JP2017015534A - Measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technique advantageous in simplifying configurations of a measurement device having a non-contact type and a contact type measuring mechanism.SOLUTION: A measurement device which measures a shape of an object of inspection includes: a light source emitting light; a light reception part receiving the light; a probe having a contactor to be brought into contact with the object of inspection and a reflection part reflecting the light; an optical system which changes a place that the light from the light source impinges on; and a control part which controls the optical system according to measurement modes. In a first measurement mode, the control part controls the optical system so that the light from the light source impinges on the object of inspection, and determines the position of a part of the object of inspection that the light from the light source impinges on based upon the output of a light reception part having received light reflected by the object of inspection. In a second measurement mode, the control part controls the optical system so that the light from the light source impinges on the reflection part of the probe, and determines a position of the part of the object of inspection that the contactor comes into contact with based upon the output from the light reception part having received light reflected by the reflection part.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a measuring apparatus that measures the shape of a test object.

  In a measuring device that measures the shape of a test object, there is a method of irradiating the test object with light and measuring the shape of the test object in a non-contact manner based on the light reflected by the test object. However, non-contact measurement is unsuitable when measuring the shape of a narrow part such as a hole formed in a test object. Therefore, in such a narrow place, it is preferable to measure the shape by bringing the contact of the probe into contact with the test object. Patent Documents 1 and 2 have both a mechanism for measuring the shape of the test object in a non-contact manner and a mechanism for measuring the shape of the test object by bringing the probe into contact with the test object. There has been proposed a measurement device that switches a measurement method according to a measurement location.

Japanese Patent Laid-Open No. 62-265520 JP-A-5-172557

  In the measuring devices described in Patent Documents 1 and 2, the shape of the test object is measured by bringing the probe into contact with the test object and a mechanism for measuring the shape of the test object in a non-contact manner (non-contact type measurement mechanism). A measurement mechanism (contact type measurement mechanism) is configured as a measurement system independent of each other. However, since it is rare to use a non-contact type measurement mechanism and a contact type measurement mechanism at the same time, it is complicated to configure both mechanisms as independent measurement systems, which is disadvantageous in terms of device cost, for example. Can be.

  Therefore, an object of the present invention is to provide an advantageous technique for simplifying the configuration of a measurement apparatus having a non-contact measurement mechanism and a contact measurement mechanism.

  In order to achieve the above object, a measurement apparatus according to one aspect of the present invention is a measurement apparatus that measures the shape of a test object, and includes a light source that emits light, a light receiving unit that receives light, and the target. A probe having a contactor to be brought into contact with a specimen and a reflection part that reflects light; an optical system that changes a location where light from the light source is incident; a control unit that controls the optical system according to a measurement mode; In the first measurement mode, the control unit controls the optical system so that light from the light source is incident on the test object, and receives the light reflected by the test object. Based on the output of the unit, the position of the portion of the test object where the light from the light source is incident is determined, and in the second measurement mode, the light from the light source is incident on the reflection unit of the probe. Controls the optical system and receives the light reflected by the reflector On the basis of the output of the light receiving portions, to determine the position of the portion of the test object to the contactor is in contact, characterized in that.

  Further objects and other aspects of the present invention will become apparent from the preferred embodiments described below with reference to the accompanying drawings.

  According to the present invention, for example, it is possible to provide an advantageous technique for simplifying the configuration of a measurement apparatus having a non-contact type measurement mechanism and a contact type measurement mechanism.

It is the schematic which shows the measuring device of 1st Embodiment. It is a figure which shows the structural example of a control part. It is a figure which shows the structural example of the measurement head in 1st Embodiment. It is a figure for demonstrating the measurement in 1st measurement mode. It is a figure for demonstrating the measurement in 2nd measurement mode. It is a figure for demonstrating the method to scan light on a plane plate. It is a figure which shows the structural example of the control part for calculating | requiring the position of the part of the test object which the contactor 24a of the probe contacted. It is a figure which shows the structural example of a probe. It is a figure which shows the measuring head provided with the some probe. It is a figure which shows the structure of the measurement head of 2nd Embodiment. It is a figure which shows the structure of the measurement head of 3rd Embodiment. It is a figure which shows the probe comprised so that attachment or detachment from the measurement head was possible. It is a figure which shows the measuring head provided with the some probe.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described with reference to the accompanying drawings. In addition, in each figure, the same reference number is attached | subjected about the same member thru | or element, and the overlapping description is abbreviate | omitted.

<First Embodiment>
A measuring apparatus 100 according to a first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic diagram illustrating a measurement apparatus 100 according to the first embodiment. The measurement apparatus 100 according to the first embodiment can include, for example, a measurement head 1 that measures the shape of the test object W, a head drive unit 10 that drives the measurement head 1, and a control unit 12. The control unit 12 includes, for example, a CPU, a memory, and the like, and controls each unit of the measurement apparatus 100 and performs a process of measuring the shape of the test object W.

[Configuration of Head Driving Unit 10]
First, the configuration of the head driving unit 10 will be described. The head drive unit 10 can include, for example, a surface plate 2 on which the test object W is arranged, a Y carriage 3, an X slider 4, a Z spindle 5, and a rotary head 6.

  The Y carriage 3 is formed in a portal shape by a pair of leg portions 3a and an X beam 3b, and is supported by the surface plate 2 through an air guide, for example. One leg 3a of the Y carriage 3 is provided with a Y drive unit 8 that drives the Y carriage 3 along the Y direction. The Y drive unit 8 includes a Y shaft 8a provided on the surface plate and a Y movable unit 8b provided on the Y carriage 3, and the Y movable unit 8b moves along the Y shaft 8a. Can be driven along the Y direction.

  The X slider 4 is supported by the X beam 3b of the Y carriage 3 via an air guide, for example, and an X drive unit 9 that drives the X slider 4 along the X direction is provided. The X drive unit 9 includes an X shaft 9a provided on the Y carriage 3 and an X movable unit 9b provided on the X slider 4, and the X movable unit 9b moves along the X shaft 9a. 4 can be driven along the X direction.

  The Z spindle 5 includes a Z shaft 5a provided with a rotary head 6, and a Z drive unit 5b supported by the X slider 4 and driving the Z shaft 5a along the Z direction. Further, the rotary head 6 can rotate the measurement head 1 around the Z axis, and thereby change the posture of the measurement head 1. By configuring the head driving unit 10 in this way, the measuring apparatus 100 can measure the shape of the test object W while changing the position and posture of the measuring head 1.

  Here, the head drive unit 10 includes, for example, a Y measurement unit 7 for measuring the position of the Y carriage 3 in the Y direction, an X measurement unit for measuring the position of the X slider 4 in the X direction, and a Z shaft. And a Z measuring unit for measuring the position of 5a in the Z direction. The head driving unit 10 can include a ωZ measuring unit for measuring the rotation amount of the rotary head 6. Thereby, the control part 12 can obtain the position (coordinates) of the measuring head 1 based on the measurement results by the Y measuring part 7, the X measuring part, the Z measuring part, and the ωZ measuring part. The Y measuring unit 7, the X measuring unit, and the Z measuring unit can each include an encoder and a laser interferometer, for example. Further, the ωZ measurement unit can include, for example, a rotary encoder. In the example shown in FIG. 1, only the Y measuring unit 7 having an encoder is shown.

[Configuration of Control Unit 12]
Next, the configuration of the control unit 12 will be described with reference to FIG. FIG. 2 is a diagram illustrating a configuration example of the control unit 12. The control unit 12 may include, for example, a processing unit 12a that determines the shape of the test object W, and a plurality of control units 12b to 12h that control the head driving unit 10 and the measurement head 1. The Y-axis control unit 12b, the X-axis control unit 12c, the Z-axis control unit 12d, and the ωZ control unit 12e are control units for controlling the head driving unit 10. The ω1 axis control unit 12f, the ω2 axis control unit 12g, and the detection control unit 12h are control units for controlling the measurement head 1. In addition, the control unit 12 includes a user interface unit 13 to which CAD information and measurement conditions of the object W are input, and a sensor unit that acquires environmental information such as temperature and vibration of a place where the measurement device 100 is disposed. 14.

  Based on the information obtained from the user interface unit 13 and the sensor unit 14, the processing unit 12 a moves the Y carriage 3, the X slider 4, the Z spindle 5, and the rotational head 6 in the head driving unit 10. Determine the control timing. The Y-axis control unit 12b controls the Y drive unit 8 that drives the Y carriage based on the movement amount and control timing of the Y carriage 3 supplied from the processing unit 12a. The X-axis control unit 12c controls the X drive unit 9 that drives the X slider 4 based on the movement amount and control timing of the X slider 4 supplied from the processing unit 12a. The Z-axis control unit 12d controls the Z drive unit 5b that drives the Z shaft 5a based on the movement amount and control timing of the Z spindle 5 supplied from the processing unit 12a. The ωZ-axis control unit 12e controls driving of the rotary head 6 based on the rotation amount and control timing of the rotary head 6 supplied from the processing unit 12a.

  In addition, the processing unit 12a is configured to control the control amounts and control timings of the first optical system 22 and the second optical system 23 in the measurement head 1 based on information obtained from the user interface unit 13 and the sensor unit 14, and in the measurement head 1. The control timing of the detection unit 21 is obtained. The configuration of the measurement head 1 will be described later. The ω1 axis control unit 12f controls the first optical system 22 based on the control amount and control timing of the first optical system 22 supplied from the processing unit 12a. The ω2 axis control unit 12g controls the second optical system 23 based on the control amount and control timing of the second optical system 23 supplied from the processing unit 12a. The detection control unit 12h acquires the detection result from the detection unit 21 based on the control timing supplied from the processing unit 12a. Thereby, the process part 12a can acquire the position about each of the some measurement location in the test object W, and can obtain | require the shape of the test object W. FIG.

[Configuration of Measuring Head 1]
The method for measuring the shape of the test object W includes, for example, a method for measuring the shape of the test object W in a non-contact manner using light, and a method for measuring the shape of the test object by bringing the probe into contact with the test object W. There is a way to do it. In the non-contact type measurement, since the shape of the test object W can be measured without bringing the probe into contact with the test object W, there is an advantage that the test object W is not damaged. However, the non-contact type measurement is not suitable for measuring the shape of a narrow portion such as a hole formed in the test object W, for example. Therefore, it is preferable to use contact measurement in such a narrow place. Therefore, the measurement head 1 of the first embodiment measures the shape of the test object W in a plurality of measurement modes including a first measurement mode for performing non-contact measurement and a second measurement mode for performing contact measurement. It is configured to be able to.

  Also, it is rare to perform non-contact measurement and contact measurement simultaneously. Therefore, the configuration in which the non-contact type measurement mechanism and the contact type measurement mechanism are independent measurement systems is complicated, and may be disadvantageous in terms of, for example, apparatus cost. Therefore, the measurement head 1 according to the first embodiment shares a part of the non-contact type measurement mechanism and the contact type measurement mechanism, thereby simplifying the apparatus configuration. Below, the structure of the measurement head 1 of 1st Embodiment is demonstrated.

  FIG. 3 is a diagram illustrating a configuration example of the measurement head 1. The measurement head 1 can include a detection unit 21, a first optical system 22, a second optical system 23, and a probe 24. The detection unit 21 includes, for example, a light source that emits light, a light receiving unit (for example, an image sensor) that receives light, and a length measurement unit that detects an optical path length. The length measuring unit detects the optical path length from the light source to the test object W in the first measurement mode based on the output of the light receiving unit, and detects the optical path length from the light source to the reflection unit of the probe 24 in the second measurement mode. To do. Each of the first optical system 22 and the second optical system 23 changes the path of light from the light source (the location where light from the light source is incident), and the light from the light source is reflected on the object W or the reflecting portion of the probe 24. It can be used to make it incident. The first optical system 22 is configured by, for example, a galvanometer mirror, and includes a mirror 22a and a drive unit 22b that rotationally drives the mirror 22a around an axis (ω1 axis) parallel to the surface of the mirror 22a. Similarly to the first optical system 22, the second optical system 23 is configured by, for example, a galvanometer mirror, and rotates the mirror 23a around an axis (ω2 axis) parallel to the surface of the mirror 23a and the mirror 23a. 23b. Although the case where the detection unit 21 includes a light source, a light receiving unit, and a length measuring unit has been described here, the light source, the light receiving unit, and the length measuring unit may be configured separately.

[Measurement in the first measurement mode]
Control of the measurement head 1 when measuring the shape of the test object W will be described. First, control of the measurement head 1 when measuring the shape of the test object W in the first measurement mode in which non-contact measurement is performed will be described. In the first measurement mode, the first optical system 22 (drive unit 22b) and the second optical system 23 (drive) are configured such that the light from the light source is reflected by the mirrors 22a and 23a and enters the measurement location on the test object. The unit 23b) is controlled by the control unit 12, respectively. And the light reflected by the said measurement location is reflected again by the mirrors 23a and 22a, and injects into the detection part 21 (light-receiving part). Thereby, the optical path length between the light source and the measurement location is obtained by the detection unit 21, and the position of the measurement location is determined by the control unit 12 based on the detection result by the detection unit 21. Thus, by performing the process which determines the position of a measurement location in each of the some location in the test object W, the shape of a test object can be obtained.

  Here, when the mirror 22a of the first optical system 22 is rotationally driven, light can be scanned on the test object in one direction (for example, the Y direction). Further, when the mirror 23a of the second optical system 23 is rotationally driven, light is emitted on the test object in a direction (for example, the X direction) different from the light scanning direction when the mirror 22a of the first optical system is rotationally driven. Can be scanned. For example, when the first optical system 22 and the second optical system 23 are respectively controlled so that the change in the angle of the mirrors 22a and 23a becomes the change shown in FIG. 4B, as shown in FIG. Light can be scanned in a zigzag pattern on the surface. In other words, within the range in which light can be scanned on the test object according to the angles of the mirrors 22a and 23a, light can be incident on an arbitrary place without the measurement head 1 being moved by the head driving unit 10. it can.

[Measurement in the second measurement mode]
Next, control of the measurement head 1 when measuring the shape of the test object W in the second measurement mode in which contact-type measurement is performed will be described. FIG. 5 is a diagram for explaining measurement in the second measurement mode. The probe 24 includes a contact 24a that comes into contact with a test object, a reflecting portion that reflects light, a stylus 24b, and a flat plate 24c, and is supported by a support member 24f through an elastic member 24g. In the first embodiment, an example in which a flat plate 24c is used as a reflection part of a probe will be described.

  In the second measurement mode, the first optical system 22 (drive unit 22b) and the second optical system 23 (drive unit) are configured such that light from the light source is reflected by the mirrors 22a and 23a and enters the flat plate 24c of the probe 24. 22b) is controlled by the control unit 12 (FIG. 5A). The light reflected by the flat plate 24c is reflected again by the mirrors 23a and 22a and enters the detection unit 21 (light receiving unit). Thereby, the optical path length between the light source and the flat plate is detected by the detection unit 21. Then, in the second measurement mode, the measurement head 1 is moved by the head drive unit 10 so that the contact 24a and the test object W come close to each other while the light is incident on the flat plate 24c, and FIG. ), The contact 24a of the probe 24 is brought into contact with the test object W. When the contact 24a comes into contact with the test object W, the flat plate 24c is displaced, and the optical path length between the light source and the flat plate 24c changes. The controller 12 can detect the contact between the contact 24a of the probe 24 and the object W based on such a change in the optical path length.

  In the first embodiment, the control unit 12 controls the first optical system 22 and the second optical system 23 so that the light from the light source scans on the flat plate of the probe 24. And the control part 12 calculates | requires the normal line with respect to the surface of the plane plate 24c based on the optical path length between the light source respectively detected by several points on a plane plate, and a plane plate, and the direction of the calculated | required normal line direction The contact between the contact 24a and the test object W is detected from the change.

FIG. 6 is a diagram for explaining a method of scanning light on the flat plate 24c. For example, when the control unit 12 controls the first optical system 22 and the second optical system 23 so that the change in the angles of the mirrors 22a and 23a becomes the change shown in FIG. In the scanning path shown, light can be scanned on the planar plate 24c with a period T. In this case, at times t ₁ , t ₂ , and t ₃ in each cycle T, light is incident on points A, B, and C on the flat plate 24c as shown in FIG. 6A. In this way, while controlling the first optical system 22 and the second optical system 23, the probe 24 (contact 24 a) and the test object W are gradually brought closer by the head driving unit 10. Then, when the contact 24a and the test object W come into contact with each other and the probe 24 tilts, at the times t ₁ , t ₂ , and t ₃ in each period T, as shown in FIG. Light enters the point A ′, point B ′, and point C ′. That is, at each of the times T ₁ , t ₂ , and t ₃ in each period T, a point on the plane plate 24c where light enters is displaced, and the direction of the normal to the plane of the plane plate 24c changes (normal vector). Changes from N to N ′). That is, by detecting the change in the direction of the normal line, the control unit 12 can detect the contact between the contact 24a and the test object W.

  Next, a method for obtaining the position of the location of the test object W that is in contact with the contact 24a of the probe 24 will be described. FIG. 7 is a diagram illustrating a configuration example of the control unit 12 for obtaining the position of the part of the test object W that the contact 24a of the probe 24 has contacted. The control unit 12 is based on the position of the measurement head 1 when the contact detection unit 41 that detects contact between the contact 24a and the test object W and the contact between the contact 24a and the test object W are detected. The processing unit 12a may include a determination unit 42 that determines the position of the location of the test object W with which the contact 24a comes into contact. The contact detection unit 41 can include, for example, a coordinate calculation unit 41a, a normal direction calculation unit 41b, and a normal change detection unit 41c.

The coordinate calculation unit 41a displays information indicating the control amount of the first optical system 22 and the control amount of the second optical system 23 for each of the times t ₁ , t ₂ , and t ₃ in each cycle T as the ω1 axis control unit 12f. And ω2 axis control unit 12g. Also, the coordinate calculation unit 41a acquires information indicating the optical path length between the light source and the flat plate 24c from the detection control unit 12h. Then, based on the acquired information, the coordinate calculation unit 41a calculates the coordinates on the flat plate 24c for the points on the flat plate 24c at which light is incident at each of the times t ₁ , t ₂ , and t ₃ in each period T. Ask. When the contactor 24a and the test object W are not in contact with each other, the coordinates of the points A, B, and C on the flat plate 24c on which light is incident at times t ₁ , t ₂ , and t ₃ are calculated. It is calculated | required by the part 41a. In the following, the coordinates of the point A are (x _a1 , y _a1 , z _a1 ), the coordinates of the point B are (x _b1 , y _b1 , z _b1 ), and the coordinates of the point C are (x _c1 , y _c1 , z _c1 ). And

  The normal direction calculation unit 41b calculates the normal direction with respect to the surface of the plane plate 24c based on the coordinates of each point on the plane plate 24c obtained by the coordinate calculation unit 41a. First, the normal direction calculation unit 41b obtains a vector AB from the point A to the point B and a vector AC from the point A to the point C from the equations (1) and (2), respectively. Next, the normal direction calculation unit 41c obtains a vector N orthogonal to the vector AB and the vector AC from Expression (3) using the outer product of the vector AB and the vector AC. This vector N is a normal vector (hereinafter referred to as normal vector N) with respect to the plane of the flat plate 24c.

_{AB = (x b1 -x a1,} y b1 -y a1, z b1 -z a1)
= ( _{M x1} , m _y1 , m _z1 ) (1)

AC = (x _c1 −x _a1 , y _c1 −y _a1 , z _c1 −z _a1 )
= (N _x1 , n _y1 , n _z1 ) (2)

N = AB × AC
= ( _{M x1} , m _y1 , m _z1 ) × (n _x1 , n _y1 , n _z1 )
_{= (M y1 · n z1 -m} z1 · n y1, m z1 · n x1 -m x1 · n z1,
m _x1 · n _y1 −m _y1 · n _x1 ) (3)

The normal change detection unit 41c detects a change in the normal vector N obtained by the normal direction calculation unit 41b. For example, the normal change detecting unit 41c, the normal vector _{N 0} obtained in the period _{T 0} shown in FIG. 6 (c), the angle between the normal vector _{N 1} obtained in the period _{T 1,} Using the inner product of the normal vector N ₀ and the normal vector N _1, it is obtained from equation (4). In the case where the contact piece 24a and the test object W is not in contact, the normal vector N ₀ and the normal vector N ₁ and the no change, the cos [theta] = 1. On the other hand, when the contact 24a and the test object W come into contact with each other and the probe 24 tilts, cos θ ≠ 1. For this reason, when the calculated cos θ is no longer “1”, the normal line change detection unit 41c detects that the contact 24a and the object W are in contact and outputs a contact signal. Here, since a disturbance occurs in the measuring head 1, a threshold value α (0 ≦ α <1) is set in consideration of the disturbance, and a normal line change detection unit 41c is output so that a contact signal is output when cos θ <α. May be configured.

cos θ = N ₀ · N ₁ / | N ₀ | · | N ₁ | (4)

  The determination unit 42 uses the contact signal supplied from the normal change detection unit 41a as a trigger, and the positional information of the measurement head 1 from the X-axis control unit 12b, the Y-axis control unit 12c, the Z-axis control unit 12d, and the ωZ control unit 12e. To get. Since the contact 24a of the probe 24 is arranged at a predetermined position in the measuring head 1, if the position of the measuring head 1 is known, the position of the contact 24a can be obtained. The position of the location of the test object W that the child 24a has contacted can also be obtained. Therefore, the determination unit 42 can determine the position of the location of the test object W that is in contact with the contact 24 a of the probe 24 based on the position information of the measurement head 1.

  Here, in the first embodiment, a method for detecting contact between the contact 24a of the probe 24 and the test object W from a change in normal to the surface of the flat plate 24c using the probe 24 having the flat plate 24c will be described. did. However, the shape of the reflection portion of the probe 24 on which light from the light source is incident may be any shape as long as the change in the optical path length between the light source and the reflection portion of the probe 24 can be detected. It is not limited to a specific shape. For example, as shown in FIG. 8, the contact between the contact 24a of the probe 24 and the test object W may be detected using a probe 24 having a spherical member 24d as a reflecting portion. In this case, the control unit 12 controls the first optical system 22 and the second optical system 23 so that the light from the light source is reflected by the mirrors 22a and 23a and enters the spherical member 24d. The control unit 12 may detect contact between the contact 24a of the probe 24 and the test object W based on a change in the optical path length between the light source detected by the detection unit 21 and the spherical member 24d. .

  Further, as shown in FIG. 9, a plurality of probes 24 may be provided on the measurement head 1. The plurality of probes 24 are preferably arranged in different directions. Thereby, according to the shape of the measurement part of the to-be-tested surface W, the probe 24 optimal for the measurement of the said measurement part can be used among several probes 24. FIG. In this case, the control unit 12 controls the first optical system 22 and the second optical system 23 so that the light from the light source is incident on the reflection unit of the probe 24 to be used among the plurality of probes 24. The method for detecting the contact between the probe 24 (contact 24a) and the test object W is as described above.

  As described above, when measuring the shape of the test object W by bringing the probe 24 into contact with the test object W, the measuring apparatus 100 according to the first embodiment measures the shape of the test object W in a non-contact manner. At this time, the light incident on the test object W is incident on the reflection portion of the probe 24. Based on the light reflected by the probe 24, contact between the probe 24 and the test object W is detected. Thereby, a part of non-contact type measurement mechanism and a contact-type measurement mechanism can be made common, and an apparatus structure can be simplified.

Second Embodiment
A measuring device according to a second embodiment of the present invention will be described. In the first embodiment, the measurement head 1 configured to use a plurality of optical systems so that light from a light source is incident on the test object W or the reflection portion of the probe 24 has been described. However, as shown in FIG. 10, using one optical system 25 including a mirror 25a and a drive unit 25b, the light from the light source is incident on the object W or the reflecting part of the probe 24 (for example, the plane mirror 24c). The measurement head 1 may be configured as described above. FIG. 10 is a diagram illustrating a configuration of the measurement head 1 according to the second embodiment. When the measuring head 1 is configured in this way, light can be scanned only in one direction (one-dimensional) on the test object. In this case, in the first measurement mode, if the measurement head 1 is driven by the head driving unit 10 in a direction different from the direction in which the optical system 25 can scan light on the test object, Light can be scanned two-dimensionally.

<Third Embodiment>
A measurement apparatus according to a third embodiment of the present invention will be described. In the second measurement mode, when the light from the light source is incident on the reflection part (for example, the plane mirror 24c) of the probe 24, the optical path length between the light source and the reflection part of the probe 24 is the measurement range (the optical path length is measured). May not be within the allowable range). Therefore, as shown in FIG. 11, the measurement head 1 of the third embodiment reflects light from the light source so that the optical path length between the light source and the reflecting portion of the probe 24 falls within the measurement range (allowable range). A mirror 26 is provided. Thereby, the optical path length between a light source and the reflection part of the probe 24 can be stored in the measurement range.

<Fourth embodiment>
A measurement device according to a fourth embodiment of the present invention will be described. In the fourth embodiment, a probe 24 configured to be detachable from the measurement head 1 will be described with reference to FIG. FIG. 12 is a diagram showing a configuration of the probe 24 in the fourth embodiment. The probe 24 of the fourth embodiment is divided into, for example, a first portion 24 ′ supported by the measurement head 1 and a second portion 24 ″ configured to be detachable from the measurement head 1. 24 ′ includes a first stylus 24b ₁ , a flat plate 24c (reflecting portion), and a first connecting portion 24e ₁ , and is supported via an elastic member 24g by a supporting member 24f fixed to the measuring head 1. The second portion 24 ″ includes a second stylus 24b ₂ , a contact 24a and a second connection portion 24e ₂ , and is supported by the support member 24h via the elastic member 24i.

When connecting the first portion 24 ′ and the second portion 24 ″, the connection member 24j of the support member 24f that supports the first portion 24 ′ and the connection member of the support member 24h that supports the second portion 24 ″. 24k is connected. Accordingly, the first connection portion 24e ₁ and the second connection portion 24e ₂ can be connected and used as one probe 24. As the connection member 24j and the connection member 24k, for example, a magnet or the like can be used. Further, as the first connection part 24e ₁ and the second connection part 24e ₂ , for example, magnets can be used. By configuring the probe 24 in this way, for example, as shown in FIG. 13, only the first portion 24 ′ of the probe 24 is arranged at a plurality of locations of the measurement head 1, and the shape of the measurement location of the test object W is obtained. Accordingly, the second portion 24 "of the probe 24 can be replaced.

  As mentioned above, although preferred embodiment of this invention was described, it cannot be overemphasized that this invention is not limited to these embodiment, A various deformation | transformation and change are possible within the range of the summary.

1: measurement head, 10: head drive unit, 12: control unit, 21: detection unit, 22: first optical system, 23: second optical system, 24: probe, 100: measurement device

Claims (13)

A measuring device for measuring the shape of a test object,
A light source that emits light;
A light receiving portion for receiving light;
A probe having a contact to be brought into contact with the test object and a reflection part for reflecting light;
An optical system for changing the location where the light from the light source is incident;
A control unit for controlling the optical system according to a measurement mode;
Including
The controller is
In the first measurement mode, the optical system is controlled so that the light from the light source is incident on the test object, and based on the output of the light receiving unit that receives the light reflected by the test object, Determining the position of the portion of the specimen where light from the light source is incident;
In the second measurement mode, the optical system is controlled so that light from the light source is incident on the reflecting portion of the probe, and based on the output of the light receiving portion that receives the light reflected by the reflecting portion, A measuring apparatus for determining a position of a portion of the test object that is in contact with the contact. The optical system includes a mirror and a drive unit that drives the mirror,
The control unit controls the drive unit so that light from the light source is reflected by the mirror and enters the test object in the first measurement mode, and light from the light source in the second measurement mode. The measurement apparatus according to claim 1, wherein the driving unit is controlled so that the light is reflected by the mirror and enters the reflection unit of the probe.   The measuring apparatus according to claim 2, wherein the driving unit rotationally drives the mirror about an axis parallel to the surface of the mirror.   The said control part controls the said optical system so that the light from the said light source scans on the said test object in a said 1st measurement mode, The any one of the Claims 1 thru | or 3 characterized by the above-mentioned. The measuring device according to item.   The control unit detects contact between the contact and the test object based on a change in an optical path length between the light source and the reflection unit of the probe in the second measurement mode; The measuring apparatus according to any one of claims 1 to 4, wherein the measuring apparatus is characterized.   The control unit detects contact between the contact and the test object based on a change in the optical path length while the contact and the test object are brought close to each other in the second measurement mode. The measuring apparatus according to claim 5. The reflective portion of the probe includes a planar plate;
The said control part controls the said optical system so that the light from the said light source may inject into the said plane plate in the said 2nd measurement mode, The any one of Claims 1 thru | or 6 characterized by the above-mentioned. The measuring device described.   The measurement apparatus according to claim 7, wherein the control unit controls the optical system so that light from the light source scans on the flat plate in the second measurement mode.   In the second measurement mode, the control unit obtains a normal to the plane of the plane plate from the optical path lengths of the light source and each of the plurality of points on the plane plate, and based on the change in the normal, The measuring device according to claim 8, wherein contact between the contact and the test object is detected. The reflective portion of the probe includes a spherical member;
The said control part controls the said optical system so that the light from the said light source may inject into the said spherical member in the said 2nd measurement mode, The any one of the Claims 1 thru | or 6 characterized by the above-mentioned. The measuring device described in 1.   The measuring apparatus according to claim 1, comprising a plurality of the probes arranged in different directions.   The measuring apparatus according to claim 1, further comprising: a head provided with the optical system and the probe; and a head driving unit that drives the head.   The optical system further includes a mirror that reflects light from the light source so that an optical path length between the light source and the reflection portion of the probe in the measurement in the second measurement mode is within an allowable range. Item 13. The measuring device according to any one of Items 1 to 12.

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