TW202126974A - Clean heat treatment apparatus - Google Patents

Abstract

In a clean heat treatment apparatus of the present invention, it is separated into an upper section 13, a middle section 14, and a lower section 15, a treatment unit 30 being provided in the middle section, after gas for treatment being guided from a lead-in unit 31 to an object x for treatment carried and rotated by a rotating table 32 and being used for treatment, the gas being guided from a lead-out unit 35 to the upper section or the lower section, while a heating unit 20 being provided in any one of the upper section and the lower section for blowing gas heated by a heating device 21 with a hot air fan 23, and a cooling unit 40 being provided in the other one of the upper section and the lower section for blowing gas cooled by a cooling device 43 with a cold air fan 44, and a filter F being provided in any one of the heating unit and the cooling unit.

Description

Clean heat treatment device

The present invention relates to a clean heat treatment device for heating or cooling a processed object in a clean environment. In particular, the present invention has the following characteristics: the object to be processed can be rotated by the rotating table, and the object to be processed can be heated efficiently and uniformly, or the heated object can be cooled efficiently and uniformly, and it can also be used The installation area of the heat treatment device is reduced.

Conventionally, in the manufacturing processes of semiconductor devices, liquid crystal display devices, etc., clean heat treatment devices have been used in order to heat or cool objects to be processed in a clean environment.

Here, as for such a clean heat treatment apparatus, those shown in Patent Documents 1 to 3 are known in the past.

Moreover, in the patent documents 1 to 3, the gas heated by a heater or the like is guided to the filter by a blower to purify it, and the gas thus heated and purified is passed through the The inside of the processing chamber of the object to be processed is circulated, and the aforementioned object to be processed is heated. Furthermore, in the patent document 3, the following has been proposed: In addition to the aforementioned method of heating the object to be processed In addition, the air blowing device is used to guide the gas cooled by a cooler or the like to the filter to purify it, and the thus cooled and purified gas is circulated through the inside of the processing chamber where the object to be processed is placed. And the aforementioned to-be-treated object is subjected to cooling treatment.

Here, there is the following problem: In any of the clean heat treatment devices shown in the aforementioned Patent Documents 1 to 3, only the object to be treated is placed in the treatment chamber, and therefore, the gas after being heated and purified in the aforementioned manner or cooled and cooled The purified gas is only sprayed from a certain direction to the processed object placed in the processing chamber. Therefore, the temperature of the processed object will be different between the upstream side and the downstream side of the gas to the processed object. The heat treatment is performed in such a way that the object to be processed is heated or cooled efficiently and uniformly.

Furthermore, in any of the clean heat treatment devices shown in the aforementioned Patent Documents 1 to 3, the processing chamber and the filter for processing the object to be processed are arranged side by side. Therefore, the area where these components are arranged will also be changed. The problem is that the installation area of the clean heat treatment device becomes large.

[Advanced Technical Literature]

[Patent Literature]

Patent Document 1: Japanese Patent Application Publication No. 2004-163014

Patent Document 2: Japanese Patent Application Publication No. 2005-156089

Patent Document 3: Japanese Patent No. 6140264

The subject of the present invention is to solve the aforementioned problems in a clean heat treatment device that heats or cools the processed object in a clean environment.

In particular, in the clean heat treatment apparatus of the present invention, the problem is that the object to be processed can be rotated by a rotating table, so that the object can be heated efficiently and uniformly, or the heated object can be cooled efficiently and uniformly. In addition, the installation area of the heat treatment device can be reduced.

In the clean heat treatment apparatus of the present invention, in order to solve the aforementioned problems, a clean heat treatment apparatus having an upper section, a middle section, and a lower section is formed, wherein a processing section is provided in the middle section, and the processing gas is introduced from The part is guided to the processed object that is placed on the rotating table and rotated, and the gas guided to the processed object is guided from the outlet to the upper or lower part. On the other hand, In any one of the upper and lower sections, a heating section that uses a fan for hot air to blow the gas heated by the heating device is provided, and the other is provided with a fan for cold wind to cool the gas by the cooling device The latter gas is blown into the cooling section, and when either of the heating section and the cooling section is operated, the other is stopped, and a filter is provided in either of the heating section and the cooling section, and The gas heated by the heating device and the gas cooled by the cooling device are selectively guided to the filter for purification, and the gas purified by the filter is guided to The lead-in part in the processing part of the aforementioned middle section.

Moreover, like the clean heat treatment device of the present invention, a rotating table for placing and rotating the object to be processed is provided in the processing section of the middle section, so that the object to be processed placed on the rotating table is rotated, and, The hot air fan is used to guide the gas heated by the heating device of the heating part to the filter to purify it, so that the heated and purified gas is blown toward the rotating object through the introduction part in the aforementioned manner When heating is performed, the heated and purified air system uniformly sprays the rotating object to heat the object uniformly. In addition, the cooling device of the cooling unit is cooled by a fan for cold air. The gas is guided to the filter to purify it, so that the cooled and purified gas is In the method, the rotating object is sprayed through the introduction part for cooling. At this time, the cooled and purified gas system uniformly sprays the rotating object to uniformly cool the object.

In addition, like the clean heat treatment apparatus of the present invention, any one of the upper and lower sections above and below the middle section where the treatment section is provided is provided with a gas heated by a heating device or cooled by a cooling device After the gas purification filter, the gas purified by the filter is guided to the introduction part of the aforementioned treatment part. At this time, the treatment part and the filter that will treat the object to be treated are arranged side by side. In comparison, the area for installing these components can be reduced, and the installation area of the clean heat treatment device can also be reduced.

Here, the clean heat treatment device of the present invention may be formed such that the upper section is provided with the heating section that blows the gas heated by the heating device with a fan for hot air, and the filter is provided. On the other hand, The lower section is provided with the cooling section that uses a fan for cold air to blow the air cooled by the cooling device, and is provided with a cold air guide that uses the fan for cold air to guide the cooled air from the cooling section to the upper section. During the operation of the heating section, the hot air fan is used to guide the gas heated by the heating device to the filter, and the heated gas is purified and guided to the filter by the filter. The introduction part in the processing part, on the other hand, during the operation of the cooling part, the air cooled by the cooling device is guided by the cooling device from the cold air guide pipe to the upper part when the cooling part is operating. The aforementioned filter is used to purify the cooled gas and guide it to the introduction part of the aforementioned treatment part.

Here, the clean heat treatment device of the present invention may be formed such that the introduction portion of the processing portion is provided with a dispersion introduction member having a plurality of holes that disperse the processing gas and guide it to the carrier. The object to be processed is placed on the rotating table and rotated, and is guided to the processed object The lead-out part for introducing the gas after the object is provided with a dispersion lead-out member that disperses the gas after being guided to the object to be processed and guides it to the inside of the lead-out part.

In addition, at least one of the dispersion introduction member and the dispersion discharge member provided in the processing section is provided with a circular arc-shaped recessed portion facing the rotating table. In this case, the object to be processed can be placed on the rotating table. The area of the processing part that is rotated by the stage is further reduced, and the installation area for installing the clean heat treatment device is also reduced.

In addition, in the clean heat treatment device of the present invention, a rotating device for rotating the rotating table of the above-mentioned treatment part may be provided in the lower part of the treatment part. In this way, the following situations can be prevented: when the rotating device is installed inside the processing unit, problems with the position of the rotating table rotated by the rotating device are arranged inside the processing unit, or when the processing object is heated or cooled, The rotating device is heated and cooled and malfunctions.

In the clean heat treatment device of the present invention, a rotating table for placing and rotating the object to be treated is provided in the processing section of the middle section in the aforementioned manner, so that the object to be treated placed on the rotating table is rotated, and, The hot air fan is used to guide the gas heated by the heating device of the heating part to the filter to purify it, so that the heated and purified gas is blown toward the rotating object through the introduction part in the aforementioned manner The heating is performed, so that the heated and purified gas is evenly sprayed on the rotating object to heat the object uniformly. In addition, the cooling device of the cooling unit is cooled by the cooling device using a cold air fan. The gas is guided to the filter to be purified, so that the cooled and purified gas is sprayed to the rotating object through the introduction part in the aforementioned manner to be cooled. Therefore, the cooled and purified gas is The rotating object is sprayed evenly to cool the object evenly.

In addition, in the clean heat treatment apparatus of the present invention, the gas heated by the heating device or the cooling device is provided in either of the upper and lower sections located above and below the middle section where the processing section is provided in the aforementioned manner. The cooled gas purification filter guides the gas purified by the filter to the introduction part of the treatment part. At this time, it is arranged side by side with the treatment part and the filter that will treat the object to be treated. In comparison, the area for installing these components can be reduced, and the installation area of the clean heat treatment device can also be reduced.

10: Device body

11: Upper shed board

11a: Air supply outlet

11b: Return opening

11c: guide hole

12: Lower shed board

12a: Recirculation hole

12b: Through hole

13: Upper section

14: Middle section

15: Lower part

20: Heating section

21: heating device

22: Mounting plate

23: Fan for hot air

30: Processing Department

31: Introduction Department

32: Rotating table

33: Rotating device

34: Distributed import components

34a: hole

34b: recess

35: export department

36: Decentralized export components

36a: hole

40: Cooling part

41: Return pipe

41a: return branch pipe

42: Return side opening and closing valve

43: cooling device

44: Fan for cold wind

45: Cold wind guide tube

45a: Branch cold air guide tube

46: Conveying side opening and closing valve

F: filter

x: object to be processed

Figure 1 is a schematic explanatory diagram showing the situation in which a heating section is provided in the upper section, a processing section is provided in the middle section, and a cooling section is provided in the lower section in a clean heat treatment apparatus of an embodiment of the present invention, and The above-mentioned upper section, middle section and lower section are displayed in such a way that they are separated to facilitate understanding of the internal structure of these parts.

Figure 2 is a schematic cross-sectional explanatory view showing that in the clean heat treatment device of the foregoing embodiment, the object to be processed placed on the rotating table of the processing section in the middle section is rotated by the rotating device, and will be The heating processing gas purified by the filter in the heating section of the upper stage is heated and guided to the processing section to heat the object to be processed.

3 is a schematic cross-sectional explanatory view showing that in the clean heat treatment device of the foregoing embodiment, the object to be processed placed on the rotating table of the processing section in the middle section is rotated by the rotating device, and the upper section is used The filter in the lower section purifies the gas cooled in the cooling section of the lower section, and guides the purified cooling processing gas to the processing section to cool the processed object.

Fig. 4 is a schematic perspective view of a modified example, which shows that in the clean heat treatment device of the aforementioned embodiment, the gas for processing is guided from the introduction part through the dispersion introduction member to the rotating table mounted on the processing part In the case of the above to-be-processed object, a modified example of a concave portion having an arc shape is provided in the portion of the dispersion introduction member facing the rotating table.

Hereinafter, the clean heat treatment device according to the embodiment of the present invention will be specifically explained based on the accompanying drawings. In addition, the clean heat treatment apparatus of the present invention is not limited to those shown in the following embodiments, but can be implemented in a range where the gist of the invention is not changed as appropriate.

As shown in Figure 1 and so on, in the clean heat treatment device of this embodiment, the device body 10 is inside the device body 10. The interior of 10 is divided into an upper section 13 located above the upper shelf 11, a middle section 14 between the upper shelf 11 and the lower shelf, and a lower section 15 below the lower shelf 12.

Furthermore, in the clean heat treatment apparatus of this embodiment, the heating section 20 is provided in the upper section 13 and the hot air fan 23 installed on the mounting plate 22 on the downstream side of the heating apparatus 21 heats the heat by the heating apparatus 21 The gas is blown, and the heated gas is guided by the hot air fan 23 to the filter F installed on the upper shelf 11 at a position downstream in the blowing direction, and the heated gas is purified by this filter F And the processing gas thus heated and purified from the heating part 20 is guided to the middle section 14 through the air blowing port 11a provided in the upper shelf 11 under the filter F.

In addition, a processing section 30 is provided in the middle section 14 between the upper shelf 11 and the lower shelf 12, and a processing section 30 is provided in the inlet section that introduces the processing gas from the filter F through the blower port 11a. At a position further downstream of 31, a rotating table 32 for placing and rotating the object x to be processed is provided, and the rotating table 32 is rotated by a rotating device 33 provided under the lower shelf 12 described above.

In addition, a dispersion introducing member 34 having a plurality of holes 34a is provided between the introduction part 31 and the rotating table 32, so that the processing gas guided to the introducing part 31 is directed toward each hole 34a of the dispersion introducing member 34. The to-be-processed object x which is placed on the rotating table 32 and rotated is blown.

Furthermore, the gas blown toward the processed object x that is placed on the rotating table 32 and rotated is guided to a position on the way of the lead-out portion 35 located on the downstream side of the rotating table 32. The dispersing and leading-out member 36 of the plurality of holes 36a through which the gas passes prevents the processing gas guided from the introduction part 31 from being immediately guided to the leading-out part 35, and the processing gas will be placed on the rotating table 32 On the other hand, the processed object x being rotated is uniformly heated.

Furthermore, a return opening 11b is provided in the portion of the shelf 11 above the outlet portion 35. On the other hand, a pair of return holes 12a are provided in the portion of the shelf 12 below the outlet 35, and the return opening 11b will be guided. The heat-treated gas guided to the outlet portion 35 is guided to the heating portion 20 of the upper section 13, and the pair of return holes 12a return the heat-treated gas guided to the outlet portion 35 to the lower section described later.部15的冷部40。 Section 15 of the cooling section 40.

In addition, a cooling section 40 is provided in the lower section 15 under the lower shelf board 12, and in the cooling section 40, each return branch pipe 41a branched from the return pipe 41 is inserted into the lead-out section 35, which is installed in the lower shelf. Each of the return holes 12a of a pair of the plate 12, and the return pipe 41 formed by the return branch pipe 41a is provided with a return side opening and closing valve 42, and the return side opening and closing valve 42 is opened to be cooled by the cooling device 43. Pipe 41 and return the gas.

In addition, the cold air guide pipe 45 is provided with a delivery side opening and closing valve 46, wherein the cold air guide pipe 45 uses the cold air fan 44 to deliver the gas cooled by the cooling device 43 as described above, and the The delivery side on-off valve 46 is opened, and the cooled gas delivered through the cold air guide pipe 45 is guided to a pair of branched cold air guide pipes 45a that divide the gas and deliver it.

Furthermore, the pair of branched cold air guide pipes 45a are inserted from the respective through holes 12b provided in the lower shelf 12 through the processing section 30 of the middle section 14 to the upper shelf 11, which is provided near the filter F. Each of the guide holes 11c, and through each branch cold air guide pipe 45a, the cooled gas is delivered to the upper section 13, and the cooled gas is guided to the filter F provided in the upper section 13, The filter F is used to purify the cooled gas, and the thus-cooled and purified processing gas is guided to the middle section through the air outlet 11a of the upper shelf 11 provided under the filter F 14.

Here, according to FIG. 2 specifically, in the clean heat treatment apparatus of this embodiment, the rotating device 33 is used to rotate the object x placed on the rotating table 32, and the treatment after heating by the heating unit 20 is used. The gas is used to heat the processed object x.

In this case, in the cooling section 40 of the lower section 15, the return-side on-off valve 42 provided in the return pipe 41 and the delivery-side on-off valve 46 provided in the cold air guide pipe 45 are closed, and the cooling device 43 and the cooling fan 44 are stopped.

On the other hand, in the heating section 20 of the upper section 13, the heating device 21 and the hot air fan 23 are operated, and the hot air fan 23 provided on the mounting plate 22 is used to blow the gas heated by the heating device 21 , And guided to the aforementioned filter F installed on the shelf 11 on the downstream side in the blowing direction, the heated gas is purified by the filter F, and the thus heated and purified processing gas The introduction part 31 of the processing part 30 of the middle stage part 14 is guided by the air blowing port 11a provided in the part of the upper shelf 11 below the said filter F.

Then, the heated and purified processing gas guided to the introduction portion 31 of the processing portion 30 in this way is passed through the plurality of holes 34a of the aforementioned dispersion introduction member 34 provided at a position further downstream than the introduction portion 31, On the other hand, the object to be processed x placed on the rotating table 32 and rotated is sprayed and heated. In addition, the heat-treated gas after heating the object x in this manner is guided to the outlet portion 35 through the plurality of holes 36a of the dispersion and outlet member 36 provided on the downstream side thereof, and is guided in this manner The heat-treated gas to the outlet portion 35 is sent back to the heating portion 20 through the aforementioned return opening 11b of the outlet portion 35 provided on the upper shelf 11, and the operations described above are repeated to be placed on the rotating table 32. The to-be-processed object x rotated upwards is fully heat-processed.

In addition, in the clean heat treatment apparatus of this embodiment, the gas for processing heated and purified in the aforementioned manner is placed on the rotating table 32 from the plurality of holes 34a of the dispersion introducing member 34. The rotating to-be-processed object x is sprayed to heat the to-be-processed object x. Therefore, the heated and purified gas can be sprayed uniformly to the rotating to-be-processed object x, and the to-be-processed object x can be uniformly heated.

3, in the clean heat treatment apparatus of this embodiment, the rotating device 33 is used to rotate the object x placed on the rotating table 32, and the treatment after being cooled in the cooling section 40 is used. When the gas will be processed to be processed x to be cooled.

In this case, the heating device 21 and the hot air fan 23 provided in the heating section 20 of the upper section 13 are stopped, and the heated processing gas is not guided to the filter F.

On the other hand, in the cooling section 40 of the lower section 15, the return-side on-off valve 42 provided in the return pipe 41 and the conveying-side on-off valve 46 provided in the cold air guide pipe 45 are opened, and the cooling device 43 and the cold wind are operated by a fan 44.

Furthermore, the cooling fan 44 is used to draw the middle section 14 from each of the return branch pipes 41a of the pair of return holes 12a inserted in the lead-out portion 35 and provided in the lower shelf 12 through the return pipe 41. The gas in the lead-out portion 35 on the downstream side of the portion 30 is guided to the cooling device 43 provided in the return pipe 41, and the gas is cooled by the cooling device 43, and then the cooling fan 44 is used to cool the gas. The gas thus cooled is conveyed from the return pipe 41 to the cold air guiding pipe 45, and the cooled gas is guided from the cold air guiding pipe 45 to a pair of branched cold air guiding pipes 45a.

Here, the pair of branch cold air guide pipes 45a are inserted into the filter F of the upper shelf 11 from the through holes 12b provided in the lower shelf 12 via the processing section 30 of the middle section 14 as described above. Each of the nearby guide holes 11c, and the cooled gas guided from the cold air guide pipe 45 to each branch cold air guide pipe 45a is guided to the aforementioned upper section 13 and delivered to the upper section as described above. The aforementioned filter F of 13 uses this filter F to purify the cooled gas, and the thus-cooled and purified processing gas passes through the air outlet 11a of the upper shelf 11 provided under the aforementioned filter F And it is guided to the introduction part 31 of the processing part 30 of the aforementioned middle section 14.

Then, the gas for processing after cooling and purification guided to the introduction portion 31 of the processing portion 30 is passed through the plurality of holes 34a of the dispersion introduction member 34 provided at a position downstream of the introduction portion 31, On the other hand, the to-be-processed object x which is placed on the above-mentioned rotating table 32 and rotated is sprayed and cooled.

In addition, the gas after the cooling process after the object x is cooled in this way is guided to the lead-out portion 35 through the plurality of holes 36a of the dispersion lead-out member 36 provided on the downstream side thereof, and is guided in this way The gas after the cooling process to the outlet portion 35 is passed through the return pipes from the return branch pipes 41a of the pair of return holes 12a inserted in the outlet portion 35 by the cooling fan 44 as described above. 41 to be sucked and cooled by the cooling device 43, repeating as The foregoing operation sufficiently cools the processed object x that is placed on the rotating table 32 and rotated.

In addition, when cooling the processed object x that is placed on the rotating table 32 and rotated in this way, in the clean heat treatment apparatus of this embodiment, the gas for processing that has been cooled and purified in the aforementioned manner is also removed from The plurality of holes 34a of the dispersion introducing member 34 are sprayed toward the processed object x that is placed on the rotating table 32 and rotated, and the processed object x is cooled. Therefore, it can be uniformly applied to the rotating processed object x The cooled and purified gas is sprayed to the ground, and the processed object is uniformly cooled.

Here, in the clean heat treatment apparatus of the present embodiment, as described above, the gas for processing from the introduction part 31 is guided to the part of the processed object x that is placed on the rotating table 32 and rotated. , A plate-shaped member is provided as a dispersion introducing member 34 with a plurality of holes 34a. However, as shown in FIG. 4, if a portion of the dispersion introducing member 34 facing the rotating table 32 is provided with a circular arc In the case of the recessed portion 34b, the area of the processing portion 30 for rotating the object x to be processed on the turntable 32 can be reduced, and the installation area for installing the clean heat treatment device can be reduced. In addition, although not shown, it has the aforementioned plural holes 36a that disperse the gas guided to the object x and guide it to the outlet 35 for introducing the gas guided to the object x As for the dispersion lead-out member 36, similar to the aforementioned dispersion lead-in member 34, an arc-shaped concave portion may be provided at a portion facing the rotating table 32 to reduce the area of the processing portion 30 and also provide a clean heat treatment. The installation area of the device is reduced.

In addition, in the clean heat treatment device of this embodiment, the inside of the device body 10 is divided into the upper section 13 located on the upper shelf 11, the middle section 14 located between the upper shelf 11 and the lower shelf, as described above. The lower section 15 under the lower shelf 12, and the middle section 14 is provided with a processing section 30, and the upper section 13 is provided with a heating section 20, and the lower section 15 is provided with a cooling section 40. Although not shown, it may be A cooling section 40 is provided in the upper section 13 and a heating section 20 is provided in the lower section 15.

10: Device body

11: Upper shed board

11a: Air supply outlet

11b: Return opening

11c: guide hole

12: Lower shed board

12a: Recirculation hole

12b: Through hole

13: Upper section

14: Middle section

15: Lower part

20: Heating section

21: heating device

22: Mounting plate

23: Fan for hot air

30: Processing Department

31: Introduction Department

32: Rotating table

33: Rotating device

34: Distributed import components

34a: hole

35: export department

36: Decentralized export components

36a: hole

40: Cooling part

41: Return pipe

41a: return branch pipe

42: Return side opening and closing valve

43: cooling device

44: Fan for cold wind

45: Cold wind guide tube

45a: Branch cold air guide tube

46: Conveying side opening and closing valve

F: filter

Claims (5)

A clean heat treatment device having an upper section, a middle section, and a lower section, wherein a processing section is provided in the middle section, and the processing gas is guided from the introduction section to the object to be processed that is placed on a rotating table and rotated For processing, and the gas guided to the object to be processed is guided from the lead-out portion to the upper or lower section. On the other hand, at any one of the upper and lower sections, the use of hot air is provided The heating part that blows the gas heated by the heating device with a fan, and the other is provided with a cooling part that blows the gas cooled by the cooling device with a fan for cold air, and the heating part and cooling When any one of the parts is operating, the other is stopped, and a filter is installed in either of the heating part and the cooling part, and the gas heated by the heating device is selectively combined with the gas heated by the heating device. Any one of the gases cooled by the cooling device is guided to the filter to be purified, and the gas purified by the filter is guided to the introduction part in the processing part of the aforementioned middle section. The clean heat treatment device according to claim 1, wherein the upper section is provided with the heating section for blowing the gas heated by the heating device with a fan for hot air, and the filter is provided, on the other hand, The lower section is provided with the cooling section that uses a fan for cold air to blow the air cooled by the cooling device, and is provided with a cold air guide that uses the fan for cold air to guide the cooled air from the cooling section to the upper section. During the operation of the heating section, the hot air fan is used to guide the gas heated by the heating device to the filter, and the heated gas is purified and guided to the filter by the filter. The introduction part in the processing part, on the other hand, during the operation of the cooling part, the air cooled by the cooling device is guided by the cooling device from the cold air guide pipe to the upper part when the cooling part is operating. The aforementioned filter is used to purify the cooled gas and guide it to the introduction part of the aforementioned treatment part. The clean heat treatment device according to claim 1 or 2, wherein, in the treatment section, the introduction section is provided with a dispersion introducing member having a plurality of holes, and the plurality of holes disperse the processing gas. It is guided to the object to be processed which is placed on the rotating table and rotated, and the lead-out part for introducing the gas after being guided to the object is provided to disperse the gas after being guided to the object to be processed. Distributed lead-out members guided to the inside of the lead-out section. The clean heat treatment apparatus according to claim 3, wherein at least one of the dispersion introduction member and the dispersion discharge member provided in the processing section is provided with an arc-shaped concave portion at a portion facing the rotating table. The clean heat treatment apparatus according to claim 1 or 2, wherein a rotating device for rotating the rotating table of the treatment section is provided in the lower section below the treatment section.

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