TW202046496A - Display apparatus and manufacturing method thereof - Google Patents

Display apparatus and manufacturing method thereof Download PDF

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TW202046496A
TW202046496A TW108119337A TW108119337A TW202046496A TW 202046496 A TW202046496 A TW 202046496A TW 108119337 A TW108119337 A TW 108119337A TW 108119337 A TW108119337 A TW 108119337A TW 202046496 A TW202046496 A TW 202046496A
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pad
emitting diode
light
semiconductor layer
diode element
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TW108119337A
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TWI682531B (en
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劉仲展
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友達光電股份有限公司
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Priority to TW108119337A priority Critical patent/TWI682531B/en
Priority to US16/654,009 priority patent/US11177247B2/en
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Priority to CN201911241375.6A priority patent/CN111048033B/en
Publication of TW202046496A publication Critical patent/TW202046496A/en
Priority to US17/463,540 priority patent/US11742338B2/en

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    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/22Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
    • G09G3/30Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
    • G09G3/32Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/16Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
    • H01L25/167Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits comprising optoelectronic devices, e.g. LED, photodiodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/50Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00Aspects of the constitution of display devices
    • G09G2300/04Structural and physical details of display devices

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
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Abstract

A display apparatus includes a driving substrate and a first light emitting diode element. The driving substrate has driving structures. Each of the driving structures includes a first pad, a second pad, a third pad and a fourth pad. The driving structures includes a first driving structure. The first light emitting diode element is electrically connected to a first pad and a second pad of the first driving structure, and the first light emitting diode element crosses a line connecting a third pad and a fourth pad of the first driving structure. A manufacturing method of the display apparatus is also provided.

Description

顯示裝置及其製造方法Display device and manufacturing method thereof

本發明是有關於一種發光裝置及其製造方法,且特別是有關於一種顯示裝置及其製造方法。The present invention relates to a light emitting device and a manufacturing method thereof, and more particularly to a display device and a manufacturing method thereof.

發光二極體顯示裝置包括驅動基板以及被轉置(transferred)於驅動基板上的多個微型發光二極體(mirco-LEDs)。繼承發光二極體的特性,發光二極體顯示裝置具有省電、高效率、高亮度及反應時間快等優點。此外,相較於有機發光二極體顯示裝置,發光二極體顯示裝置還具有色彩易調校、發光壽命長、無影像烙印等優勢。因此,發光二極體顯示裝置被視為下一世代的顯示技術。The light emitting diode display device includes a driving substrate and a plurality of micro-light emitting diodes (mirco-LEDs) transferred on the driving substrate. Inheriting the characteristics of light-emitting diodes, light-emitting diode display devices have the advantages of power saving, high efficiency, high brightness and fast response time. In addition, compared with organic light-emitting diode display devices, light-emitting diode display devices also have the advantages of easy color adjustment, long light-emitting life, and no image burn-in. Therefore, light-emitting diode display devices are regarded as the next generation of display technology.

然而,初步完成的發光二極體顯示裝置多存在缺陷(defect),如何不依賴備援(redundancy)且快速、省晶粒的修補發光二極體顯示裝置為現階段開發發光二極體顯示裝置所遭遇的一大課題。However, the preliminarily completed LED display devices often have defects. How to repair the LED display devices quickly and die saving without relying on redundancy is the current development of LED display devices A major issue encountered.

本發明提供一種顯示裝置,易修補。The invention provides a display device which is easy to repair.

本發明提供一種顯示裝置的製造方法,能製作出易修補的顯示裝置。The invention provides a method for manufacturing a display device, which can manufacture a display device that is easy to repair.

本發明的一種顯示裝置,包括驅動基板及第一發光二極體元件。驅動基板具有多個驅動結構。多個驅動結構的每一個包括一第一接墊、一第二接墊、一第三接墊及一第四接墊。多個驅動結構包括一第一驅動結構。第一發光二極體元件電性連接至第一驅動結構的第一接墊及第二接墊,且第一發光二極體元件跨越第一驅動結構之第三接墊與第四接墊的一連線。A display device of the present invention includes a driving substrate and a first light emitting diode element. The driving substrate has a plurality of driving structures. Each of the plurality of driving structures includes a first pad, a second pad, a third pad, and a fourth pad. The plurality of driving structures includes a first driving structure. The first light emitting diode element is electrically connected to the first pad and the second pad of the first driving structure, and the first light emitting diode element straddles the third pad and the fourth pad of the first driving structure One connection.

在本發明的一實施例中,上述的第一接墊與第三接墊具有相同的第一電位,且第二接墊與第四接墊具有相同的第二電位。In an embodiment of the present invention, the above-mentioned first pad and the third pad have the same first potential, and the second pad and the fourth pad have the same second potential.

在本發明的一實施例中,上述的第一接墊、第二接墊、第三接墊及第四接墊在結構上分離。In an embodiment of the present invention, the above-mentioned first pad, second pad, third pad and fourth pad are separated in structure.

在本發明的一實施例中,上述的第一接墊及第三接墊相連接。In an embodiment of the present invention, the aforementioned first pad and third pad are connected.

在本發明的一實施例中,上述的第二接墊及第四接墊相連接。In an embodiment of the present invention, the above-mentioned second pad and the fourth pad are connected.

在本發明的一實施例中,上述的顯示裝置更包括第二發光二極體元件。多個驅動結構更包括第二驅動結構。第二發光二極體元件電性連接至第二驅動結構的第三接墊及第四接墊。第一驅動結構的第一接墊及第一驅動結構的第二接墊在第一方向上排列,第二驅動結構的第三接墊及第二驅動結構的第四接墊在第二方向上排列,且第一方向與第二方向交叉。In an embodiment of the present invention, the above-mentioned display device further includes a second light emitting diode element. The plurality of driving structures further includes a second driving structure. The second light emitting diode device is electrically connected to the third pad and the fourth pad of the second driving structure. The first pad of the first drive structure and the second pad of the first drive structure are arranged in the first direction, and the third pad of the second drive structure and the fourth pad of the second drive structure are arranged in the second direction Arranged, and the first direction crosses the second direction.

在本發明的一實施例中,上述的第一發光二極體元件包括第一型半導體層、第二型半導體層、設置於第一型半導體層與第二型半導體層之間的主動層、電性連接至第一型半導體層的第一電極以及電性連接至第二型半導體層的第二電極,其中第一電極設置於第一半導體層與第一接墊之間,且第二電極設置於第二半導體層與第二接墊之間。In an embodiment of the present invention, the above-mentioned first light emitting diode element includes a first type semiconductor layer, a second type semiconductor layer, an active layer disposed between the first type semiconductor layer and the second type semiconductor layer, The first electrode electrically connected to the first type semiconductor layer and the second electrode electrically connected to the second type semiconductor layer, wherein the first electrode is disposed between the first semiconductor layer and the first pad, and the second electrode It is arranged between the second semiconductor layer and the second pad.

在本發明的一實施例中,上述的第一發光二極體元件包括第一型半導體層、第二型半導體層、設置於第一型半導體層與第二型半導體層之間的主動層、電性連接至第一型半導體層的第一電極以及電性連接至第二型半導體層的第二電極,其中第一半導體層設置於第一電極與第一接墊之間,且第二半導體層設置於第二電極與第二接墊之間。In an embodiment of the present invention, the above-mentioned first light emitting diode element includes a first type semiconductor layer, a second type semiconductor layer, an active layer disposed between the first type semiconductor layer and the second type semiconductor layer, The first electrode electrically connected to the first type semiconductor layer and the second electrode electrically connected to the second type semiconductor layer, wherein the first semiconductor layer is disposed between the first electrode and the first pad, and the second semiconductor layer The layer is disposed between the second electrode and the second pad.

在本發明的一實施例中,上述的第一發光二極體元件包括第一型半導體層、第二型半導體層、設置於第一型半導體層與第二型半導體層之間的主動層、電性連接至第一型半導體層的第一電極以及電性連接至第二型半導體層的第二電極,其中第一半導體層設置於第一電極與第一接墊之間,且第二電極設置於第二半導體層與第二接墊之間。In an embodiment of the present invention, the above-mentioned first light emitting diode element includes a first type semiconductor layer, a second type semiconductor layer, an active layer disposed between the first type semiconductor layer and the second type semiconductor layer, The first electrode electrically connected to the first type semiconductor layer and the second electrode electrically connected to the second type semiconductor layer, wherein the first semiconductor layer is disposed between the first electrode and the first pad, and the second electrode It is arranged between the second semiconductor layer and the second pad.

一種顯示裝置的製造方法,包括下列步驟:提供驅動基板,具有多個驅動結構,其中每一驅動結構包括第一接墊、第二接墊、第三接墊及第四接墊,第一接墊及第二接墊在第一方向上排列,第三接墊及第四接墊在第二方向上排列,且第一方向與第二方向交叉;以及轉置多個第一發光二極體元件至驅動基板,其中多個第一發光二極體元件電性連接至多個驅動結構之多個第一驅動結構的多個第一接墊及多個第二接墊。A method of manufacturing a display device includes the following steps: providing a driving substrate with a plurality of driving structures, wherein each driving structure includes a first pad, a second pad, a third pad, and a fourth pad. The pads and the second pads are arranged in the first direction, the third pads and the fourth pads are arranged in the second direction, and the first direction and the second direction cross; and transpose a plurality of first light-emitting diodes The device is connected to the driving substrate, wherein the plurality of first light emitting diode devices are electrically connected to the plurality of first pads and the plurality of second pads of the plurality of first driving structures of the plurality of driving structures.

在本發明的一實施例中,上述的多個驅動結構更包括一第二驅動結構,且顯示裝置的製造方法更包括:在多個第一發光二極體元件已轉置於驅動基板之後,令多個第二發光二極體元件向驅動基板移動,以使多個第二發光二極體元件的一第二發光二極體元件轉置於第二驅動結構上,其中多個第二發光二極體元件的另一第二發光二極體元件被多個第一發光二極體元件的一第一發光二極體元件阻擋。In an embodiment of the present invention, the above-mentioned plurality of driving structures further includes a second driving structure, and the manufacturing method of the display device further includes: after the plurality of first light-emitting diode elements have been transferred to the driving substrate, The plurality of second light-emitting diode elements are moved to the driving substrate, so that a second light-emitting diode element of the plurality of second light-emitting diode elements is transferred to the second driving structure, wherein the plurality of second light-emitting diode elements The other second light emitting diode element of the diode element is blocked by a first light emitting diode element of the plurality of first light emitting diode elements.

在本發明的一實施例中,上述的顯示裝置的製造方法更包括:令第二發光二極體元件電性連接至第二驅動結構的第三接墊及第四接墊。In an embodiment of the present invention, the manufacturing method of the above-mentioned display device further includes: electrically connecting the second light emitting diode element to the third pad and the fourth pad of the second driving structure.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings.

現將詳細地參考本發明的示範性實施例,示範性實施例的實例說明於附圖中。只要有可能,相同元件符號在圖式和描述中用來表示相同或相似部分。Reference will now be made in detail to the exemplary embodiments of the present invention, and examples of the exemplary embodiments are illustrated in the accompanying drawings. Whenever possible, the same component symbols are used in the drawings and descriptions to indicate the same or similar parts.

應當理解,當諸如層、膜、區域或基板的元件被稱為在另一元件“上”或“連接到”另一元件時,其可以直接在另一元件上或與另一元件連接,或者中間元件可以也存在。相反,當元件被稱為“直接在另一元件上”或“直接連接到”另一元件時,不存在中間元件。如本文所使用的,“連接”可以指物理及/或電性連接。再者,“電性連接”或“耦合”係可為二元件間存在其它元件。It should be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "connected" to another element, it can be directly on or connected to the other element, or Intermediate elements may also be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements. As used herein, "connected" can refer to physical and/or electrical connection. Furthermore, "electrically connected" or "coupled" may mean that there are other elements between two elements.

本文使用的“約”、“近似”、或“實質上”包括所述值和在本領域普通技術人員確定的特定值的可接受的偏差範圍內的平均值,考慮到所討論的測量和與測量相關的誤差的特定數量(即,測量系統的限制)。例如,“約”可以表示在所述值的一個或多個標準偏差內,或±30%、±20%、±10%、±5%內。再者,本文使用的“約”、“近似”或“實質上”可依光學性質、蝕刻性質或其它性質,來選擇較可接受的偏差範圍或標準偏差,而可不用一個標準偏差適用全部性質。As used herein, "about", "approximately", or "substantially" includes the stated value and the average value within the acceptable deviation range of the specific value determined by a person of ordinary skill in the art, taking into account the measurement in question and the The specific amount of measurement-related error (ie, the limitation of the measurement system). For example, "about" can mean within one or more standard deviations of the stated value, or within ±30%, ±20%, ±10%, ±5%. Furthermore, the "about", "approximately" or "substantially" used herein can select a more acceptable range of deviation or standard deviation based on optical properties, etching properties, or other properties, instead of using one standard deviation for all properties .

除非另有定義,本文使用的所有術語(包括技術和科學術語)具有與本發明所屬領域的普通技術人員通常理解的相同的含義。將進一步理解的是,諸如在通常使用的字典中定義的那些術語應當被解釋為具有與它們在相關技術和本發明的上下文中的含義一致的含義,並且將不被解釋為理想化的或過度正式的意義,除非本文中明確地這樣定義。Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art to which the present invention belongs. It will be further understood that terms such as those defined in commonly used dictionaries should be interpreted as having meanings consistent with their meanings in the context of related technologies and the present invention, and will not be interpreted as idealized or excessive The formal meaning, unless explicitly defined as such in this article.

圖1A至圖1D為本發明第一實施例之顯示裝置的製造流程的上視示意圖。1A to 1D are schematic top views of the manufacturing process of the display device according to the first embodiment of the invention.

圖2A至圖2D為本發明第一實施例之顯示裝置的製造流程的剖面示意圖。圖2A至圖2D分別對應圖1A至圖1D的剖線Ι-Ι’、剖線П-П’及剖線Ш-Ш’。2A to 2D are schematic cross-sectional views of the manufacturing process of the display device according to the first embodiment of the invention. Figures 2A to 2D respectively correspond to the section line Ι-Ι', the section line П-П' and the section line Ш-Ш' of FIGS. 1A to 1D.

以下配合圖1A至圖1D及圖2A至圖2D說明本發明第一實施例之顯示裝置10、10’(標示於圖1B及圖1D)的製造流程及其構造。The manufacturing process and structure of the display device 10, 10' (labeled in FIG. 1B and FIG. 1D) according to the first embodiment of the present invention will be described below with reference to FIGS. 1A to 1D and FIGS. 2A to 2D.

請參照圖1A及圖2A,首先,提供驅動基板SUB。驅動基板SUB也可稱背板(backplane)。在本實施例中,驅動基板SUB可包括基底110及設置於基底110上的驅動線路層120。驅動線路層120具有多個驅動結構DS。Please refer to FIGS. 1A and 2A. First, a driving substrate SUB is provided. The driving substrate SUB may also be called a backplane. In this embodiment, the driving substrate SUB may include a base 110 and a driving circuit layer 120 disposed on the base 110. The driving circuit layer 120 has a plurality of driving structures DS.

舉例而言,在本實施例中,一驅動結構DS可包括一第一電晶體T1、一第二電晶體T2、一電容C、一資料線DL、一掃描線GL、一電源線VDD、一共用線VSS、一第一接墊121、一第二接墊122、一第三接墊123及一第四接墊124。For example, in this embodiment, a driving structure DS may include a first transistor T1, a second transistor T2, a capacitor C, a data line DL, a scan line GL, a power line VDD, and a The common line VSS, a first pad 121, a second pad 122, a third pad 123, and a fourth pad 124.

第一電晶體T1具有第一端T1a、第二端T1b及控制端T1c。第二電晶體T2具有第一端T2a、第二端T2b及控制端T2c。第一電晶體T1的第一端T1a電性連接至資料線DL。第一電晶體T1的控制端T1c電性連接至掃描線GL。第一電晶體T1的第二端T1b電性連接至第二電晶體T2的控制端T2c。第二電晶體T2的第一端T2a電性連接至電源線VDD。電容C電性連接至第二電晶體T2的第一端T2a及第二電晶體T2的控制端T2c。The first transistor T1 has a first terminal T1a, a second terminal T1b, and a control terminal T1c. The second transistor T2 has a first terminal T2a, a second terminal T2b, and a control terminal T2c. The first terminal T1a of the first transistor T1 is electrically connected to the data line DL. The control terminal T1c of the first transistor T1 is electrically connected to the scan line GL. The second terminal T1b of the first transistor T1 is electrically connected to the control terminal T2c of the second transistor T2. The first terminal T2a of the second transistor T2 is electrically connected to the power line VDD. The capacitor C is electrically connected to the first terminal T2a of the second transistor T2 and the control terminal T2c of the second transistor T2.

第一接墊121與第三接墊123具有相同的第一電位。第二接墊122與第四接墊124具有相同的第二電位。第一電位與第二電位可具有一電位差,所述電位差用以驅動發光二極體元件130(標示於圖1D),以使發光二極體元件130具有對應的亮度,進而顯示畫面。The first pad 121 and the third pad 123 have the same first potential. The second pad 122 and the fourth pad 124 have the same second potential. The first potential and the second potential may have a potential difference, and the potential difference is used to drive the light-emitting diode element 130 (marked in FIG. 1D), so that the light-emitting diode element 130 has a corresponding brightness and then displays a picture.

舉例而言,在本實施例中,第一接墊121及第三接墊123可皆電性連接至第二電晶體T2的第二端T2b,且第二接墊122及第四接墊124可皆電性連接至共用線VSS,但本發明不以此為限。For example, in this embodiment, the first pad 121 and the third pad 123 can both be electrically connected to the second terminal T2b of the second transistor T2, and the second pad 122 and the fourth pad 124 Both can be electrically connected to the common line VSS, but the invention is not limited to this.

具有第一電位的第一接墊121與具有第二電位的第二接墊122及具有第二電位的第四接墊124於結構上分離,且具有第一電位的第三接墊123與具有第二電位的第二接墊122及具有第二電位的第四接墊124於結構上分離。The first pad 121 with the first potential, the second pad 122 with the second potential, and the fourth pad 124 with the second potential are structurally separated, and the third pad 123 with the first potential is separated from the third pad 123 with the The second pad 122 of the second potential and the fourth pad 124 of the second potential are structurally separated.

舉例而言,在本實施例中,第一接墊121、第二接墊122、第三接墊123及第四接墊124可選擇性地在結構上互相分離,但本發明不以此為限。For example, in this embodiment, the first pad 121, the second pad 122, the third pad 123, and the fourth pad 124 can be selectively separated from each other in structure, but the present invention does not take this as limit.

一驅動結構DS的一第一接墊121及一第二接墊122可視為用以與一發光二極體元件130(標示於圖1D)電性連接的一第一接墊組。一驅動元件DS的一第三接墊123及一第四接墊124可視為用以與另一發光二極體元件130電性連接的一第二接墊組。A first pad 121 and a second pad 122 of a driving structure DS can be regarded as a first pad group for electrically connecting with a light emitting diode device 130 (marked in FIG. 1D). A third pad 123 and a fourth pad 124 of a driving device DS can be regarded as a second pad group for electrically connecting with another light emitting diode device 130.

第一接墊組的第一接墊121及第二接墊122在第一方向d1上排列。第二接墊組的第三接墊123及第四接墊124在第二方向d2上排列,且第一方向d1與第二方向d2交叉。也就是說,第一方向d1與第二方向d2具有夾角α,而0o <α<180o 。舉例而言,在本實施例中,第一方向d1與第二方向d2的夾角α可以是90o ,但本發明不以此為限。The first pad 121 and the second pad 122 of the first pad group are arranged in the first direction d1. The third pad 123 and the fourth pad 124 of the second pad group are arranged in the second direction d2, and the first direction d1 and the second direction d2 cross. That is, the first direction d1 and the second direction d2 have an included angle α, and 0 o <α<180 o . For example, in the present embodiment, the first direction and the second direction d2 d1 angle α may be 90 o, but the present invention is not limited thereto.

請參照圖1B及圖2B,接著,利用一提取元件(未繪示)轉置多個發光二極體元件130至驅動基板SUB,且令多個發光二極體元件130電性連接至多個驅動結構DS的多個第一接墊121及多個第二接墊122。Please refer to FIGS. 1B and 2B. Then, an extraction element (not shown) is used to transfer a plurality of light-emitting diode elements 130 to the driving substrate SUB, and the plurality of light-emitting diode elements 130 are electrically connected to a plurality of driving devices. The plurality of first pads 121 and the plurality of second pads 122 of the structure DS.

圖1B及圖2B繪示一個發光二極體元件130轉置於一個驅動結構DS的一第一接墊121及一第二接墊122為示例,本領域具有通常知識者根據圖1B及圖2B應能瞭解多個發光二極體元件130如何轉置於多個驅動結構DS的多個第一接墊121及多個第二接墊122,於此便不再重複繪示。1B and 2B show an example of a light emitting diode device 130 being transferred to a first pad 121 and a second pad 122 of a driving structure DS. Those with ordinary knowledge in the art can refer to FIGS. 1B and 2B It should be understood how the plurality of light-emitting diode elements 130 are transferred to the plurality of first pads 121 and the plurality of second pads 122 of the plurality of driving structures DS, and the illustration will not be repeated here.

請參照圖2B,發光二極體元件130包括第一型半導體層131、第二型半導體層132、主動層133、第一電極134及第二電極135。主動層133設置於第一型半導體層131與第二型半導體層132之間。第一電極134電性連接至第一型半導體層131。第二電極135電性連接至第二型半導體層132。2B, the light emitting diode device 130 includes a first type semiconductor layer 131, a second type semiconductor layer 132, an active layer 133, a first electrode 134, and a second electrode 135. The active layer 133 is disposed between the first type semiconductor layer 131 and the second type semiconductor layer 132. The first electrode 134 is electrically connected to the first type semiconductor layer 131. The second electrode 135 is electrically connected to the second type semiconductor layer 132.

在本實施例中,發光二極體元件130轉置到驅動基板SUB時,發光二極體元件130可同時與驅動結構DS電性連接。具體而言,在本實施例中,發光二極體元件130-1被轉置時,發光二極體元件130-1的第一電極134及第二電極135可選擇性地面向驅動基板SUB,且發光二極體元件130-1的第一電極134及第二電極135上可分別設有導電物136、137(例如但不限於:錫球、銀膠、異方性導電膠…等)。當提取元件上的發光二極體元件130-1靠近驅動基板SUB時,發光二極體元件130-1之第一電極134及第二電極135上的導電物136、137可分別與驅動基板SUB的第一接墊121及第二接墊122連接,而使發光二極體元件130-1的第一電極134及第二電極135分別電性連接至驅動基板SUB的第一接墊121及第二接墊122。In this embodiment, when the light emitting diode element 130 is transposed to the driving substrate SUB, the light emitting diode element 130 can be electrically connected to the driving structure DS at the same time. Specifically, in this embodiment, when the light emitting diode element 130-1 is transposed, the first electrode 134 and the second electrode 135 of the light emitting diode element 130-1 can selectively face the driving substrate SUB, Moreover, the first electrode 134 and the second electrode 135 of the light-emitting diode element 130-1 may be respectively provided with conductive objects 136 and 137 (for example, but not limited to: tin balls, silver glue, anisotropic conductive glue, etc.). When the light-emitting diode element 130-1 on the extraction element is close to the driving substrate SUB, the conductive objects 136 and 137 on the first electrode 134 and the second electrode 135 of the light-emitting diode element 130-1 can be connected to the driving substrate SUB, respectively. The first pad 121 and the second pad 122 are connected, and the first electrode 134 and the second electrode 135 of the light emitting diode device 130-1 are electrically connected to the first pad 121 and the second pad 121 of the driving substrate SUB, respectively. Two junction pad 122.

發光二極體元件130-1利用上述覆晶(flip chip)方式形成在驅動基板SUB上後,發光二極體元件130-1的第一電極134設置於發光二極體元件130-1的第一半導體層131與第一接墊121之間,且發光二極體元件130-1的第二電極135設置於發光二極體元件130-1的第二半導體層132與第二接墊122之間。After the light-emitting diode element 130-1 is formed on the driving substrate SUB by the above-mentioned flip chip method, the first electrode 134 of the light-emitting diode element 130-1 is disposed on the first electrode 134 of the light-emitting diode element 130-1. Between a semiconductor layer 131 and the first pad 121, and the second electrode 135 of the light emitting diode element 130-1 is disposed between the second semiconductor layer 132 and the second pad 122 of the light emitting diode element 130-1 between.

請參照圖1B,值得注意的是,在多個發光二極體元件130-1電性連接至多個驅動結構DS的多個第一接墊121及多個第二接墊122後,與一驅動結構DS之一第一接墊121及一第二接墊122電性連接的一發光二極體元件130-1係跨越一第三接墊123及一第四接墊124的連線L。於此,便初步完成顯示裝置10。1B, it is worth noting that after the plurality of light-emitting diode elements 130-1 are electrically connected to the plurality of first pads 121 and the plurality of second pads 122 of the plurality of driving structures DS, and a driving A light emitting diode element 130-1 electrically connected to a first pad 121 and a second pad 122 of the structure DS spans a line L between a third pad 123 and a fourth pad 124. At this point, the display device 10 is initially completed.

接著,檢查顯示裝置10。經檢查,若發現至少一驅動結構DS2上未設置發光二極體元件130,則可進行後續圖1C、圖1D、圖2C及圖2D所示的修補動作;或者,發現至少一驅動結構DS2上的至少一發光二極體元件130異常,則可在移除異常的發光二極體元件130後,進行後續圖1C、圖1D、圖2C及圖2D所示的修補動作;以下配合圖1C、圖1D、圖2C及圖2D說明之。Next, the display device 10 is checked. After inspection, if it is found that no light emitting diode element 130 is provided on at least one driving structure DS2, the subsequent repair operations shown in FIGS. 1C, 1D, 2C, and 2D can be performed; or, at least one driving structure DS2 is found At least one of the light-emitting diode elements 130 is abnormal, after removing the abnormal light-emitting diode element 130, the subsequent repair operations shown in FIGS. 1C, 1D, 2C, and 2D can be performed; the following is in conjunction with FIGS. 1C, Figure 1D, Figure 2C and Figure 2D illustrate.

請參照圖1C、圖1D、圖2C及圖2D,在多個發光二極體元件130-1已轉置於驅動基板SUB後,令提取元件(未繪示)提取多個發光二極體元件130-2並旋轉一角度。然後,令提取元件向驅動基板SUB移動,以使發光二極體元件130-2轉置於驅動結構DS2上,其中發光二極體元件130-2電性連接至驅動結構DS2的第三接墊123及第四接墊124。Please refer to FIG. 1C, FIG. 1D, FIG. 2C, and FIG. 2D. After the multiple light-emitting diode elements 130-1 have been transferred to the driving substrate SUB, the extraction element (not shown) extracts the multiple light-emitting diode elements 130-2 and rotate an angle. Then, the extraction element is moved to the driving substrate SUB, so that the light-emitting diode element 130-2 is transferred to the driving structure DS2, wherein the light-emitting diode element 130-2 is electrically connected to the third pad of the driving structure DS2 123 and the fourth pad 124.

在本實施例中,發光二極體元件130-2轉置到驅動基板SUB時,發光二極體元件130-2可同時與驅動結構DS電性連接。具體而言,在本實施例中,發光二極體元件130-2被轉置時,發光二極體元件130-2的第一電極134及第二電極135可選擇性地面向驅動基板SUB,且發光二極體元件130-2的第一電極134及第二電極135上可分別設有導電物136、137(例如但不限於:錫球、銀膠、異方性導電膠…等)。當提取元件上的發光二極體元件130-2靠近驅動基板SUB時,發光二極體元件130-2之第一電極134及第二電極135上的導電物136、137可分別與驅動基板SUB的第三接墊123及第四接墊124連接,而使發光二極體元件130-2的第一電極134及第二電極135分別電性連接至驅動基板SUB的第三接墊123及第四接墊124。In this embodiment, when the light emitting diode element 130-2 is transposed to the driving substrate SUB, the light emitting diode element 130-2 can be electrically connected to the driving structure DS at the same time. Specifically, in this embodiment, when the light emitting diode element 130-2 is transposed, the first electrode 134 and the second electrode 135 of the light emitting diode element 130-2 can selectively face the driving substrate SUB, In addition, the first electrode 134 and the second electrode 135 of the light-emitting diode element 130-2 may be respectively provided with conductive objects 136, 137 (for example, but not limited to: tin balls, silver glue, anisotropic conductive glue, etc.). When the light-emitting diode element 130-2 on the extraction element is close to the driving substrate SUB, the conductive objects 136, 137 on the first electrode 134 and the second electrode 135 of the light-emitting diode element 130-2 can be connected to the driving substrate SUB, respectively. The third pad 123 and the fourth pad 124 are connected, so that the first electrode 134 and the second electrode 135 of the light emitting diode element 130-2 are electrically connected to the third pad 123 and the second pad 123 of the driving substrate SUB, respectively Four pad 124.

發光二極體元件130-2利用上述覆晶(flip chip)方式形成在驅動基板SUB上後,發光二極體元件130-2的第一電極134設置於發光二極體元件130-2的第一半導體層131與第三接墊123之間,且發光二極體元件130-2的第二電極135設置於發光二極體元件130-2的第二半導體層132與第四接墊124之間。於此,便完成修補後的顯示裝置10’。After the light-emitting diode element 130-2 is formed on the driving substrate SUB by the above-mentioned flip chip method, the first electrode 134 of the light-emitting diode element 130-2 is disposed on the first electrode 134 of the light-emitting diode element 130-2. Between a semiconductor layer 131 and the third pad 123, and the second electrode 135 of the light emitting diode element 130-2 is disposed between the second semiconductor layer 132 and the fourth pad 124 of the light emitting diode element 130-2 between. At this point, the repaired display device 10' is completed.

請參照圖1C及圖2C,值得注意的是,在一發光二極體元件130-2轉置於一驅動結構DS2的過程中,提取元件上的另一發光二極體元件130-2(例如圖1C之左側的發光二極體元件130-2)會被已設置於驅動基板SUB上的一發光二極體元件130-1阻擋。請參照圖1C、圖1D、圖2C及圖2D,當未被發光二極體元件130-1阻擋的發光二極體元件130-2(例如圖1C之右側的發光二極體元件130-2)已轉置於驅動結構DS2上且提取元件離開驅動基板SUB時,先前被發光二極體元件130-1阻擋的發光二極體元件130-2會被提取元件帶走而能再度被使用(例如:於下一次的修補動作中,設置於另一個驅動結構DS2上)。Please refer to FIGS. 1C and 2C. It is worth noting that in the process of transferring a light-emitting diode element 130-2 to a driving structure DS2, another light-emitting diode element 130-2 (for example, The light-emitting diode element 130-2 on the left side of FIG. 1C is blocked by a light-emitting diode element 130-1 that has been disposed on the driving substrate SUB. 1C, 1D, 2C and 2D, when the light-emitting diode element 130-2 is not blocked by the light-emitting diode element 130-1 (for example, the light-emitting diode element 130-2 on the right side of FIG. 1C) ) When the extraction element has been transferred to the driving structure DS2 and the extraction element leaves the driving substrate SUB, the light-emitting diode element 130-2 that was previously blocked by the light-emitting diode element 130-1 will be taken away by the extraction element and can be used again ( For example: in the next repair action, set on another drive structure DS2).

藉此,無須在製造顯示裝置10之初,便於一個驅動結構DS上設置多個發光二極體元件130,而能減少發光二極體元件130的使用數量,降低顯示裝置10的製造成本。並且,透過上述修補方法能快速修補顯示裝置10。此外,於修補過程中,被已形成在驅動基板SUB上之發光二極體元件130-1阻擋的發光二極體元件130-2能回收再利用,因而能降低修補成本。Thereby, it is not necessary to arrange multiple light-emitting diode elements 130 on one driving structure DS at the beginning of manufacturing the display device 10, which can reduce the number of light-emitting diode elements 130 used and reduce the manufacturing cost of the display device 10. Moreover, the display device 10 can be quickly repaired through the above-mentioned repair method. In addition, during the repair process, the light-emitting diode element 130-2 blocked by the light-emitting diode element 130-1 formed on the driving substrate SUB can be recycled and reused, thereby reducing the repair cost.

雖然,上述修補方法須搭配具有第一接墊121、第二接墊122、第三接墊123及第四接墊124的驅動結構DS方能使用,但由於第一接墊121與第二接墊122在第一方向d1上排列,第三接墊123及第四接墊124在第二方向d2上排列,且第一方向d1與第二方向d2交叉(亦即,第一接墊121、第二接墊122、第三接墊123及第四接墊124係緊密排列),因此,第一接墊121、第二接墊122、第三接墊123及第四接墊124的設置並不會過度影響顯示裝置10、10’的解析度,且因第一接墊121、第二接墊122、第三接墊123及第四接墊124緊密排列的緣故,相較一般配置備用驅動方法之結構,本發明之一實施例更可稍微節省空間。Although the above repair method can only be used with the driving structure DS having the first pad 121, the second pad 122, the third pad 123, and the fourth pad 124, the first pad 121 and the second pad 124 The pads 122 are arranged in the first direction d1, the third pads 123 and the fourth pads 124 are arranged in the second direction d2, and the first direction d1 and the second direction d2 cross (that is, the first pad 121, The second pad 122, the third pad 123, and the fourth pad 124 are closely arranged). Therefore, the first pad 121, the second pad 122, the third pad 123 and the fourth pad 124 are arranged in parallel It does not excessively affect the resolution of the display devices 10, 10', and because the first pad 121, the second pad 122, the third pad 123, and the fourth pad 124 are closely arranged, compared to the general configuration of backup drivers The structure of the method, an embodiment of the present invention can save a little space.

下述實施例沿用前述實施例的元件標號與部分內容,其中採用相同的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,下述實施例不再重複贅述。The following embodiments use the element numbers and part of the content of the previous embodiments, wherein the same numbers are used to represent the same or similar elements, and the description of the same technical content is omitted. For the description of the omitted parts, reference may be made to the foregoing embodiments, and the following embodiments will not be repeated.

圖3A至圖3E為本發明第二實施例之顯示裝置的製造流程的上視示意圖。3A to 3E are schematic top views of the manufacturing process of the display device according to the second embodiment of the invention.

圖4A至圖4E為本發明第二實施例之顯示裝置的製造流程的剖面示意圖。圖4A至圖4E分別對應圖3A至圖3E的剖線Ι-Ι’、剖線П-П’及剖線Ш-Ш’。圖3A至圖3E省略圖4A至圖4E的固定層140。4A to 4E are schematic cross-sectional views of the manufacturing process of the display device according to the second embodiment of the invention. 4A to 4E respectively correspond to the section line Ι-Ι', the section line П-П' and the section line Ш-Ш' of FIGS. 3A to 3E. FIGS. 3A to 3E omit the fixing layer 140 of FIGS. 4A to 4E.

第二實施例之顯示裝置10A、10A’及其製造方法與第一實施例之顯示裝置10、10’及其製造方法類似,兩者的差異在於:在第二實施例中,發光二極體元件130為橫向式(lateral),而橫向式發光二極體元件130電性連接至驅動基板SUB的方式與前述實施例略有不同,以下配合圖3A至圖3E及圖4A至圖4E說明之。The display devices 10A, 10A' and their manufacturing methods of the second embodiment are similar to the display devices 10, 10' and their manufacturing methods of the first embodiment. The difference between the two is: in the second embodiment, the light-emitting diode The element 130 is lateral, and the way that the lateral light-emitting diode element 130 is electrically connected to the driving substrate SUB is slightly different from the foregoing embodiment. The following is described in conjunction with FIGS. 3A to 3E and 4A to 4E. .

請參照圖3A及圖4A,首先,提供驅動基板SUB。驅動基板SUB具有多個驅動結構DS。與第一實施例不同的是,驅動基板SUB的多個驅動結構DS上還設有固定層140。Please refer to FIGS. 3A and 4A. First, a driving substrate SUB is provided. The driving substrate SUB has a plurality of driving structures DS. The difference from the first embodiment is that a fixed layer 140 is further provided on the plurality of driving structures DS of the driving substrate SUB.

請參照圖3B及圖4B,接著,利用一提取元件(未繪示)轉置多個發光二極體元件130至驅動基板SUB,且令多個發光二極體元件130電性連接至多個驅動結構DS的多個第一接墊121及多個第二接墊122。Please refer to FIGS. 3B and 4B. Then, an extraction element (not shown) is used to transfer a plurality of light-emitting diode elements 130 to the driving substrate SUB, and the plurality of light-emitting diode elements 130 are electrically connected to a plurality of driving devices. The plurality of first pads 121 and the plurality of second pads 122 of the structure DS.

具體而言,在本實施例中,轉置發光二極體元件130時,發光二極體元件130的第一電極134及第二電極135可選擇性地背向驅動基板SUB,而發光二極體元件130的第二半導體層132可固定於固定層140上;然後,於發光二極體元件130的第一電極134及發光二極體元件130的第二電極135上分別形成第一連接元件151及第二連接元件152,其中發光二極體元件130-1的第一電極134透過第一連接元件151電性連接至驅動結構DS的第一接墊121,且發光二極體元件130-1的第二電極135透過第二連接元件152電性連接至驅動結構DS的第二接墊122。Specifically, in this embodiment, when the light-emitting diode element 130 is transposed, the first electrode 134 and the second electrode 135 of the light-emitting diode element 130 can selectively face away from the driving substrate SUB, and the light-emitting diode The second semiconductor layer 132 of the body element 130 can be fixed on the fixing layer 140; then, a first connection element is formed on the first electrode 134 of the light emitting diode element 130 and the second electrode 135 of the light emitting diode element 130, respectively 151 and the second connecting element 152, wherein the first electrode 134 of the light emitting diode element 130-1 is electrically connected to the first pad 121 of the driving structure DS through the first connecting element 151, and the light emitting diode element 130- The second electrode 135 of 1 is electrically connected to the second pad 122 of the driving structure DS through the second connecting element 152.

在多個發光二極體元件130電性連接至驅動基板SUB的多個第一接墊121及多個第二接墊122後,與一驅動結構DS1之一第一接墊121及一第二接墊122電性連接的一發光二極體元件130-1係跨越驅動結構DS1之一第三接墊123及一第四接墊124的連線L。於此,便初步完成顯示裝置10A。After the plurality of light emitting diode elements 130 are electrically connected to the plurality of first pads 121 and the plurality of second pads 122 of the driving substrate SUB, the first pad 121 and the second pad 121 of a driving structure DS1 are connected together. A light emitting diode device 130-1 electrically connected to the pad 122 crosses the line L between a third pad 123 and a fourth pad 124 of the driving structure DS1. At this point, the display device 10A is initially completed.

接著,檢查顯示裝置10A。經檢查,若至少一驅動結構DS2上未設置發光二極體元件130,則可進行後續圖3C至圖3E、圖4C至圖4E所示的修補動作;或者,若發現至少一驅動結構DS2上的至少一發光二極體元件130異常,則可在移除異常的發光二極體元件130後,進行後續圖3C至圖3E、圖4C至圖4E所示的修補動作;以下配合圖3C至圖3E、圖4C至圖4E說明之。Next, the display device 10A is checked. After inspection, if at least one driving structure DS2 is not provided with a light emitting diode element 130, the subsequent repair operations shown in FIGS. 3C to 3E and 4C to 4E can be performed; or, if at least one driving structure DS2 is found At least one of the light-emitting diode elements 130 is abnormal, then after the abnormal light-emitting diode element 130 is removed, the subsequent repair operations shown in FIGS. 3C to 3E and 4C to 4E can be performed; the following is in conjunction with FIGS. 3C to Figure 3E, Figure 4C to Figure 4E illustrate.

請參照圖3C、圖3D、圖4C及圖4D,在多個發光二極體元件130-1已轉置於驅動基板SUB後,令提取元件(未繪示)提取多個發光二極體元件130-2並旋轉一角度。然後,令提取元件向驅動基板SUB移動,以使發光二極體元件130-2轉置於驅動結構DS2上。3C, FIG. 3D, FIG. 4C and FIG. 4D, after the multiple light-emitting diode elements 130-1 have been transferred to the driving substrate SUB, the extraction element (not shown) extracts multiple light-emitting diode elements 130-2 and rotate an angle. Then, the extraction element is moved to the driving substrate SUB, so that the light-emitting diode element 130-2 is transferred to the driving structure DS2.

請參照圖3C及圖4C,類似地,在一發光二極體元件130-2轉置於驅動結構DS2的過程中,提取元件上的另一發光二極體元件130-2會被已設置於驅動基板SUB上的一發光二極體元件130-1阻擋。請參照圖3C、圖3D、圖4C及圖4D,當未被發光二極體元件130-1阻擋之發光二極體元件130-2已轉置於驅動結構DS2上而提取元件離開驅動基板SUB時,先前被發光二極體元件130-1阻擋的發光二極體元件130-2會被提取元件帶走而能再度被使用(例如:於下一次的修補動作中,設置於另一個驅動結構DS2上)。Referring to FIGS. 3C and 4C, similarly, in the process of transferring a light-emitting diode element 130-2 to the driving structure DS2, another light-emitting diode element 130-2 on the extraction element is already placed on A light emitting diode element 130-1 on the driving substrate SUB is blocked. 3C, 3D, 4C and 4D, when the light-emitting diode element 130-2 that is not blocked by the light-emitting diode element 130-1 has been transferred to the driving structure DS2 and the extraction element leaves the driving substrate SUB At this time, the light-emitting diode element 130-2 previously blocked by the light-emitting diode element 130-1 will be taken away by the extraction element and can be used again (for example: in the next repair operation, set in another driving structure DS2 on).

請參照圖3E及圖4E,接著,在發光二極體元件130-2的第一電極134及發光二極體元件130-2的第二電極135上分別形成第一連接元件151及第二連接元件152,其中發光二極體元件130-2的第一電極134透過第一連接元件151電性連接至驅動結構DS2的第三接墊123,且發光二極體元件130-2的第二電極135透過第二連接元件152電性連接至驅動結構DS2的第四接墊124。於此,便完成修補後的顯示裝置10A’。Please refer to FIGS. 3E and 4E. Next, a first connection element 151 and a second connection are formed on the first electrode 134 of the light-emitting diode element 130-2 and the second electrode 135 of the light-emitting diode element 130-2, respectively Element 152, in which the first electrode 134 of the light-emitting diode element 130-2 is electrically connected to the third pad 123 of the driving structure DS2 through the first connecting element 151, and the second electrode of the light-emitting diode element 130-2 135 is electrically connected to the fourth pad 124 of the driving structure DS2 through the second connecting element 152. At this point, the repaired display device 10A' is completed.

本實施例的顯示裝置10A’與前述的顯示裝置10’類似,兩者的差異在於:在本實施例中,發光二極體元件130-1的第一半導體層131設置於發光二極體元件130-1的第一電極134與第一接墊121之間,且發光二極體元件130-1的第二半導體層132設置於發光二極體元件130-1的第二電極135與第二接墊122之間;發光二極體元件130-2的第一半導體層131設置於發光二極體元件130-2的第一電極134與第三接墊123之間,發光二極體元件130-2的第二半導體層132設置於發光二極體元件130-2的第二電極135與第四接墊124之間。The display device 10A' of this embodiment is similar to the aforementioned display device 10'. The difference between the two is: in this embodiment, the first semiconductor layer 131 of the light-emitting diode element 130-1 is disposed on the light-emitting diode element. Between the first electrode 134 of 130-1 and the first pad 121, and the second semiconductor layer 132 of the light emitting diode element 130-1 is disposed on the second electrode 135 and the second electrode 135 of the light emitting diode element 130-1. Between the pads 122; the first semiconductor layer 131 of the light-emitting diode element 130-2 is disposed between the first electrode 134 and the third pad 123 of the light-emitting diode element 130-2, the light-emitting diode element 130 The second semiconductor layer 132 of -2 is disposed between the second electrode 135 and the fourth pad 124 of the light emitting diode element 130-2.

圖5A至圖5E為本發明第三實施例之顯示裝置的製造流程的上視示意圖。5A to 5E are schematic top views of the manufacturing process of the display device according to the third embodiment of the invention.

圖6A至圖6E為本發明第三實施例之顯示裝置的製造流程的剖面示意圖。圖6A至圖6E對應圖5A至圖5E的剖線Ι-Ι’、剖線П-П’及剖線Ш-Ш’。6A to 6E are schematic cross-sectional views of the manufacturing process of the display device according to the third embodiment of the invention. 6A to 6E correspond to the section line Ι-Ι', the section line П-П' and the section line Ш-Ш' of FIGS. 5A to 5E.

第三實施例之顯示裝置10B、10B’及其製造方法與第一實施例之顯示裝置10、10’及其製造方法類似,兩者的差異在於:在第二實施例中,發光二極體元件130為垂直式(vertical),而垂直式發光二極體元件130電性連接至驅動基板SUB的方式與前述實施例略有不同,以下配合圖5A至圖5E及圖6A至圖6E說明之。The display devices 10B, 10B' and their manufacturing methods of the third embodiment are similar to the display devices 10, 10' and their manufacturing methods of the first embodiment. The difference between the two is: in the second embodiment, the light-emitting diode The element 130 is vertical, and the manner in which the vertical light-emitting diode element 130 is electrically connected to the driving substrate SUB is slightly different from the foregoing embodiment. The following is described in conjunction with FIGS. 5A to 5E and FIGS. 6A to 6E .

請參照圖5A及圖6A,首先,提供驅動基板SUB。驅動基板SUB具有多個驅動結構DS。Please refer to FIG. 5A and FIG. 6A. First, a driving substrate SUB is provided. The driving substrate SUB has a plurality of driving structures DS.

請參照圖5B及圖6B,接著,利用一提取元件(未繪示)轉置多個發光二極體元件130至驅動基板SUB,且令多個發光二極體元件130電性連接至多個驅動結構DS的多個第一接墊121及多個第二接墊122。Please refer to FIGS. 5B and 6B. Then, an extraction element (not shown) is used to transfer a plurality of light-emitting diode elements 130 to the driving substrate SUB, and the plurality of light-emitting diode elements 130 are electrically connected to a plurality of driving devices. The plurality of first pads 121 and the plurality of second pads 122 of the structure DS.

具體而言,在本實施例中,於轉置發光二極體元件130時,發光二極體元件130的一電極(例如但不限於:第二電極135)上可設有導電物138(例如但不限於:錫球、銀膠、異方性導電膠…等)。提取元件上的發光二極體元件130-1靠近驅動基板SUB時,發光二極體元件130-1之一電極(例如但不限於:第二電極135)上的導電物138可與驅動基板SUB之第一接墊組的一接墊(例如但不限於:第二接墊122)連接,而使發光二極體元件130-1電性連接至驅動基板SUB。Specifically, in this embodiment, when the light-emitting diode element 130 is transposed, an electrode (such as but not limited to: the second electrode 135) of the light-emitting diode element 130 may be provided with a conductive object 138 (such as But not limited to: solder balls, silver glue, anisotropic conductive glue... etc.). When the light-emitting diode element 130-1 on the extraction element is close to the driving substrate SUB, the conductive object 138 on one of the electrodes of the light-emitting diode element 130-1 (for example, but not limited to: the second electrode 135) can interact with the driving substrate SUB. A pad (such as but not limited to: the second pad 122) of the first pad group is connected, so that the light emitting diode element 130-1 is electrically connected to the driving substrate SUB.

接著,在發光二極體元件130的另一電極(例如但不限於:第一電極134)上形成連接元件153,其中發光二極體元件130的另一電極(例如但不限於:第一電極134)透過連接元件153電性連接至驅動基板SUB之第一接墊組的另一接墊(例如但不限於:第一接墊121)。於此,便初步完成顯示裝置10B。Next, a connecting element 153 is formed on the other electrode of the light emitting diode element 130 (for example, but not limited to: the first electrode 134), wherein the other electrode of the light emitting diode element 130 (for example, but not limited to: the first electrode 134) The connection element 153 is electrically connected to another pad of the first pad group of the driving substrate SUB (for example, but not limited to: the first pad 121). At this point, the display device 10B is initially completed.

接著,檢查顯示裝置10B。經檢查,若發現至少一驅動結構DS2上未設置發光二極體元件130,則可進行後續圖5C至圖5E、圖6C至圖6E所示的修補動作;或者,若發現至少一驅動結構DS2上的至少一發光二極體元件130異常,則可在移除異常的發光二極體元件130後,進行後續圖5C至圖5E、圖6C至圖6E所示的修補動作;以下配合圖5C至圖5E、圖6C至圖6E說明之。Next, the display device 10B is checked. After inspection, if it is found that no light emitting diode element 130 is provided on at least one driving structure DS2, the subsequent repair operations shown in FIGS. 5C to 5E and 6C to 6E can be performed; or, if at least one driving structure DS2 is found At least one light-emitting diode element 130 above is abnormal. After removing the abnormal light-emitting diode element 130, the subsequent repair operations shown in FIGS. 5C to 5E and 6C to 6E can be performed; the following is in conjunction with FIG. 5C To Figure 5E, Figure 6C to Figure 6E to illustrate.

請參照圖5C、圖5D、圖6C及圖6D,在多個發光二極體元件130-1已轉置於驅動基板SUB後,令提取元件(未繪示)提取多個發光二極體元件130-2並旋轉一角度。然後,令提取元件向驅動基板SUB移動,以使發光二極體元件130-2轉置於驅動結構DS2上。Referring to FIGS. 5C, 5D, 6C and 6D, after the multiple light-emitting diode elements 130-1 have been transferred to the driving substrate SUB, the extraction element (not shown) extracts the multiple light-emitting diode elements 130-2 and rotate an angle. Then, the extraction element is moved to the driving substrate SUB, so that the light-emitting diode element 130-2 is transferred to the driving structure DS2.

在本實施例中,轉置多個發光二極體元件130-2時,至少一發光二極體元件130-2可與驅動結構DS2電性連接。In this embodiment, when multiple light-emitting diode elements 130-2 are transposed, at least one light-emitting diode element 130-2 can be electrically connected to the driving structure DS2.

具體而言,在本實施例中,於轉置發光二極體元件130-2時,發光二極體元件130-2的一電極(例如但不限於:第二電極135)上可設有導電物138(例如但不限於:錫球、銀膠、異方性導電膠…等)。提取元件上的發光二極體元件130-2靠近驅動基板SUB時,發光二極體元件130-2之一電極(例如但不限於:第二電極135)上的導電物138可與驅動基板SUB之第二接墊組的一接墊(例如但不限於:第四接墊124)連接,而使發光二極體元件130-2電性連接至驅動基板SUB。Specifically, in this embodiment, when the light-emitting diode element 130-2 is transposed, an electrode (for example, but not limited to: the second electrode 135) of the light-emitting diode element 130-2 may be provided with conductive 138 (such as but not limited to: tin balls, silver glue, anisotropic conductive glue... etc.). When the light-emitting diode element 130-2 on the extraction element is close to the driving substrate SUB, the conductive object 138 on one of the electrodes of the light-emitting diode element 130-2 (for example, but not limited to: the second electrode 135) can interact with the driving substrate SUB. A pad (for example, but not limited to: the fourth pad 124) of the second pad group is connected, so that the light emitting diode element 130-2 is electrically connected to the driving substrate SUB.

請參照圖5C及圖6C,類似地,在一發光二極體元件130-2轉置於驅動結構DS2的過程中,提取元件上的另一發光二極體元件130-2會被已設置於驅動基板SUB上的一發光二極體元件130-1阻擋。請參照圖5C、圖5D、圖6C及圖6D,當未被發光二極體元件130-1阻擋的發光二極體元件130-2已轉置於驅動結構DS2上而提取元件離開驅動基板SUB時,先前被發光二極體元件130-1阻擋的發光二極體元件130-2會被提取元件帶走而能再度被使用(例如:於下一次的修補動作中,設置於另一個驅動結構DS2上)。Please refer to FIG. 5C and FIG. 6C. Similarly, in the process of transferring a light-emitting diode element 130-2 to the driving structure DS2, another light-emitting diode element 130-2 on the extraction element is already placed on A light emitting diode element 130-1 on the driving substrate SUB is blocked. Referring to FIG. 5C, FIG. 5D, FIG. 6C and FIG. 6D, when the light-emitting diode element 130-2 that is not blocked by the light-emitting diode element 130-1 has been transferred to the driving structure DS2 and the extraction element leaves the driving substrate SUB At this time, the light-emitting diode element 130-2 previously blocked by the light-emitting diode element 130-1 will be taken away by the extraction element and can be used again (for example: in the next repair operation, set in another driving structure DS2 on).

請參照圖5E及圖6E,接著,在發光二極體元件130-2的另一電極(例如但不限於:第一電極134)上形成連接元件153,其中發光二極體元件130-2的另一電極(例如但不限於:第一電極134)透過連接元件153電性連接至驅動結構DS2之第二接墊組的另一接墊(例如但不限於:第三接墊123)。於此,便完成修補後的顯示裝置10B’。Please refer to FIGS. 5E and 6E. Next, a connecting element 153 is formed on another electrode of the light-emitting diode element 130-2 (for example, but not limited to: the first electrode 134), wherein the light-emitting diode element 130-2 The other electrode (for example, but not limited to: the first electrode 134) is electrically connected to another pad (for example, but not limited to: the third pad 123) of the second pad group of the driving structure DS2 through the connecting element 153. At this point, the repaired display device 10B' is completed.

本實施例的顯示裝置10B’與前述的顯示裝置10’類似,兩者的差異在於:在本實施例中,發光二極體元件130-1的第一半導體層131設置於發光二極體元件130-1的第一電極134與第一接墊121之間,且發光二極體元件130-1的第二電極135設置於發光二極體元件130-1的第二半導體層132與第二接墊122之間;發光二極體元件130-2的第一半導體層131設置於發光二極體元件130-2的第一電極134與第三接墊123之間,且發光二極體元件130-2的第二電極135設置於發光二極體元件130-2的第二半導體層132與第四接墊124之間。The display device 10B' of this embodiment is similar to the aforementioned display device 10'. The difference between the two is: in this embodiment, the first semiconductor layer 131 of the light-emitting diode element 130-1 is disposed on the light-emitting diode element. Between the first electrode 134 of 130-1 and the first pad 121, and the second electrode 135 of the light emitting diode element 130-1 is disposed on the second semiconductor layer 132 and the second semiconductor layer 132 of the light emitting diode element 130-1 Between the pads 122; the first semiconductor layer 131 of the light-emitting diode element 130-2 is disposed between the first electrode 134 and the third pad 123 of the light-emitting diode element 130-2, and the light-emitting diode element The second electrode 135 of 130-2 is disposed between the second semiconductor layer 132 and the fourth pad 124 of the light emitting diode device 130-2.

圖7A至圖7D為本發明第四實施例之顯示裝置的製造流程的上視示意圖。圖8A至圖8D為本發明第四實施例之顯示裝置的製造流程的剖面示意圖。圖8A至圖8D分別對應圖7A至圖7D的剖線Ι-Ι’、剖線П-П’及剖線Ш-Ш’。7A to 7D are schematic top views of the manufacturing process of the display device according to the fourth embodiment of the present invention. 8A to 8D are schematic cross-sectional views of the manufacturing process of the display device according to the fourth embodiment of the present invention. 8A to 8D respectively correspond to the section line Ι-Ι', the section line П-П' and the section line Ш-Ш' of FIGS. 7A to 7D.

第四實施例之顯示裝置10C、10C’及其製造方法與第一實施例之顯示裝置10、10’及其製造方法類似,兩者的差異在於:在本實施例中,具有相同之第一電位的第一接墊121及第三接墊123相連接,及/或具有相同之第二電位第二接墊122及第四接墊124相連接。也就是說,在本實施例中,第一接墊121及第三接墊123可為同一第一導電圖案的兩部分,及/或第二接墊122及第四接墊124可為同一第二導電圖案的兩部分。The display devices 10C, 10C' and their manufacturing methods of the fourth embodiment are similar to the display devices 10, 10' and their manufacturing methods of the first embodiment. The difference between the two is: in this embodiment, they have the same first The first pad 121 and the third pad 123 of potential are connected, and/or the second pad 122 and the fourth pad 124 having the same second potential are connected. That is, in this embodiment, the first pad 121 and the third pad 123 may be two parts of the same first conductive pattern, and/or the second pad 122 and the fourth pad 124 may be the same Two parts of the conductive pattern.

第四實施例之顯示裝置10C、10C’的製造方法與第一實施例之顯示裝置10、10’的製造方法類似,本領域具有通常知識者根據前述說明、圖7A至圖7D及圖8A至圖8D應能實現顯示裝置10C、10C’,於此便不再重述。The manufacturing method of the display devices 10C, 10C' of the fourth embodiment is similar to the manufacturing method of the display devices 10, 10' of the first embodiment. Those with ordinary knowledge in the art can use the foregoing description, FIGS. 7A to 7D and FIGS. 8A to FIG. 8D should be able to realize the display devices 10C and 10C', which will not be repeated here.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be determined by the scope of the attached patent application.

10、10’、10A、10A’、10B、10B’、10C、10C’:顯示裝置 110:基底 120:驅動線路層 121:第一接墊 122:第二接墊 123:第三接墊 124:第四接墊 130、130-1、130-2:發光二極體元件 131:第一型半導體層 132:第二型半導體層 133:主動層 134:第一電極 135:第二電極 136、137、138:導電物 140:固定層 151:第一連接元件 152:第二連接元件 153:連接元件 C:電容 DS、DS1、DS2:驅動結構 DL:資料線 d1:第一方向 d2:第二方向 GL:掃描線 L:連線 SUB:驅動基板 T1:第一電晶體 T1a、T2a:第一端 T1b、T2b:第二端 T1c、T2c:控制端 T2:第二電晶體 VDD:電源線 VSS:共用線 Ι-Ι’、П-П’、Ш-Ш’:剖線 α:夾角10, 10’, 10A, 10A’, 10B, 10B’, 10C, 10C’: display device 110: Base 120: drive circuit layer 121: first pad 122: second pad 123: third pad 124: fourth pad 130, 130-1, 130-2: light-emitting diode components 131: First type semiconductor layer 132: Type II semiconductor layer 133: active layer 134: first electrode 135: second electrode 136, 137, 138: conductive objects 140: fixed layer 151: The first connecting element 152: second connecting element 153: Connection element C: Capacitance DS, DS1, DS2: drive structure DL: Data line d1: first direction d2: second direction GL: scan line L: Connect SUB: Drive substrate T1: first transistor T1a, T2a: first end T1b, T2b: second end T1c, T2c: control terminal T2: second transistor VDD: power line VSS: common line Ι-Ι’, П-П’, Ш-Ш’: cut line α: included angle

圖1A至圖1D為本發明第一實施例之顯示裝置的製造流程的上視示意圖。 圖2A至圖2D為本發明第一實施例之顯示裝置的製造流程的剖面示意圖。 圖3A至圖3E為本發明第二實施例之顯示裝置的製造流程的上視示意圖。 圖4A至圖4E為本發明第二實施例之顯示裝置的製造流程的剖面示意圖。 圖5A至圖5E為本發明第三實施例之顯示裝置的製造流程的上視示意圖。 圖6A至圖6E為本發明第三實施例之顯示裝置的製造流程的剖面示意圖。 圖7A至圖7D為本發明第四實施例之顯示裝置的製造流程的上視示意圖。 圖8A至圖8D為本發明第四實施例之顯示裝置的製造流程的剖面示意圖。1A to 1D are schematic top views of the manufacturing process of the display device according to the first embodiment of the invention. 2A to 2D are schematic cross-sectional views of the manufacturing process of the display device according to the first embodiment of the invention. 3A to 3E are schematic top views of the manufacturing process of the display device according to the second embodiment of the invention. 4A to 4E are schematic cross-sectional views of the manufacturing process of the display device according to the second embodiment of the invention. 5A to 5E are schematic top views of the manufacturing process of the display device according to the third embodiment of the invention. 6A to 6E are schematic cross-sectional views of the manufacturing process of the display device according to the third embodiment of the invention. 7A to 7D are schematic top views of the manufacturing process of the display device according to the fourth embodiment of the present invention. 8A to 8D are schematic cross-sectional views of the manufacturing process of the display device according to the fourth embodiment of the present invention.

10’:顯示裝置 10’: Display device

110:基底 110: Base

121:第一接墊 121: first pad

122:第二接墊 122: second pad

123:第三接墊 123: third pad

124:第四接墊 124: fourth pad

130、130-1、130-2:發光二極體元件 130, 130-1, 130-2: light-emitting diode components

C:電容 C: Capacitance

DS、DS1、DS2:驅動結構 DS, DS1, DS2: drive structure

DL:資料線 DL: Data line

d1:第一方向 d1: first direction

d2:第二方向 d2: second direction

GL:掃描線 GL: scan line

L:連線 L: Connect

T1:第一電晶體 T1: first transistor

T1a、T2a:第一端 T1a, T2a: first end

T1b、T2b:第二端 T1b, T2b: second end

T1c、T2c:控制端 T1c, T2c: control terminal

T2:第二電晶體 T2: second transistor

VDD:電源線 VDD: power line

VSS:共用線 VSS: common line

I-I’、Π-Π’、III-III’:剖線 I-I’, Π-Π’, III-III’: Sectional line

α:夾角 α: included angle

Claims (12)

一種顯示裝置,包括: 一驅動基板,具有多個驅動結構,其中該些驅動結構的每一個包括一第一接墊、一第二接墊、一第三接墊及一第四接墊;以及 一第一發光二極體元件,其中該些驅動結構包括一第一驅動結構,該第一發光二極體元件電性連接至該第一驅動結構的該第一接墊及該第二接墊,且該第一發光二極體元件跨越該第一驅動結構之該第三接墊與該第四接墊的一連線。A display device includes: A driving substrate having a plurality of driving structures, wherein each of the driving structures includes a first pad, a second pad, a third pad, and a fourth pad; and A first light emitting diode device, wherein the driving structures include a first driving structure, and the first light emitting diode device is electrically connected to the first pad and the second pad of the first driving structure And the first light emitting diode element crosses a connection line between the third pad and the fourth pad of the first driving structure. 如申請專利範圍第1項所述的顯示裝置,其中該第一接墊與該第三接墊具有相同的一第一電位,且該第二接墊與該第四接墊具有相同的一第二電位。As for the display device described in claim 1, wherein the first pad and the third pad have the same first potential, and the second pad and the fourth pad have the same first potential Two potential. 如申請專利範圍第1項所述的顯示裝置,其中該第一接墊、該第二接墊、該第三接墊及該第四接墊在結構上分離。As for the display device described in item 1 of the scope of patent application, the first pad, the second pad, the third pad and the fourth pad are separated in structure. 如申請專利範圍第1項所述的顯示裝置,其中該第一接墊及該第三接墊在結構上相連接。In the display device described in item 1 of the scope of patent application, the first pad and the third pad are structurally connected. 如申請專利範圍第1項所述的顯示裝置,其中該第二接墊及該第四接墊在結構上相連接。As for the display device described in item 1 of the scope of patent application, the second pad and the fourth pad are structurally connected. 如申請專利範圍第1項所述的顯示裝置,更包括: 一第二發光二極體元件,其中該些驅動結構更包括一第二驅動結構,該第二發光二極體元件電性連接至該第二驅動結構的該第三接墊及該第四接墊,該第一驅動結構的該第一接墊及該第一驅動結構的該第二接墊在一第一方向上排列,該第二驅動結構的該第三接墊及該第二驅動結構的該第四接墊在一第二方向上排列,且該第一方向與該第二方向交叉。The display device described in item 1 of the scope of patent application further includes: A second light emitting diode element, wherein the driving structures further include a second driving structure, and the second light emitting diode element is electrically connected to the third pad and the fourth pad of the second driving structure Pad, the first pad of the first drive structure and the second pad of the first drive structure are arranged in a first direction, the third pad of the second drive structure and the second drive structure The fourth pads are arranged in a second direction, and the first direction crosses the second direction. 如申請專利範圍第1項所述的顯示裝置,其中該第一發光二極體元件包括: 一第一型半導體層; 一第二型半導體層; 一主動層,設置於該第一型半導體層與該第二型半導體層之間; 一第一電極,電性連接至該第一型半導體層;以及 一第二電極,電性連接至該第二型半導體層,其中該第一電極設置於該第一半導體層與該第一接墊之間,且該第二電極設置於該第二半導體層與該第二接墊之間。According to the display device described in item 1 of the scope of patent application, the first light emitting diode element includes: A first type semiconductor layer; A second type semiconductor layer; An active layer disposed between the first type semiconductor layer and the second type semiconductor layer; A first electrode electrically connected to the first type semiconductor layer; and A second electrode electrically connected to the second type semiconductor layer, wherein the first electrode is disposed between the first semiconductor layer and the first pad, and the second electrode is disposed between the second semiconductor layer and Between the second pad. 如申請專利範圍第1項所述的顯示裝置,其中該第一發光二極體元件包括: 一第一型半導體層; 一第二型半導體層; 一主動層,設置於該第一型半導體層與該第二型半導體層之間; 一第一電極,電性連接至該第一型半導體層;以及 一第二電極,電性連接至該第二型半導體層,其中該第一半導體層設置於該第一電極與該第一接墊之間,且該第二半導體層設置於該第二電極與該第二接墊之間。According to the display device described in item 1 of the scope of patent application, the first light emitting diode element includes: A first type semiconductor layer; A second type semiconductor layer; An active layer disposed between the first type semiconductor layer and the second type semiconductor layer; A first electrode electrically connected to the first type semiconductor layer; and A second electrode electrically connected to the second type semiconductor layer, wherein the first semiconductor layer is disposed between the first electrode and the first pad, and the second semiconductor layer is disposed between the second electrode and Between the second pad. 如申請專利範圍第1項所述的顯示裝置,其中該第一發光二極體元件包括: 一第一型半導體層; 一第二型半導體層; 一主動層,設置於該第一型半導體層與該第二型半導體層之間; 一第一電極,電性連接至該第一型半導體層;以及 一第二電極,電性連接至該第二型半導體層,其中該第一半導體層設置於該第一電極與該第一接墊之間,且該第二電極設置於該第二半導體層與該第二接墊之間。According to the display device described in item 1 of the scope of patent application, the first light emitting diode element includes: A first type semiconductor layer; A second type semiconductor layer; An active layer disposed between the first type semiconductor layer and the second type semiconductor layer; A first electrode electrically connected to the first type semiconductor layer; and A second electrode is electrically connected to the second type semiconductor layer, wherein the first semiconductor layer is disposed between the first electrode and the first pad, and the second electrode is disposed between the second semiconductor layer and Between the second pad. 一種顯示裝置的製造方法,包括: 提供一驅動基板,具有多個驅動結構,其中該些驅動結構的每一個包括一第一接墊、一第二接墊、一第三接墊及一第四接墊,該第一接墊及該第二接墊在一第一方向上排列,該第三接墊及該第四接墊在一第二方向上排列,且該第一方向與該第二方向交叉;以及 轉置多個第一發光二極體元件至該驅動基板,其中該些第一發光二極體元件電性連接至該些驅動結構之多個第一驅動結構的多個第一接墊及多個第二接墊。A method for manufacturing a display device includes: A driving substrate is provided with a plurality of driving structures, wherein each of the driving structures includes a first pad, a second pad, a third pad and a fourth pad, the first pad and The second pads are arranged in a first direction, the third pads and the fourth pads are arranged in a second direction, and the first direction crosses the second direction; and Transpose a plurality of first light-emitting diode elements to the driving substrate, wherein the first light-emitting diode elements are electrically connected to the plurality of first pads and the plurality of first driving structures of the driving structures A second pad. 如申請專利範圍第10項所述的顯示裝置的製造方法,其中該些驅動結構更包括一第二驅動結構,且該顯示裝置的製造方法更包括: 在該些第一發光二極體元件已轉置於該驅動基板之後,令多個第二發光二極體元件向該驅動基板移動,以使該些第二發光二極體元件的一第二發光二極體元件轉置於該第二驅動結構上,其中該些第二發光二極體元件的另一第二發光二極體元件被該些第一發光二極體元件的一第一發光二極體元件阻擋。According to the manufacturing method of the display device as described in claim 10, the driving structures further include a second driving structure, and the manufacturing method of the display device further includes: After the first light-emitting diode elements have been transferred to the driving substrate, a plurality of second light-emitting diode elements are moved to the driving substrate, so that a second light-emitting diode element of the second light-emitting diode elements The light-emitting diode element is transferred to the second driving structure, wherein another second light-emitting diode element of the second light-emitting diode elements is emitted by a first light-emitting diode element of the first light-emitting diode elements Diode element blocking. 如申請專利範圍第11項所述的顯示裝置的製造方法,更包括: 令該第二發光二極體元件電性連接至該第二驅動結構的該第三接墊及該第四接墊。The manufacturing method of the display device as described in item 11 of the scope of patent application further includes: The second light emitting diode device is electrically connected to the third pad and the fourth pad of the second driving structure.
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