TW202122331A - Electronic component processing device - Google Patents

Electronic component processing device Download PDF

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TW202122331A
TW202122331A TW109132035A TW109132035A TW202122331A TW 202122331 A TW202122331 A TW 202122331A TW 109132035 A TW109132035 A TW 109132035A TW 109132035 A TW109132035 A TW 109132035A TW 202122331 A TW202122331 A TW 202122331A
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Taiwan
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electronic component
component holding
displacement
expansion
winding
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TW109132035A
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Chinese (zh)
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TWI746170B (en
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永里正一
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日商上野精機股份有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0015Orientation; Alignment; Positioning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00Control devices, e.g. for safety, warning or fault-correcting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/914Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems incorporating rotary and rectilinear movements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02Feeding of components

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Specific Conveyance Elements (AREA)
  • Manipulator (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

This electronic component processing device comprises: a swivel unit; an electronic component holding unit that is provided to the swivel unit; a holding position variable unit that enables displacement of the electronic component holding unit with respect to the swivel unit in a predetermined displacement direction; a swivel drive unit that causes the swivel unit to turn; and a displacement drive unit that is provided so as to move the electronic component holding unit to one side in the displacement direction. The holding position variable unit has a plurality of parallel plate springs that intersect the displacement direction and connect the electronic component holding unit and the swivel unit.

Description

電子零件的處理裝置Processing device for electronic parts

本發明,關於電子零件的處理裝置。The present invention relates to a processing device for electronic parts.

於專利文獻1揭示出電子零件檢查裝置,其具備:旋轉平台、安裝在旋轉平台之外周端的電子零件保持裝置。電子零件檢查裝置,具有可對於電子零件的載置位置來升降的吸嘴,使該吸嘴下降至載置位置,來使電子零件脫離載置位置,或是從載置位置取得電子零件。 [先前技術文獻] [專利文獻]Patent Document 1 discloses an electronic component inspection device including a rotating platform and an electronic component holding device attached to the outer peripheral end of the rotating platform. The electronic component inspection device has a suction nozzle that can be raised and lowered with respect to the mounting position of the electronic component, and the suction nozzle is lowered to the mounting position to remove the electronic component from the mounting position or obtain the electronic component from the mounting position. [Prior Technical Literature] [Patent Literature]

[專利文獻1]國際公開第2012/073282號[Patent Document 1] International Publication No. 2012/073282

[發明所欲解決之問題][The problem to be solved by the invention]

本發明,提供電子零件的處理裝置,能有效提升電子零件的定位精度。 [解決問題之技術手段]The present invention provides a processing device for electronic parts, which can effectively improve the positioning accuracy of electronic parts. [Technical means to solve the problem]

本發明之一型態之電子零件的處理裝置,具備:旋繞部,其可繞著通過既定配置區域之搬運用循環軌道的中心軸來旋繞;電子零件保持部,其在旋繞部設置成位於搬運用循環軌道;保持位置可變部,其可在既定的位移方向,使電子零件保持部對於旋繞部位移;旋繞驅動部,其以保持電子零件的電子零件保持部配置在配置區域的方式來使旋繞部繞中心軸旋繞;以及位移驅動部,其設在配置區域,而使配置在配置區域的電子零件保持部往位移方向的一方側移動。保持位置可變部,具有與位移方向交錯且將電子零件保持部與旋繞部予以連接之複數片平行的板簧。 [發明之效果]An electronic component processing device of one aspect of the present invention is provided with: a winding part which can be wound around the central axis of a conveying circulating track passing through a predetermined arrangement area; an electronic part holding part, which is provided in the winding part so as to be positioned at the carrying Circulating track is used; the holding position variable part can displace the electronic part holding part with respect to the winding part in a predetermined displacement direction; the winding drive part is used to keep the electronic part holding part of the electronic part arranged in the arrangement area. The revolving part revolves around the central axis; and the displacement driving part, which is provided in the arrangement area, and moves the electronic component holding part arranged in the arrangement area to one side of the displacement direction. The holding position variable part has a plurality of parallel leaf springs that are staggered with the displacement direction and connect the electronic component holding part and the winding part. [Effects of Invention]

根據本發明,提供電子零件的處理裝置,能有效提升電子零件的定位精度。According to the present invention, a processing device for electronic parts is provided, which can effectively improve the positioning accuracy of electronic parts.

以下,針對實施形態,參照圖式來進行詳細說明。在說明中,對具有相同要件或相同功能的要件附上相同的符號,省略重複的說明。Hereinafter, the embodiment will be described in detail with reference to the drawings. In the description, the same symbols are attached to the same elements or the same functions, and repeated descriptions are omitted.

本實施形態之電子零件的處理裝置1,是所謂工件分選機,一邊將在切割等之前置工程所形成的電子零件W予以搬運,一邊實施外觀檢查、電氣特性檢查、標記等之處理之後,以膠帶、收容管、拖盤等之收容構件來打包的裝置。以下所舉例的處理裝置1,是對從零件供給部接收的電子零件W實施檢查等的各種處理,不將該電子零件W接合於基板等就打包於收容構件用的裝置。The electronic component processing device 1 of this embodiment is a so-called work sorting machine, which carries the electronic components W formed in the pre-processing process such as cutting, and performs processing such as appearance inspection, electrical characteristic inspection, marking, etc. , A device packed with storage components such as tape, storage tube, tray, etc. The processing apparatus 1 exemplified below is an apparatus for performing various processes such as inspection on the electronic component W received from the component supply unit, and packaging the electronic component W in a storage member without bonding the electronic component W to a substrate or the like.

如圖1及圖2所示般,處理裝置1,具備旋轉搬運部10、控制器100。旋轉搬運部10,使電子零件W沿著循環軌道CR(搬運用循環軌道)移動。搬運對象的電子零件W,具有:互相平行的兩個主面Wa和Wb、包圍主面Wa和Wb的外周面Wc(參照圖3)。旋轉搬運部10,具有:旋繞部20、複數個電子零件保持部50、複數個保持位置可變部70、旋繞驅動部60、位移驅動部80。As shown in FIG. 1 and FIG. 2, the processing device 1 includes a rotating conveyance unit 10 and a controller 100. The conveyance unit 10 is rotated to move the electronic component W along the circulation track CR (circulation track for conveyance). The electronic component W to be conveyed has two main surfaces Wa and Wb parallel to each other, and an outer peripheral surface Wc surrounding the main surfaces Wa and Wb (see FIG. 3). The rotating conveyance unit 10 has a winding unit 20, a plurality of electronic component holding units 50, a plurality of holding position variable units 70, a winding drive unit 60, and a displacement drive unit 80.

旋繞部20,可繞著通過複數個配置區域AR之循環軌道CR的中心軸Ax來旋繞。旋繞部20,具有:設置成可繞中心軸Ax來旋繞的旋轉平台22、複數個連接部24。旋轉平台22的外周,位在比循環軌道CR還內側。例如循環軌道CR是水平的圓軌道,中心軸Ax為鉛直。The revolving part 20 can revolve around the central axis Ax of the circulating track CR passing through the plurality of arrangement areas AR. The revolving part 20 has a rotating platform 22 that is provided to be revolved around the central axis Ax, and a plurality of connecting parts 24. The outer circumference of the rotating platform 22 is located on the inner side of the circulating track CR. For example, the circulating orbit CR is a horizontal circular orbit, and the central axis Ax is vertical.

複數個配置區域AR,設定成沿著循環軌道CR互相成為等間隔亦可。複數個配置區域AR,是即使旋繞部20旋繞亦不會動的區域。例如,在通過循環軌道CR的複數個配置區域AR之至少一部分,進行從旋繞部20往處理部16的電子零件W之收授。作為處理部16的具體例,舉例出:供給電子零件W的零件供給部、回收電子零件W並打包於收容構件的回收部、以及在零件供給部與回收部之間對電子零件W實施既定處理的中間處理部。作為中間處理部,舉例出:進行電子零件W之外觀檢查的檢查部、檢查電子零件W之電氣特性的檢查部、以及對電子零件W施以標記的標記部等。複數個連接部24,沿著旋轉平台22的外周並排成等間隔,各自從旋轉平台22往外周側突出。The plural arrangement areas AR may be set at equal intervals along the circulating track CR. The plural arrangement areas AR are areas where the winding part 20 does not move even if it is wound. For example, in at least a part of a plurality of arrangement areas AR passing through the circulating track CR, the electronic components W from the winding part 20 to the processing part 16 are accepted. Specific examples of the processing unit 16 include: a parts supply unit that supplies electronic components W, a collection unit that collects electronic parts W and packs them in a housing member, and performs predetermined processing on electronic parts W between the parts supply unit and the collection unit. The intermediate processing department. Examples of the intermediate processing unit include an inspection unit that performs an appearance inspection of the electronic component W, an inspection unit that inspects the electrical characteristics of the electronic component W, and a marking unit that marks the electronic component W. The plurality of connecting portions 24 are arranged at equal intervals along the outer circumference of the rotating platform 22, and each protrudes from the rotating platform 22 to the outer circumferential side.

複數個電子零件保持部50,在旋繞部20設置成位於循環軌道CR。例如,複數個電子零件保持部50,沿著循環軌道CR配置成等間隔,分別安裝於複數個連接部24。又,本說明書中,「安裝」並非單指直接安裝的情況,亦包含透過其他構件來安裝的情況。作為一例,複數個電子零件保持部50的數量與複數個配置區域AR的數量為相同亦可。複數個電子零件保持部50沿著循環軌道CR來配置的間距角度(彼此相鄰之電子零件保持部50彼此之間的角度)、複數個配置區域AR沿著循環軌道CR來配置的間距角度為相同亦可。The plurality of electronic component holding parts 50 are provided in the winding part 20 so as to be located in the circulation track CR. For example, the plurality of electronic component holding parts 50 are arranged at equal intervals along the circulation track CR, and are respectively attached to the plurality of connection parts 24. In addition, in this manual, "installation" does not only refer to the case of direct installation, but also includes the case of installation through other components. As an example, the number of the plurality of electronic component holding parts 50 may be the same as the number of the plurality of arrangement areas AR. The pitch angle at which the plurality of electronic component holding parts 50 are arranged along the circulating track CR (the angle between the adjacent electronic part holding parts 50), and the pitch angle at which the plural arrangement areas AR are arranged along the circulating track CR is The same can be used.

複數個電子零件保持部50的各個,保持電子零件W。電子零件保持部50,以任何方式來保持電子零件W皆可。作為保持電子零件W之方式的具體例,舉例出負壓(真空)吸附、靜電式吸附、以及把持等。例如,電子零件保持部50,從與旋轉平台22正交之方向(圖示Z軸方向)的一方側將主面Wa、Wb的任一方藉由負壓來吸附。Each of the plurality of electronic component holding parts 50 holds the electronic component W. The electronic component holding portion 50 may hold the electronic component W in any manner. Specific examples of the method of holding the electronic component W include negative pressure (vacuum) suction, electrostatic suction, and holding. For example, the electronic component holding portion 50 sucks either one of the main surfaces Wa and Wb by negative pressure from one side in the direction orthogonal to the rotating table 22 (the Z-axis direction in the figure).

如圖2所示般,保持位置可變部70,將旋繞部20與電子零件保持部50之間予以連接,可在既定方向使電子零件保持部50對旋繞部20位移。以下,將可藉由保持位置可變部70來使電子零件保持部50位移的方向稱為「位移方向」。例如,保持位置可變部70,在對於旋轉平台22垂直的方向(圖示Z軸方向)中,可使電子零件保持部50位移。作為一例,保持位置可變部70,可在搬運位置與載置位置之間使電子零件保持部50位移。As shown in FIG. 2, the holding position variable part 70 connects the winding part 20 and the electronic component holding part 50 so that the electronic component holding part 50 can be displaced relative to the winding part 20 in a predetermined direction. Hereinafter, the direction in which the electronic component holding portion 50 can be displaced by the holding position variable portion 70 is referred to as the "displacement direction". For example, the holding position variable part 70 can displace the electronic component holding part 50 in a direction perpendicular to the rotating platform 22 (the Z-axis direction in the figure). As an example, the holding position variable part 70 can displace the electronic component holding part 50 between the conveyance position and the placement position.

搬運位置,是在旋繞部20旋繞之際配置有電子零件保持部50的位置,例如,設定在與旋轉平台22相同的高度位置。載置位置,是對處理部16進行電子零件W之收授的位置,設定在比搬運位置還下方的(Z軸負方向的)位置。The transport position is a position where the electronic component holding part 50 is arranged when the winding part 20 is wound, and is set at the same height position as the rotating platform 22, for example. The placement position is a position where the electronic component W is received and delivered to the processing unit 16, and is set at a position (in the negative direction of the Z axis) below the transport position.

旋繞驅動部60,使旋繞部20繞中心軸Ax旋繞。旋繞驅動部60,例如以電動馬達為動力源,藉由不透過齒輪的直接驅動來使旋轉平台22繞中心軸Ax旋轉。複數個電子零件保持部50安裝於旋轉平台22,故伴隨著旋轉平台22的旋轉,複數個電子零件保持部50會沿著循環軌道CR移動(繞中心軸Ax旋轉)。旋繞驅動部60,使旋繞部20旋繞成將複數個電子零件保持部50的各個對一個配置區域AR依序配置。例如,旋繞驅動部60,使旋繞部20間歇地旋繞,而使複數個電子零件保持部50分別暫時停止在複數個配置區域AR。藉此,在一個配置區域AR,使複數個電子零件保持部50之中的其中一個依序暫時停止。The driving part 60 is revolved so that the revolving part 20 is revolved around the central axis Ax. The revolving drive unit 60 uses, for example, an electric motor as a power source, and rotates the rotating platform 22 around the central axis Ax by direct drive without gears. The plurality of electronic component holding parts 50 are mounted on the rotating platform 22, so as the rotating platform 22 rotates, the plural electronic component holding parts 50 move along the circulating track CR (rotate around the central axis Ax). The revolving drive unit 60 revolves the revolving unit 20 so that each of the plurality of electronic component holding units 50 is sequentially arranged in one arrangement area AR. For example, the drive unit 60 is revolved to revolve the reel 20 intermittently, and the plural electronic component holding units 50 are temporarily stopped in the plural arrangement areas AR, respectively. Thereby, in one arrangement area AR, one of the plurality of electronic component holding parts 50 is temporarily stopped in order.

如圖3所示般,電子零件保持部50,亦可具有:吸嘴52、吸嘴固定器54、連接塊55。As shown in FIG. 3, the electronic component holding part 50 may also have a suction nozzle 52, a suction nozzle holder 54, and a connecting block 55.

吸嘴52,位於循環軌道CR。吸嘴52,於下方開口,將電子零件W之主面Wa、Wb的任一方從上方藉由負壓來吸附。例如,吸嘴52,對旋轉平台22垂直地延伸,其下端部於下方開口。電子零件保持部50,進一步具有:用來因應控制訊號的輸入來切換吸嘴52之負壓吸附的開及關的閥(未圖示)。作為閥的具體例,舉例出電磁閥等。The suction nozzle 52 is located on the circulating track CR. The suction nozzle 52 opens below, and sucks either one of the main surfaces Wa and Wb of the electronic component W by negative pressure from above. For example, the suction nozzle 52 extends perpendicularly to the rotating platform 22, and its lower end opens below. The electronic component holding portion 50 further has a valve (not shown) for switching the on and off of the negative pressure suction of the suction nozzle 52 in response to the input of the control signal. As a specific example of the valve, a solenoid valve or the like is exemplified.

吸嘴固定器54,保持吸嘴52。吸嘴52,從吸嘴固定器54往下方突出。連接塊55,對於吸嘴固定器54鄰接於旋轉平台22側,與連接部24相對向。以下,將連接塊55的外表面之中與連接部24相對向的面稱為「內面55a」,將連接部24的外表面之中與連接塊55相對向的面稱為「外面24a」。The suction nozzle holder 54 holds the suction nozzle 52. The suction nozzle 52 protrudes downward from the suction nozzle holder 54. The connecting block 55 is adjacent to the side of the rotating platform 22 with respect to the nozzle holder 54 and faces the connecting portion 24. Hereinafter, the surface of the outer surface of the connecting block 55 facing the connecting portion 24 is referred to as "inner surface 55a", and the surface of the outer surface of the connecting portion 24 facing the connecting block 55 is called "outer surface 24a". .

保持位置可變部70,具有複數片平行的板簧。保持位置可變部70,例如具有兩片平行的板簧。以下,將兩片板簧之中一方作為「板簧72a」,將另一方作為「板簧72b」來說明。The holding position variable part 70 has a plurality of parallel leaf springs. The holding position variable part 70 has, for example, two parallel leaf springs. Hereinafter, one of the two leaf springs will be referred to as the "plate spring 72a", and the other will be described as the "plate spring 72b".

板簧72a、72b,與電子零件保持部50的位移方向交錯且將電子零件保持部50與旋繞部20予以連接。例如,板簧72a、72b,互相分開且並排於上下,各自於水平延伸來連接塊55的內面55a與連接部24的外面24a。板簧72a與板簧72b的間隔,比旋轉平台22的厚度還大亦可。兩片平行的板簧72a、72b,將電子零件保持部50與旋繞部20予以連接,藉此限制電子零件保持部50對旋繞部20位移的方向(電子零件保持部50的移動動作)。亦即,板簧72a、72b,具有引導電子零件保持部50對旋繞部20之移動的功能。The leaf springs 72 a and 72 b are staggered with the displacement direction of the electronic component holding portion 50 and connect the electronic component holding portion 50 and the winding portion 20. For example, the leaf springs 72a and 72b are separated from each other and arranged up and down, and each extend horizontally to connect the inner surface 55a of the block 55 and the outer surface 24a of the connecting portion 24. The distance between the leaf spring 72a and the leaf spring 72b may be larger than the thickness of the rotating platform 22. Two parallel leaf springs 72a and 72b connect the electronic component holding portion 50 and the winding portion 20, thereby restricting the direction in which the electronic component holding portion 50 displaces the winding portion 20 (moving operation of the electronic component holding portion 50). That is, the leaf springs 72a and 72b have a function of guiding the movement of the electronic component holding portion 50 to the winding portion 20.

板簧72a與板簧72b,形成為具有相同的彈簧特性亦可。例如,板簧72a與板簧72b,彼此以相同材料來構成。且,板簧72a與板簧72b,具有相同形狀。又,相同形狀,不只是指板簧72a與板簧72b完全一致的情況,亦包含大致一致的情況。The leaf spring 72a and the leaf spring 72b may be formed to have the same spring characteristics. For example, the leaf spring 72a and the leaf spring 72b are made of the same material. In addition, the leaf spring 72a and the leaf spring 72b have the same shape. In addition, the same shape means not only the case where the leaf spring 72a and the leaf spring 72b are completely consistent, but also the case where they are substantially the same.

位移驅動部80,使配置在配置區域AR的電子零件保持部50往位移方向的一方側移動。例如,位移驅動部80,在鉛直方向使電子零件保持部50往下方移動。旋轉搬運部10,具備複數個位移驅動部80亦可。複數個位移驅動部80,分別設在複數個配置區域AR。複數個位移驅動部80,分別固定在複數個配置區域AR,即使旋繞部20旋繞亦不會移動。又,在沒有必要使電子零件保持部50位移的配置區域AR,不設置位移驅動部80亦可。一個位移驅動部80,使在固定有該位移驅動部80的配置區域AR依序被配置的電子零件保持部50往位移方向的一方側移動。The displacement drive part 80 moves the electronic component holding part 50 arrange|positioned in the arrangement area|region AR to one side of a displacement direction. For example, the displacement drive unit 80 moves the electronic component holding unit 50 downward in the vertical direction. The rotating conveyance unit 10 may be provided with a plurality of displacement driving units 80. The plurality of displacement driving units 80 are respectively provided in the plurality of arrangement areas AR. The plurality of displacement driving parts 80 are respectively fixed to the plurality of arrangement areas AR, so that the winding part 20 does not move even if the winding part 20 is rotated. In addition, in the arrangement area AR where it is not necessary to displace the electronic component holding part 50, the displacement driving part 80 may not be provided. One displacement driving part 80 moves the electronic component holding parts 50 sequentially arranged in the arrangement area AR where the displacement driving part 80 is fixed to one side of the displacement direction.

回到圖2,旋轉搬運部10,進一步具備固定(保持)複數個位移驅動部80的固定板90亦可。固定板90,例如,是配置在旋繞部20之旋轉平台22之上方的板狀構件。固定板90,構成為不與旋轉平台22一起旋繞。複數個位移驅動部80,是以各自位在複數個配置區域AR的狀態來固定於固定板90。因此,複數個位移驅動部80,即使旋繞部20旋繞亦不會動。Returning to FIG. 2, the rotating conveyance unit 10 may further include a fixing plate 90 that fixes (holds) a plurality of displacement driving units 80. The fixing plate 90 is, for example, a plate-shaped member arranged above the rotating platform 22 of the winding part 20. The fixed plate 90 is configured not to be wound together with the rotating platform 22. The plurality of displacement driving parts 80 are fixed to the fixed plate 90 in a state where each is located in the plurality of arrangement areas AR. Therefore, the plurality of displacement driving parts 80 will not move even if the winding part 20 is rotated.

位移驅動部80,例如具有:本體部81、推桿82、驅動部84。本體部81,以不與旋轉平台22(旋繞部20)一起旋繞的方式固定在配置區域AR。例如,本體部81,固定在固定板90之外緣部之中與配置區域AR對應的部分。推桿82,在本體部81設置成可對於本體部81沿著位移方向位移。例如,推桿82,被本體部81保持可沿著上下方向移動。推桿82,在電子零件保持部50位於配置區域AR的狀態下,是位於該電子零件保持部50的上方。驅動部84,是以電動馬達或氣壓缸等為動力源來使推桿82往下方移動。藉此,以推桿82將電子零件保持部50往下方按壓。從位移驅動部80對電子零件保持部50之力的作用點(以下稱為「作用點Pl」)的位置與吸嘴52的位置,是在與位移方向正交的方向上不同亦可。The displacement driving unit 80 includes, for example, a main body 81, a push rod 82, and a driving unit 84. The main body part 81 is fixed to the arrangement area AR so as not to be wound together with the rotating platform 22 (the winding part 20). For example, the main body 81 is fixed to a portion corresponding to the arrangement area AR among the outer edges of the fixing plate 90. The push rod 82 is provided on the main body 81 so as to be displaceable in the displacement direction with respect to the main body 81. For example, the push rod 82 is held by the main body 81 and can move in the vertical direction. The push rod 82 is located above the electronic component holding portion 50 when the electronic component holding portion 50 is located in the arrangement area AR. The driving unit 84 uses an electric motor, a pneumatic cylinder, or the like as a power source to move the push rod 82 downward. Thereby, the electronic component holding portion 50 is pressed downward by the push rod 82. The position of the point of application of the force from the displacement driving section 80 to the electronic component holding section 50 (hereinafter referred to as the "point of application P1") and the position of the suction nozzle 52 may be different in the direction orthogonal to the displacement direction.

如圖3所示般,推桿82,在電子零件保持部50位於配置區域AR的狀態下,是位於連接塊55的上方,在將電子零件保持部50往下方按壓之際接觸於連接塊55的上面55b。亦即,從位移驅動部80對電子零件保持部50之力的作用點Pl,位於連接塊55的上面55b。若位移驅動部80解除對連接塊55之上面55b賦予向下之力的狀態的話,會藉由板簧72a、72b的反作用力使電子零件保持部50復歸至位移前的位置。As shown in FIG. 3, the push rod 82 is located above the connecting block 55 when the electronic component holding portion 50 is located in the arrangement area AR, and contacts the connecting block 55 when the electronic component holding portion 50 is pressed downward.的上55b. That is, the point of action P1 of the force from the displacement driving portion 80 to the electronic component holding portion 50 is located on the upper surface 55b of the connecting block 55. If the displacement driving part 80 releases the state in which downward force is applied to the upper surface 55b of the connecting block 55, the electronic component holding part 50 will be returned to the position before displacement by the reaction force of the leaf springs 72a and 72b.

保持位置可變部70,進一步具有補助彈簧78亦可。補助彈簧78,朝向位移方向的另一方側按壓電子零件保持部50。例如補助彈簧78,是往與位移驅動部80按壓電子零件保持部50的方向相反的方向來按壓電子零件保持部50。從補助彈簧78對電子零件保持部50之力的作用點(以下稱為「作用點P2」)的位置與從位移驅動部80對電子零件保持部50之力的作用點Pl的位置,是在與位移方向正交的方向(圖示X軸方向)上不同亦可。The holding position variable part 70 may further have an auxiliary spring 78. The auxiliary spring 78 presses the electronic component holding portion 50 toward the other side of the displacement direction. For example, the auxiliary spring 78 presses the electronic component holding portion 50 in a direction opposite to the direction in which the displacement driving portion 80 presses the electronic component holding portion 50. The position of the point of application of the force from the auxiliary spring 78 to the electronic component holding portion 50 (hereinafter referred to as "point of application P2") and the position of the point of application P1 of the force from the displacement driving portion 80 to the electronic component holding portion 50 are at The direction orthogonal to the displacement direction (the X-axis direction in the figure) may be different.

作為一例,電子零件保持部50進一步具有擴張部56(第1擴張部),連接部24進一步具有擴張部28(第2擴張部),補助彈簧78設在擴張部56與擴張部28之間。擴張部56,從連接塊55的內面55a朝向連接部24的外面24a突出。擴張部28,從連接部24的外面24a朝向連接塊55的內面55a突出。擴張部28,比擴張部56還位於下方,擴張部28的上面28a與擴張部56的下面56b相對向。As an example, the electronic component holding portion 50 further has an expansion portion 56 (first expansion portion), the connection portion 24 further has an expansion portion 28 (second expansion portion), and the auxiliary spring 78 is provided between the expansion portion 56 and the expansion portion 28. The expansion portion 56 protrudes from the inner surface 55 a of the connecting block 55 toward the outer surface 24 a of the connecting portion 24. The expansion portion 28 protrudes from the outer surface 24 a of the connecting portion 24 toward the inner surface 55 a of the connecting block 55. The expansion portion 28 is located below the expansion portion 56, and the upper surface 28 a of the expansion portion 28 and the lower surface 56 b of the expansion portion 56 are opposed to each other.

補助彈簧78,例如為線圈彈簧(壓縮線圈彈簧)。補助彈簧78,是以其中心軸沿著位移方向的狀態來配置在擴張部28與擴張部56之間,補助彈簧78的下端接觸於擴張部28的上面28a,補助彈簧78的上端接觸於擴張部56的下面56b。補助彈簧78,在電子零件保持部50從搬運位置位移至載置位置之際,是從載置位置朝向搬運位置的方向來對電子零件保持部50賦予力。The auxiliary spring 78 is, for example, a coil spring (compression coil spring). The auxiliary spring 78 is arranged between the expansion part 28 and the expansion part 56 with its central axis along the displacement direction. The lower end of the auxiliary spring 78 is in contact with the upper surface 28a of the expansion part 28, and the upper end of the auxiliary spring 78 is in contact with the expansion part. The lower surface 56b of the section 56. The auxiliary spring 78 applies force to the electronic component holding section 50 in the direction from the placing position to the transporting position when the electronic component holding section 50 is displaced from the transport position to the placing position.

連接部24及電子零件保持部50之至少一方,具有使補助彈簧78的變形方向沿著位移方向來導引的導引銷32亦可。例如連接部24進一步具有導引銷32,電子零件保持部50進一步具有導引孔58。導引銷32,從擴張部28朝向擴張部56突出。導引銷32,例如形成為圓柱狀。導引孔58,在與導引銷32對應的位置貫通擴張部56。例如,導引孔58,於鉛直方向(圖示Z軸方向)貫通擴張部56。At least one of the connecting portion 24 and the electronic component holding portion 50 may have a guide pin 32 that guides the deformation direction of the auxiliary spring 78 along the displacement direction. For example, the connecting portion 24 further has a guide pin 32, and the electronic component holding portion 50 further has a guide hole 58. The guide pin 32 protrudes from the expansion part 28 toward the expansion part 56. The guide pin 32 is formed in a cylindrical shape, for example. The guide hole 58 penetrates the expansion part 56 at a position corresponding to the guide pin 32. For example, the guide hole 58 penetrates the expansion part 56 in the vertical direction (the Z-axis direction in the figure).

導引銷32的端部通過導引孔58。導引孔58的內徑,比導引銷32之端部的外徑還大。因此,在導引銷32的外周面與導引孔58的內周面之間設有間隙。該間隙,設定成比電子零件保持部50往垂直於位移方向之方向的位移量還大。又,電子零件保持部50往垂直於位移方向之方向的位移,是伴隨著往位移方向之板簧72a、72b的撓曲而產生的位移。補助彈簧78,配置成包圍導引銷32。藉此,補助彈簧78的變形方向被限制成沿著導引銷32的方向。The end of the guide pin 32 passes through the guide hole 58. The inner diameter of the guide hole 58 is larger than the outer diameter of the end of the guide pin 32. Therefore, a gap is provided between the outer circumferential surface of the guide pin 32 and the inner circumferential surface of the guide hole 58. This gap is set to be larger than the displacement amount of the electronic component holding portion 50 in the direction perpendicular to the displacement direction. In addition, the displacement of the electronic component holding portion 50 in the direction perpendicular to the displacement direction is the displacement caused by the deflection of the leaf springs 72a and 72b in the displacement direction. The auxiliary spring 78 is arranged to surround the guide pin 32. Thereby, the deformation direction of the auxiliary spring 78 is restricted to be along the direction of the guide pin 32.

擴張部28,配置成至少在與擴張部56之間包夾板簧72a、72b的至少一方,補助彈簧78,將板簧72a、72b之中位於擴張部56與擴張部28之間的板簧予以貫通來接觸於擴張部56與擴張部28亦可。擴張部56及擴張部28的一方配置在板簧72a、72b之間,擴張部56及擴張部28的另一方位在板簧72a、72b之間以外亦可。The expansion portion 28 is arranged to sandwich at least one of the leaf springs 72a, 72b between at least the expansion portion 56, and the auxiliary spring 78 provides the leaf spring between the expansion portion 56 and the expansion portion 28 among the leaf springs 72a, 72b. It may penetrate through and contact the expansion part 56 and the expansion part 28. One of the expansion part 56 and the expansion part 28 is arranged between the leaf springs 72a and 72b, and the other orientation of the expansion part 56 and the expansion part 28 may be other than between the leaf springs 72a and 72b.

作為一例,擴張部28位在板簧72a、72b之間,擴張部56位在板簧72a、72b之間以外。更具體來說,擴張部56位在比板簧72a還上方的位置。亦即,擴張部28,配置成在與擴張部56之間包夾板簧72a。例如擴張部56是位在連接塊55之靠上端的位置,連接塊55的上面55b與擴張部56的上面56a是成為同平面。擴張部56,位在比旋轉平台22還上方的位置亦可。As an example, the expansion part 28 is positioned between the leaf springs 72a and 72b, and the expansion part 56 is positioned outside of the space between the leaf springs 72a and 72b. More specifically, the expansion portion 56 is located above the leaf spring 72a. That is, the expansion part 28 is arranged to sandwich the leaf spring 72a between the expansion part 56 and the expansion part 56. For example, the expansion portion 56 is located near the upper end of the connecting block 55, and the upper surface 55b of the connecting block 55 and the upper surface 56a of the expansion portion 56 are in the same plane. The expansion part 56 may be positioned above the rotating platform 22.

板簧72a,具有供導引銷32貫通的開口76a。開口76a,鉛直地貫通板簧72a。導引銷32沒貫通的板簧72b,具有與開口76a相同的開口76b亦可。板簧72b之開口76b的位置、形狀及大小,與板簧72a之開口76a的位置、形狀及大小相同亦可。藉此,即使是導引銷32貫通板簧72a且不貫通板簧72b的情況,亦可使板簧72b的彈簧特性與板簧72a的彈簧特性成為實質相同。開口76a、76b的大小,至少比導引銷32還大,甚至比導引孔58更大亦可。The leaf spring 72a has an opening 76a through which the guide pin 32 penetrates. The opening 76a penetrates the leaf spring 72a vertically. The leaf spring 72b through which the guide pin 32 does not penetrate may have the same opening 76b as the opening 76a. The position, shape, and size of the opening 76b of the leaf spring 72b may be the same as the position, shape, and size of the opening 76a of the leaf spring 72a. Thereby, even if the guide pin 32 penetrates the leaf spring 72a and does not penetrate the leaf spring 72b, the spring characteristics of the leaf spring 72b and the spring characteristics of the leaf spring 72a can be made substantially the same. The size of the openings 76a and 76b is at least larger than the guide pin 32, or even larger than the guide hole 58.

擴張部28、56及板簧72a、72b之彼此的配置關係,不限於上述之例。擴張部28、板簧72b、擴張部56、及板簧72a,以該順序從下方配置亦可。亦即,使擴張部56位在板簧72a、72b之間,使擴張部28位在板簧72a、72b以外(板簧72b的下方)亦可。如上述般,擴張部56配置在與擴張部28之間包夾板簧72b的位置亦可。在此例,板簧72a,位於擴張部28與擴張部56之間亦可(位於擴張部56的上方亦可),板簧72b,位於擴張部28與擴張部56之間亦可。該情況時,在板簧72a的開口76a,導引銷32及補助彈簧78沒有貫通,在板簧72b的開口76b,貫通有導引銷32及補助彈簧78亦可。The mutual arrangement relationship of the expansion parts 28, 56 and the leaf springs 72a, 72b is not limited to the above-mentioned example. The expansion portion 28, the leaf spring 72b, the expansion portion 56, and the leaf spring 72a may be arranged from below in this order. That is, the expansion part 56 may be positioned between the leaf springs 72a and 72b, and the expansion part 28 may be positioned outside the leaf springs 72a and 72b (below the leaf spring 72b). As described above, the expansion part 56 may be arranged at a position where the leaf spring 72b is sandwiched between the expansion part 28 and the expansion part 28. In this example, the leaf spring 72a may be located between the expansion portion 28 and the expansion portion 56 (it may also be located above the expansion portion 56), and the leaf spring 72b may be located between the expansion portion 28 and the expansion portion 56. In this case, the guide pin 32 and the auxiliary spring 78 do not penetrate through the opening 76a of the leaf spring 72a, and the guide pin 32 and the auxiliary spring 78 may penetrate through the opening 76b of the leaf spring 72b.

擴張部28及擴張部56,位於板簧72a、72b之間亦可。該情況時,在板簧72a、72b的開口76a、76b貫通有導引銷32及補助彈簧78亦可。擴張部28及擴張部56,位於板簧72a、72b之外亦可。亦即,擴張部28及擴張部56,位於板簧72a的上方或板簧72b的下方亦可。該情況時,不在板簧72a、72b設有開口76a、76b亦可。The expansion part 28 and the expansion part 56 may be located between the leaf springs 72a and 72b. In this case, the guide pin 32 and the auxiliary spring 78 may penetrate through the openings 76a, 76b of the leaf springs 72a, 72b. The expansion part 28 and the expansion part 56 may be located outside the leaf springs 72a and 72b. That is, the expansion portion 28 and the expansion portion 56 may be located above the leaf spring 72a or below the leaf spring 72b. In this case, the openings 76a and 76b may not be provided in the leaf springs 72a and 72b.

保持位置可變部70,除了板簧72a、72b以外,具有至少一片其他的板簧亦可。在圖3所示之例中,至少一片其他的板簧,設在擴張部28的下方亦可,或是,設在擴張部28與擴張部56之間亦可。且,在擴張部28的下方設有一片以上其他的板簧,此外,在擴張部28與擴張部56之間設有一片以上其他的板簧亦可。其他的板簧,是藉由與板簧72a、72b相同的材料,形成相同形狀亦可。在該其他的板簧,亦設有與開口76a(開口76b)相同的開口亦可。又,在擴張部56位在板簧72a、72b之間,且擴張部28位在板簧72a、72b之外的情況,使至少一片其他的板簧同樣地設置亦可。The holding position variable part 70 may have at least one other leaf spring in addition to the leaf springs 72a and 72b. In the example shown in FIG. 3, at least one other leaf spring may be provided below the expansion portion 28 or may be provided between the expansion portion 28 and the expansion portion 56. In addition, one or more other leaf springs may be provided below the expansion portion 28, and more than one other leaf spring may be provided between the expansion portion 28 and the expansion portion 56. The other leaf springs may be made of the same material as the leaf springs 72a and 72b, and may be formed in the same shape. The other leaf spring may be provided with the same opening as the opening 76a (opening 76b). In addition, when the expansion part 56 is positioned between the leaf springs 72a and 72b, and the expansion part 28 is positioned outside the leaf springs 72a and 72b, at least one other leaf spring may be provided in the same manner.

圖3及圖4所示之例,在從上方觀看之與板簧72a、72b重疊的位置,雖設有補助彈簧78,但亦可在不與板簧72a、72b重疊的位置設置補助彈簧78。該情況時,於板簧72a、72b不設有開口76a、76b亦可,從上方觀看,擴張部28、56不與板簧72a、72b重疊亦可。保持位置可變部70,不具有補助彈簧78亦可。該情況時,不設有擴張部28、導引銷32、及擴張部56亦可。In the example shown in FIGS. 3 and 4, although the auxiliary spring 78 is provided at a position overlapping the leaf springs 72a and 72b when viewed from above, the auxiliary spring 78 may be provided at a position that does not overlap the leaf springs 72a and 72b. . In this case, the openings 76a and 76b may not be provided in the leaf springs 72a and 72b, and the expansion portions 28 and 56 may not overlap the leaf springs 72a and 72b when viewed from above. The holding position variable part 70 may not have the auxiliary spring 78. In this case, the expansion part 28, the guide pin 32, and the expansion part 56 may not be provided.

旋繞部20,進一步具有限制部34亦可,其限制補助彈簧78往按壓電子零件保持部50的方向(例如上方)之電子零件保持部50的移動。例如旋繞部20,進一步具有設在導引銷32之上端的限制部34。限制部34,是形成為無法通過導引孔58(與導引孔58的周緣部干涉)的形狀及大小。作為一例,如圖4所示般,限制部34的形狀,從上方觀看時,是最大寬度比導引孔58的直徑還大的多角形。The winding portion 20 may further have a restricting portion 34 that restricts the movement of the auxiliary spring 78 to the electronic component holding portion 50 in the direction (for example, upward) that presses the electronic component holding portion 50. For example, the winding portion 20 further has a restricting portion 34 provided at the upper end of the guide pin 32. The restricting portion 34 is formed in a shape and size that cannot pass through the guide hole 58 (which interferes with the peripheral edge of the guide hole 58). As an example, as shown in FIG. 4, the shape of the restricting portion 34 is a polygon having a maximum width larger than the diameter of the guide hole 58 when viewed from above.

限制部34,在電子零件保持部50位於上述搬運位置之際,配置在接觸於擴張部56之上面56a的高度。藉此,即使電子零件保持部50欲移動至比搬運位置還上方,亦會接觸到限制部34而使該移動被妨礙。補助彈簧78,在擴張部56接觸於限制部34的狀態下,是構成為將擴張部56抵接於限制部34亦可。例如,補助彈簧78的自然長度,是比擴張部56接觸於限制部34的狀態之擴張部56與擴張部28的間隔還長亦可。The restricting portion 34 is arranged at a height that contacts the upper surface 56 a of the expansion portion 56 when the electronic component holding portion 50 is located at the above-mentioned conveying position. Thereby, even if the electronic component holding part 50 tries to move above the conveyance position, it will contact the restricting part 34 and the movement will be hindered. The auxiliary spring 78 may be configured to abut the expansion portion 56 against the restriction portion 34 when the expansion portion 56 is in contact with the restriction portion 34. For example, the natural length of the auxiliary spring 78 may be longer than the interval between the expansion portion 56 and the expansion portion 28 in a state where the expansion portion 56 is in contact with the restricting portion 34.

補助彈簧78對於位移驅動部80所致之電子零件保持部50的位移來產生的反作用力,是比板簧72a、72b對於該位移來產生的反作用力的合計還大亦可。例如,補助彈簧78對於上述位移的彈簧常數,是對於板簧72a、72b之彈簧常數的2~20倍亦可,5~15倍亦可,8~12倍亦可。The reaction force of the auxiliary spring 78 to the displacement of the electronic component holding part 50 caused by the displacement drive part 80 may be greater than the total of the reaction forces of the leaf springs 72a and 72b to the displacement. For example, the spring constant of the auxiliary spring 78 for the aforementioned displacement may be 2-20 times, 5-15 times, or 8-12 times the spring constant of the leaf springs 72a and 72b.

控制器100,是以事先設定的控制順序來控制旋轉搬運部10的電腦。該控制中,控制器100,至少實行以下內容:在電子零件保持部50保持電子零件W的狀態下,控制旋繞驅動部60,而使該電子零件保持部50移動至任一個配置區域AR;控制位移驅動部80,而使移動至配置區域AR的電子零件保持部50於鉛直方向從搬運位置位移至載置位置。The controller 100 is a computer that controls the rotary conveyance unit 10 in a control sequence set in advance. In this control, the controller 100 executes at least the following: in a state where the electronic component holder 50 holds the electronic component W, it controls the winding drive unit 60 to move the electronic component holder 50 to any arrangement area AR; control The drive unit 80 is displaced to displace the electronic component holding unit 50 that has moved to the arrangement area AR from the conveyance position to the placement position in the vertical direction.

在旋繞驅動部60使旋繞部20旋繞的期間,電子零件保持部50配置在上述搬運位置。電子零件保持部50在搬運位置時,是藉由補助彈簧78來使擴張部56按壓於限制部34。因此,伴隨著旋繞部20之移動的電子零件保持部50之振動受到抑制。使配置在配置區域AR的電子零件保持部50位移至載置位置之際,位在該配置區域AR的位移驅動部80使推桿82下降。若推桿82從初始位置下降既定量的話,如圖5(a)所示般,推桿82接觸於連接塊55。While the winding drive part 60 is winding the winding part 20, the electronic component holding part 50 is arrange|positioned at the said conveyance position. When the electronic component holding portion 50 is at the transport position, the expansion portion 56 is pressed against the restricting portion 34 by the auxiliary spring 78. Therefore, the vibration of the electronic component holding portion 50 accompanying the movement of the winding portion 20 is suppressed. When displacing the electronic component holding part 50 arranged in the arrangement area AR to the placing position, the displacement driving part 80 arranged in the arrangement area AR lowers the push rod 82. If the push rod 82 is lowered from the initial position by a predetermined amount, as shown in FIG. 5( a ), the push rod 82 contacts the connecting block 55.

然後,若位移驅動部80藉由推桿82進一步對作用點Pl施加力的話,推桿82按壓電子零件保持部50的力,會超過板簧72a、72b及補助彈簧78的反作用力,使電子零件保持部50往下方移動。此時,如圖5(b)所示般,板簧72a、72b保持大致平行的狀態來變形,故電子零件保持部50的姿勢被保持成大致固定。亦即電子零件保持部50,將吸嘴52實質保持成朝向鉛直下方的狀態並往下方位移。Then, if the displacement driving part 80 further applies a force to the point of application Pl by the push rod 82, the force of the push rod 82 pressing the electronic component holding part 50 will exceed the reaction force of the leaf springs 72a, 72b and the auxiliary spring 78, causing the electronic The component holding part 50 moves downward. At this time, as shown in FIG. 5(b), the leaf springs 72a and 72b are deformed while maintaining a substantially parallel state, so the posture of the electronic component holding portion 50 is maintained substantially constant. That is, the electronic component holding portion 50 substantially holds the suction nozzle 52 in a state of facing vertically downward and displaces downward.

又,若電子零件保持部50往下方位移的話,位移前為水平的板簧72a、72b,會在連接塊55的內面55a與連接部24的外面24a之間撓曲。因此,內面55a與外面24a的間隔,變得比板簧72a、72b的全長還短。藉此,電子零件保持部50,亦會朝向旋繞部20的中心軸Ax來於水平方向位移。只要電子零件保持部50之往下方的位移,是比板簧72a、72b的全長還微小的話,電子零件保持部50之往水平方向位移就還是微小。如上述般,導引孔58與導引銷32之間的間隙,若設定成比電子零件保持部50往與位移方向垂直之方向(圖示X軸方向)的位移量還大的話,能抑制電子零件保持部50往水平方向的位移所導致之電子零件保持部50與導引銷32的接觸、摩擦。Furthermore, if the electronic component holding portion 50 is displaced downward, the plate springs 72a and 72b, which were horizontal before the displacement, will bend between the inner surface 55a of the connection block 55 and the outer surface 24a of the connection portion 24. Therefore, the distance between the inner surface 55a and the outer surface 24a becomes shorter than the total length of the leaf springs 72a and 72b. Thereby, the electronic component holding part 50 will also be displaced in the horizontal direction toward the central axis Ax of the winding part 20. As long as the downward displacement of the electronic component holding portion 50 is smaller than the total length of the leaf springs 72a and 72b, the horizontal displacement of the electronic component holding portion 50 is still small. As described above, if the gap between the guide hole 58 and the guide pin 32 is set to be larger than the displacement of the electronic component holding portion 50 in the direction perpendicular to the displacement direction (the X-axis direction in the figure), it can be suppressed The contact and friction between the electronic component holding portion 50 and the guide pin 32 caused by the displacement of the electronic component holding portion 50 in the horizontal direction.

在位移驅動部80藉由推桿82對作用點Pl施加力的狀態(電子零件保持部50位於載置位置的狀態)下,在電子零件保持部50與處理部16之間進行電子零件W的收授。例如,吸嘴52所保持著的電子零件W的吸附被解除,該電子零件W從電子零件保持部50被交到處理部16。然後,位移驅動部80,減少施加於作用點Pl的力。若施加於作用點Pl的力減少的話,板簧72a、72b及補助彈簧78的反作用力,會超過推桿82按壓電子零件保持部50的力,而使電子零件保持部50往上方位移。In the state in which the displacement driving section 80 applies force to the point of application Pl by the push rod 82 (the state where the electronic component holding section 50 is in the placement position), the electronic component W is operated between the electronic component holding section 50 and the processing section 16 Accept. For example, the suction of the electronic component W held by the suction nozzle 52 is released, and the electronic component W is delivered from the electronic component holding unit 50 to the processing unit 16. Then, the drive unit 80 is displaced to reduce the force applied to the point of application Pl. If the force applied to the point of application P1 decreases, the reaction force of the leaf springs 72a, 72b and the auxiliary spring 78 exceeds the force of the push rod 82 pressing the electronic component holding portion 50, and the electronic component holding portion 50 is displaced upward.

之後,電子零件保持部50(擴張部56)抵接於限制部34,電子零件保持部50的上升停止,推桿82從電子零件保持部50分離。藉此,使電子零件保持部50回到可再次旋繞(搬運)的狀態。又,在沒有保持電子零件W的電子零件保持部50從處理部16接收電子零件W之際,亦同樣地進行電子零件保持部50的下降及上升亦可。After that, the electronic component holding portion 50 (expansion portion 56) abuts on the restricting portion 34, the ascent of the electronic component holding portion 50 is stopped, and the push rod 82 is separated from the electronic component holding portion 50. Thereby, the electronic component holding part 50 is returned to the state which can be rewound (transported) again. In addition, when the electronic component holding unit 50 that does not hold the electronic component W receives the electronic component W from the processing unit 16, the electronic component holding unit 50 may be lowered and raised in the same manner.

如以上說明般,本發明之一型態的處理裝置1,具備:旋繞部20,其可繞著通過既定配置區域AR之循環軌道CR的中心軸Ax來旋繞;電子零件保持部50,其在旋繞部20設置成位於循環軌道CR;保持位置可變部70,其可在既定的位移方向,使電子零件保持部50對於旋繞部20的位移;旋繞驅動部60,其以保持電子零件W的電子零件保持部50配置在配置區域AR的方式來使旋繞部20繞中心軸Ax旋繞;以及位移驅動部80,其設在配置區域AR,而使配置在配置區域AR的電子零件保持部50往位移方向的一方側移動。保持位置可變部70,具有:與上述位移方向交錯且將電子零件保持部50與旋繞部20予以連接之兩片平行的板簧72a、72b。As described above, the processing device 1 of one aspect of the present invention includes: a winding part 20 which can be wound around the central axis Ax of the circulating track CR passing through the predetermined arrangement area AR; and the electronic component holding part 50 The winding part 20 is arranged to be located on the circulating track CR; the holding position variable part 70 can make the electronic component holding part 50 displace the winding part 20 in a predetermined displacement direction; the winding driving part 60 is used to hold the electronic part W The electronic component holding portion 50 is arranged in the arrangement area AR so that the winding portion 20 is wound around the central axis Ax; and the displacement driving portion 80 is arranged in the arrangement area AR so that the electronic component holding portion 50 arranged in the arrangement area AR moves toward One side of the displacement direction moves. The holding position variable part 70 has two parallel leaf springs 72 a and 72 b that are staggered with the above-mentioned displacement direction and connect the electronic component holding part 50 and the winding part 20.

作為在既定的位移方向導引電子零件保持部50之位移的機構,舉例出將沿著該位移方向之電子零件保持部50的移動予以導引的滑動導件。但是,滑動導件在構造上縫隙為不可或缺、無法完全限制電子零件保持部往與位移方向垂直之方向的移動。且,會因為磨損等而使縫隙經年增大。對此,根據具有與位移方向交錯來將電子零件保持部50與旋繞部20予以連接之兩片平行的板簧72a、72b的保持位置可變部70的話,可一邊無縫隙地限制電子零件保持部50往沿著板簧72a、72b之方向的移動,並容許電子零件保持部50往與板簧72a、72b垂直之方向的移動。As a mechanism for guiding the displacement of the electronic component holding portion 50 in a predetermined displacement direction, a sliding guide that guides the movement of the electronic component holding portion 50 along the displacement direction is exemplified. However, the sliding guide is structurally indispensable and cannot completely restrict the movement of the electronic component holding portion in a direction perpendicular to the displacement direction. Moreover, the gap will increase over the years due to wear and the like. On the other hand, by having the holding position variable part 70 of the two parallel leaf springs 72a, 72b intersecting with the displacement direction to connect the electronic part holding part 50 and the winding part 20, the holding position of the electronic part can be restricted without any gap. The portion 50 moves in the direction along the leaf springs 72a and 72b and allows the electronic component holding portion 50 to move in the direction perpendicular to the leaf springs 72a and 72b.

又,根據藉由板簧72a、72b的變形而可使電子零件保持部50位移的機構,亦會產生電子零件保持部50往與上述位移方向垂直之方向的位移(以下稱為「垂直位移」)。針對該位移,板簧72a、72b的長度是設定成比起往位移方向的位移量還充分地大,藉此可將垂直位移抑制成微小。且,垂直位移的大小,在與滑動導件之構造上之縫隙的大小相較之下,是難以經時變化,故只要將包含垂直位移的位置作為目標位置的話,可提升定位精度,可長期維持該定位精度。於是,有效提升電子零件W的定位精度。In addition, according to the mechanism that can displace the electronic component holding portion 50 by the deformation of the leaf springs 72a and 72b, the electronic component holding portion 50 is also displaced in a direction perpendicular to the above-mentioned displacement direction (hereinafter referred to as "vertical displacement"). ). With respect to this displacement, the lengths of the leaf springs 72a and 72b are set to be sufficiently larger than the amount of displacement in the displacement direction, whereby the vertical displacement can be suppressed to be small. In addition, the size of the vertical displacement is difficult to change over time compared with the size of the gap in the structure of the sliding guide. Therefore, as long as the position including the vertical displacement is used as the target position, the positioning accuracy can be improved and the long-term Maintain the positioning accuracy. Therefore, the positioning accuracy of the electronic component W is effectively improved.

位移驅動部80,具有:本體部81,其在配置區域AR固定成不與旋繞部20一起旋繞;推桿82,其在本體部81設置成可沿著位移方向位移,且朝向位移方向的一方側按壓電子零件保持部50;以及驅動部84,其沿著位移方向使推桿82移動。使位移驅動部80在配置區域AR設置成不與旋繞部20一起旋繞,藉此使在該配置區域AR使電子零件保持部50位移的機構簡易化。The displacement driving part 80 has: a main body 81 which is fixed in the arrangement area AR so as not to rotate together with the winding part 20; and a push rod 82 which is provided in the main body 81 so as to be displaceable along the displacement direction and faces one side of the displacement direction The side presses the electronic component holding part 50; and the driving part 84, which moves the push rod 82 along the displacement direction. The displacement driving part 80 is provided in the arrangement area AR so as not to revolve together with the winding part 20, thereby simplifying the mechanism for displacing the electronic component holding part 50 in the arrangement area AR.

處理裝置1,亦可具備:複數個電子零件保持部50、複數個保持位置可變部70。複數個電子零件保持部50,可各自使複數個電子零件保持部50對旋繞部20位移。旋繞驅動部60,使旋繞部20旋繞成將複數個電子零件保持部50的各個對配置區域AR依序配置。該情況時,可藉由複數個電子零件保持部50來同時搬運複數個電子零件W。於是,可進行電子零件W之有效率的處理。The processing device 1 may include a plurality of electronic component holding parts 50 and a plurality of holding position variable parts 70. The plurality of electronic component holding parts 50 can each displace the plurality of electronic component holding parts 50 with respect to the winding part 20. The revolving drive unit 60 revolves the revolving unit 20 so that the respective pair arrangement regions AR of the plurality of electronic component holding units 50 are sequentially arranged. In this case, a plurality of electronic components W can be simultaneously carried by the plurality of electronic component holding parts 50. Thus, efficient processing of the electronic component W can be performed.

位移驅動部80,亦可構成為朝向位移方向的一方側來按壓電子零件保持部50。保持位置可變部70,亦可進一步具有朝向位移方向的另一方側來按壓電子零件保持部50的補助彈簧78。根據板簧72a、72b,可無縫隙地限制電子零件保持部50的移動方向,另一方面,板簧72a、72b的反作用力,是因應板簧72a、72b的厚度差異而容易差異化。另一方面,於補助彈簧78,可不考慮到限制電子零件保持部50之移動方向的功能而使用容易調節反作用力之大小的彈簧。因此,根據保持位置可變部70進一步具有補助彈簧78的上述構造,可更高精度地調節保持位置可變部70對電子零件保持部50賦予的反作用力。The displacement driving part 80 may be configured to press the electronic component holding part 50 toward one side of the displacement direction. The holding position variable part 70 may further have an auxiliary spring 78 which presses the electronic component holding part 50 toward the other side of the displacement direction. According to the leaf springs 72a and 72b, the moving direction of the electronic component holding portion 50 can be restricted seamlessly. On the other hand, the reaction force of the leaf springs 72a and 72b is easily differentiated according to the difference in the thickness of the leaf springs 72a and 72b. On the other hand, for the auxiliary spring 78, it is possible to use a spring that can easily adjust the magnitude of the reaction force without considering the function of restricting the moving direction of the electronic component holding portion 50. Therefore, according to the above-mentioned structure in which the holding position variable portion 70 further includes the auxiliary spring 78, the reaction force imparted by the holding position variable portion 70 to the electronic component holding portion 50 can be adjusted with higher accuracy.

旋繞部20,進一步具有限制部34亦可,其限制補助彈簧78往按壓電子零件保持部50之方向的電子零件保持部50的移動。該情況時,藉由將電子零件保持部50抵接於限制部34,來提高電子零件保持部50與旋繞部20之間連接部的剛性。且,該剛性強度,可藉由補助彈簧78之反作用力的大小來適當調節。藉此,可抑制與旋繞部20的旋轉及停止對應之電子零件保持部50的振動,故容易提高旋繞部20的旋轉速度。提高旋繞部20的旋轉速度,可進一步提升電子零件W的處理效率。The winding portion 20 may further have a restricting portion 34 that restricts the movement of the auxiliary spring 78 to the electronic component holding portion 50 in the direction in which the electronic component holding portion 50 is pressed. In this case, by abutting the electronic component holding portion 50 against the restricting portion 34, the rigidity of the connecting portion between the electronic component holding portion 50 and the winding portion 20 is increased. In addition, the rigidity can be appropriately adjusted by the magnitude of the reaction force of the auxiliary spring 78. Thereby, the vibration of the electronic component holding part 50 corresponding to the rotation and stop of the winding part 20 can be suppressed, so the rotation speed of the winding part 20 can be easily increased. Increasing the rotation speed of the winding part 20 can further improve the processing efficiency of the electronic component W.

從補助彈簧78對電子零件保持部50之力的作用點P2與從位移驅動部80對電子零件保持部50之力的作用點Pl,是在與位移方向正交的方向上不同亦可。該情況時,可利用兩片板簧72a、72b所致之電子零件保持部50的姿勢保持功能,來謀求省空間化。The point of application P2 of the force from the auxiliary spring 78 to the electronic component holding portion 50 and the point of application P1 of the force from the displacement driving portion 80 to the electronic component holding portion 50 may be different in the direction orthogonal to the displacement direction. In this case, the posture maintaining function of the electronic component holding portion 50 by the two leaf springs 72a and 72b can be utilized to achieve space saving.

電子零件保持部50,亦可具有朝向旋繞部20突出的擴張部56。旋繞部20,亦可具有擴張部28,其在與擴張部56之間包夾至少兩片板簧72a、72b之任一者的位置,朝向電子零件保持部50突出。補助彈簧78,將兩片板簧72a、72b之中位於擴張部56與擴張部28之間的板簧予以貫通來接觸於擴張部56與擴張部28亦可。該情況時,兩片板簧72a、72b之間的一部分可利用為補助彈簧78的配置空間,藉此可謀求進一步的省空間化。The electronic component holding portion 50 may also have an expansion portion 56 protruding toward the winding portion 20. The winding portion 20 may also have an expansion portion 28 which protrudes toward the electronic component holding portion 50 at a position where at least two leaf springs 72 a and 72 b are sandwiched between the expansion portion 56. The auxiliary spring 78 may penetrate a leaf spring located between the expansion portion 56 and the expansion portion 28 among the two leaf springs 72 a and 72 b to contact the expansion portion 56 and the expansion portion 28. In this case, a part between the two leaf springs 72a and 72b can be used as an arrangement space for the auxiliary spring 78, thereby achieving further space saving.

擴張部56及擴張部28的一方配置在兩片板簧72a、72b之間,擴張部56及擴張部28的另一方位在兩片板簧72a、72b之外亦可。該情況時,兩片板簧72a、72b之間可利用為擴張部56或擴張部28的配置空間,藉此謀求進一步的省空間化。One of the expansion part 56 and the expansion part 28 is arranged between the two leaf springs 72a and 72b, and the other orientation of the expansion part 56 and the expansion part 28 may be outside the two leaf springs 72a and 72b. In this case, the space between the two leaf springs 72a and 72b can be used as an arrangement space for the expansion portion 56 or the expansion portion 28, thereby achieving further space saving.

兩片板簧72a、72b之中,位在擴張部28與擴張部56之間的板簧具有供補助彈簧78貫通的開口,沒有位在擴張部28與擴張部56之間的板簧亦可亦具有與上述開口相同的開口。該情況時,在補助彈簧78沒貫通的板簧,亦設置與供補助彈簧貫通的板簧相同的開口,藉此可確實謀求兼具省空間化與定位精度。Among the two leaf springs 72a and 72b, the leaf spring located between the expansion portion 28 and the expansion portion 56 has an opening for the auxiliary spring 78 to pass through, and the leaf spring located between the expansion portion 28 and the expansion portion 56 may not be provided. It also has the same opening as the above-mentioned opening. In this case, the leaf spring through which the auxiliary spring 78 is not penetrated is also provided with the same opening as the leaf spring through which the auxiliary spring is penetrated, so that both space saving and positioning accuracy can be surely achieved.

電子零件保持部50,亦可具有貫通擴張部56的導引孔58。旋繞部20,亦可具有導引銷32,其從擴張部28朝向擴張部56突出,貫通導引孔58來導引補助彈簧78。導引孔58與導引銷32之間的間隙,設定成比電子零件保持部50往與位移方向垂直之方向的位移量還大亦可。該情況時,依據兩片板簧72a、72b之變形的電子零件保持部50之位移,不會被導引孔58與導引銷32的接觸給妨礙,可引導補助彈簧78。藉此,可更高精度地調節保持位置可變部70對電子零件保持部50賦予的反作用力。The electronic component holding portion 50 may also have a guide hole 58 penetrating the expansion portion 56. The winding portion 20 may also have a guide pin 32 that protrudes from the expansion portion 28 toward the expansion portion 56 and penetrates the guide hole 58 to guide the auxiliary spring 78. The gap between the guide hole 58 and the guide pin 32 may be set to be larger than the displacement amount of the electronic component holding portion 50 in the direction perpendicular to the displacement direction. In this case, the displacement of the electronic component holding portion 50 based on the deformation of the two leaf springs 72a and 72b is not hindered by the contact between the guide hole 58 and the guide pin 32, and the auxiliary spring 78 can be guided. Thereby, the reaction force imparted by the holding position variable portion 70 to the electronic component holding portion 50 can be adjusted with higher accuracy.

補助彈簧78對於位移驅動部80所致之電子零件保持部50的位移來產生的反作用力,是比兩片板簧72a、72b對於該位移來產生的反作用力的合計還大亦可。該情況時,可更高精度地調節保持位置可變部對電子零件保持部賦予的反作用力。The reaction force of the auxiliary spring 78 to the displacement of the electronic component holding part 50 caused by the displacement driving part 80 may be greater than the sum of the reaction forces of the two leaf springs 72a and 72b to the displacement. In this case, the reaction force imparted by the holding position variable portion to the electronic component holding portion can be adjusted with higher accuracy.

以上,雖說明了實施形態,但本發明並不一定限定於上述的形態,在不超脫其主旨的範圍可有各種變形。Although the embodiments have been described above, the present invention is not necessarily limited to the above-mentioned embodiments, and various modifications can be made within a range that does not deviate from the gist.

l:處理裝置 20:旋繞部 28:擴張部 32:導引銷 34:限制部 56:擴張部 60:旋繞驅動部 70:保持位置可變部 72a,72b:板簧 78:補助彈簧 80:位移驅動部 90:固定板 AR:配置區域 CR:循環軌道 Ax:中心軸l: processing device 20: Spiral part 28: Expansion 32: guide pin 34: Restricted Department 56: Expansion 60: Swivel drive 70: Keep the position variable part 72a, 72b: leaf spring 78: auxiliary spring 80: Displacement drive unit 90: fixed plate AR: configuration area CR: Circulating track Ax: central axis

[圖1]示意表示處理裝置之一例的俯視圖。 [圖2]示意表示圖1所示之處理裝置的側視圖。 [圖3]將處理裝置的一部分擴大表示的側視圖。 [圖4]示意表示處理裝置之一部分的俯視圖。 [圖5]用來說明電子零件保持部之位移的示意圖。[Fig. 1] A plan view schematically showing an example of a processing device. [Fig. 2] A side view schematically showing the processing device shown in Fig. 1. [Fig. 3] A side view showing an enlarged part of the processing device. [Fig. 4] A plan view schematically showing a part of the processing device. [Figure 5] A schematic diagram for explaining the displacement of the electronic component holding portion.

16:處理部 16: Processing Department

22:旋轉平台 22: Rotating platform

24:連接部 24: Connection part

24a:外面 24a: outside

28:擴張部 28: Expansion

28a:上面 28a: above

32:導引銷 32: guide pin

34:限制部 34: Restricted Department

50:複數個電子零件保持部 50: Multiple electronic component holding parts

52:吸嘴 52: Nozzle

54:吸嘴固定器 54: Nozzle holder

55:連接塊 55: connection block

55a:內面 55a: inside

55b:上面 55b: Above

56:擴張部 56: Expansion

56a:上面 56a: Above

56b:下面 56b: below

58:貫通導引孔 58: Through guide hole

70:保持位置可變部 70: Keep the position variable part

72a,72b:板簧 72a, 72b: leaf spring

76a,76b:開口 76a, 76b: opening

78:補助彈簧 78: auxiliary spring

80:位移驅動部 80: Displacement drive unit

82:推桿 82: putter

W:電子零件 W: Electronic parts

Wa,Wb:包圍主面 Wa, Wb: Surround the main surface

Wc:外周面 Wc: outer peripheral surface

Claims (6)

一種電子零件的處理裝置,具備:旋繞部,其可繞著通過既定配置區域之搬運用循環軌道的中心軸來旋繞; 電子零件保持部,其在前述旋繞部設置成位於前述搬運用循環軌道; 保持位置可變部,其可在既定的位移方向,使前述電子零件保持部對於前述旋繞部位移; 旋繞驅動部,其以保持前述電子零件的前述電子零件保持部配置在前述配置區域的方式來使前述旋繞部繞前述中心軸旋繞;以及 位移驅動部,其設在前述配置區域,而使配置在前述配置區域的前述電子零件保持部往前述位移方向的一方側移動, 前述保持位置可變部,具有與前述位移方向交錯且將前述電子零件保持部與前述旋繞部予以連接之複數片平行的板簧。A processing device for electronic parts, comprising: a winding part, which can be wound around the central axis of a circulation track for conveyance passing through a predetermined arrangement area; An electronic component holding part, which is arranged in the aforementioned winding part so as to be located on the aforementioned conveying circulating track; A holding position variable part, which can displace the aforementioned electronic component holding part with respect to the aforementioned spiral part in a predetermined displacement direction; A revolving drive portion that revolves the revolving portion around the central axis in such a manner that the electronic component holding portion holding the electronic component is arranged in the arrangement area; and A displacement driving part is provided in the arrangement area, and moves the electronic component holding part arranged in the arrangement area to one side of the displacement direction, The holding position variable part has a plurality of parallel leaf springs that are staggered with the displacement direction and connect the electronic component holding part and the spiral part. 如請求項1所述之電子零件的處理裝置,其中, 前述位移驅動部,具有: 本體部,其在前述配置區域固定成不與前述旋繞部一起旋繞; 推桿,其在前述本體部設置成可沿著前述位移方向位移,且朝向前述位移方向的一方側按壓前述電子零件保持部;以及 驅動部,其沿著前述位移方向使前述推桿移動。The electronic component processing device according to claim 1, wherein: The aforementioned displacement drive unit has: The body part, which is fixed in the aforementioned configuration area so as not to revolve together with the aforementioned revolving part; A push rod is provided on the main body part to be displaceable along the displacement direction, and presses the electronic component holding part toward one side of the displacement direction; and The driving part moves the push rod along the displacement direction. 如請求項1或2所述之電子零件的處理裝置,其具備:複數個電子零件保持部,其含有前述電子零件保持部;以及 複數個保持位置可變部,其含有前述保持位置可變部, 前述複數個保持位置可變部,可各自使前述複數個電子零件保持部對前述旋繞部位移, 前述旋繞驅動部,使前述旋繞部旋繞成將前述複數個電子零件保持部的各個依序配置於前述配置區域。An electronic component processing device according to claim 1 or 2, comprising: a plurality of electronic component holding portions including the aforementioned electronic component holding portion; and A plurality of holding position variable parts including the aforementioned holding position variable parts, The plurality of holding position variable parts can each displace the plurality of electronic component holding parts with respect to the winding part, The winding driving part is configured to wind the winding part so that each of the plurality of electronic component holding parts is sequentially arranged in the arrangement area. 如請求項1或2所述之電子零件的處理裝置,其中, 前述位移驅動部,構成為朝向前述位移方向的一方側來按壓前述電子零件保持部, 前述保持位置可變部,進一步具有朝向前述位移方向的另一方側來按壓前述電子零件保持部的補助彈簧。The electronic component processing device according to claim 1 or 2, wherein: The displacement driving part is configured to press the electronic component holding part toward one side of the displacement direction, The holding position variable part further has an auxiliary spring for pressing the electronic component holding part toward the other side of the displacement direction. 如請求項4所述之電子零件的處理裝置,其中,前述旋繞部,進一步具有限制部,其限制前述補助彈簧往按壓前述電子零件保持部之方向的前述電子零件保持部的移動。The electronic component processing device according to claim 4, wherein the winding portion further has a restricting portion that restricts the movement of the auxiliary spring to the electronic component holding portion in a direction to press the electronic component holding portion. 如請求項4所述之電子零件的處理裝置,其中,從前述補助彈簧對前述電子零件保持部之力的作用點與從前述位移驅動部對前述電子零件保持部之力的作用點,是在與前述位移方向正交的方向上不同。The electronic component processing device according to claim 4, wherein the point of application of the force of the auxiliary spring to the electronic component holding portion and the point of application of the force of the displacement driving portion on the electronic component holding portion are at It is different in the direction orthogonal to the aforementioned displacement direction.
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