TW202105066A - Exposure device and exposure method - Google Patents

Abstract

According to the present invention, an exposure surface of a substrate and an imaging surface of an exposure part are matched while maintaining flatness of the substrate, and a flaw occurring on the exposure surface of the substrate is prevented. This exposure device for exposing a substrate is provided with: a substrate holder that has a holding surface for suctions and holds the substrate; a driving mechanism that moves the substrate holder in a direction perpendicular to the holding surface; and a substrate pressing member that is disposed so as not to be displaced in the direction perpendicular to the holding surface and that abuts the substrate at a position avoiding the exposure region of the substrate when the substrate held by the substrate holder pressed against the substrate pressing member by the driving mechanism.

Description

Exposure device and exposure method

The present invention relates to an exposure device and an exposure method.

Conventionally, there is known an exposure device for irradiating light to the exposure surface of a substrate having a photosensitive layer to form a pattern on the exposure surface (for example, refer to Patent Document 1). The exposure device is provided with a light-transmitting member, which has a flat surface opposite to the exposure surface of the substrate, and is a flat surface consistent with the imaging surface of the projection optical system. In this exposure device, the exposure surface of the substrate is closely adhered to the flat surface of the translucent member, thereby accurately forming a desired image on the exposure surface of the substrate with poor surface flatness. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] JP 2011-81317 A

[The problem to be solved by the invention]

In the exposure device described in Patent Document 1, the exposure surface of the substrate is closely attached to the flat surface of the translucent member. Therefore, the exposed surface of the substrate and the flat surface of the light-transmitting member are closely adhered, so that on the exposed surface of the substrate, there are problems such as dirt adhesion, damage, and dust trapped between the flat surface of the light-transmitting member and the like. . [Technical means to solve the problem]

The present invention is to solve at least a part of the above-mentioned general problems, and for example, it can be realized as the following forms.

According to the first aspect of the present invention, an exposure apparatus for exposing a substrate is provided. This exposure apparatus includes: a substrate holder having a holding surface for sucking and holding the substrate; and a driving mechanism that moves the substrate holder in a direction orthogonal to the holding surface. Furthermore, this exposure apparatus is equipped with a board|substrate pressing member, and it is arrange|positioned so that it may not shift in the direction orthogonal to a holding surface. When the substrate held by the substrate holder is pressed against the substrate holding member by the drive mechanism, the substrate pressing member abuts against the substrate at a position avoiding the exposure area of the substrate.

According to this exposure apparatus, the substrate holder attracts and holds the substrate, so the flatness of the substrate can be maintained. In addition, the substrate pressing member is arranged so as not to be displaced in a direction orthogonal to the holding surface of the substrate holder. Therefore, the surface of the substrate pressing member that abuts against the substrate is aligned with the imaging surface of the exposure portion, whereby the exposure surface of the substrate can be aligned with the imaging surface of the exposure portion when the substrate and the substrate pressing member abut. In addition, when the substrate held by the substrate holder is pressed against the substrate pressing member by the driving mechanism, the substrate pressing member abuts against the substrate at a position avoiding the exposure area of the substrate. Therefore, the flatness of the substrate can be improved, and defects that occur on the exposed surface of the substrate can be prevented.

According to the second aspect of the present invention, in the first aspect, the substrate pressing member is configured to be movable in a direction parallel to the holding surface. Therefore, substrates of various sizes can be applied to the exposure device. In addition, when the substrate is placed on the substrate holder or removed from the substrate holder, the substrate pressing member is moved to the outside of the substrate holder, whereby the substrate can be easily replaced.

According to a third aspect of the present invention, in the second aspect, the substrate pressing member is configured to slide on a guide rail having a fixed position. Therefore, while preventing displacement of the substrate pressing member in a direction orthogonal to the holding surface of the substrate holder, the substrate pressing member can be moved in a direction parallel to the holding surface.

According to the fourth aspect of the present invention, in the first aspect, the position of the substrate pressing member is fixed. Therefore, the structure of the exposure device can be simplified.

According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the substrate pressing member has a flat surface that abuts the substrate. Therefore, the substrate and the substrate pressing member can be stably contacted with each other on the surface.

According to a sixth aspect of the present invention, it is any one of the first to fifth aspects, wherein the substrate pressing member is arranged so as to abut the two opposite edge portions of the substrate. Therefore, the substrate can be held stably.

According to a seventh aspect of the present invention, in any one of the first to fifth aspects, the substrate pressing member is a lattice-shaped member that opens regions corresponding to a plurality of exposure regions provided on the substrate. Thereby, the substrate pressing member abuts on the substrate except the edge portion of the substrate, so that the flatness of the substrate can be further improved.

According to an eighth aspect of the present invention, in any one of the first to seventh aspects, the drive mechanism is configured to apply force to a plurality of positions on the outer periphery of the substrate holder. Therefore, the substrate holder can be reliably brought into contact with each other.

According to a ninth aspect of the present invention, it is any one of the first to the eighth aspect, and further includes: a first substrate conveying portion that is pressed against the substrate pressing member by a driving mechanism on the substrate held in the substrate holder In the state, the substrate is transported to the exposure section; and the second substrate transport section, which is arranged side by side with the first substrate transport section, and the substrate held in the substrate holder is pressed by the substrate pressing member by the driving mechanism. It is conveyed to the exposure part, and one exposure part exposes the substrate conveyed by the 1st board|substrate conveyance part and the board|substrate conveyed by the 2nd board|substrate conveyance part alternately. Thereby, the exposure process can be efficiently performed.

According to a tenth aspect of the present invention, there is provided an exposure method that uses an exposure device to expose a substrate. This exposure method includes a step of preparing an exposure device of any one of the first aspect to the ninth aspect. In addition, this exposure method includes a step of sucking and sucking the substrate by a substrate holder, a step of pressing the substrate held by the substrate holder to a substrate pressing member by a drive mechanism, and a step of exposing by the exposure unit.

According to this exposure method, the substrate holder attracts and holds the substrate, so the flatness of the substrate can be maintained. In addition, the substrate pressing member is arranged so as not to be displaced in a direction orthogonal to the holding surface. Therefore, the surface of the substrate pressing member that abuts against the substrate is aligned with the imaging surface of the exposure portion, whereby the exposure surface of the substrate can be aligned with the imaging surface of the exposure portion when the substrate and the substrate pressing member abut. In addition, when the substrate held by the substrate holder is pressed against the substrate pressing member by the driving mechanism, the substrate pressing member abuts against the substrate at a position avoiding the exposure area of the substrate. Therefore, the flatness of the substrate can be improved, and defects that occur on the exposed surface of the substrate can be prevented.

Hereinafter, suitable embodiments of the exposure apparatus of the present invention will be described using drawings, but the same or equivalent parts in each figure will be described with the same reference numerals.

Fig. 1 is a perspective view showing the overall structure of an exposure apparatus according to an embodiment of the present invention. The exposure device 100 exposes the exposure surface of a substrate having a photosensitive layer on the surface based on exposure data of a two-dimensional pattern such as a display circuit, thereby forming the pattern on the substrate.

In FIG. 1, the exposure apparatus 100 includes a first substrate conveying unit 10, a second substrate conveying unit 20, a registration imaging unit 30, and an exposure unit 40. The first substrate conveying unit 10 and the second substrate conveying unit 20 are arranged side by side on, for example, a first base member 102, and the first base member 102 is fixed to a base frame 101 installed on the floor. The alignment imaging section 30 and the exposure section 40 are arranged on the second base member 103 provided on the first base member 102 and straddle the first substrate conveying section 10 and the second substrate conveying section 20.

In this embodiment, the moving direction (from the upper left direction to the lower right direction of FIG. 1) of the camera 34 of the registration photographing unit 30 and the exposure head 44 of the exposure unit 40 is defined as the X-axis direction. In addition, the movement direction of the board fixing portion 60 conveyed by the first board conveying portion 10 and the second board conveying portion 20 is defined as the Y-axis direction (from the lower left direction to the upper right direction in FIG. 1). In addition, the direction orthogonal to the X-axis direction and the Y-axis direction (from the downward direction in FIG. 1 to the upward direction) is defined as the Z-axis direction.

The first substrate conveying section 10 conveys the substrate 50 held by the substrate fixing section 60 in the Y-axis direction along the flow of the exposure process. The second substrate conveying section 20 conveys the substrate 50 held by the substrate fixing section 60 in the Y-axis direction in the same manner as the first substrate conveying section 10 along the flow of the exposure process. Since the first board conveying unit 10 and the second board conveying unit 20 have the same structure, only the first board conveying unit 10 will be described below. The first substrate conveying unit 10 includes a supporting member 11, a guide member 12, and a linear motor 13.

The supporting member 11 is arranged along the Y-axis direction on the first base member 102. The guide member 12 is arranged on the support member 11 along the Y-axis direction. The linear motor 13 is arranged in parallel with the guide member 12 on the upper surface of the support member 11. The substrate fixing portion 60 clamps the exposed substrate 50, uses the linear motor 13 as a power source, and is configured to be movable on the guide member 12. The detailed structure of the substrate fixing portion 60 will be described later.

The registration photographing unit 30 uses a camera 34 to optically read the registration mark provided at a predetermined position on the substrate 50, and thereby detects based on the coordinates (X, Y) of the read registration mark Arrangement position of substrate 50. The alignment imaging unit 30 includes a supporting member 31, a guide member 32, a shaft motor 33, and two cameras 34.

The support member 31 is arranged on the second base member 103 along the X-axis direction across the first substrate conveying section 10 and the second substrate conveying section 20. The guide member 32 is arranged on the side surface of the support member 31 along the X-axis direction. The shaft motor 33 is arranged in parallel with the guide member 32 on the upper part of the support member 31. The cameras 34 each use the shaft motor 33 as a power source, and are configured to be movable on the guide member 32.

When the substrate 50 has a rectangular shape, the alignment marks are provided at the four corners of the substrate 50, for example. Therefore, by using two cameras 34, two alignment marks can be read at the same time, so that the placement position of the substrate 50 can be detected efficiently. In addition, the registration photographing unit 30 may have one camera 34, or may have three or more cameras 34.

The exposure unit 40 exposes the exposed surface of the substrate 50 based on the exposure data. The exposure unit 40 has a supporting member 41, a guide member 42, a linear motor 43, and an exposure head 44. The operation of the exposure unit 40 is controlled by an image processing unit (not shown) that processes exposure data. This image processing unit corrects the exposure data according to the arrangement position of the substrate 50 detected by the photographing unit 30, and controls the exposure unit 40 based on the correction data. In this way, exposure can be performed at an appropriate position on the substrate 50.

The support member 41 is arranged on the second base member 103 along the X-axis direction across the first substrate conveying section 10 and the second substrate conveying section 20. The guide member 42 is arranged on the support member 41 along the X-axis direction. The linear motor 43 is arranged on the side surface of the support member 41 in parallel with the guide member 42. The exposure head 44 uses the linear motor 43 as a power source and is configured to be movable on the guide member 42.

The exposure head 44 has an LED light source and a light modulating element, that is, a digital micro-mirror device (DMD: Digital Mirror Device). By using a digital micro-mirror device, patterns can be directly formed on the substrate 50 without having to pass through the mask. In addition, the light source is not limited to LED light sources, and various light sources such as lasers or UV lamps can be used. Moreover, even if a polygon mirror is used instead of a digital micro-mirror device, it is possible to directly form a pattern on the substrate 50 without passing through the mask. In the case of using a polygon mirror, it is better to use a laser light source as the light source.

In this embodiment, the exposure apparatus 100 includes a first substrate conveying unit 10 and a second substrate conveying unit 20. In addition, the alignment imaging section 30 and the exposure section 40 are arranged across the first substrate conveying section 10 and the second substrate conveying section 20. Therefore, for example, while the substrate 50 conveyed by the first substrate conveying section 10 is exposed by the exposure section 40, the alignment imaging section 30 can detect the substrate 50 conveyed by the second substrate conveying section 20. The configuration location. That is, the exposure unit 40 alternately exposes the substrate 50 conveyed by the first substrate conveying unit 10 and the substrate 50 conveyed by the second substrate conveying unit 20, thereby enabling efficient exposure processing. In addition, the number of substrate conveying parts may be one, or three or more.

In addition, in this embodiment, although the image processing unit has been described, the exposure data is corrected in response to the placement position of the substrate 50 detected by the photographing section 30, and the exposure section 40 is controlled based on the correction data, but it is not limited to this. . For example, the alignment mechanism disclosed in Patent Document 1 may be provided between the guide member 12 and the substrate fixing portion 60 of the present embodiment, and the alignment mechanism may correct the placement position of the substrate 50 in accordance with exposure data. In this case, exposure may be performed at an appropriate position on the substrate 50.

Next, the detailed structure of the substrate fixing section 60 provided in the first substrate conveying section 10 will be described. Fig. 2 is a perspective view showing a substrate fixing portion according to an embodiment of the present invention. Fig. 3 is a perspective view showing a state in which a substrate is clamped by a substrate fixing portion according to an embodiment of the present invention. Fig. 4 is a cross-sectional view showing a state in which a substrate is clamped by a substrate fixing portion in an embodiment of the present invention. In addition, FIG. 4 is a line passing through the pneumatic cylinder 62 to show the cross section of the substrate fixing portion cut.

In FIGS. 2 to 4, the substrate fixing portion 60 has: a substrate holder 61, a pneumatic cylinder 62, a substrate holder support member 63, a substrate holder guide member 64, a guide member 65, a sliding member 66, and a substrate pressing member 67. The operation of the substrate fixing unit 60 is controlled by the control unit in response to an operator's operation.

The substrate holder 61 has a holding surface 61a for holding the substrate 50, and is a rectangular plate-shaped member that expands toward the XY plane. The holding surface 61a of the substrate holder 61 is formed with a plurality of fine through holes (not shown). Through the through hole, the substrate 50 placed on the substrate holder 61 is sucked onto the holding surface 61a by suction by a suction mechanism (not shown) toward the opposite side of the holding surface 61a. Thereby, the substrate 50 can be held flat.

The pneumatic cylinder 62 is a driving mechanism that moves the substrate holder 61 in a direction (Z-axis direction) orthogonal to the holding surface 61a from the inner surface of the substrate holder 61. The pneumatic cylinders 62 are arranged at the four corners of the substrate holder 61. The pneumatic cylinder 62 has a cylinder portion 62 a fixed to the substrate holder support member 63 and a rod 62 b whose tip abuts against the inner surface of the substrate holder 61. The pneumatic cylinder 62 uses air pressure to extend the rod 62b from the cylinder portion 62a, thereby moving the substrate holder 61.

The pneumatic cylinders 62 are arranged at the four corners of the substrate holder 61, whereby the substrate holder 61 can be moved evenly by applying force to the entire surface of the substrate holder 61. In addition, the pneumatic cylinder 62 is used as the driving mechanism, whereby the substrate holder 61 can be moved with a simple structure. In addition, the pneumatic cylinder 62 does not have to be provided at the four corners of the substrate holder 61, and may be provided at the center of each side of the substrate holder 61. In this case, the force may be uniformly applied to the entire surface of the substrate holder 61.

The substrate holder support member 63 is a rectangular plate-shaped member that expands toward the XY plane. The substrate holder support member 63 can guide the substrate holder 61 up and down through the substrate holder guide member 64. The substrate holder guide member 64 fixes the rod portion 64 a to the substrate holder 61 and fixes the bearing portion 64 b to the substrate holder support member 63.

The guide members 65 are arranged outside the substrate holder 61 in the Y-axis direction at positions facing each other on the substrate holder support member 63, and two are arranged along the X-axis direction. Two sliding members 66 are provided for one guide member 65. The sliding member 66 is engaged with the guide member 65 and is configured to be movable on the guide member 65 by using a motor or the like not shown as a power source.

Two substrate pressing members 67 are arranged on the sliding member 66 so as to face each other. The substrate pressing member 67 has an abutting portion 67a that abuts the substrate 50, and a fixing portion 67b that extends from both ends of the abutting portion 67a in a direction orthogonal to the abutting portion 67a and is fixed to the sliding member 66, respectively. By arranging the two substrate pressing members 67, the two opposite edge portions of the substrate 50 can be brought into contact with the substrate pressing members 67.

The contact portion 67 a is formed to extend along the Y-axis direction, and has a flat surface 67 d that abuts against the non-exposed area of the exposed surface of the substrate 50. The contact portion 67a has a flat surface 67d, whereby the substrate 50 and the substrate pressing member 67 can be stably contacted with each other on the surface. In addition, the abutting portion 67a may have a convex portion and may be in contact with the non-exposed area of the exposed surface of the substrate 50 by dots or lines. In addition, the fixed portion 67b and the sliding member 66 may be integrated.

The substrate pressing member 67 is attached to the substrate holder support member 63 through the sliding member 66 and the guide member 65, and thereby is arranged so as not to be displaced in the direction (Z-axis direction) orthogonal to the holding surface 61a. In addition, the flat surface 67 d of the abutting portion 67 a of the two substrate pressing members 67 facing each other is extended to define the reference surface 68. In this embodiment, the reference surface 68 is configured to coincide with the imaging surface of the exposure unit 40.

Here, when the substrate 50 held by the substrate holder 61 is pressed against the substrate pressing member 67 by the pneumatic cylinder 62, the substrate pressing member 67 abuts against the substrate 50 at a position avoiding the exposure area of the substrate 50. Therefore, above the exposure area of the substrate 50, there is nothing that hinders the exposure. In addition, at this time, the exposure surface of the substrate 50 and the reference surface 68, that is, the exposure surface of the substrate 50 and the imaging surface of the exposure portion 40 will coincide.

Next, the operation of clamping the substrate 50 by the substrate fixing portion 60 will be described. Here, the operation in the case where the rectangular substrate 50 is clamped will be described. First, when an operator places the substrate 50 on the substrate holder 61, for example, when a switch provided in the exposure apparatus 100 is pressed down, the substrate holder 61 attracts and holds the substrate 50 by suction.

Next, the substrate pressing member 67 waiting outside the X-axis direction of the substrate holder 61 will move parallel to the X-axis direction in accordance with the size of the substrate 50, avoiding the exposure area of the substrate 50 and stopping at the edge of the substrate 50. The position where the axis directions overlap. Here, the size of the substrate 50 may be registered in the control unit by an operator in advance, or may be detected by a sensor (not shown).

It is configured such that the substrate pressing member 67 can be moved in a direction parallel to the holding surface 61 a, whereby the substrate fixing portion 60 can clamp the substrate 50 of various sizes. In addition, when the substrate 50 is placed on the substrate holder 61 or when the substrate 50 is removed from the substrate holder 61, the substrate pressing member 67 is moved to the outside of the substrate holder 61, whereby the substrate 50 can be easily installed. replace. In addition, the substrate pressing member 67 is configured to slide on the guide member 65 which is a fixed position guide rail, thereby preventing the substrate pressing member 67 from being displaced in a direction orthogonal to the holding surface 61a of the substrate holder 61 , While moving the substrate pressing member 67.

After that, the pneumatic cylinder 62 is driven to move the substrate holder 61 in the Z-axis direction, and the substrate 50 held by the substrate holder 61 is pressed against the substrate pressing member 67 with a predetermined pressure. Here, the pressure for pressing the substrate 50 against the substrate pressing member 67 may be registered in the control unit by an operator in advance, or feedback control may be performed using a sensor not shown. Thereby, the substrate 50 is clamped by the substrate fixing portion 60. Also, at this time, as described above, the reference plane 68 defined by the exposure surface of the substrate 50 and the substrate pressing member 67 are the same.

As described above, the exposure apparatus 100 includes the substrate holder 61 that sucks and holds the substrate 50 by suction. Furthermore, the exposure apparatus 100 is equipped with the board|substrate pressing member 67, and it is arrange|positioned so that it may not shift to the direction (Z-axis direction) orthogonal to the holding surface 61a. When the substrate 50 held by the substrate holder 61 is pressed against the substrate pressing member 67 by the pneumatic cylinder 62, the substrate pressing member 67 abuts against the substrate 50 at a position avoiding the exposure area of the substrate 50.

According to the exposure apparatus 100, the substrate holder 61 attracts and holds the substrate 50, so the flatness of the substrate 50 can be maintained. In addition, the substrate pressing member 67 is arranged so as not to be displaced in a direction orthogonal to the holding surface 61a. Therefore, the surface of the substrate pressing member 67 that is in contact with the substrate 50 is aligned with the imaging surface of the exposure section 40, so that the exposure surface of the substrate 50 and the exposure section 40 can be imaged when the substrate 50 and the substrate pressing member 67 are in contact with each other. Same face. When the substrate 50 held by the substrate holder 61 is pressed against the substrate pressing member 67 by the pneumatic cylinder 62, the substrate pressing member 67 abuts against the substrate 50 at a position avoiding the exposure area of the substrate 50. Therefore, the flatness of the substrate 50 can be improved, and defects that occur on the exposed surface of the substrate 50 can be prevented.

In this embodiment, although the substrate pressing member 67 has been described to move in parallel in the X-axis direction in accordance with the size of the substrate 50, it is not limited to this. The substrate pressing member 67 may avoid the exposure area of the substrate 50 and be fixed at a position overlapping the edge portion of the substrate 50 in the Z-axis direction. In the case where the size of the substrate 50 exposed by the exposure apparatus 100 does not change, with this structure, the guide member 65 and the sliding member 66 are omitted, and the structure of the substrate fixing portion 60 can be simplified. At this time, in order for the operator to easily place the substrate holder 61 on the substrate 50, it is also possible to provide the substrate 50 from the X-axis direction or the Y-axis direction through the gap between the substrate holder 61 and the substrate pressing member 67. Substrate supply mechanism. The substrate supply mechanism may be, for example, a sliding mechanism in which rollers are arranged side by side.

In addition, when the substrate 50 is provided with a plurality of exposure regions, as shown in FIG. 5, a grid-shaped substrate pressing member 67A having openings for opening regions corresponding to the plurality of exposure regions of the substrate 50 may also be used.部67c. In this case, the substrate pressing member 67A is in contact with the substrate pressing member 67A except for the edge portion of the substrate 50, so that the flatness of the substrate 50 can be further improved. At this time, the pneumatic cylinder 62 may apply force to the center part of the substrate holder 61 in addition to the outer peripheral part of the substrate holder 61.

Although several embodiments of the present invention have been described above, the above-mentioned embodiments of the invention are intended to facilitate the understanding of the present invention and are not intended to limit the present invention. The present invention can be changed or improved within the scope not exceeding the gist thereof, and the equivalents thereof are included in the present invention. In addition, in the range where at least a part of the above-mentioned problems can be solved or at least a part of the effect is exerted, the combination or omission of the respective constituent elements described in the scope of the patent application and the specification can be made.

10: The first board conveying department 11, 21, 31, 41: support member 12, 22, 32, 42, 64: guide member 13,23,43: Linear motor 20: The second board conveying department 30: Counterpoint Photography Department 33: Shaft motor 34: Camera 40: Exposure Department 44: Exposure head 50: substrate 60: Board fixing part 61: substrate holder 61a: Keep the face 62: pneumatic cylinder 62a: Cylinder body 62b: Rod 63: substrate holder support member 64: substrate holder guide member 64a: pole 64b: Bearing part 65: Guiding member 66: Sliding member 67: substrate pressing member 67a: Abutment part 67b: Fixed part 67d: flat surface 67A: Board pressing member 67c: opening 68: datum plane 100: Exposure device 101: pedestal frame 102: The first base member 103: The second base member

[Fig. 1] A perspective view showing the overall structure of an exposure apparatus according to an embodiment of the present invention. [Fig. 2] A perspective view showing a substrate fixing portion according to an embodiment of the present invention. [Fig. 3] A perspective view showing a state in which a substrate is clamped by a substrate fixing portion according to an embodiment of the present invention. [FIG. 4] A cross-sectional view showing a state in which a substrate is clamped by a substrate fixing portion in an embodiment of the present invention. [FIG. 5] A plan view showing a substrate pressing member having openings corresponding to a plurality of exposure regions in one embodiment of the present invention.

50: substrate

60: Board fixing part

61: substrate holder

61a: Keep the face

62: pneumatic cylinder

63: substrate holder support member

64: substrate holder guide member

64a: pole

64b: Bearing part

65: Guiding member

66: Sliding member

67: substrate pressing member

67a: Abutment part

67b: Fixed part

Claims (10)

An exposure device for exposing a substrate, including: A substrate holder, which has a holding surface for attracting and holding the aforementioned substrate; A driving mechanism that moves the substrate holder in a direction orthogonal to the holding surface; and The substrate pressing member is arranged so as not to be displaced in a direction orthogonal to the holding surface. When the substrate held by the substrate holder is pressed against the substrate pressing member by the drive mechanism, it avoids the difference between the substrate and the substrate. The position of the exposure area is in contact with the aforementioned substrate. The exposure device according to claim 1, wherein: The substrate pressing member is configured to be movable in a direction parallel to the holding surface. The exposure device according to claim 2, wherein: The aforementioned substrate pressing member is configured to slide on a guide rail having a fixed position. The exposure device according to claim 1, wherein: The position of the aforementioned substrate pressing member is fixed. The exposure device according to any one of claim 1 to claim 4, wherein: The substrate pressing member has a flat surface in contact with the substrate. The exposure device according to any one of claim 1 to claim 4, wherein: The substrate pressing member is arranged so as to abut against two opposite edge portions of the substrate. The exposure device according to any one of claim 1 to claim 4, wherein: The substrate pressing member is a lattice-shaped member that opens regions corresponding to a plurality of exposure regions provided on the substrate. The exposure device according to any one of claim 1 to claim 4, wherein: The drive mechanism is configured to apply force to a plurality of positions on the outer periphery of the substrate holder. The exposure device according to any one of claim 1 to claim 4, wherein: It further includes: a first substrate conveying section that conveys the substrate to the exposure section in a state where the substrate held by the substrate holder is pressed by the substrate pressing member by the drive mechanism; and The second substrate conveying section is arranged side by side with the first substrate conveying section, and conveys the substrate to the exposure section in a state where the substrate held by the substrate holder is pressed by the substrate pressing member by the drive mechanism , One said exposure part is to alternately expose the said board|substrate conveyed by the said 1st board|substrate conveyance part, and the said board|substrate conveyed by the said 2nd board|substrate conveyance part. An exposure method that uses an exposure device to expose a substrate and includes: The steps of preparing the exposure device described in any one of claim 1 to 4, The step of attracting and adsorbing the aforementioned substrate by the aforementioned substrate holder, The step of pressing the substrate held in the substrate holder to the substrate pressing member by the drive mechanism, The step of exposing is performed by the aforementioned exposing part.

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