TW202112833A - Resin composition - Google Patents

Resin composition Download PDF

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TW202112833A
TW202112833A TW109126458A TW109126458A TW202112833A TW 202112833 A TW202112833 A TW 202112833A TW 109126458 A TW109126458 A TW 109126458A TW 109126458 A TW109126458 A TW 109126458A TW 202112833 A TW202112833 A TW 202112833A
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component
group
same
resin composition
mass
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TW109126458A
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大村浩之
稲見佳代
湯川昇志郎
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日商日產化學股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F265/00Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F265/00Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00
    • C08F265/04Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00 on to polymers of esters
    • C08F265/06Polymerisation of acrylate or methacrylate esters on to polymers thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/86Arrangements for improving contrast, e.g. preventing reflection of ambient light
    • H10K50/865Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/44Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/46Polymerisation initiated by wave energy or particle radiation
    • C08F2/48Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • C08F2/50Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/12Light sources with substantially two-dimensional radiating surfaces
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/12Light sources with substantially two-dimensional radiating surfaces
    • H05B33/22Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers

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  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
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  • Polymers & Plastics (AREA)
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  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

This resin composition containing (A) an alkali-soluble copolymer, (B) a compound having two or more polymerizable groups which are one or more kinds of groups selected from the group consisting of an acrylate group, a methacrylate group, a vinyl group and an allyl group, (C) a photoinitiator, (D) a black pigment, (E) a liquid repellent component and (F) a solvent exhibits good curability in a light exposure process even in a colored state, and is capable of forming a pattern, thereby enabling the achievement of a cured film having high visible light blocking properties after curing of this resin composition.

Description

樹脂組成物Resin composition

本發明係有關於具有感光性的樹脂組成物。更詳言之係有關於,適合作為量子點-有機電激發光(QD-OLED)顯示器或Micro LED顯示器等之自發光顯示器用之材料的樹脂組成物。The present invention relates to a resin composition having photosensitivity. More specifically, it relates to a resin composition suitable as a material for self-luminous displays such as quantum dot-organic electroluminescent (QD-OLED) displays or Micro LED displays.

QD-OLED顯示器或Micro LED顯示器等之自發光顯示器,係以藍色的自發光元件為基底,將往紅與綠的波長轉換層以噴墨法方式進行構裝的次世代顯示器技術為基礎,該技術係被評價為色彩重現力高、可表現較豐富的色彩的技術。Self-luminous displays such as QD-OLED displays or Micro LED displays are based on blue self-luminous elements as the base, and the red and green wavelength conversion layers are assembled by inkjet method based on the next-generation display technology. This technology is evaluated as a technology that has high color reproducibility and can express richer colors.

在上述自發光顯示器中,為了更進一步的畫質之提升,針對將該顯示器面板的波長轉換層的子像素予以構成的隔壁,研討採用帶有遮光性的著色隔壁(著色撥液間隔層)。然而,就先前的著色感光性樹脂組成物而言,由於在隔壁形成的曝光工程中,入射光的穿透率較低,因此無法充分硬化至膜深部為止,而會發生圖案形成不良。另一方面,在以膜的硬化為優先的情況下,會因為著色劑的添加不足導致難以確保必要的遮光性。In the above-mentioned self-luminous display, in order to further improve the image quality, the use of light-shielding colored partitions (colored liquid-repellent partitions) for partitions formed of sub-pixels of the wavelength conversion layer of the display panel has been studied. However, in the conventional colored photosensitive resin composition, since the transmittance of incident light is low in the exposure process of forming the partition, it cannot be cured sufficiently to the deep part of the film, and pattern formation defects may occur. On the other hand, when the hardening of the film is the priority, it is difficult to ensure the necessary light-shielding properties due to insufficient addition of the colorant.

此外,本發明所關連的先前技術文獻方面係可舉如下。 [先前技術文獻] [專利文獻]In addition, aspects of prior art documents related to the present invention can be cited as follows. [Prior Technical Literature] [Patent Literature]

[專利文獻1]國際公開第2015/060240號[Patent Document 1] International Publication No. 2015/060240

[發明所欲解決之課題][The problem to be solved by the invention]

本發明係有鑑於上述事情而研發,目的在於提供一種,即使在已被著色之狀態下於曝光工程中仍具有良好的硬化性,可形成圖案,且硬化後能帶來可見光之遮光性高的硬化膜的樹脂組成物。 [用以解決課題之手段]The present invention was developed in view of the above matters, and its purpose is to provide a product that has good curability in the exposure process even in a colored state, can form a pattern, and can bring high light-shielding properties to visible light after curing. The resin composition of the cured film. [Means to solve the problem]

本發明人們,係為了達成上述目的而反覆深入研究,結果發現,作為光起始劑是使用具有特定之吸光係數(於本發明中係意味克吸光係數。以下相同。)的光起始劑、與特定之黑色顏料併用而成的樹脂組成物,係可形成圖案,且曝光工程中的紫外線之穿透率係為較高,可充分硬化至膜深部為止,而且藉由使該組成物硬化就可形成可見光之遮光性為高的硬化膜,而完成了本發明。The inventors of the present invention have conducted intensive studies to achieve the above-mentioned object. As a result, they have found that as a photoinitiator, a photoinitiator, which has a specific absorption coefficient (in the present invention, means gram absorption coefficient. The same applies below) is used. The resin composition used in combination with a specific black pigment can form patterns, and the transmittance of ultraviolet rays in the exposure process is high, and it can be fully cured to the deep part of the film, and the composition can be cured by curing the composition. The present invention has been completed by forming a cured film with high light-shielding properties of visible light.

亦即,本發明係提供下述的樹脂組成物。 1. 一種樹脂組成物,其特徵為,含有: (A)鹼可溶性共聚物; (B)具有2個以上從丙烯酸酯基、甲基丙烯酸酯基、乙烯基及烯丙基所組成的群組中所選擇出來的至少1種聚合性基的化合物; (C)光起始劑:(C-1)具有肟酯基,且在365nm下的甲醇中或乙腈中之吸光係數為5,000 ml/g・cm以上的光起始劑; (D)黑色顏料:將含有(A)成分、(B)成分、(C-1)成分、(C-2)在365nm下的甲醇中或乙腈中之吸光係數為100 ml/g・cm以下的光起始劑、(D)黑色顏料、(E)撥液成分、(F)溶媒及(G)硫醇化合物,且以相對於(A)成分100質量份而(D)成分為10質量份之比率分散於(F)成分中而成的分散液塗佈在玻璃基板上,使其乾燥而成膜的膜厚10μm的薄膜中,令波長365nm之光穿透率為T1 ,令波長550nm之光穿透率為T2 時,T1 /T2 之值為0.3以上的黑色顏料; (E)撥液成分;及 (F)溶媒。 2. 如1之樹脂組成物,其中,(D)成分之含有量,係相對於(A)成分100質量份,而為1~50質量份。 3. 如1或2之樹脂組成物,其中,(A)成分之數目平均分子量,係以聚苯乙烯換算為2,000~50,000。 4. 如請求項1~3之任1項所記載之樹脂組成物,其中,(A)成分係為,含有從丙烯酸、甲基丙烯酸、馬來酸酐及馬來醯亞胺所組成的群組中所選擇出來的至少1種單體混合物的共聚物。 5. 如1~4之任一樹脂組成物,其中,(C-1)成分之含有量,係相對於(A)成分100質量份,而為0.3~5質量份。 6. 如1~5之任一樹脂組成物,其中,(B)成分之含有量,係相對於(A)成分100質量份,而為10~150質量份。 7. 如1~6之任一樹脂組成物,其中,(C-1)成分係為具有咔唑結構的光起始劑。 8. 一種硬化膜,係由1~7之任一樹脂組成物所得。 9. 一種自發光顯示器用隔壁,係由1~7之任一樹脂組成物所形成。 10. 一種自發光顯示器的波長轉換層,係具備9之隔壁。 11. 一種有機電激發光元件,係具備10之波長轉換層。 12. 一種Micro LED元件,係具備10之波長轉換層。 [發明效果]That is, the present invention provides the following resin composition. 1. A resin composition characterized by containing: (A) an alkali-soluble copolymer; (B) having two or more groups consisting of an acrylate group, a methacrylate group, a vinyl group, and an allyl group (C) Photoinitiator: (C-1) has an oxime ester group and has an absorption coefficient of 5,000 ml/g in methanol or acetonitrile at 365 nm・Photoinitiator above cm; (D) Black pigment: absorb light containing (A) component, (B) component, (C-1) component, (C-2) in methanol or acetonitrile at 365nm The photoinitiator with a coefficient of 100 ml/g·cm or less, (D) black pigment, (E) liquid-repellent component, (F) solvent, and (G) thiol compound, relative to 100 mass of (A) component The dispersion of the component (D) is 10 parts by mass in the component (F), which is coated on a glass substrate and dried to form a thin film with a thickness of 10μm, and make the light with a wavelength of 365nm A black pigment with a transmittance of T 1 and a light transmittance of 550 nm with a wavelength of T 2 , the value of T 1 /T 2 is 0.3 or more; (E) liquid-repellent component; and (F) solvent. 2. The resin composition of item 1, wherein the content of component (D) is 1-50 parts by mass relative to 100 parts by mass of component (A). 3. The resin composition of 1 or 2, wherein the number average molecular weight of component (A) is 2,000-50,000 in terms of polystyrene. 4. The resin composition described in any one of Claims 1 to 3, wherein the component (A) contains a group consisting of acrylic acid, methacrylic acid, maleic anhydride, and maleimide A copolymer of at least one monomer mixture selected in. 5. The resin composition of any one of 1 to 4, wherein the content of the component (C-1) is 0.3 to 5 parts by mass relative to 100 parts by mass of the component (A). 6. The resin composition of any one of 1 to 5, wherein the content of the component (B) is 10 to 150 parts by mass relative to 100 parts by mass of the component (A). 7. The resin composition of any one of 1 to 6, wherein the component (C-1) is a photoinitiator having a carbazole structure. 8. A cured film obtained from any resin composition of 1-7. 9. A partition wall for self-luminous displays, which is formed of any resin composition from 1 to 7. 10. A wavelength conversion layer of a self-luminous display with 9 partitions. 11. An organic electroluminescence element with 10 wavelength conversion layers. 12. A Micro LED element with 10 wavelength conversion layers. [Effects of the invention]

本發明所述之樹脂組成物,係曝光工程中的紫外線之穿透率為較高,可充分硬化至膜深部為止,而且藉由使該組成物硬化就可形成可見光之遮光性為高的硬化膜。所得之硬化膜,係可合適地作為QD-OLED顯示器或Micro LED顯示器等之自發光顯示器用之材料來使用,尤其是,進行圖案形成,作為將自發光顯示器面板的波長轉換層的子像素予以構成的隔壁(著色隔壁)來使用,藉此可對其畫質的更進一步提升做出貢獻。The resin composition of the present invention has a high transmittance of ultraviolet rays in the exposure process, and can be fully cured to the deep part of the film, and by curing the composition, a curing with high light-shielding properties of visible light can be formed membrane. The resulting cured film can be suitably used as a material for self-luminous displays such as QD-OLED displays or Micro LED displays, especially for pattern formation, as sub-pixels of the wavelength conversion layer of self-luminous display panels. The structure of the partition (colored partition) can be used to further improve the image quality.

本發明的樹脂組成物係為含有: (A)鹼可溶性共聚物; (B)具有2個以上從丙烯酸酯基、甲基丙烯酸酯基、乙烯基及烯丙基所組成的群組中所選擇出來的至少1種聚合性基的化合物; (C)光起始劑:(C-1)具有肟酯基,且在365nm下的甲醇中或乙腈中之吸光係數為5,000 ml/g・cm以上的光起始劑; (D)黑色顏料:將含有(A)成分、(B)成分、(C-1)成分、(C-2)在365nm下的甲醇中或乙腈中之吸光係數為100 ml/g・cm以下的光起始劑、(D)黑色顏料、(E)撥液成分、(F)溶媒及(G)硫醇化合物,且以相對於(A)成分100質量份而(D)成分為10質量份之比率分散於(F)成分中而成的分散液塗佈在玻璃基板上,使其乾燥而成膜的膜厚10μm的薄膜中,令波長365nm之光穿透率為T1 ,令波長550nm之光穿透率為T2 時,T1 /T2 之值為0.3以上的黑色顏料; (E)撥液成分;及 (F)溶媒 的樹脂組成物。The resin composition of the present invention contains: (A) an alkali-soluble copolymer; (B) having two or more selected from the group consisting of an acrylate group, a methacrylate group, a vinyl group, and an allyl group At least one type of polymerizable group compound; (C) Photoinitiator: (C-1) has an oxime ester group, and the absorption coefficient in methanol or acetonitrile at 365 nm is 5,000 ml/g·cm or more (D) Black pigment: The absorption coefficient of (A) component, (B) component, (C-1) component, (C-2) in methanol or acetonitrile at 365nm is 100 ml/g·cm or less of the photoinitiator, (D) black pigment, (E) liquid repellent component, (F) solvent, and (G) thiol compound, with respect to 100 parts by mass of (A) component ( D) component is 10 parts by mass dispersed in component (F). The dispersion is coated on a glass substrate and dried to form a thin film with a thickness of 10μm. The light transmittance at a wavelength of 365nm It is T 1, so that the light transmittance of the wavelength of 550nm is 2 T, T 1 / T is 0.3 or more of the black pigment 2; (E) repellent composition; and (F) a solvent a resin composition.

<(A)成分> (A)鹼可溶性共聚物,係為藉由含有具有鹼可溶性基之單體及其他單體的單體混合物之共聚而獲得的共聚物(以下記載成「(A)成分之共聚物」)。<(A) Ingredient> (A) The alkali-soluble copolymer is a copolymer obtained by copolymerization of a monomer mixture containing a monomer having an alkali-soluble group and other monomers (hereinafter referred to as "copolymer of component (A)").

(A)成分之共聚物,係若其重複單位中含有具鹼可溶性基的結構即可,至於構成共聚物之高分子的主鏈的骨架及側鏈之種類等並無特別限定。The copolymer of the component (A) only needs to have a structure having an alkali-soluble group in its repeating unit, and there are no particular restrictions on the type of the backbone and side chains of the main chain of the polymer constituting the copolymer.

(A)成分之共聚物的數目平均分子量Mn,係若考慮未曝光部的顯影性(對鹼性溶液的可溶性),則以2,000~50,000為佳,以5,000~20,000為較佳。 此外,本發明中,數目平均分子量Mn及後述的重量平均分子量Mw,係皆為藉由凝膠滲透層析(GPC)所致之聚苯乙烯換算值。(A) The number average molecular weight Mn of the copolymer of the component is 2,000 to 50,000, and more preferably 5,000 to 20,000, considering the developability of the unexposed part (solubility in alkaline solution). In addition, in the present invention, the number average molecular weight Mn and the weight average molecular weight Mw described later are all polystyrene conversion values by gel permeation chromatography (GPC).

作為具有鹼可溶性基之單體中所含之鹼可溶性基係可舉例如:羧基、酚性羥基、酸酐基、馬來醯亞胺基。Examples of the alkali-soluble group system contained in the monomer having an alkali-soluble group include a carboxyl group, a phenolic hydroxyl group, an acid anhydride group, and a maleimide group.

作為具羧基之單體係可舉例如:丙烯酸、甲基丙烯酸、巴豆酸、單-(2-(丙烯醯氧基)乙基)酞酸酯、單-(2-(甲基丙烯醯氧基)乙基)酞酸酯、N-(羧基苯基)馬來醯亞胺、N-(羧基苯基)甲基丙烯醯胺、N-(羧基苯基)丙烯醯胺及4-乙烯基安息香酸。Examples of the single system having a carboxyl group include acrylic acid, methacrylic acid, crotonic acid, mono-(2-(acryloyloxy)ethyl)phthalate, mono-(2-(methacryloyloxy) )Ethyl)phthalate, N-(carboxyphenyl)maleimide, N-(carboxyphenyl)methacrylamide, N-(carboxyphenyl)acrylamide and 4-vinylbenzoin acid.

作為具有酚性羥基之單體係可舉例如:羥基苯乙烯、N-(羥基苯基)丙烯醯胺、N-(羥基苯基)甲基丙烯醯胺及N-(羥基苯基)馬來醯亞胺。Examples of the single system having a phenolic hydroxyl group include: hydroxystyrene, N-(hydroxyphenyl)acrylamide, N-(hydroxyphenyl)methacrylamide, and N-(hydroxyphenyl)maleic Imine.

作為具有酸酐基之單體係可舉例如:馬來酸酐及伊康酸酐。Examples of the single system having an acid anhydride group include maleic anhydride and itaconic anhydride.

作為具有馬來醯亞胺基之單體係可舉例如:馬來醯亞胺、或前述之N-(羧基苯基)馬來醯亞胺及N-(羥基苯基)馬來醯亞胺。As a single system having a maleimide group, for example, maleimide, or the aforementioned N-(carboxyphenyl)maleimide and N-(hydroxyphenyl)maleimide .

在本發明中,這些具有鹼可溶性基之單體之中,又以含有從丙烯酸、甲基丙烯酸、馬來酸酐及馬來醯亞胺所組成的群組中所選擇出來的至少1種單體混合物之共聚物為佳。In the present invention, among these monomers having alkali-soluble groups, at least one monomer selected from the group consisting of acrylic acid, methacrylic acid, maleic anhydride and maleimide The copolymer of the mixture is preferred.

又,於本發明中,在獲得上述共聚物時,亦可併用能與上述具有鹼可溶性基之單體進行共聚之其他單體。 作為其他單體係可舉如:丙烯酸酯化合物、甲基丙烯酸酯化合物、N-取代馬來醯亞胺化合物、丙烯腈化合物、丙烯醯胺化合物、甲基丙烯醯胺化合物、苯乙烯化合物及乙烯基化合物。Furthermore, in the present invention, when obtaining the above-mentioned copolymer, another monomer capable of copolymerizing with the above-mentioned alkali-soluble group-containing monomer may be used in combination. Examples of other single systems include: acrylate compounds, methacrylate compounds, N-substituted maleimide compounds, acrylonitrile compounds, acrylamide compounds, methacrylamide compounds, styrene compounds, and ethylene Base compound.

作為丙烯酸酯化合物係可舉例如:甲基丙烯酸酯、乙基丙烯酸酯、異丙基丙烯酸酯、苄基丙烯酸酯、萘基丙烯酸酯、蒽基丙烯酸酯、蒽基甲基丙烯酸酯、苯基丙烯酸酯、苯氧基乙基丙烯酸酯、2,2,2-三氟乙基丙烯酸酯、tert-丁基丙烯酸酯、環己基丙烯酸酯、異莰基丙烯酸酯、2-甲氧基乙基丙烯酸酯、甲氧基三乙二醇丙烯酸酯、2-乙氧基乙基丙烯酸酯、四氫糠基丙烯酸酯、3-甲氧基丁基丙烯酸酯、2-甲基-2-金剛烷基丙烯酸酯、2-丙基-2-金剛烷基丙烯酸酯、8-甲基-8-三環癸基丙烯酸酯、2-羥基乙基丙烯酸酯、2-羥基丙基丙烯酸酯、4-羥基丁基丙烯酸酯、2,3-二羥基丙基丙烯酸酯、二乙二醇單丙烯酸酯、己內酯2-(丙烯醯氧基)乙基酯、聚(乙二醇)乙基醚丙烯酸酯、5-丙烯醯氧基-6-羥基降莰烯-2-羧酸-6-內酯、丙烯醯基乙基異氰酸酯、8-乙基-8-三環癸基丙烯酸酯及環氧丙基丙烯酸酯。Examples of acrylate compound systems include: methacrylate, ethacrylate, isopropyl acrylate, benzyl acrylate, naphthyl acrylate, anthryl acrylate, anthryl methacrylate, and phenyl acrylate Ester, phenoxyethyl acrylate, 2,2,2-trifluoroethyl acrylate, tert-butyl acrylate, cyclohexyl acrylate, isobornyl acrylate, 2-methoxyethyl acrylate , Methoxytriethylene glycol acrylate, 2-ethoxyethyl acrylate, tetrahydrofurfuryl acrylate, 3-methoxybutyl acrylate, 2-methyl-2-adamantyl acrylate , 2-Propyl-2-adamantyl acrylate, 8-methyl-8-tricyclodecyl acrylate, 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, 4-hydroxybutyl acrylate Ester, 2,3-dihydroxypropyl acrylate, diethylene glycol monoacrylate, caprolactone 2-(acryloxy) ethyl ester, poly(ethylene glycol) ethyl ether acrylate, 5- Acryloyloxy-6-hydroxynorbornene-2-carboxylic acid-6-lactone, acryloylethyl isocyanate, 8-ethyl-8-tricyclodecyl acrylate and glycidyl acrylate.

作為甲基丙烯酸酯化合物係可舉例如:甲基丙烯酸甲酯、甲基丙烯酸乙酯、甲基丙烯酸異丙基酯、甲基丙烯酸苄基酯、甲基丙烯酸萘基酯、甲基丙烯酸蒽基酯、甲基丙烯酸蒽基甲基酯、甲基丙烯酸苯基酯、甲基丙烯酸苯氧基乙基酯、甲基丙烯酸2,2,2-三氟乙基酯、甲基丙烯酸tert-丁基酯、甲基丙烯酸環己基酯、甲基丙烯酸異莰基酯、甲基丙烯酸2-甲氧基乙基酯、甲基丙烯酸甲氧基三乙二醇酯、甲基丙烯酸2-乙氧基乙基酯、甲基丙烯酸四氫糠基酯、甲基丙烯酸3-甲氧基丁基酯、甲基丙烯酸2-甲基-2-金剛烷基酯、γ-丁內酯甲基丙烯酸酯、甲基丙烯酸2-丙基-2-金剛烷基酯、甲基丙烯酸8-甲基-8-三環癸基酯、甲基丙烯酸2-羥基乙基酯、甲基丙烯酸2-羥基丙基酯、甲基丙烯酸4-羥基丁基酯、甲基丙烯酸2,3-二羥基丙基酯、二乙二醇單甲基丙烯酸酯、己內酯2-(甲基丙烯醯氧基)乙基酯、聚(乙二醇)乙基醚甲基丙烯酸酯、5-甲基丙烯醯氧基-6-羥基降莰烯-2-羧酸-6-內酯、甲基丙烯醯基乙基異氰酸酯、8-乙基-8-三環癸基甲基丙烯酸酯及縮水甘油甲基丙烯酸酯。Examples of the methacrylate compound system include methyl methacrylate, ethyl methacrylate, isopropyl methacrylate, benzyl methacrylate, naphthyl methacrylate, and anthracenyl methacrylate. Ester, anthracenyl methyl methacrylate, phenyl methacrylate, phenoxyethyl methacrylate, 2,2,2-trifluoroethyl methacrylate, tert-butyl methacrylate Ester, cyclohexyl methacrylate, isobornyl methacrylate, 2-methoxyethyl methacrylate, methoxytriethylene glycol methacrylate, 2-ethoxyethyl methacrylate Base ester, tetrahydrofurfuryl methacrylate, 3-methoxybutyl methacrylate, 2-methyl-2-adamantyl methacrylate, γ-butyrolactone methacrylate, methyl methacrylate 2-propyl-2-adamantyl methacrylate, 8-methyl-8-tricyclodecyl methacrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate, 4-hydroxybutyl methacrylate, 2,3-dihydroxypropyl methacrylate, diethylene glycol monomethacrylate, caprolactone 2-(methacryloxy) ethyl ester, Poly(ethylene glycol) ethyl ether methacrylate, 5-methacryloyloxy-6-hydroxynorbornene-2-carboxylic acid-6-lactone, methacryloyl ethyl isocyanate, 8 -Ethyl-8-tricyclodecyl methacrylate and glycidyl methacrylate.

作為乙烯基化合物係可舉例如:甲基乙烯基醚、苄基乙烯基醚、乙烯基萘、乙烯基蒽、乙烯基聯苯、乙烯基咔唑、2-羥基乙基乙烯基醚、苯基乙烯基醚及丙基乙烯基醚。Examples of the vinyl compound system include: methyl vinyl ether, benzyl vinyl ether, vinyl naphthalene, vinyl anthracene, vinyl biphenyl, vinyl carbazole, 2-hydroxyethyl vinyl ether, phenyl Vinyl ether and propyl vinyl ether.

作為苯乙烯化合物係可舉例如:苯乙烯、甲基苯乙烯、氯苯乙烯及溴苯乙烯。Examples of the styrene compound system include styrene, methylstyrene, chlorostyrene, and bromostyrene.

作為N-取代馬來醯亞胺化合物係可舉例如:N-甲基馬來醯亞胺、N-苯基馬來醯亞胺、及N-環己基馬來醯亞胺。Examples of the N-substituted maleimide compound system include N-methylmaleimide, N-phenylmaleimide, and N-cyclohexylmaleimide.

作為丙烯腈化合物係可舉例如丙烯腈。As an acrylonitrile compound system, acrylonitrile is mentioned, for example.

作為丙烯醯胺化合物係可舉例如:羥基丙烯醯胺、N-甲基丙烯醯胺、N-乙基丙烯醯胺、N-異丙基丙烯醯胺、N-丁基丙烯醯胺、二丙酮丙烯醯胺、N,N-二甲基丙烯醯胺、N,N-二乙基丙烯醯胺、N,N-二丙基丙烯醯胺、丙烯醯基嗎啉、N-n-丁氧基甲基丙烯醯胺、N-異丁氧基甲基丙烯醯胺及N-甲氧基甲基丙烯醯胺。Examples of the acrylamide compound system include: hydroxyacrylamide, N-methacrylamide, N-ethacrylamide, N-isopropylacrylamide, N-butylacrylamide, and diacetone Acrylic amide, N,N-dimethyl acrylamide, N,N-diethyl acrylamide, N,N-dipropyl acrylamide, acryl morpholine, Nn-butoxymethyl Allylamide, N-isobutoxymethacrylamide and N-methoxymethacrylamide.

作為甲基丙烯醯胺化合物係可舉例如:羥基甲基丙烯醯胺、N-甲基甲基丙烯醯胺、N-乙基甲基丙烯醯胺、N-異丙基甲基丙烯醯胺、N-丁基甲基丙烯醯胺、二丙酮甲基丙烯醯胺、N,N-二甲基甲基丙烯醯胺、N,N-二乙基甲基丙烯醯胺、N,N-二丙基甲基丙烯醯胺、4-甲基丙烯醯基嗎啉、N-n-丁氧基甲基甲基丙烯醯胺、N-異丁氧基甲基甲基丙烯醯胺及N-甲氧基甲基甲基丙烯醯胺。Examples of the methacrylamide compound system include: hydroxymethacrylamide, N-methylmethacrylamide, N-ethylmethacrylamide, N-isopropylmethacrylamide, N-butylmethacrylamide, diacetone methacrylamide, N,N-dimethylmethacrylamide, N,N-diethylmethacrylamide, N,N-dipropylmethacrylamide Methacrylamide, 4-methacrylomorpholine, Nn-butoxymethylmethacrylamide, N-isobutoxymethylmethacrylamide and N-methoxymethylmethacrylate Allyl amide.

在本發明中,在上述其他單體之中,又以含有從丙烯酸酯化合物、甲基丙烯酸酯化合物、N-取代馬來醯亞胺化合物、丙烯腈化合物、丙烯醯胺化合物、甲基丙烯醯胺化合物、苯乙烯化合物及乙烯基化合物所組成的群組中所選擇出來的至少1種為佳,含有甲基丙烯酸酯化合物則為較佳。In the present invention, among the above-mentioned other monomers, it contains acrylate compounds, methacrylate compounds, N-substituted maleimide compounds, acrylonitrile compounds, acrylamide compounds, and methacrylamide compounds. At least one selected from the group consisting of an amine compound, a styrene compound, and a vinyl compound is preferable, and it is preferable to contain a methacrylate compound.

又,上述的具有鹼可溶性基之單體及其他單體之中,具有羧基之單體與甲基丙烯酸酯化合物的組合係為較佳,甲基丙烯酸與甲基丙烯酸甲酯的組合則為更佳。In addition, among the above-mentioned monomers having alkali-soluble groups and other monomers, the combination of a monomer having a carboxyl group and a methacrylate compound is preferred, and a combination of methacrylic acid and methyl methacrylate is more preferred. good.

獲得(A)成分之共聚物的方法係無特別限定,但可藉由例如:令含有上述的具有鹼可溶性基之單體及其他單體的單體混合物,在溶媒中,在50~110℃下進行聚合的方法而獲得。作為上述溶媒,係若能溶解具有鹼可溶性基之單體及其他單體、以及(A)成分之共聚物者,則無特別限制皆可使用。作為具體例係可舉後述的(F)成分中所例示的溶媒。又,在聚合之際,係使用偶氮二異丁腈等之公知的聚合起始劑為佳。The method for obtaining the copolymer of component (A) is not particularly limited, but it can be achieved by, for example, making a monomer mixture containing the above-mentioned alkali-soluble group-containing monomer and other monomers in a solvent at 50 to 110°C Under the method of polymerization. As said solvent, if it can dissolve the monomer and other monomers which have an alkali-soluble group, and the copolymer of (A) component, it can use without a restriction|limiting in particular. As a specific example, the solvent illustrated in (F) component mentioned later can be mentioned. In addition, at the time of polymerization, a known polymerization initiator such as azobisisobutyronitrile is preferably used.

將如上述所得之(A)成分之共聚物的溶液,在攪拌下投入於二乙醚或水等使其再沉澱,過濾所生成之沉澱物並洗淨後,在常壓或減壓下,以常溫或加熱進行乾燥,就可獲得上述共聚物的粉體。藉由如此操作,就可去除與共聚物共存的聚合起始劑或未反應單體,其結果為,可取得已純化之共聚物的粉體。藉由一次的操作並無法充分純化的情況下,只需將已取得之粉體再溶解於溶媒中,並重複上述操作即可。The solution of the copolymer of component (A) obtained as described above is poured into diethyl ether or water with stirring to re-precipitate, and the resulting precipitate is filtered and washed, and then under normal pressure or reduced pressure, Drying at room temperature or by heating can obtain the above-mentioned copolymer powder. By doing this, the polymerization initiator or unreacted monomer coexisting with the copolymer can be removed. As a result, a purified copolymer powder can be obtained. If it is not possible to purify sufficiently by one operation, only need to re-dissolve the obtained powder in the solvent and repeat the above operation.

在本發明中,可直接使用上述(A)鹼可溶性共聚物的聚合溶液,或亦可使用將單離的聚合物之粉體再溶解於適宜的溶媒所成的溶液。作為上述溶媒係可舉例如:於後述的(F)成分中所例示的溶媒。In the present invention, the polymerization solution of the above-mentioned (A) alkali-soluble copolymer can be used as it is, or a solution obtained by re-dissolving the powder of the isolated polymer in a suitable solvent can also be used. As said solvent system, the solvent exemplified in (F) component mentioned later can be mentioned, for example.

鹼可溶性單體及其他單體之質量比([鹼可溶性單體]/[其他單體]),以5/95~50/50為佳,以10/90~30/70為較佳。藉由將上述質量比設為上述範圍,於曝光部中可獲得良好的硬化性,於未曝光部中可獲得良好的顯影性。The mass ratio of alkali-soluble monomer to other monomers ([alkali-soluble monomer]/[other monomer]) is preferably 5/95-50/50, preferably 10/90-30/70. By setting the above mass ratio to the above range, good curability can be obtained in the exposed portion, and good developability can be obtained in the unexposed portion.

<(B)成分> (B)成分係為,具有2個以上從丙烯酸酯基、甲基丙烯酸酯基、乙烯基及烯丙基所組成的群組中所選擇出來之至少1種聚合性基的化合物。於本發明中,所謂「具有2個以上聚合性基的化合物」係指,於一分子中具有2個以上聚合性基,且這些聚合性基係位於分子末端之化合物。 (B)成分,係就與各成分之相溶性為良好,且不對顯影性造成影響的觀點來看,Mw為1,000以下的化合物為佳。<(B) Ingredient> (B) The component is a compound having at least one polymerizable group selected from the group consisting of an acrylate group, a methacrylate group, a vinyl group, and an allyl group. In the present invention, the "compound having two or more polymerizable groups" refers to a compound having two or more polymerizable groups in one molecule, and these polymerizable groups are located at the end of the molecule. The (B) component is a compound having a Mw of 1,000 or less from the viewpoint that the compatibility with each component is good and does not affect the developability.

作為(B)成分的具體例係可舉例如:二季戊四醇六丙烯酸酯、二季戊四醇六甲基丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇五甲基丙烯酸酯、季戊四醇四丙烯酸酯、季戊四醇四甲基丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇三甲基丙烯酸酯、季戊四醇二丙烯酸酯、季戊四醇二甲基丙烯酸酯、四羥甲基丙烷四丙烯酸酯、四羥甲基丙烷四甲基丙烯酸酯、四羥甲基甲烷四丙烯酸酯、四 羥甲基甲烷四甲基丙烯酸酯、三羥甲基丙烷三丙烯酸酯、三羥甲基丙烷三甲基丙烯酸酯、1,3,5-三丙烯醯基六氫-S-三嗪、1,3,5-三甲基丙烯醯基六氫-S-三嗪、參(羥基乙基丙烯醯基)異三聚氰酸酯、參(羥基乙基甲基丙烯醯基)異三聚氰酸酯、三丙烯醯基甲縮醛、三甲基丙烯醯基甲縮醛、1,6-已二醇丙烯酸酯、1,6-已二醇甲基丙烯酸酯、新戊二醇二丙烯酸酯、新戊二醇二甲基丙烯酸酯、乙烷二醇二丙烯酸酯、乙烷二醇二甲基丙烯酸酯、2-羥基丙二醇二丙烯酸酯、2-羥基丙二醇二甲基丙烯酸酯、二乙二醇二丙烯酸酯、二乙二醇二甲基丙烯酸酯、異丙二醇二丙烯酸酯、異丙二醇二甲基丙烯酸酯、三乙二醇二丙烯酸酯、三乙二醇二甲基丙烯酸酯、N,N’-雙(丙烯醯基)半胱胺酸、N,N’-雙(甲基丙烯醯基)半胱胺酸、硫二甘醇二丙烯酸酯、硫二甘醇二甲基丙烯酸酯、雙酚A二丙烯酸酯、雙酚A二甲基丙烯酸酯、雙酚F二丙烯酸酯、雙酚F二甲基丙烯酸酯、雙酚S二丙烯酸酯、雙酚S二甲基丙烯酸酯、雙苯氧基乙醇茀二丙烯酸酯、雙苯氧基乙醇茀二甲基丙烯酸酯、二烯丙基醚雙酚A、o-二烯丙基雙酚A、馬來酸二烯丙基酯及三烯丙基偏苯三甲酸酯。具有2個以上這些聚合性基的化合物,係可1種單獨使用,或2種以上組合使用。Specific examples of the component (B) include: dipentaerythritol hexaacrylate, dipentaerythritol hexamethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol pentamethacrylate, pentaerythritol tetraacrylate, pentaerythritol tetramethyl Acrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, pentaerythritol diacrylate, pentaerythritol dimethacrylate, tetramethylolpropane tetraacrylate, tetramethylolpropane tetramethacrylate, tetramethylolmethane Methane tetraacrylate, tetramethylolmethane tetramethacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, 1,3,5-tripropenyl hexahydro- S-triazine, 1,3,5-trimethacryloyl hexahydro-S-triazine, ginseng (hydroxyethyl acrylate) isocyanurate, ginseng (hydroxyethyl methacrylate) Base) isocyanurate, triacryloyl methylal, trimethacryloyl methylal, 1,6-hexanediol acrylate, 1,6-hexanediol methacrylate, new Pentylene glycol diacrylate, neopentyl glycol dimethacrylate, ethanediol diacrylate, ethanediol dimethacrylate, 2-hydroxypropanediol diacrylate, 2-hydroxypropanediol dimethyl Acrylate, diethylene glycol diacrylate, diethylene glycol dimethacrylate, propylene glycol diacrylate, propylene glycol dimethacrylate, triethylene glycol diacrylate, triethylene glycol dimethyl Acrylate, N,N'-bis(acryloyl)cysteine, N,N'-bis(methacryloyl)cysteine, thiodiglycol diacrylate, thiodiglycol two Methacrylate, bisphenol A diacrylate, bisphenol A dimethacrylate, bisphenol F diacrylate, bisphenol F dimethacrylate, bisphenol S diacrylate, bisphenol S dimethyl Acrylic esters, bisphenoxyethanol diacrylate, bisphenoxyethanol dimethacrylate, diallyl ether bisphenol A, o-diallyl bisphenol A, diallyl maleate Base ester and triallyl trimellitate. Compounds having two or more of these polymerizable groups can be used singly or in combination of two or more.

上述的各化合物,係亦可作為市售品而取得,作為此種市售品係可舉例如:KAYARAD(註冊商標)T-1420、同DPHA、同DPHA-2C、同D-310、同D-330、同DPCA-20、同DPCA-30、同DPCA-60、同DPCA-120、同DN-0075、同DN-2475、同R-526、同NPGDA、同PEG400DA、同MANDA、同R-167、同HX-220、同HX620、同R-551、同R-712、同R-604、同R-684、同GPO-303、同TMPTA、同THE-330、同TPA-320、同TPA-330、同PET-30、同RP-1040(以上皆為日本化藥(股)製);ARONIX(註冊商標)M-210、同M-208、同M-211B、同M-215、同M-220、同M-225、同M-270、同M-240、同M-6100、同M-6250、同M-6500、同M-6200、同M-309、同M-310、同M-321、同M-350、同M-360、同M-313、同M-315、同M-306、同M-303、同M-452、同M-408、同M-403、同M-400、同M-402、同M-405、同M-406、同M-450、同M-460、同M-510、同M-520、同M-1100、同M-1200、同M-6100、同M-6200、同M-6250、同M-6500、同M-7100、同M8030、同M8060、同M8100、同M8530、同M-8560、同M9050(以上皆為東亞合成(股)製);VISCOAT 295、同300、同360、同GPT、同3PA、同400、同260、同312、同335HP、同700(以上皆為大阪有機化學工業(股)製);A-200、A-400、A-600、A-1000、A-B1206PE、ABE-300、A-BPE-10、A-BPE-20、A-BPE-30、A-BPE-4、A-BPEF、A-BPP-3、A-DCP、A-DOD-N、A-HD-N、A-NOD-N、APG-100、APG-200、APG-400、APG-700、A-PTMG-65、A-9300、A-9300-1CL、A-GLY-9E、A-GLY-20E、A-TMM-3、A-TMM-3L、A-TMM-3LM-N、A-TMPT、AD-TMP、ATM-35E、A-TMMT、A-9550、A-DPH、TMPT、9PG、701A、1206PE、NPG、NOD-N、HD-N、DOD-N、DCP、BPE-1300N、BPE-900、BPE-200、BPE-100、BPE-80N、23G、14G、9G、4G、3G、2G、1G(以上皆為新中村化學工業(股)製);輕酯EG、同2EG、同3EG、同4EG、同9EG、同14EG、同1.4BG、同NP、同1.6HX、同1.9ND、同G-101P、同G-201P、同DCP-M、同BP-2EMK、同BP-4EM、同BP-6EM、同TMP、輕丙烯酸酯3EG-A、同4EG-A、同9EG-A、同14EG-A、同PTMGA-250、同NP-A、同MPD-A、同1.6HX-A、同1.9ND-A、同MOD-A、同DCP-A、同BP-4PA、同BA-134、同BP-10EA、同HPP-A、同G-201P、同TMP-A、同TMP-3EO-A、同TMP-6EO-3A、同PE-3A、同PE-4A、同DPE-6A、環氧基酯40EM、同70PA、同200PA、同80MFA、同3002M、同3002A、同3000MK、同3000A、同EX-0205、AH-600、AT-600、UA-306H、UA-306T、UA-306I、UA-510H、UF-8001G、DAUA-167(共榮社化學(股)製);EBECRYL(註冊商標)TPGDA、同145、同150、同PEG400DA、同11、同HPNDA、同PETIA、同PETRA、同TMPTA、同TMPEOTA、同OTA480、同DPHA、同180、同40、同140、同204、同205、同210、同215、同220、同6202、同230、同244、同245、同264、同265、同270、同280/15IB、同284、同285、同294/25HD、同1259、同KRM8200、同4820、同4858、同5129、同8210、同8301、同8307、同8402、同8405、同8411、同8804、同8807、同9260、同9270、同KRM7735、同KRM8296、同KRM8452、同8311、同8701、同9227EA、同80、同436、同438、同446、同450、同505、同524、同525、同770、同800、同810、同811、同812、同1830、同846、同851、同852、同853、同1870、同884、同885、同600、同605、同645、同648、同860、同1606、同3500、同3608、同3700、同3701、同3702、同3703、同3708、同6040 (DAICEL-ALLNEX(股)製);SR212、SR213、SR230、SR238F、SR259、SR268、SR272、SR306H、SR344、SR349、SR508、CD560、CD561、CD564、SR601、SR602、SR610、SR833S、SR9003、CD9043、SR9045、SR9209、SR205、SR206、SR209、SR210、SR214、SR231、SR239、SR248、SR252、SR297、SR348、SR480、CD540、CD541、CD542、SR603、SR644、SR9036、SR351S、SR368、SR415、SR444、SR454、SR492、SR499、CD501、SR502、SR9020、CD9021、SR9035、SR350、SR295、SR355、SR399、SR494、SR9041(Sartomer公司製)。The above-mentioned compounds can also be obtained as commercially available products. Examples of such commercially available products include: KAYARAD (registered trademark) T-1420, the same as DPHA, the same as DPHA-2C, the same as D-310, and the same as D -330, same DPCA-20, same DPCA-30, same DPCA-60, same DPCA-120, same DN-0075, same DN-2475, same R-526, same NPGDA, same PEG400DA, same MANDA, same R- 167, same HX-220, same HX620, same R-551, same R-712, same R-604, same R-684, same GPO-303, same TMPTA, same THE-330, same TPA-320, same TPA -330, same as PET-30, same as RP-1040 (the above are all manufactured by Nippon Kayaku Co., Ltd.); ARONIX (registered trademark) M-210, same as M-208, same as M-211B, same as M-215, same M-220, same M-225, same M-270, same M-240, same M-6100, same M-6250, same M-6500, same M-6200, same M-309, same M-310, same M-321, same M-350, same M-360, same M-313, same M-315, same M-306, same M-303, same M-452, same M-408, same M-403, same M-400, same M-402, same M-405, same M-406, same M-450, same M-460, same M-510, same M-520, same M-1100, same M-1200, same M-6100, same M-6200, same M-6250, same M-6500, same M-7100, same M8030, same M8060, same M8100, same M8530, same M-8560, same M9050 (all above are East Asia Synthetic ( VISCOAT 295, the same 300, the same 360, the same GPT, the same 3PA, the same 400, the same 260, the same 312, the same 335HP, the same 700 (the above are the Osaka Organic Chemical Industry (stock) system); A- 200, A-400, A-600, A-1000, A-B1206PE, ABE-300, A-BPE-10, A-BPE-20, A-BPE-30, A-BPE-4, A-BPEF, A-BPP-3, A-DCP, A-DOD-N, A-HD-N, A-NOD-N, APG-100, APG-200, APG-400, APG-700, A-PTMG-65, A-9300, A-9300-1CL, A-GLY-9E, A-GLY-20E, A-TMM-3, A-TMM-3L, A-TMM-3LM-N, A-TMPT, AD-TMP, ATM-35E, A-TMMT, A-9550, A-DPH, TMPT, 9 PG, 701A, 1206PE, NPG, NOD-N, HD-N, DOD-N, DCP, BPE-1300N, BPE-900, BPE-200, BPE-100, BPE-80N, 23G, 14G, 9G, 4G, 3G, 2G, 1G (all of the above are manufactured by Shinnakamura Chemical Industry Co., Ltd.); light ester EG, the same 2EG, the same 3EG, the same 4EG, the same 9EG, the same 14EG, the same 1.4BG, the same NP, the same 1.6HX, the same 1.9ND, same G-101P, same G-201P, same DCP-M, same BP-2EMK, same BP-4EM, same BP-6EM, same TMP, light acrylate 3EG-A, same 4EG-A, same 9EG -A, same 14EG-A, same PTMGA-250, same NP-A, same MPD-A, same 1.6HX-A, same 1.9ND-A, same MOD-A, same DCP-A, same BP-4PA, Same as BA-134, same BP-10EA, same HPP-A, same G-201P, same TMP-A, same TMP-3EO-A, same TMP-6EO-3A, same PE-3A, same PE-4A, same DPE-6A, epoxy ester 40EM, same 70PA, same 200PA, same 80MFA, same 3002M, same 3002A, same 3000MK, same 3000A, same EX-0205, AH-600, AT-600, UA-306H, UA- 306T, UA-306I, UA-510H, UF-8001G, DAUA-167 (manufactured by Kyoeisha Chemical Co., Ltd.); EBECRYL (registered trademark) TPGDA, the same as 145, the same as 150, the same as PEG400DA, the same as 11, the same as HPNDA, Same PETIA, Same PETRA, Same TMPTA, Same TMPEOTA, Same OTA480, Same DPHA, Same 180, Same 40, Same 140, Same 204, Same 205, Same 210, Same 215, Same 220, Same 6202, Same 230, Same 244 , Same 245, same 264, same 265, same 270, same 280/15IB, same 284, same 285, same 294/25HD, same 1259, same KRM8200, same 4820, same 4858, same 5129, same 8210, same 8301 Same 8307, same 8402, same 8405, same 8411, same 8804, same 8807, same 9260, same 9270, same KRM7735, same KRM8296, same KRM8452, same 8311, same 8701, same 9227EA, same 80, same 436, same 438 , Same 446, same 450, same 505, same 524, same 525, same 770, same 800, same 810, same 811, same 812, same 1830, same 846, same 851, same 852, same 853, same 1870, same 884、The same 885、The same 600, same 605, same 645, same 648, same 860, same 1606, same 3500, same 3608, same 3700, same 3701, same 3702, same 3703, same 3708, same 6040 (DAICEL-ALLNEX (share) system); SR212, SR213, SR230, SR238F, SR259, SR268, SR272, SR306H, SR344, SR349, SR508, CD560, CD561, CD564, SR601, SR602, SR610, SR833S, SR9003, CD9043, SR9045, SR9209, SR205, SR206, SR209, SR210, SR214, SR231, SR239, SR248, SR252, SR297, SR348, SR480, CD540, CD541, CD542, SR603, SR644, SR9036, SR351S, SR368, SR415, SR444, SR454, SR492, SR499, CD501, SR502, SR9020, CD9021, SR9035, SR350, SR295, SR355, SR399, SR494, SR9041 (manufactured by Sartomer).

(B)成分之含有量,相對於(A)成分100質量份,以10~150質量份為佳,以20~120質量份為較佳,以30~110質量份為更佳。藉由將(B)成分之含有量設為上述範圍的下限以上,就可使曝光部充分地硬化,可確實地進行圖案形成。又,藉由將(B)成分之含有量設為上述範圍的上限以下,就可使預烘烤後的塗膜中不發生密著,於未曝光部中可確保良好的顯影性。The content of the (B) component is preferably 10 to 150 parts by mass relative to 100 parts by mass of the (A) component, preferably 20 to 120 parts by mass, and more preferably 30 to 110 parts by mass. By setting the content of the component (B) to be equal to or greater than the lower limit of the above-mentioned range, the exposed portion can be sufficiently hardened, and pattern formation can be performed reliably. In addition, by setting the content of the (B) component to be equal to or less than the upper limit of the above-mentioned range, it is possible to prevent adhesion in the coating film after prebaking, and to ensure good developability in the unexposed area.

<(C)成分> (C)成分係為光起始劑,在本發明中係使用具有特定之吸光係數的下述(C-1)之光起始劑。<(C) Ingredient> The component (C) is a photoinitiator, and the following (C-1) photoinitiator having a specific absorption coefficient is used in the present invention.

<(C-1)成分> (C-1)成分係為,具有肟酯基,且在365nm下的甲醇中或乙腈中之吸光係數為5,000 ml/g・cm以上的光起始劑。具體而言係可舉具有肟酯基與光吸收部位,且在365nm下的甲醇中或乙腈中之吸光係數為5,000 ml/g・cm以上的化合物。<(C-1) Ingredients> (C-1) The component is a photoinitiator having an oxime ester group and having an absorption coefficient of 5,000 ml/g·cm or more in methanol or acetonitrile at 365 nm. Specifically, the compound has an oxime ester group and a light absorption site, and has an absorption coefficient of 5,000 ml/g·cm or more in methanol or acetonitrile at 365 nm.

作為上述肟酯基,係可舉例如下述式(1)所表示的基。As said oxime ester group, the group represented by following formula (1) is mentioned, for example.

Figure 02_image001
(式中,R1 係表示苯基、碳數1~10之烷基或苄基,R2 係表示氫原子、碳數1~10之烷基或苯基,虛線係表示鍵結處。)
Figure 02_image001
(In the formula, R 1 represents a phenyl group, an alkyl group having 1 to 10 carbons or a benzyl group, R 2 represents a hydrogen atom, an alkyl group having 1 to 10 carbons or a phenyl group, and the dashed line represents a bonding site.)

作為碳數1~10之烷基,係直鏈狀、分枝狀或環狀之哪一者皆可,可舉例如:甲基、乙基、n-丙基、異丙基、環丙基、n-丁基、異丁基、s-丁基、t-丁基、n-戊基、新戊基、環戊基、n-己基、環己基、n-辛基、n-癸基及1-金剛烷基。The alkyl group having 1 to 10 carbon atoms may be linear, branched or cyclic, and examples include methyl, ethyl, n-propyl, isopropyl, and cyclopropyl. , N-butyl, isobutyl, s-butyl, t-butyl, n-pentyl, neopentyl, cyclopentyl, n-hexyl, cyclohexyl, n-octyl, n-decyl and 1-adamantyl.

作為上述光吸收部位係例如,在從苯基、苯硫基苯基、N-烷基咔唑基、萘基、香豆素基、烷氧基苯基、苯基烷氧基苯基及苯氧基烷氧基苯基所選擇出來的基上,以苄醯基、萘基羰基等之具有苄醯基結構的基所取代者為佳。甚至,亦可在該結構上,以苯基、苯硫基、二苯基胺基等做取代。As the above-mentioned light-absorbing part system, for example, it is selected from phenyl, thiophenylphenyl, N-alkylcarbazolyl, naphthyl, coumarin, alkoxyphenyl, phenylalkoxyphenyl, and benzene. The group selected for the oxyalkoxyphenyl group is preferably substituted with a group having a benzyl group such as a benzyl group and a naphthylcarbonyl group. Furthermore, the structure can also be substituted with phenyl, thiophenyl, diphenylamino, etc.

作為(C-1)成分係為例如:式(1)所表示的肟酯基,隔著單鍵或羰基,而與光吸收部位的從苯基、苯硫基苯基、N-烷基咔唑基、萘基、香豆素基、烷氧基苯基、苯基烷氧基苯基、及苯氧基烷氧基苯基所選擇出來的基所鍵結而成的化合物為佳。在本發明中,係在這些中,又以具有咔唑結構者為佳。The component (C-1) is, for example, the oxime ester group represented by the formula (1) via a single bond or a carbonyl group, and a light absorption site from a phenyl group, a phenylthiophenyl group, and N-alkylcarba Compounds formed by bonding selected groups of azole group, naphthyl group, coumarin group, alkoxy phenyl group, phenyl alkoxy phenyl group, and phenoxy alkoxy phenyl group are preferred. In the present invention, among these, those having a carbazole structure are preferred.

作為(C-1)成分的具體例係可舉例如:1-(4-苯硫基苯基)-1,2-辛二酮-2-(O-苄醯基肟)、乙酮,1-[9-乙基-6-(2-甲基苄醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、(E)-4-(4(4-(二苯基胺基)苄醯基)苄基氧基)苯甲醛-O-乙醯基肟、(E)-4-(4,8-二甲氧基-1-萘甲醯基)苯甲醛-O-乙醯基肟、1-(9-丙基-9H-咔唑-3-基)丁-1,3-二酮-1-(O-乙醯基肟)、及1-[9-乙基-6-(2-甲基苄醯基)-9H-咔唑-3-基]丁-1,3-二酮-1-(O-乙醯基肟)。Specific examples of the component (C-1) include: 1-(4-phenylthiophenyl)-1,2-octanedione-2-(O-benzyloxime), ethyl ketone, 1 -[9-Ethyl-6-(2-methylbenzyl)-9H-carbazol-3-yl]-1-(O-acetyloxime), (E)-4-(4(4 -(Diphenylamino)benzyl)benzyloxy)benzaldehyde-O-acetyloxime, (E)-4-(4,8-dimethoxy-1-naphthyloxy) Benzaldehyde-O-acetyloxime, 1-(9-propyl-9H-carbazol-3-yl)butan-1,3-dione-1-(O-acetyloxime), and 1- [9-Ethyl-6-(2-methylbenzyl)-9H-carbazol-3-yl]butan-1,3-dione-1-(O-acetyloxime).

(C-1)成分,係作為市售品而可容易取得,作為如此的市售品係可舉例如:IRGACURE(註冊商標) OXE01、IRGACURE(註冊商標)OXE02、IRGACURE(註冊商標)OXE03(以上為BASF公司製)、ADEKA OPTOMER N-1919、ADEKA ARKLS NCI-831、ADEKA ARKLS NCI-930 (以上為ADEKA(股)製)。這些(C-1)成分,係可單獨地使用1種,亦可2種類以上組合使用。(C-1) Ingredients are readily available as commercially available products. Examples of such commercially available products include: IRGACURE (registered trademark) OXE01, IRGACURE (registered trademark) OXE02, IRGACURE (registered trademark) OXE03 (above It is made by BASF Corporation), ADEKA OPTOMER N-1919, ADEKA ARKLS NCI-831, ADEKA ARKLS NCI-930 (the above are ADEKA (shares) system). These (C-1) components may be used individually by 1 type, and may be used in combination of 2 or more types.

(C-1)成分之含有量,相對於(A)成分100質量份,以0.3~5質量份為佳,以0.5~4質量份為較佳。藉由將(C-1)成分之含有量設為上述範圍內,可獲得良好的硬化性。The content of the component (C-1) is preferably 0.3 to 5 parts by mass, and more preferably 0.5 to 4 parts by mass relative to 100 parts by mass of the component (A). By setting the content of the component (C-1) within the above range, good curability can be obtained.

<(C-2)成分> 在本發明中,亦可連同(C-1)成分而併用(C-2)在365nm下的甲醇中或乙腈中之吸光係數為100 ml/g・cm以下的光起始劑。作為(C)成分藉由併用2種具有不同吸光係數的光起始劑,就可更為提升硬化性與顯影性。作為(C-2)成分係例如以具有羥基者為佳。<(C-2) Ingredients> In the present invention, it is also possible to use (C-2) a photoinitiator having an absorption coefficient of 100 ml/g·cm or less in methanol or acetonitrile at 365 nm together with the component (C-1). As the component (C), two photoinitiators with different absorption coefficients can be used in combination to further improve the curability and developability. As the (C-2) component, for example, those having a hydroxyl group are preferable.

作為(C-2)成分的具體例係可舉例如:1-羥基-環己基-苯基-酮、1-[4-(2-羥基乙氧基)-苯基]-2-羥基-2-甲基-1-丙-1-酮、2-羥基-2-甲基-1-苯基-丙-1-酮、苯甲醯甲酸甲酯、及2-氧基-2-苯基乙酸2-[2-羥基-乙氧基]乙基酯。Specific examples of the component (C-2) include 1-hydroxy-cyclohexyl-phenyl-ketone, 1-[4-(2-hydroxyethoxy)-phenyl]-2-hydroxy-2 -Methyl-1-propan-1-one, 2-hydroxy-2-methyl-1-phenyl-propan-1-one, methyl benzoate, and 2-oxy-2-phenylacetic acid 2-[2-Hydroxy-ethoxy] ethyl ester.

(C-2)成分,係可作為市售品而容易取得,作為此種市售品係可舉例如:IRGACURE(註冊商標) 2959、IRGACURE(註冊商標)754、IRGACURE(註冊商標) 184、DAROCURE MBF、DAROCURE 1173(以上皆為BASF公司製)。這些(C-2)成分,係可單獨地使用1種,亦可2種類以上組合使用。(C-2) Ingredients are readily available as commercially available products. Examples of such commercially available products include: IRGACURE (registered trademark) 2959, IRGACURE (registered trademark) 754, IRGACURE (registered trademark) 184, DAROCURE MBF, DAROCURE 1173 (all of the above are made by BASF). These (C-2) components may be used individually by 1 type, and may be used in combination of 2 or more types.

在使用(C-2)成分的情況下,其含有量係為,相對於(A)成分100質量份,以0.5~10質量份為佳,以1~7質量份為較佳。藉由將(C-2)成分之含有量設為上述範圍的下限以上,可獲得良好的硬化性。藉由將(C-2)成分之含有量設為上述範圍的上限以下,於未曝光部中可確保良好的顯影性。When using (C-2) component, its content is 0.5-10 mass parts with respect to 100 mass parts of (A) components, Preferably it is 0.5-10 mass parts, Preferably it is 1-7 mass parts. By setting the content of the component (C-2) to be at least the lower limit of the above-mentioned range, good curability can be obtained. By setting the content of the component (C-2) to be equal to or less than the upper limit of the above-mentioned range, good developability can be ensured in the unexposed part.

<(D)成分> (D)成分係為,將含有(A)成分、(B)成分、(C-1)成分、(C-2)成分、(D)黑色顏料、(E)撥液成分、(F)溶媒及(G)硫醇化合物,且以相對於(A)成分100質量份而(D)成分為10質量份之比率分散於(F)成分中而成的分散液塗佈在玻璃基板上,使其乾燥而成膜的膜厚10μm的薄膜中,令波長365nm之光穿透率為T1 ,令波長550nm之光穿透率為T2 時,T1 /T2 之值為0.3以上的黑色顏料。於上述分散液中,(A)成分及(D)成分之種類,以及(A)成分及(D)成分以外之成分的種類及含有量,係可和上述的(A)~(C)成分、以及後述的(D)~(G)成分之說明中所記載者相同。此外,作為使用於上述分散液的溶媒,係以丙二醇單甲醚及丙二醇單甲醚乙酸酯為合適。這些溶媒,係亦可單獨使用1種,亦可將2種做組合而使用。<(D) component> (D) component is to contain (A) component, (B) component, (C-1) component, (C-2) component, (D) black pigment, (E) liquid repellent Component, (F) solvent and (G) thiol compound, and dispersed in (F) component at a ratio of (A) component 100 mass parts and (D) component 10 mass parts ratio to (F) component In a thin film with a thickness of 10 μm formed by drying on a glass substrate, let the light transmittance at a wavelength of 365 nm be T 1 , and when the light transmittance at a wavelength of 550 nm is T 2 , the ratio of T 1 /T 2 A black pigment with a value of 0.3 or more. In the above dispersion, the types of (A) and (D) components, and the types and contents of components other than (A) and (D) are compatible with the above (A) to (C) components And the same as those described in the description of the components (D) to (G) described later. Moreover, as a solvent used for the said dispersion liquid, propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate are suitable. These solvents may be used alone or in combination of two types.

(D)成分,係若考慮紫外線的穿透性及可見光的遮蔽性,則以上述T1 /T2 之值為1.0以上者為佳,1.5以上者為較佳。T1 /T2 之值的上限,係無特別限定,但一般而言以5.0以下為佳,以3.0以下為較佳。藉由使用T1 /T2 之值是被包含在上述範圍內的(D)成分,就可兼顧曝光工程中的紫外線之穿透性,與所獲得的硬化物中的可見光之遮蔽性。For the component (D), in consideration of the penetration of ultraviolet rays and the shielding properties of visible light, the value of T 1 /T 2 is preferably 1.0 or more, and more preferably 1.5. The upper limit of the value of T 1 /T 2 is not particularly limited, but in general, 5.0 or less is preferable, and 3.0 or less is more preferable. By using the component (D) whose value of T 1 /T 2 is included in the above range, it is possible to balance the penetration of ultraviolet rays in the exposure process and the shielding properties of visible light in the cured product obtained.

作為(D)成分的具體例係可舉氮化鋯、氮化鈦及氮氧化鈦、以及作為這些的混合物的含有氮化鋯與氮化鈦的混合粉末、及含有氮化鋯與氮氧化鈦的混合粉末等,在本發明中係可合適地使用氮化鋯。Specific examples of the component (D) include zirconium nitride, titanium nitride and titanium oxynitride, and mixed powders containing zirconium nitride and titanium nitride as a mixture of these, and zirconium nitride and titanium oxynitride Zirconium nitride can be suitably used in the present invention.

上述的氮化鋯、氮化鈦及氮氧化鈦之純度,係若不損及本發明的效果則無特別限定,但以90質量%以上為佳,95質量%以上為較佳,98質量%以上則更佳。The purity of the above-mentioned zirconium nitride, titanium nitride and titanium oxynitride is not particularly limited unless the effect of the present invention is impaired, but it is preferably 90% by mass or more, preferably 95% by mass or more, 98% by mass The above is even better.

上述氮化鋯藉由BET法所測定的比表面積係以20~90m2 /g為佳,30~60m2 /g為較佳。又,上述氮化鈦及氮氧化鈦藉由BET法所測定的比表面積係以10~90m2 /g為佳。若比表面積是在上述範圍,則在長期保管組成物之際不易發生沈降,於所得之硬化膜中,可見光的遮蔽性會是良好。Zirconium nitride is the above specific surface area by the BET method, measured at 20 ~ 90m 2 / g preferably, 30 ~ 60m 2 / g is preferred. In addition, the specific surface area of the above-mentioned titanium nitride and titanium oxynitride measured by the BET method is preferably 10 to 90 m 2 /g. If the specific surface area is in the above range, sedimentation is unlikely to occur when the composition is stored for a long time, and the obtained cured film will have good visible light shielding properties.

作為如此的黑色顏料係可使用市售品,可舉例如NITRBLACK UB-1(三菱综合材料(股)製)。又,作為含有氮化鋯與氮化鈦的混合粉末、及含有氮化鋯與氮氧化鈦的混合粉末係可舉日本特開2018-83730號公報中所揭露的黑色膜形成用混合粉體。As such a black pigment system, a commercially available product can be used, and for example, NITRBLACK UB-1 (manufactured by Mitsubishi Materials Co., Ltd.) can be used. In addition, as a mixed powder containing zirconium nitride and titanium nitride, and a mixed powder containing zirconium nitride and titanium oxynitride, a mixed powder for black film formation disclosed in Japanese Patent Application Laid-Open No. 2018-83730 can be mentioned.

(D)成分之含有量,相對於(A)成分100質量份,以1~50質量份為佳,以5~30質量份為較佳。藉由將(D)成分之含有量設成上記範圍,就可兼顧曝光工程中的紫外線之穿透性,與所獲得的硬化膜中的可見光之遮蔽性。The content of the component (D) is preferably 1 to 50 parts by mass, and more preferably 5 to 30 parts by mass relative to 100 parts by mass of the component (A). By setting the content of the component (D) in the above-mentioned range, the penetration of ultraviolet rays in the exposure process and the shielding properties of visible light in the obtained cured film can be balanced.

此外,(D)成分,係在調製組成物之際,亦可以維持粉末的方式直接混合,但若考慮要獲得較為均勻的組成物,則事前分散於適宜的溶媒中而調製成分散液為佳。作為上述溶媒的具體例係可舉後述的(F)溶媒中所記載的溶媒。又,在調製(D)成分的分散液之際,亦可因應需要而使用公知的分散劑。作為上述分散劑,係可使用市售品,可舉例如SOLSPERSE 34750(日本Lubrizol(股)製)。In addition, component (D) can be directly mixed as a powder when preparing the composition. However, if it is considered to obtain a more uniform composition, it is better to disperse it in a suitable solvent in advance to prepare a dispersion. . As a specific example of the said solvent, the solvent described in (F) solvent mentioned later can be mentioned. Moreover, when preparing the dispersion liquid of (D)component, you may use a well-known dispersing agent as needed. As the above-mentioned dispersant, a commercially available product can be used, and for example, SOLSPERSE 34750 (manufactured by Japan Lubrizol Co., Ltd.) can be used.

<(E)成分:撥液成分> (E)成分係為具有(e1)撥液性基的聚合物,或後述的所定之界面活性劑。<(E) component: liquid repellent component> The component (E) is a polymer having a liquid repellent group (e1), or a predetermined surfactant described later.

<(e1)撥液性基> 作為(e1)撥液性基係可舉例如:從氟烷基、聚氟醚基、矽醚基及聚矽氧烷基所選擇出來的至少1種基。<(e1) Liquid repellent base> (E1) The liquid-repellent group system includes, for example, at least one group selected from a fluoroalkyl group, a polyfluoroether group, a silyl ether group, and a polysiloxyalkyl group.

作為氟烷基,係以碳數3~10之氟烷基為佳,碳數4~10之氟烷基為較佳。作為此種氟烷基係可舉例如:2,2,2-三氟乙基、2,2,3,3,3-七氟丙基、2-(全氟丁基)乙基、3-全氟丁基-2-羥基丙基、2-(全氟己基)乙基、3-全氟己基-2-羥基丙基、2-(全氟辛基)乙基、3-全氟辛基-2-羥基丙基、2-(全氟癸基)乙基、2-(全氟-3-甲基丁基)乙基、3-(全氟-3-甲基丁基)-2-羥基丙基、2-(全氟-5-甲基己基)乙基、2-(全氟-5-甲基己基)-2-羥基丙基、2-(全氟-7-甲基辛基)乙基,及2-(全氟-7-甲基辛基)-2-羥基丙基。As the fluoroalkyl group, a fluoroalkyl group having 3 to 10 carbon atoms is preferred, and a fluoroalkyl group having 4 to 10 carbon atoms is preferred. Examples of such fluoroalkyl groups include 2,2,2-trifluoroethyl, 2,2,3,3,3-heptafluoropropyl, 2-(perfluorobutyl)ethyl, 3- Perfluorobutyl-2-hydroxypropyl, 2-(perfluorohexyl) ethyl, 3-perfluorohexyl-2-hydroxypropyl, 2-(perfluorooctyl) ethyl, 3-perfluorooctyl -2-Hydroxypropyl, 2-(perfluorodecyl)ethyl, 2-(perfluoro-3-methylbutyl)ethyl, 3-(perfluoro-3-methylbutyl)-2- Hydroxypropyl, 2-(perfluoro-5-methylhexyl) ethyl, 2-(perfluoro-5-methylhexyl)-2-hydroxypropyl, 2-(perfluoro-7-methyloctyl) ) Ethyl, and 2-(perfluoro-7-methyloctyl)-2-hydroxypropyl.

作為聚氟醚基係可舉下述式(i)所表示的聚氟醚結構所成的Rf基。

Figure 02_image003
(式(i)中,X係表示亦可具有氟原子的碳數1~10之2價飽和烴基,且以n所括號的每單位為相同的基或不同的基;Y係表示氫原子(但是只限與Y相鄰之氧原子所相鄰的碳原子上無鍵結氟原子的情況),或亦可具有氟原子的碳數1~20之1價飽和烴基;n係表示2~50之整數。其中,式(i)中的氟原子之總數係為2以上。)As a polyfluoroether group system, the Rf group which consists of a polyfluoroether structure represented by following formula (i) is mentioned.
Figure 02_image003
(In formula (i), X represents a divalent saturated hydrocarbon group with 1 to 10 carbon atoms which may also have a fluorine atom, and each unit parenthesized by n represents the same group or a different group; Y represents a hydrogen atom ( However, it is limited to the case where there is no fluorine atom bonded to the carbon atom adjacent to the oxygen atom adjacent to Y), or a monovalent saturated hydrocarbon group with 1 to 20 carbon atoms with a fluorine atom; n represents 2 to 50 Integer. Wherein, the total number of fluorine atoms in formula (i) is 2 or more.)

作為式(i)中的X及Y的較佳態樣係可舉:X是表示將碳數1~10之伸烷基的1個氫原子取代成氟原子的伸烷基或碳數1~10之全氟伸烷基,且以n所括號的每單位為相同的基或不同的基;Y是表示將碳數1~20之烷基的1個氫原子以氟原子做取代而成的烷基或碳數1~20之全氟烷基。Examples of preferred aspects of X and Y in formula (i) include: X represents an alkylene group having 1 to 10 carbon atoms substituted with a fluorine atom, or a carbon number of 1 to 10 Perfluoroalkylene of 10, and each unit in parenthesis of n is the same group or different group; Y means that one hydrogen atom of an alkyl group with 1 to 20 carbon atoms is substituted with a fluorine atom Alkyl group or perfluoroalkyl group with 1 to 20 carbon atoms.

作為式(i)中的X及Y的更佳態樣係可舉:X是表示碳數1~10之全氟伸烷基,且以n所括號的每單位為相同的基或不同的基;Y是表示碳數1~20之全氟烷基。As a more preferable aspect of X and Y in the formula (i), X is a perfluoroalkylene group having 1 to 10 carbon atoms, and each unit in the parentheses of n is the same group or different groups. ; Y is a perfluoroalkyl group with 1 to 20 carbon atoms.

於式(i)所表示的Rf基中,n係為2~50之整數為佳,2~30之整數為較佳,2~15之整數則更佳。若n為2以上,則可獲得良好的撥液性。若n為50以下,則將(E)成分之聚合物,藉由具有Rf基之單體,與具有羥基、羧基、醯胺基、胺基、N-烷氧基甲基醯胺基、封端異氰酸酯基、三烷氧基矽烷基的單體或其他單體的共聚而加以合成的情況下,單體的相溶性係成為良好。In the Rf group represented by the formula (i), n is preferably an integer of 2-50, preferably an integer of 2-30, and more preferably an integer of 2-15. If n is 2 or more, good liquid repellency can be obtained. If n is 50 or less, the polymer of component (E) is combined with a monomer having an Rf group with a hydroxyl group, a carboxyl group, an amide group, an amino group, an N-alkoxymethyl amide group, and a sealing When a monomer of a terminal isocyanate group, a trialkoxysilyl group, or other monomers are copolymerized and synthesized, the compatibility of the monomers becomes good.

又,式(i)中所表示的Rf基中,碳原子之總數係以2~50為佳,2~30為較佳。於該範圍中,(E)成分之聚合物係可發揮良好的撥液性。又,將(E)成分之聚合物,藉由具有Rf基之單體,與具有羥基、羧基、醯胺基、胺基、N-烷氧基甲基醯胺基、封端異氰酸酯基、三烷氧基矽烷基的單體或其他單體的共聚而加以合成的情況下,單體的相溶性係為良好。In addition, in the Rf group represented by the formula (i), the total number of carbon atoms is preferably 2-50, more preferably 2-30. Within this range, the polymer system of the (E) component can exhibit good liquid repellency. In addition, the polymer of component (E) is combined with a monomer having an Rf group with a hydroxyl group, a carboxyl group, an amide group, an amine group, an N-alkoxymethyl amide group, a blocked isocyanate group, and three When the alkoxysilyl monomers or other monomers are copolymerized and synthesized, the compatibility of the monomers is good.

作為X的具體例係可舉例如:-CF2 -、 -CF2 CF2 -、-CF2 CF2 CF2 -、-CF2 CF(CF3 )-、-CF2 CF2 CF2 CF2 -、-CF2 CF2 CF(CF3 )-、及CF2 CF(CF3 )CF2 -。Specific examples of X include: -CF 2 -, -CF 2 CF 2 -, -CF 2 CF 2 CF 2 -, -CF 2 CF(CF 3 )-, -CF 2 CF 2 CF 2 CF 2 -, -CF 2 CF 2 CF(CF 3 )-, and CF 2 CF(CF 3 )CF 2 -.

作為Y的具體例係可舉例如:-CF3 、-CF2 CF3 、-CF2 CHF2 、-(CF2 )2 CF3 、-(CF2 )3 CF3 、-(CF2 )4 CF3 、 -(CF2 )5 CF3 、-(CF2 )6 CF3 、-(CF2 )7 CF3 、-(CF2 )8 CF3 、 -(CF2 )9 CF3 、及(CF2 )11 CF3 、-(CF2 )15 CF3Specific examples of Y include, for example, -CF 3 , -CF 2 CF 3 , -CF 2 CHF 2 , -(CF 2 ) 2 CF 3 , -(CF 2 ) 3 CF 3 , -(CF 2 ) 4 CF 3 , -(CF 2 ) 5 CF 3 , -(CF 2 ) 6 CF 3 , -(CF 2 ) 7 CF 3 , -(CF 2 ) 8 CF 3 , -(CF 2 ) 9 CF 3 , and ( CF 2 ) 11 CF 3 , -(CF 2 ) 15 CF 3 .

作為式(i)中所表示的Rf基之較佳態樣係可舉式(ii)中所表示的Rf基。

Figure 02_image005
(式(ii)中,p係為2或3,n所括號的每單位為相同的基,q係表示1~20之整數,n係表示2~50之整數。)A preferable aspect of the Rf group represented in the formula (i) includes the Rf group represented in the formula (ii).
Figure 02_image005
(In formula (ii), p is 2 or 3, each unit in the parentheses of n is the same base, q is an integer from 1 to 20, and n is an integer from 2 to 50.)

作為式(ii)中所表示的Rf基的較佳具體例,從合成的容易性的觀點來看,可舉以下的基。

Figure 02_image007
As a preferable specific example of the Rf group represented by the formula (ii), the following groups can be cited from the viewpoint of ease of synthesis.
Figure 02_image007

(E)成分之聚合物內的Rf基,係亦可全部相同,亦可不同。The Rf groups in the polymer of the component (E) may all be the same or different.

上述所謂矽醚基,係指醇類的羥基被三烷基矽烷基所保護的基,以下述式中所表示的基為佳。

Figure 02_image009
(式中,X1 、X2 及X3 係各自獨立而表示碳數1~3之烷基,X4 係表示碳數1~6之伸烷基。)The above-mentioned silyl ether group refers to a group in which the hydroxyl group of an alcohol is protected by a trialkylsilyl group, and is preferably a group represented by the following formula.
Figure 02_image009
(In the formula, X 1 , X 2 and X 3 each independently represent an alkyl group having 1 to 3 carbon atoms, and X 4 represents an alkylene group having 1 to 6 carbon atoms.)

作為聚矽氧烷基係可舉具有式(iii)所表示之聚矽氧烷結構的基。以下,將具有式(iii)所表示之聚矽氧烷結構的基,稱作pSi基。

Figure 02_image011
(但是,Ra 及Rb 係各自獨立而表示氫原子、烷基、環烷基或芳基,Rc 係表示氫原子或碳數1~10之有機基,m係表示1~200之整數。)。Examples of the polysiloxane group include a group having a polysiloxane structure represented by formula (iii). Hereinafter, the group having the polysiloxane structure represented by the formula (iii) is referred to as a pSi group.
Figure 02_image011
(However, R a and R b each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group or an aryl group, R c represents a hydrogen atom or an organic group with 1 to 10 carbon atoms, and m represents an integer of 1 to 200 .).

Ra 及Rb 係各自獨立而表示氫原子、烷基、環烷基或芳基,又,亦可每矽烷氧基單位為相同也可不同。由於(E)成分之聚合物要發揮良好的撥液性,因此Ra 及Rb 係各自獨立而為氫原子、甲基或苯基的態樣為佳,再者,所有的矽烷氧基單位的Ra 及Rb 係皆為甲基的態樣為佳。又,Rc 中亦可含有氮原子及氧原子等。R a and R b each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, or an aryl group, and may be the same or different for each silanoxy unit. Since the polymer of component (E) needs to exhibit good liquid repellency, it is preferable that Ra and R b are independently hydrogen atoms, methyl groups or phenyl groups. Furthermore, all silanoxy units It is preferable that both Ra and R b are methyl groups. In addition, R c may contain nitrogen atoms, oxygen atoms, and the like.

<(e2)從N-烷氧基甲基醯胺基、封端異氰酸酯基及三烷氧基矽烷基所組成的群組中所選擇出來的至少1個基> 在本發明中,從上述子像素之開口部的墨水溼潤性的觀點來看,除了(e1)的基以外,還含有從N-烷氧基甲基醯胺基、封端異氰酸酯基及三烷氧基矽烷基所組成的群組中所選擇出來的至少1個基為佳。<(e2) At least one group selected from the group consisting of N-alkoxymethylamino group, blocked isocyanate group, and trialkoxysilyl group> In the present invention, from the viewpoint of the wettability of the ink at the opening of the sub-pixel, in addition to the group (e1), it also contains an N-alkoxymethyl amide group, a blocked isocyanate group, and a trioxane group. At least one group selected from the group consisting of oxysilyl groups is preferred.

作為N-烷氧基甲基醯胺基係可舉例如:N-甲氧基甲基(甲基)丙烯醯胺基、N-乙氧基甲基(甲基)丙烯醯胺基、及N-丁氧基甲基(甲基)丙烯醯胺基。Examples of the N-alkoxymethyl amide group include: N-methoxymethyl (meth) acrylamide group, N-ethoxymethyl (meth) acrylamide group, and N -Butoxymethyl (meth)acrylamido.

封端異氰酸酯基,係會因加熱使封端基脫保護而成為異氰酸酯基者,具體而言可舉:被醇、酚、硫醇、亞胺、酮亞胺、胺、內醯胺、吡唑、肟、β-二酮等所取代的異氰酸酯基。Blocked isocyanate groups are those that deprotect the blocked groups by heating and become isocyanate groups. Specifically, they include alcohols, phenols, thiols, imines, ketimines, amines, lactams, and pyrazoles. , Oxime, β-diketone and other substituted isocyanate groups.

作為三烷氧基矽烷基係可舉例如下述所示者。

Figure 02_image013
Examples of the trialkoxysilyl group include those shown below.
Figure 02_image013

<(e3)從羥基、羧基、醯胺基及胺基所組成的群組中所選擇出至少1個基> (E)成分,係除了上述(e1)及(e2)的基以外,從上述子像素之開口部中的墨水濕潤性的觀點來看,還含有(e3)從羥基、羧基、醯胺基及胺基所組成的群組中所選擇出來的至少1個基為佳。<(e3) At least one group selected from the group consisting of hydroxyl group, carboxyl group, amide group and amino group> (E) Component, in addition to the groups (e1) and (e2), from the viewpoint of the wettability of the ink in the openings of the sub-pixels, it also contains (e3) from the hydroxyl group, carboxyl group, amide group and At least one group selected from the group consisting of amine groups is preferred.

<(e4)丙烯酸酯基> (E)成分係亦可導入,對具有上述(e1)之基的聚合物隔著氨基甲酸酯鍵而鍵結的丙烯酸酯基。 作為丙烯酸酯基係可舉(甲基)丙烯醯基等,藉由使具有異氰酸酯基的丙烯酸酯反應變成具有(e1)之基的聚合物,即可導入。 作為具有異氰酸酯基的丙烯酸酯係可舉例如:2-(甲基)丙烯醯氧基乙基異氰酸酯及1,1-雙((甲基)丙烯醯氧基甲基)乙基異氰酸酯。<(e4) Acrylate group> (E) The component system can also be introduced, and the acrylate group bonded to the polymer having the group (e1) described above via a urethane bond. Examples of the acrylate group include (meth)acrylic acid groups and the like, which can be introduced by reacting an acrylate having an isocyanate group into a polymer having a group (e1). Examples of the acrylate system having an isocyanate group include 2-(meth)acryloxyethyl isocyanate and 1,1-bis((meth)acryloxymethyl)ethyl isocyanate.

作為(E)成分之聚合物係可舉例如:含有上述(e1)之基、因應需要的(e2)之基、甚至(e3)之基的,丙烯酸聚合物、聚醯胺酸、聚醯亞胺、聚醯胺、聚脲、聚胺酯、酚樹脂、環氧樹脂、聚矽氧烷及聚酯;在本發明中是以丙烯酸聚合物為佳。Examples of the polymer system of the component (E) include those containing the group (e1), the group (e2), or even the group (e3) as needed, acrylic polymer, polyamide acid, and polyacrylic acid. Amine, polyamide, polyurea, polyurethane, phenol resin, epoxy resin, polysiloxane and polyester; in the present invention, acrylic polymer is preferred.

[丙烯酸聚合物] 丙烯酸聚合物,係藉由使含(e1)之基的單體做聚合,以藉由與含(e2)之基的單體做共聚為佳,以還加入含(e3)之基的單體做共聚為較佳,即可獲得。[Acrylic Polymer] Acrylic polymer is made by polymerizing the monomer containing the group (e1), preferably by copolymerizing the monomer containing the group (e2), and adding the monomer containing the group (e3) It is better to do copolymerization, which can be obtained.

(e1)含有撥液性基之單體 作為具有氟烷基之單體,係可舉具有碳數3~10之氟烷基的單體,例如:2,2,2-三氟乙基丙烯酸酯、2,2,2-三氟乙基甲基丙烯酸酯、2,2,3,3,3-五氟丙基丙烯酸酯、2,2,3,3,3-五氟丙基甲基丙烯酸酯、2-(全氟丁基)乙基丙烯酸酯、2-(全氟丁基)乙基甲基丙烯酸酯、3-全氟丁基-2-羥基丙基丙烯酸酯、3-全氟丁基-2-羥基丙基甲基丙烯酸酯、2-(全氟己基)乙基丙烯酸酯、2-(全氟己基)乙基甲基丙烯酸酯、3-全氟己基-2-羥基丙基丙烯酸酯、3-全氟己基-2-羥基丙基甲基丙烯酸酯、2-(全氟辛基)乙基丙烯酸酯、2-(全氟辛基)乙基甲基丙烯酸酯、3-全氟辛基-2-羥基丙基丙烯酸酯、3-全氟辛基-2-羥基丙基甲基丙烯酸酯、2-(全氟癸基)乙基丙烯酸酯、2-(全氟癸基)乙基甲基丙烯酸酯、2-(全氟-3-甲基丁基)乙基丙烯酸酯、2-(全氟-3-甲基丁基)乙基甲基丙烯酸酯、3-(全氟-3-甲基丁基)-2-羥基丙基丙烯酸酯、3-(全氟-3-甲基丁基)-2-羥基丙基甲基丙烯酸酯、2-(全氟-5-甲基己基)乙基丙烯酸酯、2-(全氟-5-甲基己基)乙基甲基丙烯酸酯、2-(全氟-5-甲基己基)-2-羥基丙基丙烯酸酯、2-(全氟-5-甲基己基)-2-羥基丙基甲基丙烯酸酯、2-(全氟-7-甲基辛基)乙基丙烯酸酯、2-(全氟-7-甲基辛基)乙基甲基丙烯酸酯、2-(全氟-7-甲基辛基)-2-羥基丙基丙烯酸酯、及2-(全氟-7-甲基辛基)-2-羥基丙基甲基丙烯酸酯。(e1) Monomers containing liquid repellent groups Examples of monomers having a fluoroalkyl group include monomers having a fluoroalkyl group with a carbon number of 3-10, such as 2,2,2-trifluoroethyl acrylate, 2,2,2-trifluoroethane Methyl methacrylate, 2,2,3,3,3-pentafluoropropyl acrylate, 2,2,3,3,3-pentafluoropropyl methacrylate, 2-(perfluorobutyl) Ethyl acrylate, 2-(perfluorobutyl) ethyl methacrylate, 3-perfluorobutyl-2-hydroxypropyl acrylate, 3-perfluorobutyl-2-hydroxypropyl methacrylate Ester, 2-(perfluorohexyl) ethyl acrylate, 2-(perfluorohexyl) ethyl methacrylate, 3-perfluorohexyl-2-hydroxypropyl acrylate, 3-perfluorohexyl-2- Hydroxypropyl methacrylate, 2-(perfluorooctyl) ethyl acrylate, 2-(perfluorooctyl) ethyl methacrylate, 3-perfluorooctyl-2-hydroxypropyl acrylate , 3-perfluorooctyl-2-hydroxypropyl methacrylate, 2-(perfluorodecyl) ethyl acrylate, 2-(perfluorodecyl) ethyl methacrylate, 2-(all Fluoro-3-methylbutyl)ethyl acrylate, 2-(perfluoro-3-methylbutyl)ethyl methacrylate, 3-(perfluoro-3-methylbutyl)-2- Hydroxypropyl acrylate, 3-(perfluoro-3-methylbutyl)-2-hydroxypropyl methacrylate, 2-(perfluoro-5-methylhexyl) ethyl acrylate, 2-( Perfluoro-5-methylhexyl) ethyl methacrylate, 2-(perfluoro-5-methylhexyl)-2-hydroxypropyl acrylate, 2-(perfluoro-5-methylhexyl)- 2-Hydroxypropyl methacrylate, 2-(perfluoro-7-methyloctyl) ethyl acrylate, 2-(perfluoro-7-methyloctyl) ethyl methacrylate, 2- (Perfluoro-7-methyloctyl)-2-hydroxypropyl acrylate, and 2-(perfluoro-7-methyloctyl)-2-hydroxypropyl methacrylate.

作為具有矽醚基之單體係可舉例如:甲基丙烯醯氧丙基參(三甲基矽烷氧基)矽烷及丙烯醯氧基丙基參(三甲基矽烷氧基)矽烷。Examples of the single system having a silyl ether group include methacryloxypropyl ginseng (trimethylsilyloxy) silane and acryloxypropyl ginseng (trimethylsilyloxy) silane.

作為具有聚矽氧烷基之單體係可舉例如:CH2 =CHCOO(pSi)、及CH2 =C(CH3 )COO(pSi)。其中,pSi係表示pSi基。具有pSi基之單體,係可單獨使用1種,亦可併用2種以上。As a single system having a polysiloxane group, for example, CH 2 =CHCOO(pSi), and CH 2 =C(CH 3 )COO(pSi). Here, the pSi system represents a pSi group. The monomer having a pSi group may be used singly, or two or more of them may be used in combination.

此外,對(E)成分之聚合物導入pSi基的情況下,除了上述的使具有pSi基之單體做共聚的方法以外,亦可採用使具有反應部位的聚合物與具有pSi基的化合物反應之各種改性方法、或使用具有pSi基的聚合起始劑之方法等。In addition, in the case of introducing pSi groups into the polymer of component (E), in addition to the above-mentioned method of copolymerizing monomers having pSi groups, it is also possible to use a reaction site-containing polymer with a pSi group-containing compound Various modification methods, or methods using a pSi-based polymerization initiator, etc.

使具有反應部位的聚合物與具有pSi基的化合物反應之各種改性方法方面,可舉例如以下方法。In terms of various modification methods for reacting a polymer having a reaction site with a compound having a pSi group, the following methods can be mentioned, for example.

使具有環氧基的單體預先共聚後,使其與一末端具有羧基、另一末端具有pSi基的化合物反應之方法。 使具有環氧基的單體預先共聚後,使其與一末端具有胺基、另一末端具有pSi基的化合物反應之方法。 使具有環氧基的單體預先共聚後,使其與一末端具有巰基、另一末端具有pSi基的化合物反應之方法。 使具有胺基的單體預先共聚後,使其與一末端具有羧基、另一末端具有pSi基的化合物反應之方法。A method of pre-copolymerizing a monomer having an epoxy group and then reacting it with a compound having a carboxyl group at one end and a pSi group at the other end. A method of pre-copolymerizing a monomer having an epoxy group and then reacting it with a compound having an amino group at one end and a pSi group at the other end. A method of pre-copolymerizing a monomer having an epoxy group and then reacting it with a compound having a mercapto group at one end and a pSi group at the other end. A method of pre-copolymerizing a monomer having an amine group and then reacting it with a compound having a carboxyl group at one end and a pSi group at the other end.

使具有胺基的單體預先共聚後,使其與一末端具有環氧基、另一末端具有pSi基的化合物反應之方法。 使具有羧基的單體預先共聚後,使其與一末端具有環氧基、另一末端具有pSi基的化合物反應之方法。 使具有羧基的單體預先共聚後,使其與一末端具有胺基、另一末端具有pSi基的化合物反應之方法。 使具有羧基的單體預先共聚後,使其與一末端具有氯化矽烷基、另一末端具有pSi基的化合物反應之方法。 使具有羥基的單體預先共聚後,使其與一末端具有氯化矽烷基、另一末端具有PSi基的化合物反應之方法。A method of pre-copolymerizing a monomer having an amine group and then reacting it with a compound having an epoxy group at one end and a pSi group at the other end. A method of pre-copolymerizing a monomer having a carboxyl group and then reacting it with a compound having an epoxy group at one end and a pSi group at the other end. A method of pre-copolymerizing a monomer having a carboxyl group and then reacting it with a compound having an amino group at one end and a pSi group at the other end. A method of pre-copolymerizing a monomer having a carboxyl group and then reacting it with a compound having a chlorosilyl group at one end and a pSi group at the other end. A method of pre-copolymerizing a monomer having a hydroxyl group and then reacting it with a compound having a chlorosilyl group at one end and a PSi group at the other end.

作為具有pSi基的聚合起始劑,係可為在分子主鏈中含有具有2價之聚矽氧烷結構的基,亦可為在起始劑分子的末端部分或側鏈中含有具有1價之聚矽氧烷結構的基。作為在分子主鏈中含具有2價之聚矽氧烷結構的基的起始劑係可舉,具2價之聚矽氧烷結構的基與偶氮基是交互具有的化合物等。如此的聚合起始劑,係可作為市售品而容易取得,可舉例如:VPS-1001、VPS-0501(以上皆為富士軟片和光純藥工業(股)製)。As a polymerization initiator having a pSi group, it may be a group having a divalent polysiloxane structure in the main chain of the molecule, or it may include a monovalent group in the terminal part or side chain of the initiator molecule. The base of the polysiloxane structure. Examples of the initiator system containing a group having a divalent polysiloxane structure in the molecular main chain include a compound having a group having a divalent polysiloxane structure and an azo group alternately. Such polymerization initiators are easily available as commercially available products, and examples include VPS-1001 and VPS-0501 (all of which are manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.).

(e2)含有從N-烷氧基甲基醯胺基、封端異氰酸酯基及三烷氧基矽烷基所組成的群組中所選擇出來的基之單體 作為具有N-烷氧基甲基醯胺基的單體係可舉例如:N-羥基甲基(甲基)丙烯醯胺、N-甲氧基甲基(甲基)丙烯醯胺、N-乙氧基甲基(甲基)丙烯醯胺、及N-丁氧基甲基(甲基)丙烯醯胺等之以羥基甲基或烷氧基甲基取代的(甲基)丙烯醯胺化合物。(e2) A monomer containing a group selected from the group consisting of N-alkoxymethyl amide group, blocked isocyanate group and trialkoxysilyl group Examples of the single system having an N-alkoxymethyl amide group include: N-hydroxymethyl (meth) acrylamide, N-methoxymethyl (meth) acrylamide, N- Ethoxymethyl (meth)acrylamide, N-butoxymethyl (meth)acrylamide and other (meth)acrylamide compounds substituted with hydroxymethyl or alkoxymethyl .

作為具有封端異氰酸酯基之單體係可舉例如:甲基丙烯酸2-(0-(1’-甲基次丙基胺基)羧基胺基)乙酯、及甲基丙烯酸2-((3,5-二甲基吡唑基)羰基胺基)乙酯。As a single system having a blocked isocyanate group, for example, 2-(0-(1'-methyl propylene amino) carboxyamino) ethyl methacrylate and 2-((3) methacrylic acid ,5-Dimethylpyrazolyl)carbonylamino)ethyl ester.

作為三烷氧基矽烷基之單體係可舉例如:丙烯酸3-三甲氧基甲矽烷基丙基酯、丙烯酸3-三乙氧基甲矽烷基丙基酯、甲基丙烯酸3-三甲氧基甲矽烷基丙基酯、及甲基丙烯酸3-三乙氧基甲矽烷基丙基酯。As a single system of trialkoxysilyl groups, for example, 3-trimethoxysilylpropyl acrylate, 3-triethoxysilylpropyl acrylate, 3-trimethoxy methacrylate Silyl propyl ester, and 3-triethoxy silyl propyl methacrylate.

(e3)含有從羥基、羧基、醯胺基及胺基所組成的群組中所選擇出來的至少1個基的單體 作為具有羥基之單體係可舉例如:丙烯酸2-羥基乙酯、甲基丙烯酸2-羥基乙酯、丙烯酸2-羥基丙酯、甲基丙烯酸2-羥基丙酯、丙烯酸4-羥基丁酯、甲基丙烯酸4-羥基丁酯、丙烯酸2,3-二羥基丙酯、甲基丙烯酸2,3-二羥基丙酯、單甲基丙烯酸甘油酯、二乙二醇單丙烯酸酯、二乙二醇單甲基丙烯酸酯、己內酯2-(丙烯醯氧基)乙酯、己內酯2-(甲基丙烯醯氧基)乙酯、聚(乙二醇)丙烯酸酯、聚(丙二醇)丙烯酸酯、聚(乙二醇)乙基醚丙烯酸酯、聚(乙二醇)乙基醚甲基丙烯酸酯、5-丙烯醯氧基-6-羥基降莰烯-2-羧酸-6-內酯、及5-甲基丙烯醯氧基-6-羥基降莰烯-2-羧酸-6-內酯、p-羥基苯乙烯、α-甲基-p-羥基苯乙烯、N-羥苯馬來醯亞胺、N-羥苯丙烯醯胺、N-羥苯甲基丙烯醯胺、p-羥苯丙烯酸酯、及p-羥苯甲基丙烯酸酯。在本發明中,係在這些之中,又以丙烯酸2-羥基乙酯及甲基丙烯酸2-羥基乙酯為佳。(e3) A monomer containing at least one group selected from the group consisting of a hydroxyl group, a carboxyl group, an amide group, and an amine group Examples of the single system having a hydroxyl group include: 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, 2-hydroxypropyl methacrylate, 4-hydroxybutyl acrylate, 4-hydroxybutyl methacrylate, 2,3-dihydroxypropyl acrylate, 2,3-dihydroxypropyl methacrylate, glycerol monomethacrylate, diethylene glycol monoacrylate, diethylene glycol Monomethacrylate, 2-(acryloxy) ethyl caprolactone, 2-(methacryloxy) ethyl caprolactone, poly(ethylene glycol) acrylate, poly(propylene glycol) acrylic acid Ester, poly(ethylene glycol) ethyl ether acrylate, poly(ethylene glycol) ethyl ether methacrylate, 5-propenoxy-6-hydroxynorbornene-2-carboxylic acid-6-in Esters, and 5-methacryloxy-6-hydroxynorbornene-2-carboxylic acid-6-lactone, p-hydroxystyrene, α-methyl-p-hydroxystyrene, N-hydroxybenzene Maleimide, N-hydroxybenzal acrylamide, N-hydroxybenzyl methacrylamide, p-hydroxybenzyl acrylate, and p-hydroxybenzyl methacrylate. In the present invention, among these, 2-hydroxyethyl acrylate and 2-hydroxyethyl methacrylate are preferred.

作為具有羧基之單體係可舉例如:丙烯酸、甲基丙烯酸、巴豆酸、單-(2-(丙烯醯氧基)乙基)酞酸酯、單-(2-(甲基丙烯醯氧基)乙基)酞酸酯、N-(羧基苯基)馬來醯亞胺、N-(羧基苯基)甲基丙烯醯胺、及N-(羧基苯基)丙烯醯胺。Examples of the single system having a carboxyl group include acrylic acid, methacrylic acid, crotonic acid, mono-(2-(acryloyloxy)ethyl)phthalate, mono-(2-(methacryloyloxy) ) Ethyl) phthalate, N-(carboxyphenyl)maleimide, N-(carboxyphenyl)methacrylamide, and N-(carboxyphenyl)acrylamide.

作為具有醯胺基之單體係可舉例如:丙烯醯胺、甲基丙烯醯胺、N-甲基丙烯醯胺、N,N-二甲基丙烯醯胺及N,N-二乙基丙烯醯胺。在本發明中,係在這些之中,又以甲基丙烯醯胺為佳。Examples of the single system having an amide group include: acrylamide, methacrylamide, N-methacrylamide, N,N-dimethylacrylamide, and N,N-diethyl propylene Amide. In the present invention, among these, methacrylamide is preferred.

作為具有胺基之單體係可舉例如:丙烯酸氨基甲酯、甲基丙烯酸氨基甲酯、丙烯酸2-氨基乙酯、甲基丙烯酸2-氨基乙酯、丙烯酸3-氨基丙酯及甲基丙烯酸3-氨基丙酯。Examples of the single system having an amino group include: aminomethyl acrylate, aminomethyl methacrylate, 2-aminoethyl acrylate, 2-aminoethyl methacrylate, 3-aminopropyl acrylate, and methacrylic acid 3-aminopropyl ester.

[聚醯胺酸、聚醯亞胺] 作為聚醯胺酸係可舉例如:使具有氟烷基的二胺、與二酸酐反應所得的聚醯胺酸。作為聚醯亞胺係可舉例如:將前述聚醯胺酸予以亞醯胺化所得的聚醯亞胺。[Polyamide acid, polyimide] Examples of the polyamide acid system include polyamide acid obtained by reacting a diamine having a fluoroalkyl group with a dianhydride. As the polyimide system, for example, a polyimide obtained by imidizing the aforementioned polyimide acid can be mentioned.

[聚醯胺] 作為聚醯胺係可舉例如:使具有氟烷基的二胺、與二羧酸酐聚合所得的聚醯胺。[Polyamide] As a polyamide system, the polyamide obtained by polymerizing the diamine which has a fluoroalkyl group, and dicarboxylic anhydride is mentioned, for example.

[聚脲] 作為聚脲係可舉例如:使具有氟烷基的二胺、與二異氰酸酯聚合所得的聚脲。[Polyurea] Examples of the polyurea system include polyureas obtained by polymerizing a diamine having a fluoroalkyl group and a diisocyanate.

[聚胺酯] 作為聚氨酯係可舉例如:使具有氟烷基或氟烷氧基之二元醇與具有胺基之二元醇與二異氰酸酯聚合所得的聚氨酯。[Polyurethane] As the polyurethane system, for example, a polyurethane obtained by polymerizing a diol having a fluoroalkyl group or a fluoroalkoxy group, a diol having an amino group, and a diisocyanate.

[酚樹脂] 作為酚樹脂係可舉例如:使具有氟烷基或氟烷氧基的苯酚、與甲醛聚合所得的Novolak樹脂。[Phenolic resin] Examples of the phenol resin system include Novolak resin obtained by polymerizing phenol having a fluoroalkyl group or a fluoroalkoxy group with formaldehyde.

[環氧樹脂] 作為環氧樹脂係可舉例如:使具有氟烷基或氟烷氧基的雙酚A及雙酚F之任一方或雙方、與該雙酚A之二縮甘油醚及雙酚F之二縮甘油醚之任一方或雙方反應所得的環氧樹脂。[Epoxy resin] Examples of the epoxy resin system include dicondensation of either or both of bisphenol A and bisphenol F having a fluoroalkyl group or a fluoroalkoxy group, and the diglycidyl ether of bisphenol A and bisphenol F Epoxy resin obtained by the reaction of either or both of glycerol ethers.

[聚矽氧烷] 作為聚矽氧烷係可舉例如:使具有氟烷基的三烷氧基矽烷或具有氟烷基的二烷氧基矽烷矽烷、與含有具有胺基的三烷氧基矽烷或具有胺基的二烷氧基矽烷之矽烷單體混合物進行聚合所得的聚矽氧烷。[Polysiloxane] Examples of the polysiloxane series include trialkoxysilanes having fluoroalkyl groups or dialkoxysilanes having fluoroalkyl groups, and trialkoxysilanes having amine groups or those having amine groups. Polysiloxane obtained by polymerization of a mixture of silane monomers of dialkoxysilane.

[聚酯] 作為聚酯係可舉例如:使二羧酸或四羧酸二酐、與具有氟烷基或氟烷氧基的二元醇反應所得的聚酯。[Polyester] Examples of the polyester system include polyesters obtained by reacting dicarboxylic acid or tetracarboxylic dianhydride with a diol having a fluoroalkyl group or a fluoroalkoxy group.

(E)成分之聚合物中,係除了具有上述(e1)~(e3)之基的單體以外,亦可還加入其他之單體(以下稱為其他單體E)。(E) In addition to the monomer having the groups of (e1) to (e3), other monomers (hereinafter referred to as other monomer E) may be added to the polymer of the component (E).

作為其他單體E的具體例係可舉例如:甲基丙烯酸甲酯、甲基丙烯酸乙酯、甲基丙烯酸異丙酯、甲基丙烯酸苄酯、甲基丙烯酸萘酯、甲基丙烯酸蔥酯、甲基丙烯酸蒽甲酯、甲基丙烯酸苯酯、甲基丙烯酸缩水甘油酯、甲基丙烯酸環己酯、甲基丙烯酸異莰酯、甲基丙烯酸甲氧基三甘醇酯、甲基丙烯酸2-乙氧基乙酯、甲基丙烯酸四氫呋喃酯、甲基丙烯酸3-甲氧基丁酯、甲基丙烯酸γ-丁內酯、甲基丙烯酸2-丙基-2-金剛烷基酯、甲基丙烯酸8-甲基-8-三環癸酯、甲基丙烯酸8-乙基-8-三環癸酯、丙烯酸甲酯、丙烯酸乙酯、丙烯酸異丙酯、丙烯酸苄酯、丙烯酸萘酯、丙烯酸蒽酯、丙烯酸蒽甲酯、丙烯酸苯酯、丙烯酸縮水甘油酯、丙烯酸環己酯、丙烯酸異莰酯、丙烯酸甲氧基三甘醇酯、丙烯酸2-乙氧基乙酯、丙烯酸四氫呋喃酯、丙烯酸3-甲氧基丁酯、γ-丙烯酸丁內酯、丙烯酸2-丙基-2-金剛烷基酯、丙烯酸8-甲基-8-三環癸酯、丙烯酸8-乙基-8-三環癸酯、N-甲基馬來醯亞胺、N-乙基馬來醯亞胺、N-苯基馬來醯亞胺、N-環己基馬來醯亞胺、苯乙烯、乙烯基萘、乙烯基蒽及乙烯基聯苯。Specific examples of other monomers E include methyl methacrylate, ethyl methacrylate, isopropyl methacrylate, benzyl methacrylate, naphthyl methacrylate, onion methacrylate, Anthracene methyl methacrylate, phenyl methacrylate, glycidyl methacrylate, cyclohexyl methacrylate, isobornyl methacrylate, methoxytriethylene glycol methacrylate, 2-methacrylate Ethoxyethyl, tetrahydrofuran methacrylate, 3-methoxybutyl methacrylate, γ-butyrolactone methacrylate, 2-propyl-2-adamantyl methacrylate, methacrylic acid 8-methyl-8-tricyclodecyl ester, 8-ethyl-8-tricyclodecyl methacrylate, methyl acrylate, ethyl acrylate, isopropyl acrylate, benzyl acrylate, naphthyl acrylate, anthracene acrylate Ester, methyl anthracene acrylate, phenyl acrylate, glycidyl acrylate, cyclohexyl acrylate, isobornyl acrylate, methoxytriethylene glycol acrylate, 2-ethoxyethyl acrylate, tetrahydrofuran acrylate, acrylic acid 3 -Methoxybutyl ester, γ-butyrolactone acrylate, 2-propyl-2-adamantyl acrylate, 8-methyl-8-tricyclodecyl acrylate, 8-ethyl-8-tricyclic acrylate Decyl ester, N-methylmaleimide, N-ethylmaleimide, N-phenylmaleimide, N-cyclohexylmaleimide, styrene, vinyl naphthalene, Vinyl anthracene and vinyl biphenyl.

於(E)成分之聚合物中,(e1)之基的導入量,係相對於全重複單位以5~60莫耳%為佳,以5~40莫耳%為較佳。藉由將(e1)之基的導入量設為上述範圍的下限以上,就可獲得良好的撥液性。藉由將(e1)之基的導入量設為上述範圍的上限以下,凝聚等之問題就難以發生。In the polymer of the component (E), the introduction amount of the group (e1) is preferably 5-60 mol%, and more preferably 5-40 mol% relative to the total repeat unit. By setting the introduction amount of the base (e1) to be equal to or greater than the lower limit of the above-mentioned range, good liquid repellency can be obtained. By setting the introduction amount of the base (e1) to be equal to or less than the upper limit of the above-mentioned range, problems such as aggregation hardly occur.

於(E)成分之聚合物中,(e2)從N-烷氧基甲基醯胺基、封端異氰酸酯基及三烷氧基矽烷基所組成的群組中所選擇出來的基之導入量,係相對於全重複單位以5~70莫耳%為佳,以5~50莫耳%為較佳。藉由將(e2)之基的導入量設為上述範圍的下限以上,所得的硬化膜就會具有良好的耐熱性或耐溶媒性。藉由將(e2)之基的導入量設為上述範圍的上限以下,就可獲得良好的顯影性。In the polymer of component (E), (e2) the introduction amount of a group selected from the group consisting of N-alkoxymethyl amide group, blocked isocyanate group and trialkoxysilyl group , Relative to the total repeat unit, it is preferably 5 to 70 mol%, more preferably 5 to 50 mol%. By setting the introduction amount of the group (e2) to be at least the lower limit of the above-mentioned range, the obtained cured film will have good heat resistance or solvent resistance. By setting the introduction amount of the base (e2) to be equal to or less than the upper limit of the above-mentioned range, good developability can be obtained.

於(E)成分之聚合物中,導入(e3)從羥基、羧基、醯胺基及胺基所組成的群組中所選擇出來的至少1個基的情況下,其導入量,相對於全重複單位以5~60莫耳%為佳,以5~40莫耳%為較佳。藉由將(e3)之基的導入量設為上述範圍的下限以上,所得的硬化膜就會具有良好的耐熱性或耐溶媒性。藉由將(e3)之基的導入量設為上述範圍的上限以下,就可獲得良好的撥液性。In the case of introducing (e3) at least one group selected from the group consisting of a hydroxyl group, a carboxyl group, an amide group, and an amino group into the polymer of the component (E), the amount of introduction is relative to the total The repeating unit is preferably 5-60 mol%, more preferably 5-40 mol%. By setting the introduction amount of the group (e3) to be at least the lower limit of the above-mentioned range, the cured film obtained will have good heat resistance or solvent resistance. By setting the introduction amount of the base (e3) to be equal to or less than the upper limit of the above-mentioned range, good liquid repellency can be obtained.

(E)成分之聚合物的數目平均分子量Mn,以2,000~100,000為佳、以3,000~50,000為較佳、以4,000~10,000為更佳。(E)成分之聚合物的Mn若在上述範圍的上限以下,則難以產生殘渣。 此外,(E)成分之聚合物的數目平均分子量Mn,係為凝膠滲透層析儀(GPC)測定所致之聚苯乙烯換算值。(E) The number average molecular weight Mn of the polymer of the component is preferably 2,000 to 100,000, more preferably 3,000 to 50,000, and more preferably 4,000 to 10,000. (E) When the Mn of the polymer of the component is less than the upper limit of the above-mentioned range, it is difficult to generate a residue. In addition, the number average molecular weight Mn of the polymer of the component (E) is a polystyrene conversion value measured by a gel permeation chromatography (GPC).

又,於本發明中,(E)成分之聚合物,係亦可為複數種共聚物的混合物。In addition, in the present invention, the polymer of the component (E) may be a mixture of a plurality of copolymers.

(E)成分之聚合物,係藉由使(e1)具有撥液性基的單體,例如,具有碳數3~10之氟烷基的單體、具有聚氟醚基的單體、(e2)具有從N-烷氧基甲基醯胺基、封端異氰酸酯基及三烷氧基矽烷基所組成的群組中所選擇出來的至少1個基的單體、因應需要而還會有(e3)具有從羥基、羧基、醯胺基及胺基所組成的群組中所選擇出來的至少1個基的單體,以及其他單體E,於聚合起始劑存在下的溶媒中進行聚合反應而獲得。此外,聚合之際的反應溫度,係可隨著所製造的聚合物之種類等而適宜設定,但在製造丙烯酸聚合物的情況下,係設成50~110℃為佳。又,聚合反應中所使用的溶媒,係若能溶解所使用的單體及所得的聚合物,則無特別限定。作為上述溶媒的具體例係可舉後述的(F)溶媒中所記載的溶媒。(E) The polymer of component is made by making (e1) a monomer having a liquid repellent group, for example, a monomer having a fluoroalkyl group with 3 to 10 carbon atoms, a monomer having a polyfluoroether group, (e1) e2) A monomer having at least one group selected from the group consisting of N-alkoxymethyl amide group, blocked isocyanate group, and trialkoxysilyl group, and if necessary (e3) A monomer having at least one group selected from the group consisting of a hydroxyl group, a carboxyl group, an amide group and an amine group, and other monomers E, carried out in a solvent in the presence of a polymerization initiator Obtained by polymerization reaction. In addition, the reaction temperature during polymerization can be appropriately set according to the type of polymer to be produced, etc. However, in the case of producing an acrylic polymer, it is preferably set to 50 to 110°C. In addition, the solvent used in the polymerization reaction is not particularly limited as long as it can dissolve the monomers used and the resulting polymer. As a specific example of the said solvent, the solvent described in (F) solvent mentioned later can be mentioned.

上述(E)成分,通常係可為溶液,但亦可因應需要而藉由與(A)成分之說明中所記載之方法相同之方法而加以單離、純化等等。又,上述(E)成分之共聚物的聚合溶液,係亦可直接使用,或亦可將單離之聚合物的粉體再溶解於適宜的溶媒中而成的溶液加以使用。作為上述溶媒係可舉例如:於後述的(F)成分中所例示的溶媒。The above-mentioned (E) component may usually be a solution, but if necessary, it may be isolated, purified, etc. by the same method as described in the description of the (A) component. In addition, the polymerization solution of the copolymer of the above-mentioned component (E) can also be used as it is, or a solution obtained by re-dissolving the powder of the isolated polymer in a suitable solvent can be used. As said solvent system, the solvent exemplified in (F) component mentioned later can be mentioned, for example.

作為(E)成分的界面活性劑係可舉例如:氟系界面活性劑、聚矽氧系界面活性劑及非離子系界面活性劑。這些界面活性劑,係亦可作為市售品而取得,作為如此的市售品係可舉:PolyFox PF-136A、151、156A、154N、159、636、6320、656、6520(Omnova公司製)、MEGAFAC(註冊商標)R30、R08、R40、R41、R43、F251、F477、F552、F553、F554、F555、F556、F557、F558、F559、F560、F561、F562、F563、F565、F567、F570 (DIC(股)製)、FC4430、FC4432(住友3M(股)製)、AsahiGuard(註冊商標)AG710、SURFLON(註冊商標)S-386、S-611、S-651(AGC清美化學(股)製)、FTERGENT(註冊商標)FTX-218、DFX-18、220P、251、212M、215M (Neos(股)製)等之氟系界面活性劑;BYK-300、302、306、307、310、313、315、320、322、323、325、330、331、333、342、345、346、347、348、349、370、377、378、3455(BYK-Chemie Japan(股)製)、SH3746、SH3749、SH3771、SH8400、SH8410、SH8700、SF8428(東麗道康寧矽利康(股)製)、KF-351、KF-352、KF-353、KF-354L、KF-355A、KF-615A、KF-945、KF-618、KF-6011、KF-6015(信越化學工業(股)製)等之聚矽氧系界面活性劑。這些界面活性劑,係可單獨1種,或可組合2種以上使用。The surfactant system as the (E) component includes, for example, fluorine-based surfactants, silicone-based surfactants, and nonionic surfactants. These surfactants can also be obtained as commercial products. Examples of such commercial products include PolyFox PF-136A, 151, 156A, 154N, 159, 636, 6320, 656, 6520 (manufactured by Omnova) , MEGAFAC (registered trademark) R30, R08, R40, R41, R43, F251, F477, F552, F553, F554, F555, F556, F557, F558, F559, F560, F561, F562, F563, F565, F567, F570 ( DIC (stock) system), FC4430, FC4432 (Sumitomo 3M (stock) system), AsahiGuard (registered trademark) AG710, SURFLON (registered trademark) S-386, S-611, S-651 (AGC Kiyomi Chemical Co., Ltd.) ), FTERGENT (registered trademark) FTX-218, DFX-18, 220P, 251, 212M, 215M (made by Neos (stock)) and other fluorine-based surfactants; BYK-300, 302, 306, 307, 310, 313 , 315, 320, 322, 323, 325, 330, 331, 333, 342, 345, 346, 347, 348, 349, 370, 377, 378, 3455 (manufactured by BYK-Chemie Japan), SH3746, SH3749 , SH3771, SH8400, SH8410, SH8700, SF8428 (manufactured by Toray Dow Corning Silicone Co., Ltd.), KF-351, KF-352, KF-353, KF-354L, KF-355A, KF-615A, KF-945, KF-618, KF-6011, KF-6015 (manufactured by Shin-Etsu Chemical Co., Ltd.) and other silicone-based surfactants. These surfactants can be used individually by 1 type or in combination of 2 or more types.

(E)成分之含有量,相對於(A)成分100質量份,以0.5~10質量份為佳,以1~5質量份為較佳。(E)成分之含有量若在上述範圍內,則可獲得良好的撥液性,又從經濟的觀點來看也為佳。The content of the (E) component is preferably 0.5 to 10 parts by mass, and more preferably 1 to 5 parts by mass relative to 100 parts by mass of the (A) component. (E) If the content of the component is within the above range, good liquid repellency can be obtained, and it is also preferable from an economic point of view.

<(F)成分:溶媒> (F)成分之溶媒,係若能將(A)成分、(B)成分及(C)成分予以溶解,且能將因應需要而添加的後述的(G)成分等予以溶解,則其種類及結構等並無特別限定。<(F)Component: Solvent> The solvent for component (F) is if it can dissolve component (A), component (B), and component (C), and can dissolve component (G) described later, etc. added as needed, then its type and The structure and the like are not particularly limited.

作為(F)成分之溶媒,係可使用光阻材料中所被一般使用的溶媒,可舉例如:乙二醇單甲醚、乙二醇單乙醚、甲基溶纖劑乙酸酯、乙基溶纖劑乙酸酯、二乙二醇單甲醚、二乙二醇單乙醚、丙二醇、丙二醇單甲醚、丙二醇單甲醚乙酸酯、丙二醇丙醚、丙二醇丙醚乙酸酯、甲苯、二甲苯、甲乙酮、環戊酮、環己酮、2-丁酮、3-甲基-2-戊酮、2-戊酮、2-庚酮、γ-丁內酯、2-羥基丙酸乙酯、2-羥基-2-甲基丙酸乙酯、乙氧基乙酸乙酯、羥乙酸乙酯、2-羥基-3-甲基丁酸甲酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸乙酯、3-乙氧基丙酸甲酯、丙酮酸甲酯、丙酮酸乙酯、乙酸乙酯、乙酸丁酯、乳酸乙酯、乳酸丁酯、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、及N-甲基-2-吡咯啶酮。在本發明中,係在這些之中,若考慮組成物的塗佈性及安全性,則又以丙二醇單甲醚、二乙二醇單甲醚、丙二醇單甲醚乙酸酯、乳酸乙酯、乳酸丁酯為佳。這些溶媒,係可單獨1種,或可組合2種以上使用。As the solvent for component (F), solvents commonly used in photoresist materials can be used, such as: ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cellosolve acetate, ethyl Cellosolve acetate, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, propylene glycol, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, propylene glycol propyl ether, propylene glycol propyl ether acetate, toluene, Xylene, methyl ethyl ketone, cyclopentanone, cyclohexanone, 2-butanone, 3-methyl-2-pentanone, 2-pentanone, 2-heptanone, γ-butyrolactone, ethyl 2-hydroxypropionate Ester, ethyl 2-hydroxy-2-methylpropionate, ethyl ethoxy acetate, ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutanoate, methyl 3-methoxypropionate, Ethyl 3-methoxypropionate, ethyl 3-ethoxypropionate, methyl 3-ethoxypropionate, methyl pyruvate, ethyl pyruvate, ethyl acetate, butyl acetate, ethyl lactate Ester, butyl lactate, N,N-dimethylformamide, N,N-dimethylacetamide, and N-methyl-2-pyrrolidone. In the present invention, among these, considering the coating properties and safety of the composition, propylene glycol monomethyl ether, diethylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, ethyl lactate , Butyl lactate is better. These solvents may be used alone or in combination of two or more kinds.

<(G)成分> (G)成分係為硫醇化合物。該成分的目的在於提升上述樹脂組成物的硬化速度,在不損及本發明的效果的範圍內,可被摻合。<(G) Ingredient> (G) The component system is a thiol compound. The purpose of this component is to increase the curing speed of the above-mentioned resin composition, and it can be blended within a range that does not impair the effect of the present invention.

作為(G)成分之硫醇化合物係無特別限制,但可舉例如:1-己硫醇、1-庚硫醇、1-辛硫醇、1-壬硫醇、1-癸硫醇、1-十一硫醇、1-十二硫醇、1-十八硫醇、2-巰基苯并噻唑、6-甲基-2-巰基苯并噻唑、5-氯-2-巰基苯并噻唑、2-萘硫醇、2,5-二巰基-1,3,4-噻二唑、2-巰基苯并咪唑、2-巰基苯并噁唑、β-巰基丙酸、甲基-3-巰基丙酸酯、2-乙基己基-3-巰基丙酸酯、n-辛基-3-巰基丙酸酯、甲氧基丁基-3-巰基丙酸酯、硬脂醯基-3-巰基丙酸酯、三羥甲基丙烷參(3-巰基丙酸酯)、參-[(3-巰基丙醯氧基)-乙基]異三聚氰酸酯、季戊四醇肆(3-巰基丙酸酯)、四乙二醇雙(3-巰基丙酸酯)、二季戊四醇陸(3-巰基丙酸酯)、季戊四醇肆(3-巰基丁酸酯)、季戊四醇肆(3-巰基丁酸酯)、1,4-雙(3-巰基丁醯氧基)丁烷、及1,3,5-參[2-(3-磺醯基丁醯氧基)乙基]-1,3,5-三嗪-2,4,6-三酮。在本發明中,係在這些之中,從樹脂組成物的保存穩定性高,且可獲得充分硬化性的觀點來看,又以季戊四醇肆(3-巰基丁酸酯)、季戊四醇肆(3-巰基丁酸酯)、1,4-雙(3-巰基丁醯氧基)丁烷、及1,3,5-參[2-(3-磺醯基丁醯氧基)乙基]-1,3,5-三嗪-2,4,6-三酮為佳。這些硫醇化合物,係可單獨1種,或可組合2種以上使用。The thiol compound as the component (G) is not particularly limited, but examples include 1-hexyl mercaptan, 1-heptane mercaptan, 1-octyl mercaptan, 1-nonane mercaptan, 1-decane mercaptan, 1 -Undecyl mercaptan, 1-dodecyl mercaptan, 1-octadecyl mercaptan, 2-mercaptobenzothiazole, 6-methyl-2-mercaptobenzothiazole, 5-chloro-2-mercaptobenzothiazole, 2-naphthyl mercaptan, 2,5-dimercapto-1,3,4-thiadiazole, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, β-mercaptopropionic acid, methyl-3-mercapto Propionate, 2-ethylhexyl-3-mercaptopropionate, n-octyl-3-mercaptopropionate, methoxybutyl-3-mercaptopropionate, stearyl-3-mercapto Propionate, trimethylolpropane (3-mercaptopropionate), ginseng-[(3-mercaptopropionoxy)-ethyl]isocyanurate, pentaerythritol 4 (3-mercaptopropionic acid Ester), tetraethylene glycol bis(3-mercaptopropionate), dipentaerythritol (3-mercaptopropionate), pentaerythritol 4 (3-mercaptobutyrate), pentaerythritol 4 (3-mercaptobutyrate) , 1,4-bis(3-mercaptobutanoyloxy)butane, and 1,3,5-gin[2-(3-sulfonylbutanoyloxy)ethyl]-1,3,5- Triazine-2,4,6-trione. In the present invention, among these, pentaerythritol 4 (3-mercaptobutyrate) and pentaerythritol 4 (3-mercaptobutyrate) are used from the viewpoint of high storage stability of the resin composition and sufficient curability. Mercaptobutyrate), 1,4-bis(3-mercaptobutanoyloxy)butane, and 1,3,5-gin[2-(3-sulfonylbutanoyloxy)ethyl]-1 ,3,5-triazine-2,4,6-trione is preferred. These thiol compounds can be used individually by 1 type or in combination of 2 or more types.

在(G)成分有被使用的情況下,其含有量係為,相對於(A)成分100質量份,以0.01~10質量份為佳,以0.03~5質量份為較佳。若(G)成分之含有量是上述範圍的下限以上,則硬化性會成為較為良好。若(G)成分之含有量是上述範圍的上限以下,則圖案解析度會成為較為良好。When the component (G) is used, its content is preferably 0.01-10 parts by mass, and more preferably 0.03-5 parts by mass relative to 100 parts by mass of the component (A). If the content of the component (G) is greater than or equal to the lower limit of the above range, the curability will be relatively good. If the content of the component (G) is equal to or less than the upper limit of the above range, the pattern resolution will be relatively good.

<(H)成分> (H)成分係為密著促進劑。本發明的樹脂組成物,係為了提高與顯影後的基板之密著性之目的,而亦可添加密著促進劑。作為此種密著促進劑的具體例係可舉:三甲基氯矽烷、二甲基乙烯基氯矽烷、甲基二苯基氯矽烷及氯甲基二甲基氯矽烷等之氯矽烷類;三甲基甲氧基矽烷、二甲基二乙氧基矽烷、甲基二甲氧基矽烷、二甲基乙烯基乙氧基矽烷、二苯基二甲氧基矽烷、苯基三乙氧基矽烷、乙烯基三氯矽烷、γ-胺丙基三乙氧基矽烷、γ-甲基丙烯醯氧基丙基三乙氧基矽烷、γ-甲基丙烯醯氧基丙基三甲氧基矽烷、γ-縮水甘油醚氧丙基三乙氧基矽烷、γ-(N-哌啶基)丙基三乙氧基矽烷、3-脲丙基三乙氧基矽烷及3-脲丙基三甲氧基矽烷等之烷氧矽烷類;六甲基二矽氮烷、N,N’-雙(三甲基矽烷基)脲、二甲基三甲基矽胺及三甲基矽咪唑等之矽氮烷類;苯并三唑、苯并咪唑、吲唑、咪唑、2-巰基苯并咪唑、2-巰基苯并噻唑、2-巰基苯并噁唑、脲唑、硫脲嘧碇、巰基咪唑及巰基嘧啶等之雜環狀化合物;1,1-二甲基脲等之尿素化合物;及1.3-二甲基脲等之硫脲化合物。在本發明中,係在這些之中,又以烷氧矽烷類(亦即矽烷耦合劑)在可獲得良好密著性的觀點上,係為佳。又,這些密著促進劑係可1種單獨或2種類以上組合使用。<(H)component> The component (H) is an adhesion promoter. For the resin composition of the present invention, for the purpose of improving the adhesion to the substrate after development, an adhesion promoter may be added. Specific examples of such adhesion promoters include: chlorosilanes such as trimethylchlorosilane, dimethylvinylchlorosilane, methyldiphenylchlorosilane, and chloromethyldimethylchlorosilane; Trimethylmethoxysilane, dimethyldiethoxysilane, methyldimethoxysilane, dimethylvinylethoxysilane, diphenyldimethoxysilane, phenyltriethoxysilane Silane, vinyl trichlorosilane, gamma-aminopropyl triethoxysilane, gamma-methacryloxypropyl triethoxysilane, gamma-methacryloxypropyl trimethoxysilane, γ-glycidoxypropyltriethoxysilane, γ-(N-piperidyl)propyltriethoxysilane, 3-ureapropyltriethoxysilane and 3-ureapropyltrimethoxysilane Alkoxysilanes such as silanes; silazanes such as hexamethyldisilazane, N,N'-bis(trimethylsilyl)urea, dimethyltrimethylsilylamine and trimethylsilimidazole Class; benzotriazole, benzimidazole, indazole, imidazole, 2-mercaptobenzimidazole, 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, ureaazole, thiouracil, mercaptoimidazole and mercapto Heterocyclic compounds such as pyrimidine; urea compounds such as 1,1-dimethylurea; and thiourea compounds such as 1.3-dimethylurea. In the present invention, among these, alkoxysilanes (that is, silane coupling agents) are preferred in terms of obtaining good adhesion. Moreover, these adhesion promoter systems can be used individually by 1 type or in combination of 2 or more types.

上述的密著促進劑係可使用例如:信越化學工業(股)製、Momentive Performance Materials Worldwide Inc.製或東麗道康寧矽利康(股)製等之市售品的化合物,這些市售品係可容易取得。The above-mentioned adhesion promoters can be used, for example, compounds from commercial products manufactured by Shin-Etsu Chemical Co., Ltd., Momentive Performance Materials Worldwide Inc., or Toray Dow Corning Silicone Co., Ltd., etc. These commercial products can be used easy to get.

在摻合(H)成分的情況下,其含有量係為,相對於(A)成分之100質量份,通常為0.1~20質量份,以0.5~10質量份為佳。藉由將(H)成分之含有量設為上述範圍的上限以下,可獲得良好的感度。藉由將(H)成分之含有量設為上述範圍的下限以上,可獲得密著促進劑的充分之效果。When blending (H) component, its content is usually 0.1-20 parts by mass, preferably 0.5-10 parts by mass relative to 100 parts by mass of (A) component. By setting the content of the component (H) to be equal to or less than the upper limit of the above-mentioned range, good sensitivity can be obtained. By setting the content of the component (H) to be at least the lower limit of the above-mentioned range, a sufficient effect of the adhesion promoter can be obtained.

<其他添加劑> 再者,本發明的樹脂組成物係在不損及本發明的效果範圍內,因應需要而亦可含有增感劑、鏈轉移劑、交聯劑、流變調整劑、顏料、染料、保存安定劑、消泡劑、或多價酚、多價羧酸等之溶解促進劑等。<Other additives> Furthermore, the resin composition of the present invention may also contain sensitizers, chain transfer agents, crosslinking agents, rheology modifiers, pigments, dyes, and storage stability as needed within the range that does not impair the effects of the present invention. Agents, defoamers, or dissolution accelerators for polyvalent phenols, polyvalent carboxylic acids, etc.

<樹脂組成物> 本發明的樹脂組成物係為,(A)成分的鹼可溶性聚合物、(B)成分的具有2個以上聚合性基的化合物、(C-1)成分的具有肟酯基,且在365nm下的甲醇中或乙腈中之吸光係數為5,000 ml/g・cm以上之光起始劑、(D)成分的黑色顏料、及(E)成分的撥液成分,溶解或分散於(F)成分的溶媒中而成者;因應需要而尚可含有:(C-2)成分的光起始劑、(G)成分的硫醇化合物、(H)成分的密著促進劑、及其他添加劑之其中1種以上的組成物。<Resin composition> The resin composition of the present invention is an alkali-soluble polymer of the component (A), a compound having two or more polymerizable groups of the component (B), and an oxime ester group of the component (C-1), and at 365 nm A photoinitiator with an absorption coefficient of 5,000 ml/g·cm or more in methanol or acetonitrile, a black pigment of component (D), and a liquid-repellent component of component (E), which are dissolved or dispersed in component (F) It is made in solvent; if necessary, it can still contain: (C-2) component photoinitiator, (G) component thiol compound, (H) component adhesion promoter, and other additives 1 More than one kind of composition.

作為本發明的樹脂組成物的較佳態樣係可例示如以下所示者,但並非限定於此。 [1]:相對於(A)成分100質量份,將(B)成分10~150質量份、(C-1)成分0.3~5質量份、(D)成分1~50質量份及(E)成分溶解或分散於(F)成分之溶媒中而成的樹脂組成物。 [2]:於上述[1]之組成物中,相對於(A)成分100質量份,含有(E)成分達0.5~10質量份的樹脂組成物。 [3]:於上述[1]或[2]之組成物中,還將(G)成分,相對於(A)成分100質量份,含有達0.01~10質量份的樹脂組成物。 [4]:於上述[1]、[2]或[3]之組成物中,還將(H)成分,相對於(A)成分100質量份,含有達0.1~20質量份的樹脂組成物。 [5]:於上述[1]~[4]之任一組成物中,還將(C-2)成分,相對於(A)成分100質量份,含有達0.5~10質量份的樹脂組成物。As a preferable aspect of the resin composition of this invention, as shown below can be illustrated, but it is not limited to this. [1]: With respect to 100 parts by mass of (A) component, 10 to 150 parts by mass of (B) component, 0.3 to 5 parts by mass of (C-1) component, 1 to 50 parts by mass of (D) component, and (E) A resin composition in which the components are dissolved or dispersed in the solvent of the (F) component. [2]: In the composition of the above-mentioned [1], a resin composition containing 0.5 to 10 parts by mass of the (E) component with respect to 100 parts by mass of the (A) component. [3]: In the composition of the above-mentioned [1] or [2], the (G) component further contains 0.01 to 10 parts by mass of the resin composition with respect to 100 parts by mass of the (A) component. [4]: In the composition of [1], [2], or [3] above, the component (H) is further contained in a resin composition of 0.1-20 parts by mass relative to 100 parts by mass of the component (A) . [5]: In any of the above-mentioned compositions [1] to [4], the component (C-2) further contains 0.5-10 parts by mass of the resin composition relative to 100 parts by mass of the component (A) .

本發明的樹脂組成物中的固形物濃度,係若各成分是均勻地溶解或分散於溶媒中,則無特別限定,但以1~80質量%為佳,以5~70質量%為較佳,以10~60質量%為更佳。此處所謂的固形物,係為構成樹脂組成物的溶媒以外之成分的總量。The solids concentration in the resin composition of the present invention is not particularly limited if the components are uniformly dissolved or dispersed in the solvent, but it is preferably 1 to 80% by mass, and more preferably 5 to 70% by mass , More preferably 10-60% by mass. The solid content here refers to the total amount of components other than the solvent constituting the resin composition.

本發明的樹脂組成物之調製方法並無特別限定,但其調製法係可舉例如:將(A)成分之共聚物溶解於(F)成分之溶媒中,對該溶液將(B)成分之具有2個以上聚合性基之化合物、(C-1)成分之光起始劑、(D)成分之黑色顏料及(E)成分之撥液成分,以所定之比率進行混合的方法,或者,在該調製法的適當階段中,因應需要而還添加(C-2)成分之光起始劑、(G)成分之硫醇化合物、(H)成分之密著促進劑及其他添加劑的方法。The preparation method of the resin composition of the present invention is not particularly limited, but the preparation method may include, for example, dissolving the copolymer of the component (A) in the solvent of the component (F), and applying the solution of the component (B) to the solution. A method in which a compound having two or more polymerizable groups, the photoinitiator of component (C-1), the black pigment of component (D), and the liquid-repellent component of component (E) are mixed in a predetermined ratio, or, In the appropriate stage of the preparation method, a method of adding the photoinitiator of the component (C-2), the thiol compound of the component (G), the adhesion promoter of the component (H), and other additives as needed.

在本發明的樹脂組成物的調製時,係可將(F)成分之溶媒中的聚合反應所得的(A)成分之共聚物的聚合溶液直接使用。此情況下,在與前述同樣地對該(A)成分之聚合溶液加入(B)成分、(C-1)成分及(D)成分等而進行混合之際,亦可為了調整濃度之目的,而追加投入(F)成分之溶劑。此時,(A)成分之共聚物的形成過程中所使用之(F)成分之溶媒,與樹脂組成物之調製時為了調整濃度而被使用的(F)成分之溶媒係可為相同,亦可為不同。When preparing the resin composition of the present invention, the polymerization solution of the copolymer of the component (A) obtained by the polymerization reaction in the solvent of the component (F) can be used as it is. In this case, when adding (B) component, (C-1) component, (D) component, etc., to the polymerization solution of (A) component in the same manner as above, and mixing, it can also be used for the purpose of adjusting the concentration. And add the solvent of component (F). At this time, the solvent of component (F) used in the formation of the copolymer of component (A) may be the same as the solvent of component (F) used to adjust the concentration during the preparation of the resin composition, or Can be different.

上述所得的樹脂組成物,雖然可以直接使用於圖案形成,但使用孔徑為1.0μm左右的濾網等進行過濾後再使用為佳。Although the resin composition obtained above can be used as it is for pattern formation, it is preferable to use it after filtering it with a filter with a pore size of about 1.0 μm or the like.

<塗膜及硬化膜> 本發明的樹脂組成物,係將該組成物在適當的基板(例如矽/二氧化矽被覆基板、氮化矽基板、金屬例如鋁、鉬、鉻等被覆的基板、玻璃基板、石英基板、ITO基板等)或薄膜(例如三乙醯基纖維素膜、環烯烴聚合物膜、環烯烴共聚物膜、聚對苯二甲酸乙二酯膜、聚酯膜、丙烯酸膜、聚醯亞胺等之樹脂薄膜)等之基材上,藉由旋轉塗佈、流延塗佈、滾筒塗佈、狹縫塗佈、狹縫塗佈後接續旋轉塗佈、噴墨法等之方法進行塗佈,其後,藉由加熱板或烤箱等進行預備乾燥,而形成塗膜。其後,將該塗膜進行加熱處理(預烘烤),而形成具有感光性的負片型感光性樹脂膜。<Coating film and hardened film> The resin composition of the present invention is applied to a suitable substrate (e.g., silicon/silicon dioxide coated substrate, silicon nitride substrate, metal such as aluminum, molybdenum, chromium, etc.) coated substrate, glass substrate, quartz substrate, ITO Substrate, etc.) or film (e.g. triacetyl cellulose film, cycloolefin polymer film, cycloolefin copolymer film, polyethylene terephthalate film, polyester film, acrylic film, polyimide, etc. Resin film) and other substrates are coated by spin coating, cast coating, roll coating, slit coating, slit coating followed by spin coating, inkjet method, etc. After that, it is preliminarily dried by a hot plate, oven, etc., to form a coating film. After that, the coating film is heated (pre-baked) to form a negative photosensitive resin film having photosensitivity.

上述預備乾燥,係若能去除組成物中所含之溶媒,且對塗膜不會造成不良影響的條件,則無特別限定,可採用自然乾燥、或使用加熱板或烤箱的加熱乾燥等。又,該預備乾燥,係亦可和預烘烤一體進行。The above-mentioned preliminary drying is not particularly limited as long as the solvent contained in the composition can be removed without adversely affecting the coating film. Natural drying, or heat drying using a hot plate or oven, etc. can be used. In addition, this preliminary drying can also be performed integrally with the pre-baking.

預烘烤的條件,一般而言是採用,以60~150℃為佳,以80~120℃為較佳,在使用加熱板的情況下係為0.5~30分鐘,使用烤箱的情況下則為0.5~90分鐘進行加熱的方法。The pre-baking conditions are generally used, preferably 60-150℃, preferably 80-120℃, 0.5-30 minutes in the case of using a hot plate, or 0.5-30 minutes in the case of using an oven Method of heating for 0.5 to 90 minutes.

從上述樹脂組成物所形成的負片型感光性樹脂膜之膜厚,以0.1~50μm為佳,以0.5~40μm為較佳,以1~30μm為更佳,以5~20μm為最佳。The film thickness of the negative photosensitive resin film formed from the above resin composition is preferably 0.1-50 μm, preferably 0.5-40 μm, more preferably 1-30 μm, and most preferably 5-20 μm.

由本發明的樹脂組成物所形成之負片型感光性樹脂膜,在使用具有所定之圖案的遮罩以紫外線、ArF、KrF、F2 雷射光等之光進行曝光時,藉由從負片型感光性樹脂膜中所含之(C-1)成分及(C-2)成分之光聚合起始劑所產生之自由基之作用,該膜中的曝光部會變成不溶於鹼性顯影液。The negative photosensitive resin film formed from the resin composition of the present invention is exposed to light such as ultraviolet rays, ArF, KrF, F 2 laser light, etc. using a mask with a predetermined pattern. The function of the radicals generated by the photopolymerization initiator of the component (C-1) and the component (C-2) contained in the resin film will cause the exposed part of the film to become insoluble in the alkaline developer.

本發明中,係若考慮要充分硬化至膜的深部為止,則作為照射光是使用紫外線為佳,使用波長365nm之紫外線係為較佳。In the present invention, in consideration of sufficient curing to the deep part of the film, it is preferable to use ultraviolet rays as the irradiation light, and it is preferable to use ultraviolet rays with a wavelength of 365 nm.

其後,使用鹼性顯影液進行顯影。藉此,負片型感光性樹脂膜之中,未曝光的部分會被去除,形成圖案狀的起伏(relief)。After that, development was performed using an alkaline developer. Thereby, in the negative photosensitive resin film, the unexposed part is removed, and pattern-like relief is formed.

作為本發明中所能使用的鹼性顯影液係可舉例如:碳酸鈉、碳酸鉀、氫氧化鉀及氫氧化鈉等之鹼金屬氫氧化物之水溶液;氫氧化四甲基銨、氫氧化四乙基銨及膽鹼等之氫氧化第四級銨之水溶液;以及乙醇胺、丙基胺及乙二胺等之胺水溶液等之鹼性水溶液。甚至,這些顯影液中亦可添加有界面活性劑等。Examples of alkaline developer systems that can be used in the present invention include aqueous solutions of alkali metal hydroxides such as sodium carbonate, potassium carbonate, potassium hydroxide, and sodium hydroxide; tetramethylammonium hydroxide, tetramethylammonium hydroxide, etc. Aqueous solutions of quaternary ammonium hydroxide such as ethyl ammonium and choline; and alkaline aqueous solutions of amine aqueous solutions such as ethanolamine, propylamine and ethylenediamine. Furthermore, surfactants and the like may be added to these developing solutions.

作為光阻的顯影液而一般所被使用的係可舉例如:0.5~3質量%碳酸鈉水溶液、0.01~0.5質量%氫氧化鉀水溶液及0.1~2.38質量%氫氧化四乙銨水溶液,但於本發明的樹脂組成物中,也可以使用這類的鹼性顯影液,而不會發生膨潤等之問題,即可實施良好的顯影。The systems generally used as photoresist developers include, for example, 0.5 to 3% by mass sodium carbonate aqueous solution, 0.01 to 0.5% by mass potassium hydroxide aqueous solution, and 0.1 to 2.38% by mass tetraethylammonium hydroxide aqueous solution. In the resin composition of the present invention, such an alkaline developer can also be used without problems such as swelling, and good development can be carried out.

又,作為顯影方法係也可採用噴霧法、盛液法、浸漬法或搖動浸漬法等之任一方法。此時的顯影時間,通常係為15~200秒。In addition, as the development method, any method such as a spray method, a liquid filling method, a dipping method, or a shaking dipping method may be used. The development time at this time is usually 15 to 200 seconds.

顯影後,對負片型感光性樹脂膜以流水進行洗淨。此時,洗淨時間,係若能充分去除顯影液即可,並無特別限定,但通常為20~90秒。又,洗淨後,亦可使用壓縮空氣或壓縮氮氣,或藉由旋轉而風乾。基板上的水分會被去除,獲得已被形成圖案的膜。After development, the negative photosensitive resin film was washed with running water. At this time, the washing time is not particularly limited as long as the developer can be sufficiently removed, but it is usually 20 to 90 seconds. In addition, after washing, compressed air or compressed nitrogen can also be used, or it can be air-dried by rotating. The moisture on the substrate is removed, and a patterned film is obtained.

接下來,對所得的圖案形成膜,施以熱硬化用之後烘烤或光硬化用之後曝光,具體而言,藉由使用加熱板、烤箱等進行加熱,或使用紫外線照射裝置進行曝光,就可獲得耐熱性、平坦化性、低吸水性及耐藥品性等皆有所提升,具有良好之起伏圖案的膜(硬化膜)。Next, the resulting patterned film is subjected to thermal curing followed by baking or photocuring followed by exposure. Specifically, it can be heated with a hot plate, oven, etc., or exposed with an ultraviolet irradiation device. A film (cured film) with improved heat resistance, planarization, low water absorption, and chemical resistance is obtained, and has a good undulating pattern.

作為後烘烤的條件,一般而言是採用,以150~300℃為佳,以200~250℃為較佳,在使用加熱板的情況下係為1~30分鐘,使用烤箱的情況下則為1~90分鐘進行加熱的方法。在本發明中,藉由實施如此的後烘烤,就可獲得具有目的之良好圖案形狀的硬化膜。As the conditions for post-baking, generally speaking, 150-300°C is preferred, 200-250°C is better, in the case of using a hot plate, it is 1-30 minutes, in the case of an oven, It is a method of heating for 1 to 90 minutes. In the present invention, by performing such post-baking, a cured film with a good pattern shape can be obtained.

如以上,本發明所述之樹脂組成物,係曝光工程中的紫外線之穿透率為較高,可充分硬化至膜深部為止,而且藉由使該組成物硬化就可形成可見光之遮光性為高的硬化膜。所得之硬化膜,係可合適地使用作為QD-OLED顯示器或Micro LED顯示器等之自發光顯示器用之材料,尤其是,作為將自發光顯示器面板的波長轉換層的子像素予以構成的隔壁(著色隔壁)來使用,藉此可對其畫質的更進一步提升做出貢獻。 [實施例]As described above, the resin composition of the present invention has a high transmittance of ultraviolet rays in the exposure process, and can be fully cured to the deep part of the film, and by curing the composition, the visible light shielding property can be formed. High hardened film. The obtained cured film can be suitably used as a material for self-luminous displays such as QD-OLED displays or Micro LED displays, especially as partition walls (coloring) that constitute the sub-pixels of the wavelength conversion layer of self-luminous display panels. Next door) to use, which can contribute to the further improvement of its image quality. [Example]

以下例舉實施例來更詳細說明本發明,但本發明並非限定於這些實施例。The following examples illustrate the present invention in more detail, but the present invention is not limited to these examples.

[實施例中所使用的省略記號] 以下的實施例中所使用的省略記號的意義係如以下所示。 MAA:甲基丙烯酸 MMA:甲基丙烯酸甲酯 AIBN:偶氮二異丁腈 PRG1:乙酮,1-[9-乙基-6-(2-甲基苄醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)(365nm吸光係數:7,749 ml/g‧cm in CH3 CN) PRG2:1-羥基-環己基-苯基-酮(365nm吸光係數:88.64 ml/g‧cm in MeOH) PRG3:BASF公司製,IRGACURE(註冊商標)OXE03 DPHA:日本化藥(股)製,KAYARAD(註冊商標) DPHA(產品名),二季戊四醇五及六丙烯酸酯之混合物 A-DPH-12E:新中村化學工業(股)製,NK ESTER (註冊商標)A-DPH-12E(產品名),乙氧基化二季戊四醇六丙烯酸酯 CTA:昭和電工(股)製,Karenz-MT(註冊商標)PE1(產品名),季戊四醇肆(3-巰基丁酸酯) PFHMA:2-(全氟己基)乙基甲基丙烯酸酯 KBM-503:3-甲基丙烯醯氧基丙基三甲氧矽烷(別名:丙烯酸3-三乙氧基矽烷基丙酯) HEMA:甲基丙烯酸2-羥基乙酯 PFPE1:兩末端皆不隔著聚(氧化伸烷基)基而具有2個羥基之全氟聚醚[Solvay Specialty Polymers公司製 Fomblin(註冊商標)T4] BEI:1,1-雙(丙烯醯氧基甲基)乙基異氰酸酯[昭和電工(股)製 Karenz(註冊商標)BEI] DOTDD:二新癸烷酸二辛基錫[日東化成(股)製 Neostan(註冊商標)U-830] PGME:丙二醇單甲醚 MEK:甲乙酮[The abbreviations used in the examples] The meanings of the abbreviations used in the following examples are as follows. MAA: methacrylic acid MMA: methyl methacrylate AIBN: azobisisobutyronitrile PRG1: ethyl ketone, 1-[9-ethyl-6-(2-methylbenzyl)-9H-carbazole- 3-yl]-1-(O-acetyloxime) (365nm absorbance coefficient: 7,749 ml/g‧cm in CH 3 CN) PRG2: 1-hydroxy-cyclohexyl-phenyl-ketone (365nm absorbance coefficient: 88.64 ml/g‧cm in MeOH) PRG3: manufactured by BASF, IRGACURE (registered trademark) OXE03 DPHA: manufactured by Nippon Kayaku Co., Ltd., KAYARAD (registered trademark) DPHA (product name), a mixture of dipentaerythritol penta and hexaacrylate A-DPH-12E: manufactured by Shin Nakamura Chemical Industry Co., Ltd., NK ESTER (registered trademark) A-DPH-12E (product name), ethoxylated dipentaerythritol hexaacrylate CTA: manufactured by Showa Denko Co., Ltd., Karenz -MT (registered trademark) PE1 (product name), pentaerythritol 4 (3-mercaptobutyrate) PFHMA: 2-(perfluorohexyl) ethyl methacrylate KBM-503: 3-methacryloxy propyl Trimethoxysilane (alias: 3-triethoxysilyl propyl acrylate) HEMA: 2-hydroxyethyl methacrylate PFPE1: Both ends do not have a poly(oxyalkylene) group but two hydroxyl groups Perfluoropolyether [Fomblin (registered trademark) T4 manufactured by Solvay Specialty Polymers] BEI: 1,1-bis(acryloxymethyl) ethyl isocyanate [Karenz (registered trademark) BEI manufactured by Showa Denko Corporation] DOTDD: Dioctyltin dineodecanoate [Nitto Kasei Co., Ltd. Neostan (registered trademark) U-830] PGME: Propylene glycol monomethyl ether MEK: Methyl ethyl ketone

[黑色顏料及分散劑] 黑色顏料1:三菱綜合材料(股)製,NITRBLACK UB-1 黑色顏料2:三菱綜合材料(股)製,13M-T 分散劑:日本Lubrizol(股)製,SOLSPERSE 34750[Black Pigment and Dispersant] Black pigment 1: manufactured by Mitsubishi Materials Co., Ltd., NITRBLACK UB-1 Black pigment 2: manufactured by Mitsubishi Materials Co., Ltd., 13M-T Dispersant: made by Japan Lubrizol (stock), SOLSPERSE 34750

<黑色顏料含有薄膜之光穿透率> (1)黑色顏料1含有薄膜之形成 將後述的合成例1中所得的P1(8.11g)、DPHA(1.99g)、PRG1(0.03g)、PRG2(0.09g)、CTA(0.01g)、後述的顏料分散液1(0.63g)、後述的合成例2中所得的P2(0.50g)、PGME(0.65g)予以混合,調製出以相對於(A)成分100質量份而(D)成分為10質量份之比率分散於(F)成分中而成的分散液(黑色顏料1含有樹脂組成物)。將所得的分散液使用旋轉塗佈機塗佈在無鹼玻璃(基板)上之後,在100℃的加熱板上以120秒進行預烘烤,形成膜厚10μm的黑色顏料1含有薄膜。<The light transmittance of black pigment containing film> (1) Black pigment 1 contains the formation of a thin film P1 (8.11g), DPHA (1.99g), PRG1 (0.03g), PRG2 (0.09g), CTA (0.01g) obtained in Synthesis Example 1 described below, and the pigment dispersion liquid 1 (0.63g) described below P2 (0.50g) and PGME (0.65g) obtained in Synthesis Example 2 described later were mixed, and prepared to be dispersed in (F) at a ratio of 100 parts by mass of (A) component and 10 parts by mass of (D) component A dispersion liquid (the black pigment 1 contains a resin composition) in the components. After coating the obtained dispersion liquid on an alkali-free glass (substrate) using a spin coater, it was prebaked on a hot plate at 100° C. for 120 seconds to form a black pigment 1 containing thin film with a film thickness of 10 μm.

(2)黑色顏料2含有薄膜之形成 取代(1)所使用的顏料分散液1,改用後述的顏料分散液2以外,其餘係以和(1)相同的方法,調製出以相對於(A)成分100質量份而(D)成分為10質量份之比率分散於(F)成分中而成的分散液(黑色顏料2含有樹脂組成物)。使用所得的分散液,以和(1)相同的方法,在無鹼玻璃(基板)上形成膜厚10μm的黑色顏料2含有薄膜。(2) The formation of black pigment 2 containing thin film Instead of the pigment dispersion liquid 1 used in (1), the pigment dispersion liquid 2 described later is used. The rest is the same method as (1) to prepare the component (D) relative to 100 parts by mass of the component (A) It is a dispersion liquid in which the component (F) is dispersed in a ratio of 10 parts by mass (the black pigment 2 contains a resin composition). Using the obtained dispersion liquid, a black pigment 2 containing thin film having a thickness of 10 μm was formed on an alkali-free glass (substrate) in the same manner as in (1).

(3)光穿透率之測定 針對上述所形成的薄膜,使用紫外線可見分光光度計((股)島津製作所製SIMADZU UV-2550型號)來測定365nm之波長的穿透率T1 及550nm之波長的光穿透率T2 ,算出兩者的比值T1 /T2 。結果示於表1。(3) Measurement of light transmittance For the film formed above, use an ultraviolet-visible spectrophotometer (SIMADZU UV-2550 model manufactured by Shimadzu Corporation) to measure the transmittance T 1 at the wavelength of 365nm and the wavelength of 550nm The light transmittance T 2 , calculate the ratio T 1 /T 2 of the two . The results are shown in Table 1.

Figure 02_image015
Figure 02_image015

[(A)成分及(E)成分的數目平均分子量Mn及重量平均分子量Mw之測定] 依照以下的合成例所合成的(A)成分、(E)成分之共聚物及(E)成分之聚合物的Mn及Mw,係使用島津科學(股)製GPC裝置(管柱KF803L及KF804L),作為析出溶劑是將四氫呋喃以流量1mL/分鐘在管柱中(管柱溫度40℃)流動使其溶離之條件下,進行測定。此外,下述的數目平均分子量(以下稱作Mn。)及重量平均分子量(以下稱作Mw。),係以聚苯乙烯換算值來表示。[Measurement of number average molecular weight Mn and weight average molecular weight Mw of (A) component and (E) component] The Mn and Mw of (A) component, (E) component copolymer, and (E) component polymer synthesized according to the following synthesis examples are using GPC equipment manufactured by Shimadzu Science Co., Ltd. (tube columns KF803L and KF804L) As the precipitation solvent, tetrahydrofuran was flowed through the column (column temperature 40°C) at a flow rate of 1 mL/min to perform the measurement. In addition, the following number average molecular weight (hereinafter referred to as Mn.) and weight average molecular weight (hereinafter referred to as Mw.) are expressed in terms of polystyrene.

<合成例1> 作為構成共聚物的單體成分是使用MAA(30.0g)及MMA(120.0g),作為自由基聚合起始劑是使用AIBN(6.4g),令它們在溶媒PGME(290g)中,以60~90℃進行16小時聚合反應而獲得(A)成分之共聚物溶液P1(共聚物濃度:35質量%)。所得的共聚物的Mn係為9,700,Mw係為21,500。<Synthesis example 1> As the monomer components constituting the copolymer, MAA (30.0g) and MMA (120.0g) were used, and AIBN (6.4g) was used as the radical polymerization initiator. The polymerization reaction was performed at 90°C for 16 hours to obtain a copolymer solution P1 of the component (A) (copolymer concentration: 35% by mass). The Mn series of the obtained copolymer was 9,700, and the Mw series was 21,500.

<合成例2> 作為構成共聚物的單體成分是使用PFHMA(5.00g)、KBM-503(3.83g)及HEMA(1.51g),作為自由基聚合起始劑是使用AIBN(0.52g),令它們在溶媒PGME(25.32g)中,以80℃進行16小時聚合反應而獲得(E)成分之共聚物溶液P2 (共聚物濃度:30質量%)。所得的共聚物的Mn係為4,800,Mw係為6,700。<Synthesis example 2> As the monomer components constituting the copolymer, PFHMA (5.00g), KBM-503 (3.83g) and HEMA (1.51g) are used. As the radical polymerization initiator, AIBN (0.52g) is used. (25.32g), the polymerization reaction was performed at 80 degreeC for 16 hours, and the copolymer solution P2 of (E) component (copolymer concentration: 30 mass %) was obtained. The Mn series of the obtained copolymer was 4,800, and the Mw series was 6,700.

<合成例3> 使用PFPE1(1.19g)、BEI(0.48g),作為觸媒是使用DOTDD(0.017g),令它們在溶媒MEK(1.67g)中,以室溫(約23℃)進行24小時反應,獲得(E)成分之聚合物溶液P3 (聚合物濃度:50質量%)。所得的P3的Mn係為2,500,Mw係為3,000。<Synthesis example 3> Using PFPE1 (1.19g) and BEI (0.48g), DOTDD (0.017g) was used as a catalyst, and they were reacted in a solvent MEK (1.67g) at room temperature (about 23°C) for 24 hours to obtain ( E) Component polymer solution P3 (polymer concentration: 50% by mass). The Mn series of the obtained P3 was 2,500, and the Mw series was 3,000.

<顏料分散液之調製> 黑色顏料、溶媒、分散劑以表2所記載之摻合比率而進行混合。將該溶液以Mix Rotor進行8小時分散處理。作為滾珠使用0.5mmφ的矽珠,加入分散液的5倍之質量。在分散結束後,以濾網將滾珠與分散液做分離,調製出顏料分散液。<Preparation of pigment dispersion> The black pigment, solvent, and dispersant were mixed at the blending ratios described in Table 2. The solution was subjected to a dispersion treatment with Mix Rotor for 8 hours. As the balls, use 0.5mmφ silicon beads, and add 5 times the mass of the dispersion. After the dispersion is completed, the balls and the dispersion are separated by a filter to prepare a pigment dispersion.

Figure 02_image017
Figure 02_image017

<實施例1~3,比較例1~2> 依照以下表3所示的組成,在(A)成分之溶液中,混合(B)成分、(C-1)成分、(F)成分之溶媒、任意成分、(D)成分及(E)成分,在室溫攪拌3小時,調製出實施例及比較例的樹脂組成物。<Examples 1 to 3, Comparative Examples 1 to 2> According to the composition shown in Table 3 below, in the solution of (A) component, mix (B) component, (C-1) component, (F) component solvent, optional component, (D) component and (E) component , And stirred at room temperature for 3 hours to prepare resin compositions of Examples and Comparative Examples.

Figure 02_image019
Figure 02_image019

針對所得的實施例1~3及比較例1~2的各樹脂組成物,分別進行穿透率之測定及圖案形狀之觀察。With respect to the obtained resin compositions of Examples 1 to 3 and Comparative Examples 1 to 2, the transmittance measurement and pattern shape observation were performed, respectively.

[穿透率、光學濃度(OD值)之評價] 將樹脂組成物使用旋轉塗佈機塗佈在無鹼玻璃(基板)上後,在100℃之加熱板上進行120秒的預烘烤,形成塗膜(膜厚14μm)。對所得的塗膜,使用佳能(股)製紫外線照射裝置PLA-600FA,將365nm的光強度為5.5 mW/cm2 的紫外線,以140 mJ/cm2 進行照射。其後,以0.033質量%的氫氧化鉀水溶液進行180秒的噴霧顯影後,以超純水進行30秒的流水洗淨。接下來,使用烤箱,將該塗膜以230℃進行30分鐘的加熱而進行後烘烤,獲得硬化膜(膜厚10μm)。[Evaluation of transmittance and optical density (OD value)] After coating the resin composition on an alkali-free glass (substrate) using a spin coater, it is pre-baked on a hot plate at 100°C for 120 seconds. A coating film (film thickness 14 μm) was formed. The obtained coating film was irradiated with ultraviolet rays having a light intensity of 5.5 mW/cm 2 at 365 nm at 140 mJ/cm 2 using an ultraviolet irradiation device PLA-600FA manufactured by Canon Co., Ltd. After that, spray development was performed for 180 seconds with a 0.033% by mass potassium hydroxide aqueous solution, and then, running water washing was performed for 30 seconds with ultrapure water. Next, using an oven, the coating film was heated at 230°C for 30 minutes and post-baked to obtain a cured film (film thickness 10 μm).

針對上述所得的硬化膜,使用紫外線可見分光光度計((股)島津製作所製SIMADZU UV-2550型號)來測定200~800nm之波長的穿透率,算出550nm的光學濃度(OD值)。此外,OD值係為表示遮光能力的數值,數值越大表示遮光性越高。所得的結果示於表3。For the cured film obtained above, an ultraviolet-visible spectrophotometer (SIMADZU UV-2550 model manufactured by Shimadzu Corporation) was used to measure the transmittance at a wavelength of 200 to 800 nm, and the optical density (OD value) at 550 nm was calculated. In addition, the OD value is a numerical value indicating the light-shielding ability, and the larger the value, the higher the light-shielding ability. The results obtained are shown in Table 3.

[圖案化之評價] 將樹脂組成物使用旋轉塗佈機塗佈在無鹼玻璃(基板)上後,在100℃之加熱板上進行120秒的預烘烤,形成塗膜(膜厚14μm)。對該塗膜,隔著10μm的線與空白圖案之遮罩,使用佳能(股)製紫外線照射裝置PLA-600FA,將365nm的光強度為5.5 mW/cm2 的紫外線,以140 mJ/cm2 進行照射。其後,以0.033質量%的氫氧化鉀水溶液進行180秒的噴霧顯影後,以超純水進行30秒的流水洗淨。接下來,使用烤箱,將該塗膜以230℃進行30分鐘的加熱而進行後烘烤,使其硬化。將硬化的線與空白圖案的剖面形狀,使用(股)日立先端科技製掃描型電子顯微鏡S-4800進行觀察,根據以下的基準來評價圖案的解像性。所得的結果示於表4。 <評價基準> ○:可形成圖案,且無殘留膜 ×:不可形成圖案,或雖然可形成圖案但有殘留膜[Evaluation of patterning] After coating the resin composition on an alkali-free glass (substrate) using a spin coater, it is pre-baked on a hot plate at 100°C for 120 seconds to form a coating film (film thickness 14μm) . For this coating film, with a mask of 10μm line and blank pattern, using a Canon (stock) ultraviolet irradiation device PLA-600FA, the 365nm light intensity is 5.5 mW/cm 2 of ultraviolet light to 140 mJ/cm 2 Perform irradiation. After that, spray development was performed for 180 seconds with a 0.033% by mass potassium hydroxide aqueous solution, and then, running water washing was performed for 30 seconds with ultrapure water. Next, using an oven, the coating film was heated at 230°C for 30 minutes to perform post-baking and harden it. The cross-sectional shape of the hardened line and the blank pattern was observed using a scanning electron microscope S-4800 manufactured by Hitachi Advanced Technologies, and the pattern resolution was evaluated based on the following criteria. The results obtained are shown in Table 4. <Evaluation Criteria> ○: Pattern can be formed without residual film ×: Pattern cannot be formed, or pattern can be formed but residual film is present

Figure 02_image021
Figure 02_image021

根據表4的結果,在實施例1~3中係表示,可見光的遮蔽性為優良,解像性也為良好的優良特性。另一方面,在比較例1中,可見光的遮蔽性不足,在比較例2中,無法形成圖案。According to the results of Table 4, in Examples 1 to 3, it is shown that the shielding properties of visible light are excellent, and the resolution is also excellent. On the other hand, in Comparative Example 1, the shielding properties of visible light were insufficient, and in Comparative Example 2, the pattern could not be formed.

Claims (12)

一種樹脂組成物,其特徵為,含有: (A)鹼可溶性共聚物; (B)具有2個以上從丙烯酸酯基、甲基丙烯酸酯基、乙烯基及烯丙基所組成的群組中所選擇出來的至少1種聚合性基的化合物; (C)光起始劑:(C-1)具有肟酯基,且在365nm下的甲醇中或乙腈中之吸光係數為5,000 ml/g・cm以上的光起始劑; (D)黑色顏料:將含有(A)成分、(B)成分、(C-1)成分、(C-2)在365nm下的甲醇中或乙腈中之吸光係數為100 ml/g・cm以下的光起始劑、(D)黑色顏料、(E)撥液成分、(F)溶媒及(G)硫醇化合物,且以相對於(A)成分100質量份而(D)成分為10質量份之比率分散於(F)成分中而成的分散液塗佈在玻璃基板上,使其乾燥而成膜的膜厚10μm的薄膜中,令波長365nm之光穿透率為T1 ,令波長550nm之光穿透率為T2 時,T1 /T2 之值為0.3以上的黑色顏料; (E)撥液成分;及 (F)溶媒。A resin composition, which is characterized in that it contains: (A) an alkali-soluble copolymer; (B) having two or more acrylate groups, methacrylate groups, vinyl groups, and allyl groups. Selected at least one polymerizable compound; (C) Photoinitiator: (C-1) has an oxime ester group, and the absorption coefficient in methanol or acetonitrile at 365nm is 5,000 ml/g·cm The above photoinitiator; (D) Black pigment: The absorption coefficient of (A) component, (B) component, (C-1) component, (C-2) in methanol or acetonitrile at 365nm is 100 ml/g·cm or less of the photoinitiator, (D) black pigment, (E) liquid-repellent component, (F) solvent, and (G) thiol compound, based on 100 parts by mass of (A) component (D) component is 10 parts by mass dispersed in (F) component dispersion liquid coated on a glass substrate and dried to form a film with a thickness of 10μm, so that light with a wavelength of 365nm penetrates was T 1, so that the light transmittance of the wavelength of 550nm is 2 T, T 1 / T is 0.3 or more of the black pigment 2; (E) repellent composition; and (F) a solvent. 如請求項1所記載之樹脂組成物,其中,(D)成分之含有量,係相對於(A)成分100質量份,而為1~50質量份。The resin composition according to claim 1, wherein the content of the component (D) is 1 to 50 parts by mass relative to 100 parts by mass of the component (A). 如請求項1或2所記載之樹脂組成物,其中,(A)成分的數目平均分子量,係以聚苯乙烯換算為2,000~50,000。The resin composition according to claim 1 or 2, wherein the number average molecular weight of the component (A) is 2,000 to 50,000 in terms of polystyrene. 如請求項1~3之任1項所記載之樹脂組成物,其中,(A)成分係為,含有從丙烯酸、甲基丙烯酸、馬來酸酐及馬來醯亞胺所組成的群組中所選擇出來的至少1種單體混合物的共聚物。The resin composition as described in any one of claims 1 to 3, wherein the component (A) is composed of acrylic acid, methacrylic acid, maleic anhydride, and maleimide. A copolymer of at least one monomer mixture selected. 如請求項1~4之任1項所記載之樹脂組成物,其中,(C-1)成分之含有量,係相對於(A)成分100質量份,而為0.3~5質量份。The resin composition according to any one of claims 1 to 4, wherein the content of the component (C-1) is 0.3 to 5 parts by mass relative to 100 parts by mass of the component (A). 如請求項1~5之任1項所記載之樹脂組成物,其中,(B)成分之含有量,係相對於(A)成分100質量份,而為10~150質量份。The resin composition according to any one of claims 1 to 5, wherein the content of the component (B) is 10 to 150 parts by mass relative to 100 parts by mass of the component (A). 如請求項1~6之任1項所記載之樹脂組成物,其中,(C-1)成分係為具有咔唑結構的光起始劑。The resin composition according to any one of claims 1 to 6, wherein the component (C-1) is a photoinitiator having a carbazole structure. 一種硬化膜,係由如請求項1~7之任1項所記載之樹脂組成物所得。A cured film obtained from the resin composition described in any one of claims 1 to 7. 一種自發光顯示器用隔壁,係由如請求項1~7之任1項所記載之樹脂組成物所形成。A partition wall for a self-luminous display is formed of the resin composition described in any one of claims 1 to 7. 一種自發光顯示器的波長轉換層,係具備如請求項9所記載之隔壁。A wavelength conversion layer of a self-luminous display is provided with the partition wall as described in claim 9. 一種有機電激發光元件,係具備如請求項10所記載之波長轉換層。An organic electroluminescence element comprising the wavelength conversion layer as described in claim 10. 一種Micro LED元件,係具備如請求項10所記載之波長轉換層。A Micro LED element is provided with the wavelength conversion layer as described in claim 10.
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