JP6294111B2 - Surface shape measuring device - Google Patents

Description

  The present invention relates to a surface shape measuring apparatus.

For example, Patent Document 1 and Patent Document 2 are known as techniques for measuring the surface shape.
The surface shape measuring device of Patent Document 1 is included in a moving body, a stylus that contacts a surface to be measured, a load control mechanism that supports the stylus with respect to the moving body, and the load control mechanism. It has an elastic body and a displacement detection means for detecting the displacement of the moving body. In addition, the surface shape measuring device includes a control device that controls the load control mechanism in accordance with detection of displacement of the elastic body and the moving body of the displacement detection means. The control device applies a load up to a set load while bringing the stylus into contact with the surface to be examined by moving the moving body, and the difference between the displacement amount of the moving body and the displacement amount of the elastic body is the set value. The position of the moving body is controlled so as to be equal to the amount of displacement corresponding to the load. In patent document 1, there exists an advantage which the followability to the shape change of a to-be-tested surface improves by comprising as mentioned above.

  The surface shape measuring apparatus of Patent Literature 2 is based on an acting force sensor that detects an acting force acting on the measuring element when the measuring element scans the surface of the object to be measured, and the acting force detected by the acting force sensor. It has a displacement information calculation circuit for calculating displacement information of the measuring element. Further, the surface shape measuring apparatus of Patent Document 2 drives a drive mechanism that displaces the measuring element so that the acting force is constant based on the displacement information of the measuring element obtained by the displacement information calculating circuit. I try to control it. Patent Document 2 has an advantage that the measurement speed can be improved by reducing the variation width of the measurement data by configuring as described above.

Japanese Patent No. 2966214 Japanese Patent No. 4167031

  However, in Patent Document 1, it is necessary to perform both position control of the moving body (that is, position control of the stylus) and force control of the stylus, which makes it difficult to control. Moreover, in patent document 2, there exists a problem which requires force control of a probe.

  An object of the present invention is to provide a surface shape measuring apparatus that does not require force control of a displacement sensor that detects the shape of the surface to be measured of the object to be measured and can measure the surface to be measured of the object to be measured with a simple configuration. There is.

  In order to solve the above problems, a surface shape measuring apparatus according to the present invention includes a holder having three legs that are in point contact with the surface to be measured of the object to be measured and two legs that are spaced apart in the scanning direction during measurement. A displacement sensor that is provided on the holder so as to be positioned, and that measures a shape of the test surface; and a rigid member that is coupled to the holder via an elastic coupling member. While the holder and the object to be measured move relative to each other in the scanning direction, the holder is dragged while being connected to the rigid member, and vibrations from the rigid member are absorbed.

Further, the connecting member may be formed of a leaf spring.
Further, the connecting member may be formed by a coil spring.
Further, it is preferable that the leg has a curved surface at a point contact point with the measurement object.

The holder and the leg are preferably made of a low thermal expansion material.
The surface shape measuring device may be a curved surface shape measuring device.

  According to the present invention, it is not necessary to control the force of a displacement sensor that detects the shape of the surface to be measured, and the surface to be measured can be measured with a simple configuration.

The side view of the surface shape measuring apparatus of one Embodiment. The bottom view of a holder. The characteristic view which shows the dispersion | variation from the average value of the measured value measured in multiple times by the surface shape measuring apparatus. The side view of the surface shape measuring apparatus of other embodiment.

(First embodiment)
Hereinafter, a surface shape measuring apparatus according to an embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 1, the surface shape measuring apparatus 10 includes a holder 20, three legs 30, 40, 50 provided on the lower surface of the holder 20, and a displacement sensor 60 attached to the holder 20. The holder 20 is formed of a low thermal expansion material with extremely low thermal expansion. Examples of the low thermal expansion material include low thermal expansion metals, low thermal expansion glass, and low thermal expansion ceramics. Note that, instead of the low thermal expansion material, zero thermal expansion glass having no thermal expansion near room temperature may be used. Moreover, lens glass can be mentioned as low thermal expansion glass and zero thermal expansion glass. Examples of the low thermal expansion metal include Invar, Super Invar, and Kovar. In the present embodiment, the holder 20 is composed of a super invar.

  As shown in FIG. 2, the legs 30, 40, 50 are arranged so as to be located at the vertices of the triangle, respectively. The triangle is not limited to an equilateral triangle or an isosceles triangle, and may be any appropriate shape that can be stabilized when the holder 20 is placed on the test surface 100a of the measurement object 100.

  The legs 30, 40, 50 preferably have a shape that makes point contact with the test surface 100 a of the measurement object 100. The point-contacting shape is preferably a curved surface, and more preferably a spherical shape (including a spherical shape and a semi-spherical shape). Further, the legs 30, 40, 50 may be cones or pyramids. In the case of a cone or a pyramid, the bottom surface of the cone or the pyramid may be fixed to the lower surface of the holder 20 so that the apexes of the cone or the pyramid are in point contact with the test surface 100a. In the present embodiment, the legs 30, 40, 50 are formed in a hemispherical shape having a spherical surface.

  The legs 30, 40, 50 are preferably made of a low thermal expansion material such as a low thermal expansion glass, a low thermal expansion ceramic, or a low thermal expansion metal. Instead of the low thermal expansion material, zero thermal expansion glass having no thermal expansion near room temperature may be used. Examples of the low thermal expansion glass and zero thermal expansion glass include lens glass.

  The legs 30, 40, and 50 are formed of the above-described low thermal expansion material, and the holder 20 is formed of a low thermal expansion metal, thereby eliminating measurement errors due to thermal expansion due to environmental temperature during measurement. be able to.

  The X-axis direction shown in FIGS. 1 and 2 is the same direction as the scanning direction of the surface shape measuring apparatus. The scanning direction is also a drag direction in which the holder 20 is dragged by the rigid member 70 via a connecting member 80 described later. Note that the XYZ orthogonal coordinates are a right-handed system. The legs 30 and 40 are arranged so as to be separated from each other in the scanning direction of the holder 20. Further, the displacement sensor 60 is disposed so as to be positioned between the legs 30 and 40 on a straight line connecting the point contacts of the legs 30 and 40 with respect to the test surface 100a. In the present embodiment, the displacement sensor 60 is disposed so as to be located at a position that is half of the separation distance 2 </ b> L of the point contact portions of the legs 30 and 40. The displacement sensor 60 may be either a contact type displacement sensor or a non-contact type displacement sensor. A contact type displacement sensor includes, for example, an electric micrometer. Non-contact displacement sensors include, for example, laser displacement sensors and capacitive sensors. With these displacement sensors, it is possible to detect the height of the shape of the test surface 100a of the measurement object 100. In this embodiment, it consists of a laser type displacement sensor which is a non-contact type displacement sensor.

  As shown in FIG. 1, the holder 20 is connected to a rigid member 70 located on the drag direction side via an elastic connecting member 80. The connecting member 80 is connected to the rigid member 70 so as not to support the holder 20 in the direction of gravity.

The rigid member 70 shown in FIG. 1 only needs to be in a relatively movable relationship with respect to the table 200 on which the measurement object 100 is placed.
For example, when the table 200 is an XY table, the rigid member 70 may be fixed integrally with a base (not shown) that supports the XY table movably. Further, when the table 200 is a fixed table, a gantry (not shown) that is reciprocally movable in the X-axis direction and a moving member (not shown) that is reciprocally movable in the Y-axis direction with respect to the gantry. The rigid member 70 may be attached.

As described above, the shape of the test surface 100a of the measurement object 100 placed on the table 200 can be measured based on the relative movement relationship between the rigid member 70 and the table 200.
The connecting member 80 is made of, for example, a leaf spring. The connecting member 80 drags the holder 20 and absorbs vibration from the rigid member 70 when the rigid member 70 and the table 200 relatively move in the scanning direction.

The surface shape measuring apparatus 10 of the present embodiment is a curved surface shape measuring apparatus that measures a shape in which the test surface 100a of the measurement object 100 is a curved surface.
(Operation of the embodiment)
A case where the surface shape measuring apparatus 10 configured as described above sequentially measures the test surface 100a of the measurement object 100 by the three-point method will be described.

First, the output value S (x) from the displacement sensor 60 will be described.
When the rigid member 70 and the table 200 on which the measurement object 100 is placed are relatively moved in the scanning direction, the X coordinates of the point contact of the legs 30 and 40 with respect to the test surface 100a of the measurement object 100 are (xL ) And (x + L). The straight line connecting the point contacts of the legs 30 and 40 is determined by the difference in height between the two point contacts in the Z-axis direction. Here, the point x on the straight line indicates the position of the displacement sensor 60 on the X axis. When the straight line is included in a preset reference horizontal plane, it is the origin position in the Z-axis direction where the displacement sensor 60 is located.

When there is an inclination of the straight line with respect to the reference horizontal plane at the time of measurement and there is a movement of the origin of the displacement sensor 60 at the point x, the output value S (x) of the displacement sensor 60 and the test surface of the measurement object 100 The cross-sectional shape f (x) of 100a is the relationship of Formula (1).
S (x) = f (x) − {f (x−L) + f (x + L)} / 2 + a (1)
The above equation (1) means the same as the differential output when the three-point method is executed sequentially and the motion error in the scan acquired from the three displacement sensors is removed to show only the amount related to the cross-sectional shape. ing. In the case of performing measurement by the sequential three-point method, an output value may be employed every time the displacement sensor 60 moves half of the separation distance 2L of the part where the legs 30 and 40 are in point contact.

  Note that a in the above formula (1) corresponds to a zero point error between the displacement sensors in the sequential three-point method. This zero point error a can be calibrated based on the value of the displacement sensor 60 acquired when the legs 30, 40, 50 are brought into contact with each other along the known linear shape and dragged.

Next, FIG. 3 shows the result of confirming the effect of the connecting member 80 when the surface shape of the test surface 100a of the actual measurement object 100 is measured using the surface shape measuring apparatus 10.
The displacement sensor 60 used the following.

SI-F01: manufactured by KEYENCE Co., Ltd. Measurement range: 0.05 to 1.1 mm
Spot diameter: φ20μm
Resolution: 0.001 μm
The displacement sensor 60 was mounted on the holder 20 and scanned at a scanning speed of 20 mm / s. The sample interval was set to one point per 1 mm, and the same portion of the test surface 100a of the measurement object 100 was measured 20 times. The test surface 100a of the measurement object 100 has a convex mirror surface, but the surface shape is unknown.

In addition, the holder 20 used the rigid body of the superstructure of the surface grinding machine via the connecting member 80 as the rigid body member 70, and used the movable table of the surface grinding machine as the table 200.
FIG. 3 shows the variation from the average value of the measured values when the distance of 200 mm on the measured object 100 is measured 20 times as described above. In FIG. 3, the horizontal axis is the scanning distance, and the unit is mm. The vertical axis is the deviation from the average value of the measured values, and the unit is micrometer.

  In FIG. 3, the standard deviation is 0.5 nm except for the place where the shape around 40 mm is deteriorated. This is probably because the holder 20 is dragged and moved through the connecting member 80 when the table 200 and the rigid member 70 are moved relative to each other, but the vibration from the rigid member 70 is absorbed by the connecting member 80. It is.

This embodiment has the following features.
(1) The surface shape measuring apparatus 10 of the present embodiment includes a holder 20 having three legs 30, 40, and 50 that are in point contact with the test surface 100 a of the measurement object 100. The holder 20 includes a displacement sensor 60 that measures the shape of the test surface 100a so as to be positioned between the two legs 30 and 40 that are separated in the scanning direction at the time of measurement. Moreover, it has the rigid member 70 connected with the holder 20 through the elastic connection member 80. As shown in FIG. Further, the connecting member 80 drags the holder in a connected state to the rigid member 70 and absorbs vibration from the rigid member 70 while the holder 20 and the measurement object 100 are relatively moved in the scanning direction.

  As a result, according to the present embodiment, it is not necessary to control the force of the displacement sensor for detecting the shape of the surface to be measured, and the surface to be measured can be measured with a simple configuration. In this embodiment, since only the holder 20 is dragged, a guide member for guiding the holder is not necessary.

  (2) The connecting member 80 of the surface shape measuring apparatus 10 of this embodiment is a leaf spring. As a result, according to the present embodiment, vibration from the rigid member 70 can be absorbed by the connecting member 80, and highly accurate measurement can be performed.

  (3) The legs 30, 40, 50 of the surface shape measuring apparatus 10 according to the present embodiment have a curved surface at a portion that makes point contact with the measurement object 100. As a result, according to the present embodiment, the legs 30, 40, and 50 make point contact with the test surface 100a of the measurement object 100 at a curved surface during measurement, so that damage to the test surface 100a can be suppressed.

  (4) The holder 20 and the legs 30, 40, 50 of the surface shape measuring apparatus 10 of this embodiment are made of a low thermal expansion material. As a result, a measurement error due to thermal expansion of the holder 20 and the legs 30, 40, 50 due to the environmental temperature at the time of measurement can be eliminated.

  (5) The surface shape measuring device 10 of the present embodiment is a curved surface shape measuring device. As a result, in this embodiment, when the test surface 100a of the measurement object 100 measures the shape of the curved surface, the effect (1) can be achieved.

(Second Embodiment)
Next, the surface shape measuring apparatus 10 of 2nd Embodiment is demonstrated with reference to FIG. In addition, about the structure which is the same as that of the surface shape measuring apparatus 10 of 1st Embodiment, or equivalent, the same code | symbol is attached | subjected, the detailed description is abbreviate | omitted, and a different structure is demonstrated.

  In the surface shape measuring apparatus 10 of the first embodiment, the connecting member 80 is configured by a leaf spring, but the connecting member 180 of the present embodiment is configured by a coil spring. Moreover, in 1st Embodiment, as shown in FIG. 1, the holder 20 was connected with the rigid member 70 located in the drag direction side via the elastic connection member 80. As shown in FIG. On the other hand, in this embodiment, as shown in FIG. 4, the rigid member 70 is disposed above the holder 20 and the rigid member 70 and the connecting member 180 are connected.

Even if the surface shape measuring apparatus 10 is configured in this manner, the same effects as those of the first embodiment can be obtained.
In addition, embodiment of this invention is not limited to the said embodiment, You may change as follows.

  In the above embodiment, the legs 30, 40, 50 are formed from low thermal expansion glass or low thermal expansion metal. However, if the measurement environment temperature of the surface 100a to be measured 100 is controlled to a constant temperature, the material of the legs 30, 40, and 50 need not be limited to low thermal expansion glass or low thermal expansion metal. Absent. In this case, since the measurement environment temperature is constant, the surface shape of the test surface 100a of the measurement object 100 can be measured without the leg 30, 40, 50 being adversely affected by thermal expansion.

  In the above-described embodiment, the displacement sensor 60 is disposed so as to be positioned between the legs 30 and 40 on the straight line connecting the point contacts of the legs 30 and 40 and is equidistant from the legs 30 and 40. Although arranged, it is not limited to this position. For example, the displacement sensor 60 may be arranged so that one of the legs 30 and 40 is more proximal than the other on a straight line connecting the point contacts of the legs 30 and 40. In this case, if the output value S (x) of the displacement sensor 60 is calculated according to the ratio of the distance between the leg 30 and the displacement sensor 60 and the distance between the leg 40 and the displacement sensor 60 in the equation (1). Good. Even in this case, the cross-sectional shape can be measured even when the test surface 100a is a curved surface.

  In the embodiment, the surface shape measuring device 10 is a curved surface shape measuring device, but the test surface 100a of the measurement object 100 can also measure a flat surface. In this case, the surface shape measuring device 10 is a planar shape measuring device.

  When the planar shape measuring device is used, the leg 30 and the leg 50 are arranged on a line orthogonal to the scanning direction (hereinafter referred to as a first straight line), and the leg 40 is orthogonal to the first straight line (hereinafter referred to as the first straight line). You may arrange | position on a 2nd straight line. Then, the displacement sensor 60 may be disposed between the intersection point / leg 40 of the second straight line and the first straight line on the second straight line.

  -It is good also considering the connection member 80 of 1st Embodiment as a coil spring instead of a leaf | plate spring. Further, the connecting member 180 of the second embodiment may be a leaf spring instead of the coil spring. The connecting members 80 and 180 are not limited to leaf springs or coil springs, and may be other elastic members.

  In the first embodiment, the displacement sensor 60 is disposed so as to be positioned between the legs 30 and 40 on a straight line connecting the point contacts of the legs 30 and 40 with the test surface 100a. Instead of this, the displacement sensor 60 may be disposed between the legs 30 and 40 on an arc line connecting the point contacts of the legs 30 and 40 with the test surface 100a. The arc line has a radius of curvature set in advance. Further, the position of the displacement sensor 60 on the arc line may be an appropriate position between the legs 30 and 40, for example, it may be arranged at a position that is ½ of the separation distance on the arc line between the legs 30 and 40. .

  In this way, the leg 30, the displacement sensor 60, and the leg 40 sequentially move onto the same point on the test surface on the arc line, and the displacement sensor 60 measures the same point, The cross-sectional shape of the surface to be measured can be measured by the sequential three-point method.

DESCRIPTION OF SYMBOLS 10 ... Surface shape measuring device, 20 ... Holder, 30, 40, 50 ... Leg,
60 ... Displacement sensor, 70 ... Rigid member, 80 ... Connecting member,
100: Measurement object, 100a: Test surface, 200: Table.

Claims (6)

A holder having three legs in point contact with the surface to be measured;
A displacement sensor that is provided on the holder so as to be positioned between the two legs that are spaced apart in the scanning direction at the time of measurement, and that measures the shape of the test surface;
A rigid member connected to the holder via an elastic connecting member;
While the holder and the object to be measured move relative to each other in the scanning direction, the connecting member drags the holder with the three members abutting on the test surface while being connected to the rigid member, and the rigid member. Surface shape measuring device that absorbs vibration from the surface.   The surface shape measuring apparatus according to claim 1, wherein the connecting member is a leaf spring.   The surface shape measuring apparatus according to claim 1, wherein the connecting member is a coil spring.   The surface shape measuring device according to any one of claims 1 to 3, wherein a portion of the leg that makes point contact with the measurement object has a curved surface.   The surface shape measuring device according to any one of claims 1 to 4, wherein the holder and the leg are made of a low thermal expansion material.   A surface shape measuring device, wherein the surface shape measuring device according to any one of claims 1 to 5 is a curved surface shape measuring device.