TWI495844B - Probe for three-dimensional shape measurement apparatus - Google Patents

Description

Probe for three-dimensional shape measuring device

The present invention relates to a probe for a three-dimensional shape measuring device that scans a three-dimensional shape with high precision and low measurement force.

A probe for a conventional three-dimensional shape measuring device (hereinafter referred to as a probe) capable of performing scanning measurement on a three-dimensional shape of a measurement object with high precision and low measurement force is disclosed in Patent Document 1. 12 and 13 show the configuration of the probe disclosed in Patent Document 1.

In FIG. 12, the probe 101 is detachably attached to the three-dimensional shape measuring device 201 by the mounting member 102. The swinging portion 103 is swingably coupled to the mounting table 104b fixed to the lower portion of the mounting member 102, and the arm mounting portion 120 is held by the swinging portion 103 so as to be movable up and down via the upper and lower elastic members 109. The tensor shape measuring device 201 emits the measurement laser light 211, and detects the swing of the arm attachment portion 120 and the displacement in the vertical direction. An arm 122 having a probe 121 at a lower end is fixed to a lower portion of the arm attachment portion 120. The probe 121 is in contact with the surfaces 61a and 61b to be measured of the measurement object 60 to be measured, and the three-dimensional shape is measured.

The details will be described using FIG. Fig. 13 is a perspective view showing the probe 101 of Fig. 12 taken along the A-A plane. In FIG. 13, the swinging portion 103 that swings with respect to the mounting member 102 includes a lower member 103c, a spacer 103b, an upper member 103a, an extending portion 103e, and a movable-side holding portion 103d. Two upper and lower elastic bodies 109 are spaced apart from each other by a spacer 103b It is fixed to the lower member 103c and the upper member 103a. The fulcrum member 104c which becomes the fulcrum of the oscillating motion in the oscillating portion 103 is fixed to the center of the lower portion of the lower member 103c so as to hang down. On the upper surface of the upper member 103a, an extending portion 103e extending in the vertical direction is provided at two locations. Further, a movable side holding portion 103d is provided at the upper end of the extending portion 103e. The movable-side holding portion 103d is an annular member, and the movable-side magnets 151 are provided at four positions at equal intervals on the same radius.

A fixed side holding member 114 is attached to the mounting member 102. The fixed side holding members 114 and the fixed side magnets 152 are provided at four positions at equal intervals on the same radius. The positional relationship between the movable side magnet 151 and the fixed side magnet 152 is arranged in parallel in the vertical axis direction, that is, in the Z-axis direction. Further, the movable side magnet 151 and the fixed side magnet 152 are fixed to each other in the direction in which the suction force acts for each pair.

The swinging portion 103 and the mounting member 102 are swingably coupled by the connecting mechanism 104. The connection mechanism 104 includes a mounting table 104b fixed to the corner post of the mounting member 102, and a fulcrum member 104c attached to the swinging portion lower member 103c. The mounting table 104b is formed with a conical groove 104a on its upper surface, and the front end of the fulcrum member 104c is fitted into the groove 104a. Thereby, the swinging portion 103 and the mounting member 102 are coupled to each other such that the contact portion between the fulcrum member 104c and the conical groove 104a can be rotated about any horizontal axis as a center of rotation. That is, the swinging portion 103 is swingable with respect to the mounting member 102.

The arm attachment portion 120 is fixed to a central portion of the two upper and lower elastic bodies 109 that are fixed to the swing portion 103 at both ends. A mirror 123 is disposed above the arm attachment portion 120, and the mirror 123 reflects the measurement laser light 211 passing through the mounting member 102.

According to the above configuration, even if the swinging portion 103 swings around the front end of the fulcrum member 104c, the restoring force acts in the direction in which the rotation is restored to the initial state by the suction force of the magnet. Further, the upper and lower elastic bodies 109 allow the arm attachment portion 120 to slightly move in the vertical direction with respect to the swing portion 103, and actuate the elastic restoring force so as to move up and down to return to the neutral position. By using two leaf springs as the upper and lower elastic bodies 109, only The rigidity is weakened in the up and down direction, and the rigidity in the horizontal direction is enhanced, so that the measurement is performed with high precision.

Next, a measurement method using the probe 101 having the above configuration will be described. The shape of the measurement surface 61a, which is the vertical surface of the measurement object 60, is measured by pressing the probe 121 attached to the arm 122 against the measurement surface 61a with a specific pressing force. The pressing force, that is, the measuring force, is caused by the restoring force of the swinging portion 103 by moving the probe 101 slightly toward the measuring object 60 while the probe 121 is in contact with the surface to be measured 61a.

Further, when the measurement surface 60 is in the horizontal plane of the surface to be measured 61b, the probe 121 is pressed against the surface to be measured 61b with a specific pressing force. The pressing force, that is, the measuring force, can be slightly moved toward the lower side of the measuring object 60 side by bringing the measuring head 121 into contact with the surface to be measured 61b, and the restoring force of the upper and lower elastic bodies 109 can be made. produce.

As described above, the probe 101 is scanned while applying a certain measurement force to the measurement object 60, and the upper and lower positions and the inclination of the mirror 123 are detected by the measurement laser light 211, whereby the probe 121 can be obtained. The relative position of the center relative to the probe 101. Further, by determining the position of the probe 101 by the three-dimensional shape measuring device 201, the shape of the measuring object 60 can be measured three times.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-286475

However, in the case of performing measurement with higher precision or when using a small probe, it is necessary to set a smaller measurement force. In the above-described prior configuration, if the measurement force at the time of measuring the horizontal plane is to be reduced, It is necessary to further reduce the thickness of the leaf spring as an example of the upper and lower elastic bodies 109, and to increase the thickness of the leaf spring. For example, when the measurement force is 0.5 gf or less, the thickness of the leaf spring must be about 0.05 mm, and the length in the horizontal direction is 30. Mm or so. In the case of such a thickness, the rigidity in the horizontal direction becomes small, and in the measuring machine that detects the inclination of the mirror in the probe and the vertical movement, the horizontal deviation becomes a measurement error. Further, when the thickness of the leaf spring is made thin, the rigidity is lowered, and when the leaf spring having a small thickness is increased, the mass of the movable portion is increased, so that the natural vibration number of the probe is reduced. When the number of natural vibrations is reduced, vibration is easily generated during measurement, and measurement errors due to vibration are generated in the measurement data.

The present invention has been made in view of the above problems, and an object of the invention is to provide a probe for a three-dimensional shape measuring device for reducing the upward and downward direction of a micro-moving mechanism above and below a probe (pig. The rigidity in the axial direction is increased in rigidity in the horizontal direction, and the measurement can be performed with a smaller measurement force, and it is difficult to generate vibration at the time of measurement or non-measurement by increasing the number of natural vibrations of the probe.

In order to achieve the above object, a probe for a three-dimensional shape measuring apparatus according to the present invention includes: a mounting portion that is attached to a three-dimensional shape measuring device; and a swing portion that includes a mounting table provided on the mounting portion and is placed on the mounting portion The fulcrum member is pivotally coupled to the mounting portion with the fulcrum member as a fulcrum, and has a first surface and a second surface that intersect each other; and a pressing mechanism including a movable side member provided on the swing portion, and The fixed side member is disposed opposite to the movable side member with respect to the mounting portion, and the movable side member and the fixed side member are configured to generate magnetic attraction force, and the magnetic attraction force is directed toward the swing portion The swinging portion is pressed in a fixed direction; the arm supporting portion is attached to the lower end of the probe that is in contact with the surface to be measured of the measuring object, and has a third surface facing the first facing surface And a fourth surface facing the second surface; the plurality of swinging side members are disposed on the first surface and the second surface of the swinging portion, respectively a vertical surface; the plurality of arm side members are disposed on the third surface and the fourth surface of the arm support portion, and are configured to be horizontally separated from each of the swing portion side members Opposite and opposite, and have the above The vertical surface of the swinging-portion side member is opposed to the vertical plane at a distance in the horizontal direction, and generates magnetic attraction force to the swinging-portion-side member; and a plurality of spheres including the magnetic body are disposed on each other The opposing side of the swinging portion side member and the arm side member are attracted by the magnetic attraction force to contact the vertical surface.

Specifically, the probe for a three-dimensional shape measuring device according to the present invention has five sets of magnetic components including one of the swinging-portion-side members and one of the arm-sides facing the one of the swinging-portion-side members. a member and one of the spherical bodies disposed between the swinging-portion-side member and the arm-side member, and the magnetic component is disposed in any one of five groups and the degree of freedom of the other four groups is not uniform The position and direction of the degree of freedom in the direction.

According to this configuration, the ball system rolls between the swinging-portion-side member and the arm-side member while being in contact with the vertical surface thereof. Thereby, the arm support portion is movable on the vertical axis with respect to the swing portion. Further, since the magnetic attraction force acts between the swinging-portion-side member and the arm-side member, when the arm supporting portion moves on the vertical axis and the swinging-portion-side member is away from the arm-side member, the approach is approached. The restoring force acts in the direction. The measurement force at the time of measuring the horizontal plane is generated by the magnetic attraction force in the neutral position in the direction of the vertical axis, which is held in such a manner that it can move only in the direction of the vertical axis with respect to the above-mentioned swinging portion. The support department puts pressure on it. The swinging-side member, the arm-side member, and the spherical body constituting each of the magnetic components are in point contact. However, since the rigid bodies are in contact with each other, the rigidity and the rotation of the five degrees of freedom other than the vertical axis direction can be increased. Thereby, the position of the probe can be detected with high precision by detecting only the inclination of the position detecting mirror provided in the arm support portion and the movement in the direction of the vertical axis. Further, the magnetic component only needs to be capable of holding the arm support portion and the magnetic attraction of the arm, the probe, and the mirror. Therefore, for example, a permanent magnet having a diameter of about 1 mm and a steel ball may be used. Thereby, the mass of the movable portion is reduced, the natural vibration number is increased, and vibration is less likely to occur. Further, the restoring force by the magnetic attraction force can be made small, and the measurement force can be reduced to, for example, 0.3 gf or less.

Alternatively, the swinging-side member and the arm-side member may be composed of a permanent magnet and the other may be made of a magnetic material.

The swinging-side member, the arm-side member, and the pair of the spherical bodies may be arranged in three pairs on the vertical plane a, and two pairs may be disposed on the vertical plane b that intersects the vertical plane a. .

According to the probe for a three-dimensional shape measuring device of the present invention, the contact force between the probe and the measuring object, that is, the measuring force can be reduced, so that the measurement can be performed with high precision, and even if it is a small measuring head, it can be damaged without damage. The measurement was carried out. Moreover, since the number of natural vibrations of the movable portion can be reduced, vibration is less likely to occur, and measurement with high precision can be realized.

1‧‧‧ Probe for three-dimensional shape measuring device

2‧‧‧Installation Department

3‧‧‧ swinging department

3a‧‧‧lower components

3b‧‧‧Extension

3c‧‧‧ movable side holding section

5‧‧‧Closed components

5a‧‧‧Swing through hole

11‧‧‧The Department of Cavity

17‧‧‧focus lens

20‧‧‧arm support

21‧‧‧ probe

22‧‧‧ Arm

23‧‧‧ position detection mirror

24‧‧‧through holes

33‧‧‧Fixed side retaining members

41‧‧‧ mounting table

41a‧‧‧Conical trough

42‧‧‧ fulcrum components

49‧‧‧Plumbing

49a‧‧‧Surface

50‧‧‧Plumbing

50a‧‧‧Plumbing

51‧‧‧ movable side magnet

52‧‧‧ Fixed side magnet

53a‧‧‧ permanent magnet

53b‧‧‧ permanent magnet

53c‧‧‧ permanent magnet

53d‧‧‧ permanent magnet

53e‧‧‧ permanent magnet

54a‧‧‧ permanent magnet

54b‧‧‧ permanent magnet

54c‧‧‧ permanent magnet

54d‧‧‧ permanent magnet

54e‧‧‧ permanent magnet

55a‧‧‧ steel ball

55b‧‧‧ steel ball

55c‧‧‧ steel ball

55d‧‧‧ steel ball

55e‧‧‧ steel ball

56‧‧‧Plumbing

56a‧‧‧Surface

57‧‧‧ plumb noodles

57a‧‧‧Plumbing

60‧‧‧Measurement

61a‧‧‧Measured surface

61b‧‧‧Measured surface

101‧‧‧Three-dimensional shape measuring probe

102‧‧‧Installation components

103‧‧‧ swinging department

103a‧‧‧Upper components

103b‧‧‧ spacers

103c‧‧‧lower components

103d‧‧‧ movable side holding part

103e‧‧‧Extension

104‧‧‧Linked institutions

104a‧‧‧ slot

104b‧‧‧mounting table

104c‧‧‧ fulcrum components

109‧‧‧ Upper and lower elastomers

111‧‧‧Measured laser light

114‧‧‧Fixed side retaining members

120‧‧‧arm installation

121‧‧‧ probe

121a‧‧‧ arrow

121b‧‧‧ arrow

122‧‧‧ Arm

123‧‧‧Mirror

151‧‧‧ movable side magnet

152‧‧‧ Fixed side magnet

201‧‧‧Three-dimensional shape measuring device

210‧‧‧He-Ne laser

211‧‧‧Measured laser light

211b‧‧‧ reflected light

220‧‧‧Measurement point information decision department

221‧‧‧Optical system

222‧‧‧Slant angle detection unit

223‧‧‧Probe Position Calculation Department

224‧‧‧ Position coordinate measurement department

224a‧‧Detection Department

224b‧‧‧Detection Department

224c‧‧‧Detection Department

225‧‧‧ Addition Department

226‧‧‧Mirror Position Slope Detection Department

227‧‧‧Semiconductor laser

228‧‧‧Up and down position detection department

229‧‧‧Laser light

229b‧‧‧ reflected light

230‧‧‧Z reference plate

231‧‧‧Probe optical system

280‧‧‧Control device

292‧‧‧ stone plate

293‧‧‧Z-platform

294‧‧‧ Drive Department

295‧‧‧mounting table

2211a‧‧‧Dual color mirror

2211b‧‧‧Half mirror

2951‧‧‧X-mounting table

2952‧‧‧Y-stage

A-A‧‧‧ face (XZ plane)

B-B‧‧‧ face (YZ plane)

F‧‧‧Resilience

N‧‧‧electrode

S‧‧‧electrode

X‧‧‧ axis

Y‧‧‧ axis

Z‧‧‧ axis

Β‧‧‧ slope

△Z‧‧‧moving amount

Fig. 1 is a perspective view of a probe for a three-dimensional shape measuring device in an embodiment of the present invention.

Fig. 2 is a perspective view showing a state in which the probe for the three-dimensional shape measuring device of Fig. 1 is cut by the A-A plane.

Fig. 3 is a cross-sectional view showing the B-B plane of the probe for the three-dimensional shape measuring device of Fig. 1.

Fig. 4 is a perspective view showing the main part of Fig. 1 exploded.

Fig. 5 is a view showing the positional relationship of the permanent magnets 53a and 54a and the steel ball 55a in Fig. 4 .

Fig. 6 is a view showing a state after the movement of the upper and lower moving mechanisms of Fig. 5.

Fig. 7 is a view showing an example of a shape measuring device including the probe shown in Fig. 1;

Fig. 8 is a view showing the configuration of a measurement point information determining unit and a probe optical unit included in the shape measuring device shown in Fig. 7;

Fig. 9 is a view for explaining the inclination angle of the probe when the measurement surface is measured by the probe shown in Fig. 1, and is a view showing the measurement object in a plan view.

Figure 10 is a view for explaining the measurement of the surface to be measured by using the probe shown in Figure 1. A diagram of the angle of inclination of the needle, and a view of the measured object in a side view.

Figure 11a is a perspective view showing the upper moving mechanism of the alternative.

Figure 11b is a front view of Figure 11a.

Figure 11c is a top view of Figure 11a.

Fig. 12 is a perspective view showing an example of a probe for a conventional three-dimensional shape measuring device.

Fig. 13 is a perspective view showing a state in which the probe for the three-dimensional shape measuring device of Fig. 12 is cut by the A-A plane.

Hereinafter, a probe for a three-dimensional shape measuring device (hereinafter referred to as a probe 1) according to an embodiment of the present invention will be described with reference to the drawings.

First, the probe 1 will be described with reference to Figs. 1 to 4 . Fig. 1 is a perspective view showing the appearance of the probe 1 in the first embodiment of the present invention. Figure 2 is a perspective view of the probe 1 cut away from the A-A plane (XZ plane) for a portion of Figure 1. Figure 3 is a cross-sectional view taken along line B-B (YZ plane) of Figure 1. Fig. 4 is a perspective view showing only the movable portion of Fig. 1 exploded.

In Fig. 1, the probe 1 is detachably attached to the three-dimensional shape measuring device 201 by a cylindrical mounting portion 2 which is open at both ends as a whole. The upper end side of the closing member 5 is fixedly attached to the lower portion of the mounting portion 2. A mounting table 41 is fixedly attached to the lower end side of the closing member 5. The arm 22 including the probe 21 at the lower end is attached so as to be swingable relative to the mounting table 41 and moved up and down. The measurement laser light 111 is emitted from the ternary shape measuring device 201, and the swing of the arm 22 and the probe 21 and the displacement in the vertical direction are detected. The probe 1 measures the three-dimensional shape of the probe 21 while contacting the measurement surfaces 61a and 61b of the measurement object 60 to be measured.

Hereinafter, the details of the structure of the probe 1 will be described with reference to FIGS. 2, 3, and 4.

In FIG. 2, the probe 1 includes a mounting portion 2 and a member fixed thereto, a swinging portion 3 including a lower member 3a, a movable side holding portion 3c, and a member fixed thereto, an arm support portion 20, and a solid portion. The components set for it. The swinging portion performs a swinging motion with respect to the mounting portion 2, and the arm supporting portion 20 moves up and down with respect to the swinging portion. The composition is shown below.

The mounting portion 2 is formed in a cylindrical portion so as to be attached to the ternary shape measuring device 201 at the upper portion, and has a cavity in the center portion thereof so that the measurement laser light 111 passes and does not come into contact with the movable side holding portion 3c of the swing portion. Part 11. A substantially ring-shaped fixed side holding member 33 is fixedly attached to a lower portion of the mounting portion 2. Four fixed side magnets 52 are held by the fixed side holding member 33. The fixed side magnets 52 are arranged at intervals of 90 degrees on the circumference centered on the central axis of the probe 1. Moreover, the closing member 5 is fixed to the opening part of the lower part of the mounting part 2. The swinging through hole 5a is opened in the lower portion of the closing member 5 so as not to contact the lower member 3a of the swinging portion 3. A mounting base 41, which is a corner post extending in the horizontal direction, is fixed to the closing member 5, and a tapered groove 41a is formed in the central axis of the probe 1 of the mounting table 41.

The movable-side holding portion 3c of the swinging portion 3 is formed in a ring shape at the upper portion, and is held as a movable side member at intervals of 90 degrees on the circumference centering on the central axis of the probe 1 like the fixed-side magnet 52. Four movable side magnets 51. The movable side magnet 51 is paired with the fixed side magnet 52. In other words, each of the movable-side magnets 51 faces the corresponding fixed-side magnet 52 in the direction of the central axis of the probe 1 (up-and-down direction or in the vertical direction). The lower member 3a is fixed to the movable-side holding member 3c via the extending portion 3b shown in Fig. 3 . The permanent magnets 53a to e (the permanent magnets 53a and 53b are referred to FIG. 4) are embedded in the lower member 3a as the swinging-port side members. Further, in one of the lower members 3a, a fulcrum member 42 is fixed to the probe central axis, and the fulcrum member 42 is constituted by needle-like projections that protrude downward in the vertical direction.

The arm support portion 20 is attached to the lower surface thereof with an arm 22 having a probe 21 at its lower end. Further, a position detecting mirror 23 for reflecting the measurement laser light 111 for detecting the upper and lower moving position and the inclination of the arm supporting portion is fixed to the upper surface of the arm supporting portion 20. Moreover, as shown most explicitly in FIG. 4, the permanent magnets 54a-e are embedded in the arm support part 20 as an arm side member. The arm support portion 20 is provided at the center with a through hole 24 extending in the horizontal direction. a mounting table 41, a fulcrum member 42, and a fixed fulcrum member constituting a coupling mechanism A portion of the member 3a below the swing portion 3 of the 42 is held in the gap and is located in the through hole 24. That is, the mounting table 41 extends through the through hole 24 . The portion of the fixed fulcrum member 42 of the lower member 3a of the swinging portion 3 has a corner post shape, and the fulcrum member 42 is fixed to the lower portion thereof. Further, the fulcrum member 42 extends above the through hole 24 and extends.

The steel balls 55a to e are held in contact with the permanent magnets 53a to e embedded in the lower member 3a and the permanent magnets 54a to e embedded in the arm support portion 20 (the steel balls 55b, 55d, and 55e are shown in the figure). 4)).

In FIG. 3, as described above, the movable-side holding portion 3c of the swing portion 3 is fixed to the lower member 3a of the swing portion 3 via the extending portion 3b of the swing portion. Further, both ends of the mounting table 41 are screwed to the lower portion of the closing member 5. The tip end position of the fulcrum member 42 is in contact with the lowermost point of the tapered groove 41a of the mounting table 41. With such a configuration, the swinging portion lower member 3a and the attaching portion 2 are swingably coupled with the contact portion between the fulcrum member 42 and the tapered groove 41a as a swing center. Further, the lower member 3a of the swing portion 3 is preferably configured such that when the fulcrum member 42 is fitted into the tapered groove 41a of the mounting table 41 and connected, the center of gravity of the arm 22 is oriented in the vertical direction. Located on the vertical axis passing through the front end of the fulcrum member 42.

The four movable side magnets 51 and the four fixed side magnets 52 are disposed at a fixed distance coaxially. Moreover, for each pair, it is arranged in the direction of suction interaction. In the present embodiment, the upper side of all of the movable side magnet 51 and the fixed side magnet 52 is N pole and the lower side is S pole.

4 is a fixing portion (a portion fixed to the three-dimensional shape measuring device 201) including the mounting portion 2, the fixed-side holding member 33, the fixed-side magnet 52, the closing member 5, and the mounting table 41 of the probe 1 in FIG. An exploded perspective view of the movable portion.

In FIG. 4, the swinging portion lower member 3a includes a corner post portion that fixes the fulcrum member 42, and a portion that holds the arm support portion 20. The portion of the holding arm support portion 20 is formed by a shape that surrounds the arm support portion 20, and includes a vertical plane parallel to the YZ plane shown in FIG. 49, and a vertical plane 50 parallel to the XZ plane. The vertical plane (first surface) 49 and the vertical plane (second surface) 50 are orthogonal to each other when viewed from the Z-axis direction in plan view. A total of five cylindrical permanent magnets 53a to e are embedded in the vertical surfaces 49 and 50 as the swinging side members. The three permanent magnets 53a to 53c are embedded and fixed such that the plane on one side thereof and the vertical plane 49 are flush with each other. The remaining two permanent magnets 53d and 53e are embedded and fixed such that the plane on one side thereof and the vertical plane 50 are flush with each other. The vertical plane 50 is a plane orthogonal to the vertical plane 49. The five permanent magnets 53 have a polarity in the cylinder axis direction.

The arm support portion 20 shown in Fig. 4 is held inside the swinging portion lower member 3a, and is formed with vertical faces 56, 57. The vertical plane (third surface) 56 is parallel to the surface of the YZ plane, and the vertical plane (fourth surface) 57 is perpendicular to the surface of the XZ plane, and the vertical planes 56 and 57 are orthogonal to each other in plan view. Further, the vertical faces 56 and 57 are opposed to each other in parallel with the vertical faces 49 and 50 formed on the swinging member lower member 3a in the horizontal direction. Specifically, the vertical plane 56 faces the vertical plane 49 of the lower member 3a in the X-axis direction, and the vertical plane 57 opposes the vertical plane 50 of the lower member 3a in the Y-axis direction. A total of five cylindrical permanent magnets 54a to e are embedded and fixed to the vertical surfaces 56 and 57 of the arm support portion 20 as arm-side members. The three permanent magnets 54a to 54c are embedded and fixed such that the plane on one side thereof and the vertical plane 56 are flush with each other. The remaining two permanent magnets 54d and 54e are embedded and fixed such that the plane on one side thereof and the vertical plane 57 are flush with each other. Thereby, the permanent magnets 53a to e embedded in the lower portion 3a of the swing portion and the permanent magnets 54a to e embedded in the arm support portion 20 are opposed to each other at intervals in the horizontal direction. The five permanent magnets 54a-e have polarities in the direction of the cylinder axis, which are coaxial with the opposing permanent magnets 53a-e. That is, the permanent magnets 54a-e and the permanent magnets 53a-e are interposed between the steel balls 55a-e and the opposite poles (see Fig. 5). Further, the faces of the respective permanent magnets 53a to e and 54a to e are parallel to each other and are perpendicular to each other.

Between the vertical faces of the opposing permanent magnets 53a to e and 54a to e shown in FIG. 4, five steel balls 55a to e are sandwiched by a magnetic attraction, that is, a ball which is a magnetic body. Will separate Between the vertical faces of the permanent magnets 53a to e and 54a to e, a set of permanent magnets 53a and 54a and a steel ball 55a of a combination of five groups (magnetic components) including the steel balls 55a to e are formed. In Figure 5. The steel ball 55a is in contact with two permanent magnets on one side, and rolls on the vertical surface as a contact surface. Thereby, the arm support portion 20 is movable on the vertical plane with respect to the swinging portion lower member 3a. In FIG. 4, the arm support portion 20 is provided with three sets of permanent magnets 53a-c, 54a-c, and steel balls 55a-c provided on the vertical surface 49 of the lower member 3a and the vertical surface 56 of the arm support portion 20. It is movable only in parallel with the vertical plane 49 with respect to the swinging member lower member 3a. However, when the arrangement of the three sets of permanent magnets and balls is arranged on a straight line on the vertical plane, the rotation around the straight line cannot be constrained, so that the three pairs must not be arranged in a straight line. In the present embodiment, the group (the first group) including the permanent magnets 53a and 54a and the steel ball 55a and the group (the second group) including the permanent magnets 53b and 54b and the steel ball 55b are disposed to extend in the Y-axis direction. In the straight line, the permanent magnets 53c and 54c and the steel ball 55c constituting the remaining one (group 3) are disposed at positions shifted in the Z-axis direction with respect to the straight line in the Y-axis direction (lower in the figure) And being disposed at a position shifted in the Y-axis direction with respect to any of the first group and the second group. On the other hand, the arm support portion 20 can be only leaded with respect to the swing member lower member 3a by the pair of permanent magnets 53d to e, 54d to e and the steel balls 55d to e provided on the vertical faces 50 and 57. The vertical surface 49 moves in parallel. Since the vertical surface 49 and the vertical surface 50 are orthogonal to each other, the arm support portion 20 can move only in the vertical axis direction with respect to the swing portion lower member 3a. In the present embodiment, the vertical faces 49 and 50 are orthogonal to each other in plan view, but they may not necessarily be orthogonal. When the vertical faces 49 and 50 are surfaces that intersect at a certain angle in a plan view, the arm support portion 20 can be moved only in the vertical axis direction. Further, any of the permanent magnets 53a and 54a can be replaced with a magnetic body.

The probe 1 of the present embodiment configured as described above operates as follows.

The lower member 3a and the movable-side holding portion 3c of the swing portion 3 shown in Fig. 2 are swingable in either direction with respect to the measurement laser light 111 with respect to the attachment portion 2 around the tip end of the fulcrum member 42. Furthermore, in the present embodiment, the optical axis of the measurement laser light and the vertical direction are The Z axis direction is the same. When the swing portion 3 is inclined in the horizontal direction around the tip end of the fulcrum member 42, the distance between the movable side magnet 51 and the fixed side magnet 52 becomes longer, and the pair of magnets 51, 52 are brought closer to each other depending on the nature of the magnet. The restoring force acts in the direction. As a result, the magnetic restoring force is applied to the entire swinging portion 3 to restore the inclination to the initial state (the direction in which the arm 22 extends in the vertical direction in the vertical direction). Similarly, when the swing portion is rotated about the vertical axis around the tip end of the fulcrum member 42, the swing portion 3 acts to restore the rotation to the initial state by the magnetic force between the movable side magnet 51 and the fixed side magnet 52. The magnetic restoring force in the direction (the direction in which the swing member 3 is restored to the initial posture in the direction of the vertical axis). By the magnetic restoring force, the swing portion at the time of non-measurement is held in a posture in which the extending direction of the arm 22 coincides with the vertical direction.

As described above, the arm support portion 20, the arm 22, and the probe 21 are movable on the vertical axis with respect to the lower member 3a of the swing portion 3 shown in FIG. Since the magnetic attraction force is applied between the permanent magnets 53a to e, which are the swinging side members, and the permanent magnets 54a to e, which are the arm side members, the arm support portion 20 moves on the vertical axis to cause the permanent magnets 53a to e and the permanent magnets. When 54a to e are apart from each other in the direction of the vertical axis, a restoring force acts in a direction in which the permanent magnets 53a to e and the permanent magnets 54a to e approach each other. The case of the group including the permanent magnets 53a and 54a and the steel ball 55a is shown in Fig. 6. Fig. 6 shows a state in which the arm support portion 20 is moved by ΔZ only in the vertical direction with respect to the swing portion. At this time, the ball 55a rolls on the front end faces of the permanent magnets 53a, 54a, and only one half of the distance ΔZ is moved in the vertical direction. In this state, the magnetic axis of the permanent magnet 53a and the magnetic axis of the permanent magnet 54a are shifted by only ΔZ, so that the arm support portion 20 moves in the vertical direction in accordance with the nature of the magnet in the direction in which the magnetic axes coincide with each other. The restoring force F acts in the direction. Further, since the movement of the steel ball 55a is a rolling contact, the frictional force is extremely small, and the arm support portion 20 can move with respect to the lower member 3a with a slight force.

As described above, the arm support portion 20 is movable only in the vertical axis direction with respect to the swing portion, and has a restoring force in the vertical axis direction by magnetic attraction.

The operation will be described using FIG. 2. For measuring the vertical direction or approximate of the measured substance When the surface extending in the vertical direction (the vertical surface is the surface to be measured 61a in the case of the measurement object 60 in Fig. 2), the measurement force for pressing the probe 21 against the surface to be measured is obtained as follows. . When the mounting portion 2 is slightly moved to the side of the measuring object 60 in the horizontal direction while the probe 21 is in contact with the surface to be measured 61a, the lower member 3a and the movable side holding portion 3c of the swinging portion 3 are the tip end of the fulcrum member 42. It is tilted to the center, whereby the arm 22 is inclined in the horizontal direction. When the swing portion 3 is inclined, the swing portion 3a to c is restored by the magnetic attraction between the movable side magnet 51 of the movable side member 3c provided in the swing portion 3 and the fixed side magnet 52 provided on the mounting portion 2. The restoring force to the neutral position in the initial state in which the arm 22 extends in the vertical direction. By the magnetic restoring force, the probe 21 is pressed with respect to the surface 61a to be measured with a specific measurement force.

As described above, the measurement force when measuring the vertical surface is generated by the magnetic attraction of the movable side and the fixed side magnets 51 and 52 so as to be swingably coupled to the swing portion 3a of the mounting portion 2 by the connection mechanism. c pressure. The measurement force at the time of measuring the vertical plane can be adjusted according to the magnetic force of the movable side magnet 51 and the fixed side magnet 52, and the interval between the two. For example, in the present embodiment, when the front end of the probe 21 is pressed at 0.3 mN, the magnetic force and distance between the movable side magnet 51 and the fixed side magnet 52 are set such that the horizontal displacement of the probe is 10 μm. As described above, the probe 1 of the present embodiment can measure the shape of the vertical plane by a small measurement force.

When the shape of the surface extending in the horizontal direction or the substantially horizontal direction of the measurement object (the horizontal plane: the surface to be measured 61b in the case of the measurement object 60 in Fig. 1) is measured, the probe 21 is obtained by the following method. The measurement force on the surface to be measured. In the case of the non-measurement, the arm support portion 20 moves downward in the vertical direction due to its weight (gravity), and the positional relationship between the permanent magnets 53a and 54a and the ball 55a constituting one set is as shown in FIG. However, as the amount of movement ΔZ increases, the magnetic restoring force F also increases. Therefore, at a certain fixed position, the restoring force F is balanced with gravity. When the mounting portion 2 is moved to the side of the measuring object 60 in the vertical direction with the probe 21 in contact with the surface 61 to be measured, the ΔZ becomes small, and the restoring force F becomes weaker than the application. The gravity to the arm support portion 20. The difference is the measurement force, and the probe 21 is pressed against the surface 61b to be measured.

As described above, the measurement force at the time of measuring the horizontal plane is generated by pressing the arm support portion 20 by the elastic force generated by the displacement of the magnetic axes between the two permanent magnets. The rigidity of the arm support portion 20 in the vertical direction may be such a degree as to support the weight of the arm support portion 20 itself and the arm 22 and the probe 21. That is, the weight that must be supported by the permanent magnets 53, 54 is light. Therefore, the magnetic force of the permanent magnets 53, 54 can be weakened, and the elastic pressing force due to the displacement of the magnetic axis can be made small. Therefore, the probe 1 of the present embodiment can measure the shape of the horizontal plane with a small measurement force.

As described above, the probe 1 of the present embodiment can measure highly accurate measurement using a small measurement force with respect to either of the vertical plane and the horizontal plane.

The combination of the movable magnets 53 and 54 and the ball 55 other than the vertical axis direction of the restraining arm support portion 20 shown in FIG. 4 is a rigid body, so that the rigidity can be sufficiently increased in the moving direction and rotation other than the vertical axis direction. The horizontal direction of the arm support portion 20 due to the reaction force of the measuring force acting on the probe 21 when measuring the vertical surface, and the displacement of the position detecting mirror 23 in the horizontal direction thereof, and the vertical axis Since the rotation of the laser beam 111 for measurement by the shape measuring device 201 described below cannot be detected, the measurement error is caused. However, since the probe 1 of the present embodiment has high rigidity in the horizontal direction of movement and rotation with respect to the arm support portion 20, the horizontal direction of the position detecting mirror 23 caused by the reaction force of the measuring force can be reduced, The shape of the measured surface 61b perpendicular to the measurement object 60 can be measured with high precision by the rotation around the vertical axis.

Next, a shape measuring apparatus including the probe 1 of the present embodiment will be described with reference to Figs. 7 and 8 .

In general, the three-dimensional shape measuring device 201 controls the movement of the probe 1 such that the probe 1 comes into contact with the measuring object 60 and the measuring force of the measuring head 61 against the surfaces 61a and 61b to be measured is substantially fixed. The measurement was performed by moving along the surfaces 61a and 61b to be measured. The position of the probe 1 in the three-dimensional space is detected by the laser range finder, and the displacement of the probe 21 with respect to the probe 1 is added to the position coordinates of the probe 1, thereby obtaining the measured surface 61a. , surface shape data of 61b.

As an example of such a shape measuring apparatus, the type disclosed in the above-mentioned Patent Document 1 (Japanese Laid-Open Patent Publication No. 2010-286475) is a type in which the measuring object 60 is fixed to a fixed plate as shown in FIG. The axis, the Y axis, and the Z axis move in all directions. Further, there is a type in which the measuring object 60 is moved on the X-axis and the Y-axis to move the probe on the Z-axis.

The three-dimensional shape measuring device 201 shown in FIG. 7 includes a mounting table 295 including an X-mounting table 2951 and a Y-mounting table 2952 which are provided on the stone fixing plate 292 and movable in the X-axis and Y-axis directions. . A Z-platform 293, a He-Ne laser (laser light generating unit) 210, a measurement point information determining unit 220, and a probe optical unit 231 are placed on the mounting table 295. Thereby, the mounting table 295 can move the Z-platform 293, the He-Ne laser 210, the measurement point information determining unit 220, and the probe optical unit 231 in the X-axis and Y-axis directions.

The measurement point information determining unit 220 and the probe optical unit 231 will be described in detail with reference to FIGS. 7 and 8. As shown in FIG. 8, the measurement point information determining unit 220 includes an optical system 221 for obtaining positional information of the surfaces to be measured 61a, 61b, a position coordinate measuring unit 224, and a adding unit 225. The probe optical unit 231 includes a mirror position gradient detecting unit 226, a probe position calculating unit 223, a dichroic mirror 2211a, and a focus lens 17. The probe optical portion 231 is attached to the movable side of the Z-platform 293 together with the probe 1. The mirror position gradient detecting unit 226, the probe position calculating unit 223, the position coordinate measuring unit 224, and the adding unit 225 are connected to the optical system 221, and are used to obtain a component of the position information of the probe at the time of measurement.

The measurement laser light 111 generated by the He-Ne laser 210 is divided into four by the optical system 221 in order to obtain the three-dimensional coordinate position of the measurement surfaces 61a and 61b of the measurement object 60. In order to detect the amount of movement in the X-axis direction and the Y-axis direction of the mounting table 295 (see FIG. 7), that is, the coordinate values in the X-axis direction and the Y-axis direction of the surfaces 61a and 61b to be measured, although Although the illustration is omitted, the optical system 221 includes an X-axis reference plate having a reference surface formed by a mirror surface orthogonal to the X-axis direction, and a Y-axis reference plate having a Y-axis and a Y-axis. A mirror surface formed by orthogonal mirrors. Further, the optical system 221 is also provided with a Z reference plate 230 (see FIG. 7) composed of a mirror surface orthogonal to the Z-axis direction. The flatness of the reference plane of each reference plate is set to be 0.01 micron.

For the shape measurement method of the measurement surfaces 61a and 61b, a known laser ranging method is used. For example, the reference for the X-axis, the Y-axis, and the Z-axis is as described in Japanese Laid-Open Patent Publication No. Hei 10-170243. The surface is irradiated with laser light, and the interference signal of the irradiated laser light and the laser light reflected by each reference surface is counted, thereby detecting the phase change of the reflected laser light. More specifically, in the laser ranging method, for example, as disclosed in Japanese Laid-Open Patent Publication No. 4-1-503, the laser beam irradiated to each reference surface is divided into reference light by a branch member such as a crucible. The light is measured, and the phase of the reference light and the measurement light is shifted by 90 degrees. Then, the measurement light is irradiated onto the reference surface and reflected, and the interference light due to the phase shift of the returned reflected light and the reference light is electrically detected, and based on the obtained interference fringe signal, Lissajous is formed. The distance between the reference point of the graph and the above reference plane.

The position coordinate measuring unit 224 is a part that performs such a distance measuring method, and includes detection units 224a to 224c that perform measurement of the X coordinate value, the Y coordinate value, and the Z coordinate value of the measurement points in the measurement surfaces 61a and 61b. . In the present embodiment, as shown in FIG. 7, the mounting table 295 moves relative to the measuring object 60 placed on the stone fixing plate 292. Therefore, the X coordinate value, the Y coordinate value, and the Z coordinate value at the measurement point can be In other words, it is the absolute position coordinate value of the mounting portion 2 of the probe 1 mounted on the Z-platform 293.

In the present embodiment, the detecting unit 224c performs a range in which the Z coordinate value of the probe 21 in the probe 1 is measured, and functions as a probe position measuring device. Hereinafter, this aspect will be described in detail. As shown in FIG. 8, the center point of the position detecting mirror 23 mounted to the arm supporting portion 20 of the probe 1 attached to the lower end of the Z-platform 293 is irradiated via the focus lens 17. Use one part of the laser light 111. The laser light for measurement 115 that is irradiated is reflected by the position detecting mirror 23, and the reflected light 211b is not reflected by the dichroic mirror 2211a as the light separating portion, but is transmitted and reflected by the half mirror 2211b, and is irradiated to the detecting portion 224c. The distance measurement of the Z coordinate value of the probe 21 can be performed.

The calculation result of the position coordinate measuring unit 224 based on the detection result of the position detecting units 224a to 224c by the adding unit 225 (in the present embodiment, the X-axis and Y-axis coordinate values of the mounting unit 2 and the Z of the probe 21) The axis coordinate value is added to the calculation result of the probe position calculating unit 223 based on the detection result of the mirror position gradient detecting unit 226, thereby calculating the shape of the surface 61 to be measured. The probe position gradient detecting unit 226 shifts the probe 21 (the X-axis and the Y-axis direction) with the inclination of the swing portions 3a to 3, and the probe that is displaced in the vertical direction of the arm support portion 20 The shift of 21 (Z-axis direction) is detected.

Hereinafter, the mirror position gradient detecting unit 226 and the probe position calculating unit 223 will be described. The mirror position gradient detecting unit 226 includes a semiconductor laser 227 that irradiates the position detecting mirror 23, an inclination angle detecting unit 222, and an up-and-down position detecting unit 228. The laser light 229 of the semiconductor laser (laser light generating portion) 227 having a wavelength different from that of the He-Ne laser 210 is irradiated to the position detecting mirror 23 via the dichroic mirror 2211a. The reflected light 229b reflected by the position detecting mirror 23 by the laser beam 229 is reflected by the dichroic mirror 2211a, and then incident on the tilt angle detecting unit 222 and the vertical position detecting unit 228.

The tilt angle detecting unit 222 is configured by a photodetector having a slope detecting light receiving surface that receives reflected light 229b and converts it into an electric signal, and detects the position of the reflected light 229b on the light receiving surface based on the slope, and the probe position calculating unit 223 transmits an electrical signal corresponding to the 2nd dimensional coordinate value of the light receiving surface. The above-described 2nd dimensional coordinate value corresponds to the inclination angle of the arm 22 of the holding probe 21. The probe position calculating unit 223 converts the angle signal input from the tilt angle detecting unit 222 into the shift amount of the probe 21 included in the probe 1.

Since the probe 21 is spherical as shown in the figure, the X coordinate value is measured, the Y coordinate value is measured, and the Z coordinate value is measured as the center coordinate of the probe 21. Therefore, the measurement on the surface 61a to be measured The true coordinate value of the fixed point is a value which is only offset from the radius value of the probe 21 in the direction perpendicular to the scanning direction of the probe 1.

The upper-lower position detecting unit 226 of the mirror position gradient detecting unit 226 detects the displacement of the position detecting mirror 23 in the vertical direction of the mounting unit 2 based on the reflected light 229b from the position detecting mirror 23. The detection method may be a well-known technique such as a method of using a hologram as shown in Japanese Patent Laid-Open No. 2008-292236.

Hereinafter, the operation of the three-dimensional shape measuring apparatus 201 configured as described above, that is, the method of measuring the shape of the surfaces 61a and 61b of the measuring object 60 will be described. This shape measuring method is executed by the operation control of the control device 280 shown in FIG.

First, the case where the surface 61a to be measured as the vertical plane is measured will be described with reference to FIGS. 7 and 8. As described above, the probe 21 shown in FIG. 8 is brought into contact with the surface to be measured 61a, and the probe 21 is pressed against the surface 61a to be measured, for example, by a measuring force of about 0.3 mN (= 30 mgf). The object 60 is oppositely disposed with a mounting table 295 including a Z-platform 293 on which the probe 1 is mounted.

For example, a case where the surface to be measured 61a of the measurement object 60 is a cylindrical inner circumferential surface and the shape is measured will be described with reference to FIGS. 9 and 10 . As shown in Fig. 9, the probe 21 is measured while being in contact with the surface 61a to be measured. At this time, the probe 1 advances in the direction of the arrow 121a. At this time, by moving the probe 1 slightly in the direction of the arrow 121b, the arm 22 shown in FIG. 10 is fixed or substantially fixed to advance with respect to the inclination β of the vertical direction. That is, the control unit 280 shown in FIG. 7 controls the driving unit 294 of the mounting table 295 so that the arm 22 is inclined in either direction and the inclination β with respect to the vertical direction is maintained constant or substantially fixed. Thereby, the amount of movement and the moving direction of the mounting table 295 in the X-axis direction and the Y-axis direction are controlled. Further, in the present embodiment, the measurement force can be maintained at 0.3 mN by adjusting the displacement of the tip end of the arm 22 to an angle of 10 μm.

In the above-described measurement operation, the measurement position of the measurement surface 61a is obtained by the addition unit 225 via the probe position calculation unit 223 and the position coordinate measurement unit 224 shown in FIG. The X coordinate value is measured, the Y coordinate value is measured, and the Z coordinate value is measured.

Next, a case where the measured surface 61b as a horizontal plane is measured will be described. In this case, the measurement force for pressing the probe 21 against the surface to be measured 61b must be generated downward in the vertical direction. Further, in order to perform measurement with high precision, it is necessary to fix the measurement force directed downward in the vertical direction. The drive unit 294 is driven by the control device 280 to move the mounting table 295 (see FIG. 7) in the horizontal direction, and based on the detection result of the upper and lower position detecting unit 228 of the mirror position gradient detecting unit 226, the position detecting mirror is used. The shift amount of the vertical direction of 23 is fixed so that the Z-platform 293 operates. For example, when the arm support portion 20 is moved by 100 μm in the vertical direction with respect to the swing portions 3a to 3c by gravity, the arm support portion 20 is controlled so as to achieve a deflection of 90 μm at the time of measurement, whereby the measurement force can be measured. Keep it at 3mN. Further, since the probe 21 moves up and down following the minute displacement of the surface to be measured 61b, it can be detected by the distance measuring unit of the Z coordinate of the position detecting mirror 23 that moves integrally with the probe 21. The detected value of the portion 224c measures the minute shift of the measured object.

Further, when the inclination is increased from the complete horizontal plane, for example, when a pressing force is generated in the vertical downward direction when the inclination of about 45 degrees is measured, the arm 22 of the probe 21 is inclined by the inclination angle detecting portion. Since the inclination of the arm is detected by 222, the measurement of the high precision can be realized by converting the amount of tilt to the displacement of the probe and applying correction. However, in this measurement method, the rotation of the mirror 23 about the Z-axis and the shift in the parallel movement in the X and Y-axis directions cannot be detected, which is a measurement error. As described above, the probe 1 of the present invention can reduce the rigidity around the Z axis and the X and Y axes in the lower mechanism portion including the permanent magnets 53a to e, 54a to e, and the balls 55a to e. Kind of error. In order to detect the inclination and the up and down position of the arm support portion 20, the arm support portion includes a position detecting mirror, but a plurality of arm support portions may be obtained by using a distance sensor of a plurality of electrostatic capacitance sensors. The position is shifted for detection.

Furthermore, the probe 1 can maintain the swinging portions 3a-c in a fixed direction by magnetic force, and Since the arm support portion 20 is held at a fixed position, the axis of the arm 22 to which the probe 21 is fixed is not limited to the vertical direction, and can be used in an inclined state.

In the present embodiment, five pairs of magnets are arranged on two planes. Alternatively, as shown in FIG. 11a, FIG. 11b, and FIG. 11c, a pair of parallel curved surfaces and a vertical plane intersecting the five pairs of magnets and steel are disposed. The ball can also achieve the same effect. Fig. 11a is a perspective view showing the arrangement of the upper and lower moving members including the swinging portion lower member 3a, the arm supporting portion 20, and the magnets 53a to e, 54a to e, and the balls 55a to e, and Fig. 11b is a front view thereof. Figure 11c is a top view thereof. In the plan view of Fig. 11c, the member 3a is formed with a curved surface 49a under the swing portion 3. The curved surface 49a is an inner surface of the cylinder, and its cylindrical axis coincides with the vertical direction. The curved surface 56a opposite thereto is formed on the arm support portion 20. The curved surface 56a forms a face of a concentric cylinder with the curved surface 49a. That is, the curved surface 49a and the curved surface 56a are perpendicular to each other at a fixed distance. The permanent magnets 53a to c, 54a to c are disposed along the curved surfaces 49a and 56a, and the steel balls 55a to c are held by the magnetic force therebetween. The permanent magnets 53d to e and 54d to e are held by the vertical surface 50a formed on the lower member 3a of the swing portion 3 and the vertical surface 57a formed on the arm support portion 20. Similarly to the above-described vertical faces 50 and 57 (FIG. 4), the vertical faces 50a and 57a are vertical planes parallel to each other. In such a configuration, by the combination of the permanent magnets 53a to c, 54a to c and the pair of the permanent magnets and the balls of the balls 55a to c, the arm support portion 20 can have the curved surface 49a with respect to the swinging member lower member 3a. It moves in the Z-axis direction while maintaining a fixed distance from the curved surface 56a. However, if it is only this, it is also possible to move with respect to the rotation about the Z axis and the rotation about the X axis. Therefore, the combination of the permanent magnets 53d to e, 54d to e, and the pair of the permanent magnets and the balls of the balls 55d to e can be added to restrict the rotation. In addition, the arrangement of the five pairs of permanent magnets and the ball can achieve the same effect as long as the degree of freedom other than the vertical axis can be restrained.

When the arm support portion 20 shown in FIG. 4 and FIG. 11a (alternative) is not constrained, three degrees of freedom associated with the movement of the swing portion 3 in three directions of X, Y, and Z, and 6 degrees of freedom combined with 3 degrees of freedom around the X axis, around the Y axis, and around the Z axis to achieve movement and rotation, but with 5 sets of permanent magnets and steel balls to constrain 5 of 6 degrees of freedom One The degree of freedom is thus configurable to move only one degree of freedom of the remaining Z directions. Therefore, the group of the magnet and the steel ball must be five sets, and if it is six or more sets, in at least one set of the magnet and the ball, the magnet does not contact with the ball and is suspended, so that the movement in the vertical axis direction cannot be accurately performed. .

If the direction of the degree of freedom of the constraint of one of the five groups of the magnet and the steel ball respectively overlaps with the direction of the degrees of freedom of the other four pairs of constraints, the constraint becomes insufficient and may move to a degree of freedom other than the Z-axis direction or Rotate. For example, in FIG. 4, the arm support portion 20 is restrained on the YZ plane by the four sets of the permanent magnets 53a to d, 54a to d, and the balls 55a to d (i.e., for the X-axis movement, around the Y-axis). Constraints of rotation, rotation about the Z axis, and four directions for the constraint of Y-axis movement. Regarding the remaining one set of constraints, the rotation about the X axis must be constrained by the permanent magnets 53e, 54e and the steel ball 55e. Therefore, the permanent magnets 53e and 54e and the steel ball 55e are disposed below the permanent magnets 53d and 54d and the steel ball 55d. However, when the permanent magnets 53e and 54e and the steel ball 55e are disposed at the same height as the permanent magnets 53d and 54d and the ball 55d, the permanent magnets 53e and 54e and the ball 55e may be constrained in the Y-axis direction or constrained around the Z-axis. Rotation, consistent with the direction of freedom by the other four pairs of constraints. In this case, the rotation around the X-axis cannot be restricted, and when the measurement force in the Y-axis direction is applied to the probe 21, it is rotated about the X-axis, which causes a measurement error. That is, any one of the five pairs must be placed at the position and direction of the degree of freedom of the constraint and the direction in which the degrees of freedom of the other four pairs of constraints do not match.

Further, in the present embodiment, the probe 21 is a spherical body having a diameter of, for example, about 0.03 mm to about 2 mm, and the arm 22 is, as an example, having a thickness of about 0.7 mm and a lower surface of the arm support portion 20. A rod-shaped member having a length of about 10 mm up to the center of the probe 21. The values are appropriately changed depending on the shapes of the surfaces 61a and 61b to be measured.

As described above, by attaching the probe 1 for the three-dimensional shape measuring device of the present invention to the previous three-dimensional shape measuring device 201, the contact force between the probe 21 and the measuring object 60, that is, the measuring force can be made small, Can be measured with high precision, even for tiny probes 21, can also be measured without damage. Further, the movement of the restraining arm support portion 20 and the combination of the magnet having the restoring force and the steel ball are point contact, respectively, but since the rigid bodies are in contact with each other, the movement of the five degrees of freedom other than the vertical axis direction is possible. Rotation increases rigidity. Thereby, the position of the probe 21 can be detected with high accuracy by detecting only the inclination of the position detecting mirror 23 provided in the arm support portion 20 and the movement in the vertical axis direction. The combination of the magnet and the steel ball is an example in which the smaller diameter is about 1 mm, whereby the mass of the movable portion is reduced, and the number of natural vibrations can be reduced. Thereby, vibration is less likely to occur, and measurement with high precision can be achieved.

Further, even if an unexpected impact is applied to the probe 1, the arm support portion 20 is largely displaced from the swing portion 3, and the ball sandwiched between the magnets is adsorbed to a certain magnet, so that the ball can be immediately restored without being dropped.

In the probe 1, the restoring force or the like utilizes a magnetic force, but since the permanent magnet is included, current does not flow as an electromagnet. Thereby, the configuration is simple, and the temperature rise without electric heating can be stably performed.

[Industrial availability]

The invention can not only measure the pressing surface with a small pushing pressure, but also can measure with a small pushing pressure when measuring the horizontal plane, and can reduce the horizontal displacement of the mirror in the probe. Thereby, the shape of the measurement object can be measured with high precision. It can be applied to the measurement of the inner surface or the aperture of a hole of any shape not only by high-precision and low-measurement force measurement, but also the shape of the vertical surface of the outer surface of an arbitrary shape, and the measurement of the horizontal surface with high precision and low measurement force. A probe for measuring a three-dimensional shape of a three-dimensional shape measuring device for shape measurement.

1‧‧‧ Probe for three-dimensional shape measuring device

2‧‧‧Installation Department

3a‧‧‧lower components

3c‧‧‧ movable side holding section

5‧‧‧Closed components

5a‧‧‧Swing through hole

11‧‧‧The Department of Cavity

20‧‧‧arm support

21‧‧‧ probe

22‧‧‧ Arm

23‧‧‧ position detection mirror

24‧‧‧through holes

33‧‧‧Fixed side retaining members

41‧‧‧ mounting table

41a‧‧‧Conical trough

42‧‧‧ fulcrum components

51‧‧‧ movable side magnet

52‧‧‧ Fixed side magnet

53c‧‧‧ permanent magnet

53d‧‧‧ permanent magnet

53e‧‧‧ permanent magnet

54c‧‧‧ permanent magnet

55a‧‧‧ steel ball

55c‧‧‧ steel ball

60‧‧‧Measurement

61a‧‧‧Measured surface

61b‧‧‧Measured surface

111‧‧‧Measured laser light

X‧‧‧ axis

Y‧‧‧ axis

Z‧‧‧ axis

Claims (6)

A probe for a three-dimensional shape measuring device, comprising: a mounting portion mounted on a three-dimensional shape measuring device; and a swinging portion including a mounting table provided on the mounting portion and a fulcrum placed on the mounting table The member is swingably coupled to the mounting portion with the fulcrum member as a fulcrum, and has a first surface and a second surface that intersect each other; and a pressing mechanism including a movable side member provided on the swinging portion and provided on the above The mounting portion fixes the side member opposite to the movable side member with respect to the movable side member, and the movable side member and the fixed side member are configured to generate magnetic attraction force, and the swinging portion faces the fixed direction by the magnetic attraction force. In the method, the swinging portion is pressed, and the arm supporting portion is attached to the lower end of the probe that is in contact with the surface to be measured of the measuring object, and has a third surface facing the first facing surface and a fourth surface facing the second facing surface; a plurality of swinging-portion side members provided on the first surface and the second surface of the swinging portion, and each having a vertical surface; a plurality of arm-side members are disposed on the third surface and the fourth surface of the arm support portion, and are configured to face each other in a horizontal direction with respect to any one of the swing-portion-side members And having a vertical surface that is opposed to the vertical plane of the opposite side of the swinging portion side member in the horizontal direction, and a magnetic attraction force with the swinging side member; and a plurality of magnetic bodies The spherical body is disposed between the swinging-portion side member and the arm-side member that are opposed to each other, and is attracted by the magnetic attraction force to contact the vertical surface. The probe for the three-dimensional shape measuring device of claim 1, which has five sets of magnetic components, The magnetic component includes one of the swinging-port side members, one of the arm-side members facing the one of the swinging-portion-side members, and one of the swinging-side member and the arm-side member. The above-mentioned magnetic body is disposed at a position and a direction of a degree of freedom in a direction in which any one of the five groups is constrained in a direction in which the degrees of freedom of the other four groups do not coincide. The probe for a three-dimensional shape measuring device according to claim 2, wherein one of the swinging-side member and the arm-side member includes a permanent magnet, and the other includes a magnetic body. The probe for a three-dimensional shape measuring device according to claim 2, wherein both of the swinging-portion-side member and the arm-side member comprise permanent magnets, and are disposed to face each other with opposite poles. The probe for a three-dimensional shape measuring device according to any one of claims 2 to 4, wherein the arrangement of the swinging-side member and the magnetic component is arranged in three groups on the first surface and the third surface The two rows are arranged at different positions on the second surface and the fourth surface. The probe for a three-dimensional shape measuring device according to any one of claims 1 to 4, wherein the arm support portion includes a position detecting mirror.