CN110339963A - Nozzle, the spray gun comprising the nozzle and its working method - Google Patents
Nozzle, the spray gun comprising the nozzle and its working method Download PDFInfo
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- CN110339963A CN110339963A CN201910720691.5A CN201910720691A CN110339963A CN 110339963 A CN110339963 A CN 110339963A CN 201910720691 A CN201910720691 A CN 201910720691A CN 110339963 A CN110339963 A CN 110339963A
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- Prior art keywords
- discharging portion
- conduction part
- aperture
- nozzle
- discharge port
- Prior art date
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- 239000007921 spray Substances 0.000 title claims abstract description 70
- 238000000034 method Methods 0.000 title claims abstract description 45
- 238000007599 discharging Methods 0.000 claims abstract description 124
- 238000000576 coating method Methods 0.000 claims abstract description 55
- 239000011248 coating agent Substances 0.000 claims abstract description 53
- 239000000843 powder Substances 0.000 claims description 65
- 239000004065 semiconductor Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 10
- 229910003460 diamond Inorganic materials 0.000 claims description 6
- 239000010432 diamond Substances 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 claims description 5
- 230000001788 irregular Effects 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 claims description 3
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- 235000007164 Oryza sativa Nutrition 0.000 claims 1
- 235000009566 rice Nutrition 0.000 claims 1
- 238000012216 screening Methods 0.000 claims 1
- 238000005507 spraying Methods 0.000 abstract description 28
- 210000000481 breast Anatomy 0.000 description 16
- 238000010586 diagram Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 239000003973 paint Substances 0.000 description 3
- -1 Ether ether ketone Chemical class 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229920006260 polyaryletherketone Polymers 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 241001640558 Cotoneaster horizontalis Species 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009503 electrostatic coating Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
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- 229940098458 powder spray Drugs 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
- B05B1/16—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening having selectively- effective outlets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/02—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling time, or sequence, of delivery
- B05B12/04—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling time, or sequence, of delivery for sequential operation or multiple outlets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/084—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to condition of liquid or other fluent material already sprayed on the target, e.g. coating thickness, weight or pattern
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/06—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00 specially designed for treating the inside of hollow bodies
- B05B13/0627—Arrangements of nozzles or spray heads specially adapted for treating the inside of hollow bodies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/08—Plant for applying liquids or other fluent materials to objects
- B05B5/081—Plant for applying liquids or other fluent materials to objects specially adapted for treating particulate materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/08—Plant for applying liquids or other fluent materials to objects
- B05B5/12—Plant for applying liquids or other fluent materials to objects specially adapted for coating the interior of hollow bodies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/16—Arrangements for supplying liquids or other fluent material
- B05B5/1683—Arrangements for supplying liquids or other fluent material specially adapted for particulate materials
Abstract
A kind of nozzle, spray gun and its working method comprising the nozzle, wherein, spray gun includes: discharging portion, and the discharging portion includes the firstth area and the secondth area, the side wall in firstth area is equipped with several first discharge ports, and first discharge port is connected to the inner space of the discharging portion；Conduction part, the conduction part close to the discharging portion the secondth area and be connected to the inner space of the discharging portion, and the side wall of the conduction part is equipped with drainage trough, and the drainage trough is connected to the inner space of conduction part；The gun body connecting with the conduction part, the gun body are entered discharging portion by conduction part and are sprayed from the first discharge port for conveying coating, the coating into conduction part.The spray gun can carry out spraying process to the inner sidewall of high-aspect-ratio aperture.
Description
Technical field
The present invention relates to semiconductor field more particularly to a kind of nozzles, the spray gun comprising the nozzle and its working method.
Background technique
The important means as surface treatment is sprayed, has in semiconductor equipment components spray process field and widely answers
With.As the essential tool of spraying, the superiority and inferiority of spray gun performance directly determines the quality of spraying effect.The spray gun includes gun body
The nozzle connecting with gun body, the nozzle design decide whether semiconductor equipment components be sprayed and be sprayed
The quality of effect.
However, existing nozzle is difficult to carry out spraying work to the aperture inner sidewall of high-aspect-ratio in semiconductor equipment components
Skill.
Summary of the invention
The technical problem to be solved by the present invention is to provide a kind of nozzle, the spray gun comprising the nozzle and its working method, with
It realizes and sprays electrostatic coatings in high-aspect-ratio aperture inner surface.
In order to solve the above technical problems, the present invention provides a kind of nozzle, comprising: discharging portion, the discharging portion include first
The side wall in area and the secondth area, firstth area is equipped with several first discharge ports, and first discharge port is interior with the discharging portion
The connection of portion space；Conduction part, the conduction part close to the discharging portion the secondth area and with the inner space of the discharging portion connect
It is logical, and the side wall of the conduction part is equipped with drainage trough, the drainage trough is connected to the inner space of conduction part.
Optionally, the discharging portion is tubular structure.
Optionally, the second discharge port is arranged in the end in the firstth area of the discharging portion.
Optionally, several openings are arranged in the side wall in secondth area.
Optionally, baffle is equipped between the discharging portion and the conduction part, the outer diameter of the baffle is greater than the discharging
The outer diameter in portion.
Optionally, the outer diameter of the conduction part is all larger than the outer diameter of discharging portion, and the outer diameter of the baffle is greater than conduction part
Outer diameter.
Optionally, further includes: be coated at the covering of the conduction part, the covering is for adjusting the drainage trough
Size.
Optionally, the covering is moved to adjust the drainage trough along the direction far from or close to baffle
Size.
Optionally, the covering side wall has groove, and conduction part and covering is made circumferentially to carry out opposite move along conduction part
It is dynamic, keep the groove and drainage trough all be overlapped or partly overlap, to adjust the size for draining channel opening.
Optionally, the number of first discharge port is 1~500；The area of each first discharge port is 0.1 square
Millimeter~5 square millimeters；Spacing between adjacent first discharge port is 0.1 millimeter~10 millimeters.
Optionally, the number of second discharge port 1~10；The area of each second discharge port is 0.1 flat
Square millimeter~5 square millimeter；Spacing between adjacent second discharge port is 2 millimeters~10 millimeters.
Optionally, the number of the drainage trough is 1~5, and the area of each drainage trough is 4 square millimeters~50
Square millimeter.
Optionally, projection of shape of first discharge port on discharging portion side wall includes: circle, ellipse, rectangle, three
Angular, diamond shape or other irregular shapes.
Optionally, projection of shape of the drainage trough on the conduction part side wall includes: circle, ellipse, rectangle, three
Angular, diamond shape or other irregular shapes.
Optionally, the material of the discharging portion includes: high molecular material, metal or inorganic non-metallic material.
Optionally, the length of the discharging portion is 1 millimeter~300 millimeters；It is flat that the sectional area of the discharging portion is more than or equal to 1
Square millimeter.
Correspondingly, include: discharging portion the present invention also provides a kind of spray gun comprising the nozzle, the discharging portion includes the
One area and the secondth area, the side wall in firstth area are equipped with several first discharge ports, first discharge port and the discharging portion
Inner space connection；Conduction part, secondth area of the conduction part close to the discharging portion and inner space with the discharging portion
Connection, and the side wall of the conduction part is equipped with drainage trough, the drainage trough is connected to the inner space of conduction part；With the drainage
The gun body of portion's connection, for conveying coating into conduction part, the coating by conduction part enters discharging portion and from the gun body
One discharge port sprays.
Optionally, the coating is liquid.
Optionally, the coating is charged powder；The spray gun further include: be located at the intracorporal electrode assembly of the rifle.
Correspondingly, include: that semiconductor equipment components are provided the present invention also provides a kind of working method of spray gun, described half
There is aperture in conductor device components；It is inserted into the discharging portion in the aperture, sprays and apply in the inner sidewall of the aperture
Material, forms the film.
Optionally, the semiconductor equipment components include liner；The liner includes: gaseous diffusion cell and expands with gas
The aperture of slot connection is dissipated, the aperture is for providing reaction gas into the processing space of semiconductor equipment.
Optionally, the outer diameter of the discharging portion is less than opening diameter.
Optionally, the depth-to-width ratio of the aperture is more than or equal to 0.5.
Optionally, the film includes positioned at the first film layer of the aperture inner sidewall and positioned at first film surface
The second film layer；The forming method of first film layer includes: to be inserted into first discharging portion in the aperture, is opened described
The inner sidewall in hole sprays the first coating, forms first film layer；The forming method of second film layer includes: to make described second
Discharging portion is inserted into the aperture, and the first film surface of side wall sprays the second coating in the opening, forms described second
Film layer；First coating is liquid；Second coating is charged powder.
Compared with prior art, the technical solution of the embodiment of the present invention has the advantages that
In the working method for the spray gun that technical solution of the present invention provides, the discharging portion is inserted into the semiconductor equipment zero
In the aperture of component, the gun body is for conveying coating into conduction part.Since the side wall of the conduction part has drainage trough, institute
Partial pressure can be discharged by stating drainage trough, so that the kinetic energy of the coating reduces, then the speed of the coating sprayed from the first discharge port
Degree is unlikely to too fast, and coating is adhered on the inner sidewall of the aperture, it can be seen that, the spray gun can be in profundity
The aperture interior side-wall surface sprayed coating of wide ratio.The coating is used to form film, and the film is for protecting semiconductor equipment
The inner sidewall of components.
Further, the side wall in secondth area also sets up several openings, and the opening is pressed for further discharging part
Power is conducive to paint-absorbable in the inner sidewall of aperture so that coating is unlikely to too fast from the speed that the first discharge port sprays.
Further, first discharge port is used to carry out spraying process to the corresponding aperture inner sidewall in the firstth area, when described
After firstth area completes spraying process, the discharging portion is moved into the corresponding aperture inner sidewall in the secondth area, to secondth area
Corresponding aperture inner sidewall carries out spraying process.When carrying out spraying process to first area's aperture inner sidewall, secondth area is opened
For mouth also by ejection portion coating, part coatings will be adsorbed in the corresponding aperture inner sidewall in the secondth area, subsequent when the discharging portion moves
Aperture inner sidewall corresponding to the secondth area is moved, when first discharge port being recycled to carry out spraying process to the secondth area, so that the
The paint thickness of the paint thickness of the corresponding aperture inner sidewall in 2nd area aperture inner sidewall corresponding compared with the firstth area is thick.In order to compensate for institute
The second discharge port of end setting that the firstth area paint thickness corresponding with the secondth area is poor, in firstth area of discharging portion is stated, it is described
Second discharge port to the corresponding aperture inner sidewall in the secondth area carry out spraying process when also by ejection portion coating, therefore, favorably
In the consistency of thickness for improving the aperture inner sidewall coating.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the nozzle for spray gun of the present invention；
Fig. 2 is the structural schematic diagram of another nozzle for spray gun of the present invention；
Fig. 3 is a kind of structural schematic diagram of the spray gun comprising nozzle shown in Fig. 1 of the present invention；
Fig. 4 is the structural schematic diagram of another spray gun comprising nozzle shown in Fig. 2 of the invention；
Structural schematic diagram when Fig. 5 and Fig. 6 is spray gun work in Fig. 3.
Specific embodiment
As described in background, existing spray gun is difficult to carry out spraying process to the inner surface of high-aspect-ratio aperture.
In order to solve the above-mentioned technical problem, it includes: discharging portion that technical solution of the present invention, which provides a kind of spray gun comprising nozzle,
The discharging portion includes the firstth area and the secondth area, and the side wall in firstth area is equipped with several first discharge ports, first discharging
Mouth is connected to the inner space of the discharging portion；Conduction part, the conduction part close to the discharging portion the secondth area and with it is described
The inner space of discharging portion is connected to, and the side wall of the conduction part is equipped with drainage trough, the inside sky of the drainage trough and conduction part
Between be connected to；The gun body connecting with the conduction part, the gun body is for conveying coating into conduction part, and the coating is by conduction part
It is sprayed into discharging portion and from the first discharge port.The spray gun can carry out spraying process to high-aspect-ratio aperture inner sidewall.
It is understandable to enable above-mentioned purpose of the invention, feature and beneficial effect to become apparent, with reference to the accompanying drawing to this
The specific embodiment of invention is described in detail.
Fig. 1 is a kind of structural schematic diagram of the nozzle for spray gun of the present invention.
Referring to FIG. 1, discharging portion 100, the discharging portion 100 includes the first area A and the second area B, the side of the firstth area A
Wall is equipped with several first discharge ports 101, and first discharge port 101 is connected to the inner space of the discharging portion 100；Conduction part
102, the conduction part 102 close to the discharging portion 100 the second area B and be connected to the inner space of the discharging portion 100, and
The side wall of the conduction part 102 is equipped with drainage trough 103, and the drainage trough 103 is connected to the inner space of conduction part 102.
In the present embodiment, the discharging portion 100 is round tube shape structure.
In the present embodiment, the material of the discharging portion 100 includes: high molecular material, metal or inorganic non-metallic material
Material.
In the present embodiment, the nozzle is used for electrostatic gun, and the coating that the electrostatic gun sprays is charged powder.
In other embodiments, the nozzle is used for air gun, and the coating that the air gun sprays is liquid.
In the present embodiment, the length of the discharging portion 100 is 1 millimeter~300 millimeters；The section of the discharging portion 100
Product is more than or equal to 1 square millimeter.It can be seen that the outer diameter of the discharging portion 100 is smaller, and the length of the discharging portion 100 compared with
Long, therefore, the electrostatic gun comprising the nozzle can be used in the aperture to high-aspect-ratio in semiconductor processing equipment components
Inner sidewall carries out spraying process.
In the present embodiment, first discharge port 101 is for spraying charged powder, and the charged powder of ejection is for half-and-half
High-aspect-ratio aperture interior side-wall surface carries out spraying process in conductor processing equipment, and the drainage trough 103 is pressed for discharging part
Power prevents powder excessive from the speed after the ejection of the first discharge port 101, is conducive to set the powder spray in semiconductor processes
The surface of standby inner opening inner sidewall.
In the present embodiment, the number of first discharge port 101 is 1~500；Each first discharge port 101
Area is 0.1 square millimeter~5 square millimeters；Spacing between adjacent first discharge port 101 is 0.1 millimeter~10 millimeters.By
It is smaller in the area of each first discharge port 101, so that the powder flow out of the first discharge port 101 is smaller, be conducive to in aperture
Side wall carries out fine manipulation, and will not pollute to the position for being not required to spraying.Also, between adjacent first discharge port 101
Spacing is smaller, so that corresponding part open inner sidewall is coated with and covers charged powder between adjacent first discharge port 101, it may be assumed that institute
It states the corresponding separately hole inner sidewall of the first area A and is coated with and cover charged powder, the charged powder is used to form film, the film
For being protected to aperture inner sidewall.
Projection of shape of first discharge port 101 on discharging portion side wall includes: circle, ellipse, rectangle, triangle
Shape, diamond shape or other irregular shapes.
In the present embodiment, the number of the drainage trough 103 is 1~5, and the area of each drainage trough 103 is 4
Square millimeter~50 square millimeters.
Projection of shape of the drainage trough 103 on 102 side wall of conduction part includes: circle, ellipse, rectangle, three
Angular, diamond shape or other shapes.
In the present embodiment, baffle 106 is additionally provided between the discharging portion 100 and the conduction part 102.
In the present embodiment, the outer diameter of the conduction part 102 and the outer diameter of baffle 106 are all larger than the outer diameter of discharging portion 100,
And the outer diameter of the baffle 106 is greater than the outer diameter of conduction part 102, and the size of the baffle 106 is greater than the internal diameter of aperture, so that
The baffle 106 is difficult to be inserted into aperture, and therefore, the baffle 106 is for playing the role of positioning.When the baffle 106 is difficult to
When being inserted into aperture, then show that discharging portion 100 is fully inserted into aperture.Also, the part band when releasing stress of drainage trough 103
Electro-powder will be flowed out from drainage trough 103, and the baffle 106 is used to that the charged powder flowed out from drainage trough 103 to be stopped to enter aperture
It is interior, it prevents from polluting aperture inner sidewall.
In the present embodiment, further includes: be coated at the covering 150 of the conduction part 102, the covering 150 is used for
Adjust the size of the drainage trough 103.
In the present embodiment, the covering 150 is moved along the direction a1 far from or close to baffle 106 to adjust
The size of the drainage trough 103.When the kinetic energy for needing to spray the charged powder from the first discharge port 101 is larger, make institute
Covering 150 is stated to close to the mobile size to reduce drainage trough 103 of baffle 106；When needing to make the charged powder from first
When the kinetic energy that discharge port 101 sprays is smaller, keep the covering 150 mobile to increase the drainage trough 103 to separate baffle 106
Size.
In other embodiments, the covering side wall has groove, described to make conduction part and covering along conduction part week
To making a relative move, so that the groove and drainage trough are all be overlapped or partly overlap, to adjust the drainage channel opening
Size.
In the present embodiment, the discharging portion 100 of the secondth area B is additionally provided with opening 107, corresponding to the first area A
When aperture inner sidewall carries out spraying process, the opening 107 is for further releasing stress.Also, the opening 107 can also be released
The part charged powder of discharge section charged powder, 107 release of opening will be coated on the aperture inner sidewall not by first
The region that discharge port 101 coats.
In the present embodiment, the second discharge port 108 is arranged in the end of the first area A of the discharging portion 100.
In the present embodiment, it is illustrated so that the number of second discharge port 108 is 1 as an example.In other embodiments
In, the number of second discharge port 108 is greater than 1.
In the present embodiment, the charged powder is in 100 inner sidewall of discharging portion along the 100 length direction side X of discharging portion
To movement, second discharge port 108 is set in the first area end A of the discharging portion 100, is on the one hand beneficial to prevent the discharging
The 100 first area end A of portion blocks.On the other hand, since first discharge port 101 is in the corresponding aperture of the first area A
When side wall carries out spraying process, the outlet 107 will also discharge part charged powder, and part charged powder will be coated in aperture
The region that side wall is not coated by the first discharge port 101.It is subsequent that first discharge port 101 is moved to the aperture inner sidewall not by
When the region of one discharge port 101 coating is to carry out the coating processes, the charged powder that second discharge port 108 sprays is used for
The difference in thickness for compensating the charged powder of aperture inner sidewall coating is conducive to improve the uniform of aperture inner sidewall charged powder thickness
Property.
In the present embodiment, the number of second discharge port 108 1~10；Each second discharge port 108
Area is 0.1 square millimeter~5 square millimeters；Spacing between adjacent second discharge port 108 is 2 millimeters~10 millimeters.
Fig. 2 is the structural schematic diagram of another nozzle for spray gun of the present invention.
Referring to FIG. 2, discharging portion 200, the discharging portion 200 includes the first area C and the second area D, the side of the firstth area C
Wall is equipped with several first discharge ports 201, and first discharge port 201 is connected to the inner space of the discharging portion 200；Conduction part
202, the conduction part 202 close to the discharging portion 200 the second area D and be connected to the inner space of the discharging portion 200, and
The side wall of the conduction part 202 is equipped with drainage trough 203, and the drainage trough 203 is connected to the inner space of conduction part 202.
In the present embodiment, the nozzle is used for electrostatic gun, and the coating that the electrostatic gun sprays is charged powder.
In other embodiments, the nozzle is used for air gun, and the coating that the air gun sprays is liquid.At this
In embodiment, further includes: be coated at the covering 250 of the conduction part 202, the covering 250 is for adjusting the drainage
The size of slot 203.
In the present embodiment, 250 side wall of covering has groove 251, described to make conduction part 202 and covering 250
It is made a relative move along 202 circumferential direction a2 of conduction part, so that the groove 251 is be overlapped with 203 whole of drainage trough or partly overlaps,
To adjust the size that the drainage trough 203 is open.Specifically, can be adjusted according to the groove 251 with 203 overlapping area of drainage trough
The size of drainage trough 203 is saved, and when the groove 251 is all Chong Die with drainage trough 203, the drainage trough is maximum.
In the present embodiment, baffle 206 is set also between the conduction part 202 and discharging portion 201.The baffle 206
Effect it is same as the previously described embodiments, therefore not to repeat here.
In other embodiments, the covering is moved along the direction far from or close to baffle to draw described in adjusting
The size of chute.
In the present embodiment, although the charged powder pressure that enters conduction part 202 is larger, the conduction part 202
Drainage trough 203 is arranged in side wall, and the drainage trough 203 can discharge partial pressure, so that charged powder is sprayed from the first discharge port 201
Speed out is unlikely to excessive.Also, the electrical property of the charged powder and aperture inner sidewall institute band is on the contrary, according to there is a natural attraction between the sexes,
The charged powder is enabled to be adsorbed in the corresponding aperture inner sidewall of the firstth area C.
In the present embodiment, the discharging portion 200 is square tube type structure.In other embodiments, the discharging portion is it
The tubular structure of his shape.
In the present embodiment, the end tool of the 200 first area C of discharging portion is there are two section 209, on described and face 209
It is provided with the second discharge port 208.The effect of second discharge port 208 is same as the previously described embodiments, and therefore not to repeat here.
Fig. 3 is a kind of structural schematic diagram of the spray gun comprising nozzle shown in Fig. 1 of the present invention.
Referring to FIG. 3, discharging portion 100, the discharging portion 100 includes the first area A and the second area B, the side of the firstth area A
Wall is equipped with several first discharge ports 101, and first discharge port 101 is connected to the inner space of the discharging portion 100；Conduction part
102, the conduction part 102 close to the discharging portion 100 the second area B and be connected to the inner space of the discharging portion 100, and
The side wall of the conduction part 102 is equipped with drainage trough 103, and the drainage trough 103 is connected to the inner space of conduction part 102；With institute
The gun body 104 of the connection of conduction part 102 is stated, the gun body 104 is for conveying coating into conduction part 102, and the coating is by draining
Portion 102 enters discharging portion 100 and sprays from the first discharge port 101.
In the present embodiment, the spray gun comprising nozzle is electrostatic gun, and the coating that the electrostatic gun sprays is band
Electro-powder.The gun body 104 is connect with feeding box (not shown), and coating is contained in the feeding box.
In other embodiments, the nozzle is used for air gun, and the coating that the air gun sprays is liquid.
In the present embodiment, the electrostatic gun further includes electrode assembly 105, and the electrode assembly 105 makes the coating
Band electric forming charged powder, the charged powder are transported in conduction part 102.Charged powder enters the pressure of conduction part 102
Larger, pressure is excessive to be difficult to charged powder coated in the aperture from the excessive velocities that the first discharge port 101 sprays
On inner sidewall, therefore, drainage trough 103 is set in the side wall of the conduction part 102, the drainage trough 103 can discharge part pressure
Power, so that charged powder is unlikely to excessive from the speed that the first discharge port 101 sprays.Also, in the charged powder and aperture
The electrical property of side wall institute band is on the contrary, according to there is a natural attraction between the sexes, and the charged powder is adsorbed in, and the firstth area A is corresponding to be opened
Hole inner sidewall.
In the present embodiment, the gun body 104 include rifle front end 104a, with the rifle front end 104a body of a gun 104b connecting and
The small of the stock hand 104c being connect with body of a gun 104b；Wherein, the rifle front end 104b is used to be used as the covering 150, the masking
Part 150 is used to adjust the size of drainage trough 103.
Fig. 4 is the structural schematic diagram of another spray gun comprising nozzle shown in Fig. 2 of the invention.
Referring to FIG. 4, discharging portion 200, the discharging portion 200 includes the first area C and the second area D, the side of the firstth area C
Wall is equipped with several first discharge ports 201, and first discharge port 201 is connected to the inner space of the discharging portion 200；Conduction part
202, the conduction part 202 close to the discharging portion 200 the second area D and be connected to the inner space of the discharging portion 200, and
The side wall of the conduction part 202 is equipped with drainage trough 203, and the drainage trough 203 is connected to the inner space of conduction part 202；With institute
The gun body 204 of the connection of conduction part 202 is stated, the gun body 204 is for conveying coating into conduction part 202, and the coating is by draining
Portion 202 enters discharging portion 200 and sprays from the first discharge port 201.
In the present embodiment, the spray gun is electrostatic gun, and the coating that the electrostatic gun sprays is charged powder.
In other embodiments, the spray gun is air gun, and the coating that the air gun sprays is liquid.
In the present embodiment, further includes: be coated at the covering 250 of the conduction part 202, the covering 250 is used for
Adjust the size of the drainage trough 203.
In the present embodiment, the gun body 204 include rifle front end 204a, with the rifle front end 204a body of a gun 204b connecting and
The small of the stock hand 204c being connect with body of a gun 204b；Wherein, the rifle front end 204b is used to be used as the covering 250.
In the present embodiment, the rifle front end 204a side wall has groove 251, described to make conduction part 202 and rifle front end
204a circumferentially makes a relative move along conduction part 202, so that the groove 251 is all Chong Die or partially heavy with drainage trough 203
It is folded, to adjust the size of the drainage channel opening.Specifically, can be adjusted according to the groove 251 with 203 overlapping area of drainage trough
The size of drainage trough 203 is saved, and when the groove 251 is all Chong Die with drainage trough 203, the drainage trough is maximum.
In the present embodiment, although the charged powder pressure that enters conduction part 202 is larger, the conduction part 202
Drainage trough 203 is arranged in side wall, and the drainage trough 203 can discharge partial pressure, so that charged powder is sprayed from the first discharge port 201
Speed out is unlikely to excessive.Also, the electrical property of the charged powder and aperture inner sidewall institute band is on the contrary, according to there is a natural attraction between the sexes,
The charged powder is enabled to be adsorbed in the corresponding aperture inner sidewall of the firstth area C.
Structural schematic diagram when Fig. 5 is spray gun work in Fig. 3.
Referring to FIG. 5, providing semiconductor equipment components (not shown), have in the semiconductor equipment components
Aperture 300；It is inserted into the discharging portion 100 in the aperture 300, sprays charged powder, shape in the inner sidewall of the aperture 300
At the film 301.
In the present embodiment, the depth-to-width ratio of the aperture is more than or equal to 0.5.
In the present embodiment, the outer diameter of the aperture 300 is smaller, and the internal diameter of the aperture 300 is greater than discharge port 100
Outer diameter, so that the discharging portion 100 is inserted into aperture 300.The aperture 300 includes several third areas along depth direction
With several the 4th areas, and the third area is intervally arranged with the 4th area, a third area and the 4th area's structure
At a unit.When the discharging portion 100 is inserted into 300 bosom of aperture, the first area A and the innermost third area pair of aperture 300
It answers, secondth area is corresponding with innermost 4th area of aperture 300.Since the internal diameter of the aperture 300 is smaller, so that the band
Electro-powder need to be smaller from the speed after the ejection of the first discharge port 101, and therefore, the covering 104a should be to far from baffle 106
It is mobile, keep the drainage trough 103 larger, then the ejection of the first discharge port 101 charged powder speed is unlikely to excessive, is conducive to
Charged powder is adsorbed in 300 interior side-wall surface of aperture in 300 bosom third area of aperture.
When carrying out spraying process to 300 inner sidewall of aperture in the 300 bosom third area of aperture, the opening 107 is used
In further release partial pressure, meanwhile, the opening 107 goes back ejection portion charged powder, the electrification that the opening 107 sprays
Powder adsorption is in the inner sidewall of the 4th area's aperture of 300 bosom of aperture.
When being finished to the 300 bosom third area aperture inner sidewall of aperture spraying, the firstth area of discharge port 100 is moved
It moves to spraying corresponding with aperture the 4th area of 300 bosom, with realization to the 4th area of 300 bosom of aperture.Due to the aperture
The 4th area of 300 bosom has coated part charged powder when spraying to 300 bosom third area of aperture, so that institute
The thickness for stating the charged powder in the 4th area of 300 bosom of aperture is slightly thicker than the thickness of 300 bosom third zone electro-powder of aperture.
In order to compensate for the difference in thickness in the 4th area of 300 bosom of aperture and 300 bosom third zone electro-powder of aperture, in the discharging
The 100 first area ends A of mouth open up the second discharge port 108.On the one hand, second discharge port 108 is for preventing discharging portion first
The blocking of the area end A.On the other hand, second discharge port 108 is when carrying out spraying process to the 4th area of 300 bosom of aperture
Ejection portion charged powder, the charged powder that second discharge port 108 sprays for compensate 300 bosom third area of aperture with
The difference in thickness in the 4th area of 300 bosom of aperture is conducive to the difference in thickness for improving 300 inner sidewall charged powder of aperture.
When the aperture 300 most it is deep go out a unit carry out spraying process after, by the discharging portion 100 to aperture
It is mobile successively to carry out spraying process to each unit outside 300, until the inner sidewall of the aperture 300 is all sprayed-on the painting
Material.
In the present embodiment, the semiconductor equipment components include liner；The liner include: gaseous diffusion cell and with
The aperture 300 of gaseous diffusion cell connection, the aperture 300 is for providing reaction gas into the processing space of semiconductor equipment.
In the present embodiment, the liner connects negative electricity；Charged powder institute's charging property is positive electricity.
It is formed after the film, further includes: baking process is carried out to the film.The temperature of the baking process are as follows:
310 degrees Celsius~380 degrees Celsius.
The film 301 includes positioned at the first film layer of 300 inner sidewall of aperture and positioned at first film surface
The second film layer；The forming method of first film layer includes: to be inserted into first discharging portion in the aperture 300, in institute
The inner sidewall for stating aperture 300 sprays the first coating, forms first film layer；The forming method of second film layer includes: to make
Second discharging portion is inserted into the aperture 300, is applied in the first film surface spraying second of 300 inner sidewall of aperture
Material forms second film layer.
First coating is liquid, and second coating is charged powder, and the charged powder includes: Teflon, gathers
Ether ether ketone, modified polyurethane, poly(aryl ether ketone).
Structural schematic diagram when Fig. 6 is spray gun work in Fig. 3.
Referring to FIG. 6, providing semiconductor equipment components (not shown), have in the semiconductor equipment components
Aperture 400；It is inserted into the discharging portion 100 in the aperture 400, sprays charged powder, shape in the inner sidewall of the aperture 300
At the film 401.
In the present embodiment, the depth-to-width ratio of the aperture is more than or equal to 0.5.
In the present embodiment, the internal diameter of the aperture 400 is greater than the size of Fig. 3 internal diameter.It can be realized using the spray gun
To the spraying process of 400 inner sidewall of aperture.
Although the size of the aperture 400 is larger, it is not necessarily to additional customized discharging portion 100, is discharged using described in Fig. 3
Portion 100.Only because the internal diameter of discharging portion 100 is larger so that discharging portion lateral wall to inner hole inner sidewall distance farther out,
So that the kinetic energy of the charged powder sprayed out of first discharge port 101 need to be larger, then need to make the covering 104a to close to gear
Plate 106 is mobile, keeps the drainage trough 103 smaller, then the charged powder kinetic energy sprayed from the first discharge port 101 is larger, so that institute
400 inner sidewall of aperture can be reached by stating charged powder, and be adsorbed in the interior side-wall surface of aperture 400.
In the present embodiment, the liner connects negative electricity；Charged powder institute's charging property is positive electricity.
It is formed after the film, further includes: baking process is carried out to the film.The temperature of the baking process are as follows:
310 degrees Celsius~380 degrees Celsius.
The film 301 includes positioned at the first film layer of 300 inner sidewall of aperture and positioned at first film surface
The second film layer；The forming method of first film layer includes: to be inserted into first discharging portion in the aperture 300, in institute
The inner sidewall for stating aperture 300 sprays the first coating, forms first film layer；The forming method of second film layer includes: to make
Second discharging portion is inserted into the aperture 300, is applied in the first film surface spraying second of 300 inner sidewall of aperture
Material forms second film layer.
First coating is liquid, and second coating is charged powder, and the charged powder includes: Teflon, gathers
Ether ether ketone, modified polyurethane, poly(aryl ether ketone).
Although present disclosure is as above, present invention is not limited to this.Anyone skilled in the art are not departing from this
It in the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
Subject to the range of restriction.
Claims (24)
1. a kind of nozzle for spray gun characterized by comprising
Discharging portion, the discharging portion include the firstth area and the secondth area, and the side wall in firstth area is equipped with several first discharge ports, institute
The first discharge port is stated to be connected to the inner space of the discharging portion；
Conduction part, the conduction part close to the discharging portion the secondth area and be connected to the inner space of the discharging portion, and institute
The side wall for stating conduction part is equipped with drainage trough, and the drainage trough is connected to the inner space of conduction part.
2. nozzle as described in claim 1, which is characterized in that the discharging portion is tubular structure.
3. nozzle as described in claim 1, which is characterized in that second discharging of end setting in the firstth area of the discharging portion
Mouthful.
4. nozzle as described in claim 1, which is characterized in that the side wall in secondth area also sets up several openings.
5. nozzle as described in claim 1, which is characterized in that be equipped with baffle, institute between the discharging portion and the conduction part
The outer diameter for stating baffle is greater than the outer diameter of the discharging portion.
6. nozzle as claimed in claim 5, which is characterized in that the outer diameter of the conduction part is greater than the outer diameter of the discharging portion,
The outer diameter of the baffle is greater than the outer diameter of the conduction part.
7. nozzle as claimed in claim 5, which is characterized in that further include: it is coated at the covering of the conduction part, the screening
Shield is used to adjust the size of the drainage trough.
8. nozzle as claimed in claim 7, which is characterized in that make the covering along the direction far from or close to baffle into
The mobile size to adjust the drainage trough of row.
9. nozzle as claimed in claim 7, which is characterized in that the covering side wall have groove, make the conduction part with
Covering circumferentially makes a relative move along conduction part, keeps the groove and drainage trough all be overlapped or partly overlaps, to adjust
The size of the drainage channel opening.
10. nozzle as described in claim 1, which is characterized in that the number of first discharge port is 1~500；Each
The area of first discharge port is 0.1 square millimeter~5 square millimeters；Spacing between adjacent first discharge port is 0.1 millimeter~
10 millimeters.
11. nozzle as claimed in claim 3, which is characterized in that the number of second discharge port 1~10；Each institute
The area for stating the second discharge port is 0.1 square millimeter~5 square millimeters；Spacing between adjacent second discharge port is 2 millis
Rice~10 millimeters.
12. nozzle as described in claim 1, which is characterized in that the number of the drainage trough is 1~5, each described to draw
The area of chute is 4 square millimeters~50 square millimeters.
13. nozzle as described in claim 1, which is characterized in that projection shape of first discharge port on discharging portion side wall
Shape includes: circle, ellipse, rectangle, triangle, diamond shape or other irregular shapes.
14. nozzle as described in claim 1, which is characterized in that projection shape of the drainage trough on the conduction part side wall
Shape includes: circle, ellipse, rectangle, triangle, diamond shape or other irregular shapes.
15. nozzle as described in claim 1, which is characterized in that the material of the discharging portion includes: high molecular material, metal
Or inorganic non-metallic material.
16. nozzle as described in claim 1, which is characterized in that the length of the discharging portion is 1 millimeter~300 millimeters；It is described
The sectional area of discharging portion is more than or equal to 1 square millimeter.
17. a kind of spray gun comprising the nozzle as described in claim 1 to any one of claim 16 characterized by comprising
Discharging portion, the discharging portion include the firstth area and the secondth area, and the side wall in firstth area is equipped with several first discharge ports, institute
The first discharge port is stated to be connected to the inner space of the discharging portion；
Conduction part, the conduction part close to the discharging portion the secondth area and be connected to the inner space of the discharging portion, and institute
The side wall for stating conduction part is equipped with drainage trough, and the drainage trough is connected to the inner space of conduction part；
The gun body being connect with the conduction part, the gun body for conveying coating into conduction part, the coating by conduction part into
Enter discharging portion and is sprayed from the first discharge port.
18. spray gun as claimed in claim 17, which is characterized in that the coating is liquid.
19. spray gun as claimed in claim 17, which is characterized in that the coating is charged powder；The spray gun further include: position
In the intracorporal electrode assembly of the rifle.
20. a kind of working method of spray gun as claimed in claim 17 characterized by comprising
Semiconductor equipment components are provided, there is aperture in the semiconductor equipment components；
It is inserted into the discharging portion in the aperture, in the inner sidewall sprayed coating of the aperture, forms film.
21. the working method of spray gun as claimed in claim 20, which is characterized in that the semiconductor equipment components include interior
Lining；The liner includes: gaseous diffusion cell and the aperture that is connected to gaseous diffusion cell, and the aperture is used for semiconductor equipment
Reaction gas is provided in processing space.
22. the working method of spray gun as claimed in claim 20, which is characterized in that it is straight that the outer diameter of the discharging portion is less than aperture
Diameter.
23. the working method of spray gun as claimed in claim 20, which is characterized in that the depth-to-width ratio of the aperture is more than or equal to
0.5。
24. the working method of spray gun as claimed in claim 20, which is characterized in that the film includes being located in the aperture
First film layer of side wall and the second film layer positioned at first film surface；The forming method of first film layer includes: to make
First discharging portion is inserted into the aperture, is sprayed the first coating in the inner sidewall of the aperture, is formed first film layer；
The forming method of second film layer includes: to be inserted into second discharging portion in the aperture, in the opening side wall
First film surface sprays the second coating, forms second film layer；First coating is liquid；Second coating is band
Electro-powder.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910720691.5A CN110339963A (en) | 2019-08-06 | 2019-08-06 | Nozzle, the spray gun comprising the nozzle and its working method |
| TW109123971A TWI790461B (en) | 2019-08-06 | 2020-07-15 | Nozzle, spray gun including nozzle and method of operation thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910720691.5A CN110339963A (en) | 2019-08-06 | 2019-08-06 | Nozzle, the spray gun comprising the nozzle and its working method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110339963A true CN110339963A (en) | 2019-10-18 |
Family
ID=68184039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910720691.5A Pending CN110339963A (en) | 2019-08-06 | 2019-08-06 | Nozzle, the spray gun comprising the nozzle and its working method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN110339963A (en) |
| TW (1) | TWI790461B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW202106393A (en) | 2021-02-16 |
| TWI790461B (en) | 2023-01-21 |
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