TW202108298A - Flange mechanism preventing cutting debris as a contamination from entering and sticking to a screwed portion - Google Patents

Abstract

This invention aims to provide a flange mechanism for preventing cutting debris as a contamination from entering and sticking to a screwed portion, which will be a concern that a fixing tool for fixing a cutting blade cannot be dismounted. A flange mechanism 30 sandwiches a cutting blade 20 having insertion hole 201 at the center and attaches it to the front end of the spindle 11. The flange mechanism 30 has a rear flange 31 and a fixing tool 50. The rear flange has a boss portion 311 that is inserted into the insertion hole 201 of the cutting blade 20 and has a male thread 311b formed at the front end; and a flange portion 313 protruding from the rear portion of the boss portion 311 in the radial direction and having an abutting surface 313a abutting the cutting blade 20 on the front surface. The fixing tool has a screw hole 521 and fixes the cutting blade 20 relative to the rear flange 31, and the screw hole has a female thread 521a at the inner circumference screwed on the male thread 311b of the boss portion 311. The screw hole 521 of the fixing tool 50 is a blind hole.

Description

Flange mechanism

The invention relates to a flange mechanism, which clamps and installs a cutting blade on the front end of a main shaft.

Conventionally, as disclosed in Patent Document 1, there is known a configuration in which a pair of flanges clamps the blade and mounts the blade on the main shaft of the cutting device.

Specifically, it is configured as follows: a male thread is formed on the boss of the fixing flange on the spindle side, and the boss is inserted into the blade and the front flange by locking the female thread of the fixing nut Tighten the male thread of the boss part, and clamp and fix the blade between the fixed flange and the front flange. [Literature Technical Literature] [Patent Literature]

[Patent Document 1] JP 2015-85466 A

[The problem to be solved by the invention] In the cutting device disclosed in Patent Document 1, the cutting water mixed with the cutting chips generated by cutting the workpiece becomes sewage. This sewage will swirl around the cutting blade and adhere to the cutting blade as the cutting blade rotates. Fix nuts, flanges and cutting blades.

Then, sewage will penetrate into the screw joint between the fixing nut and the fixing flange, and then when the water evaporates, the cutting chips will be fixed between the threads of the screw part to produce contaminants and cause the fixing nut to become The hidden worry that cannot be removed from the rear flange.

In view of the above problems, the present invention provides a flange mechanism to prevent the cutting chips from becoming contaminants from infiltrating and being fixed to the screw joints, which may cause the doubt that the fixing tool for fixing the cutting blades cannot be removed.

[Technical means to solve the problem] According to one aspect of the present invention, it is a flange mechanism that clamps a cutting blade with an insertion hole formed in the center and mounts it on the front end of the main shaft. The flange mechanism includes a rear flange and a fixture ; The rear flange is provided with: a boss portion that is inserted through the insertion hole of the cutting blade and a male screw is formed at the front end; and a flange portion that protrudes in the radial direction from the rear end of the boss portion and in The front surface has an abutting surface for abutting the cutting blade; the fixing tool is formed with a screw hole and fixing the cutting blade with respect to the rear flange, and the screw hole has the male thread for screwing the boss portion on the inner periphery The female thread; the screw hole of the fixture is a blind hole.

In addition, the flange mechanism further includes a front flange having an insertion hole into which the boss portion is inserted in the center and an abutting surface for abutting the cutting blade, and the front flange and the rear flange Clamp the cutting blade together.

[Efficacy of invention] According to the configuration of the present invention, because the fixture for fixing the cutting blade with respect to the rear flange is formed with a screw hole and the screw hole is a blind hole, the screw hole does not become a through hole; wherein the screw hole has a female thread on the inner periphery , It is screwed to the male thread of the boss of the rear flange. With this structure, it is difficult for the sewage to penetrate between the female thread and the male thread, and it is possible to avoid the problem of fixing the fixture to the rear flange.

Hereinafter, with appropriate reference to the drawings, an embodiment of the present invention will be described. The cutting device 1 shown in FIG. 1 is a processing device that cuts a workpiece by the cutting blade 20 clamped and fixed by the flange mechanism 30 shown in FIG. 3.

As shown in FIG. 1, the cutting device 1 is configured to include a chuck table 2, a moving device 3, an imaging device 4, and a cutting device 5. The object to be processed is not particularly limited, but is, for example, various plate-shaped processed materials such as a plate-shaped semiconductor wafer or an optical element wafer, a plate-shaped inorganic material substrate, and a plate-shaped ductile material. In this embodiment, a description is given of a case where a plurality of planned dividing lines perpendicular to each other are formed on the surface of the workpiece.

The chuck table 2 is a member that sucks and holds the workpiece. The chuck table 2 is formed in a disk shape, and the upper surface is a flat surface formed parallel to the horizontal direction. The chuck table 2 is made of porous ceramics, and is connected to a vacuum suction source (not shown).

The moving means 3 relatively moves the chuck table 2 and the cutting means 5 in the X-axis direction, the Y-axis direction, and the Z-axis direction. The moving means 3 is configured to include an X-axis moving means 3a, a Y-axis moving means 3b, and a Z-axis moving means 3c. The X-axis moving means 3 a supports the chuck table 2 so as to be relatively movable in the X-axis direction (corresponding to the cutting feed direction) with respect to the main body 6. The Y-axis moving means 3b supports the cutting means 5 so as to be relatively movable in the Y-axis direction (corresponding to the indexing feed direction) with respect to the main body 6. The Z-axis moving means 3c supports the cutting means 5 so as to be relatively movable in the Z-axis direction (corresponding to the cutting feed direction) with respect to the main body 6. Each of the moving means 3a to 3c is constituted by, for example, a motor, a ball screw, a nut, and the like.

The imaging means 4 is a member for imaging the cutting path before the cutting process in order to adjust the alignment of the cutting means 5 with respect to the planned dividing line (cutting path) of the workpiece. The imaging means 4 is, for example, a camera using a CCD (Charge Coupled Device) image sensor.

The cutting means 5 applies cutting processing to the workpiece. As shown in FIG. 3, the cutting means 5 is configured to include a rotation driving means 10, a cutting blade 20, a flange mechanism 30, and a rear flange fixing means 40.

The rotation driving means 10 is a member that drives the cutting blade 20 in a high-speed rotation. The rotation driving means 10 includes a main shaft 11, a main shaft housing 12, and a motor (not shown). The main shaft 11 is a member in which the flange mechanism 30 is detachably fixed at the front end thereof, and is rotatably supported with respect to the main shaft housing 12.

As shown in FIGS. 3 and 4, the main shaft 11 has a screw hole 11 a at the front end thereof, and the screw hole 11 a is formed with a female thread 11 b for screwing the rear flange fixing means 40. The main shaft housing 12 is formed in a cylindrical shape, and the main shaft 11 inserted into the main shaft 11 is rotatably supported by a radial air bearing and a thrust air bearing.

Next, the first embodiment of the flange mechanism will be described based on FIGS. 2 to 4. In addition, for the convenience of description, the left side of the paper in FIG. 2 is referred to as the front side, the right side is referred to as the rear side, the upper side is referred to as the upper side, and the lower side is referred to as the lower side.

As shown in FIGS. 2 to 4, the hub-shaped blade 22 is configured by integrally providing a cutting blade 20 for cutting a plate-like object on the outer peripheral portion of a disc-shaped hub base 21. The cutting blade 20 is configured to include a cutting grindstone on an annular plate-shaped member, and is, for example, a so-called metal bond blade, a resin bond blade, a ceramic bond blade, or the like.

As shown in FIG. 4, the cutting blade 20 and the hub base 21 are respectively formed with insertion holes 201 and 211 in the direction of a concentric circle. The inner circumference of each insertion hole 201, 211 is configured as an inner diameter into which the blade mounting portion 311a of the boss portion 311 can be inserted.

As shown in FIGS. 2 and 3, the rear flange 31 of the flange mechanism 30 clamps and fixes the hub-shaped blade 22 to the front end of the main shaft 11 detachably. The flange mechanism 30 is configured to include a rear flange fixing means 40 and a fixture 50 in addition to the rear flange 31.

As shown in FIGS. 2 and 4, the rear flange 31 is configured as a substantially disc shape as a whole, and is configured to include a boss portion 311, a main shaft mounting portion 312, and a flange portion 313.

As shown in FIG. 4, the boss portion 311 protrudes from the flange portion 313 toward the front side in the axial direction and is formed in a cylindrical shape, and a blade mounting portion 311a and a male screw 311b are formed on the outer periphery. The blade mounting portion 311 a supports the inner peripheral surface 211 a of the insertion hole 211 of the hub-shaped blade 22. The male screw 311b is formed at the axial front end portion of the boss portion 311, and is screwed with the female screw 521a of the fixture 50. The outer circumference of the male screw 311b is formed to be smaller in diameter than the outer circumference of the blade mounting portion 311a.

As shown in FIG. 4, the main shaft mounting portion 312 is formed on the opposite side of the boss portion 311 in the axial direction of the rear flange 31. In the spindle mounting portion 312, a spindle fitting hole 312a is formed in the coaxial direction and the spindle fitting hole 312a is fitted with the spindle 11.

As shown in FIG. 4, the flange portion 313 is formed at a position between the boss portion 311 and the spindle mounting portion 312, and the edge of the outer peripheral portion of the flange portion 313 abuts against the rear surface 201a of the cutting blade 20 The contact surface 313a is formed to protrude forward.

As shown in FIG. 4, a large-diameter hole portion 314 having an inner diameter larger than that of the spindle fitting hole 312a is conformally provided on the front end side of the boss portion 311, and is configured to accommodate the bolt head of the rear flange fixing means 40 At the same time, the bolt head 42 abuts against the boundary surface 314a of the large-diameter hole 314.

As shown in FIG. 4, the rear flange fixing means 40 fixes the rear flange 31 to the front end of the main shaft 11 detachably. The rear flange fixing means 40 is configured in the shape of a bolt, and the bolt head 42 is formed into a size that can be inserted into the large-diameter hole 314 of the boss 311, and is configured to abut the boundary surface 314a. The male thread 41 of the rear flange fixing means 40 is screwed to the female thread 11 b of the main shaft 11, and at the same time, the bolt head 42 presses the boundary surface 314 a, so that the rear flange 31 is fixed to the main shaft 11. On the bolt head 42, a hexagon hole 42 a into which a tool such as a hexagon wrench is inserted is formed.

As shown in FIG. 4, the hub-shaped blade 22 is provided with a rib 212 for reinforcing the hub base 21. The rib 212 protrudes annularly and rearwardly on the side opposite to the cutting blade 20 of the hub blade 22 and is formed around the insertion hole 211, and is configured such that the rear surface 50a of the fixture 50 can be opposed to the front surface 212a of the rib 212 Abut. Thereby, when the fixture 50 is locked to the male thread 311b of the boss portion 311, the front surface 212a and the rear surface 50a are configured to be in pressure contact with each other.

As shown in FIG. 4, the fixture 50 fixes the hub-shaped blade 22 to the rear flange 31 detachably. The fixing tool 50 is composed of a disc-shaped member, and the screw hole 521 in the thickness direction of the fixing tool 50 is formed in the coaxial direction, and the front side of the screw hole 521 is sealed by the cover 51. A female screw 521a is formed in the screw hole 521, and the male screw 311b of the boss portion 311 of the rear flange 31 is screwed. With such a configuration, one side of the screw hole 521 is closed by the cover 51, and the other side is in an open state, that is, it is configured as a so-called "blind hole."

As shown in Figures 3 and 4, on the surface of the cover 51 of the fixture 50, a plurality of places (four places in this embodiment) are conformally provided with a mounting and dismounting jig 60 (Figure 9). ), by rotating the fixing device 50, the fixing device can be attached to and detached from the rear flange 31.

With the above structure, and as shown in FIG. 3, the rear flange 31 is inserted into the main shaft 11, and the rear flange fixing means 40 fixes the two. Then, the hub-shaped blade 22 is installed on the rear flange 31 and fixed with the fixture 50. In the above-mentioned way, the state shown in Fig. 2 is realized.

Next, based on FIGS. 5 to 7, a description will be given of the differences from the first embodiment in the second embodiment of the flange mechanism.

As shown in FIGS. 5 to 7, the cutting blade 20 and the front flange 32 of the second embodiment are separately constructed, and this point is different from the first embodiment in which the cutting blade 20 and the hub base 21 are integrally constructed Hub type blade 22.

As shown in FIGS. 5 to 7, in the second embodiment, the flange mechanism 30 is configured to include a rear flange 31, a front flange 32, a rear flange fixing means 40, and a fixture 50.

As shown in FIG. 7, the front flange 32 clamps the cutting blade 20 between the front flange 32 and the rear flange 31. The front flange 32 is configured in an annular disc shape, and includes an insertion hole 321, a flange portion 322, and a rib portion 324.

As shown in FIG. 7, the insertion hole 321 of the front flange 32 is configured to penetrate coaxially with the flange portion 322, and the inner periphery 321a of the insertion hole 321 has an outer periphery corresponding to the blade mounting portion 311a of the boss portion 311 The size of the inner diameter.

As shown in FIG. 7, at the edge of the outer peripheral portion of the flange portion 322 of the front flange 32, a contact surface 322a protruding to the rear side is formed. The abutting surface 322 a of the front flange 32 is provided to face the abutting surface 313 a of the rear flange 31. The abutting surface 322a of the front flange 32 abuts the front surface 201b of the cutting blade 20, and the abutting surface 313a of the rear flange 31 abuts the rear surface 201a of the cutting blade 20, thereby forming the cutting blade 20 clamped between the two Between the abutting surfaces 322a and 313a.

As shown in FIG. 7, the rear surface 50a of the fixture 50 abuts against the front surface 324a of the rib 324 of the front flange 32, and when the fixture 50 is locked to the male thread 311b of the boss portion 311, it is configured as The front surface 324a and the rear surface 50a are in pressure contact with each other.

With the above structure, and as shown in FIG. 6, the rear flange 31 is inserted into the main shaft 11, and the rear flange fixing means 40 fixes the two. Then, the cutting blade 20 and the front flange 32 are installed in sequence with respect to the rear flange 31 and the fixture 50 is locked to the rear flange 31, whereby the cutting blade 20 will be clamped on the rear flange 31 The state with the front flange 32 is fixed. In the above-mentioned way, the state shown in Fig. 5 is realized.

Next, the operation of attaching and detaching the cutting blade 20 in the cutting device 1 will be described. FIG. 8 shows a loading and unloading jig 60 used for loading and unloading the fixture 50. In addition, FIG. 9 shows the usage state of the attachment and detachment jig 60 using the torque screwdriver 70.

As shown in FIGS. 8 and 9, the entire assembly and disassembly jig 60 is formed in a cylindrical shape, and a circular recess 61 facing the bottom surface of the cover 51 of the fixture 50 is formed at the front end, and the circular recess 61 On the inner peripheral surface of the 4 grip claws 62 are spaced apart at equal intervals in the circumferential direction. The gripping claw 62 can be elastically deformed in the radial direction, and when the fixture 50 is inserted into the circular recess 61, compression occurs, thereby gripping the outer periphery of the cover 51 of the fixture 50.

As shown in FIG. 8 and FIG. 9, on the bottom surface of the circular recess 61, the engagement pins 64 that can expand and contract from the bottom surface are arranged at four places by an elastic member such as a spring. The engaging pin 64 is inserted into the engaging hole 511 provided in the cover 51 of the fixture 50, and is configured in a shape that can be engaged. Furthermore, the engaging pin provided on the bottom surface may be configured to be fixedly provided on the bottom surface of the circular recess 61.

As shown in FIG. 9, a through hole 63 for inserting a torsion screwdriver 70 is formed in the center of the bottom surface of the circular recess 61 of the attachment/detachment jig 60. An unillustrated hexagonal engagement portion is engaged with the through hole 63, and corresponding to this structure, an engagement portion 71 with a hexagonal cross-section is formed at the tip of the torque screwdriver 70. In addition, on the rear end side of the torque screwdriver 70, a handle 72 for rotating work is provided.

The mounting and dismounting jig 60 and the torsion screwdriver 70 constructed as described above are used to lock the fixture 50. The following is a description of the first embodiment shown in FIGS. 2 to 4, but the second embodiment shown in FIGS. 5 to 7 is also the same in implementation.

First, as shown in FIGS. 3 and 4, the rear flange 31 is inserted into the main shaft 11, and the rear flange fixing means 40 fixes both. A torsion screwdriver 70 can also be used when fixing the rear flange fixing means 40 (FIG. 9 ).

Next, as shown in FIG. 4, the hub-shaped blade 22 is mounted on the boss portion 311 of the rear flange 31, and the rear surface 201a of the cutting blade 20 becomes abutting against the contact surface 313a of the rear flange 31 status.

Next, as shown in FIG. 4, the female thread 521a of the fixture 50 is screwed to the male thread 311b of the boss portion 311 of the rear flange and temporarily locked, as shown in FIG. The cover 51 of the 50 faces and is inserted into the circular recess 61 of the mounting and dismounting jig 60, and the engaging pin 64 is inserted into the engaging hole 511, so that the mounting and dismounting jig 60 and the fixture 50 are integrated.

Next, as shown in FIG. 9, insert the engaging portion 71 at the tip of the torque screwdriver 70 into the through hole 63 of the attachment and detachment jig 60 and apply a rotating force to the hand 72 to rotate, thereby locking the fixture 50 with a predetermined torque. Solid and fixed. After the fixture 50 is locked, the loading and unloading jig 60 is removed.

As shown in FIG. 2, when the assembly of the fixture 50 is completed, the rear surface 50a of the fixture 50 and the front surface 212a of the hub-shaped blade 22 (the hub base 21) are pressed against each other to form the fixture 50 and the hub-type A closed state where the boundary S of the blade 22 is closed.

After completing the fixing of the fixture 50 in the above-mentioned manner, the cutting process as shown in FIG. 10 is performed. In the dicing process, the dicing blade 20 is rotated at a high speed to perform the dicing process of the wafer 7 held by the chuck table 2. At this time, the dicing fluid is continuously supplied toward the lower part of the dicing blade 20 and the processing location, so that the dicing blade 20 and the wafer 7 are cooled.

The cutting chips produced by this cutting will be mixed with cutting fluid and produce sewage. However, because the fixture 50 is provided with a cover 51 and the screw hole 521 (Figure 2) is configured as a blind hole, it can prevent sewage from flowing into the screw hole 521 Infiltrate.

In addition, as shown in FIG. 2, since the boundary S is closed to form a sealed state, it is also possible to prevent sewage from penetrating into the screw hole 521 through the boundary S.

As described above, it is possible to prevent sewage mixed with cutting chips from penetrating into the screw hole 521 and prevent sewage from penetrating into the threaded portion between the female thread 521a and the male thread 311b, thereby preventing the cutting chips or sewage from becoming contaminants remaining and solidifying. It is attached to the screw part, which causes the occurrence of a problem that the fixture 50 becomes difficult to remove.

The present invention can be implemented in the manner described above. That is, as shown in Figures 2 to 7, A flange mechanism 30 that clamps the cutting blade 20 with an insertion hole 201 formed in the center and mounts it on the front end of the main shaft 11. The flange mechanism 30 includes a rear flange 31 and a fixture 50; The rear flange 31 has: The boss portion 311 penetrates the insertion hole 201 of the cutting blade 20 and has a male thread 311b formed at the front end; and The flange portion 313 protrudes in the radial direction from the rear end of the boss portion 311 and has an abutting surface 313a on the front surface that abuts the cutting blade 20; The fixing tool is formed with a screw hole 521 and fixes the cutting blade 20 with respect to the rear flange 31, and the screw hole has a female thread 521a on the inner circumference of the male thread 311b of the boss portion 311; The screw hole 521 of the fixture 50 is a blind hole.

Thereby, it is possible to prevent the cutting chips from becoming contaminants and penetrating into the threaded portion between the male thread 311b and the female thread 521a, and the fixture 50 for fixing the cutting blade 20 cannot be removed from the rear flange 31.

Also, as shown in Figures 5 to 7, The flange mechanism 30 further includes a front flange 32 having an insertion hole 321 into which the boss 311 is inserted in the center and an abutting surface 322a for abutting the cutting blade 20, and the front flange 32 and the rear flange 31 clamps the cutting blade 20 together.

In this way, the present invention can also be applied to a structure in which the cutting blade 20 and the front flange 32 are configured separately.

10: Rotating drive means 11: Spindle 11a: Screw hole 11b: Female thread 12: Spindle housing 20: Cutting blade 21: Hub abutment 22: Hub type blade 30: Flange mechanism 31: Rear flange 32: Front flange 40: Rear flange fixing means 41: male thread 50: Fixture 51: Lid 60: loading and unloading fixture 70: Torque screwdriver 311: boss 311b: male thread 511: snap hole 521: screw hole 521a: Female thread S: boundary

Fig. 1 is a perspective view showing a configuration example of a cutting device according to an embodiment. Fig. 2 is a cross-sectional view showing a configuration example of the flange mechanism of the first embodiment. Fig. 3 is an exploded perspective view showing a configuration example of the flange mechanism of the first embodiment. Fig. 4 is an exploded cross-sectional view showing a configuration example of the flange mechanism of the first embodiment. Fig. 5 is a cross-sectional view showing a configuration example of a flange mechanism of a second embodiment. Fig. 6 is an exploded perspective view showing a configuration example of the flange mechanism of the second embodiment. Fig. 7 is an exploded cross-sectional view showing a configuration example of the flange mechanism of the second embodiment. Fig. 8 is a perspective view showing the attachment and detachment jig of the embodiment. Fig. 9 is a perspective view showing how the attachment and detachment jig of the embodiment is used. Fig. 10 is a schematic diagram showing the cutting process of the workpiece by the cutting means of the cutting device provided with the flange mechanism of the embodiment.

11: Spindle

11a: Screw hole

11b: Female thread

20: Cutting blade

21: Hub abutment

22: Hub type blade

31: Rear flange

40: Rear flange fixing means

41: male thread

42: Bolt head

42a: Hexagonal hole

50: Fixture

50a: rear surface

51: Lid

201: Through hole

201a: rear surface

201b: Front surface

211: Through hole

211a: inner peripheral surface

212: rib

212a: front surface

311: boss

311a: Blade installation part

311b: male thread

312: Spindle Installation Department

312a: Spindle fitting hole

313: Flange

313a: abutment surface

314: Large diameter hole

314a: boundary surface

511: snap hole

521: screw hole

521a: Female thread

Claims (2)

A flange mechanism that clamps a cutting blade with an insertion hole formed in the center and installs it on the front end of the spindle, The flange mechanism is provided with a rear flange and a fixture; The rear flange has: A boss portion inserted through the insertion hole of the cutting blade and a male thread is formed at the front end; and A flange portion protruding in the radial direction from the rear end of the boss portion and having an abutting surface on the front surface that abuts the cutting blade; The fixing tool is formed with a screw hole and fixes the cutting blade relative to the rear flange, and the screw hole has a female thread for screwing the male thread of the boss portion on the inner periphery; The screw hole of the fixture is a blind hole. Such as the flange mechanism of claim 1, in which, The flange mechanism further includes a front flange having an insertion hole formed in the center for inserting the boss portion and an abutting surface for abutting the cutting blade, and the front flange and the rear flange are clamped together Hold the cutting blade.

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