TW202126477A - Polyimide film and copper-clad laminate - Google Patents

Polyimide film and copper-clad laminate Download PDF

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TW202126477A
TW202126477A TW110105431A TW110105431A TW202126477A TW 202126477 A TW202126477 A TW 202126477A TW 110105431 A TW110105431 A TW 110105431A TW 110105431 A TW110105431 A TW 110105431A TW 202126477 A TW202126477 A TW 202126477A
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polyimide
polyimide film
copper
diamine
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TWI763311B (en
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松下祐之
金子和明
須藤芳樹
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日商日鐵化學材料股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1067Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
    • C08G73/1071Wholly aromatic polyimides containing oxygen in the form of ether bonds in the main chain
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/20Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
    • B32B2307/206Insulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/732Dimensional properties
    • B32B2307/734Dimensional stability
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2311/00Metals, their alloys or their compounds
    • B32B2311/12Copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2379/00Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
    • C08J2379/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08J2379/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors

Abstract

A polyimide film capable of reducing a dimensional change at the time of high-temperature processing and a copper clad laminate using the same are provided. As a polyimide film having a thermoplastic polyimide layer on at least one side of a non-thermoplastic polyimide layer, the polyimide film satisfies the following conditions: (i) a thermal expansion coefficient is in the range of 10 to 30 ppm/K; (ii) glass transition temperature of a thermoplastic polyimide is within the range of 200 to 350 DEG C; (iii) a value of in-plane retardation (RO) is in the range of 5 to 50 nm; (iv) the deviation of the RO ([Delta]RO) in the width direction (TD direction) is 10 nm or less.

Description

聚醯亞胺膜及覆銅層疊板Polyimide film and copper clad laminate

本發明是關於一種聚醯亞胺膜及覆銅層疊板。The invention relates to a polyimide film and a copper clad laminate.

近年來,隨著電子設備的小型化、輕量化、省空間化的發展,薄且輕量、具有可撓性、即便反覆彎曲也具有優異耐久性的柔性印刷電路板(Flexible Printed Circuits,FPC)的需要不斷增大。FPC即便在有限空間內也可實現立體且高密度的安裝,因此其用途不斷地擴大到例如硬碟驅動器(Hard Disk Drive,HDD)、數位通用光碟(Digital Versatile Disc,DVD)、手機等電子設備的可動部分的佈線或電纜(cable)、連接器(connector)等零件。In recent years, with the development of miniaturization, weight reduction, and space saving of electronic equipment, flexible printed circuit boards (FPC) are thin, lightweight, flexible, and have excellent durability even if they are repeatedly bent. The needs of the people continue to grow. FPC can achieve three-dimensional and high-density installation even in a limited space, so its use continues to expand to electronic devices such as hard disk drives (HDD), digital versatile discs (Digital Versatile Disc, DVD), mobile phones, etc. Wiring, cables, connectors and other parts of movable parts.

FPC是通過蝕刻覆銅層疊板(Copper-Clad Laminate,CCL)的銅層進行佈線加工而製造。對於手機或智慧手機中連續彎曲或彎折180°的FPC,大多使用壓延銅箔作為銅層的材料。例如專利文獻1中提出:以耐折裂次數來規定使用壓延銅箔所製作的覆銅層疊板的耐彎曲性。另外,專利文獻2中提出了一種使用以光澤度及彎折次數規定的壓延銅箔的覆銅層疊板。FPC is manufactured by etching the copper layer of a copper-clad laminate (Copper-Clad Laminate, CCL) for wiring processing. For FPCs that are continuously bent or bent 180° in mobile phones or smart phones, rolled copper foil is mostly used as the material of the copper layer. For example, Patent Document 1 proposes that the bending resistance of a copper clad laminate produced using rolled copper foil is specified by the number of breaks resistance. In addition, Patent Document 2 proposes a copper-clad laminate using a rolled copper foil defined by glossiness and the number of folds.

在對覆銅層疊板的光刻(photolithography)步驟或安裝FPC的過程中,以設置在覆銅層疊板中的對準標記(alignment mark)為基準而進行接合、切斷、曝光、蝕刻等各種加工。這些步驟中的加工精度在維持搭載有FPC的電子設備的可靠性方面變得重要。然而,覆銅層疊板具有將熱膨脹係數不同的銅層與樹脂層加以層疊的結構,因此由於銅層與樹脂層的熱膨脹係數之差而在層間產生應力。該應力的一部分或全部在蝕刻銅層進行佈線加工的情況下被解除,由此產生伸縮,導致佈線圖案的尺寸變化。因此,最終在FPC的階段中發生尺寸變化,成為引起佈線間或佈線與端子的接觸不良的原因,使電路基板的可靠性或良率降低。因此,對於作為電路基板材料的覆銅層疊板來說,尺寸穩定性為非常重要的特性。但是,所述專利文獻1、專利文獻2中,關於覆銅層疊板的尺寸穩定性未作任何考慮。In the photolithography process of the copper clad laminate or the process of mounting FPC, the alignment mark (alignment mark) provided in the copper clad laminate is used as a reference to perform various bonding, cutting, exposure, etching, etc. Processing. The processing accuracy in these steps becomes important in maintaining the reliability of the electronic device equipped with the FPC. However, the copper clad laminate has a structure in which a copper layer and a resin layer with different thermal expansion coefficients are laminated, and therefore, a stress is generated between the layers due to the difference in the thermal expansion coefficient between the copper layer and the resin layer. A part or all of this stress is relieved when the copper layer is etched to perform wiring processing, which causes expansion and contraction, resulting in a change in the size of the wiring pattern. Therefore, finally, a dimensional change occurs in the FPC stage, which causes poor contact between the wiring or the wiring and the terminal, and reduces the reliability or yield of the circuit board. Therefore, dimensional stability is a very important characteristic for the copper clad laminate as a material for a circuit board. However, in Patent Document 1 and Patent Document 2, no consideration is given to the dimensional stability of the copper clad laminate.

作為製造聚醯亞胺膜的方法,已知以下方法:對於聚醯胺酸的自支撐性凝膠膜,同時或連續地進行單軸延伸與熱醯亞胺化,由此使聚醯亞胺分子鏈配向而表現出面內雙折射。此時,為了控制延遲(retardation),高精度地控制單軸延伸操作及熱醯亞胺化時的升溫速度、最終固化溫度、負重等條件。例如專利文獻3中提出了以下技術:將聚醯亞胺膜一面加熱一面單軸延伸,由此控制延遲。 [現有技術文獻]As a method of manufacturing a polyimide film, the following method is known: for a self-supporting gel film of polyamide acid, uniaxial stretching and thermal imidization are performed simultaneously or continuously, thereby making the polyimide The molecular chains are aligned to show in-plane birefringence. At this time, in order to control the retardation, conditions such as the uniaxial stretching operation and the heating rate during thermal imidization, the final curing temperature, and the load are controlled with high accuracy. For example, Patent Document 3 proposes a technique in which a polyimide film is heated while uniaxially stretched to control the retardation. [Prior Art Literature]

[專利文獻] [專利文獻1]日本專利特開2014-15674公報(申請專利範圍等) [專利文獻2]日本專利特開2014-11451號公報(申請專利範圍等) [專利文獻3]日本專利特開2000-356713號公報(申請專利範圍等)[Patent Literature] [Patent Document 1] Japanese Patent Laid-Open No. 2014-15674 (application scope, etc.) [Patent Document 2] Japanese Patent Laid-Open No. 2014-11451 (Scope of patent application, etc.) [Patent Document 3] Japanese Patent Laid-Open No. 2000-356713 (application scope, etc.)

[發明所要解決的問題] 本發明的第一目的在於提供一種可減少高溫加工時的尺寸變化的聚醯亞胺膜及使用該聚醯亞胺膜的覆銅層疊板。另外,本發明的第二目的在於提供一種即便置於熱塑性聚醯亞胺的玻璃轉移溫度以上的加熱環境下也實現高的尺寸穩定精度,且可穩定地生產的聚醯亞胺膜及使用該聚醯亞胺膜的覆銅層疊板。 [解決問題的技術手段][The problem to be solved by the invention] The first object of the present invention is to provide a polyimide film that can reduce dimensional changes during high-temperature processing and a copper-clad laminate using the polyimide film. In addition, the second object of the present invention is to provide a polyimide film that achieves high dimensional stability accuracy even under a heating environment above the glass transition temperature of the thermoplastic polyimide and can be stably produced and uses the same. Polyimide film copper clad laminate. [Technical means to solve the problem]

本發明人等進行了努力研究,結果發現,通過控制聚醯亞胺膜的面內延遲可解決所述課題,以至完成了本發明。The inventors of the present invention conducted diligent studies, and as a result, found that the problem can be solved by controlling the in-plane retardation of the polyimide film, and completed the present invention.

即,本發明的聚醯亞胺膜在包含非熱塑性聚醯亞胺的非熱塑性聚醯亞胺層的至少一側具有包含熱塑性聚醯亞胺的熱塑性聚醯亞胺層。本發明的聚醯亞胺膜的特徵在於滿足下述條件(i)~條件(iv); (i)熱膨脹係數為10 ppm/K~30 ppm/K的範圍內; (ii)所述熱塑性聚醯亞胺的玻璃轉移溫度為200℃以上且350℃以下的範圍內; (iii)面內延遲(RO)的值為5 nm以上且50 nm以下的範圍內; (iv)寬度方向(Transverse Direction,TD方向)的面內延遲(RO)的不均一性(ΔRO)為10 nm以下。That is, the polyimide film of the present invention has a thermoplastic polyimide layer containing a thermoplastic polyimide on at least one side of a non-thermoplastic polyimide layer containing a non-thermoplastic polyimide. The polyimide film of the present invention is characterized by satisfying the following conditions (i) to (iv); (I) The coefficient of thermal expansion is within the range of 10 ppm/K to 30 ppm/K; (Ii) The glass transition temperature of the thermoplastic polyimide is within the range of 200°C or more and 350°C or less; (Iii) The value of in-plane retardation (RO) is within the range of 5 nm or more and 50 nm or less; (Iv) The non-uniformity (ΔRO) of the in-plane retardation (RO) in the width direction (Transverse Direction, TD direction) is 10 nm or less.

本發明的聚醯亞胺膜也可為在溫度360℃的環境下以壓力340 MPa/m2 、保持時間15分鐘加壓前後的面內延遲(RO)的變化量為20 nm以下。The polyimide film of the present invention may be such that the change in the in-plane retardation (RO) before and after pressurization at a temperature of 360°C at a pressure of 340 MPa/m 2 and a holding time of 15 minutes is 20 nm or less.

本發明的聚醯亞胺膜也可使所述非熱塑性聚醯亞胺含有四羧酸殘基及二胺殘基,所述四羧酸殘基及二胺殘基均為芳香族基,所述芳香族基包含聯苯四基或亞聯苯基,並且相對於所述四羧酸殘基及二胺殘基的合計100莫耳份,所述聯苯四基或亞聯苯基為40莫耳份以上。The polyimide film of the present invention can also make the non-thermoplastic polyimine contain tetracarboxylic acid residues and diamine residues, and the tetracarboxylic acid residues and diamine residues are aromatic groups, so The aromatic group contains biphenyltetrayl or biphenylene, and the biphenyltetrayl or biphenylene is 40 mole parts relative to the total of 100 mole parts of the tetracarboxylic acid residue and diamine residue. More than mol portion.

本發明的聚醯亞胺膜也可使所述熱塑性聚醯亞胺含有四羧酸殘基及二胺殘基,所述四羧酸殘基及二胺殘基均為芳香族基,所述芳香族基包含聯苯四基或亞聯苯基,並且相對於所述四羧酸殘基及二胺殘基的合計100莫耳份,所述聯苯四基或亞聯苯基為30莫耳份以上且80莫耳份以下的範圍內。The polyimide film of the present invention can also make the thermoplastic polyimine contain tetracarboxylic acid residues and diamine residues, and the tetracarboxylic acid residues and diamine residues are both aromatic groups. The aromatic group contains biphenyltetrayl or biphenylene, and the biphenyltetrayl or biphenylene is 30 moles relative to the total of 100 mole parts of the tetracarboxylic acid residue and diamine residue. In the range of more than ear part and less than 80 mol part.

本發明的聚醯亞胺膜也可為相對於所述非熱塑性聚醯亞胺所含的所有四羧酸殘基100莫耳份,由3,3',4,4'-聯苯四羧酸二酐所衍生的四羧酸殘基為20莫耳份以上且70莫耳份以下的範圍內。The polyimide film of the present invention can also be 100 mole parts relative to all the tetracarboxylic acid residues contained in the non-thermoplastic polyimide, which is composed of 3,3',4,4'-biphenyltetracarboxylic acid The tetracarboxylic acid residue derived from the acid dianhydride is in the range of 20 mol parts or more and 70 mol parts or less.

本發明的聚醯亞胺膜也可為相對於所述熱塑性聚醯亞胺所含的所有四羧酸殘基100莫耳份,由3,3',4,4'-聯苯四羧酸二酐所衍生的四羧酸殘基為40莫耳份以上。The polyimide film of the present invention may also be 100 mol parts of all tetracarboxylic acid residues contained in the thermoplastic polyimide, which is composed of 3,3',4,4'-biphenyltetracarboxylic acid The tetracarboxylic acid residue derived from the dianhydride is 40 mole parts or more.

本發明的聚醯亞胺膜也可為相對於所述非熱塑性聚醯亞胺所含的所有二胺殘基100莫耳份,下述通式(1)所表示的二胺殘基為20莫耳份以上。The polyimide film of the present invention may also be 100 mole parts relative to all diamine residues contained in the non-thermoplastic polyimide, and the diamine residue represented by the following general formula (1) is 20 parts. More than mol portion.

[化1]

Figure 02_image001
[式中,R1 、R2 獨立地表示可經鹵素原子或苯基取代的碳數1~3的烷基或碳數1~3的烷氧基或者碳數2~3的烯基][化1]
Figure 02_image001
[In the formula, R 1 and R 2 independently represent an alkyl group having 1 to 3 carbons or an alkoxy group having 1 to 3 carbons or an alkenyl group having 2 to 3 carbons which may be substituted with a halogen atom or a phenyl group]

本發明的聚醯亞胺膜也可為相對於所述熱塑性聚醯亞胺所含的所有二胺殘基100莫耳份,下述通式(2)所表示的二胺殘基為3莫耳份以上且60莫耳份以下的範圍內。The polyimide film of the present invention may be 100 mole parts of all diamine residues contained in the thermoplastic polyimide, and the diamine residue represented by the following general formula (2) is 3 mole parts. In the range of more than ear part and less than 60 mol part.

[化2]

Figure 02_image003
[式中,R3 、R4 獨立地表示可經鹵素原子或苯基取代的碳數1~3的烷基或碳數1~3的烷氧基或者烯基][化2]
Figure 02_image003
[In the formula, R 3 and R 4 independently represent an alkyl group having 1 to 3 carbons or an alkoxy group or alkenyl group having 1 to 3 carbons which may be substituted with a halogen atom or a phenyl group]

本發明的覆銅層疊板具備絕緣層及位於該絕緣層的至少一個面上的銅層。而且,本發明的覆銅層疊板的特徵在於:所述絕緣層具有與所述銅層的表面接觸的熱塑性聚醯亞胺層、及間接地層疊的非熱塑性聚醯亞胺層, 所述絕緣層包含所述任一種聚醯亞胺膜。The copper clad laminate of the present invention includes an insulating layer and a copper layer located on at least one surface of the insulating layer. Furthermore, the copper clad laminate of the present invention is characterized in that the insulating layer has a thermoplastic polyimide layer in contact with the surface of the copper layer, and a non-thermoplastic polyimide layer laminated indirectly, The insulating layer includes any of the polyimide films.

本發明的覆銅層疊板也可為所述銅層的蝕刻前後的長度方向(Machine Direction,MD方向)的尺寸變化量及寬度方向(TD方向)的尺寸變化量均為2%以下。 [發明的效果]In the copper clad laminate of the present invention, the dimensional change in the longitudinal direction (Machine Direction, MD direction) and the dimensional change in the width direction (TD direction) of the copper layer before and after the etching may both be 2% or less. [Effects of the invention]

本發明的聚醯亞胺膜即便在高溫、高壓的環境下延遲的變化量也得到抑制,因此例如即便為在高溫下與銅箔熱壓接的情況,尺寸穩定性也優異。因此,通過使用本發明的聚醯亞胺膜,可縮短覆銅層疊板的製造步驟的時間,生產穩定性優異。特別在以卷對卷(roll-to-roll)方式對寬幅的聚醯亞胺膜進行處理,層疊銅箔而製造覆銅層疊板的情況下,膜的全寬也尺寸變化率低,尺寸穩定,因此可將由該覆銅層疊板所得的FPC高密度安裝。因此,通過將本發明的聚醯亞胺膜及使用該聚醯亞胺膜的覆銅層疊板用作FPC材料,可對電路基板實現可靠性及良率的提高。The polyimide film of the present invention suppresses the amount of retardation change even in a high-temperature and high-pressure environment, and therefore has excellent dimensional stability even when, for example, it is thermocompression-bonded to a copper foil at a high temperature. Therefore, by using the polyimide film of the present invention, the time for the production step of the copper-clad laminate can be shortened, and the production stability is excellent. Especially when a wide-width polyimide film is processed in a roll-to-roll method, and copper foil is laminated to produce a copper-clad laminate, the overall width of the film also has a low dimensional change rate. It is stable, so the FPC obtained from the copper clad laminate can be mounted at high density. Therefore, by using the polyimide film of the present invention and the copper-clad laminate using the polyimide film as an FPC material, the reliability and yield of the circuit board can be improved.

其次,一面適當參照圖式一面對本發明的實施形態進行說明。Next, the embodiments of the present invention will be described with appropriate reference to the drawings.

<聚醯亞胺膜> 本實施形態的聚醯亞胺膜在非熱塑性聚醯亞胺層的至少一側具有熱塑性聚醯亞胺層。即,熱塑性聚醯亞胺層是設置在非熱塑性聚醯亞胺層的單面或兩面上。例如在製成由本實施形態的聚醯亞胺膜與銅層所構成的覆銅層疊板的情況下,銅層是層疊在熱塑性聚醯亞胺層的面上。 這裡所謂非熱塑性聚醯亞胺,通常為即便進行加熱產生軟化而也不顯示出黏接性的聚醯亞胺,而本發明中是指使用動態黏彈性測定裝置(動態機械分析(Dynamic Mechanical Analysis,DMA))所測定的30℃下的儲存模數為1.0×109 Pa以上,且360℃下的儲存模數為1.0×108 Pa以上的聚醯亞胺。另外,所謂熱塑性聚醯亞胺,通常為可明確地確認到玻璃轉移溫度(Tg)的聚醯亞胺,而本發明中是指使用DMA所測定的30℃下的儲存模數為1.0×109 Pa以上,且360℃下的儲存模數小於1.0×108 Pa的聚醯亞胺。<Polyimide film> The polyimide film of this embodiment has a thermoplastic polyimide layer on at least one side of the non-thermoplastic polyimide layer. That is, the thermoplastic polyimide layer is provided on one side or both sides of the non-thermoplastic polyimide layer. For example, when a copper-clad laminate composed of the polyimide film of this embodiment and a copper layer is used, the copper layer is laminated on the surface of the thermoplastic polyimide layer. The so-called non-thermoplastic polyimide here generally refers to a polyimide that does not exhibit adhesiveness even if it is softened by heating. In the present invention, it refers to the use of a dynamic viscoelasticity measuring device (Dynamic Mechanical Analysis (Dynamic Mechanical Analysis)). , DMA)) The measured storage modulus at 30°C is 1.0×10 9 Pa or more, and the storage modulus at 360°C is 1.0×10 8 Pa or more of polyimide. In addition, the so-called thermoplastic polyimide is usually a polyimide whose glass transition temperature (Tg) can be clearly confirmed. In the present invention, it means that the storage modulus at 30°C measured using DMA is 1.0×10. 9 Pa or more, and the storage modulus at 360 ℃ is less than 1.0×10 8 Pa polyimide.

本實施形態的聚醯亞胺膜可為膜(片),也可為層疊在銅箔、玻璃板、聚醯亞胺系膜、聚醯胺系膜、聚酯系膜等樹脂片等基材上的狀態的膜。The polyimide film of this embodiment may be a film (sheet), or it may be laminated on a resin sheet such as copper foil, glass plate, polyimide film, polyimide film, polyester film, etc. The state of the membrane.

本實施形態的聚醯亞胺膜例如在應用作電路基板的絕緣層的情況下,為了防止翹曲的產生或尺寸穩定性的降低,重要的是熱膨脹係數(Coefficients of Thermal Expansion,CTE)為10 ppm/K以上且30 ppm/K以下的範圍內,優選以10 ppm/K以上且25 ppm/K以下的範圍內為宜。若CTE小於10 ppm/K或超過30 ppm/K,則產生翹曲,或尺寸穩定性降低。另外,本實施形態的聚醯亞胺膜中,相對於包含銅箔等的銅層的CTE,聚醯亞胺膜的CTE更優選±5 ppm/K以下的範圍內,最優選±2 ppm/K以下的範圍內。For example, when the polyimide film of this embodiment is used as an insulating layer of a circuit board, in order to prevent warpage or decrease in dimensional stability, it is important that the coefficient of thermal expansion (CTE) is 10 Within the range of ppm/K or more and 30 ppm/K or less, preferably in the range of 10 ppm/K or more and 25 ppm/K or less. If the CTE is less than 10 ppm/K or more than 30 ppm/K, warpage occurs, or dimensional stability is reduced. In addition, in the polyimide film of the present embodiment, the CTE of the polyimide film is more preferably in the range of ±5 ppm/K or less, and most preferably ±2 ppm/ relative to the CTE of the copper layer including copper foil or the like. Within the range below K.

本實施形態的聚醯亞胺膜中,聚醯亞胺膜的厚度可根據使用目的而設定為既定範圍內的厚度。聚醯亞胺膜的厚度例如優選在8 μm~50 μm的範圍內,更優選在11 μm~26 μm的範圍內。若聚醯亞胺膜的厚度小於所述下限值,則有時無法確保電絕緣性,或產生因操作性降低而在製造步驟中處理變困難等問題。另一方面,若聚醯亞胺膜的厚度超過所述上限值,則為了控制面內延遲(RO),必須高精度地控制製造條件,產生生產性降低等不良狀況。In the polyimide film of this embodiment, the thickness of the polyimide film can be set to a thickness within a predetermined range according to the purpose of use. The thickness of the polyimide film is, for example, preferably in the range of 8 μm to 50 μm, and more preferably in the range of 11 μm to 26 μm. If the thickness of the polyimide film is less than the lower limit, electrical insulation may not be ensured, or problems such as difficulty in handling in the manufacturing process due to reduced operability may occur. On the other hand, if the thickness of the polyimide film exceeds the upper limit, in order to control the in-plane retardation (RO), it is necessary to control the manufacturing conditions with high accuracy, which may cause problems such as decreased productivity.

本實施形態的聚醯亞胺膜中,非熱塑性聚醯亞胺層構成低熱膨脹性的聚醯亞胺層,熱塑性聚醯亞胺層構成高熱膨脹性的聚醯亞胺層。這裡,低熱膨脹性的聚醯亞胺層是指熱膨脹係數(CTE)優選1 ppm/K以上且25 ppm/K以下的範圍內、更優選3 ppm/K以上且25 ppm/K以下的範圍內的聚醯亞胺層。另外,高熱膨脹性的聚醯亞胺層是指CTE優選35 ppm/K以上、更優選35 ppm/K以上且80 ppm/K以下的範圍內、進而優選35 ppm/K以上且70 ppm/K以下的範圍內的聚醯亞胺層。聚醯亞胺層可通過適當變更所使用的原料的組合、厚度、乾燥及硬化條件而製成具有所需CTE的聚醯亞胺層。In the polyimide film of this embodiment, the non-thermoplastic polyimide layer constitutes a low thermal expansion polyimide layer, and the thermoplastic polyimide layer constitutes a high thermal expansion polyimide layer. Here, the polyimide layer with low thermal expansion means that the coefficient of thermal expansion (CTE) is preferably in the range of 1 ppm/K or more and 25 ppm/K, more preferably in the range of 3 ppm/K or more and 25 ppm/K. The polyimide layer. In addition, the highly thermally expandable polyimide layer means that the CTE is preferably 35 ppm/K or more, more preferably 35 ppm/K or more and 80 ppm/K or less, and still more preferably 35 ppm/K or more and 70 ppm/K. Polyimide layer within the following range. The polyimide layer can be made into a polyimide layer with a desired CTE by appropriately changing the combination of raw materials used, thickness, drying and curing conditions.

另外,本實施形態的聚醯亞胺膜中,以非熱塑性聚醯亞胺層與熱塑性聚醯亞胺層的厚度比(非熱塑性聚醯亞胺層/熱塑性聚醯亞胺層)為1.5~6.0的範圍內為宜。該比的值若小於1.5,則相對於聚醯亞胺膜總體的非熱塑性聚醯亞胺層變薄,因此面內延遲(RO)的不均一性容易變大,若超過6.0則熱塑性聚醯亞胺層變薄,因此聚醯亞胺膜與銅層的黏接可靠性容易降低。該面內延遲(RO)的控制與構成聚醯亞胺膜的各聚醯亞胺層的樹脂構成及其厚度有關。對於作為賦予黏接性即高熱膨脹性或軟化的樹脂構成的熱塑性聚醯亞胺層來說,其厚度越大,則對聚醯亞胺膜的RO的值造成的影響越大。因此,增大非熱塑性聚醯亞胺層的厚度的比率,減小熱塑性聚醯亞胺層的厚度的比率,減小聚醯亞胺膜的RO的值及其不均一性。In addition, in the polyimide film of this embodiment, the thickness ratio of the non-thermoplastic polyimide layer to the thermoplastic polyimide layer (non-thermoplastic polyimide layer/thermoplastic polyimide layer) is 1.5 to The range of 6.0 is appropriate. If the value of this ratio is less than 1.5, the non-thermoplastic polyimide layer relative to the entire polyimide film becomes thinner, so the unevenness of the in-plane retardation (RO) tends to increase. If it exceeds 6.0, the thermoplastic polyimide layer becomes thinner. The imine layer becomes thinner, so the adhesion reliability between the polyimide film and the copper layer is likely to decrease. The control of the in-plane retardation (RO) is related to the resin composition and thickness of each polyimide layer constituting the polyimide film. For a thermoplastic polyimide layer composed of a resin that imparts adhesiveness, that is, high thermal expansion or softening, the greater the thickness, the greater the influence on the RO value of the polyimide film. Therefore, the ratio of the thickness of the non-thermoplastic polyimide layer is increased, the ratio of the thickness of the thermoplastic polyimide layer is decreased, and the value of RO of the polyimide film and its non-uniformity are decreased.

本實施形態的聚醯亞胺膜中,構成熱塑性聚醯亞胺層的聚醯亞胺可提高與銅層的密接性。這種熱塑性聚醯亞胺的玻璃轉移溫度為200℃以上且350℃以下的範圍內,優選200℃以上且320℃以下的範圍內。In the polyimide film of this embodiment, the polyimide constituting the thermoplastic polyimide layer can improve the adhesion to the copper layer. The glass transition temperature of such a thermoplastic polyimide is in the range of 200°C or more and 350°C or less, preferably in the range of 200°C or more and 320°C or less.

就更大地表現出本實施形態的聚醯亞胺膜的尺寸精度的改善效果的觀點來看,本實施形態的聚醯亞胺膜優選的是膜寬為490 mm以上且1100 mm以下的範圍內,且長條狀的長度為20 m以上。在連續地製造本實施形態的聚醯亞胺膜的情況下,寬度方向(以下也稱為TD方向)越寬的膜,發明的效果越尤其變明顯。此外,也包括連續地製造本實施形態的聚醯亞胺膜後,在長條的聚醯亞胺膜的長度方向(以下也稱為MD方向)及TD方向上以某一定的值切割(slit)所得的膜。From the viewpoint of exhibiting the effect of improving the dimensional accuracy of the polyimide film of the present embodiment to a greater extent, the polyimide film of the present embodiment preferably has a film width of 490 mm or more and 1100 mm or less. , And the length of the strip is more than 20 m. In the case of continuously manufacturing the polyimide film of the present embodiment, the wider the film in the width direction (hereinafter also referred to as the TD direction), the more the effect of the invention becomes more pronounced. In addition, it also includes that after the polyimide film of the present embodiment is continuously manufactured, it is slit at a certain value in the longitudinal direction (hereinafter also referred to as the MD direction) and the TD direction of the long polyimide film. ) The resulting film.

本實施形態的聚醯亞胺膜的面內延遲(RO)的值為5 nm以上且50 nm以下的範圍內,優選5 nm以上且20 nm以下的範圍內,更優選5 nm以上且15 nm以下的範圍內。另外,TD方向的RO的不均一性(ΔRO)為10 nm以下,優選5 nm以下,更優選3 nm以下,由於在這種範圍內進行控制,因此尤其即便是厚度為25 μm以上的膜,尺寸精度也提高。The in-plane retardation (RO) value of the polyimide film of this embodiment is in the range of 5 nm or more and 50 nm or less, preferably in the range of 5 nm or more and 20 nm or less, more preferably 5 nm or more and 15 nm Within the following range. In addition, the RO unevenness (ΔRO) in the TD direction is 10 nm or less, preferably 5 nm or less, and more preferably 3 nm or less. Since it is controlled within this range, it is especially important for films with a thickness of 25 μm or more. The dimensional accuracy is also improved.

本實施形態的聚醯亞胺膜優選的是在溫度360℃的環境下以壓力340 MPa/m2 、保持時間15分鐘加壓前後的面內延遲(RO)的變化量為20 nm以下,更優選10 nm以下,進而優選5 nm以下。本實施形態的聚醯亞胺膜即便在超過構成熱塑性聚醯亞胺層的聚醯亞胺的玻璃轉移溫度的溫度下,也將RO的變化量控制於所述上限值以下。因此,例如在通過熱層壓將本實施形態的聚醯亞胺膜與銅箔貼合的步驟前後,RO也不易變化,因此成為尺寸穩定性優異的聚醯亞胺膜。The polyimide film of the present embodiment preferably has a pressure of 340 MPa/m 2 and a holding time of 15 minutes in an environment with a temperature of 360° C. The change in the in-plane retardation (RO) before and after pressure is 20 nm or less. It is preferably 10 nm or less, and more preferably 5 nm or less. In the polyimide film of this embodiment, even at a temperature exceeding the glass transition temperature of the polyimide constituting the thermoplastic polyimide layer, the amount of change in RO is controlled to the upper limit or less. Therefore, for example, before and after the step of bonding the polyimide film of the present embodiment and the copper foil by thermal lamination, RO is not easily changed, and therefore, it becomes a polyimide film having excellent dimensional stability.

另外,本實施形態的聚醯亞胺膜的拉伸模數優選3.0 GPa~10.0 GPa的範圍內,更優選4.5 GPa~8.0 GPa的範圍內。若聚醯亞胺膜的拉伸模數小於3.0 GPa,則聚醯亞胺自身的強度降低,由此將覆銅層疊板加工成電路基板時有時產生膜的開裂等操作上的問題。相反地,若聚醯亞胺膜的拉伸模數超過10.0 GPa,則覆銅層疊板的對於彎折的剛性上升,結果在將覆銅層疊板彎折時,對銅佈線施加的彎曲應力上升,耐彎折性降低。通過將聚醯亞胺膜的拉伸模數設為所述範圍內,可確保聚醯亞胺膜的強度及柔軟性。In addition, the tensile modulus of the polyimide film of the present embodiment is preferably in the range of 3.0 GPa to 10.0 GPa, and more preferably in the range of 4.5 GPa to 8.0 GPa. If the tensile modulus of the polyimide film is less than 3.0 GPa, the strength of the polyimide itself is lowered, which may cause operational problems such as film cracking when the copper-clad laminate is processed into a circuit board. Conversely, if the tensile modulus of the polyimide film exceeds 10.0 GPa, the bending rigidity of the copper-clad laminate increases. As a result, when the copper-clad laminate is bent, the bending stress applied to the copper wiring increases. , The bending resistance is reduced. By setting the tensile modulus of the polyimide film within the above range, the strength and flexibility of the polyimide film can be ensured.

本實施形態的聚醯亞胺膜的製造方法的實施方式例如有:[1]在支撐基材上塗布聚醯胺酸的溶液並進行乾燥後,加以醯亞胺化而製造聚醯亞胺膜的方法;以及[2]在支撐基材上塗布聚醯胺酸的溶液並進行乾燥後,將聚醯胺酸的凝膠膜從支撐基材剝離,加以醯亞胺化而製造聚醯亞胺膜的方法。另外,本實施形態的聚醯亞胺膜為包含多層聚醯亞胺層的聚醯亞胺膜,因此其製造方法的實施方式例如可舉出:[3]在支撐基材上重複進行聚醯胺酸的溶液的塗布、乾燥後,進行醯亞胺化的方法(以下稱為澆注法);以及[4]通過多層擠出同時將聚醯胺酸以多層地層疊的狀態進行塗布、乾燥後,進行醯亞胺化的方法(以下稱為多層擠出法)等。The embodiment of the method of manufacturing the polyimide film of this embodiment includes, for example: [1] A solution of polyimide acid is coated on a support substrate, dried, and then imidized to produce a polyimide film. Method; and [2] After coating the polyamide acid solution on the supporting substrate and drying, the polyamide acid gel film is peeled from the supporting substrate, and then imidized to produce polyimide Membrane method. In addition, the polyimide film of the present embodiment is a polyimide film including multiple polyimide layers. Therefore, the embodiment of the manufacturing method thereof may, for example, include: [3] Repeating the polyimide film on the supporting substrate After coating and drying the solution of amino acid, the method of imidization (hereinafter referred to as the casting method); and [4] After coating and drying the polyamic acid in a multilayered state by multi-layer extrusion at the same time , The method of carrying out imidization (hereinafter referred to as the multilayer extrusion method), etc.

所述[1]方法例如可包括以下的步驟1a~步驟1c; (1a)在支撐基材上塗布聚醯胺酸的溶液,並加以乾燥的步驟; (1b)在支撐基材上對聚醯胺酸進行熱處理而醯亞胺化,由此形成聚醯亞胺層的步驟;以及 (1c)將支撐基材與聚醯亞胺層分離,由此獲得聚醯亞胺膜的步驟。The method [1] may include the following steps 1a to 1c, for example; (1a) A step of coating a polyamic acid solution on a supporting substrate and drying it; (1b) a step of heat-treating polyamide acid on a supporting substrate to form a polyimide layer; and (1c) A step of separating the supporting substrate from the polyimide layer, thereby obtaining a polyimide film.

所述[2]方法例如可包括以下的步驟2a~步驟2c; (2a)在支撐基材上塗布聚醯胺酸的溶液,並加以乾燥的步驟; (2b)將支撐基材與聚醯胺酸的凝膠膜分離的步驟;以及 (2c)對聚醯胺酸的凝膠膜進行熱處理而醯亞胺化,由此獲得聚醯亞胺膜的步驟。The method [2] may include the following steps 2a to 2c, for example; (2a) The step of coating a polyamic acid solution on the supporting substrate and drying it; (2b) The step of separating the support substrate from the gel membrane of polyamide acid; and (2c) A step of heat-treating the gel film of polyimide to obtain a polyimide film.

所述[3]方法是在所述[1]方法或[2]方法中重複進行多次步驟1a或步驟2a,在支撐基材上形成聚醯胺酸的層疊結構體,除此以外,可與所述[1]方法或[2]方法同樣地實施。The method [3] is to repeat step 1a or step 2a multiple times in the method [1] or [2] to form a laminated structure of polyamide acid on the supporting substrate. Otherwise, It is implemented in the same manner as the method [1] or the method [2] described above.

所述[4]方法是在所述[1]方法的步驟1a或[2]方法的步驟2a中,通過多層擠出同時塗布聚醯胺酸的層疊結構體並進行乾燥,除此以外,可與所述[1]方法或[2]方法同樣地實施。In the method [4], in step 1a of the method [1] or step 2a of the method [2], the laminated structure of polyamide acid is simultaneously coated by multi-layer extrusion and dried. Otherwise, It is implemented in the same manner as the method [1] or the method [2] described above.

本發明中製造的聚醯亞胺膜優選的是在支撐基材上完成聚醯胺酸的醯亞胺化。由於在將聚醯胺酸的樹脂層固定在支撐基材上的狀態下進行醯亞胺化,因此可抑制醯亞胺化過程中的聚醯亞胺層的伸縮變化,維持聚醯亞胺膜的厚度或尺寸精度。The polyimide film produced in the present invention preferably completes the imidization of polyimide on a supporting substrate. Since the polyimide resin layer is fixed on the supporting substrate, the imidization is carried out, so that the expansion and contraction of the polyimide layer during the imidization process can be suppressed, and the polyimide film can be maintained The thickness or dimensional accuracy.

然而,對於在支撐基材上完成聚醯胺酸的醯亞胺化的聚醯亞胺膜來說,由於在從支撐基材分離聚醯亞胺膜時所施加的對聚醯亞胺膜的張力、或例如在使用刀鋒(knife edge)等的剝離時所產生的對聚醯亞胺膜的應力等,而將聚醯亞胺膜延伸。因此,容易產生聚醯亞胺膜的面內延遲(RO)的不均一性,尤其越是膜寬為490 mm以上的聚醯亞胺膜,RO的不均一性越變明顯。對於本實施形態的聚醯亞胺膜來說,以構成非熱塑性聚醯亞胺層及熱塑性聚醯亞胺層的聚醯亞胺均容易形成秩序結構的方式進行設定,由此使剝離所必需的應力分散至聚醯亞胺膜的各層中,由此可控制RO。However, for the polyimide film in which the imidization of polyimide is completed on the supporting substrate, due to the impact on the polyimide film applied when the polyimide film is separated from the supporting substrate Tension, or stress to the polyimide film generated when peeling using a knife edge or the like, for example, stretches the polyimide film. Therefore, the inhomogeneity of the in-plane retardation (RO) of the polyimide film is likely to occur, and in particular, the more the film width of the polyimide film is 490 mm or more, the more the RO unevenness becomes more obvious. For the polyimide film of this embodiment, it is set so that the polyimide constituting the non-thermoplastic polyimide layer and the thermoplastic polyimide layer can easily form an ordered structure, thereby making peeling necessary The stress is dispersed in the layers of the polyimide film, thereby controlling RO.

另外,也可通過以下方法來控制面內延遲(RO):將支撐基材上的聚醯胺酸的凝膠膜分離,將聚醯胺酸的凝膠膜單軸延伸或雙軸延伸,同時或連續地進行醯亞胺化。此時,為了更精密地高度地控制RO,優選的是適當調整延伸操作及醯亞胺化時的升溫速度、醯亞胺化的完成溫度、負重等條件。In addition, the in-plane retardation (RO) can also be controlled by the following methods: separating the polyamic acid gel film on the support substrate, uniaxially or biaxially extending the polyamic acid gel film, and simultaneously Or continuously carry out the imidization. At this time, in order to control RO more precisely and highly, it is preferable to appropriately adjust conditions such as the stretching operation and the temperature increase rate during the imidization, the completion temperature of the imidization, and the load.

(非熱塑性聚醯亞胺) 本實施形態的聚醯亞胺膜中,優選的是非熱塑性聚醯亞胺含有四羧酸殘基及二胺殘基,這些殘基均為芳香族基,且包含聯苯四基或亞聯苯基。這裡,聯苯四基或亞聯苯基與二苯基骨架為相同含意,例如也可使鹵素原子、烷基、烷氧基、烯基等取代基鍵合於聯苯四基或亞聯苯基,但尤其從減小高溫環境下的面內延遲(RO)的變化量的觀點來看,例如更優選的是將烷基、烷氧基、烯基等取代基的碳數設為1~3的範圍內。 此外,本發明中,所謂四羧酸殘基,表示由四羧酸二酐所衍生的四價基團,所謂二胺殘基,表示由二胺化合物所衍生的二價基團。另外,二胺化合物為具有兩個胺基的化合物,但各胺基中的氫原子也可經任意的取代基所取代。(Non-thermoplastic polyimide) In the polyimide film of this embodiment, it is preferable that the non-thermoplastic polyimide contains tetracarboxylic acid residues and diamine residues, and these residues are aromatic groups and contain biphenyltetrayl or biphenylene base. Here, the biphenyltetrayl or biphenylene has the same meaning as the diphenyl skeleton. For example, a substituent such as a halogen atom, an alkyl group, an alkoxy group, and an alkenyl group may be bonded to the biphenyltetrayl or biphenylene group. In particular, from the viewpoint of reducing the amount of change in in-plane retardation (RO) in a high-temperature environment, for example, it is more preferable to set the carbon number of substituents such as alkyl, alkoxy, and alkenyl groups to 1 to Within the range of 3. In the present invention, the term “tetracarboxylic acid residue” means a tetravalent group derived from tetracarboxylic dianhydride, and the term “diamine residue” means a divalent group derived from a diamine compound. In addition, the diamine compound is a compound having two amine groups, but the hydrogen atom in each amine group may be substituted with any substituent.

非熱塑性聚醯亞胺所含的四羧酸殘基及二胺殘基均為芳香族基,通過設為芳香族基,可減小聚醯亞胺膜的高溫環境下的面內延遲(RO)的變化量。進而,相對於四羧酸殘基及二胺殘基的合計100莫耳份,優選的是將聯苯四基或亞聯苯基設為40莫耳份以上,更優選的是設為50莫耳份以上,由此容易形成由聯苯四基或亞聯苯基所得的秩序結構,可減小聚醯亞胺膜的高溫環境下的RO的變化量,並且抑制RO的不均一性。The tetracarboxylic acid residues and diamine residues contained in the non-thermoplastic polyimide are both aromatic groups. By setting them as aromatic groups, the in-plane retardation (RO ) The amount of change. Furthermore, relative to the total of 100 mole parts of the tetracarboxylic acid residue and the diamine residue, the biphenyltetrayl or biphenylene group is preferably 40 mole parts or more, and more preferably 50 mole parts. It is easy to form an ordered structure derived from biphenyltetrayl or biphenylene, which can reduce the amount of change of RO in the high-temperature environment of the polyimide film, and suppress the non-uniformity of RO.

另外,非熱塑性聚醯亞胺所含的四羧酸殘基例如可優選地舉出由3,3',4,4'-聯苯四羧酸二酐(Biphenyltetracarboxylic dianhydride,BPDA)、2,2',3,3'-聯苯四羧酸二酐等所衍生的四羧酸殘基。這些四羧酸殘基中,尤其由BPDA所衍生的四羧酸殘基(以下也稱為BPDA殘基)容易形成秩序結構,可減小高溫環境下的面內延遲(RO)的變化量,因此特別優選。另外,BPDA殘基雖可賦予作為聚醯亞胺前驅物的聚醯胺酸的凝膠膜的自支撐性,但有使醯亞胺化後的CTE增大的傾向。從這種觀點來看,相對於非熱塑性聚醯亞胺所含的所有四羧酸殘基100莫耳份,BPDA殘基以優選20莫耳份~70莫耳份的範圍內、更優選20莫耳份~60莫耳份的範圍內為宜。In addition, the tetracarboxylic acid residue contained in the non-thermoplastic polyimide can preferably be exemplified by 3,3',4,4'-biphenyltetracarboxylic dianhydride (BPDA), 2,2 ',3,3'-Biphenyltetracarboxylic dianhydride and other derived tetracarboxylic acid residues. Among these tetracarboxylic acid residues, especially tetracarboxylic acid residues derived from BPDA (hereinafter also referred to as BPDA residues) easily form an ordered structure, which can reduce the amount of change in in-plane retardation (RO) in a high-temperature environment. Therefore, it is particularly preferred. In addition, although the BPDA residue can impart self-supporting properties to the polyimide precursor of the polyimide gel film, it tends to increase the CTE after imidization. From this point of view, with respect to 100 mole parts of all tetracarboxylic acid residues contained in the non-thermoplastic polyimide, the BPDA residue is preferably in the range of 20 mole parts to 70 mole parts, more preferably 20 mole parts. It is suitable to be in the range of mol parts to 60 mol parts.

非熱塑性聚醯亞胺所含的所述BPDA殘基以外的四羧酸殘基可優選地舉出由均苯四甲酸二酐(Pyromellitic dianhydride,PMDA)所衍生的四羧酸殘基(以下也稱為PMDA殘基)。相對於非熱塑性聚醯亞胺所含的所有四羧酸殘基100莫耳份,PMDA殘基以優選0莫耳份~60莫耳份的範圍內、更優選0莫耳份~50莫耳份的範圍內為宜。PMDA殘基為任意,但為發揮控制熱膨脹係數及控制玻璃轉移溫度的作用的殘基。The tetracarboxylic acid residues other than the BPDA residue contained in the non-thermoplastic polyimide may preferably be tetracarboxylic acid residues derived from pyromellitic dianhydride (PMDA) (hereinafter also Referred to as PMDA residues). Relative to 100 mol parts of all tetracarboxylic acid residues contained in the non-thermoplastic polyimide, PMDA residues are preferably in the range of 0 mol parts to 60 mol parts, more preferably 0 mol parts to 50 mol parts Within the range of parts is appropriate. The PMDA residue is arbitrary, but it is a residue that functions to control the thermal expansion coefficient and control the glass transition temperature.

其他四羧酸殘基例如可舉出由以下的芳香族四羧酸二酐所衍生的四羧酸殘基:3,3',4,4'-二苯基碸四羧酸二酐、4,4'-氧基雙鄰苯二甲酸酐、2,3',3,4'-聯苯四羧酸二酐、2,2',3,3'-二苯甲酮四羧酸二酐、2,3,3',4'-二苯甲酮四羧酸二酐或3,3',4,4'-二苯甲酮四羧酸二酐、2,3',3,4'-二苯基醚四羧酸二酐、雙(2,3-二羧基苯基)醚二酐、3,3'',4,4''-對三聯苯四羧酸二酐、2,3,3'',4''-對三聯苯四羧酸二酐或2,2'',3,3''-對三聯苯四羧酸二酐、2,2-雙(2,3-二羧基苯基)-丙烷二酐或2,2-雙(3,4-二羧基苯基)-丙烷二酐、雙(2,3-二羧基苯基)甲烷二酐或雙(3,4-二羧基苯基)甲烷二酐、雙(2,3-二羧基苯基)碸二酐或雙(3,4-二羧基苯基)碸二酐、1,1-雙(2,3-二羧基苯基)乙烷二酐或1,1-雙(3,4-二羧基苯基)乙烷二酐、1,2,7,8-菲-四羧酸二酐、1,2,6,7-菲-四羧酸二酐或1,2,9,10-菲-四羧酸二酐、2,3,6,7-蒽四羧酸二酐、2,2-雙(3,4-二羧基苯基)四氟丙烷二酐、2,3,5,6-環己烷二酐、1,2,5,6-萘四羧酸二酐、1,4,5,8-萘四羧酸二酐、2,3,6,7-萘四羧酸二酐、4,8-二甲基-1,2,3,5,6,7-六氫萘-1,2,5,6-四羧酸二酐、2,6-或2,7-二氯萘-1,4,5,8-四羧酸二酐、2,3,6,7-四氯萘-1,4,5,8-四羧酸二酐或1,4,5,8-四氯萘-2,3,6,7-四羧酸二酐、2,3,8,9-苝-四羧酸二酐、3,4,9,10-苝-四羧酸二酐、4,5,10,11-苝-四羧酸二酐或5,6,11,12-苝-四羧酸二酐、環戊烷-1,2,3,4-四羧酸二酐、吡嗪-2,3,5,6-四羧酸二酐、吡咯烷-2,3,4,5-四羧酸二酐、噻吩-2,3,4,5-四羧酸二酐、4,4'-雙(2,3-二羧基苯氧基)二苯基甲烷二酐等。Examples of other tetracarboxylic acid residues include tetracarboxylic acid residues derived from the following aromatic tetracarboxylic dianhydrides: 3,3',4,4'-diphenyl tetracarboxylic dianhydride, 4 ,4'-oxydiphthalic anhydride, 2,3',3,4'-biphenyltetracarboxylic dianhydride, 2,2',3,3'-benzophenonetetracarboxylic dianhydride , 2,3,3',4'-benzophenone tetracarboxylic dianhydride or 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 2,3',3,4' -Diphenyl ether tetracarboxylic dianhydride, bis(2,3-dicarboxyphenyl) ether dianhydride, 3,3``,4,4''-p-terphenyltetracarboxylic dianhydride, 2,3 ,3``,4''-p-terphenyltetracarboxylic dianhydride or 2,2'',3,3''-p-terphenyltetracarboxylic dianhydride, 2,2-bis(2,3-di Carboxyphenyl)-propane dianhydride or 2,2-bis(3,4-dicarboxyphenyl)-propane dianhydride, bis(2,3-dicarboxyphenyl)methane dianhydride or bis(3,4- Dicarboxyphenyl) methane dianhydride, bis(2,3-dicarboxyphenyl) dianhydride or bis(3,4-dicarboxyphenyl) dianhydride, 1,1-bis(2,3-di Carboxyphenyl)ethane dianhydride or 1,1-bis(3,4-dicarboxyphenyl)ethane dianhydride, 1,2,7,8-phenanthrene-tetracarboxylic dianhydride, 1,2,6 ,7-phenanthrene-tetracarboxylic dianhydride or 1,2,9,10-phenanthrene-tetracarboxylic dianhydride, 2,3,6,7-anthracene tetracarboxylic dianhydride, 2,2-bis(3, 4-Dicarboxyphenyl)tetrafluoropropane dianhydride, 2,3,5,6-cyclohexane dianhydride, 1,2,5,6-naphthalenetetracarboxylic dianhydride, 1,4,5,8- Naphthalenetetracarboxylic dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 4,8-dimethyl-1,2,3,5,6,7-hexahydronaphthalene-1,2, 5,6-tetracarboxylic dianhydride, 2,6- or 2,7-dichloronaphthalene-1,4,5,8-tetracarboxylic dianhydride, 2,3,6,7-tetrachloronaphthalene-1 ,4,5,8-tetracarboxylic dianhydride or 1,4,5,8-tetrachloronaphthalene-2,3,6,7-tetracarboxylic dianhydride, 2,3,8,9-perylene-tetra Carboxylic dianhydride, 3,4,9,10-perylene-tetracarboxylic dianhydride, 4,5,10,11-perylene-tetracarboxylic dianhydride or 5,6,11,12-perylene-tetracarboxylic acid Dianhydride, cyclopentane-1,2,3,4-tetracarboxylic dianhydride, pyrazine-2,3,5,6-tetracarboxylic dianhydride, pyrrolidine-2,3,4,5-tetra Carboxylic dianhydride, thiophene-2,3,4,5-tetracarboxylic dianhydride, 4,4'-bis(2,3-dicarboxyphenoxy)diphenylmethane dianhydride, etc.

非熱塑性聚醯亞胺所含的四羧酸殘基中,相對於非熱塑性聚醯亞胺所含的所有四羧酸殘基100莫耳份,由2,3',3,4'-二苯基醚四羧酸二酐、3,3',4,4'-二苯基碸四羧酸二酐、4,4'-氧基雙鄰苯二甲酸酐及2,3',3,4'-二苯基四羧酸二酐的四羧酸二酐所衍生的四羧酸殘基以優選20莫耳份以下、更優選15莫耳份以下為宜。若相對於非熱塑性聚醯亞胺所含的所有四羧酸殘基而這些四羧酸殘基超過20莫耳份,則分子的配向性降低,面內延遲(RO)的控制變困難。Among the tetracarboxylic acid residues contained in non-thermoplastic polyimine, 100 mole parts relative to all the tetracarboxylic acid residues contained in non-thermoplastic polyimide is composed of 2,3',3,4'-two Phenyl ether tetracarboxylic dianhydride, 3,3',4,4'-diphenyl tetracarboxylic dianhydride, 4,4'-oxydiphthalic anhydride and 2,3',3, The tetracarboxylic acid residue derived from the tetracarboxylic dianhydride of 4'-diphenyltetracarboxylic dianhydride is preferably 20 mol parts or less, more preferably 15 mol parts or less. If these tetracarboxylic acid residues exceed 20 mol parts with respect to all the tetracarboxylic acid residues contained in the non-thermoplastic polyimide, the orientation of the molecule decreases and the control of in-plane retardation (RO) becomes difficult.

本實施形態的聚醯亞胺膜中,非熱塑性聚醯亞胺所含的二胺殘基例如可優選地舉出下述通式(1)所表示的二胺殘基。In the polyimide film of this embodiment, the diamine residue contained in the non-thermoplastic polyimide preferably includes, for example, a diamine residue represented by the following general formula (1).

[化3]

Figure 02_image001
[化3]
Figure 02_image001

所述式(1)中,R1 、R2 獨立地表示可經鹵素原子或苯基取代的碳數1~3的烷基、或碳數1~3的烷氧基或者碳數2~3的烯基。In the formula (1), R 1 and R 2 independently represent an alkyl group having 1 to 3 carbon atoms, or an alkoxy group having 1 to 3 carbon atoms, or an alkoxy group having 2 to 3 carbon atoms, which may be substituted with a halogen atom or a phenyl group.的alkenyl.

通式(1)所表示的二胺殘基容易形成秩序結構,尤其可有利地抑制高溫環境下的面內延遲(RO)的變化量。從這種觀點來看,相對於非熱塑性聚醯亞胺所含的所有二胺殘基100莫耳份,通式(1)所表示的二胺殘基以優選20莫耳份以上、更優選50莫耳份以上、進而優選60莫耳份~90莫耳份的範圍內為宜。The diamine residue represented by the general formula (1) easily forms an ordered structure, and can particularly advantageously suppress the amount of change in the in-plane retardation (RO) in a high-temperature environment. From this point of view, the diamine residue represented by the general formula (1) is preferably 20 mol parts or more, more preferably 100 mol parts of all diamine residues contained in the non-thermoplastic polyimide It is preferably 50 mol parts or more, more preferably in the range of 60 mol parts to 90 mol parts.

通式(1)所表示的二胺殘基的優選具體例可舉出由以下的二胺化合物所衍生的二胺殘基:2,2'-二甲基-4,4'-二胺基聯苯(m-TB)、2,2'-二乙基-4,4'-二胺基聯苯(m-EB)、2,2'-二乙氧基-4,4'-二胺基聯苯(m-EOB)、2,2'-二丙氧基-4,4'-二胺基聯苯(m-POB)、2,2'-正丙基-4,4'-二胺基聯苯(m-NPB)、2,2'-二乙烯基-4,4'-二胺基聯苯(VAB)、4,4'-二胺基聯苯、4,4'-二胺基-2,2'-雙(三氟甲基)聯苯(TFMB)等。這些二胺化合物中,尤其2,2'-二甲基-4,4'-二胺基聯苯(m-TB)容易形成秩序結構,可減小高溫環境下的面內延遲(RO)的變化量,因此特別優選。Preferable specific examples of the diamine residue represented by the general formula (1) include diamine residues derived from the following diamine compounds: 2,2'-dimethyl-4,4'-diamino group Biphenyl (m-TB), 2,2'-diethyl-4,4'-diaminobiphenyl (m-EB), 2,2'-diethoxy-4,4'-diamine Biphenyl (m-EOB), 2,2'-dipropoxy-4,4'-diaminobiphenyl (m-POB), 2,2'-n-propyl-4,4'-di Amino biphenyl (m-NPB), 2,2'-divinyl-4,4'-diamino biphenyl (VAB), 4,4'-diamino biphenyl, 4,4'-di Amino-2,2'-bis(trifluoromethyl)biphenyl (TFMB), etc. Among these diamine compounds, especially 2,2'-dimethyl-4,4'-diaminobiphenyl (m-TB) is easy to form an ordered structure, which can reduce the in-plane retardation (RO) under high temperature environment. The amount of change is therefore particularly preferred.

通式(1)所表示的二胺殘基以外的二胺殘基可優選地舉出由對苯二胺(p-PDA)、間苯二胺(m-PDA)等所衍生的二胺殘基,更優選以由p-PDA所衍生的二胺殘基(以下也稱為PDA殘基)為宜。相對於非熱塑性聚醯亞胺所含的所有四羧酸殘基100莫耳份,PDA殘基以優選0莫耳份~80莫耳份的範圍內、更優選0莫耳份~50莫耳份的範圍內為宜。PDA殘基為任意,但為發揮控制熱膨脹係數及控制玻璃轉移溫度的作用的殘基。The diamine residues other than the diamine residue represented by the general formula (1) may preferably include diamine residues derived from p-phenylenediamine (p-PDA), m-phenylenediamine (m-PDA), etc. The group is more preferably a diamine residue derived from p-PDA (hereinafter also referred to as a PDA residue). Relative to 100 mole parts of all the tetracarboxylic acid residues contained in the non-thermoplastic polyimide, the PDA residue is preferably in the range of 0 mole parts to 80 mole parts, more preferably 0 mole parts to 50 mole parts Within the range of parts is appropriate. The PDA residue is arbitrary, but it is a residue that plays the role of controlling the thermal expansion coefficient and controlling the glass transition temperature.

另外,為了提高製成聚醯亞胺膜的情況下的伸長率及耐彎折性等,優選的是非熱塑性聚醯亞胺含有選自由下述通式(3)~通式(5)所表示的二胺殘基所組成的組群中的至少一種二胺殘基。In addition, in order to improve the elongation and bending resistance when the polyimide film is made, it is preferable that the non-thermoplastic polyimide contains those represented by the following general formulas (3) to (5) At least one diamine residue in the group consisting of diamine residues.

[化4]

Figure 02_image006
[化4]
Figure 02_image006

所述式(3)中,R5 及R6 分別獨立地表示氫原子、或鹵素原子、或者碳數1~4的可經鹵素原子取代的烷基或烷氧基或烯基,X獨立地表示選自-O-、-S-、-CH2 -、-CH(CH3 )-、-C(CH3 )2 -、-CO-、-COO-、-SO2 -、-NH-或-NHCO-中的二價基團,m及n獨立地表示1~4的整數。In the above formula (3), R 5 and R 6 each independently represent a hydrogen atom, or a halogen atom, or an alkyl group, alkoxy group, or alkenyl group having 1 to 4 carbon atoms which may be substituted with a halogen atom, and X is independently Represents selected from -O-, -S-, -CH 2 -, -CH(CH 3 )-, -C(CH 3 ) 2 -, -CO-, -COO-, -SO 2 -, -NH- or In the divalent group in -NHCO-, m and n independently represent an integer of 1-4.

[化5]

Figure 02_image008
[化5]
Figure 02_image008

所述式(4)中,R5 、R6 及R7 分別獨立地表示氫原子、或鹵素原子、或者碳數1~4的可經鹵素原子取代的烷基或烷氧基或烯基,X獨立地表示選自-O-、-S-、-CH2 -、-CH(CH3 )-、-C(CH3 )2 -、-CO-、-COO-、-SO2 -、-NH-或-NHCO-中的二價基團,m、n及o獨立地表示1~4的整數。In the formula (4), R 5 , R 6 and R 7 each independently represent a hydrogen atom, or a halogen atom, or an alkyl group, alkoxy group, or alkenyl group having 1 to 4 carbon atoms that may be substituted with a halogen atom, X independently represents selected from -O-, -S-, -CH 2 -, -CH(CH 3 )-, -C(CH 3 ) 2 -, -CO-, -COO-, -SO 2 -,- In the divalent group in NH- or -NHCO-, m, n, and o independently represent an integer of 1-4.

[化6]

Figure 02_image010
[化6]
Figure 02_image010

所述式(5)中,R5 、R6 、R7 及R8 分別獨立地表示氫原子、或鹵素原子、或者碳數1~4的可經鹵素原子取代的烷基或烷氧基或烯基,X1 及X2 分別獨立地表示單鍵或選自-O-、-S-、-CH2 -、-CH(CH3 )-、-C(CH3 )2 -、-CO-、-COO-、-SO2 -、-NH-或-NHCO-中的二價基團,將X1 及X2 兩者為單鍵的情況除外,m、n、o及p獨立地表示1~4的整數。In the formula (5), R 5 , R 6 , R 7 and R 8 each independently represent a hydrogen atom, or a halogen atom, or an alkyl group or alkoxy group having 1 to 4 carbon atoms which may be substituted with a halogen atom or Alkenyl, X 1 and X 2 each independently represent a single bond or are selected from -O-, -S-, -CH 2 -, -CH(CH 3 )-, -C(CH 3 ) 2 -, -CO- The divalent group in, -COO-, -SO 2 -, -NH- or -NHCO-, except when both X 1 and X 2 are single bonds, m, n, o and p independently represent 1 An integer of ~4.

通式(3)~通式(5)所表示的二胺殘基具有彎曲性的部位,因此可對聚醯亞胺膜賦予柔軟性。此處,通式(4)及通式(5)所表示的二胺殘基由於苯環為3個或4個,因此為了抑制熱膨脹係數(CTE)的增加,優選的是將鍵合於苯環的末端基設為對位。另外,從對聚醯亞胺膜賦予柔軟性並且抑制熱膨脹係數(CTE)的增加的觀點來看,相對於非熱塑性聚醯亞胺所含的所有二胺殘基100莫耳份,通式(3)~通式(5)所表示的二胺殘基以優選10莫耳份~40莫耳份的範圍內、更優選10莫耳份~30莫耳份的範圍內為宜。若通式(3)~通式(5)所表示的二胺殘基小於10莫耳份,則產生製成膜的情況下的伸長率降低,耐彎折性等降低。另一方面,若超過40莫耳份,則分子的配向性降低,低CTE化變困難。The diamine residue represented by the general formula (3) to the general formula (5) has a flexible portion, and therefore can impart flexibility to the polyimide film. Here, the diamine residues represented by general formula (4) and general formula (5) have three or four benzene rings. Therefore, in order to suppress the increase in the coefficient of thermal expansion (CTE), it is preferable to bond to benzene The end group of the ring is set to the para position. In addition, from the viewpoint of imparting flexibility to the polyimide film and suppressing the increase in the coefficient of thermal expansion (CTE), the general formula ( 3) The diamine residue represented by the general formula (5) is preferably in the range of 10 mol parts to 40 mol parts, more preferably in the range of 10 mol parts to 30 mol parts. If the diamine residue represented by the general formula (3) to the general formula (5) is less than 10 mole parts, the elongation in the case of forming a film is reduced, and the bending resistance and the like are reduced. On the other hand, if it exceeds 40 mole parts, the orientation of the molecule decreases, and it becomes difficult to achieve low CTE.

通式(3)中,基團R5 及基團R6 的優選例可舉出:氫原子或碳數1~4的可經鹵素原子取代的烷基、或者碳數1~3的烷氧基或烯基。另外,通式(3)中,連結基X的優選例可舉出-O-、-S-、-CH2 -、-CH(CH3 )-、-SO2 -或-CO-。通式(3)所表示的二胺殘基的優選具體例可舉出由以下的二胺化合物所衍生的二胺殘基:4,4'-二胺基二苯基醚(4,4'-DAPE)、3,3'-二胺基二苯基醚、3,4'-二胺基二苯基醚、4,4'-二胺基二苯基甲烷、3,3'-二胺基二苯基甲烷、3,4'-二胺基二苯基甲烷、4,4'-二胺基二苯基丙烷、3,3'-二胺基二苯基丙烷、3,4'-二胺基二苯基丙烷、4,4'-二胺基二苯基硫醚、3,3'-二胺基二苯基硫醚、3,4'-二胺基二苯基硫醚、4,4'-二胺基二苯基碸、3,3'-二胺基二苯基碸、4,4'-二胺基二苯甲酮、3,4'-二胺基二苯甲酮、3,3'-二胺基二苯甲酮等。In the general formula (3), preferred examples of the group R 5 and the group R 6 include: a hydrogen atom or an alkyl group having 1 to 4 carbon atoms which may be substituted by a halogen atom, or an alkoxy group having 1 to 3 carbon atoms基 or alkenyl. In addition, in the general formula (3), preferred examples of the linking group X include -O-, -S-, -CH 2 -, -CH(CH 3 )-, -SO 2 -, or -CO-. Preferred specific examples of the diamine residue represented by the general formula (3) include diamine residues derived from the following diamine compounds: 4,4'-diaminodiphenyl ether (4,4' -DAPE), 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 4,4'-diaminodiphenylmethane, 3,3'-diamine Diphenylmethane, 3,4'-diaminodiphenylmethane, 4,4'-diaminodiphenylpropane, 3,3'-diaminodiphenylpropane, 3,4'- Diaminodiphenylpropane, 4,4'-diaminodiphenyl sulfide, 3,3'-diaminodiphenyl sulfide, 3,4'-diaminodiphenyl sulfide, 4,4'-diaminodiphenyl benzene, 3,3'-diaminodiphenyl benzene, 4,4'-diamino benzophenone, 3,4'-diamino benzophenone Ketones, 3,3'-diaminobenzophenone, etc.

通式(4)中,基團R5 、基團R6 及基團R7 的優選例可舉出:氫原子或碳數1~4的可經鹵素原子取代的烷基、或者碳數1~3的烷氧基或烯基。另外,通式(4)中,連結基X的優選例可舉出-O-、-S-、-CH2 -、-CH(CH3 )-、-SO2 -或-CO-。通式(4)所表示的二胺殘基的優選具體例可舉出由以下的二胺化合物所衍生的二胺殘基:1,3-雙(4-胺基苯氧基)苯(TPE-R)、1,4-雙(4-胺基苯氧基)苯(TPE-Q)、雙(4-胺基苯氧基)-2,5-二-叔丁基苯(DTBAB)、4,4-雙(4-胺基苯氧基)二苯甲酮(BAPK)、1,3-雙[2-(4-胺基苯基)-2-丙基]苯、1,4-雙[2-(4-胺基苯基)-2-丙基]苯等。In the general formula (4), preferred examples of the group R 5 , the group R 6 and the group R 7 include a hydrogen atom or an alkyl group having 1 to 4 carbon atoms which may be substituted with a halogen atom, or a carbon number of 1 ~3 alkoxy or alkenyl. In addition, in the general formula (4), preferred examples of the linking group X include -O-, -S-, -CH 2 -, -CH(CH 3 )-, -SO 2 -, or -CO-. Preferred specific examples of the diamine residue represented by the general formula (4) include diamine residues derived from the following diamine compounds: 1,3-bis(4-aminophenoxy)benzene (TPE -R), 1,4-bis(4-aminophenoxy)benzene (TPE-Q), bis(4-aminophenoxy)-2,5-di-tert-butylbenzene (DTBAB), 4,4-bis(4-aminophenoxy)benzophenone (BAPK), 1,3-bis[2-(4-aminophenyl)-2-propyl]benzene, 1,4- Bis[2-(4-aminophenyl)-2-propyl]benzene and the like.

通式(5)中,基團R5 、基團R6 、基團R7 及基團R8 的優選例可舉出:氫原子或碳數1~4的可經鹵素原子取代的烷基、或者碳數1~3的烷氧基或烯基。另外,通式(5)中,連結基X1 及連結基X2 的優選例可舉出單鍵、-O-、-S-、-CH2 -、-CH(CH3 )-、-SO2 -或-CO-。其中,從賦予彎曲部位的觀點來看,將連結基X1 及連結基X2 兩者為單鍵的情況除外。通式(5)所表示的二胺殘基的優選具體例可舉出由以下的二胺化合物所衍生的二胺殘基:4,4'-雙(4-胺基苯氧基)聯苯(BAPB)、2,2'-雙[4-(4-胺基苯氧基)苯基]丙烷(BAPP)、2,2'-雙[4-(4-胺基苯氧基)苯基]醚(BAPE)、雙[4-(4-胺基苯氧基)苯基]碸等。In the general formula (5), preferred examples of the group R 5 , the group R 6 , the group R 7 and the group R 8 include: a hydrogen atom or an alkyl group having 1 to 4 carbon atoms which may be substituted by a halogen atom , Or alkoxy or alkenyl having 1 to 3 carbons. In addition, in the general formula (5), preferred examples of the linking group X 1 and the linking group X 2 include a single bond, -O-, -S-, -CH 2 -, -CH(CH 3 )-, -SO 2 -or -CO-. However, from the viewpoint of providing a bent portion, the case where both the linking group X 1 and the linking group X 2 are single bonds is excluded. Preferable specific examples of the diamine residue represented by the general formula (5) include a diamine residue derived from the following diamine compound: 4,4'-bis(4-aminophenoxy)biphenyl (BAPB), 2,2'-bis[4-(4-aminophenoxy)phenyl]propane (BAPP), 2,2'-bis[4-(4-aminophenoxy)phenyl ] Ether (BAPE), bis[4-(4-aminophenoxy)phenyl] chrysene, etc.

其他二胺殘基例如可舉出由以下的芳香族二胺化合物所衍生的二胺殘基:2,2-雙-[4-(3-胺基苯氧基)苯基]丙烷、雙[4-(3-胺基苯氧基)苯基]碸、雙[4-(3-胺基苯氧基)聯苯、雙[1-(3-胺基苯氧基)]聯苯、雙[4-(3-胺基苯氧基)苯基]甲烷、雙[4-(3-胺基苯氧基)苯基]醚、雙[4-(3-胺基苯氧基)]二苯甲酮、9,9-雙[4-(3-胺基苯氧基)苯基]芴、2,2-雙-[4-(4-胺基苯氧基)苯基]六氟丙烷、2,2-雙-[4-(3-胺基苯氧基)苯基]六氟丙烷、3,3'-二甲基-4,4'-二胺基聯苯、4,4'-亞甲基二鄰甲苯胺、4,4'-亞甲基二-2,6-二甲苯胺、4,4'-亞甲基-2,6-二乙基苯胺、3,3'-二胺基二苯基乙烷、3,3'-二胺基聯苯、3,3'-二甲氧基聯苯胺、3,3''-二胺基對三聯苯、4,4'-[1,4-亞苯基雙(1-甲基亞乙基)]雙苯胺、4,4'-[1,3-亞苯基雙(1-甲基亞乙基)]雙苯胺、雙(對胺基環己基)甲烷、雙(對-β-胺基叔丁基苯基)醚、雙(對-β-甲基-δ-胺基戊基)苯、對雙(2-甲基-4-胺基戊基)苯、對雙(1,1-二甲基-5-胺基戊基)苯、1,5-二胺基萘、2,6-二胺基萘、2,4-雙(β-胺基叔丁基)甲苯、2,4-二胺基甲苯、間二甲苯-2,5-二胺、對二甲苯-2,5-二胺、間二甲苯二胺、對二甲苯二胺、2,6-二胺基吡啶、2,5-二胺基吡啶、2,5-二胺基-1,3,4-噁二唑、呱嗪等。Examples of other diamine residues include diamine residues derived from the following aromatic diamine compounds: 2,2-bis-[4-(3-aminophenoxy)phenyl]propane, bis[ 4-(3-aminophenoxy)phenyl] sulfide, bis[4-(3-aminophenoxy)biphenyl, bis[1-(3-aminophenoxy)]biphenyl, double [4-(3-aminophenoxy)phenyl]methane, bis[4-(3-aminophenoxy)phenyl]ether, bis[4-(3-aminophenoxy)]di Benzophenone, 9,9-bis[4-(3-aminophenoxy)phenyl]fluorene, 2,2-bis-[4-(4-aminophenoxy)phenyl]hexafluoropropane , 2,2-bis-[4-(3-aminophenoxy)phenyl]hexafluoropropane, 3,3'-dimethyl-4,4'-diaminobiphenyl, 4,4' -Methylene di-o-toluidine, 4,4'-methylene bis-2,6-dimethylaniline, 4,4'-methylene-2,6-diethyl aniline, 3,3'- Diaminodiphenylethane, 3,3'-diaminobiphenyl, 3,3'-dimethoxybenzidine, 3,3''-diaminop-terphenyl, 4,4'- [1,4-Phenylenebis(1-methylethylene)]bisaniline, 4,4'-[1,3-phenylenebis(1-methylethylene)]bisaniline, bisaniline (P-aminocyclohexyl) methane, bis(p-β-amino tert-butylphenyl) ether, bis(p-β-methyl-δ-aminopentyl)benzene, p-bis(2-methyl -4-aminopentyl)benzene, p-bis(1,1-dimethyl-5-aminopentyl)benzene, 1,5-diaminonaphthalene, 2,6-diaminonaphthalene, 2, 4-bis(β-amino-tert-butyl)toluene, 2,4-diaminotoluene, meta-xylene-2,5-diamine, para-xylene-2,5-diamine, meta-xylenediamine , P-xylene diamine, 2,6-diaminopyridine, 2,5-diaminopyridine, 2,5-diamino-1,3,4-oxadiazole, piperazine, etc.

在非熱塑性聚醯亞胺中,通過選定所述四羧酸殘基及二胺殘基的種類、或應用兩種以上的四羧酸殘基或二胺殘基的情況下的各自的莫耳比,可控制熱膨脹係數、儲存模數、拉伸模數等。另外,在非熱塑性聚醯亞胺中具有多種聚醯亞胺的結構單元的情況下,能以嵌段的形式存在,也可無規地存在,從抑制面內延遲(RO)的不均一性的觀點來看,優選的是無規地存在。In the non-thermoplastic polyimide, by selecting the types of the tetracarboxylic acid residues and diamine residues, or using two or more kinds of tetracarboxylic acid residues or diamine residues, the respective moles Ratio, can control thermal expansion coefficient, storage modulus, tensile modulus, etc. In addition, in the case of non-thermoplastic polyimine having a variety of polyimine structural units, it can exist in the form of blocks, or it can exist randomly, so as to suppress the in-plane retardation (RO) non-uniformity From the viewpoint of, it is preferable to exist randomly.

(熱塑性聚醯亞胺) 本實施形態的聚醯亞胺膜中,優選的是熱塑性聚醯亞胺含有四羧酸殘基及二胺殘基,這些殘基均為芳香族基,且包含聯苯四基或亞聯苯基。這裡,關於聯苯四基或亞聯苯基,例如也可使鹵素原子、烷基、烷氧基、烯基等取代基鍵合於聯苯四基或亞聯苯基,尤其從抑制高溫環境下的面內延遲(RO)的變化量的觀點來看,例如烷基、烷氧基、烯基等取代基的碳數優選的是設定為1~3的範圍內。(Thermoplastic polyimide) In the polyimide film of this embodiment, it is preferable that the thermoplastic polyimide contains tetracarboxylic acid residues and diamine residues, and these residues are aromatic groups and contain biphenyltetrayl or biphenylene base. Here, regarding the biphenyltetrayl or biphenylene group, for example, substituents such as halogen atoms, alkyl groups, alkoxy groups, and alkenyl groups may be bonded to the biphenyltetrayl group or biphenylene group, especially to suppress high-temperature environments. From the viewpoint of the amount of change in the in-plane retardation (RO) below, for example, the carbon number of substituents such as an alkyl group, an alkoxy group, and an alkenyl group is preferably set within the range of 1 to 3.

熱塑性聚醯亞胺所含的四羧酸殘基及二胺殘基均為芳香族基,通過設為芳香族基,可抑制聚醯亞胺膜的高溫環境下的面內延遲(RO)的變化量。進而,相對於四羧酸殘基及二胺殘基的合計100莫耳份,將聯苯四基或亞聯苯基設為30莫耳份以上且80莫耳份以下的範圍內。若聯苯四基或亞聯苯基小於30莫耳份,則難以形成由聯苯四基或亞聯苯基所得的秩序結構,聚醯亞胺膜的高溫環境下的RO的變化量增大。另一方面,若聯苯四基或亞聯苯基超過80莫耳份,則熱塑性受損。The tetracarboxylic acid residues and diamine residues contained in the thermoplastic polyimide are both aromatic groups. By setting them as aromatic groups, the in-plane retardation (RO) of the polyimide film in a high temperature environment can be suppressed. The amount of change. Furthermore, the biphenyltetrayl group or biphenylene group is made into the range of 30 mol parts or more and 80 mol parts or less with respect to the total of 100 mol parts of a tetracarboxylic acid residue and a diamine residue. If the biphenyltetrayl or biphenylene group is less than 30 moles, it is difficult to form an ordered structure derived from the biphenyltetrayl or biphenylene group, and the amount of change in RO of the polyimide film in a high-temperature environment increases . On the other hand, if the biphenyltetrayl or biphenylene group exceeds 80 mole parts, the thermoplasticity is impaired.

另外,熱塑性聚醯亞胺所含的四羧酸殘基例如可優選地舉出由BPDA、2,3',3,4'-聯苯四羧酸二酐、2,2',3,3'-聯苯四羧酸二酐等所衍生的四羧酸殘基。這些四羧酸殘基中,尤其BPDA殘基容易形成秩序結構,可抑制高溫環境下的面內延遲(RO)的變化量,因此特別優選。因此,相對於熱塑性聚醯亞胺所含的所有四羧酸殘基100莫耳份,BPDA殘基以優選40莫耳份以上、更優選50莫耳份以上為宜。In addition, the tetracarboxylic acid residue contained in the thermoplastic polyimide can preferably be exemplified by BPDA, 2,3',3,4'-biphenyltetracarboxylic dianhydride, 2,2',3,3 '-Biphenyltetracarboxylic dianhydride and other derived tetracarboxylic acid residues. Among these tetracarboxylic acid residues, BPDA residues are particularly preferred because they tend to form an ordered structure and can suppress the amount of change in in-plane retardation (RO) in a high-temperature environment. Therefore, the BPDA residue is preferably 40 mol parts or more, more preferably 50 mol parts or more relative to 100 mol parts of all tetracarboxylic acid residues contained in the thermoplastic polyimide.

熱塑性聚醯亞胺所含的所述BPDA殘基以外的四羧酸殘基可優選地舉出PMDA殘基。相對於熱塑性聚醯亞胺所含的所有四羧酸殘基100莫耳份,PMDA殘基以優選0莫耳份~60莫耳份的範圍內、更優選0莫耳份~50莫耳份的範圍內為宜。PMDA殘基為任意,但為發揮控制熱膨脹係數及控制玻璃轉移溫度的作用的殘基。The tetracarboxylic acid residue other than the BPDA residue contained in the thermoplastic polyimide preferably includes a PMDA residue. Relative to 100 mol parts of all tetracarboxylic acid residues contained in the thermoplastic polyimide, PMDA residues are preferably in the range of 0 mol parts to 60 mol parts, more preferably 0 mol parts to 50 mol parts Within the range is appropriate. The PMDA residue is arbitrary, but it is a residue that functions to control the thermal expansion coefficient and control the glass transition temperature.

其他四羧酸殘基例如可舉出由以下的芳香族四羧酸二酐所衍生的四羧酸殘基:3,3',4,4'-二苯基碸四羧酸二酐、4,4'-氧基雙鄰苯二甲酸酐、2,2',3,3'-二苯甲酮四羧酸二酐、2,3,3',4'-二苯甲酮四羧酸二酐或3,3',4,4'-二苯甲酮四羧酸二酐、2,3',3,4'-二苯基醚四羧酸二酐、雙(2,3-二羧基苯基)醚二酐、3,3'',4,4''-對三聯苯四羧酸二酐、2,3,3'',4''-對三聯苯四羧酸二酐或2,2'',3,3''-對三聯苯四羧酸二酐、2,2-雙(2,3-二羧基苯基)-丙烷二酐或2,2-雙(3,4-二羧基苯基)-丙烷二酐、雙(2,3-二羧基苯基)甲烷二酐或雙(3,4-二羧基苯基)甲烷二酐、雙(2,3-二羧基苯基)碸二酐或雙(3,4-二羧基苯基)碸二酐、1,1-雙(2,3-二羧基苯基)乙烷二酐或1,1-雙(3,4-二羧基苯基)乙烷二酐、1,2,7,8-菲-四羧酸二酐、1,2,6,7-菲-四羧酸二酐或1,2,9,10-菲-四羧酸二酐、2,3,6,7-蒽四羧酸二酐、2,2-雙(3,4-二羧基苯基)四氟丙烷二酐、2,3,5,6-環己烷二酐、1,2,5,6-萘四羧酸二酐、1,4,5,8-萘四羧酸二酐、2,3,6,7-萘四羧酸二酐、4,8-二甲基-1,2,3,5,6,7-六氫萘-1,2,5,6-四羧酸二酐、2,6-或2,7-二氯萘-1,4,5,8-四羧酸二酐、2,3,6,7-四氯萘-1,4,5,8-四羧酸二酐或1,4,5,8-四氯萘-2,3,6,7-四羧酸二酐、2,3,8,9-苝-四羧酸二酐、3,4,9,10-苝-四羧酸二酐、4,5,10,11-苝-四羧酸二酐或5,6,11,12-苝-四羧酸二酐、環戊烷-1,2,3,4-四羧酸二酐、吡嗪-2,3,5,6-四羧酸二酐、吡咯烷-2,3,4,5-四羧酸二酐、噻吩-2,3,4,5-四羧酸二酐、4,4'-雙(2,3-二羧基苯氧基)二苯基甲烷二酐、2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙烷二酐等。Examples of other tetracarboxylic acid residues include tetracarboxylic acid residues derived from the following aromatic tetracarboxylic dianhydrides: 3,3',4,4'-diphenyl tetracarboxylic dianhydride, 4 ,4'-oxydiphthalic anhydride, 2,2',3,3'-benzophenone tetracarboxylic dianhydride, 2,3,3',4'-benzophenone tetracarboxylic acid Dianhydride or 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 2,3',3,4'-diphenyl ether tetracarboxylic dianhydride, bis(2,3-di Carboxyphenyl) ether dianhydride, 3,3``,4,4''-p-terphenyltetracarboxylic dianhydride, 2,3,3``,4''-p-terphenyltetracarboxylic dianhydride or 2,2``,3,3''-p-terphenyltetracarboxylic dianhydride, 2,2-bis(2,3-dicarboxyphenyl)-propane dianhydride or 2,2-bis(3,4 -Dicarboxyphenyl)-propane dianhydride, bis(2,3-dicarboxyphenyl)methane dianhydride or bis(3,4-dicarboxyphenyl)methane dianhydride, bis(2,3-dicarboxybenzene) Group) bis(3,4-dicarboxyphenyl) dianhydride, 1,1-bis(2,3-dicarboxyphenyl)ethane dianhydride or 1,1-bis(3,4 -Dicarboxyphenyl)ethane dianhydride, 1,2,7,8-phenanthrene-tetracarboxylic dianhydride, 1,2,6,7-phenanthrene-tetracarboxylic dianhydride or 1,2,9,10 -Phenanthrene-tetracarboxylic dianhydride, 2,3,6,7-anthracene tetracarboxylic dianhydride, 2,2-bis(3,4-dicarboxyphenyl)tetrafluoropropane dianhydride, 2,3,5 ,6-Cyclohexane dianhydride, 1,2,5,6-naphthalenetetracarboxylic dianhydride, 1,4,5,8-naphthalenetetracarboxylic dianhydride, 2,3,6,7-naphthalenetetracarboxylic acid Acid dianhydride, 4,8-dimethyl-1,2,3,5,6,7-hexahydronaphthalene-1,2,5,6-tetracarboxylic dianhydride, 2,6-or 2,7 -Dichloronaphthalene-1,4,5,8-tetracarboxylic dianhydride, 2,3,6,7-tetrachloronaphthalene-1,4,5,8-tetracarboxylic dianhydride or 1,4,5 ,8-Tetrachloronaphthalene-2,3,6,7-tetracarboxylic dianhydride, 2,3,8,9-perylene-tetracarboxylic dianhydride, 3,4,9,10-perylene-tetracarboxylic acid Dianhydride, 4,5,10,11-perylene-tetracarboxylic dianhydride or 5,6,11,12-perylene-tetracarboxylic dianhydride, cyclopentane-1,2,3,4-tetracarboxylic acid Dianhydride, pyrazine-2,3,5,6-tetracarboxylic dianhydride, pyrrolidine-2,3,4,5-tetracarboxylic dianhydride, thiophene-2,3,4,5-tetracarboxylic acid Dianhydride, 4,4'-bis(2,3-dicarboxyphenoxy)diphenylmethane dianhydride, 2,2-bis[4-(3,4-dicarboxyphenoxy)phenyl]propane Dianhydride and so on.

本實施形態的聚醯亞胺膜中,熱塑性聚醯亞胺所含的二胺殘基例如可優選地舉出下述通式(2)所表示的二胺殘基。In the polyimide film of the present embodiment, the diamine residue contained in the thermoplastic polyimide preferably includes, for example, a diamine residue represented by the following general formula (2).

[化7]

Figure 02_image003
[化7]
Figure 02_image003

所述式(2)中,R3 、R4 獨立地表示可經鹵素原子或苯基取代的碳數1~3的烷基或碳數1~3的烷氧基或者烯基。In the formula (2), R 3 and R 4 independently represent an alkyl group having 1 to 3 carbons or an alkoxy group or alkenyl group having 1 to 3 carbons which may be substituted with a halogen atom or a phenyl group.

通式(2)所表示的二胺殘基容易形成秩序結構,尤其可有利地抑制高溫環境下的面內延遲(RO)的變化量。從這種觀點來看,相對於熱塑性聚醯亞胺所含的所有二胺殘基100莫耳份,通式(2)所表示的二胺殘基以優選3莫耳份~60莫耳份的範圍內、更優選5莫耳份~40莫耳份的範圍內為宜。若通式(2)所表示的二胺殘基小於3莫耳份,則難以形成秩序結構,聚醯亞胺膜的高溫環境下的面內延遲(RO)的變化量增大,若超過60莫耳份,則熱塑性受損。The diamine residue represented by the general formula (2) easily forms an ordered structure, and can particularly advantageously suppress the amount of change in in-plane retardation (RO) in a high-temperature environment. From this point of view, the diamine residue represented by the general formula (2) is preferably 3 mol parts to 60 mol parts relative to 100 mol parts of all diamine residues contained in the thermoplastic polyimide It is more preferably within the range of 5 mol parts to 40 mol parts. If the diamine residue represented by the general formula (2) is less than 3 moles, it is difficult to form an ordered structure, and the amount of change in the in-plane retardation (RO) of the polyimide film under a high temperature environment increases. If it exceeds 60 Moer parts, the thermoplasticity is impaired.

通式(2)所表示的二胺殘基的優選具體例可舉出由以下的二胺化合物所衍生的二胺殘基:2,2'-二甲基-4,4'-二胺基聯苯(m-TB)、2,2'-二乙基-4,4'-二胺基聯苯(m-EB)、2,2'-二乙氧基-4,4'-二胺基聯苯(m-EOB)、2,2'-二丙氧基-4,4'-二胺基聯苯(m-POB)、2,2'-正丙基-4,4'-二胺基聯苯(m-NPB)、2,2'-二乙烯基-4,4'-二胺基聯苯(VAB)、4,4'-二胺基聯苯、4,4'-二胺基-2,2'-雙(三氟甲基)聯苯(TFMB)等。這些化合物中,尤其2,2'-二甲基-4,4'-二胺基聯苯(m-TB)容易形成秩序結構,可減小高溫環境下的面內延遲(RO)的變化量,因此特別優選。Preferable specific examples of the diamine residue represented by the general formula (2) include a diamine residue derived from the following diamine compound: 2,2'-dimethyl-4,4'-diamino group Biphenyl (m-TB), 2,2'-diethyl-4,4'-diaminobiphenyl (m-EB), 2,2'-diethoxy-4,4'-diamine Biphenyl (m-EOB), 2,2'-dipropoxy-4,4'-diaminobiphenyl (m-POB), 2,2'-n-propyl-4,4'-di Amino biphenyl (m-NPB), 2,2'-divinyl-4,4'-diamino biphenyl (VAB), 4,4'-diamino biphenyl, 4,4'-di Amino-2,2'-bis(trifluoromethyl)biphenyl (TFMB), etc. Among these compounds, especially 2,2'-dimethyl-4,4'-diaminobiphenyl (m-TB) is easy to form an ordered structure, which can reduce the amount of change in in-plane retardation (RO) under high temperature environments , So it is particularly preferred.

通式(2)所表示的二胺殘基以外的二胺殘基可優選地舉出由對苯二胺(p-PDA)、間苯二胺(m-PDA)等所衍生的二胺殘基,更優選的是以由p-PDA所衍生的二胺殘基(以下也稱為PDA殘基)為宜。相對於熱塑性聚醯亞胺所含的所有二胺殘基100莫耳份,PDA殘基以優選3莫耳份~60莫耳份的範圍內、更優選5莫耳份~40莫耳份的範圍內為宜。PDA殘基為任意,但由於具有剛直結構,因此具有對聚合物總體賦予秩序結構的作用。The diamine residues other than the diamine residue represented by the general formula (2) may preferably include diamine residues derived from p-phenylenediamine (p-PDA), m-phenylenediamine (m-PDA), etc. The group is more preferably a diamine residue derived from p-PDA (hereinafter also referred to as a PDA residue). With respect to 100 mol parts of all diamine residues contained in the thermoplastic polyimide, the PDA residue is preferably in the range of 3 mol parts to 60 mol parts, more preferably 5 mol parts to 40 mol parts The range is appropriate. The PDA residue is arbitrary, but because it has a rigid structure, it has the effect of imparting an orderly structure to the polymer as a whole.

另外,為了提高聚醯亞胺分子鏈的柔軟性,賦予熱塑性,熱塑性聚醯亞胺優選的是含有選自由下述通式(6)~通式(12)所表示的二胺殘基所組成的組群中的至少一種二胺殘基。In addition, in order to improve the flexibility of the polyimide molecular chain and impart thermoplasticity, the thermoplastic polyimide preferably contains diamine residues selected from the group consisting of the following general formulas (6) to (12) At least one diamine residue in the group.

[化8]

Figure 02_image013
[化8]
Figure 02_image013

所述式(6)~式(12)中,R9 獨立地表示碳數1~6的一價烴基或烷氧基,連結基A獨立地表示選自-O-、-S-、-CO-、-SO-、-SO2 -、-COO、-CH2 -、-C(CH3 )2 -、-NH-或-CONH-中的二價基團,n1 獨立地表示0~4的整數。其中,從式(8)中將與式(7)重複者除外,從式(10)中將與式(9)重複者除外。此外,所謂「獨立地」,是指所述式(6)~式(12)中的一個中或兩個以上中,多個連結基A、多個R9 或多個n1 可相同也可不同。In the above formulas (6) to (12), R 9 independently represents a monovalent hydrocarbon group or alkoxy group having 1 to 6 carbons, and the linking group A independently represents selected from -O-, -S-, -CO -, -SO-, -SO 2 -, -COO, -CH 2 -, -C(CH 3 ) 2 -, -NH- or a divalent group in -CONH-, n 1 independently represents 0~4 Integer. Among them, from the formula (8) will be excluded from the formula (7), except from the formula (10) will be excluded from the formula (9). In addition, the term "independently" means that in one or two or more of the above formulas (6) to (12), multiple linking groups A, multiple R 9 or multiple n 1 may be the same or different.

通式(6)~通式(12)所表示的二胺殘基以如下情況為宜:相對於熱塑性聚醯亞胺所含的所有二胺殘基100莫耳份,至少一種的合計量優選40莫耳份~97莫耳份的範圍內。若通式(6)~通式(12)所表示的二胺殘基的合計量小於40莫耳份,則聚醯亞胺的柔軟性不足而無法獲得熱塑性,若超過97莫耳份,則有聚醯亞胺膜的高溫環境下的面內延遲(RO)的變化量增大的傾向。The diamine residues represented by the general formula (6) to the general formula (12) are preferably as follows: the total amount of at least one is preferably 100 mol parts of all the diamine residues contained in the thermoplastic polyimide Within the range of 40 mol parts to 97 mol parts. If the total amount of diamine residues represented by general formula (6) to general formula (12) is less than 40 mol parts, the flexibility of polyimide is insufficient and thermoplasticity cannot be obtained, and if it exceeds 97 mol parts, There is a tendency for the amount of change in the in-plane retardation (RO) of the polyimide film to increase in a high-temperature environment.

式(6)所表示的二胺殘基為具有兩個苯環的芳香族二胺殘基。對於成為式(6)所表示的二胺殘基的來源的二胺化合物來說,可認為通過至少一個直接鍵合於苯環的胺基與二價連結基A位於間位,聚醯亞胺分子鏈所具有的自由度增加而具有高的彎曲性,有助於提高聚醯亞胺分子鏈的柔軟性。因此,通過使用式(6)所表示的二胺殘基,聚醯亞胺的熱塑性提高。這裡,連結基A優選-O-、-CH2 -、-C(CH3 )2 -、-CO-、-SO2 -、-S-。The diamine residue represented by the formula (6) is an aromatic diamine residue having two benzene rings. For the diamine compound that becomes the source of the diamine residue represented by the formula (6), it can be considered that at least one amine group directly bonded to the benzene ring is located in the meta position with the divalent linking group A, and the polyimide The degree of freedom of the molecular chain is increased and the flexibility is high, which helps to improve the flexibility of the polyimide molecular chain. Therefore, by using the diamine residue represented by Formula (6), the thermoplasticity of polyimide improves. Here, the linking group A is preferably -O-, -CH 2 -, -C(CH 3 ) 2 -, -CO-, -SO 2 -, -S-.

式(6)所表示的二胺殘基例如可舉出由以下的二胺化合物所衍生的二胺殘基:3,3'-二胺基二苯基甲烷、3,3'-二胺基二苯基丙烷、3,3'-二胺基二苯基硫醚、3,3'-二胺基二苯基碸、3,3-二胺基二苯基醚、3,4'-二胺基二苯基醚、3,4'-二胺基二苯基甲烷、3,4'-二胺基二苯基丙烷、3,4'-二胺基二苯基硫醚、3,3'-二胺基二苯甲酮、(3,3'-雙胺基)二苯基胺等。The diamine residue represented by the formula (6) includes, for example, diamine residues derived from the following diamine compounds: 3,3'-diaminodiphenylmethane, 3,3'-diamino Diphenylpropane, 3,3'-diaminodiphenyl sulfide, 3,3'-diaminodiphenyl sulfide, 3,3-diaminodiphenyl ether, 3,4'-di Aminodiphenyl ether, 3,4'-diaminodiphenylmethane, 3,4'-diaminodiphenylpropane, 3,4'-diaminodiphenyl sulfide, 3,3 '-Diaminobenzophenone, (3,3'-Diamino)diphenylamine, etc.

式(7)所表示的二胺殘基為具有三個苯環的芳香族二胺殘基。對於成為式(7)所表示的二胺殘基的來源的二胺化合物來說,可認為通過至少一個直接鍵合於苯環的胺基與二價的連結基A位於間位,聚醯亞胺分子鏈所具有的自由度增加而具有高的彎曲性,有助於提高聚醯亞胺分子鏈的柔軟性。因此,若使用式(7)所表示的二胺殘基,則聚醯亞胺的熱塑性提高。這裡,連結基A優選-O-。The diamine residue represented by the formula (7) is an aromatic diamine residue having three benzene rings. For the diamine compound that becomes the source of the diamine residue represented by the formula (7), it can be considered that at least one amine group directly bonded to the benzene ring and the divalent linking group A are located in the meta position, and the polyamide The degree of freedom of the amine molecular chain is increased and the flexibility is high, which helps to improve the flexibility of the polyimide molecular chain. Therefore, if the diamine residue represented by Formula (7) is used, the thermoplasticity of polyimide will improve. Here, the linking group A is preferably -O-.

式(7)所表示的二胺殘基例如可舉出由以下的二胺化合物所衍生的二胺殘基:1,4-雙(3-胺基苯氧基)苯、3-[4-(4-胺基苯氧基)苯氧基]苯胺、3-[3-(4-胺基苯氧基)苯氧基]苯胺等。The diamine residue represented by formula (7) includes, for example, diamine residues derived from the following diamine compounds: 1,4-bis(3-aminophenoxy)benzene, 3-[4- (4-aminophenoxy)phenoxy]aniline, 3-[3-(4-aminophenoxy)phenoxy]aniline and the like.

式(8)所表示的二胺為具有三個苯環的芳香族二胺殘基。對於式(8)所表示的二胺殘基來說,可認為通過直接鍵合於一個苯環的兩個二價的連結基A彼此位於間位,聚醯亞胺分子鏈所具有的自由度增加而具有高的彎曲性,有助於提高聚醯亞胺分子鏈的柔軟性。因此,通過使用式(8)所表示的二胺殘基,聚醯亞胺的熱塑性提高。這裡,連結基A優選-O-。The diamine represented by formula (8) is an aromatic diamine residue having three benzene rings. For the diamine residue represented by the formula (8), it can be considered that the degree of freedom of the polyimide molecular chain is that the two divalent linking groups A directly bonded to a benzene ring are located in the meta position with each other Increased and has high flexibility, which helps to improve the flexibility of the polyimide molecular chain. Therefore, by using the diamine residue represented by Formula (8), the thermoplasticity of polyimide improves. Here, the linking group A is preferably -O-.

式(8)所表示的二胺殘基例如可舉出由以下的二胺化合物所衍生的二胺殘基:1,3-雙(4-胺基苯氧基)苯(TPE-R)、1,3-雙(3-胺基苯氧基)苯(APB)、4,4'-[2-甲基-(1,3-亞苯基)雙氧基]雙苯胺、4,4'-[4-甲基-(1,3-亞苯基)雙氧基]雙苯胺、4,4'-[5-甲基-(1,3-亞苯基)雙氧基]雙苯胺等。The diamine residue represented by formula (8) includes, for example, diamine residues derived from the following diamine compounds: 1,3-bis(4-aminophenoxy)benzene (TPE-R), 1,3-bis(3-aminophenoxy)benzene (APB), 4,4'-[2-methyl-(1,3-phenylene) bisoxy] bisaniline, 4,4' -[4-Methyl-(1,3-phenylene)bisoxy]bisaniline, 4,4'-[5-methyl-(1,3-phenylene)bisoxy]bisaniline, etc. .

式(9)所表示的二胺殘基為具有四個苯環的芳香族二胺殘基。對於成為式(9)所表示的二胺殘基的來源的二胺化合物來說,可認為通過至少一個直接鍵合於苯環的胺基與二價的連結基A位於間位,而具有高的彎曲性,有助於提高聚醯亞胺分子鏈的柔軟性。因此,通過使用式(9)所表示的二胺殘基,聚醯亞胺的熱塑性提高。這裡,連結基A優選-O-、-CH2 -、-C(CH3 )2 -、-SO2 -、-CO-、-CONH-。The diamine residue represented by formula (9) is an aromatic diamine residue having four benzene rings. For the diamine compound that becomes the source of the diamine residue represented by the formula (9), it can be considered that at least one amine group directly bonded to the benzene ring and the divalent linking group A are located in the meta position, thereby having high The flexibility of the polyimide helps to improve the flexibility of the polyimide molecular chain. Therefore, by using the diamine residue represented by Formula (9), the thermoplasticity of polyimide improves. Here, the linking group A is preferably -O-, -CH 2 -, -C(CH 3 ) 2 -, -SO 2 -, -CO-, -CONH-.

式(9)所表示的二胺殘基可舉出由以下的二胺化合物所衍生的二胺殘基:雙[4-(3-胺基苯氧基)苯基]甲烷、雙[4-(3-胺基苯氧基)苯基]丙烷、雙[4-(3-胺基苯氧基)苯基]醚、雙[4-(3-胺基苯氧基)苯基]碸、雙[4-(3-胺基苯氧基)]二苯甲酮、雙[4,4'-(3-胺基苯氧基)]苯甲醯苯胺等。The diamine residue represented by formula (9) includes diamine residues derived from the following diamine compounds: bis[4-(3-aminophenoxy)phenyl]methane, bis[4- (3-aminophenoxy)phenyl]propane, bis[4-(3-aminophenoxy)phenyl]ether, bis[4-(3-aminophenoxy)phenyl] chrysene, Bis[4-(3-aminophenoxy)]benzophenone, bis[4,4'-(3-aminophenoxy)]benzaniline, etc.

式(10)所表示的二胺殘基為具有四個苯環的芳香族二胺殘基。對於式(10)所表示的二胺殘基來說,可認為通過直接鍵合於至少一個苯環的兩個二價的連結基A彼此位於間位,聚醯亞胺分子鏈所具有的自由度增加而具有高的彎曲性,有助於提高聚醯亞胺分子鏈的柔軟性。因此,通過使用式(10)所表示的二胺殘基,聚醯亞胺的熱塑性提高。這裡,連結基A優選-O-。The diamine residue represented by the formula (10) is an aromatic diamine residue having four benzene rings. For the diamine residue represented by formula (10), it can be considered that the two divalent linking groups A directly bonded to at least one benzene ring are located in the meta position with each other, and the polyimide molecular chain has the freedom The degree of increase in the degree of bending has high flexibility, which helps to improve the flexibility of the polyimide molecular chain. Therefore, by using the diamine residue represented by Formula (10), the thermoplasticity of polyimide improves. Here, the linking group A is preferably -O-.

式(10)所表示的二胺殘基可舉出由4-[3-[4-(4-胺基苯氧基)苯氧基]苯氧基]苯胺、4,4'-[氧基雙(3,1-亞苯氧基)]雙苯胺等二胺化合物所衍生的二胺殘基。The diamine residue represented by the formula (10) includes 4-[3-[4-(4-aminophenoxy)phenoxy]phenoxy]aniline, 4,4'-[oxy Diamine residues derived from diamine compounds such as bis(3,1-phenyleneoxy)]bisaniline.

式(11)所表示的二胺殘基為具有四個苯環的芳香族二胺殘基。關於式(11)所表示的二胺殘基,可認為通過具有至少兩個醚鍵而具有高的彎曲性,有助於提高聚醯亞胺分子鏈的柔軟性。因此,通過使用式(11)所表示的二胺殘基,聚醯亞胺的熱塑性提高。這裡,連結基A優選-C(CH3 )2 -、-O-、-SO2 -、-CO-。The diamine residue represented by the formula (11) is an aromatic diamine residue having four benzene rings. Regarding the diamine residue represented by the formula (11), it is considered that it has high flexibility by having at least two ether bonds and contributes to the improvement of the flexibility of the polyimide molecular chain. Therefore, by using the diamine residue represented by Formula (11), the thermoplasticity of polyimide improves. Here, the linking group A is preferably -C(CH 3 ) 2 -, -O-, -SO 2 -, -CO-.

式(11)所表示的二胺殘基例如可舉出由以下的二胺化合物所衍生的二胺殘基:2,2-雙[4-(4-胺基苯氧基)苯基]丙烷(BAPP)、雙[4-(4-胺基苯氧基)苯基]醚(BAPE)、雙[4-(4-胺基苯氧基)苯基]碸(BAPS)、雙[4-(4-胺基苯氧基)苯基]酮(BAPK)等。The diamine residue represented by the formula (11) includes, for example, a diamine residue derived from the following diamine compound: 2,2-bis[4-(4-aminophenoxy)phenyl]propane (BAPP), bis[4-(4-aminophenoxy)phenyl] ether (BAPE), bis[4-(4-aminophenoxy)phenyl] ash (BAPS), bis[4- (4-Aminophenoxy)phenyl]ketone (BAPK) and the like.

式(12)所表示的二胺殘基為具有四個苯環的芳香族二胺殘基。對於式(12)所表示的二胺殘基來說,可認為由於在二苯基骨架的兩側分別具有彎曲性高的二價的連結基A,因此有助於提高聚醯亞胺分子鏈的柔軟性。因此,通過使用式(12)所表示的二胺殘基,聚醯亞胺的熱塑性提高。這裡,連結基A優選-O-。The diamine residue represented by formula (12) is an aromatic diamine residue having four benzene rings. For the diamine residue represented by the formula (12), it is considered that the divalent linking group A with high flexibility is provided on both sides of the diphenyl skeleton, thereby contributing to the improvement of the polyimide molecular chain. The softness. Therefore, by using the diamine residue represented by Formula (12), the thermoplasticity of polyimide improves. Here, the linking group A is preferably -O-.

式(12)所表示的二胺殘基例如可舉出由雙[4-(3-胺基苯氧基)]聯苯、雙[4-(4-胺基苯氧基)]聯苯等二胺化合物所衍生的二胺殘基。The diamine residue represented by the formula (12) includes, for example, bis[4-(3-aminophenoxy)]biphenyl, bis[4-(4-aminophenoxy)]biphenyl, etc. A diamine residue derived from a diamine compound.

在熱塑性聚醯亞胺中,通過選定所述四羧酸殘基及二胺殘基的種類、或應用兩種以上的四羧酸殘基或二胺殘基的情況下的各自的莫耳比,可控制熱膨脹係數、拉伸模數、玻璃轉移溫度等。另外,在熱塑性聚醯亞胺中具有多種聚醯亞胺的結構單元的情況下,能以嵌段的形式存在,也可無規地存在,優選的是無規地存在。In the thermoplastic polyimide, by selecting the types of the tetracarboxylic acid residues and diamine residues, or using two or more kinds of tetracarboxylic acid residues or diamine residues, the respective molar ratios , Can control thermal expansion coefficient, tensile modulus, glass transition temperature, etc. In addition, when the thermoplastic polyimine has a plurality of polyimine structural units, it may exist in the form of blocks or may exist randomly, and it is preferable to exist randomly.

熱塑性聚醯亞胺的重量平均分子量例如優選10,000~400,000的範圍內,更優選50,000~350,000的範圍內。若重量平均分子量小於10,000,則有膜的強度降低而容易脆化的傾向。另一方面,若重量平均分子量超過400,000,則有黏度過度地增加而在塗敷操作時容易產生膜厚度不均一、條紋等不良的傾向。The weight average molecular weight of the thermoplastic polyimide is, for example, preferably in the range of 10,000 to 400,000, and more preferably in the range of 50,000 to 350,000. If the weight average molecular weight is less than 10,000, the strength of the film decreases and it tends to become brittle. On the other hand, if the weight average molecular weight exceeds 400,000, the viscosity increases excessively, and defects such as uneven film thickness and streaks tend to occur during the coating operation.

(非熱塑性聚醯亞胺及熱塑性聚醯亞胺的合成) 通常聚醯亞胺可通過以下方式製造:使四羧酸二酐與二胺化合物在溶劑中反應,生成聚醯胺酸後進行加熱閉環。例如使四羧酸二酐與二胺化合物以大致等莫耳而溶解在有機溶劑中,在0℃~100℃的範圍內的溫度下攪拌30分鐘~24小時而進行聚合反應,由此獲得作為聚醯亞胺的前驅物的聚醯胺酸。反應時,以所生成的前驅物在有機溶劑中成為5重量%~30重量%的範圍內、優選10重量%~20重量%的範圍內的方式將反應成分溶解。聚合反應中所用的有機溶劑例如可舉出:N,N-二甲基甲醯胺(DMF)、N,N-二甲基乙醯胺(DMAc)、N,N-二乙基乙醯胺、N-甲基-2-吡咯啶酮(NMP)、2-丁酮、二甲基亞碸(DMSO)、六甲基磷醯胺、N-甲基己內醯胺、硫酸二甲酯、環己酮、二噁烷、四氫呋喃、二乙二醇二甲醚、三乙二醇二甲醚、甲酚等。也可將這些溶劑並用兩種以上,進而也可並用二甲苯、甲苯那樣的芳香族烴。另外,這種有機溶劑的使用量並無特別限制,優選的是調整為通過聚合反應所得的聚醯胺酸溶液的濃度成為5重量%~30重量%左右那樣的使用量而使用。(Synthesis of non-thermoplastic polyimide and thermoplastic polyimide) Generally, polyimide can be produced by reacting tetracarboxylic dianhydride and diamine compound in a solvent to generate polyimide and then heating and ring-closing. For example, the tetracarboxylic dianhydride and the diamine compound are dissolved in an organic solvent at approximately equal moles and stirred at a temperature in the range of 0°C to 100°C for 30 minutes to 24 hours to carry out the polymerization reaction. Polyimide is the precursor of polyimide. At the time of the reaction, the reaction components are dissolved so that the generated precursor is in the range of 5% by weight to 30% by weight, preferably in the range of 10% by weight to 20% by weight, in the organic solvent. Examples of organic solvents used in the polymerization reaction include: N,N-dimethylformamide (DMF), N,N-dimethylacetamide (DMAc), and N,N-diethylacetamide , N-methyl-2-pyrrolidone (NMP), 2-butanone, dimethyl sulfide (DMSO), hexamethylphosphamide, N-methylcaprolactone, dimethyl sulfate, Cyclohexanone, dioxane, tetrahydrofuran, diethylene glycol dimethyl ether, triethylene glycol dimethyl ether, cresol, etc. Two or more of these solvents may be used in combination, and aromatic hydrocarbons such as xylene and toluene may also be used in combination. In addition, the use amount of such an organic solvent is not particularly limited, and it is preferable to adjust the use amount such that the concentration of the polyamide acid solution obtained by the polymerization reaction becomes about 5 wt% to 30 wt%.

所合成的聚醯胺酸通常有利的是以反應溶劑溶液的形式使用,視需要可濃縮、稀釋或替換成其他有機溶劑。另外,聚醯胺酸通常溶劑可溶性優異,因此可有利地使用。聚醯胺酸的溶液的黏度優選500 cps~100,000 cps的範圍內。若偏離該範圍,則利用塗布機等進行塗敷操作時容易產生厚度不均一、條紋等不良。使聚醯胺酸加以醯亞胺化的方法並無特別限制,例如適合採用在所述溶劑中在80℃~400℃的範圍內的溫度條件下加熱1小時~24小時的熱處理。The synthesized polyamide acid is generally advantageously used in the form of a reaction solvent solution, which can be concentrated, diluted or replaced with other organic solvents as necessary. In addition, polyamide acid is generally excellent in solvent solubility, and therefore can be advantageously used. The viscosity of the polyamide acid solution is preferably in the range of 500 cps to 100,000 cps. If it deviates from this range, defects such as thickness unevenness and streaks are likely to occur when the coating operation is performed with a coater or the like. The method for imidizing the polyamide acid is not particularly limited, and for example, a heat treatment of heating in the solvent at a temperature in the range of 80°C to 400°C for 1 hour to 24 hours is suitable.

<覆銅層疊板> 本實施形態的覆銅層疊板具備絕緣層及位於該絕緣層的至少一個面上的銅箔等銅層,絕緣層只要使用本實施形態的聚醯亞胺膜而形成即可。另外,為了提高絕緣層與銅層的黏接性,絕緣層的與銅層接觸的層為熱塑性聚醯亞胺層。銅層是設置在絕緣層的單面或兩面上。即,本實施形態的覆銅層疊板可為單面覆銅層疊板(單面CCL),也可為雙面覆銅層疊板(兩面CCL)。單面CCL的情況下,將層疊在絕緣層的單面上的銅層視為本發明的「第一銅層」。兩面CCL的情況下,將層疊在絕緣層的單面上的銅層視為本發明的「第一銅層」,將層疊在絕緣層中與層疊有第一銅層的面為相反側的面上的銅層視為本發明的「第二銅層」。本實施形態的覆銅層疊板是對銅層進行蝕刻等而進行佈線電路加工,形成銅佈線,用作FPC。<Copper clad laminates> The copper clad laminate of this embodiment includes an insulating layer and a copper layer such as a copper foil located on at least one surface of the insulating layer, and the insulating layer may be formed using the polyimide film of this embodiment. In addition, in order to improve the adhesion between the insulating layer and the copper layer, the layer in contact with the copper layer of the insulating layer is a thermoplastic polyimide layer. The copper layer is arranged on one or both sides of the insulating layer. That is, the copper clad laminate of this embodiment may be a single-sided copper clad laminate (single-sided CCL) or a double-sided copper clad laminate (double-sided CCL). In the case of a single-sided CCL, the copper layer laminated on one surface of the insulating layer is regarded as the "first copper layer" of the present invention. In the case of a double-sided CCL, the copper layer laminated on one side of the insulating layer is regarded as the "first copper layer" of the present invention, and the surface laminated on the insulating layer and the surface on which the first copper layer is laminated is the opposite side The upper copper layer is regarded as the "second copper layer" of the present invention. The copper clad laminate of this embodiment is used as an FPC by etching the copper layer and performing wiring circuit processing to form copper wiring.

覆銅層疊板例如也可通過以下方式製備:準備含有本實施形態的聚醯亞胺膜而構成的樹脂膜,對其濺鍍金屬而形成種子層後,例如通過鍍銅而形成銅層。The copper-clad laminate can also be prepared, for example, by preparing a resin film including the polyimide film of the present embodiment, sputtering a metal on the resin film to form a seed layer, and then forming a copper layer by, for example, copper plating.

另外,覆銅層疊板也可通過以下方式製備:準備含有本實施形態的聚醯亞胺膜而構成的樹脂膜,利用熱壓接等方法對其層壓銅箔。In addition, the copper-clad laminate can also be prepared by preparing a resin film composed of the polyimide film of this embodiment, and laminating copper foil on it by a method such as thermocompression bonding.

進而,覆銅層疊板也可通過以下方式製備:在銅箔上澆注含有作為聚醯亞胺的前驅物的聚醯胺酸的塗布液,進行乾燥而製成塗布膜後,進行熱處理而醯亞胺化,形成聚醯亞胺層。Furthermore, copper clad laminates can also be prepared by casting a coating solution containing polyamide acid as a precursor of polyimide on copper foil, drying to form a coating film, and then performing heat treatment to form a coating film. Amination to form a polyimide layer.

(第一銅層) 本實施形態的覆銅層疊板中,第一銅層所使用的銅箔(以下有時記作「第一銅箔」)並無特別限定,例如可為壓延銅箔也可為電解銅箔。(The first copper layer) In the copper clad laminate of the present embodiment, the copper foil used for the first copper layer (hereinafter may be referred to as “first copper foil”) is not particularly limited, and may be, for example, rolled copper foil or electrolytic copper foil.

第一銅箔的厚度以優選13 μm以下,更優選6 μm~12 μm的範圍內為宜。若第一銅箔的厚度超過13 μm,則將覆銅層疊板(或FPC)彎折時對銅層(或銅佈線)施加的彎曲應力增大,由此耐彎折性降低。另外,從生產穩定性及操作性的觀點來看,第一銅箔的厚度的下限值優選的是設定為6 μm。The thickness of the first copper foil is preferably 13 μm or less, more preferably in the range of 6 μm to 12 μm. If the thickness of the first copper foil exceeds 13 μm, the bending stress applied to the copper layer (or copper wiring) when the copper clad laminate (or FPC) is bent increases, thereby reducing the bending resistance. In addition, from the viewpoint of production stability and operability, the lower limit of the thickness of the first copper foil is preferably set to 6 μm.

另外,第一銅箔的拉伸模數例如優選10 GPa~35 GPa的範圍內,更優選15 GPa~25 GPa的範圍內。在本實施形態中使用壓延銅箔作為第一銅箔的情況下,若通過熱處理而進行退火,則柔軟性容易提高。因此,若銅箔的拉伸模數小於所述下限值,則在長條的第一銅箔上形成絕緣層的步驟中,因加熱而導致第一銅箔自身的剛性降低。另一方面,若拉伸模數超過所述上限值,則將FPC彎折時對銅佈線施加更大的彎曲應力,由此其耐彎折性降低。此外,壓延銅箔有其拉伸模數根據在銅箔上形成絕緣層時的熱處理條件、或形成絕緣層後的銅箔的退火處理等而變化的傾向。因此,本實施形態中,只要最終獲得的覆銅層疊板中,第一銅箔的拉伸模數在所述範圍內即可。In addition, the tensile modulus of the first copper foil is preferably in the range of 10 GPa to 35 GPa, and more preferably in the range of 15 GPa to 25 GPa, for example. In the case of using rolled copper foil as the first copper foil in the present embodiment, if annealing is performed by heat treatment, flexibility is easily improved. Therefore, if the tensile modulus of the copper foil is less than the lower limit, in the step of forming an insulating layer on the long first copper foil, the rigidity of the first copper foil itself is reduced due to heating. On the other hand, if the tensile modulus exceeds the upper limit, greater bending stress is applied to the copper wiring when the FPC is bent, thereby reducing its bending resistance. In addition, the rolled copper foil tends to change its tensile modulus depending on the heat treatment conditions when the insulating layer is formed on the copper foil, the annealing treatment of the copper foil after the insulating layer is formed, or the like. Therefore, in this embodiment, as long as the tensile modulus of the first copper foil is within the above-mentioned range in the finally obtained copper-clad laminate.

第一銅箔並無特別限定,可使用市售的壓延銅箔。The first copper foil is not particularly limited, and a commercially available rolled copper foil can be used.

(第二銅層) 第二銅層是層疊在絕緣層的與第一銅層為相反側的面上。第二銅層所使用的銅箔(第二銅箔)並無特別限定,例如可為壓延銅箔也可為電解銅箔。另外,第二銅箔也可使用市售的銅箔。此外,也可使用與第一銅箔相同的銅箔作為第二銅箔。(Second copper layer) The second copper layer is laminated on the surface of the insulating layer opposite to the first copper layer. The copper foil (second copper foil) used for the second copper layer is not particularly limited. For example, it may be a rolled copper foil or an electrolytic copper foil. In addition, as the second copper foil, a commercially available copper foil can also be used. In addition, the same copper foil as the first copper foil can also be used as the second copper foil.

本實施形態的覆銅層疊板優選的是通過下述評價方法所得的10 mm的電路基板尺寸(FPC尺寸)的佈線圖案的累計換算尺寸變化量相對於佈線寬與佈線間隔之和的比率在試片內的面內不均一性為±2%以下。所謂該不均一性的值為±2%以下,是指蝕刻前後的長度方向(MD方向)的尺寸變化量及寬度方向(TD方向)的尺寸變化量均為2%以下。在該不均一性的值超過±2%的情況下,在由覆銅層疊板加工而成的FPC中,成為引起佈線間或佈線與端子的接觸不良的原因,導致電路基板的可靠性或良率降低。這裡,一面參照圖1~圖7,一面對本實施形態中使用的覆銅層疊板的尺寸穩定性的評價方法加以說明。該評價方法包括以下的步驟(1)~步驟(6)。The copper clad laminate of this embodiment is preferably the ratio of the cumulative conversion size change of the wiring pattern of the circuit board size (FPC size) of 10 mm obtained by the following evaluation method to the sum of the wiring width and the wiring interval. The in-plane unevenness in the sheet is ±2% or less. The value of this non-uniformity is ±2% or less, which means that the dimensional change in the longitudinal direction (MD direction) and the dimensional change in the width direction (TD direction) before and after etching are both 2% or less. When the value of this non-uniformity exceeds ±2%, in the FPC processed by the copper clad laminate, it becomes the cause of poor contact between the wiring or the wiring and the terminal, resulting in the reliability or the good of the circuit board. The rate is reduced. Here, while referring to FIGS. 1 to 7, the method of evaluating the dimensional stability of the copper clad laminate used in this embodiment will be described. This evaluation method includes the following steps (1) to (6).

(1)準備試片的步驟: 該步驟中,像圖1所例示那樣,將長條的覆銅層疊板100以既定的長度切斷,由此準備試片10。此外,在以下的說明中,將長條的覆銅層疊板100的長度方向定義為MD方向,將寬度方向定義為TD方向(對於試片10來說也相同)。試片10優選的是以成為接近正方形的形狀的方式而使覆銅層疊板100的寬度(TD方向的長度)與切斷間隔(MD方向的長度)大致相等。雖省略圖示,但覆銅層疊板100具有絕緣樹脂層、及層疊在該絕緣樹脂層的單側或兩側的銅層。(1) Steps to prepare test piece: In this step, as illustrated in FIG. 1, the long copper clad laminate 100 is cut to a predetermined length, thereby preparing the test piece 10. In addition, in the following description, the longitudinal direction of the long copper clad laminate 100 is defined as the MD direction, and the width direction is defined as the TD direction (the same applies to the test piece 10). The test piece 10 is preferably such that the width (length in the TD direction) of the copper clad laminate 100 and the cutting interval (length in the MD direction) are approximately equal to each other so as to have a nearly square shape. Although not shown, the copper clad laminate 100 has an insulating resin layer and copper layers laminated on one side or both sides of the insulating resin layer.

成為本評價方法的物件的覆銅層疊板100可使用利用任意的方法所製備的覆銅層疊板。例如覆銅層疊板100可通過以下方式製備:準備樹脂膜,對其濺鍍金屬而形成種子層後,通過鍍敷而形成銅層。另外,覆銅層疊板100也可通過利用熱壓接等方法將樹脂膜與銅箔層壓而製備。進而,覆銅層疊板100也可通過在銅箔上塗布樹脂溶液形成絕緣樹脂層而製備。The copper-clad laminate 100 used as an object of this evaluation method can use a copper-clad laminate prepared by any method. For example, the copper clad laminate 100 can be prepared by preparing a resin film, sputtering metal on it to form a seed layer, and then forming a copper layer by plating. In addition, the copper clad laminate 100 can also be prepared by laminating a resin film and copper foil by a method such as thermocompression bonding. Furthermore, the copper clad laminate 100 can also be prepared by coating a resin solution on copper foil to form an insulating resin layer.

(2)在試片中形成多個標記的步驟: 該步驟中,像圖2所示那樣,首先在試片10中設想具有與MD方向及TD方向平行的邊的假想正四邊形20(以下有時簡單地記作「正四邊形20」)。該假想正四邊形20的一邊的長度可設定為與覆銅層疊板100的寬度(TD方向的長度)相對應的長度。另外,關於假想正四邊形20的面積,在採取多數個試片的情況下,加工成FPC的範圍的極限包括在評價物件中,因此優選的是設定為可覆蓋加工成FPC的範圍的面積。因此,正四邊形20的一邊的長度優選的是設定為試片10的TD方向的長度(覆銅層疊板100的寬度)的60%~90%的範圍內,更優選的是設定為70%~80%的範圍內。例如在覆銅層疊板100的寬度(TD方向的長度)為250 mm的情況下,假想正四邊形20的一邊的長度優選的是設定為150 mm~225 mm的範圍內,更優選的是設定為175 mm~200 mm的範圍內。(2) Steps to form multiple marks on the test piece: In this step, as shown in FIG. 2, first, an imaginary regular quadrilateral 20 having sides parallel to the MD direction and the TD direction is assumed in the test piece 10 (hereinafter sometimes simply referred to as "regular quadrilateral 20"). The length of one side of the imaginary regular quadrilateral 20 can be set to a length corresponding to the width of the copper clad laminate 100 (the length in the TD direction). In addition, regarding the area of the imaginary regular quadrilateral 20, when a large number of test pieces are taken, the limit of the range processed into FPC is included in the evaluation object, so it is preferably set to an area that can cover the range processed into FPC. Therefore, the length of one side of the regular quadrilateral 20 is preferably set in the range of 60% to 90% of the length of the test piece 10 in the TD direction (the width of the copper clad laminate 100), and more preferably set to 70% to 70%. Within 80%. For example, when the width of the copper clad laminate 100 (the length in the TD direction) is 250 mm, the length of one side of the imaginary regular quadrilateral 20 is preferably set in the range of 150 mm to 225 mm, and more preferably set to Within the range of 175 mm~200 mm.

然後,像圖2~圖4所示那樣,在假想正四邊形20的包含中心20a的中心區域21、與逐一包含共有正四邊形20的TD方向一邊的兩個角部20b的兩個角落區域23a、角落區域23b中,分別形成包含直線狀的排列的多個標記。標記例如為貫穿試片10的圓孔30。多個孔30優選的是等間隔地形成。此外,作為標記的孔30例如可為三角形、長方形等多邊形狀。另外,標記只要可識別其位置,則不限於貫通孔,例如也可在試片10中形成槽、切口等,也可為利用油墨等印刷的花紋。Then, as shown in FIGS. 2 to 4, in the central region 21 including the center 20a of the imaginary regular quadrilateral 20, and the two corner regions 23a each including the two corners 20b sharing one side of the regular quadrilateral 20 in the TD direction, In the corner area 23b, a plurality of marks including a linear arrangement are formed respectively. The mark is, for example, a circular hole 30 penetrating the test piece 10. The plurality of holes 30 are preferably formed at equal intervals. In addition, the hole 30 as a mark may have a polygonal shape such as a triangle or a rectangle, for example. In addition, the mark is not limited to a through hole as long as its position can be recognized. For example, a groove, a cutout, etc. may be formed in the test piece 10, or a pattern printed with ink or the like may be used.

<中心區域> 假想正四邊形20的中心20a成為用以測定試片10的伸縮的座標的基準,因此該評價方法中,將包含該中心20a的中心區域21作為測定物件。中心區域21中,只要包含直線狀的排列,則形成多個孔30的位置為任意,例如也可排列成T字形、L字形等,優選的是可從假想正四邊形20的中心20a在MD方向及TD方向上均等地排列的十字型。即,像圖3所示,優選的是沿著通過假想正四邊形20的中心20a的十字形而在MD方向及TD方向上形成多個孔30,更優選的是以十字型的交叉部分與假想正四邊形20的中心20a重疊的方式配置。該情況下,與中心20a重疊的孔30是作為構成MD方向及TD方向這兩方向的排列的孔30而重複計數。<Central area> The center 20a of the imaginary regular quadrilateral 20 serves as a reference for measuring the coordinates of the expansion and contraction of the test piece 10. Therefore, in this evaluation method, the center region 21 including the center 20a is used as a measurement object. In the central region 21, as long as it includes a linear arrangement, the position where the plurality of holes 30 are formed is arbitrary. For example, it may be arranged in a T-shape, an L-shape, etc., and it is preferable to be able to move from the center 20a of the imaginary regular quadrilateral 20 in the MD direction. And cross-shaped evenly arranged in the TD direction. That is, as shown in FIG. 3, it is preferable to form a plurality of holes 30 in the MD direction and the TD direction along the cross shape passing through the center 20a of the imaginary regular quadrilateral 20, and it is more preferable to form the cross-shaped cross portion and the imaginary The centers 20a of the regular quadrilaterals 20 are arranged such that they overlap. In this case, the holes 30 overlapping the center 20a are repeatedly counted as the holes 30 constituting the array in both the MD direction and the TD direction.

另外,中心區域21中,為了準確地評價包含試片10面內的尺寸變化不均一性的尺寸穩定性,以如下情況為宜:從正四邊形20的中心20a起,在MD方向及TD方向上分別相對於正四邊形20的一邊長度而在至少12.5%以上、優選12.5%~32.5%的範圍內、更優選12.5%~25%的範圍內形成孔30。In addition, in the central region 21, in order to accurately evaluate the dimensional stability including the unevenness of the dimensional change in the surface of the test piece 10, it is advisable to start from the center 20a of the regular quadrilateral 20 in the MD and TD directions. The pores 30 are formed in a range of at least 12.5% or more, preferably in a range of 12.5% to 32.5%, and more preferably in a range of 12.5% to 25% with respect to the length of one side of the regular quadrilateral 20, respectively.

<角落區域> 在圖1所示那樣的長條的覆銅層疊板100中,共有正四邊形20的TD方向一邊的兩個角部20b的周圍為最易伸縮,尺寸變化容易變大的區域。因此,該評價方法中,將逐一包含共有正四邊形20的TD方向一邊的兩個角部20b的兩個角落區域23a、角落區域23b兩者作為測定對象。<Corner area> In the long copper clad laminate 100 as shown in FIG. 1, the area around two corners 20 b sharing one side of the regular quadrilateral 20 in the TD direction is the easiest area to expand and contract, and the dimensional change is likely to increase. Therefore, in this evaluation method, the two corner regions 23a and the corner region 23b each including the two corners 20b sharing one side of the regular quadrilateral 20 in the TD direction are the measurement targets.

角落區域23a、角落區域23b中,只要包含直線狀的排列,則形成孔30的位置為任意,例如優選的是像圖4所示那樣,沿著假想正四邊形20的夾持角部20b的兩條邊,在MD方向及TD方向上將多個孔30形成為L字形。該情況下,在角部20b重疊的孔30是作為構成MD方向及TD方向這兩方向的排列的孔30而重複計數。此外,圖4僅示出了一個角落區域23b,但對於另一角落區域23a來說也相同。In the corner area 23a and the corner area 23b, as long as the linear arrangement is included, the position where the hole 30 is formed is arbitrary. For example, as shown in FIG. The strip side has a plurality of holes 30 formed in an L-shape in the MD direction and the TD direction. In this case, the holes 30 overlapping at the corner portion 20b are repeatedly counted as the holes 30 constituting the array in both the MD direction and the TD direction. In addition, FIG. 4 shows only one corner area 23b, but the same is true for the other corner area 23a.

兩個角落區域23a、角落區域23b中,為了可準確地評價包含試片10面內的尺寸變化不均一性的尺寸穩定性,以如下情況為宜:從正四邊形20的TD方向一邊的兩端(即正四邊形20的角部20b)朝向MD方向的中央側,分別相對於MD方向的一邊長度而在至少12.5%以上、優選12.5%~32.5%的範圍內、更優選12.5%~25%的範圍內形成孔30。In the two corner regions 23a and corner region 23b, in order to accurately evaluate the dimensional stability including the unevenness of dimensional changes in the surface of the test piece 10, the following situation is appropriate: from both ends of one side of the regular quadrilateral 20 in the TD direction (That is, the corner 20b of the regular quadrilateral 20) faces the central side in the MD direction, and is at least 12.5% or more, preferably in the range of 12.5% to 32.5%, more preferably 12.5% to 25% with respect to the length of one side in the MD direction. A hole 30 is formed in the range.

另外,兩個角落區域23a、角落區域23b中,為了可準確地評價包含試片10面內的尺寸變化不均一性的尺寸穩定性,以如下情況為宜:從正四邊形20的TD方向一邊的兩端(即正四邊形20的角部20b)朝向TD方向的中央側,分別相對於TD方向的一邊長度而在至少12.5%以上、優選12.5%~32.5%的範圍內、更優選12.5%~25%的範圍內形成孔30。In addition, in the two corner regions 23a and the corner region 23b, in order to accurately evaluate the dimensional stability including the unevenness of the dimensional change in the surface of the test piece 10, the following situation is appropriate: Both ends (that is, the corners 20b of the regular quadrilateral 20) face the central side in the TD direction, and are at least 12.5% or more, preferably 12.5% to 32.5%, and more preferably 12.5% to 25 with respect to the length of one side in the TD direction. A hole 30 is formed in the range of %.

另外,為了涵蓋試片10的面內而準確地把握每個部位的尺寸變化,也可使中心區域21中排列成直線狀的兩端的孔30間的排列範圍,與角落區域23a、角落區域23b中在相同方向上排列成直線狀的兩端的孔30間的排列範圍重疊。 具體而言,也能以如下方式配置:在TD方向上平行移動時,至少在中心區域21內排列在MD方向上的多個孔30的兩端的位置,與在兩個角落區域23a、角落區域23b中分別排列在MD方向上的多個孔30中最靠內側(遠離角部20b的一側)的孔30的位置重疊(overlap)。 同樣地,也能以如下方式配置:在MD方向上平行移動時,至少在中心區域21內排列在TD方向上的多個孔30中最接近角落區域23a、角落區域23b的孔30的位置,與在兩個角落區域23a、角落區域23b內分別排列在TD方向上的多個孔30中最靠內側(遠離角部20b的一側)的孔30的位置重疊。 若考慮到如上配置,則中心區域21中將多個孔30排列成十字形最合理,另外,兩個角落區域23a、角落區域23b中,將多個孔30排列成L字形最合理。In addition, in order to cover the surface of the test piece 10 and accurately grasp the dimensional change of each part, the arrangement range between the holes 30 at both ends in the central area 21 that are arranged in a straight line can be compared with the corner area 23a and the corner area 23b. The array ranges between the holes 30 at both ends arranged linearly in the same direction overlap. Specifically, it can also be configured in such a way that when moving in parallel in the TD direction, at least the positions of the two ends of the plurality of holes 30 arranged in the MD direction in the central region 21 and the two corner regions 23a and corner regions The positions of the holes 30 on the innermost side (the side farther from the corner portion 20b) of the plurality of holes 30 arranged in the MD direction in 23b overlap (overlap). Similarly, it can also be arranged in the following manner: when moving in parallel in the MD direction, at least the position of the hole 30 in the corner region 23a and the corner region 23b among the plurality of holes 30 arranged in the TD direction in the central region 21 is closest, It overlaps with the position of the innermost hole 30 (the side far from the corner 20b) among the plurality of holes 30 arranged in the TD direction in the two corner regions 23a and the corner region 23b. In consideration of the above configuration, it is most reasonable to arrange the plurality of holes 30 in a cross shape in the central area 21. In addition, in the two corner areas 23a and 23b, it is most reasonable to arrange the plurality of holes 30 in an L shape.

在試片10的假想正四邊形20中,形成孔30的範圍可通過孔30的大小、孔30的個數、孔30與孔30的間隔的長度而調節。In the imaginary regular quadrilateral 20 of the test piece 10, the range in which the holes 30 are formed can be adjusted by the size of the holes 30, the number of the holes 30, and the length of the interval between the holes 30 and the holes 30.

為了提高尺寸變化的檢測精度,孔30的大小優選的是設定為孔30與孔30的間隔的長度的20%以下的範圍內。In order to improve the detection accuracy of the dimensional change, the size of the hole 30 is preferably set to be within a range of 20% or less of the length of the interval between the hole 30 and the hole 30.

對於形成在所述中心區域21及兩個角落區域23a、角落區域23b中的多個孔30來說,為了可準確地評價包含試片10面內的尺寸變化不均一性的尺寸穩定性,優選的是在MD方向及TD方向上分別包含至少11個以上的直線狀的排列,更優選包含20個以上的直線狀的排列。這裡,若將孔30的個數設為n個,則後續步驟(3)、步驟(5)中成為測量對象的相鄰的孔30與孔30的間隔數成為n-1處。關於相鄰的孔30與孔30的間隔,例如在孔30的個數為10個的情況下成為9處,在孔30的個數為21個的情況下成為20處。該情況下,優選的是在MD方向及TD方向上,孔30的個數相同。For the plurality of holes 30 formed in the central area 21 and the two corner areas 23a and the corner areas 23b, in order to accurately evaluate the dimensional stability including the unevenness of the dimensional change in the surface of the test piece 10, it is preferable It is a linear arrangement including at least 11 or more in the MD direction and the TD direction, and more preferably 20 or more linear arrays. Here, if the number of holes 30 is set to n, the number of intervals between the adjacent holes 30 and the holes 30 to be measured in the subsequent steps (3) and (5) becomes n-1. The distance between the adjacent holes 30 and the holes 30 is, for example, 9 places when the number of holes 30 is 10, and 20 places when the number of holes 30 is 21. In this case, it is preferable that the number of holes 30 is the same in the MD direction and the TD direction.

為了提高尺寸變化的檢測精度,孔30與孔30之間的距離優選的是設定為2 mm以上。In order to improve the detection accuracy of the dimensional change, the distance between the hole 30 and the hole 30 is preferably set to 2 mm or more.

(3)第一測量步驟: 該步驟中,測定多個孔30的位置。而且,根據各孔30的位置的測定結果而算出鄰接的孔30與孔30之間的距離L0。例如若孔30的個數為21個,則對鄰接的孔30與孔30之間的20處的間隔求出距離L0。這裡,像圖5所示那樣,鄰接的孔30與孔30之間的距離L0是指從某個孔30的中心30a到鄰接的孔30的中心30a的距離。(3) The first measurement step: In this step, the positions of a plurality of holes 30 are measured. Then, the distance L0 between the adjacent hole 30 and the hole 30 is calculated based on the measurement result of the position of each hole 30. For example, if the number of holes 30 is 21, the distance L0 is calculated for the interval between adjacent holes 30 and holes 30 at 20 locations. Here, as shown in FIG. 5, the distance L0 between the adjacent holes 30 and the holes 30 refers to the distance from the center 30 a of a certain hole 30 to the center 30 a of the adjacent hole 30.

孔30的位置的測量並無特別限定,例如可通過根據試片10的圖像來檢測孔30的位置的方法而實施。The measurement of the position of the hole 30 is not particularly limited. For example, it can be implemented by a method of detecting the position of the hole 30 based on the image of the test strip 10.

該步驟的孔30的位置的測量可繼所述步驟(2)之後而實施,但優選的是在測量前設置調整試片10的狀態(condition)的步驟。試片10的狀態調整的一例可舉出調濕處理。調濕處理可通過將試片10在一定環境下靜置一定時間(例如23℃、50RH%的環境下24小時)而進行。The measurement of the position of the hole 30 in this step can be performed after the step (2), but it is preferable to provide a step of adjusting the condition of the test strip 10 before the measurement. As an example of the state adjustment of the test piece 10, humidity control processing can be mentioned. The humidity control treatment can be performed by leaving the test piece 10 in a certain environment for a certain period of time (for example, in an environment of 23° C. and 50 RH% for 24 hours).

(4)蝕刻步驟: 該步驟中,將試片10的銅層的一部分或全部蝕刻。為了評價切合實際的尺寸穩定性,蝕刻的內容優選的是依照由覆銅層疊板100所形成的FPC的佈線圖案而進行。在試片10是由雙面覆銅層疊板所製備的情況下,也可對兩側的銅層進行蝕刻。此外,在實際的FPC加工中伴有熱處理的情況下,也可在蝕刻後進行以任意溫度將試片10加熱的處理。(4) Etching steps: In this step, part or all of the copper layer of the test piece 10 is etched. In order to evaluate realistic dimensional stability, the content of etching is preferably performed in accordance with the wiring pattern of the FPC formed by the copper-clad laminate 100. In the case where the test piece 10 is prepared from a double-sided copper clad laminate, the copper layers on both sides can also be etched. In addition, when heat treatment is involved in actual FPC processing, a process of heating the test piece 10 at an arbitrary temperature may be performed after etching.

(5)第二測量步驟: 該步驟為在所述(4)的蝕刻後再次測定多個孔30的位置的步驟。而且,像圖5所示那樣,根據各孔30的位置的測定結果而算出鄰接的孔30與孔30之間的距離L1。該步驟中的孔30的位置的測量可利用與所述步驟(3)相同的方法來進行。(5) The second measurement step: This step is a step of measuring the positions of the plurality of holes 30 again after the etching in (4). Furthermore, as shown in FIG. 5, the distance L1 between the adjacent hole 30 and the hole 30 is calculated based on the measurement result of the position of each hole 30. The measurement of the position of the hole 30 in this step can be performed by the same method as the step (3).

該步驟的孔30的位置的測量可繼所述步驟(4)之後而實施,但優選的是與所述步驟(3)同樣地設置調整試片10的狀態的步驟。尤其在所述步驟(3)中進行了狀態調整的情況下,該步驟中也優選的是在測量前以相同的條件實施狀態調整。The measurement of the position of the hole 30 in this step can be performed after the step (4), but it is preferable to provide a step of adjusting the state of the test strip 10 in the same manner as in the step (3). Especially in the case where the state adjustment is performed in the step (3), it is also preferable in this step to implement the state adjustment under the same conditions before the measurement.

(6)算出尺寸變化量的步驟: 該步驟中,像圖5所示那樣,在蝕刻前後對相同的兩個孔30的間隔算出第一測量步驟中所得的距離L0、與第二測量步驟中所得的距離L1之差L1-L0。而且,對排列成同一直線狀的孔30與孔30的間隔的2處以上、優選10處以上、更優選全部同樣地算出差L1-L0。將該差L1-L0作為「尺寸變化量Δ」。(6) Steps to calculate the amount of dimensional change: In this step, as shown in FIG. 5, the distance L0 obtained in the first measurement step and the difference L1-L0 between the distance L1 obtained in the second measurement step and the distance L1 obtained in the second measurement step are calculated for the interval between the same two holes 30 before and after the etching. In addition, the difference L1-L0 is calculated in the same manner for two or more places, preferably ten or more places, and more preferably all of the gaps between the holes 30 and the holes 30 arranged in the same linear shape. Let this difference L1-L0 be "dimension change amount Δ".

(7)換算成佈線規格的步驟: 該步驟中,將步驟(6)中所得的尺寸變化量Δ換算成由覆銅層疊板100所形成的FPC中的佈線圖案的規格,以相對於佈線圖案的佈線寬與佈線間隔之和的比率來表示所得的換算值。通過該步驟,在將供試驗的覆銅層疊板100實際加工成FPC的情況下,可容易地得知並表現出覆銅層疊板100的尺寸變化對FPC的佈線圖案造成的影響。(7) Steps to convert into wiring specifications: In this step, the dimensional change amount Δ obtained in step (6) is converted into the specification of the wiring pattern in the FPC formed by the copper clad laminate 100, in a ratio relative to the sum of the wiring width of the wiring pattern and the wiring interval To represent the converted value obtained. Through this step, when the copper-clad laminate 100 for testing is actually processed into an FPC, the influence of the dimensional change of the copper-clad laminate 100 on the wiring pattern of the FPC can be easily understood and shown.

該步驟中,首先將尺寸變化量Δ換算成由覆銅層疊板100所形成的預定的FPC中的L/S佈線圖案的佈線寬/佈線間隔的規格,將換算所得的尺寸變化量累計而求出累計換算尺寸變化量。例如在相對於蝕刻前的兩個孔30之間的距離L0,預定形成的FPC中的佈線圖案的佈線寬與佈線間隔分別為距離L0的1/Y的情況下,根據下式將尺寸變化量Δ換算成縮減(downsizing)為2×(1/Y)的規格時的值,求出2×(1/Y)的規格的累計換算尺寸變化量。In this step, first, the dimensional change amount Δ is converted into the specifications of the wiring width/wiring interval of the L/S wiring pattern in the predetermined FPC formed by the copper-clad laminate 100, and the calculated dimensional change is calculated by accumulating The cumulative converted size change amount. For example, in the case where the wiring width and the wiring interval of the wiring pattern in the planned FPC are respectively 1/Y of the distance L0 with respect to the distance L0 between the two holes 30 before etching, the size change is calculated according to the following formula Δ is converted to the value when downsizing is 2×(1/Y), and the cumulative conversion size change of 2×(1/Y) is calculated.

累計換算尺寸變化量=[Σi=1 i (2×Δi /Y)]Cumulative conversion size change = [Σ i=1 i (2×Δ i /Y)]

所述式中,記號Σi=1 i 表示1至i的總和。另外,尺寸變化量Δ表示蝕刻後的第n個孔30與第n-1個孔30的距離L1減去蝕刻前的第n個孔30與第n-1個孔30的距離L0所得的值(這裡,n為2以上的整數)。例如,Δ1 為第1個間隔的長度(相鄰的兩個孔30間的距離)的尺寸變化量,Δi 為第i個(i是指正整數)間隔的長度的尺寸變化量。In the above formula, the symbol Σ i=1 i represents the sum of 1 to i. In addition, the dimensional change Δ represents a value obtained by subtracting the distance L0 between the nth hole 30 and the n-1th hole 30 before the etching from the distance L1 between the nth hole 30 and the n-1th hole 30 after etching (Here, n is an integer of 2 or more). For example, Δ 1 is the dimensional change of the length of the first interval (the distance between two adjacent holes 30), and Δ i is the dimensional change of the length of the i-th (i is a positive integer) interval.

然後,由累計換算尺寸變化量根據下式求出佈線的位移比率。該佈線的位移比率是以相對於預定形成的L/S佈線圖案的佈線寬(Lmm)與佈線間隔(Smm)之和的比率來表示累計換算尺寸變化量。 佈線的位移比率(%)= {[Σi=1 i (2×Δi /Y)]/[L+S]}×100Then, the displacement ratio of the wiring is obtained according to the following equation from the cumulatively converted dimensional change amount. The displacement ratio of the wiring is the ratio of the sum of the wiring width (Lmm) and the wiring interval (Smm) of the predetermined L/S wiring pattern to express the cumulative converted dimension change amount. Displacement ratio of wiring (%) = {[Σ i=1 i (2×Δ i /Y)]/[L+S]}×100

將像以上那樣所算出的FPC中的MD及TD的佈線的位移比率繪製在圖表上,由此獲得與FPC尺寸相對應的近似直線(此外,省略圖表的圖示)。這裡,所謂「FPC尺寸」,是指FPC中形成的多條佈線中距離最遠的兩端的佈線間的距離。圖表的斜率的大小是指佈線位移的大小,圖表的斜率的不均一性的大小是指佈線位移的面內不均一性的大小。The displacement ratio of the MD and TD wiring in the FPC calculated as described above is plotted on a graph, thereby obtaining an approximate straight line corresponding to the FPC size (in addition, the illustration of the graph is omitted). Here, the so-called "FPC size" refers to the distance between the wirings at both ends of the plurality of wirings formed in the FPC that are farthest away. The magnitude of the slope of the graph refers to the magnitude of the wiring displacement, and the magnitude of the unevenness of the slope of the graph refers to the magnitude of the in-plane unevenness of the wiring displacement.

通過該步驟,在將供試驗的覆銅層疊板100實際加工成電路的情況下,可容易地得知並表現出覆銅層疊板100的尺寸變化對FPC的佈線圖案造成的影響。另外,通過製作近似直線的圖表,可與FPC尺寸相對應而看到並表現出由作為供試體的覆銅層疊板100所製作的佈線的位移的大小或面內的不均一性。Through this step, when the copper-clad laminate 100 for testing is actually processed into a circuit, the influence of the dimensional change of the copper-clad laminate 100 on the wiring pattern of the FPC can be easily understood and shown. In addition, by creating an approximate straight line graph, the size of the displacement or the in-plane unevenness of the wiring produced by the copper clad laminate 100 as the test body can be seen and expressed corresponding to the size of the FPC.

此外,也可將所述步驟(6)中所得的尺寸變化量Δ累計後,將累計尺寸變化量換算成由覆銅層疊板100所形成的預定的FPC中的L/S佈線圖案的佈線寬/佈線間隔的規格,求出累計換算尺寸變化量。例如將各間隔的尺寸變化量Δ累計,獲得累計尺寸變化量Σ。該累計尺寸變化量Σ可通過下式而算出。In addition, after the dimensional change amount Δ obtained in the step (6) is accumulated, the cumulative dimensional change amount may be converted into the wiring width of the L/S wiring pattern in the predetermined FPC formed by the copper clad laminate 100 / Wiring interval specifications, calculate the cumulative conversion size change. For example, the dimensional change amount Δ of each interval is accumulated to obtain the cumulative dimensional change amount Σ. This cumulative dimensional change amount Σ can be calculated by the following formula.

Σ=Δ1 +Δ2 +Δ3 +・・・+Δi =Σi=1 i Δi Σ=Δ 1 +Δ 2 +Δ 3 +・・・+Δ i =Σ i=1 i Δ i

累計尺寸變化量Σ可對覆銅層疊板100的MD方向、TD方向的任一方向、優選兩個方向求出。根據累計尺寸變化量Σ的大小,可評價覆銅層疊板100的MD方向、TD方向的尺寸穩定性。另外,根據累計尺寸變化量Σ的實測值而獲得規格增大(scale up)的近似直線。The cumulative dimensional change amount Σ can be obtained for any one of the MD direction and the TD direction of the copper clad laminate 100, preferably two directions. Based on the cumulative dimensional change Σ, the dimensional stability of the copper clad laminate 100 in the MD and TD directions can be evaluated. In addition, an approximate straight line that scales up is obtained based on the actual measurement value of the cumulative dimensional change amount Σ.

像以上那樣,根據該評價方法,可通過步驟(1)~步驟(7)而高精度地評價包含面內不均一性的覆銅層疊板100的尺寸變化。另外,即便在從覆銅層疊板100採取多數個試片的情況下,也可對加工成FPC的各區域分別評價尺寸穩定性。As described above, according to this evaluation method, the dimensional change of the copper-clad laminate 100 including in-plane unevenness can be evaluated with high accuracy through steps (1) to (7). In addition, even in the case where a plurality of test pieces are taken from the copper clad laminate 100, the dimensional stability can be evaluated separately for each area processed into FPC.

<FPC> 本實施形態的覆銅層疊板主要作為FPC材料而有用。即,利用常法將本實施形態的覆銅層疊板的銅層加工成圖案狀而形成佈線層,由此可製造作為本發明的一實施形態的FPC。 [實施例]<FPC> The copper clad laminate of this embodiment is mainly useful as an FPC material. That is, by processing the copper layer of the copper clad laminate of this embodiment into a pattern by a conventional method to form a wiring layer, the FPC as one embodiment of the present invention can be manufactured. [Example]

以下示出實施例對本發明的特徵進行更具體說明。然而,本發明的範圍不限定於實施例。此外,以下的實施例中,只要無特別說明,則各種測定、評價是利用下述方法。The following examples illustrate the features of the present invention in more detail. However, the scope of the present invention is not limited to the examples. In addition, in the following examples, unless otherwise specified, the following methods are used for various measurements and evaluations.

[黏度的測定] 關於黏度的測定,使用E型黏度計(博勒飛(Brookfield)公司製造,商品名:DV-II+Pro)測定25℃下的黏度。以扭矩(torque)成為10%~90%的方式設定轉速,開始測定起經過2分鐘後,讀取黏度穩定時的值。[Determination of Viscosity] Regarding the measurement of the viscosity, the viscosity at 25° C. was measured using an E-type viscometer (manufactured by Brookfield, trade name: DV-II+Pro). Set the rotation speed so that the torque becomes 10% to 90%. After 2 minutes have passed since the start of the measurement, read the value when the viscosity is stable.

[重量平均分子量的測定] 重量平均分子量是利用凝膠滲透色譜儀(東曹(Tosoh)股份有限公司製造,商品名:HLC-8220GPC)進行測定。使用聚苯乙烯作為標準物質,展開溶劑使用N,N-二甲基乙醯胺。[Determination of weight average molecular weight] The weight average molecular weight is measured using a gel permeation chromatography (Tosoh Co., Ltd. product, trade name: HLC-8220GPC). Polystyrene was used as a standard substance, and N,N-dimethylacetamide was used as a developing solvent.

[玻璃轉移溫度(Tg)的測定] 關於玻璃轉移溫度,使用動態黏彈性測定裝置(DMA:UBM公司製造,商品名:E4000F),從30℃到400℃以升溫速度4℃/分鐘、頻率11 Hz對尺寸為5 mm×20 mm的聚醯亞胺膜進行測定,將彈性模數變化(tanδ)達到最大的溫度作為玻璃轉移溫度。此外,將使用DMA所測定的30℃下的儲存模數為1.0×109 Pa以上、360℃下的儲存模數小於1.0×108 Pa者視為「熱塑性」,將30℃下的儲存模數為1.0×109 Pa以上、360℃下的儲存模數顯示出1.0×108 Pa以上者視為「非熱塑性」。[Measurement of glass transition temperature (Tg)] Regarding the glass transition temperature, a dynamic viscoelasticity measuring device (DMA: manufactured by UBM, trade name: E4000F) was used, from 30°C to 400°C at a heating rate of 4°C/min, frequency 11 Hz measured a polyimide film with a size of 5 mm×20 mm, and the temperature at which the change in elastic modulus (tanδ) reached the maximum was taken as the glass transition temperature. In addition, the storage modulus at 30°C measured by DMA is 1.0×10 9 Pa or more, and the storage modulus at 360°C is less than 1.0×10 8 Pa as “thermoplastic”, and the storage modulus at 30°C If the number is 1.0×10 9 Pa or more, and the storage modulus at 360°C shows 1.0×10 8 Pa or more, it is regarded as "non-thermoplastic".

[熱膨脹係數(CTE)的測定] 使用熱機械分析儀(布魯克(Bruker)公司製造,商品名:4000SA),對尺寸為3 mm×20 mm的聚醯亞胺膜一面施加5.0 g的負重,一面以一定的升溫速度使其從30℃升溫到265℃,進而在該溫度下保持10分鐘後,以5℃/分鐘的速度冷卻,求出250℃至100℃的平均熱膨脹係數(熱膨脹係數)。[Determination of Coefficient of Thermal Expansion (CTE)] Using a thermomechanical analyzer (manufactured by Bruker, trade name: 4000SA), a load of 5.0 g is applied to a polyimide film with a size of 3 mm×20 mm, and a load of 5.0 g is applied to the polyimide film at a certain heating rate. The temperature was raised to 265°C, and the temperature was maintained at that temperature for 10 minutes, and then cooled at a rate of 5°C/min to obtain an average thermal expansion coefficient (thermal expansion coefficient) from 250°C to 100°C.

[銅箔的表面粗度的測定] 關於銅箔的表面粗度,使用原子力顯微鏡(Atomic Force Microscope,AFM)(布魯克AXS(Bruker AXS)公司製造,商品名:維度圖示(Dimension Icon)型SPM)、探針(布魯克AXS(Bruker AXS)公司製造,商品名:TESPA(NCHV),前端曲率半徑10 nm,彈簧常數42 N/m),以輕敲模式(tapping mode)對銅箔表面的80 μm×80 μm的範圍進行測定,求出十點平均粗糙度(Rz)。[Measurement of surface roughness of copper foil] Regarding the surface roughness of the copper foil, an atomic force microscope (Atomic Force Microscope, AFM) (manufactured by Bruker AXS (Bruker AXS), trade name: Dimension Icon type SPM), probe (Bruker AXS (Bruker AXS) ) Manufactured by the company, trade name: TESPA (NCHV), tip curvature radius 10 nm, spring constant 42 N/m), in tapping mode (tapping mode) to measure the copper foil surface in the range of 80 μm×80 μm, find The ten-point average roughness (Rz) is calculated.

[剝離強度的測定] 1)單面覆銅層疊板的澆注側(樹脂塗敷側) 將單面覆銅層疊板(銅箔/樹脂層)的銅箔以寬度1.0 mm進行電路加工後,以寬度:8 cm×長度:4 cm切斷,製備測定樣本1。關於測定樣本1的澆注側的剝離強度,使用拉伸測試機(Tensilon tester)(東洋精機製作所製造,商品名:萬能試驗機(Strograph)VE-1D),利用雙面膠帶將測定樣本1的樹脂層側固定在鋁板上,將銅箔朝90°方向以50 mm/分鐘的速度剝離,求出將銅箔從樹脂層剝離10 mm時的中央強度。將該值作為剝離強度1A。 2)雙面覆銅層疊板的澆注側(樹脂塗敷側) 將雙面覆銅層疊板(銅箔/樹脂層/銅箔)的熱壓接側與澆注側兩面的銅箔以寬度0.8 mm進行電路加工(以兩面的銅箔成為相同位置的方式進行佈線加工)後,以寬度:8 cm×長度:4 cm切斷,製備測定樣本2。關於測定樣本2的澆注側的剝離強度,使用拉伸測試機(Tensilon tester)(東洋精機製作所製造,商品名:萬能試驗機(Strograph)VE-1D),利用雙面膠帶將測定樣本2的熱壓接側的銅箔面固定在鋁板上,將銅箔朝90°方向以50 mm/分鐘的速度剝離,求出將樹脂塗敷側的銅箔從樹脂層剝離10 mm時的中央值強度。將該值作為剝離強度2A。[Measurement of peel strength] 1) Pouring side of single-sided copper clad laminate (resin coating side) After the copper foil of the single-sided copper clad laminate (copper foil/resin layer) was circuit-processed with a width of 1.0 mm, it was cut with width: 8 cm × length: 4 cm to prepare a measurement sample 1. Regarding the measurement of the peel strength of the casting side of the sample 1, a tensile tester (Tensilon tester) (manufactured by Toyo Seiki Seisakusho, trade name: Strograph VE-1D) was used, and the resin of the sample 1 was measured using double-sided tape The layer side was fixed to an aluminum plate, and the copper foil was peeled in a 90° direction at a speed of 50 mm/min, and the central strength when the copper foil was peeled from the resin layer by 10 mm was obtained. Let this value be peel strength 1A. 2) Pouring side of double-sided copper clad laminate (resin coating side) The copper foil on both sides of the double-sided copper-clad laminate (copper foil/resin layer/copper foil) on the thermocompression bonding side and the casting side is processed with a width of 0.8 mm (wiring processing is performed so that the copper foils on both sides become the same position) ), cut with width: 8 cm × length: 4 cm to prepare measurement sample 2. Regarding the measurement of the peel strength of the pouring side of the sample 2, a tensile tester (Tensilon tester) (manufactured by Toyo Seiki Seisakusho Co., Ltd., trade name: Strograph VE-1D) was used to measure the heat of the sample 2 using double-sided tape. The copper foil surface on the crimping side was fixed to an aluminum plate, and the copper foil was peeled in a 90° direction at a speed of 50 mm/min. The median strength when the copper foil on the resin coated side was peeled off the resin layer by 10 mm was obtained. Let this value be peeling strength 2A.

[面內延遲(RO)的測定] 關於面內延遲(RO),使用雙折射率計(光子晶格(Photonic-Lattice)公司製造,商品名:寬範圍(wide range)雙折射評價系統WPA-100,測定區域:MD:140 mm×TD:100 mm),求出既定樣本的面內方向的延遲。此外,入射角為0°,測定波長為543 nm。[Measurement of in-plane delay (RO)] Regarding the in-plane retardation (RO), a birefringence meter (manufactured by Photonic-Lattice), trade name: wide range birefringence evaluation system WPA-100, measurement area: MD: 140 mm× TD: 100 mm) to find the in-plane retardation of a given sample. In addition, the incident angle is 0°, and the measurement wavelength is 543 nm.

[拉伸模數的測定] 關於銅箔的拉伸模數,應用使用真空烘箱進行了與覆銅層疊板的處理步驟同等的熱處理的銅箔,使用東洋精機製作所股份有限公司製造的萬能試驗機(Strograph)R-1,在溫度23℃、相對濕度50%的環境下測定拉伸模數的值。[Determination of Tensile Modulus] Regarding the tensile modulus of the copper foil, the copper foil, which has been heat-treated in a vacuum oven with the same processing steps as the copper-clad laminate, is used, and the universal testing machine (Strograph) R-1 manufactured by Toyo Seiki Seisakusho Co., Ltd. is used. The tensile modulus is measured under an environment with a temperature of 23°C and a relative humidity of 50%.

實施例及比較例中所用的簡稱表示以下的化合物。 NTCDA:2,3,6,7-萘四羧酸二酐 BPDA:3,3',4,4'-聯苯四羧酸二酐 PMDA:均苯四甲酸二酐 m-TB:2,2'-二甲基-4,4'-二胺基聯苯 m-EOB:2,2'-二乙氧基-4,4'-二胺基聯苯 TPE-R:1,3-雙(4-胺基苯氧基)苯 DAPE:4,4'-二胺基二苯基醚 BAPP:2,2-雙[4-(4-胺基苯氧基)苯基]丙烷 DMAc:N,N-二甲基乙醯胺The abbreviations used in Examples and Comparative Examples indicate the following compounds. NTCDA: 2,3,6,7-naphthalenetetracarboxylic dianhydride BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride PMDA: Pyromellitic dianhydride m-TB: 2,2'-dimethyl-4,4'-diaminobiphenyl m-EOB: 2,2'-diethoxy-4,4'-diaminobiphenyl TPE-R: 1,3-bis(4-aminophenoxy)benzene DAPE: 4,4'-diaminodiphenyl ether BAPP: 2,2-bis[4-(4-aminophenoxy)phenyl]propane DMAc: N,N-Dimethylacetamide

(合成例1) 在氮氣流下,在反應槽中投入1146.4重量份的m-TB(5.4莫耳份)及175.4重量份的TPE-R(0.6莫耳份)以及聚合後的固體成分濃度成為15重量%的量的DMAc,在室溫下攪拌而加以溶解。然後,添加706.1重量份的BPDA(2.4莫耳份)及965.4重量份的NTCDA(3.6莫耳份)後,在室溫下繼續攪拌3小時而進行聚合反應,獲得聚醯胺酸溶液1。聚醯胺酸溶液1的溶液黏度為41,100 cps。(Synthesis example 1) Under nitrogen flow, put 1146.4 parts by weight of m-TB (5.4 mol parts) and 175.4 parts by weight of TPE-R (0.6 mol parts) into the reaction tank, and the solid content concentration after polymerization becomes 15% by weight. DMAc is dissolved by stirring at room temperature. Then, after adding 706.1 parts by weight of BPDA (2.4 mol parts) and 965.4 parts by weight of NTCDA (3.6 mol parts), stirring was continued for 3 hours at room temperature to perform polymerization reaction, and a polyamide acid solution 1 was obtained. The solution viscosity of polyamide acid solution 1 is 41,100 cps.

然後,以硬化後的厚度成為約25 μm的方式將聚醯胺酸溶液1均勻塗布在不銹鋼製支撐基材上後,在120℃下加熱乾燥而除去溶劑。進而,從120℃到360℃在30分鐘以內進行階段性的熱處理,完成醯亞胺化,製備聚醯亞胺膜1(聯苯四基及亞聯苯基:65莫耳%,非熱塑性,Tg:400℃以上,CTE:7.7 ppm/K)。Then, after the polyamide acid solution 1 was uniformly coated on the stainless steel support base material so that the thickness after curing became about 25 μm, it was heated and dried at 120° C. to remove the solvent. Furthermore, stepwise heat treatment was performed within 30 minutes from 120°C to 360°C to complete the imidization to prepare polyimide film 1 (biphenyltetrayl and biphenylene: 65 mol%, non-thermoplastic, Tg: above 400℃, CTE: 7.7 ppm/K).

(合成例2) 在氮氣流下,在反應槽中投入743.0重量份的m-TB(3.5莫耳份)及672.4重量份的TPE-R(2.3莫耳份)以及聚合後的固體成分濃度成為15重量%的量的DMAc,在室溫下攪拌而加以溶解。然後,添加353.1重量份的BPDA(1.2莫耳份)及1233.6重量份的NTCDA(4.6莫耳份)後,在室溫下繼續攪拌3小時而進行聚合反應,獲得聚醯胺酸溶液2。聚醯胺酸溶液2的溶液黏度為41,900 cps。(Synthesis example 2) Under nitrogen flow, 743.0 parts by weight of m-TB (3.5 mol parts) and 672.4 parts by weight of TPE-R (2.3 mol parts) were put into the reaction tank, and the solid content concentration after polymerization became 15% by weight. DMAc is dissolved by stirring at room temperature. Then, after adding 353.1 parts by weight of BPDA (1.2 mol parts) and 1233.6 parts by weight of NTCDA (4.6 mol parts), stirring was continued for 3 hours at room temperature to perform polymerization reaction, and a polyamide acid solution 2 was obtained. The solution viscosity of the polyamide acid solution 2 is 41,900 cps.

然後,以硬化後的厚度成為約25 μm的方式將聚醯胺酸溶液2均勻塗布在不銹鋼製支撐基材上後,在120℃下加熱乾燥而除去溶劑。進而,從120℃到360℃在30分鐘以內進行階段性的熱處理,完成醯亞胺化,製備聚醯亞胺膜2(聯苯四基及亞聯苯基:41莫耳%,非熱塑性,Tg:391℃,CTE:19.1 ppm/K)。Then, after the polyamide acid solution 2 was uniformly applied on the stainless steel support base material so that the thickness after curing became about 25 μm, it was heated and dried at 120° C. to remove the solvent. Furthermore, stepwise heat treatment was performed within 30 minutes from 120°C to 360°C to complete the imidization to prepare polyimide film 2 (biphenyltetrayl and biphenylene: 41 mol%, non-thermoplastic, Tg: 391°C, CTE: 19.1 ppm/K).

(合成例3) 在氮氣流下,在反應槽中投入1040.2重量份的m-TB(4.9莫耳份)及350.8重量份的TPE-R(1.2莫耳份)以及聚合後的固體成分濃度成為15重量%的量的DMAc,在室溫下攪拌而加以溶解。然後,添加529.6重量份的BPDA(1.8莫耳份)、643.6重量份的NTCDA(2.4莫耳份)及392.6重量份的PMDA(1.8莫耳份)後,在室溫下繼續攪拌3小時而進行聚合反應,獲得聚醯胺酸溶液3。聚醯胺酸溶液3的溶液黏度為32,500 cps。(Synthesis example 3) Under nitrogen flow, put 1040.2 parts by weight of m-TB (4.9 mole parts) and 350.8 parts by weight of TPE-R (1.2 mole parts) into the reaction tank, and the solid content concentration after polymerization becomes 15% by weight. DMAc is dissolved by stirring at room temperature. Then, 529.6 parts by weight of BPDA (1.8 mol parts), 643.6 parts by weight of NTCDA (2.4 mol parts), and 392.6 parts by weight of PMDA (1.8 mol parts) were added, followed by stirring at room temperature for 3 hours. Polymerization reaction, polyamide acid solution 3 is obtained. The solution viscosity of the polyamide acid solution 3 is 32,500 cps.

然後,以硬化後的厚度成為約25 μm的方式將聚醯胺酸溶液3均勻塗布在不銹鋼製支撐基材上後,在120℃下加熱乾燥而除去溶劑。進而,從120℃到360℃在30分鐘以內進行階段性的熱處理,完成醯亞胺化,製備聚醯亞胺膜3(聯苯四基及亞聯苯基:55莫耳%,非熱塑性,Tg:377℃,CTE:14.8 ppm/K)。Then, after the polyamide acid solution 3 was uniformly coated on the stainless steel support base material so that the thickness after curing became about 25 μm, it was heated and dried at 120° C. to remove the solvent. Furthermore, stepwise heat treatment was performed within 30 minutes from 120°C to 360°C to complete the imidization to prepare polyimide film 3 (biphenyltetrayl and biphenylene: 55 mol%, non-thermoplastic, Tg: 377°C, CTE: 14.8 ppm/K).

(合成例4) 在氮氣流下,在反應槽中投入552.0重量份的m-TB(2.6莫耳份)及760.9重量份的DAPE(3.8莫耳份)以及聚合後的固體成分濃度成為15重量%的量的DMAc,在室溫下攪拌而加以溶解。然後,添加1716.3重量份的NTCDA(6.4莫耳份)後,在室溫下繼續攪拌3小時而進行聚合反應,獲得聚醯胺酸溶液4。聚醯胺酸溶液4的溶液黏度為42,300 cps。(Synthesis example 4) Under a nitrogen flow, 552.0 parts by weight of m-TB (2.6 mol parts) and 760.9 parts by weight of DAPE (3.8 mol parts) and DMAc in an amount such that the solid content concentration after polymerization becomes 15% by weight are put into the reaction tank, Stir at room temperature to dissolve. Then, after adding 1716.3 parts by weight of NTCDA (6.4 parts by mole), stirring was continued for 3 hours at room temperature to proceed the polymerization reaction, and a polyamide acid solution 4 was obtained. The solution viscosity of the polyamide acid solution 4 is 42,300 cps.

然後,以硬化後的厚度成為約25 μm的方式將聚醯胺酸溶液4均勻塗布在不銹鋼製支撐基材上後,在120℃下加熱乾燥而除去溶劑。進而,從120℃到360℃在30分鐘以內進行階段性的熱處理,完成醯亞胺化,製備聚醯亞胺膜4(亞聯苯基:20莫耳%,非熱塑性,Tg:400℃以上,CTE:32.1 ppm/K)。Then, after the polyamide acid solution 4 was uniformly coated on the stainless steel support base material so that the thickness after curing became about 25 μm, it was heated and dried at 120° C. to remove the solvent. Furthermore, stepwise heat treatment was performed within 30 minutes from 120°C to 360°C to complete the imidization to prepare polyimide film 4 (biphenylene: 20 mol%, non-thermoplastic, Tg: 400°C or higher , CTE: 32.1 ppm/K).

(合成例5) 在氮氣流下,在反應槽中投入898.7重量份的m-EOB(3.3莫耳份)及660.8重量份的DAPE(3.3莫耳份)以及聚合後的固體成分濃度成為15重量%的量的DMAc,在室溫下攪拌而加以溶解。然後,添加1439.6重量份的PMDA(6.6莫耳份)後,在室溫下繼續攪拌3小時而進行聚合反應,獲得聚醯胺酸溶液5。聚醯胺酸溶液5的溶液黏度為31,700 cps。(Synthesis example 5) Under a nitrogen stream, 898.7 parts by weight of m-EOB (3.3 mol parts) and 660.8 parts by weight of DAPE (3.3 mol parts) and DMAc in an amount such that the solid content concentration after polymerization becomes 15% by weight are put into the reaction tank, Stir at room temperature to dissolve. Then, after adding 1439.6 parts by weight of PMDA (6.6 mol parts), stirring was continued for 3 hours at room temperature to perform a polymerization reaction, and a polyamide acid solution 5 was obtained. The solution viscosity of the polyamide acid solution 5 was 31,700 cps.

然後,以硬化後的厚度成為約25 μm的方式將聚醯胺酸溶液5均勻塗布在不銹鋼製支撐基材上後,在120℃下加熱乾燥而除去溶劑。進而,從120℃到360℃在30分鐘以內進行階段性的熱處理,完成醯亞胺化,製備聚醯亞胺膜5(亞聯苯基:25莫耳%,非熱塑性,Tg:376℃,CTE:33.5 ppm/K)。Then, after the polyamide acid solution 5 was uniformly coated on the stainless steel support base material so that the thickness after curing became about 25 μm, it was heated and dried at 120° C. to remove the solvent. Furthermore, stepwise heat treatment was performed within 30 minutes from 120°C to 360°C to complete the imidization to prepare polyimide film 5 (biphenylene: 25 mol%, non-thermoplastic, Tg: 376°C, CTE: 33.5 ppm/K).

(合成例6) 在氮氣流下,在反應槽中投入63.7重量份的m-TB(0.3莫耳份)及1490.9重量份的TPE-R(5.1莫耳份)以及聚合後的固體成分濃度成為15重量%的量的DMAc,在室溫下攪拌而加以溶解。然後,添加1118.0重量份的BPDA(3.8莫耳份)及349.0重量份的PMDA(1.6莫耳份)後,在室溫下繼續攪拌3小時而進行聚合反應,獲得聚醯胺酸溶液6。聚醯胺酸溶液6的溶液黏度為6,700 cps,重量平均分子量為163,400。(Synthesis example 6) Under nitrogen flow, 63.7 parts by weight of m-TB (0.3 parts by mole) and 1490.9 parts by weight of TPE-R (5.1 parts by mole) are put into the reaction tank, and the solid content concentration after polymerization becomes 15% by weight. DMAc is dissolved by stirring at room temperature. Then, after adding 1118.0 parts by weight of BPDA (3.8 mol parts) and 349.0 parts by weight of PMDA (1.6 mol parts), stirring was continued for 3 hours at room temperature to perform polymerization reaction, and a polyamide acid solution 6 was obtained. The solution viscosity of the polyamide acid solution 6 was 6,700 cps, and the weight average molecular weight was 163,400.

然後,以硬化後的厚度成為約25 μm的方式將聚醯胺酸溶液6均勻塗布在不銹鋼製的支撐基材上後,在120℃下加熱乾燥而除去溶劑。進而,從120℃到360℃在30分鐘以內進行階段性的熱處理,完成醯亞胺化,製備聚醯亞胺膜6(聯苯四基及亞聯苯基:38莫耳%,熱塑性,Tg:242℃,30℃的儲存模數:4.3×109 Pa,360℃的儲存模數:1.4×107 Pa)。Then, after the polyamide acid solution 6 was uniformly coated on a stainless steel support base material so that the thickness after curing became about 25 μm, it was heated and dried at 120° C. to remove the solvent. Furthermore, stepwise heat treatment was performed within 30 minutes from 120°C to 360°C to complete the imidization to prepare polyimide film 6 (biphenyltetrayl and biphenylene: 38 mol%, thermoplastic, Tg : 242℃, 30℃ storage modulus: 4.3×10 9 Pa, 360℃ storage modulus: 1.4×10 7 Pa).

(合成例7) 在氮氣流下,在反應槽中投入743.0重量份的m-TB(3.5莫耳份)及672.4重量份的TPE-R(2.3莫耳份)以及聚合後的固體成分濃度成為15重量%的量的DMAc,在室溫下攪拌而加以溶解。然後,添加1206.3重量份的BPDA(4.1莫耳份)及370.8重量份的PMDA(1.7莫耳份)後,在室溫下繼續攪拌3小時而進行聚合反應,獲得聚醯胺酸溶液7。聚醯胺酸溶液7的溶液黏度為7,200 cps,重量平均分子量為112,000。(Synthesis example 7) Under nitrogen flow, 743.0 parts by weight of m-TB (3.5 mol parts) and 672.4 parts by weight of TPE-R (2.3 mol parts) were put into the reaction tank, and the solid content concentration after polymerization became 15% by weight. DMAc is dissolved by stirring at room temperature. Then, after adding 1206.3 parts by weight of BPDA (4.1 mol parts) and 370.8 parts by weight of PMDA (1.7 mol parts), stirring was continued for 3 hours at room temperature to perform a polymerization reaction, and a polyamide acid solution 7 was obtained. The solution viscosity of the polyamide acid solution 7 was 7,200 cps, and the weight average molecular weight was 112,000.

然後,以硬化後的厚度成為約25 μm的方式將聚醯胺酸溶液7均勻塗布在不銹鋼製支撐基材上後,在120℃下加熱乾燥而除去溶劑。進而,從120℃到360℃在30分鐘以內進行階段性的熱處理,完成醯亞胺化,製備聚醯亞胺膜7(聯苯四基及亞聯苯基:66莫耳%,熱塑性,Tg:266℃,30℃的儲存模數:4.3×109 Pa,360℃的儲存模數:7.1×107 Pa)。Then, after the polyamide acid solution 7 was uniformly coated on the stainless steel support base material so that the thickness after curing became about 25 μm, it was heated and dried at 120° C. to remove the solvent. Furthermore, stepwise heat treatment was performed within 30 minutes from 120°C to 360°C to complete the imidization to prepare polyimide film 7 (biphenyltetrayl and biphenylene: 66 mol%, thermoplasticity, Tg : 266℃, 30℃ storage modulus: 4.3×10 9 Pa, 360℃ storage modulus: 7.1×10 7 Pa).

(合成例8) 在氮氣流下,在反應槽中投入233.5重量份的m-TB(1.1莫耳份)及1344.7重量份的TPE-R(4.6莫耳份)以及聚合後的固體成分濃度成為15重量%的量的DMAc,在室溫下攪拌而加以溶解。然後,添加676.7重量份的BPDA(2.3莫耳份)及741.6重量份的PMDA(3.4莫耳份)後,在室溫下繼續攪拌3小時而進行聚合反應,獲得聚醯胺酸溶液8。聚醯胺酸溶液8的溶液黏度為7,400 cps,重量平均分子量為163,400。(Synthesis example 8) Under nitrogen flow, put 233.5 parts by weight of m-TB (1.1 mol parts) and 1344.7 parts by weight of TPE-R (4.6 mol parts) into the reaction tank, and the solid content concentration after polymerization becomes 15% by weight. DMAc is dissolved by stirring at room temperature. Then, after adding 676.7 parts by weight of BPDA (2.3 mol parts) and 741.6 parts by weight of PMDA (3.4 mol parts), stirring was continued for 3 hours at room temperature to perform a polymerization reaction, and a polyamide acid solution 8 was obtained. The solution viscosity of the polyamide acid solution 8 was 7,400 cps, and the weight average molecular weight was 163,400.

然後,以硬化後的厚度成為約25 μm的方式將聚醯胺酸溶液8均勻塗布在不銹鋼製支撐基材上後,在120℃下加熱乾燥而除去溶劑。進而,從120℃到360℃在30分鐘以內進行階段性的熱處理,完成醯亞胺化,製備聚醯亞胺膜8(聯苯四基及亞聯苯基為30莫耳%,熱塑性,Tg:279℃,30℃的儲存模數:4.1×109 Pa,360℃的儲存模數:7.9×107 Pa)。Then, after the polyamide acid solution 8 was uniformly coated on the stainless steel support base material so that the thickness after curing became about 25 μm, it was heated and dried at 120° C. to remove the solvent. Furthermore, stepwise heat treatment was carried out within 30 minutes from 120°C to 360°C to complete the imidization to prepare polyimide film 8 (biphenyltetrayl and biphenylene is 30 mol%, thermoplasticity, Tg : 279℃, 30℃ storage modulus: 4.1×10 9 Pa, 360℃ storage modulus: 7.9×10 7 Pa).

[實施例1-1] 在環形帶狀的不銹鋼製支撐基材上,使用多歧管(multimanifold)式的三層共擠出多層模頭,以聚醯胺酸溶液7/聚醯胺酸溶液1/聚醯胺酸溶液7的順序的三層結構連續地擠出塗布,在130℃下加熱乾燥3分鐘而除去溶劑。然後,從130℃到360℃進行階段性的熱處理,完成醯亞胺化,製備熱塑性聚醯亞胺層/非熱塑性聚醯亞胺層/熱塑性聚醯亞胺層的厚度分別為2.5 μm/20 μm/2.5 μm的聚醯亞胺膜1a'。利用刀鋒法將支撐基材上的聚醯亞胺膜1a'剝離,製備寬度方向的長度為1100 mm的長條狀聚醯亞胺膜1a。[Example 1-1] A multi-manifold type three-layer co-extrusion multi-layer die is used on an endless belt-shaped stainless steel support substrate, with polyamide acid solution 7/polyamide acid solution 1/polyamide acid solution The sequential three-layer structure of 7 was extrusion coated continuously, and the solvent was removed by heating and drying at 130°C for 3 minutes. Then, heat treatment stepwise from 130°C to 360°C to complete the imidization, and the thickness of the thermoplastic polyimide layer/non-thermoplastic polyimide layer/thermoplastic polyimide layer is 2.5 μm/20, respectively. μm/2.5 μm polyimide film 1a'. The polyimide film 1a' on the supporting substrate was peeled off by the knife edge method to prepare a long polyimide film 1a with a length of 1100 mm in the width direction.

<面內延遲(RO)評價用樣本的製備> 將長條狀聚醯亞胺膜1a的TD方向的左右兩個端部(左側(Left)及右側(Right))以及中央部(Center)分別以A4尺寸(TD:210 mm×MD:297 mm)切斷,製備樣本L1(Left)、樣本R1(Right)及樣本C1(Center)。<Preparation of samples for in-plane delay (RO) evaluation> The left and right ends (Left and Right) and the center of the long polyimide film 1a in the TD direction are respectively A4 size (TD: 210 mm × MD: 297 mm) ) Cut off and prepare sample L1 (Left), sample R1 (Right) and sample C1 (Center).

<面內延遲(RO)的評價> 對樣本L1、樣本R1及樣本C1各自分別測定面內延遲(RO)。將各樣本的測定值的最大值作為「面內延遲(RO)」,將面內延遲(RO)的測定值中的最大值與最小值之差作為「寬度方向(TD方向)的面內延遲(RO)的不均一性(ΔRO)」。另外,「在溫度360℃的環境下以壓力340 MPa/m2 、保持時間15分鐘加壓前後的面內延遲(RO)的變化量」是設定為樣本C1的加壓前及加壓後的各面內延遲(RO)的測定值中的最大值之差。 此外,各樣本中的測定區域如下。 樣本L1:TD方向的左側端部區域及MD方向的中央區域 樣本R1:TD方向的右側端部區域及MD方向的中央區域 樣本C1:TD方向及MD方向的中央區域<Evaluation of in-plane retardation (RO)> The in-plane retardation (RO) was measured for each of sample L1, sample R1, and sample C1. The maximum value of the measured value of each sample is regarded as the "in-plane retardation (RO)", and the difference between the maximum and the minimum of the measured values of the in-plane retardation (RO) is regarded as the "in-plane retardation in the width direction (TD direction)" The heterogeneity of (RO) (ΔRO)”. In addition, "The amount of change in the in-plane retardation (RO) before and after pressurization at a temperature of 360°C at a pressure of 340 MPa/m 2 and a holding time of 15 minutes" is set as the sample C1 before and after pressurization The difference between the maximum value of the measured values of the in-plane retardation (RO). In addition, the measurement area in each sample is as follows. Sample L1: Left end area in TD direction and central area in MD direction Sample R1: Right end area in TD direction and central area in MD direction Sample C1: Central area in TD direction and MD direction

長條狀聚醯亞胺膜1a的評價結果如下。 CTE:17 ppm/K 面內延遲(RO):11 nm 寬度方向(TD方向)的面內延遲(RO)的不均一性(ΔRO):1 nm 在溫度360℃的環境下以壓力340 MPa/m2 、保持時間15分鐘加壓前後的面內延遲(RO)的變化量:3 nmThe evaluation results of the long polyimide film 1a are as follows. CTE: 17 ppm/K In-plane retardation (RO): 11 nm In-plane retardation (RO) non-uniformity (ΔRO) in the width direction (TD direction): 1 nm at a pressure of 340 MPa/ m 2 , hold time 15 minutes, the amount of change in the in-plane retardation (RO) before and after pressurization: 3 nm

[實施例1-2] 除了將寬度方向(TD方向)的長度設為540 mm以外,與實施例1-1同樣地製備長條狀聚醯亞胺膜1b。[Example 1-2] Except that the length in the width direction (TD direction) was 540 mm, a long polyimide film 1b was prepared in the same manner as in Example 1-1.

長條狀聚醯亞胺膜1b的評價結果如下。 CTE:17 ppm/K 面內延遲(RO):11 nm 寬度方向(TD方向)的面內延遲(RO)的不均一性(ΔRO):1 nm 在溫度360℃的環境下以壓力340 MPa/m2 、保持時間15分鐘加壓前後的面內延遲(RO)的變化量:3 nmThe evaluation results of the long polyimide film 1b are as follows. CTE: 17 ppm/K In-plane retardation (RO): 11 nm In-plane retardation (RO) non-uniformity (ΔRO) in the width direction (TD direction): 1 nm at a pressure of 340 MPa/ m 2 , hold time 15 minutes, the amount of change in the in-plane retardation (RO) before and after pressurization: 3 nm

[實施例1-3] 在長條狀的銅箔1(壓延銅箔,JX金屬股份有限公司製造,商品名:GHY5-93F-HA-V2箔,厚度:12 μm,熱處理後的拉伸模數:18 GPa,寬度方向的長度:540 mm)的表面上,以硬化後的厚度成為2.5 μm的方式均勻塗布聚醯胺酸溶液7後,在120℃下加熱乾燥1分鐘而除去溶劑。在其上以硬化後的厚度成為20 μm的方式均勻塗布聚醯胺酸溶液1後,在120℃下加熱乾燥3分鐘而除去溶劑。進而,在其上以硬化後的厚度成為2.5 μm的方式均勻塗布聚醯胺酸7後,在120℃下加熱乾燥1分鐘而除去溶劑。然後,從130℃到360℃進行階段性的熱處理,完成醯亞胺化後,製備單面覆銅層疊板1a。[Example 1-3] In a long strip of copper foil 1 (rolled copper foil, manufactured by JX Metal Co., Ltd., trade name: GHY5-93F-HA-V2 foil, thickness: 12 μm, tensile modulus after heat treatment: 18 GPa, width direction (Length: 540 mm), uniformly apply polyamide acid solution 7 so that the cured thickness becomes 2.5 μm, and heat and dry at 120°C for 1 minute to remove the solvent. After the polyamide acid solution 1 was uniformly applied thereon so that the thickness after curing became 20 μm, it was heated and dried at 120° C. for 3 minutes to remove the solvent. Furthermore, after the polyamide 7 was uniformly coated thereon so that the thickness after curing became 2.5 μm, it was heated and dried at 120° C. for 1 minute to remove the solvent. Then, heat treatment is performed stepwise from 130°C to 360°C to complete the imidization, and then a single-sided copper-clad laminate 1a is prepared.

對單面覆銅層疊板1a的銅箔進行蝕刻除去而製備的長條狀聚醯亞胺膜的評價結果如下。 CTE:17 ppm/K 面內延遲(RO):11 nm 寬度方向(TD方向)的面內延遲(RO)的不均一性(ΔRO):1 nmThe evaluation results of the elongated polyimide film prepared by etching and removing the copper foil of the single-sided copper-clad laminate 1a are as follows. CTE: 17 ppm/K In-plane retardation (RO): 11 nm In-plane retardation (RO) non-uniformity (ΔRO) in the width direction (TD direction): 1 nm

在所述單面覆銅層疊板1a的聚醯亞胺層側重合銅箔1,在溫度360℃、壓力340 MPa/m2 的條件下熱壓接15分鐘,製備雙面覆銅層疊板1a。對雙面覆銅層疊板1a的銅箔進行蝕刻除去而製備的長條狀聚醯亞胺膜的面內延遲(RO)為8 nm。The copper foil 1 is superimposed on the polyimide layer side of the single-sided copper clad laminate 1a, and thermal compression bonding is performed at a temperature of 360° C. and a pressure of 340 MPa/m 2 for 15 minutes to prepare a double-sided copper clad laminate 1a . The in-plane retardation (RO) of the long polyimide film prepared by etching and removing the copper foil of the double-sided copper-clad laminate 1a was 8 nm.

對所製備的雙面覆銅層疊板1a的中央部進行切割加工,準備長條狀的覆銅層疊板1a'(端寬:250 mm)作為尺寸穩定性的評價用樣本的材料。The central portion of the prepared double-sided copper-clad laminate 1a was cut to prepare an elongated copper-clad laminate 1a' (end width: 250 mm) as a material for a sample for evaluation of dimensional stability.

<尺寸穩定性的評價用樣本的製備> 將所述覆銅層疊板1a'在MD方向上以長度250 mm切斷,製成MD:250 mm×TD:250 mm。像圖6所示那樣,在切斷後的覆銅層疊板的MD:200 mm×TD:200 mm的範圍內設想假想正四邊形。在該假想正四邊形的逐一包含共有TD方向一邊的兩個角部的左右兩個角落區域(Left及Right)以及包含假想正四邊形的中心的中央區域(Center)中,分別在MD及TD方向上以2.5 mm的間隔連續地進行21個開孔加工,製備評價用樣本。此外,開孔加工使用直徑0.105 mm的鑽頭(drill)。<Preparation of samples for evaluation of dimensional stability> The copper-clad laminate 1a' was cut in the MD direction with a length of 250 mm to produce MD: 250 mm×TD: 250 mm. As shown in FIG. 6, a virtual regular quadrilateral is assumed in the range of MD: 200 mm×TD: 200 mm of the cut copper clad laminate. The left and right corner areas (Left and Right) of the imaginary regular quadrilateral that each include two corners sharing one side in the TD direction and the center area (Center) that includes the center of the imaginary regular quadrilateral are in the MD and TD directions, respectively 21 holes were continuously drilled at intervals of 2.5 mm to prepare samples for evaluation. In addition, drills with a diameter of 0.105 mm are used for drilling.

<尺寸穩定性的評價> 使用非接觸電腦數控(Computer Numerical Control,CNC)圖像測定機(三豐(Mitutoyo)公司製造,商品名:快速視像(Quick Vision)QV-X404PIL-C),對將評價用樣本的兩面的銅箔層全部蝕刻而除去前後的各孔的位置進行測定。根據測定值算出蝕刻前後的相鄰兩孔間距離的尺寸變化量及累計尺寸變化量。<Evaluation of dimensional stability> Using a non-contact Computer Numerical Control (CNC) image measuring machine (manufactured by Mitutoyo, trade name: Quick Vision QV-X404PIL-C), the evaluation of both sides of the sample All the copper foil layers were etched and the positions of the holes before and after removal were measured. Calculate the dimensional change and the cumulative dimensional change of the distance between two adjacent holes before and after etching based on the measured value.

準備長條狀的覆銅層疊板1a',像圖7所示那樣製備評價用樣本1、評價用樣本2。對評價用樣本1、評價用樣本2分別測定Center、Left及Right的蝕刻前後的各孔的位置。根據測定值算出蝕刻前後的相鄰兩孔間的距離的尺寸變化量及這些的合計(20處)的累計尺寸變化量。An elongated copper-clad laminated board 1a' is prepared, and a sample for evaluation 1 and a sample for evaluation 2 are prepared as shown in FIG. 7. The position of each hole before and after the etching of Center, Left, and Right was measured for the sample 1 for evaluation 1 and the sample 2 for evaluation, respectively. From the measured value, the dimensional change of the distance between two adjacent holes before and after the etching and the cumulative dimensional change of the total (20 locations) of these were calculated.

根據覆銅層疊板1a'的評價結果,將MD的累計尺寸變化量及不均一性示於表1中。此外,表1中,以Left、Center、Right的累計尺寸變化率以及將累計尺寸變化量換算成設想FPC尺寸10 mm的累計換算尺寸變化量來表示,也示出Left、Center、Right的整個範圍的不均一性。此外,「累計尺寸變化率」是指累計尺寸變化量相對於蝕刻前的兩孔間距離的合計值的比率(%)。另外,表中的「範圍」的數值是指Left、Center、Right的整個範圍的中央值±上下範圍(表2、表3中相同)。Based on the evaluation results of the copper-clad laminate 1a', the cumulative dimensional change amount and unevenness of MD are shown in Table 1. In addition, in Table 1, the cumulative dimensional change rate of Left, Center, Right and the cumulative dimensional change converted to the assumed FPC size of 10 mm are shown, and the entire range of Left, Center, and Right is also shown. The inhomogeneity. In addition, the "cumulative dimensional change rate" refers to the ratio (%) of the cumulative dimensional change to the total value of the distance between the two holes before etching. In addition, the numerical value of the "range" in the table refers to the central value of the entire range of Left, Center, and Right ± the upper and lower ranges (the same in Table 2 and Table 3).

[表1]   覆銅層疊板1a' 左側(Left) 中央(Center) 右側(Right) 範圍 FPC尺寸 % mm % mm % mm % 10 mm 6.2 0.00305 5.5 0.00275 7.2 0.00360 6.3±1.6 [Table 1] Copper clad laminate 1a' Left Center Right scope FPC size % mm % mm % mm % 10 mm 6.2 0.00305 5.5 0.00275 7.2 0.00360 6.3±1.6

根據該結果,確認到可對將覆銅層疊板1a'作為材料而形成的電路佈線基板(L/S=0.025 mm/0.0025 mm)評價佈線的位移比率及試片面內的尺寸變化率的不均一性,並且可確認實施例1-3的雙面覆銅層疊板1a的各FPC尺寸時的佈線的位移比率的不均一性小。另外可確認,為了實現僅控制聚醯亞胺膜的CTE的情況下無法達成的覆銅層疊板的高的尺寸穩定精度,重要的是控制面內延遲。Based on the results, it was confirmed that the circuit wiring board (L/S=0.025 mm/0.0025 mm) formed by using the copper clad laminate 1a' as a material can evaluate the unevenness of the displacement ratio of the wiring and the dimensional change rate in the surface of the test piece. It was confirmed that the double-sided copper-clad laminate 1a of Example 1-3 had a small unevenness in the displacement ratio of the wiring at each FPC size. In addition, it can be confirmed that in order to achieve high dimensional stability accuracy of the copper clad laminate that cannot be achieved when only controlling the CTE of the polyimide film, it is important to control the in-plane retardation.

[實施例1-4] 在實施例1-2中製備的長條狀聚醯亞胺膜1b的兩面上重合銅箔1,以溫度360℃、壓力340 MPa/m2 的條件熱壓接15分鐘,製備雙面覆銅層疊板1b,與實施例1-3同樣地準備長條狀的覆銅層疊板1b'(端寬:250 mm),進行尺寸穩定性的評價。將其結果示於表2中。[Example 1-4] The long polyimide film 1b prepared in Example 1-2 was superimposed on both sides of the copper foil 1, and thermocompression-bonded 15 under the conditions of a temperature of 360°C and a pressure of 340 MPa/m 2 Minutes, a double-sided copper-clad laminate 1b was prepared, and a long copper-clad laminate 1b' (end width: 250 mm) was prepared in the same manner as in Example 1-3, and the dimensional stability was evaluated. The results are shown in Table 2.

[表2]   覆銅層疊板1b' 左側(Left) 中央(Center) 右側(Right) 範圍 FPC尺寸 % mm % mm % Mm % 10 mm 6.0 0.00300 5.2 0.00265 7.1 0.00353 6.0±1.8 [Table 2] Copper clad laminate 1b' Left Center Right scope FPC size % mm % mm % Mm % 10 mm 6.0 0.00300 5.2 0.00265 7.1 0.00353 6.0±1.8

[比較例1-1] 準備長條狀聚醯亞胺膜1c(厚度:25 μm,鐘淵(Kaneka)公司製造,商品名:皮克斯奧(Pixeo))。 長條狀聚醯亞胺膜1c的評價結果如下。 CTE:17 ppm/K 面內延遲(RO):200 nm 寬度方向(TD方向)的面內延遲(RO)的不均一性(ΔRO):80 nm 在溫度360℃的環境下以壓力340 MPa/m2 、保持時間15分鐘加壓前後的面內延遲(RO)的變化量:30 nm[Comparative Example 1-1] A long polyimide film 1c (thickness: 25 μm, manufactured by Kaneka, trade name: Pixeo) was prepared. The evaluation results of the long polyimide film 1c are as follows. CTE: 17 ppm/K In-plane retardation (RO): 200 nm In-plane retardation (RO) non-uniformity (ΔRO) in the width direction (TD direction): 80 nm at a temperature of 360°C at a pressure of 340 MPa/ m 2 , hold time 15 minutes, the amount of change in the in-plane retardation (RO) before and after pressurization: 30 nm

[比較例1-2] 在長條狀聚醯亞胺膜1c的兩面上重合銅箔1,以溫度360℃、壓力340 MPa/m2 的條件熱壓接15分鐘,製備雙面覆銅層疊板1c,與實施例1-3同樣地製備長條狀的覆銅層疊板1c'(端寬:250 mm),進行尺寸穩定性的評價。將其結果示於表3中。[Comparative Example 1-2] Copper foil 1 was laminated on both sides of a long polyimide film 1c, and thermocompression bonding was performed at a temperature of 360°C and a pressure of 340 MPa/m 2 for 15 minutes to prepare a double-sided copper-clad laminate For the board 1c, a long copper-clad laminate 1c' (end width: 250 mm) was prepared in the same manner as in Example 1-3, and the dimensional stability was evaluated. The results are shown in Table 3.

[表3] 覆銅層疊板1c'   左側(Left) 中央(Center) 右側(Right) 範圍 FPC尺寸 % mm % mm % mm % 10 mm -0.8 -0.00042 -3.2 -0.00159 -4.2 -0.00212 -5.3±5.1 [table 3] Copper clad laminate 1c' Left Center Right scope FPC size % mm % mm % mm % 10 mm -0.8 -0.00042 -3.2 -0.00159 -4.2 -0.00212 -5.3±5.1

[實施例2-1] 除了聚醯胺酸溶液8/聚醯胺酸溶液1/聚醯胺酸溶液8的順序的三層結構以外,與實施例1-1同樣地製備寬度方向的長度為1100 mm的長條狀聚醯亞胺膜2。 長條狀聚醯亞胺膜2的評價結果如下。 CTE:17 ppm/K 面內延遲(RO):11 nm 寬度方向(TD方向)的面內延遲(RO)的不均一性(ΔRO):1 nm 在溫度360℃的環境下以壓力340 MPa/m2 、保持時間15分鐘加壓前後的面內延遲(RO)的變化量:5 nm[Example 2-1] The length in the width direction was prepared in the same manner as in Example 1-1, except that the three-layer structure of the sequence of polyamide acid solution 8/polyamide acid solution 1 and polyamide acid solution 8 was 1100 mm long polyimide film 2. The evaluation results of the long polyimide film 2 are as follows. CTE: 17 ppm/K In-plane retardation (RO): 11 nm In-plane retardation (RO) non-uniformity (ΔRO) in the width direction (TD direction): 1 nm at a pressure of 340 MPa/ m 2 , hold time 15 minutes, the amount of change in the in-plane retardation (RO) before and after pressurization: 5 nm

[實施例3-1] 除了聚醯胺酸溶液6/聚醯胺酸溶液2/聚醯胺酸溶液6的順序的三層結構以外,與實施例1-1同樣地製備寬度方向的長度為1100 mm的長條狀聚醯亞胺膜3。 長條狀聚醯亞胺膜3的評價結果如下。 CTE:17 ppm/K 面內延遲(RO):17 nm 寬度方向(TD方向)的面內延遲(RO)的不均一性(ΔRO):3 nm 在溫度360℃的環境下以壓力340 MPa/m2 、保持時間15分鐘加壓前後的面內延遲(RO)的變化量:7 nm[Example 3-1] Except for the sequential three-layer structure of polyamide acid solution 6/polyamide acid solution 2 and polyamide acid solution 6, the length in the width direction was prepared in the same manner as in Example 1-1. 1100 mm long polyimide film 3. The evaluation results of the long polyimide film 3 are as follows. CTE: 17 ppm/K In-plane retardation (RO): 17 nm In-plane retardation (RO) non-uniformity (ΔRO) in the width direction (TD direction): 3 nm at a pressure of 340 MPa/ m 2 , hold time 15 minutes, the amount of change in the in-plane retardation (RO) before and after pressurization: 7 nm

[實施例4-1] 除了聚醯胺酸溶液8/聚醯胺酸溶液3/聚醯胺酸溶液8的順序的三層結構以外,與實施例1-1同樣地製備寬度方向的長度為1100 mm的長條狀聚醯亞胺膜4。 長條狀聚醯亞胺膜4的評價結果如下。 CTE:17 ppm/K 面內延遲(RO):15 nm 寬度方向(TD方向)的面內延遲(RO)的不均一性(ΔRO):2 nm 在溫度360℃的環境下以壓力340 MPa/m2 、保持時間15分鐘加壓前後的面內延遲(RO)的變化量:10 nm[Example 4-1] Except for the sequential three-layer structure of polyamide acid solution 8/polyamide acid solution 3/polyamide acid solution 8, the length in the width direction was prepared in the same manner as in Example 1-1. 1100 mm long polyimide film4. The evaluation results of the long polyimide film 4 are as follows. CTE: 17 ppm/K In-plane retardation (RO): 15 nm In-plane retardation (RO) non-uniformity (ΔRO) in the width direction (TD direction): 2 nm at a temperature of 360°C at a pressure of 340 MPa/ m 2 , hold time 15 minutes, the amount of change in the in-plane retardation (RO) before and after pressurization: 10 nm

以上,以例示為目的對本發明的實施形態進行了詳細說明,但本發明不受所述實施形態的限制,可進行各種變形。As mentioned above, the embodiment of the present invention has been described in detail for the purpose of illustration, but the present invention is not limited to the embodiment described above, and various modifications can be made.

本申請案主張基於2016年4月27日提出申請的日本專利申請案2016-89514號的優先權,將該申請案的所有內容引用至本文中。This application claims priority based on Japanese Patent Application No. 2016-89514 filed on April 27, 2016, and all the contents of this application are incorporated herein.

10:試片 20:假想正四邊形 20a:中心 20b:角部 21:中心區域 23a、23b:角落區域 30:孔 30a:孔30的中心 100:覆銅層疊板 L0、L1:距離 MD、TD:方向 Δ1 、Δ1 +Δ2 :尺寸變化量10: Test piece 20: imaginary regular quadrilateral 20a: center 20b: corner 21: central area 23a, 23b: corner area 30: hole 30a: center of hole 30 100: copper clad laminate L0, L1: distance MD, TD: Direction Δ 1 , Δ 1 +Δ 2 : Dimensional change

圖1為表示對本發明的一實施形態的覆銅層疊板的尺寸穩定性進行評價的評價方法中所用的覆銅層疊板與試片的概略構成的立體圖。 圖2為對試片中的標記位置進行說明的圖式。 圖3為試片的中心區域的局部放大圖。 圖4為試片的角落區域的局部放大圖。 圖5為對孔與孔的間隔的尺寸變化量進行說明的圖式。 圖6為供說明實施例的評價樣本的圖式。 圖7為供說明實施例的評價樣本的製備的圖式。Fig. 1 is a perspective view showing a schematic configuration of a copper-clad laminate and a test piece used in an evaluation method for evaluating the dimensional stability of a copper-clad laminate according to an embodiment of the present invention. Fig. 2 is a diagram for explaining the position of the mark in the test piece. Fig. 3 is a partial enlarged view of the central area of the test piece. Fig. 4 is a partial enlarged view of the corner area of the test piece. Fig. 5 is a diagram for explaining the dimensional change amount of the gap between the holes. Fig. 6 is a diagram for explaining the evaluation sample of the embodiment. Fig. 7 is a diagram for explaining the preparation of an evaluation sample of an embodiment.

Claims (10)

一種聚醯亞胺膜,在包含非熱塑性聚醯亞胺的非熱塑性聚醯亞胺層的至少一側具有包含熱塑性聚醯亞胺的長條的熱塑性聚醯亞胺層,並且 所述聚醯亞胺膜的膜寬為490 mm以上且1100 mm以下的範圍內並且所述聚醯亞胺膜滿足下述條件(i)~條件(iv): (i)熱膨脹係數為10 ppm/K~30 ppm/K的範圍內; (ii)所述熱塑性聚醯亞胺的玻璃轉移溫度為200℃以上且350℃以下的範圍內; (iii)面內延遲的值為5 nm以上且50 nm以下的範圍內; (iv)寬度方向的面內延遲的不均一性為10 nm以下。A polyimide film having a long thermoplastic polyimide layer containing a thermoplastic polyimide on at least one side of a non-thermoplastic polyimide layer containing a non-thermoplastic polyimide, and The film width of the polyimide film is in the range of 490 mm or more and 1100 mm or less, and the polyimide film satisfies the following conditions (i) to (iv): (I) The coefficient of thermal expansion is within the range of 10 ppm/K to 30 ppm/K; (Ii) The glass transition temperature of the thermoplastic polyimide is within the range of 200°C or more and 350°C or less; (Iii) The value of the in-plane retardation is within the range of 5 nm or more and 50 nm or less; (Iv) The non-uniformity of the in-plane retardation in the width direction is 10 nm or less. 如請求項1所述的聚醯亞胺膜,其中, 除了所述(i)~(iv)的條件以外,進一步滿足: (v)在溫度360℃的環境下以壓力340 MPa/m2 、保持時間15分鐘加壓前後的面內延遲的變化量為20 nm以下。The polyimide film according to claim 1, wherein, in addition to the conditions (i) to (iv), it further satisfies: (v) a pressure of 340 MPa/m 2 in an environment with a temperature of 360°C, The amount of change in the in-plane retardation before and after pressure is 20 nm or less when the holding time is 15 minutes. 如請求項1或請求項2所述的聚醯亞胺膜,其中, 除了所述(i)~(iv)的條件以外,進一步滿足: (vi)所述非熱塑性聚醯亞胺含有四羧酸殘基及二胺殘基,所述四羧酸殘基及二胺殘基均為芳香族基,所述芳香族基包含聯苯四基或亞聯苯基,並且相對於所述四羧酸殘基及二胺殘基的合計100莫耳份,所述聯苯四基或亞聯苯基為40莫耳份以上。The polyimide film according to claim 1 or 2, wherein In addition to the conditions of (i) to (iv), further satisfy: (Vi) The non-thermoplastic polyimide contains a tetracarboxylic acid residue and a diamine residue, the tetracarboxylic acid residue and the diamine residue are both aromatic groups, and the aromatic group includes biphenyl tetrakis The biphenyl tetrayl group or biphenylene group is 40 mol parts or more with respect to the total of 100 mol parts of the tetracarboxylic acid residue and the diamine residue. 如請求項1或請求項2所述的聚醯亞胺膜,其中, 除了所述(i)~(iv)的條件以外,進一步滿足: (vii)所述熱塑性聚醯亞胺含有四羧酸殘基及二胺殘基,所述四羧酸殘基及二胺殘基均為芳香族基,所述芳香族基包含聯苯四基或亞聯苯基,並且相對於所述四羧酸殘基及二胺殘基的合計100莫耳份,所述聯苯四基或亞聯苯基為30莫耳份以上且80莫耳份以下的範圍內。The polyimide film according to claim 1 or 2, wherein In addition to the conditions of (i) to (iv), further satisfy: (Vii) The thermoplastic polyimide contains a tetracarboxylic acid residue and a diamine residue, the tetracarboxylic acid residue and the diamine residue are both aromatic groups, and the aromatic group includes biphenyltetrayl Or biphenylene group, and the biphenyltetrayl group or biphenylene group is 30 mol parts or more and 80 mol parts relative to the total of 100 mol parts of the tetracarboxylic acid residue and diamine residue Within the following range. 如請求項1或請求項2所述的聚醯亞胺膜,其中, 相對於所述非熱塑性聚醯亞胺所含的所有四羧酸殘基100莫耳份,由3,3',4,4'-聯苯四羧酸二酐所衍生的四羧酸殘基為20莫耳份以上且70莫耳份以下的範圍內。The polyimide film according to claim 1 or 2, wherein Relative to 100 mole parts of all tetracarboxylic acid residues contained in the non-thermoplastic polyimide, tetracarboxylic acid residues derived from 3,3',4,4'-biphenyltetracarboxylic dianhydride It is in the range of 20 mol parts or more and 70 mol parts or less. 如請求項1或請求項2所述的聚醯亞胺膜,其中, 相對於所述熱塑性聚醯亞胺所含的所有四羧酸殘基100莫耳份,由3,3',4,4'-聯苯四羧酸二酐所衍生的四羧酸殘基為40莫耳份以上。The polyimide film according to claim 1 or 2, wherein Relative to 100 mole parts of all tetracarboxylic acid residues contained in the thermoplastic polyimide, the tetracarboxylic acid residue derived from 3,3',4,4'-biphenyltetracarboxylic dianhydride is More than 40 moles. 如請求項1或請求項2所述的聚醯亞胺膜,其中, 相對於所述非熱塑性聚醯亞胺所含的所有二胺殘基100莫耳份,下述通式(1)所表示的二胺殘基為20莫耳份以上,
Figure 03_image001
式中,R1 、R2 獨立地表示可經鹵素原子或苯基取代的碳數1~3的烷基或碳數1~3的烷氧基或者碳數2~3的烯基。
The polyimide film according to claim 1 or claim 2, wherein, with respect to 100 mole parts of all diamine residues contained in the non-thermoplastic polyimide, it is represented by the following general formula (1) The diamine residue represented is more than 20 mol parts,
Figure 03_image001
In the formula, R 1 and R 2 independently represent an alkyl group having 1 to 3 carbons or an alkoxy group having 1 to 3 carbons or an alkenyl group having 2 to 3 carbons which may be substituted with a halogen atom or a phenyl group.
如請求項1或請求項2所述的聚醯亞胺膜,其中, 相對於所述熱塑性聚醯亞胺所含的所有二胺殘基100莫耳份,下述通式(2)所表示的二胺殘基為3莫耳份以上且60莫耳份以下的範圍內,
Figure 03_image003
式中,R3 、R4 獨立地表示可經鹵素原子或苯基取代的碳數1~3的烷基或碳數1~3的烷氧基或者烯基。
The polyimide film according to claim 1 or claim 2, wherein, with respect to 100 mole parts of all diamine residues contained in the thermoplastic polyimine, it is represented by the following general formula (2) The diamine residue of is within the range of 3 mol parts or more and 60 mol parts or less,
Figure 03_image003
In the formula, R 3 and R 4 independently represent an alkyl group having 1 to 3 carbon atoms or an alkoxy group or alkenyl group having 1 to 3 carbon atoms which may be substituted with a halogen atom or a phenyl group.
一種覆銅層疊板,具有絕緣層及位於所述絕緣層的至少一個面上的銅層,並且所述覆銅層疊板中, 所述絕緣層具有與所述銅層的表面接觸的熱塑性聚醯亞胺層、及間接地層疊的非熱塑性聚醯亞胺層, 所述絕緣層包含如請求項1至8中任一項所述的聚醯亞胺膜。A copper clad laminated board has an insulating layer and a copper layer located on at least one surface of the insulating layer, and in the copper clad laminated board, The insulating layer has a thermoplastic polyimide layer in contact with the surface of the copper layer, and a non-thermoplastic polyimide layer laminated indirectly, The insulating layer includes the polyimide film according to any one of claims 1 to 8. 如請求項9所述的覆銅層疊板,其中,所述銅層的蝕刻前後的長度方向的尺寸變化量及寬度方向的尺寸變化量均為2%以下。The copper clad laminate according to claim 9, wherein the dimensional change in the longitudinal direction and the dimensional change in the width direction of the copper layer before and after etching are both 2% or less.
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