TW202106393A - Nozzle, spray gun comprising same and working method of spray gun - Google Patents

Abstract

The invention discloses a nozzle, a spray gun comprising the nozzle and a working method of the spray gun. The spray gun comprises a discharging part, a drainage part and a gun body. The discharging part comprises a first area and a second area, the side wall of the first area is provided with a plurality of first discharging ports, and the first discharging ports communicate with the inner space of the discharging part; the drainage part is close to the second area of the discharging part and communicates with the inner space of the discharging part, the side wall of the drainage part is provided with a drainage groove, and the drainage groove communicates with the inner space of the drainage part; and the gun body is connected with the drainage part and used for conveying paint into the drainage part, and the paint enters the discharging part from the drainage part and is sprayed out from the first discharging ports. The spray gun can be used for spraying the inner side wall of a high-aspect-ratio opening.

Description

Nozzle, spray gun containing nozzle and working method thereof

The invention relates to the field of semiconductors, in particular to a nozzle, a spray gun containing the nozzle and a working method thereof.

As an important method of surface treatment, spraying has a wide range of applications in the field of spraying processing of semiconductor equipment parts. As a necessary tool for spraying, the performance of the spray gun directly determines the quality of the spraying effect. The spray gun includes a gun body and a nozzle connected to the gun body. The design of the nozzle determines whether it can spray semiconductor equipment parts and whether the spraying effect is good or bad.

However, it is difficult for existing nozzles to spray the inner sidewalls of openings with high aspect ratios in semiconductor equipment components.

The technical solution of the present invention to solve the technical problem is to provide a nozzle, a spray gun containing the nozzle and a working method thereof, so as to spray electrostatic paint on the surface in the opening with a high aspect ratio.

In order to solve the above technical problems, the present invention provides a nozzle including: a discharging part, the discharging part includes a first zone and a second zone, the side wall of the first zone is provided with a plurality of first discharging ports, the first discharging ports Connect with the internal space of the discharge part; the drainage part, the drainage part is close to the second zone of the discharge part and communicates with the internal space of the discharge part, and the side wall of the drainage part is provided with a drainage groove, the drainage groove and the internal space of the drainage part Connected.

Preferably, the discharging part has a tubular structure.

Preferably, the end of the first zone of the discharging part is provided with a second discharging port.

Preferably, the side wall of the second area is provided with a plurality of openings.

Preferably, a baffle is provided between the discharging part and the drainage part, and the outer diameter of the baffle is larger than the outer diameter of the discharging part.

Preferably, the outer diameter of the drainage part is greater than the outer diameter of the discharge part, and the outer diameter of the baffle is greater than the outer diameter of the drainage part.

Preferably, it further comprises: a shielding member sheathed on the drainage part, the shielding member is used to adjust the size of the drainage groove.

Preferably, the shielding member is moved in a direction away from or close to the baffle to adjust the size of the drainage groove.

Preferably, the side wall of the shielding member has a groove, so that the drainage portion and the shielding member move relative to each other in the circumferential direction of the drainage portion, so that the groove and the drainage groove overlap completely or partially, so as to adjust the size of the drainage groove opening.

Preferably, the number of first discharge ports is 1 to 500; the area of each first discharge port is 0.1 square millimeters to 5 square millimeters; the distance between adjacent first discharge ports is 0.1 Millimeters ~ 10 millimeters.

Preferably, the number of second discharge ports is 1-10; the area of each second discharge port is 0.1 square millimeter to 5 square millimeters; the distance between adjacent second discharge ports is 2 mm ~10 mm.

Preferably, the number of drainage grooves is 1 to 5, and the area of each drainage groove is 4 square millimeters to 50 square millimeters.

Preferably, the projection shape of the first discharging port on the side wall of the discharging part includes a circle, an ellipse, a rectangle, a triangle, a rhombus or other irregular shapes.

Preferably, the projection shape of the drainage groove on the side wall of the drainage portion includes a circle, an ellipse, a rectangle, a triangle, a diamond or other irregular shapes.

Preferably, the material of the discharging part includes: polymer material, metal or inorganic non-metal material.

Preferably, the length of the discharging portion is 1 mm to 300 mm; the cross-sectional area of the discharging portion is greater than or equal to 1 square millimeter.

Correspondingly, the present invention further provides a spray gun including a nozzle, which includes: a discharge part, the discharge part includes a first zone and a second zone, the side wall of the first zone is provided with a plurality of first discharge ports, the first discharge The discharge port is in communication with the internal space of the discharge part; the drainage part, the drainage part is close to the second zone of the discharge part and communicates with the internal space of the discharge part, and the side wall of the drainage part is provided with a drainage groove, which is connected to the drainage part. The internal space is connected; the gun body connected with the drainage part, the gun body is used for conveying paint into the drainage part, and the paint enters the discharge part from the drainage part and is sprayed from the first discharge port.

Preferably, the coating is liquid.

Preferably, the paint is a charged powder; the spray gun further includes: an electrode assembly located in the gun body.

Correspondingly, the present invention further provides a working method of a spray gun, which includes: providing semiconductor equipment parts with openings in the semiconductor equipment parts; inserting the discharge part into the opening, and spraying paint on the inner side wall of the opening to form film.

Preferably, the semiconductor device component includes an inner liner; the inner liner includes a gas diffusion tank and an opening communicating with the gas diffusion tank, and the opening is used to provide a reaction gas into the processing space of the semiconductor device.

Preferably, the outer diameter of the discharge part is smaller than the diameter of the opening.

Preferably, the aspect ratio of the opening is greater than or equal to 0.5.

Preferably, the film includes a first film layer located on the inner sidewall of the opening and a second film layer located on the surface of the first film layer; the method for forming the first film layer includes: inserting the first discharge port into the opening, The first coating is sprayed on the inner side wall of the opening to form the first film layer; the method for forming the second film layer includes: inserting the second discharge port into the opening, and spraying on the surface of the first film layer on the inner side wall of the opening The second paint forms a second film layer; the first paint is a liquid; the second paint is a charged powder.

Compared with the prior art, the technical solution of the embodiment of the present invention has the following beneficial effects:

In the working method of the spray gun provided by the technical scheme of the present invention, the discharging part is inserted into the opening of the semiconductor equipment component, and the gun body is used for conveying paint into the drainage part. Since the side wall of the drainage part has a drainage groove, the drainage groove can release part of the pressure, so that the kinetic energy of the paint is reduced, and the speed of the paint sprayed from the first discharge port is not too fast, so that the paint can adhere to the inner side wall of the opening Above, it can be seen that the spray gun can spray paint on the inner wall surface of the opening with high aspect ratio. The paint is used to form a thin film, and the thin film is used to protect the inner sidewalls of semiconductor device components.

Further, the side wall of the second zone is further provided with a plurality of openings, the openings are used to further release part of the pressure, so that the spraying speed of the paint from the first discharge port is not too fast, which is beneficial for the paint to be adsorbed on the inner side wall of the opening.

Further, the first discharge port is used for spraying process on the inner side wall of the corresponding opening in the first zone. After the spraying process is completed in the first zone, the discharge part is moved to the inside of the corresponding opening in the second zone. The side wall is used to perform a spraying process on the inner side wall of the corresponding opening in the second area. When the inner wall of the opening in the first zone is sprayed, part of the coating will be sprayed from the opening in the second zone, and part of the coating will be adsorbed on the inner side wall of the corresponding opening in the second zone. Later, when the discharge part moves to When the inner side wall of the corresponding opening in the second zone is sprayed on the second zone with the first discharge port, the coating thickness of the inner side wall of the corresponding opening in the second zone is greater than that of the corresponding opening in the first zone The thickness of the paint on the inner side wall is thick. In order to compensate for the difference in paint thickness between the first zone and the second zone, a second discharge port is provided at the end of the first zone of the discharging part, and the second discharge port is on the inner side wall of the corresponding opening in the second zone. Part of the paint will also be sprayed during the spraying process. Therefore, it is beneficial to improve the thickness consistency of the paint on the inner side wall of the opening.

As mentioned in the prior art, it is difficult for the existing spray gun to spray the inner surface of the opening with high aspect ratio.

In order to solve the above technical problems, the technical solution of the present invention provides a spray gun including a nozzle including: a discharge part, the discharge part includes a first zone and a second zone, the side wall of the first zone is provided with a plurality of first discharge ports, A discharge port is communicated with the internal space of the discharge part; the drainage part, the drainage part is close to the second zone of the discharge part and communicates with the internal space of the discharge part, and the side wall of the drainage part is provided with a drainage groove, the drainage groove and the drainage The internal space of the part is connected; the gun body connected with the drainage part, the gun body is used to transport the paint into the drainage part, and the paint enters the discharge part from the drainage part and is sprayed out from the first discharge port. The spray gun can spray the inner wall of the opening with high aspect ratio.

In order to make the above objects, features and beneficial effects of the present invention more obvious and easy to understand, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

Fig. 1 is a schematic structural diagram of a nozzle for a spray gun provided by the present invention.

Please refer to FIG. 1, the discharging part 100 includes a first zone A and a second zone B. The side wall of the first zone A is provided with a plurality of first discharging ports 101, the first discharging port 101 and the inside of the discharging part 100 Space communication; the drainage part 102 is close to the second zone B of the discharge part 100 and communicates with the internal space of the discharge part 100, and the side wall of the drainage part 102 is provided with a drainage groove 103, which communicates with the internal space of the drainage part 102 .

In this embodiment, the discharging part 100 has a circular tubular structure.

In this embodiment, the material of the discharging part 100 includes: polymer materials, metals or inorganic non-metallic materials.

In this embodiment, the nozzle is used in an electrostatic spray gun, and the paint sprayed by the electrostatic spray gun is a charged powder.

In other embodiments, the nozzle is used in an air spray gun, and the paint sprayed by the air spray gun is liquid.

In this embodiment, the length of the discharging portion 100 is 1 mm to 300 mm; the cross-sectional area of the discharging portion 100 is greater than or equal to 1 square millimeter. It can be seen that the outer diameter of the discharging part 100 is small, and the length of the discharging part 100 is longer. Therefore, the electrostatic spray gun including the nozzle can be used to perform the processing of the inner side wall of the opening of the semiconductor processing equipment with a high aspect ratio. Spraying process.

In this embodiment, the first discharge port 101 is used for spraying charged powder, and the sprayed charged powder is used for spraying process on the inner wall surface of the high aspect ratio opening in the semiconductor processing equipment, and the drainage groove 103 is used for releasing part of the pressure , To prevent the powder from being sprayed from the first discharge port 101 at an excessively high speed, which is beneficial for spraying the powder on the surface of the inner side wall of the opening in the semiconductor processing equipment.

In this embodiment, the number of the first discharge ports 101 is 1 to 500; the area of each first discharge port 101 is 0.1 square millimeters to 5 square millimeters; the number of adjacent first discharge ports 101 The distance between them is 0.1 mm to 10 mm. Since the area of each first discharge port 101 is small, the powder discharge flow rate of the first discharge port 101 is small, which facilitates fine work on the inner side wall of the opening, and does not cause pollution to parts that do not need to be sprayed. In addition, the distance between adjacent first outlets 101 is relatively small, so that the inner side walls of the corresponding partial openings between adjacent first outlets 101 are all coated with charged powder, that is to say: The inner sidewalls of the openings corresponding to the area A are coated with charged powder, the charged powder is used to form a thin film, and the thin film is used to protect the inner sidewalls of the opening.

The projection shape of the first discharging port 101 on the side wall of the discharging part 100 includes a circle, an ellipse, a rectangle, a triangle, a diamond, or other irregular shapes.

In this embodiment, the number of drainage grooves 103 is 1 to 5, and the area of each drainage groove 103 is 4 square millimeters to 50 square millimeters.

The projection shape of the drainage groove 103 on the side wall of the drainage portion 102 includes a circle, an ellipse, a rectangle, a triangle, a diamond, or other shapes.

In this embodiment, a baffle 106 is further provided between the discharge part 100 and the drainage part 102.

In this embodiment, the outer diameter of the drainage part 102 and the outer diameter of the baffle 106 are both larger than the outer diameter of the discharge part 100, and the outer diameter of the baffle 106 is larger than the outer diameter of the drainage part 102, and the size of the baffle 106 The inner diameter of the opening is larger than that of the opening, which makes it difficult for the baffle 106 to be inserted into the opening. Therefore, the baffle 106 is used for positioning. When the baffle 106 is difficult to insert into the opening, it means that the discharging part 100 is completely inserted into the opening. In addition, part of the charged powder from the drainage groove 103 will flow out of the drainage groove 103 when the pressure is released. The baffle 106 is used to block the charged powder flowing out of the drainage groove 103 from entering the opening to prevent contamination of the inner side wall of the opening.

In this embodiment, it further includes: a shielding member 150 sheathed on the drainage part 102, and the shielding member 150 is used to adjust the size of the drainage groove 103.

In this embodiment, the shield 150 moves in the direction a1 away from or close to the baffle 106 to adjust the size of the drainage groove 103. When the kinetic energy of the charged powder sprayed from the first discharge port 101 needs to be large, the shield 150 is moved closer to the baffle 106 to reduce the size of the drainage groove 103; when it is necessary to spray the charged powder from the first discharge port 101 When the kinetic energy of is small, the shield 150 is moved away from the baffle 106 to increase the size of the drainage groove 103.

In other embodiments, the side wall of the shielding member has a groove, so that the drainage portion and the shielding member move relative to each other in the circumferential direction of the drainage portion, so that the groove and the drainage groove overlap completely or partially to adjust the size of the drainage groove opening.

In this embodiment, the discharging portion 100 of the second zone B is further provided with an opening 107, and the opening 107 is used to further release the pressure when the inner wall of the opening corresponding to the first zone A is sprayed. In addition, the opening 107 will also release part of the charged powder, and the part of the charged powder released by the opening 107 will be coated on the area of the inner side wall of the opening that is not coated by the first discharge port 101.

In this embodiment, the end of the first zone A of the discharging part 100 is provided with a second discharging port 108.

In this embodiment, the number of the second discharge port 108 is taken as an example for description. In other embodiments, the number of second discharge ports 108 is greater than one.

In this embodiment, the charged powder moves on the inner side wall of the discharging part 100 along the longitudinal direction X of the discharging part 100, and a second discharging port 108 is provided at the end of the first zone A of the discharging part 100, On the one hand, it is beneficial to prevent the end of the first zone A of the discharging portion 100 from being blocked. On the other hand, when the first discharge port 101 sprays the inner side wall of the opening corresponding to the first zone A, the opening 107 will also release part of the charged powder, and part of the charged powder will be coated on the inner side wall of the opening. The area coated by the first discharge port 101. When the first discharge port 101 is subsequently moved to the area where the inner side wall of the opening is not coated by the first discharge port 101 for the coating process, the charged powder sprayed from the second discharge port 108 is used to compensate for the opening The thickness difference of the charged powder coated on the inner side wall is beneficial to improve the uniformity of the thickness of the charged powder on the inner side wall of the opening.

In this embodiment, the number of second discharge ports 108 is 1-10; the area of each second discharge port 108 is 0.1 square millimeter to 5 square millimeters; the number of adjacent second discharge ports 108 The distance between them is 2 mm to 10 mm.

Fig. 2 is a schematic diagram of another nozzle structure of the spray gun of the present invention.

Please refer to FIG. 2, the discharging part 200 includes a first zone C and a second zone D. The side wall of the first zone C is provided with a plurality of first discharging ports 201, the first discharging port 201 and the inside of the discharging part 200 Space communication; the drainage part 202 is close to the second zone D of the discharge part 200 and communicates with the internal space of the discharge part 200, and the side wall of the drainage part 202 is provided with a drainage groove 203, which communicates with the internal space of the drainage part 202 .

In this embodiment, the nozzle is used in an electrostatic spray gun, and the paint sprayed by the electrostatic spray gun is a charged powder.

In other embodiments, the nozzle is used in an air spray gun, and the paint sprayed by the air spray gun is liquid. In this embodiment, it further includes: a shielding member 250 sheathed on the drainage portion 202, and the shielding member 250 is used to adjust the size of the drainage groove 203.

In this embodiment, the side wall of the shielding member 250 has a groove 251, so that the drainage portion 202 and the shielding member 250 move relative to each other along the circumferential direction a2 of the drainage portion 202, so that the groove 251 and the drainage groove 203 overlap completely or partially. To adjust the size of the opening of the drainage groove 203. Specifically, the size of the drainage groove 203 can be adjusted according to the overlapping area of the groove 251 and the drainage groove 203, and when the groove 251 and the drainage groove 203 all overlap, the drainage groove 203 is the largest.

In this embodiment, a baffle 206 is further provided between the drainage part 202 and the discharge part 200. The function of the baffle 206 is the same as that of the above-mentioned embodiment, and will not be repeated here.

In other embodiments, the shielding member moves in a direction away from or close to the baffle to adjust the size of the drainage groove.

In this embodiment, although the pressure of the charged powder entering the drainage part 202 is relatively high, the side wall of the drainage part 202 is provided with a drainage groove 203, which can release part of the pressure, so that the charged powder is ejected from the first discharge port 201 The speed should not be too high. In addition, the charged powder and the inner side wall of the opening have opposite electrical properties, and attract each other according to the opposite sex, so that the charged powder can be adsorbed on the inner side wall of the opening corresponding to the first zone C.

In this embodiment, the discharging part 200 has a square tubular structure. In other embodiments, the discharge part is a tubular structure with other shapes.

In this embodiment, the end of the first zone C of the discharging portion 200 has two cut surfaces 209, and the cut surface 209 is provided with a second discharge port 208. The function of the second discharge port 208 is the same as that of the above-mentioned embodiment, and will not be repeated here.

Fig. 3 is a schematic structural diagram of a spray gun including the nozzle shown in Fig. 1 provided by the present invention.

3, the discharging part 100 includes a first zone A and a second zone B. The side wall of the first zone A is provided with a plurality of first discharging ports 101, the first discharging port 101 and the inside of the discharging part 100 Space communication; the drainage part 102 is close to the second zone B of the discharge part 100 and communicates with the internal space of the discharge part 100, and the side wall of the drainage part 102 is provided with a drainage groove 103, which communicates with the internal space of the drainage part 102 The gun body 104 connected with the drainage part 102, the gun body 104 is used to convey the paint to the drainage part 102, and the paint enters the discharge part 100 from the drainage part 102 and is sprayed from the first discharge port 101.

In this embodiment, the spray gun containing the nozzle is an electrostatic spray gun, and the paint sprayed by the electrostatic spray gun is charged powder. The gun body 104 is connected with a supply barrel (not shown in the figure), and the supply barrel is filled with paint.

In other embodiments, the nozzle is used in an air spray gun, and the paint sprayed by the air spray gun is liquid.

In this embodiment, the electrostatic spray gun further includes an electrode assembly 105, the electrode assembly 105 charges the paint to form a charged powder, and the charged powder is conveyed into the drainage part 102. The pressure of the charged powder entering the drainage part 102 is relatively high. If the pressure is too high, the speed of the charged powder from the first discharge port 101 is too fast and it is difficult to coat the inner side wall of the opening. Therefore, the side wall of the drainage part 102 is provided There is a drainage groove 103, and the drainage groove 103 can release part of the pressure, so that the speed at which the charged powder is ejected from the first discharge port 101 is not too high. In addition, the charged powder and the inner side wall of the opening have the opposite electrical properties, and attract each other according to the opposite sex, so that the charged powder can be adsorbed on the inner side wall of the opening corresponding to the first zone A.

In this embodiment, the gun body 104 includes a gun front end 104a, a gun body 104b connected to the gun front end 104a, and a gun handle 104c connected to the gun body 104b; wherein the gun front end 104a is used as a shield 150, and the shield 150 is used To adjust the size of the drainage groove 103.

Fig. 4 is a schematic structural diagram of another spray gun including the nozzle shown in Fig. 2 provided by the present invention.

4, the discharging part 200 includes a first zone C and a second zone D. The side wall of the first zone C is provided with a plurality of first discharging ports 201, the first discharging port 201 and the inside of the discharging part 200 The drainage part 202, the drainage part 202 is close to the second zone D of the discharge part 200 and communicates with the internal space of the discharge part 200, and the side wall of the drainage part 202 is provided with a drainage groove 203, the drainage groove 203 and the drainage part 202 The internal space of the connection; the gun body 204 connected with the drainage part 202, the gun body 204 is used to convey the paint into the drainage part 202, the paint enters the discharge part 200 from the drainage part 202 and is ejected from the first discharge port 201.

In this embodiment, the spray gun is an electrostatic spray gun, and the paint sprayed by the electrostatic spray gun is a charged powder.

In other embodiments, the spray gun is an air spray gun, and the paint sprayed by the air spray gun is liquid.

In this embodiment, it further comprises: a shielding member 250 sheathed on the drainage part 202, and the shielding member 250 is used to adjust the size of the drainage groove 203.

In this embodiment, the gun body 204 includes a gun front end 204a, a gun body 204b connected to the gun front end 204a, and a gun handle 204c connected to the gun body 204b; wherein the gun front end 204a is used as a shield 250.

In this embodiment, the side wall of the gun front end 204a has a groove 251, so that the drainage portion 202 and the gun front end 204a move relative to each other in the circumferential direction of the drainage portion 202, so that the groove 251 and the drainage groove 203 overlap completely or partially to Adjust the size of the opening of the drainage groove 203. Specifically, the size of the drainage groove 203 can be adjusted according to the overlapping area of the groove 251 and the drainage groove 203, and when the groove 251 and the drainage groove 203 all overlap, the drainage groove 203 is the largest.

In this embodiment, although the pressure of the charged powder entering the drainage part 202 is relatively high, the side wall of the drainage part 202 is provided with a drainage groove 203, and the drainage groove 203 can release part of the pressure, so that the charged powder is ejected from the first discharge port 201 The speed is not too high. In addition, the charged powder and the inner side wall of the opening have opposite electrical properties, and attract each other according to the opposite sex, so that the charged powder can be adsorbed on the inner side wall of the opening corresponding to the first zone C.

Fig. 5 is a schematic diagram of the structure of the spray gun in Fig. 3 when it is working.

Please refer to Figure 5 to provide semiconductor equipment parts (not shown in the figure). The semiconductor equipment parts have openings 300 in them; insert the discharging part 100 into the openings 300, and spray charged powder on the inner wall of the openings 300, A thin film 301 is formed.

In this embodiment, the aspect ratio of the opening 300 is greater than or equal to 0.5.

In this embodiment, the outer diameter of the opening 300 is small, and the inner diameter of the opening 300 is larger than the outer diameter of the discharging part 100, so that the discharging part 100 can be inserted into the opening 300. The opening 300 includes a plurality of third regions and a plurality of fourth regions along the depth direction, and the third regions and the fourth regions are arranged at intervals, and a third region and a fourth region constitute a unit. When the discharge part 100 is inserted into the deepest part of the opening 300, the first zone A corresponds to the third zone at the deepest part of the opening 300, and the second zone corresponds to the fourth zone at the deepest part of the opening 300. Since the inner diameter of the opening 300 is small, the speed of the charged powder after being ejected from the first discharge port 101 needs to be small. Therefore, the front end 104a of the gun as the shield 150 should move away from the baffle 106 to make the drainage groove 103 If it is larger, the discharge rate of the charged powder from the first discharge port 101 will not be too high, which facilitates the adsorption of the charged powder on the inner wall surface of the opening 300 in the third region at the deepest part of the opening 300.

During the spraying process on the inner wall of the opening 300 at the deepest third zone of the opening 300, the opening 107 is used to further release part of the pressure. At the same time, the opening 107 further ejects a part of the charged powder, and the charged powder ejected from the opening 107 is adsorbed on the opening 300 The inner side wall of the opening in the fourth zone at the deepest point.

When the inner wall of the third region at the deepest part of the opening 300 is sprayed, the first region of the discharge part 100 is moved to correspond to the fourth region at the deepest part of the opening 300 to realize the fourth region at the deepest part of the opening 300 Spraying. Since the fourth zone at the deepest part of the opening 300 has been sprayed with partially charged powder when spraying the third zone at the deepest part of the opening 300, the thickness of the charged powder at the fourth zone at the deepest part of the opening 300 is slightly thicker than that at the deepest part of the opening 300 The thickness of the charged powder in the third zone. In order to compensate for the difference in thickness of the charged powder in the fourth zone at the deepest part of the opening 300 and the third zone at the deepest part of the opening 300, a second discharge port 108 is provided at the end of the first zone A of the discharge part 100. On the one hand, the second discharge port 108 is used to prevent the end of the first zone A of the discharge portion 100 from being blocked. On the other hand, the second discharge port 108 also sprays part of the charged powder during the spraying process on the fourth zone at the deepest part of the opening 300, and the charged powder sprayed from the second discharge port 108 is used to compensate for the third zone at the deepest part of the opening 300 The difference in thickness from the fourth region at the deepest part of the opening 300 is beneficial to increase the thickness difference of the charged powder on the inner sidewall of the opening 300.

After the deepest unit of the opening 300 undergoes the spraying process, the discharging part 100 is moved outside the opening 300 to sequentially perform the spraying process on each unit until the inner wall of the opening 300 is completely sprayed with paint.

In this embodiment, the semiconductor device component includes an inner liner; the inner liner includes a gas diffusion tank and an opening 300 communicating with the gas diffusion tank. The opening 300 is used to provide a reaction gas into the processing space of the semiconductor device.

In this embodiment, the lining is negatively charged; the chargeability of the charged powder is positively charged.

After the thin film 301 is formed, the method further includes: performing a baking process on the thin film 301. The temperature of the baking process is 310 degrees Celsius to 380 degrees Celsius.

The film 301 includes a first film layer located on the inner sidewall of the opening 300 and a second film layer located on the surface of the first film layer; the method for forming the first film layer includes: inserting the first discharge port 101 into the opening 300, The first coating is sprayed on the inner side wall of the opening 300 to form a first film layer; the method for forming the second film layer includes: inserting the second discharge port 108 into the opening 300, on the first side of the inner side wall of the opening 300 The second coating is sprayed on the surface of the film to form a second film.

The first paint is a liquid, and the second paint is a charged powder. The charged powder includes: Teflon, polyether ether ketone, modified polyurethane, and polyaryl ether ketone.

Fig. 6 is a schematic diagram of the structure of the spray gun in Fig. 3 when it is working.

Please refer to Figure 6 to provide semiconductor equipment parts (not shown in the figure). The semiconductor equipment parts have openings 400 in them; insert the discharging part 100 into the openings 400, and spray charged powder on the inner sidewalls of the openings 300, A thin film 401 is formed.

In this embodiment, the aspect ratio of the opening is greater than or equal to 0.5.

In this embodiment, the inner diameter of the opening 400 is larger than the inner diameter of FIG. 3. The spray gun can be used to realize the spraying process on the inner side wall of the opening 400.

Although the size of the opening 400 is relatively large, there is no need to customize the discharging part 100, and the discharging part 100 of FIG. 3 can be used. Only because the inner diameter of the discharging part 100 is larger, the distance between the outer side wall of the discharging part and the inner side wall of the inner hole is longer, so that the kinetic energy of the charged powder sprayed from the first discharging port 101 needs to be larger, then The front end 104a of the gun as the shield 150 needs to be moved closer to the baffle 106 to make the drainage groove 103 smaller, and the kinetic energy of the charged powder sprayed from the first discharge port 101 is larger, so that the charged powder can reach the inside of the opening 400 The side wall is adsorbed on the surface of the inner side wall of the opening 400.

In this embodiment, the lining is negatively charged; the chargeability of the charged powder is positively charged.

After forming the film, it further includes: baking the film. The temperature of the baking process is 310 degrees Celsius to 380 degrees Celsius.

The film 301 includes a first film layer located on the inner sidewall of the opening 300 and a second film layer located on the surface of the first film layer; the method for forming the first film layer includes: inserting the first discharge port 101 into the opening 300, The first coating is sprayed on the inner side wall of the opening 300 to form a first film layer; the method for forming the second film layer includes: inserting the second discharge port 108 into the opening 300, on the first side of the inner side wall of the opening 300 The second coating is sprayed on the surface of the film to form a second film.

The first paint is a liquid, and the second paint is a charged powder. The charged powder includes: Teflon, polyether ether ketone, modified polyurethane, and polyaryl ether ketone.

Although the present invention is disclosed as above, the present invention is not limited to this. Anyone with ordinary knowledge in the field can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be subject to the scope of the patent application.

100,200: Discharge department 101,201: the first discharge port 102, 202: drainage department 103,203: drainage trough 104,204: Gun body 104a, 204a: front end of the gun 104b, 204b: gun body 104c, 204c: gun handle 105, 205: Electrode assembly 106,206: baffle 107,207: opening 108,208: The second discharge port 150, 250: shelter 209: Cut Noodles 251: Groove 300, 400: opening 301, 401: Film A, C: Zone 1 B, D: Zone 2 a1, a2, X: direction

Figure 1 is a schematic structural view of a nozzle for a spray gun provided by the present invention; Figure 2 is a schematic structural diagram of another nozzle for spray gun provided by the present invention; 3 is a schematic structural diagram of a spray gun including the nozzle shown in FIG. 1 provided by the present invention; 4 is a schematic structural view of another spray gun including the nozzle shown in FIG. 2 provided by the present invention; Fig. 5 and Fig. 6 are schematic diagrams of the structure of the spray gun in Fig. 3 when it is working.

200: Discharge department

201: The first discharge port

202: Drainage Department

203: Drainage trough

204: Gun Body

204a: front end of the gun

204b: gun body

204c: Gun handle

205: Electrode assembly

206: Baffle

207: opening

208: The second discharge port

209: Cut Noodles

251: Groove

C: District 1

D: District 2

a2: direction

Claims (24)

A nozzle for spray gun, including: A discharging part, the discharging part includes a first zone and a second zone, the side wall of the first zone is provided with a plurality of first discharging openings, the plurality of first discharging openings and the discharging part Internal space is connected; A drainage portion, the drainage portion is close to the second zone of the discharge portion and communicates with the internal space of the discharge portion, and a drainage groove is provided on the side wall of the drainage portion, and the drainage groove is communicated with the internal space of the drainage portion . The nozzle according to claim 1, wherein the discharge part has a tubular structure. The nozzle according to claim 1, wherein the end of the first zone of the discharge part is provided with a second discharge port. The nozzle according to claim 1, wherein the side wall of the second area is further provided with a plurality of openings. The nozzle according to claim 1, wherein a baffle is provided between the discharge part and the drainage part, and the outer diameter of the baffle is larger than the outer diameter of the discharge part. The nozzle according to claim 5, wherein the outer diameter of the drainage portion is greater than the outer diameter of the discharge portion, and the outer diameter of the baffle is greater than the outer diameter of the drainage portion. The nozzle according to claim 5, further comprising: a shielding member sheathed on the drainage part, and the shielding member is used to adjust the size of the drainage groove. The nozzle according to claim 7, wherein the shielding member is moved in a direction away from or close to the baffle plate to adjust the size of the drainage groove. The nozzle according to claim 7, wherein the side wall of the shielding member has a groove, so that the drainage portion and the shielding member move relative to each other in the circumferential direction of the drainage portion, so that the groove and the drainage groove are completely overlapped or Partially overlap to adjust the size of the drainage groove opening. The nozzle according to claim 1, wherein the number of the first discharge ports is 1 to 500; the area of each first discharge port is 0.1 square millimeters to 5 square millimeters; the adjacent first discharge ports The distance between the discharge ports is 0.1 mm to 10 mm. The nozzle according to claim 3, wherein the number of the second discharge ports is 1 to 10; the area of each second discharge port is 0.1 square millimeters to 5 square millimeters; the adjacent second discharge ports The spacing between the material openings is 2 mm to 10 mm. The nozzle according to claim 1, wherein the number of the drainage grooves is 1 to 5, and the area of each drainage groove is 4 square millimeters to 50 square millimeters. The nozzle according to claim 1, wherein the projection shape of the first discharge port on the side wall of the discharge portion includes: a circle, an ellipse, a rectangle, a triangle, a diamond, or other irregular shapes. The nozzle according to claim 1, wherein the projection shape of the drainage groove on the side wall of the drainage portion includes: a circle, an ellipse, a rectangle, a triangle, a diamond, or other irregular shapes. The nozzle according to claim 1, wherein the material of the discharge part includes: polymer material, metal or inorganic non-metallic material. The nozzle according to claim 1, wherein the length of the discharge part is 1 mm to 300 mm; the cross-sectional area of the discharge part is greater than or equal to 1 square mm. A spray gun containing the nozzle according to any one of claim 1 to claim 16, including: A discharging part, the discharging part includes a first zone and a second zone, the side wall of the first zone is provided with a plurality of first discharging openings, the plurality of first discharging openings and the discharging part Internal space is connected; A drainage portion, the drainage portion is close to the second zone of the discharge portion and communicates with the internal space of the discharge portion, and a drainage groove is provided on the side wall of the drainage portion, and the drainage groove is communicated with the internal space of the drainage portion ； A gun body is connected with the drainage part, and the gun body is used for conveying a paint into the drainage part, and the paint enters the discharge part from the drainage part and is sprayed from the plurality of first discharge ports. The spray gun according to claim 17, wherein the paint is liquid. The spray gun according to claim 17, wherein the paint is a charged powder; the spray gun further comprises: an electrode assembly located in the gun body. A working method of the spray gun according to claim 17, comprising: Provide a semiconductor equipment component with an opening in the semiconductor equipment component; The discharging part is inserted into the opening, and a paint is sprayed on the inner side wall of the opening to form a thin film. The working method according to claim 20, wherein the semiconductor device component includes an inner liner; the inner liner includes: a gas diffusion tank and an opening communicating with the gas diffusion tank, and the opening is used for directing a semiconductor Reactive gas is provided in the processing space of the equipment. The working method according to claim 20, wherein the outer diameter of the discharge part is smaller than the diameter of the opening. The working method according to claim 20, wherein the aspect ratio of the opening is greater than or equal to 0.5. The working method according to claim 20, wherein the film includes a first film layer located on the inner side wall of the opening and a second film layer located on the surface of the first film layer; a method of forming the first film layer The method includes: inserting the first discharge port into the opening, and spraying a first paint on the inner side wall of the opening to form the first film; the method for forming the second film includes: making the second outlet The material port is inserted into the opening, and a second coating is sprayed on the surface of the first film on the inner side wall of the opening to form the second film; the first coating is a liquid; the second coating is a charged powder .

Images