TW202108286A - Tray conveying device and tray conveying method wherein the tray conveying device is provided with a conveying rail, a tray conveying unit, a fluid rail, and a fluid supply and suction unit - Google Patents

Tray conveying device and tray conveying method wherein the tray conveying device is provided with a conveying rail, a tray conveying unit, a fluid rail, and a fluid supply and suction unit Download PDF

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TW202108286A
TW202108286A TW109126965A TW109126965A TW202108286A TW 202108286 A TW202108286 A TW 202108286A TW 109126965 A TW109126965 A TW 109126965A TW 109126965 A TW109126965 A TW 109126965A TW 202108286 A TW202108286 A TW 202108286A
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Taiwan
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rail
fluid
tray
pallet
conveying
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TW109126965A
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Chinese (zh)
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杉本進司
小野田雅也
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日商日特有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/003Cyclically moving conveyors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1426Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices
    • B23Q7/1447Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices using endless conveyors

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Feeding Of Workpieces (AREA)

Abstract

A tray conveying device comprises a conveying rail for moving a tray on which a fluid pressure device is carried; a tray conveying unit for transporting the tray carried on the conveying rail; a fluid rail arranged along the conveying rail and having a fluid passage formed therein; and a fluid supply and suction unit arranged to be in communication with the fluid passage for supplying fluid to the fluid passage or drawing the fluid from the fluid passage. A plurality of through holes are formed on the fluid rail to communicate the fluid passage with the exterior. An opposed member and a connecting channel are provided on the tray. The opposed member is formed with a recess covering a part of the plurality of through holes, and the opposed member is opposed to the fluid rail. The connecting channel connects the recess with the fluid pressure device.

Description

托盤搬運裝置及托盤搬運方法Pallet conveying device and pallet conveying method

本發明涉及托盤搬運裝置以及托盤搬運方法。The present invention relates to a pallet conveying device and a pallet conveying method.

以往,在生產線上存在搬運裝置,該搬運裝置用輸送帶搬運工件,搬運目的地的工具機對工件實施預定加工。然而,利用以往的搬運裝置,例如將定子等重量較大的工件搭載於輸送帶而搬運的情況下,在使工件的搬運停止時作用於工件的慣性力較大。因此,存在以下不良情況,即,很難提高搬運速度,很難通過阻擋件來進行準確定位的不良情況。Conventionally, there is a conveying device on a production line, and the conveying device conveys a workpiece with a conveyor belt, and the machine tool of the conveying destination performs predetermined processing on the workpiece. However, with the conventional conveying device, when a heavy workpiece such as a stator is mounted on a conveyor belt and conveyed, the inertial force acting on the workpiece is large when the conveyance of the workpiece is stopped. Therefore, there are disadvantages in that it is difficult to increase the conveyance speed, and it is difficult to accurately position the stopper.

為了解決上述不良情況,例如在日本專利公開公報特開2007-21629號中提出了一種托盤搬運裝置,該托盤搬運裝置相對於工具機透過四角形的軌道而對搭載了工件的多個托盤進行搬運。在該托盤搬運裝置中,將多個托盤搭載於軌道,將多個托盤夾持在左托盤搬運機構以及右托盤搬運機構之間,並以被夾持的狀態將多個托盤移動一個托盤的距離進行搬運。In order to solve the above-mentioned problems, for example, Japanese Patent Laid-Open Publication No. 2007-21629 proposes a pallet conveying device that conveys a plurality of pallets on which workpieces are mounted with respect to a machine tool through a quadrangular rail. In this pallet conveying device, a plurality of pallets are mounted on a rail, a plurality of pallets are clamped between a left pallet conveying mechanism and a right pallet conveying mechanism, and the plurality of pallets are moved by a distance of one pallet in a clamped state Carry out.

近年,在托盤上搭載透過流體壓力而運作的流體壓力設備,並透過使該流體壓力設備運作而搬運托盤的要求漸增。In recent years, a fluid pressure device that operates under fluid pressure is mounted on a pallet, and the demand for handling the pallet by operating the fluid pressure device has gradually increased.

然而,當在托盤上搭載流體壓力設備時,也需要在托盤上搭載供給流體或者吸引流體而使流體壓力設備運作的流體供給吸引單元。而且,還存在以下不良情況,即,托盤的重量增加,並且托盤上的工件搭載區域減少、工件的有效搬運變困難的不良情況。However, when a fluid pressure device is mounted on a tray, it is also necessary to mount a fluid supply suction unit that supplies fluid or sucks fluid to operate the fluid pressure device on the tray. In addition, there are also disadvantages in that the weight of the pallet increases, and the workpiece loading area on the pallet decreases, and the effective conveyance of the workpiece becomes difficult.

此外,在將多個托盤搭載於搬運軌進行搬運的情況下,當在多個托盤上分別搭載流體壓力設備時,也需要將使流體壓力設備運作的流體供給吸引單元分別搭載在多個托盤上。並且,由於需要與托盤的數量相同的流體供給吸引單元,因此仍然存在托盤搬運裝置的單價過高的問題。In addition, when a plurality of trays are loaded on a conveyance rail for transportation, when a fluid pressure device is mounted on a plurality of trays, it is also necessary to install a fluid supply and suction unit that operates the fluid pressure device on the plurality of trays. . In addition, since the same number of fluid supply suction units as the number of trays are required, there is still a problem that the unit price of the tray conveying device is too high.

本發明的目的在於,提供能夠避免將驅使流體壓力設備運作的流體供給吸引單元搭載在托盤上的托盤搬運裝置以及托盤搬運方法。The object of the present invention is to provide a pallet conveying device and a pallet conveying method that can avoid mounting a fluid supply suction unit that drives a fluid pressure device on a pallet.

根據本發明的一種實施方式,提供一種托盤搬運裝置,其具備:搬運軌,其將搭載有流體壓力設備的托盤搭載成能夠移動;托盤搬運單元,其對搭載於所述搬運軌的所述托盤進行搬運;流體軌,其沿著所述搬運軌設置,並在內部形成有流體通路;以及流體供給吸引單元,其設置為與所述流體通路連通,並朝向所述流體通路供給流體或者從所述流體通路吸引流體;在所述流體軌形成有使所述流體通路與外部連通的多個通孔,在所述托盤上設置有對置部件以及連通路,所述對置部件形成有對多個所述通孔的一部分進行覆蓋的凹部,並且與所述流體軌對置,所述連通路將所述凹部與所述流體壓力設備連通。According to an embodiment of the present invention, there is provided a pallet conveying device including: a conveying rail that mounts a pallet equipped with a fluid pressure device so as to be movable; and a pallet conveying unit that supports the pallet mounted on the conveying rail. Carrying; a fluid rail, which is arranged along the carrying rail and has a fluid passage formed inside; and a fluid supply suction unit which is arranged to communicate with the fluid passage and supply fluid to or from the fluid passage The fluid passage sucks fluid; the fluid rail is formed with a plurality of through holes that allow the fluid passage to communicate with the outside, and the tray is provided with an opposing member and a communication path, and the opposing member is formed with a plurality of A recess covering a part of the through hole is opposed to the fluid rail, and the communication path communicates the recess with the fluid pressure device.

根據本發明的另一種實施方式,提供一種托盤搬運方法,其將搭載有流體壓力設備的托盤搭載於搬運軌進行搬運,其包含:將內部形成有流體通路、並且形成有使所述流體通路與外部連通的多個通孔的流體軌沿著所述搬運軌設置;朝向所述流體通路供給流體或者從所述流體通路吸引流體;使形成有對多個所述通孔的一部分進行覆蓋的凹部的對置部件與所述流體軌對置;使所述凹部與搭載於所述托盤的所述流體壓力設備連通,並一邊使所述流體壓力設備運作,一邊搬運所述托盤以及所述對置部件。According to another embodiment of the present invention, there is provided a pallet conveying method, which mounts a pallet equipped with a fluid pressure device on a conveying rail for conveying, including: forming a fluid passage inside and forming the fluid passage and A fluid rail with a plurality of through-holes communicating with the outside is provided along the conveying rail; fluid is supplied to the fluid passage or sucked from the fluid passage; a recessed portion covering a part of the plurality of through-holes is formed The opposed member is opposed to the fluid rail; the recess is communicated with the fluid pressure equipment mounted on the tray, and the fluid pressure equipment is operated while the tray and the opposed part.

根據本發明所涉及的實施方式,能夠避免將驅使流體壓力設備運作的流體供給吸引單元搭載在托盤上。According to the embodiment of the present invention, it is possible to avoid mounting the fluid supply suction unit that drives the fluid pressure device to operate on the tray.

下面,參照附圖,對本發明之較佳實施方式進行說明。Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

在圖1至圖8中表示本發明的托盤搬運裝置10。在各圖中,設定彼此正交的X軸、Y軸、Z軸,將X軸設為大致水平橫向,將Y軸設為大致水平前後方向,將Z軸設為大致鉛直方向,對托盤搬運裝置10的結構進行說明。The pallet conveying device 10 of the present invention is shown in Figs. 1 to 8. In each figure, set the X-axis, Y-axis, and Z-axis orthogonal to each other, set the X-axis to be approximately horizontal, the Y-axis to the approximately horizontal front-to-rear direction, and the Z-axis to be approximately the vertical direction. The structure of the device 10 will be described.

如圖1以及圖8所示,本實施方式的托盤搬運裝置10被設置在製造較小產品的生產線上。此外,托盤搬運裝置10將搭載有作為流體壓力設備的吸嘴26的多個托盤21搭載於搬運軌31進行搬運。該生產線為,三台加工站11、12、13沿著X軸方向以預定間隔排列成一列的生產線。各加工站11、12、13形成為箱狀,內部設置有未圖示的工具機。As shown in FIG. 1 and FIG. 8, the pallet conveying apparatus 10 of this embodiment is installed in the production line which manufactures small products. In addition, the pallet conveying device 10 loads and conveys a plurality of pallets 21 equipped with suction nozzles 26 as fluid pressure equipment on the conveying rail 31. The production line is a production line in which three processing stations 11, 12, and 13 are arranged in a row at predetermined intervals along the X-axis direction. Each processing station 11, 12, 13 is formed in a box shape, and a machine tool (not shown) is installed inside.

並且,各加工站11、12、13中的工具機對於被托盤搬運裝置10搬運的工件14(參照圖2)依序實施開孔、緊固、焊接等的各種必要加工,從而自動製造未圖示的產品。供給工件14的工件供給機16以及回收工件14的工件回收機17以隔著加工站11、12、13的方式分別設置在加工站11、12、13的上游側以及下游側。In addition, the machine tool in each processing station 11, 12, 13 performs various necessary processing such as drilling, fastening, and welding on the workpiece 14 (refer to FIG. 2) conveyed by the pallet conveying device 10, thereby automatically manufacturing the image Products shown. The workpiece supply machine 16 that supplies the workpiece 14 and the workpiece recovery machine 17 that collects the workpiece 14 are respectively installed on the upstream side and the downstream side of the processing stations 11, 12, and 13 with the processing stations 11, 12, and 13 interposed therebetween.

如圖8至圖11所示,本實施方式的托盤搬運裝置10具備:搬運軌31,其設置為沿著X軸方向延伸;返回軌41,其設置為在Y軸方向上與搬運軌31分離,並與搬運軌31平行;托盤搬運單元51,其對搭載於搬運軌31的托盤21進行搬運;托盤返回單元61,其使搭載於返回軌41的托盤21朝向與搬運方向相反的方向進行移動;返回托盤移載機構70,其將搭載於搬運軌31的托盤21從搬運軌31的頂端移載至返回軌41的頂端;以及搬運托盤移載機構80,其將搭載於返回軌41的托盤21從返回軌41的基端移載至搬運軌31的基端。As shown in FIGS. 8 to 11, the pallet conveying device 10 of this embodiment includes: a conveying rail 31 that is provided to extend along the X-axis direction; and a return rail 41 that is provided to be separated from the conveying rail 31 in the Y-axis direction , And parallel to the conveying rail 31; the pallet conveying unit 51, which conveys the pallet 21 loaded on the conveying rail 31; the pallet returning unit 61, which moves the pallet 21 loaded on the return rail 41 in the direction opposite to the conveying direction Return tray transfer mechanism 70, which transfers the tray 21 loaded on the transport rail 31 from the top of the transport rail 31 to the top of the return rail 41; and the transport tray transfer mechanism 80, which will be loaded on the tray on the return rail 41 21 is transferred from the base end of the return rail 41 to the base end of the transport rail 31.

如圖2所示,本實施方式的搬運軌31具有在截面中沿著Z軸方向形成長方形的支撐板32、通過螺紋固定而固定在支撐板32的上緣的市售的直線運動導軌33、以及焊接在支撐板32的下端的安裝板34。As shown in FIG. 2, the conveyance rail 31 of the present embodiment has a support plate 32 formed in a rectangular shape along the Z-axis direction in cross section, a commercially available linear motion guide 33 fixed to the upper edge of the support plate 32 by screw fixation, And the mounting plate 34 welded to the lower end of the support plate 32.

如圖8所示,返回軌41與搬運軌31的結構相同,具有與搬運軌31的支撐板32相同的截面形狀的支撐板42、通過螺紋固定而固定在支撐板42的上緣的市售的直線運動導軌43、以及焊接在支撐板42的下端的安裝板44。As shown in FIG. 8, the return rail 41 has the same structure as the conveyance rail 31, and a support plate 42 having the same cross-sectional shape as the support plate 32 of the conveyance rail 31, and a commercially available one that is fixed to the upper edge of the support plate 42 by screw fixation The linear motion guide 43 and the mounting plate 44 welded to the lower end of the support plate 42.

搬運軌31以及返回軌41以隔著三台加工站11、12、13且相互平行的方式,搬運軌31以及返回軌41的兩端被安裝在架台71、81上。架台71、81以隔著三台加工站11、12、13、以及設置在該三台加工站11、12、13的兩端的工件供給機16和工件回收機17的方式,在X軸方向分離設置。The conveyance rail 31 and the return rail 41 are installed on the stands 71 and 81 at both ends of the conveyance rail 31 and the return rail 41 in parallel with each other across the three processing stations 11, 12, and 13. The gantry 71, 81 is separated in the X-axis direction by separating the three processing stations 11, 12, and 13, and the workpiece supply machine 16 and the workpiece recovery machine 17 provided at both ends of the three processing stations 11, 12, and 13 Set up.

架台71、81形成為在Y軸方向較長。搬運軌31以及返回軌41上各自的安裝板34、44的長度方向的端部被螺紋固定在架台71、81上。由此,搬運軌31以從工件供給機16經由三台加工站11、12、13至工件回收機17連結的方式,搬運軌31的兩端部被安裝在架台71、81上(參照圖1以及圖8)。The mounts 71 and 81 are formed to be long in the Y-axis direction. The longitudinal ends of the mounting plates 34 and 44 on the transport rail 31 and the return rail 41 are screwed to the mounts 71 and 81. Thus, the conveying rail 31 is connected from the workpiece supply machine 16 to the workpiece recovery machine 17 via the three processing stations 11, 12, and 13, and both ends of the conveying rail 31 are mounted on the stands 71, 81 (refer to FIG. 1 And Figure 8).

搬運軌31以及返回軌41分別將托盤21搭載成能夠移動。如圖2所示,搭載於搬運軌31或返回軌41的托盤21具有:直線運動塊22,其構成為跨及搬運軌31或返回軌41的直線運動導軌33、43,並能夠在直線運動導軌33、43上移動;以及台座23,其被螺紋固定在直線運動塊22上。在台座23的下側、沿著搬運軌31以及返回軌41的兩側分別設置有卡止部件24。The conveyance rail 31 and the return rail 41 respectively mount the tray 21 so as to be movable. As shown in FIG. 2, the pallet 21 mounted on the conveyance rail 31 or the return rail 41 has: a linear motion block 22, which is configured as a linear motion guide 33, 43 spanning the conveyance rail 31 or the return rail 41, and is capable of linear motion Move on the guide rails 33 and 43; and a pedestal 23, which is screwed on the linear motion block 22. Locking members 24 are respectively provided on the lower side of the base 23 and on both sides along the conveyance rail 31 and the return rail 41.

直線運動塊22為與搬運軌31以及返回軌41上的直線運動導軌33、43成對販賣的市售品。如圖4所示,相對於台座23,直線運動塊22被設置為兩個,且在X軸方向上分離。透過使用直線運動塊22,能夠禁止直線運動塊22的寬度方向(Y軸方向)的移動,並且能夠減輕托盤21在搬運軌31或返回軌41上移動的阻力。因此,托盤21被搭載為能夠在搬運軌31或返回軌41上移動。The linear motion block 22 is a commercial product sold as a pair with the linear motion guides 33 and 43 on the conveyance rail 31 and the return rail 41. As shown in FIG. 4, relative to the pedestal 23, the linear motion blocks 22 are provided in two, and they are separated in the X-axis direction. By using the linear motion block 22, the movement of the linear motion block 22 in the width direction (Y-axis direction) can be prohibited, and the resistance of the tray 21 from moving on the conveyance rail 31 or the return rail 41 can be reduced. Therefore, the tray 21 is mounted so as to be movable on the conveyance rail 31 or the return rail 41.

如圖2所示,在托盤21的台座23上搭載有吸嘴26。圖示的吸嘴26為吸附工件14的部件,吸嘴26經由安裝夾具27被設置在托盤21的台座23上,並在台座23的上方沿著鉛直方向延伸。由此,托盤21構成為經由吸嘴26吸附工件14進行保持。另外,未圖示的工件14為在各加工站11、12、13中被加工的工件,在圖2中為能夠被吸嘴26吸附的平板。As shown in FIG. 2, the suction nozzle 26 is mounted on the base 23 of the tray 21. The illustrated suction nozzle 26 is a member that sucks the workpiece 14. The suction nozzle 26 is installed on the base 23 of the tray 21 via the mounting jig 27 and extends in the vertical direction above the base 23. Thus, the tray 21 is configured to suck and hold the workpiece 14 via the suction nozzle 26. In addition, the unillustrated workpiece 14 is a workpiece processed in each processing station 11, 12, and 13, and in FIG. 2 is a flat plate that can be sucked by the suction nozzle 26.

如圖1以及圖8所示,將搭載於搬運軌31的托盤21進行搬運的托盤搬運單元51具備搬運帶52,該搬運帶52構成為能夠與搭載於搬運軌31的托盤21進行卡止,並且以環狀的方式設置為能夠沿著搬運軌31循環。As shown in FIGS. 1 and 8, the pallet conveying unit 51 that conveys the pallet 21 mounted on the conveying rail 31 includes a conveying belt 52 configured to be locked with the pallet 21 mounted on the conveying rail 31. And it is provided in an annular manner so as to be able to circulate along the conveyance rail 31.

在對搬運軌31的兩端部進行支撐的架台71、81上設置有第一支撐台53以及第二支撐台54,第一支撐台53以及第二支撐台54位於搬運軌31的延長線上。在第一支撐台53以及第二支撐台54上設置有同樣形狀以及同樣大小的第一滑輪55以及第二滑輪56。搬運帶52設置為掛於第一滑輪55以及第二滑輪56,並且透過第一滑輪55以及第二滑輪56的旋轉而能夠沿著搬運軌31循環。A first support stand 53 and a second support stand 54 are provided on the stands 71 and 81 that support both ends of the conveyance rail 31, and the first support stand 53 and the second support stand 54 are located on the extension line of the conveyance rail 31. The first support 53 and the second support 54 are provided with a first pulley 55 and a second pulley 56 of the same shape and the same size. The conveying belt 52 is provided so as to be hung on the first pulley 55 and the second pulley 56, and can circulate along the conveying rail 31 by the rotation of the first pulley 55 and the second pulley 56.

因此,如圖1所示,搬運帶52沿著搬運軌31(具體為搬運軌31的延伸方向)設置,並與搬運軌31在上下方向上隔開間隔,該間隔與第一滑輪55以及第二滑輪56的外徑大致相等。如圖2所示,在搬運軌31上設置有帶軌57以及支撐軌58,帶軌57對掛於第一滑輪55以及第二滑輪56的搬運帶52的下側搬運帶52c進行支撐,從而抑制下側搬運帶52c的鬆弛。支撐軌58防止上側搬運帶52d垂下。Therefore, as shown in FIG. 1, the conveying belt 52 is provided along the conveying rail 31 (specifically, the direction in which the conveying rail 31 extends), and is spaced from the conveying rail 31 in the vertical direction. The gap is separated from the first pulley 55 and the first pulley 55 and the first pulley. The outer diameters of the two pulleys 56 are approximately the same. As shown in FIG. 2, a belt rail 57 and a support rail 58 are provided on the conveyance rail 31. The belt rail 57 supports the lower conveyance belt 52c of the conveyance belt 52 hung on the first pulley 55 and the second pulley 56, thereby The slack of the lower conveying belt 52c is suppressed. The support rail 58 prevents the upper conveyance belt 52d from hanging down.

在搬運軌31的支撐板32上設置有將帶軌57安裝於搬運軌31的多個第一安裝部件57a,多個第一安裝部件57a設置為在支撐板32的長度方向上隔開預定間隔。帶軌57經由多個第一安裝部件57a安裝在搬運軌31上。此外,在支撐板32上設置有將支撐軌58安裝於搬運軌31的多個第二安裝部件58a,多個第二安裝部件58a設置為在支撐板32的長度方向上隔開預定間隔。支撐軌58經由多個第二安裝部件58a安裝在搬運軌31上。The support plate 32 of the transport rail 31 is provided with a plurality of first mounting members 57a for attaching the belt rail 57 to the transport rail 31, and the plurality of first mounting members 57a are provided at predetermined intervals in the length direction of the support plate 32 . The belt rail 57 is mounted on the conveyance rail 31 via a plurality of first mounting members 57a. In addition, the support plate 32 is provided with a plurality of second mounting members 58 a for mounting the support rail 58 to the transport rail 31, and the plurality of second mounting members 58 a are provided at predetermined intervals in the longitudinal direction of the support plate 32. The support rail 58 is mounted on the transport rail 31 via a plurality of second mounting members 58a.

另一方面,本實施方式的搬運帶52是所謂的帶齒帶(toothed belt)。如圖5所示,作為帶齒帶的搬運帶52為在寬度方向上延伸的凹凸52a、52b在長度方向交錯連續的搬運帶52。能夠與凹凸52a、52b卡止的反凹凸24a、24b形成在托盤21的卡止部件24上。On the other hand, the conveying belt 52 of this embodiment is a so-called toothed belt. As shown in FIG. 5, the conveyance belt 52 which is a toothed belt is the conveyance belt 52 which the unevenness|corrugation 52a, 52b extended in the width direction staggered and continued in the longitudinal direction. Anti-recesses 24a and 24b that can be locked with the recesses and projections 52a and 52b are formed on the locking member 24 of the tray 21.

如圖2以及圖5所示,當在搬運軌31上搭載有托盤21時,在支撐於支撐軌58的上側搬運帶52d上從上側重合有卡止部件24。在重合狀態下,形成於搬運帶52的凹凸52a、52b與卡止部件24的反凹凸24a、24b卡止。並且,支撐軌58跨及工件供給機16與工件回收機17之間的搬運方向上的全長設置,以防止上側搬運帶52d垂下、防止凹凸52a、52b與反凹凸24a、24b的卡止被解除。As shown in FIGS. 2 and 5, when the pallet 21 is mounted on the conveyance rail 31, the locking member 24 is overlapped from above on the upper conveyance belt 52d supported by the support rail 58. As shown in FIG. In the overlapped state, the irregularities 52a and 52b formed on the conveying belt 52 are locked with the reverse irregularities 24a and 24b of the locking member 24. In addition, the support rail 58 is provided across the entire length of the conveying direction between the workpiece feeder 16 and the workpiece recovery machine 17 to prevent the upper conveying belt 52d from hanging down and prevent the unevenness 52a, 52b and the anti-recession 24a, 24b from being locked. .

如圖5所示,托盤21的卡止部件24設置為在長度方向上連續形成的反凹凸24a、24b能夠與搬運帶52的凹凸52a、52b卡止。因此,當托盤21的反凹凸24a、24b與凹凸52a、52b卡止時,禁止托盤21獨立於搬運帶52的移動。由此,托盤21被卡止在搬運帶52上。As shown in FIG. 5, the locking member 24 of the pallet 21 is provided so that the anti-concavities 24 a and 24 b formed continuously in the longitudinal direction can be locked with the concavities and convexities 52 a and 52 b of the conveying belt 52. Therefore, when the reverse unevenness 24a, 24b of the pallet 21 is locked with the unevenness 52a, 52b, the pallet 21 is prohibited from moving independently of the conveying belt 52. As a result, the tray 21 is locked on the conveying belt 52.

如圖1以及圖8所示,托盤搬運單元51具備使搬運帶52循環的第一循環單元59。本實施方式的第一循環單元59為使第一滑輪55旋轉驅動的電氣驅動式的伺服馬達59。並且,在旋轉軸59a上安裝有第一滑輪55的伺服馬達59被安裝在直立設置於架台71的支撐台53上。As shown in FIGS. 1 and 8, the pallet conveying unit 51 includes a first circulation unit 59 that circulates the conveying belt 52. The first circulation unit 59 of the present embodiment is an electric drive type servo motor 59 that drives the first pulley 55 to rotate. In addition, a servo motor 59 having a first pulley 55 attached to a rotating shaft 59 a is attached to a support stand 53 that is installed upright on a stand 71.

在伺服馬達59上連接有來自未圖示的控制器的控制輸出。並且,當透過來自控制器的控制輸出驅動伺服馬達59時,第一滑輪55與旋轉軸59a一起旋轉。由此,使掛於第一滑輪55與第二滑輪56之間的搬運帶52循環,從而在搭載於搬運軌31的狀態下搬運被卡止於搬運帶52的托盤21。The servo motor 59 is connected with a control output from a controller not shown. And, when the servo motor 59 is driven by the control output from the controller, the first pulley 55 rotates together with the rotating shaft 59a. Thereby, the conveyance belt 52 hung between the first pulley 55 and the second pulley 56 is circulated, and the pallet 21 locked to the conveyance belt 52 is conveyed while being mounted on the conveyance rail 31.

如圖8至圖11所示,使搭載於返回軌41的托盤21朝向與搬運方向相反的方向移動返回的托盤返回單元61,其具有與上述托盤搬運單元51相同的結構。此外,托盤返回單元61具備返回帶62,該返回帶62構成為能夠與搭載於返回軌41的托盤21進行卡止,並且以環狀的方式設置為能夠沿著返回軌41循環。As shown in FIGS. 8 to 11, the tray return unit 61 that moves and returns the tray 21 mounted on the return rail 41 in a direction opposite to the transport direction has the same structure as the tray transport unit 51 described above. In addition, the tray return unit 61 is provided with a return belt 62 configured to be able to be locked with the tray 21 mounted on the return rail 41 and provided in an annular manner so as to be able to circulate along the return rail 41.

在對返回軌41的兩端部進行支撐的架台71、81上設置有第三支撐台63以及第四支撐台64,第三支撐台63以及第四支撐台64位於返回軌41的延長線上。在第三支撐台63以及第四支撐台64上設置有第三滑輪65以及第四滑輪66。返回帶62被掛在設置於返回軌41的兩端的延長線上的第三滑輪65以及第四滑輪66上。A third support platform 63 and a fourth support platform 64 are provided on the stands 71 and 81 that support both ends of the return rail 41, and the third support platform 63 and the fourth support platform 64 are located on the extension line of the return rail 41. The third support platform 63 and the fourth support platform 64 are provided with a third pulley 65 and a fourth pulley 66. The return belt 62 is hung on the third pulley 65 and the fourth pulley 66 provided on the extension line of both ends of the return rail 41.

使返回帶62循環的第二循環單元為對安裝於後退方向的基端上的第四支撐台64上的第四滑輪66進行旋轉驅動的伺服馬達69。與托盤搬運單元51相同,在返回軌41上設置有對下側返回帶進行支撐的未圖示的帶軌、以及防止上側返回帶62d垂下的支撐軌68。The second circulation unit that circulates the return belt 62 is a servo motor 69 that rotates and drives the fourth pulley 66 on the fourth support table 64 attached to the base end in the backward direction. Like the pallet conveying unit 51, the return rail 41 is provided with a belt rail (not shown) that supports the lower return belt and a support rail 68 that prevents the upper return belt 62d from hanging down.

返回帶62與托盤搬運單元51的搬運帶52同為所謂的帶齒帶。返回帶62形成為在寬度方向上延伸的凹凸62a、62b在長度方向交錯連續。能夠與凹凸62a、62b卡止的反凹凸24a、24b形成在托盤21的另一個的卡止部件24上(參照圖7)。The return belt 62 and the conveying belt 52 of the pallet conveying unit 51 are the same as a so-called toothed belt. The return belt 62 is formed such that the irregularities 62a and 62b extending in the width direction are staggered and continuous in the longitudinal direction. The anti-concave projections 24a, 24b that can be locked with the recesses and projections 62a, 62b are formed on the other locking member 24 of the tray 21 (refer to FIG. 7).

具體而言,如圖2所示,卡止部件24以隔著直線運動塊22的方式設置在托盤21上的台座23的下側的兩側。如圖10所示,當托盤21與返回軌41接續時,如圖7所示,另一個的卡止部件24設置為與返回帶62對置。並且,卡止部件24的反凹凸24a、24b形成為在返回帶62的寬度方向上移動、並從上方與返回帶62的凹凸62a、62b卡止。Specifically, as shown in FIG. 2, the locking members 24 are provided on both sides of the lower side of the pedestal 23 on the tray 21 with the linear motion block 22 interposed therebetween. As shown in FIG. 10, when the tray 21 is connected to the return rail 41, as shown in FIG. 7, the other locking member 24 is arranged to face the return belt 62. In addition, the reverse projections and depressions 24a and 24b of the locking member 24 are formed to move in the width direction of the return belt 62 and to be locked with the projections and depressions 62a and 62b of the return belt 62 from above.

如圖8至圖11所示,在安裝有搬運軌31和返回軌41的頂端側的頂端側的架台71上設置有返回托盤移載機構70,該返回托盤移載機構70將搭載於搬運軌31上的托盤21從搬運軌31的頂端朝向返回軌41的頂端移載。另一方面,在安裝有搬運軌31和返回軌41的基端側的基端側的架台81上設置有搬運托盤移載機構80,該搬運托盤移載機構80將搭載於返回軌41上的托盤21從返回軌41的基端朝向搬運軌31的基端移載。As shown in FIGS. 8 to 11, a return tray transfer mechanism 70 is provided on the top end side of the front end side where the conveyance rail 31 and the return rail 41 are installed, and the return tray transfer mechanism 70 will be mounted on the conveyance rail. The tray 21 on the 31 is transferred from the top end of the conveyance rail 31 toward the top end of the return rail 41. On the other hand, the base 81 on the base end side on the base end side where the conveyance rail 31 and the return rail 41 are mounted is provided with a conveyance tray transfer mechanism 80 which transfers the conveyance tray transfer mechanism 80 that is mounted on the return rail 41. The tray 21 is transferred from the base end of the return rail 41 toward the base end of the conveyance rail 31.

返回托盤移載機構70和搬運托盤移載機構80的兩者具有同一結構。在X軸方向分離設置的架台71、81設置為分別在Y軸方向上延伸。設置於搬運軌31以及返回軌41的端緣、和搬運軌31以及返回軌41的延長線上的支撐台53、54、63、64之間的間隔L(參照圖8)形成為與托盤21的台座23的搬運方向的寬度W1(即,托盤21在後述的流體軌91的延伸方向上的長度,參照圖8)相比較寬。並且,返回托盤移載機構70和搬運托盤移載機構80分別具備可動體72、82,可動體72、82將設置於搬運軌31以及返回軌41的端緣、和搬運軌31以及返回軌41的延長線上的支撐台53、54、63、64之間的間隔L堵塞。Both the return tray transfer mechanism 70 and the conveyance tray transfer mechanism 80 have the same structure. The mounts 71 and 81 separately provided in the X-axis direction are provided so as to extend in the Y-axis direction, respectively. The distance L between the end edges of the conveying rail 31 and the return rail 41 and the support bases 53, 54, 63, and 64 on the extension line of the conveying rail 31 and the return rail 41 (refer to FIG. 8) is formed to be the distance from the tray 21 The width W1 of the conveyance direction of the pedestal 23 (that is, the length of the tray 21 in the extending direction of the fluid rail 91 described later, see FIG. 8) is relatively wide. In addition, the return tray transfer mechanism 70 and the conveyance tray transfer mechanism 80 are provided with movable bodies 72 and 82, respectively. The movable bodies 72 and 82 are provided on the ends of the conveyance rail 31 and the return rail 41, and the conveyance rail 31 and the return rail 41. The interval L between the support tables 53, 54, 63, 64 on the extension line of the slab is blocked.

可動體72、82分別具備台板72a、82a和短軌72b、82b,台板72a、82a在收納於搬運軌31以及返回軌41的端緣和支撐台53、54、63、64之間的狀態下,與搬運軌31以及返回軌41上的支撐板32、42接續,短軌72b、82b安裝於台板72a、82a的上緣並與直線運動導軌33、43接續。The movable bodies 72, 82 are provided with table plates 72a, 82a and short rails 72b, 82b, respectively. The table plates 72a, 82a are stored between the end edges of the conveying rail 31 and the return rail 41 and the support tables 53, 54, 63, 64. In the state, it is connected to the supporting plates 32 and 42 on the conveying rail 31 and the return rail 41, and the short rails 72b and 82b are installed on the upper edges of the table plates 72a and 82a and connected to the linear motion guide rails 33 and 43.

短軌72b、82b具有與直線運動導軌33、43相同的截面形狀。在可動體72、82堵塞搬運軌31以及返回軌41的端緣和支撐台53、54、63、64之間的狀態下,在直線運動導軌33、43上移動的托盤21構成為能夠移動至短軌72b、82b。由此,可動體72、82構成為能夠搭載移動的托盤21。The short rails 72b, 82b have the same cross-sectional shape as the linear motion guides 33, 43. In a state where the movable bodies 72, 82 block the ends of the conveyance rail 31 and the return rail 41 and the support tables 53, 54, 63, 64, the tray 21 that moves on the linear motion guides 33, 43 is configured to be able to move to Short rails 72b, 82b. Thus, the movable bodies 72 and 82 are configured to be able to mount the movable tray 21.

返回托盤移載機構70和搬運托盤移載機構80具有同一結構。返回托盤移載機構70和搬運托盤移載機構80分別具備:一對軌道73、83,其以能夠搭載可動體72、82的方式分別在架台71、81上沿著Y軸方向延伸設置;台部件74、84,其以能夠移動的方式設置在一對軌道73、83上;滾珠螺桿75、85,其螺合於台部件74、84,並與軌道73、83平行設置;以及馬達76、86,其使滾珠螺桿75、85旋轉。並且,在各台部件74、84上分別直立設置有可動體72、82的台板72a、82a。The return tray transfer mechanism 70 and the conveyance tray transfer mechanism 80 have the same structure. The return tray transfer mechanism 70 and the conveyance tray transfer mechanism 80 are respectively provided with a pair of rails 73 and 83, which respectively extend in the Y-axis direction on the stands 71 and 81 so as to be able to carry the movable bodies 72 and 82; The components 74 and 84 are movably arranged on a pair of rails 73 and 83; the ball screws 75 and 85 are screwed to the table components 74 and 84 and are arranged in parallel with the rails 73 and 83; and a motor 76, 86, which rotates the ball screws 75 and 85. In addition, the table plates 72a and 82a of the movable bodies 72 and 82 are erected on the table members 74 and 84, respectively.

在由此構成的返回托盤移載機構70和搬運托盤移載機構80中,透過驅動馬達76、86,使滾珠螺桿75、85旋轉,從而能夠使搭載於一對軌道73、83的台部件74、84與可動體72、82一起沿著軌道73、83移動。In the return tray transfer mechanism 70 and the conveyance tray transfer mechanism 80 thus constructed, the ball screws 75 and 85 are rotated by the drive motors 76 and 86, so that the table member 74 mounted on the pair of rails 73 and 83 can be rotated. , 84 moves along the rails 73, 83 together with the movable bodies 72, 82.

因此,在返回托盤移載機構70中,能夠使與搬運軌31的頂端接續的可動體72移動至與返回軌41的頂端接續的位置。如圖6以及圖9所示,將從搬運軌31的頂端離開的托盤21移動至可動體72進行搭載。如圖7以及圖10所示,通過將可動體72與托盤21一起在Y軸方向上從搬運軌31的頂端移動至返回軌41的頂端,並再次使托盤21從可動體72朝向返回軌41的頂端移動,從而能夠將托盤21從搬運軌31的頂端移載返回軌41的頂端。Therefore, in the return tray transfer mechanism 70, the movable body 72 connected to the top end of the conveyance rail 31 can be moved to a position connected to the top end of the return rail 41. As shown in FIGS. 6 and 9, the tray 21 separated from the tip of the conveyance rail 31 is moved to the movable body 72 and mounted. As shown in FIGS. 7 and 10, by moving the movable body 72 together with the tray 21 in the Y-axis direction from the tip of the conveying rail 31 to the tip of the return rail 41, the tray 21 is moved from the movable body 72 to the return rail 41 again. The top end of the pallet can be moved, so that the tray 21 can be transferred from the top end of the conveying rail 31 to the top end of the rail 41.

另一方面,在搬運托盤移載機構80中,將與返回軌41的基端接續的可動體72移動至與搬運軌31的基端接續的位置。如圖11所示,將從返回軌41的基端離開的托盤21移動至可動體82進行搭載。如圖8所示,通過將可動體82與托盤21一起在Y軸方向上從返回軌41的基端移動至搬運軌31的基端,並再次使托盤21從可動體82朝向搬運軌31的基端移動,從而能夠將托盤21從返回軌41的基端移載搬運軌31的基端。On the other hand, in the transport tray transfer mechanism 80, the movable body 72 connected to the base end of the return rail 41 is moved to a position connected to the base end of the transport rail 31. As shown in FIG. 11, the tray 21 separated from the base end of the return rail 41 is moved to the movable body 82, and is mounted. As shown in FIG. 8, by moving the movable body 82 together with the tray 21 in the Y-axis direction from the base end of the return rail 41 to the base end of the transport rail 31, the tray 21 is moved from the movable body 82 toward the transport rail 31 again. By moving the base end, the tray 21 can be transferred from the base end of the return rail 41 to the base end of the transport rail 31.

如圖8所示,在本實施方式中,以隔著3台的加工站11、12、13的方式設置有工件供給機16和工件回收機17。工件供給機16和工件回收機17與加工站11、12、13以同一間距P進行設置。並且,與搬運軌31以及返回軌41的端緣接續設置的可動體72、82設置為與工件供給機16以及供給回收機17相距同一間距P。As shown in FIG. 8, in the present embodiment, a workpiece supply machine 16 and a workpiece recovery machine 17 are provided with three processing stations 11, 12, and 13 interposed therebetween. The workpiece supply machine 16 and the workpiece recovery machine 17 and the processing stations 11, 12, and 13 are installed at the same pitch P. In addition, the movable bodies 72 and 82 provided in succession to the end edges of the conveyance rail 31 and the return rail 41 are provided at the same pitch P from the workpiece supply machine 16 and the supply recovery machine 17.

如圖1至圖4所示,托盤搬運裝置10具備內部形成有作為流體通路的凹槽91d的流體軌91。流體軌91為沿著搬運軌31(具體而言,搬運軌31的延伸方向)設置的部件,並具備形成為長條狀的基材91a、和安裝在基材91a上的蓋板91b。As shown in FIGS. 1 to 4, the pallet conveying device 10 includes a fluid rail 91 in which a groove 91d as a fluid passage is formed. The fluid rail 91 is a member installed along the conveyance rail 31 (specifically, the extending direction of the conveyance rail 31), and includes a base material 91a formed in an elongated shape and a cover plate 91b attached to the base material 91a.

如圖2以及圖3所示,在支撐板32上設置有支撐件91c。基材91a藉由支撐件91c安裝為平行於搬運軌31。基材91a被蓋板91b覆蓋的上表面上形成有沿著長度方向延伸的凹槽91d。如圖1所示,在基端側的架台81上設置有作為朝向凹槽91d供給流體或者從凹槽91d吸引流體的流體供給吸引單元的流體泵92。As shown in FIG. 2 and FIG. 3, a support 91c is provided on the support plate 32. The base material 91a is installed parallel to the conveyance rail 31 by the support 91c. A groove 91d extending in the longitudinal direction is formed on the upper surface of the base material 91a covered by the cover plate 91b. As shown in FIG. 1, the base 81 on the proximal side is provided with a fluid pump 92 as a fluid supply suction unit for supplying fluid to or sucking fluid from the groove 91d.

本實施方式中的流體泵92為,將作為流體的空氣噴出或者吸引的流體泵92。在流體泵92的噴出吸引口安裝有連通路92a的一端。連通路92a的另一端以朝向凹槽91d開放的方式安裝在基材91a上。由此,流體泵92構成為朝向凹槽91d供給流體或者從凹槽91d吸引流體,凹槽91d構成被蓋板91b覆蓋的基材91a的流體通路。The fluid pump 92 in this embodiment is a fluid pump 92 that ejects or sucks air as a fluid. One end of a communication passage 92a is attached to the discharge suction port of the fluid pump 92. The other end of the communication path 92a is attached to the base 91a so as to open toward the groove 91d. Thus, the fluid pump 92 is configured to supply fluid to the groove 91d or suck fluid from the groove 91d, and the groove 91d constitutes a fluid passage of the base material 91a covered by the cover plate 91b.

並且,如圖1的放大圖所示,在蓋板91b上形成有在上下方向上貫穿並與凹槽91d連通的通孔91e。多個通孔91e形成為在流體軌91的長度方向(即,流體軌91的延伸方向)上隔開預定間隔T而連續。In addition, as shown in the enlarged view of FIG. 1, a through hole 91e penetrating in the vertical direction and communicating with the groove 91d is formed in the cover plate 91b. The plurality of through holes 91 e are formed to be continuous with a predetermined interval T in the longitudinal direction of the fluid rail 91 (that is, the extending direction of the fluid rail 91 ).

另一方面,如圖2以及圖3所示,在多個托盤21上分別設置對置部件93,對置部件93與流體軌91對置,並形成有對一個或兩個以上的通孔91e進行覆蓋的凹部93a。如圖3所示,對置部件93為,其長度W2(即,對置部件93在流體軌91延伸方向的長度W2)與托盤21上的台座23的搬運軌31方向的寬度W1相比較長的棒狀部件。對置部件93其截面形成為方形,在與流體軌91對置的一側形成有在長度方向上延伸、並且與多個通孔91e的間隔T相比較長的長度為M的凹部93a。On the other hand, as shown in FIGS. 2 and 3, opposed members 93 are respectively provided on the plurality of trays 21. The opposed members 93 are opposed to the fluid rail 91, and are formed with one or more through holes 91e. Covered recess 93a. As shown in FIG. 3, the opposing member 93 has a length W2 (that is, the length W2 of the opposing member 93 in the extending direction of the fluid rail 91) which is longer than the width W1 in the direction of the conveyance rail 31 of the base 23 on the pallet 21 Rod-shaped parts. The opposing member 93 has a square cross-section, and a recess 93a having a length M that extends in the longitudinal direction and is longer than the interval T of the plurality of through holes 91e is formed on the side opposing the fluid rail 91.

對置部件93經由懸掛單元94而設置在托盤21的台座23上。懸掛單元94為將對置部件93以朝向流體軌91按壓的方式而施力的部件。托盤21上的台座23安裝有卡止部件24的外側設置有朝向鉛直方向貫穿的支撐軸94a,該支撐軸94a能夠在軸向上移動。The opposing member 93 is installed on the base 23 of the tray 21 via the suspension unit 94. The suspension unit 94 is a member that urges the opposing member 93 to press against the fluid rail 91. A support shaft 94a penetrating in the vertical direction is provided on the outer side of the base 23 on the tray 21 to which the locking member 24 is attached, and the support shaft 94a can move in the axial direction.

如圖3所示,支撐軸94a為其下端安裝有對置部件93的部件。單一的對置部件93被兩根支撐軸94a支撐。對單一的對置部件93支撐的台座23的側緣以在搬運軌31的長度方向隔開預定間隔的方式設置有兩根支撐軸94a。在兩根支撐軸94a的下端安裝有單一的對置部件93。在此,圖的元件符號94b表示設置在台座23上,並支撐支撐軸94a使其能夠在軸向上移動的滑套94b。As shown in FIG. 3, the support shaft 94a is a member in which the opposing member 93 is attached to the lower end. The single opposing member 93 is supported by two supporting shafts 94a. Two support shafts 94a are provided on the side edge of the pedestal 23 that supports the single opposed member 93 at a predetermined interval in the longitudinal direction of the conveyance rail 31. A single opposed member 93 is attached to the lower ends of the two support shafts 94a. Here, the reference numeral 94b in the figure denotes a sliding sleeve 94b which is provided on the base 23 and supports the support shaft 94a so as to be movable in the axial direction.

在對置部件93與台座23之間的支撐軸94a上,以被壓縮的狀態安裝有作為施力部件的螺旋彈簧94c。螺旋彈簧94c欲延伸的力作用於使對置部件93從托盤21的台座23分離的方向上。在對置部件93與流體軌91對置的情況下,能夠朝向流體軌91按壓對置部件93。On the support shaft 94a between the opposing member 93 and the pedestal 23, a coil spring 94c as an urging member is attached in a compressed state. The force of the coil spring 94 c to extend acts in the direction in which the opposed member 93 is separated from the base 23 of the tray 21. When the opposed member 93 is opposed to the fluid rail 91, the opposed member 93 can be pressed toward the fluid rail 91.

如圖6以及圖7所示,在對置部件93未與流體軌91對置的情況下,支撐軸94a由於螺旋彈簧94c的施力而朝向Z軸方向下方移動。在貫穿托盤21上的台座23的支撐軸94a的上部處安裝有環狀物94d。環狀物94d構成為,當支撐軸94a與對置部件93一起下降,且環狀物94d與托盤21上的台座23的上表面抵接時,禁止支撐軸94a繼續下降。因此,環狀物94d為對對置部件93上的可動範圍進行限制的部件。As shown in FIGS. 6 and 7, when the opposed member 93 is not opposed to the fluid rail 91, the support shaft 94a moves downward in the Z-axis direction due to the urging force of the coil spring 94c. A ring 94d is attached to the upper part of the support shaft 94a of the pedestal 23 which penetrates the tray 21. As shown in FIG. The ring 94d is configured to prohibit the support shaft 94a from continuing to descend when the support shaft 94a descends together with the opposing member 93 and the ring 94d abuts the upper surface of the base 23 on the tray 21. Therefore, the ring 94 d is a member that restricts the movable range of the opposed member 93.

如圖3以及圖4所示,對置部件93在流體軌91方向的長度W2形成為,與托盤21上的台座23在流體軌91方向的長度W1相比較長。即,托盤21形成為,在流體軌91的延伸方向上的端部未從對置部件93的端部突出。由此,能夠防止由於相鄰的托盤21彼此的端部抵接而引起的相鄰對置部件93彼此的端部之間產生間隔。另外,在本實施方式中,對置部件93的長度W2形成為,與設置加工站11、12、13的間距P相同或者略小。As shown in FIGS. 3 and 4, the length W2 of the opposed member 93 in the direction of the fluid rail 91 is formed to be longer than the length W1 of the base 23 on the tray 21 in the direction of the fluid rail 91. That is, the tray 21 is formed so that the end in the extending direction of the fluid rail 91 does not protrude from the end of the opposed member 93. Thereby, it is possible to prevent a gap between the ends of the adjacent opposing members 93 caused by the abutment of the ends of the adjacent trays 21. In addition, in this embodiment, the length W2 of the opposed member 93 is formed to be the same as or slightly smaller than the pitch P at which the processing stations 11, 12, and 13 are installed.

並且,在對置部件93上,樞軸支撐有輥96,該輥96在流體軌91上滾動,並以隔開預定間隙的方式使對置部件93與流體軌91對置。另外,預定間隔為0-0.1 mm。如圖1的放大圖所示,流體軌91的基端側的上表面形成有傾斜面91f,輥96進行滾動,傾斜面91f將對置部件93引導朝向流體軌91的上表面。並且,在本實施方式中,一對輥96被樞軸支撐在支撐軸94a附近的對置部件93上。In addition, the opposing member 93 is pivotally supported by a roller 96 that rolls on the fluid rail 91 and opposes the opposing member 93 and the fluid rail 91 with a predetermined gap therebetween. In addition, the predetermined interval is 0-0.1 mm. As shown in the enlarged view of FIG. 1, an inclined surface 91 f is formed on the upper surface of the base end side of the fluid rail 91, the roller 96 rolls, and the inclined surface 91 f guides the opposing member 93 toward the upper surface of the fluid rail 91. In addition, in this embodiment, the pair of rollers 96 are pivotally supported by the opposing member 93 near the support shaft 94a.

在對置部件93上設置有與凹部93a連通的連通部件93b。連通部件93b與吸嘴26由連通路93c連通。即,連通路93c的一端以藉由連通部件93b而朝向凹部93a開放的方式安裝,連通路93c的另一端與作為流體壓力設備的吸嘴26相連結。以此,在托盤21上形成連通路93c,該連通路93c在托盤21被搭載於搬運軌31的狀態下連通流體軌91與吸嘴26。The opposing member 93 is provided with a communicating member 93b communicating with the recess 93a. The communication member 93b and the suction nozzle 26 communicate with each other by a communication passage 93c. That is, one end of the communication path 93c is attached to open toward the recess 93a by the communication member 93b, and the other end of the communication path 93c is connected to the suction nozzle 26 as a fluid pressure device. Thereby, a communication path 93c is formed in the tray 21, and the communication path 93c connects the fluid rail 91 and the suction nozzle 26 in the state where the tray 21 is mounted on the conveyance rail 31. As shown in FIG.

因此,當驅動作為流體供給吸引單元的流體泵92(參照圖1)時,例如,將被蓋板91b覆蓋的凹槽91d內的空氣吸引而變為負壓時,如圖2所示,藉由通孔91e與凹槽91d對置的對置部件93的凹部93a中的流體被吸引。並且,由於在凹部93a上經由連通路93c而連通吸嘴26,因此當凹部93a中的流體被吸引時,藉由連通路93c連通的吸嘴26構成為將工件14吸附在吸嘴26的下端。Therefore, when the fluid pump 92 (refer to FIG. 1) as the fluid supply and suction unit is driven, for example, when the air in the groove 91d covered by the cover 91b is sucked to become a negative pressure, as shown in FIG. The fluid in the recess 93a of the opposed member 93 opposed to the groove 91d by the through hole 91e is sucked. In addition, since the suction nozzle 26 is connected to the concave portion 93a via the communication path 93c, when the fluid in the concave portion 93a is sucked, the suction nozzle 26 connected via the communication path 93c is configured to suck the workpiece 14 to the lower end of the suction nozzle 26 .

並且,作為帶齒帶的搬運帶52構成為,能夠卡止搭載於搬運軌31的托盤21。由此,當驅動伺服馬達59(參照圖8),使卡止有托盤21的搬運帶52循環時,沿著搬運帶52所沿續的搬運軌31而搬運設置有吸嘴26的托盤21,且吸嘴26在其下端吸附有工件14。In addition, the conveying belt 52 as a toothed belt is configured to be able to lock the pallet 21 mounted on the conveying rail 31. Thus, when the servo motor 59 (refer to FIG. 8) is driven to circulate the conveying belt 52 with the pallet 21 locked, the pallet 21 provided with the suction nozzle 26 is conveyed along the conveying rail 31 along which the conveying belt 52 follows. And the suction nozzle 26 sucks the workpiece 14 at its lower end.

接下來,對使用了托盤搬運裝置10的本發明的托盤搬運方法進行說明。Next, the pallet conveying method of the present invention using the pallet conveying device 10 will be described.

本發明的托盤搬運方法為將搭載有吸嘴26的多個托盤21搭載於搬運軌31而搬運的托盤搬運方法。The pallet conveying method of the present invention is a pallet conveying method in which a plurality of pallets 21 equipped with suction nozzles 26 are mounted on a conveying rail 31 and conveyed.

如圖8所示,在上述托盤搬運裝置10中,返回軌41與搬運軌31平行設置。由此,在搬運了搭載於搬運軌31的托盤21之後,在將托盤21從搬運軌31的頂端移載至返回軌41的頂端之後,使托盤21後退至返回軌41的基端側。之後,透過使托盤21返回至搬運軌31的基端側,從而實現多個托盤21的循環搬運。As shown in FIG. 8, in the pallet conveying device 10 described above, the return rail 41 and the conveying rail 31 are provided in parallel. Thus, after the tray 21 mounted on the transport rail 31 is transported, the tray 21 is transferred from the top end of the transport rail 31 to the top end of the return rail 41, and then the tray 21 is retreated to the proximal end side of the return rail 41. Thereafter, by returning the tray 21 to the base end side of the conveying rail 31, the cyclic conveyance of the plurality of trays 21 is realized.

此外,如圖3所示,在上述托盤搬運裝置10中,流體軌91沿著搬運軌31(即,搬運軌31的延伸方向)設置,流體軌91在搬運軌31的延伸方向上形成有隔開預定間隔T的多個通孔91e,多個通孔91e將形成於內部的凹槽91d與外部連通。由此,在搬運搭載於搬運軌31的托盤21時,透過朝向作為流體通路的凹槽91d供給流體或者從凹槽91d吸引流體,並使形成有對一個或兩個以上的通孔91e進行覆蓋的凹部93a的對置部件93與流體軌91對置,從而能夠連通凹部93a與搭載於托盤21的吸嘴26,並一邊使吸嘴26運作一邊搬運托盤21以及對置部件93。In addition, as shown in FIG. 3, in the above-mentioned pallet transport device 10, the fluid rail 91 is provided along the transport rail 31 (that is, the extending direction of the transport rail 31), and the fluid rail 91 is formed with a partition in the extending direction of the transport rail 31. A plurality of through holes 91e with a predetermined interval T are opened, and the plurality of through holes 91e communicate the groove 91d formed in the inside with the outside. Thus, when the pallet 21 mounted on the conveyance rail 31 is transported, the fluid is supplied to or sucked from the groove 91d as the fluid passage, and the through holes 91e are formed to cover one or two or more through holes 91e. The opposing member 93 of the concave portion 93a is opposed to the fluid rail 91, so that the concave portion 93a and the suction nozzle 26 mounted on the tray 21 can be communicated, and the tray 21 and the opposing member 93 can be transported while operating the suction nozzle 26.

從循環搬運多個托盤21開始說明。首先,從朝向搬運軌31搭載多個托盤21開始。在托盤21的搭載中,首先將托盤21搭載於搬運軌31的基端側,即搭載於基端側的架台81。並且,當將托盤21搭載於搬運軌31時,托盤21的卡止部件24與搬運帶52重合。The description starts from the cyclic conveyance of a plurality of pallets 21. First, start by loading a plurality of pallets 21 toward the conveyance rail 31. In the loading of the tray 21, first, the tray 21 is mounted on the base end side of the conveyance rail 31, that is, mounted on the base 81 on the base end side. In addition, when the tray 21 is mounted on the transport rail 31, the locking member 24 of the tray 21 overlaps the transport belt 52.

藉此將托盤21搭載於搬運軌31的基端側之後,使搬運帶52循環從而將已搭載的托盤21僅搬運預定間距P。並且,從搬運軌31的基端側重新將托盤21搭載於搬運軌31。重複這樣的操作,如圖8所示,以與加工站11、12、13的間距P相同的間距P而將多個托盤21(本實施方式為6台)搭載於搬運軌31上。Thereby, after the pallet 21 is mounted on the base end side of the conveyance rail 31, the conveyance belt 52 is circulated to convey the loaded pallet 21 by the predetermined pitch P only. Then, the tray 21 is newly mounted on the conveying rail 31 from the proximal end side of the conveying rail 31. Such an operation is repeated, and as shown in FIG. 8, a plurality of pallets 21 (six in this embodiment) are mounted on the conveyance rail 31 at the same pitch P as the pitch P of the processing stations 11, 12, and 13.

在此,設置於托盤21的對置部件93的長度在略小於預定間距P或與預定間距P相同時,即可通過將托盤21依次搭載於搬運軌31使對置部件93彼此接觸(抵接),從而能夠較容易地以預定間距P搭載托盤21。Here, when the length of the opposing members 93 provided on the pallet 21 is slightly less than the predetermined pitch P or the same as the predetermined pitch P, the opposing members 93 can be brought into contact (abutted against each other) by sequentially mounting the pallets 21 on the conveyance rail 31. ), so that the tray 21 can be mounted at a predetermined pitch P more easily.

接下來,對使多個托盤21循環搬運的狀態進行說明。Next, the state in which the plurality of trays 21 are cyclically conveyed will be described.

當從圖8所示的狀態使沿著搬運軌31的搬運帶52循環時,在保持預定間隔P的狀態下使多個托盤21前進。並且,當多個托盤21僅前進預定間隔P時,如圖9所示,一開始的托盤21從搬運軌31的頂端分離。並且,由於可動體72與搬運軌31的頂端接續,因此如圖6所示,能夠透過將在搬運軌31上的直線運動導軌33上移動的托盤21移動至可動體72的短軌72b,從而將一開始的托盤21搭載於可動體72上。When the conveying belt 52 along the conveying rail 31 is circulated from the state shown in FIG. 8, the plurality of pallets 21 are advanced while maintaining a predetermined interval P. In addition, when the plurality of pallets 21 advance only by the predetermined interval P, as shown in FIG. 9, the initial pallet 21 is separated from the top end of the conveyance rail 31. In addition, since the movable body 72 is connected to the top end of the conveying rail 31, as shown in FIG. 6, the pallet 21 moving on the linear motion guide 33 on the conveying rail 31 can be moved to the short rail 72b of the movable body 72, thereby The initial tray 21 is mounted on the movable body 72.

接下來,如圖7以及圖10所示,利用返回托盤移載機構70,使搭載於可動體72的托盤21移動至返回軌41的頂端。具體而言,透過驅動馬達76,使滾珠螺桿75旋轉,並使可動體72在Y軸方向上移動,從而能夠使可動體72從與搬運軌31的頂端接續的圖6所示的狀態移動至如圖7所示的與返回軌41的頂端接續的位置。之後,透過使托盤21再次從可動體72移動至返回軌41的頂端,從而將托盤21從搬運軌31的頂端移載至返回軌41的頂端。Next, as shown in FIGS. 7 and 10, the tray 21 mounted on the movable body 72 is moved to the top end of the return rail 41 by the return tray transfer mechanism 70. Specifically, by driving the motor 76 to rotate the ball screw 75 and move the movable body 72 in the Y-axis direction, the movable body 72 can be moved from the state shown in FIG. The position following the top end of the return rail 41 as shown in FIG. 7. After that, by moving the tray 21 from the movable body 72 to the top end of the return rail 41 again, the tray 21 is transferred from the top end of the conveyance rail 31 to the top end of the return rail 41.

在此,當使搭載有托盤21的可動體72與托盤21一起在與搬運帶52正交的Y軸方向上移動時,由於托盤21的卡止部件24上的反凹凸24a、24b從在搬運帶52的寬度方向上延伸的凹凸52a、52b沿著其寬度方向錯開並脫離,因此托盤21與搬運帶52的卡止被解除。Here, when the movable body 72 on which the tray 21 is mounted is moved together with the tray 21 in the Y-axis direction orthogonal to the conveying belt 52, the anti-concavities 24a, 24b on the locking member 24 of the tray 21 are removed from the conveyance. The concavities and convexities 52a and 52b extending in the width direction of the belt 52 are shifted and detached along the width direction, so that the locking of the tray 21 and the conveying belt 52 is released.

並且,能夠透過使托盤21與可動體72一起在Y軸方向上移動,使托盤21與返回軌41接續,從而使可動體72、82與返回軌41在同一直線上。並且,當托盤21在返回帶62的寬度方向上移動時,托盤21的卡止部件24被重新卡止在沿著返回軌41設置的返回帶62。In addition, by moving the tray 21 together with the movable body 72 in the Y-axis direction, the tray 21 and the return rail 41 can be connected, so that the movable bodies 72 and 82 and the return rail 41 can be on the same straight line. Furthermore, when the tray 21 moves in the width direction of the return belt 62, the locking member 24 of the tray 21 is locked again to the return belt 62 provided along the return rail 41.

因此,透過使用由所謂帶齒帶構成的搬運帶52以及返回帶62,能夠使托盤21與可動體72一起在Y軸方向上移動不產生障礙,從而使托盤21容易與搬運帶52以及返回帶62重新卡合。Therefore, by using the conveying belt 52 and the return belt 62 constituted by a so-called toothed belt, the pallet 21 and the movable body 72 can be moved in the Y-axis direction without obstruction, so that the pallet 21 can easily interact with the conveying belt 52 and the return belt. 62 re-locked.

接下來,使托盤21在與搬運方向相反的方向上移動,使托盤21搭載於返回軌41。因此,當驅動托盤返回單元61的伺服馬達69,使返回帶62循環時,搭載於可動體72的托盤21從返回軌41的頂端緣移動至其頂端部。由此,托盤21從搬運軌31的頂端移載至返回軌41的頂端。Next, the tray 21 is moved in the direction opposite to the conveying direction, and the tray 21 is mounted on the return rail 41. Therefore, when the servo motor 69 of the tray return unit 61 is driven to circulate the return belt 62, the tray 21 mounted on the movable body 72 moves from the tip edge of the return rail 41 to the tip portion thereof. As a result, the tray 21 is transferred from the top end of the conveyance rail 31 to the top end of the return rail 41.

藉此,在托盤21移載至返回軌41的頂端後,當托盤返回單元61使返回帶62繼續循環時,從可動體72移動至返回軌41上的托盤21進一步在返回軌41上後退。並且,托盤21的後退進行到托盤21到達返回軌41的基端為止。With this, after the tray 21 is transferred to the top end of the return rail 41, when the tray return unit 61 continues to circulate the return belt 62, the tray 21 moved from the movable body 72 to the return rail 41 further retreats on the return rail 41. In addition, the retreat of the tray 21 is performed until the tray 21 reaches the base end of the return rail 41.

如圖11所示,當以將搬運托盤移載機構80的可動體82收納在返回軌41的基端側的方式使托盤21後退時,搭載於返回軌41上而後退的托盤21移動至搬運托盤移載機構80上的可動體82,從而托盤21被搭載於可動體82。As shown in FIG. 11, when the pallet 21 is retracted so that the movable body 82 of the conveyance pallet transfer mechanism 80 is housed on the proximal side of the return rail 41, the pallet 21 that is mounted on the return rail 41 and retreated is moved to conveyance By the movable body 82 on the tray transfer mechanism 80, the tray 21 is mounted on the movable body 82.

接下來,利用搬運托盤移載機構80將從返回軌41移動並搭載於可動體82上的托盤21從返回軌41的基端移動至搬運軌31的基端。具體而言,透過驅動搬運托盤移載機構80上的馬達86,並使滾珠螺桿85旋轉,使可動體82在Y軸方向上移動,從而使可動體82從與返回軌41的基端接續的圖11所示的狀態移動至圖8所示的與搬運軌31的基端接續的位置。Next, the tray 21 moved from the return rail 41 and mounted on the movable body 82 is moved from the base end of the return rail 41 to the base end of the transport rail 31 by the transport tray transfer mechanism 80. Specifically, by driving the motor 86 on the transport tray transfer mechanism 80 and rotating the ball screw 85, the movable body 82 is moved in the Y-axis direction, so that the movable body 82 is connected to the base end of the return rail 41 The state shown in FIG. 11 moves to the position continuous with the base end of the conveyance rail 31 shown in FIG.

之後,透過再次使托盤21從可動體82移動至搬運軌31的基端,從而使托盤21從返回軌41的基端移載至搬運軌31的基端。即,在可動體82與搬運軌31接續的狀態下,可動體82與搬運軌31在同一直線上,從而托盤21重新卡止於與沿著搬運軌31設置的搬運帶52。因此,搭載於與搬運軌31接續的可動體82上的托盤21由於搬運帶52的循環能夠再次搬運,被移載至搬運軌31的基端。由此,包括了托盤21的多個托盤21能夠在平面內以方形進行循環。After that, by moving the tray 21 from the movable body 82 to the base end of the transport rail 31 again, the tray 21 is transferred from the base end of the return rail 41 to the base end of the transport rail 31. That is, in a state where the movable body 82 is connected to the conveyance rail 31, the movable body 82 and the conveyance rail 31 are on the same straight line, and the tray 21 is again locked with the conveyance belt 52 provided along the conveyance rail 31. Therefore, the pallet 21 mounted on the movable body 82 connected to the conveyance rail 31 can be conveyed again due to the circulation of the conveyance belt 52 and is transferred to the base end of the conveyance rail 31. As a result, the plurality of trays 21 including the tray 21 can circulate in a square in the plane.

接下來,對使作為流體壓力設備的吸嘴26運作且同時搬運托盤21進行說明。Next, the pallet 21 is conveyed while operating the suction nozzle 26 as a fluid pressure device.

即,如圖1所示,在搬運搭載於搬運軌31的托盤21時,使沿著搬運軌31設置的搬運帶52循環,同時朝向流體軌91的作為流體通路的凹槽91d供給流體或者從凹槽91d吸引流體,並且,使搭載於托盤21的吸嘴26與凹槽91d連通,一邊使吸嘴26運作一邊搬運托盤21。That is, as shown in FIG. 1, when the pallet 21 mounted on the transport rail 31 is transported, the transport belt 52 provided along the transport rail 31 is circulated, and fluid is supplied to or from the groove 91d as the fluid passage of the fluid rail 91 at the same time. The groove 91d sucks fluid, and the suction nozzle 26 mounted on the tray 21 communicates with the groove 91d, and the tray 21 is conveyed while the suction nozzle 26 is operated.

具體而言,如圖1的放大圖所示,在與工件供給機16對置的流體軌91上形成有作為流體通路的凹槽91d。以覆蓋凹槽91d的方式在搭載於基材91a上的蓋板91d上形成有多個通孔91e。因此,首先驅動作為流體供給吸引單元的流體泵92,對被蓋板91b覆蓋的凹槽91d的內部的空氣進行吸引,從而使凹槽91d的內部變為負壓。Specifically, as shown in the enlarged view of FIG. 1, a groove 91 d as a fluid passage is formed on the fluid rail 91 facing the workpiece feeder 16. A plurality of through holes 91e are formed in the cover plate 91d mounted on the base material 91a so as to cover the groove 91d. Therefore, first, the fluid pump 92 as a fluid supply suction unit is driven to suck the air inside the groove 91d covered by the cover plate 91b, so that the inside of the groove 91d becomes a negative pressure.

在此狀態下,當使托盤21與工件供給機16對置時,在托盤21上設置有對置部件93,該對置部件93形成有對多個通孔91e進行覆蓋的凹部93a。由此,藉由流體軌91的通孔91e,吸引對通孔91e進行覆蓋的凹部93a的空氣,使凹部93a變為負壓。並且,如圖2所示,由於凹部93a與吸嘴26被連通路93c連結,從經由連通路93c而與凹部93a連通的托盤21的吸嘴26吸引空氣。因此,能夠將由工件供給機16所供給的工件14吸附在吸嘴26的下端。In this state, when the tray 21 is opposed to the workpiece feeder 16, an opposed member 93 is provided on the tray 21, and the opposed member 93 is formed with a recess 93a covering the plurality of through holes 91e. Thereby, the through hole 91e of the fluid rail 91 sucks air in the recess 93a covering the through hole 91e, so that the recess 93a becomes a negative pressure. And, as shown in FIG. 2, since the recessed part 93a and the suction nozzle 26 are connected by the communication path 93c, air is sucked from the suction nozzle 26 of the tray 21 which communicates with the recessed part 93a via the communication path 93c. Therefore, the workpiece 14 supplied by the workpiece feeder 16 can be sucked to the lower end of the suction nozzle 26.

在將工件14吸附後,當使沿著搬運軌31的搬運帶52再次循環,使托盤21以吸附工件14的狀態前進時,如圖1所示,托盤21接著與第三加工站13對置。After the workpiece 14 is sucked, the conveying belt 52 along the conveying rail 31 is circulated again, and the pallet 21 is moved forward in a state where the workpiece 14 is sucked. As shown in FIG. 1, the pallet 21 is then opposed to the third processing station 13 .

並且,在托盤21與第三加工站13對置的階段,托盤21的搬運被停止。並且,在第三加工站13中,對於被吸附於托盤21的吸嘴26上的工件14進行預定加工。並且,在預定加工結束後,再次使搬運帶52循環而再次搬運托盤21。重複這樣的作業,使搬運的托盤21依次與各加工站11、12、13對置,從而對吸附於托盤21的吸嘴26上的工件14依次進行加工。In addition, at the stage where the pallet 21 and the third processing station 13 face each other, the conveyance of the pallet 21 is stopped. In addition, in the third processing station 13, predetermined processing is performed on the workpiece 14 sucked on the suction nozzle 26 of the tray 21. And after the predetermined process is finished, the conveying belt 52 is circulated again, and the pallet 21 is conveyed again. Such operations are repeated, and the conveyed pallet 21 is sequentially opposed to the respective processing stations 11, 12, and 13 to sequentially process the workpiece 14 sucked on the suction nozzle 26 of the pallet 21.

在此,在沿著搬運軌31設置的流體軌91上形成有多個通孔91e,多個通孔91e在長度方向上隔開預定間隔T而接續。由此,搬運途中的托盤21以及與各加工站11、12、13對置的托盤21的對置部件93的凹部93a覆蓋流體軌91上的任意的通孔91e。Here, a plurality of through holes 91e are formed in the fluid rail 91 provided along the conveyance rail 31, and the plurality of through holes 91e are connected at a predetermined interval T in the longitudinal direction. Thereby, the recessed part 93a of the opposing member 93 of the pallet 21 in the middle of conveyance and each processing station 11, 12, and the pallet 21 opposed to each processing station 11, 12, and 13 covers arbitrary through holes 91e in the fluid rail 91.

因此,當驅動作為流體供給吸引單元的流體泵92時,無論是否是搬運途中,從與托盤21上的對置部件93的凹部93a連通的吸嘴26能夠一直吸引空氣,從而維持工件14吸附於吸嘴26下端的吸附狀態。Therefore, when the fluid pump 92 as the fluid supply and suction unit is driven, the suction nozzle 26 communicating with the recess 93a of the opposing member 93 on the tray 21 can always suck air regardless of whether it is being transported or not, so as to maintain the workpiece 14 adsorbed to The suction state of the lower end of the suction nozzle 26.

並且,由全部的加工站11、12、13進行的加工結束之後,被搬運的托盤21進一步與工件回收機17對置。並且,在托盤21所對置的工件回收機17中,將完成一系列加工的工件14從吸嘴26拆卸而回收。In addition, after the processing by all the processing stations 11, 12, and 13 is completed, the conveyed pallet 21 further faces the workpiece recovery machine 17. Then, in the workpiece recovery machine 17 facing the tray 21, the workpiece 14 that has completed a series of processing is removed from the suction nozzle 26 and recovered.

在工件14被回收後,如圖6以及圖9所示,被搬運的托盤21進一步從搬運軌31的頂端分離,托盤21移動至返回托盤移載機構70的可動體72,並搭載於可動體72。After the workpiece 14 is collected, as shown in FIGS. 6 and 9, the pallet 21 being conveyed is further separated from the top end of the conveying rail 31, and the pallet 21 is moved to the movable body 72 of the return pallet transfer mechanism 70 and mounted on the movable body 72.

在此,流體軌91在可動體72處消失。即,在可動體72上未設置有流體軌91。因此,即使驅動作為流體供給吸引單元的流體泵92,在流體軌91消失的可動體72上,來自托盤21的吸嘴26的空氣的吸引變無,從而也能夠使托盤21移載至返回軌41。Here, the fluid rail 91 disappears at the movable body 72. That is, the fluid rail 91 is not provided on the movable body 72. Therefore, even if the fluid pump 92 as the fluid supply and suction unit is driven, the suction of air from the suction nozzle 26 of the tray 21 is eliminated on the movable body 72 where the fluid rail 91 disappears, and the tray 21 can be transferred to the return rail. 41.

此外,與搬運軌31的頂端側接續的可動體72設置為,能夠與在X軸方向上排列的各加工站11、12、13以相同的間距P排列在Y軸方向上移動。由此,當以與間距P相同的間距P將多個托盤21搭載在搬運軌31上,並且一開始的托盤21到達可動體72時,其他的托盤21也與各加工站11、12、13對置。因此,在各加工站11、12、13中,為了工件14的加工,托盤21的搬運被一時停止。In addition, the movable body 72 connected to the tip side of the conveyance rail 31 is provided so as to be able to move in the Y-axis direction at the same pitch P as the processing stations 11, 12, and 13 arranged in the X-axis direction. Thus, when a plurality of pallets 21 are mounted on the conveyance rail 31 at the same pitch P as the pitch P, and the initial pallet 21 reaches the movable body 72, the other pallets 21 also interact with the processing stations 11, 12, and 13 Opposite. Therefore, in each of the processing stations 11, 12, and 13, the conveyance of the pallet 21 is temporarily stopped in order to process the workpiece 14.

為了工件14的加工,在托盤21的搬運被停止的期間,將到達搬運軌31的頂端側的可動體72的一開始的托盤21移載至返回軌41的頂端。並且,使托盤21沿著返回軌41後退,再次將托盤21從返回軌41的基端移載至搬運軌31的基端側。In order to process the workpiece 14, while the conveyance of the pallet 21 is stopped, the initial pallet 21 that has reached the movable body 72 on the tip side of the conveyance rail 31 is transferred to the tip of the return rail 41. Then, the tray 21 is retreated along the return rail 41, and the tray 21 is transferred from the base end of the return rail 41 to the base end side of the transport rail 31 again.

藉此,當進行一次將托盤21從搬運軌31的頂端返回至搬運軌31的基端的循環時,能夠將搭載於搬運軌31的多個托盤21分別朝向逆時針方向搬運一個托盤21。Thereby, when a cycle of returning the pallet 21 from the top end of the conveying rail 31 to the base end of the conveying rail 31 is performed once, the plurality of pallets 21 mounted on the conveying rail 31 can each be conveyed in the counterclockwise direction of one pallet 21.

並且,這樣的循環每進行一次,在使托盤搬運裝置10的動作停止的狀態下,使各加工站11、12、13運作,對吸附於搬運軌31上排列的各托盤21的吸嘴26上的各工件14同步進行各種加工以及工件14的吸附、回收。In addition, every time such a cycle is performed, the processing stations 11, 12, and 13 are operated in a state where the operation of the pallet conveying device 10 is stopped, and the suction nozzles 26 of the pallets 21 arranged on the conveying rail 31 are attracted to the suction nozzles 26. Each of the workpieces 14 simultaneously performs various processing, as well as the adsorption and recovery of the workpieces 14.

藉此,在本發明的托盤搬運裝置10以及托盤搬運方法中,能夠以使多個托盤21循環的方式進行搬運。透過使用與搬運軌31平行設置的流體軌91,即使是作為單一的流體供給吸引單元的流體泵92,也能夠在使多個托盤21的吸嘴26分別運作的狀態下,同時搬運多個托盤21。Thereby, in the pallet conveying device 10 and the pallet conveying method of the present invention, it is possible to convey a plurality of pallets 21 such that they circulate. By using the fluid rail 91 arranged in parallel with the transport rail 31, even the fluid pump 92 as a single fluid supply and suction unit can simultaneously transport a plurality of trays while operating the suction nozzles 26 of the plurality of trays 21 separately. twenty one.

並且,形成流體軌91中的流體通路的凹槽91d形成為,在流體軌91的長度方向即托盤21的搬運方向上延伸。由此,搭載於搬運軌31的托盤21即使被搬運,對置部件93所覆蓋的流體軌91的任意的通孔91e必定與凹部93a連通,並且托盤21與對置部件93一起移動,因此任意的通孔91e與對置部件93的凹部93a必定連通。其結果,即使托盤21移動,也能夠持續將工件14吸附於吸嘴26的下端(參照圖2)。In addition, the groove 91 d forming the fluid passage in the fluid rail 91 is formed to extend in the longitudinal direction of the fluid rail 91, that is, in the conveying direction of the tray 21. Thus, even if the tray 21 mounted on the transport rail 31 is transported, any through hole 91e of the fluid rail 91 covered by the opposed member 93 must communicate with the recess 93a, and the tray 21 moves together with the opposed member 93, so it is arbitrary The through hole 91e of φ and the recess 93a of the opposing member 93 must be communicated with each other. As a result, even if the tray 21 moves, the workpiece 14 can be continuously sucked to the lower end of the suction nozzle 26 (refer to FIG. 2 ).

因此,在托盤搬運裝置10中,能夠一邊使吸嘴26運作一邊使托盤21移動,從而能夠避免將驅使吸嘴26運作的流體泵92搭載在托盤21上。Therefore, in the tray conveying device 10, the tray 21 can be moved while the suction nozzle 26 is operated, so that it is possible to avoid mounting the fluid pump 92 that drives the suction nozzle 26 on the tray 21.

在此,當透過流體泵92對構成流體通路的凹槽91d的空氣進行吸引,並且經由通孔91e吸引對置部件93的凹部93a的空氣時,對置部件93被吸附在流體軌91的上表面,該吸附可能成為托盤21搬運的阻力。Here, when the air in the groove 91d constituting the fluid passage is sucked by the fluid pump 92, and the air in the concave portion 93a of the opposing member 93 is sucked through the through hole 91e, the opposing member 93 is adsorbed on the fluid rail 91 On the surface, the suction may become a resistance to the transportation of the tray 21.

在本實施方式中,為了防止對置部件93被吸附在流體軌91的上表面,在對置部件93上,樞軸支撐有在流體軌91上滾動的輥96。由此,即使將對置部件93與流體軌91的上表面対置,也能夠減少對於托盤21搬運的阻力。In this embodiment, in order to prevent the opposing member 93 from being adsorbed on the upper surface of the fluid rail 91, the opposing member 93 is pivotally supported with a roller 96 that rolls on the fluid rail 91. Thus, even if the opposed member 93 is placed on the upper surface of the fluid rail 91, the resistance to the transportation of the tray 21 can be reduced.

另一方面,也考慮到當將對置部件93從流體軌91的上表面隔開預定間隙與流體軌91對置時,作為流體的空氣從預定間隙流入凹部93a,從而來自與凹部93a連通的吸嘴26的空氣的吸引變得困難。因此,通過將預定間隙設為0-0.1 mm,從而造成自吸嘴26吸引空氣變得困難的空氣量流入凹部93a的情況較少。並且,考慮來自間隔的空氣的流入,能夠通過確保充分的凹槽91d截面積以及通孔91e的個數或大小,從而續行自吸嘴26的空氣的吸引。On the other hand, it is also considered that when the opposing member 93 is opposed to the fluid rail 91 with a predetermined gap from the upper surface of the fluid rail 91, air as a fluid flows into the recess 93a from the predetermined gap, and comes from the communication with the recess 93a. The suction of air by the suction nozzle 26 becomes difficult. Therefore, by setting the predetermined gap to 0-0.1 mm, the amount of air that makes it difficult to suck air from the suction nozzle 26 flows into the concave portion 93a less frequently. In addition, considering the inflow of air from the interval, it is possible to continue the suction of air from the suction nozzle 26 by ensuring a sufficient cross-sectional area of the groove 91d and the number or size of the through holes 91e.

此外,也考慮到如果產生未被對置部件93覆蓋的通孔91e,空氣從該通孔91e流入凹槽91d,從而凹部93a的空氣經由被對置部件93覆蓋的其他的通孔91e與凹槽91d連通,使凹部93a的空氣的吸引變得困難。因此,能夠透過將多個托盤21接續搭載於搬運軌31,並使多個托盤21的對置部件93彼此接近或接觸進行搬運,從而避免對置部件93未覆蓋通孔91e的情況產生。另外,相鄰的對置部件93在彼此對置的端部相互抵接為佳。In addition, it is also considered that if a through hole 91e not covered by the opposing member 93 occurs, air flows from the through hole 91e into the groove 91d, so that the air in the recess 93a passes through the other through holes 91e covered by the opposing member 93 and the recess. The groove 91d communicates with each other, making it difficult to attract air in the recess 93a. Therefore, by successively mounting the plurality of trays 21 on the transport rail 31 and bringing the opposing members 93 of the plurality of trays 21 close to or in contact with each other, it is possible to prevent the opposing member 93 from not covering the through hole 91e. In addition, it is preferable that adjacent facing members 93 abut against each other at the ends facing each other.

並且,也考慮到在搬運軌31的長度較長的情況下,與搬運軌31平行設置的流體軌91也變得較長,從而相對於搭載並搬運托盤21的搬運軌31,流體軌91可能歪曲。因此,透過將對置部件93藉由懸掛單元94安裝在托盤21上,從而對置部件93一直被懸掛單元94朝向流體軌91按壓。其結果,流體軌91的歪曲被懸掛單元94吸收,從而能夠從對置部件93的流體軌91的上表面維持預定間隙,並搬運托盤21。In addition, it is also considered that when the length of the conveying rail 31 is long, the fluid rail 91 arranged in parallel with the conveying rail 31 also becomes longer, so that the fluid rail 91 may be longer than the conveying rail 31 on which the pallet 21 is loaded and conveyed. distort. Therefore, by mounting the opposing member 93 on the tray 21 by the suspension unit 94, the opposing member 93 is always pressed by the suspension unit 94 toward the fluid rail 91. As a result, the distortion of the fluid rail 91 is absorbed by the suspension unit 94, so that a predetermined gap can be maintained from the upper surface of the fluid rail 91 of the opposing member 93, and the tray 21 can be conveyed.

接下來,對本實施方式所起到的作用效果進行說明。Next, the function and effect of this embodiment will be described.

本實施方式所涉及的托盤搬運裝置10,其具備:搬運軌31,其將搭載有吸嘴26的托盤21搭載成能夠移動;托盤搬運單元51,其對搭載於搬運軌31的托盤21進行搬運;流體軌91,其沿著搬運軌31設置,並在內部形成有凹槽91d;以及流體泵92,其設置為與凹槽91d連通,並朝向凹槽91d供給流體或者從凹槽91d吸引流體。在流體軌91形成有使凹槽91d與外部連通的多個通孔91e,在托盤21上設置有對置部件93以及連通路93c,對置部件93形成有對多個通孔91e的一部分進行覆蓋的凹部93a,並且對置部件93與流體軌91對置,連通路93c將凹部93a與吸嘴26連通。The pallet conveying device 10 according to this embodiment includes: a conveying rail 31 that mounts the pallet 21 equipped with the suction nozzle 26 so as to be movable; and a pallet conveying unit 51 that conveys the pallet 21 mounted on the conveying rail 31 Fluid rail 91, which is provided along the conveying rail 31, and formed with a groove 91d inside; and a fluid pump 92, which is provided in communication with the groove 91d, and supplies fluid toward the groove 91d or sucks fluid from the groove 91d . The fluid rail 91 is formed with a plurality of through holes 91e for communicating the groove 91d with the outside. The tray 21 is provided with an opposing member 93 and a communication path 93c. The opposing member 93 is formed with a portion of the plurality of through holes 91e. The recess 93a is covered, the opposed member 93 is opposed to the fluid rail 91, and the communication path 93c communicates the recess 93a with the suction nozzle 26.

本實施方式所涉及的托盤搬運方法,其將搭載有吸嘴26的托盤21搭載於搬運軌31進行搬運,其包含:將內部形成有凹槽91d、並且形成有使凹槽91d與外部連通的多個通孔91e的流體軌91沿著搬運軌31設置;朝向凹槽91d供給流體或者從凹槽91d吸引流體;使形成有對多個通孔91e的一部分進行覆蓋的凹部93a的對置部件93與流體軌91對置;使凹部93a與搭載於托盤21的吸嘴26連通,並一邊使吸嘴26運作,一邊搬運托盤21以及對置部件93。The pallet conveying method according to this embodiment, which mounts the pallet 21 equipped with the suction nozzle 26 on the conveying rail 31 for conveying, includes forming a groove 91d inside and forming a groove 91d to communicate with the outside. The fluid rail 91 of the plurality of through holes 91e is provided along the conveyance rail 31; the fluid is supplied to the groove 91d or the fluid is sucked from the groove 91d; the opposing member is formed with a recess 93a that covers a part of the plurality of through holes 91e 93 is opposed to the fluid rail 91; the recess 93a is communicated with the suction nozzle 26 mounted on the tray 21, and while the suction nozzle 26 is operated, the tray 21 and the opposed member 93 are conveyed.

根據這樣的結構,由於將流體軌91沿著搬運軌31設置,從流體泵92朝向流體軌91供給流體或者吸引流體,將搭載於托盤21的吸嘴26與流體軌91連通,一邊使吸嘴26運作一邊搬運托盤21,因此能夠避免將驅使吸嘴26運作的流體泵26搭載在托盤21上。According to this structure, since the fluid rail 91 is provided along the conveyance rail 31, the fluid is supplied or sucked from the fluid pump 92 toward the fluid rail 91, and the suction nozzle 26 mounted on the tray 21 is communicated with the fluid rail 91 while making the suction nozzle Since the tray 21 is transported while operating at 26, it is possible to avoid mounting the fluid pump 26 that drives the operation of the suction nozzle 26 on the tray 21.

此外,即使在將多個托盤21搭載於搬運軌31進行搬運的情況下,也能夠透過將流體軌91沿著搬運軌31設置,使搭載於多個托盤21上的吸嘴26分別與流體軌91連結。其結果,即使是單一的流體泵92,也能夠透過利用流體泵92朝向流體軌91供給流體或吸引流體,使分別搭載於多個托盤21的吸嘴26同時運作。In addition, even when a plurality of trays 21 are mounted on the conveyance rail 31 for conveyance, the fluid rail 91 can be arranged along the conveyance rail 31, so that the suction nozzles 26 mounted on the plurality of trays 21 can be connected to the fluid rail respectively. 91 links. As a result, even a single fluid pump 92 can simultaneously operate the suction nozzles 26 respectively mounted on the plurality of trays 21 by supplying or sucking fluid to the fluid rail 91 by the fluid pump 92.

此外,在本實施方式中,即使在托盤21被托盤搬運單元51搬運至搬運軌31的任意位置的情況下,凹部93a也均對多個通孔91e的一部分進行覆蓋。In addition, in this embodiment, even when the pallet 21 is conveyed by the pallet conveying unit 51 to an arbitrary position of the conveying rail 31, the recessed part 93a all covers a part of the some through-hole 91e.

根據這樣的結構,能夠藉由凹部93a常態覆蓋形成於流體軌91的多個通孔91e的一部分,使托盤21的吸嘴26以及流體軌91的凹槽91d確實地連通。其結果,能夠一邊使吸嘴26運作一邊搬運托盤21。According to such a structure, a part of the plurality of through holes 91e formed in the fluid rail 91 can be normally covered by the recess 93a, so that the suction nozzle 26 of the tray 21 and the recess 91d of the fluid rail 91 can be reliably communicated. As a result, the tray 21 can be conveyed while operating the suction nozzle 26.

此外,在本實施方式中,在對置部件93樞軸支撐有輥96,輥96在流體軌91上滾動,並以隔開預定間隙的方式使對置部件93與流體軌91對置。In addition, in this embodiment, a roller 96 is pivotally supported on the opposing member 93, the roller 96 rolls on the fluid rail 91, and the opposing member 93 and the fluid rail 91 are opposed to each other with a predetermined gap.

根據這樣的結構,由於能夠防止對置部件93被吸附在流體軌91的上表面,因此能夠去除由對置部件93與流體軌91接觸而產生的滑動阻力。其結果,能夠減少對於托盤21搬運的阻力。According to such a structure, since the opposing member 93 can be prevented from being adsorbed on the upper surface of the fluid rail 91, the sliding resistance generated by the opposing member 93 and the fluid rail 91 can be removed. As a result, the resistance to the transportation of the tray 21 can be reduced.

此外,在本實施方式中,在托盤21設置有懸掛單元94,懸掛單元94朝向流體軌91按壓對置部件93。In addition, in this embodiment, a suspension unit 94 is provided on the tray 21, and the suspension unit 94 presses the opposing member 93 toward the fluid rail 91.

根據該結構,流體軌91的歪曲被懸掛單元94吸收,從而能夠從對置部件93的流體軌91的上表面維持預定間隙,並搬運托盤21。According to this structure, the distortion of the fluid rail 91 is absorbed by the suspension unit 94, so that a predetermined gap can be maintained from the upper surface of the fluid rail 91 of the opposing member 93, and the tray 21 can be conveyed.

此外,在本實施方式中,在搬運軌31上搭載有沿著搬運軌31排列的多個托盤21,相鄰的對置部件93在彼此對置的端部相互抵接。In addition, in the present embodiment, a plurality of trays 21 arranged along the conveying rail 31 are mounted on the conveying rail 31, and the adjacent facing members 93 abut against each other at the ends facing each other.

根據該結構,由於相鄰的對置部件93在彼此對置的端部相互抵接,因此能夠使相鄰對置部件93在彼此的端部之間沒有間隙。其結果,在托盤21的搬運中,能夠避免發生對置部件93未覆蓋通孔91e的情況,從而能夠防止由通孔91e引起的漏氣。According to this structure, since the adjacent opposing members 93 abut against each other at the ends facing each other, it is possible to prevent the adjacent opposing members 93 from having a gap between the ends of each other. As a result, during the transportation of the pallet 21, it is possible to avoid the occurrence of the opposing member 93 not covering the through hole 91e, and it is possible to prevent air leakage due to the through hole 91e.

此外,在本實施方式中,托盤21形成為,在流體軌91的延伸方向上的端部未從對置部件93的端部突出。In addition, in this embodiment, the tray 21 is formed so that the end in the extending direction of the fluid rail 91 does not protrude from the end of the opposed member 93.

根據該結構,由於在流體軌91的延伸方向上的托盤21的端部未從對置部件93的端部突出,因此能夠防止相鄰托盤21在彼此端部抵接而導致相鄰對置部件93在彼此端部之間產生間隙。其結果,在托盤21的搬運中,能夠避免發生對置部件93未覆蓋通孔91e的情況,從而能夠防止由通孔91e引起的漏氣。According to this structure, since the end of the tray 21 in the extending direction of the fluid rail 91 does not protrude from the end of the opposing member 93, it is possible to prevent the adjacent trays 21 from contacting each other at the ends and causing the adjacent opposing member. 93 creates a gap between the ends of each other. As a result, during the transportation of the pallet 21, it is possible to avoid the occurrence of the opposing member 93 not covering the through hole 91e, and it is possible to prevent air leakage due to the through hole 91e.

此外,在本實施方式中,托盤搬運裝置10還具備:返回軌41,其與搬運軌31平行設置,並將托盤21搭載成能夠移動;托盤返回單元61,其使搭載於返回軌41的托盤21朝向與搬運方向相反的方向移動;返回托盤移載機構70,其將搭載於搬運軌31的托盤21從搬運軌31的頂端移載至返回軌41的頂端;以及搬運托盤移載機構80,其將搭載於返回軌41的托盤21從返回軌41的基端移載至搬運軌31的基端。In addition, in this embodiment, the pallet conveying device 10 further includes: a return rail 41 that is arranged in parallel with the conveyance rail 31 and mounts the pallet 21 so as to be movable; and a pallet return unit 61 that enables the pallet mounted on the return rail 41 21 moves in the direction opposite to the conveying direction; the return tray transfer mechanism 70, which transfers the tray 21 loaded on the transfer rail 31 from the top of the transfer rail 31 to the top of the return rail 41; and the transfer tray transfer mechanism 80, This transfers the tray 21 mounted on the return rail 41 from the base end of the return rail 41 to the base end of the conveyance rail 31.

根據該結構,能夠以使托盤21沿著搬運軌31以及返回軌41循環的方式搬運托盤21。According to this structure, the pallet 21 can be conveyed so that the pallet 21 may circulate along the conveyance rail 31 and the return rail 41. As shown in FIG.

此外,在本實施方式中,托盤搬運單元51具有:搬運帶52,搬運帶52設置為能夠沿著搬運軌31循環;以及伺服馬達59,伺服馬達59使搬運帶52循環。並且,托盤返回單元61具有:返回帶62,返回帶62設置為能夠沿著返回軌41循環;以及伺服馬達69,伺服馬達69使返回帶62循環。在托盤21上設置有卡止部件24,卡止部件24與托盤21一起在搬運帶52或返回帶62的寬度方向上移動,從而能夠與搬運帶52或返回帶62卡止。In addition, in this embodiment, the pallet conveying unit 51 has a conveying belt 52 that is provided to be able to circulate along the conveying rail 31 and a servo motor 59 that circulates the conveying belt 52. In addition, the tray return unit 61 has a return belt 62 that is provided to be able to circulate along the return rail 41 and a servo motor 69 that circulates the return belt 62. The pallet 21 is provided with a locking member 24, and the locking member 24 moves together with the pallet 21 in the width direction of the conveying belt 52 or the return belt 62 so as to be able to be locked with the conveying belt 52 or the return belt 62.

根據該結構,由於托盤21獨立於搬運帶52或返回帶62的移動被禁止,因此托盤21與搬運帶52或返回帶62卡止而被搬運。According to this structure, since the movement of the pallet 21 independently of the conveying belt 52 or the return belt 62 is prohibited, the pallet 21 is caught by the conveying belt 52 or the return belt 62 and conveyed.

此外,將多個托盤21連續地搭載於搬運軌31上,並一邊使設置於多個托盤21的對置部件93彼此接近或者抵接,一邊搬運托盤21。In addition, the plurality of pallets 21 are continuously mounted on the conveyance rail 31, and the pallets 21 are conveyed while the opposing members 93 provided on the plurality of pallets 21 approach or abut each other.

根據該結構,在托盤21的搬運中,能夠避免發生對置部件93未覆蓋通孔91e的情況,從而能夠防止由通孔91e引起的漏氣。According to this structure, it is possible to prevent the counter member 93 from not covering the through hole 91e during the transportation of the pallet 21, and it is possible to prevent air leakage due to the through hole 91e.

以上,雖然對本發明的實施方式進行了說明,但上述實施方式僅僅示出了本發明的應用例的一部分,並不意味著將本發明的技術範圍限定於上述實施方式的具體的結構。As mentioned above, although the embodiment of the present invention has been described, the above-mentioned embodiment only shows a part of the application example of the present invention, and does not mean that the technical scope of the present invention is limited to the specific configuration of the above-mentioned embodiment.

接下來,對本發明所涉及的改變例進行說明。Next, a modification example according to the present invention will be described.

在上述的實施方式中,說明了對置部件93在流體軌91方向的長度W2與托盤21的台座23在流體軌91方向的長度W1相比較長的情況。然而,對置部件93在流體軌91方向的長度W2,不僅限於此,也可以與托盤21的台座23在流體軌91方向上的長度W1相同。即使在該情況下,也能夠透過將多個托盤21連續地搭載於搬運軌31上,並使多個托盤21的對置部件93相互接近或接觸而對托盤21進行搬運,從而避免發生對置部件93未覆蓋通孔91e的情況。In the above-described embodiment, the case where the length W2 of the opposed member 93 in the direction of the fluid rail 91 is longer than the length W1 of the base 23 of the tray 21 in the direction of the fluid rail 91 has been described. However, the length W2 of the opposed member 93 in the direction of the fluid rail 91 is not limited to this, and may be the same as the length W1 of the base 23 of the tray 21 in the direction of the fluid rail 91. Even in this case, it is possible to transport the pallets 21 by continuously mounting the plurality of pallets 21 on the transport rail 31 and bringing the opposing members 93 of the plurality of pallets 21 close to or in contact with each other, thereby avoiding the occurrence of opposing. The case where the component 93 does not cover the through hole 91e.

此外,在上述實施方式中,說明了利用電氣驅動式的伺服馬達59、69使滑輪55、66旋轉從而使搬運帶52或返回帶62循環的情況。然而,只要能夠使滑輪55、66旋轉,也可以使用流體壓力缸或流體壓力馬達代替伺服馬達。In addition, in the above-mentioned embodiment, the case where the electric drive type servomotor 59,69 rotates the pulleys 55,66, and circulates the conveyance belt 52 or the return belt 62 was demonstrated. However, as long as the pulleys 55 and 66 can be rotated, a fluid pressure cylinder or a fluid pressure motor may be used instead of the servo motor.

此外,在上述實施方式中,說明了不讓流體軌91沿著返回軌41,在搭載於返回軌41的托盤21中,不使吸嘴26運作的情況。然而,不僅限於此,也可以使流體軌91沿著使托盤21後退的返回軌41形成。在該情況下,透過使對置部件93與沿著返回軌41設置的流體軌91對置,從而即使在搭載於返回軌41的托盤21中,也能夠使吸嘴26運作。In addition, in the above-mentioned embodiment, the case where the fluid rail 91 is not allowed to follow the return rail 41 and the suction nozzle 26 is not operated in the tray 21 mounted on the return rail 41 has been described. However, it is not limited to this, and the fluid rail 91 may be formed along the return rail 41 that retreats the tray 21. In this case, by opposing the opposing member 93 and the fluid rail 91 provided along the return rail 41, even in the tray 21 mounted on the return rail 41, the suction nozzle 26 can be operated.

此外,在上述實施方式中,說明了流體壓力設備為透過空氣的吸引而使吸嘴26吸附工件14的情況。然而,流體壓力設備只要能夠利用流體運作,並不限於此,例如,也可以是利用流體的吸引使工件14旋轉的部件、或者對工件14進行加工的部件。In addition, in the above-mentioned embodiment, the case where the suction nozzle 26 sucks the workpiece 14 by the suction nozzle 26 through the suction of the air has been described. However, the fluid pressure device is not limited to this as long as it can be operated with fluid. For example, it may be a component that rotates the workpiece 14 by suction of fluid or a component that processes the workpiece 14.

此外,在上述實施方式中,透過利用流體泵92將流體軌91的凹槽91d的空氣吸引變為負壓,從而使吸嘴26運作。然而,也可以朝向凹槽91d供給流體進行加壓,並將利用從凹槽91d供給的流體而運作的吸嘴26設置在托盤21上。In addition, in the above-mentioned embodiment, the suction nozzle 26 is operated by using the fluid pump 92 to suck the air of the groove 91d of the fluid rail 91 into a negative pressure. However, it is also possible to supply fluid to the groove 91d for pressurization, and to provide the suction nozzle 26 operating with the fluid supplied from the groove 91d on the tray 21.

該情況下,也考慮到對與凹槽91d連通的通孔91e進行覆蓋的對置部件93浮起從而流體洩露的情況。因此,透過將把對置部件93朝向流體軌91按壓的懸掛單元94設置在托盤21上,從而防止對置部件93從流體軌91浮起,並抑制流體的洩露,從而能夠確保吸嘴26的運作。In this case, it is also considered that the opposed member 93 covering the through hole 91e communicating with the groove 91d floats and the fluid leaks. Therefore, by providing the suspension unit 94 that presses the opposing member 93 toward the fluid rail 91 on the tray 21, the opposing member 93 is prevented from floating from the fluid rail 91 and the leakage of the fluid is suppressed, thereby ensuring the suction nozzle 26 Operation.

本申請主張基於在2019年8月21日向日本專利局提出的日本專利申請號特願2019-151021的優先權,並透過參照的方式在本說明書中引入了該申請的全部內容。This application claims priority based on Japanese Patent Application No. Japanese Patent Application No. 2019-151021 filed with the Japan Patent Office on August 21, 2019, and incorporates the entire content of this application in this specification by reference.

10:托盤搬運裝置 21:托盤 24:卡止部件 26:流體壓力設備 31:搬運軌 41:返回軌 51:托盤搬運單元 52:搬運帶 59:伺服馬達(第一循環單元) 61:托盤返回單元 62:返回帶 69:伺服馬達(第二循環單元) 70:返回托盤移載機構 80:搬運托盤移載機構 91:流體軌 91d:凹槽(流體通路) 91e:通孔 92:流體泵(流體供給吸引單元) 93:對置部件 93a:凹部 93c:連通路 94:懸掛單元 96:輥 W1:托盤的長度 W2:對置部件的長度10: Pallet handling device 21: Tray 24: Blocking parts 26: Fluid pressure equipment 31: Transport rail 41: Return to track 51: Pallet handling unit 52: Carrying belt 59: Servo motor (first circulation unit) 61: Pallet return unit 62: return belt 69: Servo motor (second circulation unit) 70: Return to the tray transfer mechanism 80: pallet transfer mechanism 91: fluid rail 91d: Groove (fluid path) 91e: Through hole 92: Fluid pump (fluid supply suction unit) 93: Opposite parts 93a: recess 93c: connecting path 94: Suspension unit 96: Roll W1: the length of the pallet W2: the length of the opposing part

圖1是表示本發明實施方式所涉及的托盤搬運裝置的正視圖。 圖2是沿著圖1的A-A線的剖視圖。 圖3是表示托盤的正面的圖1的E部分放大圖。 圖4是從上方對搭載於搬運軌的托盤進行觀察的俯視圖。 圖5是表示托盤與循環帶卡止狀態的沿著圖4的B-B線的剖視圖。 圖6是表示托盤移載機構的沿著圖9的D-D線的放大剖視圖。 圖7是表示托盤移載機構的沿著圖10的C-C線的放大剖視圖。 圖8是表示將托盤沿著搬運軌搬運之前的狀態的俯視圖。 圖9是表示將托盤沿著搬運軌搬運之後、並將該托盤移動至返回軌之前的狀態的俯視圖。 圖10是表示托盤移動至返回軌之後、該托盤沿著返回軌後退之前的狀態的俯視圖。 圖11是表示托盤沿著返回軌後退之後、該托盤移動至搬運軌之前的狀態的俯視圖。Fig. 1 is a front view showing a pallet conveying device according to an embodiment of the present invention. Fig. 2 is a cross-sectional view taken along the line A-A in Fig. 1. Fig. 3 is an enlarged view of part E in Fig. 1 showing the front surface of the tray. Fig. 4 is a plan view of the pallet mounted on the conveyance rail viewed from above. Fig. 5 is a cross-sectional view taken along the line B-B of Fig. 4 showing a locked state of the tray and the endless belt. Fig. 6 is an enlarged cross-sectional view taken along the line D-D of Fig. 9 showing the tray transfer mechanism. Fig. 7 is an enlarged cross-sectional view taken along the line C-C of Fig. 10 showing the tray transfer mechanism. Fig. 8 is a plan view showing a state before the pallet is transported along the transport rail. Fig. 9 is a plan view showing a state after the pallet is conveyed along the conveyance rail and before the pallet is moved to the return rail. Fig. 10 is a plan view showing a state after the tray is moved to the return rail and before the tray is retreated along the return rail. Fig. 11 is a plan view showing a state before the pallet is moved to the conveyance rail after the pallet has retreated along the return rail.

10:托盤搬運裝置 10: Pallet handling device

11、12、13:加工站 11, 12, 13: processing station

16:工件供給機 16: Workpiece feeding machine

17:工件回收機 17: Workpiece recycling machine

21:托盤 21: Tray

22:直線運動塊 22: Linear motion block

23:台座 23: Pedestal

24:卡止部件 24: Blocking parts

26:流體壓力設備 26: Fluid pressure equipment

27:夾具 27: Fixture

31:搬運軌 31: Transport rail

32:支撐板 32: Support plate

34:安裝板 34: mounting plate

51:托盤搬運單元 51: Pallet handling unit

52:搬運帶 52: Carrying belt

52c:下側搬運帶 52c: Lower transport belt

52d:上側搬運帶 52d: upper conveying belt

53、54:支撐台 53, 54: support table

55:滑輪 55: pulley

56:第二滑輪 56: second pulley

57:帶軌 57: belt track

59:伺服馬達(第一循環單元) 59: Servo motor (first circulation unit)

59a:旋轉軸 59a: Rotation axis

71、81:架台 71, 81: stand

72、82:可動體 72, 82: movable body

72a:台板 72a: platen

72b:短軌 72b: short track

73、83:軌道 73, 83: Orbit

74、84:台部件 74, 84: Taiwan parts

75、85:滾珠螺桿 75, 85: Ball screw

91:流體軌 91: fluid rail

91a:基材 91a: Substrate

91b:蓋板 91b: cover

91d:凹槽(流體通路) 91d: Groove (fluid path)

91e:通孔 91e: Through hole

91f:傾斜面 91f: Inclined surface

92:流體泵(流體供給吸引單元) 92: Fluid pump (fluid supply suction unit)

92a:連通路 92a: connecting path

93:對置部件 93: Opposite parts

93a:凹部 93a: recess

93c:連通路 93c: connecting path

94:懸掛單元 94: Suspension unit

96:輥 96: Roll

Claims (12)

一種托盤搬運裝置,其具備: 搬運軌,其將搭載有流體壓力設備的托盤搭載成能夠移動; 托盤搬運單元,其對搭載於所述搬運軌的所述托盤進行搬運; 流體軌,其沿著所述搬運軌設置,並在內部形成有流體通路;以及 流體供給吸引單元,其設置為與所述流體通路連通,並朝向所述流體通路供給流體或者從所述流體通路吸引流體; 在所述流體軌形成有使所述流體通路與外部連通的多個通孔, 在所述托盤上設置有對置部件以及連通路,所述對置部件形成有對多個所述通孔的一部分進行覆蓋的凹部,並且所述對置部件與所述流體軌對置,所述連通路將所述凹部與所述流體壓力設備連通。A pallet handling device, which is provided with: Carrying rail, which carries the pallet equipped with fluid pressure equipment to be able to move; A pallet handling unit, which transports the pallet mounted on the handling rail; A fluid rail, which is arranged along the conveying rail and has a fluid passage formed inside; and A fluid supply and suction unit, which is arranged to communicate with the fluid passage and supply fluid to the fluid passage or suck fluid from the fluid passage; A plurality of through holes are formed in the fluid rail to allow the fluid passage to communicate with the outside, The tray is provided with an opposing member and a communication path, the opposing member is formed with a recess covering a part of the plurality of through holes, and the opposing member opposes the fluid rail, so The communication path communicates the recess with the fluid pressure device. 如請求項1所記載的托盤搬運裝置,其中, 在所述托盤被所述托盤搬運單元搬運至所述搬運軌的任意位置的情況下,所述凹部均對多個所述通孔的一部分進行覆蓋。The pallet handling device described in claim 1, wherein: When the pallet is conveyed to any position of the conveying rail by the pallet conveying unit, the recesses all cover a part of the plurality of through holes. 如請求項1所記載的托盤搬運裝置,其中, 在所述對置部件樞軸支撐有輥,所述輥在所述流體軌上滾動,並以隔開預定間隙的方式使所述對置部件與所述流體軌對置。The pallet handling device described in claim 1, wherein: A roller is pivotally supported on the opposing member, the roller rolls on the fluid rail, and the opposing member is opposed to the fluid rail with a predetermined gap. 如請求項3所記載的托盤搬運裝置,其中, 在所述托盤設置有懸掛單元,所述懸掛單元朝向所述流體軌按壓所述對置部件。The pallet handling device described in claim 3, wherein: A suspension unit is provided on the tray, and the suspension unit presses the opposed member toward the fluid rail. 如請求項1所記載的托盤搬運裝置,其中, 在所述搬運軌上搭載有沿著所述搬運軌排列的多個所述托盤, 相鄰的所述對置部件在彼此對置的端部相互抵接。The pallet handling device described in claim 1, wherein: A plurality of the pallets arranged along the conveying rail are mounted on the conveying rail, The adjacent opposing members abut against each other at the ends facing each other. 如請求項5中所記載的托盤搬運裝置,其中, 所述托盤形成為,在所述流體軌的延伸方向上的端部未從所述對置部件的所述端部突出。Such as the pallet handling device described in claim 5, wherein: The tray is formed so that an end in the extending direction of the fluid rail does not protrude from the end of the opposed member. 如請求項1所記載的托盤搬運裝置,其中,還具備: 返回軌,其與所述搬運軌平行設置,並將所述托盤搭載成能夠移動; 托盤返回單元,其使搭載於所述返回軌的所述托盤朝向與搬運方向相反的方向移動; 返回托盤移載機構,其將搭載於所述搬運軌的所述托盤從所述搬運軌的頂端移載至所述返回軌的頂端;以及 搬運托盤移載機構,其將搭載於所述返回軌的所述托盤從所述返回軌的基端移載至所述搬運軌的基端。The pallet handling device described in claim 1, which also includes: A return rail, which is arranged in parallel with the transport rail and carries the pallet so as to be movable; A pallet return unit that moves the pallet mounted on the return rail in a direction opposite to the conveying direction; A return tray transfer mechanism that transfers the pallet mounted on the transfer rail from the top end of the transfer rail to the top end of the return rail; and A transport tray transfer mechanism that transfers the tray mounted on the return rail from the base end of the return rail to the base end of the transport rail. 如請求項7所記載的托盤搬運裝置,其中, 所述托盤搬運單元具有: 搬運帶,所述搬運帶設置為能夠沿著所述搬運軌循環;以及 第一循環單元,所述第一循環單元使所述搬運帶循環; 所述托盤返回單元具有: 返回帶,所述返回帶設置為能夠沿著所述返回軌循環;以及 第二循環單元,所述第二循環單元使所述返回帶循環; 在所述托盤上設置有卡止部件,所述卡止部件與所述托盤一起在所述搬運帶或所述返回帶的寬度方向上移動,從而所述卡止部件能夠與所述搬運帶或所述返回帶卡止。The pallet handling device described in claim 7, wherein: The pallet handling unit has: A conveying belt, the conveying belt is arranged to be able to circulate along the conveying rail; and A first circulation unit, the first circulation unit circulates the conveying belt; The tray returning unit has: A return belt, the return belt being configured to be able to circulate along the return rail; and A second circulation unit, the second circulation unit circulates the return belt; A locking member is provided on the pallet, and the locking member moves together with the pallet in the width direction of the conveying belt or the return belt, so that the locking member can interact with the conveying belt or The return belt is stuck. 一種托盤搬運方法,其將搭載有流體壓力設備的托盤搭載於搬運軌進行搬運;其包含: 將內部形成有流體通路、並且形成有使所述流體通路與外部連通的多個通孔的流體軌沿著所述搬運軌設置; 朝向所述流體通路供給流體或者從所述流體通路吸引流體; 使形成有對多個所述通孔的一部分進行覆蓋的凹部的對置部件與所述流體軌對置; 使所述凹部與搭載於所述托盤的所述流體壓力設備連通,並一邊使所述流體壓力設備運作,一邊搬運所述托盤以及所述對置部件。A pallet handling method, which loads a pallet equipped with a fluid pressure device on a handling rail for handling; it includes: Arranging a fluid rail with a fluid passage formed inside and a plurality of through holes for communicating the fluid passage with the outside along the conveying rail; Supplying fluid to the fluid passage or sucking fluid from the fluid passage; Opposing the fluid rail with the opposing member formed with the recessed portion covering a part of the plurality of through holes; The recessed portion is communicated with the fluid pressure equipment mounted on the tray, and the tray and the opposing member are transported while the fluid pressure equipment is operated. 如請求項9所記載的托盤搬運方法,其中, 在所述對置部件樞軸支撐有輥,所述輥在所述流體軌上滾動,並一邊以隔開預定間隙的方式使所述對置部件與所述流體軌對置,一邊搬運所述托盤。Such as the pallet handling method described in claim 9, wherein: A roller is pivotally supported on the opposing member, and the roller rolls on the fluid rail, and the opposing member and the fluid rail are opposed to each other with a predetermined gap while the roller is transported. tray. 如請求項10所記載的托盤搬運方法,其中, 一邊將所述對置部件按壓在所述流體軌上,一邊搬運所述托盤。Such as the pallet handling method described in claim 10, wherein: While pressing the opposing member on the fluid rail, the tray is conveyed. 如請求項9至11中任一項所記載的托盤搬運方法,其中, 將多個所述托盤連續地搭載於所述搬運軌上,並一邊使被設置於多個所述托盤的所述對置部件彼此接近或者抵接,一邊搬運所述托盤。The pallet handling method described in any one of claims 9 to 11, wherein: The plurality of pallets are continuously mounted on the conveying rail, and the pallets are conveyed while the opposed members provided on the plurality of pallets approach or abut each other.
TW109126965A 2019-08-21 2020-08-07 Tray conveying device and tray conveying method wherein the tray conveying device is provided with a conveying rail, a tray conveying unit, a fluid rail, and a fluid supply and suction unit TW202108286A (en)

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