TW202119041A - Horizontality-adjustable probe card comprising an elastic plate having a central portion and a plurality of adjusting arms extending from a circumference of the central portion and a probe head arranged on the central portion - Google Patents

Abstract

A horizontality-adjustable probe card comprises an elastic plate and a probe head. The elastic plate comprises a central portion and a plurality of adjusting arms extending from a circumference of the central portion. The probe head comprises at least one probe, wherein the probe head is arranged on the central portion of the elastic plate. Accordingly, the probe card allows a user to make adjustment on horizontality after having been installed, in order to avoid a height difference at a bottom end of the probe.

Description

Adjustable probe card

The present invention relates to a probe card, and particularly relates to a probe card with an adjustable level.

The conventional probe card mainly includes a probe head with a plurality of probes protruding from the bottom, a space converter on the top of the probe head, and a main circuit board on the top of the space converter, or it may not be provided. With a space converter, the main circuit board is directly installed on the top of the probe head to electrically connect to a testing machine through the main circuit board, and the bottom end of the probes is used to touch the conductive connection of the object under test. Point, so that the test signal can be transmitted between the test object and the test machine through the probe and the space converter and/or the main circuit board.

However, due to the influence of assembly accuracy, after the probe card is assembled, the bottom ends of the probes may have a slight height difference instead of being on the same horizontal plane. Although such a height difference is very small, it is enough to make the probes suffer from The degree of contact with the conductive contacts of the object to be measured is different, which has adverse effects. For example, some probes apply excessive needle pressure to destroy the conductive contacts, and some probes do not actually contact the conductive contacts, resulting in unstable signal transmission, etc. .

In view of the above-mentioned deficiencies, the main purpose of the present invention is to provide a level-adjustable probe card that can be adjusted by the user after the assembly is completed, so as to avoid a height difference at the bottom of the probe.

To achieve the above objective, the level-adjustable probe card provided by the present invention includes an elastic plate body and a probe head. The elastic plate body has a central portion and a plurality of adjusting arms extending from the periphery of the central portion The probe head includes at least one probe, and the probe head is disposed at the center of the elastic plate body.

Thereby, after the probe card is assembled, the user can change the posture of the elastic plate by swinging each of the adjusting arms. For example, each of the adjusting arms can be connected to a linear displacement device, so as to be subjected to linear displacement. The displacement device is driven to swing. Although such an adjustment method has a slight degree of change in the posture of the central part of the elastic plate body, it is still sufficient to adjust the level of the probe head arranged in the central part. The probe head is usually equipped with a plurality of probes, and/or cooperate with the probes of other probe devices (such as edge sensors) to perform spot measurement on the same object under test. When there is a height difference between the ends, the aforementioned method of adjusting the level of the probe head can correct the bottom end of the probe to be on the same horizontal plane, so that the probes can achieve a good spot measurement effect.

The detailed structure, features, assembling or using method of the level-adjustable probe card provided by the present invention will be described in the detailed description of the following embodiments. However, those with ordinary knowledge in the field of the present invention should be able to understand that these detailed descriptions and specific examples for implementing the present invention are only used to illustrate the present invention, and are not intended to limit the scope of the patent application of the present invention.

The applicant first explains here that in the embodiments and drawings to be introduced below, the same reference numbers indicate the same or similar elements or structural features. It should be noted that the various elements and structures in the drawings are illustrative for convenience and are not drawn based on actual proportions and quantities, and if it is possible in implementation, the features of different embodiments can be applied interactively. Secondly, when it is mentioned that an element is arranged on another element, it means that the aforementioned element is directly arranged on the other element, or the aforementioned element is indirectly arranged on the other element, that is, there is still another element between the two elements. One or more other elements are provided. When it is mentioned that one element is "directly" arranged on another element, it means that no other element is arranged between the two elements.

1 to 3, the level-adjustable probe card 10 provided by a preferred embodiment of the present invention includes an elastic plate body 20, a probe head 30, a space converter 12, and a structural reinforcement member 14. , And three connecting plates 16. The aforementioned components are generally plate-shaped structures arranged along the horizontal axis (X-axis, Y-axis), and the probe card 10 is used to move along the vertical axis (Z-axis) with its probe (detailed below) Touch the conductive contact of the object to be tested (not shown in the figure).

The elastic plate body 20 has a circular central portion 22, and three adjusting arms 24 extending from the periphery of the central portion 22. Each of the adjusting arms 24 includes a central portion 22 extending from the periphery of the central portion 22 and An elongated extension portion 242 and a mounting portion 244 located at the end of the extension portion 242 and wider than the extension portion 242. In this embodiment, the elastic board body 20 is a circuit board with a circuit (not shown in the figure) inside. It can be slightly bent and deformed due to its relatively thin thickness. The lower surface 25 of the elastic board body 20 is provided with The conductive contacts (not shown in the figure) of the central portion 22, the upper surface 26 of the elastic plate body 20 is provided with a plurality of electrical connectors 28, and the mounting portions 244 of the three adjusting arms 24 are respectively provided with at least one electrical connector 28 Each of the electrical connectors 28 is electrically connected to the conductive contacts on the lower surface 25 of the elastic plate body 20 through the internal circuit of the elastic plate body 20.

The probe head 30 includes an upper plate 31, a lower plate 32, a circuit board 33 fixed between the upper plate 31 and the lower plate 32, and is formed by a microelectromechanical system (MEMS for short) Sixteen probes 34 (the number is not limited) on the bottom surface 332 of the circuit board 33, as shown in FIGS. 4-6, each probe 34 includes a cantilever section 341 extending along the Y axis, and a cantilever section 341 extending along the Z axis. The point of the shaft extension touches the segment 342. In detail, the cantilever section 341 of the eight probes 34 located in the left half of FIG. 4 extends toward the positive Y axis, and the cantilever section 341 of the eight probes 34 located in the right half of FIG. 4 extends toward the Y axis. The end of the cantilever segment 341 of the probe 34 on the left half and the end of the cantilever segment 341 of the probe 34 on the right half are staggered and arranged along a straight line L. As shown in FIGS. 5 and 6, the touch section 342 of the probes 34 extends from the end of the cantilever section 341 toward the negative direction of the Z axis and protrudes downward from the bottom of the probe head 30 for The touch terminal 344 at the bottom of each touch section 342 touches the conductive contact of the object under test downward.

The probe head 30 is arranged on the lower surface 25 of the elastic plate body 20 through the space converter 12 and arranged on the central portion 22, so that the probes 34 and the lower surface 25 of the elastic plate body 20 The conductive contacts are electrically connected. This part is a conventional technology and is relatively unrelated to the characteristics of the present invention, so the applicant is not allowed to describe it in detail here. When the electrical connector 28 of the elastic board body 20 is electrically connected to a testing machine (not shown in the figure) through a signal transmission line (not shown in the figure), the touch terminals 344 of the probes 34 touch it The test object can transmit test signals to the tester through the probe head 30, the space converter 12, the elastic plate body 20 and the aforementioned signal transmission line.

The structural reinforcement 14 and the three connecting plates 16 are fixed on the upper surface 26 of the elastic plate body 20, and the structural reinforcement 14 is provided on the central portion 22 to strengthen the structural strength there, thereby enhancing the probe head The stability of 30, the three connecting plates 16 are respectively arranged on the mounting part 244 of the three adjusting arms 24, and are used to provide three linear displacement devices such as slide rails and slider sets, pneumatic cylinders, hydraulic cylinders, etc. ( (Not shown in the figure) are respectively connected to the three connecting plates 16, so that each of the linear displacement devices arranged on the upper surface 26 of the elastic plate body 20 can generate a linear displacement in the Z-axis direction to drive its corresponding adjustment arm 24 to swing up and down . Alternatively, the aforementioned linear displacement device may be directly disposed on the adjustment arm 24 without passing through the connecting plate 16 to directly drive the corresponding adjustment arm 24 to swing up and down.

Therefore, after the probe card 10 is assembled, if the point contact ends 344 of the probes 34 have a slight height difference, for example, if the point contact ends 344 of the probe 34 in this embodiment are not along X as shown in FIG. 6 If the shafts are arranged in a straight line, the linear displacement device on the three connecting plates 16 can generate a linear displacement in the Z-axis direction to swing each adjustment arm 24 to change the posture of the elastic plate body 20, and then the probe The head 30 has the function of adjusting the level, so that the touching ends 344 of the probes 34 are calibrated to be on the same horizontal plane, so that the probes 34 can achieve a good point measurement effect.

As shown in FIG. 3, the three adjusting arms 24 of the elastic plate body 20 of the present embodiment extend radially from the periphery of the central portion 22 at equal intervals and the included angle θ, that is, every two adjacent adjusting arms The included angle θ of 24 is about 120 degrees, and one of the adjusting arms 24 extends along the Y axis toward the positive direction. As shown in FIG. 4, the point contact section 342 of the probe 34 of the probe head 30 is arranged along the X axis. A straight line L, that is, the touch segments 342 of the probes 34 are arranged in a straight line L perpendicular to the extension direction of one of the adjusting arms 24. Such a configuration does not require more adjustment arms 24, and can exert a good level adjustment effect on the probes 34. However, the elastic plate body 20 of the present invention is not limited to having three adjustment arms 24, as long as it has a plurality of adjustment arms 24, and the position configuration of the adjustment arms 24 is not limited. In addition, the probe 34 of the probe head 30 of the present invention It is not limited to being arranged in a straight line.

It is worth mentioning that the probe head 30 is usually provided with a plurality of probes 34, but it is not limited to this. Regardless of whether the number of probes 34 of the probe head 30 is singular or plural, the probe head 30 The needle 34 may also be matched with the probes of other probe devices to simultaneously perform spot measurement on the same object to be tested. The other probe devices are, for example, the edge sensor 40 shown in FIGS. 7 and 8. In detail, the center of the probe card 10 is provided with a through hole 18 that penetrates the structural reinforcement 14, the elastic plate body 20, the space converter 12 and the probe head 30, and the probe of the probe head 30 The position of the touch end 344 of 34 corresponds to the through hole 18. The structural reinforcement 14 has a notch 142 communicating with the through hole 18 for the probe device (edge sensor) 40 to be disposed in the notch 142 And one of the probes 42 of the probe device 40 is passed through the perforation 18, so that the probe 34 of the probe head 30 and the probe 42 of the probe device 40 can simultaneously point the same object to be tested The height difference between the probe 34 and the probe 42 can also be corrected by swinging the adjusting arm 24 of the elastic plate body 20 as described above. In addition, as shown in FIGS. 2 and 3, the adjustment arm 24 of the elastic plate body 20 can be provided with a force sensor 19, such as a load cell, to measure 34 points of each probe The force status when touching the object to be tested. Furthermore, each of the adjusting arms 24 can be provided with a displacement sensor (not shown in the figure) for sensing the displacement of the Z axis, so as to calculate the posture of the elastic plate 20. The force sensor 19 can be arranged on the upper and lower surfaces of the adjustment arm 24 of the elastic plate body 20. Further, the force sensor 19 can be arranged on the extension portion 242 or the mounting portion 244 of the adjustment arm 24, as shown in FIG. 2. As shown in FIG. 3, the force sensor 19 can also be arranged at the junction between the extension portion 242 and the mounting portion 244 of the adjustment arm 24.

Finally, it must be explained again that the constituent elements disclosed in the previously disclosed embodiments of the present invention are only examples and are not intended to limit the scope of the case. Alternatives or changes to other equivalent elements should also be the scope of the patent application for this case. Covered.

10: Probe card with adjustable level 12: Space converter 14: Structural reinforcement 142: missing slot 16: connecting board 18: Piercing 19: Force sensor 20: Elastic board 22: Central 24: Adjusting arm 242: Extension 244: Installation Department 25: lower surface 26: upper surface 28: Electrical connector 30: Probe head 31: upper board 32: Lower board 33: circuit board 332: Bottom 34: Probe 341: Cantilever section 342: Touch Segment 344: Touch End 40: Probe device 42: Probe θ: included angle L: straight line

FIG. 1 is a three-dimensional assembly diagram of a probe card with adjustable level provided by a preferred embodiment of the present invention. Fig. 2 is an exploded perspective view of the level-adjustable probe card provided by the preferred embodiment of the present invention. Figure 3 is a bottom view of the level-adjustable probe card provided by the preferred embodiment of the present invention. Fig. 4 is a partial enlarged view of Fig. 3. Fig. 5 is a left side view of the level-adjustable probe card provided by the preferred embodiment of the present invention. Fig. 6 is a partial enlarged view of Fig. 5. FIG. 7 is a three-dimensional assembly diagram of a probe card with an adjustable level and a probe device provided by the preferred embodiment of the present invention. FIG. 8 is a three-dimensional exploded view of the level-adjustable probe card and the probe device provided by the preferred embodiment of the present invention.

10: Probe card with adjustable level

12: Space converter

14: Structural reinforcement

142: missing slot

16: connecting board

19: Force sensor

20: Elastic board

22: Central

24: Adjusting arm

242: Extension

244: Installation Department

26: upper surface

28: Electrical connector

30: Probe head

31: upper board

32: Lower board

33: circuit board

Claims (10)

A probe card with adjustable level, including: An elastic plate having a central part and a plurality of adjusting arms extending from the periphery of the central part; and A probe head includes at least one probe, and the probe head is arranged at the center of the elastic plate body. The level-adjustable probe card according to claim 1, wherein the adjusting arms of the elastic plate body extend radially from the periphery of the central portion at equal intervals and angles. The level-adjustable probe card according to claim 1, wherein the elastic plate body has three adjusting arms. The level-adjustable probe card according to claim 1, wherein the elastic plate body has three adjustment arms extending radially from the periphery of the central portion with equally spaced included angles, and the probe head includes A plurality of the probes, each of the probes has a point contact section, and the point contact sections of the probes are arranged in a line perpendicular to the extension direction of one of the adjusting arms. The level-adjustable probe card of claim 1, wherein the elastic plate body has an upper surface and a lower surface facing opposite directions, the probe head is disposed on the lower surface of the elastic plate body, and the probe The card further includes a structural reinforcement member arranged on the upper surface of the elastic plate body and located at the central part. The level-adjustable probe card according to claim 5, wherein the probe card has a perforation, the one-point contact position of the probe of the probe head corresponds to the perforation, and the structural reinforcement has a connection with the perforation The connected notch is used for a probe device to be arranged in the notch and for a probe of the probe device to pass through the perforation. The level-adjustable probe card described in claim 1 further includes a plurality of connecting plates. The connecting plates are respectively arranged on the adjusting arms of the elastic plate body for connecting a linear displacement device to make each of the The adjusting arm can be driven by the linear displacement device to swing. The level-adjustable probe card of claim 7, wherein the elastic plate body has an upper surface and a lower surface facing opposite directions, the probe head is disposed on the lower surface of the elastic plate body, and the connections The plate is arranged on the upper surface of the elastic plate body, so that the linear displacement devices are arranged on the upper surface of the elastic plate body. The level-adjustable probe card according to claim 1, wherein the elastic board body is a circuit board and has a plurality of electrical connectors electrically connected to the internal circuits and located on the adjusting arms. The level-adjustable probe card described in claim 1 further includes a plurality of force sensors provided on the adjusting arm of the elastic plate body.

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