TW202108298A - Flange mechanism preventing cutting debris as a contamination from entering and sticking to a screwed portion - Google Patents
Flange mechanism preventing cutting debris as a contamination from entering and sticking to a screwed portion Download PDFInfo
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- TW202108298A TW202108298A TW109128249A TW109128249A TW202108298A TW 202108298 A TW202108298 A TW 202108298A TW 109128249 A TW109128249 A TW 109128249A TW 109128249 A TW109128249 A TW 109128249A TW 202108298 A TW202108298 A TW 202108298A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B45/00—Means for securing grinding wheels on rotary arbors
- B24B45/006—Quick mount and release means for disc-like wheels, e.g. on power tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D19/00—Shearing machines or shearing devices cutting by rotary discs
- B23D19/08—Shearing machines or shearing devices cutting by rotary discs for special use, e.g. for cutting curves, for chamfering edges
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D45/00—Sawing machines or sawing devices with circular saw blades or with friction saw discs
- B23D45/02—Sawing machines or sawing devices with circular saw blades or with friction saw discs with a circular saw blade or the stock mounted on a carriage
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0683—Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B45/00—Means for securing grinding wheels on rotary arbors
- B24B45/003—Accessories therefor
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Dicing (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
本發明關於一種凸緣機構,是將切割刀片加以夾持並裝設在主軸的前端。The invention relates to a flange mechanism, which clamps and installs a cutting blade on the front end of a main shaft.
以往如專利文獻1所揭露,已知有一種構成,是以一對凸緣夾持刀片並將刀片裝設在切割裝置的主軸。Conventionally, as disclosed in Patent Document 1, there is known a configuration in which a pair of flanges clamps the blade and mounts the blade on the main shaft of the cutting device.
具體而言,其構成為:固定在主軸側的固定凸緣的凸轂部上形成有公螺紋,在凸轂部插入刀片及前側凸緣的狀態下,藉由將固定螺帽的母螺紋鎖緊在凸轂部的公螺紋,而將刀片夾持固定在固定凸緣與前側凸緣之間。 [習知技術文獻] [專利文獻]Specifically, it is configured as follows: a male thread is formed on the boss of the fixing flange on the spindle side, and the boss is inserted into the blade and the front flange by locking the female thread of the fixing nut Tighten the male thread of the boss part, and clamp and fix the blade between the fixed flange and the front flange. [Literature Technical Literature] [Patent Literature]
[專利文獻1]日本特開2015-85466號公報[Patent Document 1] JP 2015-85466 A
[發明所欲解決的課題] 在如專利文獻1所揭露的切割裝置中,混入有因切割被加工物而產生的切割屑的切割水會成為汙水,此汙水會伴隨切割刀片的旋轉而在切割刀片周圍旋繞並附著在固定螺帽、凸緣及切割刀片。[The problem to be solved by the invention] In the cutting device disclosed in Patent Document 1, the cutting water mixed with the cutting chips generated by cutting the workpiece becomes sewage. This sewage will swirl around the cutting blade and adhere to the cutting blade as the cutting blade rotates. Fix nuts, flanges and cutting blades.
然後,汙水會滲入固定螺帽與固定凸緣之間的螺合部,之後當水分蒸發,會有切割屑固著在螺合部的螺紋之間而產生汙染物並導致固定螺帽變得無法從後側凸緣卸除的隱憂。Then, sewage will penetrate into the screw joint between the fixing nut and the fixing flange, and then when the water evaporates, the cutting chips will be fixed between the threads of the screw part to produce contaminants and cause the fixing nut to become The hidden worry that cannot be removed from the rear flange.
本發明有鑑於以上的問題,於是提供一種凸緣機構,防止切割屑成為汙染物滲入並固著在螺合部,而導致固定切割刀片的固定具變得無法卸除的疑慮。In view of the above problems, the present invention provides a flange mechanism to prevent the cutting chips from becoming contaminants from infiltrating and being fixed to the screw joints, which may cause the doubt that the fixing tool for fixing the cutting blades cannot be removed.
[解決課題的技術手段] 若根據本發明的一態樣,其為一種凸緣機構,將在中央形成有插通孔之切割刀片加以夾持並裝設在主軸的前端,該凸緣機構具備後側凸緣以及固定具;該後側凸緣具備:凸轂部,插通該切割刀片的該插通孔且在前端形成有公螺紋;以及凸緣部,從該凸轂部的後端部往徑方向突出且在前表面具有抵接該切割刀片的抵接面;該固定具形成有螺絲孔且相對於該後側凸緣固定該切割刀片,該螺絲孔在內周具有螺合該凸轂部的該公螺紋的母螺紋;該固定具的該螺絲孔是盲孔。[Technical means to solve the problem] According to one aspect of the present invention, it is a flange mechanism that clamps a cutting blade with an insertion hole formed in the center and mounts it on the front end of the main shaft. The flange mechanism includes a rear flange and a fixture ; The rear flange is provided with: a boss portion that is inserted through the insertion hole of the cutting blade and a male screw is formed at the front end; and a flange portion that protrudes in the radial direction from the rear end of the boss portion and in The front surface has an abutting surface for abutting the cutting blade; the fixing tool is formed with a screw hole and fixing the cutting blade with respect to the rear flange, and the screw hole has the male thread for screwing the boss portion on the inner periphery The female thread; the screw hole of the fixture is a blind hole.
又,該凸緣機構還具備前側凸緣,其在中央形成有供該凸轂部插入的插通孔並具有抵接該切割刀片的抵接面,且該前側凸緣與該後側凸緣一同夾持該切割刀片。In addition, the flange mechanism further includes a front flange having an insertion hole into which the boss portion is inserted in the center and an abutting surface for abutting the cutting blade, and the front flange and the rear flange Clamp the cutting blade together.
[發明功效] 若根據本發明的構成,因為相對於後側凸緣固定切割刀片的固定具是形成有螺絲孔且螺絲孔為盲孔,所以螺絲孔不會成為貫通孔;其中螺絲孔在內周具有母螺紋,其螺合後側凸緣的凸轂部的公螺紋。藉由此構成,汙水會難以滲入母螺紋與公螺紋之間,而能避免固定具固著在後側凸緣的不良狀況。[Efficacy of invention] According to the configuration of the present invention, because the fixture for fixing the cutting blade with respect to the rear flange is formed with a screw hole and the screw hole is a blind hole, the screw hole does not become a through hole; wherein the screw hole has a female thread on the inner periphery , It is screwed to the male thread of the boss of the rear flange. With this structure, it is difficult for the sewage to penetrate between the female thread and the male thread, and it is possible to avoid the problem of fixing the fixture to the rear flange.
以下適當地參考圖式,針對本發明的一實施方式做說明。
圖1所示的切割裝置1為藉由被圖3所示的凸緣機構30夾持並固定之切割刀片20來切割被加工物的加工裝置。Hereinafter, with appropriate reference to the drawings, an embodiment of the present invention will be described.
The cutting device 1 shown in FIG. 1 is a processing device that cuts a workpiece by the
如圖1所示,切割裝置1構成為包含卡盤台2、移動手段3、拍攝手段4以及切割手段5。被加工物雖未特別限定,但例如是板狀的半導體晶圓或光元件晶圓、板狀的無機材料基板、板狀的延展性材料等的板狀的各種加工材料。而在本實施方式中,是針對被加工物的表面形成有多條彼此垂直的分割預定線的情況做說明。As shown in FIG. 1, the cutting device 1 is configured to include a chuck table 2, a moving device 3, an
卡盤台2為吸引保持被加工物的構件。卡盤台2形成為圓盤狀,且上表面是形成為平行於水平方向的平面。卡盤台2是由多孔陶瓷所構成,並連接未圖示的真空吸引源。The chuck table 2 is a member that sucks and holds the workpiece. The chuck table 2 is formed in a disk shape, and the upper surface is a flat surface formed parallel to the horizontal direction. The chuck table 2 is made of porous ceramics, and is connected to a vacuum suction source (not shown).
移動手段3使卡盤台2與切割手段5在X軸方向、Y軸方向以及Z軸方向上相對移動。移動手段3構成為包含X軸移動手段3a、Y軸移動手段3b以及Z軸移動手段3c。X軸移動手段3a為可相對於本體部6在X軸方向(相當於切割進給方向)上相對移動地支撐著卡盤台2。Y軸移動手段3b為可相對於本體部6在Y軸方向(相當於分度進給方向)上相對移動地支撐著切割手段5。Z軸移動手段3c為可相對於本體部6在Z軸方向(相當於切入進給方向)上相對移動地支撐著切割手段5。各移動手段3a~3c例如是由馬達、滾珠螺桿、螺帽等所構成。The moving means 3 relatively moves the chuck table 2 and the cutting means 5 in the X-axis direction, the Y-axis direction, and the Z-axis direction. The moving means 3 is configured to include an X-axis moving means 3a, a Y-axis moving means 3b, and a Z-axis moving means 3c. The X-axis moving means 3 a supports the chuck table 2 so as to be relatively movable in the X-axis direction (corresponding to the cutting feed direction) with respect to the main body 6. The Y-axis moving means 3b supports the cutting means 5 so as to be relatively movable in the Y-axis direction (corresponding to the indexing feed direction) with respect to the main body 6. The Z-axis moving means 3c supports the cutting means 5 so as to be relatively movable in the Z-axis direction (corresponding to the cutting feed direction) with respect to the main body 6. Each of the moving
拍攝手段4是為了將切割手段5相對於被加工物的分割預定線(切割道)做對準調整而在切割加工前拍攝切割道的構件。拍攝手段4例如是使用CCD(Charge Coupled Device,電荷耦合元件)影像感測器的攝影機等。The imaging means 4 is a member for imaging the cutting path before the cutting process in order to adjust the alignment of the cutting means 5 with respect to the planned dividing line (cutting path) of the workpiece. The imaging means 4 is, for example, a camera using a CCD (Charge Coupled Device) image sensor.
切割手段5對被加工物施以切割加工。切割手段5如圖3所示,構成為包含旋轉驅動手段10、切割刀片20、凸緣機構30以及後側凸緣固定手段40。The cutting means 5 applies cutting processing to the workpiece. As shown in FIG. 3, the cutting means 5 is configured to include a rotation driving means 10, a
旋轉驅動手段10是以高速旋轉驅動切割刀片20的構件。旋轉驅動手段10具備主軸11、主軸外殼12以及未圖示的馬達。主軸11為其前端可裝卸地固定有凸緣機構30的構件,且相對於主軸外殼12可旋轉地被支撐著。The rotation driving means 10 is a member that drives the
如圖3與圖4所示,主軸11在其前端具有螺絲孔11a,螺絲孔11a形成有螺合後側凸緣固定手段40的母螺紋11b。主軸外殼12形成為筒狀,並藉由徑向空氣軸承與止推式空氣軸承而將插入於自身中的主軸11支撐為可旋轉。As shown in FIGS. 3 and 4, the
接著,基於圖2~圖4而針對凸緣機構的第一實施方式做說明。再者,為了說明上方便,是將圖2紙面中的左側作為前側,右側作為後側,上側作為上方,下側作為下方。Next, the first embodiment of the flange mechanism will be described based on FIGS. 2 to 4. In addition, for the convenience of description, the left side of the paper in FIG. 2 is referred to as the front side, the right side is referred to as the rear side, the upper side is referred to as the upper side, and the lower side is referred to as the lower side.
如圖2至圖4所示,輪轂型刀片22構成為將用以切割板狀物的切割刀片20一體地設在圓盤狀的輪轂基台21的外周部。切割刀片20構成為在環狀的板狀構件具備切割磨石,並例如是所謂的金屬結合劑刀片、樹脂結合劑刀片、陶瓷結合劑刀片等。As shown in FIGS. 2 to 4, the hub-
如圖4所示,在切割刀片20與輪轂基台21,分別在同心圓方向上形成有插通孔201、211。各插通孔201、211的內周則構成為凸轂部311的刀片裝設部311a可插入的內徑。As shown in FIG. 4, the
如圖2與圖3所示,凸緣機構30的後側凸緣31是將輪轂型刀片22可裝卸地夾持並固定在主軸11的前端。凸緣機構30構成為除了包含後側凸緣31之外,還包含後側凸緣固定手段40以及固定具50。As shown in FIGS. 2 and 3, the
如圖2與圖4所示,後側凸緣31整體上構成為大致圓盤狀,並構成為包含凸轂部311、主軸裝設部312以及凸緣部313。As shown in FIGS. 2 and 4, the
如圖4所示,凸轂部311從凸緣部313往軸方向前側突出並形成為圓筒狀,且在外周形成有刀片裝設部311a以及公螺紋311b。刀片裝設部311a支撐輪轂型刀片22的插通孔211的內周面211a。公螺紋311b形成在凸轂部311的軸方向前端部,並與固定具50的母螺紋521a螺合。公螺紋311b的外周形成為直徑比刀片裝設部311a的外周還小。As shown in FIG. 4, the
如圖4所示,主軸裝設部312是形成在後側凸緣31的軸方向上凸轂部311的相反側。在主軸裝設部312,主軸嵌合孔312a形成在同軸方向上且主軸嵌合孔312a嵌合主軸11。As shown in FIG. 4, the main
如圖4所示,凸緣部313形成在凸轂部311與主軸裝設部312之間的位置,而在凸緣部313的外周部的緣部,抵接切割刀片20的後表面201a的抵接面313a是形成為往前側突出。As shown in FIG. 4, the
如圖4所示,在凸轂部311的前端側適形設有內徑比主軸嵌合孔312a還大的大徑孔部314,並構成為收納後側凸緣固定手段40的螺栓頭部42的同時螺栓頭部42抵接大徑孔部314的邊界面314a。As shown in FIG. 4, a large-
如圖4所示,後側凸緣固定手段40將後側凸緣31可裝卸地固定在主軸11的前端。後側凸緣固定手段40構成為螺栓狀,而其螺栓頭部42是形成為可插入凸轂部311的大徑孔部314的大小,並構成為會抵接邊界面314a。藉由後側凸緣固定手段40的公螺紋41螺合主軸11的母螺紋11b,且同時螺栓頭部42推壓邊界面314a,從而後側凸緣31會固定在主軸11。而在螺栓頭部42形成有供六角板手等的工具插入的六角孔42a。As shown in FIG. 4, the rear flange fixing means 40 fixes the
如圖4所示,在輪轂型刀片22設有用以補強輪轂基台21的肋部212。肋部212在輪轂型刀片22的與切割刀片20相反側環狀地往後方突出而形成在插通孔211的周圍,並構成為固定具50的後表面50a可對肋部212的前表面212a抵接。藉此,在將固定具50鎖緊在凸轂部311的公螺紋311b時,構成為前表面212a與後表面50a彼此壓接。As shown in FIG. 4, the hub-
如圖4所示,固定具50將輪轂型刀片22可裝卸地固定在後側凸緣31。固定具50是由圓盤狀的構件所構成,且在固定具50的厚度方向螺絲孔521構成在同軸方向上,螺絲孔521的前側則由蓋部51所封住。在螺絲孔521形成有母螺紋521a,其螺合後側凸緣31的凸轂部311的公螺紋311b。藉由像這樣的構成,螺絲孔521是一側由蓋部51所封住,另一側則為開通狀態,也就是構成為所謂的「盲孔」。As shown in FIG. 4, the
如圖3與圖4所示,在固定具50的蓋部51的表面,於多個地方(在本實施例為4個地方)適形設有用以卡合後述的裝卸治具60(圖9)的卡合孔511,藉由旋轉固定具50,從而可進行固定具對後側凸緣31的裝卸。As shown in Figures 3 and 4, on the surface of the
用以上構成,並如圖3所示,將後側凸緣31插設在主軸11,再以後側凸緣固定手段40將兩者固定。接著將輪轂型刀片22裝設在後側凸緣31並以固定具50固定。而用以上所述方式,即實現圖2所示的狀態。With the above structure, and as shown in FIG. 3, the
接著,基於圖5~7針對凸緣機構的第二實施方式中相異於第一實施方式的點做說明。Next, based on FIGS. 5 to 7, a description will be given of the differences from the first embodiment in the second embodiment of the flange mechanism.
如圖5至圖7所示,第二實施方式的切割刀片20與前側凸緣32是個別地構成,而此點乃不同於使切割刀片20與輪轂基台21一體構成的第一實施方式的輪轂型刀片22。As shown in FIGS. 5 to 7, the
如圖5至圖7所示,在第二實施方式中凸緣機構30構成為包含後側凸緣31、前側凸緣32、後側凸緣固定手段40以及固定具50。As shown in FIGS. 5 to 7, in the second embodiment, the
如圖7所示,前側凸緣32在與後側凸緣31之間將切割刀片20加以夾持。前側凸緣32構成為環狀的圓板狀,並具備插通孔321、凸緣部322以及肋部324。As shown in FIG. 7, the
如圖7所示,前側凸緣32的插通孔321構成為與凸緣部322同軸狀地貫通,插通孔321的內周321a則具有對應凸轂部311的刀片裝設部311a的外周大小的內徑。As shown in FIG. 7, the
如圖7所示,在前側凸緣32的凸緣部322的外周部的緣部,形成有往後側突出的抵接面322a。此前側凸緣32的抵接面322a設置成面對後側凸緣31的抵接面313a。前側凸緣32的抵接面322a抵接切割刀片20的前表面201b,而後側凸緣31的抵接面313a則抵接切割刀片20的後表面201a,從而成為切割刀片20被夾持在兩抵接面322a、313a之間。As shown in FIG. 7, at the edge of the outer peripheral portion of the
如圖7所示,固定具50的後表面50a成為對前側凸緣32的肋部324的前表面324a抵接,在將固定具50鎖緊在凸轂部311的公螺紋311b時,構成為前表面324a與後表面50a彼此壓接。As shown in FIG. 7, the
用以上構成,並如圖6所示,將後側凸緣31插設在主軸11,再以後側凸緣固定手段40將兩者固定。接著相對於後側凸緣31依序裝設切割刀片20、前側凸緣32並將固定具50鎖緊在後側凸緣31,藉此切割刀片20會以被夾持在後側凸緣31與前側凸緣32之間的狀態固定。而用以上所述方式,即實現圖5所示的狀態。With the above structure, and as shown in FIG. 6, the
接著,針對切割裝置1中的切割刀片20的裝卸作業做說明。
圖8表示用於裝卸固定具50的裝卸治具60。又,圖9則表示使用扭力螺絲起子70的裝卸治具60的使用態樣。Next, the operation of attaching and detaching the
如圖8與圖9所示,裝卸治具60的整體是以圓柱形狀構成,並在前端部形成具有面對固定具50的蓋部51的底面之圓形凹部61,而在圓形凹部61的內周面,4個把持爪62是於圓周方向等間隔地分隔配置。把持爪62可在半徑方向彈性變形,且固定具50插入圓形凹部61時會產生壓縮,從而把持固定具50的蓋部51的外周。As shown in FIGS. 8 and 9, the entire assembly and
如圖8與圖9所示,在圓形凹部61的底面,藉由彈簧等的彈性構件,自底面伸縮自如的卡合銷64被配置在4個地方。卡合銷64插入設在固定具50的蓋部51的卡合孔511,並構成為可卡合的形狀。再者,設在底面的卡合銷亦可構成為固定地設在圓形凹部61的底面。As shown in FIG. 8 and FIG. 9, on the bottom surface of the
如圖9所示,在裝卸治具60的圓形凹部61的底面中心形成有用以插入扭力螺絲起子70的貫通孔63。在貫通孔63卡合有未圖示的六角形的卡合部,而對應此構造,在扭力螺絲起子70的前端部乃形成有六角形狀剖面的卡合部71。又,在扭力螺絲起子70的後端部側則設有用於旋轉作業的手把72。As shown in FIG. 9, a through
用以上所述方式構成的裝卸治具60與扭力螺絲起子70來進行固定具50的鎖緊。以下為針對圖2至圖4所示的第一實施方式做說明,惟關於圖5至圖7所示的第二實施方式在實施上亦相同。The mounting and dismounting
首先,如圖3與圖4所示,將後側凸緣31插設在主軸11,再以後側凸緣固定手段40將兩者固定。而在固定此後側凸緣固定手段40時亦可使用扭力螺絲起子70(圖9)。First, as shown in FIGS. 3 and 4, the
接著,如圖4所示,將輪轂型刀片22裝設在後側凸緣31的凸轂部311,並使切割刀片20的後表面201a成為對於後側凸緣31的抵接面313a抵接的狀態。Next, as shown in FIG. 4, the hub-shaped
接著,如圖4所示,將固定具50的母螺紋521a對適形設在後側凸緣的凸轂部311的公螺紋311b螺合並暫時鎖緊後,如圖9所示,使固定具50的蓋部51面對並插入裝卸治具60的圓形凹部61,並將卡合銷64插入卡合孔511,從而使裝卸治具60與固定具50一體化。Next, as shown in FIG. 4, the
接著,如圖9所示,將扭力螺絲起子70前端的卡合部71插入裝卸治具60的貫通孔63並對手把72賦予旋轉力加以旋轉,藉此能以預定的扭力將固定具50鎖固並固定。在鎖固固定具50後,即卸除裝卸治具60。Next, as shown in FIG. 9, insert the engaging
如圖2所示,當固定具50的組裝完成,則固定具50的後表面50a與輪轂型刀片22(輪轂基台21)的前表面212a彼此會壓接,而形成固定具50與輪轂型刀片22的邊界S被封閉的密閉狀態。As shown in FIG. 2, when the assembly of the
用以上所述方式完成固定具50的固定,則進行如圖10所示的切割加工。在切割加工時,使切割刀片20高速旋轉而進行保持在卡盤台2的晶圓7的切割加工。此時,切割液會朝向切割刀片20的下部與加工處連續供給,從而進行切割刀片20與晶圓7的冷卻。After completing the fixing of the
由此切割所產生的切割屑會混入切割液而產生汙水,惟因為在固定具50設有蓋部51且螺絲孔521(圖2)是構成為盲孔,所以可防止汙水往螺絲孔521滲入。The cutting chips produced by this cutting will be mixed with cutting fluid and produce sewage. However, because the
又,如圖2所示,因為邊界S被封閉而形成密閉狀態,所以亦能防止汙水經由該邊界S而滲入螺絲孔521。In addition, as shown in FIG. 2, since the boundary S is closed to form a sealed state, it is also possible to prevent sewage from penetrating into the
如以上所述,可防止混入切割屑的汙水滲入螺絲孔521且防止汙水滲入母螺紋521a與公螺紋311b之間的螺合部,從而能防止切割屑或汙水成為汙染物殘留並固著在螺合部,而導致固定具50變得難以卸除的不良狀況的發生。As described above, it is possible to prevent sewage mixed with cutting chips from penetrating into the
用以上所述方式即能實施本發明。
亦即,如圖2至圖7所示,
一種凸緣機構30,將在中央形成有插通孔201之切割刀片20加以夾持並裝設在主軸11的前端,凸緣機構30具備後側凸緣31以及固定具50;
後側凸緣31具備:
凸轂部311,插通切割刀片20的插通孔201且在前端形成有公螺紋311b;以及
凸緣部313,從凸轂部311的後端部往徑方向突出且在前表面具有抵接切割刀片20的抵接面313a;
固定具形成有螺絲孔521且相對於後側凸緣31固定切割刀片20,螺絲孔在內周具有螺合凸轂部311的公螺紋311b的母螺紋521a;
固定具50的螺絲孔521是盲孔。The present invention can be implemented in the manner described above.
That is, as shown in Figures 2 to 7,
A
藉此,能防止切割屑成為汙染物而滲入公螺紋311b與母螺紋521a之間的螺合部而導致固定切割刀片20的固定具50變得無法從後側凸緣31卸除。Thereby, it is possible to prevent the cutting chips from becoming contaminants and penetrating into the threaded portion between the
又,如圖5至圖7所示,
凸緣機構30還具備前側凸緣32,其在中央形成有供凸轂311部插入的插通孔321並具有抵接切割刀片20的抵接面322a,且前側凸緣32與後側凸緣31一同夾持切割刀片20。Also, as shown in Figures 5 to 7,
The
而像這樣,即使在切割刀片20與前側凸緣32是個別地構成的構造中亦能適用本發明。In this way, the present invention can also be applied to a structure in which the
10:旋轉驅動手段
11:主軸
11a:螺絲孔
11b:母螺紋
12:主軸外殼
20:切割刀片
21:輪轂基台
22:輪轂型刀片
30:凸緣機構
31:後側凸緣
32:前側凸緣
40:後側凸緣固定手段
41:公螺紋
50:固定具
51:蓋部
60:裝卸治具
70:扭力螺絲起子
311:凸轂部
311b:公螺紋
511:卡合孔
521:螺絲孔
521a:母螺紋
S:邊界10: Rotating drive means
11:
圖1為表示實施方式的切割裝置的構成例的立體圖。 圖2為表示第一實施方式的凸緣機構的構成例的剖面圖。 圖3為表示第一實施方式的凸緣機構的構成例的分解立體圖。 圖4為表示第一實施方式的凸緣機構的構成例的分解剖面圖。 圖5為表示第二實施方式的凸緣機構的構成例的剖面圖。 圖6為表示第二實施方式的凸緣機構的構成例的分解立體圖。 圖7為表示第二實施方式的凸緣機構的構成例的分解剖面圖。 圖8為表示實施方式的裝卸治具的立體圖。 圖9為表示實施方式的裝卸治具的使用態樣的立體圖。 圖10為表示由具備實施方式的凸緣機構之切割裝置的切割手段所做的被加工物的切割加工狀況的示意圖。Fig. 1 is a perspective view showing a configuration example of a cutting device according to an embodiment. Fig. 2 is a cross-sectional view showing a configuration example of the flange mechanism of the first embodiment. Fig. 3 is an exploded perspective view showing a configuration example of the flange mechanism of the first embodiment. Fig. 4 is an exploded cross-sectional view showing a configuration example of the flange mechanism of the first embodiment. Fig. 5 is a cross-sectional view showing a configuration example of a flange mechanism of a second embodiment. Fig. 6 is an exploded perspective view showing a configuration example of the flange mechanism of the second embodiment. Fig. 7 is an exploded cross-sectional view showing a configuration example of the flange mechanism of the second embodiment. Fig. 8 is a perspective view showing the attachment and detachment jig of the embodiment. Fig. 9 is a perspective view showing how the attachment and detachment jig of the embodiment is used. Fig. 10 is a schematic diagram showing the cutting process of the workpiece by the cutting means of the cutting device provided with the flange mechanism of the embodiment.
11:主軸 11: Spindle
11a:螺絲孔 11a: Screw hole
11b:母螺紋 11b: Female thread
20:切割刀片 20: Cutting blade
21:輪轂基台 21: Hub abutment
22:輪轂型刀片 22: Hub type blade
31:後側凸緣 31: Rear flange
40:後側凸緣固定手段 40: Rear flange fixing means
41:公螺紋 41: male thread
42:螺栓頭部 42: Bolt head
42a:六角孔 42a: Hexagonal hole
50:固定具 50: Fixture
50a:後表面 50a: rear surface
51:蓋部 51: Lid
201:插通孔 201: Through hole
201a:後表面 201a: rear surface
201b:前表面 201b: Front surface
211:插通孔 211: Through hole
211a:內周面 211a: inner peripheral surface
212:肋部 212: rib
212a:前表面 212a: front surface
311:凸轂部 311: boss
311a:刀片裝設部 311a: Blade installation part
311b:公螺紋 311b: male thread
312:主軸裝設部 312: Spindle Installation Department
312a:主軸嵌合孔 312a: Spindle fitting hole
313:凸緣部 313: Flange
313a:抵接面 313a: abutment surface
314:大徑孔部 314: Large diameter hole
314a:邊界面 314a: boundary surface
511:卡合孔 511: snap hole
521:螺絲孔 521: screw hole
521a:母螺紋 521a: Female thread
Claims (2)
Applications Claiming Priority (2)
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JP2019-151703 | 2019-08-22 | ||
JP2019151703A JP7446067B2 (en) | 2019-08-22 | 2019-08-22 | flange mechanism |
Publications (1)
Publication Number | Publication Date |
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TW202108298A true TW202108298A (en) | 2021-03-01 |
Family
ID=74674619
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW109128249A TW202108298A (en) | 2019-08-22 | 2020-08-19 | Flange mechanism preventing cutting debris as a contamination from entering and sticking to a screwed portion |
Country Status (4)
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JP (1) | JP7446067B2 (en) |
KR (1) | KR20210023685A (en) |
CN (1) | CN112405290A (en) |
TW (1) | TW202108298A (en) |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS5711717Y2 (en) * | 1979-01-17 | 1982-03-08 | ||
JPS5932354U (en) * | 1982-08-20 | 1984-02-28 | 三菱自動車工業株式会社 | cylindrical grinder |
JPH065080Y2 (en) * | 1986-05-13 | 1994-02-09 | 嚴一 佐藤 | Tool mounting jig |
JPH04201203A (en) * | 1990-11-29 | 1992-07-22 | Toshiba Corp | Dicing device |
JP2002039240A (en) * | 2000-07-24 | 2002-02-06 | Asmo Co Ltd | Motor for electric brake device |
US7588484B2 (en) * | 2006-01-19 | 2009-09-15 | Nao Enterprises, Inc. | Mounting system for grinding wheels and the like |
DE102006000360A1 (en) * | 2006-07-20 | 2008-01-24 | Hilti Ag | Tool holder for a disk-shaped tool |
JP2008084636A (en) | 2006-09-27 | 2008-04-10 | Toshiba Fuel Cell Power Systems Corp | Fuel cell system |
EP2123380A4 (en) * | 2007-01-09 | 2011-10-12 | Makita Corp | Rotary blade tool fixing device |
JP5184250B2 (en) * | 2008-08-01 | 2013-04-17 | 株式会社ディスコ | Cutting equipment |
JP2011194477A (en) * | 2010-03-17 | 2011-10-06 | Disco Corp | Cutting blade |
JP2015085466A (en) | 2013-10-31 | 2015-05-07 | 株式会社ディスコ | Flange mechanism |
JP6769680B2 (en) * | 2016-11-11 | 2020-10-14 | 株式会社ディスコ | Flange mechanism |
JP6855117B2 (en) * | 2017-03-06 | 2021-04-07 | 株式会社ディスコ | Flange mechanism |
JP7018724B2 (en) * | 2017-08-15 | 2022-02-14 | 株式会社ディスコ | Cutting blade and mounting mechanism of cutting blade |
-
2019
- 2019-08-22 JP JP2019151703A patent/JP7446067B2/en active Active
-
2020
- 2020-07-21 KR KR1020200090122A patent/KR20210023685A/en unknown
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JP2021030348A (en) | 2021-03-01 |
JP7446067B2 (en) | 2024-03-08 |
KR20210023685A (en) | 2021-03-04 |
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