JP5838370B2 - Probe for 3D shape measuring equipment - Google Patents

Description

  The present invention relates to a probe for a three-dimensional shape measuring apparatus that scans and measures a three-dimensional shape with high accuracy and low measurement force.

  As a conventional probe for a three-dimensional shape measuring apparatus (hereinafter referred to as a probe) capable of scanning and measuring a three-dimensional shape of a measurement object with high accuracy and low measurement force, there is one disclosed in Patent Document 1. 12 and 13 show the configuration of the probe disclosed in Patent Document 1. FIG.

In FIG. 12, the probe 101 is detachably attached to the three-dimensional shape measuring apparatus 201 by an attachment member 102. The swinging part 103 is slidably connected to the mounting table 104 b fixed to the lower part of the mounting member 102, and the arm mounting part 120 is vertically connected to the swinging part 103 via the vertical elastic body 109. It is held movable. A laser beam 211 for measurement is emitted from the three-dimensional shape measuring apparatus 201 to detect the swing of the arm mounting portion 120 and the displacement in the vertical direction. An arm 122 having a stylus 121 at the lower end is fixed to the lower portion of the arm mounting portion 120. The stylus 121 comes into contact with the measurement surfaces 61a and 61b of the measurement object 60 to be measured, and measures the three-dimensional shape thereof.

  The details will be described with reference to FIG. FIG. 13 is a perspective view when the probe 101 in FIG. 12 is cut along the AA plane. In FIG. 13, the swinging portion 103 that swings with respect to the mounting member 102 includes a lower member 103c, a spacer 103b, an upper member 103a, an extending portion 103e, and a movable side holding portion 103d. Two upper and lower elastic bodies 109 are fixed to the lower member 103c and the upper member 103a via spacers 103b at both ends. A fulcrum member 104c serving as a fulcrum of the swinging motion in the swinging part 103 is fixed so as to hang down from the lower center of the lower member 103c. On the upper surface of the upper member 103a, two extending portions 103e extending vertically upward are provided. Moreover, the movable side holding | maintenance part 103d is provided in the upper end of the extending | stretching part 103e. The movable-side holding portion 103d is a ring-shaped member, and the movable-side magnets 151 are provided at four locations on the same radius at equal intervals.

  A fixed-side holding member 114 is attached to the attachment member 102. On the fixed side holding member 114, fixed side magnets 152 are provided at four locations on the same radius at equal intervals. The positional relationship between the movable-side magnet 151 and the fixed-side magnet 152 is arranged side by side in the Z-axis direction, which is the vertical axis direction. In addition, the movable side magnet 151 and the fixed side magnet 152 are fixed in a direction in which an attractive force acts on each pair.

  The swinging part 103 and the mounting member 102 are connected by a connecting mechanism 104 so as to be swingable. The coupling mechanism 104 includes a prismatic mounting base 104b fixed to the mounting member 102, and a fulcrum member 104c attached to the lower member 103c of the swinging portion. The mounting table 104b has a conical groove 104a formed on the upper surface thereof, and the tip of the fulcrum member 104c is fitted into the groove 104a. Thus, the swinging portion 103 and the mounting member 102 are coupled so as to be rotatable about an arbitrary horizontal axis with the contact portion between the fulcrum member 104c and the conical groove 104a as the rotation center. That is, the swinging part 103 can swing and rotate with respect to the mounting member 102.

  An arm mounting portion 120 is fixed to the central portion of the two upper and lower elastic bodies 109 whose both ends are fixed to the swinging portion 103. A mirror 123 that reflects the measurement laser beam 211 that has passed through the mounting member 102 is provided above the arm mounting portion 120.

  With the above configuration, even if the swinging portion 103 swings and rotates around the tip of the fulcrum member 104c, a restoring force acts in a direction to return the rotation by the attractive force of the magnet. Further, the vertical elastic body 109 allows the arm mounting portion 120 to move minutely in the vertical direction with respect to the swinging portion 103, and an elastic restoring force acts so as to return to the neutral position with respect to the vertical movement. By using two leaf springs as the upper and lower elastic bodies 109, the rigidity in the vertical direction is weakened, the rigidity in the horizontal direction is increased, and measurement can be performed with high accuracy.

  Next, a measurement method using the probe 101 having the above configuration will be described. The shape measurement of the measured surface 61a which is the vertical surface of the measurement object 60 is performed by pressing the stylus 121 attached to the arm 122 against the measured surface 61a with a predetermined pressing force. The pressing force, that is, the measuring force is generated by the restoring force of the swinging portion 103 by slightly moving the probe 101 toward the measured object 60 with the stylus 121 in contact with the surface to be measured 61a.

  Further, in the case of a horizontal surface such as the measured surface 61b of the measurement object 60, the stylus 121 is pressed against the measured surface 61b with a predetermined pressing force. The pressing force, that is, the measuring force is caused by the restoring force of the upper and lower elastic bodies 109 by slightly moving the mounting member 102 downward in the measured object 60 side with the stylus 121 in contact with the surface to be measured 61b. Can be generated.

  As described above, the probe 101 is scanned while applying a constant measuring force to the measurement object 60, and at the same time, the vertical position and inclination of the mirror 123 are detected by the measurement laser beam 211, so that the center of the stylus 121 relative to the probe 101 is detected. The relative position can be obtained. Further, by obtaining the position of the probe 101 by the three-dimensional shape measuring apparatus 201, the shape of the measurement object 60 can be measured three-dimensionally.

JP 2010-286475 A

  However, when measuring with higher accuracy or when using a small stylus, it is necessary to use a smaller measuring force. In the conventional configuration, if the measuring force when measuring the horizontal plane is reduced, the upper and lower elastic bodies It is necessary to further reduce the thickness of the leaf spring, which is an example of 109, and to increase the leaf spring. For example, when the measurement force is 0.5 gf or less, it is necessary to set the thickness of the leaf spring to about 0.05 mm and the horizontal length to about 30 mm. With such a thickness, the rigidity in the horizontal direction becomes small, and in a measuring instrument that detects the tilt and vertical movement of the mirror in the probe, a horizontal deviation becomes a measurement error. Further, when the thickness of the leaf spring is reduced, the rigidity is lowered, and when the leaf spring having a small thickness is increased, the mass of the movable portion is increased, so that the natural frequency of the probe is lowered. When the natural frequency decreases, vibration is likely to occur during measurement, and measurement errors due to vibration occur in measurement data.

  The present invention solves the above-mentioned conventional problems, and the measurement with a smaller measuring force is achieved by reducing the vertical rigidity (vertical axis direction) of the probe vertical movement mechanism and increasing the horizontal rigidity. It is another object of the present invention to provide a probe for a three-dimensional shape measuring apparatus in which vibration during measurement and non-measurement hardly occurs by increasing the natural frequency of the probe.

In order to achieve the above object, a probe for a three-dimensional shape measuring apparatus according to the present invention is mounted on a mounting portion attached to the three-dimensional shape measuring device, a mounting table provided on the mounting portion, and the mounting table. And a pivot part having a first surface and a second surface intersecting each other with the fulcrum member as a fulcrum. A movable side member, and a fixed side member provided at the mounting portion and opposed to the movable side member with a space therebetween, and the movable side member and the fixed side member generate a magnetic attractive force. An urging mechanism that urges the oscillating part so that the oscillating part is directed in a certain direction by the magnetic attraction force and a stylus that contacts the surface to be measured of the object to be measured are arranged at the lower end. The attached arm is suspended and is opposed to the first surface. An arm support portion having a third surface and a fourth surface opposite to the second surface, and a plurality of swing portions provided on the first surface and the second surface of the swing portion, each having a vertical surface a Department-side member, wherein provided the third surface of the arm support portion and the fourth surface, respectively face each other with an interval in the horizontal direction and one of the swing-side member, and the swing portion facing has a vertical surface facing spaced said vertical plane and horizontal side members, and a plurality of arm-side member that is configured to generate the oscillating portion side member and the magnetic attraction force, each other And a plurality of spheres made of a magnetic material that are arranged between the swinging member side member and the arm side member facing each other and are attracted to and contact the vertical surface by the magnetic attraction force.

Specifically, one said rocking | swiveling part side member, one said arm side member facing it, and one piece arrange | positioned between these said rocking | swiveling part side member and said arm side member There the magnetic force sets 5 sets constructed from said ball member, said force sets, for any pair of the five pairs restrains the degree of freedom in a direction that does not match the degrees of freedom are constrained by other four sets Arranged in position and direction.

This structure, the ball body, said swinging portion side member, between said arm member, rolls while contacting on the vertical plane. Thereby, the arm support portion can move on the vertical axis with respect to the swinging portion. In addition, since a magnetic attractive force acts between the swing part side member and the arm side member, the arm support part moves on a vertical axis, and the swing part side member and the arm side member When is separated, restoring force works in the approaching direction. The measuring force at the time of horizontal plane measurement is that the arm support portion held so as to be movable only in the vertical axis direction with respect to the swinging portion is biased by a magnetic attraction force toward a neutral position in the vertical axis direction. It occurs in. Swinging portion side member constituting the individual magnetic set, the arm member, and the sphere body, but each point contact, since the contact of the rigid body with each other, the movement of the five degrees of freedom other than the vertical direction, the rotation The rigidity can be increased. Thereby, the position of the stylus can be detected with high accuracy by detecting only the inclination of the position detection mirror provided in the arm support portion and the movement in the vertical axis direction. In addition, the magnetic force set only needs to have a magnetic attractive force sufficient to hold the arm support portion and the arm, stylus, and mirror. For example, a permanent magnet having a diameter of about 1 mm and a steel ball may be used. Thereby, the mass of a movable part becomes small, a natural frequency can be made high, and it becomes difficult to generate | occur | produce a vibration. In addition, the restoring force due to the magnetic attractive force can be reduced, and the measuring force can be reduced to 0.3 gf or less, for example.

  As an alternative, one of the swinging member side member and the arm side member may be formed of a permanent magnet, and the other may be formed of a magnetic material.

And the swing-side member, and the arm member, 5 pair arrangement of the ball body, vertical plane a on the three pairs, are arranged two pairs vertically on the plane b intersecting the vertical plane a May be.

  According to the probe for the three-dimensional shape measuring apparatus of the present invention, since the contact force between the stylus and the measurement object, that is, the measurement force can be reduced, it is possible to measure with high accuracy, and even a minute stylus can be measured without being damaged. I can do it. In addition, since the natural frequency of the movable part can be reduced, vibration is less likely to occur, and high-precision measurement can be performed.

The perspective view of the probe for three-dimensional shape measuring apparatuses in embodiment of this invention. The perspective view when the probe for three-dimensional shape measuring apparatuses in FIG. 1 is cut | disconnected by the AA surface. Sectional drawing in the BB surface of the probe for three-dimensional shape measuring apparatuses in FIG. The perspective view which decomposed | disassembled the principal part in FIG. The figure which shows the positional relationship of the permanent magnets 53a and 54a and the steel ball 55a in FIG. It shows the state after the movement of the vertical movement Organization of FIG. The figure which shows an example of the shape measuring apparatus provided with the probe shown in FIG. The figure which shows the structure of the measurement point information determination part with which the shape measuring apparatus shown in FIG. 7 is provided, and a probe optical part. It is a figure for demonstrating the inclination angle of a probe when measuring a to-be-measured surface with the probe shown in FIG. 1, and the figure which represented the to-be-measured object with the top view. It is a figure for demonstrating the inclination-angle of a probe when measuring a to-be-measured surface with the probe shown in FIG. 1, and the figure which represented the to-be-measured object with the side view. The perspective view which shows the alternative up-and-down moving mechanism. 11b is a front view of FIG. FIG. 11B is a plan view of FIG. The perspective view of an example of the conventional probe for three-dimensional shape measuring apparatuses. FIG. 13 is a perspective view when the conventional probe for a three-dimensional shape measuring apparatus in FIG. 12 is cut along an AA plane.

  Hereinafter, a probe for a three-dimensional shape measuring apparatus (hereinafter referred to as a probe 1) according to an embodiment of the present invention will be described with reference to the drawings.

  First, the probe 1 will be described with reference to FIGS. FIG. 1 is a perspective view showing an external appearance of a probe 1 according to Embodiment 1 of the present invention. FIG. 2 is a perspective view of a part of FIG. 1 cut along the AA plane (XZ plane). 3 is a cross-sectional view taken along the BB plane (YZ plane) of FIG. 4 is an exploded perspective view of only the movable part in FIG.

In FIG. 1, the probe 1 is detachably attached to the three-dimensional shape measuring apparatus 201 by means of a mounting part 2 having a cylindrical shape with openings at both ends. The upper end side of the closing member 5 is fixedly attached to the lower portion of the attachment portion 2. A mounting table 41 is fixedly attached to the lower end side of the closing member 5. An arm 22 having a stylus 21 at the lower end is attached to the mounting table 41 so as to swing and move up and down. A laser beam 111 for measurement is emitted from the three-dimensional shape measuring apparatus 201 to detect the swinging and vertical displacement of the arm 22 and the stylus 21. The probe 1 measures its three-dimensional shape while bringing the stylus 21 into contact with the measurement surfaces 61a and 61b of the measuring object 60 to be measured.

  Details of the structure of the probe 1 will be described below with reference to FIGS.

  In FIG. 2, the probe 1 includes an attachment portion 2 and a member fixed thereto, a swinging portion 3 including a lower member 3 a and a movable side holding portion 3 c and members fixed thereto, an arm support portion 20, and a member fixed thereto. And a member. The swinging part performs a swinging movement with respect to the mounting part 2, and the arm support part 20 performs a vertical movement with respect to the swinging part. The configuration is shown below.

  The attachment portion 2 forms a cylindrical portion so that the attachment portion 2 can be attached to the three-dimensional shape measuring apparatus 201, and the measurement laser beam 111 passes through the central portion thereof and does not contact the movable side holding portion 3c of the swinging portion. As described above, the cavity portion 11 is provided. A substantially ring-shaped fixed-side holding member 33 is fixedly attached to the lower portion of the attachment portion 2. The fixed side holding member 33 holds four fixed side magnets 52. The fixed side magnets 52 are arranged at intervals of 90 degrees on the circumference centered on the central axis of the probe 1. A closing member 5 is fixed to the opening at the bottom of the mounting portion 2. In the lower part of the closing member 5, a swinging through hole 5 a is opened so that the lower member 3 a of the swinging part 3 does not come into contact. A mounting table 41, which is a prism that extends in the horizontal direction, is fixed to the closing member 5, and a conical groove 41 a is formed on the central axis of the probe 1 of the mounting table 41.

The movable side holding part 3 c of the swing part 3 has a ring shape at the top, and the four movable side magnets 51, which are examples of the movable side member, have the center axis of the probe 1 as well as the fixed side magnet 52. It is held at 90 degree intervals on the center circle. The movable side magnet 51 and the fixed side magnet 52 make a pair. That is, the individual movable side magnets 51 are opposed to each other in the direction of the central axis (vertical direction or vertical direction) of the corresponding fixed side magnet 52 and the probe 1. The lower member 3a is fixed to the movable side holding member 3c via the extending portion 3b shown in FIG. Permanent magnets 53a to 53e (for permanent magnets 53a and 53b, see FIG. 4) are embedded in the lower member 3a as swinging member side members. Further, a fulcrum member 42 constituted by a needle-like protrusion that protrudes downward in the vertical direction is fixed to a part of the lower member 3a on the probe central axis.

  An arm 22 having a stylus 21 at the lower end is attached to the lower surface of the arm support portion 20 in a suspended manner. Further, a position detection mirror 23 for reflecting the measurement laser beam 111 for detecting the vertical movement position and inclination of the arm support portion is fixed to the upper surface of the arm support portion 20. Further, as shown most clearly in FIG. 4, permanent magnets 54 a to 54 e are embedded in the arm support portion 20 as arm side members. The arm support part 20 is provided with a through hole 24 extending in the horizontal direction in the center. The mounting table 41, the fulcrum member 42, and a part of the lower member 3a of the swinging unit 3 that fixes the fulcrum member 42 are positioned in the through hole 24 while maintaining a gap. That is, the mounting table 41 extends through the through hole 24. The portion for fixing the fulcrum member 42 of the lower member 3a of the swinging portion 3 has a prismatic shape, and the fulcrum member 42 is fixed to the lower portion thereof. Further, it extends through the through hole 24 above the fulcrum member 42.

  Steel balls 55a-e (steel balls 55b, 55d, 55e are shown in FIG. 4) between the permanent magnets 53a-e embedded in the lower member 3a and the permanent magnets 54a-e embedded in the arm support portion 20. Is held in contact.

  In FIG. 3, as described above, the movable side holding portion 3c of the oscillating portion 3 is fixed to the lower member 3a of the oscillating portion 3 via the extending portion 3b of the oscillating portion. The mounting table 41 is screwed at both ends to the lower part of the closing member 5. The tip position of the fulcrum member 42 is configured to contact the lowest point of the conical groove 41 a of the mounting table 41. With such a configuration, the lower member 3a of the swinging portion and the mounting portion 2 are connected so as to be swingable with the contact portion between the fulcrum member 42 and the conical groove 41a as the swing center. The lower member 3a of the swinging portion 3 has a center of gravity passing through the tip of the fulcrum member 42 so that the arm 22 faces in the vertical direction when the fulcrum member 42 is fitted and connected to the conical groove 41a of the mounting table 41. It is preferable to be configured to be positioned on the vertical axis.

  The four movable side magnets 51 and the four fixed side magnets 52 are coaxially arranged with a certain distance. Moreover, about each pair, it arrange | positions in the direction which a suction force works mutually. In the present embodiment, all the movable side magnets 51 and the fixed side magnets 52 are arranged so that the top is the N pole and the bottom is the S pole.

  4 is a view other than the fixed portion (the portion fixed to the three-dimensional shape measuring apparatus 201) including the mounting portion 2, the fixed-side holding member 33, the fixed-side magnet 52, the closing member 5, and the mounting table 41 in FIG. It is a disassembled perspective view of the movable part.

  In FIG. 4, the lower member 3 a of the swing portion includes a prismatic portion that fixes the fulcrum member 42 and a portion that holds the arm support portion 20. The portion for holding the arm support portion 20 has a shape surrounding the arm support portion 20 inside, and includes a vertical surface 49 parallel to the YZ plane and a vertical surface 50 parallel to the XZ plane shown in FIG. The vertical surface (first surface) 49 and the vertical surface (second surface) 50 are orthogonal to each other when viewed in plan, that is, when viewed from the Z-axis direction. A total of five columnar permanent magnets 53a to 53e are embedded in these vertical surfaces 49 and 50 as swinging member side members. Among them, the three permanent magnets 53 a to 53 c are embedded and fixed so that one of the planes is flush with the vertical plane 49. The remaining two permanent magnets 53 d and 53 e are embedded and fixed so that one of the planes thereof is flush with the vertical plane 50. The vertical surface 50 is a surface orthogonal to the vertical surface 49. The five permanent magnets 53 have polarity in the cylindrical axis direction.

  The arm support portion 20 shown in FIG. 4 is held inside the lower member 3a of the swing portion, and has vertical surfaces 56 and 57 formed therein. The vertical surface (third surface) 56 is a surface parallel to the YZ plane, the vertical surface (fourth surface) 57 is a surface perpendicular to the XZ plane, and the vertical surfaces 56 and 57 are orthogonal to each other in plan view. Further, the vertical surfaces 56 and 57 respectively face the vertical surfaces 49 and 50 formed on the lower member 3a of the swinging portion in parallel with a horizontal interval. Specifically, the vertical surface 56 faces the vertical surface 49 of the lower member 3a in the X-axis direction, and the vertical surface 57 faces the vertical surface 50 of the lower member 3a in the Y-axis direction. A total of five columnar permanent magnets 54a to 54e are embedded and fixed on the vertical surfaces 56 and 57 of the arm support portion 20 as arm side members. Among them, the three permanent magnets 54 a to 54 c are embedded and fixed so that one of the planes is flush with the vertical surface 56. The remaining two permanent magnets 54 d and 54 e are embedded and fixed so that one of the planes thereof is flush with the vertical surface 57. As a result, the permanent magnets 53a to 53e embedded in the lower member 3a of the swinging part and the permanent magnets 54a to 54e embedded in the arm support part 20 are positioned to face each other at an interval in the horizontal direction. . The five permanent magnets 54a to 54e have a polarity in the cylinder axis direction, and the direction thereof is the same direction and coaxial with the opposing permanent magnets 53a to 53e. That is, the permanent magnets 54a to 54e and the permanent magnets 53a to 53e are opposite to each other with the steel balls 55a to 55e interposed therebetween (see FIG. 5). The opposing surfaces of the permanent magnets 53a to 54e and 54a to 54e are parallel and vertical surfaces.

  Five steel balls 55a to 55e are sandwiched between the opposing vertical surfaces of the permanent magnets 53a to e and 54a to e shown in FIG. 4 as magnetic balls. Between the opposing vertical surfaces of the permanent magnets 53a to 54e and 54a to 54e, the permanent magnets 53a and 54a constituting one set of five sets (magnetic force set) composed of the steel balls 55a to 55e, The steel ball 55a is shown in FIG. The steel ball 55a can roll on a vertical surface as a contact surface while making point contact with two permanent magnets. Thereby, the arm support portion 20 can move on the vertical surface with respect to the lower member 3a of the swinging portion. In FIG. 4, the arm support portion 20 is formed by three sets of permanent magnets 53 a to 53 c and 54 a to c and steel balls 55 a to 55 c provided on the vertical surface 49 of the lower member 3 a and the vertical surface 56 of the arm support portion 20. It can move only in parallel with the vertical surface 49 with respect to the lower member 3a of the swinging portion. However, if the arrangement of three sets of permanent magnets and spheres is arranged on one straight line on the vertical plane, the rotation around the straight line cannot be restricted, so the three pairs of arrangements may not line up on a straight line. is necessary. In the present embodiment, the group (first group) composed of the permanent magnets 53a, 54a and the steel balls 55a and the group (second group) composed of the permanent magnets 53b, 54b and the steel balls 55b are straight lines extending in the Y-axis direction. The permanent magnets 53c, 54c and the steel ball 55c, which are arranged on the line but constitute the remaining one set (third set), deviate from the straight line in the Y-axis direction in the Z-axis direction (see FIG. In the Y-axis direction with respect to both the first set and the second set. On the other hand, the arm support portion 20 has a vertical surface 49 with respect to the lower member 3a of the swing portion by the two pairs of permanent magnets 53d to e and 54d to e and the steel balls 55d to e provided on the vertical surfaces 50 and 57. Can move only in parallel. Since the vertical surface 49 and the vertical surface 50 are orthogonal surfaces, the arm support portion 20 can move only in the vertical axis direction with respect to the lower member 3a of the swinging portion. In the present embodiment, the vertical surfaces 49 and 50 are orthogonal in a plan view, but are not necessarily orthogonal. If the vertical surfaces 49 and 50 are surfaces that intersect at a certain angle in plan view, similarly, the arm support portion 20 can move only in the vertical axis direction. Further, either one of the permanent magnets 53a and 54a may be replaced with a magnetic material.

  The probe 1 of the present embodiment configured as described above operates as follows.

The lower member 3a and the movable side holding portion 3c of the swinging portion 3 shown in FIG. 2 are in any direction that intersects the measuring laser beam 111 with respect to the attachment portion 2 with the point of the fulcrum member 42 as the center. Can also be swung. In the present embodiment, the optical axis of the measurement laser beam coincides with the Z-axis direction that is the vertical direction. When the oscillating portion 3 is tilted in the horizontal direction around the point of the fulcrum member 42, the distance between the movable side magnet 51 and the fixed side magnet 52 is increased. Restoring force works in the direction of approach. As a result, a magnetic restoring force acts in a direction in which the inclination is returned to the entire swinging unit 3 (a direction in which the arm 22 is in a neutral position extending in the vertical direction). Similarly, when the oscillating portion rotates around the vertical axis around the point of the fulcrum member 42, the direction of returning rotation to the oscillating portion 3 by the magnetic force between the movable side magnet 51 and the fixed side magnet 52 ( A magnetic restoring force in a direction in which the posture of the peristaltic unit 3 around the vertical axis is returned. Due to these magnetic restoring forces, the swinging portion during non-measurement is held in a posture in which the extending direction of the arm 22 coincides with the vertical direction.

  As described above, the arm support portion 20, the arm 22, and the stylus 21 are movable on the vertical axis with respect to the lower member 3a of the swinging portion 3 shown in FIG. Since the magnetic attractive force acts between the permanent magnets 53a to 53e that are the swinging part side members and the permanent magnets 54a to 54e that are the arm side members, the arm support part 20 moves on the vertical axis and becomes permanent. When the magnets 53a to 53e and the permanent magnets 54a to 54e are separated from each other in the vertical axis direction, a restoring force acts in a direction in which the permanent magnets 53a to 53e and the permanent magnets 54a to 54e approach each other. FIG. 6 shows the state of a set composed of permanent magnets 53a and 54a and a steel ball 55a. FIG. 6 shows a state in which the arm support portion 20 has moved by ΔZ vertically downward with respect to the swinging portion. At this time, the sphere 55a moves vertically downward by a distance that is ½ of ΔZ while rolling on the tip surfaces of the permanent magnets 53a and 54a. In this state, the magnetic axis of the permanent magnet 53a and the magnetic axis of the permanent magnet 54a are deviated by ΔZ. Therefore, due to the nature of the magnet, the magnetic axis is aligned, that is, the arm support 20 is moved vertically upward. Restoring force F works. Further, since the movement of the steel ball 55a is rolling contact, the frictional force is very small, and the arm support portion 20 can move with a slight force against the lower member 3a.

  As described above, the arm support portion 20 can move only in the vertical axis direction with respect to the swinging portion, and has a restoring force in the vertical axis direction by a magnetic attraction force.

The operation will be described with reference to FIG. When measuring the shape of a surface (vertical surface: surface to be measured 61a in the case of the object to be measured 60 in FIG. 2) extending in the vertical direction or the substantially vertical direction of the object to be measured, the stylus 21 is pressed against the surface to be measured. The force is obtained as follows. When the attachment portion 2 is slightly moved in the horizontal direction toward the measurement object 60 in a state where the stylus 21 is in contact with the surface to be measured 61a, the movable member 3 is movable with the lower member 3a of the swinging portion 3 around the point of the fulcrum member 42. As the side holding portion 3c is inclined, the arm 22 is inclined in the horizontal direction. When the oscillating portion 3 is tilted, the arm 22 is moved in the vertical direction by the magnetic attractive force between the movable side magnet 51 provided on the movable side member 3c of the oscillating portion 3 and the fixed side magnet 52 provided on the mounting portion 2. A restoring force that restores the oscillating portions 3a to 3c to the neutral position in the initial state that extends in the range is generated. Due to this magnetic restoring force, the stylus 21 is pressed against the surface to be measured 61a with a predetermined measuring force.

  As described above, the measuring force at the time of measuring the vertical plane is applied by the magnetic attractive force of the movable side and fixed side magnets 51 and 52 by the swinging portions 3a to 3c that are swingably connected to the mounting portion 2 by the connecting mechanism. It is caused by being energized. The measuring force at the time of measuring the vertical plane can be adjusted by the magnetic force of the movable side magnet 51 and the fixed side magnet 52 and the distance between them. For example, in this embodiment, the magnetic force and distance between the movable side magnet 51 and the fixed side magnet 52 are set so that the horizontal displacement of the stylus becomes 10 μm when the tip of the stylus 21 is pushed at 0.3 mN. Yes. As described above, the probe 1 of the present embodiment can measure the shape of the vertical plane with a small measuring force.

  When measuring the shape of the surface (horizontal plane: surface to be measured 61b in the case of the object to be measured 60 in FIG. 1) extending in the horizontal direction or substantially horizontal direction of the measurement object, the measuring force that presses the stylus 21 against the surface to be measured Is obtained as follows. At the time of non-measurement, the arm support portion 20 moves downward in the vertical direction due to its weight (gravity), and the positional relationship between the permanent magnets 53a and 54a and the ball 55a constituting one set is as shown in FIG. However, the magnetic restoring force F increases as the movement amount ΔZ increases. Therefore, the restoring force F and gravity are balanced at a certain position. If the mounting portion 2 is slightly moved vertically downward toward the measurement object 60 with the stylus 21 being in contact with the surface to be measured 61b, ΔZ becomes smaller and the restoring force F is applied to the arm support portion 20. It becomes weaker than gravity. The difference becomes a measuring force, and the stylus 21 is pressed against the surface to be measured 61b.

  As described above, the measurement force at the time of horizontal plane measurement is generated by the elastic force generated by the deviation of the magnetic axis between the two permanent magnets urging the arm support portion 20. The rigidity of the arm support portion 20 in the vertical direction is not limited as long as it can support the weight of the arm support portion 20 itself, the arm 22 and the stylus 21. That is, the weight that the permanent magnets 53 and 54 need to support is light. Therefore, the magnetic force of the permanent magnets 53 and 54 can be weakened to reduce the elastic biasing force due to the magnetic axis deviation. Therefore, the probe 1 of this embodiment can measure the shape of the horizontal plane with a small measuring force.

  As described above, the probe 1 of the present embodiment can perform high-accuracy measurement with a small measurement force on both the vertical plane and the horizontal plane.

  Since the combination of the magnets 53 and 54 and the sphere 55 that restrain the movement of the arm support portion 20 other than in the vertical axis direction shown in FIG. 4 is a rigid body, the rigidity is sufficient with respect to the movement direction and rotation other than the vertical axis direction. Can be high. The horizontal displacement of the arm support portion 20 due to the reaction force of the measurement force acting on the stylus 21 during the measurement of the vertical plane, the horizontal displacement of the position detection mirror 23 and the rotation around the vertical axis will be described later. Since it cannot be detected by the measurement laser beam 111 of 201, a measurement error occurs. However, since the probe 1 of the present embodiment has high rigidity with respect to the horizontal movement and rotation of the arm support portion 20, the horizontal displacement of the position detection mirror 23 caused by the reaction force of the measuring force and the rotation around the vertical axis are reduced. It is possible to measure the shape of the vertical measurement surface 61b of the measurement object 60 with high accuracy.

  Next, the shape measuring apparatus provided with the probe 1 of this embodiment will be described with reference to FIGS.

In general, the three-dimensional shape measuring apparatus 201 controls the movement of the probe 1 while controlling the movement of the probe 1 so that the measurement force pressing the stylus 21 against the measurement surfaces 61a and 61b is substantially constant by bringing the probe 1 into contact with the measurement object 60. Measurement is performed by moving along the measurement surfaces 61a and 61b. By detecting the position of the probe 1 in the three-dimensional space by the laser length measuring device and adding the displacement of the stylus 21 relative to the probe 1 to the position coordinates of the probe 1, surface shape data of the measured surfaces 61a and 61b is obtained. It is done.

  As an example of such a shape measuring apparatus, the one disclosed in Patent Document 1 (Japanese Patent Laid-Open No. 2010-286475) described above is such that a measuring object 60 is fixed on a surface plate as shown in FIG. This type moves in all directions of the X axis, Y axis, and Z axis. In addition, there is a type in which the measurement object 60 is moved to the X axis and the Y axis, and the probe is moved to the Z axis.

The three-dimensional shape measuring apparatus 201 shown in FIG. 7 includes a stage 295 having an X-stage 2951 and a Y-stage 2952 that are installed on a stone surface plate 292 and movable in the X-axis and Y-axis directions. On this stage 295, a Z-table 293, a He-Ne laser (laser light generation unit) 210, a measurement point information determination unit 220, and a probe optical unit 231 are mounted. Therefore, the stage 295 can move the Z-table 293, the He-Ne laser 210, the measurement point information determination unit 220, and the probe optical unit 231 in the X-axis and Y-axis directions.

  The measurement point information determination unit 220 and the probe optical unit 231 will be described in detail with reference to FIGS. As shown in FIG. 8, the measurement point information determination unit 220 includes an optical system 221 for obtaining position information of the measured surfaces 61 a and 61 b, a position coordinate measurement unit 224, and an addition unit 225. The probe optical unit 231 includes a mirror position inclination detection unit 226, a stylus position calculation unit 223, a dichroic mirror 2211 a, and a focus lens 17. The probe optical unit 231 is attached to the movable side of the Z-table 293 together with the probe 1. The mirror position tilt detection unit 226, the stylus position calculation unit 223, the position coordinate measurement unit 224, and the addition unit 225 are connected to the optical system 221 and are components for obtaining stylus position information at the time of measurement.

  The measurement laser beam 111 generated by the He—Ne laser 210 is split into four beams by the optical system 221 in order to obtain the three-dimensional coordinate positions of the measurement target surfaces 61 a and 61 b of the measurement object 60. The optical system 221 detects the amount of movement of the stage 295 (see FIG. 7) in the X-axis direction and Y-axis direction, that is, the coordinate values of the measured surfaces 61a and 61b in the X-axis direction and Y-axis direction, and is not shown. However, it has an X-axis reference plate having a reference surface made of a mirror surface orthogonal to the X-axis direction, and a Y-axis reference plate having a reference surface made of a mirror surface orthogonal to the Y-axis direction. Further, the optical system 221 is also provided with a Z reference plate 230 (see FIG. 7) having a mirror surface orthogonal to the Z-axis direction. The reference surface of each reference plate has a flatness of the order of 0.01 microns.

  In the shape measuring method of the measured surfaces 61a and 61b, as described in, for example, Japanese Patent Laid-Open No. 10-170243, a laser beam is irradiated to irradiate each X-axis, Y-axis, and Z-axis reference surface. A known laser length measurement method is used to detect a change in the phase of the reflected laser light by counting interference signals between the light and the laser light reflected by each reference surface. More specifically, in this laser length measurement method, for example, as disclosed in Japanese Patent Laid-Open No. 4-1503, the laser light irradiated to each reference surface is irradiated with reference light and measurement light by a branch member such as a prism. And the phases of the reference light and the measurement light are shifted by 90 degrees. Then, irradiate the measurement light to the reference surface and reflect it, electrically detect the interference light caused by the phase difference between the reflected light and the reference light returning, and based on the Lissajous figure created from the obtained interference fringe signal The distance between the point and the reference plane is measured.

  The position coordinate measurement unit 224 is a part that executes such a length measurement method, and a detection unit 224a that measures the X coordinate value, the Y coordinate value, and the Z coordinate value of the measurement point on the measurement target surfaces 61a and 61b. ~ 224c. In the present embodiment, as shown in FIG. 7, since the stage 295 moves with respect to the measurement object 60 placed on the stone surface plate 292, the X coordinate value, the Y coordinate value, and the The Z coordinate value can be restated as the absolute position coordinate value of the attachment portion 2 of the probe 1 attached to the Z-table 293.

  In the present embodiment, the detection unit 224c is a part that measures the Z coordinate value of the stylus 21 in the probe 1, and functions as a stylus position measuring device. Hereinafter, this point will be described in detail. As shown in FIG. 8, a part of the measurement laser beam 111 is focused to the center point of the position detection mirror 23 attached to the arm support 20 of the probe 1 attached to the lower end of the Z-table 293. 17 is irradiated. The irradiated measurement laser beam 111 is reflected by the position detection mirror 23, and the reflected light 211b is transmitted without being reflected by the dichroic mirror 2211a which is a light separation unit, and is reflected by the half mirror 2211b. The detection unit 224c is irradiated to measure the Z coordinate value of the stylus 21.

  Calculation results of the position coordinate measurement unit 224 based on the detection results of the position detection units 224a to 224c (in this embodiment, the X-axis and Y-axis coordinate values of the mounting unit 2 and the Z-axis coordinate value of the stylus 21) and mirror position inclination detection The calculation result of the stylus position calculation unit 223 based on the detection result of the unit 226 is added by the adding unit 225 to calculate the shape of the measured surface 61. The mirror position inclination detection unit 226 includes a displacement of the stylus 21 (X-axis and Y-axis directions) associated with the inclination of the swinging units 3a to 3c and a displacement of the stylus 21 associated with the vertical displacement of the arm support unit 20 (the Z-axis direction). ) Is detected.

Hereinafter, the mirror position inclination detection unit 226 and the stylus position calculation unit 223 will be described. The mirror position inclination detection unit 226 includes a semiconductor laser 227 that irradiates the position detection mirror 23, an inclination angle detection unit 222, and a vertical position detection unit 228. Laser light 229 of a semiconductor laser (laser light generation unit) 227 having a wavelength different from that of the He-Ne laser 210 is applied to the position detection mirror 23 via the dichroic mirror 2211a. The reflected light 229 b of the laser beam 229 reflected by the position detection mirror 23 is reflected by the dichroic mirror 2211 a and then enters the tilt angle detection unit 222 and the vertical position detection unit 228.

  The inclination angle detection unit 222 is configured by a photodetector having an inclination detection light receiving surface that receives the reflected light 229b and converts it into an electrical signal. An electrical signal corresponding to the dimension coordinate value is sent to the stylus position calculation unit 223. The two-dimensional coordinate value corresponds to the inclination angle of the arm 22 that holds the stylus 21. The stylus position calculation unit 223 converts the angle signal input from the tilt angle detection unit 222 into a displacement amount of the stylus 21 provided in the probe 1.

  Since the stylus 21 is spherical as shown in the figure, the measured X coordinate value, measured Y coordinate value, and measured Z coordinate value are the center coordinates of the stylus 21. Therefore, the true coordinate value of the measurement point on the measured surface 61a is a value shifted by the radius value of the stylus 21 in the direction perpendicular to the scanning direction of the probe 1.

  The vertical position detection unit 228 included in the mirror position inclination detection unit 226 detects the vertical displacement of the position detection mirror 23 with respect to the mounting unit 2 from the reflected light 229 b from the position detection mirror 23. The detection method may be a known technique such as a method using a hologram as disclosed in JP-A-2008-292236.

The operation of the three-dimensional shape measuring apparatus 201 configured as described above, that is, the shape measuring method for the measurement target surfaces 61a and 61b of the measurement object 60 will be described below. This shape measuring method is executed by the operation control of the control device 280 shown in FIG.

  First, the case of measuring the measured surface 61a, which is a vertical surface, will be described with reference to FIGS. As described above, the object to be measured is such that the stylus 21 shown in FIG. 8 is brought into contact with the surface to be measured 61a, and the stylus 21 presses the surface to be measured 61a with a measuring force of, for example, about 0.3 mN (= 30 mgf). 60, a stage 295 having a Z-table 293 to which the probe 1 is attached is disposed.

For example, FIG. 9 and FIG. 10 will be described by taking as an example a case where the measured surface 61a of the measuring object 60 is a cylindrical inner peripheral surface and its shape is measured. As shown in FIG. 9, the measurement is performed while the stylus 21 is in contact with the measured surface 61a. At this time, the probe 1 advances along the direction of the arrow 121a. In this case, by moving in the direction of slightly arrow 121b probe 1, proceeds while maintaining a constant or substantially constant inclination β luer over arm 22 against the vertical direction shown in FIG. 10. In other words, tilting the A over arm 22 in any direction, and so that the inclination β is kept constant or nearly constant with respect to the vertical direction, controls the driving unit 294 of the stage 295 by the control device 280 shown in FIG. 7 Then, the moving amount and moving direction of the stage 295 in the X-axis direction and the Y-axis direction are controlled. In the present embodiment by A over arm 22 distal end of the displacement is adjusted to an angle such as to maintain the 10 [mu] m, it is possible to maintain the measurement force 0.3 mN.

  Based on such a measurement operation, as described above, the measurement X coordinate at the measurement point of the surface 61a to be measured is added by the addition unit 225 via the stylus position calculation unit 223 and the position coordinate measurement unit 224 shown in FIG. A value, a measured Y coordinate value, and a measured Z coordinate value are determined.

  Next, a case where the measurement target surface 61b that is a horizontal plane is measured will be described. In this case, the measurement force that presses the stylus 21 against the surface to be measured 61b needs to be generated downward in the vertical direction. In addition, in order to measure with high accuracy, it is necessary to make the measurement force downward in the vertical direction constant. The controller 280 drives the drive unit 294 to move the stage 295 (see FIG. 7) in the horizontal direction, and the position detection mirror 23 based on the detection result of the vertical position detection unit 228 of the mirror position inclination detection unit 226. The Z-table 293 is operated so that the amount of displacement in the vertical direction is constant. For example, when the arm support portion 20 at the time of non-measurement moves 100 μm vertically downward by gravity with respect to the swinging portions 3a to 3c, the measurement force is controlled by controlling so that the deflection is 90 μm at the time of measurement. Can be kept at 3 mN. In addition, since the stylus 21 also moves up and down following the minute displacement of the surface 61b to be measured, the detection by the detection unit 224c that functions as a length measurement unit for the Z coordinate of the position detection mirror 23 that moves together with the stylus 21. Depending on the value, the minute displacement of the measurement object can also be measured.

  Further, when the inclination increases from a complete horizontal plane, for example, when measuring an inclination of about 45 degrees, if a pressing force is generated vertically downward, the arm 22 of the stylus 21 is inclined, but the inclination Since the angle of the arm is detected by the angle detection unit 222, highly accurate measurement is possible by converting the amount of inclination into a stylus displacement and adding correction. However, in this measurement method, a rotation error around the Z axis of the mirror 23 and a shift in translation in the X and Y axis directions cannot be detected, resulting in a measurement error. As described above, the probe 1 of the present invention can increase the rigidity around the Z axis and in the X and Y axis directions in the vertical mechanism portion composed of the permanent magnets 53a to e and 54a to e and the balls 55a to e. Therefore, such an error can be reduced. In order to detect the tilt and vertical position of the arm support unit 20, the arm support unit is provided with a position detection mirror, but a plurality of displacement sensors of the electrostatic capacity sensor are used to obtain a plurality of position displacements of the arm support unit. It is also possible to detect by this.

  The probe 1 can hold the swinging portions 3a to 3c in a certain direction and can hold the arm support portion 20 in a certain position by a magnetic force, so that the axis of the arm 22 to which the stylus 21 is fixed is vertical. It can be used not only in the direction but also in an inclined state.

In this embodiment, five pairs of magnets are arranged on two planes, but as an alternative, as shown in FIGS. 11a, 11b, and 11c, parallel curved surfaces and five pairs of magnets and steel on a perpendicular plane that intersects them. Even if the sphere is arranged, the same effect can be obtained. 11a is a perspective view showing an arrangement of the vertical movement mechanism composed of the lower member 3a of the swinging portion, the arm support portion 20, and the magnets 53a to e, 54a to e, and the balls 55a to 55e, and FIG. The front view and FIG. 11c are plan views thereof. In the plan view of FIG. 11 c, a curved surface 49 a is formed on the lower member 3 a of the rocking portion 3. The curved surface 49a is a cylindrical inner surface, and the cylinder axis thereof coincides with the vertical direction. A curved surface 56 a facing this is formed in the arm support portion 20. The curved surface 56a is a surface that forms a concentric cylinder with the curved surface 49a. That is, the curved surface 49a and the curved surface 56a are vertical surfaces having a certain distance from each other. Permanent magnets 53a-c, 54a-c are arranged along these curved surfaces 49a, 56a, and steel balls 55a-c are held by magnetic force therebetween. The permanent magnets 53 d to e and 54 d to e are held by a vertical surface 50 a formed on the lower member 3 a of the swing unit 3 and a vertical surface 57 a formed on the arm support unit 20. The vertical surfaces 50a and 57a are vertical planes parallel to each other, like the above-described vertical surfaces 50 and 57 (FIG. 4). In such a configuration, the arm support portion 20 is curved with respect to the lower member 3a of the swinging portion by combining the permanent magnets 53a to 53c, 54a to 54c and the three pairs of permanent magnets 55a to 55c. 49a and the curved surface 56a can move in the Z-axis direction while maintaining a certain distance. However, this alone can also move with respect to rotation about the Z axis and rotation about the X axis. For this reason, the combination of two pairs of permanent magnets and spheres of the permanent magnets 53d to e and 54d to e and the spheres 55d to 55e can be added to restrict the rotation thereof. In addition to this, the arrangement of the five pairs of the permanent magnet and the sphere can obtain the same effect as long as the degree of freedom other than the vertical axis can be constrained.

  4 and 11a (alternative), when there is no restraint, the arm support portion 20 has three degrees of freedom related to movement in the three directions of X, Y, and Z with respect to the swing portion 3, the X axis, and the Y axis. It can move and rotate with a total of 6 degrees of freedom with 3 degrees of freedom about rotation and rotation around the Z axis, but with 5 sets of permanent magnets and steel balls, 5 degrees of freedom are constrained, Only the remaining one degree of freedom in the Z direction can be movably arranged. Therefore, 5 pairs of magnets and steel balls are always necessary. Conversely, if there are 6 or more pairs, at least one pair of magnets and spheres will float without contact with each other, and the vertical position will be exactly vertical. Cannot move in the axial direction.

If the direction of the degree of freedom in which one of the five pairs of magnets and steel balls is constrained overlaps the direction of the degree of freedom in which the other four pairs are constrained, the restraint will be insufficient and the degree of freedom other than in the Z-axis direction will be reduced. It can be moved or rotated. For example, in FIG. 4, the arm support portion 20 is restrained on the YZ plane (that is, X axis movement, rotation around the Y axis, and around the Z axis) by four sets of permanent magnets 53a to d, 54a to d and balls 55a to d. Constraints on rotation) and constraints on Y-axis movement are performed in four directions. The remaining one set of restraints needs to restrain the rotation around the X axis by the permanent magnets 53e, 54e and the steel balls 55e. Therefore, the permanent magnets 53e and 54e and the steel ball 55e are arranged below the permanent magnets 53d and 54d and the steel ball 55d. However, if the permanent magnets 53e and 54e and the steel ball 55e are arranged at the same height as the permanent magnets 53d, 54d and the ball 55d, the permanent magnets 53e, 54e and the ball 55e are restrained in the Y-axis direction or rotated around the Z-axis. It is constrained and coincides with the direction of the degree of freedom constrained by the other four pairs. In this case, the rotation around the X axis cannot be restricted, and when the measuring force in the Y axis direction is applied to the stylus 21, the rotation occurs around the X axis, resulting in a measurement error. That is, any one of the five pairs needs to be arranged in a position and a direction in which the degree of freedom in a direction that does not coincide with the degree of freedom restricted by the other four pairs is constrained.
In the present embodiment, the stylus 21 is a spherical body having a diameter of about 0.03 mm to about 2 mm, for example, and the arm 22 has a thickness of about 0.7 mm as an example, and the lower surface of the arm support portion 20. This is a rod-shaped member having a length from the stylus 21 to the center of the stylus 21 of about 10 mm. These values are appropriately changed depending on the shapes of the measured surfaces 61a and 61b.

  As described above, since the contact force between the stylus 21 and the measurement object 60, that is, the measurement force can be reduced by attaching the probe 1 for a three-dimensional shape measurement apparatus of the present invention to the conventional three-dimensional shape measurement apparatus 201, high accuracy is achieved. In addition, even a small stylus 21 can be measured without being damaged. In addition, the combination of the magnet and the steel ball that restrains the movement of the arm support portion 20 and gives a restoring force is a point contact, but since it is a contact between rigid bodies, it has 5 degrees of freedom other than in the vertical axis direction. Rigidity can be increased with respect to movement and rotation. Thereby, the position of the stylus 21 can be detected with high accuracy by detecting only the tilt of the position detection mirror 23 provided on the arm support portion 20 and the movement in the vertical axis direction. For example, by using a small combination of a magnet and a steel ball having a diameter of about 1 mm, the mass of the movable part can be reduced and the natural frequency can be lowered. As a result, vibration is less likely to occur and high-precision measurement can be performed.

  Further, even if an unexpected impact is applied to the probe 1 and the arm support portion 20 is greatly displaced with respect to the swinging portion 3, the ball sandwiched between the magnets is adsorbed to one of the magnets so that it does not fall. It can be used immediately after returning.

  In this probe 1, magnetic force is used for restoring force and the like, but since it is composed of a permanent magnet, current does not flow like an electromagnet. This simplifies the configuration, does not cause a temperature increase due to electric heat, and enables stable measurement.

  The present invention can measure with a small pressing force not only when measuring a vertical plane but also when measuring a horizontal plane, and by reducing the horizontal displacement of the mirror in the probe, the shape of the measured object can be accurately determined. Can be measured. A three-dimensional shape measuring device that scans the shape of the horizontal plane with high precision and low measuring force, as well as the measurement of the inner surface and hole diameter of arbitrary holes and the vertical surface of the outer surface of arbitrary shapes. It can be applied to a probe for three-dimensional shape measurement.

DESCRIPTION OF SYMBOLS 1 Probe for three-dimensional shape measuring apparatus 2 Attaching part 3 Oscillating part 3a Lower member 3b Extending part 3c Movable side holding part 5 Closing member 5a Oscillating through hole 11 Cavity part 17 Focus lens 20 Arm support part 21 Stylus 22 Arm 23 Position Detection mirror 24 Through hole 33 Fixed side holding member 41 Mounting table 41a Conical groove 42 Supporting point member 49 Vertical surface 50 Vertical surface 51 Movable side magnet 52 Fixed side magnet 53a Permanent magnet 53b Permanent magnet 53c Permanent magnet 53d Permanent magnet 53e Permanent magnet 54a Permanent magnet Magnet 54b Permanent magnet 54c Permanent magnet 54d Permanent magnet 54e Permanent magnet 55a Steel ball 55b Steel ball 55c Steel ball 55d Steel ball 55e Steel ball 56 Vertical surface 57 Vertical surface 60 Measurement object 101 Three-dimensional shape measurement probe 103 Oscillating unit 104 Connection Mechanism 109 Vertical elastic body 111 Measuring laser Light 114 Fixed side holding member 120 Arm mounting portion 121 Stylus 122 Arm 123 Mirror
DESCRIPTION OF SYMBOLS 201 Three-dimensional shape measuring apparatus 210 He-Ne laser 220 Measurement point information determination part 221 Optical system 222 Inclination angle detection part 223 Stylus position calculation part 224 Position coordinate measurement part 225 Adder 226 Mirror position inclination detection part 227 Semiconductor laser 228 Vertical position Detection unit 229 Laser beam 230 Z reference plate 231 Probe optical unit 292 Stone surface plate 293 Z-table 295 Stage 2951 X-stage 2952 Y-stage

Claims (6)

A mounting portion attached to the three-dimensional shape measuring apparatus;
A mounting table provided on the mounting unit; and a fulcrum member mounted on the mounting table, the first surface intersecting each other with the fulcrum member as a fulcrum and swingably connected to the mounting unit; A swinging portion having a second surface;
A movable side member provided on the swinging portion; and a fixed side member provided on the mounting portion and opposed to the movable side member with a space therebetween, wherein the movable side member and the fixed side member are An urging mechanism configured to generate a magnetic attraction force, and urges the oscillating portion so that the oscillating portion is directed in a certain direction by the magnetic attraction force;
An arm having a stylus that is in contact with the surface to be measured of the object to be measured and attached to the lower end is suspended and has a third surface that faces the first surface and a fourth surface that faces the second surface. A support part;
A plurality of oscillating part side members provided on the first surface and the second surface of the oscillating part, each having a vertical surface;
Provided on the third surface and the fourth surface of the arm support portion, respectively, are opposed to any one of the oscillating portion side members at an interval in the horizontal direction, and the vertical of the oscillating portion side member facing each other. has a vertical surface facing spaced surfaces and a horizontal direction, a plurality of arm-side member that is configured to generate the oscillating portion side member and the magnetic attraction force,
A plurality of spheres made of a magnetic material, which are arranged between the oscillating portion side member and the arm side member facing each other, and are attracted to and contact the vertical surface by the magnetic attraction force. A characteristic probe for a three-dimensional shape measuring apparatus. And one of the swing-side member, the same one with the arm-side member facing, from one of said ball member disposed between the arm member and those of the oscillating portion side member There are 5 sets of configured magnetic set,
3. The tertiary according to claim 1, wherein the magnetic force set is arranged in a position and a direction that constrain a degree of freedom in a direction in which any one of the five pairs does not coincide with a degree of freedom constrained by the other four pairs. Original shape measuring device probe. 3. The probe for a three-dimensional shape measuring apparatus according to claim 2, wherein one of the swinging part side member and the arm side member is made of a permanent magnet and the other is made of a magnetic material. The arm-side member and the swinging portion side member is composed of a permanent magnet in both three-dimensional shape measurement device probe according to claim 2, wherein disposed to different poles face each other.   As for the arrangement of the rocking part side member and the magnetic force set, three sets are arranged at positions that do not line up on a straight line on the first surface and the third surface, and two sets are arranged on the second surface and the fourth surface. The probe for a three-dimensional shape measuring apparatus according to any one of claims 2 to 4, which is disposed at different heights on the surface.   The said arm support part is provided with a position detection mirror, The probe for three-dimensional shape measuring apparatuses as described in any one of Claim 1 to 5

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