment)以改善對於稍後形成之圖案化金屬層的黏著性。According to one embodiment of the present disclosure, after the patterned polymer resin layer is formed, it may further include roughening treatment on the patterned polymer resin layer to improve the performance of the patterned metal layer to be formed later. Adhesion.

粗糙化處理可視條件而藉由乾式方法或濕式方法進行。乾式方法之實例包括真空、大氣壓力或氣體電漿(gas plasma)處理,氣體準分子UV處理(gas excimer UV treatment)等;而濕式方法之實例包括去膠渣處理。The roughening treatment may be performed by a dry method or a wet method depending on the conditions. Examples of the dry method include vacuum, atmospheric pressure or gas plasma treatment, gas excimer UV treatment, etc.; and examples of the wet method include desmearing treatment.

經由該粗糙化處理,可提高圖案化聚合物樹脂層之表面粗糙度,因而提高其對於沉積在該圖案化聚合物樹脂層上之金屬的黏著性。Through the roughening treatment, the surface roughness of the patterned polymer resin layer can be increased, thereby improving its adhesion to the metal deposited on the patterned polymer resin layer.

製造多層印刷電路板之方法Method for manufacturing multilayer printed circuit board

根據本揭示內容另一實施態樣之製造多層印刷電路板的方法包括下列步驟:藉由根據本揭示內容之一實施態樣的方法製造絕緣層;以及於該絕緣層上形成圖案化金屬層。A method for manufacturing a multilayer printed circuit board according to another embodiment of the present disclosure includes the following steps: manufacturing an insulating layer by the method according to one embodiment of the present disclosure; and forming a patterned metal layer on the insulating layer.

用語「圖案化金屬層(patterned metal layer)」可指金屬圖案層。形成圖案化金屬層之步驟可包括下列步驟:在絕緣層上形成金屬薄膜;在該金屬薄膜上形成圖案化層;在透過該圖案化層曝露之金屬薄膜上沉積金屬;以及移除該圖案化層,並移除因移除該圖案化層而曝露之金屬薄膜。The term "patterned metal layer" can refer to a metal pattern layer. The step of forming a patterned metal layer may include the following steps: forming a metal film on the insulating layer; forming a patterned layer on the metal film; depositing metal on the metal film exposed through the patterned layer; and removing the patterning Layer, and remove the metal film exposed by removing the patterned layer.

已發現,由於藉由根據本揭示內容之一實施態樣的方法所製造之絕緣層包括預定開口圖案,於將圖案化金屬層新層合於絕緣層上之製程中,可以金屬填充開口圖案內部,由此使位在絕緣層上下之金屬基材可連接在一起,從而製造多層印刷電路板。基於該發現,完成本揭示內容。It has been found that since the insulating layer manufactured by the method according to one embodiment of the present disclosure includes a predetermined opening pattern, in the process of newly laminating the patterned metal layer on the insulating layer, the inside of the opening pattern can be filled with metal Therefore, the metal substrates located above and below the insulating layer can be connected together to produce a multilayer printed circuit board. Based on this finding, the present disclosure has been completed.

於形成金屬薄膜之步驟之前,可進一步包括在絕緣層上形成表面處理層之步驟。從而可進一步改善圖案化金屬層與絕緣層之間的黏著性。Before the step of forming the metal thin film, a step of forming a surface treatment layer on the insulating layer may be further included. Thereby, the adhesion between the patterned metal layer and the insulating layer can be further improved.

具體而言,作為在絕緣層上形成表面處理層之方法的實例,可使用離子輔助反應法(ion-assisted reaction method)、離子束處理法(ion beam treatment method)、及電漿處理法(plasma treatment method)中之至少任一者。電漿處理法可包括大氣壓力電漿處理法(atmospheric pressure plasma treatment method)、DC電漿處理法(DC plasma treatment method)、及RF電漿處理法(RF plasma treatment method)中之任一者。由於表面處理程序之故,可在絕緣層表面上形成含有反應性官能基之表面處理層。在絕緣層上形成表面處理層之方法的另一實例可包括將鉻(Cr)或鈦(Ti)金屬沉積於絕緣層之表面上至厚度為50 nm至300 nm之方法。Specifically, as an example of a method of forming a surface treatment layer on an insulating layer, an ion-assisted reaction method, an ion beam treatment method, and a plasma treatment method can be used. treatment method) at least any one of them. The plasma treatment method may include any one of an atmospheric pressure plasma treatment method, a DC plasma treatment method, and an RF plasma treatment method. Due to the surface treatment process, a surface treatment layer containing reactive functional groups can be formed on the surface of the insulating layer. Another example of a method of forming a surface treatment layer on the insulating layer may include a method of depositing chromium (Cr) or titanium (Ti) metal on the surface of the insulating layer to a thickness of 50 nm to 300 nm.

在絕緣層上形成金屬薄膜之步驟中,形成金屬薄膜之方法的實例包括乾式沉積法(dry deposition process)或濕式沉積法(wet deposition process)。乾式沉積法之具體實例包括真空沉積法(vacuum deposition process)、離子鍍法(ion plating process)、濺鍍法(sputtering process)等。In the step of forming the metal thin film on the insulating layer, examples of the method of forming the metal thin film include a dry deposition process or a wet deposition process. Specific examples of dry deposition methods include vacuum deposition process, ion plating process, sputtering process, and the like.

並且,濕式沉積法之具體實例包括各種金屬之無電鍍覆(electroless plating),通常使用無電鍍銅(electroless copper plating)。In addition, specific examples of the wet deposition method include electroless plating of various metals, and electroless copper plating is generally used.

在金屬薄膜上形成圖案化層之步驟中,與形成圖案化層相關之細節可包括上述關於該實施態樣之細節。In the step of forming the patterned layer on the metal thin film, the details related to the formation of the patterned layer may include the above-mentioned details about the embodiment.

在透過圖案化層曝露之金屬薄膜上沉積金屬的步驟中,透過圖案化層曝露之金屬薄膜意指金屬薄膜中其表面未與圖案化層接觸的部分。作為欲沉積之金屬,可使用銅。沉積金屬之方法的實例無特別限制,且可使用各種為人已知的物理或化學氣相沉積法而無限制。作為一般用途實例,可使用電解鍍銅法(electrolytic copper plating method)。In the step of depositing metal on the metal thin film exposed through the patterned layer, the metal thin film exposed through the patterned layer refers to the part of the metal thin film whose surface is not in contact with the patterned layer. As the metal to be deposited, copper can be used. Examples of methods for depositing metals are not particularly limited, and various known physical or chemical vapor deposition methods can be used without limitation. As an example of general use, an electrolytic copper plating method can be used.

在移除圖案化層及移除因移除圖案化層而曝露之金屬薄膜的步驟中,因移除圖案化層而曝露之金屬薄膜係指金屬薄膜中其表面係與圖案化層接觸的部分。圖案化層之移除的相關細節可包括上述關於該實施態樣之細節。In the steps of removing the patterned layer and removing the metal thin film exposed by removing the patterned layer, the metal thin film exposed by removing the patterned layer refers to the part of the metal thin film whose surface is in contact with the patterned layer . The related details of the removal of the patterned layer may include the above-mentioned details about this embodiment.

藉由製造多層印刷電路板之方法所製造的多層印刷電路板可再次用作增層材料(build-up material)。例如,根據該實施態樣之絕緣層的製造方法於多層印刷電路板上形成絕緣層的第一程序、以及根據另一實施態樣之多層印刷電路板製造方法於絕緣層上形成金屬基材的第二程序,係可重複之。The multilayer printed circuit board manufactured by the method of manufacturing the multilayer printed circuit board can be used again as a build-up material. For example, the first process of forming an insulating layer on a multilayer printed circuit board according to the method of manufacturing an insulating layer of this embodiment, and the method of forming a metal substrate on the insulating layer according to another embodiment of the method of manufacturing a multilayer printed circuit board The second procedure is repeatable.

因此,藉由多層印刷電路板製造方法所製造之多層印刷電路板中所包括的堆疊層之數目亦無特別限制,且多層印刷電路板可視其所欲用途或目的而具有例如一或多層或者1至20層。Therefore, the number of stacked layers included in the multilayer printed circuit board manufactured by the multilayer printed circuit board manufacturing method is not particularly limited, and the multilayer printed circuit board may have, for example, one or more layers or one layer depending on its intended use or purpose. Up to the 20th floor.

下文茲參照實例詳細描述本揭示內容。然而,根據本揭示內容之實例可修改成各種不同形式,本揭示內容之範圍不解釋為受限於下述實例。提供本揭示內容之實例以對熟習本領域之人士更完整地解釋本揭示內容。Hereinafter, the present disclosure will be described in detail with reference to examples. However, the examples according to the present disclosure can be modified into various different forms, and the scope of the present disclosure is not construed as being limited to the following examples. Examples of the present disclosure are provided to explain the present disclosure more completely to those familiar with the field.

製造例Manufacturing example 11

將作為非質子性溶劑之242 g之二甲亞碸、105 g之硫代蘋果酸(thiomalic acid)、137 g之2-乙烯基-4,6-二胺基-1,3,5-三𠯤(2-vinyl-4,6-diamino-1,3,5-triazine)、及16 g之偶氮雙異丁腈(azobisisobutyronitrile)置入1-L反應器,在攪拌下加熱至80℃,然後保持24小時以獲得透明溶液。使獲得之溶液於甲醇中沉澱,並乾燥所形成之固體,從而製造具有以下化學式2之三聚氰胺衍生物:As an aprotic solvent, 242 g of dimethyl sulfoxide, 105 g of thiomalic acid, 137 g of 2-vinyl-4,6-diamino-1,3,5-tri 𠯤 (2-vinyl-4,6-diamino-1,3,5-triazine) and 16 g of azobisisobutyronitrile (azobisisobutyronitrile) are placed in a 1-L reactor, heated to 80°C under stirring, Then keep for 24 hours to obtain a clear solution. The obtained solution is precipitated in methanol, and the formed solid is dried to produce a melamine derivative having the following chemical formula 2:

[化學式2][Chemical formula 2]

Figure 02_image024
Figure 02_image024

製造例Manufacturing example 22

將作為非質子性溶劑之205 g之二甲亞碸、105 g之硫代蘋果酸、100 g之二烯丙基三聚氰胺(diallylmelamine)、及16 g之偶氮雙異丁腈置入1-L反應器,在攪拌下加熱至80℃,然後保持24小時以獲得透明溶液。使獲得之溶液於甲醇中沉澱,並乾燥所形成之固體,從而製造具有以下化學式3之三聚氰胺衍生物:Put 205 g of dimethylsulfoxide, 105 g of thiomalic acid, 100 g of diallylmelamine, and 16 g of azobisisobutyronitrile as an aprotic solvent into 1-L The reactor was heated to 80°C with stirring, and then kept for 24 hours to obtain a transparent solution. The obtained solution is precipitated in methanol, and the formed solid is dried, thereby producing a melamine derivative having the following chemical formula 3:

[化學式3][Chemical formula 3]

Figure 02_image026
Figure 02_image026

製造例Manufacturing example 33

將221 g之10 wt%氫氧化鈉溶液、75 g之甘胺酸(glycine)、及146 g之2-氯-4,6-二胺基-1,3,5-三𠯤(2-chloro-4,6-diamino-1,3,5-triazine)置入1-L反應器,在攪拌下加熱至80℃,然後保持24小時以獲得透明溶液。使獲得之溶液於甲醇中沉澱,並乾燥所形成之固體,從而製造具有以下化學式4之三聚氰胺衍生物:Combine 221 g of 10 wt% sodium hydroxide solution, 75 g of glycine, and 146 g of 2-chloro-4,6-diamino-1,3,5-tris (2-chloro -4,6-diamino-1,3,5-triazine) was placed in a 1-L reactor, heated to 80°C under stirring, and then kept for 24 hours to obtain a transparent solution. The obtained solution was precipitated in methanol, and the formed solid was dried, thereby producing a melamine derivative having the following chemical formula 4:

[化學式4][Chemical formula 4]

Figure 02_image028
Figure 02_image028

製造例Manufacturing example 44 :鹼溶性樹脂:Alkali-soluble resin

將作為溶劑之543 g之二甲基乙醯胺(dimethylacetamide)(DMAc)、350 g之SMA1000 (由Cray Valley製造)、144 g之4-胺基苯甲酸(4-aminobenzoic acid)(PABA)、及49 g之4-胺基苯酚(4-aminophenol)(PAP)置入配備溫度計、攪拌器、回流冷凝器(reflux condenser)及定量濕氣分析儀(quantitative moisture analyzer)之2公升可冷卻及可加熱反應器並混合在一起。在氮氣氛下於反應器之溫度設為80℃之後,使酸酐(acid anhydride)和苯胺衍生物(aniline derivative)持續反應24小時以形成醯胺酸(amic acid)。然後,將反應器溫度設為150℃,使亞胺化反應(imidization reaction)持續進行24小時,以製造固體含量為50%之鹼溶性樹脂溶液。As a solvent, 543 g of dimethylacetamide (DMAc), 350 g of SMA1000 (manufactured by Cray Valley), 144 g of 4-aminobenzoic acid (PABA), And 49 g of 4-aminophenol (PAP) are placed in 2 liters equipped with thermometer, stirrer, reflux condenser and quantitative moisture analyzer, which can be cooled and can be cooled. Heat the reactor and mix together. After the temperature of the reactor is set to 80°C under a nitrogen atmosphere, the acid anhydride and the aniline derivative are allowed to react continuously for 24 hours to form amic acid. Then, the reactor temperature was set to 150° C., and the imidization reaction was continued for 24 hours to produce an alkali-soluble resin solution with a solid content of 50%.

絕緣層之製造Manufacturing of insulating layer

實施例Example 11

製備尺寸為5 cm * 5 cm之銅基材作為基材。製備混合物,其包括作為鹼溶性樹脂之100重量份之樹脂(於製造例4中合成)、作為熱固性黏合劑之30重量份之MY-510 (由Huntsman製造)、作為無機填料之180重量份之SC2050MB、4重量份之製造例1中製造的三聚氰胺衍生物、及作為溶劑之20重量份之DMSO。將混合物施加至PET膜上並乾燥以製造厚度為15 μm之聚合物樹脂層。Prepare a copper substrate with a size of 5 cm * 5 cm as the substrate. A mixture was prepared, which included 100 parts by weight of the resin (synthesized in Manufacturing Example 4) as an alkali-soluble resin, 30 parts by weight of MY-510 (manufactured by Huntsman) as a thermosetting adhesive, and 180 parts by weight as an inorganic filler SC2050MB, 4 parts by weight of the melamine derivative produced in Production Example 1, and 20 parts by weight of DMSO as a solvent. The mixture was applied on a PET film and dried to produce a polymer resin layer with a thickness of 15 μm.

所製造之聚合物樹脂層係於85℃真空層合(vacuum-laminate)至銅線係形成於覆銅積層物(copper clad laminate)上之電路板上。然後移除PET膜。於110℃將厚度為15 µm之光敏性乾膜光阻(photosensitive dry film resist)KL1015 (由Kolon Industries製造)層合至聚合物樹脂層上。The manufactured polymer resin layer was vacuum-laminated at 85°C until the copper wire was formed on the circuit board on the copper clad laminate. Then remove the PET film. A photosensitive dry film resist KL1015 (manufactured by Kolon Industries) with a thickness of 15 µm was laminated on the polymer resin layer at 110°C.

使直徑為30 µm之圓形負型光罩(circular negative photomask)與光敏性乾膜光阻之表面接觸,以UV光(劑量為25 mJ/cm2 )照射該光敏性乾膜光阻,然後以30℃之1%碳酸鈉顯影劑溶液依序顯影該乾膜光阻及該聚合物樹脂層。此時,其中形成有圖案之光敏性乾膜光阻係作為聚合物樹脂層之保護層,因而使與光敏性乾膜光阻相同的圖案亦形成於該聚合物樹脂層中。隨後,該聚合物樹脂層係於100℃之溫度熱固化1小時,然後使用溫度為50℃之3%氫氧化鈉光阻去除溶液(resist stripper solution)移除殘留物及該光敏性乾膜光阻。然後,該聚合物樹脂層係於200℃之溫度熱固化1小時,從而製造絕緣層。Place a circular negative photomask with a diameter of 30 µm in contact with the surface of the photosensitive dry film resist, and irradiate the photosensitive dry film resist with UV light (dose of 25 mJ/cm 2 ), and then Sequentially develop the dry film photoresist and the polymer resin layer with a 1% sodium carbonate developer solution at 30°C. At this time, the photosensitive dry film photoresist with the pattern formed therein serves as the protective layer of the polymer resin layer, so that the same pattern as the photosensitive dry film photoresist is also formed in the polymer resin layer. Subsequently, the polymer resin layer was thermally cured at a temperature of 100°C for 1 hour, and then a 3% sodium hydroxide photoresist stripper solution (resist stripper solution) at a temperature of 50°C was used to remove the residue and the photosensitive dry film. Hinder. Then, the polymer resin layer was thermally cured at a temperature of 200° C. for 1 hour to produce an insulating layer.

實施例Example 22

以與實施例1相同方式製造絕緣層,但使用4重量份之製造例2中所製造的三聚氰胺衍生物代替製造例1中所製造之三聚氰胺衍生物。The insulating layer was manufactured in the same manner as in Example 1, except that 4 parts by weight of the melamine derivative manufactured in Manufacturing Example 2 was used instead of the melamine derivative manufactured in Manufacturing Example 1.

實施例Example 33

以與實施例1相同方式製造絕緣層,但使用4重量份之製造例3中所製造的三聚氰胺衍生物代替製造例1中所製造之三聚氰胺衍生物。The insulating layer was manufactured in the same manner as in Example 1, except that 4 parts by weight of the melamine derivative manufactured in Manufacturing Example 3 was used instead of the melamine derivative manufactured in Manufacturing Example 1.

比較例Comparative example 11

以與實施例1相同方式製造絕緣層,但不添加製造例1中所製造之三聚氰胺衍生物。The insulating layer was manufactured in the same manner as in Example 1, except that the melamine derivative manufactured in Manufacturing Example 1 was not added.

比較例Comparative example 22

以與實施例1相同方式製造絕緣層,但使用4重量份之三聚氰胺(Sigma Aldrich)代替製造例1中所製造之三聚氰胺衍生物。結果,三聚氰胺不溶解,且塗層不均勻,因此無法進行評估。The insulating layer was manufactured in the same manner as in Example 1, but using 4 parts by weight of melamine (Sigma Aldrich) instead of the melamine derivative manufactured in Manufacturing Example 1. As a result, melamine did not dissolve, and the coating was uneven, so evaluation could not be performed.

多層印刷電路板之製造Manufacturing of multilayer printed circuit boards

實施例Example 44

於實施例1中製造的絕緣層之上表面上,在由沉積系統供應氬及氧之混合氣體的情況下,透過濺鍍法將鈦(Ti)金屬及銅(Cu)金屬分別沉積至厚度為50 nm及0.5 µm而形成金屬薄膜。On the upper surface of the insulating layer manufactured in Example 1, with a mixed gas of argon and oxygen supplied by the deposition system, titanium (Ti) metal and copper (Cu) metal were deposited by sputtering to a thickness of 50 nm and 0.5 µm to form a metal thin film.

之後,於該金屬薄膜上形成光敏性樹脂層,曝光及顯影以形成圖案化光敏性樹脂層。此外,透過電鍍在該金屬薄膜上形成由銅製成之金屬基材。然後,使用光敏性樹脂去除溶液移除該圖案化光敏性樹脂層,且蝕刻掉因移除圖案化光敏性樹脂層而曝露的種子層(seed layer)以在絕緣層上形成圖案化金屬層,從而製造多層印刷電路板。Afterwards, a photosensitive resin layer is formed on the metal film, exposed and developed to form a patterned photosensitive resin layer. In addition, a metal substrate made of copper is formed on the metal film through electroplating. Then, using a photosensitive resin removing solution to remove the patterned photosensitive resin layer, and etch away the seed layer exposed by removing the patterned photosensitive resin layer to form a patterned metal layer on the insulating layer, Thus, a multilayer printed circuit board is manufactured.

實施例Example 55 and 66 以及比較例And a comparative example 33

以與實施例4相同方式製造實施例5之多層印刷電路板,但使用實施例2中所製造之絕緣層代替實施例1中所製造之絕緣層。The multilayer printed circuit board of Example 5 was manufactured in the same manner as Example 4, but the insulating layer manufactured in Example 2 was used instead of the insulating layer manufactured in Example 1.

此外,以與實施例4相同方式製造實施例6之多層印刷電路板,但使用實施例3中所製造之絕緣層。In addition, the multilayer printed circuit board of Example 6 was manufactured in the same manner as Example 4, but the insulating layer manufactured in Example 3 was used.

此外,以與實施例4相同方式製造比較例3之多層印刷電路板,但使用比較例1中所製造之絕緣層。In addition, the multilayer printed circuit board of Comparative Example 3 was manufactured in the same manner as in Example 4, but the insulating layer manufactured in Comparative Example 1 was used.

金屬黏著性之測量Metal adhesion measurement

使實施例4至6及比較例3中所製造之多層印刷電路板於135℃及85%之濕度下靜置48小時,然後根據IPC-TM-650標準測量各多層印刷電路板中之圖案化金屬層的剝離強度並記錄為金屬黏著性。The multilayer printed circuit boards manufactured in Examples 4 to 6 and Comparative Example 3 were allowed to stand at 135°C and 85% humidity for 48 hours, and then the patterning in each multilayer printed circuit board was measured according to the IPC-TM-650 standard The peel strength of the metal layer is recorded as the metal adhesion.

下表1顯示實施例4至6及比較例3中所製造之各多層印刷電路板的絕緣層與圖案化金屬層之間的金屬黏著性測量結果。Table 1 below shows the measurement results of the metal adhesion between the insulating layer and the patterned metal layer of the multilayer printed circuit boards manufactured in Examples 4 to 6 and Comparative Example 3.

[表1]    金屬黏著性(kgf/cm) 實施例4 0.51 實施例5 0.54 實施例6 0.52 比較例3 0.22 [Table 1] Metal adhesion (kgf/cm) Example 4 0.51 Example 5 0.54 Example 6 0.52 Comparative example 3 0.22

參見上表1,可確認分別使用含有三聚氰胺衍生物之實施例1、2及3的絕緣層所製造之實施例4、5及6的多層印刷電路板之金屬黏著性極優異,分別為0.51 kgf/cm、0.54 kgf/cm及0.52 kgf/cm。然而,可確認使用不含三聚氰胺衍生物之比較例1的絕緣層所製造之比較例3的多層印刷電路板具有極低的金屬黏著性。即,可確認根據本揭示內容一實施態樣之多層印刷電路板在絕緣層與圖案化金屬層之間具有優異黏著性,意味著三聚氰胺衍生物具有改善黏著性的效果。Referring to Table 1 above, it can be confirmed that the multilayer printed circuit boards of Examples 4, 5, and 6 manufactured using the insulating layers of Examples 1, 2, and 3 containing melamine derivatives, respectively, have extremely excellent metal adhesion properties, each being 0.51 kgf /cm, 0.54 kgf/cm and 0.52 kgf/cm. However, it can be confirmed that the multilayer printed circuit board of Comparative Example 3 manufactured using the insulating layer of Comparative Example 1 that does not contain a melamine derivative has extremely low metal adhesion. That is, it can be confirmed that the multilayer printed circuit board according to an embodiment of the present disclosure has excellent adhesion between the insulating layer and the patterned metal layer, which means that the melamine derivative has the effect of improving adhesion.

如上述,根據本揭示內容之一實施態樣的多層印刷電路板用之絕緣層因含有三聚氰胺衍生物而對於圖案化金屬層具有優異的黏著性。As described above, the insulating layer for the multilayer printed circuit board according to one embodiment of the present disclosure has excellent adhesion to the patterned metal layer because it contains a melamine derivative.

根據本揭示內容另一實施態樣之多層印刷電路板在含有三聚氰胺衍生物的絕緣層與圖案化金屬層之間具有優異的黏著性。The multilayer printed circuit board according to another embodiment of the present disclosure has excellent adhesion between the insulating layer containing the melamine derivative and the patterned metal layer.

根據本揭示內容又另一實施態樣之絕緣層製造方法所製造的絕緣層因含有三聚氰胺衍生物而對於圖案化金屬層具有優異的黏著性。The insulating layer manufactured by the insulating layer manufacturing method according to yet another embodiment of the present disclosure contains melamine derivatives and has excellent adhesion to the patterned metal layer.

100:基材 200,201,202:聚合物樹脂層 300:圖案化層100: Substrate 200, 201, 202: polymer resin layer 300: patterned layer

[圖1]為顯示根據本揭示內容之一實施態樣的製造絕緣層之方法的示意圖。[Fig. 1] is a schematic diagram showing a method of manufacturing an insulating layer according to an embodiment of the present disclosure.

100:基材 100: Substrate

200,201,202:聚合物樹脂層 200, 201, 202: polymer resin layer

300:圖案化層 300: patterned layer

Claims (10)

一種多層印刷電路板用之絕緣層,該絕緣層包含含有鹼溶性樹脂、熱固性黏合劑、及三聚氰胺衍生物之圖案化聚合物樹脂層,其中,該三聚氰胺衍生物具有下列化學式1之結構: [化學式1]
Figure 03_image001
其中,A為含有1至6個羧基之烷基、或含有1至6個羧基之胺基。
An insulating layer for a multilayer printed circuit board, the insulating layer comprising a patterned polymer resin layer containing an alkali-soluble resin, a thermosetting adhesive, and a melamine derivative, wherein the melamine derivative has the structure of the following chemical formula 1: [Chemical formula 1]
Figure 03_image001
Wherein, A is an alkyl group containing 1 to 6 carboxyl groups, or an amino group containing 1 to 6 carboxyl groups.
如請求項1之絕緣層,其中,該聚合物樹脂層含有,以100重量份之該鹼溶性樹脂為基準計,為3至30重量份之量的三聚氰胺衍生物。The insulating layer of claim 1, wherein the polymer resin layer contains a melamine derivative in an amount of 3 to 30 parts by weight based on 100 parts by weight of the alkali-soluble resin. 如請求項1之絕緣層,其中,該三聚氰胺衍生物於25℃在非質子性溶劑中的溶解度為5至20。The insulating layer of claim 1, wherein the solubility of the melamine derivative in an aprotic solvent at 25° C. is 5 to 20. 如請求項1之絕緣層,其中,該鹼溶性樹脂含有:一或更多酸性官能基;以及經一或更多胺基取代之環狀醯亞胺官能基。The insulating layer of claim 1, wherein the alkali-soluble resin contains: one or more acidic functional groups; and a cyclic amide functional group substituted with one or more amine groups. 如請求項1之絕緣層,其中,該熱固性黏合劑含有環氧基以及選自由下列所組成之群組中之一或更多官能基:氧呾基(oxetanyl group)、環狀醚基、環狀硫醚基、氰基、順丁烯二醯亞胺基、及苯并㗁𠯤基(benzoxazine group)。The insulating layer of claim 1, wherein the thermosetting adhesive contains an epoxy group and one or more functional groups selected from the group consisting of: oxetanyl group, cyclic ether group, ring Shape thioether group, cyano group, maleimide group, and benzoxazine group. 一種多層印刷電路板,其包含:如請求項1之絕緣層;以及位於該絕緣層上之圖案化金屬層。A multilayer printed circuit board comprising: an insulating layer as claimed in claim 1; and a patterned metal layer on the insulating layer. 如請求項6之多層印刷電路板,其中,該圖案化金屬層具有根據IPC-TM-650標準於該多層印刷電路板在135℃之溫度及85%之濕度靜置48小時之後測量為0.4 kgf/cm至1.2 kgf/cm的剝離強度。Such as the multilayer printed circuit board of claim 6, wherein the patterned metal layer has a value of 0.4 kgf as measured after the multilayer printed circuit board is allowed to stand for 48 hours at a temperature of 135°C and a humidity of 85% according to the IPC-TM-650 standard /cm to 1.2 kgf/cm peel strength. 一種製造如請求項1之絕緣層之方法,該方法包含下列步驟: 於基材上形成含有鹼溶性樹脂、熱固性黏合劑及三聚氰胺衍生物之聚合物樹脂層; 於該聚合物樹脂層上形成圖案化層; 顯影及固化其上形成有該圖案化層之該聚合物樹脂層;以及 藉由從經固化之聚合物樹脂層移除該圖案化層而形成圖案化聚合物樹脂層, 其中,該三聚氰胺衍生物具有下列化學式1之結構: [化學式1]
Figure 03_image001
其中,A為含有1至6個羧基之烷基、或含有1至6個羧基之胺基。
A method of manufacturing the insulating layer according to claim 1, the method comprising the following steps: forming a polymer resin layer containing alkali-soluble resin, thermosetting adhesive and melamine derivative on a substrate; forming a pattern on the polymer resin layer Developing and curing the polymer resin layer on which the patterned layer is formed; and forming a patterned polymer resin layer by removing the patterned layer from the cured polymer resin layer, wherein the The melamine derivative has the structure of the following chemical formula 1: [Chemical formula 1]
Figure 03_image001
Wherein, A is an alkyl group containing 1 to 6 carboxyl groups, or an amino group containing 1 to 6 carboxyl groups.
如請求項8之方法,其中,於該聚合物樹脂層上形成該圖案化層之步驟包含下列步驟: 在該聚合物樹脂層上形成光敏性樹脂層;以及 藉由曝光該光敏性樹脂層以及鹼顯影該光敏性樹脂層之未曝光部分而形成該圖案化層。The method of claim 8, wherein the step of forming the patterned layer on the polymer resin layer includes the following steps: Forming a photosensitive resin layer on the polymer resin layer; and The patterned layer is formed by exposing the photosensitive resin layer and developing an unexposed portion of the photosensitive resin layer with alkali. 如請求項8之方法,其中,該圖案化層之移除係藉由以光阻去除溶液(photoresist stripper solution)處理而進行。The method of claim 8, wherein the removal of the patterned layer is performed by processing with a photoresist stripper solution.
TW109134589A 2019-10-24 2020-10-06 Insulating layer for multilayer printed circuit board, multilayer printed circuit board including the same, and method for fabricating the same TW202130508A (en)

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